U.S. patent application number 10/596175 was filed with the patent office on 2007-11-29 for ultrasound transducer and method for implementing flip-chip two dimensional array technology to curved arrays.
This patent application is currently assigned to Koninklijke Philips Electronic, N.V.. Invention is credited to Wojtek Sudol.
Application Number | 20070276238 10/596175 |
Document ID | / |
Family ID | 34652479 |
Filed Date | 2007-11-29 |
United States Patent
Application |
20070276238 |
Kind Code |
A1 |
Sudol; Wojtek |
November 29, 2007 |
Ultrasound transducer and method for implementing flip-chip two
dimensional array technology to curved arrays
Abstract
An ultrasound transducer probe (40) includes a support substrate
(54), an integrated circuit (42) and an array of piezoelectric
elements (50). The support substrate (54) has a non-linear surface
(55). The integrated circuit (42) physically couples to the support
substrate (54) overlying the non-linear surface (55), wherein the
integrated circuit (42) substantially conforms to a shape of the
non-linear surface (55). An array of piezoelectric elements (50)
couples to the integrated circuit (42).
Inventors: |
Sudol; Wojtek; (Andover,
MA) |
Correspondence
Address: |
PHILIPS INTELLECTUAL PROPERTY & STANDARDS
P.O. BOX 3001
BRIARCLIFF MANOR
NY
10510
US
|
Assignee: |
Koninklijke Philips Electronic,
N.V.
Groenewoudseweg 1
Eindhoven
NL
5621 BA
|
Family ID: |
34652479 |
Appl. No.: |
10/596175 |
Filed: |
December 1, 2004 |
PCT Filed: |
December 1, 2004 |
PCT NO: |
PCT/IB04/52624 |
371 Date: |
June 2, 2006 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
60527014 |
Dec 4, 2003 |
|
|
|
Current U.S.
Class: |
600/437 ;
29/25.35; 310/311 |
Current CPC
Class: |
B06B 1/0637 20130101;
Y10T 29/42 20150115; B06B 1/0633 20130101 |
Class at
Publication: |
600/437 ;
029/025.35; 310/311 |
International
Class: |
A61B 8/00 20060101
A61B008/00; H01L 41/00 20060101 H01L041/00 |
Claims
1. An ultrasound transducer probe, comprising: a support substrate
having a non-linear surface; an integrated circuit physically
coupled to the support substrate overlying the non-linear surface,
wherein said integrated circuit substantially conforms to a shape
of the non-linear surface; and an array of piezoelectric elements
coupled to said integrated circuit.
2. The ultrasound transducer probe of claim 1, wherein said
integrated circuit is physically attached to the support substrate
via at least one of an adhesive and an epoxy.
3. The ultrasound transducer probe of claim 1, wherein the
non-linear surface of said support substrate includes a smooth
curved surface.
4. The ultrasound transducer probe of claim 3, further wherein the
smooth curved surface has a radius of curvature selected as a
function of a desired ultrasound transducer probe application,
wherein the desired ultrasound transducer probe application
includes one selected from the group consisting of a cardiac
application, an abdominal application, and a transosophageal
application.
5. The ultrasound transducer probe of claim 1, wherein said
integrated circuit has a thickness on the order of approximately
5-50 .mu.m.
6. The ultrasound transducer probe of claim 1, wherein said
integrated circuit includes an active region, said ultrasound
transducer probe further comprising: a passivation layer overlying
the active region of said integrated circuit, wherein a thickness
of said integrated circuit and a thickness of said passivation
layer are selected to assure that neutral fibers of a bend
structure coincide with the active region of said integrated
circuit, wherein the bend structure includes that of said
integrated circuit and said passivation layer.
7. The ultrasound transducer probe of claim 6, wherein the active
region of said integrated circuit includes circuitry for performing
at least one of control processing and signal processing functions
of said ultrasound transducer probe.
8. The ultrasound transducer probe of claim 1, wherein said
integrated circuit includes at least one of a silicon based, a
gallium based, and a germanium based integrated circuit.
9. The ultrasound transducer probe of claim 1, wherein said array
of piezoelectric elements includes a two-dimensional array of
piezoelectric transducer elements.
10. The ultrasound transducer probe of claim 1, wherein said array
of piezoelectric elements is coupled to said integrated circuit via
flip-chip conductive bump connections.
11. The ultrasound transducer probe of claim 1, wherein said
support substrate includes a highly thermally conductive material,
the conductive material having a thermal conductivity in a range on
the order of 45 W/mk to 420 W/mk.
