U.S. patent application number 13/578854 was filed with the patent office on 2012-12-13 for image pickup apparatus.
This patent application is currently assigned to CANON KABUSHIKI KAISHA. Invention is credited to Tomoaki Kawakami.
Application Number | 20120314051 13/578854 |
Document ID | / |
Family ID | 45003635 |
Filed Date | 2012-12-13 |
United States Patent
Application |
20120314051 |
Kind Code |
A1 |
Kawakami; Tomoaki |
December 13, 2012 |
IMAGE PICKUP APPARATUS
Abstract
An image pickup apparatus of the present invention includes a
light source unit, an illumination optical system configured to
introduce a light from the light source unit onto a plane to be
illuminated, a sample stage configured to place an object on the
plane to be illuminated, an image pickup optical system configured
to form an image of the object placed on the plane to be
illuminated, an image pickup element portion configured by
disposing a plurality of image pickup elements on an image plane of
the image pickup optical system, and a light shielding member
configured to reduce entrance of a light to an area where the
plurality of image pickup elements of the image pickup element
portion are not disposed.
Inventors: |
Kawakami; Tomoaki;
(Utsunomiya-shi, JP) |
Assignee: |
CANON KABUSHIKI KAISHA
Tokyo
JP
|
Family ID: |
45003635 |
Appl. No.: |
13/578854 |
Filed: |
May 25, 2011 |
PCT Filed: |
May 25, 2011 |
PCT NO: |
PCT/JP2011/002921 |
371 Date: |
August 14, 2012 |
Current U.S.
Class: |
348/79 ;
348/E7.085 |
Current CPC
Class: |
G02B 21/361
20130101 |
Class at
Publication: |
348/79 ;
348/E07.085 |
International
Class: |
H04N 7/18 20060101
H04N007/18 |
Foreign Application Data
Date |
Code |
Application Number |
May 27, 2010 |
JP |
2010-121752 |
Claims
1. An image pickup apparatus comprising: a light source unit; an
illumination optical system configured to introduce a light from
the light source unit onto a plane to be illuminated; a sample
stage configured to place an object on the plane to be illuminated;
an image pickup optical system configured to form an image of the
object placed on the plane to be illuminated; an image pickup
element portion configured by disposing a plurality of image pickup
elements on an image plane of the image pickup optical system; and
a light shielding member configured to reduce entrance of a light
to an area where the plurality of image pickup elements of the
image pickup element portion are not disposed.
2. The image pickup apparatus according to claim 1, wherein the
light shielding member is disposed on at least one of light
incident side of the image pickup element portion, the plane to be
illuminated, and a plane conjugate with the plane to be
illuminated.
3. The image pickup apparatus according to claim 1, wherein the
light shielding member has a plate shape configured by including an
opening portion that is an area corresponding to an effective light
receiving area in which the plurality of image pickup elements
receive a light when being disposed in an optical path and a light
shielding portion that is an area other than the opening
portion.
4. The image pickup apparatus according to claim 1, further
comprising: an image processor configured to change a relative
position of at least one of the image pickup element portion, the
light shielding member, and the plane to be illuminated to
synthesize a plurality of images obtained by taking a plurality of
images of the object on the plane to be illuminated; and an image
display configured to display an image processed by the image
processor.
5. The image pickup apparatus according to claim 4, further
comprising a storage unit configured to store image information
processed by the image processor.
Description
TECHNICAL FIELD
[0001] The present invention relates to an image pickup apparatus
that takes an image of an object such as an object under test to
display it on a display and that is suitably used for example as a
microscope for taking an image of a sample to display it on the
display to be observed.
BACKGROUND ART
[0002] Recently, a digital microscope which is capable of
displaying shape information from whole of an object under test to
a cell tissue as an electronic image including the scaling on a
monitor has been proposed.
[0003] Patent Literature 1 discloses a virtual microscope that
attaches a plurality of taken images obtained with high
magnification and high resolution to form an image of the whole of
the object under test. Generally, an image pickup method of
obtaining images with high magnification one by one for the whole
of the object under test takes much time. In microscope systems
disclosed in Patent Literature 2 and Patent Literature 3, a
high-resolution object lens is prepared although a field of view of
observation is large. They disclose methods (apparatuses) of
devising configurations of image pickup units to take an image with
high magnification at high speed.
