U.S. patent application number 11/869717 was filed with the patent office on 2008-07-10 for properties in electronic design automation.
This patent application is currently assigned to Mentor Graphics Corporation. Invention is credited to Ellis Cohen, Fedor G. Pikus.
Application Number | 20080168410 11/869717 |
Document ID | / |
Family ID | 39124584 |
Filed Date | 2008-07-10 |
United States Patent
Application |
20080168410 |
Kind Code |
A1 |
Pikus; Fedor G. ; et
al. |
July 10, 2008 |
Properties In Electronic Design Automation
Abstract
One or more properties can be associated with a design object in
a microdevice design. The design object may be an object in a
physical layout design for a microdevice, such as a geometric
element in a layout design. The design object also may be a
collection of geometric elements in a layout design, such as a net,
a cell in a hierarchical design, or even a collection of all of the
geometric elements in a layer of a design. Still further, the
design object may even be an item in a logical circuit design, such
as a net in a logical circuit design for an integrated circuit. The
values of one or more properties may be statically assigned for or
dynamically generated during a design process performed by an
electronic design automation tool. A property may be assigned a
constant value or a value defined by an equation or other type of
script that includes one or more variables. A property may be
simple, where the definition of the property's value is not
dependent upon the value of any other properties. Alternately, a
property may be a compound property, where the definition of the
property's value incorporates another, previously-determined
property value. Still further, a property may be an alternative
property, where the property is assigned one value definition under
a first set of conditions and assigned another value definition
under a second set of conditions. A first electronic design
automation process may generate one or more property values. The
generated property values then can be passed to another electronic
design automation process in the design analysis flow for its
use.
Inventors: |
Pikus; Fedor G.; (Beaverton,
OR) ; Cohen; Ellis; (Mercer Island, WA) |
Correspondence
Address: |
MENTOR GRAPHICS CORP.;PATENT GROUP
8005 SW BOECKMAN ROAD
WILSONVILLE
OR
97070-7777
US
|
Assignee: |
Mentor Graphics Corporation
Wilsonville
OR
|
Family ID: |
39124584 |
Appl. No.: |
11/869717 |
Filed: |
October 9, 2007 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
60850716 |
Oct 9, 2006 |
|
|
|
Current U.S.
Class: |
716/52 ; 716/112;
716/139 |
Current CPC
Class: |
G06F 30/398 20200101;
G06F 2119/18 20200101; Y02P 90/265 20151101; Y02P 90/02
20151101 |
Class at
Publication: |
716/5 ;
716/11 |
International
Class: |
G06F 17/50 20060101
G06F017/50 |
Claims
1. A method of analyzing a circuit design, comprising: receiving a
circuit design into an electronic design automation process;
executing the electronic design automation process using the
circuit design; during the execution of the electronic design
automation process, determining a value for a property, the
property being associated with a first design object in the circuit
design, having a user-specified value definition, and having a
value derived from a feature of at least one second design object
different from the first design object; and storing the property
value in a memory storage medium.
2. The method recited in claim 1, wherein the first design object
is selected from the group consisting of: a polygon edge, one or
more vertices of a polygon, a collection of geometric elements in a
layout circuit design, a placement of a hierarchical cell in a
layout circuit design, and an item in a logical circuit design.
3. The method recited in claim 2, wherein the first design object
is a collection of geometric elements in a layout design selected
from the group consisting of: a group of polygon edges, a group of
polygons, a net, a hierarchical cell in the layout design, every
hierarchical cell of a specified type in the layout design, and a
collection of all of the geometric elements in a layer of the
layout design.
4. The method recited in claim 2, wherein the first design object
is an item in a logical circuit design selected from the group
consisting of: a net, a device, and an instance pin.
5. The method recited in claim 1, wherein the second design object
is selected from the group consisting of: a polygon edge, one or
more vertices of a polygon, a polygon, a collection of geometric
elements in a layout circuit design, a placement of a hierarchical
cell in a layout circuit design, and an item in a logical circuit
design.
6. The method recited in claim 5, wherein the second design object
is a collection of geometric elements in a layout design selected
from the group consisting of: a group of polygon edges, a group of
polygons, a net, a hierarchical cell in the layout design, every
hierarchical cell of a specified type in the layout design, and a
collection of all of the geometric elements in a layer of the
layout design.
7. The method recited in claim 5, wherein the second design object
is an item in a logical circuit design selected from the group
consisting of: a net, a device, and an instance pin.
8. The method recited in claim 1, wherein the feature is a
characteristic of the at least one second design object.
9. The method recited in claim 1, wherein the feature is a value of
a second property associated with the at least one second design
object.
10. The method recited in claim 1, wherein the at least one second
design object is selected from the group consisting of: geometric
elements that touch the design object with which the property is
associated, geometric elements that intersect the design object
with which the property is associated, geometric elements that are
within a specified proximity of the design object with which the
property is associated, geometric elements that are within a
specified proximity of the design object with which the property is
associated or are within a specified proximity of another related
design object, geometric elements that overlap the design object
with which the property is associated, portions of geometric
elements that are clipped by the design object with which the
property is associated, items in a logical circuit design that
belong a same device as the design object, items in a logical
circuit design that share a net with the design object; and items
in a logical circuit design that share a reference identifier with
the design object.
11. The method recited in claim 1, wherein the property has a value
definition that includes a variable function.
12. The method recited in claim 11, wherein the variable function
is described in a program script.
13. The method recited in claim 1, wherein the property has
alternate value definitions to determine a first value under a
first set of conditions, and a second value under a second set of
conditions different from the first set of conditions, such that at
least one of the first value and the second value is derived from
the feature of the at least one second design object.
14. The method recited in claim 1, wherein the property has two or
more concurrent value definitions, such that at such that at least
one of the value definitions employs the feature of the at least
one second design object.
15. The method recited in 14, wherein the feature is a
characteristic of the at least one second design object.
16. The method recited in 14, wherein the feature is a value of a
second property associated with the at least one second design
object.
17. The method recited in claim 1, further comprising during the
execution of the electronic design automation process, adding at
least one value definition for the property, the value definition
employing the feature of the at least one second design object; and
determining a value for each value definition of the property.
18. The method recited in claim 1, wherein the feature is a
characteristic of the at least one second design object.
19. The method recited in claim 18, wherein the feature is a value
of a second property associated with the at least one second design
object.
20. A method of analyzing a circuit design, comprising: receiving a
circuit design into an electronic design automation process;
executing the electronic design automation process using the
circuit design; during the execution of the electronic design
automation process, determining a value for a property, the
property being associated with a first design object in the circuit
design, having a user-specified value definition, and having a
value derived from geometric elements separate from the design
object with which the property is associated.
Description
RELATED APPLICATIONS
[0001] This application claims priority to U.S. Provisional Patent
Application No. 60/850,716 entitled "Properties In Electronic
Design Automation," filed on Oct. 9, 2006, and naming Fedor Pikus
as inventor, which application is incorporated entirely herein by
reference.
FIELD OF THE INVENTION
[0002] The present invention is directed to the use of properties
in electronic design automation. Various implementations of the
invention may be useful for exchanging one or more properties
between processes in an automated electronic design tool.
BACKGROUND OF THE INVENTION
[0003] Many microdevices, such as integrated circuits, have become
so complex that these devices cannot be manually designed. For
example, even a simple microprocessor may have millions and
millions of transistors that cooperate to form the components of
the microprocessor. As a result, electronic design automation tools
have been created to assist circuit designers in analyzing a
circuit design before it is manufactured. These electronic design
automation tools typically will execute one or more electronic
design automation (EDA) processes to verify that the circuit design
complies with specified requirements, identify problems in the
design, modify the circuit design to improve its manufacturability,
or some combination thereof. For example, some electronic design
automation tools may provide one or more processes for simulating
the operation of a circuit manufactured from a circuit design to
verify that the design will provides the desired functionality.
Still other electronic design automation tools may alternately or
additionally provide one or more processes for confirming that a
circuit design matches the intended circuit schematic, for
identifying portions of a circuit design that do not comply with
preferred design conventions, for identifying flaws or other
weaknesses the design, or for modifying the circuit design to
address any of these issues. Examples of electronic design
automation tools include the Calibre family of software tools
available from Mentor Graphics Corporation of Wilsonville,
Oreg.
[0004] As electronic design automation tools continue to develop,
greater sophistication is being demanded from these tools. For
example, in addition to detecting obvious design flaws, many
electronic design automation tools are now expected to identify
those design objects in a design that have a significant likelihood
of being improperly formed during the manufacturing process,
determine the resultant impact on manufacturing yield that these
design objects will create, and/or identify design changes that
will allow the design objects to be more reliably manufactured
during the manufacturing process (e.g., "design-for-manufacture"
(DFM)). In order to meet these expectations, a process executed by
an electronic design automation tool may need to perform more
calculations than with previous generations of electronic design
automation tools. For example, a design rule check process may
confirm that the polygons used in a physical layout design to form
individual wiring lines are separated by a minimum specified
distance. In addition, however, the design rule check process also
may determine the likelihood that the polygons may nonetheless form
the wiring lines with an erroneous bridging fault. This
determination may require, for example, calculating the distance
between the polygons, the length for which the polygons run
adjacent to each other, and the thickness of the polygons at their
adjacent portions.
[0005] Because even a single process executed by an electronic
design automation tool may require millions of calculations,
improvements in the speed and efficiency of electronic design
automation tools are continuously being sought. Still further,
additional functionality for electronic design automation tools
also is continuously being sought, in order to improve their
usefulness to circuit designers and manufacturers.
