U.S. patent application number 11/640887 was filed with the patent office on 2008-02-14 for metal photomask box.
This patent application is currently assigned to Gudeng Precision Industrial Co., Ltd.. Invention is credited to Ming-Lung Chiu, Chien Feng Wang.
Application Number | 20080035514 11/640887 |
Document ID | / |
Family ID | 39049584 |
Filed Date | 2008-02-14 |
United States Patent
Application |
20080035514 |
Kind Code |
A1 |
Chiu; Ming-Lung ; et
al. |
February 14, 2008 |
Metal photomask box
Abstract
The present invention relates to a metal photomask box
structure, which is composed of an upper cover member, a lower
cover member, and a ring-shaped airtight washer positioned between
the upper metal cover member and the lower metal cover member. At
least a movable connecting mechanism is disposed on one side of the
metal photomask box to connect the upper metal cover member and the
lower metal cover member. And at least a latch piece is disposed on
an opposite side of the movable connecting mechanism to latch the
upper metal cover member and the lower metal cover member.
Inventors: |
Chiu; Ming-Lung; (Taipei
County, TW) ; Wang; Chien Feng; (Taipei County,
TW) |
Correspondence
Address: |
REED SMITH LLP
Suite 1400, 3110 Fairview Park Drive
Falls Church
VA
22042
US
|
Assignee: |
Gudeng Precision Industrial Co.,
Ltd.
|
Family ID: |
39049584 |
Appl. No.: |
11/640887 |
Filed: |
December 19, 2006 |
Current U.S.
Class: |
206/454 ;
206/449 |
Current CPC
Class: |
H01L 21/67359 20130101;
H01L 21/67373 20130101; H01L 21/67393 20130101; H01L 21/67353
20130101; H01L 21/67369 20130101; H01L 21/67294 20130101; H01L
21/67288 20130101; H01L 21/67383 20130101; H01L 21/67396
20130101 |
Class at
Publication: |
206/454 ;
206/449 |
International
Class: |
B65D 85/48 20060101
B65D085/48 |
Foreign Application Data
Date |
Code |
Application Number |
Aug 10, 2006 |
TW |
95129396 |
Claims
1. A metal photomask box, comprising: a metal upper cover member; a
metal lower cover member; at least a movable connecting mechanism
disposed on one side of said metal photomask box for connecting
said metal upper cover member and said metal lower cover member;
and at least a latch piece, disposed on the other side of said
metal photomask box, being opposite to said movable connecting
mechanism for latching said metal upper cover member and said metal
lower cover member.
2. The metal photomask box according to claim 1, wherein said metal
photomask box is made of stainless steel series or aluminum alloy
or magnesium alloy.
3. The metal photomask box according to claim 1, further comprising
a ring-shaped airtight washer which is disposed between said metal
upper cover member and said metal lower cover member.
4. The metal photomask box according to claim 3, wherein the
material of said ring-shaped airtight washer is a polymer
resin.
5. The metal photomask box according to claim 3, wherein the
material of said ring-shaped airtight washer is a conductive
adhesive film.
6. A metal photomask box, comprising: a metal upper cover member; a
metal lower cover member; at least a movable connecting mechanism
disposed on one side of said metal photomask box for connecting
said metal upper cover member and said metal lower cover member; at
least a latch piece, disposed on the other side of said metal
photomask box, being opposite to said movable connecting mechanism
for latching said metal upper cover member and said metal lower
cover member; a ring-shaped airtight washer disposed between said
metal upper cover member and said metal lower cover member; and a
plurality of air valve devices disposed on said metal upper cover
member or said metal lower cover member.
7. The metal photomask box according to claim 6, wherein said metal
photomask box is made of stainless steel series or aluminum alloy
or magnesium alloy.
8. The metal photomask box according to claim 6, wherein the
material of said ring-shaped airtight washer is a polymer
resin.
