U.S. patent application number 13/589547 was filed with the patent office on 2012-12-13 for method and device for optoelectronic sensors with ir blocking filter.
This patent application is currently assigned to TEXAS ADVANCED OPTOELECTRONIC SOLUTIONS, INC.. Invention is credited to CECIL ASWELL, EUGENE G. DIERSCHKE.
Application Number | 20120312990 13/589547 |
Document ID | / |
Family ID | 46846313 |
Filed Date | 2012-12-13 |
United States Patent
Application |
20120312990 |
Kind Code |
A1 |
ASWELL; CECIL ; et
al. |
December 13, 2012 |
METHOD AND DEVICE FOR OPTOELECTRONIC SENSORS WITH IR BLOCKING
FILTER
Abstract
Semiconductor structures for optoelectronic sensors with an
infrared (IR) blocking filter and methods for using such sensors
with post-detection compensation for IR content that passes through
the IR blocking filter are provided herein.
Inventors: |
ASWELL; CECIL; (Orangevale,
CA) ; DIERSCHKE; EUGENE G.; (Dallas, TX) |
Assignee: |
TEXAS ADVANCED OPTOELECTRONIC
SOLUTIONS, INC.
Plano
TX
|
Family ID: |
46846313 |
Appl. No.: |
13/589547 |
Filed: |
August 20, 2012 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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13097420 |
Apr 29, 2011 |
8274051 |
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13589547 |
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Current U.S.
Class: |
250/338.4 ;
250/226; 250/340 |
Current CPC
Class: |
H01L 27/14621 20130101;
G01J 3/513 20130101; H01L 31/02162 20130101; G01J 1/4228 20130101;
G01J 3/0262 20130101; G01J 1/0488 20130101; H01L 27/14623 20130101;
G01J 3/524 20130101; G01J 1/4204 20130101 |
Class at
Publication: |
250/338.4 ;
250/340; 250/226 |
International
Class: |
G01J 5/10 20060101
G01J005/10; G01J 3/50 20060101 G01J003/50 |
Claims
1. A method comprising: receiving, by a semiconductor device having
first and second optoelectronic sensors formed therein, light
having an infrared (IR) light component and a visible light
component; filtering a portion of the IR light component from the
received light using an IR blocking filter to exclude the filtered
portion of the IR light from detection by the first and second
optoelectronic sensors; filtering a portion of the visible light
component using a first visible light filter to exclude a first set
of visible light wavelengths from detection by the first
optoelectronic sensor, wherein the first set of visible light
wavelengths is not filtered for the second optoelectronic sensor;
generating first and second sensor responses by the first and
second optoelectronic sensors, respectively, wherein the first and
second sensor responses represent the received light detected by
the first and second optoelectronic sensors after filtering the IR
light portion and the first set of visible light wavelengths; and
performing at least one calculation based on the first and second
sensor responses to compensate for IR light remaining after
filtering the IR light portion.
2. The method of claim 1 further comprising filtering a second set
of visible light wavelengths from the received visible light using
a second visible light filter to exclude the second set of visible
light wavelengths from detection by both the first and second
optoelectronic sensors.
3. The method of claim 2 wherein the compensating includes
determining a difference between the first and second sensor
responses.
4. The method of claim 1 further comprising filtering a second set
of visible light wavelengths from the received visible light using
a second visible light filter to exclude the second set of visible
light wavelengths from detection by one of the first and second
optoelectronic sensors, wherein the first set of visible light
wavelengths is not filtered for the other of the first and second
optoelectronic sensors.
5. The method of claim 1 further comprising generating a third
sensor response by a third sensor of the semiconductor device,
wherein the third response represents the IR light component
without filtering by the IR blocking filter.
6. The method of claim 5 further comprising filtering a portion of
the visible light using a second visible light filter to exclude a
second set of visible light wavelengths from detection by the third
optoelectronic sensor.
7. The method of claim 1 wherein excluding the first set of visible
light wavelengths includes blocking all visible light from an upper
surface of the first optoelectronic sensor facing the first visible
light filter.
8. The method of claim 7 wherein the compensating is based on the
first sensor response representing only a first detectable set of
wavelengths of the IR light received by the first optoelectronic
sensor due to wavelength dependent absorption of the IR light, and
on the second sensor response representing a second detectable set
of wavelengths that is larger than the first detectable set of
wavelengths and includes the first detectable set of wavelengths,
and wherein the first detectable set of wavelengths is biased to
longer wavelengths than the remainder of the second detectable set
of wavelengths.
9. A method comprising: providing a first IR blocking filter
configured to block a first portion of IR light and to let a second
portion of the IR light pass through, wherein the first IR blocking
filter is positioned over first and second optoelectronic sensors
to block the first portion of IR light from reaching the first and
second optoelectronic sensors; providing a first visible light
filter configured to block a first portion of visible light and to
let a second portion of the visible light pass through, wherein the
first visible light filter is positioned over the first
optoelectronic sensor to block the first portion of visible light
from reaching the first optoelectronic sensor and is not positioned
over the second optoelectronic sensor; obtaining a first response
from the first optoelectronic sensor representing at least part of
the second portion of the visible light and at least part of the
second portion of the IR light detected by the first optoelectronic
sensor; obtaining a second response from the second optoelectronic
sensor representing at least part of the first and second portions
of the visible light and at least part of the second portion of the
IR light detected by the second optoelectronic sensor; and
compensating for the IR light in the first and second responses to
approximate a photopic response.
10. The method of claim 9 further comprising providing a second
visible light filter configured to block part of the second portion
of visible light and to let a third portion of the visible light
pass through, wherein the second visible light filter is positioned
over the first and second optoelectronic sensors.
11. The method of claim 10 wherein compensating for the IR light
includes determining a difference between the first and second
sensor responses.
12. The method of claim 9 wherein compensating for the IR light
includes determining a ratio between the first and second
responses, wherein the ratio represents a spectral response.
13. The method of claim 9 further comprising providing a second
visible light filter configured to block part of the second portion
of visible light and to let a third portion of the visible light
pass through, wherein the second visible light filter is positioned
over the second optoelectronic sensor and not the first
optoelectronic sensor.
