U.S. patent application number 12/995998 was filed with the patent office on 2011-06-02 for supporting substrate for preparing semiconductor light-emitting device and semiconductor light-emitting device using supporting substrates.
This patent application is currently assigned to Korea University Industrial & Academic Collaboration Foundation. Invention is credited to Tae Yeon Seong.
Application Number | 20110127567 12/995998 |
Document ID | / |
Family ID | 43608423 |
Filed Date | 2011-06-02 |
United States Patent
Application |
20110127567 |
Kind Code |
A1 |
Seong; Tae Yeon |
June 2, 2011 |
SUPPORTING SUBSTRATE FOR PREPARING SEMICONDUCTOR LIGHT-EMITTING
DEVICE AND SEMICONDUCTOR LIGHT-EMITTING DEVICE USING SUPPORTING
SUBSTRATES
Abstract
The present invention is related to a supporting substrate for
preparing a semiconductor light-emitting device employing a
multi-layered light-emitting structure thin-film and a method for
preparing a semiconductor light-emitting device employing the
supporting substrate for preparing a semiconductor light-emitting
device. The supporting substrate for preparing a semiconductor
light-emitting device is formed by successively laminating a
sacrificial layer, a heat-sink layer and a bonding layer on a
selected supporting substrate. A method for preparing a
semiconductor light-emitting device employing the supporting
substrate for preparing a semiconductor light-emitting device
includes: preparing a first wafer in which a semiconductor
multi-layered light-emitting structure is laminated/grown on an
upper part of an initial substrate; preparing a second wafer which
is a supporting substrate for preparing a semiconductor
light-emitting device; bonding the second wafer on an upper part of
the first wafer; separating the initial substrate of the first
wafer from a result of the bonding; performing passivation after
forming a first ohmic contact electrode on an upper part of the
first wafer from which the initial substrate is separated; and
preparing a single-chip by severing a result of the
passivation.
Inventors: |
Seong; Tae Yeon; (Seoul,
KR) |
Assignee: |
Korea University Industrial &
Academic Collaboration Foundation
Seongbuk-gu, Seoul
KR
|
Family ID: |
43608423 |
Appl. No.: |
12/995998 |
Filed: |
June 2, 2009 |
PCT Filed: |
June 2, 2009 |
PCT NO: |
PCT/KR2009/002938 |
371 Date: |
February 9, 2011 |
Current U.S.
Class: |
257/99 ;
257/E33.005; 438/27 |
Current CPC
Class: |
H01L 33/0075 20130101;
H01L 33/42 20130101; H01L 33/005 20130101; H01L 33/641 20130101;
H01L 33/64 20130101; H01L 33/0095 20130101; H01L 33/0093 20200501;
H01L 33/48 20130101; H01L 33/60 20130101; H01L 33/40 20130101; H01L
33/642 20130101; H01L 33/44 20130101 |
Class at
Publication: |
257/99 ; 438/27;
257/E33.005 |
International
Class: |
H01L 33/02 20100101
H01L033/02 |
Foreign Application Data
Date |
Code |
Application Number |
Jun 2, 2008 |
KR |
10-2008-0051396 |
Jun 2, 2008 |
KR |
10-2008-0051397 |
Jul 15, 2008 |
KR |
10-2008-0068521 |
Jul 15, 2008 |
KR |
10-2008-0068525 |
Claims
1. A supporting substrate for preparing a semiconductor
light-emitting device, comprising: a selected supporting substrate
formed of an electrically insulating material; a sacrificial layer
formed by being laminated on an upper part of the selected
supporting substrate; a heat-sink layer formed of a metal, an alloy
or a solid solution having a high thermal and electrical
conductivity and formed on an upper part of the sacrificial layer;
and a bonding layer formed by being laminated on an upper part of
the heat-sink layer, wherein the supporting substrate is used for a
supporting substrate of a vertical-structured semiconductor
light-emitting device.
2. The supporting substrate for preparing a semiconductor
light-emitting device of claim 1, wherein the electrically
insulating material of the selected supporting substrate has a
difference of thermal expansion coefficient of 2 ppm or less from
an initial substrate.
3. The supporting substrate for preparing a semiconductor
light-emitting device of claim 1, wherein the electrically
insulating material of the selected supporting substrate is a
single crystal, polycrystal or amorphous substance selected from
the group consisting of sapphire (Al.sub.2O.sub.3), aluminum
nitride (AlN), MgO, AlSiC, BN, BeO, TiO.sub.2, SiO.sub.2 and
glass.
4. The supporting substrate for preparing a semiconductor
light-emitting device of claim 1, wherein the sacrificial layer is:
(i) a single crystal, polycrystal or amorphous substance bonded
with nitrogen or oxygen, the substance being at least one selected
from the group consisting of GaN, InGaN, ZnO, InN, In.sub.2O.sub.3,
ITO, SnO.sub.2, Si.sub.3N.sub.4, SiO.sub.2, BeMgO and MgZnO; (ii)
at least one material selected from the group consisting of metals,
alloys, solid solutions, oxides, nitrides and thermophile organic
materials that can be chemically etched, if the sacrificial layer
is composed of materials removable by chemical etching; (iii) at
least one material selected from the group consisting of
heat-resistant adhesive, silicone adhesive and polyvinyl butyral
resin, if the sacrificial layer is composed of a heat-resistant
adhesive material; (iv) a silicate or a silicic acid material, if
the sacrificial layer is an SOG (Spin on Glass) thin film; (v) at
least one selected from the group consisting of silicate, siloxane,
methyl silsequioxane (MSQ), hydrogen silsequioxane (HSQ), MQS+HSQ,
perhydrosilazane (TCPS) and polysilazane, if the sacrificial layer
is an SOD (Spin On Dielectrics); or (vi) at least one selected from
the group consisting of AZ series, SU-8 series, TLOR series, TDMR
series, and GXR series if the sacrificial layer is composed of
photoresist.
5. The supporting substrate for preparing a semiconductor
light-emitting device of claim 1, wherein the thickness of the
heat-sink layer is 0.1 .mu.m to 500 .mu.m.
6. The supporting substrate for preparing a semiconductor
light-emitting device of claim 1, wherein the metal, alloy or solid
solution forming the heat-sink layer comprises at least one
selected from the group consisting of Cu, Ni, Ag, Mo, Al, Au, Nb,
W, Ti, Cr, Ta, Al, Pd, Pt and Si.
7. The supporting substrate for preparing a semiconductor
light-emitting device of claim 1, wherein the bonding layer is a
soldering or brazing alloy material comprising at least one
selected from the group consisting of Ga, Bi, In, Sn, Pb, Au, Al,
Ag, Cu, Ni, Pd, Si and Ge.
8. The supporting substrate for preparing a semiconductor
light-emitting device of claim 1, wherein the sacrificial layer,
the heat-sink layer and the bonding layer laminated/formed on the
upper part of the selected supporting substrate are formed by
physical vapor deposition, chemical vapor deposition or
electrochemical deposition, the sacrificial layer is formed by one
method selected from the group consisting of E-beam evaporator,
thermal evaporator, MOCVD (Metal Organic Chemical Vapor
Deposition), sputtering and PLD (Pulsed Laser Deposition), and the
heat-sink layer is formed by electro plating or electroless
plating.
9. The supporting substrate for preparing a semiconductor
light-emitting device of claim 1, wherein at least one of the
sacrificial layer, the heat-sink layer and the bonding layer of the
supporting substrate for preparing a semiconductor light-emitting
device is selectively patterned in the form of a predetermined
shape, or all of the sacrificial layer, the heat-sink layer and the
bonding layer of the supporting substrate for preparing a
semiconductor light-emitting device are patterned in the form of a
predetermined shape, and the selected supporting substrate is
etched to a predetermined depth.
10. The supporting substrate for preparing a semiconductor
light-emitting device of claim 1, wherein the sacrificial layer is
dissolved in a wet etching solution.
11. A method for preparing a semiconductor light-emitting device,
the method comprising: (a) preparing a first wafer in which
semiconductor multi-layered light-emitting structure is
laminated/grown on an upper part of an initial substrate; (b)
preparing a second wafer which is a supporting substrate for
preparing a semiconductor light-emitting device; (c) bonding the
second wafer on an upper part of the first wafer; (d) separating
the initial substrate of the first wafer from a result of the
bonding; (e) performing passivation after forming a first ohmic
contact electrode on the upper part of the first wafer from which
the initial substrate is separated; and (f) fabricating a
single-chip by severing a result of the passivation, wherein the
supporting substrate for preparing a semiconductor light-emitting
device of the second wafer is formed by successively laminating the
sacrificial layer, the heat-sink layer and the bonding layer on the
selected supporting substrate.
12. The method for preparing a semiconductor light-emitting device
of claim 11, wherein the semiconductor multi-layered light-emitting
structure in the step (a) comprises an n-type semiconductor
cladding layer, a light-emitting active layer and a p-type
semiconductor cladding layer.
13. The method for preparing a semiconductor light-emitting device
of claim 11, wherein each layer of the semiconductor multi-layered
light-emitting structure in the step (a) is composed of a single
crystal of In.sub.x(Ga.sub.yAl.sub.1-y)N(1=x=0, 1=y=0,
x+y>0).
14. The method for preparing a semiconductor light-emitting device
of claim 11, wherein the wafer bonding of the step (c) is performed
by a thermo compression bonding method at the temperature of
100.degree. C. to 600.degree. C. and the pressure of 1 Mpa to 200
Mpa.
15. The method for preparing a semiconductor light-emitting device
of claim 11, wherein the separating of the initial substrate of the
first wafer from the bonded result in the step (d) is performed by
a method selected from the group consisting of a laser lift-off
method irradiating a laser beam to a surface of the initial
substrate, a chemo-mechanical polishing method, and a wet etching
method using a wet etching solution.
16. The method for preparing a semiconductor light-emitting device
of claim 11, wherein the preparing of the semiconductor
light-emitting device in a single-chip in the step (f) comprises:
(f1) attaching a temporary supporting substrate formed of organic
or inorganic bonding materials in the opposite direction of the
supporting substrate for preparing a semiconductor light-emitting
device; (f2) separating and removing the selected supporting
substrate by thermochemical dissociation of the sacrificial layer
with an electromagnetic light including a laser beam having an
appropriate absorption wavelength range according to a material
used for the sacrificial layer; and (f3) severing a result of the
above steps in a vertical direction without any bonding process of
the supporting substrate if the thickness of the heat-sink layer is
greater than a predetermined value, and forming an additional
bonding layer composed of an electrically conductive metal, solid
solution or alloy and bonding a third supporting substrate to the
heat-sink layer using the additional bonding layer and then
severing a result of the forming and bonding in a vertical
direction if the thickness of the heat-sink layer is smaller than a
predetermined value.
17. The method for preparing a semiconductor light-emitting device
of claim 16, wherein the thickness of the heat-sink layer of the
supporting substrate for preparing a semiconductor light-emitting
device is 80 .mu.m to 500 .mu.m.
18. The method for preparing a semiconductor light-emitting device
of claim 16, wherein the third supporting substrate is formed of: a
single crystal or polycrystal wafer comprising at least one
component selected from the group consisting of Si, Ge, SiGe, ZnO,
GaN, AlGaN and GaAs having thermal and electrical conductivity; or
a metal, alloy or solid solution foil comprising at least one
selected from the group consisting of Mo, Cu, Ni, Nb, Ta, Ti, Au,
Ag, Cr, NiCr, CuW, CuMo and NiW.
19. The method for preparing a semiconductor light-emitting device
of claim 11, wherein a material for forming the first ohmic contact
electrode in the step (e) is composed of a material comprising at
least one selected from the group consisting of Al, Ti, Cr, Ta, Ag,
Al, Rh, Pt, Au, Cu, Ni, Pd, In, La, Sn, Si, Ge, Zn, Mg, NiCr, PdCr,
CrPt, NiTi, TiN, CrN, SiC, SiCN, InN, AlGaN, InGaN, rare earth
metals and alloys, metallic silicides, semiconducting silicides,
CNTNs (carbonnanotube networks), transparent conducting oxides
(TCO) and transparent conducting nitrides (TCN).
20. The method for preparing a semiconductor light-emitting device
of claim 11, wherein the first wafer in the step (a) is prepared by
forming an optical reflective layer, an electrical insulating
layer, a diffusion barrier layer, a heat-sink layer, or a bonding
layer on the upper part of the semiconductor multi-layered
light-emitting structure laminated and grown on the upper part of
the substrate.
21. The method for preparing a semiconductor light-emitting device
of claim 20, wherein the electrical insulating layer, the diffusion
barrier layer, the heat-sink layer, or the bonding layer on the
upper part of the semiconductor multi-layered light-emitting
structure is formed by physical vapor deposition, chemical vapor
deposition, electro plating or electroless plating.
