U.S. patent application number 11/788891 was filed with the patent office on 2007-11-01 for fluid distribution system.
Invention is credited to David Paul Edwards.
Application Number | 20070251585 11/788891 |
Document ID | / |
Family ID | 38647195 |
Filed Date | 2007-11-01 |
United States Patent
Application |
20070251585 |
Kind Code |
A1 |
Edwards; David Paul |
November 1, 2007 |
Fluid distribution system
Abstract
The present invention provides a method and apparatus for bulk
fluid distribution. In particular, the invention provides a method
and apparatus for distributing fluids in a semiconductor
manufacturing plant (e.g. a 300 mm fab). The invention meets the
performance and uptime requirements of semiconductor manufacturers
including increased capacity and pressure control as compared to
known fluid distribution systems, and can satisfy the requirements
of "no single point failures" and "no planned downtime."
Inventors: |
Edwards; David Paul;
(Waconia, MN) |
Correspondence
Address: |
BOC EDWARDS , INC
55 MADISON AVENUE SUITE 400
MORRISTOWN
NJ
07960
US
|
Family ID: |
38647195 |
Appl. No.: |
11/788891 |
Filed: |
April 23, 2007 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
60795730 |
Apr 28, 2006 |
|
|
|
Current U.S.
Class: |
137/565.33 |
Current CPC
Class: |
F04B 23/00 20130101;
Y10T 137/86163 20150401; F04F 1/10 20130101; F04F 1/02
20130101 |
Class at
Publication: |
137/565.33 |
International
Class: |
F04B 41/06 20060101
F04B041/06 |
Claims
1. A fluid distribution system for supplying fluid to a point of
use comprising: a fluid source; a first engine adapted to receive
fluid from the fluid source and to distribute fluid to the point of
use; and a second engine identical to the first engine, the second
engine being adapted to receive fluid from the fluid source and to
distribute fluid to the point of use; wherein the fluid
distribution system does not have any single point failures.
2. The fluid distribution system of claim 1 having no planned
downtime wherein the system is adapted to distribute fluid to the
point of use while maintenance is performed on any component of the
system.
3. The fluid distribution system of claim 1 further comprising a
third engine identical to the first and second engines wherein the
third engine is adapted to receive fluid from the fluid source and
to distribute fluid to the point of use.
4. The fluid distribution system of claim 1 wherein the first and
second engines comprise a pump and a pressure vessel.
5. The fluid distribution system of claim 4 wherein the pressure
vessel comprises a level sensor.
6. The fluid distribution system of claim 4 wherein the pressure
vessel comprises a load cell.
7. The fluid distribution system of claim 1 wherein the first and
second engines comprise a positive displacement pump and a pulse
dampener.
8. The fluid distribution system of claim 1 wherein the first and
second engines comprise a centrifugal pump.
9. The fluid distribution system of claim 1 wherein the first and
second engines comprise a pressure vacuum vessel.
10. The fluid distribution system of claim 9 wherein each of the
pressure vacuum vessels comprises a sensor.
11. The fluid distribution system of claim 9 wherein each of the
pressure vacuum vessels comprises a load cell.
12. The fluid distribution system of claim 1 wherein the point of
use is a semiconductor process tool.
13. A fluid distribution system comprising: a main module; a day
tank module; a fluid source; a point of use; a first engine adapted
to receive fluid from each of the main module, the day tank module
and the fluid source and adapted to dispense fluid to each of the
day tank module, the fluid source and the point of use; and a
second engine adapted to receive fluid from each of the main
module, the day tank module and the fluid source and adapted to
dispense fluid to each of the day tank module, the fluid source and
the point of use; wherein the fluid distribution system does not
have any single point failures.
14. The fluid distribution system of claim 13 having no planned
downtime wherein the system is adapted to distribute fluid to the
point of use while maintenance is performed on any component of the
system.
15. The fluid distribution system of claim 13 further comprising a
third engine adapted to receive fluid from each of the main module,
the day tank module and the fluid source and adapted to dispense
fluid to each of the day tank module, the fluid source and the
point of use.
16. The fluid distribution system of claim 13 further comprising a
central processing unit having an input-output module connected to
each of the first and second engines.
17. The fluid distribution system of claim 13 further comprising a
plurality of central processing units wherein each central
processing unit comprises an input-output module connected to each
of the first and second engines.
