U.S. patent application number 12/718926 was filed with the patent office on 2010-09-09 for statistical illuminator.
This patent application is currently assigned to Micronic Laser Systems AB. Invention is credited to Jarek Luberek, Torbjorn Sandstrom.
Application Number | 20100225236 12/718926 |
Document ID | / |
Family ID | 42309698 |
Filed Date | 2010-09-09 |
United States Patent
Application |
20100225236 |
Kind Code |
A1 |
Luberek; Jarek ; et
al. |
September 9, 2010 |
Statistical Illuminator
Abstract
The technology disclosed relates to an illumination source
including numerous laser diodes. In particular, it relates to
extending the duty cycle and/or reducing the frequency of component
replacement by detecting failure of one or more individual laser
diodes and compensating for the failure, without replacing the
laser diodes. The technology disclosed can be used in cases of
catastrophic laser diode failure by changing the power of remaining
laser diodes to restore illumination to the coherence function
similar to the pre-failure illumination field. Particular aspects
of the technology disclosed are described in the claims,
specification and drawings.
Inventors: |
Luberek; Jarek; (Molndal,
SE) ; Sandstrom; Torbjorn; (Pixbo, SE) |
Correspondence
Address: |
HAYNES BEFFEL & WOLFELD LLP
P O BOX 366
HALF MOON BAY
CA
94019
US
|
Assignee: |
Micronic Laser Systems AB
Taby
SE
|
Family ID: |
42309698 |
Appl. No.: |
12/718926 |
Filed: |
March 5, 2010 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
61158310 |
Mar 6, 2009 |
|
|
|
Current U.S.
Class: |
315/158 ;
315/297 |
Current CPC
Class: |
G03F 7/70366 20130101;
G03F 7/70433 20130101; G03F 7/70591 20130101; G01B 11/303 20130101;
G03F 7/70508 20130101; G03F 7/70291 20130101; G03F 7/70516
20130101; G03F 7/70783 20130101 |
Class at
Publication: |
315/158 ;
315/297 |
International
Class: |
H05B 37/02 20060101
H05B037/02 |
Claims
1. A method of extending the life of an illumination source upon
catastrophic failure of one or more illumination elements among 15
or more elements, the method including: operating an illuminator
that combines radiation output from 15 or more illumination
elements, including distributing initial power to the elements that
produces initial radiation output levels from the elements; and
combining the initial radiation output levels to produce an overall
illumination field from the illuminator that satisfies a quality
function; detecting failure of a first illumination element that
reduces output from the first element to less than 20 percent of
its initial output level; reducing power distribution to and output
from one or more non-failing illumination elements to restore
symmetry in the overall illumination field; increasing power
distribution to and output from at least some of the illumination
elements to restore quality of the overall illumination field, as
measured by the quality function.
2. The method of claim 1, further including the illuminator
combining radiation from up to 200 illumination elements.
3. The method of claim 1, wherein the illumination elements have
even spatial distribution.
4. The method of claim 1, wherein the illumination elements having
varying spatial distribution.
5. The method of claim 1 further including expressing said quality
function as an approximately Gaussian distribution.
6. The method of claim 1, further including expressing said quality
function as an approximately sin(x)/x distribution.
7. The method of claim 1, wherein said detecting, reading and
increasing power distribution can be done automatically.
8. Method of claim 1, further including operating the illuminator
with the 15 or more illumination elements after the first
illumination element has failed without replacing the first
illumination element.
9. The method of claim 1, further including detecting failure of a
second illumination element, applying the reducing an increasing
steps to compensate for the failure of the second illumination
element, and continuing to operate the illuminator with the 15 or
more illumination elements after the first and second illumination
elements have failed, without replacing the first or second
illumination elements.
10. A self-correcting illuminator system including: an illuminator
that includes 15 or more illumination elements and optics that
combine radiation output from the illumination elements; a power
supply coupled to the illumination elements that distributes power
to the illumination elements; sensors optically coupled to the
radiation output; a controller coupled to the sensors and
controlling the power supply, the controller including program
instructions that set an initial power level for the illumination
elements, wherein initial output levels from the illumination
elements produce an overall illumination field from the illuminator
that satisfies a quality function; detect failure of a first
illumination element that reduces output from the first element to
less than 20 percent of its initial output level; responsive to the
detected failure, reduce power distribution to and output from one
or more non-failing illumination elements to restore symmetry in
the overall illumination field; and further responsive to the
detected failure, increase power distribution to and output from at
least some of the illumination elements to restore quality of the
overall illumination field, as measured by the quality
function.