22. The method for preparing a semiconductor light-emitting device
of claim 11, wherein the sacrificial layer laminated on the
selected supporting substrate of the second wafer is composed of a
material soluble in a wet etching solution, and the sacrificial
layer of the supporting substrate for preparing a semiconductor
light-emitting device in the step (f) is wet-etched by dissolving
the sacrificial layer into a wet etching solution to separate and
remove the selected supporting substrate and then a single chip is
obtained by severing a result of the separating and removing.
23. The method for preparing a semiconductor light-emitting device
of claim 11, wherein the first ohmic contact electrode in the step
(e) is formed on an upper surface of a buffering layer or an n-type
semiconductor cladding layer.
24. The method for preparing a semiconductor light-emitting device
of claim 11, wherein the supporting substrate for preparing a
semiconductor light-emitting device of the second wafer is the
supporting substrate for preparing a semiconductor light-emitting
device according to claim 1.
25. The method for preparing a semiconductor light-emitting device
of claim 12, wherein each layer of the semiconductor multi-layered
light-emitting structure in the step (a) is composed of a single
crystal of In.sub.x(Ga.sub.yAl.sub.1-y)N(1=x=0, 1=y=0,
x+y>0).
26. The method for preparing a semiconductor light-emitting device
of claim 12, wherein the separating of the initial substrate of the
first wafer from the bonded result in the step (d) is performed by
a method selected from the group consisting of a laser lift-off
method irradiating a laser beam to a surface of the initial
substrate, a chemo-mechanical polishing method, and a wet etching
method using a wet etching solution.
Description
TECHNICAL FIELD
[0001] The present invention relates to a supporting substrate for
preparing a semiconductor light-emitting device using a
multi-layered light-emitting structure thin film and a method for
preparing a semiconductor light-emitting device using the
supporting substrate for preparing a semiconductor light-emitting
device.
[0002] More particularly, in a Group III-V nitride-based
semiconductor light-emitting device vertically structured in the up
and down ohmic contact electrode structure, it relates to a
semiconductor light-emitting device which minimizes damage to a
semiconductor single crystal multi-layered light-emitting structure
thin film, thereby improving the overall performance, by bonding a
multi-layered light-emitting structure thin film formed on an
initial substrate (e.g., Al.sub.2O.sub.3 , SiC, Si, GaAs, GaP) to
grow the Group III-V nitride-based semiconductor and a supporting
substrate for preparing a semiconductor light-emitting device
through wafer bonding and then separating/removing the
multi-layered light-emitting structure thin film from the initial
substrate through the laser lift off, chemo-mechanical polishing,
or wet-etching process.
BACKGROUND
[0003] Generally, a semiconductor light-emitting device has a
light-emitting diode (LED) and a laser diode (LD) generating light
when a forward current flows. Particularly, the LED and LD have a
common p-n junction, and when a current is applied to the
light-emitting device, the current is converted to photons and
thereby light is emitted from the device. The light emitted from
the LED and LD has various wavelengths from a long wavelength to a
short wavelength depending on the semiconductor material(s). Above
all, LEDs made from wide band-gap semiconductors allow red, green
and blue colors in visible bands and have been applied widely in
industries such as displays for electronic devices, traffic lights,
and various light sources for display devices. Due to the
development of white light in recent years, it will be widely used
as the next generation light source for general lighting.
[0004] A Group III-V nitride-based semiconductor is generally grown
hetro-epitaxially on the upper part of sapphire, silicon carbide
(SiC), or silicon (Si) which is an initial substrate having a
significantly different lattice constant and thermal expansion
coefficient to obtain high quality semiconductor thin films.
However, since the sapphire initial substrate has poor thermal
conductivity, it cannot apply a large current to LEDs. Since the
sapphire initial substrate is an electrical insulator and thereby
is difficult to respond to static electricity flowed in from
outside, it has a high possibility to cause failure due to the
static electricity. Such drawbacks not only reduce reliability of
devices but also cause a lot of constraints in packaging
processes.
[0005] Further, the sapphire initial substrate, which is an
insulator, has a MESA structure in which both an n-type ohmic
contact electrode (hereinafter referred as to "first ohmic contact
electrode") and a p-type ohmic contact electrode (hereinafter
referred as to "second ohmic contact electrode") are formed in the
same growth direction as that of a multi-layered light-emitting
structure. Since an LED chip area should be higher than a certain
size, there is limit to reducing the LED chip area, restricting the
improvement of LED chip production.
[0006] In addition to these disadvantages of the MESA-structured
LEDs grown on the upper part of the sapphire substrate as an
initial substrate, it is difficult to release a great amount of
heat outward generated inevitably during the operation of the
light-emitting device since the sapphire substrate has poor thermal
conductivity. Due to these reasons, there is a limitation in
applying the MESA structure, to which the sapphire substrate is
attached, to light-emitting devices used for a large area and a
large capacity (that is, a large current) such as the light for
large displays and general lighting. When a high current is applied
to a light-emitting device for a long period of time, the internal
temperature of a light-emitting active layer is gradually increased
largely due to the generated heat and thereby an LED light-emitting
efficiency is gradually decreased.
[0007] A silicon carbide (SiC) substrate, unlike the sapphire
substrate, not only has good thermal and electric conductivity but
also allows a multi-layered light-emitting structure thin film to
be laminated and grown since it has a similar lattice constant and
thermal expansion coefficient (TEC), which are important factors in
the semiconductor single crystal thin film growth, as that of Group
III-V nitride-based semiconductors. Further, it allows the
manufacturing of various types of vertical-structured
light-emitting devices. However, because producing a high quality
SiC substrate is not easy, it is more expensive than producing
other single crystal substrates, making it difficult for mass
production.
[0008] Therefore, it is most desirable to provide a
high-performance light-emitting device by using a multi-layered
light-emitting structure laminated and grown on a sapphire
substrate in view of the technology, economy and performance. As
described above, much effort has been made to produce a
high-performance vertical structured LED by growing a high quality
multi-layered light-emitting structure thin-film on the upper part
of a sapphire initial substrate, lifting-off the Group III-V
nitride-based semiconductor multi-layered light-emitting structure
thin film from the sapphire substrate and using the result, in
order to resolve the problems associated with the MESA-structured
LEDs produced by using a thin film which is Group III-V
nitride-based semiconductor multi-layered light-emitting structure
laminated/grown on the upper part of a sapphire substrate which is
an initial substrate.
[0009] FIG. 1 is a sectional view illustrating a process for
separating a sapphire initial substrate by employing a conventional
laser lift off (LLO) process. As shown in FIG. 1, when a laser
beam, which is a strong energy source, is irradiated to the
backside of a transparent sapphire initial substrate 100, the laser
beam is absorbed strongly at the interface and the temperature of
900.degree. C. or higher is thereby generated momentarily and
causes thermochemical dissociation of gallium nitride (GaN) at the
interface, and further separates the sapphire initial substrate 100
from the nitride-based semiconductor thin film 120. However, it has
been reported in many documents that in the laser lift-off process
of the Group III-V nitride-based semiconductor multi-layered
light-emitting structure thin film, the semiconductor single
crystal thin film is damaged and broken after being separated from
the sapphire substrate due to a mechanical stress generated between
the thick sapphire initial substrate and the Group III-V
nitride-based semiconductor thin film because of the difference in
the lattice constant and thermal expansion coefficient. When the
Group III-V nitride-based semiconductor multi-layered
light-emitting structure thin film is damaged and broken, it causes
a large leaky current, reduces the chip yield of light-emitting
devices and reduces the overall performance of the light-emitting
devices. Therefore, studies are currently under way for
manufacturing a high-performance vertical-structured LED by using
the lift-off process of the sapphire substrate which can minimize
damage to the Group III-V nitride-based semiconductor multi-layered
light-emitting structure thin film and the separated semiconductor
single crystal thin film.
[0010] Various methods have been suggested to minimize damage and
breaking of the Group III-V nitride-based semiconductor
multi-layered light-emitting structure thin film when the sapphire
initial substrate is separated by the LLO process. FIG. 2 is
sectional views illustrating a process for forming a stiffening
supporting substrate in the growth direction by employing a wafer
bonding, electro plating or electroless plating process prior to
the LLO process according to a conventional technology to prevent
damage and breaking of a semiconductor multi-layered light-emitting
structure thin film. Referring to (a) in FIG. 2, a supporting
substrate 240, which is strongly adhered and is structurally stable
by using wafer bonding, is formed on the upper part of a bonding
layer 230 before lifting off semiconductor single crystal
multi-layered light-emitting structure thin films 210, 220 from an
initial substrate 200 by irradiating the backside of the initial
substrate made of transparent sapphire with a laser beam. Referring
to (b) in FIG. 2, a supporting substrate 242, which is strongly
adhered and is structurally stable, is formed on the upper part of
a seed layer 232 by using an electro plating process before lifting
off the semiconductor single crystal multi-layered light-emitting
structure thin films 210, 220 from the initial substrate 200 made
of sapphire.
[0011] FIG. 3 is a sectional view illustrating vertical-structured
Group III-V nitride-based semiconductor light-emitting devices
manufactured by introducing the supporting substrate, which is
strongly adhered and is structurally stable, according to the
conventional technology used in the process of FIG. 2.
[0012] The figure indicated by (a) in FIG. 3 is a sectional view
illustrating a semiconductor light-emitting device manufactured by
using the method for manufacturing the supporting substrate
indicated by (a) in FIG. 2. Referring to (a) in FIG. 2 illustrating
an LED section bonded with a wafer, it is successively constituted
with a supporting substrate 340, which is a thermal and electrical
conductor, a bonding layer 330, a multi-layered metal layer 350
including a second ohmic contact electrode, a second semiconductor
cladding layer 380, a light-emitting active layer 370, a first
semiconductor cladding layer 360, and a first ohmic contact
electrode 390. A semiconductor wafer such as silicon (Si),
germanium (Ge), silicon-germanium (SiGe), gallium arsenide (GaAs)
and the like having an excellent electrical conductivity is
preferably used as the electro conductive supporting substrate
340.
[0013] However, the supporting substrate 340, used for the
vertical-structured light-emitting device (LED) as shown in (a) of
FIG. 3, causes significant wafer warpage and fine micro-cracks
inside the semiconductor multi-layered light-emitting structure
when Si or another conductive supporting substrate wafer is bonded
by wafer bonding because it has a significant difference in thermal
expansion coefficient (TEC) against the sapphire substrate on which
the semiconductor single crystal thin film is grown/laminated. Such
problems further cause processing difficulties and lower the
performance of LED manufactured therefrom and the product
yield.
[0014] The figure indicated by (b) in FIG. 3 is a sectional view
illustrating a semiconductor light-emitting device manufactured by
using the method for manufacturing the supporting substrate
indicated by (b) in FIG. Referring to (b) in FIG. 3 illustrating
the sectional view of the LED formed through electro plating, the
vertical-structured light-emitting device (LED) formed through an
LLO and electro plating process is successively constituted with a
supporting substrate 342, which is electrically conductive, a seed
layer 332, a multi-layered metal layer 352 including a second ohmic
contact electrode, a second semiconductor cladding layer 380, a
light-emitting active layer 370, a first semiconductor cladding
layer 360, and a first ohmic contact electrode 390. The
electrically conductive supporting substrate 342, which is a
metallic thick film formed through electro plating, is preferably
formed with a single metal such as Cu, Ni, W, Au, Mo and the like
or an alloy composed thereof.
[0015] The LED supporting substrate 342 having the structure
described above as shown in (b) of FIG. 3 has a significantly
higher thermal expansion coefficient and flexibility than the
sapphire substrate due to the metal or alloy thick film formed
through electro plating, thereby causing curling, warpage,
breaking, etc.
[0016] Therefore, it is highly demanded that highly efficient
supporting substrates and methods for manufacturing the high
performance vertical-structured light-emitting devices using the
same are develop to resolve the problems of wafer warpage,
breaking, micro-crack, annealing and singulate chip processing,
post-processing problems, low product yield, etc. while
manufacturing the vertical-structured Group III-V nitride-based
semiconductor light-emitting device using the LLO process.
DISCLOSURE
Technical Problem
[0017] The present invention provides a supporting substrate for
preparing a semiconductor light-emitting device that does not cause
wafer warpage when a sapphire substrate, on which a thin film
having Group III-V nitride-based semiconductor multi-layered
light-emitting structure is laminated and grown, is wafer-bonded
with a supporting substrate by bonding materials or breakings and
micro-cracks inside the thin film having a semiconductor
multi-layered light-emitting structure after an LLO processing.
[0018] The present invention also provides a high performance
vertical-structured Group III-V nitride-based semiconductor
light-emitting device using the supporting substrate for preparing
a semiconductor light-emitting device, manufactured by
laminating/growing a multi-layered light-emitting structure thin
film composed of Group III-V nitride-based semiconductor single
crystal on an upper part of a sapphire initial substrate, and
employing the LLO process to minimize damage and breaking of the
semiconductor single crystal thin film.
