U.S. patent application number 10/970067 was filed with the patent office on 2007-03-22 for a method for fabricating a tuning fork gyroscope.
Invention is credited to Jeffrey T. Borenstein, James H. Connelly, James R. Cousens, Amy E. Duwel, Anthony S. Kourepenis, Christopher M. Lento, William D. Sawyer, Marc S. Weinberg.
Application Number | 20070062283 10/970067 |
Document ID | / |
Family ID | 27357574 |
Filed Date | 2007-03-22 |
United States Patent
Application |
20070062283 |
Kind Code |
A9 |
Weinberg; Marc S. ; et
al. |
March 22, 2007 |
A METHOD FOR FABRICATING A TUNING FORK GYROSCOPE
Abstract
A method for reducing errors in a tuning fork gyroscope includes
determining a first distance, g.sub.t, between an upper sense plate
and a proof mass and a second distance, g.sub.b, between a lower
sense plate and the proof mass. The method further includes
applying a first voltage, V.sub.t, to the upper sense plate and a
second voltage, V.sub.b, to the lower sense plate, wherein the
ratio of the first voltage and the second voltage is a function of
the first distance and the second distance.
Inventors: |
Weinberg; Marc S.; (Needham,
MA) ; Kourepenis; Anthony S.; (Acton, MA) ;
Sawyer; William D.; (Lexington, MA) ; Borenstein;
Jeffrey T.; (Holliston, MA) ; Connelly; James H.;
(Weymouth, MA) ; Duwel; Amy E.; (Cambridge,
MA) ; Lento; Christopher M.; (Boston, MA) ;
Cousens; James R.; (Hanson, MA) |
Correspondence
Address: |
Iandiorio & Teska
260 Bear Hill Road
Waltham
MA
02451-1048
US
|
Prior
Publication: |
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Document Identifier |
Publication Date |
|
US 20050081631 A1 |
April 21, 2005 |
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Family ID: |
27357574 |
Appl. No.: |
10/970067 |
Filed: |
October 21, 2004 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10264887 |
Oct 4, 2002 |
6862934 |
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10970067 |
Oct 21, 2004 |
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10004145 |
Oct 23, 2001 |
6548321 |
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10970067 |
Oct 21, 2004 |
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60327450 |
Oct 5, 2001 |
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60327434 |
Oct 5, 2001 |
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Current U.S.
Class: |
73/504.16 |
Current CPC
Class: |
H01L 2924/3025 20130101;
H01L 21/6835 20130101; H01L 2924/19041 20130101; H01L 2924/30105
20130101; G01C 19/5719 20130101 |
Class at
Publication: |
073/504.16 |
International
Class: |
G01P 15/08 20060101
G01P015/08 |
Claims
1. A method for reducing errors in a tuning fork gyroscope
comprising: determining a first distance, g.sub.t, between an upper
sense plate and a proof mass and a second distance, g.sub.b,
between a lower sense plate and the proof mass; and applying a
first voltage, V.sub.t, to the upper sense plate and a second
voltage, V.sub.b, to the lower sense plate, wherein the ratio of
the first voltage and the second voltage is a function of the first
distance and the second distance.
2. The method for reducing errors of claim 1, wherein
V.sub.t/V.sub.b=g.sub.t.sup.3/g.sub.b.sup.3.
3. The method for reducing errors of claim 1, wherein said first
and second voltages are DC voltages.
4. The method for reducing errors of claim 1, wherein said first
and second voltages are AC carrier excitation voltages.
5. The method for reducing errors of claim 1, wherein said step of
determining said first distance is carried out by measuring the
capacitance between the upper sense plate and the proof mass.
6. The method for reducing errors of claim 1, wherein said step of
determining said second distance is carried out by measuring the
capacitance between the lower sense plate and the proof mass.
7. A method for reducing errors in a tuning fork gyroscope
including first and second proof masses, a left upper sense plate
disposed over the first proof mass, a right upper sense plate
disposed over the second proof mass, a left lower sense plate
disposed under the first proof mass and a right lower sense plate
disposed under the second proof mass, the method comprising:
measuring a first distance, g.sub.tl, between the left upper sense
plate and the first proof mass, measuring a second distance,
g.sub.tr, between the right upper sense plate and the second proof
mass, measuring a third distance, g.sub.bl, between the left lower
sense plate and the first proof mass, and measuring a fourth
distance, g.sub.br, between the right lower sense plate and the
second proof mass; and applying a first voltage, V.sub.tl, to the
left upper sense plate, a second voltage, V.sub.tr, to the right
upper sense plate, a third voltage, V.sub.bl, to the left lower
sense plate, and a fourth voltage, V.sub.br, to the lower right
sense plate, wherein the ratio of V.sub.tl and V.sub.bl is a
function of g.sub.tl and g.sub.bl and the ratio of V.sub.tr and
V.sub.br is a function of g.sub.tr and g.sub.br.
