U.S. patent application number 12/195558 was filed with the patent office on 2009-03-26 for method and apparatus for generating a carbon nanotube.
Invention is credited to Suk-Won Jang, Chung-Heon Jeong, Byung-Yun Kong.
Application Number | 20090081113 12/195558 |
Document ID | / |
Family ID | 40446737 |
Filed Date | 2009-03-26 |
United States Patent
Application |
20090081113 |
Kind Code |
A1 |
Jang; Suk-Won ; et
al. |
March 26, 2009 |
METHOD AND APPARATUS FOR GENERATING A CARBON NANOTUBE
Abstract
In an apparatus and method of generating a carbon nanotube
(CNT), a process chamber is heated to a target temperature and a
catalyst powder is supplied into the heated process chamber. The
catalyst powder moves in a first direction in the process chamber.
A source gas is supplied into the process chamber in a second
direction opposite to the first direction, so that the source gas
delays the movement of the catalyst powder in the first direction
and is reacted with the catalyst powder in the process chamber to
thereby produce the CNT in the process chamber. Accordingly, the
flow of the source gas against the flow of the catalyst powder
reduces the drop velocity of the catalyst powder. Therefore, the
source gas and the catalyst powder may be reacted with each other
for a sufficiently long time.
Inventors: |
Jang; Suk-Won; (Seoul,
KR) ; Kong; Byung-Yun; (Gyeonggi-do, KR) ;
Jeong; Chung-Heon; (Gyeonggi-do, KR) |
Correspondence
Address: |
DALY, CROWLEY, MOFFORD & DURKEE, LLP
SUITE 301A, 354A TURNPIKE STREET
CANTON
MA
02021-2714
US
|
Family ID: |
40446737 |
Appl. No.: |
12/195558 |
Filed: |
August 21, 2008 |
Current U.S.
Class: |
423/447.1 ;
422/139; 977/742 |
Current CPC
Class: |
B82Y 40/00 20130101;
B01J 2219/0892 20130101; C01B 32/162 20170801; B01J 19/088
20130101; B01J 2219/0871 20130101; B01J 2219/0875 20130101; B01J
2219/0898 20130101; B82Y 30/00 20130101; B01J 2219/0869
20130101 |
Class at
Publication: |
423/447.1 ;
422/139; 977/742 |
International
Class: |
D01F 9/12 20060101
D01F009/12; B01J 8/18 20060101 B01J008/18 |
Foreign Application Data
Date |
Code |
Application Number |
Aug 21, 2007 |
KR |
10-2007-0083758 |
Claims
1. A method of generating a carbon nanotube (CNT), comprising:
heating a process chamber; supplying a catalyst powder into the
heated process chamber, the catalyst powder moving in a first
direction in the process chamber; and supplying a source gas into
the process chamber in a second direction opposite to the first
direction, so that the source gas delays the movement of the
catalyst powder in the first direction and is reacted with the
catalyst powder in the process chamber to thereby produce the CNT
in the process chamber.
2. The method of claim 1, wherein the first direction is directed
to a lower portion of the process chamber from an upper portion
thereof and the second direction is directed to the upper portion
of the process chamber from the lower portion thereof.
3. The method of claim 2, wherein the source gas is supplied into
the process chamber in the second direction through a plurality of
dispersion holes of a dispersion plate, the dispersion plate being
disposed at the lower portion of the process chamber.
4. The method of claim 3, wherein the source gas is dispersed
through the dispersion plate in the second direction from a portion
of the lower portion of the process chamber to the whole portion of
the upper portion of the process chamber.
5. The method of claim 3, further comprising heating the source gas
before supplying the source gas into the process chamber.
6. The method of claim 1, further comprising recovering the CNT
from the process chamber.
7. An apparatus of generating a CNT, comprising: a process chamber;
a catalyst supplier that supplies a catalyst powder into the
process chamber in a first direction, the catalyst powder moving in
a first direction in the process chamber; and a source gas supplier
that supplies a source gas into the process chamber in a second
direction opposite to the first direction, so that the source gas
delays the movement of the catalyst powder in the first direction
and is reacted with the catalyst powder in the process chamber to
thereby produce the CNT in the process chamber.
8. The apparatus of claim 7, wherein the first direction is
directed to a lower portion of the process chamber from an upper
portion thereof and the second direction is directed to the upper
portion of the process chamber from the lower portion thereof.
9. The apparatus of claim 7, wherein the catalyst supplier includes
at least one spray nozzle that is positioned at a sidewall of the
process chamber and is directed to an upper portion of the process
chamber, so that the catalyst powder is supplied to the upper
portion of the process chamber through the spray nozzle and moves
down in the first direction in the process chamber.
10. The apparatus of claim 7, wherein the catalyst supplier
includes a dispersion net that is positioned at an upper portion of
the process chamber and has a mesh structure, so that the catalyst
powder is dispersively supplied to the upper portion of the process
chamber through the dispersion net and moves down in the first
direction in the process chamber.
11. The apparatus of claim 10, wherein the size of the dispersion
net is substantially smaller than that of the process chamber.
12. The apparatus of claim 7, wherein the source gas supplier
includes: a gas reservoir in which the source gas is stored; a
supply pipe that is connected with both of the gas reservoir and
the process chamber; and a control valve that is arranged at the
supply pipe and controls an amount of the source gas supplied into
the process chamber through the supply pipe.
13. The apparatus of claim 12, wherein the source gas supplier
further includes a dispersion plate that is positioned at a lower
portion of the process chamber and has a plurality of spray holes,
so that the source gas is dispersively supplied into the process
chamber through the spray holes and moves upward in the second
direction in the process chamber.
14. The apparatus of claim 13, wherein an upper portion of the
dispersion plate includes a curved surface.
15. The apparatus of claim 13, wherein the size of the dispersion
plate is substantially smaller than that of the process
chamber.
16. The apparatus of claim 15, wherein the dispersion plate is
positioned at a central portion of the process chamber spaced apart
from a sidewall of the process chamber by a distance.
17. The apparatus of claim 12, wherein the source gas supplier
further includes a source heater by which the source gas is heated
before supplying into the process chamber.
18. The apparatus of claim 17, wherein the source heater includes a
heating coil enclosing at least one of the gas reservoir and the
supply pipe.
19. The apparatus of claim 17, wherein the source heater includes a
plasma heater interposed between the gas reservoir and the control
valve.
20. The apparatus of claim 12, wherein the gas reservoir includes:
a reaction gas reservoir in which a reaction gas is stored, the
reaction gas being reacted with the catalyst powder in the process
chamber to thereby generate the CNT in the process chamber; and a
carrier gas reservoir in which a carrier gas is stored, the carrier
gas carrying the reaction gas into the process chamber.
21. The apparatus of claim 7, further comprising a collector
connected to the process chamber, so that the CNT is collected into
the collector from the process chamber.