[0019] The present invention also provides a method for
manufacturing the high performance vertical-structured Group III-V
nitride-based semiconductor light-emitting device.
Technical Solution
[0020] Contrived to solve the above technical problems, an aspect
of the present invention features a supporting substrate for
preparing a semiconductor light-emitting device, which can include:
a selected supporting substrate formed of an electrical insulating
material; a sacrificial layer formed by being laminated on an upper
part of the selected supporting substrate; a heat-sink layer formed
of a metal, an alloy or a solid solution having a high thermal and
electric conductivity by being laminated on an upper part of the
sacrificial layer; and a bonding layer formed by being laminated on
an upper part of the heat-sink layer. The supporting substrate is
used for a supporting substrate of a vertical-structured
semiconductor light-emitting device.
[0021] The electrical insulating material of the selected
supporting substrate can have a difference of thermal expansion
coefficient of 2 ppm or less from an initial substrate. The
electrical insulating material of the selected supporting substrate
can be a single crystal, polycrystal or amorphous substance
selected from the group consisting of sapphire (Al.sub.2O.sub.3),
aluminum nitride (AlN), MgO, AlSiC, BN, BeO, TiO.sub.2, SiO.sub.2
and glass.
[0022] The sacrificial layer can be a single crystal, polycrystal
or amorphous substance bonded with nitrogen or oxygen, and the
substance can be at least one selected from the group consisting of
GaN, InGaN, ZnO, InN, In.sub.2O.sub.3, ITO, SnO.sub.2,
Si.sub.3N.sub.4, SiO.sub.2, BeMgO and MgZnO.
[0023] Further, if the sacrificial layer is separated from the
selected supporting substrate by chemical etching, the sacrificial
layer can be at least one material selected from the group
consisting of metals, alloys, solid solutions, oxides, nitrides and
thermophile organic materials.
[0024] Further, if the sacrificial layer is composed of a
heat-resistant adhesive material, the sacrificial layer can be at
least one material selected from the group consisting of
heat-resistant adhesive, silicone adhesive and polyvinyl butyral
resin.
[0025] Further, the sacrificial layer can be a silicate or a
silicic acid material if the sacrificial layer is an SOG (Spin on
Glass) thin film, and the sacrificial layer can be at least one
selected from the group consisting of silicate, siloxane, methyl
silsequioxane (MSQ), hydrogen silsequioxane (HSQ), MQS+HSQ,
perhydrosilazane (TCPS) and polysilazane if the sacrificial layer
is an SOD (Spin On Dielectrics).
[0026] Further, the sacrificial layer can be at least one selected
from the group consisting of AZ series, SU-8 series, TLOR series,
TDMR series, and GXR series if the sacrificial layer is composed of
photoresist.
[0027] A composition material for the sacrificial layer can be
appropriately selected according to characteristics of a selected
supporting substrate, separation methods and vertical structures
finally to be manufactured.
[0028] A thickness of the heat-sink layer can be 0.1 .mu.m to 500
.mu.m. The metal, alloy or solid solution forming the heat-sink
layer can include at least one selected from the group consisting
of Cu, Ni, Ag, Mo, Al, Au, Nb, W, Ti, Cr, Ta, Al, Pd, Pt and
Si.
[0029] The bonding layer can be a soldering or brazing alloy
material including at least one selected from the group consisting
of Ga, Bi, In, Sn, Pb, Au, Al, Ag, Cu, Ni, Pd, Si and Ge.
[0030] The sacrificial layer, the heat-sink layer and the bonding
layer laminated/formed on the upper part of the selected supporting
substrate can be formed by physical vapor deposition, chemical
vapor deposition or electrochemical deposition, and the sacrificial
layer can be formed by one method selected from the group
consisting of E-beam evaporator, thermal evaporator, MOCVD (Metal
Organic Chemical Vapor Deposition), sputtering and PLD (Pulsed
Laser Deposition), and the heat-sink layer can be formed by electro
plating or electroless plating.
[0031] At least one of the sacrificial layer, the heat-sink layer
and the bonding layer of the supporting substrate for preparing a
semiconductor light-emitting device can be selectively patterned in
the form of a predetermined shape, or all of the sacrificial layer,
the heat-sink layer and the bonding layer of the supporting
substrate for preparing a semiconductor light-emitting device can
be patterned in the form of a predetermined shape, and the selected
supporting substrate can be etched to a predetermined depth.
[0032] According to an embodiment, the sacrificial layer can be
dissolved in a wet etching solution. Another aspect of the present
invention features a method for preparing a semiconductor
light-emitting device that includes: (a) preparing a first wafer in
which semiconductor multi-layered light-emitting structure is
laminated/grown on an upper part of an initial substrate; (b)
preparing a second wafer which is a supporting substrate for
preparing a semiconductor light-emitting device; (c) bonding the
second wafer on an upper part of the first wafer; (d) separating
the initial substrate of the first wafer from a result of the
bonding; (e) performing passivation after forming a first ohmic
contact electrode on the upper part of the first wafer from which
the initial substrate is separated; and (f) fabricating a
single-chip by severing a result of the passivation, the supporting
substrate for preparing a semiconductor light-emitting device of
the second wafer can be formed by successively laminating the
sacrificial layer, the heat-sink layer and the bonding layer on the
selected supporting substrate.
[0033] Each layer of the semiconductor multi-layered light-emitting
structure in the step (a) can be composed of a single crystal
having composition of In.sub.x(Ga.sub.yAl.sub.1-y)N(1=x=0, 1=y=0,
x+y>0).
[0034] The wafer bonding of the step (c) can be performed by a
thermo compression bonding method at the temperature of 100.degree.
C. to 600.degree. C. and the pressure of 1 Mpa to 200 Mpa.
[0035] The separating of the initial substrate of the first wafer
from the bonded result in the step (d) can be performed by a method
selected from the group consisting of a laser lift-off method
irradiating a laser beam to the surface of the initial substrate, a
chemo-mechanical polishing method, and a wet etching method using a
wet etching solution.
[0036] The preparing of the semiconductor light-emitting device in
a single-chip of the step (f) can include: (f1) attaching a
temporary supporting substrate formed of organic or inorganic
bonding materials in the opposite direction of the supporting
substrate for preparing a semiconductor light-emitting device; (f2)
separating and removing the selected supporting substrate by
thermochemical dissociation of the sacrificial layer with an
electromagnetic light including a laser beam having an appropriate
absorption wavelength range selected according to a material used
for the sacrificial layer; and (f3) severing a result of the above
steps in a vertical direction without any bonding process of the
supporting substrate if the thickness of the heat-sink layer is
greater than a predetermined value, and forming an additional
bonding layer composed of an electrically conductive metal, solid
solution or alloy and bonding a third supporting substrate to the
heat-sink layer using the additional bonding layer and then
severing a result of the forming and bonding in a vertical
direction if the thickness of the heat-sink layer is smaller than a
predetermined value.
[0037] The thickness of the heat-sink layer of the supporting
substrate for preparing a semiconductor light-emitting device can
be 80 .mu.m to 500 .mu.m.
[0038] The third supporting substrate can be formed of: a single
crystal or polycrystal wafer including at least one component
selected from the group consisting of Si, Ge, SiGe, ZnO, GaN, AlGaN
and GaAs having thermal and electric conductivity; or a metal,
alloy or solid solution foil including at least one selected from
the group consisting of Mo, Cu, Ni, Nb, Ta, Ti, Au, Ag, Cr, NiCr,
CuW, CuMo and NiW.
[0039] A material forming the first ohmic contact electrode in the
step (e) can be composed of a material including at least one
selected from the group consisting of Al, Ti, Cr, Ta, Ag, Al, Rh,
Pt, Au, Cu, Ni, Pd, In, La, Sn, Si, Ge, Zn, Mg, NiCr, PdCr, CrPt,
NiTi, TiN, CrN, SiC, SiCN, InN, AlGaN, InGaN, rare earth metals and
alloys, metallic silicides, semiconducting silicides, CNTNs
(carbonnanotube networks), transparent conducting oxides (TCO) and
transparent conducting nitrides (TCN).
[0040] The first wafer in the step (a) can be prepared by forming
an optical reflective layer, an electrical insulating layer, a
diffusion barrier layer, a heat-sink layer, or a bonding layer on
the upper part of the semiconductor multi-layered light-emitting
structure laminated and grown on the upper part of the
substrate.
[0041] The electrical insulating layer, the diffusion barrier
layer, the heat-sink layer, or the bonding layer on the upper part
of the semiconductor multi-layered light-emitting structure can be
formed by physical vapor deposition, chemical vapor deposition,
electro plating or electroless plating.
[0042] The sacrificial layer laminated on the selected supporting
substrate of the second wafer can be composed of a material soluble
in a wet etching solution, and the sacrificial layer of the
supporting substrate for preparing a semiconductor light-emitting
device in the step (f) can be wet-etched by dissolving the
sacrificial layer into a wet etching solution to separate and
remove the selected supporting substrate and then a single chip can
be obtained by severing a result of the separating and
removing.
[0043] The first ohmic contact electrode in the step (e) can be
formed on an upper surface of a buffering layer or an n-type
semiconductor cladding layer.
Advantageous Effect
[0044] As mentioned above, the present invention provides an easy
method for manufacturing a vertical-structured light-emitting
device by arranging the first and second ohmic contact electrodes
on the upper part and the lower part of the Group III-V
nitride-based semiconductor single crystal multi-layered
light-emitting structure, respectively, to improve the production
yield of LED chips and separating the sapphire substrate for
efficient heat dissipation and prevention of static electricity.
Further, the present invention minimizes micro-crack or breaking in
the Group III-V nitride-based semiconductor and separates the Group
III-V nitride-based semiconductor thin film into wafer bonding
materials by performing wafer bonding not to have any wafer warpage
in the supporting substrate for preparing a semiconductor
light-emitting device before separating the sapphire substrate by
using the laser lift-off process, thereby reducing the stress
applied to the Group III-V nitride-based semiconductor layers
during the separation of the sapphire substrate from the Group
III-V nitride-based semiconductor multi-layered light-emitting
structure by using the laser life-off process.
[0045] In addition, when the Group III-V nitride-based
semiconductor multi-layered light-emitting structure is formed on
the upper part of the supporting substrate for preparing a
semiconductor light-emitting device, since any post-processing such
as annealing, passivation, etc. can be performed in the present
invention, it is possible to provide a highly reliable
light-emitting device that causes no thermal or mechanical damage.
In addition, when the high reliability light-emitting device formed
on the upper part of the supporting substrate for preparing a
semiconductor light-emitting device is performed for a unified chip
process, the method of the present invention allows a high
production yield and productivity that could not be achieved in the
wafer bonding process with conventional supporting substrates,
since wet etching can be used in the present invention rather than
in the conventional mechanical and laser processes.
[0046] The supporting substrate for preparing a semiconductor
light-emitting device allows not only the manufacturing of a high
quality nitride-based semiconductor single crystal multi-layered
thin film by employing wafer bonding but also any kind of
post-processing after separating the sapphire substrate so that it
is suitable for manufacturing high performance vertical-structured
Group III-V nitride-based light-emitting devices.
[0047] Further, the present invention allows the manufacturing of a
single-chip-type semiconductor light-emitting device by using a
sacrificial layer formed on the supporting substrate for preparing
a semiconductor light-emitting device without any mechanical
processing such as sawing, laser scribing, etc. of the
light-emitting device formed on the "supporting substrate for
preparing a semiconductor light-emitting device" wafer of the
present invention.
BRIEF DESCRIPTION OF THE DRAWINGS
[0048] FIG. 1 is a sectional view illustrating a general laser
lift-off (LLO) process in manufacturing a vertical-structured
semiconductor light-emitting device according to a conventional
technology.
[0049] FIG. 2 is sectional views illustrating supporting substrates
which are strongly adhered and are structurally stable in the
growth direction of a Group III-V nitride-based semiconductor
single crystal thin film before performing the laser lift off
process according to a conventional technology.
[0050] FIG. 3 is sectional views illustrating the LLO process and
vertical-structured Group III-V nitride-based semiconductor
light-emitting devices manufactured by bonding a supporting
substrate which is strongly adhered and is structurally stable
according to a conventional technology.
[0051] FIG. 4 shows sectional views illustrating examples of
various modes of supporting substrates for preparing semiconductor
light-emitting devices according to an embodiment of the present
invention.
[0052] FIG. 5 shows sectional views illustrating examples of
various modes of supporting substrates for preparing semiconductor
light-emitting devices according to Preparation Example 2 of the
present invention.
[0053] FIG. 6 shows sectional views illustrating examples of
various modes of supporting substrates for preparing semiconductor
light-emitting devices according to Preparation Example 3 of the
present invention.
