U.S. patent application number 10/593085 was filed with the patent office on 2008-02-21 for semiconductor laser equipment.
Invention is credited to Hirofumi Kan, Hirofumi Miyajima, Masanobu Yamanaka.
Application Number | 20080043791 10/593085 |
Document ID | / |
Family ID | 34975903 |
Filed Date | 2008-02-21 |
United States Patent
Application |
20080043791 |
Kind Code |
A1 |
Miyajima; Hirofumi ; et
al. |
February 21, 2008 |
Semiconductor Laser Equipment
Abstract
The present invention relates to a semiconductor laser apparatus
having a structure for preventing the corrosion of a refrigerant
flow path in a heat sink and for cooling a semiconductor laser
array stably over a long period of time. The semiconductor laser
apparatus comprises a semiconductor laser stack in which a
plurality of semiconductor laser units are stacked, a refrigerant
supplier, a piping for connecting these components, and a
refrigerant flowing through these components. The refrigerant
supplier supplies the refrigerant to the semiconductor laser stack.
The refrigerant is comprised of fluorocarbon. Each of the
semiconductor laser units is constituted by a pair of a
semiconductor laser array and a heat sink. The heat sink has a
refrigerant flow path.
Inventors: |
Miyajima; Hirofumi;
(Shizuoka, JP) ; Kan; Hirofumi; (Shizuoka, JP)
; Yamanaka; Masanobu; (Osaka, JP) |
Correspondence
Address: |
DRINKER BIDDLE & REATH (DC)
1500 K STREET, N.W., SUITE 1100
WASHINGTON
DC
20005-1209
US
|
Family ID: |
34975903 |
Appl. No.: |
10/593085 |
Filed: |
March 8, 2005 |
PCT Filed: |
March 8, 2005 |
PCT NO: |
PCT/JP05/03980 |
371 Date: |
June 21, 2007 |
Current U.S.
Class: |
372/36 ;
257/E23.098 |
Current CPC
Class: |
H01L 2924/3011 20130101;
H01L 2924/0002 20130101; H01S 5/02365 20210101; H01S 5/405
20130101; H01L 23/473 20130101; H01S 5/4025 20130101; H01S 5/02423
20130101; H01L 2924/0002 20130101; H01L 2924/00 20130101 |
Class at
Publication: |
372/36 |
International
Class: |
H01S 3/04 20060101
H01S003/04 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 17, 2004 |
JP |
2004-076939 |
Claims
1. A semiconductor laser apparatus, comprising: a semiconductor
laser array; a heat sink having a refrigerant flow path; a
refrigerant including fluorocarbon and flowing through said
refrigerant flow path; and a refrigerant supplier for supplying the
refrigerant to said heat sink.
2. A semiconductor laser apparatus according to claim 1, wherein
the refrigerant flowing through said refrigerant flow path is
controlled to have a flow velocity of 10 m/s or less.
3. A semiconductor laser apparatus according to claim 1, wherein
the refrigerant flowing through said refrigerant flow path is
controlled to have a flow velocity of 1 m/s or more.
4. A semiconductor laser apparatus according to claim 1, wherein
the change in the cross-sectional area of said refrigerant flow
path along the direction in which the refrigerant flows is within
.+-.30%.
5. A semiconductor laser apparatus according to claim 1, wherein
said heat sink includes a microchannel-type or jet-cooling-type
heat sink.
6. A semiconductor laser apparatus according to claim 1, wherein
said refrigerant flow path includes a fine flow path with a width
of 1 mm or less.
7. A semiconductor laser apparatus according to claim 1, wherein
said heat sink comprises: a first plate-shaped member having a
first depressed portion formed in one surface thereof; a second
plate-shaped member provided on said first plate-shaped member and
having a second depressed portion formed in the surface facing the
one surface of said first plate-shaped member; a partition plate
provided between said first plate-shaped member and said second
plate-shaped member and having a plurality of holes each making
said first depressed portion and said second depressed portion
become in communication with each other; a refrigerant supply port
penetrating through said first plate-shaped member, said partition
plate, and said second plate-shaped member, in order to be
communicated with said first depressed portion while preventing a
communication with said second depressed portion; and a refrigerant
discharge port penetrating through said second plate-shaped member,
said partition plate, and said first plate-shaped member, in order
to be communicated with said second depressed portion while
preventing a communication with said first depressed portion, and
wherein said refrigerant flow path is constituted by said
refrigerant supply port, said first depressed portion, said
plurality of holes, said second depressed portion, and said
refrigerant discharge port.
8. A semiconductor laser apparatus according to claim 7, wherein
said semiconductor laser array is mounted on a surface facing the
one surface, on which said first depressed portion is formed, of
said first plate-shaped member in said heat sink, a semiconductor
laser unit being constituted by said semiconductor laser array and
said heat sink.