12. The ultrasound transducer probe of claim 1, wherein said
support substrate includes a highly acoustic attenuating material,
the attenuating material for attenuating acoustics in a range on
the order of 10 dB/cm at 5 MHz to 50 dB/cm at 5 MHz.
13. The ultrasound transducer probe of claim 1, further comprising:
a protective layer overlying the array of piezoelectric elements,
said protective layer having a shape substantially conformal to
said array of piezoelectric elements and the non-linear surface of
said support substrate.
14. The ultrasound transducer probe of claim 13, wherein the shape
of said protective layer includes a radius of curvature
substantially on the order of a radius of curvature of said array
of piezoelectric elements and the non-linear surface of said
support substrate.
15. The ultrasound transducer probe of claim 13, wherein said
protective layer includes polyethylene.
16. An ultrasound transducer probe, comprising: a support substrate
having a non-linear surface; an integrated circuit physically
coupled to said support substrate overlying the non-linear surface,
wherein said integrated circuit substantially conforms to a shape
of the non-linear surface, and wherein said integrated circuit
includes an active region and a passivation layer overlying the
active region, wherein a thickness of said integrated circuit and a
thickness of the passivation layer are selected to assure that
neutral fibers of a bend structure coincide with the active region
of said integrated circuit, wherein the bend structure includes
that of said integrated circuit and the passivation layer; and an
array of piezoelectric elements coupled to said integrated circuit
via flip-chip conductive bump connections.
17. The ultrasound transducer probe of claim 16, wherein the
non-linear surface of said support substrate includes a smooth
curved surface having a radius of curvature selected as a function
of a desired ultrasound transducer probe application, wherein the
desired ultrasound transducer probe application includes one
selected from the group consisting of a cardiac application, an
abdominal application, and a transosophageal application.
18. The ultrasound transducer probe of claim 17, wherein said
integrated circuit has a thickness on the order of approximately
5-50 .mu.m.
19. The ultrasound transducer probe of claim 16, further
comprising: a protective layer overlying said array of
piezoelectric elements, said protective layer having a shape
substantially conformal to said array of piezoelectric elements and
the non-linear surface of said support substrate.
20. An ultrasound diagnostic imaging system adapted for use with an
ultrasound transducer probe, said ultrasound transducer probe
comprising: a support substrate having a non-linear surface; an
integrated circuit physically coupled to the support substrate
overlying the non-linear surface, wherein said integrated circuit
substantially conforms to a shape of the non-linear surface; and an
array of piezoelectric elements coupled to said integrated
circuit.
21. A method of fabricating an ultrasound transducer probe,
comprising: providing a support substrate having a non-linear
surface; physically coupling an integrated circuit to the support
substrate overlying the non-linear surface, wherein the integrated
circuit substantially conforms to a shape of the non-linear
surface; and coupling an array of piezoelectric elements to the
integrated circuit.
22. The method of claim 21, wherein coupling the array of
piezoelectric elements to the integrated circuit includes coupling
via flip-chip conductive bump connections.
23. The method of claim 21, wherein the integrated circuit includes
an active region and a passivation layer overlying the active
region, wherein a thickness of the integrated circuit and a
thickness of the passivation layer are selected to assure that
neutral fibers of a bend structure coincide with the active region
of the integrated circuit, wherein the bend structure includes that
of the integrated circuit and the passivation layer.
24. The method of claim 21, wherein the integrated circuit has a
thickness on the order of approximately 5-50 .mu.m.
25. The method of claim 21, further comprising: overlying a
protective layer with respect to the array of piezoelectric
elements, the protective layer having a shape substantially
conformal to the array of piezoelectric elements and the non-linear
surface of the support substrate.
26. The method of claim 25, wherein the shape of said protective
layer includes a radius of curvature substantially on the order of
a radius of curvature of said array of piezoelectric elements and
the non-linear surface of said support substrate.
27. The method of claim 25, wherein the protective layer includes
polyethylene.
Description
[0001] The present disclosure generally relates to transducer
arrays for use in medical ultrasound, and more particularly, to a
method and apparatus for implementing flip-chip two-dimensional
array technology to curved arrays.
[0002] In medical ultrasound, two-dimensional transducer arrays are
generally used for transmission and reception of ultrasonic or
acoustic waves during ultrasound diagnostic imaging. State of the
art two-dimensional arrays generally include a flat array having on
the order of about three thousand (3,000) transducer elements. In
one type of ultrasound transducer design, all transducer elements
of an array are attached and individually electrically connected to
a surface of an integrated circuit (IC) via flip-chip technology
using conductive bumps. The IC provides electrical control of the
elements, such as, for beam forming, signal amplifying, etc.