11. The system of claim 10, wherein the quality function is an
approximately Gaussian distribution.
12. The system of claim 10, wherein the quality function is an
approximately sin(x)/x distribution.
13. The system of claim 10 wherein the illumination elements have
even spatial distribution.
14. The system of claim 10 wherein the illumination elements have
varying spatial distribution.
Description
RELATED APPLICATION
[0001] This application claims the benefit of U.S. Provisional
Application No. 61/158,310, filed 6 Mar. 2009, which is hereby
incorporated by reference.
[0002] This application is related to US patent application
entitled "Rotor Imaging System and Method with Variable-Rate Pixel
Clock"; and US patent application entitled "Variable Overlap Method
and Device for Stitching Together Lithographic Stripes"; and US
patent application entitled "Lithographic Printing System with
Placement Corrections", all filed contemporaneously. The related
applications are incorporated by reference.
BACKGROUND OF THE INVENTION
[0003] The technology disclosed relates to an illumination source
including numerous laser diodes. In particular, it relates to
extending the duty cycle and/or reducing the frequency of component
replacement by detecting failure of one or more individual laser
diodes and compensating for the failure, without replacing the
laser diodes.
[0004] The Micronic Laser development team has pioneered a variety
of platforms for microlithographic printing. An established
platform for the Sigma machine is depicted in FIG. 2. A rotor
printing platform is described in recently filed patent
applications. A drum printing platform is described in other patent
applications.
[0005] One printing mechanism designed for these platforms uses
swept beams that are modulated as they traverse the surface of the
workpiece, applying energy as a paintbrush applies color. Another
printing mechanism design freezes the motion of the workpiece with
the flash and stamps two dimensional patterns on the workpiece,
exposing a radiation sensitive layer in a manner similar to block
printing a pattern. Printing with stamps is an intricate process
that typically overlaps multiple writing passes.
[0006] Illuminators are a major part of the operating cost of many
microlithographic printing systems. Accordingly, the opportunity is
ever present to develop new illuminators. New illuminator designs
may deliver increased power, extended lives, failure tolerance and
decreased maintenance.
SUMMARY OF THE INVENTION
[0007] The technology disclosed relates to an illumination source
including numerous laser diodes. In particular, it relates to
extending the duty cycle and/or reducing the frequency of component
replacement by detecting failure of one or more individual laser
diodes and compensating for the failure, without replacing the
laser diodes.
[0008] The technology disclosed can be used in cases of
catastrophic laser diode failure by changing the power of remaining
laser diodes to restore illumination to the coherence function
similar to the pre-failure illumination field. Particular aspects
of the technology disclosed are described in the claims,
specification and drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0009] FIG. 1: Partially coherent projection system using an SLM
and relays in the illuminator and projection paths.
[0010] FIG. 2: Generic writer or printer using a one-dimensional
SLM as disclosed.
[0011] FIG. 3: An example illuminator using an array of light
sources S1-S8.
[0012] FIG. 4a: Gaussian distribution of light from the plane of
the sources.
[0013] FIG. 4b: Depicting the coherence function with the failed
laser diode.
[0014] FIG. 4c: Depicting the solution for a failed laser
diode.
[0015] FIG. 5: A flow chart depicting the iteration process for
maintaining a constant value for illumination field.
DETAILED DESCRIPTION
[0016] The following detailed description is made with reference to
the figures. Preferred embodiments are described to illustrate the
technology disclosed, not to limit its scope, which is defined by
the claims. Those of ordinary skill in the art will recognize a
variety of equivalent variations on the description that
follows.
[0017] The technology disclosed uses a one or two dimensional array
of laser diodes with individually controlled power feeds and
radiation outputs as an illumination source. Based on our analysis,
we believe that 15 laser diodes is a good minimum number to permit
the system to continue operation after catastrophic failure of one
or more laser diodes, while continuing to satisfy a selected
coherence function and afford a printing fidelity. Our analysis
demonstrates that seven or eight laser diodes is too few to permit
reduction of output from one of the remaining good laser diodes, to
reestablish symmetry. By catastrophic failure, we mean that one or
more laser diodes suffers a reduction in output to less than or
equal to 20% of its initial output. By continuing to operate, we
mean that the array of laser diodes can be used without replacing
the failed laser diode. Coupled to an array of 15 or more laser
diodes, we describe a detection and recovery method device to avoid
the inconvenience of interrupted production and increase the time
between replacement of illumination elements or illumination
sources.
