U.S. patent application number 11/734492 was filed with the patent office on 2007-08-09 for docking station for a factory interface.
Invention is credited to Sungmin Cho, Peter Reimer, Vincent Seidl.
Application Number | 20070183869 11/734492 |
Document ID | / |
Family ID | 30115164 |
Filed Date | 2007-08-09 |
United States Patent
Application |
20070183869 |
Kind Code |
A1 |
Cho; Sungmin ; et
al. |
August 9, 2007 |
DOCKING STATION FOR A FACTORY INTERFACE
Abstract
An apparatus for docking a substrate storage pod to a factory
interface is provided. In one embodiment, an apparatus for docking
a substrate storage pod to a factory interface includes a docking
station having a substantially horizontal flange extending from a
substantially vertical wall. The wall has an aperture formed
therethrough. A stage is movably coupled to the flange and adapted
to support the substrate storage pod. An engagement mechanism and
docking actuator are coupled to the stage. The engagement mechanism
is adapted to secure the substrate storage pod to the stage. The
docking actuator is adapted to move substrate storage cassette
against the bay. A release mechanism is adapted to decouple at
least one of the engagement mechanism from the pod or the stage
from the docking actuator, thereby facilitating access to the pod
in the event of one or more of the actuators becoming
immobilized.
Inventors: |
Cho; Sungmin; (Menlo Park,
CA) ; Reimer; Peter; (Los Altos, CA) ; Seidl;
Vincent; (Austin, TX) |
Correspondence
Address: |
Patent Counsel;APPLIED MATERIALS, INC.
P.O. Box 450-A
Santa Clara
CA
95052
US
|
Family ID: |
30115164 |
Appl. No.: |
11/734492 |
Filed: |
April 12, 2007 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
10198688 |
Jul 17, 2002 |
7204669 |
|
|
11734492 |
Apr 12, 2007 |
|
|
|
Current U.S.
Class: |
414/217 |
Current CPC
Class: |
H01L 21/67265 20130101;
H01L 21/67379 20130101; H01L 21/67775 20130101; H01L 21/67259
20130101; H01L 21/67772 20130101; H01L 21/682 20130101 |
Class at
Publication: |
414/217 |
International
Class: |
H01L 21/677 20060101
H01L021/677 |
Claims
1. An apparatus for docking a substrate storage pod to a factory
interface, comprising: a docking station having a substantially
horizontal flange extending from a substantially vertical wall
having an aperture formed therethrough; a stage movably coupled to
the flange and adapted to support the substrate storage pod; an
engagement mechanism adapted to secure the substrate storage pod to
the stage; a docking actuator coupled to the stage and adapted to
move substrate storage pod against the bay; and a release mechanism
adapted to decouple at least one of the engagement mechanism from
the pod or the stage from the docking actuator.
2. The apparatus of claim 1, wherein the release mechanism further
comprises at least one quick-disassembly device selected from the
group consisting of quick pins, lynch pins, clevis pins, dowel
pins, quarter-turn fasteners, quick release fasteners, clamps,
latches and locks.
3. The apparatus of claim 1, wherein the release mechanism further
comprises at least one quick-disassembly device selected from the
group consisting of an electromechanical device or a pneumatic
device.
4. The apparatus of claim 1 further comprising: a bracket coupled
to the stage and having the release mechanism coupled thereto, the
release mechanism adapted to secure one end of the docking actuator
to the bracket.
5. The apparatus of claim 4, wherein the docking actuator is a ball
screw that drives a nut along its length.
6. The apparatus of claim 5, wherein the nut is selectively clamped
to the bracket by the release mechanism.
7. The apparatus of claim 6, wherein the release mechanism is a
clamp.
8. The apparatus of claim 1, wherein the stage is pivotally coupled
to the flange.
9. An apparatus for docking a substrate storage pod to a factory
interface, comprising: a docking station having a substantially
horizontal flange extending from a substantially vertical wall
having an aperture formed therethrough; a stage pivotally coupled
to the flange and adapted to support the substrate storage pod; and
a docking actuator coupled to the stage and rotate the stage.
10. The apparatus of claim 9 further comprising: a release
mechanism adapted to decouple the stage from the docking
actuator.
