U.S. patent application number 11/309825 was filed with the patent office on 2007-04-05 for fabricating method of a pixel structure.
Invention is credited to Chien-Sheng Yang.
Application Number | 20070076156 11/309825 |
Document ID | / |
Family ID | 34632312 |
Filed Date | 2007-04-05 |
United States Patent
Application |
20070076156 |
Kind Code |
A1 |
Yang; Chien-Sheng |
April 5, 2007 |
FABRICATING METHOD OF A PIXEL STRUCTURE
Abstract
A fabricating method of a pixel structure is disclosed. The
pixel structure is disposed on a substrate. The pixel structure
comprises a scan line, a data line, an active element, a capacitor
electrode, a pixel electrode and an electric field shielding layer.
The fabricating method of the pixel structure comprises forming the
scan line, the data line and the active element on the substrate
first. The scan line and the data line are electrically coupled to
the active element. Then, the capacitor electrode and the electric
field shielding layer are formed on the substrate. Finally, the
pixel electrode is formed on the substrate, covering the capacitor
electrode and electrically coupled to the active element. The pixel
electrode and the capacitor electrode form a pixel storage
capacitor. The electric field shielding layer can avoid the
interference between the data line and the pixel electrode.
Inventors: |
Yang; Chien-Sheng; (Hsinchu
County, TW) |
Correspondence
Address: |
JIANQ CHYUN INTELLECTUAL PROPERTY OFFICE
7 FLOOR-1, NO. 100
ROOSEVELT ROAD, SECTION 2
TAIPEI
100
TW
|
Family ID: |
34632312 |
Appl. No.: |
11/309825 |
Filed: |
October 4, 2006 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
10708016 |
Feb 3, 2004 |
7142260 |
|
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11309825 |
Oct 4, 2006 |
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Current U.S.
Class: |
349/139 |
Current CPC
Class: |
G02F 1/136213 20130101;
G02F 1/136227 20130101; G02F 1/136218 20210101 |
Class at
Publication: |
349/139 |
International
Class: |
G02F 1/1343 20060101
G02F001/1343 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 5, 2003 |
TW |
92134284 |
Claims
1. A method of fabricating a pixel structure, comprising:
sequentially forming an active element, a scan line and a data line
on a substrate, the active element being electrically coupled to
the scan line and the data line; forming a capacitor electrode on
the substrate; forming an electrical field shielding layer on the
substrate, covering the data line; and forming a pixel electrode on
the substrate, covering the capacitor electrode and electrically
coupled to the active element, wherein the pixel electrode and the
capacitor electrode are coupled as a pixel storage capacitor.
2. The method of fabricating a pixel structure of claim 1, wherein
the electrical field shielding layer and the capacitor electrode
are formed by a patterned material layer.
3. The method of fabricating a pixel structure of claim 1, wherein
the active element comprises a low temperature polysilicon thin
film transistor.
4. The method of fabricating a pixel structure of claim 3, while
forming the data line, further comprising forming a source/drain
conductive layer over the active element, wherein the active
element is electrically coupled to the data line and the pixel
electrode through the drain/source conductive layer.
5. The method of fabricating a pixel structure of claim 3, after
forming the data line, further comprising a step of forming a
conductive layer over the active element, wherein the active
element is electrically coupled to the data line through the
drain/source conductive layer, and the pixel electrode is directly
electrically coupled to the active element.
6. The method of fabricating a pixel structure of claim 5, wherein
the conductive layer and the pixel electrode are formed from a
patterned material layer.
7. The method of fabricating a pixel structure of claim 3, wherein
the step of forming the active element comprises: forming a
polysilicon layer on the substrate; forming a gate dielectric layer
on the substrate, covering the polysilicon layer; forming a gate
terminal on the gate dielectric layer and over the polysilicon
layer; and forming a source/drain doped region within the
polysilicon layer besides the gate terminal.
8. The method of fabricating a pixel structure of claim 7, wherein
the step of forming the source/drain doped region comprises
performing a doping process using the gate terminal as a hard mask
for forming the source/drain doped region.
9. The method of fabricating a pixel structure of claim 1, wherein
the active element comprises an amorphous silicon thin film
transistor.
