U.S. patent application number 12/037725 was filed with the patent office on 2008-06-19 for programmable capacitors and methods of using the same.
Invention is credited to Wagdi W. Abadeer, Anthony R. Bonaccio, Jack A. Mandelman, William R. Tonti, Sebastian T. Ventrone.
Application Number | 20080144252 12/037725 |
Document ID | / |
Family ID | 38367758 |
Filed Date | 2008-06-19 |
United States Patent
Application |
20080144252 |
Kind Code |
A1 |
Abadeer; Wagdi W. ; et
al. |
June 19, 2008 |
PROGRAMMABLE CAPACITORS AND METHODS OF USING THE SAME
Abstract
In a first aspect, a first method of adjusting capacitance of a
semiconductor device is provided. The first method includes the
steps of (1) providing a transistor including a dielectric material
having a dielectric constant of about 3.9 to about 25, wherein the
transistor is adapted to operate in a first mode to provide a
capacitance and further adapted to operate in a second mode to
change a threshold voltage of the transistor from an original
threshold voltage to a changed threshold voltage such that the
changed threshold voltage affects a capacitance provided by the
transistor when operated in the first mode; and (2) employing the
transistor in a circuit. Numerous other aspects are provided.
Inventors: |
Abadeer; Wagdi W.; (Jericho,
VT) ; Bonaccio; Anthony R.; (Shelburne, VT) ;
Mandelman; Jack A.; (Flat Rock, NC) ; Tonti; William
R.; (Essex Junction, VT) ; Ventrone; Sebastian
T.; (South Burlington, VT) |
Correspondence
Address: |
IBM CORPORATION, INTELLECTUAL PROPERTY LAW
DEPT 917, 3605 HIGHWAY 52 NORTH
ROCHESTER
MN
55901-7829
US
|
Family ID: |
38367758 |
Appl. No.: |
12/037725 |
Filed: |
February 26, 2008 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
11353516 |
Feb 14, 2006 |
7358823 |
|
|
12037725 |
|
|
|
|
Current U.S.
Class: |
361/277 |
Current CPC
Class: |
H03L 7/099 20130101;
H03B 5/1212 20130101; H03L 7/18 20130101; H03L 7/095 20130101; H03L
2207/06 20130101; H03B 5/124 20130101; H03B 5/1228 20130101; H03L
7/10 20130101 |
Class at
Publication: |
361/277 |
International
Class: |
H01G 7/00 20060101
H01G007/00 |
Claims
1. A semiconductor device having an adjustable capacitance,
comprising: a transistor formed on a substrate having: a gate
region including a dielectric material having a dielectric constant
of about 3.9 to about 25; wherein the transistor is adapted to
operate in a first mode to provide a capacitance; and wherein the
transistor is adapted to operate in a second mode to change a
threshold voltage of the transistor from an original threshold
voltage to a changed threshold voltage such that the changed
threshold voltage affects a capacitance provided by the transistor
when operated in the first mode.
2. The semiconductor device of claim 1 wherein: the semiconductor
device further includes a source diffusion region and a drain
diffusion region; and the transistor is adapted to operate in the
first mode to provide the capacitance when a voltage is applied to
the gate region, and the source diffusion region, drain diffusion
region and substrate are grounded.
3. The semiconductor device of claim 1 wherein the dielectric
material is hafnium silicon oxide (HfSiO).
4. The semiconductor device of claim 1 wherein the transistor is
adapted to provide low-leakage capacitance.
5. The semiconductor device of claim 1 wherein the transistor is
further adapted to provide a capacitance of about 0.1
fF/.mu.m.sup.2 to about 2.0 fF/.mu.m.sup.2.
6. The semiconductor device of claim 1 wherein the transistor is
adapted to store a capacitance state.
7. A system adapted to provide a variable capacitance, comprising:
a circuit including at least one transistor including a dielectric
material having a dielectric constant of about 3.9 to about 25;
wherein each of the at least one transistor is adapted to operate
in a first mode to provide a capacitance; wherein each of the at
least one transistor is adapted to operate in a second mode to
change a threshold voltage of the transistor from an original
threshold voltage to a changed threshold voltage such that the
changed threshold voltage affects a capacitance provided by the
transistor when operated in the first mode; and wherein a
capacitance provided by the circuit is based on the capacitance
provided by each of the at least one transistor.
8. The system of claim 7 wherein the circuit is a
voltage-controlled oscillator of a phase-locked loop.
9. The system of claim 7 wherein the circuit is a binary weighted
array of the at least one transistor.
10. The system of claim 7 further comprising control circuitry
coupled to one or more of the at least one transistor and adapted
to: cause one or more of the at least one transistor to operate in
the first mode; and cause one or more of the at least one
transistor to operate in the second mode.
11. The system of claim 10 wherein: the circuit is a
voltage-controlled oscillator of a phase-locked loop (PLL); and the
control circuitry includes a multiplexer adapted to: selectively
output a functional voltage to the at least one transistor such
that the at least one transistor operates in the first mode to
provide a capacitance based on the functional voltage; and
selectively output a programming voltage to the at least one
transistor such that the at least one transistor operates in the
second mode to change a threshold voltage of the at least one
transistor based on the programming voltage.
12. The system of claim 11 wherein the functional voltage is the
control voltage of the PLL.
13. The system of claim 11 wherein the control circuitry is further
adapted to: selectively output a functional voltage to the at least
one transistor such that the at least one transistor operates in
the first mode to provide a first transistor capacitance based on
the functional voltage such that the circuit provides a first
circuit capacitance that does not lock the PLL within a
predetermined distance from a center control voltage; selectively
output a programming voltage to the at least one transistor such
that a threshold voltage of the at least one transistor changes
from an original threshold voltage to a changed threshold voltage
such that the changed threshold voltage affects a capacitance
provided by the transistor, and therefore the circuit, when
operated in the first mode; and thereafter, selectively output the
functional voltage to the at least one transistor such that the at
least one transistor operates in the first mode to provide a second
transistor capacitance based on the functional voltage such that
the circuit provides a second circuit capacitance that locks the
PLL.
14. The system of claim 10 wherein: the circuit includes a first
set of one or more of the transistors coupled in parallel to a
second set of one or more of the transistors; and the control
circuitry is further adapted to: cause transistors in one or more
of the first and second sets to operate in the first mode such that
the circuit provides a first circuit capacitance; and cause the
transistors in one or more of the first and second sets to operate
in the second mode such that respective threshold voltages of the
transistors change; and thereafter, cause the transistors in one or
more of the first and second sets to operate in the first mode such
that the circuit provides a second circuit capacitance.
15. The system of claim 14 wherein the control circuitry includes
switches adapted to: cause a functional voltage to be applied to
transistors in one or more of the first and second sets such that
the transistors operate in the first mode and the circuit provides
a circuit capacitance; and cause a programming voltage to be
applied to transistors in one or more of the first and second sets
such that the transistors operate in the second mode and respective
threshold voltages of the transistors change.
Description
[0001] The present application is a continuation of and claims
priority to U.S. patent application Ser. No. 11/353,516, filed Feb.
14, 2006, which is hereby incorporated by reference herein its
entirety.
CROSS-REFERENCE TO RELATED APPLICATION
[0002] The present application is related to U.S. patent
application Ser. No. 11/353,493, filed Feb. 14, 2006 and titled
"MEMORY ELEMENTS AND METHODS OF USING THE SAME" (Attorney Docket
No. ROC920050313), which is hereby incorporated by reference herein
in its entirety.