[0004] Generally, it is very difficult to prepare an image pickup
element having a size in which images can be simultaneously taken
for a wide field of view. Therefore, in the microscope systems
disclosed in Patent Literature 2 and Patent Literature 3, a
plurality of image pickup elements are disposed in the image pickup
unit in order to take an image having of a wide field of view. In
these microscope systems, a sample or the image pickup unit is
driven more than once in one plane while taking images to form a
whole image by synthesizing the taken images. Thus, the microscope
system that obtains the shape information from the whole of the
object under test to the cell tissue as an image is disclosed.
CITATION LIST
Patent Literature
[0005] [PTL 1] Japanese Patent Laid-Open No. 2008-510201 [0006]
[PTL 2] Japanese Patent Laid-Open No. 2009-003016 [0007] [PTL 3]
Japanese Patent Laid-Open No. 2009-063655
SUMMARY OF INVENTION
Technical Problem
[0008] When a plurality of image pickup elements are arrayed on the
image pickup surface as these microscopes, an image of the sample
(the object under test) is also formed between the plurality of
image pickup elements. Generally, an electric basement or a
mechanical unit is formed between the image pickup elements.
Therefore, when the imaged light related to the sample enters the
electric basement or the mechanical unit, a reflected light or a
scattering light is generated from the electric basement or the
mechanical unit. The reflected light or the scattering light in
this time may illuminate other electric basement, mechanical unit,
a lens of the image pickup optical system, or the like to finally
enter the image pickup element. The reflected light or the
scattering light in this time is an unnecessary light (a harmful
light) for taking an image of the sample, and causes a
deterioration of the image quality.
[0009] In the microscope system, it is strongly desired that an
abnormal portion of the object under test is detected with high
accuracy, and the deterioration of the image quality caused by the
harmful light is a major problem to be solved.
[0010] The present invention provides an image pickup apparatus
capable of reducing a deterioration of an image quality caused by a
harmful light generated by reflection or scattering in a non-image
pickup area between image pickup elements in arranging a plurality
of image pickup elements to obtain and observe an image.
Solution to Problem
[0011] An image pickup apparatus of the present invention includes
a light source unit, an illumination optical system configured to
introduce a light from the light source unit onto a plane to be
illuminated, a sample stage configured to place an object on the
plane to be illuminated, an image pickup optical system configured
to form an image of the object placed on the plane to be
illuminated, an image pickup element portion configured by
disposing a plurality of image pickup elements on an image plane of
the image pickup optical system, and a light shielding member
configured to reduce entrance of a light to an area where the
plurality of image pickup elements of the image pickup element
portion are not disposed.
Advantageous Effects of Invention
[0012] According to the present invention, an image pickup
apparatus capable of reducing a deterioration of an image quality
caused by a harmful light generated by reflection or scattering in
a non-image pickup area between image pickup elements in arranging
a plurality of image pickup elements to obtain and observe an image
can be obtained.
BRIEF DESCRIPTION OF DRAWINGS
[0013] FIG. 1 is a diagram describing an overall structure of an
image pickup apparatus of the present invention.
[0014] FIG. 2A is a diagram describing arrangements of an electric
basement and image pickup elements illustrated in FIG. 1.
[0015] FIG. 2B is a diagram describing arrangements of an electric
basement and image pickup elements illustrated in FIG. 1.
[0016] FIG. 3 is a diagram describing an object under test in a
sample unit illustrated in FIG. 1.
[0017] FIG. 4 is a diagram describing an image of the object under
test in an image pickup unit illustrated in FIG. 1.
[0018] FIG. 5A is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0019] FIG. 5B is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0020] FIG. 5C is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0021] FIG. 5D is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0022] FIG. 5E is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0023] FIG. 5F is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0024] FIG. 6A is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0025] FIG. 6B is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0026] FIG. 6C is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0027] FIG. 6D is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0028] FIG. 6E is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0029] FIG. 6F is a diagram describing an obtainment of a whole
image by taking a plurality of images in FIG. 1.
[0030] FIG. 7A is a diagram describing arrangements of the image
pickup elements and a light shielding member in FIG. 1.
[0031] FIG. 7B is a diagram describing arrangements of the image
pickup elements and a light shielding member in FIG. 1.
