U.S. patent application number 13/337846 was filed with the patent office on 2012-04-19 for system and method of vapor deposition.
This patent application is currently assigned to Taiwan Semiconductor Manufacturing Company, Ltd., ("TSMC"). Invention is credited to Ching-Yu Chang, David Ding-Chung Lu, Chien-Wei Wang.
Application Number | 20120090547 13/337846 |
Document ID | / |
Family ID | 42109023 |
Filed Date | 2012-04-19 |
United States Patent
Application |
20120090547 |
Kind Code |
A1 |
Wang; Chien-Wei ; et
al. |
April 19, 2012 |
SYSTEM AND METHOD OF VAPOR DEPOSITION
Abstract
Provided is a system for vapor deposition of a coating material
onto a semiconductor substrate. The system includes a chemical
supply chamber, a supply nozzle operable to dispense vapor, and a
heating element operable to provide heat to a substrate in-situ
with the dispensing of vapor. The system may further include
reaction chamber(s) and/or mixing chamber(s).
Inventors: |
Wang; Chien-Wei; (Wufong
Township, TW) ; Lu; David Ding-Chung; (Hsinchu City,
TW) ; Chang; Ching-Yu; (Yuansun Village, TW) |
Assignee: |
Taiwan Semiconductor Manufacturing
Company, Ltd., ("TSMC")
Hsin-Chu
TW
|
Family ID: |
42109023 |
Appl. No.: |
13/337846 |
Filed: |
December 27, 2011 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
12254658 |
Oct 20, 2008 |
8105954 |
|
|
13337846 |
|
|
|
|
Current U.S.
Class: |
118/725 |
Current CPC
Class: |
H01L 21/0273 20130101;
G03F 7/167 20130101; B05D 3/02 20130101; B05D 1/60 20130101; H01L
21/0276 20130101 |
Class at
Publication: |
118/725 |
International
Class: |
C23C 16/46 20060101
C23C016/46 |
Claims
1. A deposition system, comprising: a chemical supply chamber; a
supply nozzle operable to dispense vapor; and a heating element
operable to provide heat to a substrate in-situ with the dispensing
of vapor.
2. The system of claim 1, further comprising: a mixing chamber for
mixing two or more chemical components provided by the chemical
supply chamber.
3. The system of claim 1, further comprising: a reaction chamber
for reacting two or more chemical components provided by the
chemical supply chamber.
4. The system of claim 3, wherein the reaction chamber is connected
to the supply nozzle such that the reacted two or more chemicals
are provided to the supply nozzle.
5. The system of claim 1, wherein a semiconductor substrate is
positioned on the heating element while a material is vapor
deposited.
6. The system of claim 1, further comprising: a vaporization device
positioned in the chemical supply chamber.
7. The system of claim 1, wherein the chemical supply chamber
includes a first chamber and a second chamber.
8. The system of claim 7, wherein the first and second chambers
include a nozzle for controlling the flow of a chemical from each
of the first chamber and the second chamber.
9. The system of claim 1, further comprising: a vacuum device.
10. An apparatus, comprising: a first material supply chamber and a
second material supply chamber; a mixing chamber connected to the
first and second material supply chambers; a reaction chamber
connected to the mixing chamber; and a plurality of nozzles
overlying a heating element operable to hold a substrate.
11. The apparatus of claim 10, wherein the first and second
material supply chambers each include a valve that controls a flow
of a material exiting the first and second material supply
chambers.
12. The apparatus of claim 10, further comprising: a vacuum device
positioned adjacent the heating element.
13. The apparatus of claim 12, wherein the vacuum device is
operable to remove outgassing from the substrate disposed on the
heating element.
14. The apparatus of claim 10, wherein the substrate is a silicon
wafer.
15. The apparatus of claim 10, wherein the plurality of nozzles
dispense a photosensitive material.
16. A system of vapor deposition, comprising: a first material
supply chamber and a second material supply chamber; a mixing
chamber connected to the first and second material supply chambers;
a plurality of nozzles overlying a base operable to position a
substrate; and a heating element disposed in the base.
17. The system of vapor deposition of claim 16, wherein the heating
element is operable to heat the substrate as vapor is dispensed
from the plurality of nozzles.
18. The system of vapor deposition of claim 16, further comprising:
a vacuum device adjacent the base, wherein the vacuum device is
operable to remove an evaporated chemical from the substrate
positioned on the base.
