U.S. patent application number 12/956611 was filed with the patent office on 2011-03-24 for pressure measurement using a mems device.
This patent application is currently assigned to QUALCOMM MEMS Technologies, Inc.. Invention is credited to Kasra Khazeni.
Application Number | 20110071775 12/956611 |
Document ID | / |
Family ID | 40974525 |
Filed Date | 2011-03-24 |
United States Patent
Application |
20110071775 |
Kind Code |
A1 |
Khazeni; Kasra |
March 24, 2011 |
PRESSURE MEASUREMENT USING A MEMS DEVICE
Abstract
A device to measure pressure is disclosed. In one embodiment,
the device includes at least one element with two layers separated
by a space which changes over a variable time period in response to
a voltage applied across the two layers. The time period may be
measured and is indicative of the ambient pressure about the
device.
Inventors: |
Khazeni; Kasra; (San Jose,
CA) |
Assignee: |
QUALCOMM MEMS Technologies,
Inc.
San Diego
CA
|
Family ID: |
40974525 |
Appl. No.: |
12/956611 |
Filed: |
November 30, 2010 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
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12141326 |
Jun 18, 2008 |
7860668 |
|
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12956611 |
|
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Current U.S.
Class: |
702/52 ; 702/50;
73/723; 73/724 |
Current CPC
Class: |
G01L 9/0073 20130101;
G01L 9/0086 20130101 |
Class at
Publication: |
702/52 ; 702/50;
73/724; 73/723 |
International
Class: |
G01L 9/12 20060101
G01L009/12; G06F 19/00 20110101 G06F019/00; G01L 9/00 20060101
G01L009/00 |
Claims
1. A device for measuring pressure comprising: at least one element
comprising two layers separated by a space, wherein a dimension of
the space changes in response to an applied stimulus; and a
processor configured to determine a time period over which the
dimension of the space changes from a first dimension to a second
dimension, and determine, based on the determined time period, an
ambient pressure about the device.
2. The device of claim 1, wherein the at least one element
comprises at least one microelectromechanical systems (MEMS)
element.
3. The device of claim 1, wherein the at least one element
comprises at least one interferometric modulator.
4. The device of claim 1, wherein the at least one element
comprises a plurality of elements comprising two layers, and the
processor is configured to determine a plurality of respective time
periods, and determine, based on the determined time periods, an
ambient pressure about the device.
5. The device of claim 1, wherein the processor is further
configured to apply a stimulus to the at least one element.
6. The device of claim 5, wherein the stimulus comprises an applied
voltage across the two layers.
7. The device of claim 1, further comprising a display configured
to display the determined pressure.
8. The device of claim 1, wherein the processor is further
configured to determine an altitude based on the determined ambient
pressure, further comprising a display configured to display the
determined altitude.
9. The device of claim 1, wherein the processor is configured to
determine the time period by measuring an electrical current
induced by a motion of at least one of the layers.
10. The device of claim 9, wherein the processor is configured to
determine the time period by determining a time between when a
voltage is applied across the two layers and when the electrical
current reaches a relative maximum.
11. The device of claim 9, wherein the processor is configured to
determine the time period by determining a time between a first
time and a second time, the first time and second time each being
when the electrical current reaches a predetermined percentage of a
relative maximum.
12. The device of claim 1, wherein the processor is configured to
determine the time period by measuring a capacitance across the two
layers.
13. The device of claim 1, wherein the processor is configured to
determine the time period as a release time or actuation time of
the at least one element.
14. A method of measuring pressure comprising: applying a stimulus
to an element comprising two layers separated by a space, wherein a
dimension of the space changes in response to the stimulus;
determining a time period over which the dimension of the space
changes from a first dimension to a second dimension; and
determining, based on the determined time period, an ambient
pressure about the element.
15. The method of claim 14, wherein applying the stimulus comprises
applying a voltage across the two layers.
16. The method of claim 14, wherein applying the stimulus comprises
applying the stimulus to a microelectromechanical systems (MEMS)
element.
17. The method of claim 14, wherein applying the stimulus comprises
applying a voltage across two layers of an interferometric
modulator.
18. The method of claim 14, further comprising a displaying the
determined pressure.
19. The method of claim 14, further comprising determining an
altitude based on the determined ambient pressure and displaying
the determined altitude.
20. The method of claim 14, wherein determining the time period
comprises measuring an electrical current induced by a motion of at
least one of the layers.