[0003] One example of a typical design of an ultrasound transducer
is illustrated in FIG. 1. The ultrasound transducer 10 includes a
flat array of acoustic elements 12 that are coupled to a surface of
an integrated circuit 14 via flip-chip conductive bumps 16. A
flip-chip underfill material 18 is included within a region between
the flip-chip conductive bumps 16, the integrated circuit 14 and
the flat array of acoustic elements 12. Transducer 10 further
includes a transducer base 20 and an interconnection cable 22.
Interconnection cable 22 is for interconnecting between the
integrated circuit 14 and an external cable (not shown). Integrated
circuit 14 is electrically coupled to the interconnection cable 22
via wirebonded wires 24, using techniques known in the art.
[0004] FIG. 2 is a plan view of an ultrasound probe 30, with a
cut-away cross-sectional view of a portion 32 of the probe
containing the conventional ultrasound transducer 10 of FIG. 1.
FIG. 3 is an enlarged view of the cut-away cross-sectional view of
the portion 32 of the probe containing the conventional ultrasound
transducer 10. As discussed above, the conventional acoustic array
is flat and thus transducer 10 is flat. A preferred shape of the
portion of the probe 30 intended for being placed in contact with a
patient, from an ergonomic point of view (i.e., probe contact and
patient comfort), is a convex surface.
[0005] To change the flat face of an acoustic array to an ergonomic
convex shape of the probe, a separate interface part is
conventionally used to facilitate the transition. For example, as
shown in FIG. 3, an acoustic window or lens 34 is disposed on a top
surface of the flat transducer 10. The acoustic lens 34 provides a
transition from the flat transducer surface to the ergonomic convex
shape of the probe 30. In addition, physical structural members 36
and 38 secure the transducer 10 and acoustic lens 34 within the
probe 30. However, the addition of interface parts, such as
acoustic lens 34, directly in the acoustic path of the transducer
array is very disadvantageous. That is, acoustic losses caused by
the acoustic attenuation of the interface material and
reverberations from each interface are introduced into the acoustic
path. As a result, the phenomenon of both the acoustic losses and
reverberations decrease an acoustic performance of the ultrasound
transducer probe.
[0006] In addition, it is noted that flip-chip two-dimensional
transducer arrays have a number of advantages. For example, the
advantages include having a shortest possible electrical connection
path (small capacitance), a smallest possible number of electrical
connections, simplicity, size, cost, etc. However, while flip-chip
technology can be applied to a large percentage of transducer
applications, it also has a significant limitation. That is, IC
fabrication technology is limited to flat parts. As a result, this
limits application of the flip-chip technology only to flat
transducer arrays. However, there exists: a very large application
base for curved transducer arrays and the market segment for curved
transducer arrays cannot currently be addressed with the flip-chip
technology.
[0007] Accordingly, an improved ultrasound transducer and method of
making the same for overcoming the problems in the art is
desired.
[0008] An ultrasound transducer probe includes a support substrate,
an integrated circuit and an array of piezoelectric elements. The
support substrate has a non-linear surface. The integrated circuit
physically couples to the support substrate overlying the
non-linear surface, wherein the integrated circuit substantially
conforms to a shape of the non-linear surface. An array of
piezoelectric elements couples to the integrated circuit.
[0009] FIG. 1 is a plan view of a conventional ultrasound
sensor;
[0010] FIG. 2 is a plan view of an ultrasound probe, with a
cut-away cross-sectional view of a portion of the probe containing
the conventional ultrasound transducer;
[0011] FIG. 3 is an enlarged view of the cut-away cross-sectional
view of the portion of the probe containing the conventional
ultrasound transducer of FIG. 2;
[0012] FIGS. 4-6 are cross-sectional views of various steps in the
formation of a curved flip-chip two dimensional ultrasound
transducer according to an embodiment of the present
disclosure;
[0013] FIG. 7 is a cross-sectional view of a portion of an
integrated circuit of the ultrasound transducer in accordance with
an embodiment of the present disclosure;
[0014] FIG. 8 is a cut-away cross-sectional view of a portion of a
probe containing an ultrasound transducer according to an
embodiment of the present disclosure; and
[0015] FIG. 9 is a block diagram view of an ultrasound diagnostic
imaging system with an ultrasound transducer according to an
embodiment of the present disclosure.