FIELD OF THE INVENTION
[0003] The present invention relates generally to semiconductor
devices, and more particularly to programmable capacitors and
methods of using the same.
BACKGROUND
[0004] A conventional transistor may be employed as a capacitor. A
plurality of such transistors may be coupled to form an array of
capacitors. However, a large amount of circuitry and additional
process complexity are required to maintain a state of the
capacitor array. Further, such a conventional transistor may not
provide low leakage (e.g., voltage or capacitance leakage), a wide
tuning range and be adapted to integrate easily into existing
complementary metal-oxide-semiconductor field effect transistor
(CMOS) processing. Accordingly, an improved capacitor and circuitry
formed thereby, and methods of using the same are desired.
SUMMARY OF THE INVENTION
[0005] In a first aspect of the invention, a first method of
adjusting capacitance of a semiconductor device is provided. The
first method includes the step of providing a transistor including
a dielectric material having a dielectric constant of about 3.9 to
about 25. The transistor is adapted to operate in a first mode to
provide a capacitance and further adapted to operate in a second
mode to change a threshold voltage of the transistor from an
original threshold voltage to a changed threshold voltage. The
changed threshold voltage affects a capacitance provided by the
transistor when operated in the first mode. The first method also
includes the step of employing the transistor in a circuit.
[0006] In a second aspect of the invention, a first apparatus is
provided. The first apparatus is a semiconductor device having an
adjustable capacitance that includes a transistor formed on a
substrate having a gate region including a dielectric material
having a dielectric constant of about 3.9 to about 25. The
transistor is adapted to (1) operate in a first mode to provide a
capacitance; and (2) operate in a second mode to change a threshold
voltage of the transistor from an original threshold voltage to a
changed threshold voltage such that the changed threshold voltage
affects a capacitance provided by the transistor when operated in
the first mode.
[0007] In a third aspect of the invention, a first system is
adapted to provide a variable capacitance. The first system is a
circuit that includes at least one transistor including a
dielectric material having a dielectric constant of about 3.9 to
about 25. Each transistor is adapted to operate in a first mode to
provide a capacitance. Further, each transistor is adapted to
operate in a second mode to change a threshold voltage of the
transistor from an original threshold voltage to a changed
threshold voltage such that the changed threshold voltage affects a
capacitance provided by the transistor when operated in the first
mode. A capacitance provided by the circuit is based on the
capacitance provided by each transistor. Numerous other aspects are
provided in accordance with these and other aspects of the
invention.
[0008] Other features and aspects of the present invention will
become more fully apparent from the following detailed description,
the appended claims and the accompanying drawings.
BRIEF DESCRIPTION OF THE FIGURES
[0009] FIG. 1 is a graph illustrating a relationship between
capacitance ratio and voltage.
[0010] FIG. 2 is a schematic diagram of a phase-locked loop (PLL)
including a programmable capacitor in accordance with an embodiment
of the present invention.
[0011] FIG. 3 is a schematic diagram of a first exemplary
voltage-controlled oscillator (VCO) included in the PLL in
accordance with an embodiment of the present invention.
[0012] FIG. 4 is a schematic diagram of a second exemplary VCO
included in a modified version of the PLL in accordance with an
embodiment of the present invention.
[0013] FIG. 5 is a schematic diagram of a capacitor array including
at least one programmable capacitor in accordance with an
embodiment of the present invention.
DETAILED DESCRIPTION
[0014] The present invention provides an improved capacitor and
circuitry formed thereby, and methods of using the same. More
specifically, the present invention may employ a transistor
including a dielectric material having a dielectric constant of
about 3.9 to about 25 as a capacitor. A threshold voltage of the
transistor may be adjusted by applying a bias voltage to a gate of
the transistor. In this manner, a capacitance of the transistor may
be adjusted, and the transistor may be tuned to provide a desired
capacitance. Such an adjustable capacitor may be employed in a
variety of circuits. For example, such a capacitor may be used to
adjust a frequency employed by a phase-locked loop (PLL).
[0015] Alternatively, in some embodiments, a plurality of such
capacitors may be employed in a binary-weighted array of
capacitors. A capacitance of such an array may be based on control
signals (e.g., bits) asserted on one or more inputs of the array.
For example, if a control signal is asserted on a first input of
the array, a capacitance of the array may be based on a first set
of capacitors, which are coupled to the first input, included in
the array. Alternatively, if a control signal is asserted on a
second input of the array, the capacitance of the array may be
based on a second set of capacitors, which are coupled to the
second input, included in the array and so on. A capacitance of
such an array may further be based on programming signals coupled
to the array. Such programming signals may be employed to adjust
threshold voltages of one or more transistors of the array, thereby
affecting respective capacitances subsequently provided by such
transistors, and therefore the capacitance of the array. The
control signals may serve as a coarse adjustment and the
programming signals may serve as a fine adjustment of capacitance
provided by the array, or vice versa.
[0016] In this manner, the present invention may provide a
capacitor whose capacitance may be varied and circuitry formed
thereby, and methods of using the same.
[0017] FIG. 1 is a graph illustrating a relationship between
capacitance ratio and voltage. A conventional
metal-oxide-semiconductor field-effect transistor (MOSFET) (e.g.,
which may be an n-channel MOSFET (NFET)) formed on a substrate may
be employed as a capacitor, which may provide a capacitance C, by
applying a voltage Vg to a gate of the MOSFET while grounding the
substrate and a source and drain of the MOSFET. With reference to
FIG. 1, the graph 100 illustrates a relationship between a
capacitance-to-gate dielectric capacitance per unit area ratio
(C/Cox) and a voltage Vg applied to the MOSFET gate for a capacitor
under different conditions. For example, a first curve 102 of the
graph 100 illustrates the relationship between C/Cox and Vg for the
MOSFET, a second curve 104 of the graph 100 illustrates the
relationship if source/drain diffusion regions are no longer
present and a third curve 106 of the graph 100 illustrates the
relationship if the MOSFET undergoes deep depletion. The
capacitance described by the curves 102, 104, 106 is representative
of a small signal measurement superimposed upon a transient or DC
bias value.
[0018] Capacitance provided by the MOSFET depends on a
gate-to-diffusion region bias as follows. The first curve 102 may
apply to MOSFETs employed in accordance with an embodiment of the
present invention. For example, the first curve 102 may illustrate
low frequency operation in which an approximately unlimited supply
of minority carriers (e.g., electrons) may be available to a
channel region of the MOSFET from the adjacent source/drain
diffusion regions of the MOSFET. Accumulation may refer to a
condition in which depletion does not occur in a top surface of the
substrate. Therefore, a top surface of silicon of the MOSFET is a
P-type material. With reference to the first curve 102, while in
accumulation with a negative gate voltage Vg applied to the NFET,
and the substrate, source and drain grounded, the NFET may provide
a gate capacitance C equal to the gate dielectric capacitance per
unit area Cox. As shown, when the NFET, which is employed as a
capacitor, is biased far enough into accumulation by application of
negative gate bias Vg, a change in Vt may not change the
capacitance C provided by the NFET from Cox.
