U.S. patent application number 13/384694 was filed with the patent office on 2012-05-10 for angular speed sensor.
This patent application is currently assigned to Panasonic Corporation. Invention is credited to Takashi Kawai, Hideyuki Murakami, Kouji Nabetani, Takehiko Ogawa.
Application Number | 20120111111 13/384694 |
Document ID | / |
Family ID | 43498928 |
Filed Date | 2012-05-10 |
United States Patent
Application |
20120111111 |
Kind Code |
A1 |
Murakami; Hideyuki ; et
al. |
May 10, 2012 |
ANGULAR SPEED SENSOR
Abstract
An angular velocity sensor includes a vibration, first and
second sensor electrodes generating an electric charge responsive
to an angular velocity applied to the vibration body, first and D/A
converters each outputting at least two levels of an electric
charge, first and second integrator circuits integrating the
electric charge generated by the first and second sensor electrodes
and the electric charges output from the first and second D/A
converters, respectively, a comparator unit comparing output
signals from the first and second integrator circuits, first and
second D/A switching units switching levels of the output signals
from the first and second D/A converters according to a comparison
result of the comparator unit, a first disconnection detecting
switch connected between the first sensor electrode and the first
integrator circuit, a first voltage source for injecting an
electric charge into a point between the first sensor electrode and
the first integrator circuit via the first disconnection detecting
switch, a second disconnection detecting switch connected between
the second sensor electrode and the second integrator circuit, and
a second voltage source for injecting an electric charge into a
point between the second sensor electrode and the second integrator
circuit via the second disconnection detecting switch. This angular
velocity sensor has a high reliability and performs stable
operation even if ambient environment changes.
Inventors: |
Murakami; Hideyuki; (Fukui,
JP) ; Kawai; Takashi; (Fukui, JP) ; Nabetani;
Kouji; (Fukui, JP) ; Ogawa; Takehiko; (Fukui,
JP) |
Assignee: |
Panasonic Corporation
Osaka
JP
|
Family ID: |
43498928 |
Appl. No.: |
13/384694 |
Filed: |
July 20, 2010 |
PCT Filed: |
July 20, 2010 |
PCT NO: |
PCT/JP2010/004646 |
371 Date: |
January 18, 2012 |
Current U.S.
Class: |
73/504.12 |
Current CPC
Class: |
G01C 19/5614
20130101 |
Class at
Publication: |
73/504.12 |
International
Class: |
G01C 19/56 20120101
G01C019/56 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 22, 2009 |
JP |
2009-170939 |
Oct 13, 2009 |
JP |
2009-236383 |
Claims
1. An angular velocity sensor comprising: a vibration body; a first
sensor electrode provided on the vibration body for generating an
electric charge responsive to an angular velocity applied to the
vibration body; a second sensor electrode provided on the vibration
body for generating an electric charge responsive to the angular
velocity; a driver circuit for vibrating the vibration body at a
predetermined driving frequency; a first D/A converter for
outputting at least two levels of an electric charge; a second D/A
converter for outputting at least two levels of an electric charge;
a first integrator circuit for integrating the electric charge
generated by the first sensor electrode and the electric charge
output from the first D/A converter; a second integrator circuit
for integrating the electric charge generated in the second sensor
electrode and the electric charge output from the second D/A
converter; a comparator unit for comparing an output signal from
the first integrator circuit with an output signal from the second
integrator circuit; a first D/A switching unit for switching a
level of the output signal from the first D/A converter according
to a comparison result of the comparator unit; a second D/A
switching unit for switching a level of the output signal from the
second D/A converter according to the comparison result of the
comparator unit; a first disconnection detecting switch connected
between the first sensor electrode and the first integrator
circuit; a first voltage source for injecting an electric charge
into a point between the first sensor electrode and the first
integrator circuit via the first disconnection detecting switch; a
second disconnection detecting switch connected between the second
sensor electrode and the second integrator circuit; and a second
voltage source for injecting an electric charge to a point between
the second sensor electrode and the second integrator circuit via
the second disconnection detecting switch.
2. The angular velocity sensor of claim 1, wherein the electric
charge injected from the first voltage source and the electric
charge injected from the second voltage source are substantially
equal to each other in absolute value and have polarities opposite
to each other.
3. The angular velocity sensor of claim 1, wherein an absolute
value of a sum of the electric charge generated in the first sensor
electrode and the electric charge injected from the first voltage
source is smaller than an absolute value of the electric charge
injected from the first D/A converter, and wherein an absolute
value of a sum of the electric charge generated in the second
sensor electrode and the electric charge injected from the second
voltage source is smaller than an absolute value of the electric
charge injected from the second D/A converter.
4. An angular velocity sensor comprising: a vibration body; a first
sensor electrode provided on the vibration body for generating an
electric charge responsive to an angular velocity applied to the
vibration body, the first sensor electrode further generating a
first undesired signal; a second sensor electrode provided on the
vibration body for generating an electric charge responsive to the
angular velocity, the second sensor electrode further generating a
second undesired signal; a driver circuit for vibrating the
vibration body at a predetermined driving frequency; a processor
for detecting signals output from the first sensor electrode and
the second sensor electrode; and a cancellation signal output
circuit operable to inject a first cancellation signal into a point
between the first sensor electrode and the processor, the first
cancellation having an amount of an electric charge identical to an
amount of an electric charge of the first undesired signal and
having a polarity opposite to a polarity of the first undesired
signal, and inject a second cancellation signal into a point
between the second sensor electrode and the processor, the second
cancellation signal having an amount of an electric charge
identical to an amount of an electric charge of the second
undesired signal and having a polarity opposite to a polarity of
the second undesired signal.
5. The angular velocity sensor of claim 4, wherein the cancellation
signal output circuit includes a D/A converter circuit for
outputting a sinusoidal wave signal having a frequency identical to
the driving frequency of the vibration body.
6. The angular velocity sensor of claim 4, wherein the cancellation
signal output circuit includes a D/A converter circuit for
outputting a rectangular wave signal having a frequency identical
to the driving frequency of the vibration body.
7. The angular velocity sensor of claim 6, wherein the cancellation
signal output circuit controls a sum of an electric charge output
from the cancellation signal output circuit by adjusting the
rectangular wave in a time-axis direction.
8. The angular velocity sensor of claim 6, wherein a width of the
rectangular wave signal is about 64% of a half cycle of the first
and the second undesired signals, and a sum of the output electric
charge is controlled by adjusting amplitude of the rectangular wave
signal.
9. The angular velocity sensor of claim 4, wherein the processor
includes a first D/A converter for outputting at least two levels
of an electric charge, a second D/A converter for outputting at
least two levels of an electric charge, a first integrator circuit
for integrating the electric charge generated in the first sensor
electrode and the electric charge output from the first D/A
converter, a second integrator circuit for integrating the electric
charge generated in the second sensor electrode and the electric
charge output from the second D/A converter, a comparator unit for
comparing an output signal from the first integrator circuit with
an output signal from the second integrator circuit, a first D/A
switching unit for switching a level of the output signal from the
first D/A converter according to a comparison result of the
comparator unit, and a second D/A switching unit for switching a
level of the output signal from the second D/A converter according
to the comparison result of the comparator unit.
10. An angular velocity sensor comprising: a vibration body; a
first sensor electrode provided on the vibration body for
generating an electric charge responsive to an angular velocity
applied to the vibration body, the first sensor electrode further
generating a first undesired signal; a second sensor electrode
provided on the vibration body for generating an electric charge
responsive to the angular velocity, the second sensor electrode
further generating a second undesired signal; a driver circuit for
vibrating the vibration body at a predetermined driving frequency;
a processor for detecting signals output from the first sensor
electrode and the second sensor electrode; and a cancellation
signal output circuit operable to inject a cancellation signal into
a point between the first sensor electrode and the processor, the
cancellation signal having an amount of an electric charge
identical to an amount of a difference between the first undesired
signal and the second undesired signal and having a polarity
opposite to a polarity of the difference between the first
undesired signal and the second undesired signal.
11. The angular velocity sensor of claim 10, wherein the
cancellation signal output circuit includes a D/A converter circuit
for outputting a sinusoidal wave signal having a identical to the
driving frequency of the vibration body.