BRIEF SUMMARY OF THE INVENTION
[0006] Aspects of the invention relate to techniques of more
efficiently processing data for electronic design automation. As
will be discussed in detail below, embodiments of both tools and
methods implementing these techniques have particular application
for analyzing microdevice design data, such as integrated circuit
design data.
[0007] According to various implementations of the invention, one
or more properties can be associated with a design object in a
microdevice design. The design object may be any data in a physical
layout design for a microdevice. For example, the design object may
be a geometric element in a layout design, such as a polygon, a
polygon edge, a group of edges, or one or more vertices of a
polygon. The design object also may be a collection of geometric
elements in a layout design, such as a group of polygons, a cell in
a hierarchical design, every cell of a specified type in a
hierarchical design, or even a collection of all of the geometric
elements in a layer of a design. Still further, the design object
may be any item of data in another type of circuit design,
including a non-geometric item, such as a net, device, or instance
of a connection pin in a logical circuit design for an integrated
circuit, or the placement of a cell in a hierarchical circuit
design.
[0008] With some examples of the invention, one or more properties
may be statically assigned during the execution of a design process
by an electronic design automation tool. Alternately or
additionally, one or more properties may be dynamically generated
during the execution of a design process by an electronic design
automation tool. A property may have any desired data value. For
example, a property may be assigned a constant value or a vector
value. Alternately, a property may be assigned a variable value.
For example, a property may be defined by an equation or other type
of script that includes one or more variables. A property's value
thus may be dynamically derived from, e.g., geometric data in the
design.
[0009] A property may be a simple property, where the definition of
the property's value is not dependent upon the value of any other
properties. Alternately, a property may be a compound property,
where the definition of the property's value incorporates one or
more other, previously-determined property values. Still further, a
property may be an alternative property. With an alternative
property, the property will have one value definition under a first
set of conditions, and another value definition under a second set
of conditions.
[0010] A property also may have multiple values. A property may
have, for example, an x-coordinate value, a y-coordinate value, and
a z-coordinate value. Moreover, a property may have multiple,
heterogeneous values. For example, a property may have both a
numerical value and a string value. A property associated with a
cell in a hierarchical layout circuit design thus could have a
numerical value that may be, e.g., a device count of devices in the
cell, and a string value that may be, e.g., a model name
identifying the library source for the cell. Of course, a property
with multiple heterogeneous values can have any combination of
types of value definitions, including any combination of the types
of value definitions described above (e.g., one or more constant
value definitions, one or more vector value definitions, one or
more dynamic value definitions, one or more simple value
definitions, one or more compound value definitions, one or more
string value definitions, etc.). A property may even have multiple
alternative value definitions, where one or more of the alternative
value definitions are of different types.
[0011] Advantageously, various implementations of the invention may
allow a first electronic design automation process to generate one
or more property values. The generated property values can then be
passed to another electronic design automation process. For
example, a design rule check (DRC) process may generate one or more
property values for each of a plurality of geometric elements in a
physical layout design. The design rule check process can then pass
these property values onto a second electronic design automation
process, such as an optical proximity correction (OPC) process. By
using the property values provided by the design rule check
process, the optical proximity correction process can avoid having
to recalculate the property values. This use of property values may
be particularly beneficial where the second electronic design
automation process cannot easily calculate the property values
itself, or where the second electronic design automation process
cannot calculate the property values as quickly or efficiently as
the first electronic design automation process.
[0012] Similarly, property values may be generated by a first
portion of an electronic design automation process, and
subsequently provided to a second portion of the same electronic
design process. For example, one portion of a
design-for-manufacture (DFM) process may generate a set of property
values for each of a plurality of geometric elements in a physical
layout design during a first operation. The first portion of the
design-for-manufacture process can then provide the calculated
properties to a second, subsequent portion of the process. This use
of property values may be particularly beneficial where the second
portion of the electronic design automation process cannot easily
calculate the property values itself, or where the second portion
of the electronic design automation process cannot calculate the
property values as quickly or efficiently as the first portion of
the electronic design automation process.
[0013] These and other features and aspects of the invention will
be apparent upon consideration of the following detailed
description.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] FIG. 1 illustrates an example of a computing system that may
be used to implement various embodiments of the invention.
[0015] FIG. 2 illustrates an example of a multi-core processor unit
that may be used to implement various embodiments of the
invention.
[0016] FIG. 3 schematically illustrates an example of a family of
software tools for automatic design automation that may employ
associative properties according to various embodiments of the
invention.
[0017] FIG. 4 illustrates geometric elements in a microcircuit
layout design that may be associated with one or more properties
according to various embodiments of the invention.
[0018] FIG. 5 illustrates one example of a type of array that may
be employed by various embodiments of the invention.
[0019] FIG. 6 illustrates a flowchart showing a method that an EDA
process may use to generate and provide a property value to another
EDA process.
[0020] FIG. 7 illustrates a flowchart showing a method that a first
portion of an EDA process may use to generate and provide a
property value to a second portion of an EDA process.
DETAILED DESCRIPTION OF THE INVENTION
Exemplary Operating Environment
[0021] The execution of various electronic design automation
processes according to embodiments of the invention may be
implemented using computer-executable software instructions
executed by one or more programmable computing devices.
[0022] Because these embodiments of the invention may be
implemented using software instructions, the components and
operation of a generic programmable computer system on which
various embodiments of the invention may be employed will first be
described. Further, because of the complexity of some electronic
design automation processes and the large size of many circuit
designs, various electronic design automation tools are configured
to operate on a computing system capable of simultaneously running
multiple processing threads. The components and operation of a
computer network having a host or master computer and one or more
remote or servant computers therefore will be described with
reference to FIG. 1. This operating environment is only one example
of a suitable operating environment, however, and is not intended
to suggest any limitation as to the scope of use or functionality
of the invention.
[0023] In FIG. 1, the computer network 101 includes a master
computer 103. In the illustrated example, the master computer 103
is a multi-processor computer that includes a plurality of input
and output devices 105 and a memory 107. The input and output
devices 105 may include any device for receiving input data from or
providing output data to a user. The input devices may include, for
example, a keyboard, microphone, scanner or pointing device for
receiving input from a user. The output devices may then include a
display monitor, speaker, printer or tactile feedback device. These
devices and their connections are well known in the art, and thus
will not be discussed at length here.
[0024] The memory 107 may similarly be implemented using any
combination of computer readable media that can be accessed by the
master computer 103. The computer readable media may include, for
example, microcircuit memory devices such as read-write memory
(RAM), read-only memory (ROM), electronically erasable and
programmable read-only memory (EEPROM) or flash memory microcircuit
devices, CD-ROM disks, digital video disks (DVD), or other optical
storage devices. The computer readable media may also include
magnetic cassettes, magnetic tapes, magnetic disks or other
magnetic storage devices, punched media, holographic storage
devices, or any other medium that can be used to store desired
information.
[0025] As will be discussed in detail below, the master computer
103 runs a software application for performing one or more
operations according to various examples of the invention.
Accordingly, the memory 107 stores software instructions 109A that,
when executed, will implement a software application for performing
one or more operations. The memory 107 also stores data 109B to be
used with the software application. In the illustrated embodiment,
the data 109B contains process data that the software application
uses to perform the operations, at least some of which may be
parallel.
[0026] The master computer 103 also includes a plurality of
processor units 111 and an interface device 113. The processor
units 111 may be any type of processor device that can be
programmed to execute the software instructions 109A, but will
conventionally be a microprocessor device. For example, one or more
of the processor units 111 may be a commercially generic
programmable microprocessor, such as Intel.RTM. Pentium.RTM. or
Xeon.TM. microprocessors, Advanced Micro Devices Athlon.TM.
microprocessors or Motorola 68K/Coldfire.RTM. microprocessors.
Alternately or additionally, one or more of the processor units 111
may be a custom-manufactured processor, such as a microprocessor
designed to optimally perform specific types of mathematical
operations. The interface device 113, the processor units 111, the
memory 107 and the input/output devices 105 are connected together
by a bus 115.
[0027] With some implementations of the invention, the master
computing device 103 may employ one or more processing units 111
having more than one processor core. Accordingly, FIG. 2
illustrates an example of a multi-core processor unit 111 that may
be employed with various embodiments of the invention. As seen in
this figure, the processor unit 111 includes a plurality of
processor cores 201. Each processor core 201 includes a computing
engine 203 and a memory cache 205. As known to those of ordinary
skill in the art, a computing engine contains logic devices for
performing various computing functions, such as fetching software
instructions and then performing the actions specified in the
fetched instructions. These actions may include, for example,
adding, subtracting, multiplying, and comparing numbers, performing
logical operations such as AND, OR, NOR and XOR, and retrieving
data. Each computing engine 203 may then use its corresponding
memory cache 205 to quickly store and retrieve data and/or
instructions for execution.
[0028] Each processor core 201 is connected to an interconnect 207.
The particular construction of the interconnect 207 may vary
depending upon the architecture of the processor unit 201. With
some processor cores 201, such as the Cell microprocessor created
by Sony Corporation, Toshiba Corporation and IBM Corporation, the
interconnect 207 may be implemented as an interconnect bus. With
other processor units 201, however, such as the Opteron.TM. and
Athlon.TM. dual-core processors available from Advanced Micro
Devices of Sunnyvale, Calif., the interconnect 207 may be
implemented as a system request interface device. In any case, the
processor cores 201 communicate through the interconnect 207 with
an input/output interface 209 and a memory controller 211. The
input/output interface 209 provides a communication interface
between the processor unit 201 and the bus 115. Similarly, the
memory controller 211 controls the exchange of information between
the processor unit 201 and the system memory 107. With some
implementations of the invention, the processor units 201 may
include additional components, such as a high-level cache memory
accessible shared by the processor cores 201.
