U.S. patent application number 11/975124 was filed with the patent office on 2009-01-08 for device and method for transferring linear movements.
Invention is credited to Karin Siemroth.
Application Number | 20090010772 11/975124 |
Document ID | / |
Family ID | 38739963 |
Filed Date | 2009-01-08 |
United States Patent
Application |
20090010772 |
Kind Code |
A1 |
Siemroth; Karin |
January 8, 2009 |
Device and method for transferring linear movements
Abstract
The invention relates to a device, a method and the use of the
device, for transferring linear movements. The device consists of a
hollow cylinder, in which a pressurized space is found, wherein the
pressurized space is bounded by a connection flange, which is
attached to a terminal opening of the hollow cylinder, and a
movable piston flange, which is applied in a pressure-tight manner
to the inside of the cylinder wall of the hollow cylinder, and
wherein the connection flange and the piston flange are joined
together by means of a reversibly deformable component.
Inventors: |
Siemroth; Karin; (Koenigs
Wusterhausen, DE) |
Correspondence
Address: |
KRIEGSMAN & KRIEGSMAN
30 TURNPIKE ROAD, SUITE 9
SOUTHBOROUGH
MA
01772
US
|
Family ID: |
38739963 |
Appl. No.: |
11/975124 |
Filed: |
October 17, 2007 |
Current U.S.
Class: |
417/400 |
Current CPC
Class: |
H05H 7/00 20130101; G21B
1/17 20130101; Y02E 30/10 20130101; F16J 3/06 20130101 |
Class at
Publication: |
417/400 |
International
Class: |
F04B 35/00 20060101
F04B035/00 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 4, 2007 |
EP |
07075560.8 |
Claims
1. A device for transferring linear movements, consisting of a
hollow cylinder, in which a pressurized space is found, wherein the
pressurized space is bounded by a connection flange, which is
fastened to a terminal opening of hollow cylinder, and a movable
piston flange, which is applied in a pressure-tight manner to the
inside of the cylinder wall of hollow cylinder, and wherein the
connection flange and the piston flange are joined together by
means of a reversibly deformable component.
2. The device according to claim 1, further characterized in that
the reversibly deformable component is completely or partially
comprised of a reversibly deformable material.
3. The device according to claim 1, further characterized in that
the reversibly deformable component is an expansion bellows.
4. The device according to claim 1, further characterized in that
the reversibly deformable component is comprised of at least three
parts, wherein two non-deformable parts are each joined with one
end of a deformable part and one non-deformable part is joined to
the connection flange and the second non-deformable part is joined
to the movable piston flange.
5. The device according to claim 1, further characterized in that
the device can be fastened to a container by means of connection
flange or a terminal end of hollow cylinder.
6. The device according to claim 5, further characterized in that
the container is a vacuum chamber.
7. The device according to claim 1, further characterized in that
connection flange has an opening.
8. The device according to claim 1, further characterized in that
connection flange has an opening.
9. The device according to claim 1, further characterized in that
at least one connection is provided on piston flange.
10. The device according to claim 9, further characterized in that
connection is a screw thread, a plug connection, a bayonet joint, a
screw connection, or another detachable connection.
11. The device according to claim 1, further characterized in that
the piston flange is comprised of a piston and at least one
flange.
12. The device according to claim 1, further characterized in that
cylinder wall of hollow cylinder has a opening in the region of
pressurized space.
13. A method for transferring a linear movement by means of a
device according to claim 1, wherein a movement of piston flange in
hollow cylinder is produced by a change in the pressure ratios in
pressurized space and/or in the inside space of the reversibly
deformable component and/or in the inside space of a container
connected to device.
14. The method according to claim 13, further characterized in that
the changes of the pressure ratios in pressurized space are
produced by introducing or removing a gas or a liquid through
opening in cylinder wall.
15. The method according to claim 13, further characterized in that
the speed and direction of the linear movement are controlled by
adjusting the pressure in pressurized space.
16. The method according to claim 15, further characterized in that
the speed and direction of the linear movement are controlled by
adjusting the pressure in the inside space of the reversibly
deformable component and/or in the inside space of a container
connected to device.
17. A use of device according to claim 1 for transferring linear
movements in vacuum apparatuses.
Description
[0001] The invention relates to a device and a method for
transferring linear movements. In addition, the invention relates
to a use of the device.