12. The angular velocity sensor of claim 10, wherein the
cancellation signal output circuit includes a D/A converter circuit
for outputting a rectangular wave signal having a frequency
identical to the driving frequency of the vibration body.
13. The angular velocity sensor of claim 12, wherein the
cancellation signal output circuit controls a sum of an electric
charge output from the cancellation signal by adjusting the
rectangular wave in a time-axis direction.
14. The angular velocity sensor of claim 10, wherein the processor
includes a first D/A converter for outputting at least two levels
of an electric charge, a second D/A converter for outputting at
least two levels of an electric charge. a first integrator circuit
for integrating the electric charge generated in the first sensor
electrode and the electric charge output from the first D/A
converter, a second integrator circuit for integrating the electric
charge generated in the second sensor electrode and the electric
charge output from the second D/A converter, a comparator unit for
comparing an output signal from the first integrator circuit with
an output signal from the second integrator circuit, a first D/A
switching unit for switching a level of the output signal from the
first D/A converter according to a comparison result of the
comparator unit, and a second D/A switching unit for switching a
level of the output signal from the second D/A converter according
to the comparison result of the comparator unit.
Description
TECHNICAL FIELD
[0001] The present invention relates to an angular velocity sensor
used for controlling attitude of a mobile body, such as an
aircraft, a vehicle, and a navigation system.
BACKGROUND ART
[0002] FIG. 11 is a circuit block diagram of conventional angular
velocity sensor 5001 described in PATENT LITERATURE 1. FIG. 12 is a
block diagram of driver circuit 6 and failure detector circuit 7 of
angular velocity sensor 5001.
[0003] Vibrator 1 made of an H-shaped piezoelectric crystal
includes a pair of driving arms 2 and a pair of sensing arms 3
provided at the opposite side of the pair of driving arms 2.
Sensing arm 3 is provided with a sensor electrode.
[0004] One of driving arms 2 is provided with driving electrode 4,
and the other one of driving arms 2 is provided with drive
detecting electrode 5. Driver circuit 6 is electrically connected
to driving electrode 4 and drive detecting electrode 5 of vibrator
1, and controls them to vibrate vibrator 1 with predetermined
amplitude. Failure detector circuit 7 includes window comparator 8
and BIT logic circuit 9 for monitoring an output signal of window
comparator 8. Detector circuit 10 amplifies an electric charge
output from sensing arm 3 of vibrator 1, converts the charge into a
voltage, and outputs the voltage as an output signal to the outside
from input-output terminal 11.
[0005] An operation of conventional angular velocity sensor 5001
will be described below.
[0006] When an alternating current (AC) voltage is applied to
driving electrode 4 of vibrator 1, vibrator 1 resonates and
generates an electric charge corresponding to vibrating amplitude
of vibrator 1 in drive detecting electrode 5 of vibrator 1. This
electric charge is amplified and adjusted by driver circuit 6, and
is input to driving electrode 4 to vibrate vibrator 1 with the
predetermined amplitude. When an angular velocity .omega. is
applied to vibrator 1 while vibrating, an electric charge is
generated in the sensor electrode provided on the pair of sensing
arms 3. The electric charge generated in this sensor electrode is
converted into an output voltage by detector circuit 10, supplied
through input-output terminal 11, and input as an angular velocity
signal to an external device, such as a computer, which in turn
determines the angular velocity.
[0007] A circuit pattern around the sensor electrode may brake
during an extended period of use. In this case, conventional
angular velocity sensor 5001 outputs a signal which does not
correspond to the angular velocity.
[0008] FIGS. 13 and 14 are a side view and sectional views of
another conventional angular velocity sensor 5002 disclosed in
PATENT LITERATURE 2. FIG. 15 is a circuit block diagram of angular
velocity sensor 5002.
[0009] Vibrator 101 made of a piezoelectric mono-crystal includes
vibration body 102, vibration body 103 in juxtaposition with
vibration body 102, and connecting arm 104 connecting between
vibration bodies 102 and 103. Vibration body 102 is provided with
four driving electrodes 105. Vibration body 103 is also provided
with two detecting electrodes 106. Drive detector circuit 107
includes power supply 108, offset adjusting circuit 109, driver
circuit 110, synchronous detector circuit 111, and differential
amplifier circuit 112.
[0010] An operation of conventional angular velocity sensor 5002
will be described below.
[0011] When an alternating current (AC) voltage is applied from
driver circuit 110 to driving electrodes 105 of vibration body 102,
vibrator 101 vibrates due to resonance, and the vibration is
transmitted to second vibration body 103 via connecting arm 104.
When an angular velocity is applied to vibrator 101 while
vibrating, detecting electrodes 106 provided on vibration body 103
generate an output signal corresponding to the angular velocity.
This output signal is supplied to synchronous detector circuit 111
through a phase adjusting circuit. Synchronous detector circuit 111
performs synchronous detection on this output signal by using the
driving signal output from driver circuit 110 as a reference
signal, and supplies it to differential amplifier circuit 112 via a
smoothing circuit. Offset adjusting circuit 109 receives a voltage
from power supply 108, and outputs an offset voltage. Differential
amplifier circuit 112 amplifies a difference between the offset
voltage and the voltage output from the smoothing circuit, and
produces two outputs 191 and 192. A difference in the potential
between outputs 191 and 192 is used to detect the angular
velocity.
[0012] FIG. 16 illustrates waveforms of the driving signal applied
to driving electrodes 105 and a detected signal output from
detecting electrodes 106. Detecting electrodes 106 generate an
undesired signal even when no angular velocity is applied to
vibrator 101 if there is a mechanically induced leakage due to
unbalanced mass of vibrator 101 or an electro-mechanically coupled
leakage attributed to a positional deviation of any of driving
electrodes 105 and detecting electrodes 106. More specifically, the
detected signal contains electrostatic leakage L101 due to
electrostatic capacitances among driving electrodes 105 and
detecting electrodes 106, and aggregate leakage L102 resulting from
combination of the mechanically induced leakage and the
electro-mechanically coupled leakage discussed above.
[0013] FIGS. 17A and 17B illustrate a cross-sectional view and a
side view respectively of vibrator 101. In conventional angular
velocity sensor 5002, a bottom portion of vibration body 103 is
trimmed in order to reduce the mechanically induced leakage and the
electro-mechanically coupled leakage of vibrator 101. This changes
the mass balance of vibrator 101 to eliminate the undesired signal
generated by angular velocity sensor 5002.
[0014] When vibrator 101 has a small size according to a small size
of angular velocity sensor 5002, vibrator 101 tends to damage in
the process of trimming the bottom portion of vibration body 103,
and this makes it not feasible to eliminate the undesired signal
generated from angular velocity sensor 5002.
CITATION LIST
Patent Literature
[0015] PATENT LITERATURE 1: Japanese Patent Laid-Open Publication
No. 2002-174521 [0016] PATENT LITERATURE 2: Japanese Patent
Laid-Open Publication No. 10-73437
SUMMARY OF THE INVENTION
[0017] An angular velocity sensor includes a vibration, first and
second sensor electrodes generating an electric charge responsive
to an angular velocity applied to the vibration body, first and D/A
converters each outputting at least two levels of an electric
charge, first and second integrator circuits integrating the
electric charge generated by the first and second sensor electrodes
and the electric charges output from the first and second D/A
converters, respectively, a comparator unit comparing output
signals from the first and second integrator circuits, first and
second D/A switching units switching levels of the output signals
from the first and second D/A converters according to a comparison
result of the comparator unit, a first disconnection detecting
switch connected between the first sensor electrode and the first
integrator circuit, a first voltage source for injecting an
electric charge into a point between the first sensor electrode and
the first integrator circuit via the first disconnection detecting
switch, a second disconnection detecting switch connected between
the second sensor electrode and the second integrator circuit, and
a second voltage source for injecting an electric charge into a
point between the second sensor electrode and the second integrator
circuit via the second disconnection detecting switch.
[0018] This angular velocity sensor has a high reliability and
performs stable operation even if ambient environment changes.
BRIEF DESCRIPTION OF DRAWINGS
[0019] FIG. 1 is a circuit diagram of an angular velocity sensor
according to Exemplary Embodiment 1 of the present invention.
[0020] FIG. 2 illustrates waveforms of timing signals of the
angular velocity sensor according to Embodiment 1.
[0021] FIG. 3 illustrates signals of the angular velocity sensor
according to Embodiment 1.
