U.S. patent application number 11/795396 was filed with the patent office on 2008-11-06 for automated sputtering target production.
This patent application is currently assigned to Tosoh SMD ETNA, LLC. Invention is credited to Neil D. Bultz, Bobby R. Cosper, John P. Matera, Wiley Zane Reed, Kenneth G. Schmidt, Charles E. Wickersham.
Application Number | 20080271305 11/795396 |
Document ID | / |
Family ID | 36692572 |
Filed Date | 2008-11-06 |
United States Patent
Application |
20080271305 |
Kind Code |
A1 |
Reed; Wiley Zane ; et
al. |
November 6, 2008 |
Automated Sputtering Target Production
Abstract
A system and method are provided for manufacturing a sputtering
target. The system is preferably automated. Sub systems of the
manufacturing system include a robotic part handling sub system, a
weighing sub system adapted to measure the weight of a part to be
manufactured into a sputtering target, and a machining sub system
adapted to finish machine a part to be manufactured into a
sputtering target. The system can further include a cleaning sub
system adapted to clean a part to be manufactured into a sputtering
target, an inspection sub system adapted to measure dimensions of a
part to be manufactured into a sputtering target, and a feedback
control sub system adapted to provide control signals to one or
more of the robotic handling sub system, the weighing sub system,
the cleaning sub system, and the inspection sub system to control
processing performed by one or more of the sub systems.
Inventors: |
Reed; Wiley Zane;
(Greenville, SC) ; Cosper; Bobby R.; (Grove City,
OH) ; Schmidt; Kenneth G.; (Grove City, OH) ;
Bultz; Neil D.; (Grove City, OH) ; Wickersham;
Charles E.; (Grove City, OH) ; Matera; John P.;
(Grove City, OH) |
Correspondence
Address: |
WEGMAN, HESSLER & VANDERBURG
6055 ROCKSIDE WOODS BOULEVARD, SUITE 200
CLEVELAND
OH
44131
US
|
Assignee: |
Tosoh SMD ETNA, LLC
Grove City
OH
|
Family ID: |
36692572 |
Appl. No.: |
11/795396 |
Filed: |
January 18, 2006 |
PCT Filed: |
January 18, 2006 |
PCT NO: |
PCT/US2006/001725 |
371 Date: |
June 23, 2008 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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60644929 |
Jan 19, 2005 |
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60646244 |
Jan 24, 2005 |
|
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60656978 |
Feb 28, 2005 |
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60657054 |
Feb 28, 2005 |
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60656977 |
Feb 28, 2005 |
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60657263 |
Mar 1, 2005 |
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Current U.S.
Class: |
29/563 ;
29/559 |
Current CPC
Class: |
C23C 14/3414 20130101;
G05B 19/418 20130101; Y02P 90/02 20151101; Y02P 90/28 20151101;
Y10T 409/303864 20150115; G05B 2219/32256 20130101; G05B 2219/32283
20130101; Y10T 29/5124 20150115; Y10T 29/5196 20150115; G05B
2219/32244 20130101; G05B 2219/32114 20130101; Y02P 90/20 20151101;
G05B 2219/32304 20130101; Y10T 29/49998 20150115; G05B 2219/31316
20130101; Y02P 90/04 20151101 |
Class at
Publication: |
29/563 ;
29/559 |
International
Class: |
B23Q 39/00 20060101
B23Q039/00 |
Claims
1. An automated system for manufacturing a sputtering target.
2. A system for manufacturing a sputtering target, comprising: a
robotic part handling sub system; a weighing sub system adapted to
measure the weight of a part to be manufactured into a sputtering
target; a machining sub system adapted to finish machine a part to
be manufactured into a sputtering target; a cleaning sub system
adapted to clean a part to be manufactured into a sputtering
target; an inspection sub system adapted to measure dimensions of a
part to be manufactured into a sputtering target; and a feedback
control sub system adapted to provide control signals to one or
more of the robotic part handling sub system, the weighing sub
system, the cleaning sub system, and the inspection sub system to
control processing performed by one or more of the sub systems.
3. The system of claim 2, further including: a computer numerically
controlled machining sub system adapted to finish machine one or
more surfaces of a semi-finished part to be manufactured into a
sputtering target.
4. The system of claim 2, wherein the robotic part handling sub
system comprises a six axis, modular, electric, servo-driven
robot.
5. The system of claim 1, wherein the robotic part handling sub
system comprises a single carriage, heavy duty, floor-mount robot
transport unit.
6. The system of claim 5, wherein the robotic part handling sub
system further comprises a six axis, modular, electric,
servo-driven robot, the robot transport unit transporting the six
axis, modular, electric, servo-driven robot.
7. The system of claim 1, further comprising a product load
station, wherein parts to be manufactured into sputtering targets
are staged and mounted in fixtures adapted to hold the parts during
further processing.
8. The system of claim 7, wherein the product load station
comprises seven universal part fixtures, each adapted to hold a
part to be manufactured into a sputtering target.
9. The system of claim 7, wherein the product load station
comprises a floor supported bridge crane.
10. The system of claim 7, wherein the product load station
comprises a vacuum lifting mechanism.
