U.S. patent application number 12/659971 was filed with the patent office on 2011-06-09 for method for forming imprinting roller.
This patent application is currently assigned to National Taiwan University. Invention is credited to Ying-Ta Chu, Tzu-Chien Huang, Hsin-Chun Lai, Jing-Tang Wu, Sen-Yeu Yang.
Application Number | 20110132768 12/659971 |
Document ID | / |
Family ID | 44080948 |
Filed Date | 2011-06-09 |
United States Patent
Application |
20110132768 |
Kind Code |
A1 |
Yang; Sen-Yeu ; et
al. |
June 9, 2011 |
Method for forming imprinting roller
Abstract
The invention relates to a forming method for imprinting roller.
A photoresist layer is coated on an aluminum roller with
cylindrical surface. After a pattern is transferred on the
photoresist layer, the photoresist layer with the pattern is formed
on the aluminum roller. Then the anodic oxidization treatment
conducted for the photoresist layer with the pattern on the
aluminum roller. Repeat the above-mentioned steps to obtain the
roller with nanopore structure. When the roll-to-roll process is
applied, the motherboard of roller with arbitrary size can be
formed to facilitate the transfer printing of large area.
Inventors: |
Yang; Sen-Yeu; (Taipei,
TW) ; Huang; Tzu-Chien; (Taipei, TW) ; Wu;
Jing-Tang; (Taipei, TW) ; Lai; Hsin-Chun;
(Taipei, TW) ; Chu; Ying-Ta; (Taipei, TW) |
Assignee: |
National Taiwan University
Taipei
TW
|
Family ID: |
44080948 |
Appl. No.: |
12/659971 |
Filed: |
March 26, 2010 |
Current U.S.
Class: |
205/127 |
Current CPC
Class: |
G03F 7/0002 20130101;
B82Y 10/00 20130101; B82Y 40/00 20130101; C25D 11/045 20130101;
C25D 11/00 20130101; B41F 13/00 20130101 |
Class at
Publication: |
205/127 |
International
Class: |
C25D 5/02 20060101
C25D005/02 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 8, 2009 |
TW |
098141823 |
Claims
1. A method for forming imprinting roller, comprising: providing a
conductive roller having a cylindrical surface; forming a patterned
photoresist layer on the cylindrical surface; and carrying out an
anodic oxidization treatment for the conductive roller having the
patterned photoresist layer to form the imprinting roller.
2. The method according to claim 1, wherein the forming the
patterned photoresist layer on the cylindrical surface, comprising:
coating a photoresist agent on a cylindrical surface; transferring
a pattern onto the photoresist agent; and removing a part of
photoresist agent from the transferred pattern.
3. The method according to claim 2, wherein transferring the
pattern onto the photoresist agent comprises kept in a
self-rotating motion at a constant speed upon the transfer
treatment of pattern.
4. The method according to claim 1, wherein carrying out an anodic
oxidization treatment comprises placing the conductive roller
having the patterned photoresist layer in a reaction equipment, in
which the conductive roller being set on an anode of a power supply
and a cathode being a graphite electrode.
5. The method according to claim 4, wherein the conductive roller
having the patterned photoresist layer comprises kept in a
self-rotating motion at a constant speed.
6. The method according to claim 4, wherein the graphite electrode
moves up and down at a constant linear speed relative to the
conductive roller, and a constant distance being kept between the
conductive roller and the graphite electrode.
7. A method for forming a nanoimprinting roller, comprising:
providing an aluminum roller having a cylindrical surface; coating
an photoresist layer on a surface of the aluminum roller;
transferring a pattern onto the photoresist layer; removing a part
of the photoresist layer from the transferred pattern to form the
photoresist layer with pattern on the cylindrical surface; and
carrying out an anodic oxidization treatment for the aluminum
roller having the patterned photoresist layer.
8. The method according to claim 7, wherein transferring the
pattern onto the photoresist agent comprises kept in a
self-rotating motion at a constant speed upon the transfer
treatment of pattern.
9. The method according to claim 1, wherein carrying out an anodic
oxidization treatment comprises placing the conductive roller
having the patterned photoresist layer in a reaction equipment, in
which the conductive roller being set on an anode of a power supply
and a cathode being a graphite electrode.
10. The method according to claim 9, wherein the aluminum roller
having the patterned photoresist layer comprises kept in a
self-rotating motion at constant speed.
11. The method according to claim 10, wherein the graphite
electrode moves up and down at a constant linear speed relative to
the aluminum roller, and a constant distance is kept between the
aluminum roller and the graphite electrode.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The invention relates to a method for forming imprinting
roller, particularly to a method for forming nano-imprinting
roller.
