U.S. patent application number 11/406569 was filed with the patent office on 2007-10-18 for transport system including vertical rollers.
This patent application is currently assigned to Aquest Systems Corporation. Invention is credited to Michael D. Brain, Barry Kitazumi, Mihir Parikh.
Application Number | 20070240970 11/406569 |
Document ID | / |
Family ID | 38577701 |
Filed Date | 2007-10-18 |
United States Patent
Application |
20070240970 |
Kind Code |
A1 |
Kitazumi; Barry ; et
al. |
October 18, 2007 |
TRANSPORT SYSTEM INCLUDING VERTICAL ROLLERS
Abstract
A transport system for conveying articles along conveyance paths
including straight, curvilinear, horizontal, inclined and declined
conveyance sections. The articles are conveyed between a pair of
vertical belts while being supported by protrusions extending from
the vertical belts. The vertical belts are guided using a
multiplicity of vertical rollers that are configurable into
straight, curvilinear and dynamically changing conveyance sections.
Multiple conveyance sections can be joined end to end to transport
articles over complex paths and over long distances. The articles
conveyed may include semiconductor wafers.
Inventors: |
Kitazumi; Barry; (Milpitas,
CA) ; Brain; Michael D.; (Monte Sereno, CA) ;
Parikh; Mihir; (Los Altos Hills, CA) |
Correspondence
Address: |
CARR & FERRELL LLP
2200 GENG ROAD
PALO ALTO
CA
94303
US
|
Assignee: |
Aquest Systems Corporation
|
Family ID: |
38577701 |
Appl. No.: |
11/406569 |
Filed: |
April 18, 2006 |
Current U.S.
Class: |
198/626.1 |
Current CPC
Class: |
Y10S 414/14 20130101;
B65G 15/14 20130101; H01L 21/67706 20130101; H01L 21/67715
20130101; B65G 17/123 20130101; B65G 2201/0297 20130101; H01L
21/6773 20130101 |
Class at
Publication: |
198/626.1 |
International
Class: |
B65G 15/00 20060101
B65G015/00 |
Claims
1-2. (canceled)
3. A system comprising: an article including a substrate used for
manufacturing a display device; a first belt and a second belt
disposed on either side of a conveyance path and configured to
convey the article along the conveyance path, the first belt and
the second belt separated by a distance configured for placement of
the article between the first belt and the second belt; a plurality
of approximately vertical rollers configured to guide the first
belt and the second belt; and a plurality of support protrusions
extending from the first belt and from the second belt, the
plurality of support protrusions configured to support a weight of
the article.
4. The system of claim 40 wherein the first belt and the second
belt are a first vertical belt and a second vertical belt
respectively, and are stiff along a vertical cross-sectional axis
and less stiff in a horizontal cross-sectional axis.
5. The system of claim 40, wherein the first belt and the second
belt include a compliant material configured to reduce vibration of
the article as the article is conveyed along the conveyance
path.
6. The system of claim 40, wherein the first belt and the second
belt include a compliant material configured to allow movement of a
member of the plurality of support protrusions responsive to the
weight of the article.
7. The system of claim 40, wherein the first belt and the second
belt are configured to move at different speeds.
8. The system of claim 40, wherein the plurality of vertical
rollers are disposed such that the conveyance path is
curvilinear.
9. The system of claim 40, wherein the plurality of vertical
rollers are disposed such that the conveyance path is declined or
inclined.
10-11. (canceled)
12. The system of claim 40, wherein the plurality of support
protrusions includes an essentially continuous support protrusion
along a length of the first belt or the second belt.
13. The system of claim 40, wherein the vertical rollers have
circular surfaces that rotate to provide motion in the conveyance
direction and the weight of the article is decoupled from the
circular surfaces of the vertical rollers.
14. The system of claim 40, wherein the first belt or the second
belt includes a part that extends above a bottom of the
article.
15. The system of claim 40, wherein the first belt is coupled to a
capture lip, the capture lip configured to restrict vertical
movement of the article.
16. The system of claim 40, further including a capture lip
positioned above the first belt, the capture lip configured to
restrict vertical movement of the article.
17. The system of claim 40, wherein the plurality of vertical
rollers are configured to move horizontally in order to change the
conveyance path of the article.
18. (canceled)
19. A system comprising: a first belt and a second belt disposed on
either side of a conveyance path and configured to convey an
article along the conveyance path, the first belt and the second
belt separated by a distance configured for placement of a Front
Opening Unified Pod (FOUP) between the first belt and the second
belt; a plurality of approximately vertical rollers configured to
guide the first belt and the second belt; a plurality of support
protrusions extending from the first belt and from the second belt,
the plurality of support protrusions configured to support a weight
of the article; and a three-point kinematic interface configured to
manipulate the article between the first belt and the second
belt.
20. A system comprising: a first belt and a second belt disposed on
either side of a conveyance path and configured to convey an
article along the conveyance path, the first belt and the second
belt separated by a distance configured for placement of a Front
Opening Unified Pod (FOUP) between the first belt and the second
belt; a plurality of approximately vertical rollers configured to
guide the first belt and the second belt; a plurality of support
protrusions extending from the first belt and from the second belt,
the plurality of support protrusions configured to support a weight
of the article; and a three-point kinematic interface configured to
unload the article from the first belt and the second belt, and
configured to locate the article between the first belt and the
second belt, the distance between the first belt and the second
belt being greater than the width of the article.
21-34. (canceled)
35. A method comprising: loading an article on a transport section,
the transport section including a first vertical belt and a second
vertical belt, the first vertical belt and the second vertical belt
separated by a distance configured for placement of a Front Opening
Unified Pod (FOUP) between the first vertical belt and the second
vertical belt; a plurality of vertical rollers configured to guide
the first vertical belt and the second vertical belt; conveying the
article along a conveyance path using the first vertical belt and
the second vertical belt; and unloading the article using a
three-point kinematic interface configured to locate the article
between the first vertical belt and the second vertical belt, the
distance between the first vertical belt and the second vertical
belt being greater than the width of the article.
