U.S. patent application number 12/237798 was filed with the patent office on 2010-03-18 for wafer container with roller.
Invention is credited to Ming-Long CHIU, Kuo Chun Hung.
Application Number | 20100065468 12/237798 |
Document ID | / |
Family ID | 42006273 |
Filed Date | 2010-03-18 |
United States Patent
Application |
20100065468 |
Kind Code |
A1 |
CHIU; Ming-Long ; et
al. |
March 18, 2010 |
Wafer Container with roller
Abstract
A wafer container includes a container body, the internal of
which is disposed with a plurality of slots for supporting a
plurality of wafers and an opening is formed on one sidewall of
which for importing and exporting said plurality of wafers, and a
door with an outer surface and an inner surface, which is joined
with opening of the container body with its inner surface for
protecting the plurality of wafers within the container, the
characteristic in that: a plurality of pairs of rollers are
disposed on the inner rim of the opening of container body.
Inventors: |
CHIU; Ming-Long; (Shulin
City, TW) ; Hung; Kuo Chun; (Shulin City,
TW) |
Correspondence
Address: |
SINORICA, LLC
2275 Research Blvd., Suite 500
ROCKVILLE
MD
20850
US
|
Family ID: |
42006273 |
Appl. No.: |
12/237798 |
Filed: |
September 25, 2008 |
Current U.S.
Class: |
206/711 |
Current CPC
Class: |
H01L 21/67373 20130101;
H01L 21/67376 20130101 |
Class at
Publication: |
206/711 |
International
Class: |
B65D 85/90 20060101
B65D085/90 |
Foreign Application Data
Date |
Code |
Application Number |
Sep 12, 2008 |
TW |
097134960 |
Claims
1. A wafer container including a container body that having a
plurality of slots therein for supporting a plurality of wafers and
having an opening formed on a sidewall of said container body for
importing or exporting said plurality of wafers, and a door with an
outer surface and an inner surface, said door joining with said
opening of said container body via said inner surface for
protecting said plurality of wafers in said container body, the
characteristic in that: a plurality of pairs of rollers are
disposed on inner rim of said opening of said container body.
2. The wafer container according to claim 1, wherein said pair of
rollers are disposed on an opposite sidewall of interior of said
container body.
3. The wafer container according to claim 1, wherein said pair of
rollers are disposed in pair with corner of interior of said
container body as center.
4. The wafer container according to claim 1, wherein said roller is
composed of a roller axle and a roller body.
5. The wafer container according to claim 4, wherein said roller
axle and said roller body are integrated in manufacture.
6. The wafer container according to claim 4, wherein said roller
further includes a block portion disposed on two ends of said
roller axle.
7. The wafer container according to claim 4, wherein said roller
body is selected from the group consisting of the following:
polymer plastic material and rubber.
8. The wafer container according to claim 1, wherein at inner rim
of said opening of said container body is further disposed with a
roller support portion.
9. The wafer container according to claim 8, wherein said roller
support portion is a support groove.
10. The wafer container according to claim 9, wherein a fastening
device is further disposed in said support groove for fixedly
disposing said roller in said container body.
11. The wafer container according to claim 8, wherein said roller
support portion can be a support hole.
12. The wafer container according to claim 11, wherein a fastening
device is further disposed around said support hole for fixedly
disposing said roller in said container body.
13. A wafer container including a container body that having a
plurality of slots therein for supporting a plurality of wafers and
having an opening formed on a sidewall of said container body for
importing or exporting said plurality of wafers, and a door with an
outer surface and an inner surface, said door joining with said
opening of said container body via said inner surface for
protecting said plurality of wafers in said container body, the
characteristic in that: at least a pair of rollers are disposed on
inner rim of each adjacent sidewall at opening of said container
body.
14. A wafer container including a container body that having a
plurality of slots therein for supporting a plurality of wafers and
having an opening formed on a sidewall of said container body for
importing or exporting said plurality of wafers, and a door with an
outer surface and an inner surface, said door joining with said
opening of said container body via said inner surface for
protecting said plurality of wafers in said container body, said
outer surface of said door including an inside wall surrounding
said door, the characteristic in that a plurality of pairs of
rollers are disposed on said inside wall of said outer surface of
said door.
15. The wafer container according to claim 14, wherein said pair of
rollers are disposed on an opposite inside wall of said outer
surface of said door.
16. The wafer container according to claim 14, wherein said pair of
rollers are disposed in pair with corner of interior of said inside
wall of said door as center.
17. The wafer container according to claim 14, wherein at said
inside wall of said outer surface of said door is further disposed
with a roller support portion.
18. The wafer container according to claim 17, wherein said roller
support portion is a support groove.
19. The wafer container according to claim 18, wherein a fastening
device is further disposed in said support groove for fixedly
disposing said roller in said door.
20. The wafer container according to claim 17, wherein said roller
support portion can be a support hole.
21. The wafer container according to claim 20, wherein a fastening
device is further disposed around said support hole for fixedly
disposing said roller in said door.
22. The wafer container according to claim 17, wherein said roller
support portion further includes a roller holding portion disposed
at said inside wall of said outer surface of said door.
23. The wafer container according to claim 17, wherein said roller
holding portion is disposed on left and right opposite sides of
said support hole of said roller support portion.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present field of the invention is related to a wafer
container, and more particularly, to a wafer container with roller
disposed on the inner rim of the opening of the container body to
reduce collision and friction between the door and the container
body of the wafer container.
