U.S. patent application number 11/180247 was filed with the patent office on 2011-05-19 for integrated circuit tester with high bandwidth probe assembly.
This patent application is currently assigned to FormFactor, Inc.. Invention is credited to Charles A. Miller.
Application Number | 20110115512 11/180247 |
Document ID | / |
Family ID | 22979472 |
Filed Date | 2011-05-19 |
United States Patent
Application |
20110115512 |
Kind Code |
A1 |
Miller; Charles A. |
May 19, 2011 |
Integrated circuit tester with high bandwidth probe assembly
Abstract
Described herein is a probe card assembly providing signal paths
for conveying high frequency signals between bond pads of an
integrated circuit (IC) and an IC tester. The frequency response of
the probe card assembly is optimized by appropriately distributing,
adjusting and impedance matching resistive, capacitive and
inductive impedance values along the signal paths so that the
interconnect system behaves as an appropriately tuned Butterworth
or Chebyshev filter.
Inventors: |
Miller; Charles A.;
(Fremont, CA) |
Assignee: |
FormFactor, Inc.
|
Family ID: |
22979472 |
Appl. No.: |
11/180247 |
Filed: |
July 12, 2005 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10749358 |
Dec 29, 2003 |
6917210 |
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11180247 |
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10286062 |
Oct 31, 2002 |
6686754 |
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10749358 |
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09805668 |
Mar 13, 2001 |
6501343 |
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10286062 |
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09258186 |
Feb 25, 1999 |
6218910 |
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09805668 |
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Current U.S.
Class: |
324/754.03 ;
333/33 |
Current CPC
Class: |
G01R 1/073 20130101;
G01R 1/06766 20130101; G01R 1/06772 20130101 |
Class at
Publication: |
324/754.03 ;
333/33 |
International
Class: |
G01R 31/20 20060101
G01R031/20; H03H 7/38 20060101 H03H007/38 |
Claims
1. A signal path for linking a node of an electronic device to a
terminal of an IC tester, the signal path comprising: a probe for
contacting said node; and a conductive path for linking said probe
to said terminal, wherein said node, said terminal and said
conductive path have impedances sized relative to one another to
substantially optimize a frequency response characteristic of said
signal path.
2. The signal path in accordance with claim 1 wherein said
impedances include inductances in series with said signal path and
capacitances shunting said signal path.
3. The signal path in accordance with claim 1 wherein said
conductive path comprises: a probe card including first conductors
forming a first part of said conductive path; a space transformer
including second conductors forming a second part of said
conductive path; and an interposer including third conductors for
conveying signals between said first and second conductors, wherein
said impedances include impedances of said node and of said first,
second and third conductors.
4. The signal path in accordance with claim 1 wherein said
frequency response characteristic is one of maximal passband width,
maximal passband flatness and maximal passband power.
5. The signal path in accordance with claim 1 wherein said
impedances are sized relative to one another so that said
interconnect system forms a multiple-pole Butterworth filter.
6. The signal path in accordance with claim 1 wherein said
impedances are sized relative to one another so that said
interconnect system forms a multiple-pole Chebyshev filter.
7. A signal path for linking a node of an integrated circuit (IC)
to a terminal of an IC tester, the signal path comprising: a
conductive pad implemented on said IC and linked to said node; a
probe for contacting said conductive pad; and conductive means for
linking said probe to said terminal, wherein said conductive pad,
said terminal and said conductive means have impedances sized
relative to one another to substantially optimize a frequency
response characteristic of said signal path.
8. The signal path in accordance with claim 7 wherein said
impedances include inductances in series with said signal path and
capacitances shunting said signal path.
9. The signal path in accordance with claim 7 wherein said
conductive means includes a printed circuit board via having a
capacitance that is one of said impedances.
10. The signal path in accordance with claim 7 wherein said
conductive means includes a trace having a characteristic impedance
that is one of said impedances.
11. The signal path in accordance with claim 7 wherein said
conductive means includes a spring contact having an inductance
that is one of said impedances.
12. The signal path in accordance with claim 7 wherein said
conductive means comprises: a printed circuit board via having a
capacitance that is one of said impedances, a trace having a
characteristic impedance that is one of said impedances, and a
spring contact having an inductance that is one of said
impedances,
13. The signal path in accordance with claim 7 wherein said
conductive means comprises: a probe card including first conductors
forming a first part of said signal path; a space transformer
including second conductors forming a second part of said signal
path; and an interposer including a third conductor for conveying a
signal between said first and second conductors, wherein said
impedances include impedances of said first, second and third
conductors.