9. A semiconductor laser apparatus comprising a plurality of
semiconductor laser units each having the same structure as that of
said semiconductor laser unit in a semiconductor laser apparatus
according to claim 8, wherein said plurality of semiconductor laser
units are stacked such that refrigerant supply ports in heat sinks
of said respective semiconductor laser units are in communication
with each other, and that refrigerant discharge ports in said heat
sinks of said respective semiconductor laser units are in
communicated with each other.
Description
TECHNICAL FIELD
[0001] The present invention relates to a semiconductor laser
apparatus having a semiconductor laser array as an emission source
and a structure for effectively cooling the semiconductor laser
array. Background Art
[0002] Recently, a semiconductor laser apparatus, which is capable
of achieving a high output power of several to 100 W, has been
developed. Such a semiconductor laser apparatus is also used as a
light source of, for example, a laser knife, a laser soldering
iron, and a laser marker.
[0003] Since the electro-optical conversion efficiency of a
semiconductor laser array is about 50%, half of the input power is
to be converted into heat. Such heat has a great impact on laser
output power, efficiency, and element lifetime. In order to
effectively cool such heat, used is a heat sink that employs water,
which have a high thermal conductivity as well as a high heat
capacity, as a refrigerant. As such a heat sink, known is one, for
example, having a structure in which a plurality of copper
plate-shaped members are combined to form a fine flow path and
cooling water is circulated in the flow path. The cooling water is
adapted to exchange heat with the semiconductor laser array placed
on the flow path to cool the semiconductor laser array (refer to
Patent Documents 1 and 2, for example).
[0004] Such a semiconductor laser apparatus as mentioned above has
a stack structure in which a plurality of semiconductor laser
arrays are stacked. In the case of achieving a higher output power,
a plurality of heat sinks are to be inserted, respectively, between
the stacked semiconductor laser arrays. Since these heat sinks are
adapted not only to cool the semiconductor laser arrays but also to
serve as an electrical conduction path between the semiconductor
laser arrays, an electric field is to be applied also to the heat
sinks during the operation of each semiconductor laser array (refer
to FIG. 1 in Patent Document 1, for example).
Patent Document 1: International Patent Publication No.
WO00/11717
Patent Document 2: Japanese Published Unexamined Patent Application
No.H10-209531
DISCLOSURE OF THE INVENTION
Problem to be Solved by the Invention
[0005] The inventors have studied a conventional semiconductor
laser apparatus in detail, and as a result, have found problems as
follows. Namely, there is a problem that the conventional
semiconductor laser apparatus including heat sinks that employ
water as a refrigerant cannot sufficiently prevent the corrosion of
the flow path to be described hereinafter, whereby it is impossible
to efficiently and stably cool the semiconductor laser arrays to be
cooled over a long period of time.
[0006] That is, in such a semiconductor laser stack apparatus as
mentioned above, since the heat sinks form part of the electric
circuit, a current flows through the heat sinks themselves and
thereby through the water flowing inside the heat sinks. The
cooling water employs ion-exchanged water with a restrained
conductivity, which has a resistance of about 1 M.OMEGA. to cause a
current of about 1 .mu.A to flow at an applied voltage of about 1V,
resulting in electrolysis of the water in the flow path using the
heat sinks as electrodes. This causes the inner wall of the flow
path to be electrochemically corroded. With the progress of such
corrosion, clogging of the flow path, water leakage, and/or short
circuits due to electrical leakage, etc., are more likely to
occur.
[0007] In order to overcome the above-mentioned problems, it is an
object of the present invention to provide a semiconductor laser
apparatus having a structure for preventing the corrosion of a
refrigerant flow path in a heat sink and for cooling a
semiconductor laser array stably over a long period of time.
Means for Solving Problem
[0008] A semiconductor laser apparatus according to the present
invention comprises a semiconductor laser array, a heat sink having
a refrigerant flow path, a refrigerant including fluorocarbon and
flowing through the refrigerant flow path, and a refrigerant
supplier for supplying the refrigerant to the heat sink.
[0009] In accordance with the arrangement above, as a refrigerant
adopted is fluorocarbon, which has a significantly lower reactivity
and conductivity than water, whereby it is possible to avoid the
corrosion of the refrigerant flow path. In addition, in this case,
the refrigerant flowing through the refrigerant flow path is
preferably controlled to have a flow velocity of 1 m/s or more but
10 m/s or less. By suppressing a flow velocity of the refrigerant
at 10 m/s or less, the occurrence of cavitations can be effectively
restrained. Also, by suppressing a flow velocity of the refrigerant
at 1 m/s or more, the thermal resistance of the refrigerant can be
reduced to achieve a sufficient cooling efficiency. The flow
velocity of the refrigerant is to be controlled by adjusting the
refrigerant supply pressure in the refrigerant supplier and by
changing the shape of the refrigerant flow path.
[0010] In the semiconductor laser apparatus according to the
present invention, the change in the cross-sectional area of the
refrigerant flow path along the direction in which the refrigerant
flows is preferably within .+-.30%. Thus, by reducing the change in
the cross-sectional area of the flow path, the change in the flow
velocity of the refrigerant can be effectively restrained.