19. The system of vapor deposition of claim 16, further comprising:
a reaction chamber connected to the mixing chamber, wherein the
reaction chamber interposes the mixing chamber and the plurality of
nozzles.
20. The system of vapor deposition of claim 16, further comprising:
a third material supply chamber connected to the mixing chamber.
Description
CROSS REFERENCE TO RELATED APPLICATION
[0001] The present application is a divisional of U.S. Utility
application Ser. No. 12/254,658 filed on Oct. 20, 2008, attorney
docket number 2008-0169/24061.1029, the entire disclosure of which
is incorporated herein by reference.
BACKGROUND
[0002] The present disclosure relates generally to semiconductor
fabrication and, more particularly, to a method of depositing
materials onto a semiconductor substrate (e.g., wafer).
[0003] In integrated circuit (IC) manufacturing technology, a
photoresist (resist) layer is typically applied to a semiconductor
wafer surface, followed by a soft bake, and an exposure of the
resist through a photomask. A post-exposure baking process and a
developing process are then performed to form a patterned resist
layer with openings. After verification that the resist is within
fabrication specifications, the wafer is processed using the
patterned resist as a masking element. Following processing (e.g.,
etch, implant, etc) of the wafer, the resist layer may be
stripped.
[0004] In conventional photoresist deposition--spin-on coating--the
photoresist layer suffers from non-uniform chemical distribution
and intermixing with other layers. This non-uniform chemical
distribution can negatively affect line edge roughness and cause
pin holes to form in the sidewalls of the resist pattern after
development. This effect is especially problematic for thin
photoresists of less than 75 nm, which is needed for high
lithography resolution. Similar issues are provided with other
deposition materials (e.g., coatings) that may be deposited on the
substrate.
[0005] It would therefore be desirable to have an improved method
and system of depositing materials onto a semiconductor wafer.
BRIEF DESCRIPTION OF THE DRAWINGS
[0006] Aspects of the present disclosure are best understood from
the following detailed description when read with the accompanying
figures. It is emphasized that, in accordance with the standard
practice in the industry, various features are not drawn to scale.
In fact, the dimensions of the various features may be arbitrarily
increased or reduced for clarity of discussion.
[0007] FIG. 1 is a flow chart illustrating an embodiment of a
method to vapor deposit a material onto a semiconductor
substrate.
[0008] FIG. 2 is perspective view illustrating a system for vapor
depositing material onto a semiconductor substrate.
[0009] FIG. 3 is a cross-sectional view illustrating a system of
vapor depositing a conformal coating on a semiconductor
substrate.
[0010] FIG. 4 is a cross-sectional view illustrating a
semiconductor substrate including a plurality of layers formed by
vapor deposition according to the method of FIG. 1.
[0011] FIGS. 5A, 6A, and 7A are cross-sectional views illustrating
embodiments of substrates having a layer of photoresist with
varying chemical component distributions.
[0012] FIGS. 5B, 6B, and 7B are cross sectional views illustrating
embodiments of substrates including photoresist features having
profiles determined by the chemical component distributions of
FIGS. 5A, 6A, and 7A respectively.
[0013] FIG. 8 is a flow chart illustrating an embodiment of a
method of performing dual pattern lithography.
[0014] FIGS. 9 and 10 are cross-sectional views illustrating an
embodiment of a substrate according to the steps of the method of
FIG. 8.
[0015] FIG. 11 is a flow chart illustrating an embodiment of a
method of vapor depositing an antireflective coating (ARC) material
having varying reflective properties on a semiconductor wafer.
DETAILED DESCRIPTION
[0016] The present disclosure relates generally to semiconductor
fabrication and, more particularly, to a method of depositing
materials such as, photoresists and other coating materials, using
a vapor deposition process. It is understood, however, that
specific embodiments are provided as examples to teach the broader
inventive concept, and one of ordinary skill in the art can easily
apply the teaching of the present disclosure to other methods or
devices. In addition, it is understood that the methods and
apparatus discussed in the present disclosure include some
conventional structures and/or processes. Since these structures
and processes are well known in the art, they will only be
discussed in a general level of detail. Furthermore, reference
numbers are repeated throughout the drawings for sake of
convenience and example, and such repetition does not indicate any
required combination of features or steps throughout the drawings.