14. The signal path in accordance with claim 7 wherein said
frequency response characteristic is one of maximal passband width,
maximal passband flatness and maximal passband power.
15. The signal path in accordance with claim 7 wherein said
impedances are sized relative to one another so that said
interconnect system forms a multiple-pole Butterworth filter.
16. The signal path in accordance with claim 7 wherein said
impedances are sized relative to one another so that said
interconnect system forms a multiple-pole Chebyshev filter.
17. A method for sizing impedances of a signal path connecting a
node of an integrated circuit (IC) to a terminal of an IC tester,
wherein the signal path comprises a bond pad connected to said
node, a probe contacting said bond pad, and conductive means
linking said probe to said terminal, the method comprising the step
of adjusting impedances of said bond pad, said probe, and said
conductive means relative to one another so as to optimize a
characteristic of a frequency response of said signal path.
18. The method in accordance with claim 17 wherein said
characteristic of said frequency response is one of maximal
passband width, maximal passband flatness and maximal passband
power.
19. The method in accordance with claim 17 wherein said impedances
are adjusted such that said signal path acts substantially as a
multiple-pole Butterworth filter.
20. The method in accordance with claim 17 wherein said impedances
are adjusted such that said signal path acts substantially as a
multiple-pole Chebyshev filter.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The subject matter of the present application is related to
that of copending U.S. application FILTER STRUCTURES FOR INTEGRATED
CIRCUIT INTERFACES, Ser. No. ______, (Attorney docket No. 1795
(C81)), filed ______, concurrently herewith. The subject matter of
the present application is also related to that of copending U.S.
application INTEGRATED CIRCUIT INTERCONNECT SYSTEM, Ser. No.
______, (Attorney Docket No. 1796 (C82)) filed concurrently
herewith.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention relates in general to a probe card
assembly for interconnecting test equipment to an integrated
circuit die to be tested, and in particular to a probe card
assembly that implements each signal path as a high-bandwidth,
low-distortion, impedance-matched filter structure between the test
equipment and the die.
[0004] 2. Description of Related Art
[0005] An integrated circuit (IC) die typically includes a set of
bond pads on its upper surface acting as input/output terminals for
the integrated circuit die. When an IC die is packaged, its bond
pads provide points of connection for bond wires or other
structures that link the IC to external circuits. These bond pads
may also provide access points to an IC tester when testing an IC
die before it is separated from a wafer and packaged.
[0006] An IC tester typically includes a separate channel for each
terminal of an IC to be tested, and during a test each channel may
transmit a test signal to the IC terminal or may receive and
process an IC output signal appearing at the IC terminal. Each
channel is typically implemented on a separate circuit board
mounted in a relatively large chassis called a "test head". The
tester normally includes a probe card assembly for providing signal
paths between the circuit boards mounted in the test head and the
IC's bond pads.
[0007] PCT published application WO 96/15458, published May 23,
1996 (incorporated herein by reference) describes a high
performance probe card assembly including a set of three separate
layers stacked vertically under the test head. One layer of the
assembly, a "probe card" mounted on the probe head, provides points
of contact on its surface for pogo pin connectors extending from
the circuit boards mounted in the test head. The pogo pins act as
input and/or output terminals for the test equipment implemented by
those circuit boards. A "space transformer" layer of the probe card
assembly includes a set of probes on its underside for contacting
the bond pads on the upper surface of the die. An "interposer"
board residing between the probe card and the space transformer
provides signal routing paths between the probe card and the space
transformer therebetween through spring contacts on its surfaces
for contacting pads on facing surfaces of the probe card and space
transformer.
[0008] To test a die at high frequencies it is helpful to position
test equipment as closely as possible to the bond pads of the IC
being tested so as to reduce the amount of time signals require to
travel between the test equipment and the IC's bond pads. Since the
circuit boards in the test head are much larger than the IC die
they are to test, the pogo pins through which the circuit boards
send and receive signals are necessarily distributed over a much
wider horizontal area than the bond pads on the die being tested.
Thus the probe assembly must not only route signals vertically
between the bond pads and the pogo pins, it also must also route
them horizontally. The probes, pogo pins, spring contracts between
the various boards of the assembly, and vias within those boards
move test signals vertically between the bond pads and the tester
circuits. Microstrip traces on the surfaces or layers of the
various boards of the probe assembly route those signals
horizontally.
[0009] One of the reasons tester designers want to minimize the
length of the signal paths between the bond pads and the circuits
is to minimize delay and impedance discontinuities in those signal
paths. When those paths carry high frequency test and IC output
signals, impedance discontinuities in the signal path can attenuate
and distort those signals. The inherent series inductance and shunt
capacitance of the signal routing paths are primary sources of
impedance continuities that can lead to signal distortion.