18. The fluid distribution system of claim 13 wherein the first and
second engines comprise a pump and a pressure vessel.
19. The fluid distribution system of claim 18 wherein the pressure
vessel comprises a level sensor.
20. The fluid distribution system of claim 18 wherein the pressure
vessel comprises a load cell.
21. The fluid distribution system of claim 13 wherein the first and
second engines comprise a positive displacement pump and a pulse
dampener.
22. The fluid distribution system of claim 13 wherein the first and
second engines comprise a centrifugal pump.
23. The fluid distribution system of claim 13 wherein the first and
second engines comprise a pressure vacuum vessel.
24. The fluid distribution system of claim 23 wherein each of the
pressure vacuum vessels comprises a sensor.
25. The fluid distribution system of claim 23 wherein each of the
pressure vacuum vessels comprises a load cell.
26. A method of distributing fluid to a point of use comprising:
distributing fluid to the point of use with a first engine;
filtering fluid in a day tank with a second engine; and filtering
fluid in a supply drum with a third engine; wherein each of the
first, second and third engines is adapted to perform the steps of
distributing fluid to the point of use, filtering fluid in the day
tank and filtering fluid in the supply drum.
27. The method of claim 26 wherein in the event of failure of a
component in the first engine, the second engine or the third
engine is adapted to distribute the fluid to the point of use.
28. The method of claim 26 further comprising the step of
performing maintenance on a component of the fluid distribution
system without requiring any planned downtime.
Description
CROSS-REFERENCE TO RELATED APPLICATION(S)
[0001] This application claims priority from U.S. Provisional
Patent Application Ser. No. 60/795,730 filed Apr. 28, 2006.
FIELD OF THE INVENTION
[0002] The present invention relates to an apparatus and method for
distributing a fluid to a point of use. More specifically, the
present invention provides an apparatus, having no single point
failures or planned downtime, and a method for distributing a fluid
to a semiconductor process tool for semiconductor processing.
BACKGROUND OF THE INVENTION
[0003] The manufacture of semiconductor (i.e. integrated circuit)
devices is a complex process involving hundreds of process steps.
Each step requires optimal conditions to produce a high yield of
the devices. In addition, many process steps require fluids to
inter alia etch, expose, coat, and polish materials deposited on
the surfaces of the devices during manufacturing. When high purity
fluids (e.g. hydrofluoric acid, sulfuric acid, hydrogen peroxide,
ammonium hydroxide and isopropyl alcohol) are used during the
manufacturing process, the fluids must be substantially free of
particulate and metal contaminants to prevent defects in the
finished devices. When chemical-mechanical polishing slurries (e.g.
Semi-Sperse.RTM.-12, iCue.RTM. 5001, Klebosol.RTM. 1501 and
Cab-O-Sperse.RTM. SC-112) are used, the slurries must be free from
large particles capable of scratching the surfaces of the devices
and causing defects. Moreover, during manufacturing there must be a
stable and sufficient supply of the fluids to the process tools to
avoid process fluctuations and manufacturing downtime.
[0004] Since their introduction to the semiconductor market, bulk
fluid distribution systems have played an important role in
semiconductor manufacturing processes. Prior to the use of fluid
distribution systems, process fluids were stored and transported to
the process tools in plastic or glass bottles. This method involved
many hazards in transportation and use such as broken bottles,
chemical exposure to operators, and spilling or splashing when
pouring the fluids into baths or other containers. In addition,
there were several opportunities for the fluids to become
contaminated through exposure to the atmosphere and contact with
objects (e.g. operator gloves). Fluid distribution systems, such as
the Model 1500 manufactured by the Chemical Management Division of
BOC Edwards.TM., Inc., were developed to eliminate these hazards
and contamination issues and to help automate the process of
replenishing fluids in the manufacturing process. Notably, the
Model 1500 has been used by semiconductor manufacturers for over a
decade.
[0005] A representation of a typical fluid distribution system used
in semiconductor manufacturing processes is shown in FIG. 1. The
system 100 is a standalone unit including a controller 101, a
human-machine interface (HMI) 103, an electrical compartment 105
including input/output (I/O) components and solenoid valves 106,
connections to facilities such as clean dry air 107, nitrogen 109,
exhaust 111, deionized water 113 and city water 115, an engine 117,
and a day tank 123. The engine 117 is typically one of several
types: 1) pump-pulse dampener; 2) pump-pressure vessel; or 3)
alternating pressure vacuum vessel. FIG. 1 is shown with a
pump-pulse dampener engine 119,121. During operation, system 100
draws fluid from supply drums 127 or a pressurized source and
dispenses the fluid to one or more points of use 129.