[0022] FIG. 4 is a circuit diagram of an angular velocity sensor
according to Exemplary Embodiment 2 of the invention.
[0023] FIG. 5 illustrates signals of the angular velocity sensor
according to Embodiment 2.
[0024] FIG. 6 illustrates signals of the angular velocity sensor
according to Embodiment 2.
[0025] FIG. 7 illustrates cancellation signals of the angular
velocity sensor according to Embodiment 2.
[0026] FIG. 8A illustrates other cancellation signals of the
angular velocity sensor according to Embodiment 2.
[0027] FIG. 8B illustrates further cancellation signals of the
angular velocity sensor according to Embodiment 1.
[0028] FIG. 9 illustrates further cancellation signals of the
angular velocity sensor according to Embodiment 2.
[0029] FIG. 10 illustrates further cancellation signals of the
angular velocity sensor according to Embodiment 2.
[0030] FIG. 11 is a circuit block diagram of a conventional angular
velocity sensor.
[0031] FIG. 12 is a block diagram of a driver circuit and a failure
detector circuit of the angular velocity sensor shown in FIG.
11.
[0032] FIG. 13 is a side view of another conventional angular
velocity sensor.
[0033] FIG. 14 is a sectional view of the angular velocity sensor
shown in FIG. 13.
[0034] FIG. 15 is a circuit block diagram of the angular velocity
sensor shown in FIG. 13.
[0035] FIG. 16 illustrates an undesired signal in the angular
velocity sensor shown in FIG. 13.
[0036] FIG. 17A is a cross-sectional view of the angular velocity
sensor shown in FIG. 13.
[0037] FIG. 17B is a side view of the angular velocity sensor shown
in FIG. 13.
DETAIL DESCRIPTION OF PREFERRED EMBODIMENTS
Exemplary Embodiment 1
[0038] FIG. 1 is a circuit diagram of angular velocity sensor 1001
according to Exemplary Embodiment 1 of the present invention.
[0039] Sensor element 30 includes vibration body 31, driving
electrode 32 including a piezoelectric element for vibrating
vibration body 31, monitor electrode 33 having a piezoelectric
element for generating an electric charge responsive to a vibration
of vibration body 31, and sensor electrodes 34 and 35 having a
piezoelectric element for generating electric charges when an
angular velocity is applied to sensor element 30. Sensor electrodes
34 and 35 generate the electric charges having polarities opposite
to each other. Charge amplifier 36 amplifies the electric charge
output from monitor electrode 33 to a level of predetermined
amplitude, and converts the amplified converted electric charge
into a voltage. Band-pass filter (BPF) 37 outputs a monitor signal
after removing a noise component from the voltage output from
charge amplifier 36. Automatic gain control (AGC) circuit 38
includes a half-wave rectifier and a smoothing circuit, and
generates a direct current (DC) voltage by performing half-wave
rectification and smoothing to the voltage output from band-pass
filter 37. Based on this DC voltage, AGC circuit 38 either
amplifies or attenuates the voltage output from band-pass filter 37
and outputs it. Driving circuit 39 outputs a driving signal to
driving electrode 32 of sensor element 30 based on the voltage
output from AGC circuit 38. Charge amplifier 36, band-pass filter
37, AGC circuit 38 and driving circuit 39 constitute driver circuit
40.
[0040] PLL circuit 41 multiplies a frequency of the voltage output
from band-pass filter 37 of driver circuit 40, time-integrates and
reduces a phase noise of the voltage, and outputs the resulting
voltage. Timing generator circuit 42 multiplies a frequency of the
voltage output from PLL circuit 41, generates and outputs timing
signals .PHI.1 and .PHI.2. PLL circuit 41 and timing generator
circuit 42 constitute timing control circuit 43.
[0041] FIG. 2 illustrates waveforms of timing signals .PHI.1 and
.PHI.2. Timing signals .PHI.1 and .PHI.2 has polarities opposite to
each other. Each of the timing signals has two levels; a high level
and a low level. Timing signal .PHI.2 is at the high level and
timing signal .PHI.1 is at the low level during a period of P2.
[0042] On the other hand, timing signal .PHI.2 is at the low level
and timing signal .PHI.1 is at the high level during a period of
P1. Timing signals .PHI.1 and .PHI.2 define the periods of P1 and
P2 alternately and continuously.
[0043] D/A switching unit 47 switches and selectively outputs
reference voltages V49 and V50 in response to a predetermined
signal. D/A output unit 51 includes capacitor 52, switch 54
connected between one terminal 52B of capacitor 52 and a ground,
and switch 53 connected between the other terminal 52A of capacitor
52 and the ground. The voltage output from D/A switching unit 47 is
input to terminal 52A of capacitor 52. Switches 53 and 54 are
turned on in the period P2 to discharge an electric charge of
capacitor 52. D/A switching unit 47 and D/A output unit 51
constitute D/A converter 48. D/A converter 48 discharges the
electric charge of capacitor 52 and inputs and outputs an electric
charge corresponding to the reference voltage output from D/A
switching unit 47 during the period P1. Switch 55 outputs an output
signal as a current supplied from sensor electrode 34 during the
period P1. The signal output from switch 55 is input to integrator
circuit 56. Integrator circuit 56 includes operational amplifier 57
and capacitor 58 connected between an output terminal and an
inverting input terminal of operational amplifier 57.
[0044] D/A switching unit 59 switches and selectively outputs
reference voltages V60 and V61 in response to a predetermined
signal. D/A output unit 62 includes capacitor 63, switch 64A
connected between one terminal 63A of capacitor 63 and the ground,
and switch 64B connected between the other terminal 63B of
capacitor 63 and the ground. The voltage output from D/A switching
unit 59 is input to terminal 63A of capacitor 63. Switches 64A and
64B are turned on during the period P2 to discharge an electric
charge of capacitor 63. D/A switching unit 59 and D/A output unit
62 constitute D/A converter 66. D/A converter 66 discharges the
electric charge of capacitor 63 and inputs and outputs an electric
charge corresponding to the reference voltage output from D/A
switching unit 59 during the period P2. Switch 65 outputs an output
signal as a current supplied from sensor electrode 35 during the
period P1. The signal output from switch 65 is input to integrator
circuit 67. Integrator circuit 67 includes operational amplifier 68
and capacitor 69 connected between an output terminal and an
inverting input terminal of operational amplifier 68.
[0045] Comparator unit 70 includes comparator 71 and D-type
flip-flop 72. Comparator 71 compares a signal output by integrator
circuit 56 with a signal output from integrator circuit 67, and
outputs a one-bit digital signal consisting of one bit to D-type
flip-flop 72. D-type flip-flop 72 latches the one-bit digital
signal at the beginning of period P1 and outputs a latching signal.
The latched signal is input to D/A switching unit 47 in D/A
converter 48. D/A converter 48 switches reference voltages V49 and
V50. The latched signal is also input to D/A switching unit 59 of
D/A converter 66. D/A converter 66 switches reference voltages V60
and V61. D/A converters 48 and 66, integrator circuits 56 and 67,
and comparator unit 70 constitute .SIGMA.A modulator 73. .SIGMA.A
modulator 73 performs a .SIGMA.A modulation to the electric charges
output from each of sensor electrodes 34 and 35 of sensor element
30 to convert the charge into a one-bit digital signal.
[0046] Correction processor 74 receives the one-bit digital signal
output from flip-flop 72, and performs a corrective operation to
the one-bit digital signal by a substitution process with a
predetermined correction factor. When correction processor 74
receives one-bit digital signals of values "0", "1" and "-1",
correction processor 74 substitutes the signals with multi-bit
digital signals of values "0", "5" and "-5", respectively in the
case that the correction factor is "5". The digital signals output
from correction processor 74 are input to digital filter 75 that
filters the signals to remove noise components of the signals.
Correction processor 74 and digital filter 75 constitute operation
unit 76. Operation unit 76 latches the one-bit digital signals
according to the timing signal .PHI.1, performs the corrective
operation, and filters the signals to output multi-bit digital
signals. Timing control circuit 43, .SIGMA.A modulator 73, and
operation unit 76 constitute a sensor circuit. Voltage source 77
supplies an electric charge corresponding to value "2" to a point
between sensor electrode 34 and integrator circuit 56 via
disconnection detecting switch 78. Voltage source 79 supplies
another electric charge corresponding to value "-2" to a point
between sensor electrode 35 and integrator circuit 67 via
disconnection detecting switch 80. In other words, the electric
charges supplied from voltage sources 77 and 79 have absolute
values substantially equal to each other and have polarities
opposite to each other.