11. The system of claim 1, wherein the weighing sub system is
adapted to compare the actual measured weight of a part to be
manufactured into a sputtering target with an expected weight for
the part as stored in the feedback control sub system.
12. The system of claim 11, wherein the weighing sub system further
includes a marking device adapted to mark a part to be manufactured
into a sputtering target.
13. The system of claim 1, wherein the cleaning sub system
comprises a degreasing, cleaning, and drying station.
14. The system of claim 1, further including a grit blast station
adapted to etch at least a portion of a part to be manufactured
into a sputtering target.
15. The system of claim 1, further including a coating station
adapted to coat at least a portion of a part to be manufactured
into a sputtering target.
16. The system of claim 1, further including a secondary cleaning
sub system, the secondary cleaning sub system comprising one or
more stations that are provided in a zone separate from a zone that
includes the weighing sub system, the cleaning sub system, and the
inspection sub system.
17. The system of claim 16, wherein the secondary cleaning sub
system comprises an ultrasonic cleaning station, and a nitrogen
clean room station.
18. The system of claim 16, wherein a secondary automatic part
handling sub system is provided for transferring a part to be
manufactured into a sputtering target to and/or between one or more
of the ultrasonic cleaning station and the nitrogen clean room
station.
19. A method of manufacturing a sputtering target, comprising:
gripping a part to be manufactured into a sputtering target using a
robotic part handling apparatus; weighing the part and comparing
the actual weight of the part to an expected weight, determining
whether further processing of the part should be performed based on
the results of comparing the actual weight to the expected weight;
finish machining the part to desired dimensions; cleaning the
finish machined part; and inspecting the finish machined part to
determine conformance of the dimensions of the finish machined part
with desired dimensions.
20. The method of claim 19, further including leak testing the
finish machined and cleaned part.
21. The method of claim 19, further including grit blasting at
least a portion of the part to be manufactured into a sputtering
target.
22. The method of claim 19, further including moving the finish
machined and cleaned part to a secondary cleaning station wherein
further cleaning is performed including one or more of deionized
water cleaning and rinsing, ultrasonic cleaning, and filtered air
blow drying.
23. The method of claim 19, further including: providing a system
controller; providing an input signal to the system controller
indicative of the presence of a part at a desired location for
further processing including one or more of gripping the part,
weighing the part, finish machining the part, and cleaning the
part; and performing the one or more processing operations upon
receiving a control signal from the system controller based on
receipt by the system controller of the input signal indicative of
the presence of the part.
Description
INTRODUCTION
[0001] This application claims the benefit of U.S. Provisional
Patent Application Nos. 60/644,929 filed Jan. 19, 2005; 60/656,978
filed Feb. 28, 2005; 60/657,054 filed Feb. 28, 2005; 60/657,263
filed Mar. 1, 2005; 60/646,244 filed Jan. 24, 2005; and 60/656,977
filed Feb. 28, 2005, all of which are incorporated in their
entirety by reference herein. The present invention relates to a
system and method for manufacturing sputtering targets. The system
is preferably automated in part or in its entirety.
SUMMARY
[0002] According to various embodiments, a system for manufacturing
a sputtering target is provided comprising a plurality of sub
systems that are designed and/or integrated to receive and process
work pieces made from materials suitable for sputtering, for
example, tantalum or niobium. The work pieces can be received
already partially machined or with no prior machining, and the
system according to various embodiments of the present teachings
can provide for further processing to transform the work pieces
into their final form, for use as sputtering targets.
[0003] The system and method according to various embodiments of
the present teachings can process at least two different styles of
product to produce the final sputtering targets. A work piece from
which a sputtering target can be produced can be in the form of a
circular flat disk, and if desired, the circular flat disk can be
supported on a backing plate, wherein the backing plate can provide
a means for holding the work piece during further processing. The
circular flat disk type of work piece can be referred to as "disk
type," and can be obtained in its preliminary machined form from
monolithic or bonded assembly. A second style of work piece that
can be manufactured into a sputtering target can be referred to as
an "HCM" style product, or Hollow Cathode Magnetron style product.
The HCM style product can be in the form of a cylindrically-shaped
work piece, closed at one end, for example, a top-hat shaped work
piece, and can comprise a peripheral flange that can provide a
contact surface for holding the work piece during further
processing without contacting the critical machined surfaces of the
work piece.
[0004] A system for manufacturing a sputtering target, according to
various embodiments, can comprise a plurality of sub systems,
including, but not limited to, a robotic part handling sub system,
a machining sub system, a weighing sub system adapted to measure
the weight of a part to be manufactured into a sputtering target, a
grit blasting and arc spray sub system for applying particle trap
surfaces to the sputtering target, a cleaning sub system adapted to
clean a part to be manufactured into a sputtering target, an
inspection sub system adapted to measure dimensions, surface finish
and cleanliness of a part to be manufactured into a sputtering
target, a helium leak check sub system for testing the vacuum
integrity of the part, a packaging sub system for packaging the
part in an at least class 100 inert gas environment, and a feedback
control sub system adapted to provide control signals to one or
more of the robotic handling sub system, the weighing sub system,
the cleaning sub system, and the inspection sub system to control
processing performed by one or more of the sub systems.