[0006] The components of system 100 are enclosed in a stainless
steel or polymer cabinet 125 and the system is substantially
constructed of inert wetted materials to minimize particulate and
metal contamination of the process fluids. While the bulk fluid
distribution system 100 of FIG. 1 has eliminated the problems with
bottle delivery and can distribute large volumes of fluid to the
process tools, the fluid often meeting and exceeding the purity
requirements of semiconductor manufacturers, system 100 also has
drawbacks.
[0007] The fluid distribution system of FIG. 1 has several "single
point failures" and requires "planned downtime." A single point
failure occurs when a vital component or function of the system
fails thereby preventing the system from operating safely or from
adequately dispensing fluid to the points of use. Planned downtime
refers to the product maintenance schedule and how often the system
must be shutdown to check or replace a component. For example,
single point failures in system 100 include distribution valve 131,
valve 133, controller 101, regulator 108 and pressure switches
112a, 112b and 112c. If any of these components failed, then system
100 would either be unable to distribute fluid to the points of use
or safely exhaust the cabinet compartments. Similarly, planned
downtime schedules such as a monthly check of the pressure switches
112a, 112b and 112c and a quarterly check of the valves 131 and 133
require shutdown of the entire system.
[0008] As a result of such limitations to existing designs, many
semiconductor manufacturers require two fluid distribution systems
per fluid stream in order to ensure complete redundancy. This
solution is costly and inefficient with regard to space
utilization. Some fluid distribution system designs address these
issues in different ways. For example, one design provides
redundant pump engines with independently serviceable cabinets.
Other systems address redundancy and uptime by using dual pump
engines whereby the system has the capability of switching from the
on-line pump to the off-line pump when the on-line pump fails.
These designs allow for limited maintenance of systems while they
are operating. However, the dual pump engines are not
equivalent--one engine is smaller than the other and complete
serviceability and maintenance cannot be performed without system
shutdown. Another design also provides redundant pumps, but in a
shared cabinet. The filters are not redundant and the system has
less redundancy options for maintenance and serviceability as
compared to the first mentioned design. Yet another design offers
considerable redundancy and good serviceability, but is costly due
to excessive amounts of isolation in the system.
[0009] Thus, there is a need for a bulk fluid distribution system
that substantially or completely eliminates single point failures
and the impact of product maintenance shutdowns (i.e. "planned
downtime"). In addition, there is a further need for a bulk fluid
distribution system that is modular and has a smaller footprint as
compared to the footprint of two distribution systems such as
system 100 shown in FIG. 1.
BRIEF DESCRIPTION OF THE INVENTION
[0010] A fluid distribution system for supplying fluid to a point
of use comprising a fluid source; a first engine adapted to receive
fluid from the fluid source and to distribute fluid to the point of
use; and a second engine identical to the first engine, the second
engine being adapted to receive fluid from the fluid source and to
distribute fluid to the point of use; wherein the fluid
distribution system does not have any single point failures.
[0011] A method of distributing fluid to a point of use comprising
distributing fluid to the point of use with a first engine;
filtering fluid in a day tank with a second engine; and filtering
fluid in a supply drum with a third engine; wherein each of the
first, second and third engines is adapted to perform the steps of
distributing fluid to the point of use, filtering fluid in the day
tank and filtering fluid in the supply drum.
BRIEF DESCRIPTION OF THE DRAWINGS
[0012] FIG. 1 is a schematic representation of a known fluid
distribution system.
[0013] FIG. 2 is a schematic representation of an embodiment of the
bulk fluid distribution system of the present invention.
[0014] FIG. 3 is a schematic representation of an embodiment of an
optional source management module of the present invention.
[0015] FIG. 4 is a schematic representation of an embodiment of the
main module of the present invention.
[0016] FIG. 5 is a schematic representation of an embodiment of a
pump-pressure vessel engine of the present invention.
[0017] FIG. 6 is a schematic representation of an embodiment of a
pump pulse-dampener engine of the present invention.
[0018] FIG. 7 is a schematic representation of an embodiment of a
centrifugal pump engine of the present invention.
