U.S. patent application number 12/979658 was filed with the patent office on 2012-06-28 for imprint template fabrication and repair based on directed block copolymer assembly.
Invention is credited to MICHAEL FELDBAUM, YAUTZONG HSU, WEI HU, DAVID KUO, KIM YANG LEE, RENE JOHANNES MARINUS VAN DE VEERDONK, HONGYING WANG, SHUAIGANG XIAO, HENRY YANG, XIAOMIN YANG, ZHAONING YU.
Application Number | 20120164389 12/979658 |
Document ID | / |
Family ID | 46317555 |
Filed Date | 2012-06-28 |
United States Patent
Application |
20120164389 |
Kind Code |
A1 |
YANG; XIAOMIN ; et
al. |
June 28, 2012 |
IMPRINT TEMPLATE FABRICATION AND REPAIR BASED ON DIRECTED BLOCK
COPOLYMER ASSEMBLY
Abstract
Imprinted apparatuses, such as Bit-Patterned Media (BPM)
templates, Discrete Track Recording (DTR) templates,
semiconductors, and photonic devices are disclosed. Methods of
fabricating imprinted apparatuses using a combination of patterning
and block copolymer (BCP) self-assembly techniques are also
disclosed.
Inventors: |
YANG; XIAOMIN; (Livermore,
CA) ; YU; ZHAONING; (Palo Alto, CA) ; LEE; KIM
YANG; (FREMONT, CA) ; FELDBAUM; MICHAEL; (San
Jose, CA) ; HSU; YAUTZONG; (FREMONT, CA) ; HU;
WEI; (Chandler, CA) ; XIAO; SHUAIGANG;
(FREMONT, CA) ; YANG; HENRY; (SAN JOSE, CA)
; WANG; HONGYING; (FREMONT, CA) ; VAN DE VEERDONK;
RENE JOHANNES MARINUS; (PLEASANTON, CA) ; KUO;
DAVID; (PALO ALTO, CA) |
Family ID: |
46317555 |
Appl. No.: |
12/979658 |
Filed: |
December 28, 2010 |
Current U.S.
Class: |
428/172 ; 216/58;
264/220 |
Current CPC
Class: |
B82Y 10/00 20130101;
G03F 7/2059 20130101; B32B 27/302 20130101; B32B 2457/14 20130101;
H01L 21/3065 20130101; G03F 7/40 20130101; B32B 27/308 20130101;
B81C 2201/0149 20130101; G11B 5/855 20130101; Y10T 428/24612
20150115; B81C 1/00031 20130101; B32B 27/283 20130101; H01L 21/0274
20130101; B32B 3/30 20130101; G03F 7/165 20130101; C23F 4/00
20130101; G03F 7/2022 20130101; H01L 21/02112 20130101; G03F 7/0002
20130101; B82Y 40/00 20130101; G03F 7/0035 20130101; B05D 1/005
20130101; B32B 27/36 20130101; G03F 7/203 20130101 |
Class at
Publication: |
428/172 ;
264/220; 216/58 |
International
Class: |
B32B 3/30 20060101
B32B003/30; B32B 18/00 20060101 B32B018/00; B29C 59/02 20060101
B29C059/02; B29C 33/38 20060101 B29C033/38; C23F 1/00 20060101
C23F001/00 |
Claims
1. A method comprising: forming a first pattern on a first
substrate; transferring the first pattern from the first substrate
to a second substrate; and performing block copolymer self-assembly
on the second substrate having the first pattern thereon, forming a
second pattern.
2. The method of claim 1, wherein the first pattern is formed on
the first substrate by lithography.
3. The method of claim 2, wherein the lithography comprises:
depositing a mask layer on said first substrate; and forming said
first pattern on said first substrate.
4. The method of claim 1, wherein the first pattern has a density
of about 250 Gdpsi or lower.
5. The method of claim 1, wherein the block copolymer self-assembly
comprises: coating the second substrate with a block copolymer;
removing one block from the block copolymer; and transferring the
pattern from a remaining block of the block copolymer to said
second substrate.
6. The method of claim 1, wherein said transferring the pattern and
said performing block copolymer self assembly are repeated.