The formation of a feature on a substrate may include embodiments
where features are formed above the surface of the substrate,
directly on the surface of the substrate, or extending below the
surface of the substrate, such as trenches. A substrate may include
a semiconductor wafer and one or more features formed on the wafer
such as conductive layers, insulating layers, isolation regions,
doped regions, or other features known in the art.
[0017] In a conventional spin coating process, the material
deposited (e.g., resist solution) is provided to the wafer by
spinning centrifugal forces. During the process of deposition, the
resist components are included in a solvent rich matrix. The
components easily aggregate, phase separate, and/or intermix with
each other or adjacent layers. The aggregation, separation, and/or
intermixing introduces a disproportionate chemical distribution as
to what may be intended in the fabrication. For photoresist, this
may induce a non-uniform chemical amplified reaction (CAR) and
undesirable acid distribution which may lead to poor line edge
roughness (LER) and defects (e.g., pinholes in sidewall of
features). A baking process is performed after the spin coating
process to evaporate a solvent(s) included in the resist
solution.
[0018] Referring to FIG. 1, illustrated is a method 100 for vapor
depositing a material on a semiconductor substrate. The method
begins at step 102 by providing a substrate. The substrate may
include silicon. The substrate may alternatively be made of some
other suitable elementary semiconductor, such as diamond or
germanium; a suitable compound semiconductor, such as silicon
carbide, indium arsenide, or indium phosphide; or a suitable alloy
semiconductor, such as silicon germanium carbide, gallium arsenic
phosphide, or gallium indium phosphide. Alternatively, the
substrate may include a non-semiconductor material such as a glass
substrate for thin-film-transistor liquid crystal display (TFT-LCD)
devices, or fused quartz or calcium fluoride for a photomask
(mask). In an embodiment, the substrate includes one or more
material layers (e.g., insulating, conductive, semiconductive, etc)
formed thereon. The substrate may include various doped regions,
dielectric features, and multilevel interconnects. In one
embodiment, the substrate includes various doped features for
various microelectronic components, such as a complementary
metal-oxide-semiconductor field-effect transistor (CMOSFET),
imaging sensor, memory cell, and/or capacitive element.
[0019] The method 100 then proceeds to step 104 where one or more
materials and/or chemical components of a material are provided. A
material may include one or more chemical components. By way of
example, materials provided may include one or more photoresist
compositions and/or chemical components of a photoresist. Chemical
components of a photoresist may include photo acid generator (PAG),
quencher, surfactant, polymer resin, surface segregated additive,
crosslinker, chromophore, solvent, and/or other suitable
components. In other embodiments, the materials provided may
include an antireflective coating such as, BARC, a crosslinking
material, an organic etch stop layer, an inorganic etch stop layer,
hard mask (e.g., silicon-containing hard mask), silicon,
Si.sub.3N.sub.4, SiON, Ti, TiN, Ta, TaN, SiOx, and/or other
materials suitable for forming one or more features of a
semiconductor device.
[0020] The method 100 then proceeds to step 106 where the materials
and/or chemical components may be mixed. In an embodiment, the
materials and/or chemical components may react to form one or more
compositions in addition to or in lieu of the supplied materials.
The reaction may provide a composition of a different molecular
weight than the supplied material or components. In an embodiment
of the method 100, the step 106 is omitted. The mixing and reaction
may occur in separate process steps, e.g., separate chambers. In an
embodiment, the reaction of the materials and/or chemical
components requires the introduction of heat, a chemical catalyst,
and/or other reaction mechanism. The method 100 then proceeds to
step 108 where the materials may be vaporized. In an embodiment,
one or more of the materials supplied in step 104 or provided in
the reaction of step 106 is in vapor form. In such an embodiment,
the step 108 may be omitted.
[0021] The method 100 then proceeds to step 110 where the
material(s) is vapor deposited onto the surface of the substrate.
The vapor depositing may be performed using a vapor deposition
system such as, a system 200 described with reference to FIG. 2. In
an embodiment, the material may be deposited using one or more
nozzles to deposit a spray including materials across the wafer.