[0018] FIG. 3 depicts an example illuminator using an array of
light sources S1-S8. The number of sources can vary from case to
case, e.g. depending on the number of sources necessary to reach
the desired total optical power. The sources may be laser diodes,
e.g. with wavelength approximately 405, 375, or 360 nm. The number
of sources needs to be larger or much larger than shown, at least
15 laser diodes ranging upward to 30, 60, 120, or 200 sources. The
sources may be discrete, mounted in mechanic modules or be part of
laser bars. The sources are incoherent to each other, e.g. by being
selected to have a slightly different wavelength. The light from
each source is collimated to fall on the SLM from one direction.
The sources together create a partially coherent illumination on
the SLM, which is beneficial for resolution and image contrast in
an image subsequently formed of the illuminated SLM. The partial
coherence may be described by a coherence function, well known to
the skilled optical engineer and described in Born & Wolf:
"Principles of optics" and other textbooks. The coherence factor
can be calculated by means of the Zernike-van Cittert formula found
in the textbooks, relating the coherence function to the angular
spread of the light impinging on it.
[0019] The coherence function may have an approximately Gaussian or
sin(x)/x shape. The exact shape is a compromise between desired
imaging properties and technical limitation of the illuminator. An
approximately Gaussian shape assumes an approximate Gaussian
distribution of light from the plane of the sources. An example is
shown in FIG. 4a. The filled dots show the actual power from each
laser diode and the open dots the maximum allowed power from the
same laser diodes. The laser diodes are shown with an even spatial
distribution, but it is possible to use varying distances, thereby
creating the desired power distribution with few laser diodes,
and/or most laser diodes operating closer to their maximum power.
The graph to the right in FIG. 4a shows the resulting coherence
function.
[0020] The laser diodes have a limited life and the cost of the
laser diodes is a large part of the cost of ownership of the
disclosed laser writer. Typically the laser diodes fade slowly
during life, but catastrophic failure also happens. Such a failure
is shown in the example in FIG. 4b. Having a laser diode fail can
cause a number of problems.
[0021] First, if the deterioration of the coherence function is
large enough to affect image properties, the writing system may
need to be taken down for repair immediately, upsetting production
planning. If the repair cannot be affected immediately, the system
may be down for hours or longer until a skilled service person with
the proper spare parts arrives.
[0022] Second, if the light sources, e.g. laser diodes, are mounted
in modules or form part of the same array component, one failed
source means changing a whole module or array, incurring higher
replacement costs.
[0023] In addition, having a tunable fault-tolerant scheme may
allow laser diodes or laser diode arrays with less tight
specifications to be used. To be able to run the system with laser
diode arrays with some laser diodes performing out of spec may save
cost and in some cases even make it possible to use lasers which
cannot be reproducibly produced, e.g. at shorter wavelengths.
[0024] FIG. 4b shows the coherence function with the failed laser
diode in the left figure. The figure shows the actual coherence
function ("Act") and the intended one ("Ref") and the difference
magnified ten times ("10*Diff"). The horizontal scale may, in some
embodiments, be equal to the number of pixels in the SLM. The
difference between intended and actual coherence function
translates to errors in the image, e.g. in the balance between the
size of small and large features. The figure also shows the phase
angle of the complex coherence function in milliradians. A tilted
phase angle from mirror to mirror is the same as an apparent tilt
in the illumination and will give problems with the landing angle
of the light in the image, i.e. the image gets a displacement
sideways when focus is changed.
[0025] The problem of failing laser diodes or laser diodes out of
specification may be solved as shown in FIG. 4c. The power of some
of the other laser diodes has been changed to restore the coherence
function to be more similar to the intended one. To avoid problems
with the landing angle the distribution of power is made
symmetrical by the lowering of the power of the laser diode
symmetrical to the failed one on the other side of the optical
axis. Doing this improves landing angle, but amplifies other image
errors, like the large-small balance. Laser diodes close to the
laser diodes with low power are adjusted to a higher power. In a
general procedure each may have a different limit and the
distribution may be more complicated than shown in the figure.
[0026] The adjustment of the power to the laser diodes may be done
automatically by calculation of the coherence function or even the
properties of the image and finding, e.g. by iteration, laser diode
currents that minimize the resulting errors.
[0027] Another possibility is to specify momenta of different
orders for the light intensity and bringing the momenta within
bounds by modifying the drive currents to the laser diodes. In some
cases it may not be possible to recreate the desired momenta,
coherence functions, or image properties at the same total power.
