U.S. patent application number 12/345292 was filed with the patent office on 2010-07-01 for biased gap-closing actuator.
This patent application is currently assigned to FORMFACTOR, INC.. Invention is credited to Eric D. Hobbs, Gaetan L. Mathieu.
Application Number | 20100164323 12/345292 |
Document ID | / |
Family ID | 42226890 |
Filed Date | 2010-07-01 |
United States Patent
Application |
20100164323 |
Kind Code |
A1 |
Hobbs; Eric D. ; et
al. |
July 1, 2010 |
BIASED GAP-CLOSING ACTUATOR
Abstract
A gap-closing actuator includes a stator having one or more
first electrodes, a mover having one or more second electrodes
interposed among the first electrodes, and a biasing mechanism for
applying a non-capacitive bias to the mover for urging the mover to
move in a desired direction with respect to the stator. The
non-capacitive bias is different from a capacitive force generated
between the first and second electrodes when the gap-closing
actuator is in operation.
Inventors: |
Hobbs; Eric D.; (Livermore,
CA) ; Mathieu; Gaetan L.; (Vareness, CA) |
Correspondence
Address: |
N. KENNETH BURRASTON;KIRTON & MCCONKIE
P.O. BOX 45120
SALT LAKE CITY
UT
84145-0120
US
|
Assignee: |
FORMFACTOR, INC.
Livermore
CA
|
Family ID: |
42226890 |
Appl. No.: |
12/345292 |
Filed: |
December 29, 2008 |
Current U.S.
Class: |
310/300 |
Current CPC
Class: |
H02N 1/006 20130101 |
Class at
Publication: |
310/300 |
International
Class: |
H02N 11/00 20060101
H02N011/00 |
Claims
1. A gap-closing actuator comprising: a stator having one or more
first electrodes; a mover having one or more second electrodes
interposed among the first electrodes; and a biasing mechanism for
applying a non-capacitive bias to the mover for urging the mover to
move in a desired direction with respect to the stator, wherein the
non-capacitive bias is different from a capacitive force generated
between the first and second electrodes when the gap-closing
actuator is in operation.
2. The gap-closing actuator of claim 1 wherein at least one of the
first electrodes is disposed substantially at a middle point
between two consecutive second electrodes in a pre-biasing
state.
3. The gap-closing actuator of claim 2 wherein the non-capacitive
bias moves the at least one of the first electrodes to become
closer to one of the two consecutive second electrodes than the
other in a biased state.
4. The gap-closing actuator of claim 3 wherein the non-capacitive
bias is a spring force.
5. The gap-closing actuator of claim 3 wherein the biasing
mechanism comprises a loading element for generating the
non-capacitive bias.
6. The gap-closing actuator of claim 5 wherein the biasing
mechanism comprises a position constraint for constraining the
loading element in a predetermined position in order to sustain the
non-capacitive bias.
7. The gap-closing actuator of claim 6 wherein the position
constraint and the loading element are disengaged in the
pre-biasing state.
8. The gap-closing actuator of claim 6 wherein the position
constraint and the loading element are engaged in the biased
state.
9. The gap-closing actuator of claim 1 wherein at least one gap
between the first and second electrodes is narrower than a minimal
line width that can be defined by a lithographic process.
10. A process for fabricating a gap-closing actuator comprising:
forming a stator having one or more first electrodes; forming a
mover having one or more second electrodes interposed among the
first electrodes; and applying a non-capacitive bias to the mover
for urging the mover to move in a desired direction with respect to
the stator, wherein the non-capacitive bias is different from a
capacitive force generated between the first and second electrodes
when the gap-closing actuator is in operation.
11. The process of claim 10 wherein the non-capacitive bias is a
spring force.
12. The process of claim 11 wherein the spring force is generated
by providing a spring; deforming the spring; maintaining the spring
in a deformed shape to generate the spring force.
13. The process of claim 12 wherein the maintaining comprises
thermally treating the spring.
14. The process of claim 13 wherein the maintaining comprises
engaging the spring with a position constraint.
15. The process of claim 14 wherein the spring is engaged with the
position constraint by acceleration, an electric force,
electromagnetic resonance, or a combination thereof.