[0010] The typical approach to reducing the amount of signal
distortion and attenuation caused by the interconnect system has
been to minimize signal path lengths and to match transmission line
impedances. In doing so, designers typically try to minimize the
physical size of the tester circuits, at least in the horizontal
plane, so that they can be packed into a smaller horizontal space
above or below the IC under test. This minimizes the horizontal
distance that signals must travel between the test equipment and
the IC bond pads they access. Designers also try to minimize signal
path lengths in the interconnect system by making the probe card
assembly as thin as possible in the vertical direction, for example
by providing probes and pogo pins that are as short as possible, by
making the probe card, interposer and space transformer as thin as
possible, and by providing spring contacts or other contact
structures between those boards that are as short as possible.
[0011] Another approach to reducing signal distortion in the signal
paths between IC bond pads and the test equipment accessing them
has been to minimize the amount of shunt capacitance in those
signal paths. Capacitance can be reduced by appropriately choosing
physical characteristics of the probes and the various layers of
the probe card assembly including the size of the traces, their
spacing from ground planes, and the dielectric nature of the
insulating material forming those probe card assembly layers. Since
vias, conductors passing vertically through the probe card,
interposer and space transformer are also a source of shunt
capacitance, probe card assembly designers typically structure vias
so as minimize their capacitance, typically by providing a
relatively wide hole through any ground or power plane through
which they pass, since the capacitance of a signal path is
inversely related to distance between the signal path and any
ground or power planes.
[0012] Minimizing interconnect system signal path lengths,
minimizing inductance and capacitances of those signal paths, and
matching transmission line impedances throughout those signal
paths, can help increase the bandwidth, flatten frequency response
and reduce the signal distortion. But it is not possible to reduce
signal path lengths to zero or to completely eliminate probe card
assembly signal path inductance and capacitance. Thus some level of
signal distortion and attenuation is inevitable when signal
frequencies are sufficiently high. Since distortion and attenuation
increase with signal frequency, such signal distortion and
attention provide a barrier to accurate high frequency testing.
[0013] What is needed is a way to substantially improve the
frequency response of signal paths though a probe card assembly so
as to reduce distortion and attenuation of signals below a level
that can be provided by simply minimizing the lengths and
impedances of those signal paths.
SUMMARY OF THE INVENTION
[0014] The present invention is an improvement to conventional
probe card assemblies of the type that interconnect bond pads of an
integrated circuit (IC) die to IC test equipment installed in a
test head of an integrated circuit tester. In accordance with the
invention, each signal path is arranged and adapted to provide a
filter function that optimizes relevant characteristics of the
path's frequency response and impedance characteristics by
appropriately adjusting the magnitudes of its shunt capacitance and
series inductance relative to one another. For example when the
test equipment and the die communicate using a low frequency analog
signal where it is most important to avoid distortion, the
"optimal" frequency response of the signal path conveying that
signal may have a narrow, but maximally flat, pass band. Or, as
another example, when the test equipment and die communicate via a
high frequency digital signal, the optimal frequency response may
have a maximally wide passband. By appropriately distributing and
adjusting the inductance and capacitance of a signal path though a
probe card assembly in accordance with the invention, rather than
trying to simply minimize them or treat them as transmission line
segments, substantial improvement in probe card assembly frequency
response is obtained.
[0015] It is accordingly an object of the invention to provide a
system for interconnecting test equipment to terminals of an
integrated circuit device wherein the frequency response and
impedance matching characteristics of the interconnect system are
optimized for the nature of signals passing therebetween.
[0016] The concluding portion of this specification particularly
points out and distinctly claims the subject matter of the present
invention. However those skilled in the art will best understand
both the organization and method of operation of the invention,
together with further advantages and objects thereof, by reading
the remaining portions of the specification in view of the
accompanying drawing(s) wherein like reference characters refer to
like elements.
BRIEF DESCRIPTION OF THE DRAWING(S)
[0017] FIG. 1 is a block diagram of an integrated circuit
tester;
[0018] FIG. 2 is a simplified sectional plan view of the test head
of the integrated circuit tester of FIG. 1;
[0019] FIG. 3 is a simplified sectional elevation view of the test
head of FIG. 2 and of a probe card assembly in accordance with the
invention for linking the test head to an integrated circuit device
under test (DUT);
[0020] FIG. 4 is an equivalent circuit diagram modeling a single
signal path between one channel of the tester head of FIG. 3 and a
bond pad of a DUT; and
[0021] FIG. 5 compares frequency response characteristics of the
equivalent circuit of FIG. 4 when the inductance and capacitance
values are minimized in accordance with prior art practice (plot A)
and when inductance and capacitance values are adjusted in
accordance with the present invention.