[0054] FIG. 7 is a sectional view illustrating the single-chip-type
vertical-structured semiconductor light-emitting device
manufactured by using the supporting substrate for preparing a
semiconductor light-emitting device according to Example 1 of the
present invention.
[0055] FIG. 8 shows sectional views illustrating a process for
manufacturing the vertical-structured semiconductor light-emitting
device in Preparation Example 1 of the present invention.
[0056] FIG. 9 is a sectional view illustrating the final
single-chip-type vertical-structured semiconductor light-emitting
device in Preparation Example 2 manufactured by using the
supporting substrate for preparing a semiconductor light-emitting
device of the present invention.
[0057] FIG. 10 shows sectional views illustrating a process of
manufacturing the vertical-structured semiconductor light-emitting
device according to Preparation Example 2 of the present
invention.
[0058] FIG. 11 is a sectional view illustrating the final
single-chip-type vertical-structured semiconductor light-emitting
device in Preparation Example 3 manufactured by using the
supporting substrate for preparing a semiconductor light-emitting
device of the present invention.
[0059] FIG. 12 is sectional views illustrating a process of
manufacturing the semiconductor light-emitting device according to
Preparation Example 3 of FIG. 11.
[0060] FIG. 13 is a sectional view illustrating the final
single-chip-type vertical-structured semiconductor light-emitting
device in Preparation Example 4 manufactured by using the
supporting substrate for preparing a semiconductor light-emitting
device of the present invention.
[0061] FIG. 14 is sectional views illustrating a process of
manufacturing the semiconductor light-emitting device according to
Preparation Example 4 of the semiconductor light-emitting device of
FIG. 13.
[0062] FIG. 15 is a sectional view illustrating the final
single-chip-type vertical-structured semiconductor light-emitting
device in Preparation Example 4 manufactured by using the
supporting substrate for preparing a semiconductor light-emitting
device of the present invention.
[0063] FIG. 16 is sectional views illustrating a process of
manufacturing the semiconductor light-emitting device according to
Preparation Example 4 of the semiconductor light-emitting device of
FIG. 15.
DESCRIPTION OF KEY ELEMENTS
[0064] 40: supporting substrate for preparing a semiconductor
light-emitting device [0065] 50, 52, 54, 56, 58: supporting
substrate for preparing a semiconductor light-emitting device
[0066] 60: 62: 64: 66: 68: supporting substrate for preparing a
semiconductor light-emitting device [0067] 70, 90, 1100, 1300,
1500: semiconductor light-emitting device [0068] 871, 1271, 1471:
trench [0069] 881, 1281, 1481, 1681: supporting substrate for
preparing a semiconductor light-emitting device
Mode for Invention
[0069] [0070] Hereinafter, a supporting substrate for preparing a
semiconductor light-emitting device, a vertical-structured Group
III-V nitride-based semiconductor light-emitting device and a
method for manufacturing thereof will be described in detail with
reference to the accompanying drawings.
EXAMPLE 1
PREPARATION OF A SUPPORTING SUBSTRATE FOR PREPARING A SEMICONDUCTOR
LIGHT-EMITTING DEVICE
Preparation Example 1
Preparation of a Supporting Substrate for Preparing a Semiconductor
Light-Emitting Device
[0071] Hereinafter, the structure of a supporting substrate for
preparing a semiconductor light-emitting device and its sequential
manufacturing method according to an embodiment of the present
invention will be described.
[0072] FIG. 4(a) is a sectional view illustrating a supporting
substrate for preparing a semiconductor light-emitting device
according to an embodiment of the invention.
[0073] Referring to FIG. 4(a), a supporting substrate for preparing
a semiconductor light-emitting device 40 includes a selected
supporting substrate 400, a sacrificial layer 410, a heat-sink
layer 420, and a bonding layer 430.
[0074] A method for manufacturing the above-mentioned supporting
substrate for preparing a semiconductor light-emitting device 40
includes: (a) preparing a selected supporting substrate; (b)
forming a sacrificial layer; (c) forming a heat-sink layer; and (d)
forming a bonding layer. As shown in FIG. 4(a), the supporting
substrate for preparing the semiconductor light-emitting device 40
according to an embodiment of the present invention includes a
tri-layer on the upper part of the selected supporting substrate
400. In other words, the sacrificial layer 410, the heat-sink layer
420 and the bonding layer 430 are successively formed on the upper
part of the selected supporting substrate 400, which is an
electrical non-conductor.
[0075] The structure of the supporting substrate for preparing a
semiconductor light-emitting device and its manufacturing method
will be described in detail below.
[0076] The selected supporting substrate 400 can have a difference
of 2 ppm or less in thermal expansion coefficient from that of the
substrate and be composed of single crystal, polycrystal, or
amorphous substrate wafer such as sapphire (Al.sub.2O.sub.3),
aluminum nitride (AlN), MgO, AlSiC, BN, BeO, TiO.sub.2, SiO.sub.2,
glass and the like.
[0077] The selected supporting substrate 400 can absorb a
mechanical impact of a laser beam and functions as a supporter for
minimizing damage of a single crystal multi-layered light-emitting
structure thin-film having the thickness of several .mu.m while
separating a Group III-V nitride-based semiconductor single crystal
multi-layered light-emitting structure thin film from sapphire,
which is an initial substrate, by using a strong energy source of
laser beam.
[0078] In particular, the selected supporting substrate needs to be
selected according to a method for manufacturing a
vertical-structured light-emitting device to be manufactured. In
other words, wafer bonding is performed to bond the supporting
substrate for preparing a semiconductor light-emitting device with
a first wafer before performing an LLO process. Here, wafer warpage
may be often caused due to thermal property (e.g., thermal
expansion coefficient) of the bonded wafer after the wafer bonding.
It shall be apparent that the selected supporting substrate is a
single crystal, polycrystal, or amorphous substrate wafer such as
sapphire (Al.sub.2O.sub.3), aluminum nitride (AlN), MgO, AlSiC, BN,
BeO, TiO.sub.2, SiO.sub.2, glass and the like having 2 ppm or less
of thermal expansion coefficient, compared to sapphire which is an
initial substrate.
[0079] The sacrificial layer 410 is a material layer necessary for
the separation and removal of the selected supporting substrate 400
from a final light-emitting device using a laser beam which is a
strong energy source. The material of the sacrificial layer 410 can
be a single crystal, polycrystal, or amorphous material bonded with
nitrogen or oxygen including GaN, InGaN, ZnO, InN, In.sub.2O.sub.3,
ITO, SnO.sub.2, Si.sub.3N.sub.4, SiO.sub.2, BeMgO, MgZnO and the
like. It can also be a Si single crystal, polycrystal, or amorphous
material.
[0080] It is required that the sacrificial layer 410 be selected
according to the characteristics of the selected supporting
substrate and the structure of a vertical-structured light-emitting
device to be manufactured.
[0081] The heat-sink layer 420 releases a great amount of heat
outward generated during the operation of the manufactured
vertical-structured light-emitting device and functions to form a
tight bond between the upper and lower layers and as a supporter.
Therefore, the heat-sink layer 420 can be composed of a metal,
alloy or solid solution having excellent thermal and electric
conductivity and formed by CVD or PVD, preferably by electro
plating or electroless plating.
[0082] The bonding layer 430 is a material layer to bond the first
wafer, which is the sapphire substrate on which the Group III-V
nitride-based semiconductor single crystal multi-layered thin film
is laminated/grown, and the supporting substrate for preparing a
semiconductor light-emitting device and is composed of an alloy of
soldering or brazing including at least one selected from the group
consisting of Ga, Bi, In, Sn, Pb, Au, Al, Ag, Cu, Ni, Pd, Si,
Ge.
[0083] The sectional views shown in FIG. 4 illustrate examples of
various modes of supporting substrates for preparing semiconductor
light-emitting devices according to an embodiment of the present
invention. FIGS. 4(a) and (d) are sectional views illustrating
examples of supporting substrates for preparing a semiconductor
light-emitting device which are not patterned, while FIGS. 4(b),
(c), (e) and (f) are sectional views illustrating examples of
supporting substrates for preparing a semiconductor light-emitting
device which are patterned. FIG. 4(b) illustrates the supporting
substrate for preparing a semiconductor light-emitting device in
which the bonding layer and the heat-sink layer are patterned, and
FIG. 4(c) illustrates the supporting substrate for preparing a
semiconductor light-emitting device in which the bonding layer, the
heat-sink layer and the sacrificial layer are patterned. FIG. 4(d)
illustrates the supporting substrate for preparing a semiconductor
light-emitting device in which the heat-sink layer 422 has a
certain thickness, and FIGS. (e) and (f) illustrate patterned modes
of supporting substrates for preparing a semiconductor
light-emitting device having the thick heat-sink layer.
[0084] As shown in FIGS. (b), (c), (e), and (f), the supporting
substrate for preparing a semiconductor light-emitting device
according to an embodiment of the present invention allows an easy
removal process of the selected supporting substrate 400 by
patterning the bonding layer and the heat-sink layer, or the
heat-sink layer and the sacrificial layer.
Preparation Example 2
Preparation of a Supporting Substrate for Preparing a Semiconductor
Light-Emitting Device
[0085] Hereinafter, the structure of a supporting substrate for
preparing a semiconductor light-emitting device and its sequential
manufacturing method according to an embodiment of the present
invention will be described with reference to FIG. 5.
[0086] FIG. 5(a) is a sectional view illustrating a supporting
substrate for preparing a semiconductor light-emitting device
according to an embodiment of the present invention.
[0087] Referring to FIG. 5(a), a supporting substrate for preparing
a semiconductor light-emitting device 50 includes a selected
supporting substrate 500, a sacrificial layer 510, a heat-sink
layer 520, and a bonding layer 530. A method for manufacturing the
above mentioned supporting substrate for preparing a semiconductor
light-emitting device 50 includes: (a) preparing a selected
supporting substrate; (b) forming a sacrificial layer; (c) forming
a heat-sink layer; and (d) forming a bonding layer. As shown in
FIG. 5(a), the supporting substrate for preparing a semiconductor
light-emitting device 50 according to an embodiment of the present
invention includes a tri-layer on the upper part of the selected
supporting substrate 500. In other words, the sacrificial layer
510, the heat-sink layer 520 and the bonding layer 530 are
successively formed on the upper part of the selected supporting
substrate 500 which is an electrical conductor.
[0088] The selected supporting substrate 500 has an excellent
thermal and electric conductivity. The selected supporting
substrate 500 can be a single crystal or polycrystal wafer chosen
from Si, Ge, SiGe, ZnO, GaN, AlGaN, GaAs and the like, or a metal
foil chosen from Mo, Cu, Ni, Nb, Ta, Ti, Au, Ag, Cr, NiCr, CuW,
CuMo, NiW and the like.
[0089] The sacrificial layer 510 is composed of a material easily
soluble in a wet etching solution and functions to separate a
multi-layered light-emitting structure thin film of a
light-emitting device from the selected supporting substrate 500 or
to strongly bond a multi-layered light-emitting structure thin film
of a light-emitting device and the selected supporting substrate
500 according to structure of a vertical-structured semiconductor
light-emitting device finally to be manufactured.
[0090] The heat-sink layer 520 releases a great amount of heat
outward generated during the operation of the manufactured
vertical-structured light-emitting device and functions to form a
tight bond between the upper and lower layers and as a supporter.
Therefore, the heat-sink layer 520 can be composed of a metal,
alloy or solid solution having an excellent thermal conductivity,
include at least one chosen from Cu, Ni, Ag, Mo, Al, Au, Nb, W, Ti,
Cr, Ta, Al, Pd, Pt, and Si, and be 0.1 .mu.m to 500 .mu.m thick as
shown in FIGS. 5(a) and (b).
[0091] Supporting substrates for preparing a semiconductor
light-emitting device 50, 52 have the heat-sink layer 520 having a
thin thickness of 80 .mu.m or less formed on the upper part of the
selected supporting substrate 500 having an excellent thermal and
electric conductivity.
[0092] In the supporting substrates for preparing a semiconductor
light-emitting device 50, 52, wafer bonding with a first wafer, an
LLO process and post-processing are performed sequentially, and
then mechanical sawing or laser scribing are performed only in the
vertical direction (A-A' arrow direction) to provide a
light-emitting device as a single chip vertical-structured LED.
[0093] On the other hand, the supporting substrates for preparing a
semiconductor light-emitting device 54, 56, 58 have the heat-sink
layer 520 having a thick thickness of 80 .mu.m to 500 .mu.m as
shown in FIGS. 5(c), (d) and (e). In the supporting substrates for
preparing a semiconductor light-emitting device 54, 56, 58 having
relatively thick thicknesses of the heat-sink layer 520, sawing or
laser scribing process are performed in the vertical direction
(A-A' arrow direction), and at the same time wet etching of the
sacrificial layer 510 is performed in the horizontal direction
(B-B' arrow direction) to provide a light-emitting device as a
single chip vertical-structured LED.