7. The method of claim 1, wherein the block copolymer self-assembly
comprises: coating the second substrate with a block copolymer,
removing one block from the block copolymer, depositing a mask on
the remaining block of the block copolymer, transferring the
pattern from the remaining block of the block copolymer to the
second substrate, and removing the mask.
8. The method of claim 7, wherein the block copolymer self-assembly
increases the density of the second pattern relative to the density
of the first pattern.
9. The method of claim 7, wherein the block copolymer self assembly
reduces the number of dots missing from the second pattern relative
to the number of dots missing from the first pattern.
10. The method of claim 7, wherein the mask removal comprises:
removing a layer of the mask from an upper surface of the remaining
block of the block copolymer, removing a layer of the mask from a
side wall of the remaining block of the block copolymer, and
removing the remaining block of the block copolymer from the second
substrate.
11. The method of claim 10, wherein the mask is removed from the
upper surface using chlorine gas.
12. The method of claim 10, wherein the mask is removed from the
side wall using ion milling.
13. The method of claim 10, wherein the remaining block is removed
by an oxygen dry etching process.
14. The method of claim 1, wherein the second pattern has a density
of about 1 Tbpsi or greater.
15. The method of claim 1, wherein the block copolymer is selected
from the group consisting of
polystyrene-block-polymethylmethacrylate,
polystyrene-block-poly2-vinylpyridine,
polystyrene-block-poly4-vinylpyridine,
polystyrene-block-polyethyleneoxide,
polystyrene-block-polyisoprene, polystyrene-block-butadiene,
polystyrene-block-polydimethylsiloxane,
polyisoprene-block-polydimethylsiloxane,
polyisobutylene-block-polydimethylsiloxane,
polymethylmethacrylate-block-polydimethylsiloxane, and
polystyrene-block-polyferrocenylsilane
16. An apparatus manufactured by a method comprising: forming a
first pattern on a first substrate; transferring the first pattern
from the first substrate to a second substrate; and performing
block copolymer self-assembly on the second substrate having the
first pattern thereon, forming a second pattern.
17. An apparatus, comprising: a patterned substrate having a
pattern density of at least about 1 Tdpsi.
18. The apparatus of claim 17, wherein the substrate comprises
silicon.
19. The apparatus of claim 17, wherein the substrate comprises
quartz.
20. The apparatus of claim 17, wherein the apparatus comprises a
media template.
21. The apparatus of claim 17, wherein comprises a
semiconductor.
22. The apparatus of claim 17, wherein the apparatus comprises a
photonic device.
Description
FIELD
[0001] The present disclosure relates generally to imprint template
fabrication and repair.
BACKGROUND
[0002] In fabricating media for hard disk drives ("HDD"), bit
patterned media ("BPM") are used in the storage industry because of
their high storage capacity. The storage capacity of BPM depends on
the density of the magnetic islands, or "bits" on the media
substrate surface. As such, research in the area of BPM fabrication
has mainly been devoted to creating consistent and uniform patterns
of bits on a BPM substrate.
[0003] As the resolution and pattern density of the BPM increases,
an issue may arise regarding how to correct imperfections in the
BPM template, such as missing and connected bits. Cr lift-off is
another problem encountered in high-density BPM template
fabrication.
[0004] Accordingly, there is a need in the art for BPM templates
having high density patterns, and methods for fabricating them,
particularly for those BPM having a density greater than 1 Tdpsi.
There is also a need for methods of fabricating BPM templates using
a combination of lithography and self-assembly techniques.
SUMMARY
[0005] In one aspect of the disclosure, a method includes forming a
first pattern on a first substrate, transferring the pattern from
the first substrate to a second substrate to form a patterned
second substrate, and performing block copolymer self-assembly on
the patterned second substrate.
[0006] In another aspect of the disclosure, an apparatus is
manufactured by a method. The method includes forming a first
pattern on a first substrate, transferring the first pattern from
the first substrate to a second substrate, and performing block
copolymer self-assembly on the second substrate having the first
pattern thereon, forming a second pattern.
[0007] In a further aspect of the disclosure, an apparatus includes
a patterned substrate having a pattern density of at least about 1
Tdpsi.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] FIG. 1 is a flow chart depicting an example of a process
flow for fabricating a patterned apparatus.