22. The apparatus of claim 21, wherein the source gas supplier
further includes a dispersion plate that is positioned at a lower
portion of the process chamber and dispersively supplies the source
gas into the process chamber and the collector is arranged under
the process chamber in such a configuration that the CNT is
collected through a gap space between the dispersion plate and a
sidewall of the process chamber.
23. The apparatus of claim 7, further comprising a gas exhauster
arranged over the process chamber and having a cylindrical shape,
so that the source gas is exhausted out of the process chamber
through the gas exhauster by a cyclone process.
24. The apparatus of claim 7, further comprising a chamber heater
enclosing the process chamber, so that the interior of the process
chamber is heated to a temperature at which the source and the
catalyst powder are reacted with each other.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application claims priority under 35 U.S.C. .sctn. 119
to Korean Patent Application No. 2007-83758, filed on Aug. 21, 2007
in the Korean Intellectual Property Office (KIPO), the contents of
which are herein incorporated by reference in their entirety.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention relates to a method and an apparatus
of generating a carbon nanotube (CNT). More particularly, the
present invention relates to a method and an apparatus of
generating a CNT by use of a catalyst powder.
[0004] 2. Description of the Related Art
[0005] Carbon nanotubes (CNTs) are allotropes of carbon with a
nanostructure in which carbon atoms are combined with one another
in a hexagonal structure, similar to a beehive, into a cylindrical
tube of which the diameter is in the order of a few nanometers.
Since the CNTs have excellent mechanical properties, superior
field-emission characteristics and electrical selectivity, and
highly efficient hydrogen storage properties, the CNTs are widely
employed in many technical fields such as aeronautical and space
engineering, biological engineering, environmental energy,
materials industry, medicine, computers and security and safety,
etc.
[0006] In general, conventional CNTs are generated by one of an
electric discharge process, a plasma chemical vapor deposition
(CVD) process, a thermal CVD process and a thermal decomposition
process. Particularly, the thermal CVD process and the thermal
decomposition process have been most widely used to generate the
CNTs.
[0007] FIG. 1 is a cross-sectional view illustrating a schematic
structure of an apparatus for generating conventional CNTs.
[0008] Referring to FIG. 1, the conventional CNTs are generated by
a thermal CVD process or a thermal decomposition process in the
apparatus including a cylindrical process chamber 1 of which the
central axis is arranged in a horizontal direction and a heater 3
enclosing the process chamber 1. The process chamber 1 is heated to
a temperature of about 600.degree. C. to about 1,100.degree. C. by
the heater 3.
[0009] Source gases are supplied into a first end portion of the
process chamber 1 and are discharged out of the process chamber 1
from a second end portion of the process chamber 1 opposite to the
first end portion. A substrate (not shown) is loaded into the
process chamber 1 and the process chamber 1 is heated to a high
temperature. The source gases are supplied into the
high-temperature process chamber 1, and the CNTs are generated on
the substrate in the process chamber 1.
[0010] However, the process chamber 1 is partially enclosed by the
heater in the conventional apparatus, because the heat generated
from the heater 3 may have undesired effects on other elements of
the apparatus around the process chamber 1 when the whole surface
of the process chamber 1 is enclosed by the heater 3. For that
reason, the substrate is positioned only in a portion of the
process chamber that is sufficiently enclosed by the heater 3,
which reduces the space efficiency of the process chamber 1.
Further, the reduction of the space efficiency of the process
chamber 1 may prevent larger apparatuses from being used.
[0011] In addition, the process chamber 1 is directly heated by the
heater 3, and thus the life span of the process chamber 1 may be
significantly shortened.
SUMMARY OF THE INVENTION
[0012] The present invention provides a method of generating a
carbon nanotube (CNT) from source gases using a catalyst
powder.
[0013] The present invention also provides an apparatus for
generating a CNT by the above-mentioned method.
[0014] According to some example embodiments of the present
invention, there is provided a method of generating a CNT. A
process chamber may be heated, and a catalyst powder may be
supplied into the heated process chamber. The catalyst powder may
move in a first direction in the process chamber. A source gas may
be supplied into the process chamber in a second direction opposite
to the first direction, so that the source gas may delay the
movement of the catalyst powder in the first direction and be
reacted with the catalyst powder in the process chamber to thereby
produce the CNT in the process chamber.
[0015] In an example embodiment, the first direction is directed to
a lower portion of the process chamber from an upper portion
thereof, and the second direction is directed to the upper portion
of the process chamber from the lower portion thereof.
[0016] In an example embodiment, the source gas is supplied into
the process chamber in the second direction through a plurality of
dispersion holes of a dispersion plate, the dispersion plate is
disposed at the lower portion of the process chamber.
[0017] In an example embodiment, the source gas is dispersed
through the dispersion plate in the second direction from a portion
of the lower portion of the process chamber to the whole portion of
the upper portion of the process chamber.
[0018] In an example embodiment, the source gas may be further
heated in advance before supplying the source gas into the process
chamber.
[0019] In an example embodiment, the CNT may be collected from the
process chamber.
[0020] According to other example embodiments of the present
invention, there is provided an apparatus of generating a CNT
including a process chamber, a catalyst supplier that supplies a
catalyst powder into the process chamber in a first direction and a
source gas supplier that supplies a source gas into the process
chamber in a second direction opposite to the first direction. The
catalyst powder may move in a first direction in the process
chamber. The source gas may delay the movement of the catalyst
powder in the first direction and be reacted with the catalyst
powder in the process chamber to thereby produce the CNT in the
process chamber.
[0021] In an example embodiment, the first direction is directed to
a lower portion of the process chamber from an upper portion
thereof and the second direction is directed to the upper portion
of the process chamber from the lower portion thereof.
[0022] In an example embodiment, the catalyst supplier includes at
least one spray nozzle that is positioned at a sidewall of the
process chamber and is directed to an upper portion of the process
chamber, so that the catalyst powder is supplied to the upper
portion of the process chamber through the spray nozzle and moves
down in the first direction in the process chamber.
[0023] In an example embodiment, the catalyst supplier includes a
dispersion net that is positioned at an upper portion of the
process chamber and has a mesh structure, so that the catalyst
powder is dispersively supplied to the upper portion of the process
chamber through the dispersion net and moves down in the first
direction in the process chamber.
[0024] In an example embodiment, the size of the dispersion net is
substantially smaller than that of the process chamber.
[0025] In an example embodiment, the source gas supplier includes a
gas reservoir in which the source gas is stored, a supply pipe that
is connected with both of the gas reservoir and the process chamber
and a control valve that is arranged at the supply pipe and
controls an amount of the source gas supplied into the process
chamber through the supply pipe.
[0026] In an example embodiment, the source gas supplier further
includes a dispersion plate that is positioned at a lower portion
of the process chamber and has a plurality of spray holes, so that
the source gas is dispersively supplied into the process chamber
through the spray holes and moves upward in the second direction in
the process chamber.