Preparation Example 3
Preparation of a Supporting Substrate for Preparing a Semiconductor
Light-Emitting Device
[0094] Hereinafter, the supporting substrate for preparing a
semiconductor light-emitting device according to an embodiment of
the present invention will be described.
[0095] FIG. 6 is sectional views illustrating supporting substrates
for preparing a semiconductor light-emitting device according to
another embodiment of the invention. The supporting substrates for
preparing a semiconductor light-emitting device 60, 62, 64, 66, 68
are composed of a selected supporting substrate 600.
[0096] The selected supporting substrate 600 of the supporting
substrates for preparing a semiconductor light-emitting device
according to an embodiment can have a difference of 2 ppm or less
in thermal expansion coefficient, compared to an initial substrate,
and be composed of single crystal, polycrystal, or amorphous
substrate wafer such as sapphire (Al.sub.2O.sub.3), aluminum
nitride (AlN), MgO, AlSiC, BN, BeO, TiO.sub.2, SiO.sub.2, glass and
the like.
[0097] The supporting substrates for preparing a semiconductor
light-emitting device 60, 62 in FIGS. 6(a) and (b) have a heat-sink
layer 620 having a relatively thin thickness of 80 .mu.m or less
and include the selected supporting substrate 600 which is thermal
and electrical non-conductor. On the other hand, the supporting
substrates for preparing a semiconductor light-emitting device 64,
66, 68 in FIGS. 6(c), (d) and (e) have a heat-sink layer 622 having
a relatively thick thickness of 80 .mu.m to 500 .mu.m and include
the selected supporting substrate 600 which is thermal and
electrical non-conductor. FIGS. 6(a) and (c) illustrate supporting
substrates for preparing a semiconductor light-emitting device
which are not patterned, while FIGS. 6(b), (d) and (e) illustrate
supporting substrates for preparing a semiconductor light-emitting
device which are patterned. As shown in FIG. 6, the supporting
substrate for preparing a semiconductor light-emitting device
includes a tri-layer. In other words, a sacrificial layer 610, a
heat-sink layer 620 and a bonding layer 630 are laminated
successively on the upper part of the selected supporting substrate
600.
[0098] In particular, the sacrificial layer 610 can be easily
soluble in a wet etching solution and thus function to separate the
selected supporting substrate 600 from the multi-layered
light-emitting structure thin film of the light-emitting
device.
[0099] The heat-sink layer 620 is composed of metal, alloy or solid
solution having an excellent thermal and electric conductivity so
as to release a great amount of heat outward generated during the
operation of the manufactured vertical-structured light-emitting
device and function to form a tight bond between the upper and
lower layers and as a supporter.
[0100] It is preferable that the heat-sink layer 620 is composed of
metal, alloy or solid solution having an excellent and electrical
conductivity and includes at least one chosen from Cu, Ni, Ag, Mo,
Al, Au, Nb, W, Ti, Cr, Ta, Al, Pd, Pt, and Si and has a thickness
of 0.1 .mu.m to 500 .mu.m.
[0101] The heat-sink layer 620 can be formed by CVD or PVD,
preferably by electro plating or electroless plating.
[0102] The bonding layer 630 can use the same material as or a
different material from a bonding layer including a diffusion
barrier layer laminated/formed on the uppermost part of a first
wafer which is a sapphire substrate, on which the Group III
nitride-based semiconductor single crystal multi-layered thin film
is formed. The bonding layer 630 can be composed of an alloy
material of soldering or brazing including at least one chosen from
Ga, Bi, In, Sn, Pb, Au, Al, Ag, Cu, Ni, Pd, Si, and Ge.
[0103] As shown in FIG. 6(a) to (e), in the supporting substrates
for preparing a semiconductor light-emitting device, wafer bonding
with a first wafer, LLO process and post-processing are
successively performed, and then mechanical sawing or laser
scribing to the vertical direction (A-A' arrow direction) are
performed at the same time of wet etching of the sacrificial layer
610 to the horizontal direction (B-B' arrow direction) to provide a
light-emitting device as a single chip vertical-structured LED,
regardless of the thickness of the heat-sink layer 620 laminated on
thermally and electrically non-conductive selected supporting
substrate 600.
EXAMPLE 2
PREPARATION OF A SEMICONDUCTOR LIGHT-EMITTING DEVICE USING A
SUPPORTING SUBSTRATE FOR PREPARING A SEMICODUCTOR LIGHT-EMITTING
DEVICE
Preparation Example 1
Preparation of a Semiconductor Light-Emitting Device
[0104] Hereinafter, the structure of a semiconductor light-emitting
device using a supporting substrate for preparing a semiconductor
light-emitting device and its manufacturing method according to an
embodiment of the present invention will be described.
[0105] FIG. 7 is a sectional view illustrating a semiconductor
light-emitting device manufactured by using the supporting
substrate for preparing a semiconductor light-emitting device
according to Example 1 of the present invention. A semiconductor
light-emitting device 70 in FIG. 7 is a light-emitting device
manufactured by using a supporting substrate for preparing a
semiconductor light-emitting device including a heat-sink layer 780
having the thin thickness of 80 .mu.m or less.
[0106] The semiconductor light-emitting device 70 is formed by
laminating a first ohmic contact electrode 780, a buffering layer
710, an n-type semiconductor cladding layer 720, a light-emitting
active layer 730, a p-type semiconductor cladding layer 740, a
second ohmic contact electrode 750 and a first bonding layer 760,
in which a second bonding layer 788, a heat-sink layer 786, a third
bonding layer 721 and a third supporting substrate 731 are
laminated on the first bonding layer 760. The third supporting
substrate 731 can be a single crystal or polycrystal wafer, such as
Si, Ge, SiGe, ZnO, GaN, AlGaN, GaAs, or a metal foil such as Mo,
Cu, Ni, Nb, Ta, Ti, Au, Ag, Cr, NiCr, CuW, CuMo, NiW and the like,
which have an excellent thermal and electric conductivity. The
third bonding layer 721, presented between the third supporting
substrate 731 and the heat-sink layer 786, can be formed of a
thermally stable metal, alloy, or solid solution.
[0107] Preferably, the first ohmic contact electrode 780 can be
also formed on the upper part of the n-type semiconductor cladding
layer 720 after removing the buffering layer 710.
[0108] A method for manufacturing a semiconductor light-emitting
device having the structure described according to an embodiment
will be sequentially described with reference to FIG. 8(a) to
(h).
[0109] Referring to FIG. 8, a method for manufacturing a
semiconductor light-emitting device by using a supporting substrate
for preparing a semiconductor light-emitting device according to an
embodiment includes: (a) preparing a first wafer in which a Group
III-V nitride-based semiconductor multi-layered light-emitting
structure is laminated/grown on the upper part of sapphire, which
is an initial substrate (see FIG. 8(a)); (b) preparing a second
wafer which is a supporting substrate for preparing a semiconductor
light-emitting device (see FIG. 8(b)); (c) wafer bonding (see FIG.
8(c)); (d) lifting off the sapphire initial substrate (see FIG.
8(d)); (e) post-processing (see FIG. 8(e) to (h)); and (f)
manufacturing a single-chip.
[0110] Each process will be described in detail below.
[0111] Referring to FIG. 8(a), the step (a) for preparing a first
wafer performs laminating and growing a quality semiconductor
single crystal multi-layered thin film on a /transparent sapphire
substrate 800 to lift off the multi-layered light-emitting
structure thin film composed of a Group III-V nitride-based
semiconductor from the substrate by using the LLO process. A low
and high temperature buffering layer 810, which is a general
multi-layered light-emitting structure thin film of a
light-emitting device, an n-type semiconductor cladding layer 820,
a light-emitting active layer 830, and a p-type semiconductor
cladding layer 840 are successively laminated/grown on the upper
part of the initial substrate sapphire 800 by using the MOCVD and
MBE growth systems, which are the most general growth equipments of
Group III-V nitride-based semiconductor thin films. Then, a second
high reflective ohmic contact electrode 850 is formed on the p-type
semiconductor cladding layer and successively a first bonding layer
860 including a diffusion barrier layer 862 is laminated/grown
thereon. Trenches 871 are formed up to the sapphire substrate or
deeper to form a single chip by using patterning regularly arranged
in a plurality of rectangular or square and dry etching before
conducting wafer bonding with a second wafer. The second high
reflective ohmic contact electrode 850 is formed as a material
layer including at least one chosen from Ag, Al, Rh, Pt, Au, Cu,
Ni, Pd, metallic silicides, Ag-based alloys, Al-based alloys,
Rh-based alloys, CNTNs (carbon nanotube networks), transparent
conductive oxides, and transparent conductive nitrides. The
diffusion barrier layer 862 is formed as a material layer including
at least one chosen from Ti, W, Cr, Ni, Pt, NiCr, TiW, CuW, Ta,
TiN, CrN, and TiWN, and the first bonding layer 860 is formed of
soldering or brazing alloy including at least one chosen from Ga,
Bi, In, Sn, Pb, Au, Al, Ag, Cu, Ni, Pd, Si, and Ge.
[0112] The Group III-V nitride-based semiconductor thin film,
laminated/grown on the transparent sapphire 800 which is an initial
substrate in the step (a) by using metal organic chemical vapor
deposition (MOCVD), liquid phase epitaxy, hydride vapor phase
epitaxy, molecular beam epitaxy, or metal organic vapor phase
epitaxy (MOVPE), can have the composition of
In.sub.x(Ga.sub.yAl.sub.1-y)N(1=x=0, 1=y=0, x+y>0). The
multi-layered light-emitting structure of the light-emitting device
is formed by directly laminating/growing the low-temperature
buffering layer at the temperature of 600.degree. C. or less on the
sapphire substrate 800 and further successively laminating/growing
the high-temperature buffering layer 810, the Si-doped
semiconductor cladding layer 820, the semiconductor light-emitting
active layer 830, and Mg-doped semiconductor cladding layer 840.
Here, the high-temperature buffering layer 810 can be a Si-doped
Group III-V nitride-based semiconductor. The light-emitting active
layer 830 can be a single quantum well (SQW) structure or a multi
quantum well (MQW) structure composed of a barrier layer of
In.sub.x(Ga.sub.yAl.sub.1-y)N and a well layer of
In.sub.x(Ga.sub.yAl.sub.1-y)N, respectively. A light-emitting
device having wide band gaps between a long wavelength of
InN(.about.0.7 eV) band gap and a short wavelength of
AlN(.about.6.2 eV) band gap can be manufactured by controlling a
composition ratio of In, Ga, Al of the light-emitting active layer
830. The band gap of the well layer can be lower than that of the
barrier layer to provide electron and hole carriers to the well to
improve the internal quantum efficiency. In particular, at least
one of the well layer and barrier layer can be Si-doped or Mg-doped
to improve the light-emitting characteristics and lower the forward
direction operation voltage.
[0113] It is preferable that trenches 871 are formed up to the
sapphire substrate or deeper to form a single chip by using
patterning regularly arranged in a plurality of rectangles or
squares and dry etching before wafer bonding the first wafer to a
second wafer, which is the supporting substrate for preparing a
semiconductor light-emitting device 881. It is also possible to
apply the first wafer without trenches.
[0114] Referring to FIG. 8(b), the (b) step is to prepare the
second wafer which is the supporting substrate for preparing a
semiconductor light-emitting device 881. The supporting substrate
for preparing a semiconductor light-emitting device 881 is formed
by successively laminating a sacrificial layer 884, a heat-sink
layer 886, and a second bonding layer 888 on the upper part of a
selected supporting substrate 882.
[0115] In more detail, the selected supporting substrate 882 can be
an electrical insulating material having a difference of thermal
expansion coefficient of 2 ppm or less from an initial substrate
and be formed of one chosen from single crystal, polycrystal, or
amorphous substrate wafer such as sapphire (Al.sub.2O.sub.3),
aluminum nitride (AlN), MgO, AlSiC, BN, BeO, TiO.sub.2, SiO.sub.2,
glass and the like.
[0116] The sacrificial layer 884 which is the first layer formed on
the selected supporting substrate 882 can be a single crystal,
polycrystal, or amorphous material bonded with nitrogen or oxygen
including GaN, InGaN, ZnO, InN, In.sub.2O.sub.3, ITO, SnO.sub.2,
Si.sub.3N.sub.4, SiO.sub.2, BeMgO, MgZnO and the like in order to
conduct the unifying process using a laser beam which is a strong
energy source when a single-chip is finally manufactured, or it can
be also a Si-single crystal, polycrystal, or amorphous
material.