9. The metal photomask box according to claim 6, wherein said air
valve device comprises at least an air filling valve devices and at
least an air exhausting valve devices.
10. The metal photomask box according to claim 6, wherein said air
filing valve devices and said air exhausting valve devices further
comprisies a flexible baffle plate for air filling valve and a
flexible baffle plate for air exhausting valve, respectively.
11. The metal photomask box according to claim 6, wherein a longer
side can be formed on said plurality of valve devices and the
distance of said longer side is 170 mm.
12. The metal photomask box according to claim 6, wherein a shorter
side can be formed on said plurality of valve devices and the
distance of said shorter side is 110 mm.
13. The metal photomask box according to claim 6, further
comprising a vibration detecting device which is disposed on said
metal upper cover member or said metal lower cover member.
14. The metal photomask box according to claim 6, further
comprising a RFID which is disposed on any side of said metal upper
cover member or said metal lower cover member.
15. The metal photomask box according to claim 6, further
comprising a plurality of pressing buckles which are disposed on
each corner of said metal upper cover member and said metal lower
cover member.
16. The metal photomask box according to claim 15, wherein said
pressing buckles comprises: a base body fixedly connected to each
corner of said upper cover member of said photomask box through a
plurality of supporting points; a flexible bending member, for one
bent pole of the member connected to said base body and the other
bent pole positioned between said one or plurality of supporting
points in flexible floating state, further comprising a top
supporting surface and a pressing buckling surface; wherein said
top supporting surface and said pressing buckling surface of said
flexible bending member contact and lock said photomask, when said
photomask box covers a photomask.
17. A metal photomask box, comprising: a metal upper cover member;
a metal lower cover member; at least a movable connecting mechanism
being disposed on one side of said metal photomask box for
connecting said metal upper cover member and said metal lower cover
member; at least a latch piece, disposed on the other side of said
metal photomask box, being opposite to said movable connecting
mechanism for latching said metal upper cover member and said metal
lower cover member; a ring-shaped airtight washer, disposed between
said metal upper cover member and said metal lower cover member;
and a plurality of air valve devices being disposed on one side of
said metal upper cover member or one side of said metal lower cover
member.
18. The metal photomask box according to claim 17, further
comprising a vibration detecting device which is disposed on said
metal upper cover member or said metal lower cover member.
19. The metal photomask box according to claim 17, further
comprising a RFID which is disposed on any side of said metal upper
cover member or said metal lower cover member.
20. The metal photomask box according to claim 17, further
comprising a plurality of pressing buckles which are disposed on
each corner of said metal upper cover member and said metal lower
cover member.
Description
FIELD OF THE INVENTION
[0001] The present invention relates to a photomask box, and more
particularly, to a structure of the metal photomask box.
DESCRIPTION OF THE PRIOR ART
[0002] Currently, advanced Foundries or Fabs. have stepped toward
90 nm in the process of manufacturing chips. Therefore, the most
urgent thing to do is to reduce the line width of photomasks that
are used to carry out the exposing process. Since photomasks
require high cost, the duration of photomasks has to be extended in
order to reduce the manufacturing cost. There have already been
many techniques focusing on the retaining piece or the locking
piece in photomask boxes, used in the hope for effective damage
reduction caused in the process of transporting or storing. In
addition, there are also some techniques that add ESD devices in
photomask boxes to prevent the photomasks from being damaged by
static electricity.
[0003] As Fabs. move toward more advanced processes, in addition to
ESD, EMI in Fabs. will also damage the photomasks on account of the
development of processes, especially when the photomasks are in
condition of storage and the changes in the surroundings cannot be
expected. Therefore, considering the prevention of damages to
photomasks caused by ESD and EMI as the prerequisite, the present
invention provides a structure of the metal photomask box for
effectively retaining the photomask, effectively isolating the
photomask from air, and preventing from the damages caused by ESD
and EMI by using the metal photomask box.
