U.S. patent application number 12/124631 was filed with the patent office on 2009-01-22 for barrier coatings.
This patent application is currently assigned to General Electric Company. Invention is credited to Ahmet Gun Erlat, Christian Maria Anton Heller, Tae Won KIM, Marc Schaepkens, Min Yan.
Application Number | 20090022907 12/124631 |
Document ID | / |
Family ID | 35512966 |
Filed Date | 2009-01-22 |
United States Patent
Application |
20090022907 |
Kind Code |
A1 |
KIM; Tae Won ; et
al. |
January 22, 2009 |
BARRIER COATINGS
Abstract
A barrier coating of organic-inorganic composition, the barrier
coating having optical properties that are substantially uniform
along an axis of light transmission, said axis oriented
substantially perpendicular to the surface of the coating.
Inventors: |
KIM; Tae Won; (Clifton Park,
NY) ; Heller; Christian Maria Anton; (Albany, NY)
; Schaepkens; Marc; (Medina, OH) ; Erlat; Ahmet
Gun; (Clifton Park, NY) ; Yan; Min; (Ballston
Lake, NY) |
Correspondence
Address: |
Duane Morris LLP
Suite 1000, 505 9th Street, N.W.
Washington
DC
20004-2166
US
|
Assignee: |
General Electric Company
Niskayuna
NY
|
Family ID: |
35512966 |
Appl. No.: |
12/124631 |
Filed: |
May 21, 2008 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10879468 |
Jun 30, 2004 |
7449246 |
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12124631 |
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11292281 |
Dec 2, 2005 |
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10879468 |
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10065018 |
Sep 11, 2002 |
7015640 |
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11292281 |
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Current U.S.
Class: |
427/576 ;
427/162; 427/569; 427/577; 427/578; 427/74 |
Current CPC
Class: |
Y10T 428/31928 20150401;
Y10T 428/31504 20150401; H01L 51/5256 20130101; Y10T 428/31667
20150401 |
Class at
Publication: |
427/576 ;
427/569; 427/577; 427/578; 427/162; 427/74 |
International
Class: |
B01J 19/14 20060101
B01J019/14; B05D 5/06 20060101 B05D005/06; B05D 5/12 20060101
B05D005/12 |
Goverment Interests
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH &
DEVELOPMENT
[0001] This invention was made with Government support under
contract number RFP01-63GE awarded by United States Display
Consortium and Army Research Laboratory. The Government has certain
rights in the invention.
Claims
1-24. (canceled)
25. A method for depositing a barrier coating, comprising the steps
of: providing at least one surface for deposition; depositing
reaction or recombination products of reacting species on the
surface; changing the compositions of the reactants fed into the
reactor chamber during the deposition to form a compositionally
organic-inorganic coating; said coating comprising at least one
substantially organic zone and at least one substantially inorganic
zone; performing refractive index modification of the at least one
inorganic zone by varying the precursor gas composition, said
refractive index of the inorganic zone being adjusted to provide a
substantially uniform refractive index along an axis of light
transmission through said barrier coating.
26. The method of claim 25, wherein said depositing is selected
from the group consisting of plasma-enhanced chemical-vapor
deposition, radio-frequency plasma-enhanced chemical-vapor
deposition, expanding thermal-plasma chemical-vapor deposition,
sputtering, reactive sputtering, electron-cyclotron-resonance
plasma-enhanced chemical-vapor deposition, inductively-coupled
plasma-enhanced chemical-vapor deposition, and combinations
thereof.
27. The method of claim 25, wherein the barrier coating material is
selected from the group consisting of organic, inorganic materials,
and combinations thereof.
28. The method of claim 27, wherein the inorganic material are
selected from the group consisting of oxide, nitride, carbide,
boride and combinations there of elements of Groups IIA, IIIA, IVA,
VA, VIA, VIIA, IB and IIB, metals of Groups IIIB, IVB, and VB and
rare-earth metals.
29. The method of claim 27, wherein the organic barrier coating
material comprising carbon, hydrogen and oxygen.
30. The method of claim 29, wherein said organic material further
comprising sulfur, nitrogen, silicon and other elements.
31-86. (canceled)
87. A method comprising: providing a device disposed on a
substrate; and coating a surface of said device with a barrier
coating of organic-inorganic composition, the barrier coating
having optical properties that are substantially uniform along an
axis of light transmission, said axis oriented substantially
perpendicular to the surface of the coating, wherein the barrier
coating comprises at least one zone substantially organic in
composition and at least one zone substantially inorganic in
composition.
