U.S. patent application number 12/483641 was filed with the patent office on 2010-03-04 for substrate fixture pallet and substrate processor.
This patent application is currently assigned to FUJITSU LIMITED. Invention is credited to Tadashi Inoue, Gen Minemura.
Application Number | 20100050365 12/483641 |
Document ID | / |
Family ID | 41723184 |
Filed Date | 2010-03-04 |
United States Patent
Application |
20100050365 |
Kind Code |
A1 |
Inoue; Tadashi ; et
al. |
March 4, 2010 |
SUBSTRATE FIXTURE PALLET AND SUBSTRATE PROCESSOR
Abstract
A substrate fixture pallet includes a body part configured to
receive a substrate to be processed and a lid part attached movably
to the body part so as to fix the substrate when closed relative to
the body part. The lid part is configured to form a gap between the
body part and the lid part when closed relative to the body part so
as to allow the suction air of a dust collector for suctioning
cutting powder to be generated at a time of processing the
substrate to flow through the gap when the substrate fixture pallet
is attached to the dust collector.
Inventors: |
Inoue; Tadashi; (Kawasaki,
JP) ; Minemura; Gen; (Kamiminochi, JP) |
Correspondence
Address: |
Fujitsu Patent Center;C/O CPA Global
P.O. Box 52050
Minneapolis
MN
55402
US
|
Assignee: |
FUJITSU LIMITED
Kawasaki
JP
|
Family ID: |
41723184 |
Appl. No.: |
12/483641 |
Filed: |
June 12, 2009 |
Current U.S.
Class: |
15/300.1 |
Current CPC
Class: |
H05K 2203/082 20130101;
B26D 7/01 20130101; B28D 5/0082 20130101; H05K 2201/0909 20130101;
B23Q 11/0046 20130101; H05K 3/0052 20130101; B26D 7/1863 20130101;
B28D 5/0076 20130101; H05K 2203/0228 20130101; H05K 2201/09063
20130101 |
Class at
Publication: |
15/300.1 |
International
Class: |
A47L 5/00 20060101
A47L005/00 |
Foreign Application Data
Date |
Code |
Application Number |
Aug 28, 2008 |
JP |
2008-220172 |
Claims
1. A substrate fixture pallet, comprising: a body part configured
to receive a substrate to be processed; and a lid part attached
movably to the body part so as to fix the substrate when closed
relative to the body part, the lid part being configured to form a
gap between the body part and the lid part when closed relative to
the body part so as to allow a suction air of a dust collector for
suctioning a cutting powder to be generated at a time of processing
the substrate to flow through the gap when the substrate fixture
pallet is attached to the dust collector.
2. The substrate fixture pallet as claimed in claim 1, wherein the
body part includes an air passage provided on a surface thereof on
a side opposite to the gap.
3. The substrate fixture pallet as claimed in claim 2, wherein the
body part further includes a communication path connecting the gap
and the air passage.
4. A substrate processor, comprising: a processor body configured
to process a substrate using a processing tool; an attachment table
to which a substrate fixture pallet having the substrate fixed
thereto is to be attached; a dust collector configured to suction a
cutting powder to be generated at a time of processing the
substrate; and a spacer provided on the attachment table, the
spacer being configured to form a gap between the attachment table
and the substrate fixture pallet when the substrate fixture pallet
is attached to the attachment table, the gap serving as an air
passage through which a suction air of the dust collector flows to
suction the cutting powder.
5. The substrate processor as claimed in claim 4, further
comprising: the substrate fixture pallet, the substrate fixture
pallet including: a body part configured to receive the substrate;
and a lid part attached movably to the body part so as to fix the
substrate when closed relative to the body part, the lid part being
configured to form an additional gap between the body part and the
lid part when closed relative to the body part so as to allow the
suction air of the dust collector to flow through the additional
gap.
6. The substrate processor as claimed in claim 4, wherein the
attachment table is configured to allow the substrate fixture
pallet to be attached thereto and detached therefrom.