10. The method of fabricating a pixel structure of claim 9, wherein
the step of forming the active element comprises: forming a gate
terminal on the substrate, electrically coupled to the scan line;
forming a gate dielectric layer on the substrate, covering the gate
terminal; forming a channel on the gate dielectric layer and over
the gate terminal; and forming a source/drain terminal on the
channel.
11. The method of fabricating a pixel structure of claim 1, after
forming the capacitor electrode and before forming the pixel
electrode, further comprising a step of forming a transparent
capacitor electrode on the capacitor electrode.
12. The method of fabricating a pixel structure of claim 11,
wherein the capacitor electrode or the transparent capacitor
electrode is formed along with the electrical field shielding layer
by a patterned material layer.
13. The method of fabricating a pixel structure of claim 1, wherein
the capacitor electrode, the electrical field shielding layer and
the pixel electrode are made from indium tin oxide or indium zinc
oxide.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This is a divisional application of patent application Ser.
No. 10/708,016, filed on Feb. 3, 2004, which claims the priority
benefit of Taiwan patent application serial no. 92134284, filed on
Dec. 5, 2003 and is now allowed. The entirety of each of the
above-mentioned patent applications is hereby incorporated by
reference herein and made a part of this specification.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention relates to a fabricating method of a
structure of a pixel, and more particularly to a structure of a
pixel with an electrical field shielding layer between a data line
and a pixel electrode for avoiding the interference between the
data line and the pixel electrode, and a fabricating method
thereof.
[0004] 2. Description of the Related Art
[0005] Thin Film Transistor Liquid Crystal Display (TFT LCD)
comprises a thin film transistor array substrate, a color filter
array substrate and a liquid crystal layer. The thin film
transistor array substrate is composed of a plurality of pixels
arranged in arrays. Each pixel comprises a thin film transistor, a
pixel electrode and pixel storage capacitor. The thin film
transistor comprises a gate terminal, a channel, a drain terminal
and a source terminal, which are used to control the device. When
the pixel electrode is in on-state, a signal is written into the
pixel; when in off-state, a pixel storage capacitor can maintain
the potential required for driving the device. Therefore, the
capacitance of the pixel storage capacitor is closely related with
the performance of the liquid crystal display.
[0006] In the prior art pixel storage capacitor of the pixel
comprises a first metal layer, a second metal layer and a
dielectric layer therebetween. Whether it is a Cst-on-gate
structure or a Cst-on-common structure, the gate terminal or the
common line, i.e. the first metal layer, serves as an electrode;
the second metal layer and the pixel electrode electrically coupled
thereto serve as another electrode. However, because the prior
pixel storage capacitor uses the opaque metal layer as the
capacitor electrode, it substantially reduces the aperture ratio of
the pixel storage capacitor, reducing brightness of the
displays.
[0007] For solving the issue of reduction of the aperture ratio of
the pixel, another structure of a pixel is disclosed by a prior
art. FIG. 1 is a schematic cross-sectional view showing the
structure of the pixel. Referring to FIG. 1, a pixel 100 is
disposed on a substrate 110. The pixel 100 comprises a scan line
(not shown), a data line 130, an active element 140 and a pixel
storage capacitor 150. The scan line and the data line 130 are
disposed on the substrate 110. The active element 140 is disposed
on the substrate 110 and near to the intersection of the scan line
and the data line 130. The pixel storage capacitor 150 comprises a
pixel electrode 152 and a transparent capacitor electrode 154. The
pixel electrode 152 is electrically coupled to the active element
140.
[0008] Because the pixel electrode 152 and the transparent
capacitor electrode 154 of the pixel storage capacitor 150 are made
from transparent materials, the pixel storage capacitor 150 does
not result in the reduction of aperture ratio in pixel 100.
However, the capacitance of the structure is reduced because of the
shrinkage thereof. If the distance between the pixel electrode 152
and the transparent electrode 154 is reduced, the capacitance of
the pixel storage capacitor 150 is enhanced, but the interference
between the pixel electrode 152 and the data line 130 arises,
resulting in the worse performance of the liquid crystal
displays.
SUMMARY OF THE INVENTION
[0009] Therefore, an object of the present invention is to provide
a structure of a pixel and a fabricating method thereof to solve
the problems due to interference between the pixel electrode and
the data line.