11. A factory interface for a processing system, comprising: a
first side having at least a first interface port; a second side
disposed opposite the first side and having a second interface
port; a third side disposed adjacent the second side and defining
an acute angle with the second side, the third side having a third
interface port; a first load lock chamber coupled to the first
interface port; a first pod door opener coupled to the second
interface port; and a second pod door opener coupled to the second
interface port.
12. The factory interface of claim 1 further comprising a robot
disposed in a fixed location between the first side and the second
side.
13. The factory interface of claim 12, wherein the second side and
the third side define an angle between about 30 to about 60
degrees.
14. The factory interface of claim 12 further comprising a fourth
side disposed adjacent the second side opposite the third side; the
fourth side defining an acute angle with the second side and having
a fourth interface port; a third pod door opener coupled to the
fourth interface port.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a divisional of U.S. patent application
Ser. No. 10/198,688, filed Jul. 17, 2002 (Attorney Docket No.
APPM/6433), which is incorporated by reference in its entirety.
FIELD OF THE INVENTION
[0002] Embodiments of the invention generally relate to a
semiconductor substrate damage prevention system.
BACKGROUND OF THE RELATED ART
[0003] Semiconductor substrates are generally stored and
transported in substrate storage cassettes. A typically substrate
storage cassette includes a plurality of substrate support slots
arranged to hold substrates in a spaced-apart, vertically-stacked
orientation within a housing. In many systems, the housing, also
known as a pod, includes a sealable door that allows the substrate
stored within the cassette to be isolated from the surrounding
environment. The ability to isolate the interior of the substrate
storage cassette from the surrounding environment is particularly
important when substrates are transported between fabrication tools
in order to minimize potential particulate contamination.
[0004] Substrate storage cassettes are typically coupled to a
fabrication tool at a factory interface. The factory interface
includes one or more bays, each configured to accept one substrate
storage cassette. In order to maintain isolation of the environment
surrounding the substrates stored inside the substrate storage
cassette, each bay is equipped with a pod door opener (PDO). The
PDO the door of the pod from within the factory interface while
maintaining a seal between the factory interface and the substrate
storage cassette, thus maintaining isolation of the substrates from
the surrounding environment.
[0005] Occasionally during the docking and door-opening procedure,
one or more of substrates within the substrate storage cassette may
inadvertently move laterally toward the factory interface. Once the
substrate is moved out of position within the substrate storage
cassette, the substrate is highly likely to become damaged or
create other processing problems. For example, a misaligned
substrate may be hit by another substrate being removed or returned
to the substrate storage cassette, thereby causing damage to one or
both of the substrates. Additionally, the misaligned substrate may
not be positioned correctly on the blade of the transfer robot,
thus potentially becoming disengaged from the robot blade during
transfer, or becoming misaligned or damaged while being positioned
in the next transfer area, or creating orientation/alignment
problems during substrate processing.
[0006] Therefore, there is a need for a method and apparatus for
operating a pod door to mitigate substrate misalignment and prevent
substrate damage.
SUMMARY OF THE INVENTION
[0007] Embodiments of the invention provide a method and apparatus
for preventing substrate damage in a factory interface. In one
embodiment, a method for preventing substrate damage in a factory
interface includes the steps of receiving an indicia of potential
substrate damage, and automatically preventing substrates from
moving out of a substrate storage cassette in response to the
received indicia. The indicia may be a seismic warning signal,
among others.
[0008] In another embodiment, a method for preventing substrate
damage in a factory interface includes the steps of moving a pod
door in a first direction to a position spaced-apart and adjacent a
pod, and moving the pod door laterally in a second direction to
close the pod. The lateral closing motion of the pod door urges
substrates, which may be misaligned in the pod, into a predefined
position within the pod.
[0009] In another embodiment, a method for docking a substrate
storage pod to a factory interface is provided. The method for
docking a substrate storage pod to a factory interface includes
placing a substrate storage pod on a docking station in a first
orientation, coupling the wafer storage pod to the docking station,
moving the coupled substrate storage pod to a position abutting the
factory interface, and rotating the substrate storage pod during
the moving step.