[0005] The sub systems that make up the system according to various
embodiments for manufacturing a sputtering target can be arranged
at various stations, and the stations can be separated into one or
more zones. A first zone can be provided comprising a plurality of
stations, each of which can include a sub system for processing a
work piece that is to be manufactured into a sputtering target.
[0006] A multi-tooled robot on a servo-controlled rail can be
provided to transfer a work piece through a first zone comprising
one or more of the following stations: an on-load station, a
pre-machining weigh station, a computer numerically controlled
machining station adapted to machine the work piece to desired
specifications, a post-machining weighing, marking and
mark-verification station, a degrease cleaning and drying station,
a part transfer station, an ultrasonic thickness measurement and
end effector cleaning station, a helium mass spectrometer leak test
station, a part holding station, an arc spray and grit blast
station, and a part transfer station for transferring the work
piece to a further cleaning zone. The further cleaning zone can
comprise one or more of the following stations: an ultrasonic
cleaning station, a nitrogen clean tunnel system, wherein the
nitrogen clean tunnel system can comprise one or more of a part
drying oven, a part cooling system, a part transfer system, a
cleanliness and surface finish inspection system, a reject
conveyor, and a bagging station.
[0007] Additional features and advantages of the present teachings
will be set forth in part in the description that follows, and in
part will be apparent from the description, or may be learned by
practice of the present teachings. The objectives and other
advantages of the present teachings will be realized and attained
by means of the elements and combinations particularly pointed out
in the description that follows.
[0008] It is to be understood that both the foregoing general
description and the following detailed description are exemplary
and explanatory only and are intended to provide a further
explanation of the present teachings.
DESCRIPTION OF VARIOUS EMBODIMENTS
[0009] A sputtering target manufacturing system according to
various embodiments of the present teachings can comprise a
plurality of sub systems designed and/or integrated to receive
rough formed metal pieces and process them to their final form, as
sputtering targets. Two different styles of product, disk type and
HCM, can be manufactured on the system. The targets can have any
metal purity, texture, shapes, and/or grain size.
[0010] A multi-tooled robot on a servo-controlled rail can transfer
the work in process through Zone 1, which can comprise an on-load
station, a pre-machining weigh station, a CNC machining station, a
post machining weighing, part marking and marking verification
station, a degrease clean and dry station, a part transfer station,
a vacuum cup end effector and stand, an ultrasonic thickness
measurement and end effector cleaning station, a helium mass
spectrometer leak test station, a part holding station, an arc
spray and grit blast station, and a part transfer system adapted to
transfer a work piece from Zone 1 into a Zone 2 that can comprise a
Class 1000 or better Ultrasonic Cleaning Station.
[0011] A series of gantry robots, a class 100 clean room conveyor,
and various lift devices can transfer the work piece through Zone
2, which can comprise the Class 1000 Ultrasonic Cleaning Station,
and a Class 100 or Class 10 Nitrogen Clean Room System. The Class
100 or Class 10 Nitrogen Clean Room System can comprise a part
drying oven, a part cooling section, a part transfer system, a
cleanliness and surface finish inspection, a reject conveyor, and a
bagging station.
[0012] A data management system can be coupled with the
manufacturing system. The data management system can track work in
process, record pertinent data, coordinate the various sub system's
operation and provide an interface for system performance and
operation. The entire system can be designed such that minimal
human intervention is required while insuring safe, reliable, and
repeatable processing of the disk type and HCM products or other
work pieces to be manufactured into finished sputtering
targets.
[0013] The sputtering target manufacturing system according to
various embodiments can be designed and manufactured to allow
automated and/or manual process steps for finishing disk type
components, HCM components, and/or other work pieces suitable for
sputtering targets, wherein inspection and component data tracking
can be performed for all finished products, and one finished
product can be produced approximately every 20 minutes.
[0014] The sputtering target manufacturing line can comprise sub
systems and stations for processing up to four or more basic sizes
of finished product that can include two sizes of disk type parts
and two sizes of HCM parts, with several material variations being
possible within these four basic sizes.
[0015] The disk type parts can be provided to the manufacturing
line according to various embodiments on pallets or other similar
transport devices. The preliminarily machined surface of desired
sputtering material, for example, tantalum or niobium, can be
oriented on the pallet with the machined side up. According to
various embodiments, the disk type parts can be provided to the
manufacturing line pre-machined in order to assure that the surface
of the work piece opposite from the sputtering surface, for
example, a surface comprising copper or an alloy thereof, is
parallel to the sputtering surface to provide a circular disk of
constant thickness. The preliminary machining can include the
complete facing of the copper or copper alloy side opposite from
the sputtering side, and preliminary machining of the final outer
diameter of the part, such that the part does not require removal
from the CNC machine used during the final processing in order to
turn the part around and machine the other side in the CNC machine.
According to various embodiments, the disk type can be machined on
the copper or copper alloy side in an offline process so it does
not need to be flipped in the CNC machining center. The disk type
work piece can be gripped or handled on the outside diameter of a
peripheral flange that can be preliminarily machined into the work
piece. The gripping or handling can be performed using specially
designed gripper jaws or other end effectors, for example, a vacuum
end effector.