[0010] Another object of the present invention is to provide a
structure of a pixel and a fabricating method thereof to increase
the aperture ratio of the pixel.
[0011] Yet another object of the present invention is to provide a
simple method of forming a structure of a pixel structure.
[0012] A further object of the present invention is to provide a
structure of a pixel and a fabricating method thereof to increase
the capacitance of the pixel storage capacitor.
[0013] In accordance with the objects above, the present invention
discloses a structure of a pixel comprising a scan line, a data
line, an active element, a capacitor electrode, a pixel electrode
and an electrical field shielding layer. The scan line and the data
line are disposed on the substrate. The active element is disposed
on the substrate and near to an intersection of the scan line and
the data line, and electrically coupled to the scan line and the
data line. The capacitor electrode is disposed on the substrate.
The pixel electrode is disposed over the capacitor electrode, and
the pixel electrode is electrically coupled to the active element.
The pixel electrode and the capacitor electrode form a pixel
storage capacitor. The electrical field shielding layer is disposed
between the data line and the pixel electrode.
[0014] In addition, the active element is, for example, a low
temperature polysilicon (LTPS) thin film transistor. The pixel
structure further comprises, for example, a source/drain conductive
layer. The active element is electrically coupled to the data line
and the scan line, for example, through the source/drain conductive
layer. Or, the structure of the pixel further comprises a
conductive layer. The active element is electrically coupled to the
data line, for example, through the source/drain conductive layer,
and the pixel electrode is, for example, directly electrically
coupled to the active element. The conductive layer is indium tin
oxide (ITO) of indium zinc oxide (IZO).
[0015] In addition, the active element can be an amorphous silicon
thin film transistor. The active element, for example, comprises a
gate terminal, a channel and a source/drain terminal. The gate
terminal is disposed on the substrate, and electrically coupled to
the scan line. The channel is, for example, disposed over the gate
terminal. The source/drain terminal is, for example, disposed on
the channel, and electrically coupled to the data line and the
pixel electrode.
[0016] Moreover, the pixel structure further comprises, for
example, at least one transparent capacitor electrode, which is
disposed between the capacitor electrode and the pixel electrode.
The capacitor electrode, the transparent capacitor electrode and
the pixel electrode form the pixel storage capacitor, and the
capacitor electrode is formed of a transparent material. The
capacitor electrode or transparent electrode is directly, or
through the pixel electrode, electrically coupled to the active
element. The transparent electrode is formed of ITO or IZO.
[0017] In the pixel of the present invention, the capacitor
electrode, the electrical field shielding layer and the pixel
electrode are formed of, for example, ITO or IZO.
[0018] According to the objects above, the present invention
provides a method of fabricating a structure of a pixel. The method
comprises: sequentially forming an active element, a scan line and
a data line on a substrate, wherein the active element is
electrically coupled to the scan line and the data line; forming a
capacitor electrode on the substrate; forming an electrical field
shielding layer on the substrate, covering the data line; and
forming a pixel electrode on the substrate, covering the capacitor
electrode and electrically coupling to the active element, wherein
the pixel electrode and the capacitor electrode are coupled as a
pixel storage capacitor.
[0019] In addition, the electrical field shielding layer and the
capacitor electrode are formed, for example, from a patterned
material layer.
[0020] Moreover, the active element is, for example, a low
temperature polysilicon thin film transistor. Accordingly, the
method further comprises forming a source/drain conductive layer
over the active element while forming the data line. The active
element is electrically coupled to the data line and the pixel
electrode, for example, through the source/drain conductive layer.
In some embodiments, a conductive layer is formed over the active
element after the data line is formed. The active element is, for
example, electrically coupled to the data line through the
conductive layer, and the pixel electrode is, for example, directly
electrically coupled to the active element. The conductive layer
and the pixel electrode are formed, for example, from the same
patterned material layer. The step of the forming the active
element comprises, for example, forming a polysilicon layer on the
substrate; forming a gate dielectric layer on the substrate,
covering the polysilicon layer; forming a gate terminal on the gate
dielectric layer and over the polysilicon layer; and forming a
source/drain doped region within the polysilicon layer beside the
gate terminal.
[0021] Moreover, the step of forming the source/drain doped region
is performed by using the gate terminal as a hard mask in a doping
process for forming the source/drain doped region in the
polysilicon layer.