[0019] When the gate bias voltage Vg is 0, the NFET is at flat band
and provides a flat-band capacitance C.sub.fb. At flat band, a
surface potential .PSI..sub.s is 0. From this point, an
increasingly positive gate bias voltage Vg may cause silicon
depletion to expand, thereby decreasing capacitance provided by the
NFET. As the capacitance decreases while an increasingly positive
gate bias voltage Vg is applied to the NFET, the surface potential
.PSI..sub.s may equal .PSI..sub.B which is the difference between
Fermi level and intrinsic level. Once maximum depletion depth is
reached, a minimum capacitance C.sub.min1 provided by the NFET may
be reached. From this point of the first curve 102, an increase in
gate bias voltage Vg may cause an inversion layer to form (e.g.,
quickly) from carriers in the source/drain diffusion regions of the
NFET. Consequently, the capacitance C provided by the NFET may
increase toward Cox. When the gate bias voltage is increased to a
threshold voltage (Vt) of the NFET, .PSI..sub.s may equal
2.times..PSI..sub.B.
[0020] Alternatively, if source/drain diffusion regions are no
longer present, in the absence of minority carrier generation, a
capacitance (e.g., steady state capacitance) provided by the NFET
may follow the second curve 104 to reach a minimum capacitance
C.sub.min2. While reaching C.sub.min2, as the gate bias voltage is
increased to a Vt of the NFET, .PSI..sub.s may equal
2.times..PSI..sub.B. However, thermal generation of minority
carriers may cause a surface of the silicon to be partially
populated with an n-type material, thereby forming a weak inversion
layer. Consequently, the capacitance provided by the NFET may
increase slightly (from that shown in the second curve 104) as the
gate bias voltage Vg increases.
[0021] Alternatively, an abrupt increase in gate bias voltage Vg
may cause the NFET to enter deep depletion. As illustrated by the
third curve 106, the capacitance provided by the NFET may decrease
until a voltage at which semiconductor breakdown is reached.
Alternatively, under deep depletion conditions, the capacitance
provided by the NFET may at first decrease. However, thereafter,
carrier generation may cause the capacitance provided by the NFET
to increase to a steady state capacitance which is less than
Cox.
[0022] The present invention employs a MOSFET (e.g., an NFET)
including a dielectric material having a high dielectric constant
(hereinafter represented as "k" or ".epsilon..sub.d"), such as
HfSiO and/or the like. For example, the MOSFET may include
dielectric material having a k between about that of SiO2 (e.g.,
3.9) and about that of HfO2 (e.g., 25) depending on the exact
chemical composition (although MOSFETs in accordance with an
embodiment of the present invention may including dielectric
material having a k within a larger or smaller and/or different
range). As described in U.S. patent application Ser. No.
11/353,493, filed Feb. 14, 2006 and titled "MEMORY ELEMENTS AND
METHODS OF USING THE SAME" (Attorney Docket No. ROC920050313),
which is hereby incorporated by reference herein in its entirety, a
MOSFET including such a high-k dielectric material may operate in a
first mode (e.g., a functional mode) to store data and operate in a
second mode (e.g., a programming mode) to change a Vt of the MOSFET
from an original Vt to a changed Vt such that the changed Vt
affects data stored by the memory element when operated in the
first mode. For example, the MOSFET may be operated in the second
mode by applying a gate bias voltage of about +2.0 V or about +2.5
V for less than about 1 second. However, a larger or smaller and/or
different gate bias voltage may be employed. Additionally, the gate
bias voltage may be applied to the MOSFET for a longer or shorter
time period. In this manner, an original Vt of the MOSFET may be
adjusted to the changed Vt, which may be higher than the original
Vt without any other form of device degradation. The original Vt
may be restored or nearly restored by application of a negative
gate bias voltage (e.g., -2.0 V) for a time period (e.g., less than
1 second) without inducing device degradation. Consequently, the
original Vt may be recoverable. Additional details operating the
MOSFET to store data are described in U.S. patent application Ser.
No. 11/353,493, filed Feb. 14, 2006 and titled "MEMORY ELEMENTS AND
METHODS OF USING THE SAME" (Attorney Docket No. ROC920050313),
which is hereby incorporated by reference herein in its entirety,
and therefore, are not described in detail herein.
[0023] Such a MOSFET formed on a substrate may provide a
capacitance when a bias voltage is applied to a gate of the MOSFET,
and the substrate, source and drain of the MOSFET are grounded. The
capacitance provided by the MOSFET is based on the Vt thereof.
Consequently, the MOSFET may be operated in the first mode as a
capacitor while having a first Vt (e.g., the original Vt), thereby
providing a first capacitance. Thereafter, the MOSFET may be
operated in the second mode such that the Vt of the MOSFET is
adjusted from the first Vt to a second Vt (e.g., a first changed
Vt). Subsequently, the MOSFET may be operated in the first mode
while having the second Vt, thereby providing a second capacitance.
Additionally, the MOSFET may be operated in the second mode such
that the Vt of the MOSFET is adjusted from the second Vt to a third
Vt (e.g., a second changed Vt), which may be equal to or
approximately equal to the first Vt. Thereafter, the MOSFET may be
operated in the first mode while having the third Vt, thereby
providing a third capacitance which may be approximately equal to
the first capacitance.
[0024] For example, the MOSFET may be operated in the first mode as
a capacitor while having the original Vt, thereby providing a first
gate capacitance Cg1. To provide the first gate capacitance Cg1, a
first voltage Vg1 may be applied to the gate of the MOSFET. The
first gate voltage Vg1 may be selected from the portion of the
first curve 102 in which C/Cox declines (e.g., rapidly). For
example, a gate bias voltage of about 0 V to about a voltage at
which C.sub.min1 is reached may be selected (although the gate bias
voltage may be selected from a larger or smaller and or different
range). Because the selected gate bias voltage corresponds to a
rapidly changing portion of the first curve 102, in some
embodiments, a highly regulated power supply may be employed to
provide Vg1, thereby reducing and/or eliminating variation of
capacitance provided by the MOSFET. For a selected Vg1, a first
gate capacitance Cg1 provided by the MOSFET may be determined using
the following formula:
Cg1=Cox/{1+[2.times.Cox.sup.2.times.Vg1/(.epsilon..sub.si.times.Q.times.-
N.sub.a)]}.sup.0.5,
[0025] where Cox is the capacitance/unit area for the high-k gate
dielectric, .epsilon..sub.si is the dielectric constant for
silicon, Q is charge of an electron in Coulombs and N.sub.a is
acceptor impurity density in P-type silicon. The capacitance/unit
area may be determined using the following formula:
Cox=.epsilon..sub.o.times..epsilon..sub.d/tox,
[0026] where .epsilon..sub.o is the vacuum permittivity which is
equal to 8.85.times.10.sup.14 F/cm, .epsilon..sub.d is the relative
dielectric constant for the high-k dielectric and tox is a
thickness of the high-k dielectric. Therefore, Cg1 may represent an
operational capacitance of the NFET before a Vt thereof is changed.
Therefore, a capacitance provided by a circuit comprising the
MOSFET may be based on Cg1.