Description
BACKGROUND
[0001] An electric actuator is a device that is capable of
converting electrical energy into mechanical energy, for example in
form of linear or rotational motions, to drive other devices. The
electric actuator can be designed and fabricated in a miniature
size on a semiconductor substrate by micromachining and/or
semiconductor processing technology. Such electric actuator is a
type of micro-electro-mechanical system (MEMS) that can augment
microelectronics, such as a system on a chip (SOC), by generating
motions in order to control its environment in response to signals
received from the microelectronics.
[0002] FIG. 1 illustrates a schematic top view of a typical MEMS
actuator 10 comprising a stator 12, a mover 14 capable of moving
relative to the stator 12, and a number of return springs 20, 22,
and 24. The stator 12 can have a plurality of first electrodes 16
extending therefrom toward the mover 14. The mover 14 can have a
plurality of second electrode 18 extending therefrom toward the
stator 12. At least one of the first electrodes 16 can be disposed
between two consecutive second electrodes 18 in a manner where the
first electrode 16 is closer to one of the second electrodes 18
than the other. Likewise, at least one of the second electrodes 18
can be disposed between two consecutive first electrodes 16 in a
manner where the second electrode 18 is closer to one of the first
electrodes 16 than the other. The mover 14 can have one or more
protrusions 19 extending from one or more sides of its body,
respectively. The return springs 20 and 22 can be coupled between
the mover 14 and their respective fixtures 26 and 28. Each of the
return springs 24 can have one end coupled to a fixture 30, and
another end disposed in proximity of its corresponding protrusion
19.
[0003] In operation, the first and second electrodes 16 and 18 can
be electrically charged to create a capacitive force between them.
As discussed above, because the first and second electrodes 16 and
18 are interposed in an asymmetric manner, the capacitive force
generated can move the mover 14 in a desired direction relative to
the stator 12 as shown by an arrow 13 in the figure. As the mover
14 moves away from its initial position, the return springs 20, 22,
and 24 may deflect to provide it with a return force that is
necessary to push the mover 14 back to its initial position after
the first and second electrodes 16 and 18 become discharged. The
actuator 10 generates motions by closing the gaps between the first
and second electrodes 16 and 18. Thus, the actuator 10 is typically
named as a gap-closing actuator.
[0004] One of the shortcomings of the conventional gap-closing
actuator 10 is the difficulty in controlling its fabrication
process. In fabrication, the first and second electrodes 16 and 18
are typically formed by performing an etching process on a
semiconductor substrate. As shown in FIG. 1, the first and second
electrodes 16 and 18 are interposed among each other in an
asymmetric manner where a gap D1 between at least one of the first
electrodes 16 and one of two consecutive second electrodes 18
between which the first electrode 16 is disposed is wider than a
gap D2 between the first electrode 16 and the other of the two
consecutive second electrodes 18. Due to different aspect ratios of
the gaps D1 and D2, the etch rate of the semiconductor material in
the wider gap D1 can be faster than that in the narrower gap D2.
Thus, it is difficult to fabricate the wider gap D1 and the
narrower gap D2 in the same depth, which in turn makes it difficult
to control the size of the actuator 10 accurately.
[0005] Moreover, the smaller the line width of the electrodes and
the larger the ratio D1 to D2, the more difficult it is to control
the etch rate variation in fabrication. Thus, in order to control
the etch rate variation in a manageable range, the minimum width of
the gap D2 that can be selected for the actuator 10 is limited.
This, in turn, leads to greater power consumption of the actuator,
because the wider the gap D2, the higher the voltage it is required
to operate the actuator 10 for a given return spring constant.
[0006] Another shortcoming of the conventional gap-closing actuator
10 is that the asymmetric arrangement of electrodes 16 and 18
prevents the size of the actuator 10 from being reduced beyond
limits imposed by lithographical processes. In fabrication, the
gaps D1 and D2 among the electrodes 16 and 18 are defined by a
photo mask during a lithographic process, which typically has a
limit for a minimal line width that can be defined. Although the
narrower gap D2 can be defined as being equal to the minimal line
width of the lithographic process, the wider gap D1 is certainly
broader than the minimal line width because it needs to be longer
than the narrower gap D2 in order to ensure that the mover 14 moves
in a desired direction when the actuator 10 is in operation.