36. (canceled)
37. A method comprising: loading an article on a transport section,
the transport section including a first vertical belt and a second
vertical belt, the first vertical belt and the second vertical belt
separated by a distance configured for placement of the article
between the first vertical belt and the second vertical belt; a
plurality of vertical rollers configured to guide the first
vertical belt and the second vertical belt; conveying the article
along a conveyance path using the first vertical belt and the
second vertical belt; and unloading the article, wherein the
article includes the FOUP, a semiconductor wafer, or a substrate
used for manufacturing a display device.
38-39. (canceled)
40. A system comprising: a first belt and a second belt disposed on
either side of a conveyance path and configured to convey an
article along the conveyance path, the first belt and the second
belt separated by a distance configured for placement of a Front
Opening Unified Pod (FOUP) between the first belt and the second
belt; a plurality of approximately vertical rollers configured to
guide the first belt and the second belt, wherein the FOUP has a
lateral freedom of movement of 110 millimeters or less between the
first belt and the second belt; and a plurality of support
protrusions extending from the first belt and from the second belt,
the plurality of support protrusions configured to support a weight
of the article.
41. The system of claim 40, wherein the first belt and the second
belt are each supported by more than two vertical rollers.
42. The system of claim 40, wherein a member of the plurality of
support protrusions includes an article supporting surface that is
disposed below a part of the first belt.
43. The system of claim 40, further including the article, the
article including a Front Opening Unified Pod (FOUP) and at least
one or more semiconductor wafer.
44. The system of claim 40, further including a three-point
kinematic interface configured to manipulate the article.
45. The system of claim 40, wherein the first belt is configured to
fit into a groove or notch within a member of the plurality of
vertical rollers.
46-47. (canceled)
48. A method comprising: loading an article on a transport section
using a three-point kinematic interface, the transport section
including a first vertical belt and a second vertical belt, the
first vertical belt and the second vertical belt separated by a
distance configured for placement of a Front Opening Unified Pod
(FOUP) between the first vertical belt and the second vertical
belt; a plurality of vertical rollers configured to guide the first
vertical belt and the second vertical belt; conveying the article
along a conveyance path using the first vertical belt and the
second vertical belt; and unloading the article.
49. A system comprising: means for loading an article on a
transport section, the transport section including a first vertical
belt and a second vertical belt, the first vertical belt and the
second vertical belt separated by a distance configured for
placement of the article between the first vertical belt and the
second vertical belt; a plurality of vertical rollers configured to
guide the first vertical belt and the second vertical belt; means
for conveying the article along a conveyance path using the first
vertical belt and the second vertical belt; and means for unloading
the article, wherein the article includes the FOUP, a semiconductor
wafer, or a substrate used for manufacturing a display device.
50. The system of claim 49, wherein the means for unloading the
article comprises a three-point kinematic interface.
51. The system of claim 3, wherein the first belt and the second
belt include a compliant material configured to allow movement of a
member of the plurality of support protrusions responsive to the
weight of the article.
52. The system of claim 3, wherein the first belt or the second
belt includes a part that extends above a bottom of the
article.
53. The system of claim 3, wherein the plurality of vertical
rollers are disposed such that the conveyance path is
curvilinear.
54. The system of claim 3, wherein the first belt is coupled to a
capture lip, the capture lip configured to restrict vertical
movement of the article.
55. (canceled)
56. A system comprising: a first belt and a second belt disposed on
either side of a conveyance path and configured to convey an
article along the conveyance path, the first belt and the second
belt separated by a distance configured for placement of a Front
Opening Unified Pod (FOUP) between the first belt and the second
belt, wherein the FOUP has a lateral freedom of movement of 110
millimeters or less between the first belt and the second belt; a
plurality of approximately vertical rollers configured to guide the
first belt and the second belt; and a plurality of support
protrusions extending from the first belt and from the second belt,
the plurality of support protrusions configured to support a weight
of the article, wherein a member of the plurality of support
protrusions includes an article supporting surface that is disposed
below a part of the first belt.
57. A system comprising: a first belt and a second belt disposed on
either side of a conveyance path and configured to convey an
article along the conveyance path, the first belt and the second
belt separated by a distance configured for placement of a Front
Opening Unified Pod (FOUP) between the first belt and the second
belt; a plurality of approximately vertical rollers configured to
guide the first belt and the second belt; a plurality of support
protrusions extending from the first belt and from the second belt,
the plurality of support protrusions configured to support a weight
of the article, wherein a member of the plurality of support
protrusions includes an article supporting surface that is disposed
below a part of the first belt; and a three-point kinematic
interface configured to unload the article from the first belt and
the second belt.
58-59. (canceled)
60. The system of claim 37, wherein the article includes a
semiconductor wafer.
61. The system of claim 37, wherein the article includes a
substrate used for manufacturing a display device.
62. The system of claim 37, wherein the article has a lateral
freedom of movement of 110 millimeters or less between the first
belt and the second belt.
63. The system of claim 37, wherein a member of the plurality of
support protrusions includes an article supporting surface that is
disposed below a part of the first belt.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The current invention relates to transport systems and
methods for conveying articles along a conveyance path, and in some
embodiments to conveying semiconductor wafers in a semiconductor
fabrication facility.
[0003] 2. Related Art
[0004] Transport systems are widely employed in industrial
manufacturing facilities to convey articles between work stations.
Originally, these systems were manual and workers moved articles by
hand or by cart. Modern factories have developed specialized
equipment to convey articles automatically. In particular,
semiconductor fabrication facilities currently use automated
transport systems to move semiconductor wafers during the
manufacturing process. Typically, a batch of wafers may be conveyed
together in a container known as a Front Opening Unified Pod
(FOUP). Semiconductor wafer manufacturers have sought to increase
manufacturing productivity by using transport systems that
efficiently convey wafers from machine to machine without exposing
the wafers to excessive contamination, vibration or to excessive
acceleration and deceleration forces.