21. The method of claim 20, wherein determining the time period
comprises determining a time between when a voltage is applied
across the two layers and when the electrical current reaches a
relative maximum.
22. The method of claim 20, wherein determining the time period
comprises determining a time between a first time and a second
time, the first time and second time each being when the electrical
current reaches a predetermined percentage of a relative
maximum.
23. The method of claim 14, wherein determining the time period
comprises determining the capacitance across the two layers.
24. The method of claim 14, wherein determining the time period
comprises determining a release time or actuation time of the
element.
25. A system for measuring pressure comprising: means for applying
a stimulus to an element comprising two layers separated by a
space, wherein a dimension of the space changes in response to the
stimulus; means for determining a time period over which the
dimension of the space changes from a first dimension to a second
dimension; and means for determining, based on the determined time
period, an ambient pressure about the element.
26. The system of claims 25, wherein the means for applying the
stimulus comprises means for applying a voltage across the two
layers.
27. The system of claim 25, wherein the means for applying the
stimulus comprises means for applying the stimulus to a
microelectromechanical systems (MEMS) element.
28. The system of claim 25, wherein the means for applying the
stimulus comprises means for applying a voltage across two layers
of an interferometric modulator.
29. The system of claim 25, further comprising means for displaying
the determined pressure.
30. The system of claim 25, further comprising means for
determining an altitude based on the determined ambient pressure
and means for displaying the determined altitude.
31. The system of claim 25, wherein the means for determining the
time period comprises means for measuring an electrical current
induced by a motion of at least one of the layers.
32. The system of claim 31, wherein the means for determining the
time period comprises means for determining a time between when a
voltage is applied across the two layers and when the electrical
current reaches a relative maximum.
33. The system of claim 31, wherein the means for determining the
time period comprises means for determining a time between a first
time and a second time, the first time and second time each being
when the electrical current reaches a predetermined percentage of a
relative maximum.
34. The system of claim 25, wherein the means for determining the
time period comprises determining the capacitance across the two
layers.
35. The system of claim 25, wherein the means for determining the
time period comprises determining a release time or actuation time
of the element.
36. The system of claim 25, wherein at least one of the means for
applying a stimulus to an element, the means for means for
determining a time period, and the means for determining an ambient
pressure about the element comprises a processor.
37. A non-transitory computer-readable storage medium comprising
instructions which, when executed by an apparatus, cause the
apparatus to: apply a stimulus to an element comprising two layers
separated by a space, wherein a dimension of the space changes in
response to the stimulus; determine a time period over which the
dimension of the space changes from a first dimension to a second
dimension; and determine, based on the determined time period, an
ambient pressure about the element.
38. The non-transitory computer-readable storage medium of claim
37, wherein the instructions which cause the apparatus to apply a
stimulus comprise instructions which cause the apparatus to apply a
voltage across the two layers.
39. The non-transitory computer-readable storage medium of claim
37, further comprising instructions, which when executed by the
apparatus, cause the apparatus to display the determined
pressure.
40. The non-transitory computer-readable storage medium of claim
37, wherein the instructions which cause the apparatus to determine
a time period comprise instructions, which cause the apparatus to
determining a time between when a voltage is applied across the two
layers and when the electrical current reaches a relative maximum.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of U.S. application Ser.
No. 12/141,326, filed Jun. 18, 2008, which is hereby incorporated
by reference in its entirety.
BACKGROUND
Field of the Invention
[0002] Microelectromechanical systems (MEMS) include micro
mechanical elements, actuators, and electronics. Micromechanical
elements may be created using deposition, etching, and/or other
micromachining processes that etch away parts of substrates and/or
deposited material layers or that add layers to form electrical and
electromechanical devices. One type of MEMS device is called an
interferometric modulator. As used herein, the term interferometric
modulator or interferometric light modulator refers to a device
that selectively absorbs, transmits, and/or reflects light using
the principles of optical interference. In certain embodiments, an
interferometric modulator may comprise a pair of conductive plates,
one or both of which may be transparent and/or reflective in whole
or part and capable of relative motion upon application of an
appropriate electrical signal. In a particular embodiment, one
plate may comprise a stationary layer deposited on a substrate and
the other plate may comprise a metallic membrane separated from the
stationary layer by an air gap. As described herein in more detail,
the position of one plate in relation to another can change the
optical interference of light incident on the interferometric
modulator. Such devices have a wide range of applications, and it
would be beneficial in the art to utilize and/or modify the
characteristics of these types of devices so that their features
can be exploited in improving existing products and creating new
products that have not yet been developed.
