U.S. patent application number 11/892219 was filed with the patent office on 2007-12-20 for reaction chamber for oxy-fluoridation.
This patent application is currently assigned to SAMSUNG ELECTRONICS CO., LTD.. Invention is credited to Kook-rin Char, Dae-sik Kim, Tae-wan Kim.
Application Number | 20070292316 11/892219 |
Document ID | / |
Family ID | 34858681 |
Filed Date | 2007-12-20 |
United States Patent
Application |
20070292316 |
Kind Code |
A1 |
Kim; Tae-wan ; et
al. |
December 20, 2007 |
Reaction chamber for oxy-fluoridation
Abstract
In a magnetic memory device, and a method of manufacturing the
same, the magnetic memory device includes a switching device, and a
magnetic tunneling junction (MTJ) cell connected to the switching
device, the MTJ cell including a lower electrode connected to the
switching device and a lower magnetic layer, a tunneling film
containing fluorine, an upper magnetic layer, and a capping layer,
sequentially stacked on the lower electrode.
Inventors: |
Kim; Tae-wan; (Yongin-si,
KR) ; Char; Kook-rin; (Seoul, KR) ; Kim;
Dae-sik; (Seoul, KR) |
Correspondence
Address: |
LEE & MORSE, P.C.
3141 FAIRVIEW PARK DRIVE
SUITE 500
FALLS CHURCH
VA
22042
US
|
Assignee: |
SAMSUNG ELECTRONICS CO.,
LTD.
Suwon-si
KR
|
Family ID: |
34858681 |
Appl. No.: |
11/892219 |
Filed: |
August 21, 2007 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
11045476 |
Jan 31, 2005 |
7262474 |
|
|
11892219 |
Aug 21, 2007 |
|
|
|
Current U.S.
Class: |
422/129 ;
257/E21.665; 257/E27.005; 257/E43.004; 257/E43.006 |
Current CPC
Class: |
G11C 11/161 20130101;
H01L 43/08 20130101; B82Y 10/00 20130101; H01L 43/12 20130101; H01L
27/228 20130101 |
Class at
Publication: |
422/129 |
International
Class: |
B01J 19/00 20060101
B01J019/00 |
Foreign Application Data
Date |
Code |
Application Number |
Jan 29, 2004 |
KR |
10-2004-0005641 |
Claims
1-8. (canceled)
9. A reaction chamber, comprising: a stage; a fluorine source
supply provided above the stage; and an oxygen plasma generator
provided above the fluorine source supply.
10. The reaction chamber as claimed in claim 9, wherein the
fluorine source supply is a TEFLON.RTM. ring.
11. The reaction chamber as claimed in claim 9, wherein the
fluorine source supply is adapted to substantially uniformly
distribute the fluorine over a sample region of the stage.
12. The reaction chamber as claimed in claim 9, wherein the
fluorine source supply and the oxygen plasma generator are adapted
too supply fluorine and oxygen simultaneously.
13. The reaction chamber as claimed in claim 9, wherein a plasma
source gas used in the oxygen plasma generator is oxygen
(O.sub.2).
14. The reaction chamber as claimed in claim 9, wherein a plasma
source gas used in the oxygen plasma generator includes oxygen and
argon (Ar).
15. The reaction chamber as claimed in claim 9, wherein the
fluorine source supply is annular.
16. The reaction chamber as claimed in claim 9, wherein a the
fluorine source supply exposes a sample region of the stage to the
oxygen plasma generator.
17. The reaction chamber as claimed in claim 9, wherein the stage,
the fluorine source supply and the oxygen plasma generator are
substantially coextensive.
Description
CROSS REFERENCE TO RELATED APPLICATION
[0001] This is a divisional application based on pending
application Ser. No. 11/045,476, filed Jan. 31, 2005, the entire
contents of which is hereby incorporated by reference.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention relates to a memory device and a
method of manufacturing the same. More particularly, the present
invention relates to a magnetic memory device and a method of
manufacturing the magnetic memory device.
[0004] 2. Description of the Related Art
[0005] Magnetic memory devices, such as magnetic random access
memory (MRAM), are very sensitive to a variation of resistance
between cells because of weak sensing signals. Therefore, if there
is a large resistance deviation between cells, it may be difficult
to correctly read data recorded in the memory device.