[0047] An operation of angular velocity sensor 1001 according to
Embodiment 1 will be described below. FIG. 3 illustrates waveforms
of signals of angular velocity sensor 1001.
[0048] When an alternating voltage is applied to driving electrode
32 of sensor element 30, vibration body 31 vibrates with a resonant
frequency and generates an electric charge in monitor electrode 33.
The electric charge generated in monitor electrode 33 is input to
charge amplifier 36 of driver circuit 40. The charge amplifier 36
converts the electric charge into an output voltage of a sinusoidal
wave. Band-pass filter 37 removes noise components and extracts
only a resonant frequency component of vibration body 31 from the
output voltage of charge amplifier 36, and outputs signal S37
having a sinusoidal waveform shown in FIG. 3. AGC circuit 38
including a half-wave rectification and smoothing circuit converts
signal S37 into a direct current (DC) signal. When this DC signal
has a large amplitude, AGC circuit 38 sends a signal to driving
circuit 39 to have the output signal of band-pass filter 37
attenuate. AGC circuit 38 sends a signal to driving circuit 39 to
amplify the output signal of band-pass filter 37 when the DC signal
has a small amplitude. Driving circuit 39 is controlled to cause
vibration body 31 to vibrate with a constant amplitude. In timing
control circuit 43, PLL circuit 41 generates a signal by
multiplying a frequency of signal S37. Based on this signal timing,
generator circuit 42 generates timing signals .PHI.1 and .PHI.2
shown in FIGS. 2 and 3. Timing signals .PHI.1 and .PHI.2 are input
to .SIGMA.A modulator 73 and correction processor 74, to determine
switching timing of the switches and latching timing of a latching
circuit.
[0049] When sensor element 30 having a mass m rotates about the
center axis in a longitudinal direction of vibration body 31 at
angular velocity .omega. while vibrating flexibly by an electric
charge corresponding to velocity V in a driving direction D31 shown
in FIG. 1, sensor element 30 produces Coriolis force F expressed as
follows.
[0050] F=2.times.m.times.V.times..omega.
[0051] Coriolis force F generates signals S34 and S35 of electric
currents shown in FIG. 3 in sensor electrodes 34 and 35,
respectively. Since signals S34 and S35 are generated by Coriolis
force F, signals S34 and S35 have sinusoidal waveforms with phases
shifted by 90 degrees from signal S37 generated in monitor
electrode 33. As shown in FIG. 3, signals S34 and S35 are
sinusoidal waves of phases opposite to each other, and in the
relationship of positive polarity signal and negative polarity
signal.
[0052] An operation of .SIGMA.A modulator 73 in this case will be
described below. Timing signals .PHI.1 and .PHI.2 define periods P1
and P2 that repeat continuously and alternately. .SIGMA.A modulator
73 .SIGMA.A-modulates signals S34 and S35 output from sensor
electrodes 34 and 35 according to timing signals .PHI.1 and .PHI.2,
and converts signals S34 and S35 into one-bit digital signals.
[0053] An operation of .SIGMA.A modulator 73 during periods P1 and
P2 will be described below. In the following explanation, a
predetermined angular velocity is applied to sensor element 30 to
rotate sensor element 30 about the center axis thereof so that
signals S34 and S35 having a maximum current corresponding to a
value "8" are generated by sensor electrodes 34 and 35,
respectively.
[0054] Switch 55 is turned on in period P1, and a voltage provided
by the electric charge corresponding to the value "8" generated in
sensor electrode 34 is retained in capacitor 58 of integrator
circuit 56. This voltage of the electric charge retained in
capacitor 58 is input to inverting input terminal 71A of comparator
71 of comparator unit 70. Similarly, the voltage provided by the
electric charge corresponding to the value "-8" generated in sensor
electrode 35 is retained in capacitor 69 of integrator circuit 67.
This voltage of the electric charge retained in capacitor 69 is
input to non-inverting input terminal 71B of comparator 71.
Consequently, one-bit digital signal "1" produced by comparator 71
as a comparison result is input to flip-flop 72, and is latched by
flip-flop 72 at the beginning of period P2. Switches 53 and 54 of
D/A output unit 51 are turned on in period P2, and discharge the
electric charge retained in capacitor 52. Similarly, switches 64A
and 64B of D/A output unit 62 are turned on in period P2, and
discharge the electric charge retained in capacitor 63. The digital
signal "1" latched in flip-flop 72 is input to D/A switching unit
47 of D/A converter 48 in the next period P1, and is switched to
reference voltage V50 that generates an electric charge
corresponding to value "-10". Similarly, the digital signal "1"
latched in flip-flop 72 is input to D/A switching unit 59 of D/A
converter 66 in the next period P1, and is switched to the
reference voltage V60 that generates an electric charge
corresponding to value "10". As a result, an electric charge
equivalent to the electric charge corresponding to the value "-10"
from reference voltage V50 is stored in capacitor 52 of D/A output
unit 51, and is input to integrator circuit 56. Simultaneously, an
electric charge equivalent to the electric charge corresponding to
the value "10" from reference voltage V60 is stored in capacitor 63
of D/A output unit 62, and is input to integrator circuit 67. In
this same period P1, switch 55 is turned on and outputs, to
integrator circuit 56, an electric charge equivalent to the
electric charge corresponding to the value "8" generated in sensor
electrode 34 of sensor element 30. In addition, switch 65 is turned
on and outputs, to integrator circuit 67, an electric charge
equivalent to the electric charge corresponding to the value "8"
generated in sensor electrode 35.
[0055] Accordingly, capacitor 58 of integrator circuit 56 holds an
output signal as an electric charge corresponding to value "6"
which is provided by integrating the sum of electric charge Q34 of
the signal S34 shown in FIG. 3 and the electric charge output from
D/A converter 48, during the period P2. Similarly, capacitor 69 of
integrator circuit 67 holds an output signal as an electric charge
corresponding to value "-6" which is provided by integrating the
sum of electric charge Q35 of the signal S35 and the electric
charge output from D/A converter 66, during the period P2.
Comparator 71 outputs to flip-flop 72 a one-bit digital signal
representing the comparison result between the output signals of
integrator circuits 56 and 67. As a result, the voltage held in
integrator circuit 56 decreases by an amount of electric charge
corresponding to value "2", whereas the voltage held in integrator
circuit 67 increases by the amount of electric charge corresponding
to value "2" every time the above operation is repeated over the
periods P1 and P2. Consequently, comparator unit 70 continues to
output one-bit digital signal of "1" until the voltages held by
integrator circuits 56 and 67 correspond to an electric charge
corresponding to value "0". Then, comparator 71 outputs a one-bit
digital signal of "-1" when the voltage held by integrator circuit
56 becomes equivalent to an electric charge corresponding to value
"-2", and the voltage held in integrator circuit 67 becomes
equivalent to an electric charge corresponding to value "2".
Flip-flop 72 then sends an output signal of value "-1" to D/A
switching units 47 and 59 to have D/A switching units 47 and 59
output a voltage of the electric charge corresponding to value "10"
from reference voltage V49 of D/A converter 48 as well as a voltage
of the electric charge corresponding to value "10" from reference
voltage V61 of D/A converter 66, and their corresponding electric
charges are stored in capacitors 52 and 63, respectively. As a
result, a voltage of the electric charge corresponding to value
"16" is retained in integrator circuit 56, and a voltage of the
electric charge corresponding to value "-16" is retained in
integrator circuit 67. Then, the output voltages of integrator
circuits 56 and 67 change by electric charge corresponding to value
"2", and comparator 71 outputs one-bit digital signal of value "1"
nine times, and then, outputs one-bit digital signal of value "-1"
only once. The one-bit digital signals are output after converted
into multi-bit signals of value "0.8" so that they are detected as
the signals of angular velocity.
