U.S. patent application number 10/562463 was filed with the patent office on 2008-08-14 for motion imparting device.
This patent application is currently assigned to TECHNION RESEARCH & DEVELOPMENT FOUNDATION LTD.. Invention is credited to Samy Abu-Salih, David Elata.
Application Number | 20080193307 10/562463 |
Document ID | / |
Family ID | 33539342 |
Filed Date | 2008-08-14 |
United States Patent
Application |
20080193307 |
Kind Code |
A1 |
Elata; David ; et
al. |
August 14, 2008 |
Motion Imparting Device
Abstract
A device for inducing motion on fluids or solids. The device
comprising: a structure with a deformable sheet compressed to form
a structural wave; and a actuator for actuating the deformable
sheet and driving the structural wave in a predetermined
manner.
Inventors: |
Elata; David; (Palo Alto,
CA) ; Abu-Salih; Samy; (Sakhnin, IL) |
Correspondence
Address: |
Pearl Cohen Zedek Latzer, LLP
1500 Broadway, 12th Floor
New York
NY
10036
US
|
Assignee: |
TECHNION RESEARCH & DEVELOPMENT
FOUNDATION LTD.
Haifa
IL
|
Family ID: |
33539342 |
Appl. No.: |
10/562463 |
Filed: |
June 24, 2004 |
PCT Filed: |
June 24, 2004 |
PCT NO: |
PCT/IL2004/000562 |
371 Date: |
February 19, 2008 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
60482296 |
Jun 25, 2003 |
|
|
|
Current U.S.
Class: |
417/474 ;
417/53 |
Current CPC
Class: |
F04B 19/006 20130101;
F04B 43/1223 20130101 |
Class at
Publication: |
417/474 ;
417/53 |
International
Class: |
F04B 19/00 20060101
F04B019/00; F04B 43/08 20060101 F04B043/08 |
Claims
1. A device for inducing motion on fluids or solids, the device
comprising: a structure with a deformable sheet compressed to form
a structural wave; and an actuator for actuating the deformable
sheet and driving the structural wave in a predetermined
manner.
2. The device of claim 1, wherein the deformable sheet is a
deformable plate, peripherally supported by a frame.
3. The device of claim 1, wherein the deformable sheet is a
beam.
4. The device of claim 3, wherein the beam is coupled to an elastic
foundation.
5. The device of claim 1, wherein a first wall is provided against
the deformable sheet so as to define a first conduit between the
first wall and the deformable sheet.
6. The device of claim 5, wherein the first conduit is provided
with an inlet and an outlet.
7. The device of claim 5, further provided with a second wall
positioned opposite the first wall, with the deformable sheet
between the walls, the second wall defining a second conduit
between the second wall and the deformable sheet.
8. The device of claim 7, wherein the second conduit is provided
with an inlet and an outlet.
9. The device of claim 1, wherein the actuator is selected from the
group consisting of electrostatic actuators, piezoelectric
actuators, thermoelastic actuators and magnetic actuators.
10. The device of claim 1, wherein at least some of the device is
made from silicon.
11. A method for inducing motion on fluids or solids, the method
comprising: providing a structure with a deformable sheet formed to
present a structural wave; and displacing the structural wave,
thereby imparting displacing forces on a adjacent fluid or
solid.
12. The method of claim 11, wherein the actuator is operated to
continuously displace the structural waves.
13. The method of claim 11, wherein the deformable sheet is
deformed using a peripherally supporting frame.
14. The method of claim 11, using a beam as the deformable
sheet.
15. The device of claim 14, wherein the beam is coupled to an
elastic foundation.
16. The method of claim 11, further comprising providing a first
wall against the deformable sheet so as to define a first conduit
between the first wall and the deformable sheet.
17. The method of claim 16, further comprising providing the first
conduit with an inlet and an outlet.
18. The method of claim 16, further comprising providing a second
wall positioned opposite the first wall, with the deformable sheet
between the walls, the second wall defining a second conduit
between the second wall and the deformable sheet.
19. The method of claim 18, further comprising providing the second
conduit with an inlet and an outlet.
20. The method of claim 11, wherein actuation of the deformable
sheet is selected from the group consisting of electrostatic
actuation, piezoelectric actuation, thermoelastic actuation and
magnetic actuation.
21-22. (canceled)
Description
FIELD OF THE INVENTION
[0001] The invention relates to a novel method and device for
imparting motion to fluids and solids at arbitrary rates with high
efficiency.
BACKGROUND OF THE INVENTION
[0002] Micro-pump devices are essential building blocks in MEMS and
BIO-MEMS technology. Many state-of-the-art micro-pump devices are
based on a deformable element (e.g., plate or membrane) that
vibrates periodically. The deflections of the deformable element
are utilized to induce motion in confined fluids, often with the
assistance of valves. To ensure sufficiently large deflections,
these devices are operated at the resonance frequency of the
system. In other operation frequencies, the achievable deformation
is much lower, and much of the supplied power is invested in
deforming the structure.
[0003] Furthermore, in the current state-of-the-art methods,
achieving high pressure requires the use of a series of separate
pumping chambers that successively increase the fluid pressure.