[0117] The heat-sink layer 886, which is the second layer formed on
the selected supporting substrate 882 and is formed with a material
having a superior thermal and electrical conductivity, can be
metal, alloy, solid solution, and semiconductor material to easily
release a great amount of heat outward generated during the
operation of the manufactured vertical-structured light-emitting
device and function as a supporter of the multi-layered
light-emitting structure of the light-emitting device. The
heat-sink layer can have a relatively thin thickness of 80 .mu.m or
less.
[0118] The second bonding layer 888, which is the third layer
formed on the selected supporting substrate 882 and wafer-bonded
with the first wafer, can be the same material as that of the first
bonding layer 860, which is placed in the most upper part of the
first wafer, but it can be also composed of different materials.
The three layers formed on the selected supporting substrate of the
supporting substrate for preparing a semiconductor light-emitting
device can be formed through physical or chemical vapor deposition,
and in particular, the heat-sink layer 886 can be formed through
electro plating or electroless plating.
[0119] The selected supporting substrate 882 comprised in the
supporting substrate for preparing a semiconductor light-emitting
device 881 can be one chosen from sapphire (Al.sub.2O.sub.3), AN,
MgO, AlSiC, BN, BeO, TiO.sub.2, SiO.sub.2 substrate and the like
which is an electrical insulator and the sacrificial layer 884 can
be a single crystal, polycrystal, or amorphous material layer
bonded with nitrogen or oxygen including GaN, InGaN, ZnO, InN,
In.sub.2O.sub.3, ITO, SnO.sub.2, Si3N4, SiO.sub.2, BeMgO, MgZnO and
the like or a Si single crystal, polycrystal, or amorphous material
layer. The heat-sink layer 886, which is relatively thin, can be
formed with a high thermal and electrical conductivite metal, alloy
or solid solution including at least one chosen from Cu, Ni, Ag,
Mo, Al, Au, Nb, W, Ti, Cr, Ta, Al, Pd, Pt, and Si, or a material
including at least one chosen from nitrides and oxides thereof. The
second bonding layer 888 can be a soldering or brazing alloy
material including at least one chosen from Ga, Bi, In, Sn, Pb, Au,
Al, Ag, Cu, Ni, Pd, Si, and Ge. However, they are not limited
thereto.
[0120] Referring to FIG. 8(c), the wafer bonding in the step (c)
bonds the first wafer and the second wafer by a thermo-compressive
method. Thermo compression bonding in the step (c) can be performed
at the temperature of 100.degree. C. to 600.degree. C. and the
pressure of 1 Mpa to 200 Mpa.
[0121] Referring to FIG. 8(d), the step (d) is a step to lift off
the sapphire substrate. When a laser beam, which is a strong energy
source, is irradiated to the back side of the transparent sapphire,
the interface between the semiconductor single crystal
multi-layered light-emitting structure and the sapphire substrate
absorbs the strong laser so that the sapphire substrate is lifted
off by thermo-chemical dissociation of gallium nitride (GaN)
existing in the interface.
[0122] It is preferable that the laser beam, which is a strong
energy source, first irradiates to the back side of the transparent
sapphire substrate to cause thermo-chemical dissociation to lift
off the initial substrate 800 in the step (d). Here, it is
preferable that a step is further included to treat the surface of
the Group III-V nitride-based semiconductor thin film, which is
exposed to air, with at least one chosen from H.sub.2SO.sub.4, HCl,
KOH, and BOE at the temperature of 30.degree. C. to 200.degree. C.
It is also preferred that the initial substrate 800 is completely
removed through the mechanical-chemical polishing and sequential
wet etching process. The wet etching process of the sapphire
substrate 800 can be performed in an etching solution chosen from
sulfuric acid (H.sub.2SO.sub.4), chromic acid (CrO.sub.3),
phosphoric acid (H.sub.3PO.sub.4), gallium (Ga), magnesium (Mg),
indium (In), aluminum (Al) and a mixture thereof. A temperature of
the wet etching solution can be 200.degree. C. or higher.
[0123] Referring to FIG. 8(e), the post-processing in the step (e)
can include cleaning, passivation of the light-emitting device,
dry-etching, first ohmic contact electrode material deposition and
annealing, etc.
[0124] The first ohmic contact electrode 880, which is thermally
stable, is formed on the upper part of the buffering layer 810 or
the n-type semiconductor cladding layer 820 through the first ohmic
contact electrode material deposition and annealing process. It is
preferable that the step of electric passivation on the surface or
sides of the Group III nitride-based semiconductor is further
included by using at least one chosen from Si.sub.3N.sub.4,
SiO.sub.2, or electric insulating materials. In addition, the first
ohmic contact electrode 880 can be formed of a material including
at least one chosen from Al, Ti, Cr, Ta, Ag, Al, Rh, Pt, Au, Cu,
Ni, Pd, In, La, Sn, Si, Ge, Zn, Mg, NiCr, PdCr, CrPt, NiTi, TiN,
CrN, SiC, SiCN, InN, AkGaN, InGaN, rare earth metals and alloys,
metallic silicides, semiconducting silicides, CNTNs(carbonnanotube
networks), transparent conducting oxides (TCO), transparent
conducting nitrides, and TCNs.
[0125] The step (f) of manufacturing a single chip can provide the
final single-chip-type light-emitting device structure through the
wafer bonding (step (c)) according to the thickness of the
heat-sink layer 886 (which is 80 .mu.m or less) of the supporting
substrate for preparing a semiconductor light-emitting device of
the step (b) and post processing as shown in FIG. 5.
[0126] Referring to FIG. 8(f), when the thickness of the heat-sink
layer 886 of the supporting substrate for preparing a semiconductor
light-emitting device 881 is 80 .mu.m or less, a temporary
supporting substrate (hereinafter referred to as "TSS) 811 formed
of organic or inorganic bonding materials is attached in the
opposite direction of the supporting substrate for preparing a
semiconductor light-emitting device. The selected supporting
substrate 882, which is an electrical insulator, is then separated
and removed by thermo-chemical dissociation of the sacrificial
layer 884 selecting a laser beam having an appropriate absorption
wavelength range according to the material used for the sacrificial
layer 884 as shown in FIG. 8(g). The final LED chip of the
light-emitting device in FIG. 7 is manufactured by bonding a third
supporting substrate 831 composed of an electrically conductive
material and the heat-sink layer 886 using the bonding layer 821
composed of electrically conductive soldering or brazing metal or
alloy, and cutting vertically (A-A' arrow direction of FIG.
8(h)).
Preparation Example 2
Preparation of a Semiconductor Light-Emitting Device
[0127] A semiconductor light-emitting device manufactured by using
the supporting substrate for preparing a semiconductor
light-emitting device according to Preparation Example 1 and a
method for manufacturing thereof will be described with reference
to FIG. 9 and FIG. 10.
[0128] FIG. 9 is a sectional view illustrating the semiconductor
light-emitting device manufactured by using the supporting
substrate for preparing a semiconductor light-emitting device
according to an embodiment of the present invention.
[0129] A supporting substrate for preparing a semiconductor
light-emitting device according to an embodiment of the invention
has the same layered structure and manufacturing process with the
supporting substrate for preparing a semiconductor light-emitting
device of Example 1 described above, except a thicker thickness of
a heat-sink layer 986 which is 80 .mu.m to 500 .mu.m.
[0130] A semiconductor light-emitting device 90 in FIG. 9 is a
light-emitting device manufactured by using a supporting substrate
for preparing a semiconductor light-emitting device having a
thicker heat-sink layer, in which the heat-sink layer, laminated on
the upper part of the selected supporting substrate of the
supporting substrate for preparing a semiconductor light-emitting
device, has the thickness of 80 .mu.m to 500 .mu.m which is
relatively thicker.
[0131] As shown in FIG. 9, the semiconductor light-emitting device
90 is formed by laminating a first ohmic contact electrode 980, a
buffering layer 910, an n-type semiconductor cladding layer 920, a
light-emitting active layer 930, a p-type semiconductor cladding
layer 940, a second ohmic contact electrode and a first bonding
layer 960. A second bonding layer 988 and a heat-sink layer 986 are
formed on the first bonding layer 960. Therefore, in the
semiconductor light-emitting device 90, manufactured by using a
supporting substrate for preparing a semiconductor light-emitting
device according to an embodiment of the invention, the thick
heat-sink layer 986 can support the multi-layered light-emitting
structure of the semiconductor light-emitting device without having
a supporter as a third supporting substrate after removing the
selected supporting substrate, which is an electrical insulator, by
conducting the LLO process through the sacrificial layer.
[0132] It is preferable that the first ohmic contact electrode 980
is also formed on the upper part of the n-type semiconductor
cladding layer 920 after removing the buffering layer 910.
[0133] FIG. 10(a) to (h) are sectional views illustrating
sequentially a process of manufacturing the high performance
vertical-structured light-emitting device by using the supporting
substrate for preparing a semiconductor light-emitting device
according to an embodiment of the present invention. FIG. 10(a) to
(g) are the same as in FIGS. 8(a) to (g), except the thickness of
the heat-sink layer 1086 of the supporting substrate for preparing
a semiconductor light-emitting device. Thus, the redundant
description will be omitted.
[0134] As shown in FIGS. 10(a) to (g), after the semiconductor
light-emitting device is manufactured by using the supporting
substrate for preparing a semiconductor light-emitting device of
the present invention through the method in Example 1, the selected
supporting substrate 1082 of the supporting substrate for preparing
a semiconductor light-emitting device is removed. As shown in FIG.
10(h), an LED chip of the semiconductor light-emitting device 90 in
FIG. 9 is finally prepared by making a cut vertically (A-A' arrow
direction of FIG. 10(h)). The supporting substrate for preparing a
semiconductor light-emitting device 1081, used for manufacturing
the semiconductor light-emitting device 90 according to an
embodiment of the invention, including the thick heat-sink layer
1086, can support the multi-layered semiconductor light-emitting
device by the thick heat-sink layer without having an additional
third supporting substrate.
Preparation Example 3
Preparation of a Semiconductor Light-Emitting Device
[0135] The structure of a semiconductor light-emitting device
manufactured by using the supporting substrate for preparing a
semiconductor light-emitting device according to Example 1 and a
method for manufacturing thereof will be described in detail with
reference to FIG. 11 and FIG. 12.
[0136] FIG. 11 is a sectional view illustrating the semiconductor
light-emitting device 1100 manufactured by using the supporting
substrate for preparing a semiconductor light-emitting device of
Example 1 of the present invention. As shown in FIG. 11, the
semiconductor light-emitting device 1100 is formed by laminating a
first ohmic contact electrode 1180, a buffering layer 1110, an
n-type semiconductor cladding layer 1120, a light-emitting active
layer 1130, a p-type semiconductor cladding layer 1140, a second
ohmic contact electrode 1150, and a first bonding layer 1160, a
second bonding layer 1188, a heat-sink layer 1186, a sacrificial
layer 1184 and a selected supporting substrate 1182 are laminated
and formed in the first bonding layer 1160.
[0137] In particular, the first ohmic contact electrode 1180 can be
also formed on the upper part of the n-type semiconductor cladding
layer 1120 after removing the buffering layer 1110.
[0138] The selected supporting substrate 1182 of the supporting
substrate for preparing a semiconductor light-emitting device 1180,
used for manufacturing the semiconductor light-emitting device
according to an embodiment of the invention, is an electric
conductor, and the semiconductor light-emitting device is
manufactured regardless of the thickness of the heat-sink layer
1186 of the supporting substrate for preparing a semiconductor
light-emitting device. The selected supporting substrate of the
supporting substrate for preparing a semiconductor light-emitting
device can be selectively separated according to the thickness of
the heat-sink layer 1186 of the supporting substrate for preparing
a semiconductor light-emitting device in the process of preparing a
final single chip. In this case, when the thickness of the
heat-sink layer is 80 .mu.m or greater, the selected supporting
substrate can be separated and removed by dissolving the
sacrificial layer in a wet etching solution.
[0139] A method for manufacturing the semiconductor light-emitting
device 1100 having the described structure according to an
embodiment of the invention will be sequentially described with
reference to FIG. 12(a) to (f).
[0140] Referring to FIG. 12, a method for manufacturing the
semiconductor light-emitting device 1100 by using the supporting
substrate for preparing a semiconductor light-emitting device of
the invention includes: (a) preparing a first wafer in which a
Group III-V nitride-based semiconductor multi-layered
light-emitting structure is laminated/grown on a sapphire initial
substrate (see FIG. 12(a)); (b) preparing a second wafer which is
the supporting substrate for preparing a semiconductor
light-emitting device 780 (see FIG. 12(b)); (c) wafer bonding (see
FIG. 12(c)); (d) lifting off the sapphire initial substrate (see
FIG. 12(d)); (e) post-processing (see FIG. 12(e)); and (f)
manufacturing a single chip (see FIG. 12(f)).