[0056] FIG. 3 illustrates undesired signals U34 and U35 generated
in sensor electrodes 34 and 35, respectively. Undesired signals U34
and U35 have the same phases as the monitor signals. Undesired
signal U34 has a phase delayed by 90 degrees from output signal S34
generated in sensor electrode 34, and the undesired signal U35 has
a phase delayed by 90 degrees from output signal S35 generated in
sensor electrode 35. Undesired signals U34 and U35 are integrated
by integrator circuits 56 and 67 in period P1, respectively, and
have values "0", thus being cancelled.
[0057] An operation of angular velocity sensor 1001 according to
Embodiment 1 detecting a disconnection in a circuit around sensor
electrodes 34 and 35 will be described. In this case, no angular
velocity is applied to sensor element 30.
[0058] When disconnection detecting switch 78 is turned on during
period P2, electric charge Q77 corresponding to value "2" is input
from voltage source 77 to sensor electrode 34, as shown in FIG. 3.
Similarly, when disconnection detecting switch 80 is turned on
during period P2, electric charge Q79 corresponding to value "-2"
is input from voltage source 79 to sensor electrode 35. In the
succeeding period P1, the electric charge corresponding to value
"2" is stored in capacitor 58 of integrator circuit 56, and the
electric charge corresponding to value "-2" is stored in capacitor
69 of integrator circuit 67. As a result, comparator 71 outputs a
one-bit digital signal corresponding to value "4" as the compared
result, and flip-flop 72 latches the one-bit digital signal.
[0059] If a disconnection occurs in a circuit pattern around sensor
electrode 34, electric charge Q77 shown in FIG. 3 is not input from
voltage source 77 to sensor electrode 34. This causes comparator 71
to output the electric charge stored in capacitor 69 of integrator
circuit 67 as a compared result, and this one-bit digital signal
corresponding to value "2" is latched by flip-flop 72. If a
disconnection occurs in a circuit pattern around sensor electrode
35, electric charge Q79 shown in FIG. 3 is not input from voltage
source 79 to sensor electrode 35. This causes comparator 71 to
output the electric charge stored in capacitor 58 of integrator
circuit 56 as the compared result, and this one-bit digital signal
corresponding to value "2" is latched by flip-flop 72. If a
disconnection occurs in circuit patterns around both sensor
electrodes 34 and 35, none of the electric charges Q77 and Q79
shown in FIG. 3 is input from voltage sources 77 and 79 to sensor
electrodes 34 and 35, respectively. Comparator 71 hence outputs
one-bit digital signal corresponding to value "0" as a comparison
result, and the one-bit digital signal is latched by flip-flop 72.
Thus, the value of the digital signal output from flip-flop 72 is
monitored while disconnection detecting switches 78 and 80 are
turned on, thereby detecting the disconnection in the circuit
patterns around sensor electrodes 34 and 35.
[0060] As discussed, the electrical charge stored in any of sensor
electrodes 34 and 35 decreases when a circuit pattern around at
least one of sensor electrodes 34 and 35 is disconnected. This
decreases the value of the signal output from comparator unit 70,
and allows the disconnection in the circuit patterns around sensor
electrodes 34 and 35 to be detected. This operation provides
angular velocity sensor 1001 with high reliability which does not
continue to output a signal not corresponding to the angular
velocity even if any conductive pattern is disconnected in circuits
around sensor electrodes 34 and 35.
[0061] Here, the electric charges supplied from voltage sources 77
and 79 are generally equal in their absolute values, but of the
polarities opposite to each other. It is for this reason that the
value of the signal output from comparator unit 70 becomes
approximately one half when a circuit pattern of one of sensor
electrodes 34 and 35 is disconnected, hence allowing the
disconnection to be determined.
[0062] The absolute value of the sum of the electric charge
generated in sensor electrode 34 sue to the Coriolis force
attributed to an angular velocity applied to sensor element 30 and
the electric charge supplied from voltage source 77 is smaller than
the absolute value of the electric charge supplied from D/A
converter 48. In addition, the absolute value of the sum of the
electric charge generated in sensor electrode 35 by the Coriolis
force attributed to the angular velocity applied to sensor element
30 and the electric charge supplied from voltage source 79 is
smaller than the absolute value of the electric charge supplied
from D/A converter 66. For this reason, the electric charges output
from D/A converters 48 and 66 are not saturated with the sum of the
electric charges output from sensor electrodes 34 and 35 and
voltage sources 77 and 79, thereby hence allowing .SIGMA.A
modulator 73 to operate continuously appropriately.
[0063] As discussed, sensor electrodes 34 and 35 are provided on
vibration body 31 and generate electric charges responsive to the
angular velocity applied to vibration body 31. Driver circuit 40
vibrates vibration body 31 at the predetermined driving frequency.
D/A converter 48 outputs at least two levels of electric charges
and reference voltages V49 and V50. D/A converter 66 outputs at
least two levels of electric charges and reference voltages V60 and
V61. Integrator circuit 56 integrates the electric charge generated
by sensor electrode 34 and the electric charge output from D/A
converter 48. Integrator circuit 67 integrates the electric charge
generated by sensor electrode 35 and the electric charge output
from D/A converter 66. Comparator unit 70 compares the output
signal from integrator circuit 56 with the output signal from
integrator circuit 67. D/A switching unit 47 switches the level of
the output signal from D/A converter 66 according to a comparison
result performed by comparator unit 70. D/A switching unit 59
switches the level of the output signal from D/A converter 48
according to the comparison result performed by comparator unit 70.
Disconnection detecting switch 78 is connected between sensor
electrode 34 and integrator circuit 56. Voltage source 77 supplies
an electric charge to a point between sensor electrode 34 and
integrator circuit 56 via disconnection detecting switch 78.
Disconnection detecting switch 80 is connected between sensor
electrode 35 and integrator circuit 67. Voltage source 79 supplies
an electric charge to a point between sensor electrode 35 and
integrator circuit 67 via disconnection detecting switch 80.
Exemplary Embodiment 2
[0064] FIG. 4 is a circuit diagram of angular velocity sensor 1002
according to Exemplary Embodiment 2 of the present invention.
[0065] Sensor element 130 includes vibration body 131, driving
electrode 132 including a piezoelectric element for vibrating
vibration body 131, monitor electrode 133 including a piezoelectric
element for generating an electric charge responsive to vibration
of vibration body 131, and sensor electrodes 134 and 135 including
a piezoelectric element for generating electric charges when an
angular velocity is applied to sensor element 130. Sensor
electrodes 134 and 135 generate the electric charges having
polarities opposite to each other. Charge amplifier 136 amplifies
the electric charge output from monitor electrode 133 to a level of
predetermined amplitude, and converts the charge into a voltage.
Band-pass filter (BPF) 137 outputs a monitor signal after removing
a noise component from the voltage output from charge amplifier
136. Automatic gain control (AGC) circuit 138 includes a half-wave
rectifier and a smoothing circuit, and generates a direct current
(DC) signal by performing a half-wave rectification and a smoothing
to the voltage output from band-pass filter 137. Based on this DC
signal, AGC circuit 138 either amplifies or attenuates the voltage
of band-pass filter 37, and outputs it. Driving circuit 139 outputs
a driving signal to driving electrode 132 of sensor element 130
based on the voltage output from AGC circuit 138. Charge amplifier
136, band-pass filter 137, AGC circuit 138 and driving circuit 139
constitute driver circuit 140.
[0066] PLL circuit 141 multiplies a frequency of the voltage output
from band-pass filter 137 of driver circuit 140, integrates in time
and reduces a phase noise of the voltage, and outputs the resulting
voltage. Timing generator circuit 142 multiplies a frequency of the
voltage output from PLL circuit 141, generates and outputs timing
signals .PHI.1 and .PHI.2. PLL circuit 141 and timing generator
circuit 142 constitute timing control circuit 143.
[0067] FIG. 5 illustrates waveforms of timing signals .PHI.1 and
.PHI.2. Timing signals .PHI.1 and .PHI.2 have polarities opposite
to each other, and each of the timing signals has two values
consisting of a high level and a low level. Timing signal .PHI.2 is
at the high level and timing signal .PHI.1 is at the low level in a
period P102. On the other hand, timing signal .PHI.2 is at the low
level and timing signal .PHI.1 is at the high level in a period
P101. Timing signals .PHI.1 and .PHI.2 define the periods P101 and
P102 alternately and continuously.