Accordingly, the occurrence of cavitations can be prevented more
reliably. In this specification, the term "cross-sectional area of
the flow path" means the sum of the area of the flow path in a
cross-section perpendicular to the line of flow. When the
refrigerant flow path has no branch, the term "cross-sectional area
of the flow path" means the cross-sectional area of the single flow
path. On the other hand, when the refrigerant flow path has a
plurality of branches, the term "cross-sectional area of the flow
path" means the sum of the cross-sectional area of the branches in
a cross-section perpendicular to the line of flow.
[0011] In the semiconductor laser apparatus according to the
present invention, the heat sink includes a microchannel-type or
jet-cooling-type heat sink. The microchannel-type heat sink is for
flowing the refrigerant through a fine refrigerant flow path to
cool the semiconductor laser array from directly beneath. On the
other hand, the jet-cooling-type heat sink is for ejecting the
refrigerant through a small hole provided directly beneath the
semiconductor laser array to perform heat exchange efficiently
under the turbulent jet flow of the refrigerant. When fluorocarbon
is adopted as a refrigerant and when the heat sink has a structure
including such a fine refrigerant flow path, the cooling efficiency
of the heat sink will be further improved.
[0012] Further, in the semiconductor laser apparatus according to
the present invention, the refrigerant flow path preferably
includes a fine flow path with a width of 1 mm or less. When the
fluorocarbon is adopted as a refrigerant and when the heat sink has
a structure including a fine flow path with a width of 1 mm or
less, the cooling efficiency of the heat sink will be still further
improved. In the present specification, the term "width of 1 mm or
less" means that the minimum width of the refrigerant flow path in
a cross-section perpendicular to the line of flow is 1 mm or
less.
[0013] In the semiconductor laser apparatus according to the
present invention, the heat sink has a structure in which a first
plate-shaped member, a partition plate, and a second plate-shaped
member are stacked. The first plate-shaped member has a first
depressed portion formed in one surface thereof. The second
plate-shaped member is provided on the first plate-shaped member
and has a second depressed portion formed in the surface facing the
one surface of the first plate-shaped member. The partition plate
is provided between the first plate-shaped member and the second
plate-shaped member and has a plurality of holes each making the
first depressed portion and the second depressed portion become in
communication with each other. The heat sink is further provided
with a refrigerant supply port and a refrigerant discharge port.
The refrigerant supply port is provided in such a manner as to
penetrate through the first plate-shaped member, the partition
plate, and the second plate-shaped member, in order to be in
communication with the first depressed portion while preventing a
communication with the second depressed portion. Then, the
refrigerant discharge port is provided in such a manner as to
penetrate through the second plate-shaped member, the partition
plate, and the first plate-shaped member, in order to be in
communication with the second depressed portion while preventing a
communication with the first depressed portion. Therefore, when the
first plate-shaped member, the partition plate, and the second
plate-shaped member are stacked, the refrigerant flow path is
defined by the refrigerant supply port, the first depressed
portion, the plurality of holes, the second depressed portion, and
the refrigerant discharge port.
[0014] In the heat sink, by thus forming the refrigerant flow path
using the depressed portions and the holes provided in the
components of the heat sink, the refrigerant can be branched into
multiple paths, whereby the total amount of heat can be removed
through multiple heat exchange portions while restraining the flow
velocity for each branched flow path. In addition, by employing the
structure in which the first plate-shaped member, partition plate,
and second plate-shaped member are stacked, the thickness of the
heat sink can be reduced.
[0015] Here, the semiconductor laser array is mounted on a surface
facing the one surface, on which the first depressed portion is
formed, of the first plate-shaped member in the heat sink, and a
semiconductor laser unit is constituted by these semiconductor
laser array and heat sink.
[0016] The semiconductor laser apparatus according to the present
invention may be a semiconductor laser stack apparatus by
comprising a plurality of semiconductor laser units each having the
above-described structure. In this case, the plurality of
semiconductor laser units are stacked such that refrigerant supply
ports in heat sinks of the respective semiconductor laser units are
in communication with each other, and that refrigerant discharge
ports in the heat sinks of the respective semiconductor laser units
are in communication with each other.
[0017] The semiconductor laser apparatus, having such a
semiconductor laser stack structure, can extend the lifetime of the
heat sinks and cool the semiconductor laser arrays stably, and
therefore a stable output power can be achieved over a long period
of time. Also, since the heat sinks have a reduced thickness, it is
possible to reduce the size of the semiconductor laser stack
device.
[0018] The present invention will be more fully understood from the
detailed description given hereinbelow and the accompanying
drawings, which are given by way of illustration only and are not
to be considered as limiting the present invention.
[0019] Further scope of applicability of the present invention will
become apparent from the detailed description given hereinafter.
However, it should be understood that the detailed description and
specific examples, while indicating preferred embodiments of the
invention, are given by way of illustration only, since various
changes and modifications within the spirit and scope of the
invention will be apparent to those skilled in the art from this
detailed description.
