U.S. patent application number 11/712253 was filed with the patent office on 2009-03-05 for enhanced stripping of low-k films using downstream gas mixing.
This patent application is currently assigned to Novellus Systems, Inc.. Invention is credited to David Cheung, Haruhiro Harry Goto, Prabhat Kumar Sinha.
Application Number | 20090056875 11/712253 |
Document ID | / |
Family ID | 37904184 |
Filed Date | 2009-03-05 |
United States Patent
Application |
20090056875 |
Kind Code |
A1 |
Goto; Haruhiro Harry ; et
al. |
March 5, 2009 |
Enhanced stripping of low-K films using downstream gas mixing
Abstract
The present invention pertains to methods for removing unwanted
material from a work piece. More specifically, the invention
pertains to stripping photo-resist material and removing
etch-related residues from a semiconductor wafer during
semiconductor manufacturing. Methods involve implementing a
hydrogen plasma operation with downstream mixing with an inert gas.
The invention is effective at stripping photo-resist and removing
residues from low-k dielectric material used in Damascene
devices.
Inventors: |
Goto; Haruhiro Harry;
(Saratoga, CA) ; Cheung; David; (Foster City,
CA) ; Sinha; Prabhat Kumar; (Santa Clara,
CA) |
Correspondence
Address: |
Weaver Austin Villeneuve & Sampson LLP -;Attn.: Novellus Systems, Inc.
P.O. Box 70250
Oakland
CA
94612-0250
US
|
Assignee: |
Novellus Systems, Inc.
|
Family ID: |
37904184 |
Appl. No.: |
11/712253 |
Filed: |
February 27, 2007 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
11011273 |
Dec 13, 2004 |
7202176 |
|
|
11712253 |
|
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Current U.S.
Class: |
156/345.38 |
Current CPC
Class: |
C01B 3/00 20130101; G03F
7/427 20130101; H01J 37/32357 20130101; H01L 21/31138 20130101;
C01B 7/20 20130101; H01J 2237/3342 20130101; H01L 21/02063
20130101 |
Class at
Publication: |
156/345.38 |
International
Class: |
C23F 1/00 20060101
C23F001/00 |
Claims
1-21. (canceled)
22. An apparatus for removing material from a work piece surface in
a reaction chamber comprising: a plasma source; a gas inlet for
introducing a hydrogen-based gas into the plasma source; a gas
inlet for introducing an inert gas downstream of the plasma source
and upstream of the work piece; and a process chamber.
23. The apparatus of claim 22 further comprising a showerhead
assembly, said assembly comprising a showerhead for directing the
plasma and inert gas into the process chamber.
24. The apparatus of claim 23 wherein the showerhead comprises at
least 1000 holes.
25. The apparatus of claim 23 further comprising a platen for
supporting the work piece.
26. The apparatus of claim 23 further comprising an RF coil for
generating plasma in the plasma source.
27. The apparatus of claim 23 wherein the inert gas inlet comprises
at least four inlet jets.
28. The apparatus of claim 27 wherein the gas jets are a at zero
degree angle from the bottom of the plasma source.
29. The apparatus of claim 27 wherein the inert gas inlet comprises
at least sixteen inlet jets.
30. The apparatus of claim 22 wherein the inert gas inlet is
configured to inlet gas parallel to the face of the work piece.
31. The apparatus of claim 22 wherein the inert gas inlet comprises
a plurality of inlet jets, wherein the angle of the inlet jets as
measured from the bottom of the plasma source is zero degrees
Description
BACKGROUND
[0001] The present invention pertains to methods and systems for
stripping photo-resist material and removing etch-related residues
from the surface of a partially fabricated integrated circuit in
preparation for further processing. More specifically, the
invention pertains to methods and systems for implementing a plasma
operation that includes introducing an inert gas downstream of the
plasma source. The invention is effective at efficiently stripping
photo-resist and removing residues from low-k dielectric layers
after etching processes used to produce Damascene devices.