[0007] Accordingly, what is needed is a gap-closing actuator whose
fabrication process can be accurately controlled, power consumption
can be decreased, and size can be reduced beyond limits imposed by
lithographic processes.
SUMMARY
[0008] Embodiments of the invention relate to gap-closing
actuators. In some embodiments of the invention, the gap-closing
actuator can include a stator having one or more first electrodes,
a mover having one or more second electrodes interposed among the
first electrodes, and a biasing mechanism for applying a
non-capacitive bias to the mover for urging the mover to move in a
desired direction with respect to the stator. The non-capacitive
bias is different from a capacitive force generated between the
first and second electrodes when the gap-closing actuator is in
operation.
[0009] Embodiments of the invention also relate to processes for
fabricating a gap-closing actuator. In some embodiments of the
invention, a stator having one or more first electrodes can be
formed. A mover having one or more second electrodes interposed
among the first electrodes can be formed. A non-capacitive bias can
be applied to the mover for urging the mover to move in a desired
direction with respect to the stator. The non-capacitive bias is
different from a capacitive force generated between the first and
second electrodes when the gap-closing actuator is in
operation.
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] FIG. 1 illustrates a schematic top view of a conventional
gap-closing actuator 10.
[0011] FIG. 2A illustrates a perspective view of a gap-closing
actuator in a pre-biasing state in accordance with some embodiments
of the invention.
[0012] FIG. 2B illustrates a schematic top view of a gap-closing
actuator in a pre-biasing state in accordance with some embodiments
of the invention.
[0013] FIG. 3 illustrates a schematic top view of a gap-closing
actuator in a biased state in accordance with some embodiments of
the invention.
[0014] FIG. 4 schematically illustrates a diagram showing an
electro-mechanical system of a biased gap-closing actuator in
accordance with some embodiments of the invention.
[0015] FIG. 5 illustrates a graph showing a reduced voltage supply
for a biased gap-closing actuator in accordance with some
embodiments of the invention.
[0016] FIG. 6 illustrates a schematic top view of a biased
gap-closing actuator in accordance with some embodiments of the
invention.
[0017] FIG. 7 illustrates a schematic top view of a mover of a
gap-closing actuator in a pre-biasing state in accordance with some
embodiments of the invention.
[0018] FIG. 8 illustrates a schematic top view of a mover of a
gap-closing actuator in a biased state in accordance with some
embodiments of the invention.
[0019] Where possible, identical reference numbers are used herein
to designate elements that are common to the figures. The images
used in the drawings may be simplified for illustrative purposes
and are not necessarily depicted to scale.
DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS
[0020] This specification describes exemplary embodiments and
applications of the invention. The invention, however, is not
limited to these exemplary embodiments and applications or to the
manner in which the exemplary embodiments and applications operate
or are described herein. Moreover, the figures can show simplified
or partial views, and the dimensions of elements in the figures can
be exaggerated or otherwise not in proportion for clarity. In
addition, as the terms "on" and "attached to" are used herein, one
object (e.g., a material, a layer, a substrate, etc.) can be "on"
or "attached to" another object regardless of whether the one
object is directly on or attached to the other object or there are
one or more intervening objects between the one object and the
other object. Also, directions (e.g., above, below, top, bottom,
side, up, down, over, under, "x," "y," "z," etc.), if provided, are
relative and provided solely by way of example and for ease of
illustration and discussion and not by way of limitation. In
addition, where reference is made to a list of elements (e.g.,
elements a, b, c), such reference is intended to include any one of
the listed elements by itself, any combination of less than all of
the listed elements, and/or a combination of all of the listed
elements.
[0021] FIG. 2A illustrates a perspective view of a gap-closing
actuator 50 in a pre-biasing state in accordance with some
embodiments of the invention, whereas FIG. 2B illustrates an
equivalent, schematic top view of the actuator 50. Referring to
FIGS. 2A and 2B, the gap-closing actuator 50 can comprise a stator
52, a mover 54 capable of moving relative to the stator 52, a
number of return springs 56, 58, and 60, and a biasing mechanism
63. The stator 52 can have one or more first electrodes 62
extending therefrom toward the mover 54. The mover 54 can have one
or more second electrodes 64 extending therefrom toward the stator
52. At least one of the first electrodes 62 can be disposed between
two consecutive second electrodes 64. In some embodiments of the
invention, the at least one of the first electrodes 62 can be
disposed substantially at a middle point between the two
consecutive second electrodes 64 in a substantially symmetrical
manner where a first gap G1 between the first electrode 62 and one
of the two consecutive second electrodes 64 and a second gap G2
between the first electrode 62 and the other of the two consecutive
second electrodes 64 can be the same or substantially the same.