[0022] Moreover, the active element can also be an amorphous
silicon thin film transistor. Accordingly, the step of forming the
active element comprises: forming a gate terminal on the substrate,
electrically coupled to the scan line; forming a gate dielectric
layer on the substrate, covering the gate terminal; forming a
channel on the gate dielectric layer and over the gate terminal;
and forming a source/drain terminal on the channel.
[0023] In addition, before the capacitor electrode is formed and
after the pixel electrode is formed, the method further comprises,
for example, forming at least one transparent capacitor electrode.
The electrical field shielding layer is formed with, for example,
the capacitor electrode or the transparent capacitor electrode from
the same patterned material layer.
[0024] In the fabricating method the pixel structure of the present
invention, the capacitor electrode, the electrical field shielding
layer and the pixel electrode are formed of, for example, ITO or
IZO.
[0025] Accordingly, the structure of the pixel of the present
invention and the fabricating method thereof have following
advantages: (1) The pixel electrode and the data line do not
interfere with each other. (2) The process can be simplified. (3)
The transparent material of the pixel storage capacitor can
substantially improve the aperture ratio. (4) The multi-layer pixel
storage capacitor has desired capacitance. (5) They are adapted for
the high-resolution liquid crystal displays.
[0026] In order to make the aforementioned and other objects,
features and advantages of the present invention understandable, a
preferred embodiment accompanied with figures is described in
detail below.
BRIEF DESCRIPTION OF THE DRAWINGS
[0027] FIG. 1 is a schematic cross-sectional view showing a
conventional structure of a pixel.
[0028] FIGS. 2A-2E are a schematic cross-sectional process flow
showing a method of fabricating a structure of a pixel structure
according to a first preferred embodiment of the present
invention.
[0029] FIGS. 3A-3E are a schematic cross-sectional process flow
showing a method of fabricating a structure of a pixel according to
a second preferred embodiment of the present invention.
[0030] FIG. 4 is a schematic cross-sectional view showing a
structure of a pixel according to a third preferred embodiment of
the present invention.
[0031] FIG. 5 is a schematic cross-sectional view showing a
structure of a pixel according to a fourth embodiment of the
present invention.
[0032] FIG. 6 is a schematic cross-sectional view showing a
structure of a pixel according to a fifth embodiment of the present
invention.
DETAILED DESCRIPTION OF EMBODIMENTS
[0033] FIGS. 2A-2E are a schematic cross-sectional process flow
showing a method of fabricating a structure of a pixel according to
a first preferred embodiment of the present invention. Referring to
FIGS. 2A and 2B, an active element 220 and a scan line (not shown)
are formed on the substrate 210. The active element 220 is, for
example, a low temperature polysilicon thin film transistor. The
step of forming the active element 220 comprises, for example,
first forming a polysilicon layer 222 on the substrate 210. Before
the polysilicon layer 222 is formed, the step further comprises,
for example, forming a buffer layer (not shown) on the substrate
210 for preventing ion contamination in the polysilicon layer 222
from the substrate 210. The polysilicon layer 222 is formed from an
amorphous silicon layer by, for example, a thermal annealing
process. Then, a gate dielectric layer 224 is selectively formed on
the substrate 210 for covering the polysilicon layer 222. A gate
terminal 226 is formed on the gate dielectric layer 224, and over
the polysilicon layer 222. Finally, a doping process is performed
by using, for example, the gate terminal 226 as a hard mask for
forming a source/drain doped region 228 within the polysilicon
layer 222. Moreover, the gate terminal 226 of the active element
220 is electrically coupled to the scan line.
[0034] Referring to FIG. 2C, a photolithographic process is
performed for forming a plurality of first contact windows O1 on
the source/drain doped region 228 of the active element 220. Then,
a data line 250 and a source/drain conductive layer 260 are formed
from the same patterned metal layer. The data line 250 is
electrically coupled to the source/drain conductive layer 260, and
the source/drain conductive layer 260 fills the first contact
windows O1 and is electrically coupled to the active element 220.
In addition, before the first contact windows O1 are formed, the
method further comprises, for example, forming a first protective
layer 230a for covering the active element 220.