88. The method of claim 87, wherein the refractive index of the
barrier coating is substantially uniform along the axis of light
transmission.
89. The method of claim 87, wherein light transmittance through the
barrier coating, along the axis of light transmission, is greater
than 85% for all wavelengths in a selected wavelength range.
90. The method of claim 89, wherein light transmittance through the
barrier coating is greater than 85% in the selected wavelength
range between about 400 nanometers to about 700 nanometers.
91. The method of claim 87, wherein said optical properties of said
barrier coating comprise substantially uniform light transmittance
for all wavelengths within a selected wavelength range.
92. The method of claim 91, wherein light transmittance through the
barrier coating is substantially uniform for the selected
wavelength range between about 400 nanometers to about 700
nanometers.
93. The method of claim 87, wherein a transmission rate of oxygen
through the barrier coating is less than about 0.1
cm.sup.3/(m.sup.2 day), as measured at 25.degree. C. and with a gas
containing 21 volume-percent oxygen.
94. The method of claim 87, wherein a transmission rate of water
vapor through the barrier coating is less than about 1 g/(m.sup.2
day), as measured at 25.degree. C. and with a gas having
100-percent relative humidity.
95. The method of claim 87, wherein the barrier coating comprises
zones of substantially homogenous composition.
96. The method of claim 95, wherein the barrier coating further
comprises transitional zones of mixed organic and inorganic
composition.
97. The method of claim 87, wherein the barrier coating material is
selected from the group consisting of organic, inorganic materials,
and combinations thereof.
98. The method of claim 97, wherein the inorganic materials are
selected from the group consisting of oxide, nitride, carbide,
boride and combinations there of elements of Groups IIA, IIIA, IVA,
VA, VIA, VIIA, IB and IB, metals of Groups IIIB, IVB, and VB and
rare-earth metals.
99. The method of claim 97, wherein the organic barrier coating
material comprises carbon, hydrogen and oxygen.
100. The method of claim 99, wherein said organic material further
comprises sulfur, nitrogen, silicon and other elements.
101. The method of claim 87, further comprising coating a surface
of said substrate with said barrier coating.
102. The method of claim 87, wherein at least one barrier coating
encapsulates the method.
103. The method of claim 87, further comprising encapsulating said
device with said barrier coating.
104. The method of claim 87, wherein said device is an
optoelectronic element.
105. The method of claim 104, wherein the optoelectronic element is
an organic element.
106. The method of claim 104, wherein the optoelectronic element is
electroluminescent.
107. The method of claim 104, wherein the optoelectronic element is
photoresponsive.
108. The method of claim 87, wherein said substrate is
substantially transparent.
109. The method of claim 87, wherein said substrate comprises a
metal.
110. The method of claim 87, wherein said substrate comprises
glass.
111. The method of claim 87, wherein said substrate is flexible.
Description
BACKGROUND
[0002] The invention relates generally to barrier coatings. More
specifically, the invention relates to barrier coatings that are
used in optoelectronic devices.
[0003] Optical and optoelectronic devices that are susceptible to
reactive chemical species normally encountered in the environment,
require barrier coatings with desirable light transmission
properties.
[0004] Multilayer barrier coatings desirably are effective barriers
against reactive species like oxygen and water vapor. To achieve
desired barrier properties it is known in the art to try find
layers of materials of various organic and inorganic compositions.
Such materials commonly have different indices of refraction,
normally resulting in degradation in optical transmission through
the barrier layer. Prior approaches have focused on engineering the
thickness of the layers to take advantage of multiple-interference
to improve light transmission efficiency. However, one has to
retain certain thickness of the layers in order to maintain the
performance of the barrier, and thus it is not always easy to
engineer the thickness. Furthermore, in a mass production
environment it is difficult to achieve exact thickness control of
the layers. Also, it has been suggested that in multilayer
barriers, the interface between layers of different materials is
generally weak due to incompatibility of adjacent materials and the
layers, thus, are prone to be delaminated.
[0005] Organic-inorganic coating compositions desirably may be used
to minimize moisture and oxygen permeation rates through the
barrier coating. It has been speculated that the organic zone
sandwiched between two inorganic zones decouples the defects in one
inorganic zone to another. Thick organic zones in the coating are
effective in decoupling the defects. However, inorganic materials
typically have a refractive index n about 1.8 and organic materials
typically have a refractive index n about 1.5. Due to the
refractive index mismatch, large amplitude interference fringes are
observed with thick organic zones in the coating. Desired optical
performance achieved by maintaining organic zone thickness as thin
as possible, degrades the barrier properties of the coating.