[0016] According to various embodiments, the HCM parts can be
provided to the manufacturing line on pallets or other similar
transport devices oriented with the open end of the work piece
facing downward toward the pallet or transport device. The HCM
parts can also be gripped and handled on the outside diameter of a
peripheral flange premachined into the work piece using gripper
jaws or other end effectors, for example, a vacuum end
effector.
[0017] According to various embodiments, parts to be processed
during one shift at an incoming product load station can be
positioned within the loading area, and an operator can utilize a
crane and hoist to transfer the parts from the pallets to locating
fixtures. Once the locating fixtures are loaded the system can be
started and a robot can remove parts from the locating fixtures and
move them to various process stations as required.
[0018] The incoming product load station can comprise a staging
area for incoming product pallets suitable for one shift of plant
production, for example, 7 parts. In this example, seven universal
part fixtures can be provided to stage and position one shift of
production parts for the robotic material handling system. A
powered gravity roller conveyor can be provided to handle rejected
parts, and can be, for example, 10 feet long, to allow parts
rejected within the process to be staged for manual removal. A
floor supported bridge crane workstation can be provided, for
example, with a bridge length of approximately 10 feet and a runway
length of approximately 23 feet, and can be supported using four
corner columns at a height of approximately 12 feet. Total bridge
crane loading capacity can be approximately 2000 Lbs (including
lift hoist, vacuum lift end effector and product). The incoming
product load station can further comprise an electric chain hoist
that can be attached to the bridge crane. The hoist can feature a
lift capacity of approximately 2000 Lbs. One of ordinary skill in
the art will recognize that the number of parts handled during a
shift, the load capacities of handling equipment, and the
dimensions of handling equipment including conveyors and cranes as
referred to in these examples are exemplary only, and are not in
any way limiting on the variety of different shift capacities, load
capacities, and dimensions of the work piece handling equipment,
including cranes and hoists, that can be employed within the scope
of the present teachings. A mechanical vacuum lifting mechanism can
also be provided for handling the work pieces, and can comprise a
compressed air powered vacuum generator and check valve, and a
custom pad attachment and battery powered leak detector. A manually
operated generator can be capable of handling up to approximately a
750-pound lift capacity.
[0019] According to various embodiments, a material handling device
for all stations included in the system outside of a downstream
clean room environment can be, for example, a Fanuc 6 Axis Robot
mounted to a linear robot transport unit (RTU) or rail (for
example, the Fanuc M-900iA series of robots.) The robot on the rail
can utilize a specific end of the arm gripper mechanism to lift and
position disk type or HCM products to and from the various staging
and process stations within the system. In some operations where
the robot can be required to invert the part prior to loading at
the next station, the robot's 6-axis capability along with a
special static invert fixture can be utilized. The fixture can be
designed such that it allows the robot to position and drop off the
part to be inverted in a "vertical axis" orientation in the
fixture, which then allows the robot to reposition itself on the
opposite end of the part for regripping and retrieval. Product
movement in the system can include the loading and unloading of all
sub system equipment with the exception of the operator loading
products to the staging fixtures at the incoming product load
station, which can be handled by the Fanuc robot/RTU system.
[0020] According to various embodiments, the Fanuc M-900iA series
of robots can be engineered for precision, user-friendly setup and
maximum reliability. The robots can be supported by Fanuc's
extensive service and parts network. The M-900iA can be a 6-axis,
modular construction, electric servo-driven robot with a load
capacity of 350 kilograms designed for a variety of manufacturing
and system processes.
[0021] Some desirable features of the Fanuc M-9001A include wrist
design suitability for harsh environments, small robotic footprints
and reduced controller size to conserve space, slim arm and wrist
assemblies to minimize interference with system peripherals and
allow operation in confined spaces, allow wrist moments and
inertias to meet a variety of heavy handling challenges, and ease
of integration and reliability while providing the highest uptime
and productivity. Further features can include longer maintenance
intervals, which can equate to lower operating costs, robust
mechanical design features that can reduce down time, increase mean
time between failure (MTBF) and minimize spare part requirements,
and the use of high performance motion yielding fast cycle times
and high throughput.
[0022] According to various embodiments, features of the Fanuc
M-900iA series of robots can include multiple controller type and
mounting capabilities, a 6 axis of motion, and a slim profile
design. Control of the Fanuc M-900iA series of robots can include a
quick change amplifier (<5 minutes), a fast boot time (<30
seconds), a standard Ethernet Port, a PCMCIA Software distribution,
and easy connections to a variety of I/O, including a number of
distributed I/O networks.
[0023] According to various embodiments, the software of Fanuc
M-900iA series of robots can include processing specific software
packages for various applications, web-based software tools for
remote connectivity, diagnostics and production monitoring, and
machine vision for robot guidance and inspection.
[0024] According to various embodiments, the robotic transfer unit
(RTU) can be a single carriage heavy duty, floor-mount that is
approximately 40-inches wide. The RTU can transport the FANUC
M-900iA robot and related equipment with a maximum static load
rating of less than 6,000-lbs. including robot, payload, and
peripherals. A center mounted cable carrier is included.