[0029] While FIG. 2 shows one illustration of a processor unit 201
that may be employed by some embodiments of the invention, it
should be appreciated that this illustration is representative
only, and is not intended to be limiting. For example, some
embodiments of the invention may employ a master computer 103 with
one or more Cell processors. The Cell processor employs multiple
input/output interfaces 209 and multiple memory controllers 211.
Also, the Cell processor has nine different processor cores 201 of
different types. More particularly, it has six or more synergistic
processor elements (SPEs) and a power processor element (PPE). Each
synergistic processor element has a vector-type computing engine
203 with 428.times.428 bit registers, four single-precision
floating point computational units, four integer computational
units, and a 556 KB local store memory that stores both
instructions and data. The power processor element then controls
that tasks performed by the synergistic processor elements. Because
of its configuration, the Cell processor can perform some
mathematical operations, such as the calculation of fast Fourier
transforms (FFTs), at substantially higher speeds than many
conventional processors.
[0030] It also should be appreciated that, with some
implementations, a multi-core processor unit 111 can be used in
lieu of multiple, separate processor units 111. For example, rather
than employing six separate processor units 111, an alternate
implementation of the invention may employ a single processor unit
111 having six cores, two multi-core processor units each having
three cores, a multi-core processor unit 111 with four cores
together with two separate single-core processor units 111,
etc.
[0031] Returning now to FIG. 1, the interface device 113 allows the
master computer 103 to communicate with the servant computers 117A,
117B, 117C . . . 117x through a communication interface. The
communication interface may be any suitable type of interface
including, for example, a conventional wired network connection or
an optically transmissive wired network connection. The
communication interface may also be a wireless connection, such as
a wireless optical connection, a radio frequency connection, an
infrared connection, or even an acoustic connection. The interface
device 113 translates data and control signals from the master
computer 103 and each of the servant computers 117 into network
messages according to one or more communication protocols, such as
the transmission control protocol (TCP), the user datagram protocol
(UDP), and the Internet protocol (IP). These and other conventional
communication protocols are well known in the art, and thus will
not be discussed here in more detail.
[0032] Each servant computer 117 may include a memory 119, a
processor unit 121, an interface device 123, and, optionally, one
more input/output devices 125 connected together by a system bus
127. As with the master computer 103, the optional input/output
devices 125 for the servant computers 117 may include any
conventional input or output devices, such as keyboards, pointing
devices, microphones, display monitors, speakers, and printers.
Similarly, the processor units 121 may be any type of conventional
or custom-manufactured programmable processor device. For example,
one or more of the processor units 121 may be commercially generic
programmable microprocessors, such as Intel.RTM. Pentium.RTM. or
Xeon.TM. microprocessors, Advanced Micro Devices Athlon.TM.
microprocessors or Motorola 68K/Coldfire.RTM. microprocessors.
Alternately, one or more of the processor units 121 may be
custom-manufactured processors, such as microprocessors designed to
optimally perform specific types of mathematical operations. Still
further, one or more of the processor units 121 may have more than
one core, as described with reference to FIG. 2 above. For example,
with some implementations of the invention, one or more of the
processor units 121 may be a Cell processor. The memory 119 then
may be implemented using any combination of the computer readable
media discussed above. Like the interface device 113, the interface
devices 123 allow the servant computers 117 to communicate with the
master computer 103 over the communication interface.
[0033] In the illustrated example, the master computer 103 is a
multi-processor unit computer with multiple processor units 111,
while each servant computer 117 has a single processor unit 121. It
should be noted, however, that alternate implementations of the
invention may employ a master computer having single processor unit
111. Further, one or more of the servant computers 117 may have
multiple processor units 121, depending upon their intended use, as
previously discussed. Also, while only a single interface device
113 or 123 is illustrated for both the master computer 103 and the
servant computers, it should be noted that, with alternate
embodiments of the invention, either the computer 103, one or more
of the servant computers 117, or some combination of both may use
two or more different interface devices 113 or 123 for
communicating over multiple communication interfaces.
[0034] With various examples of the invention, the master computer
103 may be connected to one or more external data storage devices.
These external data storage devices may be implemented using any
combination of computer readable media that can be accessed by the
master computer 103. The computer readable media may include, for
example, microcircuit memory devices such as read-write memory
(RAM), read-only memory (ROM), electronically erasable and
programmable read-only memory (EEPROM) or flash memory microcircuit
devices, CD-ROM disks, digital video disks (DVD), or other optical
storage devices. The computer readable media may also include
magnetic cassettes, magnetic tapes, magnetic disks or other
magnetic storage devices, punched media, holographic storage
devices, or any other medium that can be used to store desired
information. According to some implementations of the invention,
one or more of the servant computers 117 may alternately or
additionally be connected to one or more external data storage
devices. Typically, these external data storage devices will
include data storage devices that also are connected to the master
computer 103, but they also may be different from any data storage
devices accessible by the master computer 103.
[0035] It also should be appreciated that the description of the
computer network illustrated in FIG. 1 and FIG. 2 is provided as an
example only, and it not intended to suggest any limitation as to
the scope of use or functionality of alternate embodiments of the
invention.
Electronic Design Automation
[0036] As previously noted, various embodiments of the invention
are related to electronic design automation. In particular, various
implementations of the invention may be used to improve the
operation of electronic design automation software tools that
identify, verify and/or modify design data for manufacturing a
microdevice, such as a microcircuit. As used herein, the terms
"design" and "design data" are intended to encompass data
describing an entire microdevice, such as an integrated circuit
device or micro-electromechanical system (MEMS) device. This term
also is intended to encompass a smaller set of data describing one
or more components of an entire microdevice, however, such as a
layer of an integrated circuit device, or even a portion of a layer
of an integrated circuit device. Still further, the terms "design"
and "design data" also are intended to encompass data describing
more than one microdevice, such as data to be used to create a mask
or reticle for simultaneously forming multiple microdevices on a
single wafer. It should be noted that, unless otherwise specified,
the term "design" as used herein is intended to encompass any type
of design, including both a physical layout design and a logical
design.
[0037] Designing and fabricating microcircuit devices involve many
steps during a `design flow` process. These steps are highly
dependent on the type of microcircuit, its complexity, the design
team, and the fabricator or foundry that will manufacture the
microcircuit from the design. Several steps are common to most
design flows, however. First, a design specification is modeled
logically, typically in a hardware design language (HDL). Once a
logical design has been created, various logical analysis processes
are performed on the design to verify its correctness. More
particularly, software and hardware "tools" verify that the logical
design will provide the desired functionality at various stages of
the design flow by running software simulators and/or hardware
emulators, and errors are corrected. For example, a designer may
employ one or more functional logic verification processes to
verify that, given a specified input, the devices in a logical
design will perform in the desired manner and provide the
appropriate output.
[0038] In addition to verifying that the devices in a logic design
will provide the desired functionality, some designers may employ a
design logic verification process to verify that the logical design
meets specified design requirements. For example, a designer may
create rules such as, e.g., every transistor gate in the design
must have an electrical path to ground that passes through no more
than three other devices, or every transistor that connects to a
specified power supply also must be connected to a corresponding
ground node, and not to any other ground node. A design logic
verification process then will determine if a logical design
complies with specified rules, and identify occurrences where it
does not.
[0039] After the logical design is deemed satisfactory, it is
converted into physical design data by synthesis software. This
physical design data or "layout" design data may represent, for
example, the geometric elements that will be written onto a mask
used to fabricate the desired microcircuit device in a
photolithographic process at a foundry. For conventional mask or
reticle writing tools, the geometric elements typically will be
polygons of various shapes. Thus, the layout design data usually
includes polygon data describing the features of polygons in the
design. It is very important that the physical design information
accurately embody the design specification and logical design for
proper operation of the device. Accordingly, after it has been
created during a synthesis process, the physical design data is
compared with the original logical design schematic in a process
sometimes referred to as a "layout-versus-schematic" (LVS)
process.
[0040] Once the correctness of the logical design has been
verified, and geometric data corresponding to the logical design
has been created in a layout design, the geometric data then may be
analyzed. For example, because the physical design data is employed
to create masks used at a foundry, the data must conform to the
foundry's requirements. Each foundry specifies its own physical
design parameters for compliance with their processes, equipment,
and techniques. Accordingly, the design flow may include a process
to confirm that the design data complies with the specified
parameters. During this process, the physical layout of the circuit
design is compared with design rules in a process commonly referred
to as a "design rule check" (DRC) process. In addition to rules
specified by the foundry, the design rule check process may also
check the physical layout of the circuit design against other
design rules, such as those obtained from test chips, general
knowledge in the industry, previous manufacturing experience,
etc.
[0041] With modern electronic design automation design flows, a
designer may additionally employ one or more
"design-for-manufacture" (DFM) software tools. As previously noted,
design rule check processes attempt to identify, e.g., elements
representing structures that will almost certainly be improperly
formed during a manufacturing process. "Design-For-Manufacture"
tools, however, provide processes that attempt to identify elements
in a design representing structures with a significant likelihood
of being improperly formed during the manufacturing process. A
"design-for-manufacture" process may additionally determine what
impact the improper formation of the identified elements will have
on the yield of devices manufactured from the circuit design,
and/or modifications that will reduce the likelihood that the
identified elements will be improperly formed during the
manufacturing process. For example, a "design-for-manufacture"
(DFM) software tool may identify wires that are connected by only a
single via, determine the yield impact for manufacturing a circuit
from the design based upon the probability that each individual
single via will be improperly formed during the manufacturing
process, and then identify areas where redundant vias can be formed
to supplement the single vias.