8. The method of claim 7 wherein V.sub.tl is not equal to V.sub.tr
and V.sub.bl is not equal to V.sub.br, and wherein V tl V bl = g tl
3 g bl 3 .times. .times. and .times. .times. V tr V br = g tr 3 g
br 3 . ##EQU12##
9. The method of claim 8 in which the voltages V.sub.tr and
V.sub.bl are of opposite sign than the voltages V.sub.tl and
V.sub.br.
10. A method for fabricating a tuning fork gyroscope with upper and
lower sense plates, the method comprising: providing a silicon
substrate; etching the silicon substrate to provide at least one
recess in the silicon substrate; producing a structure layer having
a predetermined thickness; etching the structure layer to provide
at least one proof mass; applying a metal coating to the silicon
substrate beneath a portion of each proof mass; providing a glass
substrate; etching the glass substrate to provide at least one
recess in the glass substrate; depositing a multimetal layer to the
at least one recess; electrostatically bonding the silicon
substrate to the glass substrate; and etching the silicon substrate
down to the structure layer.
11. The method of claim 10 wherein the proof masses have a
thickness in the range of 5 to 100 .mu.m.
12. The method of claim 10 wherein the multimetal layer is chosen
from the group consisting of Ti/Pt/Au and Ti/Pt.
13. The method of claim 10 in which producing a structure layer
includes diffusing boron onto a surface of the silicon
substrate.
14. The method of claim 13 in which diffusing boron onto a surface
of the silicon substrate includes diffusing boron-geranium silicon
to define structural thickness.
15. The method of claim 10 in which producing a structure layer
includes growing epitaxial silicon with boron onto a surface of the
silicon substrate to define structural thickness.
16. The method of claim 13 in which boron is diffused into a
silicon substrate to define structural thickness.
17. The method of claim 13 including the further step of applying
KOH thinning prior to etching the silicon substrate.
18. The method of claim 13 in which diffusing boron onto a surface
of the silicon substrate includes diffusing silicon-on-insulator to
define structural thickness.
19. The method of claim 10 wherein the silicon substrate includes a
lightly doped layer and a highly doped epitaxial layer.
20. The method of claim 19 wherein the thickness of said highly
doped epitaxial layer is between 5 and 100 .mu.m thick.
21. The method of claim 10 wherein the etching of the silicon
substrate is plasma enhanced ion etching.
22. The method of claim 10 wherein the structure layer is 5 to 100
.mu.m thick.
23. The method of claim 10 wherein the structure layer is 5 to 20
.mu.m thick.
24. The method of claim 10 wherein connecting posts between the
silicon substrate and the glass substrate are defined by reactive
ion etching.
25. The method of claim 10 wherein the recesses in the glass
substrate are approximately 1700 .ANG. deep.
26. The method of claim 10 further including: providing a second
glass substrate; etching said second glass substrate to provide at
least one indentation in the second glass substrate; depositing at
least one metal run in said at least one indentation in the second
glass substrate; cutting a gap between said at least one proof mass
and said second glass substrate; exposing at least one bonding pad;
and bonding said second glass substrate to said structure
layer.
27. The method of claim 10 wherein exposing at least one bonding
pad includes water drilling.
Description
RELATED APPLICATIONS
[0001] This application is a divisional of U.S. patent application
Ser. No. 10/264,887 filed Oct. 4, 2002 entitled TUNING FORK
GYROSCOPE which claims the benefit of and priority to U.S.
Provisional Application Ser. No. 60/327,450 filed Oct. 5, 2001 and
U.S. Provisional Application Ser. No. 60/327,434 filed on Oct. 5,
2001 and which is a Continuation-in-Part of U.S. application Ser.
No. 10/004,145 filed Oct. 23, 2001 entitled METHOD OF ANODICALLY
BONDING A MULTI-LAYER DEVICE WITH A FREE MASS, each of which are
incorporated herein by reference.
FIELD OF THE INVENTION
[0002] This invention relates to a tuning fork gyroscope.
