U.S. patent application number 12/270880 was filed with the patent office on 2009-08-06 for gas filling apparatus and gas filling port thereof.
Invention is credited to Yu-Ming Chen, Yung-Shun Pan.
Application Number | 20090194197 12/270880 |
Document ID | / |
Family ID | 40930493 |
Filed Date | 2009-08-06 |
United States Patent
Application |
20090194197 |
Kind Code |
A1 |
Pan; Yung-Shun ; et
al. |
August 6, 2009 |
GAS FILLING APPARATUS AND GAS FILLING PORT THEREOF
Abstract
A gas filling apparatus for connecting a gas feeding device to
introduce a gas into a storage apparatus for storing a
semiconductor element or a reticle comprises a base and at least
one gas filling port, in which the gas filling port comprises a
foundation, an elastic element and a fixing element for fixing the
elastic element.
Inventors: |
Pan; Yung-Shun; (Shulin
City, TW) ; Chen; Yu-Ming; (Shulin City, TW) |
Correspondence
Address: |
SINORICA, LLC
2275 Research Blvd., Suite 500
ROCKVILLE
MD
20850
US
|
Family ID: |
40930493 |
Appl. No.: |
12/270880 |
Filed: |
November 14, 2008 |
Current U.S.
Class: |
141/346 ;
141/368; 141/383; 141/392 |
Current CPC
Class: |
H01L 21/67393
20130101 |
Class at
Publication: |
141/346 ;
141/368; 141/383; 141/392 |
International
Class: |
B65B 3/04 20060101
B65B003/04 |
Foreign Application Data
Date |
Code |
Application Number |
Jan 31, 2008 |
TW |
097202085 |
Claims
1. A gas filling apparatus for being connected with a gas filling
device so as to introduce a gas into a storage apparatus for
storing a semiconductor element or a reticle, wherein the storage
apparatus comprises at least one gas entrance and the gas filling
apparatus comprises: at least one base for receiving the storage
apparatus; and at least one gas filling port, which is settled on
the base and positionally corresponding to the gas inlet port of
the storage apparatus, and comprises: a foundation, having a
through hole for allowing the gas to pass through; an elastic
element, deposited on the foundation and positionally corresponding
to a contacting portion of the gas inlet port for airtight; and a
fixing element, settled on the foundation for fixing the elastic
element.
2. The gas filling apparatus of claim 1, wherein the foundation of
the gas filling port further comprises a fixing element that is
combined with the base by at least one fastening element.
3. The gas filling apparatus of claim 2, wherein the fixing element
has a fastening head and the gas filling port further comprises an
elastic device settled between the fastening head of the fixing
element and the foundation so as to allow the gas filling port to
be elastically adjusted with respect to the base.
4. The gas filling apparatus of claim 1, wherein a contacting
portion on the elastic element of the gas filling port for
contacting the gas entrance of the storage apparatus is formed as
an arched surface.
5. The gas filling apparatus of claim 1, wherein a contacting
portion on the elastic element of the gas filling port for
contacting the gas inlet port of the storage apparatus is formed as
a plane surface.
6. The gas filling apparatus of claim 1, wherein the fixing element
of the gas filling port engages with the foundation by a hooking
means.
7. The gas filling apparatus of claim 1, wherein the fixing element
of the gas filling port engages with the foundation by a screwing
means.
8. The gas filling apparatus of claim 1, wherein the foundation of
the gas filling port further comprises an adjuster for adjusting an
gap between the base and the foundation.
9. The gas filling apparatus of claim 8, wherein the adjuster is
formed with at least one hole for combining the foundation and the
base.
10. The gas filling apparatus of claim 8, wherein the adjuster is
formed with at least one hole for reducing a weight of the
adjuster.