[0042] It should be noted that, in addition to
"design-for-manufacture," various alternate terms are used in the
electronic design automation industry. Accordingly, as used herein,
the term "design-for-manufacture" or "design-for-manufacturing" is
intended to encompass any electronic design automation process that
identifies elements in a design representing structures that may be
improperly formed during the manufacturing process. Thus,
"design-for-manufacture" (DFM) software tools will include, for
example, "lithographic friendly design" (LFD) tools that assist
designers to make trade-off decisions on how to create a circuit
design that is more robust and less sensitive to lithographic
process windows. They will also include "design-for-yield" (DFY)
electronic design automation tools, "yield assistance" electronic
design automation tools, and "chip cleaning" and "design cleaning"
electronic design automation tools.
[0043] After a designer has used one or more geometry analysis
processes to verify that the physical layout of the circuit design
is satisfactory, the designer may then perform one or more
simulation processes to simulate the operation of a manufacturing
process, in order to determine how the design will actually be
realized by that particular manufacturing process. A simulation
analysis process may additionally modify the design to address any
problems identified by the simulation. For example, some design
flows may employ one or more processes to simulate the image formed
by the physical layout of the circuit design during a
photolithographic process, and then modify the layout design to
improve the resolution of the image that it will produce during a
photolithography process.
[0044] These resolution enhancement techniques (RET) may include,
for example, modifying the physical layout using optical proximity
correction (OPC) or by the addition of sub-resolution assist
features (SRAF). Other simulation analysis processes may include,
for example, phase shift mask (PSM) simulation analysis processes,
etch simulation analysis processes and planarization simulation
analysis processes. Etch simulation analysis processes simulate the
removal of materials during a chemical etching process, while
planarization simulation processes simulate the polishing of the
circuit's surface during a chemical-mechanical etching process.
These simulation analysis processes may identify, for example,
regions where an etch or polishing process will not leave a
sufficiently planar surface. These simulation analysis processes
may then modify the physical layout design to, e.g., include more
geometric elements in those regions to increase their density.
[0045] Once a physical layout design has been finalized, the
geometric elements in the design are formatted for use by a mask or
reticle writing tool. Masks and reticles typically are made using
tools that expose a blank reticle or mask substrate to an electron
or laser beam (or to an array of electron beams or laser beams),
but most mask writing tools are able to only "write" certain kinds
of polygons, however, such as right triangles, rectangles or other
trapezoids. Moreover, the sizes of the polygons are limited
physically by the maximum beam (or beam array) size available to
the tool. Accordingly, the larger geometric elements in a physical
layout design data will typically be "fractured" into the smaller,
more basic polygons that can be written by the mask or reticle
writing tool.
[0046] It should be appreciated that various design flows may
repeat one or more processes in any desired order. Thus, with some
design flows, geometric analysis processes can be interleaved with
simulation analysis processes and/or logical analysis processes.
For example, once the physical layout of the circuit design has
been modified using resolution enhancement techniques, then a
design rule check process or design-for-manufacturing process may
be performed on the modified layout, Further, these processes may
be alternately repeated until a desired degree of resolution for
the design is obtained. Similarly, a design rule check process
and/or a design-for-manufacturing process may be employed after an
optical proximity correction process, a phase shift mask simulation
analysis process, an etch simulation analysis process or a
planarization simulation analysis process. Examples of electronic
design tools that employ one or more of the logical analysis
processes, geometry analysis processes or simulation analysis
processes discussed above are described in U.S. Pat. No. 6,230,299
to McSherry et al., issued May 8, 2001, U.S. Pat. No. 6,249,903 to
McSherry et al., issued Jun. 19, 2001, U.S. Pat. No. 6,339,836 to
Eisenhofer et al., issued Jan. 15, 2002, U.S. Pat. No. 6,397,372 to
Bozkus et al., issued May 28, 2002, U.S. Pat. No. 6,415,421 to
Anderson et al., issued Jul. 2, 2002, and U.S. Pat. No. 6,425,113
to Anderson et al., issued Jul. 23, 2002, each of which are
incorporated entirely herein by reference.
Software Tools for Simulation, Verification or Modification of a
Circuit Layout
[0047] To facilitate an understanding of various embodiments of the
invention, one such software tool for automatic design automation,
directed to the analysis and modification of a design for an
integrated circuit, will now be generally described. As previously
noted, the terms "design" and "design data" are used herein to
encompass data describing an entire microdevice, such as an
integrated circuit device or micro-electromechanical system (MEMS)
device. These terms also are intended, however, to encompass a
smaller set of data describing one or more components of an entire
microdevice, such as a layer of an integrated circuit device, or
even a portion of a layer of an integrated circuit device. Still
further, the terms "design" and "design data" also are intended to
encompass data describing more than one microdevice, such as data
to be used to create a mask or reticle for simultaneously forming
multiple microdevices on a single wafer. As also previously noted,
unless otherwise specified, the term "design" as used herein is
intended to encompass any type of design, including both physical
layout designs and logical designs.
[0048] As seen in FIG. 3, an analysis tool 301, which may be
implemented by a variety of different software applications,
includes a data import module 303 and a hierarchical database 305.
The analysis tool 301 also includes a layout-versus-schematic (LVS)
verification module 307, a design rule check (DRC) module 309, a
design-for-manufacturing (DFM) module 311, an optical proximity
correction (OPC) module 313, and an optical proximity rule check
(ORC) module 315. The analysis tool 301 may further include other
modules 317 for performing additional functions as desired, such as
a phase shift mask (PSM) module (not shown), an etch simulation
analysis module (not shown) and/or a planarization simulation
analysis module (not shown). The tool 301 also has a data export
module 319. One example of such an analysis tool is the Calibre
family of software applications available from Mentor Graphics
Corporation of Wilsonville, Oreg.
[0049] Initially, the tool 301 receives data 321 describing a
physical layout design for an integrated circuit. The layout design
data 321 may be in any desired format, such as, for example, the
Graphic Data System II (GDSII) data format or the Open Artwork
System Interchange Standard (OASIS) data format proposed by
Semiconductor Equipment and Materials International (SEMI). Other
formats for the data 321 may include an open source format named
Open Access, Milkyway by Synopsys, Inc., and EDDM by Mentor
Graphics, Inc. The layout data 321 includes geometric elements for
manufacturing one or more portions of an integrated circuit device.
For example, the initial integrated circuit layout data 321 may
include a first set of polygons for creating a photolithographic
mask that in turn will be used to form an isolation region of a
transistor, a second set of polygons for creating a
photolithographic mask that in turn will be used to form a contact
electrode for the transistor, and a third set of polygons for
creating a photolithographic mask that in turn will be used to form
an interconnection line to the contact electrode. The initial
integrated circuit layout data 321 may be converted by the data
import module 303 into a format that can be more efficiently
processed by the remaining components of the tool 301.
[0050] Once the data import module 303 has converted the original
integrated circuit layout data 321 to the appropriate format, the
layout data 321 is stored in the hierarchical database 305 for use
by the various operations executed by the modules 305-317. Next,
the layout-versus-schematic module 307 checks the layout design
data 321 in a layout-versus-schematic process, to verify that it
matches the original design specifications for the desired
integrated circuit. If discrepancies between the layout design data
321 and the logical design for the integrated circuit are
identified, then the layout design data 321 may be revised to
address one or more of these discrepancies. Thus, the
layout-versus-schematic process performed by the
layout-versus-schematic module 307 may lead to a new version of the
layout design data with revisions. According to various
implementations of the invention tool 301, the layout data 321 may
be manually revised by a user, automatically revised by the
layout-versus-schematic module 307, or some combination
thereof.
[0051] Next, the design rule check module 309 confirms that the
verified layout data 321 complies with defined geometric design
rules. If portions of the layout data 321 do not adhere to or
otherwise violate the design rules, then the layout data 321 may be
modified to ensure that one or more of these portions complies with
the design rules. The design rule check process performed by the
design rule check module 309 thus also may lead to a new version of
the layout design data with various revisions. Again, with various
implementations of the invention tool 301, the layout data 321 may
be manually modified by a user, automatically modified by the
design rule check module 309, or some combination thereof.
[0052] The modified layout data 321 is then processed by the design
for manufacturing module 311. As previously noted, a
"design-for-manufacture" processes attempts to identify elements in
a design representing structures with a significant likelihood of
being improperly formed during the manufacturing process. A
"design-for-manufacture" process may additionally determine what
impact the improper formation of the identified structures will
have on the yield of devices manufactured from the circuit design,
and/or modifications that will reduce the likelihood that the
identified structures may be improperly formed during the
manufacturing process. For example, a "design-for-manufacture"
(DFM) software tool may identify wires that are connected by single
vias, determine the yield impact based upon the probability that
each individual single via will be improperly formed during the
manufacturing process, and then identify areas where redundant visa
can be formed to supplement the single vias.
[0053] The processed layout data 321 is then passed to the optical
proximity correction module 313, which corrects the layout data 321
for manufacturing distortions that would otherwise occur during the
lithographic patterning. For example, the optical proximity
correction module 313 may correct for image distortions, optical
proximity effects, photoresist kinetic effects, and etch loading
distortions. The layout data 321 modified by the optical proximity
correction module 313 then is provided to the optical process rule
check module 315
[0054] The optical process rule check module 315 (more commonly
called the optical rules check module or ORC module) ensures that
the changes made by the optical proximity correction module 313 are
actually manufacturable, a "downstream-looking" step for layout
verification. This compliments the "upstream-looking" step of the
LVS performed by the LVS module 307 and the self-consistency check
of the DRC process performed by the DRC module 309, adding symmetry
to the verification step. Thus, each of the processes performed by
the design for manufacturing process 311, the optical proximity
correction module 313, and the optical process rule check module
315 may lead to a new version of the layout design data with
various revisions.