14. The method of claim 9 further comprising obtaining a third
response from a third optoelectronic sensor of the semiconductor
device having no IR blocking filter associated therewith.
15. The method of claim 14 further comprising providing a second
visible light filter positioned over the third optoelectronic
sensor and not over the first and second optoelectronic sensors,
wherein the second visible light filter is configured to exclude a
portion of the visible light from detection by the third
optoelectronic sensor.
16. A device comprising: a first semiconductor layer having first
and second optoelectronic sensors formed therein; a second
semiconductor layer formed over the first semiconductor layer and
positioned above the first and second optoelectronic sensors; and
an infrared (IR) blocking filter formed directly on the second
layer and positioned above the first and second optoelectronic
sensors.
17. The device of claim 16 further comprising a third
optoelectronic sensor formed in the first semiconductor layer,
wherein the IR blocking filter is not positioned above the third
optoelectronic sensor.
18. The device of claim 17 further comprising a visible light
filter formed over at least one of the first and second
sensors.
19. The device of claim 18 further comprising a visible light
filter formed over the third sensor.
20. The device of claim 17 further comprising a visible light
filter formed over the third sensor.
21. A device comprising: a first optoelectronic sensor configured
to detect electromagnetic radiation in the visible light spectrum
and the infrared (IR) spectrum and to generate a first response
representing a spectral content of the detected electromagnetic
radiation; a second optoelectronic sensor configured to detect
electromagnetic radiation in the visible light spectrum and the IR
spectrum and to generate a second response representing a spectral
content of the detected electromagnetic radiation; an IR blocking
filter integral to the device and positioned above the first and
second optoelectronic sensors, wherein the IR blocking filter is
configured to attenuate electromagnetic radiation in the IR
spectrum; and a visible light filter integral to the device and
positioned above the first optoelectronic sensor, wherein the
visible light filter is configured to attenuate electromagnetic
radiation forming a first portion of the visible light
spectrum.
22. The device of claim 21 further comprising a second visible
light filter integral to the device and positioned above the first
and second optoelectronic sensors, wherein the second visible light
filter is configured to attenuate electromagnetic radiation forming
a second portion of the visible light spectrum.
23. The device of claim 22 further comprising circuitry for
generating a differential response by determining a difference
between the first and second responses, wherein the differential
response represents a photopic response.
24. The device of claim 21 further comprising a third
optoelectronic sensor configured to detect electromagnetic
radiation in the visible light spectrum and the IR spectrum and to
generate a third response representing a spectral content of the
detected electromagnetic radiation, wherein the third
optoelectronic sensor is not associated with an IR blocking
filter.
25. The device of claim 24 further comprising a second visible
light filter positioned above the third optoelectronic sensor,
wherein the second visible light filter is configured to attenuate
electromagnetic radiation forming a third portion of the visible
light spectrum.
26. The device of claim 25 wherein the third portion of the visible
light spectrum overlaps at least one of the first and second
portions of the visible light spectrum.
27. The device of claim 21 wherein the visible light filter is
configured to block all visible light and wherein the device
further comprises circuitry for determining a ratio between the
first and second responses, wherein the ratio represents a spectral
response.
28. The device of claim 27 wherein the second response represents a
plurality of wavelengths, and wherein the first response represents
only longer wavelengths present in the second response.
29. The device of claim 27 further comprising a third
optoelectronic sensor configured to detect electromagnetic
radiation in the visible light spectrum and the IR spectrum and to
generate a third response representing a spectral content of the
detected electromagnetic radiation, wherein the third
optoelectronic sensor is not associated with an IR blocking
filter.
30. The device of claim 29 further comprising a second visible
light filter integral to the device and positioned above the third
optoelectronic sensor, wherein the second visible light filter is
configured to attenuate electromagnetic radiation forming a third
portion of the visible light spectrum.
31. The device of claim 30 wherein the third portion of the visible
light spectrum overlaps at least one of the first and second
portions of the visible light spectrum.
32. The device of claim 21 wherein a semiconductor layer overlays
the first and second optoelectronic sensors, and wherein the IR
blocking filter directly overlays the semiconductor layer.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of U.S. patent
application Ser. No. 13/097,420, filed Apr. 29, 2011, entitled
METHOD AND DEVICE FOR OPTOELECTRONIC SENSORS WITH IR BLOCKING
FILTER (Atty. Dkt. No. TAOS-30598), the specification of which is
incorporated herein in its entirety.
BACKGROUND
[0002] Integrated circuits (ICs) may include various components for
use in applications such as optical sensing applications. One such
component is a silicon based optoelectronic sensor used to detect
light. The optoelectronic sensor produces a representation (e.g.,
an electrical signal) of the detected light that may then be
processed and used as desired. Due to limitations in current
optoelectronic sensors, improvements are needed.
BRIEF DESCRIPTION OF THE DRAWINGS
[0003] For a more complete understanding, reference is now made to
the following description taken in conjunction with the
accompanying Drawings in which:
[0004] FIG. 1 illustrates one embodiment of a semiconductor
structure that may be used as an optoelectronic sensor.
[0005] FIG. 2 is a simplified diagram of an environment with
sensors of FIG. 1 and a spectrally distorting medium positioned
between the sensors and the environment.
[0006] FIG. 3 illustrates one embodiment of a semiconductor device
with two sensors of FIG. 1 and an infrared (IR) blocking filter
positioned above both sensors.
[0007] FIG. 4 illustrates one embodiment of a semiconductor device
such as the semiconductor device of FIG. 3 with a visible light
filter positioned above one of the sensors.
[0008] FIG. 5 illustrates one embodiment of a semiconductor device
such as the semiconductor device of FIG. 4 with a visible light
filter positioned above each sensor.
[0009] FIG. 6 illustrates one embodiment of a semiconductor device
such as the semiconductor device of FIG. 5 with a visible light
filter positioned above both sensors.
[0010] FIG. 7 illustrates one embodiment of a semiconductor device
such as the semiconductor device of FIG. 3 with a sensor that is
not covered by the IR blocking filter.