[0003] 2. Description of the Prior Art
[0004] The semiconductor wafers are transferred to different
stations to apply the various processes in the required equipments.
A sealed container is provided for automatic transfer to prevent
the pollution from occurring during transferring process. FIG. 1
shows the views of wafer container of the conventional prior art.
The wafer container is a front opening unified pod (FOUP) 1 which
includes a container body 10 and a door 20. The container body 10
is disposed with a plurality of slots 11 for horizontally placing a
plurality of wafers, and an opening 12 is located on a sidewall of
the container body 10 for importing and exporting. Further, the
door 20 includes an outer surface 21 and an inner surface 22, in
which the door 20 is joined with the opening 12 of the container
body 10 via inner surface 22 to protect the plurality of wafers
within the container body 10. In the front opening unified pod
(FOUP) described above, the inner surface 22 of door 20 is loaded
through the opening of container body 10 and joined with the
container body 10 to form an enclosed space for protecting wafers
within the container body 10. However, when the door 20 is loaded
onto the container body 10, there is large-area collision and
friction where door 20 and container body 10 contact each other,
and particles generate easily, which pollute the interior of
container body 10 and affect wafers within the container body
10.
SUMMARY OF THE INVENTION
[0005] In order to avoid the above-mentioned problems, one
objective of the present invention is to provide a front opening
unified pod (FOUP) with roller, on the inner rim of container body
of which are disposed with a plurality of pairs of rollers;
therefore when the door is loaded onto the container body, the
contact area between them is limited only to the area of roller,
which greatly reduces area of friction, prevents particles from
generating, and lowers the risk of pollution.
[0006] Another objective of the present invention is to provide a
front opening unified pod (FOUP) with roller, around the door of
which is disposed with a purgeable seal element and on the outer
surface and inner surface of the door of which is disposed with
latch component; therefore when the door is loaded onto the
container body via the roller, the latch component then locks the
door and the container body, and the purgeable seal element is
purged to achieve air tightness for isolating wafers within the
wafer container from exterior atmosphere.
[0007] Still another objective of the present invention is to
provide a front opening unified pod (FOUP) with roller, on inner
surface of door of which is disposed with restriction module;
therefore when the door is loaded onto the container body via the
roller, the restriction module on the inner surface of the door can
effectively fasten the wafers.
[0008] According to above objectives, the present invention
discloses a front opening unified pod (FOUP) with roller, which
includes a container body, the internal of which is disposed with a
plurality of slots for supporting a plurality of wafers and an
opening is formed on one sidewall of which for importing and
exporting said plurality of wafers, and a door with an outer
surface and an inner surface, which is joined with opening of the
container body with its inner surface for protecting the plurality
of wafers within the container, the characteristic in that: a
plurality of pairs of rollers are disposed on the inner rim of the
opening of the container body.
[0009] The present invention then discloses a front opening unified
pod (FOUP) with roller, which includes a container body formed by
four adjacent sidewalls, an opening formed on one sidewall of
which, a back wall formed on another sidewall of which opposite to
the opening, and on one opposite sidewall of the interior of
container body of which is disposed with a plurality of slots for
supporting a plurality of wafers; and a door with an outer surface
and an inner surface, which is joined with opening of the container
body with its inner surface for protecting the plurality of wafers
within the container, the characteristic in that: at least a pair
of rollers are disposed on the inner rim of each adjacent sidewall
at the opening of the container body.
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] The foregoing aspects and many of the attendant advantages
of this invention will become more readily appreciated as the same
becomes better understood by reference to the following detailed
description, when taken in conjunction with the accompanying
drawings, wherein:
[0011] FIG. 1 is a view of the front opening unified pod (FOUP) of
the prior art;
[0012] FIG. 2A is a view of the structure of a front opening
unified pod (FOUP) of the present invention;
[0013] FIG. 2B shows a view of and a magnified view of disposition
of rollers of the present invention;
[0014] FIG. 2C is a view of rollers of the present invention;
[0015] FIG. 3A and FIG. 3B are views of the door in the present
invention being loaded onto the container body;
[0016] FIG. 4A is a view of the door of a front opening unified pod
(FOUP) of the present invention;
[0017] FIG. 4B is a view of and a magnified view of disposition of
rollers of the present invention;
[0018] FIG. 5 is a view of the latch component of a front opening
unified pod (FOUP) of the present invention;
[0019] FIG. 6 is a magnified view of part of the latch component as
shown in FIG. 5 of the present invention;
[0020] FIG. 7A to FIG. 7C are magnified views of the moving bars of
the latch component of the present invention;
[0021] FIG. 8 is a view of the latch component of the present
invention in closing status;
[0022] FIG. 9 is a view of a front opening unified pod (FOUP) of
the present invention;
[0023] FIG. 10 is a view of the wafer restraint module of a front
opening unified pod (FOUP) of the present invention;
[0024] FIG. 11 is a view of the wafer restraint module of a front
opening unified pod (FOUP) of the present invention being fixed on
the door;
[0025] FIG. 12 is a view of the wafer restraint module of a front
opening unified pod (FOUP) of the present invention in the process
of restricting the wafer;
[0026] FIG. 13A is a view of the left and right wafer restraint
modules of a front opening unified pod (FOUP) of the present
invention being an integrated structure;
[0027] FIG. 13B is a view of the left and right wafer restraint
modules of a front opening unified pod (FOUP) of the present
invention being an integrated structure fixed on the door;
[0028] FIG. 14 is a view of another front opening unified pod
(FOUP) of the present invention;
[0029] FIG. 15 is a view of the wafer restraint module of another
front opening unified pod (FOUP) of the present invention;
[0030] FIG. 16A is a view of the wafer restraint module of another
front opening unified pod (FOUP) of the present invention starting
to contact the wafer;
[0031] FIG. 16B is a view of the wafer restraint module of another
front opening unified pod (FOUP) of the present invention in the
process of restricting the wafer;
[0032] FIG. 17 is a view of still another front opening unified pod
(FOUP) of the present invention;
[0033] FIG. 18 is a view of the wafer restraint module of still
another front opening unified pod (FOUP) of the present
invention;
[0034] FIG. 19A is a view of the wafer restraint module of still
another front opening unified pod (FOUP) of the present invention
not contacting the wafer; and
[0035] FIG. 19B is a view of the wafer restraint module of still
another front opening unified pod (FOUP) of the present invention
in the process of restricting the wafer.