[0055] As previously noted, other modules 317 may be employed to
perform alternate or additional manipulations of the layout data
321, as desired. For example, some implementations of the tool 301
may employ, for example, a phase shift mask module. As previously
discussed, with a phase-shift mask (PSM) analysis (another approach
to resolution enhancement technology (RET)), the geometric elements
in a layout design are modified so that the pattern they create on
the reticle will introduce contrast-enhancing interference fringes
in the image. The tool 301 also may alternately or additionally
employ, for example, an etch simulation analysis processes or a
planarization simulation analysis processes. The process or
processes performed by each of these additional modules 317 may
also lead to the creation of a new version of the layout data 321
that includes revisions.
[0056] After all of the desired operations have been performed on
the initial layout data 321, the data export module 319 converts
the processed layout data 321 into manufacturing integrated circuit
layout data 323 that can be used to form one or more masks or
reticules to manufacture the integrated circuit (that is, the data
export module 319 converts the processed layout data 321 into a
format that can be used in a photolithographic manufacturing
process). Masks and reticles typically are made using tools that
expose a blank reticle or mask substrate to an electron or laser
beam (or to an array of electron beams or laser beams), but most
mask writing tools are able to only "write" certain kinds of
polygons, however, such as right triangles, rectangles or other
trapezoids. Moreover, the sizes of the polygons are limited
physically by the maximum beam (or beam array) size available to
the tool.
[0057] Accordingly, the data export module 319 may "fracture"
larger geometric elements in the layout design, or geometric
elements that are not right triangles, rectangles or trapezoids
(which typically are a majority of the geometric elements in a
layout design) into the smaller, more basic polygons that can be
written by the mask or reticle writing tool. Of course, the data
export module 319 may alternately or additionally convert the
processed layout data 321 into any desired type of data, such as
data for use in a synthesis process (e.g., for creating an entry
for a circuit library), data for use in a place-and-route process,
data for use in calculating parasitic effects, etc. Further, the
tool 301 may store one or more versions of the layout 321
containing different modifications, so that a designer can undo
undesirable modifications. For example, the hierarchical database
305 may store alternate versions of the layout data 321 created
during any step of the process flow between the modules
307-317.
Data Organization
[0058] The design of a new integrated circuit may include the
interconnection of millions of transistors, resistors, capacitors,
or other electrical structures into logic circuits, memory
circuits, programmable field arrays, and other circuit devices. In
order to allow a computer to more easily create and analyze these
large data structures (and to allow human users to better
understand these data structures), they are often hierarchically
organized into smaller data structures, typically referred to as
"cells." Thus, for a microprocessor or flash memory design, all of
the transistors making up a memory circuit for storing a single bit
may be categorized into a single "bit memory" cell. Rather than
having to enumerate each transistor individually, the group of
transistors making up a single-bit memory circuit can thus
collectively be referred to and manipulated as a single unit.
Similarly, the design data describing a larger 16-bit memory
register circuit can be categorized into a single cell. This higher
level "register cell" might then include sixteen bit memory cells,
together with the design data describing other miscellaneous
circuitry, such as an input/output circuit for transferring data
into and out of each of the bit memory cells. Similarly, the design
data describing a 128 kB memory array can then be concisely
described as a combination of only 64,000 register cells, together
with the design data describing its own miscellaneous circuitry,
such as an input/output circuit for transferring data into and out
of each of the register cells.
[0059] By categorizing microcircuit design data into hierarchical
cells, large data structures can be processed more quickly and
efficiently. For example, a circuit designer typically will analyze
a design to ensure that each circuit feature described in the
design complies with specified design rules. With the above
example, instead of having to analyze each feature in the entire
128 kB memory array, a design rule check process can analyze the
features in a single bit cell. If the cells are identical, then the
results of the check will then be applicable to all of the single
bit cells. Once it has confirmed that one instance of the single
bit cells complies with the design rules, the design rule check
process then can complete the analysis of a register cell simply by
analyzing the features of its additional miscellaneous circuitry
(which may itself be made of up one or more hierarchical cells).
The results of this check will then be applicable to all of the
register cells. Once it has confirmed that one instance of the
register cells complies with the design rules, the design rule
check software application can complete the analysis of the entire
128 kB memory array simply by analyzing the features of the
additional miscellaneous circuitry in the memory array. Thus, the
analysis of a large data structure can be compressed into the
analyses of a relatively small number of cells making up the data
structure.
[0060] With various examples of the invention, layout design data
may include two different types of data: "drawn layer" design data
and "derived layer" design data. The drawn layer data describes
geometric elements that will be used to form structures in layers
of material to produce the integrated circuit. The drawn layer data
will usually include polygons that will be used to form structures
in metal layers, diffusion layers, and polysilicon layers. The
derived layers will then include features made up of combinations
of drawn layer data and other derived layer data. Thus, with a
transistor gate, derived layer design data describing the gate may
be derived from the intersection of a polygon in the polysilicon
material layer and a polygon in the diffusion material layer.
[0061] For example, a design rule check process performed by the
design rule check module 309 typically will perform two types of
operations: "check" operations that confirm whether design data
values comply with specified parameters, and "derivation"
operations that create derived layer data. A transistor gate design
data thus may be created by the following derivation operation:
gate=diff AND poly
The results of this operation will be a "layer" of data identifying
all intersections of diffusion layer polygons with polysilicon
layer polygons. Likewise, a p-type transistor gate, formed by
doping the diffusion layer with n-type material, is identified by
the following derivation operation:
pgate=nwell AND gate
The results of this operation then will be another "layer" of data
identifying all transistor gates (i.e., intersections of diffusion
layer polygons with polysilicon layer polygons) where the polygons
in the diffusion layer have been doped with n-type material.
[0062] A check operation performed by the design rule check module
309 will then define a parameter or a parameter range for a data
design value. For example, a user may want to ensure that no metal
wiring line is within a micron of another wiring line. This type of
analysis may be performed by the following check operation:
external metal<1
The results of this operation will identify each polygon in the
metal layer design data that are closer than one micron to another
polygon in the metal layer design data.
[0063] Also, while the above operation employs drawn layer data,
check operations may be performed on derived layer data as well.
For example, if a user wanted to confirm that no transistor gate is
located within one micron of another gate, the design rule check
process might include the following check operation:
external gate<1
The results of this operation will identify all gate design data
representing gates that are positioned less than one micron from
another gate. It should be appreciated, however, that this check
operation cannot be performed until a derivation operation
identifying the gates from the drawn layer design data has been
performed.
Properties
[0064] Various implementations of the invention relate to software
tools for electronic design automation that create and/or employ
associative properties. As will be discussed in more detail below,
with some implementations of the invention, one or more properties
can be generated and associated with any type of design object in a
microdevice design. If the design is a physical layout for
lithographically manufacturing an integrated circuit or other
microdevice, for example, then one or more properties can be
associated with any desired geometric element described in the
design. Referring now to FIG. 4, this figure illustrates a portion
of a layout design. The design includes a plurality of polygons
401-407 that will be used to form circuit structures in a layer of
material, such as a layer of metal. Polygons 401-405, for example,
may be used to form wiring lines for an integrated circuit. With
various examples of the invention, one or more properties can be
associated with a polygon, such as each of the polygons 401-407, or
with a component of a polygon, such as the vertices of a polygon.
Further, one or more properties can be associated with a polygon's
edge, such as the edge 409 of the polygon 401. Still further, one
or more properties can be associated with a pair of polygon edges,
such as the edges 411 and 413 of the polygon 405. With various
examples of the invention, each property may be represented as a
new "layer" of data in the design.
[0065] When a property is associated with a design object in a
layout design, its value may be derived from geometric data related
to that design object. For example, if a property is associated
with geometric element, such as a polygon, then it may have a value
derived from the area of the polygon, the perimeter of the polygon,
the number of vertices of the polygon, or the like. Similarly, if a
property is associated with an edge, then the value of the property
may be derived from the length or angle of the edge. Still further,
if a property is associated with a pair of edges, then the value of
the property may be derived from a separation distance between the
edges, a total length of the edges, a difference in length between
the edges, an area bounded by the edges, etc.
[0066] As will be apparent from the discussion below, however, it
should be appreciated that a property value can be defined by any
desired function. For example, a property may be defined as a
constant value. The value of a property X thus may be defined by
the function:
X=0.5
With this definition, the value of the property will always be
0.5.
[0067] A property's value also may be defined by a variable
function. With a variable function, the value of a property may
vary based upon, e.g., the specific data in the design. For
example, a property X may be defined by the simple function:
X=AREA(METAL1)*0.5+(PERIMETER(METAL1)).sup.2
With this function, a property value is generated for every polygon
in the design layer named "metal1." (That is, the input used to
generate the property X is the data layer in the design name
"metal1.") For each polygon in the design layer, the area of the
polygon is calculated and multiplied by 0.5. In addition, the
perimeter of the polygon is determined, and then squared. The
multiplicand of the polygon's area with 0.5 is then added to the
square of the polygon's perimeter to generate the value of the
property X for associated with that polygon.
[0068] Thus, in FIG. 4, if the perimeter of the first polygon 401
is 68, and the area of the first polygon is 64, then the value of
the property X.sub.1 for the first polygon is
X.sub.1=(64*0.5)+(68).sup.2=4656
Similarly, if the perimeter of the second polygon 403 is 60 and the
area of the second polygon is 66, then the value of the property
X.sub.2 of the second polygon is
X.sub.2=(60*0.5)+(66).sup.2=4386.