7. The substrate processor as claimed in claim 4, wherein the
processing tool is a router bit.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The present application is based upon and claims the benefit
of priority of the prior Japanese Patent Application No.
2008-220172, filed on Aug. 28, 2008, the entire contents of which
are incorporated herein by reference.
FIELD
[0002] A certain aspect of the embodiment discussed herein is
related to a substrate fixture pallet and a substrate
processor.
BACKGROUND
[0003] Recently, there has been an increasing demand for printed
(circuit) boards provided with electronic components with high
density as electronic apparatuses become smaller in size and higher
in performance. It is often the case that printed boards have
complicated shapes corresponding to the shapes of electronic
apparatuses. For example, if electronic apparatuses are cellular
phones, various printed boards corresponding to various forms of
cellular phones are manufactured.
[0004] However, in the case of automated mounting of electronic
components, changing the specifications of a mounting machine for
each printed board shape would increase the cost of facilities.
Therefore, a substrate or panel having a predetermined rectangular
shape is prepared, and multiple printed boards shaped
correspondingly to an electronic apparatus are formed in the
substrate. Such a substrate including multiple printed boards may
be referred to as a multi-board substrate.
[0005] In this case, since the multi-board substrate has a
rectangular shape and the printed boards have a shape corresponding
to the electronic apparatus, the multi-board substrate inevitably
includes a frame-shaped unnecessary part (hereinafter referred to
as "frame-shaped unnecessary part") around the printed boards.
Therefore, the frame-shaped unnecessary part and the printed boards
are separated in mounting the printed boards on electronic
apparatuses.
[0006] The printed boards are separated from the multi-board
substrate by forming grooves at peripheral parts to be cut of the
printed boards and forming connection parts connecting the printed
boards and the frame-shaped unnecessary part at some points in the
peripheral parts. Then, after automatically mounting electronic
components on each of the printed boards formed in the
rectangularly-shaped multi-board substrate, the connection parts
are removed at the time of mounting the printed boards on
electronic apparatuses such as cellular phones. As a result, the
printed boards are separated from the frame-shaped unnecessary part
into pieces to be mounted on electronic apparatuses.
[0007] Known specific methods for removing connection parts
include: (a) breaking connection parts by manual operations; (b)
removing connection parts with a press using a mold and a jig for
cutting; and (c) cutting connection parts with a router bit.
[0008] However, in the manual breaking operation of (a), labor and
working hours due to manual operations become a great obstacle to
productivity. Productivity may be improved with the cutting method
of (b) using a press. However, this method requires preparation of
expensive molds dedicated to corresponding printed boards of
various shapes with electronic components mounted thereon, thus
causing an inevitable increase in the cost of facilities.
[0009] On the other hand, the router bit method of (c), which
enjoys high cutting-time productivity and requires low cost of
facilities, is widely used for separating printed boards and the
frame-shaped unnecessary part. (See, for example, Japanese
Laid-open Patent Publication No. 2002-178295.) In the case of
separating printed boards and the frame-shaped unnecessary part
using this router bit method, the separating operation is performed
while the multi-board substrate attached to a jig called a
substrate fixture pallet is attached to a substrate processor.
Therefore, the multi-board substrate is fixed to the substrate
fixture pallet and prevented from being displaced at the time of
cutting connection parts with a router bit. Therefore, the
separating operation may be performed with high accuracy.
[0010] At the time of separating printed boards and the
frame-shaped unnecessary part using the router bit method,
connection parts are cut with a router bit, so that cutting powder
that becomes dust is generated. As described in Japanese Laid-open
Patent Publication No. 2002-178295, this cutting powder is
suctioned through a dust collecting duct so as to prevent the
cutting powder from adhering to printed boards or the substrate
fixture pallet.