[0005] Existing transport systems employ vehicle-based devices to
eliminate vibrations but the capacity of this system is limited by
the number of vehicles available. To resolve this, transporters are
used in which articles are, for example, directly conveyed across
the horizontal surface of a transport belt on rollers, or directly
on the rollers. One such transport system is shown in FIG. 1A. A
common feature of these existing systems is the difficulty of
vibrationally isolating the article being conveyed from the surface
across which the articles travel. If the surface across which the
articles travel is not flat, the articles experience vibration
during the conveyance. This source of vibration is a known problem
in the semiconductor wafer manufacturing industry. For example, as
shown in FIG. 1A, Horizontal Rollers 110 include Circular Surfaces
120 on which a Horizontal Belt 130 rests. Horizontal Belt 130 may
be characterized by a Length 140, a Long Cross-Sectional Axis 150,
and a Short Cross-Sectional Axis 160. The Long Cross-Sectional Axis
150 and a Short Cross-Sectional Axis 160 are perpendicular to the
length, and disposed in horizontal and vertical planes,
respectively. The weight of a FOUP 170 is transferred through the
Short Cross-Sectional Axis 160 of Horizontal Belt 130 onto Circular
Surfaces 120, as is shown in FIG. 1B. Because Horizontal Belt 130
is flexible in the Short Cross-Sectional Axis 160 in which the
weight of FOUP 170 is applied and is not continuously supported by
Horizontal Rollers 110, the level of Horizontal Belt 130 varies
between Horizontal Rollers 110. This unevenness limits the speed at
which FOUP 170 can be conveyed while staying within vibration
limits.
[0006] Another problem with existing transport systems used in the
semiconductor wafer manufacturing industry is the difficulty of
changing or turning the direction of conveyance of an article, such
as a FOUP, without momentarily stopping its motion.
[0007] There are, therefore, needs for improved systems and methods
for conveying articles in manufacturing facilities.
SUMMARY OF THE INVENTION
[0008] The present invention includes, in various embodiments, a
transport system for moving articles along a conveyance path that
includes straight, curvilinear, horizontal, inclined and/or
declined sections. The articles are conveyed between essentially
vertical rollers that have circular surfaces that rotate to provide
motion in a conveyance direction. Vertically-oriented belts are
optionally disposed between the vertical rollers and the articles.
In some embodiments, the vertical belts include a long
cross-sectional axis approximately parallel to the vertical plane
and a short cross-sectional axis approximately perpendicular to an
axis of rotation of the vertical rollers. The weight of the
articles transported is supported in a direction parallel to the
vertical axis. As such, the weight is directed approximately
parallel to a vertical rotational axis of the vertical rollers and
need not be supported by the circular surfaces of the vertical
rollers. This configuration allows the weight of the articles to be
decoupled from the uneven circular surfaces.
[0009] In those embodiments including vertical belts, the weight of
articles transported is optionally further supported through the
long cross-sectional axis of the vertical belts. For example, the
vertical belts are optionally stiffer through the weight bearing
long cross-sectional axis than they are through their short
cross-sectional axis. This results in less variation in the height
of the vertical belt between support points (e.g., rollers), as
compared to the height of a horizontal belt of the prior art.
Systems of the invention, therefore, typically included reduced
unevenness in the conveyance path relative to the prior art. In
various embodiments, this reduced unevenness allows articles, such
as FOUPs including semiconductor wafers, to be transported at
greater speeds than in the prior art while still staying within
vibration limits.
[0010] In various embodiments, articles are supported between first
and second vertical belts by one or more support protrusions
extending from the first vertical belt and second vertical belt.
The weight of the articles is transferred through the support
protrusions to the vertical belt. In various embodiments, the
support protrusions, vertical belts, and vertical rollers are
configured to selectively engage and disengage the articles. In
some embodiments, the support protrusions are specifically
configured to support FOUPs used to transport semiconductor wafers
within semiconductor fabrication facilities.
[0011] A transport system optionally includes several transport
sections each including separate vertical belts and/or separate
sets of vertical rollers. Within an individual transport section,
the vertical rollers are optionally configured in a curvilinear
path, allowing an article to remain in motion as it is conveyed
along a curved conveyance path. Further, within an individual
transport section, the vertical rollers are optionally configured
in an inclined or declined path, allowing the height of the article
to be changed. In embodiments not including vertical belts,
articles are typically transported by direct contact with vertical
rollers.
[0012] Various embodiments of the invention include a system
comprising a first belt and a second belt disposed on either side
of a conveyance path and configured to convey an article along the
conveyance path, a plurality of vertical rollers configured to
guide the first belt and the second belt, and a plurality of
support protrusions extending from the first belt and from the
second belt, the plurality of support protrusions configured to
support a weight of the article.
[0013] Various embodiments of the invention include a transport
belt comprising a first surface configured to be coupled to a
vertical roller, the vertical roller being configured to drive the
transport belt in a conveyance path, a support protrusion
configured to support the weight of an article being conveyed along
the conveyance path by the transport belt, and a compliant material
configured to allow the support protrusion to move in response to
forces from the article, and thus allow the transport belt to
operate as a shock absorber.
[0014] Various embodiments of the invention include a method
comprising loading an article on a conveyance section, the
conveyance section including a first belt and a second belt and a
plurality of vertical rollers configured to guide the first
vertical belt and the second vertical belt, conveying the article
along a conveyance path using the first vertical belt and the
second vertical belt, and unloading the article.