BACKGROUND OF THE INVENTION
[0003] Tuning fork gyroscopes are used to sense angular
displacement in military and commercial (e.g., automotive)
environments. In one design, two silicon proof masses (vibrating
elements) are suspended above a silicon or glass substrate (or a
glass substrate with a silicon layer thereon) and there is a
conductive (e.g., metal) sense plate (electrode) on the substrate
under each proof mass. The inner and outer edges of each proof mass
include combs or electrode fingers. Between the proof masses and
adjacent to the outer edge of each proof mass are drive motors and
sensors with complementary combs or electrode fingers interleaved
with the combs of the two proof masses for oscillating the proof
masses along a drive axis, i.e., in the direction of the plane of
the substrate. Torque and sense transducers are disposed on the
substrate as are conductive leads which interconnect the sense
plates, the drive motors, and the transducers.
[0004] When subjected to angular displacement, one proof mass moves
up and the other proof mass moves down (sense direction). By
applying a differential voltage to the two sense plates below the
masses, the differential displacement of the two proof masses can
be detected as the differential capacitance between the proof
masses or as currents flowing from the suspended members. An output
signal can then be provided which is indicative of the angular
displacement sensed by the gyroscope. See U.S. Pat. No. 5,492,596
incorporated herein by this reference.
[0005] Unfortunately, steady state acceleration or gravitational
inputs in a direction perpendicular to the plane of the substrate
causes both proof masses to move away from the substrate resulting
in a scale factor error since the output signal depends on the
extent of the air gap between the proof masses and the
substrate.
[0006] Moreover, tuning fork gyroscopes exhibit bias errors as a
result of the motor comb drives imparting forces on the proof
masses along the sensing axis. Lift force is caused by the
asymmetry where the bottom of the drive combs faces a ground plane
while the top sees free space. Nominally, both the left and right
outer motors exert forces in opposite directions so that the tuning
fork (antiparallel mode) proof mass motion is excited. The left and
right outer motor combs are mirror images, so that the left and
right motor drives exert parallel drive axis forces, and because of
differential sensing, these lift forces tend to cancel out.
However, the motor drive to sense axis coupling causes two types of
bias errors. First, because of tolerance induced construction
asymmetries, the left and right drive axis forces will not be equal
so that a differential proof mass motion ensues. A second error
ensues because of the contact potential (also known as work
function) between the metal conductors and the silicon parts. The
contact potential adds roughly 0.25 V to the voltage potential
between both sense plates and the proof masses. Thus, the common
mode motion induced by drive to sense force coupling causes a
current flow from the proof mass. This current is interpreted as a
bias error.
[0007] Generally, increasing the voltage applied to the sense
plates increases the scale factor of these instruments. However,
this voltage increase is limited by an effect known as snap down.
The applied voltage causes electrostatic forces, which act as a
negative spring. For the conventional single-sided design, the
forces pull the proof mass toward the sense plate, further
increasing the negative spring. At sufficiently high voltages, the
negative electrostatic spring overcomes the mechanical stiffness
and the proof mass unstably snaps into the sense plates. A voltage
that is a fraction, typically 1/3 to 2/3 of the snap down voltage,
excites the sense plates.
[0008] In general then, the asymmetrical design of the prior art
tuning fork gyroscopes with sense plates disposed only under the
proof masses has been used successfully in many applications. For
additional applications, however, still higher scale factor, lower
bias error, better bias stability, and lower sensitivity to linear
acceleration are required.
BRIEF SUMMARY OF THE INVENTION
[0009] It is therefore an object of this invention to provide a
tuning fork gyroscope which is symmetrical in design and includes
upper sense plates over the proof masses in addition to the prior
art lower sense plates under the proof masses.
[0010] It is a further object of this invention to provide such a
tuning fork gyroscope which reduces the sensitivity of the scale
factor to acceleration.
[0011] It is a further object of this invention to provide such a
tuning fork gyroscope with increased scale factor and improved
sensitivity.
[0012] It is a further object of this invention to provide such a
tuning fork gyroscope with improved bias magnitude and
stability.
[0013] It is a further object of this invention to provide such a
tuning fork gyroscope which is not dependent on precise
manufacturing tolerances and which exhibits improved sensitivity
and lower scale factor variation despite varying proof mass/sense
plate gaps.
[0014] This invention results from the realization that an improved
tuning fork gyroscope can be achieved by adding sense plates above
as well as below the proof masses thus increasing the scale factor
and sensitivity of the gyroscope, and by applying selected voltages
to each of the sense plates depending upon the size of the gaps
between the sense plates and the proof masses, thus making tight
manufacturing tolerances less critical and decreasing the
gyroscope's scale factor sensitivity to acceleration.