SUMMARY
[0011] According to an aspect of the invention, a substrate fixture
pallet includes a body part configured to receive a substrate to be
processed and a lid part attached movably to the body part so as to
fix the substrate when closed relative to the body part, the lid
part being configured to form a gap between the body part and the
lid part when closed relative to the body part so as to allow a
suction air of a dust collector for suctioning a cutting powder to
be generated at a time of processing the substrate to flow through
the gap when the substrate fixture pallet is attached to the dust
collector.
[0012] The object and advantages of the invention will be realized
and attained by means of the elements and combinations particularly
pointed out in the claims.
[0013] It is to be understood that both the foregoing general
description and the following detailed description are exemplary
and explanatory and not restrictive of the invention, as
claimed.
BRIEF DESCRIPTION OF THE DRAWING(S)
[0014] FIG. 1 is a diagram illustrating a substrate processor
according to an embodiment;
[0015] FIGS. 2A, 2B, and 2C are a plan view, a front view, and a
right side view, respectively, of a substrate fixture pallet
according to the embodiment;
[0016] FIG. 3 is a bottom view of the substrate fixture pallet
according to the embodiment;
[0017] FIG. 4 is an enlarged view of a dust collector and its
neighborhood in the substrate processor according to the
embodiment;
[0018] FIG. 5 is a plan view of an object to be processed by the
substrate processor according to the embodiment;
[0019] FIG. 6 is a diagram illustrating the cutting of a connection
part with a router bit according to the embodiment;
[0020] FIG. 7 is a perspective view of the substrate fixture pallet
in an open state according to the embodiment; and
[0021] FIG. 8 is an enlarged view of a dust collector and its
neighborhood in a substrate processor according to a variation of
the embodiment.
DESCRIPTION OF EMBODIMENT(S)
[0022] As described previously, the cutting powder generated by
cutting connection parts with a router bit at the time of
separating printed boards and the frame-shaped unnecessary part
using the router bit method may be suctioned through a dust
collecting duct so as to prevent the cutting powder from adhering
to printed boards or the substrate fixture pallet. Conventionally,
however, the substrate fixture pallet has a single flat bottom
surface and is provided on the placement table of the substrate
processor (over the dust collecting duct), so that there is a
problem in that the cutting power enters the space between the
bottom surface of the substrate fixture pallet and the placement
table of the substrate processor so as to adhere to the bottom
surface of the substrate fixture pallet when the cutting power is
suctioned through the dust collecting duct.
[0023] Generally, while attached to the substrate fixture pallet,
separated printed boards are conveyed to a mounting line where the
printed boards are taken out of the substrate fixture pallet and
mounted on electronic apparatuses. At this point, if cutting powder
is adhering to the bottom surface of the substrate fixture pallet,
this cutting powder may adhere to the printed boards or electronic
apparatuses. This adhesion of cutting powder to printed boards or
electronic apparatuses may cause the circuits or electronic devices
mounted on the printed boards or electronic apparatuses to
malfunction.
[0024] A preferred embodiment of the present invention will be
explained with reference to accompanying drawings.
[0025] FIG. 1 is a diagram illustrating a substrate fixture pallet
20A and a substrate processor 1 to which the substrate fixture
pallet 20A is attached according to the embodiment. FIGS. 2A, 2B,
and 2C and FIG. 3 are enlarged views of the substrate fixture
pallet 20A.
[0026] Before a description is given of the substrate processor 1
and the substrate fixture pallet 20A, a description is given of a
multi-board substrate (multi-board panel) 40, which is an object to
be attached to the substrate fixture pallet 20A and processed by
the substrate processor 1. FIG. 5 is a diagram illustrating a
configuration of the multi-board substrate 40.
[0027] Referring to FIG. 5, the multi-board substrate 40 has
multiple (three in this embodiment) printed (circuit) boards 41
formed therein. Electronic devices and the like are pre-mounted on
each printed board 41 in a separate process. The multi-board
substrate 40 has a predetermined rectangular shape in order to
enable automated mounting of these electronic devices. While the
multi-board substrate 40 thus has a rectangular shape, the printed
boards 41 have a shape corresponding to an electronic apparatus.