SUMMARY OF THE INVENTION
[0004] A main objective of the present invention is to provide a
structure of the metal photomask box that uses the metal photomask
box to prevent from the damages caused by ESD and EMI to the
photomask.
[0005] Another objective of the present invention is to provide a
structure of the metal photomask box with airtight effect that
isolates the photomask in the metal photomask box from air and
prevents from the fogging effect that can reduce the duration of
the photomask.
[0006] Still another objective of the present invention is to
provide a structure of the metal photomask box with filling
function that not only reduces the fogging effect but also
increases the storing time of the photomask.
[0007] And still another objective of the present invention is to
provide a structure of the metal photomask box that can detect
vibration and thus can monitor the storing condition of the metal
photomask box by using a vibration detecting device.
[0008] The present invention further provides another objective,
which is to provide a cover member of a metal photomask box
provided with a RFID that can rapidly identify the storing position
of the metal photomask box.
[0009] Concerning the afore-described objectives, the present
invention provides a metal photomask box composed of a metal upper
cover member and a metal lower cover member. Wherein one side of
the metal photomask box is disposed with at least a movable
connecting mechanism for connecting the metal upper cover member
and the metal lower cover member, and an opposite side of the
movable connecting mechanism is disposed with at least a latch
piece for latching the metal upper cover member and the metal lower
cover member.
[0010] The present invention then provides a metal photomask box
composed of a metal upper cover member and a metal lower cover
member. Wherein one side of the metal photomask box is disposed
with at least a movable connecting mechanism for connecting the
metal upper cover member and the metal lower cover member, and an
opposite side of the movable connecting mechanism is disposed with
at least a latch piece for latching the metal upper cover member
and the metal lower cover member. Moreover, a ring-shaped airtight
washer is further disposed between the metal upper cover member and
the metal lower cover member.
[0011] The present invention further provides a metal photomask box
composed of a metal upper cover member and a metal lower cover
member. Wherein one side of the metal photomask box is disposed
with at least a movable connecting mechanism for connecting the
metal upper cover member and the metal lower cover member, and an
opposite side of the movable connecting mechanism is disposed with
at least a latch piece for latching the metal upper cover member
and the metal lower cover member. Moreover, the photomask box is
further disposed with a ring-shaped airtight washer between the
metal upper cover member and the metal lower cover member, and a
plurality of valve pieces are disposed on the metal upper cover
member or the metal lower cover member.
[0012] The present invention further provides a metal photomask box
composed of a metal upper cover member and a metal lower cover
member. Wherein one side of the metal photomask box is disposed
with at least a movable connecting mechanism for connecting the
metal upper cover member and the metal lower cover member, and an
opposite side of the movable connecting mechanism is disposed with
at least a latch piece for latching the metal upper cover member
and the metal lower cover member. Moreover, the photomask box is
further disposed with a ring-shaped airtight washer between the
metal upper cover member and the metal lower cover member, a
plurality of valve pieces on the metal upper cover member or the
metal lower cover member, and a vibration detecting device on the
metal lower cover member.
[0013] The present invention then provides a metal photomask box
structure, comprising a metal lower cover member, two sides of
which being respectively disposed with a locking device and a
restricting device being disposed on one adjacent side of the
locking devices to form a structure shaped like a upside-down U,
the locking devices further comprising valve stoppers and holders;
a metal upper cover member, connected with the metal lower cover
member by a movable connecting mechanism; a plurality of pressing
buckles, fixedly connected to each corner of the metal upper cover
member through a plurality of supporting points; and a guiding
locking piece removably disposed on one side of the metal upper
cover member opposite to the opening of the structure shaped like
an upside-down U; a ring-shaped airtight washer, disposed between
the metal upper cover member and the metal lower cover member; at
least a latch piece, disposed on one opposite side of the movable
connecting mechanism; a plurality of air valve pieces, disposed on
the metal upper cover member or on the metal lower cover member;
and a vibration detecting device disposed on the metal lower cover
member.