Effect of the Invention
[0020] In accordance with the semiconductor laser apparatus
according to the present invention, it is possible to prevent the
corrosion of the refrigerant flow path in the heat sink and to cool
the semiconductor laser array stably over a long period of
time.
BRIEF DESCRIPTION OF THE DRAWINGS
[0021] FIG. 1 is a view showing the configuration of an embodiment
of a semiconductor laser apparatus according to the present
invention;
[0022] FIG. 2 is a perspective view showing the structure of a
semiconductor laser stack in the semiconductor laser apparatus
shown in FIG. 1;
[0023] FIG. 3 shows perspective and side plan views of the
structure of a semiconductor laser unit that constitutes a part of
the semiconductor laser stack shown in FIG. 2;
[0024] FIG. 4 is a view showing an assembling process for a heat
sink having a three-layer structure;
[0025] FIG. 5 is a graph showing the relationship between flow
velocity and thermal resistance for water and fluorocarbon flowing
through a fine flow path;
[0026] FIG. 6 is a graph showing the relationship between flow
velocity and the number of cavitations for water and
fluorocarbon;
[0027] FIG. 7 shows graphs summarizing the relationships in FIG. 5
and FIG. 6, respectively, for water and fluorocarbon;
[0028] FIG. 8 is a graph showing the change in the cross-sectional
area of the refrigerant flow path from the supply port through the
discharge port in a heat sink;
[0029] FIG. 9 is a view showing an assembling process for another
heat sink having a three-layer structure; and
[0030] FIG. 10 is a view showing an assembling process for a heat
sink having a five-layer structure.
DESCRIPTION OF THE REFERENCE NUMERALS
[0031] 1 . . . semiconductor laser apparatus; 2a, 2b, 2c . . .
semiconductor laser array; 10a, 10a', 10a'', 10b, 10c heat sink;
100a, 100b, 100c . . . semiconductor laser unit; 200 . . .
semiconductor laser stack; 400 . . . refrigerant; and 500 . . .
chiller (refrigerant supplier).
BEST MODES FOR CARRYING OUT THE INVENTION
[0032] In the following, embodiments of a semiconductor laser
apparatus according to the present invention will hereinafter be
described in detail with reference to FIGS. 1 to 9. In the
explanation of the drawings, constituents identical to each other
will be referred to with numerals identical to each other without
repeating their overlapping descriptions.
[0033] FIG. 1 is a view showing the configuration of an embodiment
of a semiconductor laser apparatus according to the present
invention. The semiconductor laser apparatus 1 is constituted by a
semiconductor laser stack 200 in which semiconductor laser units
100a to 100c are stacked, a chiller (refrigerant supplier) 500, a
piping 600 for connection between these components, and a
refrigerant 400 flowing through these components.
[0034] The chiller 500 comprises an air-cooling unit 510 and a
circulation pump 520. The air-cooling unit 510 is adapted to cool
the refrigerant, and the circulation pump 520 is adapted to supply
the refrigerant 400 to the semiconductor laser stack 200 via the
piping 600.
[0035] The refrigerant 400 is comprised of fluorocarbon.
Fluorocarbon is a compound in which some or all of the hydrogen
atoms in the hydrocarbons are replaced by fluorine atoms. Since
fluorine atoms have an atomic radius larger than that of hydrogen
atoms, the atomic framework of the carbons becomes as when covered
with the fluorine atoms after fluorine atoms are replaced. Also,
since fluorine atoms have a high electronegativity, an electron
cloud exists locally nearer the fluorine atoms. This causes the
electron concentration in the framework portion of the carbons to
be reduced, resulting in a significant reduction in reactivity. As
a result, fluorocarbon has a high chemical stability to react with
few substances. Further, since fluorocarbon has a significantly
high resistivity of 10.sup.13 .OMEGA.m relative to that of water
10.sup.7 .OMEGA.m, electrolysis due to energization is not likely
to occur unlike water. It is further preferable that the
refrigerant be perfluorocarbon, a compound in which all of the
hydrogen atoms in the hydrocarbons are replaced by fluorine atoms.
Perfluorocarbon, which in particular has a high chemical stability
and also a high resistivity, is particularly preferable as the
refrigerant.
[0036] FIG. 2 is a perspective view showing the structure of the
semiconductor laser stack in the semiconductor laser apparatus
shown in FIG. 1. The semiconductor laser stack 200 comprises three
semiconductor laser units 100a to 100c, a positive electrode 110, a
negative electrode 120, a retaining screw 140, a supply port
(refrigerant supply port) 160, and a discharge port (refrigerant
discharge port) 180. The semiconductor laser units 100a to 100c
have, respectively, semiconductor laser arrays 2a to 2c, dummy
spacers 4a to 4c, n-type electrodes 6a to 6c, sealing silicon
rubbers 8a to 8c, and heat sinks 10a to 10c. The semiconductor
laser array 2a is arranged between the upper surface of the heat
sink 10a (corresponding to the upper surface of an upper plate
member 40 to be described hereinafter) and the lower surface of the
heat sink 10b (corresponding to the lower surface of a lower plate
member 20 to be described hereinafter), the semiconductor laser
array 2b is arranged between the upper surface of the heat sink 10b
and the lower surface of the heat sink 10c, and the semiconductor
laser array 2c is mounted on the upper surface of the heat sink
1Oc. These components are fixed using the retaining screw 140 in a
stacked manner.