Therefore, the multi-board substrate 40 inevitably includes a
frame-shaped unnecessary part 44 around the printed boards 41.
[0028] Separation grooves 43 are formed around the printed boards
41 at the boundary between the printed boards 41 and the
frame-shaped unnecessary part 44. These separation grooves 43 are
not formed entirely around the periphery of the printed boards 41,
and are discontinued or separated by connection parts 42. That is,
the printed boards 41 are connected to the frame-shaped unnecessary
part 44 through the connection parts 42. These connection parts 42
have enough strength to prevent the printed boards 41 from being
detached from the frame-shaped unnecessary part 44 at the time of
mounting electronic devices on the printed boards 41.
[0029] The substrate processor 1 illustrated in FIG. 1 separates
the printed boards 41 and the frame-shaped unnecessary part 44 by
cutting and removing the connection parts 42 with a processing tool
such as a router bit 6 as illustrated in FIG. 6. The router bit 6,
which has one or more hard blades formed on the periphery of its
shaft-shaped body part, rotates at high speed to form a groove on
an object to be processed. Referring to FIG. 6, the connection part
42 may be removed by inserting this router bit 6 in the separation
groove 43 and moving the router bit 6 in the direction indicated by
arrow as illustrated.
[0030] As illustrated in FIG. 5, the connection parts 42 are formed
at multiple points on the periphery of the printed circuit boards
41. The substrate processor 1 removes each connection part 42 with
the router bit 6, thereby separating the printed boards 41 and the
frame-shaped unnecessary part 44.
[0031] Next, a description is given of the substrate processor 1.
Referring to FIG. 1, the substrate processor 1 includes a base 2, a
processor body 3, a dust collector 4A, a suction unit 10, and a
controller 12.
[0032] The processor body 3 includes a router head 5, the router
bit 6, and a router mover 7. The router head 5 has a motor (not
graphically illustrated) provided inside, and the router bit 6 is
provided at the lower end of the rotational shaft of the motor.
Therefore, the router bit 6 is rotated by the router head 5. This
motor is connected to a router controller 13, which is connected to
the controller 12.
[0033] The router mover 7 supports the router head 5 and moves the
router head 5 three-dimensionally. A drive part for moving the
router head 5 is provided inside the router mover 7. Examples of
the drive part include a motor, an air cylinder, and an
oil-hydraulic cylinder. According to this embodiment, the router
head 5 is moved using a motor.
[0034] The motor provided in the router head 5 is connected to the
controller 12 through the router controller 13. Further, the motor
provided in the router mover 7 is connected to the controller 12
through a mover controller 14. The controller 12 performs general
control of the overall operation of the substrate processor 1. Data
on the shape of the multi-board substrate 40 (including data on the
positions of the connection parts 42 and data on the positions of
the separation grooves 43) are prestored in the controller 12. The
controller 12 drives and controls the router controller 13 and the
mover controller 14 based on these shape data.
[0035] The dust collector 4A includes an attachment table 8, a dust
collecting nozzle 9, and the suction unit 10. The substrate fixture
pallet 20A described below is attached to the upper side of the
attachment table 8. This attachment table 8 is provided at the
upper end of the dust collecting nozzle 9. This dust collecting
nozzle 9 has a substantially quadrangular pyramid shape and is open
at its upper end in FIG. 1. Further, the lower end of the dust
collecting nozzle 9 is connected to a duct 11. Referring to FIG. 4,
an opening 8a is formed in the attachment table 8. The opening 8a
and the upper end of the dust collecting nozzle 9 communicate with
each other.
[0036] Referring to FIG. 1, the duct 11 extends rightward along the
base 2 to be connected to the suction unit 10. Therefore, by
driving the suction unit 10, the cutting powder generated at the
time of cutting the connection parts 42 with the router bit 6 is
suctioned and removed through the dust collecting nozzle 9.
Further, the suction unit 10 is connected to the controller 12 to
be driven and controlled by the controller 12. A description is
given below of a specific route through which the cutting powder is
removed inside the substrate fixture pallet 20A.