[0002] Intervening in a process that takes place in a vacuum
chamber is frequently associated with an adverse effect on the
vacuum in the vacuum chamber.
[0003] A linear movement into a vacuum or out from a vacuum is
possible with a linear motion leadthrough, an expansion bellows, a
pneumatic cylinder, a linear motor and axial guides. Often the
known devices lay claim to a relatively large footprint. Also, the
movement stroke, which is required for a linear motion leadthrough,
an expansion bellows or a cylinder, as well as the structural
length of the individual components are taken into consideration in
the space requirement.
[0004] Another disadvantage of the use of linear motion
leadthroughs is that leakage losses occur with these.
[0005] Linear motors or pneumatic/hydraulic cylinders are suitable
for movements, but not for a relatively long, constant introduction
of forces.
[0006] Also, an additional guide is necessary in order to transfer
forces free of lateral or crosswise forces to an expansion
bellows.
[0007] For the generation of the necessary forces, including forces
that counter air pressure, among others, there are relatively large
pneumatic/hydraulic cylinders or electrical motors, which must be
joined in a structurally complex manner with the expansion bellows
and the vacuum housing.
[0008] The object of the invention is thus to find a simple,
space-saving solution, by means of which linear movements are
transferred to regions of high vacuum with good axial guide
precision and without leakage losses, and a defined holding force
can be introduced over a relatively long time frame.
[0009] The object of the present invention is accomplished by a
device comprising a hollow cylinder, in which a pressurized space
is found, wherein the pressurized space is bounded by a connection
flange, which is attached to a terminal opening of the hollow
cylinder, and a movable piston flange, which is applied in a
pressure-tight manner to the inside of the cylinder wall (inner
lateral surface) of the hollow cylinder, and wherein the connection
flange and the piston flange are joined by means of a reversibly
deformable component in the axial direction.
[0010] An axial guidance is assured by the device according to the
invention.
[0011] The device according to the invention operates in a
leak-free manner. The integrated method of construction has the
advantage that the device possesses a small footprint and is also
easy to construct.
[0012] The reversibly deformable component in the axial direction
is preferably completely comprised or partially comprised of a good
reversibly deformable material. This material makes it possible to
bring about an axial movement of the piston flange in the hollow
cylinder by a longitudinal extension or contraction. The material
must be selected such that it does not cave in on itself due to the
difference in pressure between the pressurized space and the inside
space of the deformable component.
[0013] The inside space, which is formed by the hollow space of the
reversibly deformable component, essentially has the shape of a
cylinder, hexahedron, parallelepiped or prism.
[0014] In a particularly preferred embodiment of the invention, the
reversibly deformable component is an expansion bellows. Expansion
bellows are particularly well suitable for operating in vacuum,
since they barely deform at all except in the desired longitudinal
direction, and well withstand a drop in pressure.
[0015] The reversibly deformable component, however, may also be
constructed of several parts.
[0016] In a preferred embodiment, the reversibly deformable
component is comprised of at least three parts, wherein two
non-deformable parts are each joined with one end of a deformable
part and one non-deformable part is joined to the connection flange
and the second non-deformable part is joined to the movable piston
flange.
[0017] The reversibly deformable component can be extended in the
longitudinal direction and again contracted by means of the
deformable part. The non-deformable, rigid parts serve for
fastening the deformable part of the component to the connection
flange and the piston flange.
[0018] The linear movement is produced by a change in pressure in
the pressurized space. Due to a higher pressure in the pressurized
space, the component or the reversibly deformable part of the
component (for example, an expansion bellows) is extended
longitudinally. If the pressure is reduced, then the component
again contracts.
[0019] An axial movement of the piston flange in the hollow
cylinder, however, may also be invoked by a pressure change in the
inside space of the reversibly deformable component.
[0020] The force for tightening and holding any component in vacuum
can be built up by the atmospheric pressure. The loosening force
necessary for a short time is already produced by a slight
overpressure in the pressurized chamber. The reversibly deformable
component (for example, an expansion bellows) can withstand this
overpressure.
[0021] The device preferably can be fastened to a container by
means of the connection flange or a terminal end of the hollow
cylinder. To do so, the connection flange is attached to the
container by means of welding, bonding, screwing, clamping,
crimping or other suitable fastening possibilities.
[0022] Normally, the connection flange serves for joining the
device to a container. It is also possible, however, that the
device enters into a pressure-tight connection with a container by
one terminal end of the hollow cylinder. Such a connection can join
the container and device by another flange, or can be created by a
rigid installation of the device in or on a container.