Likewise, at least one of the second electrodes 64 can be disposed
substantially at a middle point between two consecutive first
electrodes 62 in a substantially symmetrical manner. The mover 54
can have one or more protrusions 66 extending from its body. The
return springs 56 and 58 can be coupled between the mover 54 and
their respective fixtures 68 and 70. Each of the return springs 60
can have one end coupled to a fixture 72, and another end disposed
in proximity of its corresponding protrusion 66.
[0022] Note that the numbers of the electrodes, springs,
protrusions, and fixtures illustrated in FIG. 2B are merely
examples to provide a context in which the concept of the invention
can be described. For example, although eight pairs of the first
and second electrodes 62 and 64 are illustrated in FIG. 2B, the
number thereof can be more or less than eight in some embodiments
of the invention. Likewise, although three sets of return springs
56, 58 and 60 are illustrated in the figure, there can be more or
less than three sets of return springs, and the number of the
protrusions 66 can be adjusted accordingly to accommodate the
return springs in some embodiments of the invention. Geometry of
the actuator 50 can vary without departing from the sprit of the
invention. For example, the first and second electrodes 62 and 64
can be disposed in a substantially asymmetric manner, in which some
of the electrodes are closer to each other than others. In other
examples, the lengths of the electrodes can be different. As
another example, the geometry of the mover 54, the stator 56, the
springs 56, 58 and 60, and the protrusions 66 can be in regular,
irregular, or other suitable shapes.
[0023] The biasing mechanism 63 can comprise at least one loading
element 74 and at least one position constraint 76. In some
embodiments of the invention, the loading element 74 can comprise a
biasing spring 78 coupled between the mover 54 and an engaging
member 80 adapted to be engaged with the position constraint 76.
The position constraint 76 can have one or more protrusions 82
configured to receive the engaging member 80 in one direction and
constrain its movement in another direction once they are engaged.
In the pre-biasing state, the engaging element 80 and the position
constraint 76 are disengaged. As such, the biasing spring 78 can be
in a relaxed state where it does not apply a bias to the mover
54.
[0024] FIG. 3 illustrates a schematic top view of the gap-closing
actuator 50 in a biased state in accordance with some embodiments
of the invention. In the biased state, the loading element 74 can
be engaged with the position constraint 76 by moving the engaging
element 80 from one side of the protrusions 82 to another side
thereof in a direction toward the mover 54. Each of the protrusions
82 may have an inclined surface 84 on one side, and a flat surface
86 on another side. As the engaging element 80 moves toward the
mover 54, it can move along the inclined surfaces 84 of the
protrusions 82 and forces the position constraint 76 to expand in a
transverse direction, or itself to bend inwardly. Once the engaging
element 80 moves beyond the inclined surfaces 84, it can be
constrained inside the protrusions 82 by the flat surfaces 86.
[0025] Note that the position constraint 76 utilizing the inclined
and flat surfaces 84 and 86 to engage and constrain the engaging
element 80 is merely an example of many mechanisms that can hold
the engaging element 80 in one position in the pre-biasing state,
and another in the biased state. For example, the position
constraint 76 can be configured to have an opening into which the
engaging element 80 can be press fitted. All of the mechanisms that
can achieve the above described engaging and constraining purposes
are within the scope of the invention.