[0141] Hereinafter, each process will be described in detail.
[0142] Referring to FIG. 12(a), the step (a) of preparing a first
wafer is performed by laminating/growing a high quality
semiconductor single crystal multi-layered thin film on the
transparent sapphire substrate in order to lift off the
multi-layered light-emitting structure thin film composed of Group
III-V nitride-based semiconductor from the substrate through the
LLO process. A low and high temperature buffering layer 1210, which
is a general multi-layered light-emitting structure thin film of a
light-emitting device, an n-type semiconductor cladding layer 1220,
a light-emitting active layer 1230, and a p-type semiconductor
cladding layer 1240 are successively laminated/grown on the upper
part of the initial substrate sapphire 1200 by using the MOCVD and
MBE growth systems which are the most general growth equipments of
Group III-V nitride-based semiconductor thin films.
[0143] Then, a second high reflective ohmic contact electrode 1250
is formed on the p-type semiconductor cladding layer which is the
uppermost layer of the multi-layered light-emitting structure thin
film, and a first bonding layer 1260 including a diffusion barrier
layer is successively laminated/grown thereon.
[0144] Trenches 1271 are formed up to the sapphire substrate or
deeper to form a single chip by using patterning regularly arranged
in a plurality of rectangles or squares and a dry etching process
before conducting wafer bonding with a second wafer, which is the
supporting substrate for preparing a semiconductor light-emitting
device 1281. In some cases, a first wafer which does not have
trenches can be also applied. The second high reflective ohmic
contact electrode 1250 is formed as a material layer including at
least one chosen from Ag, Al, Rh, Pt, Au, Cu, Ni, Pd, metallic
silicides, Ag-based alloy, Al-based alloy, Rh-based alloy, CNTNs
(carbon nanotube networks), transparent conductive oxides, and
transparent conductive nitrides. The diffusion barrier layer is
formed as a material layer including at least one chosen from Ti,
W, Cr, Ni, Pt, NiCr, TiW, CuW, Ta, TiN, CrN, and TiWN, and the
first bonding layer 1260 is formed of a soldering or brazing alloy
including at least one chosen from Ga, Bi, In, Sn, Pb, Au, Al, Ag,
Cu, Ni, Pd, Si, and Ge.
[0145] The Group III-V nitride-based semiconductor thin film,
laminated/grown on the transparent sapphire 1200, which is an
initial substrate, in the step (a) by using metal organic chemical
vapor deposition (MOCVD), liquid phase epitaxy, hydride vapor phase
epitaxy, molecular beam epitaxy, or metal organic vapor phase
epitaxy (MOVPE), can have the composition of
In.sub.x(Ga.sub.yAl.sub.1-y)N(1=x=0, 1=y=0, x+y>0).
[0146] The high temperature buffering layer 1210 can be a Si-doped
Group III-V nitride-based semiconductor. The semiconductor
light-emitting active layer 1230 can be a single quantum well (SQW)
structure or a multi quantum well (MQW) structure composed of a
barrier layer of In.sub.x(Ga.sub.yAl.sub.1-y)N and a well layer of
In.sub.x(Ga.sub.yAl.sub.1-y)N, respectively. A light-emitting
device having wide band gaps between a long wavelength of
InN(.about.0.7 eV) band gap and a short wavelength of
AlN(.about.6.2 eV) band gap can be manufactured by controlling the
composition ratio of In, Ga, Al of the light-emitting active layer
1230. The band gap of the well layer of the light-emitting active
layer 1230 can be lower than that of the barrier layer to provide
electron and hole carriers to the well to improve the internal
quantum efficiency. In particular, at least one of the well layer
and the barrier layer can be Si-doped or Mg-doped to improve the
light emitting characteristics and lower the forward direction
operation voltage.
[0147] It is preferable that at least one annealing process is
performed to the first wafer to not only form a second high
reflective ohmic contact electrode but also improve interfacial
adhesion between the layers before the wafer bonding.
[0148] Referring to FIG. 12(b), the (b) step is to prepare the
second wafer which is the supporting substrate for preparing a
semiconductor light-emitting device 1281. The supporting substrate
for preparing a semiconductor light-emitting device 1281 is formed
by successively laminating a sacrificial layer 1284, a heat-sink
layer 1286, and a second bonding layer 1288 on the upper part of a
selected supporting substrate 1282. As described above, the thermal
expansion coefficient (TEC) of the supporting substrate for
preparing a semiconductor light-emitting device 1281 composed with
three layers on the selected supporting substrate 1282 can be
similar or identical to that of the sapphire or nitride-based
semiconductor which is an initial substrate.
[0149] The selected supporting substrate 1282 can be a single
crystal, polycrystal, or amorphous wafer such as Si, Ge, SiGe, ZnO,
GaN, AlGaN, GaAs and the like, or a metal foil such as Mo, Cu, Ni,
Nb, Ta, Ti, Au, Ag, Cr, NiCr, CuW, CuMo, NiW and the like, which
have superior thermal and electric conductivity. In addition, the
sacrificial layer 1284 presented between the selected supporting
substrate 1282 and the heat-sink layer 1286 can be composed of a
thermally stable metal, alloy, or solid solution.
[0150] In more detail, the sacrificial layer 1284, which is the
first layer, can be metal, alloy, solid solution, semiconductor,
insulator or the like which can be quickly dissolved in a wet
etching solution so that manufacturing a final single chip can be
smoothly carried out without causing thermal/mechanical shocks to
the neighboring single chips during the unifying process.
[0151] The heat-sink layer 1286 formed of a material having
superior thermal and electric conductivity, which is the second
layer, can be metal, alloy, solid solution, semiconductor material
which can easily dissipate heat outward generated during the
operation of the light-emitting device and support the
multi-layered light-emitting structure which is the light-emitting
device.
[0152] The second bonding layer 1288, which is the third layer, can
be the same material as that of the first bonding layer 1260, which
is positioned at the uppermost part of the first wafer, for wafer
bonding with the first wafer, but can be also composed with a
different material. The three layers laminated on the upper part of
the selected supporting substrate of the supporting substrate for
preparing a semiconductor light-emitting device can be formed by
physical vapor deposition or chemical vapor deposition, preferably
by an electro plating or electroless plating process.
[0153] The sacrificial layer 1284 can be formed of a material
including at least one chosen from AlAs, SiO.sub.2, Si3N4, ITO,
Sn.sub.2O, In.sub.2O.sub.3, ZnO, ZnS, ZnSe, CrN, TiN, Cr, various
metals, alloys, and oxides. The heat-sink layer 1286 can be formed
of a material including at least one chosen from various metals or
alloys including at least one chosen from Cu, Ni, Ag, Mo, Al, Au,
Nb, W, Ti, Cr, Ta, Al, Pd, Pt, and Si, regardless of the thickness.
The second bonding layer 1288 can be formed of soldering or brazing
alloy including at least one chosen from Ga, Bi, In, Sn, Pb, Au,
Al, Ag, Cu, Ni, Pd, Si, Ge, and the like.
[0154] Referring to FIG. 12(c), the wafer bonding in the step (c)
bonds the first wafer and the second wafer by a thermo-compressive
method. Thermo compression bonding in the step (c) can be performed
at the temperature of 100.degree. C. to 600.degree. C. and the
pressure of 1 Mpa to 200 Mpa.
[0155] Referring to FIG. 12(d), the step (d) is a step for lifting
off the sapphire substrate through the LLO process. When a laser
beam, which is a strong energy source, is irradiated to the back
side of the transparent sapphire, the interface between the
semiconductor single crystal multi-layered light-emitting structure
and the sapphire substrate absorbs strong laser so that the
sapphire substrate is lifted off by thermo-chemical dissociation of
gallium nitride (GaN) existing in the interface. Here, there can be
an additional step of treating the surface of the Group III-V
nitride-based semiconductor thin film, which is exposed to air,
with at least one chosen from H.sub.2SO.sub.4, HCl, KOH, and BOE at
the temperature of 30.degree. C. to 200.degree. C. It is also
preferable that the initial substrate 1200 is completely removed
through the mechanical-chemical polishing and sequential wet
etching process. The wet etching process of the sapphire substrate
1200 can be performed in an etching solution chosen from sulfuric
acid (H.sub.2SO.sub.4), chromic acid (CrO.sub.3), phosphoric acid
(H.sub.3PO.sub.4), gallium (Ga), magnesium (Mg), indium (In),
aluminum (Al) and a mixture thereof. The temperature of the wet
etching solution may be 200.degree. C. or higher.
[0156] Referring to FIG. 12(e), the post-processing in the step (e)
may include cleaning, passivation of the light-emitting device,
dry-etching, first ohmic contact electrode material deposition and
annealing, etc.
[0157] The first ohmic contact electrode 1280, which is thermally
stable, is formed on the upper part of the buffering layer 1210 or
the n-type semiconductor cladding layer 1220 through the first
ohmic contact electrode material deposition and annealing process.
It is preferable that the step of electric passivation on the
surface or sides of the Group III nitride-based semiconductor
device is further included by using at least one chosen from
Si.sub.3N.sub.4, SiO.sub.2, or various electric insulating
materials.
[0158] In addition, the first ohmic contact electrode 1280 can be
formed of a material including at least one chosen from Al, Ti, Cr,
Ta, Ag, Al, Rh, Pt, Au, Cu, Ni, Pd, In, La, Sn, Si, Ge, Zn, Mg,
NiCr, PdCr, CrPt, NiTi, TiN, CrN, SiC, SiCN, InN, AlGaN, InGaN,
rare earth metals and alloys, metallic silicides, semiconducting
silicides, CNTNs (carbonnanotube networks), transparent conducting
oxides (TCO), transparent conducting nitrides, and TCNs.
[0159] Referring to FIG. 12(f), the step (f) is a step for
manufacturing the final unified single chip. In the process for
manufacturing the single chip, the supporting substrate for
preparing a semiconductor light-emitting device 1281, which is
formed of the second bonding layer 1288, the heat-sink layer 1286,
the sacrificial layer 1284, and the selected supporting substrate
1282, can be cut only vertically (A-A' arrow direction) to provide
a unified light-emitting device chip in FIG. 11. The sacrificial
layer 1284 existing between the selected supporting substrate 1282
and the heat-sink layer 1286 functions not only to separate the
selected supporting substrate from the heat-sink layer but also to
form a bond between layers by being dissolved in a wet etching
solution.
Preparation Example 4
Preparation of a Semiconductor Light-Emitting Device
[0160] The structure of a semiconductor light-emitting device
manufactured by using the supporting substrate for preparing a
semiconductor light-emitting device according to Example 2 and a
method for manufacturing thereof will be described in detail with
reference to FIG. 13 and FIG. 14.
[0161] FIG. 13 is a sectional view illustrating the semiconductor
light-emitting device 1300 manufactured by using the supporting
substrate for preparing a semiconductor light-emitting device of
Example 2 of the present invention. As shown in FIG. 13, the
semiconductor light-emitting device 1300 is formed by laminating a
first ohmic contact electrode 1380, a buffering layer 1310, an
n-type semiconductor cladding layer 1320, a light-emitting active
layer 1330, a p-type semiconductor cladding layer 1340, a second
ohmic contact electrode 1350 and a first bonding layer 1360. The
first bonding layer 1360 is formed by laminating a second bonding
layer 1388, a heat-sink layer 1386, a third bonding layer 1321 and
a third supporting substrate 1331.
[0162] In particular, the first ohmic contact electrode 1380 can be
also formed on the n-type semiconductor cladding layer 1320 after
the buffering layer 1310 is removed.
[0163] The selected supporting substrate of the supporting
substrate for preparing a semiconductor light-emitting device, used
for manufacturing the semiconductor light-emitting device according
to an embodiment of the invention, is formed of a single crystal,
polycrystal, or amorphous substrate wafer such as sapphire
(Al.sub.2O.sub.3), aluminum nitride (AlN), MgO, AlSiC, BN, BeO,
TiO.sub.2, SiO.sub.2, glass and the like which has the difference
of thermal expansion coefficient of 2 ppm or less from the initial
substrate. The semiconductor light-emitting device can have the
heat-sink layer 1386 of the supporting substrate for preparing a
semiconductor light-emitting device, having the thickness of 80
.mu.m or less, which is relatively thin.
[0164] The selected supporting substrate in the semiconductor
light-emitting device according to an embodiment of the invention
can be separated and removed through the sacrificial layer, and the
new third supporting substrate 1331 is formed through the third
bonding layer 1321 by wafer bonding. The third supporting substrate
1331 can be a single crystal or polycrystal wafer such as Si, Ge,
SiGe, ZnO, GaN, AlGaN, GaAs and the like, or a metal foil such as
Mo, Cu, Ni, Nb, Ta, Ti, Au, Ag, Cr, NiCr, CuW, CuMo, NiW and the
like, which have a superior thermal and electric conductivity. The
third bonding layer 1321 existing between the third supporting
substrate 1331 and the heat-sink layer 1386 can be formed of a
thermally stable metal, alloy or solid solution.