[0002] Damascene processing techniques are often preferred methods
in modern integrated circuit manufacturing schemes because they
require fewer processing steps and offers a higher yield than other
methods. Damascene processing involves forming metal conductors on
integrated circuits by forming inlaid metal lines in trenches and
vias in a dielectric layer (inter-metal dielectric). As part of the
Damascene process, a layer of photoresist is deposited on a
dielectric layer. The photoresist is a light-sensitive organic
polymer which can be "spun on" in liquid form and dries to a solid
thin film. The photosensitive photoresist is then patterned using
light through the mask and wet solvent. A plasma etching process
(dry etch) is then used to etch exposed portions of dielectric and
transfer the pattern into the dielectric, forming vias and trenches
in the dielectric layer.
[0003] Once the dielectric layer is etched, the photoresist must be
stripped and any etch-related residues must be thoroughly removed
before subsequent processing to avoid embedding impurities in the
device. Conventional processes for stripping photoresist employ a
plasma formed from a mixture of gases with the presence of oxygen
in the plasma. The highly reactive oxygen based plasma reacts with
and oxidizes the organic photoresist to form volatile components
that are carried away from the wafer surface.
[0004] Highly oxidizing conditions are also generally unsuitable
for use on low dielectric constant (low-k) materials. Low-k
materials have been used as inter-metal and/or inter-layer
dielectrics between conductive interconnects employed to reduce the
delay in signal propagation due to capacitive effects. The lower
the dielectric constant of the dielectric material, the lower the
capacitance of the dielectric and the lower the RC delay of the
integrated circuit. Typically, low-k dielectrics are silicon-oxide
based materials with some amount of incorporated carbon, commonly
referred to as carbon doped oxide (CDO). It is believed, although
not necessarily proven, that the oxygen scavenges or removes carbon
from the low-k materials. In many of these materials such as CDOs,
the presence of carbon is instrumental in providing a low
dielectric constant. Hence, to the extent that the oxygen removes
carbon from these materials, it effectively increases the
dielectric constant. As processes used to fabricate integrated
circuits move toward smaller and smaller dimensions and requires
the use of dielectric materials having lower and lower dielectric
constants, it has been found that the conventional strip plasma
conditions are not suitable.
[0005] Hydrogen plasmas or hydrogen-based plasmas with a weak
oxidizing agent are effective at stripping photo-resist and
removing residues from low-k dielectric layers without the problems
associated with conventional strip plasmas. However, these methods
require a high hydrogen flow to achieve an acceptable strip rate.
Because high hydrogen flow requires costly abatement and pump
systems, it is desirable to have hydrogen flow as low as possible
while maintaining an acceptable strip rate. In addition, it is
desirable to reduce hydrogen flow due to hydrogen's flammability
and the dangers associated with handling and abating it.
[0006] Others have reported using hydrogen-based plasmas with inert
gases such as hydrogen and helium introduced with hydrogen at the
plasma source. Han et al (U.S. Pat. Nos. 6,281,135 and 6,638,875)
describe using a mixture of hydrogen, helium and fluorine and Zhao
et al (U.S. Pat. Nos. 5,660,682 and 6,204,192) describe using a
mixture of hydrogen and argon. However, helium or argon ions in the
plasma have harmful effects. Mixtures of hydrogen and helium result
in high plasma damage on low-k materials due to the long life of
ionized helium plasma. Ionized argon causes unwanted sputtering of
the quartz material in the plasma tube (the portion of some
reactors where the plasma is formed). Introduction of argon to
hydrogen plasmas has also been shown to reduce strip rate.
[0007] What is needed therefore are improved and methods and
apparatus for stripping photoresist and etch-related materials from
dielectric materials, especially from low-k dielectric materials,
which reduce the required hydrogen flow rate while maintaining an
acceptable strip rate.
SUMMARY OF THE INVENTION
[0008] The present invention addresses the aforementioned need by
providing improved methods and an apparatus for stripping
photoresist and removing etch-related residues from dielectric
materials. An inert gas is introduced to the plasma downstream of
the plasma source and upstream of a showerhead that directs gas
into the reaction chamber. The inert gas mixes with the plasma,
reducing the required hydrogen flow rate and improving strip rate
and strip rate uniformity.
[0009] In one aspect of the invention, methods involve removing
material from a work piece in a process chamber according to the
following operations: (a) introducing a gas comprising hydrogen
into a plasma source, (b) generating a plasma from the gas
introduced into the plasma source, (c) introducing an inert gas
downstream of the plasma source and upstream of the work piece; and
(d) removing the material from the work piece. Another aspect of
this invention relates to an apparatus for removing material from a
work piece surface comprising: (a) a plasma source, (b) a gas inlet
for introducing a hydrogen-based gas into the plasma source, (c) a
gas inlet for introducing an inert gas downstream of the plasma
source and upstream of the work piece; and (e) a process
chamber.