[0026] In the biased state, the biasing mechanism 63 can apply a
non-capacitive bias to the mover 54 for urging the mover 54 to move
in a desired direction with respect to the stator 52, wherein the
non-capacitive bias is different from a capacitive force generated
between the first and second electrodes 62 and 64 when the
gap-closing actuator 50 is in operation. As shown in FIG. 3, the
engaged engaging element 80 can compress the biasing spring 78 of
the loading element 74 to apply a non-capacitive bias to the mover
54 in a longitudinal direction, and sustain the bias as the mover
54 moves back and forth in operation. The bias can move at least
one of the second electrodes 64 to become closer to one of two
consecutive first electrodes 62 between which the at least one of
the second electrodes 64 is disposed. As a result, a first gap G1'
between the at least one of the first electrodes 62 and one of the
two consecutive second electrodes 64 can become wider than a second
gap G2' between the first electrode 62 and the other of the two
consecutive second electrodes 64. These uneven gaps among the first
and second electrodes 62 and 64 can ensure the mover 54 to move in
a desired direction relative to the stator 52 in operation.
[0027] Note that although the bias can be generated by compressing
the biasing spring 78 as described, in some embodiments, it may
also be generated by stretching a spring.
[0028] In operation, the first and second electrodes 62 and 64 can
be electrically charged to create a capacitive force between them.
As discussed above, the biasing mechanism 63 can reconfigure the
first and second electrodes 62 and 64 to be interposed among each
other, for example, in a substantially asymmetric manner. Because
given the same amount of charge, the capacitive force between a
closer pair of the first and second electrodes 62 and 64 can be
larger than that between a pair of the first and second electrodes
62 that are further apart, the mover 54 can be ensured to move in a
desired direction relative to the stator 52 as shown by an arrow 65
in the figure. As the mover 54 moves along the direction shown by
the arrow 65, the return springs 56, 58, and 60 may deflect to
provide it with a return force that can be necessary to push the
mover 54 back to its initial position after the first and second
electrodes 62 and 64 become discharged.
[0029] Note that the biasing mechanism 63 is one of many exemplary
mechanisms that can bias the actuator 50 to ensure that the mover
54 moves in a desired direction in operation. Any mechanisms
suitable for generating such bias can be used in replacement of the
exemplary biasing mechanism 63 without deviating from the spirit of
the invention.
[0030] In fabrication, the mover 54 and the stator 52 can be formed
on a substrate, such as a semiconductor wafer. A lithographical
process can be performed to form a masking layer, such as a
photoresist layer, and a patterned oxide or nitride layer (not
shown in the figures), defining the first and second electrodes 62
and 64 on the substrate. An etching process can be performed to
etch away parts of the substrate unprotected by the masking layer.
After the first and second electrodes 62 and 64 are formed, the
masking layer can be stripped away. In a pre-biasing state, the
first and second electrodes can be evenly interposed in a
substantially symmetric manner as shown in FIG. 2B. To configure
the actuator 50 into a biased state, the mover 54 can be
non-capacitively biased to ensure that the mover 54 moves in a
desired direction with respect to the stator 58 in operation, as
shown in FIG. 3. As discussed above, the non-capacitive bias can be
a spring force generated by deforming a biasing spring. The biasing
spring can be engaged with a position constraint, thereby
maintaining the biasing spring in a deformed shape. There are many
ways the biasing spring can be engaged with the position
constraint. For example, the biasing spring can be engaged with the
position constraint by a non-capacitive force, an electric force,
acceleration, electromagnetic resonance, or a combination thereof.
In some embodiments of the invention, the non-capacitive force can
be a mechanical force applied, for example, by using a pick and
place machine to put a spring in place, and then attaching the
spring to a substrate by means of, for example, adhesives.
[0031] One advantage of the invention is that the fabrication
process of the biased gap-closing actuator can be more easily
controlled than the prior art. As discussed above, the first and
second electrodes 62 and 64 of the gap-closing actuator 50 can be
configured in a substantially symmetric manner in a pre-biasing
state during the fabrication. As such, the gap G1 between at least
one of the first electrodes 62 and one of two consecutive second
electrodes 64 between which the at least one of the first
electrodes 62 is disposed, and the gap G2 between the at least one
of the first electrodes 62 and the other of the two consecutive
second electrodes 64 can be equal or substantially equal in length.
Because the gaps G1 and G2 can provide the same or substantially
the same aspect ratio, the etch rates of the semiconductor material
in the gaps G1 and G2, respectively, can be substantially the same.
Thus, the depths of the gaps G1 and G2 can be easily and accurately
controlled during an etching process.