[0015] This invention features a tuning fork gyroscope including a
first substrate, a plurality of proof masses including at least
first and second proof masses suspended with respect to the first
substrate, means for oscillating the proof masses along a drive
axis in the direction of the plane of the first substrate; at least
first and second sense plates supported by the first substrate, the
first sense plate disposed under the first proof mass defining a
first nominal gap between the first proof mass and the first sense
plate, the second sense plate disposed under the second proof mass
defining a second nominal gap between the second proof mass and the
second sense plate. A second substrate is spaced from the first
substrate and supports at least third and fourth sense plates. The
third sense plate is disposed over the first proof mass defining a
third nominal gap between the first proof mass and the third sense
plate, and the fourth sense plate is disposed over the second proof
mass defining a fourth nominal gap between the second proof mass
and the fourth sense plate. Means for sensing changes in the
nominal gaps between each sense plate and each proof mass provides
an output signal indicative of the gyroscope's angular rate about
an axis parallel to the substrates.
[0016] In a preferred embodiment, the means for sensing includes a
first voltage, V.sub.b, with +V.sub.b applied to the first sense
plate and -V.sub.b applied to the second sense plate, and a second
voltage, V.sub.t, different from but approximately equal to the
first voltage, applied to the third and fourth sense plates, with
-V.sub.t applied to the third sense plate and +V.sub.t applied to
the fourth sense plate. The first and second nominal gaps may be
equal to g.sub.b and the third and fourth nominal gaps may be equal
to g.sub.t. The ratio of the second and first voltages may be a
function of the ratio of nominal gap g.sub.t and nominal gap
g.sub.b, preferably,
V.sub.t/V.sub.b=g.sub.t.sup.3/g.sub.b.sup.3.
[0017] In another embodiment, the means for sensing may include a
first voltage, V.sub.bl, applied to the first sense plate, a second
voltage, V.sub.br, applied to the second sense plate, a third
voltage, V.sub.tl, applied to the third sense plate and a fourth
voltage, V.sub.tr, applied to the fourth sense plate. The first
nominal gap may be g.sub.bl, the second nominal gap may be
g.sub.br, the third nominal gap may be g.sub.tl, and the fourth
nominal gap may be g.sub.tr. The ratio of the first and third
voltages may be a function of the ratio of the first and third
nominal gaps, and the ratio of the second and third voltages may be
a function of the ratio of the second and fourth nominal gaps.
Preferably, V.sub.tl/V.sub.bl=g.sub.tl.sup.3/g.sub.bl.sup.3 and
V.sub.tr/V.sub.br=g.sub.tr.sup.3/g.sub.br.sup.3 and V.sub.tr and
V.sub.bl are of opposite sign than V.sub.tl and V.sub.br where
V.sub.tr and V.sub.bl are positive voltages and V.sub.tl and
V.sub.br are negative voltages.
[0018] The means for oscillating the proof masses may include motor
combs which may be vertically or horizontally split. The tuning
fork gyroscope may further include guard bands for controlling
out-of-plane sensitivities. The sense plates may be made of metal
or of deposited silicon. The tuning fork gyroscope may further
include a torsion beam connecting an anchor to a base beam. The
torsion beam may be a folded beam, a strain relief chevron beam, or
a crab leg. The tuning fork gyroscope may further include at least
one torque plate. In one example, the ratio of the first and third
voltages is a function of the ratio of the first and third nominal
gaps and the ratio of the second and fourth voltages is a function
of the second and fourth nominal gaps.
[0019] The means for sensing may include applying a voltage to the
proof masses and reading currents that appear on the sense plates.
The means for sensing may include applying a voltage to the proof
masses and reading a weighted summation of output currents on each
of the sense plates for eliminating gyroscope sensitivity to
vertical displacement. I.sub.bl may be the output current that
appears on the first sense plate, I.sub.br may be the output
current that appears on the second sense plate, I.sub.tl may be the
output current that appears on the third sense plate, and I.sub.tr
may be the output current that appears on the fourth sense plate.
The first nominal gap may be g.sub.bl, the second nominal gap may
be g.sub.br, the third nominal gap may be g.sub.tl, and the fourth
nominal gap may be g.sub.tt. The weighted summation of the output
currents on each of the sense plates may be I.sub.sum, where I sum
= I tr - I tl .function. ( g tl g tr ) 3 + I bl .function. ( g bl g
tr ) 3 - I br .function. ( g br g tr ) 3 ##EQU1## and where
I.sub.sum is proportional to the input angular rate and does not
depend on vertical displacement.
[0020] This invention also features a method for reducing errors in
a tuning fork gyroscope including determining a first distance,
g.sub.t, between an upper sense plate and a proof mass and a second
distance, g.sub.b, between a lower sense plate and the proof mass,
and applying a first voltage, V.sub.t, to the upper sense plate and
a second voltage, V.sub.b, to the lower sense plate, wherein the
ratio of the first voltage and the second voltage is a function of
the first distance and the second distance. The first and second
voltages may be DC voltages, or they may be AC carrier excitation
voltages. In one example,
V.sub.t/V.sub.b=g.sub.t.sup.3/g.sub.b.sup.3. The step of
determining the first and second distances may include measuring
the capacitance between the upper sense plate and the proof mass
and the capacitance between the lower sense plate and the proof
mass, respectively.
