U.S. patent application number 13/248036 was filed with the patent office on 2013-01-10 for crucible, vapor deposition system and method using the crucible.
This patent application is currently assigned to HON HAI PRECISION INDUSTRY CO., LTD.. Invention is credited to JUIN-HONG LIN.
Application Number | 20130011556 13/248036 |
Document ID | / |
Family ID | 47438813 |
Filed Date | 2013-01-10 |
United States Patent
Application |
20130011556 |
Kind Code |
A1 |
LIN; JUIN-HONG |
January 10, 2013 |
CRUCIBLE, VAPOR DEPOSITION SYSTEM AND METHOD USING THE CRUCIBLE
Abstract
A crucible includes a main body and a cover. The main body
includes a first end surface, an opposite second end surface, a
hollow part and a solid part. The hollow part and the solid part
extend from the first end surface to the second end surface. The
hollow part defines a receiving space. The first end surface
defines an opening communicating with the receiving space, and
includes a step positioned between the hollow part and the solid
part. The solid part includes a heat end adjacent to the step. The
heat end is heated by an electro-beam. The cover covers the
opening, and defines a number of gas holes. The main body and the
cover are made of thermal conductive refractory material.
Inventors: |
LIN; JUIN-HONG; (Tu-Cheng,
TW) |
Assignee: |
HON HAI PRECISION INDUSTRY CO.,
LTD.
Tu-Cheng
TW
|
Family ID: |
47438813 |
Appl. No.: |
13/248036 |
Filed: |
September 29, 2011 |
Current U.S.
Class: |
427/248.1 ;
118/724 |
Current CPC
Class: |
C23C 14/30 20130101;
C23C 14/243 20130101 |
Class at
Publication: |
427/248.1 ;
118/724 |
International
Class: |
C23C 16/448 20060101
C23C016/448 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 7, 2011 |
TW |
100124128 |
Claims
1. A crucible comprising: a main body comprising: a first end
surface and an opposite second end surface; and a hollow part and a
solid part extending from the first end surface to the second end
surface respectively, the hollow part defining a receiving space,
the first end surface defining an opening communicating with the
receiving space, and comprising a step positioned between the
hollow part and the solid part, the solid part comprising a heat
end adjacent to the step, the heat end configured for being heated
by an electro-beam; and a cover supported by the main body and
covering the opening, the cover defining a number of gas holes
communicating with the receiving space; wherein the main body and
the cover are made of thermal conductive refractory material.
2. The crucible of claim 1, further comprising a thermal isolation
dish made of thermal insulating refractory material, the thermal
isolation dish supporting the main body.
3. The crucible of claim 2, wherein the thermal isolation dish is
made of material selected from the group consisting of: porcelain
and graphite.
4. The crucible of claim 1, wherein the main body and the cover are
made of material selected from the group consisting of: tungsten,
molybdenum, and platinum.
5. A vapor deposition system comprising: a housing; an electron gun
seat mounted in the housing, and defining a depression; and a
crucible comprising: a thermal isolation dish received in the
depression; a main body positioned on the thermal isolation dish,
and comprising: a first end surface and an opposite second end
surface; and a hollow part and a solid part extending from the
first end surface to the second end surface respectively, the
hollow part defining a receiving space, the first end surface
defining an opening communicated with the receiving space, and
comprising a step positioned between the hollow part and the solid
part, the solid part comprising a heat end adjacent to the step,
the heat end configured for being heated by an electro-beam; and a
cover supported by the main body and covering the opening, the
cover defining a number of gas holes communicating with the
receiving space; wherein the main body and the cover are made of
thermal conductive refractory material.
6. The vapor deposition system of claim 5, wherein the main body
and the cover are made of material selected from the group
consisting of: tungsten, molybdenum, and platinum.
7. The vapor deposition system of claim 5, wherein the thermal
isolation dish is made of material selected from the group
consisting of: porcelain and graphite.
8. A vapor deposition method, comprising steps of: providing a
crucible, the crucible comprising: a main body comprising: a first
end surface and an opposite second end surface; and a hollow part
and a solid part extending from the first end surface to the second
end surface respectively, the hollow part defining a receiving
space, the first end surface defining an opening communicating with
the receiving space, and comprising a step positioned between the
hollow part and the solid part, the solid part comprising a heat
end adjacent to the step; and a cover defining a number of gas
holes, both of the main body and the cover made of thermal
conductive refractory material; putting coating material in the
receiving space; and covering the opening by using the cover, with
the cover supported by the main body and the gas holes
communicating with the receiving space; emitting an electro-beam to
heat the heat end such that the main body is heated to vaporize the
coating material to escape out of the crucible through the gas
holes.
9. The vapor deposition method of claim 8, wherein the crucible
comprises a thermal isolation dish made of thermal insulating
refractory material, the thermal isolation dish supports the main
body.
Description
BACKGROUND
[0001] 1. Technical Field
[0002] The present disclosure relates to a vapor deposition system
and method, and a crucible used in the system and method.
[0003] 2. Description of Related Art
[0004] In a vapor deposition system, a thermal resistor or an
electron gun is usually used to heat and vaporize coating material.