[0037] Next, a description is given, with reference to FIGS. 2A
through 2C, FIG. 3, and FIG. 7, of the substrate fixture pallet
20A. FIGS. 2A, 2B, and 2C are a plan view, a front view, and a
right side view, respectively, of the substrate fixture pallet 20A.
FIG. 3 is a bottom view of the substrate fixture pallet 20A. FIG. 7
is a schematic perspective view of the substrate fixture pallet 20A
in an open state.
[0038] The substrate fixture pallet 20A includes a pallet body 21
and a lid body 22. The pallet body 21 and the lid body 22 are
connected with hinges 23 so that the lid body 22 is openable and
closable relative to the pallet body 21. Further, the lid body 22
has magnets 27 provided on a side opposite to the side on which the
hinges 23 are provided. This lid body 22 is configured to cover the
entire upper surface of the multi-board substrate 40 so as to not
only fix the multi-board substrate 40 but also serve as a
protective cover for the multi-board substrate 40.
[0039] These magnets 27 are attachable through magnetic attraction
to corresponding fixation parts (not graphically illustrated)
formed of a magnetic material and provided on the pallet body 21.
This causes the lid body 22 to be fixed to the pallet body 21
through the magnetic attraction (force) of the magnets 27. Further,
the lid body 22 may be made open relative to the pallet body 21 by
urging the lid body 22 in a direction to open the lid body 22 with
a force greater than the magnetic force of the magnets 27.
[0040] FIG. 2A illustrates the substrate fixture pallet 20A in a
closed state, where the multi-board substrate 40 (indicated by a
one-dot chain line in FIG. 2A) is attached onto the pallet body 21
with the lid body 22 closed. Multiple recesses 24 and 25 are formed
in the pallet body 21 so as to correspond to the printed boards 41
formed in the multi-board substrate 40. The electronic devices
mounted on the printed boards 41 project from their surfaces, but
are accommodated in the recesses 24 and 25. This ensures the
containing of the multi-board substrate 40 inside the substrate
fixture pallet 20A.
[0041] Multiple spacer projections 28 are formed on the pallet body
21. When the lid body 22 is closed, these spacer projections 28
press the multi-board substrate 40 against the lid body 22, so that
the multi-board substrate 40 is fixed inside the substrate fixture
pallet 20A. Further, as illustrated in FIG. 4, with the lid body 22
closed, a gap (space) 29 (for example, an interval of 0.2 mm to 1.0
mm) corresponding to the height of the spacer projections 28 is
formed between the pallet body 21 and the lid body 22.
[0042] By suctioning air through this gap 29, the gap 29 forms a
passage or channel for the suctioned air. The size (vertical
dimension) of the gap 29 is determined so as to be larger in size
than the cutting powder (particles) generated at the time of
cutting the connection parts 42 with the router bit 6. This allows
the cutting powder generated on the upper side of the substrate
fixture pallet 20A to be suctioned. For convenience of graphical
representation, the multi-board substrate 40 is omitted in FIG.
4.
[0043] Further, communication holes 26 are formed through the
pallet body 21 at predetermined positions (positions inside the
recesses 25 in this embodiment) in the pallet body 21. Therefore,
the communication holes 26 are open on a bottom surface 37 of the
pallet body 21 as illustrated in FIG. 3. The communication holes 26
are provided so that the dust collection nozzle 9 communicates with
the inside of the substrate fixture pallet 20A through the
communication holes 26 when the substrate fixture pallet 20A is
attached to the attachment table 8.
[0044] Further, body grip parts 31 are provided on both sides
(right and left sides in FIG. 2A) of the pallet body 21. These body
grip parts 31 are used when the substrate fixture pallet 20A is
attached to or detached from the attachment table 8.