[0006] Even if a sensing error is minimized by minimizing the
resistance deviation between cells, when stability of the memory
cells is not ensured, i.e., when a sufficient magnetic resistance
(MR) ratio is not achieved, it may be difficult not only to
correctly read data but also to correctly record data to the
magnetic memory device.
[0007] Accordingly, research has been conducted into minimizing the
resistance deviation between cells and ensuring stability of cells.
However, a more reliable magnetic memory device has not yet been
developed.
[0008] Resistance deviation between cells of the magnetic memory
device and the MR ratio are directly related to characteristics of
a tunneling film.
[0009] In a conventional memory device, an aluminum oxide, e.g.,
Al.sub.2O.sub.3, film is widely used as a tunneling film. When the
tunneling film is an aluminum oxide film, it may be formed to be
thinner than about 12 .ANG. for matching a sense circuit, to have a
resistance as low as about 10 K.OMEGA..mu.m.sup.2, and to have a
uniform thickness so that a resistance variation between cells is
less than 2%. When a thickness deviation of the aluminum oxide film
is about 1 .ANG., the resistance varies about by about a factor of
ten, i.e., one order of magnitude. Therefore, the aluminum oxide
film should have thickness uniformity so that the maximum thickness
variation in the cells is less than 1 .ANG..
[0010] FIGS. 1 and 2 illustrate cross-sectional views illustrating
a process for forming an aluminum oxide film in the course of
manufacturing a conventional MRAM in which an aluminum oxide film
is used as a tunneling film.
[0011] Referring to FIG. 1, an aluminum (Al) film 12 is formed on a
synthetic anti-ferromagnetic (SAF) film 10. Reference numeral 12a
in FIG. 1 indicates a grain boundary. During the process, the Al
film 12 is oxidized through a predetermined oxidation process. As
illustrated in FIG. 2, as a result of the oxidation, an aluminum
oxide film 14 is formed on the SAF film 10. The oxidation of the Al
film 12 starts along the grain boundary 12a and progresses into the
grain, as indicated by arrows in FIG. 1. More specifically, the
oxidation of the Al film 12 starts at a region 12b adjacent to the
grain boundary 12a and progresses into the grain.
[0012] In the case of a conventional MRAM, the resistance of the
tunneling film formed as described above varies from region to
region because the oxidation of the Al film 12 does not occur
simultaneously everywhere on the Al film 12.
[0013] In addition, a thickness of the Al film 12 increases during
oxidation. However, the thickness of the Al film 12 after oxidation
is not uniform because the oxidation of the Al film 12 does not
take place simultaneously over the entire region of the Al film 12,
as noted above.
SUMMARY OF THE INVENTION
[0014] The present invention is therefore directed to a magnetic
memory device and a method of manufacturing the magnetic memory
device, which substantially overcome one or more of the problems
due to the limitations and disadvantages of the related art.
[0015] It is a feature of an embodiment of the present invention to
provide a magnetic memory device having a low resistance, a uniform
thickness, a high magnetic resistance (MR) ratio, and a large
process margin.
[0016] It is another feature of an embodiment of the present
invention to provide a magnetic memory device having a reduced
sensing error by minimizing a resistance deviation between cells of
the magnetic memory device.
[0017] It is still another feature of an embodiment of the present
invention to provide a method of manufacturing the magnetic memory
device having a reduced oxidation process margin.
[0018] It is yet another feature of an embodiment of the present
invention to provide a plasma reaction chamber used for
manufacturing the magnetic memory device.
[0019] At least one of the above and other features and advantages
of the present invention may be realized by providing a magnetic
memory device includes a switching device, and a magnetic tunneling
junction (MTJ) cell connected to the switching device, the MTJ cell
including a lower electrode connected to the switching device and a
lower magnetic layer, a tunneling film containing fluorine, an
upper magnetic layer, and a capping layer, sequentially stacked on
the lower electrode.
[0020] The lower magnetic layer may include a buffer film, an
anti-ferromagnetic (AF) film, and a synthetic anti-ferromagnetic
(SAF) film, sequentially stacked.
[0021] The fluorine of the tunneling film may be substantially
uniformly distributed on a surface layer of the tunneling film.
[0022] The tunneling film may be an aluminium oxide film containing
fluorine.