BRIEF DESCRIPTION OF THE DRAWINGS
[0015] For a more complete understanding of the present invention
and for further features and advantages, reference is made to the
following description taken in conjunction with the accompanying
drawings, in which:
[0016] FIG. 1A is a perspective view of a prior art transport
system;
[0017] FIG. 1B is a portion of FIG. 1A, enlarged for magnification
purposes;
[0018] FIG. 2A illustrates a transport section including a vertical
belt, according to various embodiments of the invention;
[0019] FIG. 2B is a portion of FIG. 2A, enlarged for magnification
purposes;
[0020] FIG. 2C illustrates the orientation of a vertical belt with
respect to horizontal and vertical axes;
[0021] FIG. 3 illustrates a top view of the transport section of
FIG. 2A, according to various embodiments of the invention;
[0022] FIGS. 4A, 4B, 4C and 4D illustrate cross-sectional views of
a vertical belt and a vertical roller, according to various
alternative embodiments of the invention;
[0023] FIG. 5 illustrates an embodiment of a transport system
including a transport section configured to form a curvilinear
conveyance path, according to various embodiments of the
invention;
[0024] FIGS. 6A and 6B illustrate embodiments of a transport system
in two different dynamically interchangeable states, according to
various embodiments of the invention;
[0025] FIGS. 7A, 7B, 7C and 7D illustrate cross-sectional views of
a vertical belt in different dynamically interchangeable states,
according to various embodiments of the invention;
[0026] FIGS. 8A and 8B illustrate transport sections in which a
first vertical belt and second vertical belt are moved apart in
order to load or unload an article, according to various
embodiments of the invention;
[0027] FIG. 9 illustrates methods of conveying articles, according
to various embodiments of the invention; and
[0028] FIG. 10 illustrates methods of dynamically changing a
conveyance path, according to various embodiments of the
invention.
DETAILED DESCRIPTION OF THE INVENTION
[0029] Various embodiments of the invention include improved
systems and methods for automatically transporting articles such as
FOUPs. For example, some embodiments include the use of vertical
rollers to propel articles in a conveyance direction. In comparison
with the prior art, the use of vertical rollers allows for more
even support of articles and, thus, improved vibration management.
In various embodiments, the use of vertical rollers allows the
transport of articles along straight, inclined, declined,
curvilinear (e.g., curved), and/or dynamically changing conveyance
paths.
[0030] Vertical belts (transport belts) are optionally disposed
between the vertical rollers and articles to be transported. In
some embodiments, the vertical belts are configured to support the
weight of the articles through a long vertical cross-sectional
axis, as opposed to a short cross-sectional axis as in the prior
art. By supporting the weight through the long cross-sectional
axis, a more rigid, and thus more even, support can be provided as
compared to systems in which support is provided through the short
cross-sectional axis. In some embodiments, this more even support
is used to transport articles at greater speeds than with prior art
systems, while staying within vibration limits. In some
embodiments, the vertical belts include a compliant material
configured to reduce vibration of articles during transport.
[0031] In various embodiments, articles are supported by
protrusions extending approximately horizontally from the vertical
belts. In these embodiments, the weight of articles is transferred
from the support protrusions through a long cross-sectional axis of
a vertical belt. The support protrusions are optionally configured
for supporting specific types of articles. For example, some
embodiments include support protrusions configured for supporting a
FOUP. The size and spacing of the support protrusions is optionally
configured such that more than one protrusion from each vertical
belt provides support to an article. In some instances, the support
protrusions include a low friction material such as Teflon.TM. that
will allow an article to move slightly on the support protrusions.
In some embodiments, the support protrusions include a high
friction material that reduces slippage during high acceleration
and/or deceleration.
[0032] In various embodiments, the vertical belts include a
compliant material configured to flex, deform, bend or otherwise
change shape when an article is placed on the support protrusions.
This compliant material may have shock absorbing properties and may
act to reduce the effects of irregularity of the surfaces of the
article being conveyed. For example, in some embodiments the
compliant materials are configured to allow a support protrusion to
move vertically when supporting the weight of a FOUP.
[0033] In various embodiments, the vertical belts are supported by
a low friction sliding surface, an array of finely spaced
horizontal rollers, a support lip of a vertical roller, or the
like. In some embodiments, the vertical belts are configured to fit
partially within a v-groove or notch within a vertical roller and
are supported by surfaces within this v-groove or notch.
[0034] Some embodiments include a retaining lip configured to
restrain movement of articles relative to the transport system.
This retaining lip may be part of a support protrusion, be a
separate protrusion coupled to a vertical belt, or be attached to a
stationary supporting structure. The retaining lip is optionally
configured to restrain a FOUP and, thus, prevent tipping during
acceleration and deceleration.
[0035] Conveyance paths determined by the location of vertical
rollers and/or vertical belts may be straight, curvilinear,
inclined, declined, and/or dynamically variable. For example, in
some embodiments, vertical rollers are coupled to movable mounts
and are configured to move between various different positions in
order to change a conveyance path. In some embodiments, vertical
rollers are configured to move while conveying articles.
[0036] FIG. 2A illustrates a Transport Section generally designated
240 and including a First Vertical Belt 210, a Second Vertical Belt
220, and optional Support Protrusions 230. Transport Section 240 is
configured to convey an article such as FOUP 170 and may be
configured with multiple instances of separate Transport Sections
240. First Vertical Belt 210 and Second Vertical Belt 220 are
optional in some embodiments.
[0037] First Vertical Belt 210 and Second Vertical Belt 220
optionally include a material that is stiff along a Vertical Axis
260 and less stiff in a Horizontal Axis 270. Vertical Axis 260 is
parallel to a long cross-sectional axis of First Vertical Belt 210
and Horizontal Axis 270 is parallel to a short cross-sectional axis
of First Vertical Belt 210. The long cross-sectional axis and short
cross-sectional axis are perpendicular to a length of First
Vertical Belt 210, which is, in turn, parallel to a Conveyance
Direction 280. In typical embodiments, the weight of FOUP 170 is
supported in the direction of Vertical Axis 260 and, thus, through
the stiffer long cross-sectional axis of First Vertical Belt
210.
[0038] First Vertical Belt 210 and Second Vertical Belt 220 are
each driven separately or jointly in the Conveyance Direction 280
by a plurality of Vertical Rollers 290A and a plurality of Vertical
Rollers 290B, respectively. Vertical Rollers 290A are spaced apart
from Vertical Rollers 290B such that FOUP 170 may be supported
between that First Vertical Belt 210 and Second Vertical Belt 220.