[0036] FIG. 20 is a top view of a purgeable seal element disposed
in the inner surface of the door of the present invention; and
[0037] FIG. 21 is a cross-sectional view of front opening unified
pod (FOUP) of the present invention when its door is in closing
status.
DESCRIPTION OF THE PREFERRED EMBODIMENT
[0038] The present invention discloses a carrier for photomask
container, and more particularly, to a carrier for photomask
container with a plurality of fastening components disposed therein
for fastening photomask containers in the carrier. As detailed
process of manufacturing or processing of photomask or photomask
container applied in the present invention is achieved by applying
prior art, and thus will not be depicted in detail in the following
description. And the drawings described in the following are not
completely made according to the actual related sizes, the function
of which is only to show characteristics of the present
invention.
[0039] First, referring to FIG. 2A, which is a view of a preferred
embodiment of front opening unified pod (FOUP) of the present
invention. As shown in FIG. 2A, the front opening unified pod
(FOUP) 1 includes a container body 10 formed by four adjacent
sidewalls 101, an opening 12 formed on one sidewall of which, a
back wall 102 formed on another sidewall of which opposite to the
opening 12, and on one opposite sidewall 101 of the interior of
container body 10 of which is disposed with a plurality of slots 11
for supporting a plurality of wafers (not shown in Figure); and a
door 20 with an outer surface 21 and an inner surface 22, which is
joined with opening 12 of the container body 10 with its inner
surface 22 for protecting the plurality of wafers within the
container 10, the characteristic of front opening unified pod
(FOUP) 1 in that: a plurality of pairs of rollers 13 are disposed
on the inner rim of the opening 12 of the container body 10, or at
least a pair of rollers 13 are disposed on the inner rim of each
adjacent sidewall 101 at the opening 12 of the container body
10.
[0040] Then referring to FIG. 2B and FIG. 2C, which are views of a
kind of roller of the present invention and of the roller disposed
in the container body. First, as shown in FIG. 2C, the structure of
rollers 13 is composed of a roller axle 131 and a roller body 132,
which can also be integrated in manufacture, wherein roller body
132 is made of polymer plastic material or rubber. Then, referring
to FIG. 2B, for disposing the rollers 13 described above in the
container body 10, a plurality of pairs of roller support portions
14 are additionally disposed on the inner rim of adjacent sidewall
101 at opening 12 of container body 10 for pairs of rollers 13 to
be embedded in. The roller support portions 14 can be in the form
of a support groove or a support hole, and thus a fastening device
(not shown in Figure) can be additionally disposed around the
support groove or support hole for fixedly disposing the rollers 13
in the container body 10. And in order to correspond to the rollers
13 in shape, the shape of support opening of roller support
portions 14 is a cross-like shape. In a preferred embodiment of the
present invention, the rollers 13 are disposed on each adjacent
sidewall 101 in the interior of container body 10 in pairs with
corner 103 formed by adjacent sidewalls 101 in the interior of
container body 10 as the center, as shown in FIG. 2B. Therefore,
when the door 20 is loaded onto the container body 10, referring to
FIG. 3A and FIG. 3B, the contact area between the door 20 and the
container body 10 is limited only to the area of rollers 13; thus
the friction area is greatly reduced, the collision between door 20
and container body 10 is decreased, the particles are prevented
from generating, and the risk of pollution is lowered.
[0041] Then, referring to FIG. 4A, which is a view of another
preferred embodiment of front opening unified pod (FOUP) of the
present invention. As shown in FIG. 4A, the front opening unified
pod (FOUP) 1 includes a container body 10 formed by four adjacent
sidewalls 101, an opening 12 formed on one sidewall of which, a
back wall 102 formed on another sidewall of which opposite to the
opening 12, and on one opposite sidewall 101 of the interior of
container body 10 of which is disposed with a plurality of slots 11
for supporting a plurality of wafers (not shown in Figure); and a
door 20 with an outer surface 21 and an inner surface 22, which is
joined with opening 12 of the container body 10 with its inner
surface 22 for protecting the plurality of wafers within the
container 10, the outer surface 21 of which includes an inside wall
23 that surrounds the door 20, the characteristic of front opening
unified pod (FOUP) 1 in that: a plurality of pairs of rollers 13
are disposed on the inside walls 23 of outer surface 21 of the door
20, or at least a pair of rollers 13 are disposed on each adjacent
inside wall 23 of outer surface 21 of container body 10.