[0003] The device of the current invention is intended to measure
the pressure about the device, and although it has a similar
structure as an interferometric modulator, it may or may not have
the optical properties of a typical interference modulator.
SUMMARY
[0004] One aspect of the invention is a device for measuring
pressure comprising at least one element comprising two layers
separated by a space, wherein a dimension of the space changes over
a variable time period in response to a voltage applied across the
two layers and a measuring module configured to measure the time
period, wherein the time period is indicative of the ambient
pressure about the device.
[0005] Another aspect of the invention is a method of measuring
ambient pressure comprising applying a voltage across two layers of
a MEMS device, measuring a value characteristic of the response
time of the device, and determining a pressure about the device
based on the measured value.
[0006] Yet another aspect of the invention is a device for
measuring pressure comprising at least one element comprising two
conductive layers separated by a space, wherein a dimension of the
space changes over a variable time period in response to a change
in voltage applied across the two layers, a measuring module
configured to measure current flowing between the two conductive
layers as a function of time when there is a change in voltage
applied between the two conductive plates, and a processor
configured to determine the time difference between when the
voltage pulse is applied and when the local maximum of the motion
current occurs, wherein the processor is further configured to
associate the time difference with an ambient pressure.
BRIEF DESCRIPTION OF THE DRAWINGS
[0007] FIG. 1A shows an embodiment of the invention in the released
state.
[0008] FIG. 1B shows an embodiment of the invention in the actuated
state.
[0009] FIG. 1C shows an applied voltage and the current response of
one embodiment of the invention due to the applied voltage.
[0010] FIG. 2 is a flowchart which shows a method of measuring
pressure according to one embodiment of the invention.
[0011] FIG. 3 is a diagram of movable mirror position versus
applied voltage for one exemplary embodiment of a MEMS device.
[0012] FIG. 4 is an isometric view depicting a portion of one
embodiment of the invention as an interferometric modulator display
in which the first layer, a movable reflective layer, of a first
interferometric modulator is in a relaxed position and the first
layer of a second interferometric modulator is in an actuated
position.
[0013] FIG. 5 is an exemplary embodiment of the invention.
DETAILED DESCRIPTION OF CERTAIN EMBODIMENTS
[0014] Typical usage of an interferometric light modulator involves
taking advantage of the optical properties of the device. In some
embodiments, the interferometric light modulator is a bistable
device having two states, each with different optical properties.
The state a particular modulator is in is controllable by the
application of an appropriate electrical signal. Thus, the
interferometric light modulator is well-suited for display
applications. However, other properties of a MEMS device having
similar structure to an interferometric light modulator, can be
used for other purposes, e.g. the measurement of the ambient
pressure about the device.
[0015] FIG. 1A shows an embodiment of the invention in the relaxed
state at a first time, and FIG. 1B shows the same MEMS device in
the actuated state at a second time. FIG. 1C shows an applied
voltage, capable of causing actuation, and the current response of
one embodiment of the invention due to the applied voltage. The
MEMS device shown in FIGS. 1A and 1B comprises a first layer 24 and
a second layer 26. The two layers may be separated by supports 28.
When a voltage is immediately applied across the two layers of the
device, the device takes some time to change states, from the
relaxed state shown in FIG. 1A to the actuated state shown in FIG.
1B. It is appreciated that the device may be designed without
supports 28, or that both layers may move towards each other upon
the application of a voltage.
[0016] The time it takes for such a MEMS device to actuate or
release depends on the design of the device, the voltage signal,
and the ambient pressure. In one embodiment, the actuation time of
the modulator is a linear function of the ambient pressure. As
such, the MEMS device can be used, with appropriate control and
measurement circuitry, as a pressure sensor.
[0017] In one embodiment, an applied voltage 30 changing from a
first value 32 to a second value 34 causes the first layer 24 to
begin moving towards the second layer 26. The resulting current
response 36 may exhibit multiple peaks, as measured by an ammeter
22 connected between the first layer 24 and the second layer 26. In
general, the current response 36 can be described by the following
equation:
I = Q t = C V t + V C t . ##EQU00001##
[0018] The first peak 38 is caused by the change in the applied
voltage 30 from a first value 32 to a second value 34, as described
by the first term in the above equation. The second peak 40 is
caused by the change in capacitance associated with the movement of
the first layer 24 relative to the second layer 26, as described by
the second term in the above equation. The motion of the first
layer 24 relative to the second 26, and thus, the second peak 40 in
the current response 36 is affected by the ambient pressure.