[0068] D/A switching unit 147 selectively switches and outputs any
of reference voltages V149 and V150 in response to a predetermined
signal. D/A output unit 151 includes capacitor 152, switch 153
connected between one terminal 152A of capacitor 152 and the
ground, and switch 154 connected between the other terminal 152B of
capacitor 152 and the ground. The voltage output from D/A switching
unit 147 is input to terminal 152A of capacitor 152. Switches 153
and 154 are turned on in the period P102 to discharge an electric
charge stored in capacitor 152. D/A switching unit 147 and D/A
output unit 151 constitute D/A converter 148. D/A converter 148
discharges the electric charge stored in capacitor 152, and inputs
and outputs an electric charge corresponding to the reference
voltage output from D/A switching unit 147 during the period P101.
Switch 155 outputs an output signal as an electric current supplied
from sensor electrode 134 during the period P101. The signal output
from switch 155 is input to integrator circuit 156. Integrator
circuit 156 includes operational amplifier 157 and capacitor 158
connected between an output terminal and an inverting input
terminal of operational amplifier 157.
[0069] D/A switching unit 159 selectively switches and outputs
reference voltages V160 and V161 in response to a predetermined
signal. D/A output unit 162 includes capacitor 163, switch 164A
connected to one terminal 163A of capacitor 163, and switch 164B
connected to the other terminal 163B of capacitor 163. The voltage
output from D/A switching unit 159 is input to terminal 163A of
capacitor 163. Switches 164A and 164B are turned on in the period
102 to discharge an electric charge stored in capacitor 163. D/A
switching unit 159 and D/A output unit 162 constitute D/A converter
166. D/A converter 166 discharges the electric charge stored in
capacitor 163 and inputs and outputs an electric charge
corresponding to the reference voltage output from D/A switching
unit 159 during the period P102. Switch 165 outputs an output
signal as an electric current supplied from sensor electrode 135
during the period P101. The output from second switch 165 is input
to integrator circuit 167. Integrator circuit 167 includes
operational amplifier 168 and capacitor 169 connected between an
output terminal and a non-inverting input terminal of operational
amplifier 168.
[0070] Comparator unit 170 includes comparator 171 and D-type
flip-flop 172. Comparator 171 compares a signal output from
integrator circuit 156 with a signal output from integrator circuit
167, and outputs a one-bit digital signal consisting of one bit to
D-type flip-flop 172. D-type flip-flop 172 latches the one-bit
digital signal at the beginning of period P101 and outputs the
latched signal. The latched signal is input to D/A switching unit
147 of D/A converter 148, and switches reference voltages V149 and
V150. The latched signal is also input to D/A switching unit 159 in
D/A converter 166, and switches reference voltages V160 and V161.
D/A converters 148 and 166, integrator circuits 156 and 167 and
comparator unit 170 constitute processor 173 which is a .SIGMA.A
modulator. Processor 173 .SIGMA.A-modulates and detects the
electric charge output from sensor electrodes 134 and 135 of sensor
element 130 to convert the signal into a one-bit digital signal and
output the one-bit digital signal.
[0071] Correction processor 174 receives the one-bit digital signal
output from flip-flop 172, and performs a corrective operation on
the one-bit digital signal by a substitution process using a
predetermined correction factor. Upon receiving one-bit
differential signals of values "0", "1" and "-1", correction
processor 174 substitutes them with multi-bit digital signals of
values "0", "5" and "-5", respectively, and outputs the multi-bit
digital signals in the case that the correction factor is "5". The
digital signals output from correction processor 174 are input to
digital filter 175 that carries out a filtering process to remove
noise components in the multi-bit digital signals. Correction
processor 174 and digital filter 175 constitute operation unit 176.
Operation unit 176 latches the one-bit digital signals according to
the timing signal .PHI.101, carries out the corrective operation
and the filtering process, and outputs multi-bit digital signals.
Timing control circuit 143, processor 173, and operation unit 176
constitute a sensor circuit.
[0072] Cancellation signal output circuit 177 supplies cancellation
signal C134 to a point between sensor electrode 134 and integrator
circuit 156, and supplied a cancellation signal C135 to a point
between sensor electrode 135 and integrator circuit 167. Sensor
electrode 134 generates undesired signal U134 due to imbalance in
the mass of sensor element 130. Sensor electrode 135 also generates
undesired signal U135 due to the imbalance in the mass of sensor
element 130. Cancellation signal C134 is a rectangular wave of an
electric charge of the same amount as undesired signal U134 and
having a polarity opposite to undesired signal U134. Cancellation
signal C135 is a rectangular wave having an electric charge of the
same amount as undesired signal U135 and having a polarity opposite
to undesired signal U135.
[0073] An operation of angular velocity sensor 1002 according to
Embodiment 2 will be described below.
[0074] When an alternating voltage is applied to driving electrode
132 of sensor element 130, vibration body 131 vibrates at its
resonant frequency and generates an electric charge in monitor
electrode 133. The electric charge generated in monitor electrode
133 is input to charge amplifier 136 of driver circuit 140, and is
converted it into an output voltage of sinusoidal wave. Band-pass
filter 137 removes noise components and extracts only a resonant
frequency component of vibration body 131 from the output voltage
of charge amplifier 136, and outputs signal S137 having a
sinusoidal waveform shown in FIG. 5. AGC circuit 138 including a
half-wave rectification and a smoothing circuit converts signal
S137 into a direct current (DC) signal. When this DC signal is
large, AGC circuit 138 sends a signal to driving circuit 139 to
attenuate the output signal of band-pass filter 137. When the DC
signal is small, AGC circuit 138 sends a signal to driving circuit
139 to amplify the output signal of band-pass filter 137. Driving
circuit 139 is thus controlled such that vibration body 131
vibrates with constant amplitude. In timing control circuit 143,
PLL circuit 141 generates a signal by multiplying a frequency of
signal S137. Based on this signal, timing generator circuit 142
generates timing signals .PHI.101 and .PHI.102 shown in FIG. 5.
Timing signals .PHI.101 and .PHI.102 are input to processor 173 and
correction processor 174, and determine switching timing of the
switches and latching timing of a latching circuit.
[0075] When sensor element 130 having a mass m rotates about the
center axis in a longitudinal direction of vibration body 131 at
angular velocity .omega. while flexuously vibrating at velocity V
in a driving direction D131 shown in FIG. 4, Coriolis force F
expressed given by the following formula is generated in sensor
element 130.
F=2.times.m.times.V.times..omega.
[0076] This Coriolis force F generates signals S134 and S135 of
electric currents shown in FIG. 5 in sensor electrodes 134 and 135,
respectively. Since these signals S134 and S135 are generated by
Coriolis force F, they have sinusoidal waveforms with the phases
shifted by 90 degrees from signal S137 generated in monitor
electrode 133. As shown in FIG. 5, signals S134 and S135 are in the
relationship of positive polarity signal and negative polarity
signal.
[0077] An operation of processor 173 which is a .SIGMA.A modulator
in this case will be described below. Timing signals .PHI.101 and
.PHI.102 define periods P101 and P102 that repeat continuously
alternately. Processor 173 .SIGMA.A-modulates the positive polarity
signal and the negative polarity signal output from sensor
electrodes 134 and 135 according to timing signals .PHI.101 and
.PHI.102, and converts the signals into one-bit digital
signals.
[0078] An operation of processor 173 during the periods P101 and
P102 will be described below. For the purpose of the following
explanation, a predetermined angular velocity is applied to sensor
element 130 to rotate sensor element 130 about the center axis
thereof so that signals S134 and S135 having a maximum current
corresponding to a value "8" are generated from sensor electrodes
134 and 135, respectively.