During the vapor deposition, a bake process may be provided in-situ
(e.g., immediately following and/or concurrently with the vapor
deposition without moving the substrate to a separate
tool/chamber). The bake process may drive off (e.g., evaporate) a
solvent present in the material(s). During the deposition and/or
baking process, solvent may be withdrawn from the environment of
the substrate by a vacuum system. The bake process may be provided
by a heating element providing an elevated temperature to the
substrate such as, the heating element 224, also described with
reference to FIG. 2. In an embodiment, the deposition temperature
is less than 150 C (exemplary and not limiting). In an embodiment,
the deposition pressure is less than 1.2 atm (exemplary and not
limiting). In an embodiment, the thickness of one or more layers
deposited is less than 200 nm (exemplary and not limiting).
[0022] As an example, in an embodiment, a photoresist may be vapor
deposited onto a substrate. The substrate may be heated, in-situ,
to drive off the solvent (or portion thereof). The reduction of the
solvent in the formed photoresist layer may reduce the free volume
which provides reduced motion of components of the photoresist.
This may prevent separating, intermixing, and/or aggregation such
as described above with reference to a spin-on photoresist process.
The vapor deposition of the photoresist may provide a more uniform
chemical distribution, which may provide a more uniform CAR
reaction and a more-well defined acid diffusion boundary. The
improved diffusion boundary leads to improved exposure of an image,
better LER, and/or fewer defects. Step 110 may include depositing a
plurality of layers on the substrate. In an embodiment, step 110
may include providing a single layer having a gradient chemical
component distribution, for example, formed by varying the supply
of one or more chemical components during the vapor deposition.
[0023] In an embodiment, a photoresist layer is deposited on a
substrate using the method 100 or portion thereof, including
deposition of the photoresist layer by vapor deposition with
in-situ baking process. The method 100 may continue to provide
exposure of the photoresist layer to a pattern. The exposure may
include irradiation using an ArF, EUV, E-Beam, and/or other
suitable radiation. The photoresist may include a PAG, quencher,
surfactant, and acid cleavable molecule. The PAG may release acid
after irradiation. The method 100 may further continue to provide
for development, post-exposure bake, rinse, dry, and/or other
suitable photolithography processes. The acid labile polymer may
release its leaving group after reacting with acid at post exposure
bake step. After releasing the acid leaving group, the polymer may
become more soluble to water than the as deposited resist. In an
embodiment, the vapor deposition with in-situ baking process
eliminates a soft bake process found in conventional lithography
processes (e.g., bake after deposition before exposure).
[0024] Referring now to FIG. 2, illustrated is a system 200 for
vapor deposition including in-situ baking process. The system 200
includes a vapor deposition system 202 including material supply
chambers 204 and 206, a mixing chamber 208, a reaction chamber 210,
a vapor deposition support device 214, and nozzles 216. Though
illustrated as two supply chambers 204, 206, any number of supplies
may be provided. In an embodiment, a single material supply chamber
is provided such as, chamber 204. In an embodiment, the mixing
chamber 208 and/or the reaction chamber 210 are omitted from the
system 200. The nozzles 216 may include any number of nozzles. The
system 200 may allow for liquid components to be supplied in
chamber 204 and/or 206 and vaporization occurs at any point in the
system 200, such as at supply 204 or 206, mixing chamber 208,
reaction chamber 208, vapor deposition support device 214, and/or
nozzles 216.
[0025] A vapor 218 is provided by the vapor deposition system 202
and released from the nozzles 216. The vapor 218 may include one or
more materials and/or chemical components supplied from the supply
chamber 204 or 206, and/or that are the reaction product provided
in the reaction chamber 210 and/or mixing chamber 208. The vapor
218 forms a layer 220 on a wafer 222. The layer 220 may be
substantially uniformly across the surface of the entire surface
wafer 222. The wafer 222 is positioned on a heating element 224.
The heating element 224 is operable to provide an elevated
temperature to the substrate 222, and in particular to the layer
220 (e.g., a bake process for the substrate 222). The bake process
may be provided in-situ with the vapor deposition. In an
embodiment, the heating element 224 is operable to provide a bake
process to the substrate 222 substantially simultaneous with the
deposition of the vapor 218 on the substrate 222 (e.g., during the
formation of the layer 220). In an embodiment, the heating element
224 is operable to provide a bake process following the deposition
of the layer 220 without transport of the substrate 222 from a
vapor deposition chamber (e.g., the environment of providing the
vapor 218).