[0010] The methods and apparatus of the invention may be used to
remove photoresist/etch byproduct materials from dielectric
materials on a partially fabricated integrated circuit. In a
preferred embodiment, the work piece comprises a single or dual
Damascene device.
[0011] In preferred embodiments of the invention, the inert gas
comprises argon or helium. In a particularly preferred embodiment,
the inert gas comprises argon. In preferred embodiments, the inert
gas flow rate is between 0.15 and 10.0 times the hydrogen flow
rate. In particularly preferred embodiments, the inert gas flow
rate is between 0.75 and 6.0 times the hydrogen flow rate.
[0012] The inert gas is introduced downstream of the plasma source
and upstream of work piece via gas inlets. In a preferred
embodiment, the inert gas is introduced upstream of a showerhead
that directs the plasma/inert gas mixture into the process
chamber.
[0013] In preferred embodiments, the gas inlets comprise jets which
may be positioned to optimize mixing of the inert gas with the
plasma. In preferred embodiments, the jets are positioned such that
the inert gas enters at a zero degree angle from the bottom of the
plasma source.
[0014] In preferred embodiments of the invention, the gas
comprising hydrogen introduced into the plasma source further
comprises a weak oxidizing agent. In a particularly preferred
embodiment, the weak oxidizing agent comprises carbon dioxide.
[0015] The plasma source used in accordance with the methods and
apparatus of the invention may be any type of plasma source. In a
preferred embodiment an RF plasma source is used.
[0016] The process chamber used in accordance with the methods and
apparatus of the invention may be any suitable process chamber. The
process chamber may be one chamber of a multi-chambered apparatus
or it may be part of a single chamber apparatus.
[0017] These and other features and advantages of the present
invention will be described in more detail below with reference to
the associated drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0018] FIG. 1 is a schematic illustration showing an apparatus
according to one embodiment of the claimed invention and suitable
for practicing the methods of the claimed invention.
[0019] FIG. 2 is a graph showing the effect of downstream mixing
with argon or helium flows on dry etch/photoresist strip rate of a
wafer and the uniformity of the strip rate over the wafer.
[0020] FIG. 3 is a graph showing the effect of downstream mixing
with argon on change in k value of a low-k dielectric.
[0021] FIGS. 4a-4c are plots representing strip rate topography
across the surfaces of 3 wafers treated at different conditions
with 3-jet downstream argon gas inlet.
[0022] FIG. 5 is a chart showing argon gas inlet jet angle on strip
rate and strip rate uniformity of a wafer in a process in
accordance with this invention.
[0023] FIGS. 6a and 6b are charts showing the effect of inert gas
inlet jet angle on strip rate and strip rate uniformity of a wafer
in a process in accordance with this invention.
[0024] FIG. 7 is a graph showing the effect of hydrogen flow rate
on dry etch/photoresist strip rate of a wafer and strip rate
uniformity over the wafer.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0025] Introduction
[0026] In the following detailed description of the present
invention, numerous specific embodiments are set forth in order to
provide a thorough understanding of the invention. However, as will
be apparent to those skilled in the art, the present invention may
be practiced without these specific details or by using alternate
elements or processes. In other instances well-known processes,
procedures and components have not been described in detail so as
not to unnecessarily obscure aspects of the present invention.
[0027] In this application, the terms "semiconductor wafer",
"wafer" and "partially fabricated integrated circuit" will be used
interchangeably. One skilled in the art would understand that the
term "partially fabricated integrated circuit" can refer to a
silicon wafer during any of many stages of integrated circuit
fabrication thereon. The following detailed description assumes the
invention is implemented on a wafer. However, the invention is not
so limited. The work piece may be of various shapes, sizes, and
materials. In addition to semiconductor wafers, other work pieces
that may take advantage of this invention include various articles
such as printed circuit boards and the like.