[0011] FIG. 8 illustrates one embodiment of a semiconductor device
such as the semiconductor device of FIG. 7 with a visible light
filter positioned above one sensor that is under the IR blocking
filter.
[0012] FIG. 9 illustrates one embodiment of a semiconductor device
such as the semiconductor device of FIG. 10 with a visible light
filter positioned above both sensors that are under the IR blocking
filter.
[0013] FIG. 10 illustrates one embodiment of a semiconductor device
such as the semiconductor device of FIG. 8 with a visible light
filter positioned above the sensor that is not under the IR
blocking filter.
[0014] FIG. 11 illustrates one embodiment of a semiconductor device
such as the semiconductor device of FIG. 8 with a visible light
filter positioned above each of the sensors.
[0015] FIG. 12 illustrates one embodiment of a semiconductor device
with a non-integrated IR filter positioned above visible light
filters and sensors.
[0016] FIG. 13A is a simplified diagram of a top view of one
embodiment of an integrated circuit (IC) having an emitter and a
sensor positioned thereon.
[0017] FIG. 13B is a side view of the IC of FIG. 13A.
[0018] FIG. 13C is a simplified diagram of a top view of one
embodiment of an IC having a sensor positioned thereon.
[0019] FIG. 13D is a side view of the IC of FIG. 13C.
[0020] FIGS. 14A and 14B illustrate one embodiment of a
semiconductor device having multiple filter arrays.
[0021] FIG. 14C illustrates one embodiment of a possible
configuration of the semiconductor device of FIGS. 14A and 14B.
[0022] FIG. 14D illustrates another embodiment of the semiconductor
device of FIG. 14A.
[0023] FIG. 15 is a flow chart illustrating one embodiment of a
method that may be used for filtering incoming light and performing
post-detection compensation.
[0024] FIG. 16 is a flow chart illustrating one embodiment of a
method that may be used for filtering incoming light and performing
post-detection compensation.
DETAILED DESCRIPTION
[0025] The present disclosure is directed to methods and
semiconductor devices for light detection. It is understood that
the following disclosure provides many different embodiments or
examples. Specific examples of components and arrangements are
described below to simplify the present disclosure. These are, of
course, merely examples and are not intended to be limiting. In
addition, the present disclosure may repeat reference numerals
and/or letters in the various examples. This repetition is for the
purpose of simplicity and clarity and does not in itself dictate a
relationship between the various embodiments and/or configurations
discussed.
[0026] Referring to FIG. 1, one embodiment of an optoelectronic
sensor 100 is provided as a semiconductor structure having a well
102 positioned on or within a substrate 104. The sensor 100 is
configured to detect light (e.g., as a photodetector) and to
generate a sensor response (e.g., a photocurrent) based on the
detected light. The sensor 100 may detect light of varying
wavelengths for many different applications, such as presence
detection, motion detection, color detection, and ambient light
sensing (ALS) applications. For example, the sensor 100 may be
configured to detect light in the visible light spectrum and/or the
infrared (IR) spectrum, including light generated specifically for
detection by the sensor 100 (e.g., by a light emitting diode (LED)
or another device) and/or light present in the environment (e.g.,
ambient light).
[0027] For purposes of illustration, the well 102 is formed in the
substrate 104 using CMOS fabrication technology or any other
appropriate technology. For example, the well 102 may be an N-type
well formed in a P- epitaxial (epi) layer that is itself formed on
a P+ substrate. It is understood that many different configurations
of wells, layers, and substrates may be used to provide the sensor
100, and the different configurations may have different doping
types, well structures, and layers. Furthermore, it is understood
that multiple wells 102 may be present in embodiments where the
sensor 100 represents multiple sensors. For example, if the sensor
100 represents two separate sensors, two wells 102 may be present,
with one well 102 representing one sensor 100.
[0028] Accordingly, the term "sensor" is used in following
embodiments to refer to a semiconductor structure designed to
detect light and is not limited to a particular physical
configuration. The spectral response of the silicon semiconductor
structure that may be used for the sensor 100 is a range of
wavelengths from approximately 300 nanometers (nm) to 1100 nm. The
sensor 100 generates the sensor response when it detects light in
its spectral response range.
[0029] In various applications, it is desirable to use the sensor
100 to mimic a photopic response, which is the human eye's response
to light. For example, an ALS application frequently attempts to
mimic the photopic response in order to make adjustments based on
the amount of ambient light being received by the device on which
the application is running. However, sensors that are silicon based
(such as the sensor 100) are generally sensitive not only to the
light visible to the human eye, but also to light of other
wavelengths that are not detectable by the human eye, such as
infrared light. This complicates the problem of correctly
identifying the photopic response because the output of the sensor
100 will reflect both the visible and non-visible components of
light received by the sensor.
[0030] One approach used to mimic a photopic response is to use a
compensation process that relies on multiple sensors, such as are
detailed in U.S. Pat. No. 6,596,981, filed on Jan. 14, 2002, and
entitled METHOD AND APPARATUS FOR OPTICAL DETECTOR WITH SPECTRAL
DISCRIMINATION, and U.S. patent application Ser. No. 12/425,530,
filed on Apr. 17, 2009, and entitled AMBIENT LIGHT SENSOR, both of
which are incorporated herein by reference in their entirety. The
approaches described therein use the separate responses of two or
more sensors to compensate for non-visible light when calculating
the photopic response.
[0031] While post-detection compensation processes are effective in
many different applications, certain limitations may apply. For
example, because the sensor response is based on all detected light
in the sensor's spectral response range, higher levels of IR light
in the detected light will generate a larger sensor response than
lower levels of IR light. In other words, the detection of IR light
plus a fixed amount of visible light results in a larger sensor
response than the detection of a lower amount of IR light plus the
fixed amount of visible light. The larger response means that a
compensation process must deal with a larger value for the detected
light, and larger values generally have a greater margin of error
in calculations than smaller values. For example, if the
compensation process subtracts one sensor response from another
sensor response, the use of larger values in the subtraction
process will generally result in greater variation of the
difference (due to system variables) compared to the subtraction of
two smaller values. Accordingly, higher levels of IR light in a
sensor response may diminish the accuracy of post-detection
compensation calculations due to the increased margin of error
introduced by larger values. In addition, high levels of IR light
may saturate the sensors 100 in some environments, making it more
difficult to accurately calculate the photopic response. For
example, a high level of IR light may push the sensor into
saturation, thereby limiting the sensor's dynamic range.