[0026] The supply chambers 204 and 206 may provide for control over
a relative ratio (e.g., flowrate) of materials and/or chemical
components that are supplied from each of the chambers. In an
embodiment, the ratio of the component of supply chamber 204 may
vary with respect to the component of the supply chamber 206, for
example, as the vapor 218 is provided to the substrate 222. Example
embodiments of such are described below with reference to FIGS. 5A,
6A, 7A, and/or 11. The deposition system 200 may include one or
more valves that control the flow of components from the supply
chambers 204, 206. For example, the composition of a deposited
layer 220 may be controlled by tuning the supply of components from
chambers 204, 206. In an embodiment, materials from one supply may
be deposited, and subsequently material from another supply may be
provided (see, e.g., FIG. 4).
[0027] In an embodiment, the system 200 includes a vacuum device.
The vacuum device may be operable to remove any material removed
(e.g., evaporated) from the layer 220 resulting from the bake
process provided by the heating element 224. In an embodiment, the
material removed includes a solvent. The solvent may be a solvent
included in a photoresist.
[0028] The substrate 222 may include silicon. The substrate 222 may
also include other suitable elementary semiconductor, such as
diamond or germanium; a suitable compound semiconductor, such as
silicon carbide, indium arsenide, or indium phosphide; or a
suitable alloy semiconductor, such as silicon germanium carbide,
gallium arsenic phosphide, or gallium indium phosphide.
Alternatively, the substrate 222 may include a non-semiconductor
material such as a glass substrate for thin-film-transistor liquid
crystal display (TFT-LCD) devices, or fused quartz or calcium
fluoride for a photomask (mask). In an embodiment, the substrate
222 includes one or more material layers (e.g., insulating,
conductive, semiconductive, etc) formed thereon. The substrate 222
may include various doped regions, dielectric features, and
multilevel interconnects. In one embodiment, the substrate 222
includes various doped features for various microelectronic
components, such as a complementary metal-oxide-semiconductor
field-effect transistor (CMOSFET), imaging sensor, memory cell,
and/or capacitive element.
[0029] In an embodiment, the vapor 218 deposits a layer 220
including photoresist on the substrate 222. One or more components
such as, PAG, quencher, surfactant, polymer resin, surface
segregated additive, crosslinker, chromophore, acid cleavable
molecule, and solvent may be included in the supply 204 and/or 206.
In alternative embodiments, the supplies 204, 206 and/or the vapor
218 may include components such that a layer 220 includes ARC
(e.g., BARC), top coat, adhesion layer, crosslinking material,
organic etch stop layer (ESL), inorganic ESL, Si, Si.sub.3N.sub.4,
SiON, Ti, TiN, Ta, TaN, SiOx, and/or other suitable materials. The
layer 220 may include a plurality of layers.
[0030] Referring now to FIG. 3, illustrated is an embodiment of
deposition of a vaporized material 218 to form a conformal layer
302 on the substrate 222. FIG. 3 may be representative of the
deposition of a layer using the method 100. FIG. 3 may be
representative of use of the system 200. The conformal layer 302
includes a thickness t1 at the top of a feature 304 and a thickness
t2 at the bottom of a feature 304 adjacent the substrate 222, t1
and t2 are approximately equal. This is in contrast to deposition
of a material using a conventional spin-coating process. The
spin-coating process may provide a thinner layer of material at the
top of a feature (such as, feature 304) than on the underlying
substrate (such as substrate 222). The conventional process may
provide, for example, a thickness corresponding to t2 may be four
times greater than a thickness corresponding to t1. This may
provide for a narrow etch process window when, for example, forming
a trench for a shallow trench isolation feature (STI). The features
304 may include photoresist, BARC, top coat, Si containing organic
hard mask, Si, Si.sub.3N.sub.4, SiON, Ti, TiN, Ta, TaNx, SiOx,
and/or other suitable materials. The layer 302 may include
photoresist, BARC, top coat, Si containing organic hard mask, Si,
Si3N4, SiON, Ti, TiN, Ta, TaNx, SiOx, and/or other suitable
materials.
[0031] Referring now to FIG. 4, illustrated is a multi-layer
semiconductor device 400 including a plurality of layers deposited
on the substrate 222. The semiconductor device 400 may be formed
using the method 100, the system 200, and/or a portions thereof.
The semiconductor device 400 includes a layer 402 and a layer 404.