[0045] As described above, the lid body 22 is openable and closable
relative to the pallet body 21. Multiple router holes 30 are formed
in the lid body 22. The positions where the router holes 30 are
formed are determined so as to correspond to the positions where
the connection parts 42 of the multi-board substrate 40 are formed
when the lid body 22 is closed with the multi-board substrate 40
attached to the pallet body 21. That is, the connection parts 42 of
the multi-board substrate 40 are exposed (outside) through the
router holes 30 with the lid body 22 closed. Further, the router
holes 30 are sized so as to allow the router bit 6 of the substrate
processor 6 to be inserted and cut the connection parts 42.
[0046] Further, lid body grip parts 32 are provided on both sides
(right and left sides in FIG. 2A) of the lid body 22. These lid
body grip parts 32 are used when the lid body 22 is being opened or
closed.
[0047] Here, taking a look at the bottom surface 37 of the pallet
body 21, leg parts 36 are formed at the four corners and groove
parts 38 are formed between the leg parts 36 in the substrate
fixture pallet 20A of this embodiment as illustrated in FIG. 3. The
groove parts 38 are depressed relative to the surfaces (bottom
surfaces) of the leg parts 36. The groove parts 38 serve as
passages by which the outside of the substrate fixture pallet 20A
communicates with the dust collecting nozzle 9 when the substrate
fixture pallet 20A is attached to the attachment table 8.
(Hereinafter, these groove parts 38 are referred to as "air
passages 38.")
[0048] The air passages 38 are configured to form gaps of 0.2 mm to
1.0 mm in height (vertical dimension) relative to the surface of
the attachment table 8 when the substrate fixture pallet 20A is
attached to the attachment table 8. These gaps (intervals) are
larger than the size of the cutting powder (particles) generated at
the time of cutting the connection parts 42 with the router bit 6.
Further, the lengths or longitudinal dimensions of the air passages
38 may be set to any values as long as the leg parts 36 maintain
enough strength.
[0049] In this embodiment, each side of the substrate fixture
pallet 20A is provided with one air passage 38. Alternatively, the
air passage 38 of each side may be divided so as to have multiple
air passages 38 on each side. Further, according to this
embodiment, the air passages 38 have a cross-sectional shape that
is uniform in height relative to the upper surface of the
attachment table 8 as illustrated in FIG. 4. Alternatively, any of
the air passages 38 may have an inclined upper surface so as to
increase or decrease its passage area toward inside from outside.
By thus changing the shape of one or more of the air passages 38 in
a suitable manner, a flow of suction air (air flow caused by
suction) may be controlled or regulated as described below.
[0050] Next, a description is given of the behavior of the cutting
powder generated at the time of attaching the substrate fixture
pallet 20A configured as described above to the substrate processor
1 and removing the connection parts 42 of the multi-board substrate
40 using the router bit 6.
[0051] Referring to, for example, FIG. 1, the substrate fixture
pallet 20A having the multi-board substrate 40 attached thereto is
attached to the substrate processor 1. Then, the controller 12
activates the router head 5 through the router controller 13 to
cause the router bit 6 to rotate, while driving the router mover 7
through the mover controller 14 to start cutting the connection
parts 42 of the multi-board substrate 40 with the router bit 6. The
controller 12 also activates the suction unit 10 to start
suctioning cutting powder from the dust collecting nozzle 9 through
the duct 11.
[0052] For example, the substrate processor 1 removes the
connection parts as follows. First, the controller 12 selects or
determines one of the connection parts 42 to be removed based on
the prestored shape data of the multi-board substrate 40. Next, the
controller 12 reads the position data of the connection part 42 to
be removed, and drives the router mover 7 to move the router bit 6
to a position above the connection part 42 to be removed.
[0053] Next, the controller 12 drives the router mover 7 to insert
the router bit 6 into one of the separation grooves 43 adjacent to
the connection part 42 to be removed through the corresponding
router hole 30 formed in the substrate fixture pallet 20A. FIG. 6
is an enlarged view illustrating the router bit 6 thus inserted
into the adjacent (corresponding) separation groove 43.