[0032] Referring to FIG. 2, in one embodiment, an environment 200
is illustrated in which sensors 100 are illustrated with a
spectrally distorting medium 202 positioned between the sensors 100
and light 204 from the environment. The light 204 from the
environment passes through the spectrally distorting medium 202
before reaching the sensors 100 as spectrally distorted light 206.
The spectrally distorting medium 202 creates a spectral distortion
in the light 206 that reaches the sensors 100 by blocking at least
a portion of particular wavelengths of the incoming light 204 from
reaching the sensors 100 but passing the remaining wavelengths of
the light 206. For example, the spectrally distorting medium 202
may attenuate light in the visible spectrum, but may pass light in
the IR spectrum with little or no attenuation.
[0033] It is understood that the wavelengths of light that are
attenuated by the spectrally distorting medium 202 depend on the
characteristics of the material(s) forming the spectrally
distorting medium 202. For example, the spectrally distorting
medium 202 may be a cell phone faceplate or a television monitor
bezel used for aesthetic and/or other purposes to block visible
light (e.g., to hide the sensor from a user's view). However, the
faceplate or bezel may be constructed to allow infrared light to
pass through for purposes such as signaling (e.g., a television
remote control), proximity detection, motion detection, or simply
because IR attenuation is not part of the design. The spectrally
distorting medium 202 may be glass, plastic, or any other material
or combination of materials, may be a single layer or multiple
layers, and may be tinted or clear. In the present example, the
spectrally distorting medium 202 is not part of the sensors 100,
but may be in some embodiments.
[0034] In cases where the spectrally distorting medium 202
attenuates at least some visible light wavelengths but not IR light
wavelengths, the spectral distortion may complicate attempts to
mimic a photopic response to the light 204. More specifically, in
cases where the spectrally distorting medium 202 is used, a
relatively high percentage of the visible light component of the
light 204 may be blocked and therefore not detected by the sensors
100, while a relatively high percentage of the infrared light
component of the light 204 may reach the sensors 100. This increase
in the percentage of IR light relative to visible light in the
light 206 may negatively impact the accuracy of post-detection
compensation calculations as described previously.
[0035] It is understood that the attenuation caused by the
spectrally distorting medium 202 across the visible spectrum may
not be uniform. For example, ninety percent of the visible light
wavelengths in the blue color range may be attenuated (i.e., ten
percent may pass through to the sensor 100) while ninety-five
percent of the visible light wavelengths in the green color range
may be attenuated (i.e., five percent may pass through to the
sensors 100). In such an example, the spectrally distorting medium
202 may pass eighty-five percent of the IR wavelengths. Another
example may be a spectrally distorting medium 202 that is
substantially transparent in infrared but blocks ninety-five
percent or more of the visible spectrum. Accordingly, there are
many different cases of spectral distortion that may be presented
to the sensor 100.
[0036] With continued reference to FIG. 2, compensation circuitry
208 is coupled to the sensors 100 to perform one or more
post-detection compensation processes. Although shown as separate
from the sensors 100, the compensation circuitry 208 may be
integral therewith in some embodiments. For example, the
compensation circuitry 208 may be formed with the sensors 100 on an
integrated circuit (IC) during a manufacturing process.
Alternatively, the compensation circuitry may be partially or
wholly separate (e.g., may be one or more separate ICs). In some
embodiments, the compensation circuitry 208 may include a
controller that is configured to execute instructions.
[0037] Although it is understood that the compensation circuitry
208 may compensate for many different spectral distortion scenarios
and is not limited to compensating for IR light, IR light is used
for purposes of example. Accordingly, the compensation circuitry
208 uses sensor responses received from the sensors 100 and
performs one or more calculations to minimize the IR component that
remains in the detected light after IR filtering occurs. The
compensation circuitry 208 may receive a single output from
multiple sensors 100 or may receive a single output that represents
multiple sensor responses. The compensation circuitry 208 may be
configured to perform subtraction and/or other relatively simple
operations for compensation purposes (e.g., as described with
respect to U.S. patent application Ser. No. 12/425,530), or may
include various components and perform more complicated
compensation operations (e.g., as described with respect to U.S.
Pat. No. 6,596,981).
[0038] While compensation processes performed by the compensation
circuitry 208 may be generally effective for typical light sources
such as incandescent, fluorescent, and halogen lamps that have
variations in IR light content, the introduction of the spectrally
distorting medium 202 may lessen the accuracy of such processes.
Furthermore, while increasing the sensitivity of the sensors 100
for a particular spectral distortion scenario might aid in
approximating a photopic response, variations in manufacturing
processes may make this difficult. These variations may be caused
by sensitivity differences between individual sensors or batches of
sensors created by such processes. Furthermore, calibrating each
sensor 100 or sensor array after manufacture is generally not
desirable due to the time and cost of such calibration
procedures.
[0039] Accordingly, an IR blocking filter may be used in
conjunction with a post-detection compensation process, such as one
of the approaches described in previously incorporated U.S. Pat.
No. 6,596,981 and U.S. patent application Ser. No. 12/425,530. The
IR blocking filter may be used to reduce the amount of IR light
remaining after the light passes through the spectrally distorting
medium 202. A compensation process may then be applied to account
for IR light remaining in the detected light. It is understood that
the combination of an IR blocking filter and a post-detection
compensation process may also be used when there is no spectrally
distorting medium 202. Furthermore, it is understood that many
different compensation processes may be used and the present
disclosure is not limited to the compensation processes referenced
herein.