[0023] At least one of the above and other features and advantages
of the present invention may be realized by providing a method of
manufacturing a magnetic memory device including a switching device
and a magnetic tunneling junction (MTJ) cell connected to the
switching device, the method including forming a lower electrode,
which is connected to the switching device, on an interlayer
insulating layer covering the switching device, forming a lower
magnetic layer on the lower electrode, forming a metal film on the
lower magnetic layer, performing a oxy-fluoridation process on the
metal film, forming an upper magnetic layer and a capping layer on
the oxy-fluoridated metal film, and patterning the sequentially
stacked layers on the lower electrode in reverse order.
[0024] Forming the metal film may include forming an aluminum film
having a predetermined thickness.
[0025] Performing the oxy-fluoridation process on the metal film
may include loading a resulting product on which the metal film is
formed into a reaction chamber including an oxygen plasma
generating apparatus and a fluorine source supplying apparatus and
supplying oxygen plasma and fluorine source onto the metal
film.
[0026] At least one of the above and other features and advantages
of the present invention may be realized by providing a reaction
chamber including a stage, a fluorine source supplying apparatus
provided above the stage, and an oxygen plasma generating apparatus
provided above the fluorine source supplying means.
[0027] In both the method and the reaction chamber, the fluorine
source supplying apparatus may be a TEFLON.RTM. ring.
BRIEF DESCRIPTION OF THE DRAWINGS
[0028] The above and other features and advantages of the present
invention will become more apparent to those of ordinary skill in
the art by describing in detail exemplary embodiments thereof with
reference to the attached drawings in which:
[0029] FIGS. 1 and 2 illustrate cross-sectional views of a process
for forming an aluminum oxide tunneling film in the method of
manufacturing a magnetic tunneling junction (MTJ) cell of a
conventional memory device;
[0030] FIG. 3 illustrates a cross-sectional view of an MTJ cell of
a memory device according to an embodiment of the present
invention;
[0031] FIGS. 4 through 7 illustrate cross-sectional views of stages
in a method of manufacturing the MTJ cell shown in FIG. 3;
[0032] FIG. 8 illustrates a perspective view of a plasma chamber
used for manufacturing the MTJ cell shown in FIG. 7;
[0033] FIG. 9 is a graph of a tunneling magneto resistance (TMR)
and resistance (RA) versus oxidation time of a conventional
magnetic memory device and a magnetic memory device according to
the embodiment of the present invention;
[0034] FIGS. 10 and 11 are graphs illustrating a voltage V
dependence of a TMR of a conventional magnetic memory device and a
magnetic memory device according to an embodiment of the present
invention, respectively;
[0035] FIGS. 12 and 13 are transmission electron microscope (TEM)
images of a cross-section of a tunneling film of a conventional
magnetic memory device and a magnetic memory device according to an
embodiment of the present invention, respectively;
[0036] FIG. 14 is a graph showing x-ray spectra with respect to a
conventional magnetic memory device and a magnetic memory device
according to an embodiment of the present invention;
[0037] FIGS. 15 and 16 are graphs showing x-ray spectra with
respect to an A 2p core level of a conventional magnetic memory
device and a magnetic memory device according to an embodiment of
the present invention, respectively; and
[0038] FIGS. 17 and 18 are graphs showing x-ray spectra with
respect to an Fe 2p core level of a conventional magnetic memory
device and a magnetic memory device according to an embodiment of
the present invention, respectively.
DETAILED DESCRIPTION OF THE INVENTION
[0039] Korean Patent Application No. 10-2004-0005641, filed on Jan.
29, 2004, in the Korean Intellectual Property Office, and entitled:
"Magnetic Memory Device and Method of Manufacturing the Same," is
incorporated by reference herein in its entirety.
[0040] The present invention will now be described more fully
hereinafter with reference to the accompanying drawings, in which
exemplary embodiments of the invention are shown. The invention
may, however, be embodied in different forms and should not be
construed as limited to the embodiments set forth herein. Rather,
these embodiments are provided so that this disclosure will be
thorough and complete, and will fully convey the scope of the
invention to those skilled in the art. In the figures, the
dimensions of films, layers and regions are exaggerated for clarity
of illustration. It will also be understood that when a layer is
referred to as being "on" another layer or substrate, it can be
directly on the other layer or substrate, or intervening layers may
also be present. Further, it will be understood that when a layer
is referred to as being "under" another layer, it can be directly
under, and one or more intervening layers may also be present. In
addition, it will also be understood that when a layer is referred
to as being "between" two layers, it can be the only layer between
the two layers, or one or more intervening layers may also be
present. Like reference numerals refer to like elements
throughout.