[0023] The container is preferably a vacuum chamber.
[0024] The device according to the invention can be easily fastened
to a container by the connection flange, for example, by a screw
connection or a bayonet joint or quarter-turn fastener.
[0025] The connection flange preferably has an (inner) opening,
whereby it is possible to transfer a movement into the container
(or the vacuum chamber).
[0026] A standard flange, for example an ISO K or an ISO CF flange
can be used as the connection flange.
[0027] Linear movements into a vacuum are made possible by the
device according to the invention. It is thus possible to conduct
movements, such as, for example, the actuating of a switch or the
adjusting of a mirror or the tightening of a part, by means of the
device, inside a vacuum chamber. For this, a pin which is attached
to the piston flange and which projects into the container can
serve as the actuator. The pin is guided linearly by the device, by
the movement of the piston flange, and, by changing pressure in the
pressurized space or in the inside space of the deformable
component, can execute movements in the container such as, for
example, actuating a switch or moving samples in the container.
[0028] The piston flange preferably also has an (outer) opening. In
this way, special flanges can be introduced or electrical or other
leadthrough components can be attached.
[0029] At least one connection is preferably provided on the piston
flange, such as, for example, an ISO K or an ISO CF connection.
Flanges suitable for the specific action can be attached to the
piston flange at this connection.
[0030] In addition, the connection makes it possible for additional
equipment to be flange-mounted to the device.
[0031] The flange designations ISO K and ISO CF stand for
standardized connections in specific nominal widths, but individual
flange shapes and flange dimensions may also be used.
[0032] The connection is preferably a screw thread, a plug
connection, a bayonet joint, a screw connection, or another
detachable connection with a vacuum seal.
[0033] The piston flange forms a pressure-tight connection with the
inside of the hollow cylinder. In order to seal the sliding piston
flange, for example, the piston flange is provided with peripheral
grooves, in which O-rings are inserted as gaskets. Other seals with
surfaces that slide over one another may also be used.
[0034] The piston ring of the piston flange can be provided with a
material with good sliding properties for this purpose. The sliding
properties of the piston flange can be positively influenced by the
use of different materials for the piston gaskets. The piston ring
can also be provided with a lubricant.
[0035] The piston flange may also be produced in one piece. The
piston flange, however, preferably consists of a piston and at
least one flange. This two-part or multi-part embodiment of the
piston flange has the advantage that it facilitates maintenance. In
addition, the functionality is thereby increased.
[0036] Piston sealing rings serve for the seal between the piston
of the piston flange and the inside of the hollow cylinder.
[0037] The cylinder wall of the hollow cylinder preferably has an
opening in the region of the pressurized space. A gas or a liquid
can be guided into or out from the pressurized space through this
opening.
[0038] The device according to the invention consists of materials
that are able to withstand the pressure fluctuations occurring in
the device. Steel, particularly stainless steel, is a suitable
material for the hollow cylinder and the flange of the device
according to the invention. Other materials known to the person
skilled in the art, which are suitable for the applications
described herein, for example, plastics such as
polytetrafluorethylene (Teflon.RTM.), metal alloys such as aluminum
or magnesium alloys, and metals such as aluminum can be used for
the production.
[0039] The reversibly deformable component is produced, for
example, from metals such as steel, metal alloys, plastics such as
silicone, rubber and/or other materials suitable for the respective
application.
[0040] The gaskets are produced from metals such as nonferrous
metals, plastics such as silicone, rubber and/or other materials
suitable for the respective application.
[0041] The workpieces of the device according to the invention can
be milled, turned, stamped, extruded, cast or shaped in another way
or can be produced by means of other methods known to the person
skilled in the art.
[0042] In addition, the object of the present invention is
accomplished by a method for transferring a linear movement,
wherein a movement of the piston flange in the hollow cylinder is
produced by a change in the pressure ratios in the pressurized
space and/or in the inside space of the reversibly deformable
component and/or in the inside space of a container connected to
the device.
[0043] The change in the pressure ratios in the pressurized space
is preferably produced by introducing or removing a gas or a liquid
via the opening in the cylinder wall.
[0044] The change in pressure can be conducted by means of a pump.
A gas (for example, air), a gel or a liquid (for example, a
hydraulic oil) can be pumped by means of a pump through the opening
in the cylinder wall of the hollow cylinder into the pressurized
space of the device, whereby the piston flange is moved away from
the container and the reversibly deformable component is extended.