[0027] The MOSFET may be operated in second mode to change a Vt
thereof. For example, a gate bias voltage or stress Vg2 of about
+2.5 V may be applied to the MOSFET for a time t1 of about less
than 1 second to cause a threshold voltage change .DELTA.Vt in the
MOSFET. For example, the Vt may be increased from the original Vt
to the first changed Vt. Such a .DELTA.Vt may shift the first curve
102 to the right. More specifically, a trapped negative charge in
the gate dielectric of the MOSFET may cause +.DELTA.Vt, which may
be mirrored as positive charge in a surface of silicon of the
MOSFET. Consequently, after the threshold voltage change, a larger
gate voltage may be required to achieve a desired depletion level
than the gate voltage required to obtain such depletion level
before the threshold voltage shift. Therefore, after inducing the
.DELTA.Vt, when the MOSFET is operated in the first mode as a
capacitor while having the first changed Vt, in response to the
original gate bias voltage of Vg1, the MOSFET may provide a second
gate capacitance Cg2 which may be larger than the first gate
capacitance Cg1. For the selected Vg1, the second gate capacitance
Cg2 provided by the MOSFET may be determined using the following
formula:
Cg2=Cox/{1+[2.times.Cox.sup.2.times.(Vg1-.DELTA.Vt)/(.epsilon..sub.si.ti-
mes.Q.times.N.sub.a)]}.sup.0.5.
[0028] By adjusting a value of the gate bias voltage Vg2 applied to
the MOSFET and/or a time period that such a voltage is applied to
the MOSFET while operating in the second mode, a desired .DELTA.Vt
may be obtained. Consequently, a desired second gate capacitance
Cg2 may be obtained. In this manner, a capacitance provided by one
or more such MOSFETs (and therefore provided by a circuit
comprising one or more such MOSFETs) may be adjusted (e.g., tuned
in for RF circuits and/or increased for decoupling).
[0029] Using the formulas above, for a MOSFET including a
dielectric material having an .epsilon..sub.d=15 and for
N.sub.a=5.times.10.sup.15/cm.sup.3, Vg1=0.5 V and Cox=33.19
fF/.mu.m.sup.2, the MOSFET may provide a first capacitance
Cg1=0.009.times.Cox=0.3 fF/.mu.m.sup.2. Alternatively, by
decreasing Vg1 to about 0.1 V, the first capacitance Cg1 provided
by the MOSFET may be increased to about 0.7 fF/.mu.m.sup.2.
[0030] By causing the Vt of the MOSFET to change by about 80 mV,
the MOSFET may provide a second capacitance Cg2 of about 1.44
fF/.mu.m.sup.2 for a Vg1 of about 0.1 V, which is about twice the
first capacitance. However, the second capacitance Cg2 may be
increased by causing a larger .DELTA.Vt.
[0031] However, a greater disparity between capacitance provided by
a MOSFET employed as a capacitor before and after a threshold
voltage change may be achieved using a gate bias voltage Vg1 of 0 V
than other gate bias voltages. At Vg1=0 V, the MOSFET operates in a
flat-band condition. A capacitance Cg3 provided by the MOSFET while
operating in this condition is the flat-band capacitance C.sub.fb
and may be determined using the following formula:
1/Cg3=(1/Cox)+{[.epsilon..sub.si.times.K.times.T/(Q.sup.2.times.N.sub.a)-
].sup.0.5/.epsilon..sub.si},
[0032] where K is Boltzmann's constant which equals to
1.3806505.times.10.sup.-23 Joules/Kelvin and T is the absolute
temperature in Kelvin and .DELTA.Vt is about 80 mV. For example,
using the above formula, at 30.degree. C., a MOSFET having an
original Vt may provide a flat-band capacitance Cg3 of 1.7
fF/.mu.m.sup.2. After inducing a .DELTA.Vt of about 80 mV, when the
MOSFET is operated in the first mode as a capacitor while having
the changed Vt, in response to the original gate bias voltage of
Vg1=0 V, the MOSFET may provide a second gate capacitance Cg4,
which may be in the accumulation range of the first curve 102 and
may be larger that Vg3 (and Vg2). The second gate capacitance Cg4
in a flat-band condition provided by the MOSFET may be determined
using the following formula:
Cg4=Cox/{1+[2.times.K.times.T/(Q.times.|Vg-.PSI..sub.s|)]}
[0033] Using the above methods, in accordance with embodiments of
the present invention, one or more such MOSFETs may be employed as
capacitors which may provide a programmable (e.g., an adjustable or
variable) capacitance (e.g., varactors) in a plurality of circuits.
For example, adjustable capacitors may be employed in many
applications of analog circuit design. As described in detail
below, such adjustable capacitors (e.g., varactors) may be employed
to tune a differential LC-tank oscillator circuit adapted to
provide a proper frequency (e.g., a proper center frequency) when
operating in a phase-locked loop (PLL). For example, FIG. 2 is a
block diagram of a PLL 200 including a programmable capacitor in
accordance with an embodiment of the present invention. With
reference to FIG. 2, the PLL 200 may be similar to a conventional
PLL. However, in contrast to the conventional PLL, one or more
components of the PLL 200 may include transistors including a
dielectric material having a dielectric constant of about 3.9 to
about 25 as capacitors which may provide a programmable capacitance
in the manner described above. Further, in contrast to a
conventional PLL, as described below, the PLL 200 may include a
multiplexer adapted to receive a control signal output from a state
machine, and a programming voltage that may be employed to adjust a
Vt of such a transistor. The multiplexer may selectively output the
programming voltage to the transistor based on the control
signal.
[0034] For example, the PLL 200 may include a prescalar M circuit
(e.g., logic) 202 coupled to a phase frequency detector circuit
204. The prescalar M circuit 202 may be adapted to receive a signal
fref as input and output a signal having a frequency 1/M times that
of fref therefrom. Such a signal output from the prescalar M
circuit 202 may serve as a first signal, which may be a known
reference signal, and may be input by the phase frequency detector
circuit 204. The phase frequency detector circuit 204 may be
coupled a filter 206 and a lock detection circuit 208 adapted to
determine whether the PLL 200 has locked and output a signal
accordingly. More specifically, one or more signals output by the
phase frequency circuit 204 may be input by the filter 206 and a
lock detection circuit 208. Similarly, the filter 206 may be
coupled to a control voltage buffer circuit 210 and a voltage
comparator 212 adapted to determine whether the control voltage of
the PLL 200 is greater than or equal to a predetermined value
(e.g., 0 V). More specifically, one or more signals output by the
filter 206 may be input by the control voltage buffer circuit 210
and the voltage comparator 212.
[0035] The lock detection circuit 208 and the voltage comparator
212 may be coupled to a state machine 214. More specifically, a
signal output by the lock detection circuit 208 and/or a signal
output by the voltage comparator 212 may be input by the state
machine 214. Further, the state machine 214 may also receive a
signal including programming control bits as input. The state
machine 214 may output a control voltage selection bit based on the
signal output by the lock detection circuit 208 and the signal
output by the voltage comparator 212. For example, the state
machine 214 may output the program control bits if the signal
output by the lock detection circuit 208 indicates the PLL 200 has
locked a frequency and the voltage comparator outputs a signal
indicating the control voltage of the PLL 200 is not greater than
or equal to the predetermined value. Further, the state machine 214
and control voltage buffer circuit 210 may be coupled to an analog
multiplexer 216. More specifically, a signal (e.g., the control
voltage of the PLL 200) output by the control voltage buffer
circuit 210 or a signal (e.g., the program control bits) output by
the state machine 214 may be input by the analog multiplexer 216.