This is due to the limitations on pressure increase attainable in
each pumping chamber.
BRIEF DESCRIPTION OF THE INVENTION
[0004] There is thus provided, in accordance with some preferred
embodiments of the present invention, a device for inducing motion
on fluids or solids, the device comprising:
a structure with a deformable sheet compressed to form a structural
wave; and a actuator for actuating the deformable sheet and driving
the structural wave in a predetermined manner.
[0005] Furthermore, in accordance with some preferred embodiments
of the present invention, the deformable sheet is a deformable
plate, peripherally supported by a frame.
[0006] Furthermore, in accordance with some preferred embodiments
of the present invention, the deformable sheet is a beam.
[0007] Furthermore, in accordance with some preferred embodiments
of the present invention, the beam is coupled to an elastic
foundation.
[0008] Furthermore, in accordance with some preferred embodiments
of the present invention, a first wall is provided against the
deformable sheet so as to define a first conduit between the first
wall and the deformable sheet.
[0009] Furthermore, in accordance with some preferred embodiments
of the present invention, the first conduit is provided with an
inlet and an outlet.
[0010] Furthermore, in accordance with some preferred embodiments
of the present invention, the device is further provided with a
second wall positioned opposite the first wall, with the deformable
sheet between the walls, the second wall defining a second conduit
between the second wall and the deformable sheet.
[0011] Furthermore, in accordance with some preferred embodiments
of the present invention, the second conduit is provided with an
inlet and an outlet.
[0012] Furthermore, in accordance with some preferred embodiments
of the present invention, the actuator is selected from the group
including: electrostatic actuators, piezoelectric actuators,
thermoelastic actuators and magnetic actuators.
[0013] Furthermore, in accordance with some preferred embodiments
of the present invention, some or all of the device is made from
silicon.
[0014] Furthermore, in accordance with some preferred embodiments
of the present invention, there is provided a method for inducing
motion on fluids or solids, the method comprising:
providing a structure with a deformable sheet formed to present a
structural wave, displacing the structural wave, thereby imparting
displacing forces on a adjacent fluid or solid.
[0015] Furthermore, in accordance with some preferred embodiments
of the present invention, the actuator is operated to continuously
displace the structural waves.
[0016] Furthermore, in accordance with some preferred embodiments
of the present invention, the deformable sheet is a deformed using
a peripherally supporting frame.
[0017] Furthermore, in accordance with some preferred embodiments
of the present invention, actuation of the deformable sheet is
selected from the group containing: electrostatic actuation,
piezoelectric actuation, thermoelastic actuation and magnetic
actuation.
BRIEF DESCRIPTION OF PREFERRED EMBODIMENTS
[0018] In order to better understand the present invention, and
appreciate its practical applications, the following Figures are
provided and referenced hereafter. It should be noted that the
Figures are given as examples only and in no way limit the scope of
the invention. Like components are denoted by like reference
numerals.
[0019] FIG. 1a illustrates a structural wave formed on a clamped
plate of a micro-device, in accordance with a unilateral preferred
embodiment of the present invention.
[0020] FIG. 1b is a cross-sectional view of a unilateral micro-pump
device, in accordance with a preferred embodiment of the present
invention, illustrating an induced traveling structural wave.
[0021] FIG. 1c is a cross-sectional view of a bilateral micro-pump
device, in accordance with a preferred embodiment of the present
invention, illustrating an induced traveling structural wave.
[0022] FIG. 2a illustrates a structural wave bonded to an elastic
foundation.
[0023] FIG. 2b is cross-sectional view of a micro-pump device in
accordance with another preferred embodiment of the present
invention, incorporating an elastic foundation.
[0024] FIG. 3 is a cross-sectional view of a micro-pump device in
accordance with another preferred embodiment of the present
invention, incorporating electrostatic actuation.
[0025] FIG. 4 illustrates a pre-buckled circular plate suitable for
incorporation with a micro-pump device in accordance with another
preferred embodiment of the present invention.
[0026] FIG. 5 is a micro-pump device in accordance with another
preferred embodiment of the present invention, used for inducing
motion in solids.
DESCRIPTION OF THE PRESENT INVENTION
[0027] An aspect of the present invention is the provision of a
micro-device, which employs buckling of a deformable structure in
the form of a sheet, so as to induce a traveling wave on the
sheet.
[0028] Another aspect of the present invention is the utilization
of the traveling wave induced on the deformable sheet to impart
motion to fluids or solids.
[0029] In the novel pumping method and apparatus of the present
invention described herein, large deflections of the deformable
element are achieved by means of buckling induced by compressive
stress. Due to the buckling, deflection waves are generated in the
deformable structure. For specific geometries of the system, these
deflection waves can be continuously displaced. This displacement
requires minimal power because the waves are already formed and
only need to be relocated along the structure. The displacement of
the structural waves can be achieved using various actuation
methods (e.g., electrostatic, piezoelectric, magnetic and
other).
[0030] The displacement of these structural waves can be used to
induce motion in surrounding or confined fluids, to increase the
pressure of confined fluids, and to displace solids that are in
contact with the structural waves. In these applications, most of
the power is directly invested to induce the flow, increase the
pressure, or to accelerate solids, respectively.