[0079] In the period P101, a voltage provided by the electric
charge corresponding to the value "8" generated in sensor electrode
134 is retained in capacitor 158 of integrator circuit 156. This
voltage retained in capacitor 158 is input to inverting input
terminal 171A of comparator 171. Similarly, the electric charge
generated in sensor electrode 135 is retained in capacitor 169 of
integrator circuit 167. This voltage of the electric charge
corresponding to a value "-8" retained in capacitor 169 is input to
non-inverting input terminal 171B of comparator 171. Consequently,
one-bit digital signal "1" produced by comparator 171 as a
comparison result is input to flip-flop 172, and is latched by
flip-flop 172 at the beginning of period P102. Switches 153 and 154
are turned on in the period P102, and discharge the electric charge
retained in capacitor 152. Similarly, switches 164A and 164B are
turned on in the period P102, and discharge the electric charge
retained in capacitor 163. The digital signal "1" latched by
flip-flop 172 is input to D/A switching unit 147 in the next period
P101, and switches the reference voltage V150 that generates an
electric charge corresponding to value "-10". Similarly, the
digital signal "1" latched by flip-flop 172 is input to D/A
switching unit 159 in the next period P101, and switches the
reference voltage V160 that generates an electric charge
corresponding to value "10". As a result, an electric charge
equivalent to the electric charge corresponding to the value "-10"
from reference voltage V150 is stored in capacitor 152 of D/A
output unit 151, and is input to integrator circuit 156. At the
same time, an electric charge equivalent to the electric charge
corresponding to the value "10" from reference voltage V160 is
stored in capacitor 163 of D/A output unit 162, and is input to
integrator circuit 167. In this same period P101, switch 155 is
turned on and outputs, to integrator circuit 156, an electric
charge equivalent to the electric charge corresponding to the value
"8" generated in sensor electrode 134. In addition, switch 165 is
turned on in the period P101 and outputs, to integrator circuit
167, an electric charge equivalent to the electric charge
corresponding to the value "8" generated in sensor electrode
135.
[0080] Accordingly, during the period P102, capacitor 158 of
integrator circuit 156 holds an output signal consisting of an
electric charge corresponding to value "6" provided by integrating
the sum of electric charge Q134 of the signal S134 shown in FIG. 5
and the electric charge output from D/A converter 148. Similarly,
capacitor 169 of integrator circuit 167 holds an output signal
consisting of an electric charge corresponding to value "-6"
provided by integrating the sum of electric charge Q135 of the
signal S135 shown in FIG. 5 and the electric charge output from D/A
converter 166. Comparator 171 outputs, to flip-flop 172, a one-bit
digital signal representing a comparison result between the output
signals of integrator circuits 156 and 167. The voltage held in
integrator circuit 156 decreases by an amount of electric charge
corresponding to value "2", while the voltage held in integrator
circuit 167 increases by the amount of electric charge
corresponding to value "2" every time the above operation is
repeated over the periods P101 and P102. Consequently, comparator
unit 170 outputs one-bit digital signal of "1" until the voltages
held in integrator circuits 156 and 167 become equivalent to an
electric charge corresponding to value "0". Then, comparator 171
outputs a one-bit digital signal of "-1" when the voltage held in
integrator circuit 156 becomes equivalent to an electric charge
corresponding to value "-2", and the voltage held in integrator
circuit 167 becomes equivalent to an electric charge corresponding
to value "2". Flip-flop 172 then sends an output signal of value
"-1" to D/A switching unit 147 to cause D/A switching unit 147 to
output a voltage of the electric charge corresponding to value "10"
from reference voltage V149 of D/A converter 148, and then, the
corresponding electric charge is stored in capacitor 152.
Simultaneously, flip-flop 172 sends an output signal of value "-1"
to D/A switching unit 159 to cause D/A switching unit 159 to output
a voltage of the electric charge corresponding to value "10" from
reference voltage V161 of D/A converter 166, and then, the
corresponding electric charge is stored in capacitor 163. As a
result, a voltage of the electric charge corresponding to value
"16" is retained in integrator circuit 156, and a voltage of the
electric charge corresponding to value "-16" is retained in
integrator circuit 167. The output voltages of integrator circuits
156 and 167 change thereafter by an electric charge corresponding
to value "2", and comparator 171 outputs one-bit digital signal of
value "1" nine times, and then, outputs one-bit digital signal of
value "-1" only once. The one-bit digital signals are converted
into multi-bit signals of value "0.8" and output so as to be
detected as the signals indicating the angular velocity.
[0081] FIG. 5 illustrates undesired signals U134 and U135 generated
in sensor electrodes 134 and 135, respectively. Undesired signals
U134 and U135 have the same phases as monitor signals. Undesired
signal U134 has a phase delayed by 90 degrees from output signal
S134 generated in sensor electrode 134. Undesired signal U135 has a
phase delayed by 90 degrees from output signal S135 generated in
sensor electrode 135. When undesired signals U134 and U135 are
integrated by integrator circuits 156 and 167, respectively, their
values become "0", and they are therefore canceled nearly
completely.
[0082] Actuality, however, the phase characteristic has a deviation
due to a time constant determined by capacitances of capacitors 158
and 169, and resistances of the circuit conductors in integrator
circuits 156 and 167. FIG. 6 illustrates timing signal P101, signal
S134 (S135), and undesired signal U134 (U135) having the phases
shifted due to the deviation of their phase characteristic. An
integration time during the period P101 changes from the ideal
period T101 to period T102. Under this condition, undesired signal
U134 (U135) cannot be cancelled completely even when undesired
signal U134 (U135) is integrated because the area of a negative
side becomes larger than that of a positive side. In the case that
vibration body 131 has a small size to provide small angular
velocity sensor 1002, imbalance in the mass of vibration body 131
cannot be corrected by trimming, hence preventing undesired signals
U134 and U135 from being removed completely only by the
integration.
[0083] In angular velocity sensor 1002 according to Embodiment 2,
cancellation signal output circuit 177 injects cancellation signal
C134 to a point between sensor electrode 134 and processor 173,
while cancellation signal C135 to a point between sensor electrode
135 and processor 173. Cancellation signals C134 and C135 are
rectangular waves having the same amplitudes as undesired signals
U134 and U135 and have polarities opposite to undesired signals
U134 and U135. As shown in FIG. 7, widths T134 and T135 of the
rectangular waves of undesired signals U134 and U135 are determined
such that area B101 formed by cancellation signals C134 and C135
becomes equal to area A101 formed by the sinusoidal waves of
undesired signals U134 and U135 having frequency f in a half cycle
(1/(2.times.f)). The widths T134 and T135 of cancellation signals
C134 and C135 are determined to be (2/.pi.) times the half cycle
(1/(2.times.f), that is, about 64% of the undesired signals U134
and U135, as shown in FIG. 7.
[0084] Undesired signals U134 and U135 can be removed by
integrating undesired signals U134 and U135 during the period P101
by integrator circuits 156 and 167 even when a deviation occurs in
the phase characteristic due to the time constant determined by the
capacitances of capacitors 158 and 169 and resistances of the
circuit conductors in integrator circuits 156 and 167, since
generally the same deviation occurs in the electric charges of the
cancellation signals C134 and C135 having the opposite
polarities.
[0085] Amplitude of the rectangular waves of cancellation signals
C134 and C135 can be determined according to an amount of drift
from a zero point of the output signal generated while no angular
velocity is applied to sensor element 130.
[0086] Cancellation signal output circuit 177 includes a D/A
converter circuit that outputs cancellation signals C134 and C135
of the rectangular waves synchronized with the driving frequency of
sensor element 130, and cancels the undesired signals U134 and U135
generated in sensor electrodes 134 and 135. This can lower the
operating frequency of the D/A converter, accordingly reducing
undesired signals U134 and U135 by the D/A converter having small
power consumption.
[0087] A total amount of the electric charge output from this D/A
converter can be controlled accurately by adjusting, in a time-axis
direction, the rectangular waves of cancellation signals C134 and
C135 output from cancellation signal output circuit 177. The width
of the rectangular wave signals is about 64% of the half cycle of
undesired signals U134 and U135, and the total amount of the
electric charge output from cancellation signal output circuit 177
can be controlled by adjusting amplitude of these rectangular wave
signals.
[0088] In angular velocity sensor 1002 according to Embodiment 2,
cancellation signals C134 and C135 shown in FIG. 7 are input from
cancellation signal output circuit 177 to a point between sensor
electrode 134 and processor 173, and to a point between sensor
electrode 135 and processor 173 respectively. FIG. 8A illustrates
another cancellation signal C1134 output from cancellation signal
output circuit 177 output to the point between sensor electrode 134
and processor 173. In this case, cancellation signal output circuit
177 does not input any cancellation signal to the point between
sensor electrode 135 and processor 173. Cancellation signal C1134
has amplitude twice that of cancellation signal C134 shown in FIG.
7. This eliminates an adverse influence due to a shift in the
phases of undesired signals U134 and U135 when comparator unit 170
compares the signals output from integrator circuits 156 and 167.