[0042] Then referring to FIG. 4B, which is a view of rollers of the
present invention disposed on the door. First, as shown in FIG. 2C,
the structure of rollers 13 is composed of a roller axle 131 and a
roller body 132, which can also be integrated in manufacture, and a
block portion 133 (as shown in FIG. 4B) can be additionally
disposed on two ends of roller axle 131 of rollers 13, wherein
roller body 132 is made of polymer plastic material or rubber.
Then, referring to FIG. 4B, for disposing the rollers 13 described
above in the container body 10, a plurality of pairs of roller
support portions 14 are additionally disposed on the adjacent
inside walls 23 of outer surface 21 of door 20 for pairs of rollers
13 to be embedded in. The roller support portions 14 can be in the
form of a support groove or a support hole 15, and thus a fastening
device (not shown in Figure) or roller holding portion 16 can be
additionally disposed around the support groove or support hole 15
for fixedly disposing the rollers 13 in the door 20, wherein the
roller holding portion 16 can be disposed on the opposite left and
right sides of support hole 15 of roller support portions 14, and a
roller axle groove 17 is further disposed on the roller holding
portion 16 for the roller axle 131 of rollers 13 to be embedded in
and be fastened by the block portion 133 to prevent the rollers 13
from escaping the roller holding portion 16. In a preferred
embodiment of the present invention, the rollers 13 are disposed on
each adjacent inside wall 23 of outer surface 21 of door 20 in
pairs with corner 103 formed by adjacent inside walls 23 of outer
surface 21 of door 20 as the center, as shown in FIG. 4B.
Therefore, when the door 20 is loaded onto the container body 10,
the contact area between the door 20 and the container body 10 is
limited only to the area of rollers 13; thus the friction area is
greatly reduced, the collision between door 20 and container body
10 is decreased, the particles are prevented from generating, and
the risk of pollution is lowered.
[0043] In addition to the above description, referring then to FIG.
2A, a purgeable seal element 70 is then disposed around the door 20
of front opening unified pod (FOUP) 1 in the present invention.
When the door 20 is loaded onto the container body 10, the gap
between door 20 and container body 10 can be filled with the
purgation of purgeable seal element 70 for achieving air tightness
in the interior of front opening unified pod 1. Moreover, at least
a latch component 60 is disposed between outer surface 21 and inner
surface 22 of door 20 of front opening unified pod 1 for joining
together the door 20 and the container body 10 when the door 20 is
loaded onto the container body 10 and for preventing the door 20
from escaping from the container body 10 during the transfer
process of front opening unified pod (FOUP) 1. In addition, at
least a restriction module (not shown in Figure) is disposed on
inner surface 22 of door 20 of front opening unified pod (FOUP) 1,
which is used to fasten wafers in the container body 10 during the
process in which the door 20 is loaded onto the container body 10
for preventing wafers in the front opening unified pod (FOUP) 1
from shifting during transfer process. Related description of the
above-mentioned latch component 60, restriction module, and seal
element 70 are disclosed in detail in the following.
[0044] Referring to FIG. 5, which is a top view of latch component
60 in door 20 of front opening unified pod (FOUP) of the present
invention. As shown in FIG. 5, a pair of latch components 60 is
located between outer surface and inner surface of door 20, wherein
each latch component 60 is composed of an oval cam 62, a pair of
moving bars 64 contacting two ends of oval cam 62, at least one
roller 66 disposed between outer surface and inner surface of door
20 and fixed in slide groove 642 of the moving bars 64, and a
locating spring 68 being an integral part of the moving bars 64.
Then referring to FIG. 6, which is a magnified view of two ends of
oval cam 62 that contact moving bars 64. As shown in FIG. 6, in a
preferred embodiment of the present invention, a locating roller
644 can be further disposed where moving bars 64 contacting two
ends of oval cam 62. When the oval cam 62 rotates, the force of
friction between moving bars 64 and oval cam 62 can be reduced.
Moreover, with the design of a plurality of locating grooves 622 on
oval cam 62, when the oval cam 62 rotates, locating rollers 644 can
slide smoothly into locating groove 622 as point of restriction for
the rotating oval cam 62. In this preferred embodiment of the
present invention, the oval cam 62 can be made of metal or polymer
plastic material, which is not limited in the present
invention.
[0045] In the following, referring to FIGS. 7A-7C, which are views
of moving bars 64 of latch component 60 of the present invention.
On one end of moving bars 64 is disposed with a locating roller
644, and on the opposite end is a physical plane surface 646.
Between the two ends a slide groove 642 is formed with roller 66
fastened in door 20 fixed in it. Moreover, the end of moving bars
64 that is near to locating rollers 644 is connected with one end
of locating spring 68, and the other end of locating spring 68 is
fixed on door 20. Therefore when door 20 is to close the opening 12
of container body 10, door 20 and container body 10 are first
joined and then oval cam 62 is rotated; when oval cam 62 rotates,
moving bars 64 are pushed by oval cam 62 toward the edge of door
20. Thus physical plane surface 646 of moving bars 64 is allowed to
go through latch hole 27 of door 20 and extends into socket hole
(not shown in Figure) located near the edge of opening of container
body 10 and corresponding with latch hole 27, and container body 10
and door 20 can thus be joined into one and the closing procedure
of container body 10 is thus completed. Meanwhile, locating spring
68 is compressed, and thus when door 20 is about to be opened, with
the rotation of oval cam 62, a force of locating spring 68
generated according to Hooke's law will also drive moving bars 64
to resume to the location in opening status. In preferred
embodiment of the present invention, moving bars 64 and locating
spring 68 can be made of metal or polymer plastic material, which
is not limited in the present invention; the material of roller 66
is not limited either in the present invention.