[0009] FIGS. 2A-2G are schematic diagrams depicting an example of a
process flow including a BCP self-assembly process.
DETAILED DESCRIPTION
[0010] Various concepts are described more fully hereinafter with
reference to the accompanying drawings. These concepts, however,
may be embodied in many different forms and should not be construed
as being limited by any specific structure or process presented in
this disclosure. Rather, the specific details presented throughout
this disclosure are provided so that the disclosure will be
thorough and complete, and will fully convey the scope of these
concepts to those skilled in the art. However, it will be apparent
to those skilled in the art that the various concepts presented in
this disclosure may be practiced without these specific details. In
some instances, well-known aspects of the disclosure may be shown
in block diagram form in order to avoid obscuring the various
concepts presented throughout this disclosure.
[0011] Various apparatuses having high resolution patterns, such as
Bit-Patterned Media (BPM) templates, semiconductors, and photonic
devices will be presented, as well as methods for achieving high
resolution patterns using a combination of patterning and
self-assembly techniques. Various methods for integrating
patterning techniques with block copolymers may be used to create
nanopatterns, which may have a bit density greater than 1 Tdpsi.
The various apparatuses produced using these methods may exhibit
optimized pattern density, optimized pattern accuracy, or both,
when compared to apparatuses produced using other methods. In some
cases, pattern densities may be achieved using these methods that
are from about 1.1 to about 10 times more dense than apparatuses
produced using other systems and methods, where pattern density is
measured in dots per square inch (dpsi). In other cases, pattern
accuracy may be achieved using these methods that are from about
1.1 to about 10 times more accurate than apparatuses produced using
others methods, where pattern accuracy is measured in defects per
square inch.
[0012] Various methods are presented in this disclosure for
integrating patterning techniques with self-assembly techniques in
order to create apparatuses, such as a BPM template, a
semiconductor, or a photonic device. A patterned BPM template
substrate may then be used as a master template for direct
fabrication of other patterned media, including daughter templates
and BPM.
[0013] In order to meet the demands of BPM and DTR media
manufacturing, additional specifications may be addressed beyond
pattern resolution. Methods incorporating self-assembly, such as
block copolymer self-assembly, may provide high resolution and
acceptable throughput levels, while providing greater reliability,
fewer defects in long-range ordering, all without being dependent
on e-beam lithography. This may be advantageous because lithography
techniques, such as e-beam lithography, typically use lower
throughput in order to achieve large areas of dense patterning at
acceptable resolutions.
[0014] The methods may be used to form a patterned substrate by
conducting lithography to form a pattern on a substrate, and
conducting block-copolymer self-assembly to provide higher
resolution and greater accuracy to the pattern. The methods may be
used to form a pattern on all or a portion of the substrate.
[0015] The methods may be performed by lithography techniques in
which a mask layer is deposited on the substrate; and a first
pattern is formed on the substrate. Some methods further provide a
chemical affinity layer on the substrate before conducting
block-copolymer self-assembly techniques. The block-copolymer
self-assembly comprises coating the substrate with a block
copolymer, removing one block from the block copolymer, and
transferring the pattern from the remaining block of the block
copolymer to the substrate.
[0016] Various aspects of these methods are illustrated in FIG. 1,
which is a flow diagram depicting a method for patterning a
substrate using lithography and BCP deposition. The methods are
further described below.
[0017] In block 102, a first substrate is patterned, for example,
by using lithography techniques. The first substrate may be a
silicon or quartz template, or any other substrate suitable for use
as a BPM template. The patterning technique may be selected from
techniques such as optical lithography (e.g., DUV), advanced
lithography (e.g., e-beam lithography, EUV, or imprint
lithography), or any other patterning techniques known to those
skilled in the art.
[0018] In block 104, the pattern formed in block 102 is transferred
from the first substrate to a second substrate. The second
substrate may be a silicon or quartz template, or any other
substrate suitable for use as a BPM template. The transfer may be
carried out using lithography techniques, such as imprint
lithography (e.g., UV imprint lithography).