Still further, if the perimeter of the third polygon 405 is 60 and
the area of the second polygon is 84, then the value of the
property X.sub.3 of the third polygon is
X.sub.1=(60*0.5)+(84).sup.2=7086,
and if the perimeter of the fourth polygon 407 is 34 and the area
of the second polygon is 70, then the value of the property X.sub.4
of the fourth polygon is
X.sub.4=(34*0.5)+(70).sup.2=4917
[0069] In addition to a "simple" function like that described
above, a property also may be defined by a compound function that
incorporates a previously-generated property value. For example, a
first property X may be defined by the simple function described
above:
X=AREA(METAL1)*5+(PERIMETER(METAL1)).sup.2
A second property, Y, can then be defined by a function that
incorporates the value of the first property X, as follows:
Y=PROP(METAL1,X)+1
Thus, the value of the property Y for a polygon is the value of the
property X calculated for that polygon, plus one.
[0070] In addition to being defined by simple and compound
functions, a property may be defined so that no property value is
generated under some conditions. For example, a property associated
with a polygon may be defined so that, if the area of the polygon
is smaller than a threshold value, then no value is generated for
the property. This feature may be useful where, for example,
property values need only be generated for design objects having
desired characteristics. If a design object does not have the
required characteristics, then no property will be generated for
the design object and it can be ignored in subsequent calculations
using the generated property values.
[0071] More generally, a property's value may be defined by
alternative functions, such as the functions below:
IF AREA(METAL1)<0.5, THEN X=1
IF AREA(METAL1).gtoreq.1, THEN
X=AREA(METAL1)*0.5+(PERIMETER(METAL1)).sup.2
With these alternative functions, each polygon in the data layer
"metal1" is analyzed. If the area of the polygon is below 0.5, then
the value of the property X for the polygon is 1. Otherwise, the
value of the property X for the polygon is the area of the polygon
multiplied by 0.5, added to the square of the perimeter of the
polygon.
[0072] A property may have multiple values. For example, a property
may have an x-coordinate value, a y-coordinate value, and a
z-coordinate value. Moreover, a property may have multiple,
heterogeneous values. For example, a property may have a numerical
value and a string value. Thus, a property associated with a cell
can have a numerical value that may be, e.g., a device count of
devices in the cell, while the string value may be, e.g., a model
name identifying the library source for the cell. Of course, a
property with multiple heterogeneous values can include any
combination of value types, including any combination of the value
types described above (e.g., one or more constant values, one or
more vector values, one or more dynamic values, one or more
alternate values, one or more simple values, one or more compound
values, one or more alternate values, one or more string values,
etc.).
[0073] Still further, the number of values of a property may change
dynamically change. For example, a property K may have the values
"a" and "b" (i.e., value of property K=a, b) before an electronic
design automation process is executed. The electronic design
automation process may then change the property to include a third
value "c" (i.e., value of property K=a, b, c). Of course, the
electronic design automation process also may alternately or
additionally change the values of property K to one or more
completely different values (e.g., value of property K=d, e, f).
Moreover, with some implementations of the invention, the value of
a property at one time may depend upon the value of the property at
a previous time. For example, the value of a property Q at time
t.sub.2 may be derived from the value of the property Q at time
t.sub.1. Of course, in addition to constant values, and values
generated based upon simple, compound, or alternative variable
functions, a property's value can be specified according to any
desired definition. For example, in addition to single or alternate
mathematical functions, the value of a property may even be an
array of constant values, variable functions, or some combination
thereof. It should be appreciated, however, that, by using a
scripting language as described above, property values can be
dynamically generated during an electronic design automation
process.
[0074] That is, by specifying property value definitions using a
scripting language, the actual property values can be generated
based upon the definitions when the design is analyzed during an
electronic design automation process. If the data in the design is
changed, then the property values will automatically be
recalculated without requiring further input from the designer.
Thus, employing a scripting language allows a designer or other
user to develop properties and determine their values as needed. It
also may provide the flexibility to allow third parties to develop
new analysis techniques and methods, and then specify scripts that
allow the user of an electronic design automation tool to use the
scripts developed by a third party to generate property values for
use with those new techniques and methods.
[0075] As previously noted, a property may be associated with any
desired type of design object in a design. Thus, in addition to a
single geometric element in a layout design, such as a polygon,
edge, or edge pair, a property also can be associated with a group
of one or more design objects in a layout design. For example, a
property may be associated with a group of polygons or a
hierarchical cell in a layout design (which themselves may be
considered together as a single design object). A property also may
be associated with an entire category of one or more design
objects. For example, a property may be associated with every
occurrence of a type of design object in a design layer, such as
with every cell in a design, or every instance of a type of
geometric element occurring in a design. A property also may be
specifically associated with a particular placement of a cell in a
design. In addition to design objects in a layout design,
properties also may be associated with design objects in other
types of designs, such as logical designs. A property thus may be
associated with any desired object in a logical design, such as a
net, a device, an instance of a connection pin, or even a placement
of a cell in the design.
[0076] It also should be appreciated that, with various embodiments
of the invention, a property associated with one design object also
can be associated with another design object. Further, a property's
value may be calculated using geometric or logical data for any
desired design object, including design objects different from the
design object with which the property is associated. With some
implementations of the invention, a property's value may even be
calculated using geometric or logical data for one or more design
objects from multiple design data layers. For example, a designer
may specify a design layer entitled "pair" that includes any
specified edge pairs in a layout design, and another design layer
entitled "edge" that includes specified edges in a layout design. A
designer can then define a property Z for each edge in the edge
layer as:
Z=AREA(METAL1)/LENGTH(EDGE)+EW(PAIR)
where AREA is the area of one or more polygons related to the edge,
LENGTH is the length of the edge, and EW is the width between the
edges of an edge pair related to the edge. Thus, the value of the
property Z for an edge is dependent upon the area of some other
polygon related to the edge.
[0077] With some implementations of the invention, various
algorithms can be used to define which design objects, such as
geometric elements, will be related to each other for use in a
property definition. For example, the definition for property Z
above may employ a relationship algorithm that includes a polygon
in the property value determination if the polygon touches the edge
associated with the property, and includes an edge pair in the
property value determination if one edge is the edge associated
with the property and the second edge is connected to the first
edge through a polygon (i.e., both edges are part of the same
polygon, as opposed to being separated by an empty space).
[0078] Of course, any desired algorithms can be used to determine
which design objects will be related to each other for determining
the value of a property. Other possible relationship algorithms for
physical layout designs, for example, may relate all geometric
elements that overlap, all geometric elements that intersect, all
geometric elements that touch or otherwise contact each other, or
all geometric elements that are within a defined proximity of
another geometric element. With still other relationship
algorithms, if one geometric element touches multiple geometric
elements, the algorithms can decide to treat the touching geometric
elements as errors, or to relate all touched shapes. Still other
relationship algorithms can employ clipping, where, e.g., if a
first geometric element intersects a second geometric element, only
the part of the second geometric element inside the first geometric
element is employed when determining a property value, etc.
[0079] Similarly, a variety of relationship algorithms can be used
to relate design objects in a logical design to each other for use
in a property definition. For example, a property definition may
relate all design objects that belong to the same logical device,
all design objects that share a common net, or all design objects
that share a reference identifier with, e.g., the design object
with which the property is associated. Of course, still other
relationship criteria can be employed to relate design objects in
designs to each other for use in a property definition.
[0080] Further, by defining a second property value so that it
incorporates a first property value, a property value associated
with any design object or group of design objects can be associated
with any other design object or group of design objects. For
example, a property for a first polygon may be the area of that
polygon. A property for a second polygon touching or contacting
that first polygon can then be defined as the area of the first
polygon. In this manner, a property value associated with the first
polygon can be associated with the second polygon. Thus, a property
associated with a geometric element also can be associated with a
cell incorporating that geometric element. Similarly, a property
associated with a geometric element can be associated with an
adjacent geometric element. Still further, a property of a
geometric element can be associated with the entire data layer in a
design.
[0081] With various implementations of the invention, the value of
a property associated with a design object property value is
separate from a description of the design object with which the
property is associated. That is, with various implementations of
the invention the value of a property is not simply a
characteristic of the design object with which the property is
associated, but instead may be considered a distinct design object
itself. According to some implementations of the invention, for
example, the property values for various design objects may be
stored in an array. FIG. 5 illustrates one example of a type of
array that may be employed by various implementations of the
invention. As seen in this figure, the array 501 includes a column
listing identifiers 503. It also includes a column with property
values 505 for a property G, a column with property values 505 for
a property H, and a column with property values 505 for a property
I.
[0082] Each identifier 503 identifies an occurrence of a design
object associated with each of the properties G, H, and I. With the
illustrated example, the design object may be, e.g., a type of cell
in a hierarchical physical layout design. The definition for the
property G then may be the coordinate value for the placement of
the cell, while the definition of the property H may be both the
library from which the cell was obtained and the count of the cell
in the design. The definition of the property I then may be the
percentage at which the structure described in the cell will be
improperly formed during a manufacturing process. From the array
501, it can thus be determined that, e.g., the cell "design object
8" is located at the x, y coordinate values 40, 8 in the design,
was originally obtained from library 8, and is the ninth occurrence
of that cell in the design. Also, the value of property I for this
cell indicates that it has a 0.000009% failure rate when
manufactured.
[0083] While a table-type array is illustrated in FIG. 5 for each
of understanding, it should be appreciated that, as used herein,
the term "array" is intended to encompass any type of data
structure that behaves like a logical array. Thus, various
implementations of the invention may alternately or additionally
employ, for example, such structures as a Calibre number table
(used with the Calibre family of software tools available from
Mentor Graphics Corporation of Wilsonville, Oreg.) or a Standard
Template Library (STL) deque. It also should be appreciated that,
while FIG. 5 illustrates a single set of property values for each
design object, various implementations of the invention may allow
multiple identifies to be associated with a single set of property
values. This arrangement may be beneficial, e.g., for reducing
memory usage where one or more design objects will have the same
value for an associated property. Also, it should be noted that
various implementations of the invention may update a property
value by overwriting or otherwise replacing the previous property
value in memory with the updated property value, to conserve memory
usage.