[0046] Moreover, as shown in FIG. 7B, in a preferred embodiment,
rollers 66 are disposed in pair in door 20 and each of the pair of
rollers is at a proper distance from the other. Therefore, when
roller 662 and roller 664 are fixed in slide groove 642 of moving
bars 64, this pair of rollers 66 can accurately and smoothly guide
plane surface 646 of moving bars 64 through latch hole 27 located
on door 20.
[0047] What is to be emphasized here is that, in the process of the
present invention described above, an oval cam 62 and moving bars
64 are used to describe the operating procedures of latch component
60, but actually each oval cam 62 is in contact with a pair of
moving bars 64, and in each door 20 is disposed with a pair of
latch component 60 (as shown in FIG. 5, in which door 20 of the
present invention is in opening status). Due to that the cam in
latch component 60 of the present invention is an oval cam 62, this
oval cam 62 forms a pair of latch holes (not shown in Figure) on
the outer surface 21 of door 20. Since oval cam 62 has a longer
radius Y and a shorter radius X, in the present invention the
difference between two different radiuses of oval cam 62 is used as
starting component for controlling the to and fro movement of
moving bars 64. For example, for moving bars 64 to move up or down
along two lateral sides of door 20 for 10 mm.about.30 mm in order
to let front end of moving bars 64 go through door 20, the length
difference between longer radius and shorter radius of oval cam 62
should be no less than 10 mm.about.30 mm. Due to that the two ends
of shorter radius of oval cam 62 are in contact with a pair of
moving bars 64 located on two ends when door 20 opens, apparently,
when door 20 closes container body 10, the moving bars 64 on two
ends can be made to contact longer radius of oval cam 62 by turning
oval cam 62. Since the different in length between longer radius
and shorter radius of oval cam 62 should be no less than 10
mm.about.30 mm, therefore when oval cam 62 turns to a locating
groove 622 located on longer radius Y, front plane surface 646 of
moving bars 64 can be made to go through latch hole 27 on door 20,
as shown in FIG. 8. What is to be emphasized here is that as moving
bars 64 are connected to one end of locating spring 68 near the end
of locating roller 644, and the other end of locating spring 68 is
fixed to door 20, therefore when oval cam 62 turns to locating
groove 622 located on longer radius Y, moving bars 64 will be
pushed by oval cam 62 toward latch hole 27 on the edge of door 20.
At this time, locating spring 68 will be compressed, and thus when
door 20 is about to be opened, with oval cam 62 turning to locating
groove 622 located on shorter radius X, a force generated according
to Hooke's law of locating spring 68 will also drive moving bars 64
to resume to the location in opening status (i.e. oval cam 62 stays
at locating groove 622 located on shorter radius X).
[0048] Then, referring to FIG. 9, which is a view of a wafer
container of the present invention. This wafer container is a front
opening unified pod (FOUP) which includes a container body 10 and a
door 20. A plurality of slots 11 are disposed in the container body
10 for sustaining a plurality of wafers, and an opening 12 is
formed on one sidewall of the container body 10 for importing and
exporting the plurality of wafers. The door 20 includes an outer
surface 21 and an inner surface 22. The outer surface 21 of door 20
is disposed with at least one latch hole (not shown in Figure) for
opening or closing the front opening unified pod (FOUP). And around
the center of inner surface 22 of door 20 is disposed with a recess
24. The recess 24 is between two platforms 25 and inside two
platforms 25 is disposed with aforementioned latch component 60. An
objective of the recess 24 is to sustain the plurality of wafers in
container body 10 for shortening the length between the front side
and the back side of the FOUP. And a wafer restraint module 30 is
disposed on each of the platform 25 respectively for restricting
the movement of wafers toward the opening of the wafer container
and controlling the number of wafers settling down the recess
24.
[0049] The length of the recess 24 of the inner surface 22 of door
20 as described above is related to the distance between slots 11
in container body 10 and the number of the wafers. The distance
between 12'' wafers has been a standard regulation in the industry
to achieve maximum capacity of loading and ensure at the same time
that there is enough space for the mechanical arm to stretch in for
importing or exporting. In general, the number of wafers to be in
the wafer container is 25 pieces. However, the width and the depth
of recess 24 of the present invention can be adjusted. When the
thickness of the door 20 is constant, the depth of recess 24 can be
adjusted to be deeper, and the width of recess 24 is also adjusted
to be wider for the whole wafer to be placed further into recess
24.
[0050] Moreover, referring to FIG. 10 and FIG. 11, which are views
of wafer restraint module of wafer container of the present
invention that is fixed to the door. The wafer restraint module 30
includes a rectangular bar base portion 31, which includes two
longer sides 31L and two shorter sides 31S. One of the two longer
sides 31L is adjacent to the recess 24 to form a plurality of curve
portions 32 with a space at interval. A semicircle-like protruding
portion 32C is formed between each curve portion 32 and its
free-end. And a guide notch 32G is disposed on semicircle-like
protruding portion 32C to contact wafers for restricting movement
of corresponding wafers toward the opening of the wafer
container.