Further, the analog multiplexer 216 may receive a programming
voltage signal as input. The analog multiplexer 216 may selectively
output a signal input by the multiplexer 216 based on the signal
output by the state machine, which may serve as a control signal of
the multiplexer 216. The analog multiplexer 216 may be coupled to a
voltage-controlled oscillator (VCO) 218 in accordance with an
embodiment of the present invention. More specifically, one or more
signals output by the analog multiplexer 216 may input by the VCO
218. Such signals may be a control voltage and/or a programming
voltage. The VCO 218 may be coupled to a divider N circuit 220.
More specifically, a signal output by the VCO 218 may be input by
the divider N circuit 220. The divider N circuit 220 may divide a
frequency of the signal input by the circuit 220 (received from the
VCO 218) to create and output a second signal having a frequency
1/N times that of the signal input by the circuit 220. The divider
N circuit 220 may be coupled to the phase frequency detector
circuit 204. More specifically, the second signal output by the
divider N circuit 220 may be input by the phase frequency detector
204.
[0036] Similar to a conventional PLL, the PLL 200 is adapted to
adjust (e.g., continuously) a frequency and phase of the second
signal until the frequency and phase of the second signal matches
the frequency and phase of the first signal. The signal output by
the VCO 218 may serve as an output fout, which equals fref times
N/M, of the PLL 200 when the frequency and phase of the second
signal matches the frequency and phase of the first signal, where N
and M are integers which typically range from 1 to 1024 but may
take on other values as well. Structure and function of the
prescalar M circuit 202, phase frequency detector circuit 204,
filter 206, lock detection circuit 208, control voltage buffer
circuit 210, voltage comparator 212 and divider N circuit 220 may
be the same as corresponding circuit of a conventional PLL.
Therefore, such circuitry 202-212, 220 is not described in further
detail herein.
[0037] A VCO of a conventional PLL may be adapted to output a
signal having a frequency based on (e.g., proportional to) a
control signal (e.g., voltage) input by the VCO. The VCO may
include one or more conventional capacitors, and the control
voltage input by the VCO may modify a capacitance in the VCO which
affects the frequency of the VCO output signal. However, during
operation of the conventional PLL, the control voltage may be
limited (e.g., to a value). Therefore, a capacitance in the VCO by
the control voltage may be limited, and a frequency of the VCO
output signal may be limited. Further, such limitations may be due
in part to random variations in processing and difficult to predict
during the design of the VCO. Consequently, due to such
inflexibility of the conventional PLL, the control voltage may be
insufficient to enable the VCO to output a signal having a
frequency and phase such that the conventional PLL may create a
second signal having a frequency and phase that matches that of a
first signal (e.g., a reference signal).
[0038] In contrast to the VCO of a conventional PLL, the VCO 218
may include one or more of the varactors 222 described above (e.g.,
varactors including dielectric material having a k of about 3.9 to
about 25). Further, the VCO 218 may be adapted to receive a control
voltage signal or a programming voltage signal. During operation of
the PLL 200, the control voltage signal may be applied to the VCO
218. More specifically, the control voltage signal may be applied
to at least one of the varactors 222 such that a first capacitance
is created in the VCO 218 which may affect a frequency of the VCO
output signal, and therefore, affects a frequency and phase of the
second signal generated by the PLL 200 that should match the
frequency and phase of the first signal.
[0039] If the PLL 200 is unable to lock the frequency and phase of
the second signal to the first signal using the control voltage,
the programming voltage signal may be applied to the VCO 218. More
specifically, the programming voltage signal may be applied to at
least one of the varactors 222 such that respective Vts of such
varactors change (e.g., from an original Vt to a changed Vt) in the
manner described above). Consequently, thereafter, when the control
voltage signal is applied to at least one of the varactors 222, a
second different (e.g., larger) capacitance is created by the VCO
218. The second capacitance may affect the frequency of the VCO
output signal, and therefore, may affect a frequency of the second
signal generated by the PLL 200 such that the PLL 200 may lock the
frequency and phase of the second signal to the frequency and phase
of the first signal. In this manner, the same control voltage,
which was insufficient to lock the frequency and phase of the
second signal to the frequency and phase of the first signal before
programming (e.g., causing a Vt change in) at least one varactor
222, may be applied to at least one programmed varactor 222 to
successfully lock the frequency and phase of the second signal to
the frequency and phase of the first signal. In this manner, the
PLL 200 provides greater independence of random variations in
capacitance due to processing than a conventional PLL.
[0040] The VCO 218 in accordance with embodiments of the present
methods and apparatus may have a plurality of configurations.
Exemplary circuits which may serve as the VCO 218 are described
below with reference to FIGS. 3 and 4 which are block diagrams of
first and second exemplary voltage-controlled oscillators (VCO)
300, 400, respectively, included in the PLL 200 in accordance with
an embodiment of the present invention. With reference to FIG. 3,
the VCO 300 may include a first inductor 302 having a first input
304 coupled to a power supply such as V.sub.DD. A second input 306
of the first inductor 302 may be coupled to a varactor 222 and a
first MOSFET (e.g., NFET) 308. More specifically, the second input
306 of the first inductor 302 may be coupled to a first terminal
310 of the varactor 222 and a drain or source terminal 312 of the
first NFET 308. A source or drain terminal 314 of the first NFET
308 may be coupled to a power supply such as ground. Although
varactor 222 is shown as a single varactor, in some embodiments,
varactor 222 may comprise two discrete series varactors with the
control voltage connected to the common point between such
varactors.
[0041] Similarly, the VCO 300 may include a second inductor 316
having a first input 318 coupled to a power supply such as
V.sub.DD. A second input 320 of the second inductor 316 may be
coupled to the varactor 222 and a second MOSFET (e.g., NFET) 322.
More specifically, the second input 320 of the second inductor 316
may be coupled to a second terminal 324 of the varactor 222 and a
drain or source terminal 326 of the second NFET 322. A source or
drain terminal 328 of the second NFET 322 may be coupled to a
circuit power supply such as ground. Further, a gate 330 of the
first NFET 308 may be coupled to the second input 320 of the second
inductor 316 and the drain or source terminal 326 of the second
NFET 332. Similarly, a gate 332 of the second NFET 322 may be
coupled to the second input 306 of the first inductor 302 and the
drain or source terminal 312 of the first NFET 308. Inductor inputs
306, 320 or the potential between them may serve as an output of
the first exemplary VCO 300.
[0042] Further, the first exemplary VCO 300 may be coupled to
varactor control circuitry 336 adapted to operate the varactor 222
in a first mode to provide a capacitance and a second mode to
change a threshold voltage of the varactor 222 from an original
threshold voltage to a changed threshold voltage such that the
changed threshold voltage affects a capacitance provided by the
varactor 222 when operated in the first mode. For example, the
varactor control circuitry 336 may be or include a multiplexer 338.
The control voltage of the PLL 200 may be applied to the first
input 340 of the multiplexer 338. As described above, the control
voltage may be employed to lock the frequency and phase of the
second signal to the frequency and phase of the first signal.
Further, a programming voltage may be applied to a second input 342
of the multiplexer 338. The programming voltage may be employed to
change a Vt of the varactor 222 (e.g., from an original Vt to a
changed Vt). An output 344 of the multiplexer 338 may be coupled to
a gate terminal 346 of the varactor 222. Additionally, the
multiplexer 338 may include a third input 348 adapted to receive a
multiplexer control signal. The multiplexer 338 is adapted to
selectively output the control voltage or the programming voltage
to the gate terminal 346 of the varactor 222 based on the
multiplexer control signal. For example, the analog multiplexer 216
may serve as one or more portions of the varactor control circuitry
336. In such embodiments, the control voltage output by the control
voltage buffer circuit 210 may be applied on the first input 340,
the programming voltage may be applied on the second input 342 and
the signal output by the state machine 214 may be input on the
third input 348. The configuration of the VCO 300 is exemplary, and
therefore, the VCO 300 may include a different circuitry adapted to
function as described below.