When heated by the thermal resistor, the coating material may
chemically react with the thermal resistor to produce impurities.
When using the electron gun to heat the coating material, the
quality is effected as the coating material usually cannot be
heated evenly.
[0005] Therefore, it is desirable to provide a crucible, a vapor
deposition system and a vapor deposition method, which can overcome
the limitations described.
BRIEF DESCRIPTION OF THE DRAWINGS
[0006] Many aspects of the embodiments can be better understood
with reference to the following drawings. The components in the
drawings are not necessarily drawn to scale, the emphasis instead
being placed upon clearly illustrating the principles of the
present disclosure. Moreover, in the drawings, like reference
numerals designate corresponding parts throughout the several
views.
[0007] FIG. 1 is a schematic, isometric view of a crucible
according to an embodiment of the present disclosure.
[0008] FIG. 2 is an exploded view of the crucible of FIG. 1.
[0009] FIG. 3 is a cross-sectional view of the crucible of FIG.
1.
[0010] FIG. 4 is a cross-sectional view of a vapor deposition
system according to an embodiment.
[0011] FIG. 5 is a flow chart of a vapor deposition method
according to an embodiment.
DETAILED DESCRIPTION
[0012] Referring to FIGS. 1 to 3, a crucible 10 according to an
embodiment is disclosed. The crucible 10 includes a main body 20, a
cover 30, and a thermal isolation dish 50.
[0013] The main body 20 includes an end surface 24 and an opposite
end surface 28. The main body 20 further includes a hollow part 21
and a solid part 22 extending respectively from the end surface 24
to the end surface 28. The hollow part 21 defines a receiving space
23. The end surface 24 defines an opening 25 communicating with the
receiving space 23. The end surface 24 is a stepped surface and
includes a step 26. The step 26 is positioned between the hollow
part 21 and the solid part 22. The solid part 22 is higher than the
hollow part 21 at the end surface 24. The solid part 22 includes a
heat end 27 positioned on the end surface 24. The sectional surface
of the hollow part 21, the solid part 22, and the receiving space
23 are parallel to the end surface 24 and are all semi-circular
shaped.
[0014] The cover 30 is semi-circular shaped, and defines a number
of gas holes 31. The scale of the cover 30 is substantially equal
to that of a cross-section of the hollow part 21 at the end surface
24. The height of the cover 30 is substantially equal to that of
the step 26. The cover 30 covers the opening 25 and is supported by
the hollow part 21.
[0015] The main body 20 and the cover 30 are made of thermally
conductive refractory material, such as tungsten, molybdenum, or
platinum.
[0016] The thermal isolation dish 50 includes a bottom wall 51 and
an enclosed sidewall 52 extending from the bottom wall 51. The
sidewall 52 defines an opening 53 opposite to the bottom wall 51.
The size of the opening 53 is bigger than that of the end surface
28 of the main body 20 so that the main body 20 can be put in the
thermal isolation dish 50. The thermal isolation dish 50 is made of
thermal insulating refractory material, such as porcelain or
graphite.
[0017] Referring to FIG. 4, a vapor deposition system 100 according
to an embodiment is disclosed. The vapor deposition system 100
includes a housing 60, an electron gun seat 70, and the crucible
10. The electron gun seat 70 is mounted in the housing 60. The
electron gun seat 70 defines a depression 71. The shape and scale
of the depression 71 are substantially the same as those of the
thermal isolation dish 50. The thermal isolation dish 50 is
received in the depression 71, and the main body 20 is received in
the thermal isolation dish 50. In this way, the main body 20 does
not make contact with the electron gun seat 70.
[0018] Referring to FIG. 5, a vapor deposition method according to
an embodiment is disclosed. The vapor deposition method includes
the following steps,
[0019] In step S01, the thermal isolation dish 50 is received in
the depression 71 of the electron gun seat 70, and the main body 20
is received in the thermal isolation dish 50, the main body 20 does
not contact with the electron gun seat 70.
[0020] In step S03, the coating material 80 is put in the receiving
space 23 of the main body 20, and the cover 40 covers the opening
25.
[0021] In step S05, the electron gun seat 70 emits an electro-beam
90, the electro-beam 90 is guided by a magnetic field and hits the
heat_end 27 to heat the solid part 22. The magnetic field and the
emitting parameters of the electron gun seat 70 are adjusted to
make sure the electro-beam 90 can hit the heat end 27 only. The
operation of the electron gun seat 70 is familiar to one of
ordinary skill in the art, thus, a detailed description is omitted
here.
[0022] In step S07, the solid part 22 transmits heat to the hollow
part 21, the main body 20 heat and vaporize the coating material
80, the vaporized coating material 80 escapes from the crucible 10
through the gas holes 31 of the cover 30 for vapor deposition.
[0023] It will be understood that the above particular embodiments
are shown and described by way of illustration only. The principles
and the features of the present disclosure may be employed in
various and numerous embodiments thereof without departing from the
scope of the disclosure. The above-described embodiments illustrate
the scope of the disclosure but do not restrict the scope of the
disclosure.
* * * * *