[0032] Another advantage of the biased gap-closing actuator 50 is
that its size can be reduced beyond limitations of lithographical
and etching processes. For example, as shown in FIG. 2B, the gaps
G1 and G2 among the first and second electrodes 62 and 64 can be
made equal to a minimal line width a lithographic process allows in
the pre-biasing state. In the biased state, the mover 54 can be
moved in a predetermined direction, such that the gap G2 can be
reduced into the narrower gap G2' as shown in FIG. 3. Because the
gap G2 can equal the minimal line width the lithographic process
allows, the gap G2' reduced from the gap G2 can be narrower than
the minimal line width of the lithographic process. As a result,
the biased gap-closing actuator 50 according to some embodiments of
the invention can be made smaller than conventional actuators whose
sizes are limited by lithographical processes.
[0033] Another advantage of the biased gap-closing actuator 50
according to some embodiments of the invention is that it may
consume less power than conventional actuators. FIG. 4
schematically illustrates an electro-mechanical system 100
representing the gap-closing actuator 50 in a biased state. The
electro-mechanical system 100 can include a first electrode 102
collectively representing the first electrodes 62 of the stator 52,
a second electrode 104 collectively representing the second
electrodes 64 of the mover 54, and a spring 106 collectively
representing the return springs 56, 58, and 60. The capacitive
force F.sub.cap between the first and second electrodes 102 and 104
can be expressed mathematically by the following equation:
F cap = AV 2 2 ( g 0 - x ) 2 ( 1 ) ##EQU00001##
[0034] Where .epsilon. denotes a capacitive coefficient, A the area
between the first and second electrodes 102 and 104, go the initial
distance between the first and second electrodes 102 and 104, and x
the distance traveled by the second electrode 104. The
non-capacitive bias can be designated by F.sub.p. The return force
F.sub.sp generated by the spring 104 can be mathematically
expressed by the following equation: F.sub.sp=kx, where k denotes
the spring constant of the spring 106. In equilibrium,
F.sub.sp=F.sub.p+F.sub.cap (2)
The non-capacitive bias F.sub.p can be a spring force, which is a
function of x, or a non-spring force, which pushes the mover 54 to
a desired position. Whether the non-capacitive bias F.sub.p is a
spring force or non-spring force, the summation of the
non-capacitive bias F.sub.p and the capacitive force F.sub.cap in
the initial state needs to exceed the return spring force F.sub.sp
to ensure that the gap-closing actuator can close properly.
[0035] Referring to FIG. 5, graph 110 can include a first curve S1
showing a gap-closing force of a conventional gap-closing actuator
under various voltages, and a second curve S2 showing a gap-closing
force of a biased gap-closing actuator according to some
embodiments of the invention under various voltages. The
gap-closing force of the conventional gap-closing actuator can
equal the capacitive force F.sub.cap between the first and second
electrodes 102 and 104, whereas the gap-closing force of the biased
gap-closing actuator can equal the capacitive force F.sub.cap
between the first and second electrodes 102 and 104 plus a bias
F.sub.p. As a result, the second curve S2 can be plotted higher
than the first curve S1 in the force-voltage diagram where the
x-axis represents the voltage and the y-axis represents the
gap-closing force. As shown in the figure, the conventional
gap-closing actuator requires voltage V1 to reach a predetermined
threshold gap-closing force FT, whereas the biased gap-closing
actuator requires voltage V2 to reach the predetermined threshold
gap-closing force FT. Due to the bias F.sub.p, voltage V2 can be
smaller than voltage V1. Thus, the biased gap-closing actuator
according to some embodiments of the invention can operate under a
smaller voltage, and therefore consume less power, than the
conventional gap-closing actuator.
[0036] Although the bias generated by the biasing mechanism 63 is a
spring force, it can be a non-spring force in some embodiments of
the invention. Referring to FIG. 6, a top view of a biased
gap-closing actuator 120 is schematically illustrated in accordance
with some embodiments of the invention. The biased gap-closing
actuator 120 can comprise a stator 122, a mover 124 capable of
moving relative to the stator 122, a number of return springs 126,
128, and 130, and a biasing mechanism 134. The stator 122 can have
a plurality of first electrodes 136 extending therefrom toward the
mover 124. The mover 124 can have a plurality of second electrodes
138 extending therefrom toward the stator 122. The biasing
mechanism 134 can comprise a fixture 140 having a protruded portion
144 with an inclined surface 146 on one side and a flat surface 148
on another side. The protruded portion 144 can be flexible or
non-flexible. From the fixture 140, a loading element 142
configured in a cantilevered shape can extend toward the protruded
portion 144. The loading element 142 can include a head portion 150
in alignment with the mover 124, and an engaging element 152
adapted to engage with the protruded portion 144.