[0006] Therefore, there is need for barrier coatings that are not
only robust, having low diffusion rates for environmentally
reactive species, but also have desirable optical properties and
can easily be mass produced.
BRIEF DESCRIPTION
[0007] The present invention addresses the needs discussed above.
One aspect of this invention is a composite article comprising a
barrier coating of organic-inorganic composition, the barrier
coating having optical properties that are substantially uniform
along an axis of light transmission, said axis oriented
substantially perpendicular to the surface of the coating.
[0008] Another aspect of the invention is a method for depositing
an organic-inorganic barrier coating. The method comprising the
steps of providing at least one surface for deposition; depositing
reaction or recombination products of reacting species on the
surface; changing the compositions of the reactants fed into the
reactor chamber during the deposition to form a compositionally
organic-inorganic coating, with at least one substantially organic
zone and at least one substantially inorganic zone; and performing
refractive index modification of at least one inorganic zone by
varying the precursor gas composition, said refractive index of the
inorganic zone being adjusted to provide a substantially uniform
refractive index along an axis of light transmission through said
barrier coating.
[0009] A further aspect of the invention is a device assembly
comprising a device, at least one surface of which is coated with
at least one barrier coating of organic-inorganic composition, the
composition of which varies across the thickness of the coating and
has substantially uniform refractive index along the axis of light
transmission, the axis oriented substantially perpendicular to the
surface of the coating.
DRAWINGS
[0010] These and other features, aspects, and advantages of the
present invention will become better understood when the following
detailed description is read with reference to the accompanying
drawings in which like characters represent like parts throughout
the drawings, wherein:
[0011] FIG. 1 graphically shows light transmittance through
identical substrates having barrier coatings with and without
refractive index matching.
[0012] FIG. 2 shows schematically an embodiment of a barrier
coating of the present invention.
[0013] FIG. 3 shows light transmittance spectra for barrier
coatings of the present invention with varying number of zones and
varying zone thicknesses.
[0014] FIG. 4 shows schematically a first embodiment of a composite
article with a barrier coating.
[0015] FIG. 5 shows schematically a second embodiment of a
composite article with a barrier coating.
[0016] FIG. 6 shows schematically a third embodiment of a composite
article with a barrier coating.
[0017] FIG. 7 shows variation in refractive index and extinction
coefficient with variation in oxygen mole fraction in precursor
feed gas during deposition.
[0018] FIG. 8 shows calculated visible light transmittance spectra
as a function of oxygen mole fraction in feed gas during
deposition.
DETAILED DESCRIPTION
[0019] Light emitting and light absorbing materials and electrode
materials in optoelectronic devices, especially in organic
optoelectronic devices, are all susceptible to attack by reactive
species existing in the environment, such as oxygen, water vapor,
hydrogen sulfide, SO.sub.x, NO.sub.x, solvents, etc. Barrier
coatings engineered to affect light transmission only to a small
extent are useful in extending the device lifetime without
degrading the overall device efficiency, thus rendering them
commercially viable. Desirable barrier properties are achieved in
the coating of the present invention by using an organic-inorganic
composition and desirable light transmission is achieved by
matching refractive indices of inorganic zones and organic zones in
the coating.
[0020] One aspect of this invention is a composite article
comprising a barrier coating of organic-inorganic composition, the
barrier coating having optical properties that are substantially
uniform along an axis of light transmission oriented substantially
perpendicular to the surface of the coating. "Substantially
perpendicular" means within 15 degrees either side of a
perpendicular to a tangent drawn at any point on the surface. In a
preferred embodiment, the substantially uniform optical properties
provides for a coating with a substantially uniform refractive
index. "Substantially uniform refractive index" means the
refractive index of any zone in the coating is within 10% of any
other zone in the coating for a selected wavelength. The barrier
coating preserves color neutrality by exhibiting substantially
uniform light transmission. "Substantially uniform light
transmission" means at any selected wavelength in a selected
wavelength range, the transmission is within 10% of the average
light transmission for the wavelength range, in other words, the
barrier coating does not substantially differentially attenuate
wavelengths within the selected wavelength range. The barrier
coating is constructed with zones of various compositions. The
oxygen and water vapor barrier properties are enhanced by the
inorganic-organic composition. Optical loss due to interference
resulting from differing refractive indices of the zones of various
compositions is overcome by depositing substantially uniform
refractive-index materials. The desired transmissivity is achieved
by matching the refractive indices of zones in the coating.