[0016] Referring now to FIGS. 4-6, cross-sectional views of various
steps in the formation of a curved flip-chip two dimensional
ultrasound transducer according to an embodiment of the present
disclosure shall be discussed. The embodiments of the present
disclosure provide a path to implement flip-chip two-dimensional
array technology to curved arrays. In one embodiment, formation of
ultrasound transducer 40 begins with coupling integrated circuit
(IC) 42 to an acoustic stack of material 44, using flip-chip
techniques known in the art. As shown in FIG. 4, the integrated
circuit 42 electrically couples to the acoustic stack of material
44 via flip-chip conductive bumps 46. An underfill material 48 is
also provided between the integrated circuit 42, the acoustic stack
of material 44, and the conductive bumps 46.
[0017] Briefly, the flip-chip two-dimensional array of the present
disclosure has two sets of electrical connections to the IC. One
set of connections is between the IC and the acoustic elements.
Another set of connections provides connection of the transducer to
the ultrasound system that the transducer is intended to be used
with.
[0018] The first set of connections can be obtained by one of many
different variations of the flip-chip technique. In all instances,
one or both sides of a joint are first bumped with either a plated
metal bump, screen printed conductive epoxy bumps, bumped by
ultrasonic welding of gold wire balls, or bumped with melted and
reflowed solder balls. In a second step, both parts are brought
together and joined. Again, there are a variety of joining
techniques that make the discrete connection of the bump and the IC
substrate or bump to bump. In the simplest case there is a direct
contact of the tip of the bump with the IC substrate. Often it is
advantageous to add a small amount of conductive epoxy between the
bump tip and the substrate. Another possibility is implementation
of Anisotropic Conductive Adhesive to facilitate the connection
between the bump and substrate. Yet another variation is a reflow
solder flipchip where the molten solder is implemented to make the
bump connection.
[0019] In all instances, however there is need for an underfill.
The function of the underfill is to actually hold both parts
together since the connection of the bumps alone may not be
adequate for the strength of the assembly. Also, some of the
flip-chip variations require a good hermetic seal of the joint
which the underfill can provide. In the case of the flip-chip
two-dimensional array, there is one more function that the
underfill needs to fulfil. After the flip-chip is completed, a
dicing process is done to separate the Acoustic Stack into
individual elements. The separating cut needs to deeper than the
last layer of the acoustic stack, but not too deep so as to reach
the IC. The underfill function is also to support each individual
element.
[0020] The second set of connections to the IC can be accomplished
by wirebonding (as discussed further herein with respect to FIG. 6)
or by other means. Examples of possible connection techniques that
can be used are: solder process, ultrasonic welding,
thermocompression welding, laser welding, conductive elastomer,
anisotropic conductive adhesive, flip chip, etc.
[0021] Referring again to FIG. 4, integrated circuit 42 can include
one or more of a silicon based, a gallium based, or a germanium
based integrated circuit. In one embodiment, the integrated circuit
42 has a thickness on the order of approximately 5-50 .mu.m. A
benefit of this thickness range is that the integrated circuit
becomes flexible.
[0022] Subsequent to coupling the integrated circuit and the
acoustic stack of material, the acoustic stack of material 44 is
diced into individual acoustic elements (FIG. 5) using a dicing
process known in the art. For illustration purposes, several of the
individual acoustic elements are indicated by reference numeral 50,
wherein adjacent individual acoustic elements are separated by a
gap 52 resulting from the dicing operation. Dicing of the acoustic
stack forms an array of acoustic elements, for example, wherein the
acoustic elements include piezoelectric elements. In one
embodiment, the array of piezoelectric elements includes a
two-dimensional array of transducer elements.
[0023] Accordingly, after the dicing operation that separates the
slab of acoustic material into individual elements, the assembly
(i.e., the IC and the acoustic elements) will be very flexible and
can be bent to the desired curvature appropriate for different
ultrasound transducer probe applications. For example, one
application can include an Abdominal Curved Linear Array (CLA)
application, wherein the radius of curvature is selected to
correspond with a large size transducer probe. Another application
can include, for example, a Trans-Vaginal CLA Array application,
wherein the radius of curvature is selected to correspond with a
small size transducer probe.