[0040] Referring to FIG. 3, one embodiment of a semiconductor
device 300 that may be used to detect the light 206 of FIG. 2 for
later compensation processing is illustrated. The semiconductor
device 300 includes sensors 100A and 100B in a substrate 302. The
sensors 100A and 100B may be similar or identical to the sensor 100
of FIG. 1, and the substrate 302 may be the substrate 104 of FIG. 1
or a different substrate. A semiconductor layer 304 (e.g., an oxide
or nitride layer) may cover the sensors 100A and 100B. The layer
304 may not be present in all embodiments, and may represent
multiple layers of the same or different materials. An IR blocking
filter 306 is positioned above the sensors 100A and 100B (e.g.,
between the sensors 100A/100B and the environment). In the present
embodiment, the IR blocking filter 306 is integral and formed
directly on the layer 304 above the sensors 100A/100B. In other
embodiments, the IR blocking filter 306 may be separate and not
integral to the device 300.
[0041] The IR blocking filter 306 may include approximately fifty
different planar layers (not shown) that together form an IR
blocking filter that is approximately four microns high. However,
it is understood that different numbers of layers and thicknesses
may be used for the IR blocking filter 306. Furthermore, the IR
blocking filter 306 may be of varying area sizes. For example, the
IR blocking filter 306 may cover more or less area than the sensors
100A and 100B, or may cover an identical area. Although shown as a
single IR blocking filter 306, it is understood that each sensor
100A and 100B may be associated with its own IR blocking
filter.
[0042] The IR blocking filter 306 may prevent a significant portion
of the IR light from reaching the sensors 100A/100B, but may be
unable to block all of the IR light. For example, the IR blocking
filter 306 may block fifty percent or more of the IR light.
However, even if the IR blocking filter 306 blocks substantially
all (e.g., ninety-five percent) of the IR light, some IR light will
reach the sensors 100A/100B. When combined with the attenuated
visible light reaching the sensors 100A/100B due to the spectrally
distorting medium 202 as illustrated in FIG. 2, the responses
produced by the sensors 100A/100B may be similar or identical to
that of unfiltered sensors. For example, if the spectrally
distorting medium 202 blocks ninety-five percent of the visible
light component of the light 204 (FIG. 2) and the IR blocking
filter 306 blocks ninety-five percent of the IR light component of
the light 206, the ratio of visible light and IR light reaching the
sensors 100A/100B in the light 206 will be substantially the same
as if no blocking was occurring. In some embodiments, the IR
blocking filter 306 may attenuate visible light as well as IR
light.
[0043] A sealant layer 308 may be present above the IR blocking
filter 306. The sealant layer 308, which is clear in the present
example, may provide mechanical protection, chemical protection,
and/or moisture protection for underlying layers. In other
embodiments, the sealant layer 308 may provide additional or
alternative functions. In the present example, the sealant layer
308 completely covers the IR blocking filter 306 and contacts the
layer 304 all around the IR blocking filter 306, but in other
embodiments one or more gaps may be present in the sealant layer
308. In the present example, the sealant layer 308 is formed of a
material that allows visible and IR light to pass through with
little or no attenuation. In other embodiments, the sealant layer
308 may be designed to attenuate selected wavelengths of light
(e.g., as an IR filter or a visible light filter).
[0044] The layer 304 and/or sealant layer 308 may be present in all
embodiments described in the present disclosure, but are omitted
from many Figures for purposes of clarity. Accordingly, while the
layer 304 and/or the sealant layer 308 may not be shown in a
particular embodiment, it is understood that the layer 304 and/or
the sealant layer 308 may be incorporated therein. In embodiments
having a visible light filter (described below), the layer 304
and/or the sealant layer 308 may be positioned over or under the
visible light filter.
[0045] Referring to FIG. 4, one embodiment of a semiconductor
device 400 is illustrated that may be similar or identical to the
semiconductor device 300 of FIG. 3 with the addition of a visible
light filter 402. The visible light filter 402 is designed to
attenuate visible light based on the configuration of the visible
light filter 402. For example, the visible light filter 402 may be
a color filter and may include one or more low pass, band pass, and
high pass filters configured to attenuate some visible light
wavelengths while passing other visible light wavelengths. As a
color filter, visible light filter 402 may be configured as a
single filter (e.g., a red filter layer) or may be configured as a
stack of two or more filter layers (e.g., a red filter layer
positioned under a blue filter layer).
[0046] The visible light filter 402 may include or be formed from a
material such as plastic that is capable of blocking ultraviolet
(UV) wavelengths, and/or a material such as a metal that is capable
of blocking IR wavelengths, and/or using photonic crystal
structures. In some embodiments, the visible light filter 402 may
be configured to block all visible light. When so configured, the
visible light filter 402 may or may not block IR and/or UV light.
For example, the visible light filter 402 may be a material as
described with respect to previously incorporated U.S. Pat. No.
6,596,981. In such cases, the visible light filter 402 would be
configured to filter all visible light wavelengths and the sensors
100A and 100B may be used as described in previously incorporated
U.S. Pat. No. 6,596,981. Accordingly, the materials and structure
of the visible light filter 402 may vary in order to accomplish a
particular desired filtering result with visible light
wavelengths.
[0047] As there is no visible light filter above the sensor 100B,
the sensor 100B may be a visible light sensor such as a clear color
sensor used for sensing all incoming light (e.g., with no visible
light blocking other than that provided by the spectrally
distorting medium 202). Accordingly, sensor 100B may be used with
the sensor 100A for compensation processes based on the different
responses of the two sensors.
[0048] Although the IR blocking filter 306 is described and
illustrated in the present and following embodiments as being
located under the visible light filter 402, it is understood that
the IR blocking filter 306 may be located above the visible light
filter 402 in any of the embodiments. The illustrated vertical
arrangement enables a single IR blocking filter to be deposited
across multiple sensors and then individual visible light filters
to be deposited for each sensor. Generally, the IR blocking filter
306 may be deposited on the layer 304 because it may be desirable
that the layers forming the IR blocking filter 306 are flat and
depositing these layers on the layer 304, rather than on multiple
visible light filters, may be preferable given available
manufacturing processes. However, the IR blocking filter 306 (or
multiple IR blocking filters) may be positioned above the visible
light filters to achieve the results described herein. Such
variations in positioning may be chosen based on available
manufacturing processes, performance testing, selected materials,
and similar criteria. Accordingly, while not shown, it is
understood that the IR blocking filter 306 may be positioned above
the visible light filter 402, and that other layers may be present
between the IR blocking filter 306 and the visible light filter
402.