[0037] The heat sinks 10a to 1Oc are comprised of conductive
material, and the positive electrode 110, heat sink 10a,
semiconductor laser array 2a, n-type electrode 6a, heat sink 1Ob,
semiconductor laser array 2b, n-type electrode 6b, heat sink 10c,
semiconductor laser array 2c, n-type electrode 6c, and negative
electrode 120 are connected electrically in this order. Applying a
voltage between the positive and negative electrodes 110 and 120
allows the semiconductor laser arrays 2a to 2c to emit a laser
beam.
[0038] Each of the semiconductor laser arrays 2a to 2c includes a
plurality of linearly arranged semiconductor laser elements, and
therefore has a plurality of laser emitting spots arranged in a
line. The present embodiment adopts semiconductor laser arrays in
which a plurality of semiconductor laser elements are integrated in
a monolithic manner. In such semiconductor laser arrays, active
layers and electrodes are commonly divided by a plurality of stripe
waveguides to be arranged in parallel. Additionally, the
semiconductor laser apparatus according to the present invention
may adopt semiconductor laser arrays having a structure in which a
plurality of independent semiconductor laser chips are arranged in
line, instead of the semiconductor laser arrays having such a
structure as mentioned above.
[0039] The supply and discharge ports 160 and 180 are provided in
such a manner as to penetrate through the semiconductor laser units
100a to 100c. The supply port 160 is connected to supply ports 160a
to 160c formed in the respective semiconductor laser units 100a to
100c (described hereinafter in detail), while the discharge port
180 is connected to discharge ports 180a to 180c formed in the
respective semiconductor laser units 100a to 100c (described
hereinafter in detail). This enables the refrigerant made of
fluorocarbon to be supplied to the heat sinks 100a to 100c through
the supply port 160 and also to be discharged from the heat sinks
100a to 100c through the discharge port 180.
[0040] Next, the semiconductor laser units 100a to 100c will be
explained. In addition, since the semiconductor laser units 100a to
100c have the same structure, only the semiconductor laser unit
100a will be explained below.
[0041] FIG. 3 shows the structure of a semiconductor laser unit
that constitute a part of the semiconductor laser stack shown in
FIG. 2. The area (a) of FIG. 3 shows a perspective view of the
semiconductor laser unit, and the area (b) of FIG. 3 shows a side
plan view of the semiconductor laser unit.
[0042] The semiconductor laser unit 100a comprises the
semiconductor laser array 2a, dummy spacer 4a, n-type electrode 6a,
sealing silicon rubber 8a, and heat sink l0a. The semiconductor
laser array 2a, dummy spacer 4a, and sealing silicon rubber 8a are
mounted on the upper surface of the heat sink 10a. The dummy spacer
4a mounted adjacent to the semiconductor laser array 2a has
approximately the same thickness as the semiconductor laser array
2a, and the n-type electrode 6a is mounted on the dummy spacer 4a
and the semiconductor laser array 2a. The sealing silicon rubber 8a
with the supply and discharge ports 160a and 180a provided therein
in a penetrating manner functions in such a manner as to ensure
insulation against a heat sink to be stacked thereon and to prevent
leakage of the refrigerant.
[0043] FIG. 4 is a view showing an assembling process for a heat
sink having a three-layer structure as an example of the foregoing
heat sink 10a. The heat sink 10a is a jet-cooling-type one. The
heat sink 10a has a structure in which a lower plate member 20
(first plate-shaped member), an intermediate plate member 30
(partition plate), and an upper plate member 40 (second
plate-shaped member) are stacked in this order. The lower plate
member 20 is a copper plate with a thickness of about 400 .mu.m and
has two through holes 22 and 24. On the upper surface of the lower
plate member 20 (to be brought into contact with the intermediate
plate member 30), a refrigerant flow path depressed portion 26
(first depressed portion), having a depth of about 200 .mu.m, is
formed. The refrigerant flow path depressed portion 26 has a bell
shape, the top of the bell shape is in communication with the
through hole 22, and the bottom of the bell shape extends toward
one end of the lower plate member 20 (in the direction in which the
semiconductor laser array 2a is to be disposed). Between the
through holes 22, 24 and approximately in the central part of the
lower plate member 20, a screw hole 28 is provided to be used for
screw retention with the foregoing retaining screw 140.
[0044] The upper plate member 40 is also a copper plate with a
thickness of about 400 .mu.m, and has two through holes 42, 44 in
positions corresponding to those of the through holes 22, 24 in the
lower plate member 20. In the lower surface of the upper plate
member 40 (to be brought into contact with the intermediate plate
member 30), a refrigerant flow path depressed portion 46 (second
depressed portion), having a depth of about 200 .mu.m, is formed.