[0010] In another aspect of the invention, an apparatus for docking
a substrate storage pod to a factory interface is provided. In one
embodiment, an apparatus for docking a substrate storage pod to a
factory interface includes a docking station having a substantially
horizontal flange extending from a substantially vertical wall. The
wall has an aperture formed therethrough. A stage is movably
coupled to the flange and adapted to support the substrate storage
pod. An engagement mechanism and docking actuator are coupled to
the stage. The engagement mechanism is adapted to secure the
substrate storage pod to the stage. The docking actuator is adapted
to move substrate storage cassette against the bay. A release
mechanism is adapted to decouple at least one of the engagement
mechanism from the pod or the stage from the docking actuator,
thereby facilitating access to the pod in the event of one or more
of the actuators becoming immobilized.
BRIEF DESCRIPTION OF THE DRAWINGS
[0011] So that the manner in which the above recited features of
the present invention are attained and can be understood in detail,
a more particular description of the invention, briefly summarized
above, may be had by reference to the embodiment thereof which are
illustrated in the appended drawings. It is to be noted, however,
that the appended drawings illustrate only typical embodiments of
this invention and are therefore not to be considered limiting of
its scope, for the invention may admit to other equally effective
embodiments.
[0012] FIG. 1 is a sectional view of a cluster tool;
[0013] FIG. 2 is a top view of the cluster tool of FIG. 1;
[0014] FIG. 3 is an elevation of one embodiment of a pod door
opener;
[0015] FIG. 4 is a bottom view of the pod door opener of FIG.
3;
[0016] FIG. 5 is a perspective view of one embodiment of a release
mechanism;
[0017] FIG. 6 is a sectional view of one embodiment of a pod
door;
[0018] FIG. 7 is an elevation of another embodiment of a pod door
opener; and
[0019] FIG. 8 is a bottom view of the pod door opener of FIG.
7.
[0020] To facilitate understanding, identical reference numerals
have been used, wherever possible, to designate identical elements
that are common to the figures.
DETAILED DESCRIPTION
[0021] FIGS. 1 and 2 depict sectional and top views of a cluster
tool 100. The cluster tool 100 includes a plurality of processing
chambers 102 coupled to a transfer chamber 104 that is connected to
a factory interface 108 by one or more load lock chambers 106. The
cluster tool 100 includes a system for preventing damage to
substrates. Although the system for preventing damage to substrates
is described as residing in the factory interface 108, the system
may be employed in other areas of the cluster tool 100, or on other
tools for processing substrates.
[0022] The transfer chamber 104 generally has one or more centrally
disposed transfer robots 114 disposed therein. The transfer robot
114 is adapted to transfer substrates 110 between the load lock
chamber 106 and the processing chambers 102 that are
circumferentially coupled to the transfer chamber 104. Slit valves
112 are typically disposed within the transfer chamber 104 to
selectively isolate the transfer chamber 104 from the load lock
chamber 106 and the circumscribing process chambers. The valves 112
facilitate maintaining a vacuum environment within the transfer
chamber 104 and providing process isolation for the processing
chambers 102. Examples of commercially available platforms that
have transfer chambers include the PRODUCER.RTM., CENTURA.RTM. and
ENDURA.RTM., families of processing platforms, all available from
Applied Materials, Inc. located in Santa Clara, Calif.
[0023] The processing chambers 102 circumscribing the transfer
chamber 104 may be any variety of chambers suitable to perform the
processes desired to fabricate at least a portion of a predefined
structure upon the substrate 110. These chambers include, but are
limited to, etch chambers, chemical vapor deposition chambers,
physical vapor deposition chambers, pre-clean chambers,
orientators, metrology chambers, orientation chambers, and de-gas
chambers, among others. Processing chambers of these types are
commercially available from a number of sources, including Applied
Materials, Inc.
[0024] The load lock chamber 106 is generally coupled between the
transfer chamber 104 and the factory interface 108. The load lock
chamber 106 facilitates transfer of the substrates 110 between the
vacuum environment of the transfer chamber 104 and a substantially
atmospheric environment of the factory interface 108. The load lock
chamber 106 generally includes a substrate support 116 disposed
within the load lock chamber 106. Substrate support 116 is
configured to facilitate hand-off between the transfer robot 114
and an interface robot 118 disposed in the factory interface 108.