[0032] FIG. 8 is a diagram describing an overall structure of an
image pickup apparatus in which the light shielding member is
disposed.
[0033] FIG. 9 is a diagram describing an illumination optical
system that performs an illumination in accordance with an
arrangement of the image pickup elements.
[0034] FIG. 10 is a diagram describing an overall structure of an
image pickup apparatus which has an illumination optical system
that performs an illumination in accordance with an arrangement of
the image pickup elements and a light shielding member in the
present invention.
[0035] FIG. 11 is a diagram describing a sample surface illuminance
distribution when a blur is generated in the image pickup unit.
[0036] FIG. 12 is a diagram describing an image pickup unit in FIG.
1.
DESCRIPTION OF EMBODIMENTS
[0037] An image pickup apparatus of the present invention includes
a light source unit 10, an illumination optical system 20 that
introduces a light from the light source unit 10 onto a plane to be
illuminated on which an object being observed 32 is disposed, and a
sample stage that is movable in a plane of the plane to be
illuminated where the object being observed is disposed.
Furthermore, the image pickup apparatus includes an image pickup
optical system 40 that images the object on the plane to be
illuminated. In addition, the image pickup apparatus includes an
image pickup element portion (an image pickup unit) 50 in which a
plurality of image pickup elements 53 are disposed on an image
plane of the image pickup optical system 40.
[0038] Then, a light shielding member preventing that a light
enters a region where the plurality of image pickup elements 53 of
the image pickup element portion 50 is disposed on at least one of
an area at a light incident side of the image pickup element
portion 50, the plane to be illuminated, or a plane conjugate with
respect to the plane to be illuminated.
[0039] In the image pickup apparatus of the present invention, a
relative position of at least one of the image pickup element
portion 50, the light receiving member 60, and the plane to be
illuminated in a plane orthogonal to an optical axis is changed to
take a plurality of images of the object on the plane to be
illuminated. The image pickup apparatus includes an image processor
61 that synthesizes the plurality of taken images and an image
display 62 that displays an image processed by the image processor
61. The image pickup apparatus also includes a storage unit 63 that
stores image information processed by the image processor 61.
First Embodiment
[0040] FIG. 1 is a schematic diagram of an image pickup apparatus
using a transmissive microscope in a first embodiment of the
present invention. In FIG. 1, an image pickup apparatus 1 includes
a light source (a light source unit) 10, an illumination optical
system 20, a sample unit 30, an image pickup optical system 40, and
an image pickup unit 50. The image pickup apparatus 1 takes an
image of a sample 32 with an image pickup element 53.
[0041] The light source 10 emits a light to illuminate the sample
32 of the sample unit 30, and is configured by a halogen lamp, a
xenon lamp, an LED, or the like. The illumination optical system 20
includes optical members 20a and 20b that appropriately shape a
diameter of the light from the light source 10 to introduce it to
the sample unit 30 and a mirror that bends an optical path
traveling in a horizontal direction to a perpendicular direction.
The sample unit 30 includes a sample stage 31 that is movable in a
plane orthogonal to an optical axis and the sample 32.
[0042] In FIG. 1, the sample 32 is illustrated so as to only
include a slide glass, but actually it is integrally configured by
the slide glass, an object under test, a cover glass, and the like.
The image pickup optical system 40 is configured by an imaging
optical system having an optical magnification of .beta. times
which is used for taking an image of the sample 32 by the image
pickup unit 50. The sample unit 30 and the image pickup unit 50
(for more detail, the sample 32 and the image pickup element 53)
with respect to the image pickup optical system 40 are disposed so
as to have a conjugate relation of an object plane and an image
plane.
[0043] The image obtained by the image pickup unit 50 is processed
by the image processor 61 to be displayed on the image display 62.
The storage unit 63 stores the image information processed by the
image processor 61, image information displayed on the image
display 62, and the like.
[0044] The image pickup unit 50 includes an image pickup stage 51,
an electric basement 52, and the plurality of image pickup elements
53. The plurality of image pickup elements 53 are arranged on the
electric basement 52 as illustrated in FIGS. 2A and 2B.