[0028] As mentioned previously, the methods and apparatus of the
invention may be used to efficiently and effectively to remove
materials from a low-k dielectric materials. The invention is not
limited to dielectric materials or low-k dielectric materials. The
invention is also not limited to any particular category of low-k
dielectrics. For instance, described methods and apparatus may be
effectively used with dielectrics with k values less than 4.0
("first generation" low-k dielectrics), dielectrics with k values
less than about 2.8 ("second generation" low-k dielectrics) and
dielectrics with k values less than about 2.0 ("ultra-low-k"
dielectrics). The low-k dielectric may be porous or non-porous
(sometimes referred to as a "dense" low-k dielectric). Generally,
low-k dense dielectrics are those having k values no greater than
2.8 and low-k porous dielectrics are those having k values no
greater than 2.2. Low-k dielectrics of any suitable composition may
be used, including silicon oxide based dielectrics doped with
fluorine and/or carbon. Non-silicon oxide based dielectrics, such
as polymeric materials, may also be used. Any suitable process may
be used to deposit the low-k dielectric, including as spin-on
deposit and CVD deposit techniques. In the case of forming porous
dielectrics, any suitable method may be used. A typical method
involves co-depositing a silicon-based backbone and an organic
porogen and subsequently removing the porogen component, leaving a
porous dielectric film. Other methods include sol-gel techniques.
Specific examples of suitable low-k films are carbon based spin-on
type films such as SILK.TM. and CVD deposited porous films such as
Coral.TM..
[0029] The methods and apparatus of the invention use plasmas that
are produced from gases that contain hydrogen. The gases may also
contain a weak oxidizing agent. One skilled in the art will
recognize that the actual species present in the plasma may be a
mixture of different ions and molecules derived from the hydrogen
and/or weak oxidizing agent. It is noted that other species may be
present in the reaction chamber, such as small hydrocarbons, carbon
dioxide, water vapor and other volatile components as the plasma
reacts with and breaks down the organic photoresist and other
residues. One of skill in the art will also recognize that
reference to the initial gas/gases introduced into the plasma
is/are different from other gas/gases that may exist after the
plasma is formed.
[0030] FIG. 1 is a schematic illustration of an apparatus 100
according to one embodiment of the claimed invention. The apparatus
depicted in FIG. 1 is also suitable to practice methods of claimed
invention. Apparatus 100 has a plasma source 101 and a process
chamber 103 separated by a showerhead assembly 105. Plasma source
101 is connected to gas inlet 111. Showerhead 109 forms the bottom
of showerhead assembly 105. Inert gas inlets 113 are downstream of
plasma source 101 and upstream of wafer 115 and showerhead 109.
Inside process chamber 103, a wafer 115 with photoresist/dry etch
byproduct material rests on a platen (or stage) 117. Platen 117 may
be fitted with a heating/cooling element. In some embodiments,
platen 117 is also configured for applying a bias to wafer 115. Low
pressure is attained in reaction chamber 103 via vacuum pump and
conduit 119.
[0031] In operation, a gas is introduced via gas inlet 111 to the
plasma source 101. The gas introduced to the plasma source contains
the chemically active species that will be ionized in the plasma
source to form a plasma. Gas inlet 111 may be any type of gas inlet
and may include multiple ports or jets. Plasma source 101 is where
the active species of the gas introduced to the source is generated
to form a plasma. In FIG. 1, an RF plasma source is shown with
induction coils 115. Induction coils 115 are energized and the
plasma is generated. An inert gas is introduced via gas inlets 113
upstream of the showerhead and downstream of the plasma source. The
inert gas mixes with the plasma. Gas inlets 113 may be any type of
gas inlets and may include multiple ports or jets to optimize
mixing the inert gas with the plasma. Showerhead 109 directs the
plasma/inert gas mixture into process chamber 103 through
showerhead holes 121. There may be any number and arrangement of
showerhead holes 121 to maximize uniformity of the plasma/gas
mixture in process chamber 103. Showerhead assembly 105, which has
an applied voltage, terminates the flow of some ions and allows the
flow of neutral species into process chamber 103. As mentioned,
wafer 115 may be temperature controlled and/or a RF bias may be
applied. The plasma/inert gas mixture removes the photoresist/etch
byproduct material from the wafer.
[0032] In some embodiments of the claimed invention, the apparatus
does not include showerhead assembly 105 and showerhead 109. In
these embodiments, the inert gas inlets 113 introduce the inert gas
directly into the process chamber where it mixes with the plasma
upstream of wafer 115.