[0041] FIG. 3 illustrates a cross-sectional view of a magnetic
tunneling junction (MTJ) cell of a memory device according to an
embodiment of the present invention.
[0042] Referring to FIG. 3, an MTJ cell of a magnetic memory device
includes a lower electrode 42, which connects a switching device
38, e.g., a transistor, to the MTJ cell, and a lower magnetic layer
44, a tunneling film 46a, an upper magnetic layer 48, and a capping
film 50 sequentially formed on the lower electrode 42. An upper
electrode (not shown) is formed on the capping film 50. The lower
electrode 42 may be a tantalum (Ta) electrode or a titanium nitride
(TiN) electrode. The lower magnetic layer 44 includes a buffer film
44a or a seed layer formed on the lower electrode 42, and a pinning
film 44b and a pinned film 44c sequentially stacked on the buffer
film 44a. The buffer film 44a may be one of an amorphous metal
film, a ruthenium (Ru) film, and a nickel iron (NiFe) film. The
pinning film 44b, which is an anti-ferromagnetic (AF) film, may be
an iridium manganese (IrMn) film or a platinum manganese (PtMn)
film. The pinned film 44c may be a multiple layer film or a single
layer film. When the pinned film 44c is a multiple layer film (not
shown), it may be an SAF film including a lower pinned film, a
mediate film, and an upper pinned film. The lower pinned film may
be an anti-ferromagnetic film, such as a CoFe film. The mediate
film may be a metal film, e.g., a ruthenium (Ru) film. The upper
pinned film may be an anti-ferromagnetic film, e.g., a CoFe film.
The tunneling film 46a may be an insulating film including fluoride
(F). For example, the tunneling film 46a may be an AlO.sub.xF.sub.y
film. When the tunneling film 46a is an aluminium oxide film
containing fluoride, a thickness thereof is preferably less than
about 12 .ANG. and the fluoride may be substantially uniformly
distributed on a surface layer thereof. This aspect of the present
invention will be described in detail later with reference to test
results related to a method of manufacturing a magnetic memory
device according to an embodiment of the present invention.
[0043] The upper magnetic layer 48 is a free magnetic layer, which
is a material layer having a predetermined magnetic moment.
Polarization of the free magnetic layer may be either parallel or
anti-parallel to polarization of the pinned film 44c according to
voltage applied to the MTJ cell. The upper magnetic layer 48 may be
a double layer considering an increment of an MR ratio. The capping
film 50 is formed to protect the upper magnetic layer 48 during an
etching process and may be a Ru film.
[0044] FIGS. 4 through 7 illustrate cross-sectional views of stages
in a method of manufacturing the MTJ cell shown in FIG. 3.
[0045] A method of manufacturing a memory device, e.g., an MRAM,
including the above-described MTJ cell will now be described with
reference to FIGS. 4 through 7.
[0046] After forming a switching device (not shown), e.g., a
transistor, on a substrate (not shown), an interlayer insulating
layer (not shown) having a contact hole that exposes a doped
region, such as a source region or a drain region, of the
transistor is formed on the substrate. A pad conductive layer
filling the contact hole is formed on the interlayer insulating
layer. As illustrated in FIG. 4, the lower electrode 42, the lower
magnetic layer 44, and a metal film 46 for forming the tunneling
film 46a are sequentially formed on the pad conductive layer. The
lower electrode 42 and the lower magnetic layer 44 may be formed of
material films for manufacturing the memory device, as described
above. The metal film 46 for forming the tunneling film 46a may be
an aluminium (Al) film. At this time, the metal film 46 may be
formed to a thickness of less than about 12 .ANG., e.g., about 8
.ANG..