[0019] In blocks 106 and 108, a BCP self-assembly process is
performed on the second substrate to provide increased pattern
density and/or optimized pattern quality (e.g., by replacing
missing dots in the pattern, and/or reducing the number of
imperfect dots) by using a multiplication factor k. When k=1,
pattern rectification is provided. When k>1 (e.g., k=2 such that
2.times.2=4), density multiplication is provided (e.g., 250
Gdpsi.times.4=1 Tdpsi). The BCP self-assembly process may be
carried out as shown in FIG. 2, as further described below.
[0020] In FIG. 2A, pre-pattern marks are imprinted on the substrate
using a resist pattern from a low density template (e.g., a 250
Gbpsi template). The resist pattern guides the application of the
BCP film. The imprinted resist pattern may have a thickness ranging
from about 5 nm to about 50 nm, preferably from about 5 nm to about
20 nm, and more preferably from about 10 nm to about 20 nm. After
the resist pattern is imprinted on the substrate, an optional
descumming process may be performed.
[0021] In FIG. 2B, a BCP film is provided on the imprinted
substrate, and may be annealed. The BCP film may be applied by any
suitable technique, including spin coating. Annealing may be
conducted by carrying out thermal annealing, for from about 30
minutes to about 24 hours, at a temperature of from about
165.degree. C. to about 220.degree. C. When a lower temperature is
used, annealing may be carried out for a longer time; conversely,
when a higher temperature is used, annealing may be carried out for
a shorter time. The annealing process may be used to promote
self-assembly of the BCP, which may be further facilitated by the
addition of an optional chemical affinity layer, such as a
polystyrene brush layer such as a hydroxy terminated polystyrene,
including mono-hydroxyl-terminated polystyrene, hydroxy terminated
poly(4-t-butyl styrene) and diphenylmethyl-ol terminated
polystyrene. The polystyrene brush layer may also comprise a
neutral polymer that promotes BCP self assembly. The BCP film may
range in thickness from about 30 to about 70 nm.
[0022] The BCP used for the film may be any BCP. Examples of BCP,
include, but are not limited to, BCP that is used in the methods is
comprised of at least two constituent units, structural units, or
"blocks," herein termed "block A" and "block B." Use of the
singular "block A" or "block B" also includes use of plural "blocks
A" and "blocks B." Block A and block B may be organic or inorganic,
or block A may be organic, and block B inorganic, or block A may be
inorganic and block B organic. Preferably, block A and block B are
immiscible. The block copolymer formed by block A and block B is
preferably named using the convention polyA-block-polyB.
[0023] The block copolymers used in the methods may be selected
from polystyrene-block-polymethylmethacrylate (PS-b-PMMA),
polystyrene-block-poly2-vinylpyridine,
polystyrene-block-poly4-vinylpyridine,
polystyrene-block-polyethyleneoxide,
polystyrene-block-polyisoprene, polystyrene-block-butadiene,
polystyrene-block-polydimethylsiloxane (PS-b-PDMS),
polyisoprene-block-polydimethylsiloxane,
polymethylmethacrylate-block-polydimethylsiloxane,
polyisobutylene-block-polydimethylsiloxane, or
polystyrene-block-polyferrocenylsilane. A person of ordinary skill
in the art will appreciate that the methods described herein may be
varied depending upon the chemical characteristics of the BCP
selected. One will appreciate that selection of the BCP may also
depend upon the target pattern to be created using the BCP. For
example, the topographical pattern left by the imprinting blocks
described below may determine the chosen BCP, since certain BCP
blocks may correlate better with certain topographical pattern
features and pattern dimensions. One preferred block copolymer is
PS-b-PMMA, although one skilled in the art will appreciate that
other BCPs may be used depending on the predetermined pattern.
[0024] In FIG. 2C, one of the blocks of the BCP is removed, and the
film comprising the remaining block of the block copolymer may be
descummed, if necessary, to prepare the film for mask deposition.
The block may be removed by a chemical process, such as by exposing
the film to UV light, followed by a wet process using acetic acid.
Alternatively, the block may be removed by an O.sub.2 dry etching
process. If descumming is performed, it may be carried out using,
for example, O.sub.2 dry descumming, O.sub.2+ argon descumming, or
CO.sub.2 reactive ion beam aging (RIBE) descumming. When performed,
descumming may also remove contaminants from the substrate.