[0003] 2. Description of the Prior Art
[0004] The imprinting technology has been evolved from
microimprinting to nano-imprinting. In recent years, different
processes have been developed successively. For example, in the
photoresist coating technology, the structure on the flat
motherboard is printed on the photoresist layer of substrate, and
then it is cured by ultraviolet radiation. However, this process is
time consuming, and the size of product in limited by the dimension
of motherboard. Thus, the fast and continuous production is unable
to be achieved.
[0005] In addition, in another example, the structure is formed on
the roller by roller imprinting, or wrapped by thin metal sheet
with micro-structure, or formed by the molding process, and then
the structure is transferred onto substrate.
[0006] The roller microimprinting has the advantages of fast
process, mass and continuous production, its importance is
increased day by day, wherein the formation or roller is the key
technology. Most rollers with micro-structure need very expensive
equipments, and the process is very tedious. However, as for the
roller wrapped by thin metal sheet normally, the adherence of thin
metal sheet will not be very close and tight. Thus, the problems
such as mold displacement, warping and the like during imprinting
will be occurred usually. There are problems such as insufficient
strength and high-temperature deterioration during imprinting for
the flexible roller formed by the molding process.
[0007] In addition, the anodic oxidization treatment is required to
be conducted for microimprinting roller. The micropores or
nanopores can be formed on the surface of aluminum by the anodic
oxidization treatment. But because the anodic oxidization treatment
needs a uniform electric field, so the micropores or nanopores will
not be easy to be formed on the curved surface of cylinder or
roller.
[0008] Therefore, in order to get better and more efficient
nanoimprinting technology, it is necessary to develop the
innovative nano-imprinting method to raise the efficiency, reduce
the fabrication time and cost.
SUMMARY OF THE INVENTION
[0009] The invention provides a method for forming imprinting
roller. The anodic oxidization treatment of aluminum is employed to
produce the roller mold with tight adherence.
[0010] Moreover, the invention provides a method for forming
nano-imprinting roller, wherein the micro or sub-micro structure is
generated on the surface of aluminum roller. It can solve the
problem of flexible roller formed by the molding process, in which
the surface structure is easy to be peeled off.
[0011] According to the above-mentioned description, as a method
for forming nano-imprinting roller, an aluminum roller with
cylindrical surface is provided, a photoresist layer is coated on
the cylindrical surface, then a pattern is transferred onto the
photoresist layer; the part of photoresist layer is removed to form
the photoresist layer with pattern on the cylindrical surface; and
an anodic oxidization treatment is carried on the aluminum roller
with patterned photoresist layer. Repeat the above steps to obtain
the nano-imprinting roller with nanopore structure.
[0012] Therefore, the advantage and spirit of the invention can be
understood further by the following detail description of invention
and attached Figures.
BRIEF DESCRIPTION OF THE DRAWINGS
[0013] The foregoing aspects and many of the attendant advantages
of this invention will become more readily appreciated as the same
becomes better understood by reference to the following detailed
description, when taken in conjunction with the accompanying
drawings, wherein:
[0014] FIG. 1A is a drawing illustrating the cross-section of
roller according to an embodiment of the invention.
[0015] FIG. 1B is a drawing illustrating the cross-section of
roller with photoresist layer according to an embodiment of the
invention.
[0016] FIG. 1C is a drawing illustrating the cross-section of
roller with photoresist layer, photo mask and ultraviolet source
according to an embodiment of the invention.
[0017] FIG. 1D is a drawing illustrating the cross-section of
roller with patterned photoresist layer according to an embodiment
of the invention.
[0018] FIG. 2 is a drawing illustrating the anodic oxidization
treatment for roller with patterned photoresist layer according to
an embodiment of the invention.
[0019] FIG. 3 is a drawing illustrating the side view of roller
with the anodic oxidization treatment according to an embodiment of
the invention.
[0020] FIG. 4 is a drawing illustrating the side view of finished
roller according to an embodiment of the invention.
DESCRIPTION OF THE PREFERRED EMBODIMENT
[0021] FIG. 1A, FIG. 1B, FIG. 1C and FIG. 1D show the
cross-sectional diagram of roller according to the embodiment of
the invention. The detail is described as follows.
[0022] The method for forming imprinting roller as shown in FIG.
1A, a conductive roller 10 is provided. The geometrical shape is
cylindrical, thus the cross-section is circular. The cylinder may
be solid cylinder or hollow cylinder. The collected material may be
aluminum or the aluminum alloy, the electroplated aluminum
materials, the conductive materials, or the other alloy formed on
the surface of conductive roller 10. In the embodiment of the
invention, the aluminum made conductive roller 10 is used for the
description, however, the invention is not limited by the
above-mentioned. Moreover, in order to obtain better structure in
the follow-up procedure, a polishing treatment is conducted on the
surface of conductive roller 10.