The layers 402 and 404 may include photoresist, antireflective
coating (e.g., BARC), top coat, adhesion layers, crosslinking
materials, organic and inorganic etch stop layer, Si,
Si.sub.3N.sub.4, SiON, Ti, TiN, Ta, TaN, SiOx, and/or other
suitable materials. The layer 402 and the layer 404 have an
interface 406. The interface 406 illustrates a substantially
discrete interface between layers 404 and 402 (in contrast to a
mixing of the layers). The layer 402 and layer 404 may be vapor
deposited in-situ using the method 100 and/or the system 200. A
bake process may be performed in-situ with the depositions. In an
embodiment, the layer 402 and the layer 404 include separate and
distinct compositions. In an embodiment, the layer 402 and the
layer 404 include related compositions, for example, similar
compositions having ratios of one or more components adjusted.
[0032] In an embodiment, a first deposited layer, layer 402, and
the second deposited layer, layer 404, each provide for different
etch resistances (e.g., etch rates). Layer 402 and/or the layer 404
may include an etching resistance molecule. The molecule may
include a low onishi number structure, double bond structure,
triple bond structure, silicon, silicon nitride, Ti, TiN, Al,
aluminum oxide, SiON, and/or other suitable component.
[0033] In an embodiment, the layer 402 includes photoresist and
layer 404 includes a composition more hydrophobic than layer 402.
In an embodiment, the layer 404 includes fluorine. The layer 404
may include an isolation layer between an immersion fluid of an
immersion lithography system and the layer 402 (e.g., resist). In
an embodiment, the immersion fluid includes water.
[0034] Using conventional spin-coating process, multi-layer
applications such as illustrated by the semiconductor device 400
may raise issues. For example, components may intermix with other
layers reducing the opportunity to create an interface between
layers such as, the interface 406. By providing vapor deposition
according the method 100 and/or the system 200, a plurality of
layers may be provided in-situ (e.g., at the same time using the
same system). The solvent-reduced composition provided by the
in-situ bake (and/or vacuum) reduces the movement of components.
This may provide for reduced intermixing of components between
different layers of a multi-layer structure, in contrast with the
interface 406. In an embodiment, the layers 402 and/or layer 404
include a surface switchable photoresist.
[0035] Referring now to FIGS. 5A, 5B, 6A, 6B, 7A, and 7B,
illustrated are cross-sections providing a layer of resist as
deposited, and the corresponding patterned resist feature provided
from the layer of resist. The layers of resist may be formed using
the method 100 and/or the system 200, described above with
reference to FIGS. 1 and 2 respectively. In FIG. 5A, the resist
layer 500 is formed on the substrate 222. The resist layer 500
includes a greater distribution of component 502 at the surface and
a greater distribution of component 504 at the bottom of the
photoresist layer 500. The resist layer 500 may be provided by
tuning the ratio of component 502 and 504 while vapor depositing
the resist layer 500. In an embodiment, the component 502 includes
an acid producing component, and the profile 506 (e.g., tapered
top) is provided. In FIG. 6A, the resist layer 600 includes a
greater distribution of component 604 at the surface and a greater
distribution of component 602 at the bottom of the photoresist
layer 600. The resist layer 600 may be provided by tuning the ratio
of component 602 and 604 while vapor depositing the resist layer
600. In an embodiment, the component 602 includes an acid producing
component (CAR) and the profile 606 (e.g., tapered bottom) is
provided. In FIG. 7A, the resist layer 700 illustrates a
photoresist layer having a substantially distributed composition of
component 702 and 704. The profile 706 is provided illustrating a
substantially uniform thickness profile 706. The profiles 506, 606,
and/or 706 provide photoresist features that may be used to provide
masking elements for subsequent processing of the substrate 222.
The photoresist features including profiles 506, 606, and/or 706
are provided by exposing the photoresist layers 500, 600, and 700
respectively to a pattern, performing a post-exposure bake, and
developing the resist and/or other suitable photolithography
processes known in the art.