[0054] Next, the controller 12 controls the router mover 7 so as to
move the router bit 6 in the direction indicated by arrow in FIG.
6. As a result, the connection part 42 (to be removed) formed in
the multi-board substrate 40 is cut by the router bit 6. The
controller 12 controls the driving of the router mover 7 so as to
perform this cutting operation on each connection part 42.
[0055] By removing all of the connection parts 42, the multiple
(three in this embodiment) printed boards 41 are separated from the
frame-shaped unnecessary part 44. However, with the lid body 22
closed, the printed boards 41 and the frame-shaped unnecessary part
44 remain fixed and are prevented from moving inside the substrate
fixture pallet 20A.
[0056] At the time of cutting the connection parts 42 with the
router bit 6 as described above, cutting powder that becomes dust
is generated. This cutting powder is carried by the suction air
generated by the driving of the suction unit 10 so as to be
suctioned from the dust collecting nozzle 9 to the suction unit 10
through the duct 11 to be discharged from a discharge unit (not
graphically illustrated).
[0057] Here, a description is given, with reference to FIG. 4, of a
flow of the suction air caused in the substrate fixture pallet 20A
in the case of using the substrate fixture pallet 20A.
[0058] In the substrate fixture pallet 20A of this embodiment, the
spacer projections 28 are provided so that the gap 29 is formed
between the pallet body 21 and the lid body 22 when the substrate
fixture pallet 20A is in a closed state as described above. The
height (vertical dimension) of this gap 29, or the interval or
distance between the pallet body 21 and the lid body 22, is
determined to be larger than the shape (size) of the cutting powder
(particles) generated at the time of cutting the connection parts
42.
[0059] Further, the gap 29 is connected to the outside air on its
outer side and is connected to the dust collecting nozzle 9 through
the communication holes 26 formed in the pallet body 21 and the
opening 8a formed in the attachment table 8 on its inner side.
Therefore, the suction air generated by the driving of the suction
unit 10 serves as an influx route into the dust collecting nozzle 9
through the gap 29, the communication holes 26, and the opening 8a.
(This flow of suction air is indicated by broken arrows in FIG. 4.)
The communication holes 26 may also serve as a communication path
connecting the gap 29 and the air passages 38.
[0060] Therefore, even if cutting powder enters the space between
the pallet body 21 and the lid body 22 during the cutting of the
connection parts 42 with the router bit 6, it is ensured that this
cutting powder is discharged to the dust collecting nozzle 9 with
the suction air flowing through the gap 29.
[0061] On the other hand, the air passages 38 are formed on the
bottom surface 37 side of the pallet body 21 in the substrate
fixture pallet 20A of this embodiment. The height (vertical
dimension) of the air passages 38, or the depth of the air passages
38 relative to the bottom surfaces of the leg parts 36, is
determined to be larger than the shape (size) of the cutting powder
(particles) generated at the time of cutting the connection parts
42.
[0062] The air passages 38 are connected to the outside air on
their outer sides and are connected to the dust collecting nozzle 9
through the opening 8a formed in the attachment table 8 on their
inner sides. Accordingly, the suction air generated by the driving
of the suction unit 10 serves as an influx route into the dust
collecting nozzle 9 through the air passages 38 and the opening 8a.
(This flow of suction air is indicated by solid arrows in FIG.
4.)
[0063] Therefore, even if cutting powder enters the space on the
bottom surface 37 of the pallet body 21 (specifically, the space
between the pallet body 21 and the attachment table 8) during the
cutting of the connection parts 42 with the router bit 6, it is
ensured that this cutting powder is discharged to the dust
collecting nozzle 9 with the suction air flowing through the air
passages 38.
[0064] By forming a passage of suction air using the substrate
fixture pallet 20A of this embodiment as described above, the
cutting powder generated during the cutting of the connection parts
42 with the router bit 6 is prevented from remaining in or on the
substrate fixture pallet 20A.