[0019] As the first layer 24 picks up speed as it moves towards the
second layer 26 there is an increase in the measured current
corresponding to the left half of the second peak 40. At a point of
maximum velocity, the first layer 24 begins to slow down as it
pushes air out from between it and the second layer 26. This point
is indicated by a maximum in the second peak 40 of the current
response 36. Finally, the first layer 24 comes to rest, with the
device in an actuated state. The actuation time of the device can
thus be measured in a number of ways. For instance, the actuation
time can be considered the amount of time required for the first
layer 24 to reach maximum velocity. The actuation time can also be
considered the amount of time required for the first layer to move
fully from a relaxed state to an actuated state. The actuation time
may be characterized by measuring the sharpness of the second peak
40, e.g. measuring the time between when the second peak 40 reaches
50% of the maximum for the first time while increasing and when the
second peak 40 reaches 50% of the maximum for the second time while
decreasing. The release time, i.e. the time it takes the change
from the actuate state to the release state, is also a function of
the pressure and can also be used to measure the ambient pressure
to which the device is exposed.
[0020] FIG. 2 is a flowchart which shows a method 50 of measuring
pressure according to one embodiment of the invention. In a first
stage, a voltage is applied across two layers of a MEMS device 72.
In the next stage, the current response resulting from this applied
voltage is measured 74. In the next stage, a value characteristic
of the response time of the device is obtained based on the
measured current response 76. In the final stage, the pressure
about the device is obtained based on the value characteristic of
the response time 78.
[0021] The bistable nature of such a MEMS device is enabled by a
linear mechanical force competing with a nonlinear electrostatic
force. This creates hysteresis in the device. In one embodiment of
the invention, as shown in FIG. 3, when no voltage is applied
across the first layer 24 and the second layer 26, the position of
the first layer 24 is apart from the second layer, and the device
is in the relaxed state, indicated as point A. As the voltage
across the two layers is increased, the MEMS device remains in the
relaxed state until a threshold is reached, indicated as point B.
After the voltage across the two layers exceeds this threshold, the
first layer 24 changes position to be closer to the second layer 26
and the MEMS device is in the actuated state, indicated by point C.
As the voltage is decreased, the MEMS device stays in the actuated
state even as the voltage is decreased below the voltage which
first caused the actuation of the element, indicated by point D.
After the voltage has been decreased below a second threshold, the
MEMS device enters the relaxed state, indicated again by point A.
The hysteresis effect occurs regardless of the polarity of the
voltage, i.e. the same is true if a negative voltage rather than a
positive voltage is used.
[0022] As just described, one embodiment of invention exhibits
hysteresis. Thus, the applied voltage to actuate or release the
device can take many forms. As shown in FIG. 1C, the applied
voltage may be a step function from a release voltage to an
actuation voltage. However, a change from a hold voltage (e.g. 5
volts) to an actuation voltage (e.g. 10 volts) can also cause
actuation in a device in the release state. Similarly, although a
step function is shown in FIG. 1C, a periodic function, such as a
square wave, may be advantageous to repeatedly measure the pressure
about the device as it repeatedly changes states.
[0023] The use of a bilayer MEMS device or an array of such MEMS
devices, as a pressure sensor, has many advantages over typical
pressure sensors. In some embodiments, the construction of such a
MEMS device lends itself to the creation of an array of such
devices. The use of an array adds redundancy to the measurement. If
an element or even a fraction of the elements fail to operate, the
device as a whole can still be used to measure pressure.
[0024] As a pressure sensor, the device may be used to measure
ambient pressure as a barometer. The device may be used as an
altimeter. The device may be used to measure blood pressure as part
of a sphygmomanometer. With appropriate design, the device may be
used to record pressure applied by a user. In one embodiment of the
invention, the device is further configured as an interferometric
modulator has particularly configurable optical properties, as
described below. As such, it may be possible to use the device as
part of a touch-screen display. Also, although the device is
described to measure air pressure, it is noted that other forms of
pressure may also be measured such a configured MEMS device.