As an example of operation of one load lock chamber 106, a slit
valve 112 disposed between the factory interface 108 and transfer
chamber 104 is opened to allow the interface robot 118 to transfer
a substrate 110 from the factory interface 108 to the substrate
support 116. The interface robot 118 is withdrawn from the load
lock chamber 106 and the slit valve 112 is closed. An atmosphere
control system 120 coupled to the load lock chamber 106 evacuates
the load lock chamber 106 to a vacuum level substantially equal to
that of the process transfer chamber 104. The slit valve 112
between the transfer chamber 104 and the load lock chamber 106 is
then opened to allow the transfer robot 114 to retrieve the
substrate 110 for processing. A processed substrate is then placed
on the substrate support 116 by the transfer robot 114. The
transfer robot 114 is withdrawn from the load lock chamber 106, and
the slit valve 112 is closed. The atmosphere control system 120
then raises the pressure within the load lock chamber 106 to
essentially that of the factory interface 108. The slit valve 112
between the load lock chamber 106 and the factory interface 108 is
then opened, allowing the processed substrate 110 to be retrieved
by the factory interface robot 118 from the substrate support 116
and returned to the factory interface 108. One load lock chamber
that may be adapted to benefit from the invention is described in
U.S. patent application Ser. No. 09/599,125 (Attorney Docket No.
4251), filed Jun. 22, 2000 by Cheung, et al. and is hereby
incorporated by reference in its entirety.
[0025] A controller 122 is coupled to the tool 100 to control
substrate movement and processing. The controller 122 includes a
central processing unit (CPU) 124, support circuits 126 and memory
128. The CPU 124 may be one of any form of computer processor that
can be used in an industrial setting for controlling various
chambers and subprocessors. The memory 128 is coupled to the CPU
124. The memory 128, or computer-readable medium, may be one or
more of readily available memory such as random access memory
(RAM), read only memory (ROM), floppy disk, hard disk, or any other
form of digital storage, local or remote. The support circuits 126
are coupled to the CPU 124 for supporting the processor in a
conventional manner. These circuits include cache, power supplies,
clock circuits, input/output circuitry, subsystems, and the
like.
[0026] The factory interface 108 includes a plurality of bays 130
disposed opposite the load lock chamber 106. A substrate storage
pod 132 is coupled to each bay 130. Each pod 132 stores a plurality
of substrates 110 that are transferred between the load lock
chamber 106 and the pod 132 by the interface robot 118. The
interface robot 118 may be mounted on a rail 134 that allows the
interface robot 118 to move within the factory interface 108,
facilitating access of the pods 132 by the robot 118.
[0027] The pod 132 is typically a front opening unified pod (FOUP)
adapted to retain a plurality of substrates therein. The pod 132
may include a flange 136 that facilitates handling and transport of
the pod 132 by an automatic carrier apparatus 136, such as an
auto-guided vehicle (AGV) commonly used in FABS to transfer pods
132 between cluster tools and the like.
[0028] A pod door opener (PDO) 138 is coupled to each bay 130 and
supports the pod 132 while coupled to the factory interface 108.
The PDO is configured to sealingly mate with the pod 132. In one
embodiment, the PDO 138 is configured to conform to specifications
set forth in SEMI Specification No. E57-1296, which is hereby
incorporated by reference in its entirety. One PDO that may be
adapted to benefit from the invention is described in U.S. Pat. No.
6,082,951, issued Jul. 4, 2000 to Nering et al., which is hereby
incorporated by reference in its entirety. The PDO 138 may
alternatively be configured to other standards or specifications.
The PDO 138 generally includes a vertical docking station 140 (see
in FIG. 2) coupled to a horizontal flange 142. The docking station
140 is coupled to the bay 130. The flange 142 extends from the
docking station 140 to a distal end 144 orientated along an
imaginary line 146. The imaginary line 146 is defined by SEMI
Specification No. E-15.1.
[0029] FIG. 3 depicts one embodiment of the PDO 138 in greater
detail. The flange 142 of the PDO 138 has an aperture or window 332
formed therethrough. A stage 330 is disposed in the window 332 of
the flange 142. The stage 330 and flange 142 are typically parallel
to each other. Bearing rails 334 are coupled to the flange 142
across or along side the window 332. Guides 336, coupled to the
stage 330, are slidably mounted to the bearing rails 334 to allow
the stage 330 to move laterally within the window 332.
[0030] The stage 330 includes a plurality of pins 302 and a clamp
mechanism 306. The pins 302 project above an upper surface 312 of
the stage 330 and are arranged to mate with a receiving hole 304
formed in the bottom of the pod 132. The pins 302 and holes 304
allow the pod 132 to be precisely and repeatably positioned on the
stage 330.