[0033] FIG. 2 is graph showing the effects of downstream mixing
with argon and helium on the etch/photoresist strip rate of a wafer
and the uniformity of the strip rate over the wafer for various
hydrogen flows.
[0034] Hydrogen flow rate is shown on the x-axis. Net strip rate is
shown on the left y-axis in .ANG./min. Net strip rate does not
include any shrinkage due to evaporation of the solvent in the
photoresist. Strip rate uniformity over the wafer, calculated as 1
standard deviation/average strip rate, is shown on the right
y-axis. FIG. 2 shows strip rate is highest when the hydrogen based
plasma is mixed downstream with argon. In particular, mixing 3.5
slm hydrogen/30 sccm carbon dioxide with 3 slm argon resulted in a
higher strip rate than achieved with 6.5 slm hydrogen/30 sccm
carbon dioxide and no mixing. Thus, downstream mixing results in a
strip rate superior to that obtained with a conventional process
and a 44% reduction in hydrogen flow.
[0035] Strip rates when the hydrogen-based plasma is mixed
downstream with helium are also greater than when there is no
downstream mixing. Further, strip rate uniformity is shown to be
improved for most cases with downstream mixing. Thus, FIG. 2
demonstrates that strip rate and strip rate uniformity are
maintained for lower hydrogen flows using methods and apparatus in
accordance with the present invention.
[0036] As discussed above, many conventional photoresist/etch strip
processes are not effective to strip low-k dielectric materials
because they effectively raise the dielectric constant. FIG. 3 is
chart showing the effect of various flow rates of argon introduced
downstream of a plasma source on change in dielectric constant of a
low-k dielectric. A 300 mm wafer with 200 mm Novellus Coral low-k
film was stripped at 1 Torr. Flow rate of hydrogen plus inert gas
was kept constant at 6.5 slm. 30 sccm of carbon dioxide was
introduced with hydrogen to the plasma source. A 1300 W RF plasma
source was used. The reference value shown is the .DELTA.k for a
wafer not exposed to plasma and reflects the .DELTA.k due to
exposure to ambient conditions.
[0037] Typically, a .DELTA.k of less than 0.1 is acceptable. The
reference value in FIG. 3 shows the .DELTA.k resulting when the
wafer is exposed to air only. FIG. 3 shows that .DELTA.k values for
downstream mixing with argon are all less than or about the
reference value. All are well below maximum acceptable .DELTA.k.
Thus, FIG. 3 shows that the methods and apparatus of the invention
are effective to strip low-k dielectric materials.
Process Parameters
Upstream Inlet Gas
[0038] A hydrogen-based gas is introduced to the plasma source.
Typically the gas introduced to the plasma source contains the
chemically active species that will be ionized in the plasma source
to form a plasma. In preferred embodiments, the gas introduced to
the plasma source further comprises a weak oxidizing agent such as
carbon dioxide, carbon monoxide, nitrogen dioxide, nitrogen oxide
and water. In particularly preferred embodiments, the weak
oxidizing agent is carbon dioxide. In particularly preferred
embodiments, the gas introduced to the plasma source comprises
between about 0.1% to about 1.0% carbon dioxide by volume.
Applicants disclose methods of stripping photoresist and etch
materials from a low-k dielectric using hydrogen-based plasmas with
weak oxidizing agents in previously filed U.S. patent application
Ser. No. 10/890,653, which is hereby incorporated by reference. The
gas introduced to the plasma source may further comprise other
gases as needed, for example, to remove any plasma residue from the
wafer. In a preferred embodiment, a small amount of nitrogen
triflouride is introduced at the last station (in a multi-station
process) to remove residue from the wafer.
Plasma Generation
[0039] Any known plasma source may be used in accordance with the
invention, including a RF, DC, microwave any other known plasma
source. In a preferred embodiment, a downstream RF plasma source is
used. Typically, the RF plasma power for a 300 mm wafer ranges
between about 300 Watts to about 3 Kilowatts. In a preferred
embodiment, the RF plasma power is between about 1000 Watts and
1500 Watts.
Inert Gas
[0040] Any inert gas may be introduced downstream of the plasma
source and upstream of the showerhead for mixing with the plasma.