[0027] In an example embodiment, an upper portion of the dispersion
plate includes a curved surface. The size of the dispersion plate
is substantially smaller than that of the process chamber.
[0028] In an example embodiment, the dispersion plate is positioned
at a central portion of the process chamber spaced apart from a
sidewall of the process chamber by a distance.
[0029] In an example embodiment, the source gas supplier further
includes a source heater by which the source gas is heated before
supplying into the process chamber. The source heater includes a
heating coil enclosing at least one of the gas reservoir and the
supply pipe. The source heater includes a plasma heater interposed
between the gas reservoir and the control valve.
[0030] In an example embodiment, the gas reservoir includes a
reaction gas reservoir in which a reaction gas is stored and a
carrier gas reservoir in which a carrier gas is stored. The
reaction gas may be reacted with the catalyst powder in the process
chamber to thereby generate the CNT in the process chamber; and the
carrier gas may carry the reaction gas into the process
chamber.
[0031] In an example embodiment, the apparatus may further include
a collector connected to the process chamber, so that the CNT is
collected into the collector from the process chamber.
[0032] In an example embodiment, the source gas supplier further
includes a dispersion plate that is positioned at a lower portion
of the process chamber and dispersively supplies the source gas
into the process chamber and the collector is arranged under the
process chamber in such a configuration that the CNT is collected
through a gap space between the dispersion plate and a sidewall of
the process chamber.
[0033] In an example embodiment, the apparatus may further include
a gas exhauster arranged over the process chamber and having a
cylindrical shape, so that the source gas is exhausted out of the
process chamber through the gas exhauster by a cyclone process.
[0034] In an example embodiment, the apparatus may further include
a chamber heater enclosing the process chamber, so that the
interior of the process chamber is heated to a temperature at which
the source and the catalyst powder are reacted with each other.
[0035] According to the present invention, a source gas may be
supplied into a process chamber in a second direction opposite to a
first direction along which a catalyst powder may be supplied into
the process chamber, to thereby reduce the drop velocity of the
catalyst powder. Therefore, the source gas and the catalyst powder
may be reacted with each other for a sufficiently long time, to
thereby improve the reaction rate of the source gas and the
catalyst powder. In addition, control of the flow rate of the
source gas allows control of the drop velocity reduction of the
catalyst powder, and thus the source gas and the catalyst powder
may be reacted with each other for a sufficiently long time. As a
result, CNTs may be efficiently generated in a relatively narrow
space. In addition, the CNTs may be collected immediately when the
CNTs are generated in the process chamber while the catalyst powder
falls down in the process chamber, to thereby improve the yield and
purity of the CNTs.
BRIEF DESCRIPTION OF THE DRAWINGS
[0036] The above and other features and advantages of the present
invention will become readily apparent by reference to the
following detailed description when considered in conjunction with
the accompanying drawings wherein:
[0037] FIG. 1 is a cross-sectional view illustrating a schematic
structure of an apparatus for generating conventional carbon
nanotubes (CNTs);
[0038] FIG. 2 is a cross-sectional view schematically illustrating
an apparatus for generating a CNT in accordance with example
embodiments of the present invention;
[0039] FIG. 3 is a plan view illustrating the apparatus for
generating the CNT shown in FIG. 2;
[0040] FIG. 4 is a view illustrating a schematic structure of a
source reservoir in the source gas supplier shown in FIG. 2;
[0041] FIGS. 5 and 6 are views illustrating a schematic structure
of the source gas supplier shown in FIG. 2;
[0042] FIG. 7 is a view illustrating a schematic structure of a gas
exhauster shown in FIG. 2;
[0043] FIG. 8 is a cross-sectional view schematically illustrating
an apparatus for generating a CNT in accordance with another
example embodiment of the present invention; and
[0044] FIG. 9 is a flowchart showing a method of generating a CNT
in accordance with an example embodiment of the present
invention.
DESCRIPTION OF THE EMBODIMENTS
[0045] The present invention is described more fully hereinafter
with reference to the accompanying drawings, in which example
embodiments of the present invention are shown. The present
invention may, however, be embodied in many different forms and
should not be construed as limited to the example embodiments set
forth herein. Rather, these example embodiments are provided so
that this disclosure will be thorough and complete, and will fully
convey the scope of the present invention to those skilled in the
art. In the drawings, the sizes and relative sizes of layers and
regions may be exaggerated for clarity.
[0046] It will be understood that when an element or layer is
referred to as being "on" or "connected to" another element or
layer, it can be directly on, connected or coupled to the other
element or layer or intervening elements or layers may be present.
In contrast, when an element is referred to as being "directly on"
or "directly connected to" another element or layer, there are no
intervening elements or layers present. Like numbers refer to like
elements throughout. As used herein, the term "and/or" includes any
and all combinations of one or more of the associated listed
items.
[0047] It will be understood that, although the terms first,
second, third etc. may be used herein to describe various elements,
components, regions, layers and/or sections, these elements,
components, regions, layers and/or sections should not be limited
by these terms. These terms are only used to distinguish one
element, component, region, layer or section from another region,
layer or section. Thus, a first element, component, region, layer
or section discussed below could be termed a second element,
component, region, layer or section without departing from the
teachings of the present invention.
[0048] Spatially relative terms, such as "beneath," "below,"
"lower," "above," "upper" and the like, may be used herein for ease
of description to describe one element or feature's relationship to
another element(s) or feature(s) as illustrated in the figures. It
will be understood that the spatially relative terms are intended
to encompass different orientations of the device in use or
operation in addition to the orientation depicted in the figures.
For example, if the device in the figures is turned over, elements
described as "below" or "beneath" other elements or features would
then be oriented "above" the other elements or features. Thus, the
exemplary term "below" can encompass both an orientation of above
and below. The device may be otherwise oriented (rotated 90 degrees
or at other orientations) and the spatially relative descriptors
used herein interpreted accordingly.
[0049] The terminology used herein is for the purpose of describing
particular embodiments only and is not intended to be limiting of
the present invention. As used herein, the singular forms "a," "an"
and "the" are intended to include the plural forms as well, unless
the context clearly indicates otherwise. It will be further
understood that the terms "comprises" and/or "comprising," when
used in this specification, specify the presence of stated
features, integers, steps, operations, elements, and/or components,
but do not preclude the presence or addition of one or more other
features, integers, steps, operations, elements, components, and/or
groups thereof.
[0050] Example embodiments of the present invention are described
herein with reference to cross-section illustrations that are
schematic illustrations of idealized embodiments (and intermediate
structures) of the present invention. As such, variations from the
shapes of the illustrations as a result, for example, of
manufacturing techniques and/or tolerances, are to be expected.