[0047] As illustrated in FIG. 5, a resulting product, in which the
lower electrode 42, the lower magnetic layer 44, and the metal film
46 are sequentially formed, is transported to a plasma reaction
chamber in which an oxidation and fluoridation process, i.e., an
oxy-fluoridation process, is performed. While performing the
oxy-fluoridation process, oxygen plasma together with a fluoride
source is supplied onto the metal film 46. At this time, a thin
film that contains a component of the metal film 46 and fluoride is
formed on the metal film 46 as a result of reaction between the
metal film 46 and fluoride. Due to the thin film on the metal film
46, the oxygen plasma can be evenly distributed over the entire
surface of the metal film so that it can react with a metal
component, e.g., aluminium, therein. Consequently, as illustrated
in FIG. 6, a metal oxide film 46a, i.e., the tunneling film 46a, is
formed on the lower magnetic layer 44.
[0048] The thickness of the tunneling film 46a including fluoride
is uniform over the entire region since the metal film 46 is evenly
distributed over the entire region. When the metal film is an
aluminium film, the thickness of the tunneling film 46a increases
up to about 12 .ANG. during the oxy-fluoridation process.
[0049] As illustrated in FIG. 7, the upper magnetic layer 48 and
the capping film 50 are sequentially formed on the tunneling film
46a. The tunneling film 46a and the capping film 50 may be formed
of materials described above for forming the memory device
according to an embodiment of the present invention.
[0050] FIG. 8 illustrates a perspective view of a plasma reaction
chamber used for performing the oxy-fluoridation process.
[0051] Referring to FIG. 8, the reaction chamber includes a stage
60 on which a sample 62 to be processed is placed. The reaction
chamber also includes a fluoride source supply apparatus 64, and a
plasma generation apparatus 66 for generating plasma from a plasma
source gas, e.g., oxygen (O.sub.2) or a gaseous mixture of oxygen
and argon (Ar). The fluoride source supply apparatus 64 may be a
ring formed of TEFLON.RTM., which is a trademark of DuPont.
[0052] Experimental results will now be described. For the
experiments, a conventional tunneling film formed of an aluminium
oxide (AlO.sub.x) film (hereinafter, first magnetic memory device)
and a tunneling film formed of an aluminium oxide film containing
fluoride (AlO.sub.xF.sub.y) according to an embodiment of the
present invention (hereinafter, second magnetic memory device) were
prepared. With respect to the first and second magnetic memory
devices, a tunneling magneto resistance (TMR) variation and a
resistance variation according to oxidation time for forming the
tunneling film were measured. In addition, voltage dependence of
the TMR, uniformity of the tunneling film, effect of fluoride
content, location of fluoride, and oxidation of the material film
formed under the tunneling film were measured for the first and
second magnetic memory devices.
[0053] FIGS. 9 through 18 are graphs showing the measurement
results.
[0054] FIG. 9 shows TMR and resistance versus oxidation time for
the first and second magnetic memory devices. Reference symbols
.tangle-solidup. and .circle-solid. represent the TMR variation of
the first and second magnetic memory devices, respectively.
Reference symbols .DELTA. and .smallcircle. represent the variation
of resistance of the first and second magnetic memory devices,
respectively.
[0055] Referring to FIG. 9, a TMR value of the first magnetic
memory device decreases drastically down to about 5% over time,
however, a TMR value of the second magnetic memory device is
maintained relatively uniform at a high level of about 30-34%. This
result indicates that an oxidation process margin of the second
magnetic memory device is much greater than that of the first
magnetic memory device.
[0056] Knowing that the variation of the TMR value of the first
magnetic memory device is reduced drastically to about 5% after
oxidizing for about ten minutes, the oxidation time for the first
magnetic memory device should be less than ten minutes. The short
oxidation time is advantageous with regard to productivity.
[0057] As depicted in FIG. 9, the resistance (RA) of the second
magnetic memory device increases over time. However, when the
oxidation time is less than ten minutes, the resistance value of
the second magnetic memory device is lower than the first magnetic
memory device.
[0058] FIGS. 10 and 11 show the measured voltage dependence of TMR
of the first and second magnetic memory devices, respectively.
[0059] The uppermost graph in FIG. 10 shows TMR (V) versus voltage
of the first magnetic memory device including a tunneling film
formed by oxidizing the metal film for one minute. The second graph
from the top shows TMR (V) versus voltage of the first magnetic
memory device including a tunneling film formed by oxidizing for
two minutes. The third through fifth graphs from the top show TMR
(V) versus voltage of the first magnetic memory device including a
tunneling film formed by oxidizing for three minutes, four minutes,
and six minutes, respectively.