DESCRIPTION OF THE PREFERRED EMBODIMENT(S)
[0022] The present invention relates to integrated circuit (IC)
testers and in particular to an improved probe card assembly for
conveying signals between bond pads of an integrated circuit device
under test (DUT) and the various channels of an IC tester that
access the DUT during a test. FIG. 1 illustrates a typical IC
tester 10 in block diagram form for performing a test on a DUT 12,
suitably in the form of a die on a silicon wafer 13 that has not
yet been separated from the wafer and packaged. An IC die typically
includes a set of bond pads on its upper surface that are linked to
internal circuit nodes and which act as input/output terminals for
the IC. The bond pads on a die may provide points of connection for
bond wires linking the circuit nodes to pins or legs of an IC
package. However when the die is tested before it is packaged,
those bond pads may be used as points of contact for probes from
the tester for conveying signals between the tester and the
internal circuits of the IC.
[0023] Tester 10 includes a set of channels 14, one for each bond
pad on DUT 12. During a test, each channel 14 may either generate
and transmit a digital or analog test signal input to a bond pad of
DUT 12 or may receive and process a digital or analog DUT output
signal delivered through a bond pad. Before the start of the test,
a host computer 16 transmits instructions to each channel 14 via a
bus 18. During the test, a pattern generator within each channel 14
executes those instructions to produce a sequence of vectors (data
values) telling the channel what to do during successive cycles of
the test. At the end of the test, channels 14 send results data
back to host computer 14 reporting on the behavior of the DUT
output signals they monitored during the test.
[0024] Channels 14 are implemented on a set of printed circuit
boards which, in the example tester architecture of FIG. 1, are
mounted within an equipment chassis called a "test head" 20.
Channels may also be mounted remote from a test head but linked
thereto through transmission lines. A probe card assembly 22,
including the probes that contact the bond pads of DUT 12, provides
signal paths between those bond pads and the circuit boards in the
test head implementing channels 14. Modern testers operating at
high frequencies position test head 20 as close as possible to DUT
12 in order to minimize signal transit time between tester channels
14 and the IC's bond pads. IC tester designers also try to minimize
the length of the signal paths between the bond pads and channels
14 in order to minimize the impedance of those signal paths since
signal path impedance can significantly attenuate and distort the
DUT input and output signals.
[0025] While the example tester architecture of FIG. 1 is commonly
employed, many other tester architectures have been used. For
example, many testers centralize the pattern generation function of
channels 14 by providing a central pattern generator to supply data
to the channels during the test. Also in some testers channels 14
are mounted remote from the test head and connected thereto through
transmission lines. The invention is applicable to all tester
architectures.
[0026] FIG. 2 is a simplified sectional plan view of test head 20
of FIG. 1 including a set of circuit boards 24 implementing
channels 14 of FIG. 1. FIG. 3 includes a partial sectional
elevation view of test head 20 of FIG. 2 along with an elevation
view of a probe card assembly 22 linking circuit boards 24 to bond
pads on an IC die (DUT 12) formed on a wafer 13. In order to
emphasize various parts of the probe card assembly 22, FIGS. 2 and
3 are intentionally not to scale. For example, those skilled in the
art will appreciate, in particular, that test head 20 is much wider
and taller relative to DUT 12 than is apparent from FIG. 3.
[0027] Since circuit boards 24 implementing channels 14 of FIG. 1
within test head 20 are much larger than DUT 12 they are to test,
channels 14 are necessarily distributed over a much wider
horizontal area than the bond pads of DUT 12. Thus probe assembly
22 must not only route signals vertically between the bond pads of
DUT 12 and circuit boards 24, it also must also route those signals
horizontally. As discussed below, various probes, pogo pins, spring
contacts, and vias within various layers forming probe card
assembly 22 move test signals vertically, while microstrip and
stripline traces included within the various layers of the probe
assembly 22 route those signals horizontally.
[0028] Designers typically try to minimize the physical size of
circuit boards 24, at least in the horizontal plane, so that they
can be packed into a smaller horizontal space above or below DUT
12. This minimizes the horizontal distance that signals must travel
between the tester channels and the IC bond pads they access.
Circuit boards 24 are radially arrayed about a central vertical
axis 26 passing through DUT 12 below the test head 20 so that all
circuit boards 24 are substantially the same distance from DUT 12.