[0025] According to various embodiments, the end effector for the
system can include a custom designed product specific part gripper
assembly, one for both disk type and HCM products. The end effector
can contain various active and static tooling features such as a
direct current electric powered linear actuator, a vacuum holding
device, and a fixed reference tooling feature to perform the
gripping, locating, and holding functions as required during the
loading and unloading of products within the system. The end
effector can be designed to accommodate all sizes of parts in the
part families. The end effector's gripping and locating mechanisms
can allow it to grip the parts from either the top or the bottom as
needed for machine tool loading/unloading, invert over mechanism
loading/unloading, and other process equipment loading/unloading
requirements.
[0026] According to various embodiments, a further sub system can
comprise a weighing station, wherein the weighing station can
comprise a scale that can be used to weigh each part as they first
enter the system prior to loading for the next operation in both
disk type and HCM products. The scale can compare the actual weight
of the selected part with the expected correct raw part weight
stored within the system controller. Acceptable parts are sent on
for further processing by the system. In the event of an improperly
positioned part by the operator, the scale can identify the
incorrect part and can signal the robot to reject the part.
[0027] According to various embodiments, the weighing station can
comprise a Cardinal Floor Hugger scale mounted to the plant floor
close to the incoming product load station. The Cardinal scale can
have a platform size of 3 feet.times.3 feet with output graduations
in increments of 0.2 lbs. The scale features can include a smooth
top plate, four hermetically sealed stainless steel load cells,
trim resistors for section sealing in addition to calibration
adjustments in weight displays, self-checking load cells, and
adjustable leveling feet mounted to each load cell. The scale can
be equipped with an indicator type operator display and can include
an interface card to allow communication with the control system.
Parts can be placed into and retrieved from nest fixtures attached
to the scale top plate by the robot. It can be assumed that raw
part weights for all products, styles, sizes, and materials differ
by a sufficient amount to allow the scale to detect an incorrect
product part when weighed.
[0028] According to various embodiments, an impact printer can also
be provided, wherein the printer can be adapted to engrave a
desired word, for example, "CABOT", a desired logo, the customer
part number, the revision, and the serial number. A Telesis single
pin impact printer can include a 11/2''.times.21/2'' marking window
capable of dot matrix characters in a variety of sizes and styles
with dot density from about 10 to 200 dots per inch and can be held
in position by a robot. Disk type parts can be marked on the back
and HCM parts can be marked on the circumference of the flange.
[0029] According to various embodiments, a further downstream sub
system can comprise a degrease and clean station and a drying
station that can accept both disk type and HCM parts from upstream
computer numerically controlled machining centers and can process
them one at a time to remove residual cutting fluids, chips and
other debris from the machining process. An example of a desirable
degrease and clean station and drying station is the Alliance
"Aquamate SF", which is a top loading cabinet-style part cleaning
system designed for batch processing for low volume parts cleaning.
The SF-Series can offer easy top loading. A canopy can be hinged at
the rear of the machine. When open, the front edge of the canopy
can be beyond the center of a turntable, allowing a part to be
loaded/unloaded by the material-handling robot for fast efficient
cleaning. The part can be stationery and a spray nozzle can move
around the part to perform the degreasing and cleaning. An air
knife can be provided to pass over the part after cleaning for
drying of the part. The custom top loading type cabinet washer can
include stainless steel construction, automatic canopy opening and
closing, multiple spray nozzle cleaning, full cascade rinse, and
heated air blow-off cycles. The corrosion-resistant spray system
can feature an adjustable "clip-on" nozzle for easy maintenance, a
vertical seal less pump, auto-fill piping, and a level control with
low water safety shut-off. The system can feature a recirculating
wash and rinse pump system with solution filtration and can
incorporate removable strainer baskets and filter screens for 100%
filtration of all solutions. The Alliance system can be a
stand-alone system controlled by an Allen Bradley programmable
logic controller (PLC) with communication to the main system
controller. Control panels can be NEMA 12, designed and assembled
to meet NEC standards.
[0030] According to various embodiments, a leak test station can be
provided at which an helium mass spectrometer leak test can be
performed on all HCM parts to detect leak paths through the flange
welds of all finished machined HCM parts. The station can consist
of an HCM specific leak test fixture/chamber designed to
accommodate both sizes of HCM parts, at least one Varian Helium
Leak Detector instrument, and an appropriate pump, valve, pressure
transducer, and regulator to connect the leak test circuitry to the
test fixture/chamber. A blower can be connected to the test circuit
and fixture/chamber and can be utilized to purge remaining helium
from test circuits and fixture/chamber areas following the test
cycle. Test fixture/chamber can utilize o-ring seal designs for
sealing the test chamber on the HCM parts. Additionally, the HMS
test equipment can be integrated to a machine frame to provide a
complete test cell. The HMS Leak Test station can be a stand-alone
system controlled by an Allen Bradley PLC with communication to the
main system controller.
[0031] The helium mass spectrometer leak test system can also be
used to test the vacuum integrity of the o-ring seal on the disk
type or HCM style parts.
[0032] According to various embodiments, dimensional inspection can
be performed on all disk type and HCM parts for conformance to part
geometry and tolerance of all finished machined parts. The Mitutoyo
CMM Machine can have a work cell range to accommodate all 7 parts
and uses the latest technologies.
[0033] According to various embodiments, the CMM System can
communicate with an electronic device through Digital I/O and file
outputs in the system database. Additionally, a custom fixture can
be mounted to the CMM table to accept the part for measurement.