[0031] The clamp mechanism 306 includes a hook 308 coupled to a
clamp actuator 310. The hook 308 extends above the upper surface
312 of the flange 142, and is actuated by the clamp actuator 310 to
engage a tab 320 formed in the bottom of the pod 130. The clamp
actuator 310 may be actuated to retract the hook 308, thus engaging
the tab 320 and urging the pod 132 against the stage 330. In one
embodiment, the clamp actuator 310 is a pneumatic cylinder, but may
alternatively be a ball screw, solenoid or any other type of linear
actuator.
[0032] FIG. 4 depicts a bottom view of the flange 142 of the PDO
138. A docking mechanism 414 is coupled between the flange 142 and
the stage 330. The docking mechanism 414 includes docking actuator
410 that is adapted to controllably position the stage 330 within
the window 332, thus allowing the pod 132 to be moved into and out
of the docking station 140. In one embodiment, the docking actuator
410 includes a motor 402, a lead screw 404 and a nut 406. The motor
402 is coupled to the flange 142 and drives the lead screw 404. The
nut 406 is engaged with the lead screw 404. A bracket 420 that
extends from a bottom surface 422 of the stage 330 and is coupled
to or captures the nut 406 by a release mechanism 424. The release
mechanism 424 prevents the nut 406 from rotating. In response to a
signal from the controller 122, the motor 402 rotates the lead
screw 404 thereby causing the nut 406 to move along the lead screw
404. As the release mechanism 424 also fixes the nut 406 to the
bracket 420, the rotation of the lead screw 404 causes the nut 406
to urge the stage 330 into motion, thereby positioning the stage
330 relative to the flange 142 (and docking station 140).
Alternatively, the release mechanism may be utilized to disengage
the clamp mechanism 306 from the pod 132.
[0033] FIG. 5 depicts one embodiment of the release mechanism 424
that includes an over-center clamp 560 that actuates a forked draw
562. The draw 562 is coupled to the clamp 560 at a first end 544
and is bifurcated at a second opposing end 564 into a pair of
hooked tines 566. The tines 566 of the draw 562 straddle the lead
screw 404 while capturing the nut 406. As the clamp 560 is actuated
to retract the draw 564, the nut 406, captured by the tines 466, is
urged securely against the bracket 420. The nut 406 may include a
key 570 extending from a side of the nut 406 facing the bracket
420. The key 570 is configured to mate with a slot 572 formed in
the bracket 420 to enhance unitary movement of the nut 404 with the
bracket 420.
[0034] In the advent of power failure, the release mechanism 424
may be actuated to disengage the stage 330 from the docking
actuator 310 by opening the clamp 560 to disengage the tines 566
from the nut 406, thereby allowing stage 330 carrying the pod 132
to be manually moved away from the factory interface 108 without
damage to the docking actuator 310 or other system components.
Other types of release mechanisms are alternatively envisioned, for
example, quick pins, lynch pins, clevis pins, dowel pins,
quarter-turn fasteners, quick release fasteners, clamps, latches
and locks among others. 20. The release mechanism may alternatively
be an electro-mechanical device or a pneumatic device.
[0035] Returning to FIG. 3, the docking station 140 includes an
aperture 350 formed therethrough to allow substrates to be
transferred through a door 324 of the pod 132 into the factory
interface 108. To isolate the factory interface 108 and substrates
within the pod 132 from the environment outside the factory
interface 106, a seal 318 is disposed between the docking station
140 and a front end 322 of the pod 130 in which the door 324 is
formed. The seal 318 circumscribes the door 324 disposed in the
front end 322 of the pod 130 and is sealingly compressed as the pod
132 is urged against the docking station 140 so that the factory
interface 108 and pod 132 are isolated from the surrounding
environment once the pod 132 is docked and the door 324 of the pod
132 opened.
[0036] FIG. 6 depicts a sectional view of one embodiment of the pod
door 324 taken along section line 6-6 of FIG. 3. The pod door 324
generally includes one or more locking mechanisms 602 for sealing
securing the door 324 to the pod 132. The locking mechanism 602
includes a cylinder 604 rotatably coupled to the door 324. A
plurality of latches 606 are coupled to a perimeter 608 of the
cylinder 604. The latches 606 pass through guides 614 coupled to or
formed in adjacent opposing sides 610, 612 of the door 324. The
cylinder 604 has a key hole 368 in which a key 364 (shown in FIG.