[0021] In optoelectronic devices one of the important performance
parameters is optical efficiency. Therefore it is desirable that
any coating used in such a device to enhance other performance
parameters, does not compromise the optical efficiency due to light
absorption or other factors. Therefore it is important that barrier
coatings be substantially transparent. The term "substantially
transparent" means allowing a total transmission of at least about
50 percent, preferably at least about 80 percent, and more
preferably at least 90 percent, of light in a selected wavelength
range. The selected wavelength range can be in the visible region,
the infrared region and the ultraviolet region. For example, a 5
mil polycarbonate substrate with a barrier coating of the present
invention, light transmittance along the axis of light transmission
is greater than 85% for all wavelengths in the visible light
wavelength region about 400 nanometers to about 700 nanometers.
FIG. 1 compares the visible light transmittance through a substrate
with a barrier coating of organic-inorganic composition without
refractive index matching (a) with a refractive index matched
barrier coating of organic-inorganic composition (b). FIG. 1 shows
a transmittance greater than 85% for the visible wavelength with no
large amplitude interference fringes for the barrier coating of the
present invention. Therefore the barrier coating of the present
invention is desirably substantially transparent in the visible
wavelength range.
[0022] The barrier coating of the present invention consists of at
least one substantially transparent inorganic zone and at least one
substantially transparent organic zone having low permeability of
oxygen or other reactive materials present in the environment. By
low permeability it is meant that the oxygen permeability is less
than about 0.1 cm.sup.3/(m.sup.2 day), as measured at 25.degree. C.
and with a gas containing 21 volume-percent oxygen and the water
vapor transmission is less than about 1 g/(m.sup.2 day), as
measured at 25.degree. C. and with a gas having 100-percent
relative humidity.
[0023] Referring to drawings in general and to FIG. 2 in
particular, the illustrations are for the purpose of describing an
embodiment or aspect of the invention and are not intended to limit
the invention. FIG. 2 shows schematically a substantially organic
zone 12, a substantially inorganic zone 14 and an organic-inorganic
interface zone 16 The term "substantially organic" means the
composition is over 90% organic. The term "substantially inorganic"
means the composition is over 90% inorganic. Although, any number
of zones can be present in the barrier coating, at least two, a
substantially organic zone 12 and a substantially inorganic zone
14, is suitable for reduction of moisture, oxygen and other
reactive species. Typical thickness of respective substantially
organic zones 12 is 100 nanometers to 1 micron. Typical thickness
of respective substantially inorganic zones 14 is 10 nanometers to
100 nanometers. Typical thickness of respective transitional zones
16 is 5 nanometers to 30 nanometers. In one embodiment, the
substantially organic zone 12 is of uniform composition. In another
embodiment, the substantially organic zone 12 is of a composition
that varies across the thickness of the zone. In another embodiment
all substantially organic zones 12 in a barrier coating are of same
composition. In another embodiment at least two of the organic
zones 12 are of different composition. In one embodiment, the
substantially inorganic zone 14 is of uniform composition. In
another embodiment, the substantially organic zone 14 is of a
composition that varies across the thickness of the zone. In
another embodiment, all substantially organic zones 14 in a barrier
coating are of same composition. In another embodiment at least two
of the organic zones 14 are of different composition. Other
embodiments may include transitional zones 16 that are neither
substantially organic nor substantially inorganic. It should be
clearly understood that the zones are not layers. The zones do not
have distinct boundaries.
[0024] Thus, a coating of the present invention does not have
distinct interfaces at which the composition of the coating changes
abruptly. It should also be noted that the composition of the
barrier coating does not necessarily vary monotonically from one
surface to the other surface thereof. A monotonically varying
composition is only one case of barrier coating of the present
invention.
[0025] FIG. 3 shows transmission spectra for barrier coatings with
varying number of zones and varying organic zone thickness.
Transmission spectra as shown in FIG. 3 for barrier coatings with
100 nm silicon oxycarbide substantially organic zone between two 30
nm silicon oxynitride substantially inorganic zones (a), with 300
nm silicon oxycarbide substantially organic zone between two 30 nm
silicon oxynitride substantially inorganic zones (b), with 600 nm
silicon oxycarbide substantially organic zone between two 30 nm
silicon oxynitride substantially inorganic zones (c) and with two
300 nm silicon oxycarbide substantially organic zone alternating
with three 30 nm silicon oxynitride substantially inorganic zones,
clearly demonstrate that the transmission efficiency of the barrier
coating is affected only in a small way by increasing the number of
zones or by increasing thickness of the organic zones in the
coating. This invention thereby preserves good transmission
efficiency even with thick organic zones and with multiple organic
and inorganic zones, which will aid in improving the barrier
properties of the coating. All barrier coatings in this example
have 10 nm transitional zones between the substantially organic and
substantially inorganic zones.