[0037] In a pre-biasing state (not shown in the figure), the first
and second electrodes 136 and 138 can be interposed among each
other in a substantially symmetric manner, such that at least one
of the first electrodes 136 can be disposed substantially at a
middle point between two consecutive second electrodes 138. The
engaging element 152 (as shown by the broken lines) can be
disengaged with the protruded portion 144 of the fixture 140, such
that the loading element 142 can be in a relaxed state without
applying any bias to the mover 124.
[0038] In the biased state, the biasing mechanism 134 can apply a
non-capacitive bias to the mover 124 for urging the mover 124 to
move in a desired direction with respect to the stator 122. In
creating the bias, the loading element 142 can be deflected by
forcing the head portion 150 toward the mover 124. The loading
element 142 can be maintained in a deflected position by engaging
the engaging element 152 with the protruded portion 144 of the
fixture 140. As a result, the head portion 150 of the loading
element 142 can push the mover 124 in a predetermined direction,
such that the arrangement of the second electrodes 138 and the
first electrodes 136 can become substantially asymmetric, thereby
ensuring the mover 124 to move in a desired direction in operation.
Since the loading element 142 does not function as a spring in an
engaged position, the bias it applies to the mover 124 can be a
non-spring force.
[0039] Note that the biasing mechanism 134 is one of many exemplary
mechanisms that can bias the actuator 120 with a non-spring force
to ensure that the mover 124 moves in a desired direction in
operation. Any mechanisms suitable for generating such bias can be
used in replacement of the exemplary biasing mechanism 134 without
deviating from the spirit of the invention. Also note that the
biased gap-closing actuator 120 can be fabricated in a similar
manner as described above, and the gap-closing actuator 120 can
also provide similar advantages as described above.
[0040] FIG. 7 illustrates a schematic top view of a mover 200 of a
biased gap-closing actuator where the stator is omitted for
purposes of clarity in accordance with some embodiments of the
invention. One or more return springs 202 can be coupled between
the mover 200 and one or more corresponding fixtures 204. The mover
200 can have one or more protrusion portions 206 extending from the
body thereof. One or more loading elements 208 can be coupled
between their corresponding protrusion portions 206 and fixtures
204. The loading element 208 can be relaxed in a pre-biasing
state.
[0041] Referring to FIG. 8, the loading element 208 can be
thermally of chemically treated to change its shape permanently or
temporarily, such that the mover 208 can be displaced from its
original position in the pre-biasing state to a new position in the
biased state. Suitable material choices for the loading element 208
can include, for example, electroplated nickel cobalt, palladium
cobalt, and a composite structure of nickel cobalt and palladium
cobalt. In some embodiments of the invention, a leverage mechanism
can be used to amplify the deflection or deformation of the loading
element 208 induced by the thermal or chemical treatment. Such
displacement can alter an arrangement of the electrodes 210 of the
mover 200 with respect to the electrodes of the stator (not shown
in the figure). As a result, the mover 200 can be non-capacitively
biased to move in a desired direction.
[0042] Although specific embodiments and applications of the
invention have been described in this specification, there is no
intention that the invention be limited these exemplary embodiments
and applications or to the manner in which the exemplary
embodiments and applications operate or are described herein. For
example, particular exemplary test systems have been disclosed, but
it will be apparent that the inventive concepts described above can
apply equally to alternate arrangements of a test system. Moreover,
while specific exemplary processes for testing an electronic device
have been disclosed, variations in the order of the processing
steps, substitution of alternate processing steps, elimination of
some processing steps, or combinations of multiple processing steps
that do not depart from the inventive concepts are contemplated.
Accordingly, it is not intended that the invention be limited
except as by the claims set forth below.
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