3) may be inserted to rotate the cylinder 604. The cylinder 604 may
be rotated in a first direction to retract the latches 606 into the
door 324, or rotated a second direction to extend the latches 606
beyond the sides 610, 612 of the door 324 (as shown in FIG. 6).
When extended, the latches 606 engage slots 618, 616 formed in the
pod 132 to sealingly couple the door 324 to the pod 132.
[0037] Returning to FIG. 3, an opening mechanism 326 is disposed
within the factory interface 108 and is utilized to unlock and open
the door 324 of the pod 132. The opening mechanism 326 includes a
receiving plate 360 coupled to the factory interface 108 by an
opening actuator 362. The receiving plate 360 includes a key 364
and plurality of pins 366. The opening actuator 362 moves the
receiving plate 360 to a first position adjacent the door 324. The
pins 366 mate with respective holes 386 formed in the pod door 314,
thereby aligning the receiving plate 316 with the door 324.
[0038] The key 364 is insert into the key hole 368 formed in the
cylinder 304 of the door 324. The key 364 is rotated by a key
actuator 370 to unlock the door 324 from the pod 132. The key
actuator 370 is coupled to the receiving plate 360 and may be
adapted to selectively rotate the key 364. For example, the key
actuator 370 may be a rotary solenoid, stepper motor, pneumatic
cylinder, rotary or linear actuator among others. The key 314
typically has a tee or other feature that retains the door 324 to
the receiving plate 360 as the door 324 is moved away from the
aperture 350 to facilitate unobstructed substrate transfer between
the pod 132 and factory interface 108.
[0039] In one embodiment, the opening actuator 362 has a two-step
motion for moving the door 324 away from the aperture 350. In an
opening motion, the door 324, secured to the receiving plate 360,
is retracted laterally into the factory interface 108 in a first
step then lowered away from the aperture 350 in a second step. The
retraction motion of the first step is typically parallel to the
orientation of the substrates within the pod 132 and the upper
surface 312 of the stage 330 (i.e., perpendicular to a centerline
of the substrates within the pod 132). Alternatively, the second
step may move the door 324 laterally to the side of the aperture
350 (i.e., perpendicularly to the retraction motion and parallel to
the upper surface 312 of the stage 330 and flange 142). The door
324 is returned to the pod 132 in a closing motion opposite the
motion described above.
[0040] The two-step motion of the opening actuator 362
advantageously allows substrates that may be partially extended
from the pod 132 to be returned to the proper position within the
pod 132 by utilizing the pod door 324 to gently push the substrates
laterally into the pod 132. As the final closing motion of the pod
door 324 is parallel to the orientation of the substrates within
the pod 132, the substrates are pushed substantially within their
plane thereby minimizing potential scratching or other damage which
may be created if one of the flat surfaces of the substrate was
urged, or rubbed against the system as the substrate is slide back
into the pod 132. The door 324 is then re-opened to allow
processing and substrate transfer to continue without
interruption.
[0041] The two-step motion of the opening actuator 362 may be
realized by a linkage that provides the requisite motion, by one or
more actuators adapted to control the motion of the receiving plate
360, or a combination thereof. In the embodiment depicted in FIG.
3, the opening actuator 362 includes a first actuator 378 for
controlling motion into and out of the aperture 350, and a second
actuator 372 for controlling motion vertically towards and away
from the aperture 350.
[0042] The first actuator 378 is coupled between a base plate 374
and the receiving plate 360. The first actuator 378 is typically a
ball screw and motor, but may alternatively be any other device for
facilitating linear motion of the receiving plate 360 relative to
the base plate 374. Bearings 352, mounted to a stanchion 376 the
receiving plate 360, ride along guide rails 354 coupled to the base
plate 374 to ensure smooth controlled motion between the receiving
plate 360 and base plate 374. Thus, the first actuator 378 enables
horizontal positioning of the receiving plate 360 (and pod door 324
when coupled thereto) into and out of the aperture 350.