The refrigerant flow path depressed portion 46 has a bell shape,
the top of the bell shape is in communication with the through hole
44, and the bottom of the bell shape extends toward one end of the
upper plate member 40 (in the direction in which the semiconductor
laser array 2a is to be disposed). Meanwhile, as shown in FIG. 4,
the through hole 42 is isolated like an island within the
refrigerant flow path depressed portion 46 so as not to be in
communication with the depressed portion. Also, in the lower plate
member 20, a screw hole 48 is provided in a position corresponding
to that of the screw hole 28 in the lower plate member.
[0045] The intermediate plate member 30 is a copper plate with a
thickness of about 100 .mu.m, and has through holes 32, 34 in
positions corresponding to those of the through holes 22, 24 in the
lower plate member 20. Also, a screw hole 38 is provided in a
position corresponding to that of the screw hole 28 in the lower
plate member 20. Further, a plurality of conduit holes 36 is formed
in a portion in which the semiconductor laser array 2a is to be
disposed.
[0046] When the upper surface of the lower plate member 20 and the
lower surface of the intermediate plate member 30 are joined, and
when the upper surface of the intermediate plate member 30 and the
lower surface of the upper plate member 40 are joined, the
refrigerant flow path depressed portion 26 formed in the lower
plate member 20 and the lower surface of the intermediate plate
member 30 form a space that defines a part of the refrigerant flow
path. Similarly, the refrigerant flow path depressed portion 46
formed in the upper plate member 40 and the upper surface of the
intermediate plate member 30 form a space that defines a part of
the refrigerant flow path.
[0047] When the through hole 22 formed in the lower plate member
20, the through hole 32 formed in the intermediate plate member 30,
and the through hole 42 formed in the upper plate member 40 are
connected, the supply port 160a for supplying the refrigerant to
the refrigerant flow path is formed. On the other hand, when the
through hole 24 formed in the lower plate member 20, the through
hole 34 formed in the intermediate plate member 30, and the through
hole 44 formed in the upper plate member 40 are connected, the
discharge port 180a for discharging the refrigerant from the
refrigerant flow path is formed.
[0048] Then, the refrigerant flow path is formed by a combination
of the supply port 160a, the refrigerant flow path depressed
portion 26, the conduit holes 36, the refrigerant flow path
depressed portion 46, and the discharge port 180a. The conduit
holes 36 are fine flow paths having a width of 1 .mu.m or less.
Here, the diameter of the conduit holes 36 is sufficiently small to
shed the refrigerant into the refrigerant flow path depressed
portion 46 to be turbulent jet flow. Further, in order to bring the
refrigerant into turbulent jet flow, the refrigerant flowing inside
the heat sink 10a is preferably controlled to have a flow velocity
of 1 m/s or more, and more preferably 2 /s or more. On the other
hand, since the conduit holes 36 are provided in plurality, the
refrigerant flowing through the refrigerant flow path is controlled
to have a flow velocity of 10 m/s or less across the entire
refrigerant flow path. The flow velocity of the refrigerant is to
be controlled by, for example, adjusting the refrigerant supply
pressure of the circulation pump 520 in the chiller 500 shown in
FIG. 1. Further, the refrigerant flow path in the heat sink 10a is
branched into the plurality of conduit holes 36, and the change in
the cross-sectional area of the flow path when calculated by
summing the area of the branches is set within .+-.30%.
[0049] Next, the functions of the semiconductor laser apparatus
according to the present invention will be explained.
[0050] In the present semiconductor laser apparatus, fluorocarbon
is adopted as a refrigerant instead of water, which has
conventionally been adopted. FIG. 5 is a graph showing the
relationship between flow velocity and thermal resistance for water
and fluorocarbon flowing through a fine flow path. In the graph
shown in FIG. 5, the horizontal axis represents flow velocity,
while the vertical axis represents thermal resistance. Also, the
curve G510 indicates calculated values while symbols
".largecircle.(circular)" show actually measured values for water.
The curve G520 indicates calculated values while symbols
".diamond-solid.(solid-diamond)" show actually measured values for
fluorocarbon.
[0051] It has conventionally been known that the heat transfer
characteristics of fluorocarbon are significantly inferior to those
of water, and have not been adopted as a refrigerant for
semiconductor laser arrays. As shown in FIG. 5, the thermal
resistance of fluorocarbon (curve G520) is significantly greater
than that of water (curve G510) for each flow velocity range,
indicating inferiority as a refrigerant to support the conventional
awareness.