11. A gas filling port, settled on a base of a gas filling
apparatus, wherein the gas filling apparatus serves to introduce a
gas into a storage apparatus that is placed on the base and is for
storing a semiconductor element or a reticle, in which the storage
apparatus has at least one gas entrance, and comprising: a
foundation, having a through hole for allowing the gas to pass
through; an elastic element, deposited on the foundation and
positionally corresponding to a contacting portion of the gas
entrance for airtight; and a fixing element, settled on the
foundation for fixing the elastic element.
12. The gas filling port of claim 11, wherein the foundation of the
gas filling port further comprises a fastening portion that is
combined with the base by at least one fixing element.
13. The gas filling port of claim 12, wherein the fixing element
has a fastening head and the gas filling port further comprises an
elastic device settled between the fastening head of the fastening
element and the foundation so as to allow the gas filling port to
be elastically adjusted with respect to the base.
14. The gas filling port of claim 11, wherein a contacting portion
on the elastic element for contacting the gas entrance of the
storage apparatus is formed as an arched surface.
15. The gas filling port of claim 11, wherein a contacting portion
on the elastic element for contacting the gas inlet port of the
storage apparatus is formed as a plane surface.
16. The gas filling port of claim 11, wherein the fixing element
engages with the foundation by a hooking means.
17. The gas filling port of claim 11, wherein the fixing element
engages with the foundation by a screwing means.
18. The gas filling port of claim 11, wherein the foundation
further comprises an adjuster.
19. The gas filling port of claim 18, wherein the adjuster is
formed with at least one hole for combining the foundation and the
base.
20. The gas filling port of claim 18, wherein the adjuster is
formed with at least one hole for reducing a weight of the
adjuster.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Technical Field
[0002] The present invention relates to a gas filling apparatus and
a gas filling port thereof. More particularly, the present
invention relates to a gas filling apparatus serves to fill the gas
into a storage apparatus for storing a semiconductor element or a
reticle and a gas filling port of the gas filling apparatus.
[0003] 2. Description of Related Art
[0004] As for the rapidly developing semiconductor technology in
modern times, optical lithography plays an important role and
wherever pattern definition is conducted, optical lithography is
requisite. The application of optical lithography in associate with
semiconductors is to use a designed circuit pattern to produce a
light-transparent reticle having a predetermined shape. Basing on
the principle of exposure, after a light beam passes through the
reticle to project on a silicon wafer, the circuit pattern formed
on the reticle can be exposed onto the silicon wafer. Since any
dust (such as particles, powders or an organic matter) can
adversely affect the quality of such projected pattern, the reticle
used to produce the pattern and the silicon wafers or other
semiconductor elements to be projected with the pattern thereon,
are required with absolute cleanness. Thus, clean rooms are
typically employed in general wafer processes for preventing
particles in the air from defiling reticles and wafers. However,
absolute dustless environment is inaccessible even in the existing
clean rooms.
[0005] Hence, the storage apparatuses that facilitate protecting
semiconductor elements or reticles from defilement are implemented
in current semiconductor processes for the purpose of storage and
transportation so as to ensure cleanness of the semiconductor
elements and reticles. When accommodated in such storage
apparatuses for being transferred and conveyed between stations
during semiconductor processes, the semiconductor elements and
reticles can be isolated from the atmosphere so as to be secured
from defilement caused by impurities that induces deterioration.
Further, in advanced semiconductor factories, the cleanliness of
the storage apparatuses is required to meet the Standard Mechanical
Interface (SMIF), namely superior to Class 1. One solution for
achieving the required cleanliness is to fill gas into the storage
apparatuses. In the existing technology, an external gas filling
apparatus is connected with the storage apparatus so as to allow
gas to be filled into the storage apparatus through the gas filling
apparatus.
[0006] In all conventional methods or means used for the
aforementioned gas-filling purpose, an airtight element, typically
an "o-ring seal", is required at the gas filling port, where a gas
is filled into the storage apparatus. Such element can be learned
from U.S. Pat. Nos. 5,879,458, 6,042,651, 6,221,163, and 6,368,411.