[0023] Referring to FIG. 1B, a photoresist layer 12 is formed on
the surface of conductive roller 10. In an embodiment, a
photoresist agent is coated on the surface of conductive roller 10
to form a photoresist layer 12, the coating methods include the
immersing coating, electrostatic coating, blade coating, and T-type
extrusion coating etc.
[0024] Referring to FIG. 1C, an ultraviolet source 14 is set near
the conductive roller 10 with the photoresist layer 12 on the
surface. A photo mask 16 is placed between the conductive roller 10
and the ultraviolet source 14. In an embodiment, the geometrical
shape of the photo mask 16 is rectangular, and there is a pattern
on it. After the ultraviolet is passed through the photo mask 16
from the ultraviolet source 14, it is irradiated on the photoresist
layer 12 of conductive roller 10. The photoresist layer 12 is
exposed, and the pattern on the photo mask 16 is transferred to the
photoresist layer 12. Upon exposing, the conductive roller 10 is
rotated at constant speed along the axle of cylinder to achieve
uniform exposure, but the invention is not limited by the
above-mentioned. If required, the ultraviolet source 14 and the
photo mask 16 may rotate with respect the conductive roller 10 at
the constant speed.
[0025] Then, as shown in FIG. 1D, the photoresist layer 12 with
transferred pattern is treated by suitable way, such as the etching
treatment, to remove part of photoresist layer 12, in order to form
the patterned photoresist layer 12 on the conductive roller 10.
[0026] Referring to FIG. 2, the conductive roller 10 with the
patterned photoresist layer 12 is placed in the reaction equipment
20, in order to carry out the anodic oxidization treatment for the
conductive roller 10 with the patterned photoresist layer 12. In an
embodiment, the anodic oxidization treatment is conducted. The
conductive roller 10 is set on the anode of a power supply 22, and
the cathode is a graphite electrode 24. The reaction equipment 20
is heated by a heating controller 26, in order to get the
acceleration and convection effect. Moreover, during the reacting
process, a constant distance is kept between the conductive roller
10 and the graphite electrode 24. The conductive roller 10 is kept
in a self-rotating motion at constant speed (i.e. rotating along
the axle of cylinder at constant speed), and the graphite electrode
24 moves up and down at the constant linear speed relative to the
conductive roller 10. As shown in FIG. 3, during the electrolytic
process, the photoresist layer 12 protected by the pattern will not
be removed by the chemical reaction of electrolytic solution, thus
the nanopore structure 30 is formed.
[0027] It is further described that the steps of FIG. 1B, FIG. 1C
FIG. 1D, FIG. 2 and FIG. 3 can be repeated to obtain more uniform
nanopore structure.
[0028] Then, as shown in FIG. 4, the patterned photoresist layer 12
on the conductive roller 10 is removed to obtain the setting area
of imprinting roller required by the invention. Furthermore, carry
out the anodic oxidization treatment to form the micropores or
nanopores in local area where the photoresist layer 12 with pattern
has been removed. The photoresist layer 12 is removed again, and
the coating, development, and partial removal of the photoresist
layer 12 are carried on for the second time. The micropores or
nanopores are formed in the area without the micropores or
nanopores originally. According to the design, the micropores or
nanopores can be formed in the designed area on the surface of
roller 32. Several repeated processes may be applied to fully cover
the surface of roller by the micropores or nanopores.
[0029] The invention utilizes a limited area on the surface of
roller or a defined local area which is exposed in the anodic
treatment tank. The anodic oxidization treatment is carried on for
the limited area or the defined local area to form the micropores
or nanopores on the surface of roller. Due to it is not easy to
control the electric field, thus the area can be divided into
several parts for the anodic treatment. After the treatment, all
parts with micropores or nanopores are combined to cover the
defined area or full area on the surface of roller.
[0030] According to the above description, the anodic oxidization
treatment of aluminum is applied. Thus, it is not necessary to use
expensive equipment to fabricate the imprinting roller of the
invention and it is not time-consuming. The large-area nanopore
structure can be formed on the surface of cylinder to overcome the
loose adherence of traditional thin metal sheet wrapping and the
defect of conventional molding process. The roll-to-roll production
process can be applied for the fabrication of optical elements, in
order to carry out fast and continuous transfer printing production
on the flexible board, such as PET, PC or photoresist agent.
[0031] It is understood that various other modifications will be
apparent to and can be readily made by those skilled in the art
without departing from the scope and spirit of this invention.
Accordingly, it is not intended that the scope of the claims
appended hereto be limited to the description as set forth herein,
but rather that the claims be construed as encompassing all the
features of patentable novelty that reside in the present
invention, including all features that would be treated as
equivalents thereof by those skilled in the art to which this
invention pertains.
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