Each circuit board 24 is suitably arranged with its signal drivers
and receivers mounted near the lower-most corner 28 of the circuit
board nearest axis 26. One or more pogo pin connectors 30 extending
downward from corner 28 of each circuit board 24, suitably convey
signals between circuit board 24 and probe card assembly 22. By
radially arraying circuit boards 24 about central axis 26 and
positioning their drivers and receivers at corners 28, we help
minimize the distance that test and DUT output signals must
travel.
[0029] Probe card assembly 22, which conveys signals between DUT 12
and the pogo pins 30 of circuit boards 24, includes a set of three
vertically stacked layers. The primary layer of probe card assembly
22, a "probe card" 32, is mounted directly beneath probe head 20.
Probe card 32 provides points of contact on its upper surface for
the pogo pin connectors 30 that act as input and/or output
terminals for the tester channels 14 implemented by circuit boards
24. A "space transformer" 34 includes a set of probes 36 oriented
for contacting the bond pads on DUT 12. An "interposer" 38
positioned between probe card 32 and space transformer 34 includes
spring contacts 40 and 42 on its upper and lower surfaces for
providing signal paths between contact pads on the facing surfaces
of probe card 32 and space transformer 34.
[0030] A probe card assembly generally similar to probe card
assembly 22 of FIG. 3 is described in more detail in PCT published
application WO 96/15458, published May 23, 1996 and incorporated
herein by reference. It should be understood that while the
preferred embodiment of the invention is illustrated herein in
connection with the particular probe card assembly architecture
described herein, the invention described herein is also applicable
to other kinds of probe card assembly architectures.
[0031] Designers also try to minimize signal path lengths by making
probe card assembly 22 as thin as possible in the vertical
direction, for example by providing probes 36 and connectors 40 and
42 that are as short as possible and by making probe card 32, space
transformer 34 and interposer 38 as thin as possible. However since
there are structural limitations as to how small, thin and short we
can make the various components of probe card assembly 22, signals
must still travel, a significant distance between pogo pins 30 and
bond pads on the surface of DUT 12, and the impedance of the signal
paths they follow distorts and attenuates those signals.
[0032] With signal path distance minimized to the extent possible,
the next step in reducing signal distortion and attenuation in the
signal paths between IC bond pads and the tester channels has been
to carefully design those signal paths so as to minimize their
impedances, particularly their shunt capacitance and series
inductance. The capacitance of a signal path depends largely on its
area, on its spacing and orientation relative to nearby ground and
power planes, and on the dielectric constant of the material
between the path and those ground and power planes. Thus the
capacitance of the signal paths through probe card assembly 22 can
be further reduced by appropriately choosing physical
characteristics of probes 36, of contacts 40 and 42, and of the
various traces and vias within the layers of probe card assembly 22
forming those signal paths.
[0033] The series inductance of a signal path is largely a function
of its length, so when we reduce length of a signal path, we also
reduce its inductance. However, it is well-known that other
physical characteristics of a signal path, such as its width and
its spacing relative to other conductors, can also influence path
inductance. Probe card assembly designers have expended
considerable effort to further reduce the inductance of signal
paths through probe card assemblies by appropriately adjusting such
physical characteristics of those paths.
[0034] Although minimizing the signal path inductance and
capacitances through probe card assembly 22 can generally increase
bandwidth and reduce signal distortion, it is not possible to
completely eliminate signal path inductance and capacitance.
Likewise it is difficult to maintain a constant transmission line
impedance through the probe structure. Thus some level of signal
distortion and attenuation is therefore inevitable. Since
distortion and attenuation generally increase with signal
frequency, such signal distortion and attention provide a barrier
to accurate high frequency testing.
[0035] The present invention represents a next step in the process
of improving the frequency response of probe card assembly 22, and
to understand the invention, it is helpful to first model the
signal path through probe card assembly 22, and the tester circuits
and DUT it interconnects, with an equivalent circuit diagram. We
can then study the effects on frequency response of various
impedance values in the signal paths provided by a probe card
assembly using a conventional circuit simulator programmed to
simulate the frequency response of the equivalent circuit in a
well-known manner.