[0036] Therefore, the method 100 and/or the system 200 provide a
method and system respectively to control the composition (e.g.,
ratio of components) of a deposited layer. For example, the
composition of a photoresist layer may be controlled such that a
desired profile of a resultant photoresist feature is formed (e.g.,
an undercut feature). See FIGS. 5A, 6A, 7A. In contrast, a
conventional spin coating process provides a fixed formulation of
photoresist that does not allow for modification of the
distribution as deposited. This provides difficulties in
controlling a photoresist profile. Using the method 100 and/or the
system 200, the composition of a layer as deposited, e.g., the
composition of a photoresist layer, may be varied by controlling
the ratio of two or more components of the material (e.g.,
controlling PAG component or distribution of acid produced by an
exposed resist layer).
[0037] Referring now to FIG. 8, illustrated is a method 800 for
performing a dual pattern photolithography process. The method 800
begins at step 802 where a substrate is provided. Referring to the
example of FIG. 9, the substrate 222 is provided. The substrate 222
may be substantially similar to as described above with reference
to FIG. 2. The method 800 then proceeds to step 804 where features
associated with a first lithography process are formed. Referring
again to FIG. 9, the substrate 222 includes features 902. The
features 902 may provide photoresist features associated with a
first lithography step (e.g., formation of a first pattern on the
substrate 222).
[0038] The method 800 then proceeds to step 806 where a pattern
freezing material may be vapor deposited on the features associated
with the first lithography process. A pattern freezing material may
include a cross linkable component. The pattern freezing material
may be deposited by vapor deposition including in-situ baking
process. The pattern freezing material may be deposited using the
method 100, the system 200, and/or portions thereof. Referring to
the example of FIG. 9, a vaporized pattern freezing material 906 is
deposited on the substrate 222, and in particular on the first
features 902. The vaporized pattern freezing material 906 forms the
pattern freezing layer 904. The pattern freezing layer 904 may be a
discrete layer, or be intermixed with the features 902. The pattern
freezing material 906 may be deposited by a vapor deposition system
including the vapor deposition support device 214 and the nozzles
216. The substrate 222 is positioned on the heating element 224.
The heating element 224 may provide a baking process to the
environment of the substrate 222. The baking process may be
performed in-situ with the deposition of the pattern freezing
material 906 (e.g., at substantially the same time and/or following
the deposition of the pattern freezing layer 904 without moving the
substrate 222 from the processing tool).
[0039] The patterning freezing material may induce cross linking
reactions to the features on which it is deposited and/or within
the layer of pattern freezing material provided. In an embodiment,
after the step 806, the pattern freezing material may be rinsed
from the substrate using a developer solution and/or de-ionized
water.
[0040] In a conventional deposition process of pattern freezing
material, the features associated with the first lithography
process may be easily damaged by the solvent used in the pattern
freezing material. The damage may include CD bias and/or profile
issues. The vapor deposition process including in-situ baking
provides a reduced (or eliminated) solvent environment for the
features.
[0041] The method 800 then proceeds to step 808 where a second set
of features associated with a second lithography pattern are formed
on the substrate. Due to the pattern freezing material (e.g.,
cross-linking reactions), the second set of features may be formed
without intermixing with the first formed features. For example, to
form the second set of features a photoresist layer may be
deposited, exposed, and developed. Such processes may not affect
the first set of features as they include cross linked photoresist.
Referring to the example of FIG. 10, second features 1002 are
formed on the substrate 222. Thus a pattern including the first
features 902 and the second features 1002 is provided, which may
provide for a reduced pitch. In an embodiment, the second features
1002 may be formed using vapor deposition with in-situ baking such
as provided by the method of FIG. 1 and/or the system of FIG.
2.
[0042] Referring now to FIG. 11, illustrated is a method 1100
proving an embodiment of vapor depositing an antireflective coating
(ARC), e.g., a BARC. The method 1100 begins at step 1102 where a
substrate is provided. The substrate may be substantially similar
to the substrate provided above in step 102 of the method 100. The
method 1100 then proceeds to step 1104 where two or more BARC
material components are provided. The BARC components may be
supplied in material supply systems such as, the supply systems 204
and/or 206 of the deposition system 200. The components provided
and/or the ratio of the provided components may determine a n
and/or k value (reflectivity and/or absorptance) of the deposited
BARC layer.
[0043] The method 1100 then proceeds to step 1106 where the BARC
components, in a determined first ratio, are then mixed. In an
embodiment, the components are mixed in a mixing chamber such as,
the mixing chamber 208, described above with reference to FIG. 2.