The paths along which Vertical Rollers 290A and Vertical Rollers
290B are disposed define a conveyance path through which FOUP 170
will travel. Through selective placement of Vertical Rollers 290A
and Vertical Rollers 290B, straight or curvilinear conveyance paths
may be defined. Using a variety of transport sections, such as a
multiplicity of Transport Section 240, a FOUP 170 can be
transported along a complex variety of conveyance paths. Typically,
at each end of a transport section, First Vertical Belt 210 and
Second Vertical Belt 220 wrap around an instance of Vertical
Rollers 290A and Vertical Rollers 290B, respectively. This is
possible because First Vertical Belt 210 and Second Vertical Belt
220 are flexible in Horizontal Axis 270.
[0039] In typical embodiments, one or more Support Protrusions 230
are attached to each of First Vertical Belt 210 and to Second
Vertical Belt 220. Support Protrusions 230 extend from First
Vertical Belt 210 and from Second Vertical Belt 220, and are
optionally configured such that the weight of conveyed articles is
supported through the long cross-sectional axes of First Vertical
Belt 210 and Second Vertical Belt 220. FIG. 2B is a portion of FIG.
2A, enlarged to show further detail of FOUP 170, Second Vertical
Belt 220, Support Protrusions 230 and one of Vertical Rollers 290B.
As First Vertical Belt 210 and Second Vertical Belt 220 are driven
(moved) by Vertical Rollers 290A and Vertical Rollers 290B,
articles resting on Support Protrusions 230 are carried along
Transport Section 240 in Conveyance Direction 280.
[0040] FIG. 2C illustrates, in further detail, the relationship
between First Vertical Belt 210 and Vertical Axis 260, Horizontal
Axis 270, and Conveyance Direction 280.
[0041] FIG. 3 illustrates a top view of Transport Section 240. This
view illustrates how FOUP 170, illustrated by Outline 310, is
laterally confined (in Horizontal Axis 270) by First Vertical Belt
210 and Second Vertical Belt 220, and Vertical Rollers 290A and
Vertical Rollers 290B. In various embodiments, Vertical Surfaces
320 of First Vertical Belt 210 and Second Vertical Belt 220 are
separated by a Distance 330 equal to or less than 390, 415, or 500
millimeter (mm). Thus, an instance of FOUP 170 that is, for
example, 390 mm wide has less than zero, 25, or 110 mm of lateral
freedom of movement, or greater than zero, 25, or 110 mm of lateral
freedom of movement. Some embodiments of the invention include a
three-point kinematic interface (not shown) configured for locating
a FOUP within this freedom of movement when the FOUP is unloaded
from Transport Section 240.
[0042] FIG. 3 also illustrates how FOUP 170, illustrated by Outline
310, rests on Support Protrusions 230. In various embodiments,
Support Protrusions 230 extend a Distance 340 equal to or less than
10, 50, or 100 mm from Vertical Surfaces 320. In various
embodiments, Support Protrusions 230 extend under FOUP 170 by
distances equal to or greater than 10, 50, or 100 mm.
[0043] Support Protrusions 230 attached to First Vertical Belt 210
may be separated from each other by a variety of distances. For
example, in instances of Transport Section 240 configured to
transport FOUP 170 along a straight conveyance path, Support
Protrusions 230 may be further apart than in an instance of
Transport Section 240 configured to transport FOUP 170 in a
curvilinear conveyance path. In various embodiments, instances of
Support Protrusions 230 attached to First Vertical Belt 210 are
disposed equal to or less than 10, 30, or 100 mm from each other.
In one embodiment, Support Protrusions 230 are in contact with each
other. In this embodiment, Support Protrusions 230 form an
essentially continuous support.
[0044] FIGS. 4A, 4B, 4C and 4D illustrate cross-sectional views of
alternative embodiments of First Vertical Belt 210, Support
Protrusions 230 and Vertical Rollers 290A. It will be appreciated
from the embodiments illustrated herein that many variations from
the illustrated embodiments of First Vertical Belt 210, Support
Protrusion 230 and Vertical Rollers 290A-290B are within the scope
of this disclosure. In addition, Second Vertical Belt 220 and
Vertical Rollers 290B are optionally configured identically to
First Vertical Belt 210 and Vertical Rollers 290A.
[0045] FIG. 4A illustrates an instance of Vertical Rollers 290A
including a Circular Surface 410 and a Support Surface 420. This
instance of Vertical Rollers 290A is configured to rotate around a
Vertical Rotation Axis 430 and to support First Vertical Belt 210
on Support Surface 420. Support Surface 420 is optionally tapered
downward or upward toward an Outside Edge 440 of Vertical Rollers
290A, and optionally comprised of a low friction material such as
Teflon.TM.. Support Surface 420 carries the weight of First
Vertical Belt 410 and, through Support Protrusions 230, the weight
of FOUP 170. Vertical Rollers 290A may be configured to support
First Vertical Belt 210 on two sides, as illustrated in FIG. 4A, or
on a single side. For example, if different instances of Vertical
Rollers 290A are used to support First Vertical Belt 210 as it
returns in its looping path, then only one side of an instance of
Vertical Rollers 290A may be used to support First Vertical Belt
210.
[0046] In typical embodiments, Support Protrusions 230 are
configured for a FOUP 170 to rest on a Support Surface 450. Support
Surface 450 is optionally curved in directions perpendicular and/or
parallel to Vertical Surfaces 320. Support Surface 450 optionally
includes a low friction coating (not shown). In some embodiments,
Support Surface 450 is disposed a Distance 460 below an Upper Edge
465 of First Vertical Belt 210. As such, part of an article
transported may be below part of First Vertical Belt 210. In
various embodiments, Distance 460 is equal to or greater than zero,
10, 20, or 50 mm.