[0060] The uppermost graph in FIG. 11 shows TMR (V) versus voltage
of the second magnetic memory device including a tunneling film
formed by oxy-fluoridating the metal film for two minutes. The
second and third graphs from the top show TMR (V) versus voltage of
the second magnetic memory device including a tunneling film formed
by oxy-fluoridating the metal film for four minutes and ten
minutes, respectively. The fourth through seventh graphs from the
top show TMR (V) versus voltage of the second magnetic memory
device including a tunneling film formed by oxy-fluoridating the
metal film for sixteen, twenty-four, thirty, and forty minutes,
respectively.
[0061] Comparing FIG. 10 with FIG. 11, in all cases, variation of
the TMR (V) with voltage is greater in the first magnetic memory
device than in the second magnetic memory device. This result shows
that the voltage dependency of the first magnetic memory device is
greater than that of the second magnetic memory device.
[0062] FIG. 12 is a transmission electron microscope (TEM) image of
a portion of a region including an MTJ cell of a tunneling film 70
of the first magnetic memory device. FIG. 13 is a TEM image of a
portion of a region including an MTJ cell of a tunneling film 80 of
the second magnetic memory device.
[0063] Comparing the tunneling film 70 of the first magnetic memory
device shown in FIG. 12 and the tunneling film 80 of the second
magnetic memory device shown in FIG. 13, it is observed that the
tunneling film 80 of the second magnetic memory device exhibits
much better uniformity of thickness and planarity than the
tunneling film 70 of the first magnetic memory device.
[0064] More specifically, the tunneling film 70 of the first
magnetic memory device shown in FIG. 12 has an uneven thickness
with large local variations. The tunneling film 80 of the second
magnetic memory device shown in FIG. 13, however, has a uniform
thickness and a smooth surface over its entire area thereof.
[0065] FIG. 14 is a graph showing X-ray spectra in an energy region
of 0-1,000 eV of stacked layers used to form an MTJ cell of the
first and second magnetic memory devices, before etching the
stacked layers into the MTJ cell.
[0066] In FIG. 14, the first graph G1 represents a spectrum of the
first magnetic memory device, and the second graph G2 represents a
spectrum of the second magnetic memory device. The first peak P1 of
the first graph G1 and the second peak P2 of the second graph G2
indicate strength of F 1 s.
[0067] Comparing the first peak P1 of the first graph G1 to the
second peak P2 of the second graph G2, it may be seen that the
second peak P2 is much larger than the first peak P1. This means
that the amount of fluorine contained in the tunneling film of the
second magnetic memory device is greater than the amount of
fluorine contained in the tunneling film of the first magnetic
memory device. By comparing the peaks of the first and second
graphs G1 and G2, it is observed that the magnitude of the first
peak P1 of the first graph G1 is smaller than most other peaks.
This means that the amount of fluorine contained in the tunneling
film of the first magnetic memory device is almost negligible
compared to the amount of fluorine contained in the tunneling film
of the second magnetic memory device.
[0068] The first peak P1 of the first graph G1 is attributed to
CF.sub.4 stained on the surface of the tunneling film of the first
magnetic memory device after a cleaning process. More specifically,
after forming a tunneling film in a manufacturing process for
forming a first magnetic memory device, a process for cleaning the
tunneling film using CF.sub.4 plasma is included. During this
cleaning process, the CF.sub.4 can be stained on the surface of the
tunneling film, and generates the first peak P1. Therefore, the
first peak P1 of the first graph G1 does not represent that
fluorine is contained in the tunneling film of the first magnetic
memory device.
[0069] FIGS. 15 and 16 are graphs showing Al 2p core level spectra
of the first and second magnetic memory devices, respectively. More
specifically, the spectra shown in FIGS. 15 and 16 contain
information about the existence of aluminum in the tunneling films
of the first and second magnetic memory devices, respectively.
[0070] FIG. 15 shows spectra of the first magnetic memory device
including a tunneling film formed by oxidizing for about eight
minutes. FIG. 16 shows spectra of the second magnetic memory device
including a tunneling film formed by oxy-fluoridating for fifteen
minutes.
[0071] The spectra illustrated in FIGS. 15 and 16 are measured at
different depths from a surface of each of the tunneling films of
the first and second magnetic memory devices, respectively.