[0024] As shown in FIG. 6, ultrasound transducer 40 includes a
support substrate 54 having a non-linear surface, an integrated
circuit 42 physically coupled to the support substrate 54 overlying
the non-linear surface, wherein the integrated circuit
substantially conforms to a shape of the non-linear surface, and an
array of piezoelectric elements 50 coupled to the integrated
circuit 42. During fabrication, the diced structure of the
ultrasound transducer 40 is attached to a support substrate 54. The
integrated circuit 42 physically attaches to the support substrate
using an adhesive, epoxy, or other suitable attachment means.
[0025] Support substrate 54 has a non-linear surface 55.
Preferably, the non-linear surface 55 includes a smooth curved
surface. The smooth curved surface has a radius of curvature
selected as a function of a desired ultrasound transducer probe
application. For example, the ultrasound transducer probe
application can includes a cardiac application, an abdominal
application, or a transosophageal (TEE) application.
[0026] According to the embodiments of the present disclosure, the
thinning of the IC as discussed herein, to have a thickness on the
order of 5-50 .mu.m, is also very advantageous from a thermal
performance point of view. During the device operation, heat is
generated that causes a temperature rise of the device. Heating of
the device is not desirable and in most transducer designs, a
special heat path must be incorporated therein. Since the silicon
material of the IC is in the direct heat path and the silicon
material is not a good heat conductor, thinning of the IC provides
an additional benefit. To further improve the thermal performance,
it is advantageous to select highly thermally conductive material
for the supporting structure. In some cases there may a need for an
additional attenuation of the array and to improve the acoustic
performance it is advantageous to select highly acoustically
attenuating material for the supporting structure.
[0027] In one embodiment, the support substrate 54 includes a
material that is highly thermally conductive. The thermally
conductive material preferably has a thermal conductivity in a
range on the order of 45 W/mk to 420 W/mk. The thermally conductive
material can include brass, aluminum, zinc, graphite or a composite
of several materials with a resultant thermal conductivity in the
range specified above. In yet another embodiment, the support
substrate 54 includes a material that is an acoustic attenuating
material, the attenuating material being suitable for attenuating
acoustics in a range on the order of 10 dB/cm (at 5 Mhz) to 50
dB/cm (at 5 Mhz). The support substrate material for the acoustic
attenuation can include a high durometer rubber or an epoxy
composite material that consists of epoxy and a mixture of very
high and very low acoustic impedance particles. Still further, the
support substrate may include a substrate that is both highly
thermally conductive and acoustically attenuating.
[0028] Referring still to FIG. 6, ultrasound transducer 40 further
includes an interconnection cable 56. Interconnection cable 56 is
for interconnecting between the integrated circuit 42 and an
external cable (not shown). Integrated circuit 42 electrically
couples to the interconnection cable 56 via wirebonded wires 58,
using wire bonding techniques known in the art.
[0029] FIG. 7 is a cross-sectional view of a portion of an
integrated circuit 42 of the ultrasound transducer 40 in accordance
with an embodiment of the present disclosure. Integrated circuit 42
includes a passivation layer 60 and an integrated circuit portion
62 of silicon. The integrated circuit portion 62 includes an active
region containing circuit layers. The active region of the
integrated circuit includes various circuit layers (not shown) of
circuitry for performing at least one of control processing and
signal processing functions of the ultrasound transducer probe.
Passivation layer 60 includes any suitable dielectric, glass, or
insulation layer. Passivation layer 60 overlies the active region
of the integrated circuit portion 62. FIG. 7 also illustrates a
location of a "no stress region" 64 in the cross sectional view of
the portion of the integrated circuit 42. During bending of the
integrated circuit, tensile stress is created in the "outside" part
of the integrated circuit and there is also a compressive stress in
the inside part of the integrated circuit. In addition, there is a
location in the cross-sectional view that has "no stress." The
location of the "no stress region" 64 is dependent on the
dimensions of layers 60 and 62, as well as, on the Modulus of
Elasticity of the materials of layers 60 and 62.
[0030] A thickness of the passivation layer 60, a thickness of the
integrated circuit portion 62, and a Modulus of Elasticity of the
passivation layer are selected to assure that the "no stress
region" of a bend structure coincide with the active region of the
integrated circuit portion 62. The bend structure includes a
combined structure of the integrated circuit portion 62 and the
passivation layer 60, having a radius of curvature r, as indicated
by the reference numeral 68.