[0043] During operation of the PLL 300 to lock the frequency and
phase of the second signal to the frequency and phase of the first
signal, the varactor control circuitry 336 may apply the control
voltage to the gate terminal 346 of the varactor 222.
Alternatively, the varactor control circuitry 336 may apply the
programming voltage to the gate terminal 346 of the varactor 222 to
program the varactor 222. Application of the programming voltage
may not be allowed to happen during PLL operation. Rather, the
programming voltage may be applied during a separate calibration or
adjustment phase in which the PLL is not functioning as a loop. For
example, assuming the Vt of the varactor 222 is the original Vt, if
the first exemplary VCO 300 is unable to lock the frequency and
phase of the second signal to (e.g., within a predetermined
distance from) the frequency and phase of the first signal using
the control voltage, the varactor control circuitry 336 may be
employed to program the varactor 222. Thereafter, the varactor
control circuitry 336 may be employed to apply the control voltage
to the gate terminal 346 of the programmed varactor 222 such that
the PLL 300 may lock the frequency and phase of the second signal
to the frequency and phase of the first signal using the control
voltage.
[0044] Exemplary design and use of a varactor 222 including a
dielectric material having a dielectric constant of about 3.9 to
about 25 in a PLL 200 (e.g., in a VCO 218, 300 of the PLL 200) is
described below. For example, during circuit design, a varactor 222
may be designed for the VCO 218, 300 such that a capacitance
provided thereby is always below the desired minimum value given
all process variation effects. During circuit testing, the PLL 200,
which includes the varactor 222, prescalar M circuit 202 and
divider N circuit 220 which may be used in a final PLL design, is
locked to a reference frequency in a manner similar to that during
normal operation of the PLL 200. Because the varactor 222 may be
designed to be too small, a frequency generated by the VCO 218 may
be too high, and therefore, a sign of the control voltage applied
to the VCO 218 may be negative to compensate (e.g., assuming a
differential control voltage signal). Thereafter, a programming
voltage may be applied to the varactor 222 (e.g., via a multiplexer
216, 338) to change the Vt of varactor 222, and therefore, change a
capacitance provided thereby. A programming voltage amplitude and a
time period (controlled by program control bits) that such a
programming voltage is applied to the varactor may be adjusted such
that a desired change in capacitance (e.g., about less than a 1%
capacitance change) may be achieved which may enable the PLL to
continue to lock. The steps of locking the PLL to a reference
frequency and applying a programming voltage to the varactor may be
repeated as necessary until a sign of the control voltage is
observed to change. At this point the varactor capacitance has been
adjusted to set the oscillator to the desired center frequency.
[0045] FIG. 4 is a block diagram of a second exemplary VCO 400
included in a modified version of the PLL 200 in accordance with an
embodiment of the present invention. In the modified version of the
PLL 200, rather than coupling to the analog multiplexer 216, the
output of the control voltage buffer circuit 210 may be coupled to
and input by the VCO 218. Further, in addition to the programming
voltage, the analog multiplexer 216 may receive a functional
voltage as input. With reference to FIG. 4, the VCO 400 may include
a first inductor 402 having a first input 404 coupled to a power
supply such as V.sub.DD. A second input 406 of the first inductor
402 may be coupled to a first varactor 408, a second varactor 410
and a first MOSFET (e.g., NFET) 412. The second varactor 410 may be
similar to varactors described above (e.g., varactors including a
dielectric material having a k of about 3.9 to about 25).
Additionally, in some embodiments, the first varactor 408 may also
be similar to varactors described above. More specifically, the
second input 406 of the first inductor 402 may be coupled to a
first terminal 414 of the first varactor 408, a first terminal 416
of the second varactor 410 and a drain or source terminal 418 of
the first NFET 412. A source or drain terminal 420 of the first
NFET 412 may be coupled to a power supply such as ground.
[0046] Similarly, the VCO 400 may include a second inductor 422
having a first input 424 coupled to a power supply such as
V.sub.DD. A second input 426 of the second inductor 422 may be
coupled to the first varactor 408, second varactor 410 and a second
MOSFET (e.g., NFET) 428. More specifically, the second input 426 of
the second inductor 422 may be coupled to a second terminal 430 of
the first varactor 408, a second terminal 432 of the second
varactor 410 and a drain or source terminal 434 of the second NFET
428. A source or drain terminal 436 of the second NFET 428 may be
coupled to a power supply such as ground. Further, a gate 438 of
the first NFET 412 may be coupled to the second input 426 of the
second inductor 422, the second input 430 of the first varactor
408, the second input 432 of the second varactor 410 and the drain
or source terminal 434 of the second NFET 428. Similarly, a gate
440 of the second NFET 428 may be coupled to the second input 406
of the first inductor 402, the first input 414 of the first
varactor 408, the first input 416 of the second varactor 410 and
the drain or source terminal 418 of the first NFET 412. Inductor
inputs 406, 426, or the potential between them may serve as an
output of the second exemplary VCO 400.
[0047] A gate terminal 444 of the first varactor 408 may be coupled
to the control voltage signal of the modified version of the PLL
200. Further, the second exemplary VCO 400 may be coupled to
varactor control circuitry 446 adapted to operate the second
varactor 410 in a first mode to provide a capacitance and a second
mode to change a threshold voltage of the second varactor 410 from
an original threshold voltage to a changed threshold voltage such
that the changed threshold voltage affects a capacitance provided
by the second varactor 410 when operated in the first mode. For
example, the varactor control circuitry 446 may be or include a
multiplexer 448. A functional voltage of the modified version of
the PLL 200 may be applied to the first input 450 of the
multiplexer 448. The functional voltage may be a DC voltage whose
value may be appropriate for the loop and may be distinct from the
control voltage. The functional voltage may be employed to lock the
frequency and phase of the second signal to the frequency and phase
of the first signal. Further, a programming voltage may be applied
to a second input 452 of the multiplexer 448. The programming
voltage may be employed to change a Vt of the second varactor 410
(e.g., from an original Vt to a changed Vt). An output 454 of the
multiplexer 448 may be coupled to a gate terminal 456 of the second
varactor 410. Additionally, the multiplexer 448 may include a third
input 458 adapted to receive a multiplexer control signal. For
example, the analog multiplexer 216 of the modified version of the
PLL 200 may serve as one or more portions of the varactor control
circuitry 446. In such embodiments, the functional voltage may be
applied on the first input 450, the programming voltage may be
applied on the second input 452 and the signal output by the state
machine (e.g., the control voltage selection bit) may be input on
the third input 348. The multiplexer 448 is adapted to selectively
output the functional voltage or the programming voltage to the
gate terminal 456 of the second varactor 410 based on the
multiplexer control signal.