[0014] By using the design disclosed by the present invention, not
only can the photomask be smoothly and easily led into the
photomask box and effectively locked, but ESD and EMI can also be
prevented and thus extend the duration of the photomask. Moreover,
the metal photomask box with air filling function provided by the
present invention also offers an airtight space to protect the
photomask and prevent from fogging effect on the photomask.
BRIEF DESCRIPTION OF THE DRAWINGS
[0015] FIG. 1 is a side view for a metal photomask box of the
present invention.
[0016] FIG. 2 is a front view for a metal photomask box of the
present invention with air filling function.
[0017] FIG. 3 is a block diagram for a structure of the metal
photomask box of the present invention with air filling
function.
[0018] FIG. 4 is a block diagram for the structure of a metal
photomask box of the present invention which is equipped with air
filling valves and air exhausting valves and with air filling
function.
[0019] FIG. 5 is a block diagram for the structure of another metal
photomask box of the present invention which is equipped with air
filling valves and air exhausting valves and with air filling
function.
[0020] FIG. 6 is a block diagram for the structure of the pressing
buckle of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0021] The present invention discloses a structure for metal
photomask boxes. Some detailed procedures for fabricating or
processing the photomask or photomask box applied in the present
invention are accomplished by using current techniques and will not
be completely described in the following description. And the
drawings in the following are not drawn according to actual sizes,
the function of which is only to illustrate features related to the
present invention.
[0022] First, referring to FIG. 1 and FIG. 2, which are diagrams of
a metal photomask box according to the present invention. Metal
photomask box 10 according to the present invention comprises a
metal upper cover member 11, a metal lower cover member 12, a
ring-shaped airtight washer 13 disposed between the metal upper
cover member 11 and the metal lower cover member 12, and a latch
piece 14. Therefore, the metal photomask box 10 can be covered by
the metal upper cover member 11, the metal lower cover member 12,
and the ring-shaped airtight washer 13; and the interior of the
metal photomask box 10 can be kept in an airtight condition with
the pressing and buckling of the latch device 14 and isolated from
the exterior of the metal photomask box 10. Thus when a photomask
20 is placed into the metal photomask box 10, the effect of
isolating the photomask 20 from the external atmosphere can be
achieved.
[0023] The metal photomask box 10 according to the present
invention can be made of a kind of metal material, and this kind of
metal material can be iron, copper, aluminum, stainless steel, or
alloy of the aforementioned materials; in the present embodiment,
the material of stainless steel is a preferred choice. Moreover,
the interior of the metal photomask box 10 is surface-treated, and
the number of particles that may be produced by the metal photomask
box 10 itself can thus be minimized. In addition, the ring-shaped
airtight washer 13 according to the present embodiment can be a
flexible airtight washer made of polymer resin such as Epoxy resin.
Thus, the latching of the latch device 14 can press-fits the
flexible airtight washer and the airtight effect can be ensured.
Moreover, since the ring-shaped airtight washer 13 has a certain
thickness, a latch piece with a movable axis is used as the latch
device 14 in the present embodiment to press and buckle the metal
photomask box 10.
[0024] Furthermore, in order to improve the EMI resistance of the
metal photomask box 10, the ring-shaped airtight washer 13 in the
present embodiment can also be an airtight washer made of a kind of
conductive adhesive film. Thus, when the metal photomask box 10 is
covered by the airtight washer made of conductive adhesive film,
the metal photomask 10 can become like a metal shielding mask and
therefore can effectively protect the photomask 20 in the metal
photomask box 10. Meanwhile, the airtight washer made of conductive
adhesive film can also be used to eliminate the static electricity
on the metal photomask box 10.