Thus, example embodiments of the present invention should not be
construed as limited to the particular shapes of regions
illustrated herein but are to include deviations in shapes that
result, for example, from manufacturing. For example, an implanted
region illustrated as a rectangle will, typically, have rounded or
curved features and/or a gradient of implant concentration at its
edges rather than a binary change from implanted to non-implanted
region. Likewise, a buried region formed by implantation may result
in some implantation in the region between the buried region and
the surface through which the implantation takes place. Thus, the
regions illustrated in the figures are schematic in nature and
their shapes are not intended to illustrate the actual shape of a
region of a device and are not intended to limit the scope of the
present invention.
[0051] Unless otherwise defined, all terms (including technical and
scientific terms) used herein have the same meaning as commonly
understood by one of ordinary skill in the art to which this
invention belongs. It will be further understood that terms, such
as those defined in commonly used dictionaries, should be
interpreted as having a meaning that is consistent with their
meaning in the context of the relevant art and will not be
interpreted in an idealized or overly formal sense unless expressly
so defined herein.
[0052] FIG. 2 is a cross-sectional view schematically illustrating
an apparatus for generating a carbon nanotube (CNT) in accordance
with example embodiments of the present invention, and FIG. 3 is a
plan view illustrating the apparatus for generating the CNT shown
in FIG. 2.
[0053] Referring to FIG. 2, the apparatus for generating a CNT may
include a process chamber 200, a catalyst supplier 300, a source
gas supplier 500 and a collector 600.
[0054] The process chamber 200 may provide a space for generating
the CNT. Particularly, the CNT in the present example embodiment
may be generated in the space of the process chamber 200 using heat
provided by an external heat source. For example, the process
chamber 200 may be heated to an internal temperature of about
500.degree. C. to about 1,100.degree. C., so that the process
chamber 200 may comprise heat-resistant materials sufficiently
resistant to the internal temperature. Examples of the
heat-resistant material may include quartz, graphite and a mixture
thereof.
[0055] In example embodiments of the present invention, the process
chamber 200 may include a cylindrical tube vertically standing with
respect to the ground. That is, a central axis of the cylindrical
process chamber 200 may be perpendicular to the ground, so that the
space for reaction of source gases and a catalyst powder, which are
to be described in detail hereinafter, may be sufficiently provided
in the process chamber 200.
[0056] The catalyst supplier 300 may supply a catalyst into the
process chamber 200. For example, the catalyst may include a
transition metal such as iron or cobalt and the catalyst may be
supplied as a powder type (hereinafter referred to as catalyst
powder). That is, the catalyst may include a transition metal
powder. The powder type catalyst may increase the reaction rate of
the source gases as compared with a liquefied catalyst.
[0057] In an example embodiment, the catalyst supplier 300 may
include a catalyst reservoir 310 in which the catalyst is stored, a
catalyst supply pipe 320 interposed between the catalyst reservoir
310 and the process chamber 200 and a catalyst control valve 330
positioned on a portion of the catalyst supply pipe 320 and
controlling the amount of the catalyst powder supplied into the
process chamber 200. In the present embodiment, the catalyst
reservoir 310 is arranged outside of the process chamber 200 and
the catalyst supply pipe 320 penetrates into a sidewall of the
cylindrical process chamber 200 from the exterior to the interior
of the process chamber 200. Accordingly, the catalyst powder is
supplied into the process chamber 200 from the exterior to the
interior of the process chamber 200 through the catalyst supply
pipe 320. The catalyst control valve 330 may control the flow rate
of the catalyst that is supplied into the process chamber 200.
[0058] In an example embodiment, the catalyst supplier 300 may
further include at least one spray nozzle 340 that is connected to
an end portion of the catalyst supply pipe 320 in the process
chamber 200. For example, a plurality of the spray nozzles 340 is
arranged on an inner side surface 210 of the lower process chamber
200 and is connected to the catalyst supply pipe 320. In the
present example embodiment, four spray nozzles are arranged on the
inner side surface of the cylindrical process chamber 200 along the
circumference of the cylindrical tube, as shown in FIG. 3. Many
spray nozzles 340, for example, greater than four, may also be
arranged on the inner side surface of the cylindrical process
chamber at substantially the same gap distances along the
circumference of the cylindrical tube, as would be known to one of
ordinary skill in the art.
[0059] In an example embodiment, the spray nozzle 340 may be
directed to an upper portion of the process chamber 200 at a spray
angle with respect to a bottom of the cylindrical tube, so that the
catalyst or the catalyst powder may be supplied to the upper
portion of the process chamber, that is, to a top of the
cylindrical process chamber 200 and the sidewall adjacent to the
top thereof. As a result, the catalyst powder may move down from
the upper portion to the lower portion of the cylindrical process
chamber 200 in a first direction. That is, the catalyst powder may
freely fall downward in the first direction in the process chamber
20.
[0060] Accordingly, the catalyst supplier 300 may supply the
catalyst powder into the process chamber 200 from the exterior in
such a manner that the catalyst powder moves downward in the first
direction in the process chamber 200. In the present example
embodiment, the first direction may be directed to the lower
portion from the upper portion of the process chamber 200, so that
the catalyst powder may fall free downward in the first direction
in the process chamber 200. While the present example embodiment
discloses that the catalyst powder freely falls down in the first
direction, the catalyst powder may move any other directions in the
process chamber 200 in accordance with process conditions and
circumstances, as would be known to one of ordinary skill in the
art.
[0061] In an example embodiment, the source gas supplier 500 may
include a source gas reservoir 510 in which the source gas is
stored, a source supply pipe 520 interposed between the source gas
reservoir 510 and the process chamber 200 and a source control
valve 530 positioned on a portion of the source supply pipe 520 and
controlling the amount of the source gas supplied into the process
chamber 200. The source gas supplier 500 may supply the source gas
into the process chamber 200 through the source supply pipe 520.
The source control valve 530 may be positioned at a portion of the
source supply pipe 520 and thus the amount of the source gas
supplied into the process chamber 200 may be controlled by the
source control valve 530.
[0062] In example embodiments, the source reservoir 510 may be
arranged outside of the process chamber 200 and the source supply
pipe 520 may penetrate through the sidewall of the cylindrical
process chamber 200 from the exterior to the interior thereof.
Accordingly, the source gas is supplied into the process chamber
200 from the exterior to the interior of the process chamber 200
through the source supply pipe 520. The source control valve 530
may control the flow rate of the source gas that is supplied into
the process chamber 200. In the present example embodiment, the
source supply pipe 520 penetrates into the sidewall of the lower
portion of the process chamber 200 to a central portion of the
process chamber 200, so that the source gas is supplied into the
central portion of the lower portion of the process chamber
200.
[0063] In example embodiments, the source gas may be supplied into
the process chamber 200 from the lower portion to the upper portion
thereof in a second direction that is substantially opposite to the
first direction directed to the upper portion to the lower portion
of the process chamber 200, because the source supply pipe 520 may
be positioned at the lower portion of the process chamber 200.