[0047] FIG. 4B illustrates a cross-sectional view of alternative
embodiments of First Vertical Belt 210 and a member of Vertical
Rollers 290A. In these embodiments, Vertical Rollers 290A include a
notch or groove, such as a V-Groove 470, configured to receive a
Part 475 of First Vertical Belt 210. V-Groove 470 includes a
combined Circular/Support Surface 480 configured to support First
Vertical Belt 210. In these embodiments, Support Surface 420 may
not be required.
[0048] FIG. 4C illustrates a cross-sectional view of an alternative
embodiment of First Vertical Belt 210 and Vertical Rollers 290A.
These embodiments include an optional Capture Lip 485 and a Support
490. Typically, Capture Lip 485 is optionally included in other
embodiments, such as those illustrated by FIGS. 4A and 4B. Capture
Lip 485 is attached to First Vertical Belt 210 and is configured to
restrict the vertical movement of FOUP 170. Capture Lip 485 is
optionally connected to Support Protrusions 230. In alternative
embodiments, Capture Lip 485 is attached to a separate, optionally
stationary, support (not shown).
[0049] Support 490 is configured to support the weight of FOUP 170
through First Vertical Belt 210. In some embodiments, Support 490
includes a stationary low friction surface on which First Vertical
Belt 210 is configured to slide. In some embodiments, Support 490
includes rolling elements such as ball bearings, or horizontally
disposed rollers (not shown). These horizontally disposed rollers
are optionally smaller and more closely spaced than Vertical
Rollers 290A.
[0050] FIG. 4D illustrates a cross-sectional view of a Belt 415 and
a member of Vertical Roller 290A. Belt 415 is an alternative
embodiment of Vertical Belt 210. In these embodiments, Belt 415 has
a rounded (e.g., circular or elliptical) cross-section and Vertical
Rollers 290A includes a Groove 425 configured to receive Belt 415.
Because Belt 415 is round, long and short cross-sectional axes are
not apparent. However, when Belt 415 is placed on Vertical Rollers
290A, Belt 415 still has vertical and horizontal axes that can be
defined relative to the vertical and horizontal planes of the
cross-section.
[0051] Belt 415, as well as First Vertical Belt 210 and Second
Vertical Belts 220, optionally include a compliant material
configured to reduce vibrations of an article being transported. In
various embodiments, this compliant material can include urethane
with a durometer hardness ranging between 25A and 75D, silicone,
PVC (polyvinyl chloride), rubber or the like. The compliant
material reduces vibration by, for example, allowing vertical
movement of an Edge 435 of Support Protrusions 230 distal to Belt
415. This movement may occur when an article is loaded or unloaded
from Belt 415, when the force (e.g., weight) of an article on
Support Surface 450 changes, or when Belt 415 is disposed in a
curvilinear, inclined or declined path. For example, if there is
unevenness in the height of Belt 415 the force of an article on
Support Surface 450 may change as an article is transported. In
this instance, movement of Edge 435 or Surface 450 absorbs some of
this change in force and Belt 415 acts as a shock absorber.
[0052] First Vertical Belt 210 and Second Vertical Belt 220 are
optionally configured to reduce vibrations in a manner similar to
that of Belt 415. For example, referring to FIG. 4A, First Vertical
Belt 210 may include a compliant material that is configured to
allow Upper Edge 465 to move away from First Vertical Rollers 290A
when a FOUP 170 is loaded onto First Vertical Belt 210. This
movement results in a movement of Support Surface 450. As FOUP 170
is transported, forces that may cause vibration may be absorbed by
First Vertical Belt 210. The freedom of movement available to Upper
edge 465 allows First Vertical Belt 210 to act as a shock
absorber.
[0053] FIG. 5 illustrates an embodiment of Transport System 500
including a Transport Section 510 configured to form a curvilinear
conveyance path. Transport Section 510 is optionally an embodiment
of Transport Section 240. In various embodiments, an inner Vertical
Surface 320 of First Vertical Belt 210 of Transport Section 510 is
disposed in a Radius of Curvature 520 equal to, or less than, 2.0,
1.5 or 1.0 meters. In some embodiments, Transport Section 510 is
banked. This may allow tighter radii of curvature. Within Transport
Section 510, First Vertical Belt 210 is typically configured to run
at a different speed than Second Vertical Belt 220. For example, in
one embodiment, First Vertical Belt 210 is configured to move at a
slower linear velocity than Second Vertical Belt 220. Thus,
Transport Section 510 may include belts and rollers that run at
different speeds while transporting FOUP 170.
[0054] Using Transport Section 510, FOUP 170 can be turned without
slowing or without momentarily stopping. Thus, the direction of
motion of FOUP 170 can be changed without slowing or without
stopping. Further, more than one instance of FOUP 170 can be turned
by Transport Section 510 at the same time. By arranging several
Transport Section 510 and Transport Section 240 together, a complex
variety of curvilinear and straight conveyance paths can be
configured. In some embodiments, Transport Section 510 and/or
Transport Section 240 are configured to change the elevation of
FOUP 170 above the ground as FOUP 170 moves along a conveyance
path.
[0055] FIGS. 6A and 6B illustrate embodiments of Transport System
500 in two different dynamically interchangeable states. These
embodiments include a Dynamic Transport Section 610 configured to
change shape and, thus, convey FOUP 170 along alternative
conveyance paths. FIG. 6A illustrates a first state in which
Dynamic Transport Section 610 is disposed to convey FOUP 170 along
a linear conveyance path from a first instance of Transport Section
240 to a second instance of Transport Section 240. FIG. 6B
illustrates a second state in which Dynamic Transport Section 610
is disposed to convey FOUP 170 along a curvilinear conveyance path
from the first instance of Transport Section 240 to a third
instance of Transport Section 240. The transition between the first
state and the second state may be performed automatically and is
optionally performed while Dynamic Transport Section 610 is being
used to transport FOUP 170. Thus, the change in state can be
performed without stopping the transport of FOUP 170.