[0049] Referring to FIG. 5, one embodiment of a semiconductor
device 500 is illustrated that may be similar or identical to the
semiconductor device 400 of FIG. 4 with a visible light filter 502
positioned over the sensor 100B. More specifically, the visible
light filter 402 is formed over the IR blocking filter 306 and
sensor 100A, and the visible light filter 502 is formed over the IR
blocking filter 306 and the sensor 100B. The visible light filter
502 may be similar or identical to the visible light filter 402,
and may block the same, different, or overlapping wavelengths of
visible light.
[0050] The sensor 100B may be a color sensor used for sensing
particular wavelengths of incoming visible light (e.g., based on
the properties of the visible light filter 502) and/or may be used
for IR sensitive applications such as proximity or motion detection
with the visible light filter 502 configured to improve the
performance of IR detection. For example, the visible light filter
502 may be a red filter layer, a blue filter layer, or a stack
containing both red and blue filter layers. The addition of a green
filter layer in the visible light filter 502 may negatively impact
IR detection functionality of the sensor 100B and so may be avoided
in some embodiments.
[0051] Referring to FIG. 6, one embodiment of a semiconductor
device 600 is illustrated that may be similar or identical to the
semiconductor device 500 of FIG. 5 with a visible light filter 602
positioned over both the sensors 100A and 100B. The visible light
filter 602 may be a single filter layer that is formed over the IR
blocking filter 306 and both of the sensors 100A/100B as shown. The
visible light filter 602 may be similar or identical to the visible
light filter 402, and may block the same, different, or overlapping
wavelengths of visible light. In some embodiments, one of the
visible light filters 402 and 602 may be yellow or green, and the
other may be red or amber as described in previously incorporated
U.S. patent application Ser. No. 12/425,530. It is understood that
any of the visible light filters described herein may be formed as
one or more layers over multiple sensors, and may be positioned
either under or above other visible light filters.
[0052] Referring to FIG. 7, one embodiment of a semiconductor
device 700 is illustrated that may be similar or identical to the
semiconductor device 300 of FIG. 3 with another sensor 100C. The IR
blocking filter 306 does not cover the sensor 100C, and so light
detected by the sensor 100C contains more IR content than light
detected by the sensors 100A/100B.
[0053] The sensor 100C may be used for an application such as
proximity sensing or motion detection. For example, an LED emitter
(not shown) may be used to emit an IR signal that is reflected off
a subject in the environment and detected by the sensor 100C.
Filtering of the IR signal by the IR blocking filter 306 reduces
the incoming IR signal and therefore negatively affects the
detection of IR light needed for proximity sensing, motion
detection, or other IR sensitive applications. By positioning the
IR blocking filter 306 above the sensors 100A/100B but not the
sensor 100C, applications (e.g., color sensing or photopic response
applications) using the sensors 100A/100B can benefit from the
reduced IR without impacting the IR sensitive applications that may
use the sensor 100C. Accordingly, in this and following
embodiments, sensors not covered by the IR blocking filter 306 may
be used for applications that benefit from a higher level of
incoming IR light than sensors covered by the IR blocking filter
306. Alternatively or additionally, the sensor 100C may be used to
detect unfiltered IR light for use in post-detection IR
compensation processes.
[0054] Referring to FIG. 8, one embodiment of a semiconductor
device 800 is illustrated that may be similar or identical to the
semiconductor device 700 of FIG. 7 with the visible light filter
402 positioned above the sensor 100A. The visible light filter 402
enables filtering of the visible light reaching the sensor 100A
while not affecting the visible light detection of the sensors 100B
and 100C.
[0055] Referring to FIG. 9, one embodiment of a semiconductor
device 900 is illustrated that may be similar or identical to the
semiconductor device 800 of FIG. 8 with the visible light filter
402 positioned above the sensor 100A and the visible light filter
502 positioned above the sensor 100B. There is no visible light
filter positioned above the sensor 100C.
[0056] Referring to FIG. 10, one embodiment of a semiconductor
device 1000 is illustrated that may be similar or identical to the
semiconductor device 900 of FIG. 9 with the visible light filter
402 positioned above the sensor 100A and a visible light filter
1002 positioned above the sensor 100C. The visible light filter
1002 may be similar or identical to the visible light filter 402,
and may block the same, different, or overlapping wavelengths of
visible light. There is no visible light filter positioned above
the sensor 100B.
[0057] In some embodiments, the visible light filter 402 as
illustrated in FIG. 10 may be designed to block all visible light
from the sensor 100A. For example, the visible light filter 402 may
be a material as described with respect to previously incorporated
U.S. Pat. No. 6,596,981. In such cases, the visible light filter
402 would be configured to filter all visible light wavelengths and
the sensors 100A and 100B would be used as described in previously
incorporated U.S. Pat. No. 6,596,981.
[0058] The sensor 100C may be a color sensor used for sensing
particular wavelengths of incoming visible light (e.g., based on
the properties of the visible light filter 1002) and/or may be used
for IR sensitive applications such as proximity or motion detection
with the visible light filter 1002 configured to improve the
performance of IR detection. For example, the visible light filter
1002 may be a red filter layer, a blue filter layer, or a stack
containing both red and blue filter layers. The addition of a green
filter layer in the visible light filter 1002 may negatively impact
IR detection functionality of the sensor 100C and so may be avoided
in some embodiments.
[0059] Referring to FIG. 11, one embodiment of a semiconductor
device 1100 is illustrated that may be similar or identical to the
semiconductor device 1000 of FIG. 10 with the visible light filter
402 positioned above the sensor 100A, the visible light filter 502
positioned above the sensor 100B, and the visible light filter 1002
positioned above the sensor 100C.
[0060] Referring to FIG. 12, one embodiment of a device 1200 is
illustrated that may have filtering and sensing characteristics
that are similar or identical to those of the semiconductor device
1100 of FIG. 11. However, in the device 1200, the IR blocking
filter 306 and/or one or more of the visible light filters 402,
502, and 1002 (if present) may be separate from the device.