This structure reduces the size of the circuit since cancellation
signal C1134 is injected only to the point between sensor electrode
134 and processor 173, while no cancellation signal is injected to
the point between sensor electrode 135 and processor 173.
Cancellation signal output circuit 177 includes a D/A converter
circuit that outputs cancellation signal C1134 having a rectangular
wave synchronized with the driving frequency of sensor element 130
(vibration body 131) for canceling undesired signals U134 and U135
generated in sensor electrodes 134 and 135. This can thus lower the
operating frequency of the D/A converter, and allows the D/A
converter having small power consumption to reduce the undesired
signals U134 and U135.
[0089] FIG. 8B illustrates still another cancellation signal C1135
input from the cancellation signal output circuit 177 to the point
between sensor electrode 135 and processor 173. In this case,
cancellation signal output circuit 177 does not input any
cancellation signal to the point between sensor electrode 135 and
processor 173. Cancellation signal C1135 has amplitude twice that
of cancellation signal C135 shown in FIG. 7. This eliminates an
adverse influence due to a shift in the phases of undesired signals
U134 and U135 when comparator unit 170 compares the signals output
from integrator circuits 156 and 167. This structure reduces the
size of the circuit since cancellation signal C1135 is injected
only to the point between sensor electrode 135 and processor 173,
while no cancellation signal is injected to the point between
sensor electrode 134 and processor 173. Cancellation signal output
circuit 177 includes a D/A converter circuit that outputs
cancellation signal C1135 having a rectangular wave synchronized
with the driving frequency of sensor element 130 (vibration body
131) for canceling out the undesired signals U134 and U135
generated in sensor electrodes 134 and 135. This can thus lower the
operating frequency of the D/A converter, and the D/A converter
having small power consumption reduces the undesired signals U134
and U135.
[0090] FIG. 9 illustrates further cancellation signal C2134
injected from cancellation signal output circuit 177 to the point
between sensor electrode 134 and processor 173, and further
cancellation signal C2135 injected to the point between sensor
electrode 135 and processor 173. Cancellation signals C2134 and
C2135 have sinusoidal waveforms having the same phases and the same
amplitudes as undesired signals U134 and U135. Cancellation signals
C2134 and C2135 can cancel the undesired signals U134 and U135
accurately in integrator circuits 156 and 167, respectively.
[0091] FIG. 10 illustrates further cancellation signal C3134
injected from cancellation signal output circuit 177 to the point
between sensor electrode 134 and processor 173. Cancellation signal
C3134 has a sinusoidal waveform which is equivalent to the
difference between undesired signal U134 generated in sensor
electrode 134 and undesired signal U135 generated in sensor
electrode 135, which has the same frequency as the driving
frequency of sensor element 130. In this case, cancellation signal
output circuit 177 does not input any cancellation signal to the
point between sensor electrode 135 and processor 173. This can
eliminate an adverse influence due to a shift in the phases of
undesired signals U134 and U135 precisely when comparator unit 170
compares the signals output from integrator circuits 156 and 167.
This structure reduces the size of the circuit since cancellation
signal C3134 is injected only to the point between sensor electrode
135 and processor 173, while no cancellation signal is injected to
the point between sensor electrode 135 and processor 173.
[0092] FIG. 10 also illustrates further cancellation signal C3135
injected from cancellation signal output circuit 177 to the point
between sensor electrode 135 and processor 173. Cancellation signal
C3135 has a sinusoidal waveform which is equivalent to the
difference between undesired signal U134 generated in sensor
electrode 134 and undesired signal U135 generated in sensor
electrode 135, and which has the same frequency as the driving
frequency of sensor element 130. In this case, cancellation signal
output circuit 177 does not inject any cancellation signal to the
point between sensor electrode 134 and processor 173. This can
eliminate an adverse influence due to a shift in the phases of
undesired signals U134 and U135 precisely when comparator unit 170
compares the signals output from integrator circuits 156 and 167.
This structure reduces the size of the circuit since cancellation
signal C3135 is injected only to the point between sensor electrode
135 and processor 173, while no cancellation signal is injected to
the point between sensor electrode 134 and processor 173.
[0093] As discussed above, sensor electrode 134 is provided on
vibration body 131 and adapted to generate undesired signal U134
and an electric charge responsive to an angular velocity applied to
vibration body 131. Sensor electrode 135 is provided on vibration
body 131 and is adapted to generate undesired signal U135 and an
electric charge responsive to the angular velocity applied to
vibration body 131. Driver circuit 140 vibrates vibration body 131
with a predetermined driving frequency. Processor 173 detects the
signals output from sensor electrodes 134 and 135. Cancellation
signal output circuit 177 is operable to inject cancellation signal
C134 having a polarity opposite to undesired signal U134 and the
same amount of electric charge as undesired signal U134 to the
point between sensor electrode 134 and processor 173, and to inject
cancellation signal C135 having a polarity opposite to undesired
signal U135 and having the same amount of electric charge as
undesired signal U135 to the point between sensor electrode 135 and
processor 173.
[0094] Processor 173 includes D/A converters 148 and 166,
integrator circuits 156 and 167, comparator unit 170, and D/A
switching units 147 and 157. D/A converter 148 outputs at least two
levels of electric charges of reference voltages V149 and V150. D/A
converter 166 also outputs at least two levels of electric charges
of reference voltages V160 and V161. Integrator circuit 156
integrates the electric charge generated in sensor electrode 134
and the electric charge output from D/A converter 148. Integrator
circuit 167 integrates the electric charge generated in sensor
electrode 135 and the electric charge output from D/A converter
166. Comparator unit 170 compares the output signal from integrator
circuit 156 with the output signal from integrator circuit 167. D/A
switching unit 147 switches the level of the output signal from D/A
converter 148 according to a comparison result performed by
comparator unit 170. D/A switching unit 159 switches the level of
the output signal from D/A converter 166 according to the
comparison result preformed by comparator unit 170.
INDUSTRIAL APPLICABILITY
[0095] An angular velocity sensor according to the present
invention has an advantage of improved reliability such that it
does not continue to output any signal not corresponding to an
angular velocity if any of circuit traces becomes disconnected
around the sensor electrodes, and it is therefore useful especially
as an angular velocity sensor provided with a digital circuit used
for controlling attitude of a mobile body such as an aircraft, a
vehicle, or a navigation system.
[0096] An angular velocity sensor according to the present
invention has another advantage capable of positively removing an
undesired signal generated due to imbalance in the mass of
vibration body even though the vibration body is downsized with
miniaturization of the angular velocity sensor, and it is therefore
useful especially as the angular velocity sensor for controlling
attitude of the mobile body such as an aircraft, a vehicle, or a
navigation system.
REFERENCE MARKS IN THE DRAWINGS
[0097] 31 Vibration Body [0098] 34 Sensor Electrode (First Sensor
Electrode) [0099] 35 Sensor Electrode (Second Sensor Electrode)
[0100] 40 Driver Circuit [0101] 43 Timing Control Circuit [0102] 47
D/A Switching Unit (First D/A Switching Unit) [0103] 48 D/A
Converter (First D/A Converter) [0104] 56 Integrator Circuit (First
Integrator Circuit) [0105] 59 D/A Switching Unit (Second D/A
Switching Unit) [0106] 66 D/A Converter (Second D/A Converter)
[0107] 67 Integrator Circuit (Second Integrator Circuit) [0108] 70
Comparator Unit [0109] 78 Disconnection Detecting Switch (First
Disconnection Detecting Switch) [0110] 80 Disconnection Detecting
Switch (Second Disconnection Detecting Switch) [0111] 131 Vibration
Body [0112] 134 Sensor Electrode (First Sensor Electrode) [0113]
135 Sensor Electrode (Second Sensor Electrode) [0114] 147 D/A
Switching Unit (First D/A Switching Unit) [0115] 148 D/A Converter
(First D/A Converter) [0116] 156 Integrator Circuit (First
Integrator Circuit) [0117] 159 D/A Switching Unit (Second D/A
Switching Unit) [0118] 166 D/A Converter (Second D/A Converter)
[0119] 167 Integrator Circuit (Second Integrator Circuit) [0120]
170 Comparator Unit [0121] 173 Processor [0122] 177 Cancellation
Signal Output Circuit
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