[0021] This invention also features a method for reducing errors in
a tuning fork gyroscope including first and second proof masses, a
left upper sense plate disposed over the first proof mass, a right
upper sense plate disposed over the second proof mass, a left lower
sense plate disposed under the first proof mass and a right lower
sense plate disposed under the second proof mass, including
measuring a first distance, g.sub.tl, between the left upper sense
plate and the first proof mass, a second distance, g.sub.tr,
between the right upper sense plate and the second proof mass, a
third distance, g.sub.bl, between the left lower sense plate and
the first proof mass, and a fourth distance, g.sub.br, between the
right lower sense plate and the second proof mass; and applying a
first voltage, V.sub.tl, to the left upper sense plate, a second
voltage, V.sub.tr, to the right upper sense plate, a third voltage,
V.sub.bl, to the left lower sense plate, and a fourth voltage,
V.sub.br, to the lower right sense plate, wherein the ratio of
V.sub.tl and V.sub.bl is a function of g.sub.tl and g.sub.bl and
the ratio of V.sub.tr and V.sub.br is a function of g.sub.tr and
g.sub.br. In a preferred embodiment, wherein V.sub.tl is not equal
to V.sub.tr and V.sub.bl is not equal to V br , V tl V bl = g tl 3
g bl 3 .times. .times. and .times. .times. V tr V br = g tr 3 g br
3 . ##EQU2##
[0022] This invention also features a tuning fork gyroscope
including a first substrate, at least a first proof mass suspended
with respect to the first substrate, means for oscillating the
first proof mass along a drive axis in the direction of the plane
of the first substrate, at least a first sense plate supported by
the first substrate, the first sense plate disposed under the first
proof mass defining a first nominal gap between the first proof
mass and the first sense plate, a second substrate spaced from the
first substrate, at least a second sense plate supported by the
second substrate, the second sense plate disposed over the first
proof mass defining a second nominal gap between the first proof
mass and the second sense plate, and means for sensing changes in
the nominal gaps between each sense plate and the first proof mass
and for outputting a signal indicative of angular displacement of
the gyroscope. The means for sensing may include a first voltage,
V.sub.b, applied to the first sense plate and a second voltage,
V.sub.t, different from the first voltage, applied to the second
sense plate. The first nominal gap may be equal to g.sub.b and the
second nominal gap may be equal to g.sub.t. The ratio of the second
voltage V.sub.t and first voltage V.sub.b may be a function of the
ratio of the second nominal gap g.sub.t and the first nominal gap
g.sub.b, for example, V t V b = g t 3 g b 3 . ##EQU3##
[0023] This invention also features a method for fabricating a
tuning fork gyroscope with upper and lower sense plates, including
providing a silicon substrate, etching the silicon substrate to
provide at least one recess in the silicon substrate, producing a
structure layer having a predetermined thickness, etching the
structure layer to provide at least two proof masses, and applying
a metal coating to the silicon substrate beneath a portion of each
proof mass. The method of fabricating further includes providing a
glass substrate, etching the glass substrate to provide at least
one recess in the glass substrate, depositing a multimetal layer to
the at least one recess, depositing a multimetal layer to the at
least one recess, electrostatically bonding the silicon substrate
to the glass substrate, and etching the silicon substrate down to
the structure layer. The method may include the further step of
applying KOH thinning prior to etching the silicon substrate.
Producing the structure layer may include diffusing boron onto a
surface of the silicon substrate or it may include growing
epitaxial silicon with boron onto a surface of the silicon
substrate. Diffusing boron onto a surface of the silicon substrate
may include diffusing boron-geranium silicon or
silicon-on-insulator to define structural thickness. Boron may be
diffused into a silicon substrate to define structural
thickness.
[0024] The proof masses may have a thickness in the range of 5 to
100 .mu.m. The multimetal layer may be chosen from the group
consisting of Ti/Pt/Au and Ti/Pt.
[0025] In one example, the silicon substrate may include a lightly
doped layer and a highly doped epitaxial layer, where the thickness
of the highly doped epitaxial layer is between 5 and 100 .mu.m.