An actuator (e.g., a pin), which is attached directly to the piston
flange or is attached via another flange, or any other flange is
moved with the piston flange and in this way, the desired linear
movement is carried out.
[0045] The speed and direction of the linear movement are
preferably controlled by adjusting the pressure in the pressurized
space. By blowing or pumping the gas or liquid out of the
pressurized space, the pressure in the pressurized space is reduced
and the piston flange moves in the direction of the connection
flange. If the pressure in the pressurized space is increased, the
piston flange moves in the opposite direction (away from the
connection flange). The speed with which the gas or liquid is
pumped into the pressurized space has an influence on the speed at
which the piston flange moves and thus also how rapidly a linear
movement is conducted in the device.
[0046] More preferably, the speed and the direction of linear
movement are controlled by means of adjusting the pressure in the
inside space of the reversibly deformable component and/or in the
inside space of a container connected to the device. By blowing or
pumping the gas or the liquid from the inside space of the
reversibly deformable component and/or from the inside space of a
container connected to the device, the pressure therein is reduced
and the piston flange moves in the direction of the connected
container. If the pressure is increased, the piston flange moves in
the opposite direction (away from the connected container). The
speed with which the gas or the liquid is pumped into the inside
space of the reversibly deformable component and/or in the inside
space of a container connected to the device, has an influence on
the speed at which the piston flange moves and thus also how
rapidly a linear movement is conducted in the device.
[0047] In addition, the object of the present invention is
accomplished by a use of the device according to the invention for
transferring linear movements into vacuum apparatuses, for
example.
[0048] The device according to the invention can thus be used as a
standard component for vacuum leadthroughs for conducting linear
movements.
[0049] The invention will be described in more detail below on the
basis of figures. Taken individually.
[0050] FIG. 1 shows a cross section through a first device
according to the invention,
[0051] FIG. 2 shows a cross section through another embodiment of
the device according to the invention,
[0052] FIG. 3 shows a three-dimensional representation of the
device according to the invention shown in FIG. 2, and
[0053] FIG. 4 shows another three-dimensional representation of the
device according to the invention shown in FIGS. 2 and 3.
[0054] FIG. 1 shows a cross section through a device 1 for
transferring linear movements. Device 1 is comprised of a hollow
cylinder 2 and a component 3 disposed between a connection flange 5
and a piston flange 7; component 3 consists of two non-deformable
parts 11 that are joined together by an expansion bellows 4. In
order to create a pressure-tight connection, the non-deformable
parts 11 are welded to connection flange 5 and piston flange 7
(welds 19). Other connection possibilities, such as screws,
bonding, soldering or crimping are also suitable.
[0055] Connection flange 5 serves for fastening device 1 to a
container (for example, to a vacuum chamber). Connection flange 5
is shaped such that it makes possible a pressure-tight connection
with the vacuum chamber by means of a screw connection, a bayonet
joint or similar means. Further, connection flange 5 is welded to
hollow cylinder 2 (weld 19). Other connection possibilities, such
as bonding, soldering or crimping are also suitable. Embodiments
are also conceivable, however, in which connection flange 5 and
hollow cylinder 2 are joined together by other means, for example,
by a pressure-tight screw connection or a bayonet joint.
[0056] On the inside, connection flange 5 has an opening 14 in the
center. The reversibly deformable component 3 is attached to edge 6
of opening 14. The vacuum-side part 11 of component 3 is joined in
a pressure-tight manner with connection flange 5, for example, by a
welded joint (weld 19). Other connection possibilities, such as
screws, bonding, soldering or crimping are also suitable. It is
also possible, however, that the vacuum-side part 11 of the
reversibly deformable component 3 is a part of connection flange
5.
[0057] The movable piston flange 7 corresponds in its diameter
approximately to that of the inside diameter of hollow cylinder 2,
so that piston flange 7 can be introduced with an accurate fit into
hollow cylinder 2. A pin 8 runs through the center of piston flange
7 until it reaches into a container connected to device 1.
[0058] Piston flange 7 is joined in a pressure-tight manner with
pin 8 and the inside of hollow cylinder 2. For this purpose, pin 8
is welded to piston flange 7 (weld 19). Other connection
possibilities, such as screws, bonding, soldering or crimping are
also suitable.