[0045] FIG. 3 is a diagram describing an object under test 33 that
is an object being observed. In the sample 32, an image 33a of the
object under test 33 that is the object being observed is imaged on
the image pickup unit 50 by the image pickup optical system 40 as
indicated by a dotted line of FIG. 4. The plurality of image pickup
elements 53 are disposed on the electric basement 52 at intervals
for respective adjacent image pickup elements. At the time of
taking an image, a plurality of images are taken while the sample
32 or the image pickup unit 50 are relatively driven in a plane
perpendicular to the optical axis of the image pickup optical
system 40, and the images are attached based on an overlapped
portion to form a taken image of whole of the sample 32.
[0046] For example, in FIGS. 5A to 5F, the plurality of image
pickup elements 53 are disposed in a matrix and the image is taken
each time while the sample 32 is displaced in an oblique direction
in the drawing to attach the taken image. FIGS. 5A to 5C illustrate
a relationship between the image pickup elements 53 and the image
33a of the object under test 33 in the image pickup unit 50 when
the sample 32 is displaced half of an effective size of the image
pickup elements 53 in X and Y directions perpendicular to the
optical axis. When a first image is taken at a position of FIG. 5A,
only areas where the image pickup elements 53 exist of the image
33a of the object under test 33 are discretely imaged as
illustrated in FIG. 5D. Subsequently, when the sample 32 is
displaced to take a second image at a position of FIG. 5B, a
portion illustrated in FIG. 5E is imaged in combination with the
previously-obtained image. Finally, when the sample 32 is further
displaced to move the sample 32 to a position of FIG. 5C to take an
image and the image is overlapped with the images obtained by
taking the previous two images, an image of the whole of the image
pickup area illustrated in FIG. 5F can be created.
[0047] In the present embodiment, a method in which the plurality
of image pickup elements 53 are disposed in a zigzag arrangement as
illustrated in FIGS. 6A to 6C and the image is taken each time
while the sample 32 is displaced by an effective size in an X
direction of the image pickup elements 53 to attach the taken
images as illustrated in FIGS. 6D to 6F can also be applied. In
repeating taking the image while moving the sample 32 in the X
direction, the image pickup elements 53 are disposed so as to be
overlapped to attach images when viewing in the X direction.
[0048] An example in which the plurality of image pickup elements
53 are arrayed is described as illustrated in FIGS. 6A to 6F. In
the embodiment, a field of view of the sample 32 that is to be
observed is 20 mm.times.20 mm, and an optical magnification is 10
times as large. In this case, it is necessary to take an image of
an area of 200 mm.times.200 mm in the image pickup unit 50. In
order to taken an image of this area, a case where an image pickup
element having an effective area 24.times.36 mm is used is
considered. Considering an overlapped portion having a size that is
20 percent of a size of the image pickup element 53 to attach the
images, the image pickup elements 53 may be alternately arranged so
that eight image pickup elements exist in the X direction and three
or four image pickup elements exist in the Y direction with respect
to the X direction as illustrated in FIG. 7A. In this case, a true
effective area is 206.4 mm in the X direction and 208.8 mm in the Y
direction. When the overlapped portion is finely adjusted so as to
be 22.7% in the X direction and 24% in the Y direction, a desired
image pickup area can be formed.
[0049] In FIG. 7A, the plurality of image pickup elements 53 are
disposed in the X direction at a pitch of 1.2DX with respect to a
length DX of the image pickup element 53 in the X direction. The
plurality of image pickup elements 53 are disposed in the Y
direction at a pitch of 1.6DY with respect to a length DY in the Y
direction. Adjacent image pickup elements of the image pickup
elements arrayed in the X direction are displaced by 0.8DY pitch in
the Y direction.
[0050] FIG. 12 is a diagram describing an arrangement of the image
pickup elements 53 in this case. The image pickup element 53 has a
length of 24 mm in the X direction and a length of 36 mm in the Y
direction. The lengths in the X and Y directions of the image
pickup element 53 are represented as X and Y, respectively. In this
case, the image pickup elements 53 are disposed at a pitch of 1.2X
in the X direction and at a pitch of 1.6Y in the Y direction. When
focusing on the X direction, the image pickup elements after the
M-row are disposed so as to be positioned at a middle of the image
pickup elements of the L-row, and also are disposed so as to be
overlapped with one of the image pickup elements by 20 percent in
the Y direction. When focusing on the Y direction, the image pickup
element after the M-row is overlapped with one of the image pickup
elements by 20 percent.