[0051] The guide notch 32G of the semicircle-like protruding
portion 32C is used to sustain the wafer. The width of the guide
notch 32G can be equaled to the thickness of wafer so that the
wafer can sink into the guide notch 32G without moving up and down.
The surface of guide notch 32G that contacts wafer can be coated
with a wear-resisting material, such as PEEK material, to reduce
the friction for the wafer. Furthermore, the wafer restraint module
30 can be an integrated structure and can be made of one or two
different materials. For example, the base portion 31 and the curve
portion 32 are made of one material and the semicircle-like
protruding portion 32C is made of another material and formed on
the curve portion 32. Obviously, an angle, which is about 10 to 60
degrees, is formed between the rectangular bar base portion 31 and
the curve portion 32. Since the wafer restraint module 30 on two
sides of recess 24 are symmetrical, the resultant forces is formed
toward the center of the wafer when the wafer is restricted by
wafer restraint module 30 (as shown in FIG. 12) for preventing the
wafer from shaking. And the wafer restraint module 30 not only
restricts the movement of wafer toward the opening of the wafer
container, but also makes the wafer fully sink into the recess 24,
so that the length between front side and of back side can be
shortened, the center of gravity of the whole wafer container is
more focused on the center of wafer container, and the stability of
wafer container is also improved. As shown in FIG. 10, as a gap is
located between the plurality of semicircle-like protruding portion
32C on the curve portion 32, thus the curve portion 32 is more
elastic to permit deformation due to crackdown of the wafer.
[0052] Furthermore, according to FIG. 11 and FIG. 12, the base
portion 31 includes a plurality of snap holes 33, and a snap pillar
26 is disposed on the inner surface 22 that corresponds to the snap
holes 33; thus, the wafer restraint module 30 is firmly set on the
platforms 25 of the recess 24 of the inner surface 22 of the door
20 by snapping on the platforms 25. In order to facilitate the
manufacturing procedures, the wafer restraint module 30 can also be
integrated with the inner surface 22 of door 20 to prevent from
slackening of the wafer restraint module 30. Then, referring to
FIG. 13A and FIG. 13B, the wafer restraint module 30 on two sides
of recess 24 can also be an integrated structure, which includes a
central hole 34 that corresponds to the recess 24 of door 20. This
integrated structure can also be firmly set on the inner surface 22
of door 20 by snapping on or directly integrated with the inner
surface 22 of the door 20.
[0053] Secondly, referring to FIG. 14, which is a view of another
wafer container of the present invention. The wafer container is
the same as the wafer container as shown in FIG. 9 and includes a
container body 10 and a door 20. The difference lies in that the
wafer restraint module 400 fixed on two sides of the recess 24 of
the inner surface 22 of the door 20 is different from the wafer
restraint module 30. As shown in FIG. 15A and FIG. 16A, the wafer
restraint module 400 on two sides of the recess 24 is formed by a
plurality of wafer restraint components 40 with a space at
interval, and each wafer restraint component 40 is aligned with a
corresponding wafer restraint component 40 of the wafer restraint
module 400 that is located on the other side of the recess 24. Each
wafer restraint component 40 includes a base portion 41 that is
fixed on the inner surface 22 of the door 20, and one sidewall of
the base portion 41 is located adjacent to the recess 24. The
sidewall of base portion 41 described above is extended toward the
opening of the container body 10 to form a curve portion 42 and
turned to the central portion of the recess 24 to form a plurality
of bent arms 43. The plurality of bent arms 43 are disposed on two
side of the top of the recess 24, and the cross of the bent arm 43
and the curve portion 42 includes a first contact head 44, and the
free-end of the bent arm 43 includes a second contact head 45
thereon. As shown in FIG. 16A, each wafer restraint component 40 is
an elastic integrated structure (for example: thermal-elastic
plastic). When the door 20 and the container body 10 are about to
be joined, the connected line (44-45) between the first contact
head 44 and the second contact head 45 of the wafer restraint
component 40 is parallel to the inner surface 22 of the door 20.
Meanwhile, the wafer first contacts the second contact head 45 to
deform the curve portion 42 to lever the bent arm 43, so as another
contact head of the bent art 43, i.e. the first contact head 44,
will contact the wafer in sequence. Meanwhile, as shown in FIG.
16B, the door 20 is sealed with the container body 10, and an
included angle is formed between the connected line (44-45) of the
first contact head 44 and the second contact head 45 of the wafer
restraint component 40 and the inner surface 22 of the door 20.
Obviously, each wafer restraint component 40 contacts the wafer
with two contact heads for the wafer to be sustained and also be
restricted from moving toward the opening of the wafer container.
The tiny dust particles that are generated due to vibration during
transportation of wafers can thus be reduced. In addition, the
wafer can also effectively sink into the recess 24 for shortening
the size of the FOUP be possible.
[0054] The curve portion 42 of the wafer restraint component 40 is
an elastic structure (for example: thermal-elastic plastic) with a
bent angle. Thus, in the sealing procedure, when the door 20 and
the container body 10 go from the status of not closed to the
status of closed, the bent angle would be changed, and the first
contact head 44 and the second contact head 45 are made to contact
the wafer sequentially. Furthermore, the bent portion 42 and the
bent arm 43 can be made of two different materials, such as plastic
with different hardness which can generate larger deformation for
the curve portion 42 and the bent arm 43 would not easily deform.