In a preferred embodiment, the inert gas is argon or helium. In a
particularly preferred embodiment, the inert gas is argon. However,
any inert gas, such as nitrogen, may be used. In preferred
embodiments, the inert gas flow rate is between about 0.15 and 10.0
times the hydrogen flow rate. In particularly preferred
embodiments, the inert gas flow rate is between about 0.75 and 6.0
times the hydrogen flow rate.
Inert Gas Inlet
[0041] The inert gas inlet may be any type of gas inlets and may
include multiple ports or jets to maximize mixing with the plasma.
The angle of the inlet jets may also optimized to maximize mixing.
In a preferred embodiment, there are at least four inert gas inlet
jets. In a particularly preferred embodiment, there are sixteen
inlet jets. In a preferred embodiment the angle of the inlet jets,
as measured from the bottom of the plasma source, is zero degrees
so that the inert gas is injected perpendicular to the direction of
flow of the plasma entering the showerhead assembly (or the process
chamber if there is no showerhead assembly) from the plasma source.
An angle of zero degrees also corresponds a direction parallel to
the face of the work piece.
[0042] FIGS. 4a-4c are plots representing strip rate topography
across the surfaces of 3 wafers treated at different conditions
with 3-jet downstream argon gas inlet. FIG. 4a shows the topography
of a wafer exposed to a plasma with no downstream mixing. FIG. 4b
shows the topography of a wafer exposed to a plasma mixed with 1
slm argon downstream, and FIG. 4c shows topography of a wafer
exposed to a plasma mixed with 3 slm argon downstream. Total
hydrogen plus argon flow rate was 6.5 slm for all figures. 30 sccm
carbon dioxide was also used. Temperature and pressure were kept at
280.degree. C. and 1 Torr and exposure time at 60 seconds.
[0043] Areas of higher strip rate 401 can be seen in FIGS. 4a and
4b. This indicates that more than three inert gas inlet jets should
be used to achieve better mixing and strip rate uniformity.
[0044] FIG. 5 is a chart showing argon gas inlet jet angle on strip
rate and strip rate uniformity of a wafer in a process in
accordance with this invention. 1.2 .mu.m of a photoresist was
deposited on the dielectric. One station was used. 60 seconds of
stabilization time to pre-heat the wafer before exposing it to
plasma was used followed by 60 seconds of exposure to the plasma.
Hydrogen/carbon dioxide flow rates were 3 slm/30 sccm. Downstream
argon flow rate was 5 slm.
[0045] Net strip rate is shown on the left y-axis in .ANG./min.
Strip rate uniformity over the wafer, calculated as 1 standard
deviation/average strip rate, is shown on the right y-axis. Strip
rate was maximized when the argon inlet jets were at zero degrees.
No difference in strip rate uniformity was detected.
[0046] FIGS. 6a and 6b also show that a jet angle of zero degrees
maximizes strip rates. FIGS. 6a and 6b show the results of models
that predict helium mass fraction as a function of wafer radius for
helium injected at -45.degree., 0.degree. and 45.degree.. Helium
mass fraction is proportional to strip rate. Results shown FIG. 6a
were found for flow 5.5 slm hydrogen, 1 slm helium and in FIG. 6b
for 1 slm hydrogen, 5.5 slm helium. The charts show that for both
cases, strip rate is maximizes for an inlet jet angle of zero
degrees.
Showerhead Assembly
[0047] Preferred embodiments of the present invention include a
showerhead assembly. The showerhead assembly may have an applied
voltage, terminates the flow of some ions and allows the flow of
neutral species into the reaction chamber. The assembly includes
the showerhead itself which may be a plate having holes to direct
the plasma and inert gas mixture into the reaction chamber. The
showerhead redistributes the active hydrogen from the plasma source
over a larger area, allowing a smaller plasma source to be used.
The number and arrangement of the showerhead holes may be set to
optimize strip rate and strip rate uniformity. Fewer holes improve
uniformity, but increase recombination of the plasma ions and
electrons which results in a lower strip rate. If the plasma source
is centrally located over the wafer, the showerhead holes are
preferably smaller and fewer in the center of the showerhead in
order to push the active gases toward the outer regions. The
showerhead preferably has at least 100 holes.
[0048] In embodiments in which there is no showerhead assembly, the
plasma enters the process chamber directly.