Furthermore, the IR blocking filter 306 is illustrated as
positioned above the visible light filters 402, 502, and 1002.
Accordingly, it is understood that many different configurations of
IR blocking filters 306 and/or visible light filters 402, 502, and
1002 may be used to accomplish the filtering and sensing as
described herein.
[0061] Referring to FIGS. 13A and 13B, one embodiment of an
integrated circuit (IC) 1300 is illustrated that may incorporate
one or more semiconductor devices such as one of the devices of
FIGS. 3-11 and/or a similar device having a semiconductor sensor
structure and an IR blocking filter. As used in the present
disclosure, the term "IC" may refer to a single silicon substrate
or multiple silicon substrates, and/or may include one or more
chips (e.g., may be a packaged single chip or multi-chip module).
The IC 1300 may also include compensation circuitry in some
embodiments. The IC 1300 includes an emitter 1302 such as a light
emitting diode (LED) and the sensor 100 of FIG. 1. It is understood
that the emitter 1302 may be any type of emitter capable of
producing a signal of any wavelength. The sensor 100 may include
one or more sensors capable of sensing the signal produced by the
emitter 1302. The LED 1302 and sensor 100 may be positioned within,
on, or otherwise located relative to a substrate 1304. For example,
one or both of the LED 1302 and sensor 100 may be manufactured
separately from the substrate 1302 and later attached thereto if
the substrate is a circuit board. In another example, one or both
of the LED 1302 and sensor 100 may be created within the substrate
1304.
[0062] The LED 1302 may be any LED capable of producing visible or
non-visible light of a desired wavelength, such as wavelengths in
the visible spectrum in the range of approximately 400 nm to 700 nm
or in the IR spectrum in the range of approximately 700 nm to 1100
nm. It is understood that the wavelength range of the LED 1302 may
vary depending on the particular application for which it is to be
used. For example, the LED 1302 may be configured to emit light in
the IR spectrum for a proximity sensing application, but may be
configured to emit light in the visible light spectrum for a
reflective color sensing application. The LED 1302 may be
fabricated directly onto the IC 1300 or may be an IC chip or other
modular component that is added to the IC 1300 during or after
fabrication of the IC 1300. The LED 1302 may be a single LED or may
represent an LED array having LEDs configured to emit light of the
same or different wavelengths.
[0063] The sensor 100 may be configured to detect light of the
wavelength produced by the LED 1302 (e.g., in the visible light
spectrum and/or the IR spectrum) and/or light present in the
environment (e.g., ambient light). The sensor 100 may be a single
sensor or may represent a sensor array. In some embodiments, the
sensor 100 may represent multiple sensors, with one or more sensors
configured to detect light emitted by the LED 1302, and one or more
other sensors configured to detect light present in the
environment. The sensor 100 may be fabricated directly onto the IC
1300 or may be an IC chip or other modular component that is added
to the IC 1300 during or after fabrication of the IC 1300.
[0064] The substrate 1304 provides a structure upon which the LED
1302 and sensor 100 may be mounted or within which they may be
formed. The substrate 1304 may be provided by any suitable
material, such as a printed circuit board, a metal lead frame, a
ceramic structure, and/or other materials. Although not shown, it
is understood that one or more layers or other components may be
positioned between the substrate 1304 and the LED 1302 and sensor
100, and that the LED 1302 and sensor 100 may not be directly
coupled to the substrate 1304.
[0065] Referring to FIGS. 13C and 13D, one embodiment of an IC 1306
is illustrated with the sensor 100 of FIG. 1 and a substrate 1308.
The IC 1306 may include any of the semiconductor device embodiments
described herein, as well as the compensation circuitry in some
embodiments. In embodiments such as that illustrated in FIGS. 13C
and 13D, the emitter 1302 of FIG. 13A is not present as the sensor
100 may not require an artificial light source but may operate
solely on light present in the environment. In other embodiments,
the sensor 100 may be manufactured separately from the emitter 1302
and later combined with the emitter on a circuit board or other
base layer. It is understood that the sensor 100 may be a single
sensor or a sensor array.
[0066] Referring to FIGS. 14A-14C, one embodiment of a device 1400
is illustrated in a perspective view (FIG. 14A) and top views
(FIGS. 14B and 14C). The device 1400 may be an embodiment of the
sensor(s) 100 of FIG. 1 or the IC 1300/1306 of FIGS. 13A and 13C.
The device 1400 is illustrated with a substrate 1410, which may be
the substrate 102, 302, 1304, or 1308. A first sensor array (not
shown) is positioned in or on the substrate 1410 as described
previously. The first sensor array includes sensors 100 and may be
configured as an array that is four sensors high and three sensors
wide (i.e., a 4.times.3 array). A second sensor array (not shown)
includes sensors 100 and may be configured as a 4.times.1
array.
[0067] The first sensor array is associated with a filter array
1402 as illustrated. As shown in FIG. 14B, the filter array 1402
includes filter positions 1406A-1406L, although it is understood
that the filter positions may be clear. For example, each filter
position 1406A-1406L represents a position over a sensor that
contains a visible light filter, a clear layer, or no layer at all,
depending on the manufacturing process used to create the device
1400 and the desired configuration of the device 1400. The
previously described IR blocking filter 306 is positioned under the
filter array 1402. The second sensor array is associated with a
filter array 1404, which includes filter positions 1408A-1408D. As
with the filter array 1402, each filter 1408A-1408D of the filter
array 1404 represents a position over a sensor that contains a
visible light filter, a clear layer, or no layer at all. The filter
array 1404 does not have a corresponding IR blocking filter
306.
[0068] Referring specifically to FIG. 14C, a specific embodiment of
the filter arrays 1402 and 1404 of the device 1400 is illustrated.
In the present example, the filter positions 1406A-1406L are
associated with a color, with "G" indicating a green filter, "B"
indicating a blue filter, "R" indicating a red filter, and "C"
representing a position that is clear. It is understood that the
illustrated arrangement and color selections are for purposes of
example only and may be rearranged in many different ways.
Furthermore, one or more of the filter positions 1406A-1406L may
represent a filter stack having multiple filters arranged
vertically.