[0019] FIG. 8 is a schematic representation of an embodiment of an
alternating pressure vacuum vessel engine of the present
invention.
[0020] FIG. 9 is a schematic representation of an optional day tank
module of the present invention.
[0021] FIG. 10 is a schematic representation of floor space
configurations for various embodiments of the present
invention.
DETAILED DESCRIPTION OF THE INVENTION
[0022] The present invention provides a method and apparatus for
bulk fluid distribution. In particular, the invention provides a
method and apparatus for distributing fluids in a semiconductor
manufacturing plant (e.g. a 300 mm fab). The invention meets the
performance and uptime requirements of semiconductor manufacturers
including increased capacity and pressure control as compared to
known fluid distribution systems, and can satisfy the requirements
of "no single point failures" and "no planned downtime."
[0023] An embodiment of a bulk fluid distribution system according
to the present invention is shown in FIG. 2. Fluid distribution
system 200 includes five subsystems: three engine modules 201, 203
and 205, one main module 207 and one source management module 209.
Each subsystem can be maintained and repaired independent of the
operation of the other subsystems. System 200 may be supplied by
drums of source fluid 213 or by a pressurized supply line of source
fluid and may optionally include a day tank module 211 containing a
day tank for storing large quantities of fluid for distribution to
points of use. Similarly, the main module 207 may also include the
day tank in addition to sampling and facility connections. The
controls in the main module have dedicated input-output (I/O)
modules for each subsystem and the control system can be built
around a single CPU (taking exception to the single point failure
criteria) or dual CPUs. The engines 201, 203, and 205 may be
identical to one another and can perform identical functions
including distribution to the points of use, day tank polishing,
drum polishing, drum switching or any combination thereof. The
system also allows for complete isolation of each engine, including
isolation of the electrical, controls, pneumatics and fluids
compartments.
[0024] In one embodiment, facility supply lines 215, including
compressed dry air 215a, nitrogen 215b, deionized water 215c, city
water 215d and exhaust 215e, and fluid dispense line 217 flow into
and out of the main module 207. In another embodiment, the facility
supply lines 215 may also flow into and out of each module 201,
203, 205, 209 and 211.
[0025] Fluid supply lines 219a and 219b are connected to the source
management module 209 which distributes the source fluid to the
main module 207. In one embodiment, each of the engines 201, 203
and 205 receives the source fluid from the main module 207 through,
for example, bulk-heads or pass-throughs in the module cabinets. In
another embodiment, the engine modules 201, 203 and 205 may receive
the source fluid directly from the source management module
209.
[0026] The plumbing and instrumentation and operation of each
module will be described separately with reference to FIGS. 3-8. A
schematic diagram of the source management module 209 is shown in
FIG. 3. The primary function of the source management module 209 is
as a drum switching or supply line switching mechanism. In an
embodiment where the source fluid is supplied by drums 213, each of
the supply drums 213 is connected to the source management module
209 by fluid supply lines 219a and 219b. Each fluid supply line
219a and 219b includes a valve and is connected to the main module
207 via main supply line 220. Optionally, the source management
module 209 may be connected to a main return line 221 from the main
module 207. This option would enable drum polishing, that is,
recirculating the fluid in the drum through a filter for a period
of time to remove any particles resulting from shipment and
manufacture of the fluid. Typically, this operation would occur
every time an old drum was replaced with a new one and would be
initiated by an operator through the HMI in the main module 207.
Similarly, the controller in the main module 207 could be
configured to cause a drum polish to occur on a periodic basis.
[0027] A schematic diagram of the main module 207 is shown in FIG.
4. The main module 207 houses the facilities connections including
compressed dry air 215a, nitrogen 215b, deionized water 215c, city
water 215d and exhaust 215e, and fluid dispense line 217 (as shown
in FIG. 2) and it houses the programmable logic controller (PLC)
and HMI. The main module 207 may include two PLCs for redundancy or
another PLC may be located elsewhere in or near the system 200.
Optionally, the main module 207 will include a sample station for
collecting samples of the fluid at various points within the system
for analysis.