Process Chamber
[0049] The process chamber may be any suitable reaction chamber. It
may be one chamber of a multi-chambered apparatus or it may simply
be a single chamber apparatus. The chamber may also include
multiple stations where different wafers are processed
simultaneously. The process chamber may be the same chamber where
the etch takes place or a different chamber than where the etch
takes place. Process chamber pressure may range from 300 mTorr to 2
Torr. Preferably the pressure ranges from 0.9 Torr to 1.1 Torr.
Work Piece
[0050] In preferred embodiments, the work piece used in accordance
with the methods and apparatus of the invention is a semiconductor
wafer. Any size wafer may be used. Most modern wafer fabrication
facilities use either 200 mm or 300 mm wafers. Process conditions
may vary depending upon the wafer size. In particularly preferred
embodiments, the work piece comprises a single or dual Damascene
device.
[0051] In some embodiments of the invention, it is desired to keep
the work piece at a particular temperature during the application
of plasmas to its surface. Preferred wafer temperatures can range
between about 220 degrees and about 400 degrees Celsius.
[0052] In preferred embodiments, the surface of the work piece
comprises low-k dielectric materials, including carbon-doped low-k
dielectric materials such as carbon-doped oxides (CDOs). Non-porous
and porous dielectric materials, including CDOs and other
compositions may be used.
EXAMPLES
[0053] 300 mm sized wafers were processed (i.e., photoresist
stripped) on a strip station. Each wafer was covered with 1.2 .mu.m
of photoresist. RF power was set at 1300 W and pressure at 1 Torr.
30 sccm of carbon dioxide was introduced into the plasma source
with the hydrogen. Flow rate of hydrogen plus inert gas was kept at
6.5 slm. The results are shown in FIG. 2 as described above.
[0054] 300 mm sized wafers were processed. Each wafer was covered
with 1.2 .mu.m of photoresist. RF power was set at 1500 W and
pressure at 1 Torr. Argon flow rate was kept at 6 slm. Net strip
rate and strip rate uniformity was found for argon/hydrogen rations
of hydrogen flow rates of 1 slim, 1.5 slm, 2.0 slm, 2.5 slm and 3.0
slm (i.e. for argon/hydrogen ratios of 6.0, 4.0, 3.0, 2.4 and 2.0).
Results are shown in FIG. 7. All examples resulted in net strip
rates greater than 3000 .ANG./min and strip rate uniformities of
less than 4%.
[0055] Seven 300 mm wafers were processed on a five-station chamber
with RF power set at 1300 W and pressure at 1.1 Torr. Total
hydrogen flow rate was kept at 15 slm and total carbon dioxide flow
rate was kept at 150 sccm. Total argon flow rate was kept at 30
slm. The average net strip rate of the seven wafers was 2951
.ANG./min. Strip rate uniformity was calculated for six of the
wafers with the average found to be 3.61%.
[0056] Seven 300 mm wafers were processed with RF power set at 1200
W and pressure at 0.9 Torr. Total hydrogen flow rate was kept at 12
slm and total carbon dioxide flow rate was kept at 150 sccm. Total
argon flow rate was kept at 24 slm. The average net strip rate of
the seven wafers was 2807 .ANG./min. Strip rate uniformity was
calculated for six of the wafers with the average found to be
3.00%.
[0057] Additional experimental results are shown in Table 1 which
shows strip rates and strip rate uniformity obtained for various
argon flow rates, pressures, and RF powers. All data was collected
using in a five-station chamber with hydrogen flow of 3 slm per
station (15 slm total) and carbon dioxide flow of 30 sccm per
station (150 sccm total).
TABLE-US-00001 TABLE 1 Experimental results of downstream mixing
with argon Downstream argon flow rate per station RF Pressure Net
strip Rate Strip rate (slm) power (W) (Torr) (.ANG./min) uniformity
(%) 4 1300 1.0 2921 4.4 4 1300 1.1 2707 3.3 4 1500 1.0 2669 4.6 4
1500 1.1 2943 4.3 6 1300 1.0 3298 3.5 6 1300 1.1 2718 3.0 6 1500
1.0 3046 3.3 6 1500 1.1 2953 3.6
The target strip rate for the examples shown in Table 1 was 2200
.ANG./min with a uniformity of less than 4%. All of the above
examples meet the target strip rate and most meet the target
uniformity.
[0058] Note that experimental results for these specific examples
are shown to clarify and illustrate the effectiveness of methods of
the invention and are not meant to limit the invention to any
particular embodiments.
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