[0056] As shown in FIGS. 6A and 6B, the length of Dynamic Transport
Section 610 can be different in the first state and the second
state. Dynamic Transport Section 610 optionally includes one or
more Tension Rollers 620 configured to maintain tension of First
Vertical Belt 210 and Second Vertical Belt 220 as Dynamic Transport
Section 610 changes length from the first state to the second
state. Tension Rollers 620 are typically an embodiment of Vertical
Rollers 290A. The change in shape of Dynamic Transport Section 610
shown in FIGS. 6A and 6B is possible, in part, because the required
motion is in the Horizontal Axis 270 where First Vertical Belt 660
and Second Vertical Belt 670 are less stiff.
[0057] The change of Dynamic Transport Section 610 from the first
state to the second state optionally includes concerted motion of
Tension Rollers 620 and various instances of vertical rollers. For
example, the state change may include the movement in the
horizontal plane of Vertical Rollers 290C and 290D. If the movement
occurs during transport of FOUP 170, the spacing between Vertical
Rollers 290C and 290C may be appropriately maintained during
movement. Likewise, the spacing between Vertical Rollers 290E and
290F may be appropriately maintained as they are moved to new
positions. In order to create the curvilinear path illustrated in
FIG. 6B, Vertical Rollers 290E and 290F are move a greater distance
than Vertical Rollers 290C and 290D from their original position in
FIG. 6A. Typically, movement of Vertical Rollers 290A-290F are
managed by a computer controlled translation system (not shown).
Vertical Rollers 290A-290F are embodiments of Vertical Rollers 290A
and 290B.
[0058] While FIGS. 6A and 6B illustrate the conveyance of instances
of FOUP 170 from right to left, alternative embodiments may be
configured for conveyance from left to right. Thus, Dynamic
Transport Section 610 may be used to direct FOUP 170 to a selected
member of a plurality of alternative destinations, or to receive
FOUP 170 from a selected member of a plurality of alternative
sources.
[0059] In some embodiments, Dynamic Transport Section 610 is
configured to reorder the instances of FOUP 170 within Transport
System 500. For example, Dynamic Transport Section 610 may be used
to shift a front first FOUP 170 from a primary conveyance path to a
secondary conveyance path that allows the first FOUP 170 to be
passed by a second FOUP 170. The first FOUP 170 is then returned to
the primary conveyance path using a second instance of Dynamic
Transport Section 610 behind the second FOUP 170. This exchange of
position can be performed while continuously moving both the first
FOUP 170 and the second FOUP 170.
[0060] Transport Section 240 and Dynamic Conveyance Section 610
optionally include mechanisms configured to facilitate loading or
unloading of FOUP 170. These mechanisms include, for example, a
region in which Capture Lip 485 is absent, a region in which
Capture Lip 485 is moved, a region in which First Vertical Belt 210
is bent or tilted, or a region in which First Vertical Belt 210
and/or Second Vertical Belt 220 are moved apart.
[0061] FIGS. 7A and 7B illustrate embodiments in which First
Vertical Belt 210 is bent in Vertical Axis 260 in order to
facilitate loading and/or unloading of FOUP 170. FIG. 7A
illustrates First Vertical Belt 210 in a loading/unloading
position. In this position, an Upper End 725 of First Vertical Belt
210 is bent toward Vertical Rotational Axis 430 of a Vertical
Roller 710. Vertical Roller 710 is an embodiment of Vertical Roller
290A or 290B and is optionally convexly shaped in order to promote
the bending of First Vertical Belt 210. When First Vertical Belt
210 is bent as illustrated in FIG. 7A, FOUP 170 is separated from a
Capture Element 730.
[0062] Capture Element 730 is configured to apply pressure against
a side of FOUP 170 in order to hold FOUP 170 securely between First
Vertical Belt 210 and Second Vertical Belt 220. Capture Element 730
is typically a compliant material such as urethane. When Capture
Element 730 is separated from FOUP 170, FOUP 170 can be loaded or
unloaded from Transport System 500.
[0063] FIG. 7B illustrates First Vertical Belt 210 in a transport
position. In this position, First Vertical Belt 210 is held
straight by a Vertical Roller 720 and Capture Element 730 is
applied to an edge of FOUP 170. Vertical Roller 710 and Vertical
Roller 720 are optionally included in the same instance of
Transport Section 240. Thus, First Vertical Belt 210 may be bent at
some points within Transport Section 240 and be held straight at
other points within Transport Section 240. Those points at which
First Vertical Belt 210 is bent may be used for loading or
unloading, while FOUP 170 is held securely between First Vertical
Belt 210 and Second Vertical Belt 220 at those points at which
First Vertical Belt 210 (and Second Vertical Belt 220) are held
straight.
[0064] FIGS. 7C and 7D illustrate embodiments in which Vertical
Rollers 290A and 290B are tilted in Vertical Axis 260 in order to
facilitate loading and unloading of FOUP 170. FIG. 7C illustrates
First Vertical Belt 210 and Vertical Roller 290A in a transport
position, while FIG. 7D illustrates First Vertical Belt 210 and
Vertical Roller 290A in a load/unload position. In the load/unload
position, Vertical Roller 290A and Vertical Rotational Axis 430 is
tilted relative to Horizontal Axis 270. This tilting shifts Capture
Element 730 away from FOUP 170 and allows loading or unloading of
FOUP 170. Tilting of Vertical Roller 290A or 290B is controlled by
a mechanical or electromechanical Tilt Control Element 740.
Typically, both Vertical Rollers 290A and Vertical Rollers 290B are
tilted as illustrate in FIG. 7D in order to load or unload FOUP
170. These tilts are optionally in opposing directions.
[0065] While those embodiments illustrated by FIGS. 7A-7D include
the use of Capture Element 730, in alternative embodiments, Capture
Element 730 is replaced by Capture Lip 485. As with Capture Element
730, Capture Lip 485 is configured to limit movement of FOUP 170,
e.g., preventing FOUP 170 from inadvertently disengaging from
Transport Section 240. However, Capture Lip 485 is configured to
limit primarily vertical movement and need not make physical
contact with FOUP 170 during normal transport.