[0059] On the vacuum side, piston flange 7 is attached to
reversibly deformable component 3. Component 3 can be a part of
piston flange 7 or can be joined reversibly with this flange.
[0060] Expansion bellows 4 is compressed by an underpressure in
pressurized space 16. If an overpressure prevails, then expansion
bellows 4 extends longitudinally, so that the pin guided centrally
through the entire device 1 (expansion bellows cylinder) executes a
linear movement.
[0061] An overpressure or an underpressure can be built up in
pressurized space 16 through opening 10 in cylinder wall 9. A pump
(for example, a vacuum pump) can be connected to opening 10 for
this purpose.
[0062] In addition, device 1 can be controlled by a change in
pressure in the inside space of the deformable component 3. If
device 1 is connected to a container, such as a vacuum chamber, for
example, changes in pressure in the container also lead to a
movement of piston flange 7.
[0063] Therefore, there are two pressurized spaces in which a
movement of piston flange 7 can be executed by pressure
differences.
[0064] The hollow space, which is formed between connection flange
5, piston flange 7, the inside of hollow cylinder 2 and the outside
of the reversibly deformable component 3, forms an outer
pressurized space 16.
[0065] In addition, another hollow space is created by the inside
space of the deformable component 3 and a container connected to
device 1. A movement of the piston flange 7 can also be brought
about by a change in pressure in this hollow space.
[0066] The pressure (or the underpressure), which must be built up
for control in pressurized space 16 and/or in the inside space of
component 3, is dependent on the nature of the device, in
particular the stability of component 3.
[0067] FIG. 2 shows a cross section through another embodiment of
device 1 according to the invention with a connection flange 5 and
a piston flange 7.
[0068] The connection flange 5 shown in FIG. 2 has a recess 18 for
a sealing ring. In this embodiment, the piston flange 7 consists of
a piston 7-1 and a flange 7-2. In the region in which it is applied
to the inside of hollow cylinder 2, piston 7-1 has a piston ring
17, in which O-rings are inserted as gaskets 15. The gaskets create
a pressure-tight connection between piston ring 17 of piston 7-1
and the inside of hollow cylinder 2. Flange 7-2 has a connection 13
for the uptake of another flange 20. This additional flange 20 is
guided coaxially through device 1 by the movement of piston flange
7 in hollow cylinder 2.
[0069] Opening 10 of the embodiment shown in FIG. 2 is extended by
a tube. The tube facilitates the connection of lines, with which
device 1 can be joined to a vacuum pump. For this purpose, the tube
is joined in a pressure-tight manner with cylinder wall 9 of hollow
cylinder 2 by a weld 19.
[0070] FIGS. 3 and 4 show three-dimensional views of device 1. An
opening 10, through which gas or a liquid can be introduced into or
removed from pressurized space 16 is found in the region between
connection flange 5 and piston flange 7 in cylinder wall 9 of
hollow cylinder 2.
[0071] Device 1 with connection flange 5 points toward the viewer
in FIG. 3. In the embodiment shown in FIG. 3, connection flange 5
has a recess 18 for uptake of a sealing ring.
[0072] Device 1 with piston flange 7 points toward the viewer in
FIG. 4. Piston flange 7 consists of a piston 7-1 and a flange
7-2.
[0073] Piston 7-1 forms a pressure-tight connection to the inside
of hollow cylinder 2. On the outwardly directed surface of the
piston, piston 7-1 has connections 13 for fastening another flange
or other devices.
[0074] Flange 7-2 has an opening 12 in its center. The outer
surface of flange 7-2 is provided with connections 13.
[0075] List of Reference Numbers:
[0076] 1 Device for transferring linear movements.
[0077] 2 Hollow cylinder
[0078] 3 (Reversibly deformable) component
[0079] 4 Expansion bellows
[0080] 5 Connection flange
[0081] 6 Edge (of the inner opening)
[0082] 7 Piston flange
[0083] 7-1 Piston
[0084] 7-2 Flange
[0085] 8 Pin
[0086] 9 Cylinder wall
[0087] 10 Opening
[0088] 11 Non-deformable part of component 3
[0089] 12 (Outer) opening
[0090] 13 Connection
[0091] 14 (Inner) opening
[0092] 15 Gasket
[0093] 16 (Outer) pressurized space
[0094] 17 Piston ring
[0095] 18 Recess
[0096] 19 Weld
[0097] 20 Flange
* * * * *