[0031] In this invention the generation of elastic structural waves
is separate and independent of the process of displacing these
waves.
[0032] According to the new method of the present invention the
device can be operated at any frequency without significantly
affecting its efficiency. Accordingly, the device is not restricted
to operate in any resonance frequency. Most of the power consumed
by the device is directly invested in overcoming the drag forces in
the pumped fluid, in increasing the fluid pressure, or in
accelerating solids (depending on application).
[0033] Furthermore, achieving high pressure only requires the use
of a longer deformable element with more structural waves. This
eliminates the necessity to use a succession of many pumping
chambers (with all the valves that separate each chamber from its
neighbors).
[0034] Reference is now made to the accompanying figures.
[0035] FIG. 1a illustrates a structural wave formed on a clamped
plate of a micro-device, in accordance with a unilateral preferred
embodiment of the present invention.
[0036] FIG. 1b is a cross-sectional view of a unilateral micro-pump
device, in accordance with a preferred embodiment of the present
invention, illustrating an induced traveling structural wave. A
micro-pump device, generally denoted by numeral 10 comprises a
deformable plate 12, which is subjected to peripheral compressing
forces inflicted by frame 14, thus producing a wave structure on
the deformable plate. A wall 16 is provided, defining a conduit
between the plate and the wall, leaving two opposite openings
(outlet and inlet).
[0037] FIG. 1c is a cross-sectional view of a bilateral micro-pump
device, in accordance with a preferred embodiment of the present
invention, illustrating an induced traveling structural wave Here
an additional wall 17 is provided opposite the wall 16, encasing
the deformable plate 12. In this way fluids are pumped via twin
inlets and through to twin outlets.
[0038] FIG. 2a illustrates a structural wave bonded to an elastic
foundation.
[0039] FIG. 2b is cross-sectional view of a micro-pump device in
accordance with another preferred embodiment of the present
invention, incorporating an elastic foundation. Here an elastic
deformable foundation 22, with a thin deformable beam 24 coupled to
the surface of the elastic foundation, is held by frame 26. An
opposite wall 28 is provided, defining a conduit between the thin
beam 24 and the wall 28. As the thin deformable beam is actuated a
traveling wave is induced producing pumping forces through the
inlet through to the outlet.
[0040] FIG. 4 illustrates a pre-buckled circular plate suitable for
incorporation with a micro-pump device in accordance with another
preferred embodiment of the present invention.
[0041] FIG. 5 is a micro-pump device in accordance with another
preferred embodiment of the present invention, used for inducing
motion in solids.
[0042] When the structural wave is made to travel it induces
pumping forces in the direction of travel causing fluids that are
present at the inlet to be pumped through the conduit and out of
the outlet.
[0043] In accordance with a preferred embodiment of the present
invention a pre-buckled elastic structure is provided that includes
many structural waves. This may be for example an elastic plate
that is clamped along its circumference or a thin beam bonded to an
elastic foundation. Internal stress induces structural deformation
waves in the plate or beam.
[0044] Another possible embodiment of the present invention is
using a flexible corrugated membrane in place of the pre-buckled
plate. Such a membrane is shaped with waves occurring naturally in
preferred regions.
[0045] The structural waves may be displaced with little effort by
means of various methods of actuation (e.g., electrostatic,
piezoelectric, thermoelastic, magnetic, and other actuation
methods). For example, the elastic element in FIG. 3 is driven by
electrodes 30 from above and below the pre-buckled plate. This may
be achieved, for example, by electrically grounding the plate and
applying selected voltages to the electrodes that are coated by an
isolating layer.
[0046] The effort required to displace the structural waves depends
on the geometry of the system. For example, the displacement of the
structural waves in the pre-buckled circular plate shown in FIG. 4,
require virtually no power (due to the axi-symmetry of the
system).
[0047] The traveling structural wave obtained by continuously
displacing the structural waves, may be used to: induce flow in a
surrounding fluid; induce a pressure increase in a confined
surrounding fluid; and may be used to displace solids that are in
contact with the traveling structural wave. Since the power
required to displace the structural waves is small, most of the
power invested in these applications is used to induce the flow,
increase the pressure, or displace a solid in contact,
respectively.
[0048] For example the devices described in FIG. 1b, FIG. 1c and
FIG. 2b can be used to induce flow in a fluid, thus pumping it from
the inlet towards the outlet. The device described in FIG. 1c can
be used to induce a pressure increase in a fluid. The device in
FIG. 5 may be used to displace solid particles.
[0049] The device of the present invention can be made in any
dimension. It has a particular appeal in MEMS applications. It
therefore may be produced using MEMS manufacturing techniques,
using, for example silicon for some or all of the device.
[0050] It should be clear that the description of the embodiments
and attached Figures set forth in this specification serves only
for a better understanding of the invention, without limiting its
scope as covered by the following Claims.
[0051] It should also be clear that a person skilled in the art,
after reading the present specification could make adjustments or
amendments to the attached Figures and above described embodiments
that would still be covered by the following Claims.
* * * * *