[0026] Suitable coating compositions of regions across the
thickness are organic, and inorganic materials and combinations
thereof. These materials are typically reaction or recombination
products of reacting plasma species and are deposited onto the
substrate surface. Organic coating materials typically comprise
carbon, hydrogen, oxygen, and optionally other minor elements, such
as sulfur, nitrogen, silicon, etc., depending on the types of
reactants. Suitable reactants that result in organic compositions
in the coating are straight or branched alkanes, alkenes, alkynes,
alcohols, aldehydes, ethers, alkylene oxides, aromatics, etc.,
having up to 15 carbon atoms. Inorganic coating materials typically
comprise oxide; nitride; carbide; boride; or combinations thereof
of elements of Groups IIA, IIIA, IVA, VA, VIA, VIIA, IB, and IIB;
metals of Groups IIIB, IVB, and VB; and rare-earth metals.
[0027] In one embodiment of the composite article of the present
invention, as shown in FIG. 4, at least one barrier coating 10 is
disposed on at least one surface of an element or substrate 20, of
the composite article 30. In another embodiment of the composite
article of the present invention, as shown in FIG. 5 at least one
barrier coating 10 disposed on at least one surface of more than
one element 20 of the composite article. In a third embodiment of
the composite article 30 of the present invention, as shown in FIG.
6, at least one barrier coating 10 encapsulates at least one
substrate or element 20 of the composite article 30.
[0028] In another embodiment of the composite article, at least one
element is an optoelectronic element. In a further preferred
embodiment of the composite article, the optoelectronic element is
an organic element. In one embodiment of the composite article the
optoelectronic element is an electroluminescent element. In another
embodiment of the composite article the optoelectronic element is a
photoresponsive element.
[0029] In another embodiment, the composite article includes a
polymeric substrate and an active element, which is an organic
electroluminescent element.
[0030] The composite article may include additional elements such
as, but not limited to, an adhesion layer, abrasion resistant
layer, chemically resistant layer, photoluminescent layer
radiation-absorbing layer, radiation reflective layer, conductive
layer, electrode layer, electron transport layer, hole transport
layer and charge blocking layer.
[0031] Another aspect of the invention is a method for depositing
the barrier coatings of organic-inorganic composition. The method
comprising the steps of providing at least one surface for
deposition, depositing reaction or recombination products of
reacting species on the surface, changing the compositions of the
reactants fed into the reactor chamber during the deposition to
form an organic-inorganic coating with at least one substantially
organic zone and at least one substantially inorganic zone, and
performing refractive index modification of at least one inorganic
zone by varying the precursor gas composition, the refractive index
of the inorganic zone being adjusted to provide a substantially
uniform refractive index along an axis of light transmission
through the barrier coating
[0032] A bulk material or a substrate having a surface for
deposition typically is a single piece or a structure comprising a
plurality of adjacent pieces of different materials. Non-limiting
examples of a substrate include a rigid transparent glass and a
flexible or rigid polymeric substrate.
[0033] The coating can be formed using one of many deposition
techniques, such as plasma-enhanced chemical-vapor deposition,
radio-frequency plasma-enhanced chemical-vapor deposition,
microwave plasma enhanced chemical vapor deposition, expanding
thermal-plasma chemical-vapor deposition, sputtering, reactive
sputtering, electron-cyclotron-resonance plasma-enhanced
chemical-vapor deposition, inductively-coupled plasma-enhanced
chemical-vapor deposition, and combinations thereof. Information
regarding all deposition techniques is generally known and readily
available.
[0034] For example, silicon carbide can be deposited on a surface
by recombination of plasmas generated from silane (SiH.sub.4) and
an organic material, such as methane or xylene. Silicon oxycarbide
can be deposited from plasmas generated from silane, methane, and
oxygen or silane and propylene oxide. Silicon oxycarbide also can
be deposited from plasmas generated from organosilicone precursors,
such as Vinyl trimethylsilane (VTMS), tetraethoxysilane (TEOS),
hexamethyldisiloxane (HMDSO), hexamethyldisilazane (HMDSN), or
octamethylcyclotetrasiloxane (D4). Aluminum oxycarbonitride can be
deposited from a plasma generated from a mixture of aluminum
tartrate and ammonia. Other combinations of reactants may be chosen
to obtain a desired coating composition. The choice of particular
reactants is within the skills of the artisans. A mixed composition
of the coating is obtained by changing the compositions of the
reactants fed into the reactor chamber during the deposition of
reaction products to form the coating.