[0052] However, the present inventors have actually carried out
experiments under the assumption that fluorocarbon and water are
each adopted as a refrigerant for the heat sinks in the
semiconductor laser apparatus to find that the heat transfer
characteristics of fluorocarbon are better than expected. The
actually measured values (indicated by symbols ".diamond-solid."
and symbols ".largecircle.") shown in FIG. 5 are plotted using
measured values of thermal resistance against flow velocity when
fluorocarbon and water are each flowed through a fine flow path
with a width of 1 mm simulating the refrigerant flow path in the
heat sinks of the semiconductor laser apparatus. As found from the
actually measured values in FIG. 5, the actual thermal resistance
of fluorocarbon is significantly smaller than the calculated
values. As for the calculated values (curve G520), the thermal
resistance of fluorocarbon is 1.degree. C./W or more greater than
that of water for each flow velocity range, while as for the
actually measured values (symbols ".diamond-solid."), the
difference is about 0.5.degree. C./W. In addition, as can be seen
from FIG. 5, the calculated values (curve G510) and the actually
measured values (symbols ".largecircle.") for water coincide well
with each other.
[0053] The reason that the heat transfer characteristics of
fluorocarbon are thus found better in the actually measured values
obtained by simulating the semiconductor laser apparatus than in
the calculated values can be considered as follows. That is, the
surface tension of fluorocarbon is smaller than that of water.
Therefore, when fluorocarbon is flowed through such a fine
refrigerant flow path as in the semiconductor laser apparatus, the
fluorocarbon can proceed into finer portions in the refrigerant
flow path, resulting in a more increased thermal conduction effect
than expected. Accordingly, it can be considered that the thermal
resistance gets smaller than the calculated values.
[0054] As described above, it is found that fluorocarbon can
achieve a cooling efficiency close to that of water if adopted as a
refrigerant for the heat sinks in the semiconductor laser
apparatus. Then, fluorocarbon, which has a significantly higher
chemical stability and a lower conductivity than water, has
potential for prevention of corrosion of the refrigerant flow
path.
[0055] Meanwhile, it is found that fluorocarbon is more likely to
generate cavitations than water if adopted as a refrigerant.
Cavitation is a phenomenon of generating voids in fluid due to
evaporation of the fluid and/or separation of dissolved gas, etc.,
that may occur in portions having a locally lower pressure caused
by the flowing of the fluid. When cavitations may occur, the
contact area with the heating element is to be reduced, resulting
in a reduction in heat exchange efficiency.
[0056] FIG. 6 is a graph showing the relationship between flow
velocity and the number of cavitations for water and fluorocarbon,
where the curve G610 indicates the relationship between flow
velocity and the number of cavitations for water, while the curve
G620 indicates the relationship between flow velocity and the
number of cavitations for fluorocarbon. As can be seen from FIG. 6,
fluorocarbon (curve G620) has a smaller number of cavitations and
is more likely to generate cavitations than water (curve G610) for
each flow velocity range. In particular, when the number of
cavitations sinks below 5, cavitations are much more likely to
occur. However, also in the case of fluorocarbon, the number of
cavitations increases drastically and the risk of generating 5
cavitations decreases rapidly at a flow velocity of 10 m/s or less.
Hence, the present invention is designed in such a manner that the
refrigerant flow path is branched into multiple paths by the
depressed portions and the conduit holes to restrain the flow
velocity for each branch to 10 m/s or less, whereby the total
amount of heat can be removed through multiple heat exchange
portions while preventing the occurrence of cavitations.
[0057] FIG. 7 shows graphs summarizing the above-described
relationships. In FIG. 7, the area (a) shows the relationship
between flow velocity and thermal resistance as well as that
between flow velocity and the number of cavitations for water, and
the area (b) shows the relationship between flow velocity and
thermal resistance as well as that between flow velocity and the
number of cavitations for fluorocarbon. The curve G710TF shown in
the area (a) of FIG. 7 corresponds to the curve G510 shown in FIG.
5, while the curve G710CF corresponds to the curve G610 shown in
FIG. 6. Also, the curve G720TF shown in the area (b) of FIG. 7
corresponds to the curve G520 shown in FIG. 5, while the curve
G720CF corresponds to the curve G620 shown in FIG. 6. It is found
from these graphs that the thermal resistance and the risk of
generating cavitations are in a trade-off relationship with respect
to flow velocity. When cavitations may occur, there will occur
significantly negative impacts such as reduction in heat exchange
efficiency and erosion (mechanical corrosion). It is therefore
necessary to improve the thermal efficiency while restraining the
flow velocity. From the foregoing viewpoints, the present inventors
decided to control the refrigerant made of fluorocarbon and flowing
through the refrigerant flow path in the heat sinks to have a flow
velocity of preferably 1 to 10 m/s, more preferably 2 to 8 m/s, and
further preferably 3 to 7 m/s. At this flow velocity, it is
possible to maintain a cooling efficiency not as inferior to the
case where water is adopted as a refrigerant while restraining the
risk of cavitations.
[0058] The risk of generating cavitations depends also on the
change in the flow velocity of the refrigerant. When the flow
velocity of the refrigerant changes significantly, cavitations are
likely to occur even if the average flow velocity of the
refrigerant may be the same. The flow velocity of the refrigerant
is in inverse proportion to the cross-sectional area of the
refrigerant flow path. Hence, the present invention is designed in
such a manner that the change in the cross-sectional area of the
refrigerant flow path in the heat sinks is within .+-.30%.