Etching of the silicon substrate may be by plasma enhanced ion
etching. The structure layer may be 5 to 100 .mu.m thick, and is
preferably 5 to 20 .mu.m thick. Connecting posts between the
silicon substrate and the glass substrate may be defined by
reactive ion etching. The recesses in the glass substrate may be
approximately 1700 .ANG. deep.
[0026] The method for fabricating a tuning fork gyroscope with
upper and lower sense plates may further include providing a second
glass substrate, etching the second glass substrate to provide at
least one indentation in the second glass substrate and depositing
at least one metal run in the indentation. The method may further
include cutting a gap between the proof mass and the second glass
substrate, exposing at least one bonding pad, and bonding the
second glass substrate to the structure layer. Exposing the bonding
pad may include water drilling.
[0027] This invention further features a tuning fork gyroscope
including a first substrate, a plurality of proof masses including
at least first and second proof masses suspended with respect to
the first substrate, means for oscillating the proof masses along a
drive axis in the direction of the plane of the first substrate,
and at least first and second sense plates supported by the first
substrate. The first sense plate may be disposed adjacent the first
proof mass defining a first nominal gap between the first proof
mass and the first sense plate, and the second sense plate may be
disposed adjacent the second proof mass defining a second nominal
gap between the second proof mass and the second sense plate. A
second substrate is spaced from the first substrate and supports at
least third and fourth sense plates. The third sense plate may be
disposed adjacent the first proof mass but opposite the first sense
plate, defining a third nominal gap between the first proof mass
and the third sense plate. The fourth sense plate may be disposed
adjacent the second proof mass but opposite the second sense plate
defining a fourth nominal gap between the second proof mass and the
fourth sense plate. Means for sensing changes in the nominal gaps
between each sense plate and each proof mass provides an output
signal indicative of the gyroscope's angular rate about an axis
perpendicular to the substrates.
[0028] In a preferred embodiment, the means for sensing includes a
first voltage, V.sub.b, with +V.sub.b applied to the first sense
plate and -V.sub.b applied to the second sense plate, and a second
voltage, V.sub.t, different from but approximately equal to the
first voltage, applied to the third and fourth sense plates, with
-V.sub.t applied to the third sense plate and +V.sub.t applied to
the fourth sense plate. The first and second nominal gaps may be
equal to g.sub.b and the third and fourth nominal gaps may be equal
to g.sub.t. The ratio of the second V.sub.t and first V.sub.b
voltages is a function of the ratio of the nominal gap g.sub.t and
the nominal gap g.sub.b, preferably V t V b = g t 3 g b 3 .
##EQU4##
[0029] In another embodiment, the means for sensing may include a
first voltage, V.sub.bl, applied to the first sense plate, a second
voltage, V.sub.br, applied to the second sense plate, a third
voltage, V.sub.tl, applied to the third sense plate, and a fourth
voltage, V.sub.tr, applied to the fourth sense plate. The first
nominal gap may be g.sub.bl, the second nominal gap may be
g.sub.br, the third nominal gap may be g.sub.tl and the fourth
nominal gap may be g.sub.tr. The ratio of the first and third
voltages may be a function of the ratio of the first and third
nominal gaps and the ratio of the second and third voltages may be
a function of the ratio of the second and fourth nominal gaps.
Preferably, V tl V bl = g tl 3 g bl 3 .times. .times. and .times.
.times. V tr V br = g tr 3 g br 3 , ##EQU5## and V.sub.tr and
V.sub.bl are of opposite sign than the voltages V.sub.tl and
V.sub.br where V.sub.tr and V.sub.bl are positive voltages and the
voltages V.sub.tl and V.sub.br are negative voltages. There may be
additional sense plates arranged in a comb-like configuration.
[0030] The subject invention, however, in other embodiments, need
not achieve all these objectives and the claims hereof should not
be limited to structures or methods capable of achieving these
objectives.
BRIEF DESCRIPTION OF THE DRAWINGS
[0031] Other objects, features and advantages will occur to those
skilled in the art from the following description of a preferred
embodiment and the accompanying drawings, in which:
[0032] FIG. 1 is a top schematic view of a tuning fork gyroscope
according to the prior art;
[0033] FIG. 2A is a top schematic view of the proof mass structure
and the first or lower substrate of the tuning fork gyroscope in
accordance with the present invention;
[0034] FIG. 2B is a top schematic view of the second or upper
substrate and upper sense plates of the tuning fork gyroscope in
accordance with the present invention;
[0035] FIG. 3 is a cross-sectional schematic view of the tuning
fork gyroscope showing both the upper and lower sense plates in
accordance with the present invention;
[0036] FIG. 4 is a flow chart depicting the primary steps
associated with a method of reducing errors in a tuning fork
gyroscope according to the subject invention;
[0037] FIG. 5 is a flow chart depicting the primary steps of
another method of reducing errors in a tuning fork gyroscope
according to the subject invention;
[0038] FIG. 6A is a top schematic view of the proof mass structure
and the first or lower substrate of a tuning fork gyroscope in
accordance with the present invention having vertical sense
plates;
[0039] FIG. 6B is a top schematic view of the proof mass structure
and the first or lower substrate of a tuning fork gyroscope in
accordance with the present invention having vertical sense plates
arranged as combs;
[0040] FIG. 7 is a cross-sectional schematic view of another
embodiment of a tuning fork gyroscope according to the present
invention having a single proof mass; and
[0041] FIGS. 8A-8G are cross-sectional schematic drawings depicting
the method of manufacturing the tuning fork gyroscope of the
subject invention.