[0035] For example, when the coating on a surface is desired to
comprise silicon nitride, the first reactant gas can be ammonia,
and the second reactant gas can be silane. The relative supply
rates of reactant gases are varied during deposition to vary the
composition of the deposited material as the coating is built up.
If oxygen is used as an additional precursor gas, and the mole
fraction of oxygen in the feed gas is increased from zero, the
material deposited on the surface changes from silicon nitride to
silicon oxynitride. As the oxygen mole fraction in the reactant gas
increases, oxygen starts to replace nitrogen in the deposited
material. Compositional and structural changes occur with increase
in oxygen mole fraction, resulting in refractive index modification
as well. Therefore, in this example, refractive index modification
is achieved by varying the mole fraction of a constituent reactant
in the precursor. FIG. 7 shows the variation of refractive index
with variation in oxygen mole fraction, for a precursor composition
including, ammonia and oxygen. For example, if the substantially
organic zone of silicon oxycarbide having a refractive index at 550
nm of about 1.5 is used in the coating, then a substantially
inorganic zone of silicon oxynitride, at an oxygen mole fraction of
about 0.25, is also deposited such that the refractive index of the
inorganic zone matches the refractive index of the substantially
organic zone of silicon oxycarbide, resulting in a barrier coating
of organic-inorganic composition with substantially uniform
refractive index.
[0036] FIG. 7 shows measured optical properties, refractive index
(a) and extinction coefficient (b), of inorganic layers deposited
with varying oxygen mole fraction, obtained by spectroscopic
ellipsometry. In this example, depending on the oxygen mole
fraction in the precursor feed gases, refractive index of the
depositing inorganic material varies from 1.8 to 1.4. Thus, by
selecting a process condition, which results in refractive index of
depositing inorganic material close to that of organic material,
the interference amplitude can be reduced significantly. FIG. 7
also indicates that the extinction coefficient (b) does not change
enough to significantly affect the absorption of light through the
inorganic layers for thicknesses of inorganic layers used in this
invention.
[0037] FIG. 8 shows visible light transmittance spectra through the
barrier coating for different oxygen mole fractions 0.0 (a), 0.25
(b), 0.5 (c), 0.75, (d) and 1.0 (e) in precursor feed gas
calculated using measured optical properties such as refractive
index n and extinction coefficient k. In this example visible light
transmittance with minimum interference fringes are achieved at
about 0.25 oxygen mole fraction indicating that the refractive
index of the inorganic material deposited under this process
condition matches the refractive index of the organic material
deposited
[0038] In another embodiment of the present invention, a region
between the substrate or element with the coating and the coating
is diffuse, such that there is a gradual change from the
composition of the bulk of the substrate or element to the
composition of the portion of the coating. Such a transition
prevents an abrupt change in the composition and mitigates any
chance for delamination of the coating. The gradual change of the
coating composition is achieved by the gradual change of the
precursor composition.
[0039] A further aspect of the invention is a device assembly
comprising a device, at least one surface of which is coated with
at least one barrier coating, the composition of which varies
across the thickness of the coating and has substantially uniform
refractive index along the axis of light transmission. Such device
assemblies include, but are not limited to, liquid crystal
displays, light emitting devices, photo-responsive devices,
integrated circuits and components of medical diagnostic
systems.
[0040] The device assembly may comprise a device disposed on a
flexible substantially transparent substrate, said substrate having
a first substrate surface and a second substrate surface, at least
one of said substrate surface being coated with the barrier coating
of the present invention.
[0041] The barrier coatings of the present invention have many
advantages, including being robust against environmentally reactive
species, having desirable optical properties and being easily
mass-produced. The fundamental advantage of the method of
deposition of the present invention is that it enables concurrent
control of optical and diffusion properties of barrier coatings by
adjusting the deposition parameters. The barrier coatings of the
present invention would be useful as barrier coatings in many
optical and optoelectronic devices including organic light-emitting
devices and organic photovoltaic devices.
[0042] While only certain features of the invention have been
illustrated and described herein, many modifications and changes
will occur to those skilled in the art. It is, therefore, to be
understood that the appended claims are intended to cover all such
modifications and changes as fall within the true spirit of the
invention.
* * * * *