The first contact head 44 and the second contact head 45 include a
recess respectively, so as the wafer can sink into the recess to
avoid up and down movement of the wafer. Moreover, the plurality of
wafer restraint components 40 can form a base portion, wherein the
base portion is firmly disposed on the inner surface 22 of the door
20. Certainly, the plurality of wafer restraint components 40 can
also be integrated with the inner surface 22 of the door 20 to
reduce the manufacturing cost.
[0055] Then, referring to FIG. 17, which is a view of still another
wafer container of the present invention. This front opening
unified pod (FOUP) is similar to the wafer container as shown in
FIG. 14 in that it includes a container body 10 and a door 20, yet
different in that each of the wafer restraint modules 500 located
on two sides of the recess 24 of the inner surface 22 of the door
20 includes three contact heads, as shown in FIG. 18 and FIG. 19A.
The wafer restraint modules 500 on the two sides of recess 24 are
composed of the plurality of wafer restraint components 50 in
arrangement. Each wafer restraint component 50 is aligned with the
corresponding wafer restraint component 50 on the wafer restraint
modules 500 on the other side of the recess 24, wherein each wafer
restraint component 50 includes a base portion 51. One end of the
base portion 51 is fixed on the inner surface 22 of the door 20,
and another end is connected to a first bent arm 52, the first bent
arm 52 including two free-ends. A first contact head 54 is formed
at one of the two free-ends that is located farther from the
central part of the recess 24; another free-end adjacent to the
central part of the recess 24 further contacts the second bent arm
53; and the second bent arm 53 further includes a second contact
head 55 and a third contact head 56.
[0056] The base potion 51 of the wafer restraint component 50 is an
elastic structure (for example: thermal-elastic plastic structure)
and includes a bent portion. Therefore when the door 20 is not yet
joined with or about to be joined with the container body 10, the
second bent arm 53 of the wafer restraint component 50 is
horizontally attached or slightly suspended to the surface of or
above the recess 24. Thus, the wafer is first contacted by the
first contact head 54, and during the contact, the base portion 51
is deformed, and thus the included angle of the bent is changed and
levered the first bent arm 52 and the second bent arm 53, which in
turn make the second contact head 55 and the third contact head 56
on the second bent arm 53 contact the wafer. Meanwhile, as showing
FIG. 19B, when the door 20 seals the container body 10, the second
bent arm 53 is levered by the base portion 51 and the first bent
arm 52 and driven far away from the surface of the recess 24. Thus,
the first contact head 54, the second contact head 55, and the
third contact head 56 of the wafer restraint component contact the
wafer. Obviously, each wafer restraint component 50 provides three
contact heads for supporting the wafer to more firmly restrict the
wafer from moving toward the center of the opening or two sides of
the opening of the wafer container. Certainly, in the present
embodiment, a pivot 57 can be alternatively provided between the
two free-ends of the first bent arm 52 and on one side of the inner
surface 22 of the door 20, wherein the pivot 57 is fixed on the
inner surface 22 of door 20. Thus, when the base portion 51 is
deformed or the angle of the bent is changed, the first bent arm 52
and second bent arm 53 can be more firmly levered so that the first
contact head 54, the second contact head 55, and the third contact
head 56 can attach tightly to the wafer.
[0057] And as the abovementioned two embodiments of contact head,
each of the plurality of wafer restraint components 50 can be an
elastic integrated structure (for example: thermal-elastic plastic
structure). The base portion 51 and the first bent arm 52 or second
bent arm 53 can also be made of different materials or different
elastic structure (for example, thermal-elastic structure), such as
plastic with different hardness. Thus, bent arms would not be
deformed easily due to the deformation of the base portion 51.
Alternatively, the first contact head 54, the second contact head
55, and the third contact head 56 can include a recess so as the
wafer is sunk into the recess to restrict the wafer from moving up
and down. The plurality of wafer restraint components 50 as
described above can also be formed on a base portion, and the base
portion is firmly disposed on the inner surface 22 of the door 20.
Alternatively, the plurality of wafer restraint components 50 are
integrated with the inner surface 22 of the door 20.
[0058] Furthermore, the inner surface 22 of door 20 of the present
invention can be a plane surface without recess; at least a latch
component 60 can be disposed between inner surface 22 and outer
surface 21, and a latch component 60 is disposed in one preferred
embodiment. The latch component 60 is the same as what is described
in the aforementioned embodiment so will not be described in
detail. In addition, in order for the plurality of wafers in the
container body 10 can be fixed when the door 20 closes the
container body 10, thus at least a restraint module can be disposed
on inner surface 22 of above-mentioned plane surface or near the
central area of above-mentioned plane surface. And the structure or
the form of this restraint module is not limited in the present
invention, therefore structures such as above-mentioned restraint
module 30, restraint module 400, restraint module 500, or other
similar structures can all be included in the present invention.
Similarly, the restraint module is the same as what is described in
the aforementioned embodiment so the specifics of the structure
will not be described in detail.
[0059] Obviously, when driven by oval cam 62, the latch component
60 of the present invention can only make to-and-fro movement,
moving forward and backward, and no shift will occur on the
longitudinal (vertical) direction. Therefore, the latch component
60 of the present invention is a simpler design. When door 20 and
container body of the present invention close, the plurality of
wafer restraint components 50 fixed on inner surface 22 of door 20
directly contact wafers. A pair of moving bars 64 are driven by cam
62 to move toward the edge of door 20, which makes front plane 646
of moving bars 64 go through latch hole 27 on door 20 and be
fastened in socket hole corresponding to latch hole 27 near the
edge of opening of container body 10. Then, a purging device can be
disposed for purging the purgeable seal element (not shown in
Figure) between door 20 and container body 10 to isolate interior
from exterior of container body 10.