[0036] FIG. 4 is an equivalent circuit diagram of the signal path
between a driver 44 and a receiver 46 within a single tester
channel 14 and a receiver 48 and driver 50 linked to a bond pad 52
within DUT 12. We assume in this example that the DUT terminal
being tested is a bi-directional input/output terminal, and
therefore DUT 12 is depicted as including both a driver 50 for
transmitting a DUT output signal from bond pad 50, and receiver 48
for receiving a DUT input signal arriving at bond pad 52. Tester
channel 14 is modeled as an ideal driver 44 linked through its
output resistance R1, a transmission line (if any) having a
characteristic impedance Z0.sub.1, and pogo pin 30 to a pad 54 on
the upper surface of probe card 32. The capacitances of pogo pin 30
and of a pad on the surface of probe card 32 for receiving that
pogo pin are represented by a shunt capacitor C.sub.1. probe card
32 of FIG. 3 includes a microstrip trace of characteristic
impedance Z0.sub.3 on one of its surfaces for routing the signal
horizontally from pad 54. Probe card 32 may also include one or
more vias for routing the signal vertically through probe card 32.
The capacitances of such vias are included in C, and a capacitor
C.sub.2. A via also has inductance and resistance, but since its
capacitance predominates, it can be adequately modeled as a single
shunt capacitor.
[0037] Spring connectors 40 and 42 of interposer 38 of FIG. 3 are
modeled in FIG. 4 by a pair of series-connected inductors L.sub.1
and L.sub.2. Interposer 38 includes a vertical via linking
connectors 40 and 42, and the capacitance of that via is suitably
represented by a single shunt capacitor C.sub.3. Space transformer
34 of FIG. 3 includes a microstrip trace for routing the signal
horizontally across one of its surfaces, and that trace appears in
FIG. 4 as characteristic impedance Z0.sub.4. A pair of shunt
capacitors C.sub.4 and C.sub.5 represent the capacitance of a
contact pad on the upper surface of space transformer 34 and the
capacitance of a via passing vertically through the space
transformer 22. The probe 36 of FIG. 3 that links the space
transformer 22 to bond pad 52 of DUT 12 is primarily inductive and
is suitably represented in FIG. 4 by an inductor L3. The DUT output
driver 50 supplies a DUT output signal to bond pad 52 through its
output resistance R.sub.3 while receiver 48 of DUT 12 receives a
DUT input signal arriving at bond pad 52 with an input impedance
R.sub.4. DUT 12 will typically include an internal electrostatic
protection device (ESD) linked to bond pad 52 for protecting DUT 12
from high-voltage electrostatic noise. The ESD device impedance
(mostly capacitive) is represented in FIG. 4 by a shunt capacitor
C.sub.6.
[0038] The circuit formed by capacitors C1-C6, inductors L1-L3,
resistors R1-R4, and transmission line impedances Z0.sub.1-Z0.sub.4
has a reactive impedance that can substantially attenuate and
distort signals passing between driver 44 and receiver 48. As
discussed above, the conventional approach to reducing the amount
of signal distortion and attenuation has been to minimize to the
extent possible the various series inductances L1-L3 and shunt
capacitances C1-C6 along the path. It is also a common practice to
adjust all of resistances R1-R4 and characteristic impedances
Z0.sub.1-Z0.sub.4 to similar values (typically a standardized 50
Ohms in high-frequency applications). Such impedance matching
reduces signal reflections, thereby reducing the amount of
distortion caused by the signal path.
[0039] Table I below lists impedance values of the various
components FIG. 4 when impedances R.sub.1-R.sub.3 are set to 50
Ohms and all inductances and capacitances have been set to typical
minimum attainable values in accordance with conventional
practice.
TABLE-US-00001 TABLE I Component Value R.sub.1-R.sub.4 50 Ohms
Z0.sub.1-Z0.sub.4 50 Ohms C.sub.1 0.4 pF C.sub.2 0.1 pF C.sub.3 0.1
pF C.sub.4 0.1 pF C.sub.5 0.1 pF C.sub.6 0.05 pF L.sub.1 0.8 nH
L.sub.2 0.8 nH L.sub.3 0.8 nH
[0040] FIG. 5 (plot A) illustrates the frequency response of the
interconnect system model of FIG. 4 when components are set to the
values indicated in Table I. In particular, FIG. 5 plots signal
attenuation as a function of frequency for signals passing from
tester driver 44 to DUT receiver 48. The frequency response for
signal passing in the other direction from driver 50 to receiver 46
will be generally similar to that shown in FIG. 5 though there will
be minor differences due to a lack of symmetry.
[0041] The "optimal" frequency response characteristics for the
interconnect system depicted in FIG. 4 depends on the nature of the
signals it is to convey. For example, when DUT 12 communicates via
a high-frequency digital signal, we may want the interconnect
system to pass high frequency signals, but we may not be too
concerned about signal distortion, and therefore may be able to
tolerate a reasonable amount of ripple in the passband. Under such
circumstances we would want the interconnect system's passband to
be as wide as possible while other characteristics of the
interconnect frequency response are of lesser importance. On the
other hand when DUT 12, for example, communicates via a
low-frequency analog signal, we may want the interconnect system to
convey low frequency signals with little distortion or noise, but
we may want a wide bandwidth. Under such conditions, the optimal
frequency response for the interconnect system may include a
passband that is as flat as possible but only as wide as needed to
pass the highest frequency signal expected. We would also want all
areas of the stopband to have maximal attenuation so as to block
high frequency noise.