[0025] FIG. 4 is an isometric view depicting a portion of one
embodiment of an interferometric modulator array in which a movable
reflective layer of a first interferometric modulator is in a
relaxed position and a movable reflective layer of a second
interferometric modulator is in an actuated position. As described,
a MEMS device designed to measure pressure can be further
configured with specific optical properties. Similarly, standard
interference modulators can be used as a general MEMS device to
measure ambient pressure. The depicted portion of the modulator
array in FIG. 4 includes two adjacent interferometric modulators
12a and 12b. In the interferometric modulator 12a on the left, the
first layer, a movable reflective layer 14a, is illustrated in a
relaxed position at a predetermined distance from the second layer,
an optical stack 16a, which includes a partially reflective layer.
In the interferometric modulator 12b on the right, the movable
reflective layer 14b is illustrated in an actuated position
adjacent to the optical stack 16b.
[0026] The optical stacks 16a and 16b (collectively referred to as
optical stack 16) typically comprise several fused layers, which
can include an electrode layer, such as indium tin oxide (ITO), a
partially reflective layer, such as chromium, and a transparent
dielectric. The optical stack 16 is thus electrically conductive,
partially transparent, and partially reflective, and may be
fabricated, for example, by depositing one or more of the above
layers onto a transparent substrate 20. The partially reflective
layer can be formed from a variety of materials that are partially
reflective such as various metals, semiconductors, and dielectrics.
The partially reflective layer can be formed of one or more layers
of materials, and each of the layers can be formed of a single
material or a combination of materials.
[0027] In some embodiments, the layers of the optical stack 16 are
patterned into parallel strips, and may form row electrodes in a
display device as described further below. The movable reflective
layers 14a, 14b may be formed as a series of parallel strips of a
deposited metal layer or layers (orthogonal to the row electrodes
of 16a, 16b) deposited on top of posts 18 and an intervening
sacrificial material deposited between the posts 18. When the
sacrificial material is etched away, the movable reflective layers
14a, 14b are separated from the optical stacks 16a, 16b by a
defined gap 19. A highly conductive and reflective material such as
aluminum may be used for the reflective layers 14, and these strips
may form column electrodes in a display device.
[0028] With no applied voltage, the gap 19 remains between the
movable reflective layer 14a and optical stack 16a, with the
movable reflective layer 14a in a mechanically relaxed state, as
illustrated by the pixel 12a in FIG. 4. However, when a potential
difference is applied to a selected row and column, the capacitor
formed at the intersection of the row and column electrodes at the
corresponding pixel becomes charged, and electrostatic forces pull
the electrodes together. If the voltage is high enough, the movable
reflective layer 14 is deformed and is forced against the optical
stack 16. A dielectric layer (not illustrated in this Figure)
within the optical stack 16 may prevent shorting and control the
separation distance between layers 14 and 16, as illustrated by
interferometric light modulator 12b on the right in FIG. 4. The
behavior is the same regardless of the polarity of the applied
potential difference. In this way, row/column actuation that can
control the reflective vs. non-reflective pixel states is analogous
in many ways to that used in conventional LCD and other display
technologies.
[0029] Some embodiments of the invention may include a display
element with which to output the measured ambient pressure. The
display element may be an LCD display, such as those used in
wristwatches, or the display element may be an interferometric
array. In the case an interferometric array is used to display the
ambient pressure, it may be possible to configure the array to both
measure and display the ambient pressure about the device.
[0030] FIG. 5 is an exemplary embodiment of the invention. In this
embodiment, the device 50 comprises a processor 52, a memory 54, an
input 56, an image source module 58, a transceiver 60, a measuring
module 62, a controller 64, a driver 66, and a display 68. In an
exemplary operation, a user wishing to measure the pressure about
the device indicates this desire using the input 56. The processor
52 passes this instruction the controller 64, which activates a
driver 66 which drives the display 68. A measuring module 62
connected to display 68 measures the current response of at least
one of the MEMS device embodied in the display 68 and passes this
information to the processor 52. The processor may access memory 54
storing code to calculate the pressure about the device from the
measured current response. The device may be embodied in a general
display unit which receives images from an image source module 58.
Further, the image source module 58 is connected to a transceiver
60, which may act as a transmitter and a receiver, in order to
receiver new images.
[0031] The foregoing description sets forth various preferred
embodiments and other exemplary but non-limiting embodiments of the
inventions disclosed herein. The description gives some details
regarding combinations and modes of the disclosed inventions. Other
variations, combinations, modifications, modes, and/or applications
of the disclosed features and aspects of the embodiments are also
within the scope of this disclosure, including those that become
apparent to those of skill in the art upon reading this
specification. Thus, the scope of the inventions claimed herein
should be determined only by a fair reading of the claims that
follow.
* * * * *