[0028] As mentioned above, the engines may all be identical so that
each can perform the same operations thereby providing redundancy
and serviceability and eliminating or substantially reducing single
point failures and planned downtime. A single point failure occurs
where a component in the fluid distribution system fails causing
the entire system to shutdown and stop distributing fluid to the
point of use. The failed component may be a valve in the
distribution loop that mechanically prevents fluid flow or may be a
valve in the system exhaust that prevents safely exhausting the
cabinet. Planned downtime refers to the periodic maintenance
schedule of components in the system; in prior art systems, if
certain components must be replaced or serviced, the entire system
must be shutdown. A system having no planned downtime is one where
periodic maintenance may be performed on a system component without
disrupting operation of the system, in particular, fluid
distribution to the point of use.
[0029] Notably, all engines are capable of receiving fluid from the
source drums through line 220, the main module 207, or from the day
tank module 211. Furthermore, all of the engines dispense the fluid
through a filter or a filter bank (i.e. two to four filters in
parallel) and back to either the drums 213 or day tank module 211
or to the points of use 217. In addition, each engine is capable of
distributing fluid to the points of use, polishing the fluid in the
day tank (by filtering), polishing the fluid in the drums (by
filtering), drum switching or any combination thereof.
[0030] FIG. 5 shows a first embodiment of engines 201, 203 or 205
according to the present invention. In the first embodiment, the
engines are pump-pressure vessel engines. The pump 501 can be any
type of positive displacement pump (e.g. an air-operated dual
diaphragm pump, a self-reciprocating pump, a bellows pump, etc.).
The pressure vessel 503 may be constructed of an inert wetted
polymer material such as perfluoroalkoxy (PFA),
polytetrafluoroethylene (PTFE), polyvinylchloride (PVC),
polyvinylidine difluoride (PVDF), or polyethylene (PE). In
addition, the vessel 503 must be able to withstand pressurization
while dispensing the fluid to the points of use 217, the drums 213
or the day tank 211. An inert gas such as nitrogen may be used to
pressurize the vessel 503 and thereby dispense the fluid. The
nitrogen is preferably regulated with regulator 505 to provide
appropriate control of the dispense pressure of the fluid. The
vessel includes load cells 507 or capacitive, optical or digital
sensors on a sight tube, to maintain the level of the fluid in the
vessel between a high and low setpoint. The controller in the main
module 207 controls this operation.
[0031] A second embodiment of the engine 201, 203 or 205 of the
present invention is shown in FIG. 6. Like the pump-pressure vessel
engine, the pump-pulse dampener engine of FIG. 6 includes a
positive displacement pump 601. The pump-pulse dampener engine
further includes a pulse dampener 603 facilitated with CDA 215a.
The pressure of the CDA 215a is preferably regulated with regulator
605. As mentioned above, the pump-pulse dampener engine can receive
fluid from the drums 213 or the day tank module 211 and distribute
the fluid to the points of use 217 or back to the source management
module 207, source line 220 or the day tank module 211.
[0032] A third embodiment of the engine 201, 203 or 205 of the
present invention is shown in FIG. 7. In contrast to the
pump-pressure vessel and pump-pulse dampener engines of FIGS. 5 and
6, the third embodiment is a centrifugal pump engine. In this
embodiment the pump 701 is any centrifugal pump that is resistant
to corrosion from fluids such as strong acids and bases (e.g.
hydrofluoric acid, sulfuric acid, hydrochloric acid, hydrogen
peroxide, ammonium hydroxide, etc.). The centrifugal pump 701 may
be a magnetically levitated bearingless pump such as those
manufactured by Levitronix.RTM. GmBH. Such pumps may include a
designated controller 703 to control the speed of the pump. Such
controller would preferably communicate with the main controller in
the main module.
[0033] A fourth embodiment of the engine 201, 203 or 205 of the
present invention is a pressure-vacuum vessel engine. The
pressure-vacuum vessel engine includes two pressure-vacuum vessels
801, 802. Each vessel 801, 802 is equipped with at least two fluid
level sensors 803, 804, 805, 806 such as capacitive, optical or
digital sensors, or load cells. The sensors 803, 804, 805, 806
monitor the fluid level in the vessels 801, 802.
[0034] During a fill cycle, a vacuum-generating device 807, 808
(e.g. an aspirator or venturi) creates a vacuum in the vessel to
draw in the fluid. When the vacuum is operated on a vessel, any gas
in the vessel flows to an exhaust 215e as the fluid from either the
source line 220, the main module 207 or the day tank module 211 is
drawn into the vessel. When the fluid level reaches a predetermined
high level, the vacuum stops.