[0048] During operation of the modified version of the PLL 200 to
lock the frequency and phase of the second signal to the frequency
and phase of the first signal, the first varactor 408 may serve as
a tuning varactor and the second varactor 410 may serve to set a
center frequency of the VCO 400. For example, the control voltage
may be applied to the first varactor 408 such that the first
varactor 408 provides a first capacitance. Further, the varactor
control circuitry 446 may apply the functional voltage to the gate
terminal 456 of the second varactor 410 such that the second
varactor 410 provides a second capacitance, which may be the same
as or different than the first capacitance. An overall capacitance
created in the VCO 400 may be based on the first and second
capacitances. The overall capacitance may affect a frequency of the
VCO output signal, and therefore, may affect a frequency and phase
of the second signal generated by the modified version of the PLL
200 that should match the frequency and phase of the first
signal.
[0049] Alternatively, the varactor control circuitry 446 may apply
the programming voltage to the gate terminal 456 of the second
varactor 410 to program the second varactor 410. For example,
assuming the Vt of the second varactor 410 is the original Vt, if
the second exemplary VCO 400 is unable to lock the frequency and
phase of the second signal to the frequency and phase of the first
signal using the control and functional voltages, the varactor
control circuitry 446 may be employed to program the second
varactor 410. Thereafter, the control voltage may be applied to the
gate terminal 444 of the first varactor 408 and the varactor
control circuitry 446 may be employed to apply the functional
voltage to the gate terminal 456 of the programmed second varactor
410 such that the modified version of the PLL 200 may lock the
frequency and phase of the second signal to the frequency and phase
of the first signal.
[0050] The configuration of the VCO 400 is exemplary, and
therefore, the VCO 400 may include a larger or smaller amount of
and/or different circuitry adapted to function as described below.
For example, instead of a single tuning varactor 408, a larger
number of tuning varactors may be employed. Additionally or
alternatively, instead of a single center frequency varactor 410,
the second exemplary VCO 400 may include a different number of
center frequency varactors.
[0051] The VCO 400 may include a plurality of varactors (e.g., an
array of varactors). A subset of the plurality of varactors may
receive a programming voltage adapted to change capacitances
provided thereby, respectively. By configuring the VCO 400 such
that only a subset of a plurality of varactors included therein may
receive the programming voltage, in some embodiments, the analog
multiplexer 216 may be replaced by a programmable level driver
(PLD) assuming a functional voltage provided to the subset may be
set to a static voltage during functional operation of the modified
version of the PLL 200.
[0052] Additionally, adjustable capacitors may be employed in a
different type of circuit. For example, FIG. 5 is a block diagram
of a capacitor array 500 including at least one programmable
capacitor in accordance with an embodiment of the present
invention. With reference to FIG. 5, the capacitor array 500 may
include a plurality of programmable capacitor sets. Each set may
include one or more programmable capacitors including a dielectric
material having a k of about 3.9 to about 25. For example, the
capacitor array 500 may include a first programmable capacitor set
502 coupled across first and second functional terminals 504, 506
of the capacitor array 500. The functional terminals 504, 506 may
serve as an output of the capacitor array 500. Further, the
capacitor array 500 may include a second programmable capacitor set
508 coupled in parallel with the first programmable capacitor 502,
a third programmable capacitor set 510 coupled in parallel with the
first and second programmable capacitor sets 502, 508 and so on to
an nth programmable capacitor set 512 coupled in parallel with the
other sets 502, 508, 510.
[0053] The first programmable capacitor set 502 may include a first
programmable capacitor 514 having a dielectric material having a k
of about 3.9 to about 25. A first input 516 of the first
programmable capacitor 514 may be coupled to the first functional
terminal 504. A second input 518 of the first programmable
capacitor 514 (e.g., a gate terminal thereof) may be coupled to the
second functional terminal 506 via a first switch 520 of the set
502. Operation of the first switch 520 is based on a control signal
Control Bit 0 input by a control input 522 of the first switch 520.
For example, the first switch 520 may close when Control Bit 0 is
asserted. Additionally, the second input of the first programmable
capacitor 518 may be coupled to a programming terminal (represented
as "Fine Adjust Voltage Terminal" in FIG. 5) 524 via a second
switch 526 of the first set 502. Operation of the second switch 526
is based on a control signal (represented as "Fine Adjust 0" in
FIG. 5) input by a control input 528 of the second switch 526. For
example, the second switch 526 may close when Fine Adjust 0 is
asserted. In operation, for example, the first switch 520 may be
closed by asserting Control Bit 0. Therefore, an overall
capacitance of the capacitor array 500 may be based at least on the
programmable capacitor 514 in the first set 502. Alternatively, the
second switch 526 may be closed by asserting Fine Adjust 0.
Consequently, a signal (e.g., voltage) asserted on the programming
terminal may be applied to the gate terminal 518 of the first
programmable capacitor 514 such that a Vt of the programmable
capacitor 514 may change (e.g., from an original Vt to a changed
Vt). In this manner, a capacitance subsequently provided by the
programmable capacitor 514, and therefore, the first set 502 may be
adjusted.
[0054] The second programmable capacitor set 508 may include first
and second programmable capacitors 530, 532 having a dielectric
material having a k of about 3.9 to about 25. Respective first
inputs 534, 536 of the first and second programmable capacitors
530, 532 may be coupled to the first functional terminal 504.
Respective second inputs 538, 540 of the first and second
programmable capacitors 530, 532 (e.g., gate terminals thereof) may
be coupled to the second functional terminal 506 via a first switch
542 of the set 508. Operation of the first switch 542 is based on a
control signal Control Bit 1 input by a control input 544 of the
first switch 542. For example, the first switch 542 may close when
Control Bit 1 is asserted. Additionally, the respective second
inputs 538, 540 of the first and second programmable capacitors
530, 532 may be coupled to the programming terminal 524 via a
second switch 546 of the second set 508. Operation of the second
switch 546 is based on a control signal (represented as "Fine
Adjust 1" in FIG. 5) input by a control input 548 of the second
switch 546. For example, the second switch 546 may close when Fine
Adjust 1 is asserted. In operation, for example, the first switch
542 may be closed by asserting Control Bit 1. Therefore, an overall
capacitance of the capacitor array 500 may be based at least on the
programmable capacitors 530, 532 in the second set 508.
Alternatively, the second switch 546 may be closed by asserting
Fine Adjust 1. Consequently, a signal (e.g., voltage) asserted on
the programming terminal may be applied to respective gate
terminals 538, 540 of the first and second programmable capacitors
530, 532 such that a Vt of each such programmable capacitors 530,
532 may change (e.g., from an original Vt to a changed Vt). In this
manner, a capacitance subsequently provided by the first and second
programmable capacitors 530, 532, and therefore, the second set 508
may be adjusted.
[0055] The third programmable capacitor set 510 may include first
through fourth programmable capacitors 550-556 having a dielectric
material having a k of about 3.9 to about 25. Respective first
inputs 558-564 of the first through fourth programmable capacitors
550-556 may be coupled to the first functional terminal 504.
Respective second inputs 566-572 of the first through fourth
programmable capacitors 550-556 (e.g., gate terminals thereof) may
be coupled to the second functional terminal 506 via a first switch
574 of the set 510. Operation of the first switch 574 is based on a
control signal Control Bit 2 input by a control input 576 of the
first switch 574. For example, the first switch 574 may close when
Control Bit 2 is asserted. Additionally, the respective second
inputs 566-572 of the first through fourth programmable capacitors
550-556 may be coupled to the programming terminal 524 via a second
switch 578 of the third set 510. Operation of the second switch 578
is based on a control signal (represented as "Fine Adjust 2" in
FIG. 5) input by a control input 580 of the second switch 578. For
example, the second switch 578 may close when Fine Adjust 2 is
asserted. In operation, for example, the first switch 574 may be
closed by asserting Control Bit 2. Therefore, an overall
capacitance of the capacitor array 500 may be based at least on the
programmable capacitors 550-556 in the third set 510.