[0035] Referring to FIG. 2D, a capacitor electrode 240a and an
electrical field shielding layer 245 are formed on the substrate
210. The capacitor electrode 240a and the electrical field
shielding layer 245 are formed from the same patterned material
layer, and the electrical field shielding layer 245 covers, for
example, a portion of the active element 220. Then, a dielectric
layer 242 is formed on the substrate 210, covering the capacitor
electrode 240a. Another photolithographic process is performed to
form a second contact window O2 on the source/drain conductive
layer 260. In addition, before the capacitor electrode 240a is
formed, the method further comprises, for example, forming a second
protective layer 230b, covering the data line 250 and the
source/drain conductive layer 260.
[0036] Referring to FIG. 2E, a pixel electrode 270 is formed on the
dielectric layer 242 over the capacitor electrode 240a. Moreover,
the pixel electrode 270 fills the second contact window O2 for
electrically connecting the source/drain conductive layer 260 and
is electrically coupled to the active element 220. The pixel
electrode 270 and the capacitor electrode 240a form a pixel storage
electrode 280. In addition, the pixel electrode 270 is extended
over, for example, the active element 220. Accordingly, the pixel
electrode 270 and the electrical field shielding layer 245 over the
active element 220 also serves for storing charges.
[0037] Following are the descriptions of the first preferred pixel
structure of the present invention. Referring to FIG. 2E, the pixel
structure 200 is disposed on the substrate 210. The pixel structure
200 comprises the scan line (not shown), the data line 250, the
active element 220, the capacitor electrode 240a, the pixel
electrode 270 and the electrical field shielding layer 245. The
scan line and the data line 250 are disposed on the substrate 210.
The active element 220 is disposed on the substrate 210 and close
to the intersection of the scan line and the data line 250. The
active element 220 is electrically coupled to the scan line and the
data line 250. The capacitor electrode 240a is disposed on the
substrate 210. The pixel electrode 270 is disposed on the capacitor
electrode 240a, and electrically coupled to the active element 220.
The pixel electrode 270 and the capacitor electrode 240a form the
pixel storage capacitor 280. It should be noted that the electrical
field shielding layer 245 between the data line 250 and the pixel
electrode 270 is adapted to prevent the interference between the
data line 250 and the pixel electrode 270. Additionally, the pixel
electrode 270 extends over, for example, the active element 220.
Accordingly, the pixel electrode 270 and the electrical field
shielding layer 245 over the active element 220 also serves for
storing charges.
[0038] Moreover, the pixel 200 further comprises, for example, the
source/drain conductive layer 260. The active element 220 is
electrically coupled to the data line 250 and the pixel electrode
270 through the source/drain conductive layer 260. The electrical
field shielding layer 245, the pixel electrode 270 and the
capacitor electrode 240a are made from, for example, ITO or
IZO.
[0039] FIGS. 3A-3E show a schematic cross-sectional process flow of
a method of fabricating a structure of a pixel according to a
second preferred embodiment of the present invention. Referring to
FIGS. 3A and 3B, an active element 320 and a scan line (not shown)
are formed on the substrate 310. The active element 320 is, for
example, a low temperature polysilicon thin film transistor. The
step of forming the active element 320 comprises, for example,
first forming a polysilicon layer 322 on the substrate 310. Before
the polysilicon layer 322 is formed, the step further comprises,
for example, forming a buffer layer (not shown) on the substrate
310 for preventing ion contamination in the polysilicon layer 322
from the substrate 310. The polysilicon layer 322 is formed from an
amorphous silicon layer by, for example, an annealing process.
Then, a gate dielectric layer 324 is selectively formed on the
substrate 310 for covering the polysilicon layer 322. A gate
terminal 326 is formed on the gate dielectric layer 324, and over
the polysilicon layer 322. Finally, a doping process is performed
by using, for example, the gate terminal 326 as a hard mask for
forming a source/drain doped region 328 within the polysilicon
layer 322. The gate terminal 326 of the active element 320 is
electrically coupled to the scan line. Moreover, the method further
comprises forming a first protective layer 330a, covering the
active element 320.
[0040] Referring to FIG. 3C, a data line 350 is formed on the
substrate 310.
[0041] Referring to FIG. 3D, a capacitor electrode 340a and an
electrical field shielding layer 345 are formed on the substrate
310. In addition, before the capacitor electrode 340a and the
electrical field shielding layer 345 are formed, the method further
comprises forming, for example, a second protective layer 330b,
covering the data line 350.