[0051] In FIG. 12, the position relation of the X and Y directions
of each image pickup element is indicated by using X and Y. An area
surrounded by a dotted line is a synthetic image pickup area
obtained by using the plurality of image pickup elements. In FIG.
12, a size of the synthetic image pickup area is as follows.
X direction: 8.6X=8.6.times.24=206.4 (mm)
Y direction: 5.8Y=5.8.times.36=208.8 (mm)
[0052] In the image pickup apparatus using the microscope of the
first embodiment, the light shielding member 60 as illustrated in
FIG. 7B is disposed in an optical path so that the light from the
sample 32 only enters the image pickup elements 53.
[0053] In the present embodiment, when the light shielding member
is disposed in the optical path, it has a plate shape configured by
an opening portion that is an area corresponding to an effective
light receiving area in which the plurality of image pickup
elements receive the light and a light shielding portion that is an
area other than the opening area. Specifically, the light receiving
member 60 includes an opening portion 60a through which the light
passes and a light receiving portion 60b in which the light is
shielded. However, since there is a case where the X and Y
directions are reversed in accordance with the number of imaging
times, it may be disposed appropriately in accordance with the
image pickup optical system 40. It is preferable that a position
where the light shielding member 60 is disposed is a position of at
least one of an image plane (a plane on which the image pickup
elements 53 are disposed) and a plane conjugate with the image
plane of the image pickup optical system 40 or the illumination
optical system 20. As the plane conjugate with the image plane,
there is an imaging plane other than the imaging plane of the image
pickup optical system or an object plane (a plane on which the
sample 32 is disposed). If the light shielding portion 60b of the
light shielding member 60 completely absorbs the light, it can be
disposed on the image plane. When the light shielding member 60 is
disposed at a position other than the image plane, its size needs
to be determined by considering an optical magnification for the
image pickup unit 50.
[0054] For example, when the light shielding member 60 is disposed
in the sample unit 30, the imaging magnification of the image
pickup optical system 40 is set to be .beta.. In this case, the
light shielding member 60 which has a size of whole of the light
shielding member 60, sizes of the opening portion 60a and the light
shielding portion 60b, and the interval of the opening portions 60a
all magnified by 1/.beta. times may be disposed.
[0055] The light entering the periphery of the image pickup
elements is reduced by the light shielding member 60. Thus, the
light entering the electric basement 52 that is provided at the
periphery of the image pickup element 53 is reflected, and is
further reflected by the other member to reduce the flare entering
the image pickup element 53, and as a result the deterioration of
the image quality is reduced.
[0056] The illumination light to the sample 32 may be set to
correspond to the image pickup element 53 instead of shielding the
imaging light. In order to be discretely illuminated, the light
shielding member may be disposed on a plane conjugate with the
plane to be illuminated 32 in the illumination optical system
20.
[0057] FIG. 8 is a schematic diagram of a main part when the light
shielding member is provided in the optical path of the
illumination optical system 20. The sample 32 and a plane 27 have a
conjugate relation with respect to imaging optical systems 24 and
26. When the optical magnification of the conjugate plane 27 and
the plane to be illuminated (the plane on which the sample 32 is
disposed) is .beta.', the light shielding member 60 which has a
shape where all of the size of whole of the light shielding member
60, the size of the opening, the interval of the opening portions
60a, and the like are magnified by times 1/(.beta..times..beta.')
times may be disposed on the conjugate plane 27.
[0058] In this case, an image is taken while at least one of the
sample unit 30 and the light shielding member 60 moves in a plane
perpendicular to the optical axis. Alternatively, the image may
also be taken while the light shielding member 60 and the image
pickup unit 50 move in a plane perpendicular to the optical axis.
In this case, however, a moving amount of the light shielding
member 60 is 1/(.beta..times..beta.') with respect to a moving
amount of the image pickup unit 50.
[0059] In the present embodiment, two or more light shielding
members may also be disposed in the optical path. According to this
configuration, a harmful light can be effectively reduced.