[0064] Accordingly, the source gas may flow against the
free-falling of the catalyst powder, and thus the movement of the
catalyst powder may be interrupted by the source gas and the drop
of the catalyst powder from the upper portion to the lower portion
may be delayed in the process chamber 200. That is, when the source
gas may not flow against the free-falling of the catalyst powder in
the process chamber 200, the catalyst powder may fall down from the
upper portion to the lower portion of the process chamber 200 for a
first time. However, when the free-falling of the catalyst powder
may be interrupted by a flow of the source gas in the second
direction, the catalyst powder may fall down from the upper portion
to the lower portion of the process chamber 200 for a second time
at a greater rate than the first time. Therefore, when the source
gas may be supplied into the process chamber 200 in the second
direction, the catalyst powder falls down much more slowly due to
the upward flow of the source gas, so that the catalyst powder and
the source gas may be reacted with each other for a longer time and
the reaction rate for generating the CNTs may be sufficiently
increased in the process chamber 200, to thereby improve yield
ratio and purity of the CNTs. The amount or the flow rate of the
source gas may be controlled by the source control valve 530 and
thus the intensity of the source gas flow against the catalyst
powder may be varied by the source control valve 530. Therefore,
the drop velocity of the catalyst powder may be controlled by the
source supply valve 530. In addition, the source gas may be
controlled by an additional controller (not shown), so that the
flow rate of the source gas supplied into the process chamber 200
and the drop velocity of the catalyst powder may also be varied by
the additional controller, as would be known to one of ordinary
skill in the art. Control of the amount or the flow rate of the
source gas is to be described in detail with reference to FIG. 4
hereinafter.
[0065] In example embodiment, the source gas supplier 500 may
further include a dispersion plate 570 that is connected to the
source supply pipe 530 in the process chamber 200. In the present
example embodiment, the dispersion plate 570 may be positioned at
the central portion of the lower portion of the process chamber 200
and may include a plurality of spray holes 572 on a top surface
thereof, so that the source gas may be supplied into the process
chamber 200 through the spray holes 572 of the dispersion plate
570. In addition, a dispersion space 560 may be further positioned
between the source supply pipe 520 and the dispersion plate 570 in
such a configuration that a volume size of the dispersion space 560
is much greatly increased as compared with the volume size of the
source supply pipe 520. Therefore, the source gas is firstly
expanded and dispersed in the disperse space 560 by volume
expansion and is dispersively supplied into the process chamber 200
through the spray holes 572 from the disperse space 560. As a
result, the expanded source gas may be partially concentrated in
accordance with the spray holes 572 and may be partially injected
through each of the spray holes 572 uniformly scattered on the top
surface of the dispersion plate 570. Accordingly, the source gas is
supplied in the second direction through scattered spray holes 572
and uniformly spreads out upward in the process chamber 200.
[0066] Referring to FIG. 3, the dispersion plate 570 may be
substantially smaller than the process chamber 200 in view of size.
In example embodiments, in a case where the dispersion plate 570
and the cylindrical process chamber 200 has a circular
cross-sectional area, the diameter of the dispersion plate 570 may
be substantially smaller than that of the process chamber 200. In
an example embodiment, the source gas may be injected upwards in
almost all directions that sufficiently cover most of the space
over the dispersion plate 570 in the process chamber 200, so that
most of the catalyst powder may be interrupted while free-falling
downward in the process chamber 200. For example, the top surface
of the dispersion plate 570 may be shaped into a curved surface, so
that the source gas may be sufficiently injected in almost all
directions covering most of the space over the dispersion plate 570
although the size of the dispersion plate 570 is smaller than that
of the process chamber 200. Accordingly, most of the catalyst
powder may be interrupted while free-falling downward in the first
direction in the process chamber 200 although the size of the
dispersion plate 570 is smaller than that of the process chamber
200.
[0067] The dispersion plate 570 may be located at a position spaced
apart from the sidewall 210 of the process chamber 200 by a gap
distance D, and the shape of the dispersion plate 570 may be varied
in accordance with the gap distance D. That is, the greater the gap
distance D is, the smaller the curvature of the top surface of the
dispersion plate 570 is and the smaller the gap distance D is, the
larger the curvature of the top surface of the dispersion plate 570
is. The concave top surface of the dispersion plate 570 may allow
the source gas to be sufficiently dispersed in the process chamber
200, and thus the falling down of each catalyst powder may be
delayed by the flow of the source gas although the size of the
dispersion plate 570 is smaller than that of the cylindrical
process chamber 200.
[0068] As described above, the flow of the source gas in the second
direction may delay the drop velocity of the catalyst powder in the
process chamber 200, so that the source gas and the catalyst powder
may be reacted with each other for a sufficient time to thereby
generate high-purity CNTs.
[0069] The collector 600 may recover the CNTs from the process
chamber 200. For example, the collector 600 may be positioned under
the process chamber 200 and thus the CNTs generated in the process
chamber 200 may fall down toward the lower portion of the process
chamber 200 to thereby be collected into the collector 600.
[0070] In the present example embodiment, the dispersion plate 570
is smaller than the process chamber 200 and the dispersion plate
570 is positioned at the central portion of the lower portion of
the process chamber 200, and thus the dispersion plate 570 is
spaced apart from the sidewall 210 of the process chamber 200 by
the gap distance D and a gap space is interposed between the
sidewall of the process chamber 200 and the dispersion plate 570.
In such a case, the CNTs generated in the process chamber 200 may
be collected through the gap space between the dispersion plate 570
and the sidewall 210 of the process chamber 200 into the collector
600. The source gas and the catalyst powder are reacted with each
other to thereby generate the CNTs in the space of the upper
portion of the process chamber 200 and the CNTs also freely fall
downward while the catalyst powder freely falls downward
sufficiently slowly in the first direction in the process chamber
200. The CNTs continuously freely fall downward in the process
chamber 200 and pass through the gap space between the dispersion
plate 570 and the sidewall 210 of the process chamber 200. The CNTs
passing through the gap space may be collected into the collector
600 under the process chamber 200.
[0071] While the present example embodiment discloses that the CNTs
may be collected simultaneously with the generation of the CNTs in
the process chamber 200, the CNTs may also be collected after
completing the generation of the CNTs in the process chamber 200
using an additional collector, as would be known to one of ordinary
skill in the art. In such a case, an additional buffer space may be
located at a bottom portion of the process chamber 200, and thus
the generated CNTs may be temporarily stored into the buffer space
and then may be extracted into the collector after completing the
generation process of the CNTs.
[0072] In an example embodiment, the apparatus 100 for generating
the CNT may further include a chamber heater 700, a gas exhauster
800 and a pressure controller 900.