In those prior art devices, the o-ring seal is directly and
unfixedly inlaid into the gas filling port to prevent the gas to be
filled from leaking out. However, conventional gas filling port
configured so is subject to the life limit of the o-ring seal. In
other words, once the o-ring seal becomes incompetent due to
attrition, the overall efficiency of the gas filling port declines,
or worse, the entire gas filling port becomes invalid, resulting in
increased costs. Though such o-ring seal may be the selection for
achieving airtight combination between the gas filling port and the
storage apparatus due to its flexibility when it is simply inlaid
at the gas filling port without any fixing means as in the prior
art devices, it can be improperly consumed, thereby causing
unnecessary costs.
[0007] Seeing that, the present invention provides a gas filling
apparatus to improve the current technology.
SUMMARY OF THE INVENTION
[0008] For solve the above-mentioned technical problem, the present
invention provides a gas filling apparatus, which is composed of a
base and a gas filling port. Therein, the gas filling port includes
a foundation, an elastic element and a fixing element. The
foundation is formed with a through hole for allowing a gas to pass
through. The elastic element is deposited on the foundation for
airtight purpose. The fixing element is settled on the foundation
for fixing the elastic element.
[0009] Therefore, the main objective of the present invention is to
provide a gas filling port that having a replaceable elastic
element so that an incompetent old elastic element can be replaced
independently without rendering the entire gas filling port
discarded, thereby saving cost.
[0010] Another objective of the present invention is to provide a
gas filling port that having a fixing element for fixing an elastic
element on the gas filling port so as to enhance the utility
convenience of the gas filling port.
[0011] Still another objective of the present invention is to
provide a gas filling port with an elastic element that having an
arched contacting portion so as to further close contacting
surfaces of the gas filling port and a gas feeding device, thereby
the risk of gas leakage is reduced.
[0012] Yet another objective of the present invention is to provide
a gas filling port with an elastic element that having a plane
contacting portion so as to further close contacting surfaces of
the gas filling port and a gas feeding device, thereby the risk of
gas leakage is reduced.
BRIEF DESCRIPTION OF THE DRAWINGS
[0013] The invention as well as a preferred mode of use, further
objectives and advantages thereof, will best be understood by
reference to the following detailed description of an illustrative
embodiment when read in conjunction with the accompanying drawings,
wherein:
[0014] FIG. 1 is a sectional view of a gas filling apparatus of the
present invention;
[0015] FIGS. 2A and 2B are views of showing different embodiment of
an elastic element of the present invention;
[0016] FIGS. 3A through 3F illustrate alternative arrangements of a
fixing element of the present invention;
[0017] FIGS. 4A and 4B depict a fastening portion of a foundation
of the present invention; and
[0018] FIG. 5A through FIG. 5C represent an adjuster of the present
invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
[0019] While the present invention discloses a gas filling
apparatus having a gas filling port, it is to be stated first of
all that the detailed manufacturing or processing procedures
relating to the mentioned reticles, semiconductor elements, storage
apparatuses and gas filling apparatuses relay on known technology
and need not be discussed at length herein. Meantime, while the
accompanying drawings are provided for purpose of illustration, it
is to be understood that the components and structures therein need
not to be made in scale.
[0020] The disclosed gas filling apparatus of the present invention
is to be connected with a gas feeding device (not shown in the
drawings) for introducing a gas into a storage apparatus for
storing a semiconductor element or a reticle. The storage apparatus
comprises at least one gas entrance whereby the gas can enter the
storage apparatus.