[0042] As we see in FIG. 5 (plot A), the passband (usually defined
as the frequency at which attenuation first falls by 3 dB from its
level at zero frequency) is about 2 GHz. Thus while the
interconnect system performance may be acceptable for signals of
frequencies ranging between 0 and 2 GHz when a maximum 3 dB
attenuation is acceptable the interconnect system frequency
response depicted by plot A would not be suitable for conveying
signals of frequencies exceeding 2 GHz. We also note that the
passband is not particularly flat at frequencies above 1 GHz. Since
passband ripple distorts signals, then in applications where low
distortion is required, the interconnect system frequency response
depicted in plot A of FIG. 5 may not be suitable for conveying
signals above 1 MHz. We further note that the stopband has several
large peaks at frequencies above 2 GHz and may therefore fail to
sufficiently attenuate noise at those frequencies. Thus the
interconnect system may not be suitable in applications where we
want to greatly attenuate all high frequency noise above a certain
maximum signal frequency.
Improved Interconnect System
[0043] According to conventional practice, the frequency response
of a probe card assembly is "optimized" for all applications by
minimizing both its shunt capacitance and series inductance.
However while reducing interconnect system inductance and
capacitance generally helps to increase bandwidth and reduce signal
distortion, it is not true that setting system inductance and
capacitance as low as possible necessarily optimizes the frequency
response of the system for any particular application. In
accordance with the invention, system frequency response is
actually improved by increasing the inductance or capacitance of
one or more of the elements forming the signal path through the
probe card assembly above their minimum levels so as to
appropriately adjust their values relative to one other.
[0044] Table II compares typical impedance values of the elements
of FIG. 4 set in accordance with prior art practice (Column A) to
suitable impedance selected in accordance with the present
invention (Column B) in an application where we want to maximize
the passband power.
TABLE-US-00002 TABLE II Component Impedance A Impedance B
R.sub.1-R.sub.4 50 Ohms 50 Ohms Z0.sub.1-Z0.sub.4 50 Ohms 50 Ohms
C.sub.1 0.4 pF 0.4 pF C.sub.2 0.1 pF 0.7 pF C.sub.3 0.1 pF 1.3 pF
C.sub.4 0.1 pF 0.5 pF C.sub.5 0.1 pF 1.1 pF C.sub.6 0.05 pF 0.1 pF
L.sub.1 0.8 nH 0.8 nH L.sub.2 0.8 nH 0.8 nH L.sub.3 0.8 nH 0.8
nH
[0045] The impedance values listed Table I are repeated in column A
of Table II. Plot A of FIG. 5 therefore also represents the
frequency response of the probe card assembly equivalent circuit of
FIG. 4 when values of its circuit components are set in accordance
with prior art practice to typical minimum attainable values as
listed in Table II, column A. Plot B of FIG. 5 represents the
frequency response of the probe card assembly equivalent circuit of
FIG. 4 when values of its circuit components are set in accordance
with the present invention as listed in Table II, column B.
[0046] Note that while columns A and B provide the same resistance,
characteristic impedance and inductance values, the capacitances
listed in column B are somewhat higher than those listed in column
A. Conventional wisdom tells us to expect that due to the increase
in capacitance values we would expect deterioration in frequency
response as we move from plot A to plot B. For example we would
expect plot B to exhibit a narrower bandwidth and/or more ripple in
the passband than plot A. However quite the opposite is true. Note
that whereas plot A has a bandwidth of about 2 GHz, plot B has a
substantially wider bandwidth, about 5 GHz. Note also that plot B
has relatively less ripple than plot A over all frequency ranges up
to about 8 GHz.
[0047] In accordance with the invention, the impedance values of
column B of Table II were not simply set to their lowest attainable
values, but were instead carefully adjusted relative to one another
and relative to the physical topology of the interconnect system to
optimize the frequency response of the probe card assembly. In this
particular example the values listed in Table II, column B were
chosen to maximize the power conveyed in the passband--that is, to
maximize the amount of attenuation integrated over the full
passband range. However other impedance values may be selected to
optimize other characteristics or combinations of characteristics
of frequency response for a given application. Thus for example, we
may adjust impedance values to maximize bandwidth, to minimize
ripple, to provide rapid fall off in the stop band, or some
combination thereof. Of course we are constrained in our choices
for those impedance values; they can be no smaller than the minimum
attainable values listed in column A of Table I. But subject to
that constraint, we have a wide latitude in choosing impedance
values that will optimize frequency response of the interconnect
system for any given application.