[0043] The second actuator 372 is coupled between the base plate
374 and a frame 312 or other structural element of the factory
interface 108. The second actuator 372 is typically configured
similar to the first actuator 378. A truss plate 314 is coupled to
the base plate 374 to provide a stable attachment point for
bearings 356 that provide vertical movement of the base plate 374
along guide rails 358 coupled to the frame 312. Thus, the second
actuator 378 enables the pod door 324, while attached to the
receiving plate 360, to be lowered clear of the aperture 360,
thereby allowing substrate transfer between the pod 328 and factory
interface 108 to occur unobstructed.
[0044] A first sensor 380 is typically coupled to the factory
interface 108 proximate the aperture 350. The first sensor 380 is
typically adapted to detect misaligned substrates sticking out from
their proper positioned within the pod 132 into the aperture 350.
Substrates may become misaligned for a variety of reasons,
including by not limited to vibrations, incidental contact,
sticking to the pod door 324 during opening and seismic events
among others. Once the first sensor 380 provides the controller 122
with a signal indicative of one or more misaligned substrate
extending into the aperture 350, the pod door 324 may be closed to
return the substrates to their proper position within the pod 132.
Advantageously, the two-step motion of the opening actuator 362
allows for the substrates to be re-positioned within the pod 132
without disrupting system operations by opening the factory
interface to manually retrieve the substrates.
[0045] In one embodiment, the first sensor 380 is a vision system
adapted to view the aperture 350. The vision system includes a
camera 382 having a field of view encompassing the entire aperture
350. Images of the aperture 350 are captured by the camera 382 and
provided to the controller 122 for processing. The images may be
transferred between the controller 122 and camera 382 by hard-wire
or wire-less signal.
[0046] The images can be interpreted manually or automatically to
determine if the substrates, viewed in the image, are positioned
where potential damage may occur. In one embodiment, the images are
compared to reference images stored in the memory 128 of the
controller 122. If the captured image fails to compare favorably to
a reference image of a clear aperture 350 (i.e., no substrates
protruding into the aperture 350), the controller 122 then
instructs the opening actuator 362 to return the door 324 to the
pod 132 to re-align the substrates. The door 324 is then re-opened
to allow processing and substrate transfer to continue without
interruption. Alternatively, the images may be viewed on a monitor
(not shown) for manual interpretation.
[0047] The controller 122 may also close the pod door 132
preventatively or in response to a signal indicative of an
impending or occurring event. For example, the controller 122 may
receive information from a seismic warning system 190 (shown in
FIG. 1) which issues a signal indicative of a probable, impending
or forecasted seismic event which could cause substrates to
inadvertently move from the pod 132 into the factory interface 108.
In response to a signal from the seismic warning system 190, the
controller 122 instructs the pod door 132 to be closed, thereby
securing the substrates within the pod 132. The controller 122 may
additionally cease or suspend other operational activities, for
example, substrate processing or substrate transfer in response to
information received from the seismic warning system 190.
Alternatively, the system 100 may suspend future processing or
substrate transfers, and move substrates within the system 100 to
predetermined locations where damage may be minimized during
seismic activity.
[0048] The seismic warning system 190 may be remote to the
controller 122, such as a network, run by a local, state or Federal
agency, or may be a private or corporate enterprise that issues a
signal or other data, available to the controller 122 via hardwire
or wireless communication, based on current or forecasted seismic
or other emergency condition. Emergency conditions may include, but
are not limited to, weather conditions, geological events,
impending power loss or voltage reduction, fire, utility
interruption; terrorism, warfare, social unrest, flooding, other
natural or civil disasters, or other event where it would be
advantageous to cease substrate processing. Alternatively, the
seismic warning system 190 may be coupled to the controller 122, or
mounted to, or nearby the system 100. For example, the seismic
warning system 190 may be an accelerometer or other type of sensor
adapted to detect seismic motion, fire or voltage loss. In one
embodiment, the seismic warning system 190 is an accelerometer
adapted to detect vibration in excess of a predefined level. The
excess vibration may be due to seismic activity or other event. In
another embodiment, a manual switch 394 may be coupled to the
system 100 signals the controller 122 to instruct the pod door 132
to be closed.
