U.S. patent application number 12/106274 was filed with the patent office on 2009-05-21 for storage apparatus for storing semiconductor element or reticle.
Invention is credited to Chin-Ming Lin.
Application Number | 20090127160 12/106274 |
Document ID | / |
Family ID | 40640798 |
Filed Date | 2009-05-21 |
United States Patent
Application |
20090127160 |
Kind Code |
A1 |
Lin; Chin-Ming |
May 21, 2009 |
STORAGE APPARATUS FOR STORING SEMICONDUCTOR ELEMENT OR RETICLE
Abstract
The present invention provides a storage apparatus for storing a
semiconductor element or a reticle. The storage apparatus comprises
a first cover, a second cover and a flange. The first cover has a
top and a plurality of laterals around the top. The second cover is
for being assembled with the first cover to form an inner space for
accommodating the reticle. As to the flange, it is provided on the
first cover for being mechanically held and placed. The
characteristic of the disclosed storage apparatus is that the
flange and the first cover are integrally formed.
Inventors: |
Lin; Chin-Ming; (Shulin
City, TW) |
Correspondence
Address: |
SINORICA, LLC
528 FALLSGROVE DRIVE
ROCKVILLE
MD
20850
US
|
Family ID: |
40640798 |
Appl. No.: |
12/106274 |
Filed: |
April 19, 2008 |
Current U.S.
Class: |
206/710 |
Current CPC
Class: |
H01L 21/67379 20130101;
H01L 21/67359 20130101; H01L 21/67386 20130101; H01L 21/67353
20130101 |
Class at
Publication: |
206/710 |
International
Class: |
B65D 85/00 20060101
B65D085/00 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 15, 2007 |
TW |
096219271 |
Claims
1. A storage apparatus for storing a semiconductor element or a
reticle, comprising: a first cover, having a top and a plurality of
laterals around the top; a second cover for being assembled with
the first cover to form an inner space for accommodating the
semiconductor element or the reticle; and at least one flange,
provided on the first cover for being held and placed by a machine;
wherein the flange and the first cover are integrally formed as a
whole.
2. The storage apparatus of claim 1, wherein the flange projects
from the lateral of the first cover.
3. The storage apparatus of claim 1, wherein the flange projects
from the top of the first cover.
4. The storage apparatus of claim 1, wherein the flange further
comprises a flange support that is connected to the first
cover.
5. The storage apparatus of claim 4, wherein the flange support is
perpendicular to the top of the first cover.
6. The storage apparatus of claim 4, wherein an included angle
between the flange support and the top of the first cover is
greater or less than 90 degrees.
7. The storage apparatus of claim 4, wherein the flange support is
perpendicular to the lateral of the first cover.
8. The storage apparatus of claim 4, wherein an included angle
between the flange support and the lateral of the first cover is
greater or less than 90 degrees.
9. The storage apparatus of claim 1, wherein a handle is provided
on the first cover.
10. The storage apparatus of claim 9, wherein the handle is
integrally formed with the first cover.
11. The storage apparatus of claim 1, wherein a board is provided
on the first cover.
12. The storage apparatus of claim 11, wherein the board is
integrally formed with the first cover.
13. The storage apparatus of claim 11, wherein the board is for
being tagged with a label.
14. The storage apparatus of claim 1, further comprising an
alarm.
15. The storage apparatus of claim 1, further comprising a
sensor.
16. The storage apparatus of claim 1, further comprising an
identifying device.
17. The storage apparatus of claim 16, wherein the identifying
device is a Radio Frequency Identification (RFID) device.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Technical Field
[0002] The present invention relates to storage apparatuses for
storing semiconductor elements or reticles and, more particularly,
to a storage apparatus having a flange integrally formed with a
first cover thereof for storing a semiconductor element or a
reticle.
[0003] 2. Description of Related Art
[0004] In the rapidly developing semiconductor technology, optical
lithography plays an important role and wherever pattern definition
is conducted, optical lithography is requisite. As to the
application of optical lithography relating to semiconductors, a
designed circuit pattern is used to produce a light-transparent
reticle. Basing on the principle of exposure, after a light passes
through the reticle to be projected on a silicon wafer, the circuit
pattern formed on the reticle can be exposed onto the silicon
wafer. Since any dust (such as particles, powders or an organic
matter) can adversely affect the quality of such projected pattern,
the reticle used to produce the pattern on the silicon wafers is
required with absolute cleanness. Thus, clean rooms are typically
employed in general wafer processes for preventing particles in the
air from defiling reticles and wafers. However, absolute dustless
environment is inaccessible even in known clean rooms.