[0073] The chamber heater 700 may heat the inside of the process
chamber 200 to a temperature of about 500.degree. C. to about
1,100.degree. C. For example, the heater may include a heating coil
enclosing the process chamber 200.
[0074] The gas exhauster 800 may exhaust the sources gas from the
process chamber 200 to the outside. The gas exhauster 800 will be
described in detail with reference to FIG. 7.
[0075] The pressure controller 900 may be connected to the process
chamber 200 and may control an internal pressure of the process
chamber 200. The pressure controller 900 may include a vacuum pump
910 which pumps out the gas of the process chamber 200, a pressure
control pipe 920 interposed between the vacuum pump 910 and the
process chamber 200 and a pressure control valve 930 positioned on
a portion of the pressure control pipe 920 and controlling the
amount of the gas pumped out from the process chamber 200. Thus,
the pressure controller 900 may maintain the process chamber 200 to
be in a vacuum state by reducing the internal pressure of the
process chamber 200.
[0076] According to the present invention, the source gas is
supplied against the free-falling of the catalyst powder, to
thereby reduce the drop velocity of the catalyst powder. Therefore,
control of the flow rate of the source gas allows control of the
drop velocity reduction of the catalyst powder, so that the source
gas and the catalyst powder may be reacted with each other for a
sufficiently long time. As a result, the CNTs may be efficiently
generated in a relatively narrow space. In addition, the CNTs may
be collected immediately when the CNTs are generated in the process
chamber while the catalyst powder falls down in the process
chamber, to thereby improve the yield and purity of the CNTs.
[0077] FIG. 4 is a view illustrating a schematic structure of a
source reservoir in the source gas supplier shown in FIG. 2.
[0078] Referring to FIG. 4, the source gas reservoir 510 may
include a reaction gas reservoir 540 and a carrier gas reservoir
550.
[0079] The reaction gas reservoir 540 may store a reaction gas that
is reacted with the catalyst powder in the process chamber 200 to
thereby generate the CNTs and the carrier gas reservoir 550 may
store a carrier gas for carrying the reaction gas into the process
chamber 200. Examples of the reaction gas may include acetylene
(C.sub.2H.sub.2), ethylene (C.sub.2H.sub.4), methane (CH.sub.4),
benzene (C.sub.6H.sub.6), xylene (C.sub.6H.sub.4(CH.sub.3).sub.2),
carbon monoxide (CO), carbon dioxide (CO.sub.2), etc. These may be
used alone or in combinations thereof. Examples of the carrier gas
may include an inactive gas such as argon (Ar) gas and chromium
(Cr) gas.
[0080] In example embodiments, the carrier gas may be supplied into
the process chamber 200 in the second direction while the supply of
the reaction gas is stopped by a reaction gas control valve 542,
and thus the drop velocity of the catalyst powder may be reduced by
the flow of the carrier gas in the second direction. When the drop
velocity of the catalyst powder is sufficiently reduced, the
reaction gas control valve 542 is open and the reaction gas is
supplied into the process chamber 200 in the second direction.
Otherwise, the carrier gas and the reaction gas may also be
simultaneously supplied into the process chamber 200, as would be
known to one of ordinary skill in the art. While the reaction gas
is supplied into the process chamber 200 at a constant flow rate,
the flow rate of the carrier gas may be varied by a carrier gas
control valve 552 in such a manner that the amount of the carrier
gas may be gradually decreased on condition that the supply of the
carrier gas is not completely stopped. The reaction gas control
valve 542 and the carrier gas control valve 552 may control a
mixture ratio of the reaction gas and the carrier gas. Accordingly,
the source gas is supplied against the free-falling of the catalyst
powder and the drop velocity of the catalyst powder is sufficiently
reduced. Control of the flow rate of the source gas allows control
of the drop velocity reduction of the catalyst powder, so that the
source gas and the catalyst powder may be reacted with each other
for a sufficiently long time. As a result, the CNTs may be
efficiently generated in a relatively narrow space.
[0081] FIGS. 5 and 6 are views illustrating a schematic structure
of the source gas supplier shown in FIG. 2.
[0082] Referring to FIGS. 2, 5 and 6, the source gas supplier 500
may further include a source heater 580 for heating in advance
before the source gas is supplied into the process chamber 200. For
example, the source heater 580 may be positioned adjacent to the
source gas supplier 500. In the present example embodiment, the
source heater 580 may enclose one of the source reservoir 510 and
the source supply pipe 520. Accordingly, the source heater 580 may
heat the source gas in the source gas supplier 500.
[0083] In an example embodiment, the source heater 580 may include
a heating coil 572 enclosing the source supply pipe 520, as shown
in FIG. 5 and the source heater 580 may also include a plasma
heater 584 located at a portion of the source supply pipe 520
between the source reservoir 510 and the source control valve 530.
The source gas may be heated in advance by plasma of the plasma
heater 584 before supplying into the process chamber 200. While the
present example embodiment discloses the heat coil and the plasma
heater as the source heater 580, various heating devices may also
be utilized for heating the source gas in advance in place of or in
conjunction with the above heaters, as would be known to one of
ordinary skill in the art.
[0084] As described above, the source gas may be heated in advanced
by the source heater 580 and the preheated source gas may be
supplied into the process chamber 200. When the source gas may
include acetylene (C.sub.2H.sub.2), ethylene (C.sub.2H.sub.4),
methane (CH.sub.4), benzene (C.sub.6H.sub.6), xylene
(C.sub.6H.sub.4(CH.sub.3).sub.2), carbon monoxide (CO), or carbon
dioxide (CO.sub.2), the source gas may be activated into some
radicals having carbon (C) by the source heater 580. That is, the
source gas may be supplied into the process chamber 200 as
activated radicals, to thereby remarkably improve the generation
efficiency of the CNTs.
[0085] FIG. 7 is a view illustrating a schematic structure of a gas
exhauster shown in FIG. 2.
[0086] Referring to FIGS. 2 and 7, the gas exhauster 800 may
include a separation chamber 810 in which the source gas and the
catalyst powder are separated from each other, an exhausting pipe
820 connected to the process chamber 200 and the separation chamber
810 and an exhausting valve 830 located on a portion of the
exhausting pipe 820 and controlling the flow rate of the exhausted
gas from the process chamber 200.