[0025] In FIG. 2D, a mask layer is deposited on the film comprising
the remaining block of the block copolymer. The mask layer may be a
hard mask layer, such as a chromium layer (Cr), a tantalum layer
(Ta), a carbon layer (C), or an aluminum layer (Al). The mask layer
may be from about 3 nm to about 10 nm thick, preferably from about
4 nm to about 8 nm thick, and more preferably from about 5 to about
6 nm thick.
[0026] In FIG. 2E, a dry lift-off of the mask layer is performed as
follows: (1) The top layer of the mask (e.g., Cr) is first removed.
This may be performed, for example, by an RIE process using
Cl.sub.2 gas. (2) The mask layer deposited on the sidewalls formed
during the mask deposition process is then removed by using
high-angle ion milling, which may be carried out at 70.degree. C.
using an inert gas, such as argon. (3) The remaining block of the
block copolymer is finally removed from the substrate. This may be
performed, for example, by using an O.sub.2 dry RIE etching
process.
[0027] In FIG. 2F, the resulting pattern is transferred to the
substrate, for example, by etching. A RIE dry etching process may
be used.
[0028] In FIG. 2G any residual mask is removed. The mask may be
removed using a wet process, such as by using a Cr etchant, and
then the etched template may optionally be cleaned.
[0029] Referring again to FIG. 1, in block 110, following
completion of the BCP process and pattern transfer, the second
substrate may be inspected to determine if the pattern quality and
density specifications are met. If yes, then the process is
complete. If not, then the process can proceed to block 112.
[0030] In block 112, the pattern may optionally be transferred from
second substrate to a third substrate using imprint lithography as
described above in block 104, and a BCP self-assembly process may
optionally be performed on the third substrate, as described above
in blocks 106 and 108. The process of repeating the pattern
transfer and block copolymer self assembly process may be repeated
multiple times in order to provide optimized pattern density,
optimized pattern accuracy, or both.
[0031] One will appreciate that the processes illustrated in FIGS.
1 and 2 and described herein may vary according to the needs and
uses of the predetermined template. The method may provide
optimized quality to nanostructures by increasing pattern density
and/or improving pattern quality (e.g., replacing missing dots,
correcting deformed and/or joined dots). The optimized pattern
density and/or optimized pattern quality may be provided by
repeating the blocks of transferring the pattern from one substrate
to a new substrate, and performing BCP self-assembly on the new
substrate onto which the pattern was transferred. These blocks of
transferring the pattern to a new substrate and conducting BCP
self-assembly techniques may be repeated once, twice, or as many
times as necessary to achieve a particular predetermined density
and/or pattern quality level. The method may also reduce or
eliminate the problem of lift-off of the mask layer through use of
the dry lift-off process described in FIG. 2E.
[0032] The substrate patterning methods incorporating BCP
self-assembly techniques may be used to fabricate templates,
increase the density of patterns provided on templates, and/or to
repair defects in patterns provided on templates.
[0033] The methods described herein are not limited to BPM-related
applications. In principle, they can be used for many other
applications in which high-resolution patterns are desirable,
particularly periodic dot or line patterns.
[0034] The previous description is provided to enable any person
skilled in the art to practice the various aspects described
herein. Various modifications to these aspects will be readily
apparent to those skilled in the art, and the generic principles
defined herein may be applied to other aspects. Thus, the claims
are not intended to be limited to the aspects shown herein, but is
to be accorded the full scope consistent with the language of the
claims, wherein reference to an element in the singular is not
intended to mean "one and only one" unless specifically so stated,
but rather "one or more." Unless specifically stated otherwise, the
term "some" refers to one or more. A phrase referring to "at least
one of" a list of items refers to any combination of those items,
including single members. All structural and functional equivalents
to the elements of the various aspects described throughout this
disclosure that are known or later come to be known to those of
ordinary skill in the art are expressly incorporated herein by
reference and are intended to be encompassed by the claims.
Moreover, nothing disclosed herein is intended to be dedicated to
the public regardless of whether such disclosure is explicitly
recited in the claims. No claim element is to be construed under
the provisions of 35 U.S.C. .sctn.112, sixth paragraph, unless the
element is expressly recited using the phrase "means for" or, in
the case of a method claim, the element is recited using the phrase
"step for."
* * * * *