Alternatively, the second switch 578 may be closed by asserting
Fine Adjust 2. Consequently, a signal (e.g., voltage) asserted on
the programming terminal is applied to respective gate terminals
566-572 of the first through fourth programmable capacitors 550-556
such that a Vt of each such programmable capacitor 550-556 may
change (e.g., from an original Vt to a changed Vt). In this manner,
a capacitance subsequently provided by the first through fourth
programmable capacitors 550-556, and therefore, the third set 510
may be adjusted.
[0056] The nth programmable capacitor set 512 may include 2.sup.n
programmable capacitors 582, 584 (only two shown) having a
dielectric material having a k of about 3.9 to about 25. Respective
first inputs 586, 588 of the first through 2.sup.nth programmable
capacitors 582, 584 may be coupled to the first functional terminal
504. Respective second inputs 590, 592 of the first through
2.sup.nth programmable capacitors 582, 584 (e.g., gate terminals
thereof) may be coupled to the second functional terminal 506 via a
first switch 594 of the nth set 512. Operation of the first switch
594 is based on a control signal Control Bit n input by a control
input 596 of the first switch 594. For example, the first switch
594 may close when Control Bit n is asserted. Additionally, the
respective second inputs 590-592 of the first through 2.sup.nth
programmable capacitors 582, 584 may be coupled to the programming
terminal 524 via a second switch 598 of the nth set 512. Operation
of the second switch 598 is based on a control signal (represented
as "Fine Adjust n" in FIG. 5) input by a control input 600 of the
second switch 598. For example, the second switch 598 may close
when Fine Adjust n is asserted. In operation, for example, the
first switch 594 may be closed by asserting Control Bit n.
Therefore, an overall capacitance of the capacitor array 500 may be
based at least on the programmable capacitors 582-584 in the nth
set 512. Alternatively, the second switch 598 may be closed by
asserting Fine Adjust n. Consequently, a signal (e.g., voltage)
asserted on the programming terminal is applied to respective gate
terminals 590, 592 of the first through nth programmable capacitors
582, 584 such that a Vt of each such programmable capacitors 582,
584 may change (e.g., from an original Vt to a changed Vt). In this
manner, a capacitance subsequently provided by the first through
nth programmable capacitors 582, 584, and therefore, the nth set
512 may be adjusted.
[0057] Therefore, the control signals Control Bit 0-Control Bit n
may be employed to adjust (e.g., tune) an overall capacitance of
the capacitor array 500. For example, by asserting one or more
control signals Control Bit 0-Control Bit n, an overall capacitance
of the capacitor array 500 may be adjusted to be based on
programmable capacitors included in sets 502, 508, 510, 512
corresponding to such asserted control signals. In this manner, the
capacitor array 500 is a binary weighted array of capacitors (e.g.,
programmable capacitors as described above). Binary selection of
the control bits Control Bit 0-Control Bit n may serve to provide a
coarse adjustment to the overall capacitance provided by the
capacitor array 500 (e.g., provided between the first and second
functional terminals 504, 506). Further, an overall capacitance 500
provided by the capacitor array 500 may be adjusted (e.g., fine
tuned) by changing a Vt of (e.g., programming) one or more
programmable capacitors 514, 530-532, 550-556, 582-584 of the
capacitor array 500, and thereafter, asserting a control bit
corresponding thereto such that the overall capacitance of the
capacitor array 500 may be based on such programmed capacitors.
Although the second switches 526, 546, 578, 598 of the programmable
capacitor sets 502, 508, 510, 512 are coupled to different control
signals Fine Adjust 0, Fine Adjust 1, Fine Adjust 2, Fine Adjust n,
in some embodiments, such switches 526, 546, 578, 598 may be
coupled to the same control signal, and therefore, all programmable
capacitors 514, 530-532, 550-556, 582-584 are programmed at the
same time.
[0058] As described above, control signals Control Bit 0-Control
Bit n serve to provide a coarse adjustment (e.g., an initial
adjustment) and control signals Fine Adjust 0-Fine Adjust n serve
to provide a fine adjustment to the overall capacitance provided by
the capacitor array 500. However, in some embodiments, control
signals Fine Adjust 0-Fine Adjust n may serve to provide a coarse
adjustment and control signals Control Bit 0-Control Bit n may
serve to provide a fine adjustment to the overall capacitance
provided by the capacitor array 500. In this manner, an overall
capacitance of the capacitor array 500 may be tuned. A size of a
smallest unit capacitor (e.g., programmable capacitor) in the
capacitor array and a capacitance range that may be created by
programming the programmable capacitors 514, 530-532, 550-556,
582-584 may determine whether control signals Control Bit 0-Control
Bit n serve to provide the coarse adjustment (e.g., an initial
adjustment) and control signals Fine Adjust 0-Fine Adjust n serve
to provide the fine adjustment to the overall capacitance provided
by the capacitor array 500 or whether control signals Fine Adjust
0-Fine Adjust n serve to provide the coarse adjustment and control
signals Control Bit 0-Control Bit n serve to provide the fine
adjustment to the overall capacitance provided by the capacitor
array 500.
[0059] Through use of the present methods and apparatus, varactors
having a dielectric material including a dielectric constant of
about 3.9 to about 25 may be employed in a variety of circuit
designs, such as a PLL 200 a binary weighted capacitor array 500,
and/or the like, for example. The varactors including a dielectric
material having a dielectric constant of about 3.9 to about 25 may
provide a high quality factor (Q-factor) and therefore provide a
low-leakage capacitance. Additionally, such varactors provide a
wide tuning range. For example, such a varactor may provide a
capacitance between about 0.1 fF/.mu.m.sup.2 to about 2.0
fF/.mu.m.sup.2 (although a larger of smaller and/or different
tuning range may be employed). Further, manufacturing of such
varactors may easily be integrated into existing CMOS processes
(e.g., without a need for additional masks). For example,
manufacturing of such varactors may be integrated into methods of
manufacturing standard planar CMOS and finFET technologies. More
specifically, manufacturing of such varactors may be integrated
into methods of manufacturing silicon-on-insulator (SOI) and finFET
semiconductor devices where an active silicon layer is insulated
from a remaining portion of a substrate (e.g., a bulk silicon
region). Due to the high quality factor, a varactor in accordance
with embodiments of the present invention, and a circuit (e.g., a
varactor array) comprising such a varactor, may provide a built-in
or autonomic memory capability such that the varactor may retain
state (e.g., store a capacitance). Therefore, a circuit including
such a varactor may not require additional circuitry (e.g.,
non-volatile memory) to store a capacitance.
[0060] The foregoing description discloses only exemplary
embodiments of the invention. Modifications of the above disclosed
apparatus and methods which fall within the scope of the invention
will be readily apparent to those of ordinary skill in the art. For
instance, varactors having a dielectric material including a
dielectric constant of about 3.9 to about 25 employed in a circuit
described above may be of the same size. Alternatively, two or more
of such varactors may have different sizes.
[0061] Accordingly, while the present invention has been disclosed
in connection with exemplary embodiments thereof, it should be
understood that other embodiments may fall within the spirit and
scope of the invention, as defined by the following claims.
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