In an embodiment of the method 1100, the components may be reacted,
for example, in a reaction chamber such as the reaction chamber
210, also described above with reference to FIG. 2. The mixed
(and/or reacted) components provide a BARC composition that
includes a reflectivity property, for example, as determined by the
ration of components and/or the composition of components
provided.
[0044] The method 1100 then proceeds to step 1108 where the BARC is
vapor deposited onto the substrate. The BARC may be deposited using
the vapor deposition system 202, or portion thereof. In an
embodiment, the BARC is vaporized in the system 202 and provided to
the substrate through nozzles such as, the nozzles 216. In an
embodiment, heating element is used to provide a baking process
in-situ with the vapor deposition of the BARC material. In a
further embodiment, a vacuum device is used to remove evaporants
from a formed BARC layer (e.g., released by the baking process). In
an embodiment, the heating element and bake process are omitted.
The deposition provides a BARC layer having a first reflectivity
property.
[0045] The method 1100 then proceeds to step 1110 where a second
ratio of BARC components is determined. The BARC components may be
mixed and/or reacted to provide a BARC material having a second
reflectivity. The second ratio of components may be different than
the first ratio, provided above in step 1104. The second ratio of
BARC components may provide a different reflectivity than the first
ratio. In an embodiment, the components are mixed in a mixing
chamber such as, the mixing chamber 208, described above with
reference to FIG. 2. In an embodiment of the method 1100, the
components may be reacted, for example, in a reaction chamber such
as the reaction chamber 210, also described above with reference to
FIG. 2. property.
[0046] The method 1100 then proceeds to step 1112 where the BARC
material having the second ratio of components is vapor deposited
onto the substrate. The vapor deposition of the BARC material
having the first ratio of components may be stopped prior to step
1112. The BARC may be deposited using the vapor deposition system
202, or portion thereof. In an embodiment, the BARC is vaporized in
the system 202 and provided to the substrate through nozzles such
as, the nozzles 216. In an embodiment, heating element is used to
provide a baking process in-situ with the vapor deposition of the
BARC material. In a further embodiment, a vacuum device is used to
remove evaporants from a formed BARC layer (e.g., released by the
baking process). In an embodiment, the heating element and bake
process is omitted. The deposition provides a BARC layer having a
second reflectivity property. The BARC layer having the first
reflectivity property (formed above in step 1108) and the BARC
layer having the second reflectivity property may be distinct
layer, or may be a single BARC layer including a gradient chemical
component distribution (e.g., a varied ratio of components).
[0047] In embodiments of the method 1100, the ratio of components
of a BARC composition may be continuously modified throughout the
vapor deposition process. In embodiments, one or more components
may be provided for a portion of the formation of the BARC layer
and omitted from a portion of the deposition.
[0048] Thus, the method 1100 may provide a vapor deposited BARC
layer with a gradient reflectivity and/or absorptance--n,k
distribution. This may provide an infinite quantity of reflective
planes. This may allow for producing a reflectively close to zero
and/or that is relatively free of substrate and topography
differences. This is in contrast with a conventional spin-coating
process where the formulation and/or n,k values of a BARC material
are fixed. Therefore there are only two reflective planes (air/BARC
and BARC/substrate) in the conventional spin coated layer. The
reflectivity of the BARC layer provided by conventional spin
coating processes thus provides a reflectivity based on the
thickness of the BARC layer.
[0049] Though the method 1100 is described as providing a BARC
layer with a gradient n, k value, the method 1100 may be useful for
providing any layer of material wherein a gradient chemical
component distribution (e.g., a varying of component ratio) is
desired. For example, the photoresist of FIGS. 5A, 5B, 6A, 6B, 7A,
and 7B may be provided using the method 1100 of portion thereof.
The variation of ratio of components includes embodiments where a
component is not provided for a portion of the formation of the
layer (e.g., a first chemical component and a second component have
a ration of 0:1).
[0050] Thus, provided are methods and systems for vapor depositing
material onto a semiconductor substrate to form one or more layers.
The methods and systems provide for varying which components and/or
ratio of components that are being supplied to provide for a layer
including gradient chemical component distribution. This may be
useful in controlling a photoresist profile, reflectivity of an ARC
layer, and/or other features. The methods and systems also provide
for a bake process and/or heating element to be provided in-situ
with the vapor deposition. The elevated temperatures may remove
solvent from material being deposited (or deposited) on the
substrate.
* * * * *