[0034] According to various embodiments, a further downstream
processing station can be provided with a grit blast machine that
can be designed to automatically etch the outer flange area of the
work pieces (disk type parts and HCM parts.) The machine
configuration can include an acoustical steel cabinet to enclose
the grit blast process. Mounted on the front of the grit blast
cabinet can be a vertical sliding door. This fixture can
automatically open access to the cabinet for part loading and
retract to remove parts once the cycle is completed. The part
fixtures can include a spindle fixture that rotates the parts
during the grit blast process. According to various embodiments,
the machine controller can send a signal to the machine to indicate
what style part is to be processed. The part to be grit blasted can
be placed into the fixture by the robot end effector. When the part
is properly loaded onto the fixture a separate Fanuc LR Mate robot
will then load the required masking. The fixture can begin to
rotate and the grit blast nozzle can be turned on to etch the
flange area of the part. When grit blasting is complete, the media
flow to the nozzle can be turned off and compressed air can be used
to remove residual abrasive from the part. After the part is blown
off, the spindle rotation stops and the door opens. The Fanuc M16i
overhead robot can remove the masking, and a second blow off
operation can be completed. Spent media can be blown off the parts
before the parts are unloaded from the cabinet. The M900i robot on
the rail can remove the finished part from the fixture.
[0035] According to various embodiments, the grit blast machine can
provide the most uniform and reliable blasting performance
possible. Spent media can be recovered pneumatically from the
hopper-shaped floor of the cabinet. A cyclone can remove the fines
and dust from the reclaimed media. A screening system can be used
to insure that a consistent media size is always provided to the
blast nozzles. The grit flow rate to the blast nozzle can be
monitored and the air pressure to the blast nozzle can be
closed-loop controlled. As media breaks down from the blast process
it can be replenished with new media. An Allen Bradley PLC can be
provided to control the operation of the machine. The operator
interface can be a monitor connected to the controller.
[0036] According to various embodiments, a further downstream
station can be provided comprising an arc spray machine that can be
designed to automatically apply an aluminum coating or other
coating to the outer flange of a work piece, for example, the disk
type parts. The arc spray machine can operate very much the same as
the grit blast machine. A vertical door can open to allow parts in
and out of the machine. When the parts are in the machine's
fixture, they rotate beneath an arc spray gun for a precise amount
of time to build up the proper coating. When the arc spray process
is complete the parts are unloaded with a robot. As with the grit
blast machine, the arc spray machine can be controlled with an
Allen Bradley PLC. The masking can be loaded and unloaded
automatically as described in the grit blast section.
[0037] According to various embodiments, a further downstream zone
comprising a downstream cleaning sub system can comprise equipment
sections, stations, and positions inside a nitrogen tunnel/clean
room portion of the system which can include the nitrogen tunnel
with its entrance and exit antechambers. A Portable 1000 Clean Room
with an ultrasonic cleaning system can include a cleaning section
for an ultrasonic bath with laminar flow, including a Lexan side
wall, a support structure, a door, and a HEPA filtration with
monitoring. Products can enter the nitrogen tunnel system and
travel through a cleaning process that can comprise a four station
cleaning system of three deionized (D.I.) water cleaning and rinse
tanks plus a filtered air blow off tank. Both disk type and HCM
parts can be retrieved from the conveyor by the gantry robot and
submerged in the Ambient Water Rinse Tank with D.I. water. The
gantry robot can then move the part into the ultrasonic cleaning
tank for a specified time period. After removal from the ultrasonic
tank, the gantry robot can move the part to a heated rinse tank.
The part can be placed into the air blow dry tank by the gantry
robot. Filtered air can be used to blow the part dry. Part
orientation during the cleaning process can be maintained to
maximize draining and minimize water capture, and the part can be
repositioned back onto the conveyor travel position after blow
drying by the gantry robot. The cleaning equipment can be enclosed
in the portable Clean Room with the internal environment equaling a
class 1000 (or better) cleanroom. Transport of the parts from
process to process as listed above can be by a Gantry Robot system
equipped with a custom end effector to grip the outside diameter of
the peripheral flange on the parts. Parts returning to the conveyor
transport system enter the drying oven section of the nitrogen
tunnel following the blow-dry cycle for a 2 hour drying process.
The ultrasonic cleaning tank section can comprise a first station:
ambient D.I. Water Rinse with an approximate tank size of 30''
Front to Back.times.32'' Left to Right.times.34'' deep, 4-sided
overflow weir, a resistivity monitor with an alarm, a cove corner,
and a sanitary heat exchanger to cool water before entering the
tank. The ultrasonic cleaning tank section can further include a
second station comprising: hot temperature ultrasonic cleaning with
an approximate tank size of 30'' Front to Back.times.32'' Left to
Right.times.34'' deep, 40 KHz Ultrasonic, a 4-Sided overflow weir,
a low level safety, an overtemp safety, a resistivity monitor with
alarm, and cove corners. The ultrasonic cleaning tank section can
further include a third station comprising: hot D.I. water rinse
with an approximate tank size of 30'' Front to Back.times.32'' Left
to Right.times.34'' deep, a 4-sided overflow weir, a resistivity
monitor with alarm, and cove corners. The ultrasonic cleaning tank
section can further include a fourth station comprising: filtered
air blow dry with parallel opposed blow-off headers.