[0049] FIG. 7 depicts top plan view of another embodiment of a
processing system 700. The system 700 includes processing chambers
102 and a transfer chamber 104 that are configured similar those of
the processing system 100 described above. The system 700
additionally includes curved or faceted factory interface 708
coupled to the transfer chamber 104 by a pair of load lock chambers
106. The factory interface 708 has a center pod door opener (PDO)
710 and two outer PDOs 738 coupled thereto opposite the load lock
chambers 106. The processing system 700 has compact footprint
provided by the factory interface 708 that facilitates utilization
of a fixed position robot 720 in the factory interface 708 that
interfaces with the three PDOs 710, 738. As the fixed position
robot 720 disposed in the factory interface 708 does not require
lateral movement within the factory interface 708 to transfer
substrates with all three pods 132 disposed on the PDOs 710, 738, a
cost savings is realized as compared with other processing systems
that require a mobile factory interface robot to accommodate
substrate transfer from more than two pods.
[0050] The center PDO 710 coupled to a first facet 728 of the
factory interface 708 and is configured similar to the PDO 138
described above. The center PDO 710 is disposed inline with the
robot 720 and transfer chamber 104.
[0051] The offset PDOs 738 are coupled to a second and third facets
724, 726 disposed to either side of the first facet 724 and center
PDO 710. The PDO 738 is also configured similar to the PDO 138
described above, having a flange 740 and a docking station 742,
except that a stage 702 of the PDO 738 has a non-linear docking
motion as shown by arrow 704.
[0052] The non-linear docking motion allows the pod 132, placed on
the PDO 738 by an AGV in an orientation squared to the SEMI-line
146, to rotate through an angle 722 to mate a docking station 742
of the PDO 738. In embodiment, the angle 722 ranges between about
30 to about 60 degrees. Each docking station 742 is coupled in a
parallel orientation to respective facets 724, 726 of the factory
interface 708. The docking station 742 and facet 724 are typically
disposed at the same angle 722 relative to the SEMI-line 146 (e.g.,
the facets 724, 726 and SEMI-line 146 are non-parallel). As the
non-linear docking motion of the PDO 738 allows the pod 132 to be
disposed closer to the robot 720 than conventional factory
interfaces that are parallel to the SEMI-line 146, the system 700
utilizing the PDO 738 does not require lateral movement of the
robot 710 to reach all the pods 132, thereby eliminating a degree
of freedom required for substrate transfer and reducing robot and
factory interface costs over conventional systems. Although the
motion of the stage 702 is described below as having a curved
motion, the non-linear motion of the stage 702 is contemplated as
any combination of motions which results in a pod docking motion
having at least one motion component perpendicular to the SEMI-line
146 and a rotational component about an axis perpendicular to the
SEMI-line 146 and plane defined by a upper surface 714 of the stage
702 as shown by arrows 730, 732, respectively. The axis of rotation
is typically a central axis of the pod 132, or offset and parallel
thereto.
[0053] FIG. 8 depicts bottom plan view of the PDO 738. The flange
740 of the PDO 738 has a window 804 in which the stage 702 is moved
in a non-linear motion. It is contemplated that the non-linear
motion may comprise two linear motions, each having a unique
direction, or combination of a linear motion and rotational motion,
among other possibilities. The stage 702 has a first end 810 and a
second end 812. The first end 810 of the stage 702 has a bracket
816 coupled thereto. The bracket 816 is coupled to the flange 740
at a pivot point 806, thereby allowing the stage 702 to rotate
within the window 804. In one embodiment, the ends 810, 812 are
offset at different radii about the pivot point 806. Bearing and
guides (not shown) are typically disposed between the stage 702 and
flange 740 to facilitate smooth, repeatable motion.
[0054] The second end 812 of the stage 702 is coupled to a stage
actuator 814. The stage actuator 814 may be any rotational or
linear actuation device capable of imparting motion between the
stage 702 and flange 740, and in one embodiment, is a pneumatic
cylinder. The stage actuator 814 may be instructed by a controller
122 to pivot the stage 702 about the pivot point 740, moving the
stage 702 as indicated by the arrow 704. As the stage 702 moves,
the pod 132, secured to the stage 702 in a manner similar to as
described above with reference to FIG. 3, is sealingly docked to
the factory interface 708.
[0055] Thus, a system is provided that prevents damage to
substrates in the factory interface. Moreover, the system allows
alignment correction of substrates to occur without interrupting
processing. Additionally, in one embodiment provides a system
having a compact footprint that reduces the cost of ownership
associated with large processing systems.
[0056] While the foregoing is directed to the some embodiments of
the present invention, other and further embodiments of the
invention may be devised without departing from the basic scope
thereof, and the scope thereof is determined by the claims that
follow.
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