[0087] The separation chamber 810 may include a body 812, a source
outlet 814 and a catalyst outlet 816 connected to a lower portion
of the body 812 of the separation chamber 810. The body 812 may be
connected to the exhausting pipe 820. The source gas may be
delivered into the body 812 of the separation chamber 810 and may
be exhausted from the process chamber 200 through the source outlet
814 by a cyclone process. The catalyst powder may be delivered into
the body 812 of the separation chamber 810 and may be exhausted
from the process chamber 200 through the catalyst outlet 816 by the
cyclone process. That is, when a mixture of the source gas and the
catalyst powder is delivered into the separation chamber 810, the
mixture is rotated at very high revolutionary speed by the cyclone
process in the body 812 and thus the source gas, which is lighter
than the catalyst powder, is guided to an upper portion of the body
812 and the catalyst powder, which is heavier than the source gas,
is guided to the lower portion of the body 812. Therefore, the
source gas may be exhausted from the process chamber 200 through
the source outlet 814 at the upper portion of the body 812 and the
catalyst powder may be exhausted from the process chamber 200
through the catalyst outlet 816 at the lower portion of the body
814. As a result, the source gas and the catalyst powder may be
exhausted from the process chamber 200 by the gas exhauster
800.
[0088] While the present example embodiment discloses that the
source gas and the catalyst powder are exhausted from the process
chamber 200 by the cyclone process, the source gas and the catalyst
powder may also be regenerated by re-supplying the exhausted source
gas and catalyst powder into the process chamber again, as would be
known to one of ordinary skill in the art.
[0089] FIG. 8 is a cross-sectional view schematically illustrating
an apparatus for generating a CNT in accordance with another
example embodiment of the present invention. The CNT generation
apparatus shown in FIG. 8 has the same structure as the CNT
generation apparatus shown in FIG. 2 except the catalyst supplier.
Thus, in FIG. 8, the same reference numerals denote the same or
like elements in FIG. 2 and any detailed descriptions on the same
elements will be omitted.
[0090] Referring to FIG. 8, a catalyst supplier 400 may supply a
catalyst into the process chamber 200 as a powder type. For
example, the catalyst may include a transition metal such as iron
or cobalt. That is, a transition metal powder may be supplied into
the process chamber 200 as the catalyst by the catalyst supplier
400.
[0091] In an example embodiment, the catalyst supplier 400 may
include a catalyst reservoir 410 in which the catalyst is stored, a
catalyst supply pipe 420 interposed between the catalyst reservoir
410 and the process chamber 200 and a catalyst control valve 430
positioned on a portion of the catalyst supply pipe 420 and
controlling the amount of the catalyst powder supplied into the
process chamber 200. In the present embodiment, the catalyst
reservoir 410 is arranged over the process chamber 200 and the
catalyst supply pipe 420 penetrates into a cover of the cylindrical
process chamber 200 from the exterior to the interior of the
process chamber 200. Accordingly, the catalyst powder is supplied
into the process chamber 200 from the exterior to the interior of
the process chamber 200 through the catalyst supply pipe 420
penetrating through the cover of the process chamber 200. The
catalyst control valve 430 may control the flow rate of the
catalyst powder that is supplied into the process chamber 200.
[0092] In an example embodiment, the catalyst supplier 400 may
further include at least one dispersion net 440 that is arranged at
an upper portion of the process chamber 200 and has a mesh
structure. A plurality of the dispersion holes 442 is arranged and
uniformly distributed on the dispersion net 440, so that the
catalyst powder is supplied into the process chamber 200 from the
upper portion to the lower portion thereof in the first direction.
As described above, the first direction is also directed from the
upper portion to the lower portion of the process chamber in the
present example embodiment.
[0093] In an example embodiment, the size of the dispersion net 440
may be substantially smaller than that of the process chamber 200.
In a case where the dispersion net 440 and the cylindrical process
chamber 200 has a circular cross-sectional area, the diameter of
the dispersion net 440 may be substantially smaller than that of
the process chamber 200. Therefore, the catalyst powder may fall
down through the dispersion holes 442 of the dispersion net 440, so
that the catalyst powder may be uniformly supplied into the space
of the process chamber 200.
[0094] When the source gas is supplied against the free-falling of
the catalyst powder through the dispersion holes 442 of the
dispersion net 440, the drop velocity of the catalyst powder is
sufficiently reduced, and thus the source gas and the catalyst
powder may be reacted with each other for a sufficiently long time.
Particularly, control of the flow rate of the source gas allows
control of the drop velocity reduction of the catalyst powder, and
thus the source gas and the catalyst powder may be reacted with
each other for a sufficiently long time. As a result, the CNTs may
be efficiently generated in a relatively narrow space. In addition,
the CNTs may be collected immediately when the CNTs are generated
in the process chamber while the catalyst powder falls down in the
process chamber, to thereby improve the yield and purity of the
CNTs.
[0095] FIG. 9 is a flowchart showing a method of generating a CNT
in accordance with an example embodiment of the present
invention.
[0096] Referring to FIGS. 2, 8 and 9, the process chamber may be
heated to a process temperature (step S100) and the catalyst powder
may be supplied into the heated process chamber in the first
direction (step S200). The source gas may be supplied into the
process chamber in the second direction opposite to the first
direction (step S300).
[0097] Particularly, the chamber heater 700 may heat the process
chamber 200 to a target temperature. For example, the process
chamber 200 may be heated to the target temperature through a
preheating step and a main heating step or may be heated to the
target temperature at one step. The process chamber 200 may be
heated to a temperature lower than the target temperature in the
preheating step and then may be heated again to the target
temperature. The target temperature is a temperature at which the
source gas and the catalyst powder may be most activated. For
example, the target temperature may be in a range of about
500.degree. C. to about 1,100.degree. C.
[0098] Then, the catalyst powder may be supplied into the heated
process chamber 200 by the catalyst supplier 300 or 400. For
example, the catalyst powder may include a transition metal powder
such as iron and nickel. In an example embodiment, the catalyst
powder may be shaped into a sphere, so that the surface area of the
catalyst powder may be enlarged as much as possible and thus the
contact area of the source gas and the catalyst powder may be
maximized in the process chamber 200. The size, density and
agglomeration degree of the catalyst powder may be varied in
accordance with process conditions and kinds of the process.
[0099] The catalyst powder may be supplied into the process chamber
in the first direction from the upper portion to the lower portion
of the process chamber 200. Thus, the catalyst powder may freely
fall down from the upper portion of the process chamber to the
lower portion thereof.
[0100] In example embodiments, the catalyst supplier 300 or 400
includes a spray nozzle directed to the upper portion of the
process chamber 200. The catalyst powder may be injected to the
upper portion of the process chamber 200 through the spray nozzle
340 and may freely fall downward to the lower portion of the
process chamber 200. In other example embodiments, the catalyst
supplier includes a dispersion net 440 located on the upper portion
of the process chamber 200, so that the catalyst powder may be
supplied into the process chamber 200 from the upper portion to the
lower portion by the dispersion net 440. While the present example
embodiment discloses the spray nozzle and the dispersion net for
dispersively supplying the source gas into the upper portion of the
process chamber 200, any other configurations known to one of the
ordinary skill in the art may also be utilized in place of or in
conjunction with the spray nozzle and the dispersion net on
condition that the catalyst powder may freely fall down from the
upper portion to the lower portion of the process chamber 200.