[0038] According to various embodiments, a nitrogen tunnel can be
utilized to enclose a portion of a process line that can be
specified as a class 100 clean room classification. The nitrogen
tunnel can utilize a sliding door type entry and exit section, and
a section barrier entry door as required to separate and maintain
minimal cross contamination between various process chambers, while
allowing part movement between the different process sections. The
nitrogen tunnel can be a custom designed system that can enclose a
Nitrogen Tunnel Conveyor System, a Drying Oven, one or more
Nitrogen Tunnel Gantry Systems, a Cleanliness Inspection, a Surface
Finish Inspection Station, and a Nitrogen Tunnel Bagging Section.
The Drying Oven section can incorporate the Nitrogen Tunnel
equipment providing filtered nitrogen at .gtoreq.77 Degrees C. (170
Degrees F.) for at least two hours. The nitrogen tunnel can include
an automatic door to the drying oven, a drying oven chamber that
can include a laminar flow and all associated components, and an
exit chamber door from the drying oven. The nitrogen tunnel can
further include a cooling section for cooling parts with laminar
flow, an inspection and handling that can include a nitrogen purge,
a box, a plate, and an antistatic window. The nitrogen tunnel can
further include an exit ante-chamber for rejected parts, a bagging
station Glove Box with laminar flow that includes boxes, plates and
antistatic windows, an exit ante-chamber door for good parts, an
environmental control for the entire nitrogen tunnel system, and an
Nitrogen Tunnel Conveyor System.
[0039] According to various embodiments, Clean Room Rated Conveyor
sections can be used to transport parts, both disk type and HCM
into, through, and out of the nitrogen tunnel/clean room portion of
the system allowing the parts to ride directly on the conveyor
rollers without the use of any part pallets or fixtures. The
Slip-Torque conveyor units can provide transportation of disk type
and HCM products, in a single lane, for instance, at a conveyor
speed of approximately 10 feet per minute and a rate of 3 parts per
hour. Other speeds can be used.
[0040] According to various embodiments, the conveyor units can be
utilized inside the nitrogen tunnel including Shuttleworth's
Slip-Trak, class 100 clean room, chain driven conveyor, and can
further include an extruded aluminum frame, a solid black 21 mm
roller on 22.7 mm center, and an aluminum bushing cover. A
Slip-Trak, class 100 clean room conveyor with additional components
to meet the preferred 170 degree F. specification can be located in
the drying oven portion of the nitrogen tunnel.
[0041] According to various embodiments, the Nitrogen Tunnel Gantry
can consist of two separate gantry robots, one for transporting
parts through the Ultrasonic Cleaning Section, and one to transport
parts through the Cleanliness and Surface Inspection area. Both
Gantry Systems can incorporate the use of several Servo Driven
clean room motors for most of the linear motion in the system. The
custom end effector tooling can be designed to grip the outside
diameter of the flange on the parts. The second gantry located near
the Cleanliness and Surface Finish Inspection can be the same style
construction as the one utilized in the Ultrasonic Cleaning area.
The sizing of the unit varies however. Disk type and HCM products
can exit the cooling section and can be positioned for pick up by
the second gantry robot. The parts can be lifted from the conveyor
using a vacuum end effector and placed onto the inspection fixture.
The inspection process first inspects the part for Cleanliness, and
then performs a Surface Finish Inspection.
[0042] According to various embodiments, the Cleanliness Inspection
can consist of two identical sets of cleanliness inspection
equipment, one positioned over the fixture to inspect the tantalum
(or other metal) area of the disk type parts from above, and one
positioned under the fixture to inspect the tantalum (or other
metal) area inside the HCM "Bowl" from below the fixture. The
inspection process can illuminate the part surface with the
ultraviolet light source using the vision inspection camera with a
fixed focal length lens inspecting for "Unclean Areas" on the
metal. The two sets of cleanliness inspection equipment can
comprise a UV light source that can be mounted to illuminate as
evenly as possible the tantalum (or other metal) surface of the
part from a fixed rigid mounting position along with a vision
inspection camera that can be positioned to focus on as much as
possible the subject area of the tantalum (or other metal) surface
from a fixed rigid mounting position.
[0043] According to various embodiments, the Surface Finish
Inspection equipment can utilize the same part fixture and can be
initiated following a satisfactory cleanliness inspection process.
Surface Finish of the parts can be checked using a finish
inspection probe mounted on a three axis slide with a rotary
actuator; one for the probe can be over the fixture to inspect the
tantalum (or other metal) area of the disk type parts from above,
and in the second position one can be under the fixture to inspect
the vertical wall of the tantalum (or other metal) area inside the
HCM "Bowl" from below the fixture. The surface finish inspection
probe can be mounted to multi axis programmable servo driven linear
slides to move the inspection probe into and out of the inspection
area so as to not interfere with the previous cleanliness
inspection process.
[0044] An alternative method of conducting the cleanliness
inspection can be to use a laser and measure the specular and
diffuse reflectance from the sputtering target surface. This same
technique is used to inspect particle contamination on silicon
wafers in the integrated circuit manufacturing process. KLM Tencor
manufactures this type of equipment for silicon wafer
inspection.