In those cases, a lower power may be set and the writing speed of
the laser writer reduced, in order to keep it running until a
repair can be done. Likewise it may be possible to run some laser
diodes beyond their safe power levels in order to keep the system
running until a repair can take place, thereby eating into the
lifetime of the laser diodes slightly, but avoiding unscheduled
downtime.
[0028] The light source may be measured constantly or at short
regular intervals using an array of detectors or a camera. The
image may be brought to the camera by means of a beam sampling
mirror or grating always present in the system.
[0029] The tuning of the light source currents may be automated in
the background by the following procedure. FIG. 5 depicts an
iteration process used to calculate a coherence function and solve
for a new possible distribution of laser diode power. First,
measure the light distribution 513 in the source plane. Second,
calculate a quality function 515, which may be first, second, etc.
or momenta of the light distribution; or the coherence function
from Zernike-van Cittert, or the image of one or more features in
the image. Next, solve the derived coherence function to determine
a new possible distribution of laser diode power 517 using the
quality index. If the quality index is within allowed bounds 519
then check to see if it is close to the boundary limit 521. If yes,
then alert the operator 519 to schedule the repair. However, if the
quality index is not within the allowed bounds then alert the
operator 539 that the system is out of bounds.
[0030] In the following paragraphs, we describe systems that use 2D
and 1D SLMs that require illumination services.
[0031] A generic projection system is illustrated by FIG. 1. It has
an object 1, which can be a mask or one or several SLMs, and a
workpiece 2, e.g. a mask blank, a wafer or a display workpiece 2
device. Between them is a projection system 3 that propels 4 onto
the image 5. The object is illuminated by an illuminator 6. The
projection system consists of one or several lenses (shown) or
curved mirrors. The NA of the projection system is determined by
the size of the pupil 8. The illuminator 6 includes a light source
17 illuminating the illumination aperture 19. Field lenses 10 and
11 are shown but the presence of field lenses is not essential for
the function. The imaging properties are determined by the size and
intensity variation inside the illuminator aperture 9 in relation
to the size of the pupil 8.
[0032] The basic projection system in 1a can be realized in many
equivalent forms, e.g. with a reflecting object as shown in FIG. 1.
The imaging power of the optical system can be refractive,
diffractive or residing in curved mirrors. The reflected image can
be illuminated through a beam splitter 12 or at an off-axis angle.
The wavelength can be ultraviolet or extending into the soft x-ray
(EUV) range. The light source can be continuous or pulsed: visible,
a discharge lamp, one or several laser sources or a plasma source.
The object can be a mask in transmission or reflection or an SLM.
The SLM can be binary or analog; for example micromechanical, using
LCD modulators, or using olectrooptical, magnetooptical,
electroabsorbtive, electrowetting, acoustooptic, photoplastic or
other physical effects to modulate the beam.
[0033] The Sigma7300 mask writer made by Micronic Laser Systems AB
further includes as an Excimer laser 17, a homogenizer 18, and
relay lenses 13 forming an intermediate image 14 between the SLM
and the final lens. The pupil of the final lens is normally located
inside the enclosure of the final lens and difficult to access, but
in FIG. 1 there is an equivalent location 15 in the relay. The
smallest of the relay and lens pupils will act as the system stop.
There is also a relay in the illuminator providing multiple
equivalent planes for insertion of stops and baffles. In some
implemantations, the Sigma7300 has a catadioptric lens with a
central obscuration of approximately 16% of the open radius in the
projection pupil.
[0034] FIG. 2 is a rendering of the Sigma system, using a
two-dimensional SLM as disclosed. A light source 205 (arc lamp, gas
discharge, laser, array of lasers, laser plasma, LED, array of LEDs
etc.) illuminates a one-dimensional SLM 204. The reflected (or
transmitted in the general case) radiation is projected as a line
segment 203 on a workpiece 201. The data driving the SLM changes as
the workpiece is scanned 207 to build up an exposed image. A
strongly anamorphic optical system 206 concentrates energy from
multiple mirrors in a column (or row) to point in the image and the
entire two-dimensional illuminated array forms a narrow line
segment 203 that is swept across the workpiece. In one dimension,
the anamorphic optics demagnify the illuminated area, for instance,
by 2.times. to 5.times., so the a 60 millimeter wide SLM would
image onto a line segment 30 to 12 mm long. Along the short
dimension, the anamorphic optics strongly demagnify the column of
mirrors to focus onto a narrow area such as 3 microns wide, i.e.
essentially a single resolved line. Alternatively, the area could
be 1 or 5 microns wide or less than 10 microns wide. Focus onto a 3
micron wide area could involve an 80.times. demagnification, from
approximately 240 microns to 3 microns. The anamorphic optical path
demagnifies the row of mirrors to an extent that individual mirrors
are combined and not resolved at the image plane.