[0069] The filter positions 1408A-1408D are associated with "C/VL"
which represents that the position is either clear or has a visible
light filter associated therewith. The underlying sensors may be
used for IR detection applications, such as proximity sensing or
motion detection. Because the IR blocking filter 1504 does not
cover the filter array 1404, the underlying sensors may receive
more IR light than those underlying the filter array 1402.
[0070] Referring to FIG. 14D, one embodiment of a semiconductor
device 1412 is illustrated in a perspective view. The device 1412
may be an alternate embodiment of the device 1400 of FIG. 14A. In
the present example, the IR blocking filter 306 is positioned over
the filter array 1402, rather than under the filter array as
illustrated in FIG. 14A.
[0071] It is understood that additional layers may be present on
the devices 1400 and/or 1412, such as the layer 304 and/or sealant
layer 308 of FIG. 3. Furthermore, various metal traces and other
components may be present that are not shown. In some embodiments,
circuitry may be present for performing compensation processes such
as those described in previously incorporated U.S. Pat. No.
6,596,981 and U.S. patent application Ser. No. 12/425,530.
[0072] Referring to FIG. 15, one embodiment of a method 1500 is
illustrated that may be used to combine IR filtering with
post-detection compensation. The method 1500 may be used with the
various embodiments of semiconductor devices and/or ICs described
previously, as well as other embodiments not explicitly described
herein. For example, the method 1500 may be used with any light
detecting device having IR filtering and post-detection
compensation capabilities. The post-detection compensation process
may be used for many different purposes, such as compensation for
an IR light component that was not entirely filtered out prior to
detection in order to more accurately identify an approximate
photopic response.
[0073] In step 1502, a semiconductor device having first and second
optoelectronic sensors (e.g., the sensors 100) receives light
having an IR light component and a visible light component. For
example, the receiving may occur when the light strikes an outer
surface of an upper filter layer or another part of the
semiconductor device. It is understood that the sensors may also
detect other wavelengths (e.g., UV light) that form part of the
received light, but these additional wavelengths are ignored in the
present example. In other embodiments, the method 1500 may account
for UV wavelengths through filtering to remove some or all of the
UV light and/or through post-detection compensation.
[0074] In step 1504, the received light passes through an IR
blocking filter (e.g., the IR blocking filter 306). The IR blocking
filter filters a portion of the IR light component from the
received light. This excludes the filtered portion of the IR light
from detection by the first and second optoelectronic sensors. In
step 506, the received light passes through a visible light filter
(e.g., the visible light filter 402) either before or after it
passes through the IR blocking filter. The visible light filter
filters a portion of the visible light component to exclude a first
set of visible light wavelengths from detection by the first
optoelectronic sensor. The first set of visible light wavelengths
is not filtered for the second optoelectronic sensor.
[0075] In step 1508, first and second sensor responses are
generated by the first and second optoelectronic sensors. The first
and second sensor responses represent the received light detected
by the first and second optoelectronic sensors after the IR light
portion and the first set of visible light wavelengths are
filtered. For example, each of the first and second responses may
be a photocurrent generated by wells forming the first and second
optoelectronic sensors. In step 510, at least one calculation is
performed based on the first and second sensor responses to
compensate for IR light remaining after filtering the IR light
portion. For example, the compensation calculation may be performed
as described in previously incorporated U.S. Pat. No. 6,596,981
and/or U.S. patent application Ser. No. 12/425,530.
[0076] In other embodiments, a third sensor may be used to detect
the received light without IR filtering. Such a sensor may be used
to generate a response for purposes such as IR compensation,
proximity sensing, motion detection, and/or other applications that
may benefit from receiving a stronger IR light component than the
first and second sensors.
[0077] Referring to FIG. 16, one embodiment of a method 1600 is
illustrated that may be used to combine IR filtering with
post-detection compensation. The method 1600 may be used with the
various embodiments of semiconductor devices and/or ICs described
previously, as well as other embodiments not explicitly described
herein. For example, the method 1600 may be used with any device
having IR filtering and post-detection compensation capabilities.
The post-detection compensation process may be used for many
different purposes, such as compensation for an IR light component
that was not filtered out prior to detection in order to more
accurately identify an approximate photopic response.
[0078] In step 1602, an IR blocking filter (e.g., the IR blocking
filter 306) may be provided. The IR blocking filter is configured
to block a first portion of IR light and to let a second portion of
the IR light pass through. The IR blocking filter is positioned
over first and second optoelectronic sensors to block the first
portion of IR light from reaching the first and second
optoelectronic sensors. In step 1604, a visible light filter (e.g.,
the visible light filter 402) may be provided. The visible light
filter is configured to block a first portion of visible light and
to let a second portion of the visible light pass through. The
visible light filter is positioned over the first optoelectronic
sensor to block the first portion of visible light from reaching
the first optoelectronic sensor and is not positioned over the
second optoelectronic sensor.
[0079] In step 1606, a first response is obtained from the first
optoelectronic sensor. The first response represents at least part
of the second portion of the visible light and at least part of the
second portion of the IR light detected by the first optoelectronic
sensor. In step 1608, a second response is obtained from the second
optoelectronic sensor. The second response represents at least part
of the first and second portions of the visible light and at least
part of the second portion of the IR light detected by the second
optoelectronic sensor. In step 1610, compensation is performed for
the IR light in the first and second responses to approximate a
photopic response.
[0080] It will be appreciated by those skilled in the art having
the benefit of this disclosure that this method and device for an
optoelectronic sensor with an IR blocking filter with compensation
processing provides improved detection functionality. It should be
understood that the drawings and detailed description herein are to
be regarded in an illustrative rather than a restrictive manner,
and are not intended to be limiting to the particular forms and
examples disclosed. On the contrary, included are any further
modifications, changes, rearrangements, substitutions,
alternatives, design choices, and embodiments apparent to those of
ordinary skill in the art, without departing from the spirit and
scope hereof, as defined by the following claims. Thus, it is
intended that the following claims be interpreted to embrace all
such further modifications, changes, rearrangements, substitutions,
alternatives, design choices, and embodiments.
* * * * *