DISCLOSURE OF THE PREFERRED EMBODIMENT
[0042] Prior art tuning fork gyroscope 300, FIG. 1, is also known
in the art as a comb drive gyroscope. Gyroscope 300 includes
vibrating or proof masses 302 and 303. Interleaved fingers 304,
including outer comb drive fingers 306, 307 and inner comb driven
fingers 308, 309 impart vibrational motion to vibrating masses 302,
303. The sensed motion is wired to electronics (not shown) that
generate the driving voltage so that a self-oscillator is realized.
It is known to reverse the role of inner and outer combs. Both
solid and horizontally and vertically split inner combs have been
used although horizontal splits in both the inner and outer combs
are now preferred. Vibrating masses 302, 303 are suspended relative
to lower substrate 301 by one or more anchors 310. Sense plates or
electrodes 312, 313 and torque electrodes 314 are disposed only
beneath a portion of each vibrating mass 302, 303. A plurality of
conductive leads 316 interconnect right torque transducer 318, left
torque transducer 320, left sense transducer 322, right sense
transducer 324 and motor transducer 325 with sense electrodes 312,
313, torque electrodes 314, and left drive motor 326, right drive
motor 328 and center drive motor 330.
[0043] Prior art gyroscope 300 is driven along the x-axis, shown by
vector 332 in FIG. 1, and senses vertical motion (in and out of the
plane of the drawing sheet) caused by Coriolis acceleration.
Typically, an input rate pushes one proof mass 302 up and the other
proof mass 303 down. This differential displacement indicates
angular rate. The Coriolis induced displacement typically occurs at
5 to 30 kHz, the frequency at which the x-axis motion is driven.
The vertical motion of the proof masses 302, 303 is inferred from
measurements of the differential capacitances between the proof
masses 302, 303 and sense plates 312, 313.
[0044] Steady state acceleration or gravitational inputs along the
vertical axis move both proof masses 302, 303 away from the
substrate 301. With sense electrodes 312, 313 located only below
the proof masses 302, 303 as shown in FIG. 1, these steady state
acceleration or gravitational inputs create larger gaps between the
sense electrodes and the proof masses, resulting in a scale factor
error. In other words, the voltage output for a given input rate
depends on the air gap. Depending on the gyroscope's resonant
frequencies and design, the scale factor variation may be 300 to
10,000 ppm/g. Steady state acceleration causes only small offset or
bias errors which do not depend on the input rate because these low
frequency variations in gap are not at the drive frequency. Such
errors are rejected during demodulation. Also, steady state
acceleration causes common displacement of the proof masses while
the desired angular rate inputs cause differential motion. Thus,
gyroscopes with sense electrodes only on one side of the proof
masses--typically below--as shown in FIG. 1, result in scale factor
error.
[0045] Also, gyroscopes with sense electrodes only below the proof
masses result in bias errors caused by forces along the drive axis
332 that result from the motor drive, a principal source of bias
errors in known tuning fork gyroscope designs. Such bias errors can
be significant depending on the construction tolerances to which
the gyroscopes are made. As noted in the Background section above,
both the left and right outer motors exert forces in opposite
directions and lift forces tend to cancel out, but the motor drive
to sense axis coupling still causes two types of bias errors. The
left and right sense axis forces will not be equal so that a
differential proof mass motion ensues, because of tolerance induced
construction asymmetries. A second error ensues because the contact
potential between the metal conductors and the silicon parts causes
common mode vertical motion to be sensed as an erroneous angular
rate.