[0048] Thus to optimize the frequency response of the interconnect
system illustrated in FIG. 4, we first define the frequency
response characteristic(s) that we want to optimize. We also
determine the minimum practically attainable impedance value for
each component of the interconnect system. We then determine a
combination of impedance values equal to or larger than those
minimum attainable values that will optimize the desired frequency
response characteristics. In the example of Table II, column B, it
happened that the optimal set of impedance parameters mandated that
inductances be minimized and capacitances be increased above their
minimums. However in other applications, where we want to optimize
other frequency response characteristics, it may be that
inductances could be increased above their minimums. Also as
discussed below, inductances may be increased in order to
compensate for impedance mismatches.
Butterworth and Chebyshev Filters
[0049] It is beneficial to think of the equivalent circuit of the
interconnect system illustrated in FIG. 4 as a multiple pole
filter. By appropriately adjusting the series inductance and shunt
capacitances relative to one another and to the other impedance
components of the interconnect system, the interconnect system can
be made to behave, for example, like a well-known, multi-pole
"Butterworth" or "Chebyshev" filter. It is well understood how to
adjust the component values of such filters in order to obtain a
desired frequency response.
[0050] As mentioned above, the frequency response of an
interconnect system has many characteristics and that its "optimal"
frequency response is application-dependent. Thus the appropriate
values to which we adjust the various impedances along the signals
paths of probe head assembly 22 should be adjusted depends on which
frequency response and impedance characteristics are most important
for the particular application. In the example of Table II, column
B, capacitance values were chosen to maximize the passband power.
However other combinations of impedance values can optimize other
characteristics of the interconnect system. Thus for example when
the interconnect system is to convey a lower frequency analog
signal with minimal distortion, and where band width is not so
important, it may be desirable that the frequency response of the
interconnect system have a "maximally flat" passband, having the
least possible amount of ripple. In such case we will want to
adjust the interconnect system component impedance values so that
the system behaves like a Butterworth filter which does provide a
maximally flat frequency response.
[0051] In most applications, however, optimal frequency response
will be a tradeoff between the bandwidth, allowable passband
ripple, phase response and stopband attenuation. Accordingly the
values of inductive and capacitive components can be selected so
that the interconnect system behaves as a form of the well-known,
multiple-pole Chebyshev filter. The design of multi-pole
Butterworth and Chebyshev filters, including appropriate choices
for filter component values so as to optimize one or more
combinations of characteristics of filter's frequency response, is
well-known to those skilled in the art. See for example, pages
59-68 of the book Introduction to Radio Frequency Design by W. H.
Hayward, published 1982 by Prentice-Hall, Inc., and incorporated
herein by reference. Those skilled in the art are well aware of how
to adjust the inductance and capacitance of the various portions of
the various structures along the signal paths provided by probe
head assembly 22 of FIG. 3. The present invention applies
conventional filter design principles to determine how to chose the
most appropriate values for that inductance and capacitance for the
intended application.
Impedance Matching
[0052] Driver and receiver impedances R1-R4, and the various
transmission line impedances Z0.sub.1-Z0.sub.4 are typically set to
similar values (e.g., 50 Ohms) to prevent signal reflections which
degrade system frequency response, and the values for these
components were chosen in Table II, column B in order to conform
with industry practice. However in accordance with the invention,
we need not necessarily do that because we can compensate for
resistive or characteristic impedance mismatch by appropriately
adjusting the series inductance and shunt capacitance values. For
example pages 59-68 of the above-mentioned book Introduction to
Radio Frequency Design illustrate how to adjust other filter
component values to obtain Butterworth and Chebyshev filter
frequency response behavior even when such resistive and
characteristic impedances are mismatched.
[0053] While the forgoing specification has described preferred
embodiment(s) of the present invention, one skilled in the art may
make many modifications to the preferred embodiment without
departing from the invention in its broader aspects. For example,
while in the preferred embodiment the interconnect system employs
bond wires 22 and 27 and package legs 24 and 29 to connect nodes of
ICs 12 and 14 to PCB trace 26, other types of inductive conductors,
such as for example spring wires, could be employed to connect
nodes of an integrated circuit to a PCB trace. The appended claims
therefore are intended to cover all such modifications as fall
within the true scope and spirit of the invention.
* * * * *