[0101] The source gas may be supplied into the process chamber 200
by the source supplier 500. Examples of the source gas may include
acetylene (C.sub.2H.sub.2), ethylene (C.sub.2H.sub.4), methane
(CH.sub.4), benzene (C.sub.6H.sub.6), xylene
(C.sub.6H.sub.4(CH.sub.3).sub.2), carbon monoxide (CO), carbon
dioxide (CO.sub.2), etc. These may be used alone or in combinations
thereof. In an example embodiment, the source gas may be uniformly
supplied into the process chamber 200 through the dispersion plate
570. Particularly, the source gas may be injected into the process
chamber 200 through a plurality of the dispersion holes 572 of the
dispersion plate 570. In addition, the source gas may be firstly
expanded and dispersed in the disperse space 560 by volume
expansion and is dispersively supplied into the process chamber 200
through the spray holes 572 from the disperse space 560. As a
result, the expanded source gas may be partially concentrated in
accordance with the spray holes 572 and may be partially injected
through each of the spray holes 572 uniformly scattered on the top
surface of the dispersion plate 570. Accordingly, the source gas is
supplied in the second direction through scattered spray holes 572
and uniformly spreads out upward in the process chamber 200.
[0102] When the size of the dispersion plate 570 is smaller than
that of the process chamber 200 and the CNTs generated in the
process chamber 200 may be collected through the gap space between
the dispersion plate 570 and the sidewall 210 of the process
chamber 200, the top surface of the dispersion plate 570 may be
shaped into a curved surface. Therefore, the source gas may be
sufficiently injected in almost all directions covering most of the
space over the dispersion plate 570 although the size of the
dispersion plate 570 is smaller than that of the process chamber
200. Accordingly, most of the catalyst powder may be interrupted
while free-falling downward in the first direction in the process
chamber 200 although the size of the dispersion plate 570 is
smaller than that of the process chamber 200.
[0103] The source gas is supplied into the process chamber 200 in
the second direction substantially opposite to the first direction,
to thereby reduce the drop velocity of the catalyst powder.
Therefore, the source gas and the catalyst powder may be reacted
with each other for a sufficiently long time. Particularly, control
of the flow rate of the source gas allows control of the drop
velocity reduction of the catalyst powder, and thus the source gas
and the catalyst powder may be reacted with each other for a
sufficiently long time. As a result, the CNTs may be efficiently
generated in a relatively narrow space. In addition, the CNTs may
be collected immediately when the CNTs are generated in the process
chamber 200 while the catalyst powder falls down in the process
chamber, to thereby improve the yield and purity of the CNTs.
[0104] In an example embodiment, the source gas may be heated in
advance by the source heater 580 before supplying into the process
chamber 200. When the source gas may include acetylene
(C.sub.2H.sub.2), ethylene (C.sub.2H.sub.4), methane (CH.sub.4),
benzene (C.sub.6H.sub.6), xylene (C.sub.6H.sub.4(CH.sub.3).sub.2),
carbon monoxide (CO), or carbon dioxide (CO.sub.2), the source gas
may be activated into some radicals having carbon (C) by the source
heater 580. That is, the source gas may be supplied into the
process chamber 200 as activated radicals, to thereby remarkably
improve the generation efficiency of the CNTs.
[0105] In an example embodiment, the CNTs may be collected into the
collector from the process chamber 200. For example, the collector
600 may be positioned under the process chamber 200 and thus the
CNTs generated in the process chamber 200 may fall down toward the
lower portion of the process chamber 200 to thereby collected into
the collector 600. In the present example embodiment, the
dispersion plate 570 is smaller than the process chamber 200 and
the dispersion plate 570 is positioned at the central portion of
the lower portion of the process chamber 200, and thus the
dispersion plate 570 is spaced apart from the sidewall 210 of the
process chamber 200 by the gap distance D and a gap space is
interposed between the sidewall of the process chamber 200 and the
dispersion plate 570. In such a case, the CNTs generated in the
process chamber 200 may be collected through the gap space between
the dispersion plate 570 and the sidewall 210 of the process
chamber 200 into the collector 600. The CNTs generated in the space
of the upper portion of the process chamber 200 freely fall
downward while the catalyst powder freely falls downward
sufficiently slowly in the first direction in the process chamber
200. The CNTs continuously freely fall downward in the process
chamber 200 and pass through the gap space between the dispersion
plate 570 and the sidewall 210 of the process chamber 200. The CNTs
passing through the gap space may be collected into the collector
600 under the process chamber 200. While the present example
embodiment discloses that the CNTs may be collected simultaneously
with the generation of the CNTs in the process chamber 200, the
CNTs may also be collected after completing the generation of the
CNTs in the process chamber 200 using an additional collector, as
would be known to one of ordinary skill in the art. In such a case,
an additional buffer space may be located at a bottom portion of
the process chamber 200, and thus the generated CNTs may be
temporarily stored into the buffer space and then may be extracted
into the collector after completing the generation process of the
CNTs.
[0106] Accordingly, the source gas may be supplied into the process
chamber in the second direction opposite to the first direction
along which the catalyst powder may be supplied into the process
chamber, to thereby reduce the drop velocity of the catalyst
powder. Therefore, the source gas and the catalyst powder may be
reacted with each other for a sufficiently long time. Particularly,
control of the flow rate of the source gas allows control of the
drop velocity reduction of the catalyst powder, and thus the source
gas and the catalyst powder may be reacted with each other for a
sufficiently long time. As a result, the CNTs may be efficiently
generated in a relatively narrow space. In addition, the CNTs may
be collected immediately when the CNTs are generated in the process
chamber while the catalyst powder falls down in the process
chamber, to thereby improve the yield and purity of the CNTs.
[0107] According to the present invention, a source gas may be
supplied into a process chamber in a second direction opposite to a
first direction along which a catalyst powder may be supplied into
the process chamber, to thereby reduce the drop velocity of the
catalyst powder. Therefore, the source gas and the catalyst powder
may be reacted with each other for a sufficiently long time, to
thereby improve the reaction rate of the source gas and the
catalyst powder.
[0108] In addition, control of the flow rate of the source gas
allows control of the drop velocity reduction of the catalyst
powder, and thus the source gas and the catalyst powder may be
reacted with each other for a sufficiently long time. As a result,
CNTs may be efficiently generated in a relatively narrow space. In
addition, the CNTs may be collected immediately when the CNTs are
generated in the process chamber while the catalyst powder falls
down in the process chamber, to thereby improve the yield and
purity of the CNTs.
[0109] This invention has been described with reference to the
example embodiments. It is evident, however, that many alternative
modifications and variations will be apparent to those having skill
in the art in light of the foregoing description. Accordingly, the
present invention embraces all such alternative modifications and
variations as falling within the spirit and scope of the appended
claims.
* * * * *