Transfer of Property Values from One EDA Process to Another EDA
Process
[0084] One use of properties according to various implementations
of the invention is to transfer information determined in one
electronic design automation process to another electronic design
automation process in a format that can readily be used by the
second electronic design automation process. For example,
properties can be defined and used to transfer information from a
simulation analysis process (such as an optical proximity
correction process, an etch simulation analysis process, or a
planarization simulation analysis process) to a geometry analysis
process (such as a design rule check process, a design for
manufacturing process, or an optical rules check process) or a
logic analysis process (such as a layout-versus-schematic process,
an electrical rule checking process, or a design logic verification
process). Similarly, properties can be used to transfer information
from a geometry analysis process to a simulation analysis process
or a logic analysis process, or to transfer information from a
logic analysis process to a simulation analysis process or a
geometry analysis process.
[0085] A variety of information can be transferred from one EDA
process to another EDA process. For example, one EDA process could,
in the course of operation, determine information relating to the
yield of design objects in a layout design, and provide that
information as property values associated with the design objects.
Yield information may include, for example, the likelihood that a
design object will not be manufactured correctly and thus will not
perform according to specification.
[0086] For example, referring back to FIG. 4, the likelihood that
two adjacent parallel wiring lines will be improperly manufactured
and "bridge" together may be dependent upon the width of the lines,
the distance between the lines, and the length for which the lines
are adjacent. As discussed in detail above, the value of a property
Z can take into account the area of one or more polygons related to
the edge 411, the length of the edge 411, and the width between the
edges 409 and 411. Accordingly, the value of this property (or a
property with a similar definition that relates these features) can
be used to determine the likelihood that the wires 409 and 411 will
bridge together during a manufacturing process. Thus, an EDA
process that can easily calculate the value of property Z, such as
a design-rule-check process, can determine a value for the property
Z with respect to the line 409 or the line 411. Another EDA
process, such as a DFM process, can then employ that property value
to, e.g., determine the likelihood that the wires 409 and 411 will
bridge together during a manufacturing process
[0087] Still other information that may be generated during one EDA
process and then provided to another EDA process is failure
prediction. Failure prediction may, e.g., map yield information to
particular design features. For example, if a via has a low yield,
and if its failure will cause a device in the manufactured circuit
to be "stuck open," the failure prediction information may
correlate the low yield of the via to the likelihood that a net
connected to the device will be stuck open. Still other information
that may be generated during one EDA process and then provided to
another EDA process as property information includes test hints,
which suggest test patterns to stress potential failure in a
manufactured circuit. For example, the test hint may suggest test
patterns that will test potential failures identified by failure
prediction information. It also may include reliability
information, corresponding to delayed failures that may occur
during the use of the manufactured device, such as the failure of a
contact from thermal stress. Yet other information that can be
conveyed from one EDA process to another EDA process as property
information includes reliability and manufacturability metrics.
These metrics may be, e.g., specific qualitative characteristics
for certain failure mechanisms such as, for example, variation
across process window or probability of photoresist collapse.
[0088] Additionally, planarity information can be conveyed from one
EDA process (such as a planarization simulation analysis process)
to another EDA process. This type of information may include, e.g.,
information generated using planarity models that simulate the
process of chemical-mechanical polishing to predicted thickness
after polishing based on distribution of hardness of the materials
across the chip (oxide is harder than everything else, copper is
softer, polysilicon is in between). Still further, heat dissipation
information may be determined by one EDA process, and then provided
to another EDA process in the form of property values.
[0089] FIG. 6 illustrates a flowchart showing a method that an EDA
process may use to generate and provide a property value to another
EDA process. In step 601, the first EDA process receives design
data. Next, in step 603, the first EDA process analyzes the design
data, and in step 605 generates one or more property values from
the design data based upon the definition of the property. The, in
step 607, the first EDA process stores the property values in a
memory storage medium for use by the second EDA process. With
various implementations of the invention, the memory storage medium
may be any type of storage medium, such as a processor register,
RAM, a magnetic memory storage disc, an optical storage disc or
other format, etc. In step 609, the second EDA process obtains the
stored property values for use in its own execution. With some
implementations of the invention, the generated property values may
be provided immediately to the second EDA process. With this
arrangement, the property values may only be briefly stored in
memory, such as in a process register. For still other
implementations, however, the property values may be stored in a
more long-term storage medium, and the second EDA process initiated
some time after the property values have been generated.
Transfer of Property Values from an OPC Process to a DFM or LVS
Process
[0090] To illustrate one example of the exchange of properties
between EDA process in more detail, the use of properties to
transfer information from an OPC process to a DFM process or to an
LVS process will be discussed. Optical proximity correction (OPC)
is one type of process frequently provided by electronic design
automation tools. As microcircuits have evolved to include smaller
and smaller features, many circuit designs now include features
that are smaller than the light wavelength that will be used to
create those features during a lithographic process. This type of
subwavelength imaging often creates distortions during the
lithographic process, however. To address these distortions,
correction algorithms are employed to modify the physical layout of
the circuit design, as noted above. This process is generally
called optical proximity correction (OPC). Thus, as used herein,
the term optical proximity correction includes the modification of
a physical layout of a circuit design to improve the reproduction
accuracy of the layout during a lithographic process. In addition,
however, the term optical proximity correction as used herein will
also include the modification of the physical layout design to
improve the robustness of the lithographic process for, e.g.,
printing isolated features and/or features at abrupt proximity
transitions.
[0091] During optical proximity correction, the polygon edges of
the physical layout are divided into small fragments. These
fragments are then moved, and additional small polygons may be
added to the physical layout at strategic locations. The
lithographic process is then simulated to determine whether the
image that would be created by the modified or "corrected" layout
would be better than the image created that would be created by
previous modifications to the layout image. This process is then
iteratively repeated until a modified layout the simulation and
verification tool generates a modified layout that will produce a
satisfactory image resolution during an actual lithographic
process.
[0092] Typically, optical proximity correction techniques are
classified as either rule-based or model-based. With rule-based
optical proximity correction, the layout modifications are
generated based upon specific rules. For example, small serifs may
be automatically added to each convex (i.e., outwardly-pointing)
900 corner in the layout. Model-based optical proximity correction
generally will be significantly more complex than rule-based
optical proximity correction. With model-based optical proximity
correction, lithographic process data obtained from test layouts
are used to create mathematical models of the lithographic
patterning behavior. Using an appropriate model, the simulation and
verification tool will then calculate the image that will be
created by a corrected layout during the lithographic process. The
layout features undergoing correction then are iteratively
manipulated until the image for the layout (calculated using the
model) is sufficiently close to the desired layout image. Thus,
some model-based optical proximity correction algorithms may
require the simulation of multiple lithographic process effects by
a calculating a weighted sum of pre-simulated results for edges and
corners. An example of an optical proximity correction algorithm is
described in "Fast Optical Process And Proximity Correction
Algorithms for Integrated Circuit Manufacturing," by Nick Cobb
(Ph.D. Thesis), University of California, Berkeley, 1998.
[0093] As will be appreciated by those of ordinary skill in the
art, performing a rule-based optical proximity correction process
is computationally more intensive than performing a design rule
check, and performing a model-based optical proximity correction is
even more so. Further, the computations required for the optical
proximity correction process are more sophisticated than the
computations that usually would be employed in a design rule check
process. Obtaining a simulated lithographic image, for example, may
involve modeling the lithographic light source as a plurality of
separate coherent light sources arranged at different angles. For
each such coherent light source, a simulated image is obtained by
calculating a fast Fourier transform (FFT) to model the operation
of the lens used in the lithographic process. These simulated
images are then summed to obtain the image that would be produced
by the lithographic process.
[0094] Accordingly, an OPC process will employ a different data
"resolution" than a DFM or LVS process. For example, in analyzing a
simple rectangular polygon that represents a transistor gate, the
OPC process may transform the rectangular polygon into a contoured
polygon with perhaps millions of edges. Thus, an OPC process will
typically execute massively parallel operations that (1) divide
relatively large polygons in a design into a much larger number
(e.g., a million) of relatively small polygons, and (2) may require
ignoring a hierarchical structure of the data being analyzed. As a
result, information generated by an OPC process typically is
incompatible with a DFM or LVS process, each of which usually
executes calculations on the relatively large polygons in the
original design, and significantly benefits from performing those
calculations using a hierarchical arrangement in the design.
[0095] For example, with a rectangular polygon representing a
transistor gate, an OPC process will generate a very contoured
polygon that represents the actual details of the gate's shape
after diffraction has occurred in a lithographic manufacturing
process. An LVS process, on the other hand, only requires an
overall width and length of the gate to characterize the device.
Accordingly, an LVS process may use a formula that averages the
widths of the contoured gate shape calculated by the OPC process,
and this average value is then used by the LVS to characterize the
device. In order to calculate this average width value, however,
the LVS process typically must obtain the detailed contour
information from the OPC process, which is undesirable. With
various examples of the invention, these average width values can
easily be calculated by the OPC, and the results attached as
property values to the original gate polygon. These property values
describing contour information, which were efficiently calculated
by the OPC process, then can be passed onto the LVS process. In
turn, the LVS process can then be configured to use the received
property values to identify the device. In this manner, each
process can operate in its optimum mode for processing design
data.