[0025] In order to extend the time of storage of the metal
photomask box, some inert gas needs to be filled into the metal
photomask box; moreover, in order to keep the cleanliness in the
metal photomask box, the air that has already existed in the metal
photomask box needs to be discharged or exhausted, such air
including the atmosphere, air outgassed by the metal photomask box
itself, and volatile gas produced by small quantity of chemical
solution remaining on the surface of the photomask. Thus, at least
an air filling device and at least an air exhausting device are
needed to be disposed on the metal photomask box so that the metal
photomask box can be equipped with air filling function.
[0026] Then, refer to FIG. 3 and FIG. 4, which are diagrams of a
metal photomask box of the present invention with air filling
function. The metal photomask box in the present embodiment not
only has the structure of the above-mentioned metal photomask box
10, but also is disposed with a pair of air filling valve devices
15 and a pair of air exhausting valve devices 16 on one side of the
lower metal cover member 12 of the metal photomask box 10, and the
air filling valve devices 15 and the air exhausting valve devices
16 are disposed with flexible baffle plate 151 for air filling
valve and flexible baffle plate 161 for air exhausting valve on the
ends inside the metal photomask box. Therefore when an air filling
equipment (not indicated) fills inert gas into the metal photomask
box 10, the air inlet device and the air outlet device of the air
filling equipment will prop open the flexible baffle plate 151 for
air filling valve and baffle plate 161 for air exhausting valve by
the air filling valve devices 15 and the air exhausting valve
devices 16 on the metal photomask box 10; thus, the air can be
exhausted, inert gas can be filled in, and the metal photomask box
10 can be filled with inert gas. When the air filling is finished,
the air inlet device and the air outlet device of the air filling
equipment move away from the metal photomask box 10, and the
flexible baffle plate 151 for air filling valve and baffle plate
161 for air exhausting valve resume their previous positions
immediately and close the air filling valve devices 15 and the air
exhausting valve devices 16. Thus, inert gas filled in the metal
photomask box 10 will not leak, the photomask 20 stored in the
metal photomask box 10 can be isolated from the atmosphere, and the
metal photomask box 10 of the present invention is equipped with
the function of long-time storage of the photomask.
[0027] Then, refer to FIG. 5, which is the diagram of another metal
photomask box of the present invention with air filling function.
The structure of the metal photomask box 10 in the present
embodiment is similar to that of the last embodiment, except that
the disposition of the plurality of air filling valve devices 15
and the plurality of air exhausting valve devices 16 are now
changed for being disposed on one metal cover member of the metal
photomask box 10, and the metal cover member can be the upper metal
cover member 11 or the lower metal cover member 12. As shown in
FIG. 5, when the plurality of air filling valve devices 15 and the
plurality of air exhausting valve devices 16 are disposed on a
metal cover member, the above-mentioned flexible baffle plate 151
for air filling valve and baffle plate 161 for air exhausting valve
can also be used as the airtight switch of the metal photomask box
10 before and after the air filling. Moreover, the form and
structure of baffle plate 151 for air filling valve and baffle
plate 161 for air exhausting valve are not limited in the present
invention. For example, a two-piece flexible valve can also be used
in the present embodiment. As shown in the diagram, a longer side
"S" and a shorter side "X" are formed on the arrangement of the
plurality of air filling valve devices 15 and the plurality of air
exhausting valve devices 16, wherein the distance of the longer
side "S" is 160-180 mm and is at a preferred distance "S" of 170
mm, and the distance of the shorter side "X" is 100-120 mm and at a
preferred distance "X" of 110 mm. The distance of a longer side "S"
and that of a shorter side "X" correspond with the air inlet device
and air outlet device on the air filling equipment. When a
plurality of air filling valve devices 15 and a plurality of air
exhausting valve devices 16 are disposed on one side of the metal
upper cover member 11 or the metal lower cover member 12, as shown
in FIG. 2, a longer distance "S" and a shorter distance "X" can
also be formed between the plurality of air filling valve devices
15 and the plurality of air exhausting valve devices 16, and said
longer distance "S" is the same as a longer side "S" and said
shorter distance "X" is the same as a shorter side "X".