Some Particular Embodiments
[0035] The technology disclosed may be practiced as a method or
device adapted to practice the method. The technology disclosed may
be an article of manufacture such as media impressed with logic to
carry out computer-assisted method or program instructions that can
be combined with hardware to produce a computer-assisted
device.
[0036] One embodiment is a method of extending the life of an
illumination source upon catastrophic failure of one or more
illumination elements among 15 or more elements. The method
includes operating an illuminator that combines radiation output
from 15 or more illumination elements. The illuminator distributes
initial power to the elements that produces initial radiation
output levels from the elements. The illuminator also combines the
initial radiation output levels to produce an overall illumination
field from the illuminator that satisfies a quality function. Next,
there is detection of failure of a first illumination element that
reduces output from the first element to less than 20 percent of
its initial output level. The power distribution to and output from
one or more non-failing illumination elements is reduced to restore
symmetry in the overall illumination field. The power distribution
to and output from at least some of the illumination elements is
increased to restore quality of the overall illumination field, as
measured by the quality function.
[0037] In alternate embodiments, the illuminator combines radiation
from 15 up to 200 illumination elements. The illumination elements
can also have varying spatial distribution.
[0038] One aspect of the technology disclosed, applicable to any of
the embodiments above, is expressing said quality function as an
approximately Gaussian distribution. Alternately, the quality
function can also be expressed as an approximately sin(x)/x
distribution.
[0039] Another aspect of the technology disclosed is automatically
detecting, reading and increasing power distribution.
[0040] In another embodiment, the illuminator operates with the 15
or more illumination elements after the first illumination element
fails, without replacing the failed first illumination element.
[0041] In yet another embodiment, failure of a second illumination
element is detected, applying the reducing and increasing steps to
compensate for the failure of the second illumination element, and
continuing to operate the illuminator with the 15 or more
illumination elements after the first and second illumination
elements have failed, without replacing the first or second
illumination elements.
[0042] Any of the methods described above or aspects of the methods
may be embodied in a self correcting illuminator system. The system
includes an illuminator that includes 15 or more illumination
elements and optics that combine radiation output from the
illumination elements, a power supply coupled to the illumination
elements that distributes power to the illumination elements,
sensors optically coupled to the radiation output, a controller
coupled to the sensors and controlling the power supply, the
controller including program instructions that set an initial power
level for the illumination elements, wherein initial output levels
from the illumination elements produce an overall illumination
field from the illuminator that satisfies a quality function. The
controller also detects failure of a first illumination element
that reduces output from the first element to less than 20 percent
of its initial output level. The controller is further responsive
to the detected failure, reduce power distribution to and output
from one or more non-failing illumination elements to restore
symmetry in the overall illumination field and also responsive to
the detected failure, increase power distribution to and output
from at least some of the illumination elements to restore quality
of the overall illumination field, as measured by the quality
function.
[0043] One aspect of the technology disclosed is illumination
elements having even spatial distribution. Alternately, the
illumination elements can also have varying spatial
distribution.
[0044] Another aspect of the technology disclosed is expressing
said quality function as an approximately Gaussian distribution.
Alternately, the quality function can also be expressed as an
approximately sin(x)/x distribution.
[0045] While the technology is disclosed by reference to the
preferred embodiments and examples detailed above, it is understood
that these examples are intended in an illustrative rather than in
a limiting sense. Computer-assisted processing is implicated in the
described embodiments, implementations and features. Accordingly,
the disclosed technology may be embodied in methods for reading or
writing a workpiece using at least one optical arm that sweeps an
arc over the workpiece, systems including logic and resources to
carry out reading or writing a workpiece using at least one optical
arm that sweeps an arc over the workpiece, systems that take
advantage of computer-assisted control for reading or writing a
workpiece using at least one optical arm that sweeps an arc over
the workpiece, media impressed with logic to carry out, data
streams impressed with logic to carry out reading or writing a
workpiece using at least one optical arm that sweeps an arc over
the workpiece, or computer-accessible services that carry out
computer-assisted reading or writing a workpiece using at least one
optical arm that sweeps an arc over the workpiece. It is
contemplated that modifications and combinations will readily occur
to those skilled in the art, which modifications and combinations
will be within the spirit of the disclosed technology and the scope
of the following claims.
* * * * *