[0059] FIG. 8 is a graph showing the change in the cross-sectional
area of the refrigerant flow path from the supply port through the
discharge port in a heat sink. As can be seen from FIG. 8, the
cross-sectional area of the flow path is approximately constant
from the supply port through the conduit holes in the heat sink.
The cross-sectional area of the flow path decreases at the conduit
holes (a plurality of holes provided in the partition plate in the
heat sink) where the refrigerant is to be ejected. Then, the
cross-sectional area of the flow path increases again after passing
through the conduit holes. However, the change in the
cross-sectional area of the flow path is within .+-.30%, and more
preferably within .+-.10%. This structure can restrain the
fluctuation in the flow velocity of the refrigerant to avoid the
occurrence of cavitations effectively.
[0060] When the semiconductor laser apparatus 1 having such a
structure as shown in FIG. 1 operates, the refrigerant 400
comprised of fluorocarbon and cooled in the chiller 500 is supplied
to the semiconductor laser stack 200 through the piping 600. The
refrigerant 400 is then supplied to the heat sinks 10a to 10c. The
refrigerant 400 comprised of fluorocarbon and supplied to the heat
sinks 10a to 10c cools the semiconductor laser arrays 2a to 2c
arranged on the heat sinks 10a to 10c. The refrigerant 400
discharged from the heat sinks 10a to 10c is returned to the
chiller 500 via the piping 600, and then cooled again to cool the
heat sinks 10a to 10c in the semiconductor laser stack 200.
[0061] The refrigerant 400 comprised of fluorocarbon and flowing
through the heat sinks 10a to 10c, which is controlled to have a
flow velocity of 1 to 10 m/s, can achieve efficient cooling without
generating cavitations. Further, since the change in the
cross-sectional area of the refrigerant flow path in the heat sinks
is restrained within .+-.30%, it is also possible to avoid the
occurrence of cavitations due to flow velocity change. This allows
the semiconductor laser arrays 2a to 2c to be cooled efficiently
with no erosion of the refrigerant flow path.
[0062] Further, since the refrigerant 400 comprised of fluorocarbon
cannot corrode the refrigerant flow path, it is possible to cool
the semiconductor laser arrays 2a to 2c stably over a long period
of time. Accordingly, it is possible to extend the element lifetime
and to achieve stable light output.
[0063] FIG. 9 is a view showing an assembling process for another
heat sink having a different three-layer structure from that shown
in FIG. 4. The heat sink 10a' is different from the heat sink 10a
shown in FIG. 4 in that the number of conduit holes 36 is greater
than those in the heat sink 10a shown in FIG. 4. This causes the
refrigerant flow path to further have more branches, which further
reduces the change in the cross-sectional area of the flow path
obtained by summing the area of the branches.
[0064] FIG. 10 is a view showing an assembling process for a heat
sink having a five-layer structure. The heat sink 10a'' is
different from the heat sink 10a shown in FIG. 4 in that a lower
intermediate plate member 50 is joined to the lower side of the
lower plate member 20 in the three-layer heat sink 10a shown in
FIG. 4, and that an upper intermediate plate member 60 is joined to
the upper side of the upper plate member 40. In the lower
intermediate plate member 50, there are provided through holes 52,
54 and a screw hole 58 that correspond, respectively, to the
through holes 22, 24 and the screw hole 28 in the lower plate
member 20. In the upper intermediate plate member 60, there are
provided through holes 62, 64 and a screw hole 68 that correspond,
respectively, to the through holes 42, 44 and the screw hole 48 in
the upper plate member 40. Then, when a retaining screw is screwed
into the screw holes 58, 68, the lower intermediate plate member 50
and the upper intermediate plate member 60 are to be joined,
respectively, to the lower plate member 20 and the upper plate
member 40. Accordingly, the through holes 52, 22, 32, 42, 62 are to
be connected to form a supply port 160a for supplying the
refrigerant to the refrigerant flow path. Also, the through holes
54, 24, 34, 44, 64 are to be connected to form a discharge port
180a for discharging the refrigerant from the refrigerant flow
path. The five-layer heat sink 10a'', in which the lower
intermediate plate member 50 and the upper intermediate plate
member 60 are arranged additionally, has a further improved
durability.
[0065] In addition, although the foregoing embodiments describe the
semiconductor laser apparatuses with jet-cooling-type heat sinks
adopted therein, microchannel-type heat sinks may be adopted.
[0066] From the invention thus described, it will be obvious that
the embodiments of the invention may be varied in many ways. Such
variations are not to be regarded as a departure from the spirit
and scope of the invention, and all such modifications as would be
obvious to one skilled in the art are intended for inclusion within
the scope of the following claims.
INDUSTRIAL APPLICABILITY
[0067] The semiconductor laser apparatus according to the present
invention can achieve a high output power of several to 100 W,
which therefore is applicable to a light source of, for example, a
laser knife, a laser soldering iron, and a laser marker.
* * * * *