[0021] Please refer to FIG. 1 shows the gas filling apparatus of
the present invention. The gas filling apparatus includes at least
one base 1 and at least one gas filling port 2, in which the base 1
is provided for receiving a storage apparatus 5 while the gas
filling port 2 is for being connected with a gas inlet port 51 of
the storage apparatus 5 for filling a gas into the storage
apparatus 5. Therein, the gas filling port 2, being where the
technical feature of the present invention relies upon, is settled
on the base 1 and positionally corresponding to the gas inlet port
51 of the storage apparatus 5. The gas filling port 2 comprises a
foundation 21, an elastic element 22 and a fixing element 23. The
foundation 21 is formed with a through hole 24 that allowed the gas
to pass through. The elastic element 22 is designed to be in
contact with the gas entrance 51 of the storage apparatus 5 for
maintaining an airtight state so that when the gas is introduced
into the storage apparatus 5 through the gas filling port 2, the
elastic element 22 is capable of preventing the gas from leaking
out. The fixing element 23 serves to fix the elastic element 22 in
position. Meantime, since the elastic element 22 is not inlaid in
the foundation 21, the elastic element 22 can be easily removed by
disassembling the fixing element 23 and then be replaced with a
spare elastic element 22, so as to achieve the convenient usage.
Besides, a flange 27 may be formed on the foundation 21 for further
fixing the elastic element 22 in position. In this embodiment, the
semiconductor element such as FOUP (Front Opening Unified Pod),
FOSB (Front Opening Shipping Pod) or any kind of wafer pod.
[0022] Now referring to FIGS. 2A and 2B, the elastic element 22 is
typically an o-ring seal, which is a circular element. A contacting
portion 221 of the elastic element 22 is used for contacting the
gas entrance 51 of the storage apparatus 5 that may be formed as an
arched surface (as shown in FIG. 2A) or a plane surface (as shown
in FIG. 2B), in which the plane surface provides a relatively broad
contacting area and therefore contributes to superior airtight
efficiency.
[0023] Please see FIGS. 3A through 3F show the alternative
arrangements of the fixing element 23. The fixing element 23 is
settled on the foundation 21 by any available means for fixing the
elastic element 22, such as hooking means or screwing means. In
FIG. 3A, the fixing element 23 fixes the elastic element 22 that
having the arched contacting portion on the foundation 21 by
hooking means. In FIG. 3B, the fixing element 23 fixes the elastic
element 22 that having the plane contacting portion on the
foundation 21 by hooking means. FIG. 3C shows the fixing element 23
and the foundation 21 that to be combined by hooking means are now
disassembled. In FIG. 3D, the fixing element 23 fixes the elastic
element 22 with the arched contacting portion on the foundation 21
by screwing means. FIG. 3E shows the fixing element 23 fixing the
elastic element 22 with the plane portion on the foundation 21 by
screwing means. FIG. 3F shows the fixing element 23 and the
foundation 21 that is combined by screwing means are now
disassembled. Various arrangements of the fixing element 23 may be
implemented as needed.
[0024] Then, in FIG. 4A, to position the gas filling port 2 on the
base 1, the foundation 21 of the gas filling portmay be further
equipped with a fastening portion 25 so that fastening element 251
formed on the fastening portion 25 can engage the foundation 21
with the base 1. Therein, each said fastening element 251 may
further have a fastening head 252, as shown in FIG. 4B, and an
elastic device 253 may be additionally settled on the gas filling
port 2 wrapped around the fastening head 252 of the fastening
element 251 and the foundation 21 for allowing the gas filling port
2 to be adjusted with respect to the base 1 so that when the base 1
or the storage apparatus 5 is slanted or oblique, the gas filling
port 2 can be posed accordingly so as to prevent the gas
leakage.
[0025] For better achieving the objectives of the present
invention, an adjuster 26 may be additionally provided for allowing
adaptability of an interval between the base 1 and the foundation
21, as shown in FIGS. 5A and 5B. Furthermore, at least one aperture
261 may be formed on the adjuster 26 for combining the adjuster 26
with the foundation 21 or the base 1. Furthermore, at least one
aperture 261 may be formed on the adjuster 26 for reducing a weight
of the adjuster 26 as shown in FIG. 5C.
[0026] Although the particular embodiments of the invention have
been described in detail for purposes of illustration, it will be
understood by one of ordinary skill in the art that numerous
variations will be possible to the disclosed embodiments without
going outside the scope of the invention as disclosed in the
claims.
* * * * *