Second Embodiment
[0060] In an image pickup apparatus using a microscope of the
present invention, the illumination optical system 20 may also be
configured so that the light enters only the plurality of image
pickup elements without using the light shielding member. The
illumination in accordance with the arrangement of the image pickup
elements may also be performed by the illumination optical system
20.
[0061] In the illumination optical system illustrated in FIG. 9, a
light from the light source unit 10 is shaped to a parallel light
by a collimater 21 to enter a diffraction optical element 22. The
Fourier transform is performed for the diffracted light from the
diffraction optical element 22 by a Fourier transform lens 23 on an
intermediate image plane 27 to form an image. On the intermediate
image plane 27, a light distribution that can illuminate a
plurality of rectangle areas in accordance with the arrangement of
the image pickup elements 53 is obtained. This is the same as a
light distribution on the plane 27 when the light shielding member
60 is disposed on the plane 27 of FIG. 8. The sample 32 of the
sample unit 30 is illuminated by setting an optical magnification
on the intermediate image plane of the plane 27 to .beta.' times.
This illumination is designed so that the light only comes onto the
image pickup elements 53 by the image pickup optical system 40.
Therefore, an unnecessary light for taking the image does not enter
the image pickup elements 53.
[0062] In this embodiment, since the light is only shaped to be
illuminated onto an effective portion for taking the image by the
diffraction optical element 22, the optical power (power
consumption) can be suppressed compared with a case where the light
shielding member is used. The diffraction optical element 22 can be
made by a known method using CG (computer graphics) or the
like.
Third Embodiment
[0063] There is a case where the light entering the sample unit 30
is slightly blurred by the diffraction efficiency of the
diffraction optical element 22, the aberrations of the imaging
optical systems 24 and 26, and the like. In the case, the light
shielding member 60 described in the first embodiment may also be
combined. In a microscope illustrated in FIG. 10, a light from the
light unit 10 is changed to a parallel light by a collimater 21 to
enter the diffraction optical element 22. The diffraction optical
element 22 forms a plane that illuminates a plurality of
rectangular shapes on the intermediate image plane 27. The imaging
optical systems 24 and 26 illuminate the sample 32 with the light
distribution of the intermediate image plane 27. In this case, a
blur may be generated in the illumination distribution of the
sample 32 as illustrated in FIG. 11 for example. In this case, the
light shielding member 60 may be disposed at the sample 32 to
shield the unnecessary light generated by the blur. Then, the light
passing through the image pickup optical system 40 from the sample
32 enters the image pickup elements 53 in the image pickup unit 50.
As a result, the light which is unnecessary for taking the image
can be further reduced.
[0064] As described above, in the image pickup apparatus in which
the plurality of image pickup elements of each embodiment, the
light which images on an area where the image pickup elements are
not disposed is shielded. Alternatively, the image pickup apparatus
is configured so as not to illuminate the area where the image
pickup elements are not disposed. Thus, the light which is
fundamentally unnecessary does not enter the image pickup unit. As
a result, since the reflection or the scattering generated by the
entrance of the light on an extra area can be suppressed, the
quality of the taken image can be improved. Furthermore, since the
influence caused by the reflection on the electric basement in the
image pickup unit or the like can be reduced, the degree of freedom
of arranging the electric wire or the mechanical unit can be
improved.
[0065] As described above, the case where the present invention is
applied to microscope is described as an embodiment of the optical
system of the present invention. The transmissive optical system
that forms an image of the transmitted light of the light
illuminated on the sample on an image plane is described in each
embodiment, but a reflective optical system may also be adopted.
The embodiments are similarly applied to an image pickup apparatus
other than the microscope.
REFERENCE SIGNS LIST
[0066] 1 SCHEMATIC DIAGRAM OF IMAGE PICKUP APPARATUS [0067] 10
LIGHT SOURCE [0068] 20 ILLUMINATION OPTICAL SYSTEM [0069] 30 SAMPLE
UNIT [0070] 31 SAMPLE STAGE [0071] 32 SAMPLE [0072] 33 OBJECT UNDER
TEST [0073] 40 IMAGE PICKUP OPTICAL SYSTEM [0074] 50 IMAGE PICKUP
UNIT [0075] 52 ELECTRIC BASEMENT [0076] 53 IMAGE PICKUP ELEMENT
[0077] 60 LIGHT SHIELDING MEMBER
* * * * *