[0065] Accordingly, when the substrate fixture pallet 20A is
carried in to a mounting line where the printed boards 41 are
mounted on electronic apparatuses after the cutting of the
connection parts 42, and the printed boards 41 are taken out of the
substrate fixture pallet 20A, no cutting powder adheres to the
printed boards 41 or electronic apparatuses because no cutting
powder is adhering to the substrate fixture pallet 20A. This
increases the reliability of printed boards and electronic
apparatuses.
[0066] FIG. 8 illustrates a variation according to this embodiment.
FIG. 8 is an enlarged view of part of a dust collector 4B and its
neighborhood in a substrate processor. In FIG. 8, the same elements
as those illustrated in FIG. 1 through FIG. 7 are referred to by
the same reference numerals, and a description thereof is omitted
where appropriate.
[0067] In the embodiment described above with reference to FIGS. 2A
through 4, the air passages 38 are provided by forming grooves in
the pallet body 21 of the substrate fixture pallet 20A, thereby
causing suction air to flow on the bottom surface 37 side of the
pallet body 21 as well so as to prevent cutting powder from
adhering to the bottom surface 37 of the pallet body 21.
[0068] On the other hand, according to this variation, passage
spacers 45 are provided on the upper surface of the attachment
table 8. Further, unlike in the substrate fixture pallet 20A
illustrated in FIGS. 2A through 4, no grooves forming the air
passages 38 are formed in a substrate fixture pallet 20B employed
in this variation.
[0069] At the time of attaching the substrate fixture pallet 20B to
the attachment table 8, the substrate fixture pallet 20B is
attached on top of the passage spacers 45 provided on the
attachment table 8. That is, when the substrate fixture pallet 20B
is attached to the attachment table 8, the substrate fixture pallet
20B is placed on the passage spacers 45.
[0070] Therefore, the (upper) surface of the attachment table 8 and
the bottom surface of the substrate fixture pallet 20B (the bottom
surface 37 of the pallet body 21) are spaced apart from each other,
so that the space between the surface of the attachment table 8 and
the bottom surface of the substrate fixture pallet 20B serves as an
air passage 48 where suction air flows. The height (vertical
dimension) of this air passage 48, or the distance or interval
between the surface of the attachment table 8 and the bottom
surface of the substrate fixture pallet 20B, is determined to be
larger than the shape (size) of the cutting powder (particles)
generated at the time of cutting the connection parts 42 as in the
case of the above-described air passages 38.
[0071] Further, the air passage 48 is connected to the outside air
on its outer side and is connected to the dust collecting nozzle 9
through the opening 8a formed in the attachment table 8 on its
inner side. Therefore, the suction air generated by the driving of
the suction unit 10 serves as an influx route into the dust
collecting nozzle 9 through the air passage 48 and the opening 8a.
(This flow of suction air is indicated by solid arrows in FIG.
8.)
[0072] Therefore, even if cutting powder enters the space on the
bottom surface 37 of the pallet body 21 (specifically, the space
between the pallet body 21 and the attachment table 8) during the
cutting of the connection parts 42 with the router bit 6, it is
ensured that this cutting powder is discharged to the dust
collecting nozzle 9 with the suction air flowing through the air
passage 48.
[0073] Thus, also by providing the passage spacers 45 on the
attachment table 8, the cutting powder generated during the cutting
of the connection parts 42 with the router bit 6 is prevented from
remaining in or on the substrate fixture pallet 20B.
[0074] Thus, according to one aspect of the present invention,
cutting powder is prevented from adhering to a substrate fixture
pallet at the time of dividing a substrate or workpiece.
[0075] All examples and conditional language recited herein are
intended for pedagogical purposes to aid the reader in
understanding the invention and the concepts contributed by the
inventor to furthering the art, and are to be construed as being
without limitation to such specifically recited examples and
conditions, nor does the organization of such examples in the
specification relate to a showing of the superiority or inferiority
of the invention. Although the embodiment of the present inventions
has been described in detail, it should be understood that various
changes, substitutions, and alterations could be made hereto
without departing from the spirit and scope of the invention.
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