[0060] Then, referring to FIG. 20, which is a top view of a seal
element disposed on the inner surface 22 of the door 20 of the
present invention. As shown in FIG. 20, a recess 24 is formed in
the central area of inner surface 22 of the door 20, and latch
component 60 is disposed in the platform 25 on two sides of recess
24. Moreover, a seal element 70 is disposed around the four edges
of inner surface 22 of the door 20 and surrounds the door 20. When
the door 20 is loaded onto the container body 10 via rollers 13 on
the container body 10, the inner surface 22 of door 20 is already
inside the container body 10; meantime, the gap between door 20 and
container body 10 can be filled with the purgation of purgeable
seal element 70 for achieving air tightness in the interior of
front opening unified pod 1. In a preferred embodiment of the
present invention, this seal element 70 is a purgeable sealing
ring. The principle of purging this sealing is similar to that of
purging a bicycle inner tube. Gas can be filled in through a
purgation inlet (not shown in Figure) in order to purge the
purgeable seal element 70. The condition of air tightness between
the door 20 and the container body 10 can thus be achieved, and the
wafers stored in the front opening unified pod (FOUP) can be
prevented from being affected by the humidity of atmosphere.
Obviously, the purgation inlet on the purgeable seal element 70 is
fixed on the door 20. In addition, the purgeable seal element 70 in
the present embodiment can be rubber element, and can also be
springy element formed by polymer plastic material.
[0061] What is to be emphasized here is that in latch component 60
of the present invention disclosed in FIG. 5, oval cam 62 is used
to drive the moving bars 64 to move to and fro on a single plane
surface, and therefore when the door 20 is closed with the opening
on container body 10, with the rotation of oval cam 62, the front
plane bolts 646 of moving bars 64 are made to go through latch hole
27 on door 20 and be fastened on the container body 10 to achieve
the locking effect. Obviously, although the container body 10 and
the door 20 are already locked together at the period, air
tightness between the container body 10 and the door 20 is not yet
achieved. Thus, the purgeable seal element 70 in the present
embodiment (FIG. 20) can be used to achieve air tightness.
Obviously, as the container body 10 and the door 20 are already
locked together, uniform air tightness can be formed with the
inflation pressure generated by inflating the purgeable seal
element 70. And when it is needed to open the door 20, the pressure
of purgeable seal element 70 can first be released and then the
oval cam is rotated for plane surface bolts 646 of moving bars 64
to depart from the container body 10 and the door 20.
[0062] Then referring to FIG. 21, which is a cross-sectional view
of the front opening unified pod (FOUP) of the present invention
when the door is in closing status. As shown in FIG. 21, when the
door 20 is loaded onto the container body 10 via rollers 13 on the
container body 10, the closing process of the container body 10 is
completed; meantime, the bolts 646 are driven to go through latch
hole 27 on the door 20 and are fastened on the container body 10;
and the purgeable seal element 70 on the door 20 is then purged to
achieve air tightness between the container body 10 and the door 20
with the purgation of the purgeable seal element 70.
[0063] In addition, in order to prevent the atmosphere outside the
front opening unified pod (FOUP) from rapidly entering the
container body 10 and thus causing pollution of wafers in the
process of closing the door 20, in another preferred embodiment of
the present invention, at least a purgation valve 80 is further
formed on the container body 10 for filling gas into the interior
of the container body 10. Thus, when the door 20 closes the
container body 10 and the air tightness between the container body
10 and the door 20 is achieved by the purgation of purgeable seal
element 70, an inflation device (not shown in Figure) can be used
to fill gas into the purgation valve 80 on the container body 10,
filling in nitrogen or other inert gases for example, for forming
air pressure higher than exterior atmosphere in the interior of
container body 10 (i.e. forming so-called positive pressure).
Thereafter, if the pressure of purgeable seal element 70 on the
door 20 is released in order to diminish air tightness, since the
air pressure in the container body 10 is higher than that of
external atmosphere, air in the interior of the container body 10
will leak to the exterior and the external atmosphere can be
prevented from filling into the container body 10.
[0064] Furthermore, at least an exhaust valve 81 can be further
disposed on the container body 10. When the above-mentioned
purgation device fills gas in the purgation valve 80, an exhaust
device (not shown in Figure) can be used at the same time to
discharge trace amount of gas from the exhaust valve 81 for fully
purging the whole wafer container more rapidly. And at least an
exhaust valve 81 as described above can be disposed closer to the
location of opening 12 of container body 10, and at least a
purgation valve 80 can be disposed farther from the opening 12 of
the container body 10; thus, particles inside the container body 10
can be cleanly and rapidly carried out of the container body 10
through the opening 12 or the exhaust valve 81 by the gas filled
in.
[0065] While the invention has been described by way of examples
and in terms of the preferred embodiments, it is to be understood
that the invention is not limited to the disclosed embodiments. To
the contrary, it is intended to cover various modifications and
similar arrangements as would be apparent to those skilled in the
art. Therefore, the scope of the appended claims should be accorded
the broadest interpretation so as to encompass all such
modifications and similar arrangements.
* * * * *