[0028] Since a photomask box needs to be transported between
equipments and machines during the process, and particularly in
advanced semiconductor Fabs., the pick-and-place, transportation,
and storage of a photomask box are all carried out by a robot arm
or transporting apparatus. Therefore it is often difficult to know
whether any accidental collisions such as dropping down, momentary
cessation, or a direct collision have happened during the
transporting process and caused possible damages to the photomask
stored in the metal photomask box. Therefore, in order to monitor
whether any accidental collisions have happened during the
transporting process of the photomask box, a vibration detector 19,
and more particularly, a directional vibration detector as shown in
FIG. 4 and FIG. 5, is disposed on a proper position on the metal
upper cover member or the metal lower cover member of the metal
photomask box in the present invention for monitoring. When an
accidental collision happens to the photomask box during the
transporting process, a change of color will occur in the vibration
detector 19 disposed on the metal photomask box 10. For example,
the color of the vibration detector 19 before the collision is
green, and after the accidental collision happens, the color of the
vibration detector will become red; therefore when the process
machine or the operator detects or sees the vibration detector 19
change to red, they know that the photomask in the metal photomask
box 10 may be damaged. And more particularly, when a directional
vibration detector is used, the monitoring can be focused on
specific directions. Of course the vibration detector 19 in the
present embodiment can be a reusable mechanic vibration detector,
and can also be a disposable chemical vibration detector.
[0029] When the metal photomask box has been used for storage for a
while and needs to be picked out and reused, or when a metal
photomask box that has been used for storage needs to be selected
for composing another new process, the ability to quickly find out
the location of each metal photomask box is required. For this
purpose, referring to FIG. 1 and FIG. 3, an electronic identifier
17 such as a RFID, is disposed on a proper position on the exterior
of the metal upper cover member or the metal lower cover member of
the metal photomask box according to the present invention. When
certain metal photomask box is required to be searched for, the
automatic equipment can find out this metal photomask box through
the electronic identifier 17.
[0030] Furthermore, in order to effectively lock the photomask in
the metal photomask box, the present invention further provides
another embodiment, referring to FIG. 6, which is the diagram of a
metal photomask box with a pressing buckle of the present
invention. As shown in FIG. 6, a plurality of pressing buckles 18
are disposed on four corners of the metal upper cover member 11 or
the metal lower cover member 12 of the metal photomask box 10. The
pressing buckle, which shape is shown in FIG. 6, comprises a base
body 181, wherein one or a plurality of supporting points 185 are
disposed on the base body 181 for fixedly connecting the base body
181 to each of the four corners of the metal upper cover member 11
or the metal lower cover member 12 in the metal photomask box 10; a
flexible bending member 182 connected to the base body 181, one
pole of the flexible bending member 182 fully extended out of the
top of base body 181 and the other pole of the flexible bending
member 182 being positioned between the one or plurality of
supporting points 185 in flexible floating condition; the flexible
bending member 182 is further equipped with the design of a
pressing buckling surface 183 and a top supporting surface 184 so
that when the metal upper cover member 11, the metal lower cover
member 12, and the airtight washer 13 of the metal photomask box 10
cover a photomask, the pressing buckling surface 183 and the top
supporting surface 184 of the flexible bending member 182 can
contact and lock the photomask 20. In addition, the pressing buckle
18 can be composed of a polymer material, and the pressing buckle
18 can be connected to the metal upper cover member 11 or the metal
lower cover member 12 of the metal photomask box in a disassembly
approach.
[0031] What are described above are only preferred embodiments of
the present invention and should not be used to limit the claims of
the present invention; moreover, the above description can be
understood and put into practice by those who are skilled in the
present technical field, therefore equivalent changes or
modifications made without departing from the spirit disclosed by
the present invention should still be included in the appended
claims.
* * * * *