[0005] Hence, reticle storage apparatuses that facilitate
preventing defilement are implemented in current semiconductor
processes for the purpose of storage and transportation of reticles
so as to ensure cleanness of the reticles. When such reticle
storage apparatuses accommodate reticles for semiconductor
processes, the reticles can be isolated from the atmosphere when
being transferred and conveyed between stations, so as to be
defended from defilement caused by impurities that induces
deterioration. Similarly, when semiconductor element storage
apparatuses accommodate semiconductor elements in semiconductor
processes, the semiconductor elements can be isolated from the
atmosphere when being transferred and conveyed between stations, so
as to be secured from defilement caused by impurities that induces
deterioration. Therefore, it is preferable to store reticles or
semiconductor elements in storage apparatuses so as to ensure the
cleanness and prevent contamination.
[0006] However, conventional storage apparatuses for storing
semiconductor elements or reticles typically have complex
structures. For example, a conventional storage apparatus is always
composed of two covers and, for safe mechanical transportation, a
flange alone or in company with a flange support has to be provided
at a top of one of the covers for being help by a robot for
transportation purpose. Further, a handle is also required for
manual displacement. Besides, a board is needed for receiving a
label tagged thereon while other structures may be necessary to
accommodate other components.
[0007] Such flange, flange support, handle, board and other
components on the storage apparatus for storing semiconductor
elements or reticles can significantly increase the weight of the
storage apparatus and consume increased assembling time. Besides,
connectors are indispensable in the conventional storage apparatus
for connecting the aforementioned components. Even with the most
exquisite assembly, it is difficult to perpetually maintain
tightness of the connectors. Consequently, when the connectors
loosen, the connected components risk departing from each other. At
a minimum then, the boards may fall off or lose identifying
functions thereof; in a worst case situation, the flange, flange
support or the handle may come off during the transportation of the
storage apparatus for storing semiconductor elements or reticles,
resulting in enhanced possibility of damage to the semiconductor
elements or reticles.
[0008] Therefore, the present invention provides a storage
apparatus having a flange integrally formed with a first cover
thereof for storing a semiconductor element or a reticle to improve
the current technology.
SUMMARY OF THE INVENTION
[0009] To remedy the problem of the prior arts, the present
invention provides a storage apparatus for storing a semiconductor
element or a reticle that is constructed from a first cover, a
second cover and a flange. The first cover has a top and a
plurality of laterals around the top. The second cover is to be
assembled with the first cover to form an inner space for
accommodating the reticle. The flange is on the first cover for
being mechanically held and placed. The disclosed subject matter is
characterized by that the flange is integrally formed with the
first cover as a whole.
[0010] Thereupon, it is one objective of the present invention to
provide a storage apparatus having a flange integrally formed with
a first cover thereof for storing a semiconductor element or a
reticle that is easy to be assembled so as to reduce consumption of
assembling time.
[0011] It is another objective of the present invention to provide
a storage apparatus having a flange integrally formed with a first
cover thereof for storing a semiconductor element or a reticle that
requires no connectors so as to reduce risks of damaged to
components due to wear of the connectors.
[0012] It is another objective of the present invention to provide
a storage apparatus having a flange integrally formed with a first
cover thereof for storing a semiconductor element or a reticle that
requires no connectors so as to reduce assembling time thereof.
[0013] It is another objective of the present invention to provide
a storage apparatus having a flange integrally formed with a first
cover thereof for storing a semiconductor element or a reticle that
requires no connectors so as to reduce overall weight f the storage
apparatus.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] The invention as well as a preferred mode of use, further
objectives and advantages thereof, will best be understood by
reference to the following detailed description of an illustrative
embodiment when read in conjunction with the accompanying drawings,
wherein:
[0015] FIG. 1 is a perspective view of a storage apparatus for
storing a semiconductor element or a reticle according to one
embodiment of the present invention;
[0016] FIGS. 2A and 2B provide alternative embodiments of the
storage apparatus for storing a semiconductor element or a reticle
according to the present invention;
[0017] FIGS. 3A to 3K provide alternative embodiments of the
storage apparatus for storing a semiconductor element or a reticle
according to the present invention, wherein different
configurations of the flanges, flange supports and the top of the
first cover are illustrated;
[0018] FIGS. 4A to 4F provide alternative embodiments of the
storage apparatus for storing a semiconductor element or a reticle
according to the present invention, wherein different
configurations of the flanges, flange supports and the lateral of
the first cover are illustrated;
[0019] FIG. 5 is a perspective view of a storage apparatus for
storing a semiconductor element or a reticle of the present
invention including a handle 41;
[0020] FIGS. 6A and 6B are perspective views of the disclosed
storage apparatus for storing a semiconductor element or a reticle
including a board 42; and
[0021] FIGS. 7A to 7C are perspective views of the disclosed
storage apparatus for storing a semiconductor element or a reticle
including an alarm, a sensor or an identifying device.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
[0022] While the present invention discloses a storage apparatus
having a flange integrally formed with a first cover thereof for
storing a semiconductor element or a reticle, it is to be stated
first of all that the detailed manufacturing or processing
procedures of the disclosed reticle storage apparatuses or
semiconductor element storage apparatus relay on known technology
and need not be discussed at length herein. Meantime, while the
accompanying drawings are provided for purpose of illustration, it
is to be understood that the components and structures therein need
not to be made in scale.