[0066] FIGS. 8A and 8B illustrate embodiments of Transport Sections
240 and 850 in which First Vertical Belt 210 and Second Vertical
Belt 220 are moved apart in order to load or unload FOUP 170. FIG.
8A illustrates Transport Sections 240 and 850 in a normal transport
mode used for conveying FOUP 170. In this mode, First Vertical Belt
210 and Second Vertical Belt 220 of Transport Section 850 are
approximately a uniform Distance 810 from each other.
[0067] FIG. 8B illustrates Transport Sections 240 and 850 in a
load/unload mode in which Vertical Rollers 830A and Vertical
Rollers 830B and, thus, First Vertical Belt 210 and Second Vertical
Belt 220 have been moved apart in Transport Section 850. Vertical
Rollers 830A and 830B are embodiments of Vertical Rollers 290A and
290B, respectively. In the load/unload mode all or part of those
instances of First Vertical Belt 210 and Second Vertical Belt 220
are a Distance 820 from each other. Distance 820 is typically
greater than Distance 810. Distance 820 is sufficient to disengage
Capture Element 730 from FOUP 170 or to allow FOUP 170 to clear
Capture Lip 485. However, Distance 820 is optionally not so large
that FOUP 170 is no longer supported by Support Protrusions 230. In
various embodiments, Vertical Rollers 830A and 830B are disposed
toward one end of Transport Section 850 or disposed elsewhere
within Transport Section 850. Vertical Rollers 830A and 830B are
moved from the positions shown in FIG. 8A to the positions shown in
FIG. 8B by a mechanical or electromechanical control element.
[0068] FIG. 9 illustrates methods of conveying articles, according
to various embodiments. In these methods, an article is loaded onto
a transport system such as those describe elsewhere herein,
transported and unloaded. In a Load Article Step 910, articles to
be conveyed are placed on a transport section such as Transport
Sections 240 or 850. The articles are optionally placed at a
section of Transport Section 240 specifically configured for
loading and unloading articles. For example, a FOUP 170 including
semiconductor wafers may be loaded at a loading point discussed in
relation to FIG. 7A-7D, 8A or 8B. The transport section on which
articles are placed includes Vertical Rollers 290A and 290B, and
optionally First Vertical Belt 210 and Second Vertical Belt 220.
The weight of the placed article is not necessarily supported by
Circular Surface 410, or Vertical Rollers 290A or 290B. The weight
of the placed article is, therefore, optionally decoupled from
Vertical Rollers 290A and 290B.
[0069] In a Transport Article Step 920, the article loaded in Load
Article Step 910 is conveyed in a conveyance direction using
Vertical Rollers 290A and 290B. This conveyance is optionally
performed at a greater speed and/or a lower vibration rate than is
possible in systems of the prior art. Transport Article Step 920
optionally includes directing the article along a curvilinear path
such as that illustrated in FIG. 5. The curvilinear path is
optionally traversed without slowing or without momentarily
stopping the article.
[0070] In an Unload Article Step 930, the article is removed from
the transport system. This removal optionally occurs at a location
configured for loading and/or unloading of the article, as
discussed elsewhere herein. Load Article Step 910 and/or Unload
Article Step 930 optionally include changing the shape of First
Vertical Belt 210 as illustrated in FIGS. 7A and 7B, tilting
Vertical Rollers 290A or 290B as illustrated in FIGS. 7C and 7D, or
moving Vertical Rollers 290A and 290B apart as illustrated in FIGS.
8A and 8B.
[0071] FIG. 10 illustrates methods of dynamically changing a
conveyance path, according to various embodiments of the invention.
The methods illustrated in FIG. 10 are optionally performed using
the systems illustrated in FIGS. 6A and 6B during Transport Article
Step 920 (FIG. 9).
[0072] In a Transport Article Step 1010, an article, such as FOUP
170, is transported as in Transport Article Step 920. In an Adjust
Conveyance Path Step 1020, a conveyance path for the article is
changed by moving Vertical Rollers 290A or 290B. This movement may
be in the horizontal or vertical plane. In some embodiments, a
Tension Roller 620 is used to adjust tension of a vertical belt
coupled to Vertical Rollers 290A or 290B. The tension adjustment
may be made before, during or after moving Vertical Rollers 290A or
290B. In some embodiments, the movement of Vertical Rollers 290A or
290B is performed while these rollers are conveying a FOUP. In a
Transport Article Step 1030, the article is again conveyed, as in
Transport Article Step 920 or Transport Article Step 1010.
[0073] Several embodiments are specifically illustrated and/or
described herein. However, it will be appreciated that
modifications and variations are covered by the above teachings and
within the scope of the appended claims without departing from the
spirit and intended scope thereof. For example, while the
transportation of FOUPs in semiconductor manufacturing have been
used herein as an illustrative example, systems and methods of the
invention may be configured for transporting alternative materials,
such as for example, substrates for the manufacture of liquid
crystal, organic light emitting diode or other types of display
devices. Further, the vertical rollers and vertical belts discussed
herein need not be perfectly vertical. The spacing of vertical
rollers as illustrated herein is for illustrative purposes only. In
various embodiments, vertical rollers may be disposed in a wide
variety of spacings, from closely packed to widely dispersed
including a single roller or rollers located only at each end of a
belt.
[0074] The embodiments discussed herein are illustrative of the
present invention. As these embodiments of the present invention
are described with reference to illustrations, various
modifications or adaptations of the methods and or specific
structures described may become apparent to those skilled in the
art. All such modifications, adaptations, or variations that rely
upon the teachings of the present invention, and through which
these teachings have advanced the art, are considered to be within
the spirit and scope of the present invention. Hence, these
descriptions and drawings should not be considered in a limiting
sense, as it is understood that the present invention is in no way
limited to only the embodiments illustrated.
* * * * *