[0096] As will be appreciated by those of ordinary skill in the
art, the transfer of information from an OPC process to a DFM
process via properties is similar, but can more generic, in that a
broad range of information may be analyzed in a DFM process. For
example, a DFM process may wish to perform a fault probability
calculation for a wire based upon a "pullback" value for a wire (an
amount that the wire will retract or extend due to diffraction in a
manufacturing process). Typically, a DFM process cannot easily
calculate this type of value. With various examples of the
invention, however, an OPC process can calculate a pullback value
for a wire, and then attach this value as a property value to the
simple layout polygon on which the OPC analysis was performed. A
DFM process can then subsequently use this pullback value to
improve the accuracy of the DFM process results without requiring a
corresponding increase in calculations.
[0097] In addition to pullback information, an OPC process may
determine still other types of contour information as one or more
property values, and pass those property values onto an LVS or DFM
process. For example, the OPC process may generate property values
describing gate variation, contact stability, interconnection
variation, bridging, etc. By then providing these property values
to an LVS or DFM process, the LVS or DFM process can then use these
values during its own operation, without having to recalculate the
information.
[0098] Yet another example of the use of properties to transfer
information from one electronic design automation process to
another electronic design automation process relates to the
determination of a variation band. Process variation bands are
discussed in detail in U.S. Patent Publication No. 20050251771,
published on Nov. 10, 2005, entitled "Integrated Circuit Layout
Design Methodology With Process Variation Bands," naming Juan
Andres Torres Robles as inventor, which publication is incorporated
entirely herein by reference. A process variation band can be
calculated by an OPC process. The process variation band represents
a range of possible shape variations produced by a polygon in a
layout design that may result from diffraction created by different
process conditions during a manufacturing process. The results of
the process variation band can then be attached to the
corresponding polygon for subsequent use in a DFM process. For
example, a polygon may have associated property values that can
include both calculated geometric values (e.g., a band deviation of
0.1) and parameters at which those geometric values were calculated
(e.g., the band deviation of 0.1 was calculated for a defocusing of
1%).
[0099] This property information provided by the OPC process then
can be used by a DFM process in any desired manner. For example, a
DFM can do an initial check for bridging faults using the simple
polygons in the original layout design. Where the DFM process
determines that there is a likelihood of a fault, the DFM process
can check the process variation band values provided as associated
property values to calculate if a fault will occur (or the
likelihood that a fault may occur) with greater accuracy. Still
further, the DFM process can alternately or additionally determine
a failure area falling between two adjacent "marker" areas on
adjacent lines. Using the process variation information passed as
property values from the OPC process, the DFM process then can
determine a process variation index that represents the overlap of
the process variation band area with the fault area (as, e.g., a
simple ratio). Based upon this process variation index, the DFM
process can determine the likelihood of a fault occurring at the
associated bridge area. By adding up the process variation index
values (which themselves can be recorded as property values) for
each marker in a wire, the DFM value can, e.g., identify the wire
in a design that is most likely to cause a fault, or identify a
marker area that is most likely to cause wire to fail, etc.
[0100] As discussed above, various examples of the invention have
been described with regard to the use of property values generated
during an OPC process in subsequent electronic design automation
processes. It should be appreciated, however, that the use of
property values are not limited to those generated during an OPC
process. Other implementations of the invention may, for example,
use property values generated by any optical-related electronic
design automation process in other, subsequent electronic design
automation processes. For example, some implementations of the
invention may similarly use property values generated during an
optical proximity rule check (ORC) process or a phase shift mask
(PSM) process in subsequent electronic design automation
processes.
Transfer of Property Values Between a DFM Process and an LVS
Process
[0101] Still further, properties may be employed according to
various examples of the invention to transfer information from a
DFM process to a LVS process. An LVS process typically identifies
or characterizes a device by starting with a basic polygon in the
device as the source of a device identification, and then analyzing
each touching or overlapping polygon in the design to determine the
extent of the device. As a result, a LVS process typically cannot
consider polygons that are separate from a device as part of the
device's identification analysis. In order to accurately
characterize a device in a design, however, an LVS process may need
to use of measurements of geometric features that are outside of
what the LVS process would normally recognize as being related to
the device.
[0102] For example, in order to characterize the operation of a
device using strained silicon, such as a transistor, the LVS
process may the amount of stress applied to the transistor gate by
the strained silicon. In order to make this determination, the LVS
process should know a distance between the strained silicon
material and any holes formed in an adjacent but separate device
(e.g., a wire). Because the LVS process cannot measure features
relating to the adjacent device, however, it may not be able to
accurately characterize the strained silicon device. With various
examples of the invention, however, a DFM process can measure
distances between the strained silicon device and holes in an
adjacent wire. The DFM process then can record these measurements
as property values associated with polygon representing the gate of
the strained silicon device. The LVS process can then subsequently
employ these properties to characterize the operation of the
strained silicon device without having to perform any analysis of
adjacent devices. Accordingly, it may be useful for an LVS process
to have some information outside of a device's boundaries, and this
external information can be provided to the LVS process by another
process using property values in accordance with various
implementations of the invention.
[0103] Still further, property values can be passed from an LVS
process to a DFM process. For example, an LVS process can identify
polygons in a design that represent gates for a high-current MOS
transistor, and then record property values for these polygons
identifying them as gates for a high current MOS transistor (e.g.,
as a property with a numerical value of a current load for the gate
identifying it as a high current MOS, or as a property with a
string value of "high current MOS," etc.). These property values
then can be passed back to the DFM process. The DFM process could
then use a filter to identify the high-current MOS structures, and
perform whatever operation is desired on those structures
identified through the filter.
[0104] Still further, properties can be used to transfer
information from a design object in one type of design to another
design object in another type of design. For example, an LVS
process can determine operational characteristics for a design
object in a design, such as the capacitance of a transistor. The
LVS process can then store these operation characteristics as
property values associated with the data structure, and provide
these property values to a corresponding data structure in, e.g., a
logical design. Similarly, a DFM process may use a PEX (parasitic
extraction) process to calculate, e.g., capacitance, which can then
be employed as a property in a layout design or a schematic
design.
Transfer of Properties within an EDA Process
[0105] Another use of properties that may be employed according to
various implementations of the invention is to transfer information
from one portion of an electronic design automation process to
another portion of that electronic design automation process in a
format that can readily be used by the second portion of the
electronic design automation process. Again, a variety of
information can be transferred within a single EDA process using
property values, such as yield information, failure prediction
information, and test hints. It also may include reliability
information, reliability and manufacturability metrics, planarity
information, and heat dissipation information.
[0106] FIG. 7 illustrates a flowchart showing a method that a first
portion of an EDA process may use to generate and provide a
property value to a second portion of the EDA process. In step 701,
the first portion of the EDA process receives design data. Next, in
step 703, the first portion of the EDA process analyzes the design
data, and in step 705 generates one or more property values from
the design data based upon the definition of the property. The, in
step 707, the first portion of the EDA process stores the property
values in a memory storage medium for use by the second portion of
the EDA process. With various implementations of the invention, the
memory storage medium may be any type of storage medium, such as a
processor register, RAM, a magnetic memory storage disc, an optical
storage disc or other format, etc. In step 709, the second portion
of the EDA process obtains the stored property values for use in
its own execution. With some implementations of the invention, the
generated property values may be provided immediately to the second
portion of the EDA process. With this arrangement, the property
values may only be briefly stored in memory, such as in a process
register. For still other implementations, however, the property
values may be stored in a more long-term storage medium, and the
second portion of the EDA process initiated some time after the
property values have been generated.
Transfer of Properties within a DFM Process
[0107] Again, to illustrate one example of the exchange of
properties within a single EDA process in more detail, the use of
properties to transfer information within a DFM process will be
discussed. Different functions of a DFM process can use different
levels of data "resolution." A DFM process may provide a high level
manufacturing yield calculation for an entire circuit, which will
have a different data resolution than a fault probability using
detailed information for a specific combination of geometric
elements. Accordingly, a DFM process will calculate fault
information for individual geometric elements, and attach this
fault information as property values to a higher level design
object (e.g., a net or a cell) for use when a designer wishes to
perform a broader analysis of yield probabilities.
[0108] Moreover, a DFM process can calculate enhancements, such as
doubled vias to avoid via formation failures. With via doubling,
for example, a second via can be placed at one of four possible
locations relative to the original via (i.e., above, below, to the
left, or to the right). A DFM process could calculate all possible
options, determine characteristics for each option (e.g.,
capacitance change) for each option, and save the determined
characteristics as property values. Various option combinations
could then be generated using the properties to determine an
optimum option selection that would comply with desired
specifications. The property values also could be used to determine
a potential loss with each element based upon process parameters,
and to determine how much a process improvement would result in a
yield improvement.
CONCLUSION
[0109] While the invention has been described with respect to
specific examples including presently preferred modes of carrying
out the invention, those skilled in the art will appreciate that
there are numerous variations and permutations of the above
described systems and techniques that fall within the spirit and
scope of the invention as set forth in the appended claims. For
example, while specific terminology has been employed above to
refer to electronic design automation processes, it should be
appreciated that various examples of the invention may be
implemented using any desired combination of electronic design
automation processes.
[0110] Thus, in addition to use with "design-for-manufacture"
processes, various examples of the invention can be employed with
"design-for-yield" (DFY) electronic design automation processes,
"yield assistance" electronic design automation processes,
"lithographic-friendly-design" (LFD) electronic design automation
processes, including "chip cleaning" and "design cleaning"
electronic design automation processes, etc. Likewise, in addition
to use with "design-rule-check" electronic design automation
processes, various implementations of the invention may be employed
with "physical verification" electronic design automation
processes. Also, in addition to being used with OPC and ORC
electronic design automation processes, various implementations of
the invention may be used with any type of resolution enhancement
electronic design automation processes.
* * * * *