[0072] In FIGS. 15 and 16, reference numeral 1 represents a
spectrum at a surface of the tunneling film of the first and second
magnetic memory devices, and reference numeral 2 represents a
spectrum slightly below the surface of the tunneling film of the
first and second magnetic memory devices, respectively. As the
reference numeral sequentially increases, a measuring depth in the
tunneling film increases. Accordingly, as the reference numeral
gets larger, a distance from the surface of the tunneling film
increases, i.e., the measuring depth gets closer to the lower
magnetic layer.
[0073] Referring to FIG. 15, the peak in the spectrum 1 measured on
the surface of the tunneling film of the first magnetic memory
device appears when a binding energy is 74.4 eV. This peak means
that aluminium exists in the form of AlO.sub.x on the surface of
the tunneling film of the first magnetic memory device. In
spectrums 2 through 9 measured at increasing depths in the
tunneling film of the first magnetic memory device, locations of
peaks are the same as in spectrum 1 measured at the surface layer
of the tunneling film. This result indicates that the entire
tunneling film of the first magnetic memory device is formed of
AlO.sub.x.
[0074] Referring to FIG. 16, the peak in spectrum 1 measured on the
surface of the tunneling film of the second magnetic memory device
appears when a binding energy is 75.6 eV. This result indicates
that aluminium in the surface layer of the tunneling film of the
second magnetic memory device exists in the form of
AlO.sub.xF.sub.y.
[0075] However, referring to spectrums 2 through 7 measured at
increasing depths in the tunneling film of the second magnetic
memory device in FIG. 16, the location of the peak shifts toward a
binding energy of 74.4 eV as the depth increases. This result
indicates that while aluminium at the surface of the tunneling film
of the second magnetic memory device exists in the form of
AlO.sub.xF.sub.y, below the surface, aluminum exists in the form of
AlO.sub.x.
[0076] FIGS. 17 and 18 are graphs showing Fe 2p core level spectra
of a tunneling film of the first and second magnetic memory
devices, respectively. These graphs contain information about
oxidation of the lower magnetic layer formed under the tunneling
film during the oxidizing process in the course of forming the
tunneling film of the first and second magnetic memory devices.
[0077] FIG. 17 shows spectra of the first magnetic memory device
including a tunneling film formed by oxidizing for about eight
minutes. FIG. 18 shows spectra of the second magnetic memory device
including a tunneling film formed by oxy-fluoridating for about
fifteen minutes.
[0078] Referring to FIG. 17, the first peak appears at a binding
energy of 724.0 eV and the second peal appears at a binding energy
of 710.4 eV. However, in FIG. 18, peaks do not appear at the same
locations. The first and second peaks in FIG. 17 are attributed to
the existence of iron oxide (FeO.sub.x) or cobalt oxide
(CoO.sub.x).
[0079] By comparing FIGS. 17 and 18, in the case of the first
magnetic memory device, the lower magnetic layer formed under the
tunneling film was oxidized in the process of oxidizing the
tunneling film. However, in the case of the second magnetic memory
device, the lower magnetic layer formed under the tunneling film
was not oxidized despite a longer oxy-fluoridating time than the
first magnetic memory device.
[0080] As described above, according to an embodiment of the
present invention, a tunneling film of a magnetic memory device may
be formed to have a uniform thickness over an entire region, since
the tunneling film is formed using an oxy-fluoridation process.
Accordingly, a thickness deviation of the tunneling film in a cell
and between cells can be minimized. Also, the low resistance of an
MTJ cell can be maintained while maintaining high MR ratio, because
the entire region of the tunneling film is evenly oxidized but the
material film under the tunneling film is not oxidized during an
oxy-fluoridation process. Further, an oxidizing process margin can
be increased since the excellent characteristics of the tunneling
film do not vary with the length of the oxy-fluoridation
process.
[0081] Exemplary embodiments of the present invention have been
disclosed herein and, although specific terms are employed, they
are used and are to be interpreted in a generic and descriptive
sense only and not for purpose of limitation. For example, one
skilled in this art could apply the method of manufacturing a
tunneling film according to the present invention to a memory
device or to the manufacture of other semiconductor devices that
require a film with similar characteristics as the tunneling film
of the present invention. Accordingly, it will be understood by
those of ordinary skill in the art that various changes in form and
details may be made without departing from the spirit and scope of
the present invention as set forth in the following claims.
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