[0035] During a dispense cycle, an inert gas, such as nitrogen,
flows through a "slave" regulator 809, 810 and into the dispensing
vessel 801, 802. The vessel 801, 802 is initially pressurized to a
predetermined pressure and then the fluid under the force of the
inert gas pressure flows through the filter 811 and to the points
of use 217, or back to the drums 213 or the day tank module 211.
The vessel 801, 802 dispenses the fluid until it reaches a
predetermined low fluid level at which point the fill cycle begins
again.
[0036] During operation, the vessels 801, 802 alternate between
fill and dispense cycles such that when one vessel is filling, the
other vessel is dispensing. Notably, the vacuum-generating device
807, 808 is configured so that the vessels 801, 802 fill faster
than they dispense to provide a continuous flow of fluid to the
points of use or other areas in the system 211, 213.
[0037] FIG. 9 shows an embodiment of the optional day tank module
211. The day tank 901 may include load cells 903, 904 or
capacitive, optical or digital sensors on sight tubes to monitor
the level of fluid in the day tank. The day tank is typically
constructed of an inert polymer such as PFA, PTFE, PVC, PVDF or
PE.
[0038] Each engine 201, 203, 205 is capable of distributing fluid
to the points of use, polishing the fluid in the day tank 901 (by
filtering), polishing the fluid in the drums 213 (by filtering),
drum switching or any combination thereof. When an engine
distributes fluid to the points of use 217, it dispenses the fluid
into either a global distribution loop that recirculates back to
the fluid distribution system or to a dead-headed dispense line.
Typically several semiconductor tools are teed into the global
distribution loop or dispense line and demand fluid from these
lines on a periodic or continuous basis. When fluid in the day tank
901 is polished, the engine 201, 203, 205 draws the fluid from the
day tank 901 in the day tank module 211 and dispenses the fluid
through a filter 811 and back into the day tank 901. The fluid is
recirculated through the filter for a predetermined period of time
(i.e. about 5-45 minutes). Similarly, the fluid in one of the drums
213 is polished when the engine 201, 203, 205 draws fluid from the
drum and dispenses the fluid through the filter 811 and back into
the drum. The fluid is recirculated through the filter and back to
the drum for a predetermined period of time (i.e. about 5-45
minutes). The engine 201, 203, 205 can also send a signal to the
controller 401 to effectuate drum switching. The engine 201, 203,
205 will send the signal when it detects that there is no fluid in
the on-line drum. The controller 401 then closes the valve (e.g.
301) in the source management module 209 connected to the on-line
drum and opens the valve (e.g. 303) connected to the off-line drum
so as to switch between the drums.
[0039] Another important feature of the fluid distribution system
according to the present invention is the configuration of the
various modules in order to reduce floor space as compared to known
fluid distribution systems. Embodiments of possible floor space
configurations are shown in FIG. 10. In embodiment 10(a), the
engines 201, 203 are positioned and accessible on one side of the
system while the main module is positioned on the other side of the
system. Notably, the main module 207 preferably has an electrical
compartment 207a for the electrical (i.e. solenoids), controls
(i.e. PLC, HMI, I/O boards, etc.) and pneumatics 215a, 215b
components wherein the compartment 207a is isolated from a fluids
compartment 207b having the deionized water 215c, city water 215d
and fluid dispense line 217 connections. The day tank module 211
may be positioned at the end. A second identically configured
system may also be positioned next to the first system. The supply
drums 213 may sit on a pallet next to each of the systems. In a
system having three engines 201, 203, 205 (see FIG. 10(b)) the
engines could be positioned next to each other with the day tank
211 on the end. In this configuration, the modules 201, 203, 205
and 211 would all be accessible on the same side. Thus, the back of
a second system having the identical configuration would be
positioned abutting the back of the first system as shown in FIG.
10(b). The drums 213 may be placed on a pallet near the engine 201.
Other configurations of the system are shown in FIGS.
10(c)-10(e).
[0040] The present invention as described above and shown in the
embodiments of FIGS. 2-10 provides a cost effective and reliable
solution to distributing semiconductor process fluids. It is
anticipated that other embodiments and variations of the present
invention will become readily apparent to the skilled artisan in
light of the foregoing description and examples, and it is intended
that such embodiments and variations likewise be included within
the scope of the invention as set forth in the following
claims.
* * * * *