[0023] Please refer to FIG. 1 for a perspective view of a storage
apparatus for storing a semiconductor element or a reticle
according to one embodiment of the present invention. The disclosed
storage apparatus comprises a first cover 1, a second cover 2 and a
flange 3. The first cover 1 has a top 11 and a plurality of
laterals 12 around the top 11. The second cover 2 is for being
assembled with the first cover 1 to form an inner space for
accommodating the semiconductor element or the reticle. The flange
3 is provided on the first cover 1 and may be embodied as one or
more than one flange. When the disclosed storage apparatus for
storing the semiconductor element or the reticle is to be
transported, a robot can be directly placed below the flange 3 to
raise the flange 3 and in turn raise the disclosed storage
apparatus so as to deliver, transport or place the disclosed
storage apparatus. The disclosed subject is characterized by that
the flange 3 is integrally formed with the first cover 1 as a
whole. Therein, the flange 3 may project from one of the laterals
12, as shown in FIG. 2A. Alternatively, the flange 3 may project
from the top 11 of the first cover 1, as shown in FIG. 2B.
[0024] Now please refer to FIGS. 3A to 3K. In the disclosed storage
apparatus for storing the semiconductor element or the reticle, a
flange support 31 may be additionally disposed on flange 3 for
connecting the first cover 1 and supporting the flange 3 so as to
contribute to enhanced support strength when the disclosed storage
apparatus is held by the robot. Diverse configurations of the
flange support 31 may be implemented in the present invention, as
shown in FIGS. 3A through 3K. The flange support 31 may be
perpendicular to the top 11 of the first cover 1, or the flange
support 31 may be provided on the top 11 of the first cover 1 and
include an angle with the top 11 of the first cover 1 that is
greater or less than 90 degrees. Various modifications of the
configurations of the flange support 31 may be adopted as
needed.
[0025] Further, please refer to FIGS. 4A to 4F for alternative
embodiments of the storage apparatus of the present invention.
Therein, the flange support 31 is provided aside the lateral 12 of
the first cover 1. An included angle between the flange support 31
and the lateral 12 of the first cover 1 may be equal to greater
than or less than to 90 degrees, as shown in FIGS. 4A to 4F.
Various modifications of the configurations of the flange support
31 may be adopted as needed.
[0026] Now please refer to FIG. 5. A handle 41 may be further
provided on the first cover 1 of the disclosed storage apparatus
for facilitating manually handling and moving the disclosed storage
apparatus. The handle 41 may be formed separately and then mounted
on the first cover 1 or formed integrally with the first cover 1 as
a whole.
[0027] Moreover, according to FIGS. 6A and 6B, a board 42 may be
further provided on the first cover 1 of the disclosed storage
apparatus. The board 42 may be additionally mounted on the first
cover 1 or formed integrally with the first cover 1 as a whole. The
board 42 is provided for receiving a label 43 tagged thereon so as
to label the disclosed storage apparatus itself or contents
therein.
[0028] In addition, in FIGS. 7A to 7C, the disclosed storage
apparatus may further comprises an alarm 44 so that when the
disclosed storage apparatus encounters a predefined danger, the
alarm 44 can give an alert. The alarm may additionally comprises a
sensor 45 for directing sensing related information. Or, an
identifying device 46 is equipped on the disclosed storage
apparatus to provide an identification function. The identifying
device 46 may be a Radio Frequency Identification (RFID)
device.
[0029] Although the particular embodiments of the invention has
been described in detail for purposes of illustration, it will be
understood by one of ordinary skill in the art that numerous
variations will be possible to the disclosed embodiments without
going outside the scope of the invention as disclosed in the
claims.
* * * * *