[0045] A further alternative method for cleanliness inspection is
to use a vacuum device to pull air and particles from the surface
and measure the particle content in the air stream.
[0046] The ultraviolet method for cleanliness inspection has an
inherent speed advantage over the alternative methods.
[0047] According to various embodiments, acceptable parts are
transferred by the gantry robot to the conveyor going to the
Nitrogen Tunnel Bagging Section upon completion of the surface
finish inspection while rejects are placed on the conveyor to the
reject discharge "antechamber" and out of the nitrogen tunnel for
manual removal from the system.
[0048] According to various embodiments, the Nitrogen Tunnel
Bagging Section can be a nitrogen tunnel fitted with a glove box on
two sides and can be used to manually place finished acceptable
disk type and HCM parts into first an inner clean shipping bag and
second an outer clean shipping bag to provide a double bagged
finish part prior to the part exiting the Nitrogen Tunnel. The
acceptable parts can enter the bagging section of the nitrogen
tunnel via the Slip Trac conveyor after passing both final
inspections. The part can be positioned at the first bagging
station where a lift device elevates the part off of the conveyor
surface. The operators can retrieve a bag from a supply of bags
placed previously inside the tunnel, and working through the glove
box, slip the bag material over the part and the lift device. The
bag can be placed on the lift device, vacuum heat sealed, returned
to the conveyor, and transferred off of and away from the lift
device to a second position. The operator can position the open end
of the bag for sealing and actuate the bag sealer to complete the
first layer of bagging. The part and bag can travel to the first
lift device and then the process can be repeated over the inner
bag. The completed part with double bags can travel through the
exit "Antechamber" to the unload position for removal from the
system and loading to the final shipping container.
[0049] According to various embodiments, the automated process
equipment at each station can be mounted on heavy-duty steel bases
(e.g., hot rolled) and component risers as necessary. The steel
bases can provide a solid mounting and reference surface to build
up the custom equipment required at each station. The mounting base
tops and other impact surfaces can be blanchard ground,
shot-peened, and/or painted as the application allows or blanchard
ground and plated and/or clad as the application demands. (Such
demands are typically due to size limitations or constant exposure
to substances that can be "caustic" to painted surfaces).
[0050] According to various embodiments, other custom fabricated
metal components can be appropriately coated to prevent oxidation
and wear. One or more of a variety of coatings, for example, paint,
black oxide, anodization, electroless nickel, flash chrome, or thin
dense chrome can be used. Hardened steel touch tooling or wear
surfaces can be plated with thin dense chrome (TDC), which can
produce a very hard-finished surface (approximately Rockwell #C70).
Equipment mounting structures can be painted to any
specifications.
[0051] According to various embodiments, all system programs can be
coded according to Advanced Automation's strict coding standards in
a modular format. By following this standard, each program (and its
subroutines) can be formatted as a logical "state-machine", a
programming style that produces easy to understand, logically
flowing sequences. Using this method can improve the readability
and ease of maintenance of the code.
[0052] According to various embodiments, the machine logic can be
implemented as an event-based rather than time-based control
algorithm. Automated equipment can include feedback sensors to
verify performance of scheduled actions. For instance, grippers do
not close until a pick-and-place downstroke can be completed and a
component can be present in the fixture. As a matter of design
practice, systems typically can include sensors at both ends of an
actuation, extending positions to make sure they got there, and
then retracting positions to make sure they come back. Sensors can
include verifying that parts can be present in escapements and
grippers only when they should be. Sequencing failures can be thus
diagnosed and reported.
[0053] According to various embodiments, sub-supplier equipment can
be programmed according to their internal standards, and preferably
has common interface with the rest of the system. All sub-supplier
equipment can be "slaved" to the "zone controllers" provided by
Advanced Automation.
[0054] According to various embodiments, the system can be built
with controls-interlocked guarding to ensure personnel safety
during operation, generally using safety rated keyed interlock
switch components with solenoid latching. Interlock switches can be
generally used in conjunction with physical barrier guard
structures. Physical barrier-type guarding can be constructed from
painted steel or extruded aluminum strut structures with either
Lexan polycarbonate or wire mesh panels. System guarding can comply
with relevant OSHA, ANSI-RIA, and other regulatory agency
requirements for this type of equipment.
[0055] Applicants specifically incorporate the entire contents of
all cited references in this disclosure. Further, when an amount,
concentration, or other value or parameter is given as either a
range, preferred range, or a list of upper preferable values and
lower preferable values, this is to be understood as specifically
disclosing all ranges formed from any pair of any upper range limit
or preferred value and any lower range limit or preferred value,
regardless of whether ranges are separately disclosed. Where a
range of numerical values is recited herein, unless otherwise
stated, the range is intended to include the endpoints thereof, and
all integers and fractions within the range. It is not intended
that the scope of the invention be limited to the specific values
recited when defining a range.
[0056] Other embodiments of the present invention will be apparent
to those skilled in the art from consideration of the present
specification and practice of the present invention disclosed
herein. It is intended that the present specification and examples
be considered as exemplary only with a true scope and spirit of the
invention being indicated by the following claims and equivalents
thereof.
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