[0042] Referring to FIG. 3E, a dielectric layer 342 is formed on
the substrate 310, covering the capacitor electrode 340a and the
electrical field shielding layer 345. A photolithographic process
is performed to form a plurality of contact windows O3 on the
source/drain doped region 328 and the data line 350. Then, a
transparent material is patterned for forming a pixel electrode 370
on the dielectric layer 342 over the capacitor electrode 340a, and
a conductive layer 372 on the dielectric layer 342 over the
source/drain doped region 328 and the data line 350. Moreover, the
pixel electrode 370 and the conductive layer 372 fill the contact
windows O3. The pixel electrode 370 electrically connects the
source/drain doped region 328 of the active element 320, and the
conductive layer 372 is electrically coupled to data line 350 and
the source/drain doped region 328 of the active element 320. The
pixel electrode 370 and the capacitor electrode 340a form the pixel
storage capacitor 380.
[0043] Following are the descriptions of the second preferred pixel
structure of the present invention. Referring to FIG. 3E, the pixel
structure 300 is disposed on the substrate 310. The pixel structure
300 comprises the scan line (not shown), the data line 350, the
active element 320, the capacitor electrode 340a, the pixel
electrode 370 and the electrical field shielding layer 345. The
scan line and the data line 350 are disposed on the substrate 310.
The active element 320 is disposed on the substrate 310 and close
to the intersection of the scan line and the data line 350. The
active element 320 is electrically coupled to the scan line and the
data line 350.
[0044] The capacitor electrode 340a is disposed on the substrate
310. The pixel electrode 370 is disposed on the capacitor electrode
340a, and electrically coupled to the active element 320. The pixel
electrode 370 and the capacitor electrode 340a form the pixel
storage capacitor 380. It should be noted that the electrical field
shielding layer 345 between the data line 350 and the pixel
electrode 370 is adapted to prevent the interference between the
data line 350 and the pixel electrode 370. Additionally, the pixel
300 further comprises, for example, the conductive layer 372. The
active element 320 is electrically coupled to the data line 350,
for example, through the conductive layer 372. The pixel electrode
370 is directly electrically coupled to the active element 320. The
electrical field shielding layer 345, the pixel electrode 370, the
conductive layer 372 and the capacitor electrode 340a are formed
from, for example, ITO or IZO.
[0045] FIG. 4 is a schematic cross-sectional view showing a
structure of a pixel according to a third preferred embodiment of
the present invention. Referring to FIG. 4, the structure of the
pixel 400 is different from the embodiments described above in the
active element 420 which is an amorphous silicon thin film
transistor, wherein an electrical field shielding layer 445 is
disposed between the data line 450 and the pixel electrode 470. The
elements similar to those described in the prior embodiments are
not repeated hereinafter. The active element 420 comprises, for
example, a gate terminal 426, a channel 424 and a source/drain
terminal 428. The gate terminal 426 is disposed, for example, on
the substrate 410, and electrically coupled to the scan line (not
shown). The channel 424 is disposed, for example, over the gate
terminal 426. The source/drain terminal 428 is disposed, for
example, on the channel 424, and electrically coupled to the data
line 450 and the pixel electrode 470.
[0046] FIG. 5 is a schematic cross-sectional view showing a
structure of a pixel according to a fourth preferred embodiment of
the present invention. Referring to FIG. 5, the structure of the
pixel 500 is different from the embodiments described above, in
that, at least one transparent capacitor electrode 540a is included
in the pixel storage capacitor 580. The electrical field shielding
layer 545 is similarly disposed between the data line 550 and the
pixel electrode 570. The elements similar to those described in the
prior embodiments are not repeated hereinafter. The pixel 500
further comprises, for example, at least one transparent capacitor
540b disposed between the capacitor electrode 540a and the pixel
electrode 570. The capacitor electrode 540a, the transparent
capacitor electrode 540b and the pixel electrode 570 form the pixel
storage capacitor 580. The capacitor electrode 540a is made from a
transparent material. The transparent material of the transparent
capacitor electrode 540b is, for example, ITO or IZO.