[0031] The combination of the layer thicknesses and the radius of
curvature is selected such that the characteristics of the bend
structure include the top layer being stretched, the bottom layer
being compressed, and the central region (between the top and
bottom layers) being under a neutral stress, wherein the central
region corresponds to a region of the neutral fibers of the bend
structure. In other words, the thickness of the passivation layer
60 and the thickness of the integrated circuit portion 62 are
balanced to provide a location of "neutral fibers" in the region of
the active circuit layers of the active region. As a result, the
circuitry of the active region experiences substantially no stress
during bending of the integrated circuit in the manufacture of the
ultrasound transducer probe according to the embodiments of the
present disclosure.
[0032] FIG. 8 is a cut-away cross-sectional view of a portion of a
probe 70 containing an ultrasound transducer 40 according to an
embodiment of the present disclosure. The ultrasound transducer
probe 70 includes a protective layer 72 overlying the array of
piezoelectric elements 42 of the transducer 40. The thickness range
of the protective layer 72 is on the order of approximately 0.001
to 0.20 inch. The protective layer 72 has a shape substantially
conformal to the array of piezoelectric elements 42 and the
non-linear surface of the support substrate 54. The shape of the
protective layer 72 includes a radius of curvature substantially on
the order of a radius of curvature of the array of piezoelectric
elements 42 and the non-linear surface of the support substrate 54.
In other words, the curved shape of the array is designed for being
in contact with a patient via the conformal protective layer
without requiring additional material in the acoustic path that
changes a shape of the array. In one embodiment, the protective
layer 72 includes polyethylene. In addition, physical structural
members 74 and 76 secure the transducer 40 and protective layer 72
within the probe 70.
[0033] One advantage of the embodiments of the present disclosure
is that curving the transducer array enables better ergonomics of
the transducer probe to be obtained. A preferred shape of the
probe/patient contact portion of the transducer probe,
corresponding to the portion intended for being placed in contact
with the patient, from an ergonomic point of view is a convex
surface. Accordingly, the ergonomics relate to the probe contact
and patient comfort. In addition, given that protective layer 72 is
substantially conformal to the array of piezoelectric elements 42,
acoustic losses caused by the acoustic attenuation of the
protective layer and reverberations introduced into the acoustic
path are minimal. As a result, the embodiments of the present
disclosure provide for an improved acoustic performance of the
ultrasound transducer probe.
[0034] FIG. 9 is a block diagram view of an ultrasound diagnostic
imaging system 80 with an ultrasound transducer according to an
embodiment of the present disclosure. Ultrasound diagnostic imaging
system 80 includes a base unit 82 adapted for use with ultrasound
transducer probe 70. Ultrasound transducer probe 70 includes
ultrasound transducer 40 as discussed herein. Base unit 82 includes
additional conventional electronics for performing ultrasound
diagnostic imaging. Ultrasound transducer probe 70 couples to base
unit 82 via a suitable connection, for example, an electronic
cable, a wireless connection, or other suitable means.
[0035] According to another embodiment, a method of fabricating an
ultrasound transducer probe includes providing a support substrate
having a non-linear surface, physically coupling an integrated
circuit to the support substrate overlying the non-linear surface,
wherein the integrated circuit substantially conforms to a shape of
the non-linear surface, and coupling an array of piezoelectric
elements to the integrated circuit. In one embodiment, coupling of
the array of piezoelectric elements to the integrated circuit
includes using flip-chip conductive bump connections.
[0036] Further as discussed herein, the integrated circuit includes
an active region and a passivation layer overlying the active
region, wherein a thickness of the integrated circuit and a
thickness of the passivation layer are selected to assure that
neutral fibers of a bend structure coincide with the active region
of the integrated circuit, wherein the bend structure includes that
of the integrated circuit and the passivation layer. In one
embodiment, the integrated circuit has a thickness on the order of
approximately 5-50 .mu.m.
[0037] The method can further include providing an overlying
protective layer with respect to the array of piezoelectric
elements, the protective layer having a shape substantially
conformal to the array of piezoelectric elements and the non-linear
surface of the support substrate. The shape of the protective layer
preferably includes a radius of curvature substantially on the
order of a radius of curvature of the array of piezoelectric
elements and the non-linear surface of the support substrate. In
one embodiment, the protective layer is polyethylene.
[0038] Although only a few exemplary embodiments have been
described in detail above, those skilled in the art will readily
appreciate that many modifications are possible in the exemplary
embodiments without materially departing from the novel teachings
and advantages of the embodiments of the present disclosure.
Accordingly, all such modifications are intended to be included
within the scope of the embodiments of the present disclosure as
defined in the following claims. In the claims, means-plus-function
clauses are intended to cover the structures described herein as
performing the recited function and not only structural
equivalents, but also equivalent structures.
* * * * *