[0165] A process for manufacturing the semiconductor light-emitting
device 1300 having the structure described above according to an
embodiment will be sequentially described below with reference to
FIG. 14(a) to (h). In the process for manufacturing the
semiconductor light-emitting device 1300 by using supporting
substrate for preparing a semiconductor light-emitting device
according to an embodiment, the description that is redundant with
the process in Example 1 will be omitted.
[0166] Referring to FIG. 14(a), in the step (a), a first wafer is
prepared by forming a semiconductor multi-layered light-emitting
structure on an initial substrate of transparent sapphire 1400. The
semiconductor multi-layered light-emitting structure thin film is
formed by successively laminating/growing a low and high
temperature buffering layer 1410, an n-type semiconductor cladding
layer 1420, a light-emitting active layer 1430, and a p-type
semiconductor cladding layer 1440.
[0167] Then, a second high reflective ohmic contact electrode 1450
is formed on the p-type semiconductor cladding layer which is the
uppermost part of the multi-layered light-emitting structure thin
film, and then a first bonding layer 1460 including a diffusion
barrier layer is successively formed thereon. In addition, it is
preferable that trenches 1471 is formed up to the sapphire
substrate or deeper to form a single chip by using patterning
regularly arranged in a plurality of rectangles or squares and a
dry etching process before conducting wafer bonding with a second
wafer, which is the supporting substrate for preparing a
semiconductor light-emitting device 1481. In some cases, a first
wafer, which does not have trenches, can be also applied.
[0168] The second high reflective ohmic contact electrode 1450 is
formed as a material layer including at least one chosen from Ag,
Al, Rh, Pt, Au, Cu, Ni, Pd, metallic silicides, Ag-based alloys,
Al-based alloys, Rh-based alloys, CNTNs (carbon nanotube networks),
transparent conductive oxides, and transparent conductive nitrides.
The first bonding layer 1460 is formed of a soldering or brazing
alloy including at least one chosen from Ga, Bi, In, Sn, Pb, Au,
Al, Ag, Cu, Ni, Pd, Si, and Ge.
[0169] Referring to FIG. 14(b), in the step (b), a supporting
substrate for preparing a semiconductor light-emitting device 1481
is prepared. The supporting substrate for preparing a semiconductor
light-emitting device 1481 used in an embodiment of the invention
is formed by successively laminating a sacrificial layer 1484, a
heat-sink layer 1486 having a relatively thin thickness of 80 .mu.m
or less, and a second bonding layer 1488.
[0170] The selected supporting substrate 1482 is formed of a single
crystal, polycrystal, or amorphous substrate wafer such as sapphire
(Al.sub.2O.sub.3), aluminum nitride (AlN), MgO, AlSiC, BN, BeO,
TiO.sub.2, SiO.sub.2, glass and the like which have the difference
of thermal expansion coefficient of 2 ppm or less from the initial
substrate and are electrical insulating materials. The sacrificial
layer 1484 is formed of a material including at least one chosen
from AlAs, SiO.sub.2, Si.sub.3N.sub.4, ITO, SnO.sub.2,
In.sub.2O.sub.3, ZnO, ZnS, ZnSe, CrN, TiN, Cr, various metals,
alloys, and oxides. The thin heat-sink layer 1486 is formed of a
material including at least one chosen from various metals and
alloys including at least one chosen from Cu, Ni, Ag, Mo, Al, Au,
Nb, W, Ti, Cr, Ta, Al, Pd, Pt, and Si. The second bonding layer
1488 is formed of a soldering or brazing alloy including at least
one chosen from Ga, Bi, In, Sn, Pb, Au, Al, Ag, Cu, Ni, Pd, Si, and
Ge.
[0171] Referring to FIG. 14(c), in the wafer bonding in the step
(c), the first wafer and the second wafer are bonded by a
thermo-compressive method. Thermo compression bonding in the step
(c) can be performed at the temperature of 100.degree. C. to
600.degree. C. and the pressure of 1 Mpa to 200 Mpa.
[0172] Referring to FIG. 14(d), the step (d) is a step for lifting
off the sapphire substrate 1400 through the LLO process.
[0173] Referring to FIG. 14(e), the step (e) is a post-processing
step. The post processing can further include forming a first ohmic
contact electrode 1480 which is thermally stable on the buffering
layer 1410 or the n-type semiconductor cladding layer 1420 through
the first ohmic contact electrode material deposition and annealing
process, and performing electrical passivation on the surface or
sides of the Group III nitride-based semiconductor device by using
at least one chosen from Si.sub.3N.sub.4, SiO.sub.2, or various
electric insulating materials.
[0174] In addition, the first ohmic contact electrode 1480 is
formed of a material including at least one chosen from Al, Ti, Cr,
Ta, Ag, Al, Rh, Pt, Au, Cu, Ni, Pd, In, La, Sn, Si, Ge, Zn, Mg,
NiCr, PdCr, CrPt, NiTi, TiN, CrN, SiC, SiCN, InN, AlGaN, InGaN,
rare earth metals and alloys, metallic silicides, semiconducting
silicides, CNTNs (carbonnanotube networks), transparent conducting
oxide (TCO), transparent conducting nitrides, TCNs.
[0175] Referring to FIG. 14(f) and (g), the step (f) of
manufacturing a final single chip is performed with two steps.
First, a temporary supporting substrate (TSS) 1411 is attached in
the opposite direction of the supporting substrate for preparing a
semiconductor light-emitting device with an organic or inorganic
bonding material. Then, the selected supporting substrate 1482 is
separated and removed along the arrow direction after dissolving
the sacrificial layer 1484 in a wet etching solution such as
various acid, base, or salt solutions of HF, BOE, H.sub.2So.sub.4 ,
HNO.sub.3, H.sub.3PO4, KOH, NHOH, KI and the like selected
according to a material used for the sacrificial layer 1484.
[0176] Referring to FIG. 14(h), which is the final step of
completing the single chip, the unified light-emitting device chip
in FIG. 13 is prepared by bonding the third supporting substrate
1431 and the heat-sink layer 1486 using the third bonding layer
1421 made of the electrically conductive soldering or brazing metal
or alloy, and cutting the result vertically (A-A' arrow
direction).
Preparation Example 5
Preparation of Semiconductor Light-Emitting Device
[0177] The structure of a semiconductor light-emitting device
manufactured by using the supporting substrate for preparing a
semiconductor light-emitting device according to Example 3 and a
method for manufacturing thereof will be described in detail with
reference to FIG. 15 and FIG. 16.
[0178] FIG. 15 is a sectional view of a semiconductor
light-emitting device 1500 manufactured by using a supporting
substrate for preparing a semiconductor light-emitting device
according to Example 3 of the present invention. As shown in FIG.
15, the semiconductor light-emitting device 1500 is formed by
laminating a first ohmic contact electrode 1580, a buffering layer
1510, an n-type semiconductor cladding layer 1520, a light-emitting
active layer 1530, a p-type semiconductor cladding layer 1540, a
second ohmic contact electrode 1550 and a first bonding layer 1560.
A second bonding layer 1588 and a heat-sink layer 1586 are
laminated on the first bonding layer 1560.
[0179] In particular, the first ohmic contact electrode 1580 can be
formed on the n-type semiconductor cladding layer 1520 after the
buffering layer 1510 is removed.
[0180] A selected supporting substrate 1682 of a supporting
substrate for preparing a semiconductor light-emitting device 1681,
used for manufacturing a semiconductor light-emitting device
according to an embodiment of the invention, is formed of a single
crystal, polycrystal, or amorphous substrate wafer such as sapphire
(Al.sub.2O.sub.3), aluminum nitride (AlN), MgO, AlSiC, BN, BeO,
TiO.sub.2, SiO.sub.2, glass and the like, which are electrically
insulating materials, and has the difference of thermal expansion
coefficient of 2 ppm or less from an initial substrate. The
semiconductor light-emitting device can have the heat-sink layer
1686 having a relatively thick thickness of 80 .mu.m to 500 .mu.m,
laminated on the selected supporting substrate 1682.
[0181] Therefore, the thick heat-sink layer 1686 of the
light-emitting device according to an embodiment of the present
invention can support the multi-layered light-emitting structure of
the light-emitting device without having any additional third
supporting substrate after the selected supporting substrate 1682,
which is an electrical insulator, is removed through the
sacrificial layer 1684.
[0182] A process for manufacturing a semiconductor light-emitting
device having the structure described according to an embodiment of
the invention will be described sequentially with reference to FIG.
16(a) to (h). However, the description that is redundant with
Example 1 and Example 2 will be omitted.
[0183] Referring to FIG. 16(a), in the step (a), a semiconductor
multi-layered light-emitting structure is formed on a transparent
sapphire substrate which is an initial substrate 1600. The
semiconductor multi-layered light-emitting structure is formed by
successively laminating a low and high temperature buffering layer
1610, an n-type semiconductor cladding layer 1620, a semiconductor
light-emitting active layer 1630, and a Mg-doped p-type
semiconductor cladding layer 1640. The high temperature buffering
layer 1610 can be a Si-doped Group III-V nitride-based
semiconductor. A second high reflective ohmic contact electrode
1650 and a first bonding layer 1660 including a diffusion barrier
layer are successively laminated on the p-type semiconductor
cladding layer 1640 which is the uppermost part of the
semiconductor multi-layered light-emitting structure thin film.
[0184] Referring to FIG. 16(b), in the step (b), the supporting
substrate for preparing a semiconductor light-emitting device 1681
is prepared. The supporting substrate for preparing a semiconductor
light-emitting device 1681 is formed by laminating a selected
supporting substrate 1682 made of an electrical insulator, a
sacrificial layer 1684, a heat-sink layer 1686 having a relatively
thick thickness, and a second bonding layer 1688. Since the
supporting substrate for preparing a semiconductor light-emitting
device 1681 is the same as in Example 2, except thickness of the
heat-sink layer 1686, the redundant description will be
omitted.
[0185] Referring to FIG. 16(c), in the wafer bonding in the step
(c), the first wafer and the second wafer are bonded by a
thermo-compressive method. Thermo compression bonding in the step
(c) can be performed at the temperature of 100.degree. C. to
600.degree. C. and the pressure of 1 Mpa to 200 Mpa.
[0186] Referring to FIG. 16(d), in the step (d), the transparent
sapphire substrate, which is the initial substrate 1600, is lifted
off.
[0187] Referring to FIG. 16(e), the step (e) is a post-processing
step. The post processing can further include forming a first ohmic
contact electrode 1680, which is thermally stable, on the buffering
layer 1610 or the n-type semiconductor cladding layer 1620 through
the first ohmic contact electrode material deposition and annealing
process, and performing electrical passivation on the surface or
sides of the Group III nitride-based semiconductor device by using
at least one chosen from Si.sub.3N.sub.4, SiO.sub.2, or various
electric insulating materials.
[0188] In addition, the first ohmic contact electrode 1680 is
formed of a material including at least one chosen from Al, Ti, Cr,
Ta, Ag, Al, Rh, Pt, Au, Cu, Ni, Pd, In, La, Sn, Si, Ge, Zn, Mg,
NiCr, PdCr, CrPt, NiTi, TiN, CrN, SiC, SiCN, InN, AlGaN, InGaN,
rare earth metals and alloys, metallic silicides, semiconducting
silicides, CNTNs (carbonnanotube networks), transparent conducting
oxide (TCO), transparent conducting nitrides, and TCNs.
[0189] Referring to FIG. 16(f) and (g), a temporary supporting
substrate (TSS) 1611 is attached in the opposite direction of the
supporting substrate for preparing a semiconductor light-emitting
device with an organic or inorganic bonding material and then the
selected supporting substrate 1682 is separated and removed along
the arrow direction (B-B' direction) after dissolving the
sacrificial layer 1684 in a wet etching solution such as various
acid, base, or salt solutions of HF, BOE, H.sub.2SO.sub.4 ,
HNO.sub.3, H.sub.3PO4, KOH, NHOH, KI and the like selected
according to the material used for the sacrificial layer 1684.
[0190] While particular embodiments have been described, it is to
be appreciated that various changes and modifications can be made
by those skilled in the art without departing from the spirit and
scope of the embodiment herein, as defined by the appended claims
and their equivalents. It is also to be appreciated that it may be
applied to various optoelectronic devices including vertically
structured laser diode, transistor, etc. using a homo-epitaxial
Group III-V nitride-based semiconductor substrate and a Group III-V
nitride-based semiconductor multi-layered thin film manufactured by
growing a Group III-V nitride-based semiconductor on a sapphire
substrate. Therefore, the true scope of protection will be defined
by the claims.
* * * * *