[0047] Moreover, the capacitor electrode 540a, for example, is
directly electrically coupled to the active element 520, or
electrically coupled to the active element 520 through the pixel
electrode 570. Therefore, in the pixel storage capacitor 580, the
capacitor electrode 540a and the pixel electrode 570, for example,
have the same potential, and the transparent capacitor electrode
540b has a different potential. That can reduce the power
consumption by the pixel storage capacitor 580. Surely, when a
plurality of transparent capacitor electrodes 540b are applied, the
capacitor electrodes electrically coupled to the active element 520
through the pixel electrode 570 can be transparent capacitor
electrode 540b as long as the adjacent capacitor electrodes have
different potentials.
[0048] FIG. 6 is a schematic cross-sectional view showing a
structure of a pixel according to a fifth preferred embodiment of
the present invention. Referring to FIG. 6, the structure of the
pixel 600 is different from the fourth embodiment described above,
in that, the active element 620 and the pixel electrode 670, and
the data line 650 are connected. The electrical field shielding
layer 645 is similarly disposed between the data line 650 and the
pixel electrode 670. The elements similar to those described in the
fourth embodiment are not repeated hereinafter.
[0049] The pixel electrode 670 of the pixel 600, for example, is
directly electrically coupled to the active element 620, and the
data line 650, for example, is electrically coupled to the active
element 620 through the conductive layer 672. In addition, the
conductive layer 672 and the pixel electrode 670, for example, are
formed from the same patterned transparent material layer.
[0050] It should be noted, the low temperature polysilicon thin
film transistor serves as the active element in the fourth and the
fifth embodiments. One of ordinary skill in the art can easily
understand that an amorphous silicon thin film transistor can also
used to achieve the purpose of the claimed invention, and achieve
the advantages thereof.
[0051] Accordingly, the structures of the pixel and the fabricating
methods of the present invention are characterized in disposing the
electrical field shielding layer between the data line and the
pixel electrode. Therefore, the pixel structures and the
fabricating methods of the present invention can substantially
reduce the impact due to the interference between the data line and
the pixel electrode. Particularly, in the case of shorter
separation distance between the pixel electrode and the transparent
capacitor electrode for increasing the capacitance of the pixel
storage capacitor. Any pixel structure and fabricating method with
the features of the present invention are all included in the scope
thereof. Additionally, the pixel structures and fabricating methods
with the features described above can further comprise a pixel
storage capacitor in the pixel structure, and the pixel storage
capacitor is composed of the pixel electrode and a plurality of
transparent capacitor electrodes. The pixel electrode can also be
directly electrically coupled to the active element, and the data
line is electrically coupled to the active element through the
conductive layer.
[0052] In addition, the pixel storage capacitor is not limited to
be composed of one pixel electrode and two transparent capacitor
electrodes. It can comprise more than two capacitor electrodes for
increasing the capacitance thereof in the same area. Furthermore,
by directly coupling, or coupling through the pixel electrode a
portion of the transparent capacitor electrode to the active
element can reduce the number of power lines applied to the pixel
storage capacitor and obtain desired capacitance. Additionally, in
the second preferred embodiment, the pixel electrode is directly
electrically coupled to the active element without the source/drain
conductive layer. This scheme can save a photolithographic process,
and thereby reducing the processing time and cost.
[0053] Accordingly, the pixel structure and fabricating method
thereof have following advantages: (1) The electrical field
shielding layer can effectively reduce the interference between the
pixel electrode and the data line. (2) The electrical field
shielding layer and one of the capacitor electrode can be formed
simultaneously without increasing process steps. (3) Each capacitor
electrode of the pixel storage capacitor is made from a transparent
material, and thereby the aperture ratio of the pixel structure can
be substantially improved. (4) The multi-layer pixel storage
capacitor has the desired capacitance. (5) The pixel structure has
a higher capacitance in the same area, and is adapted for high
resolution liquid crystal displays. (6) The fabricating method
requires a photolithographic process for forming the contact
windows to connect the active element, and the pixel electrode and
the data line, reducing the processing time and cost thereof.
[0054] Although the present invention has been described in terms
of exemplary embodiments, it is not limited thereto. Rather, the
appended claims should be constructed broadly to include other
variants and embodiments of the invention which may be made by
those skilled in the field of this art without departing from the
scope and range of equivalents of the invention.
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