[0046] Upper sense plate tuning fork gyroscope 10 in accordance
with the present invention, FIGS. 2A and 3, typically includes
first and second proof masses 12, 14 which are suspended with
respect to first substrate 16. Comb drives 18, 20 provide means for
oscillating proof masses 12, 14 along a drive axis, shown by vector
22. First and second sense plates 26, 28 are disposed under first
and second proof masses 12, 14, respectively, and are supported by
substrate 16. Proof masses 12, 14 are suspended above substrate 16
by a support structure 11 that includes drive beams 13, torsion
beams 15, anchors 17, and base beams 19. Inner drive combs 21 and
outer drive combs 23 are interleaved with driven combs 25 to
provide the drive mechanism for the vibrational motion of proof
masses 12, 14. Inner motor combs 21 may be vertically split, as
shown in FIG. 3, or horizontally split (not shown).
[0047] In stark contrast with the prior art, however, third and
fourth sense plates 32, 34, FIGS. 2B and 3 are disposed over proof
masses 12, 14, respectively, and are supported by a second or top
substrate 30. Second or top substrate 30, is disposed on the side
of proof masses 12, 14 opposite first substrate 16. Support or
conducting silicon posts 46 provide the spacing between substrates
16 and 30 and bring upper sense plate excitation from lower
substrate 16. Sense plates 26, 28, 32, 34 are preferably made of
metal, but may also be made of deposited silicon. Torsion beams 15
may include folded beam, strain relief chevron beams, or other
forms known in the art.
[0048] Particularly, first nominal gap 36, FIG. 3, is defined by
first sense plate 26 and first proof mass 12. Similarly, second
nominal gap 38 is defined by second sense plate 28 and second proof
mass 14. Third nominal gap 40 is defined by third sense plate 32
and first proof mass 12, and fourth nominal gap 42 is defined by
fourth sense plate 34 and second proof mass 14.
[0049] Each of the sense plates 26, 28, 32 and 34 are
interconnected to excitation source 44, e.g., a transducer. Sensing
means 45 attached by lead 47 from anchor 17 senses changes in
nominal gaps 36, 38, 40 and 42 and provides an output signal
indicative of the angular displacement of the gyroscope. Support
posts 46 may also be conductive so that the electrical connections
from third and fourth sense plates 32, 34 to the first substrate 16
may be accomplished.
[0050] In operation, excitation source 44 may apply a first
voltage, V.sub.t, with +V.sub.t applied to sense plate 34 and
-V.sub.t applied to sense plate 32, and a second voltage, V.sub.b,
different from but approximately equal to V.sub.t, with +V.sub.b
applied to sense plate 26 and -V.sub.b applied to sense plate 28.
The motion generated current, which flows through the proof masses
12, 14, indicates differential proof mass motion in the sense
direction. If the applied voltage is DC, a single modulation is
required to obtain the estimated angular rate from the proof mass
current. If an AC carrier is applied, two levels of demodulation
are needed.
[0051] The advantages of the increased symmetrical design of tuning
fork gyroscope 10 of this invention include: reducing scale factor
sensitivity to acceleration; increasing the scale factor; reducing
the bias errors; and improving the stability of the gyroscope.
Moreover, sense plates 32, 34 and substrate 30 also act as a dust
cover, protecting proof masses 12, 14 from contamination, and they
shield inner drive combs 21 from stray electric fields emanating
from outer combs 23.
[0052] With upper 32, 34 sense plates and lower 26, 28 sense
plates, the scale factor is more than doubled. This results from
the increased symmetry of the sense plate design. In prior art
gyroscopes such as shown in FIG. 1, increasing the sense plate
voltage results in the proof masses being drawn toward the sense
plates. Because of the increased symmetry of gyroscope 10, FIGS.
2A, 2B and 3, the proof masses do not move as the sense plate
voltages are increased. The upper sense plates increase the total
plate area and result in higher (1.3 times greater) snap down
voltages since the proof mass is not drawn toward the sense plates
as sense voltage is increased. As noted in the Background section
above, increasing the voltage applied to the prior art lower sense
plates alone increases the scale factor of these instruments, but
this voltage is limited by snap down. Thus, for a similar ratio of
sense excitation to snap down voltage, the scale factor of a
double-sided sense plate gyroscope 10 can be 2.6 times that of a
single sided gyroscope 300, FIG. 1.
[0053] With upper and lower sense plates, contact potential, which
increases the proof mass voltage, does not cause a sense axis
signal when the proof masses are moved in a common mode along the
sense axis. Thus, the effect of common mode drive-to-sense force
coupling which causes a current flow from the proof mass, and which
is interpreted as bias error, is reduced.
[0054] In any embodiment, the addition of the upper sense plate as
described herein allows for a unique method for voltage tuning a
tuning fork gyroscope to minimize the sensitivity of the gyroscope
to linear acceleration. Unequal nominal gaps (such as 36, 38, 40
and 42 in FIG. 3) may arise because of the tolerances involved in
the fabrication of silicon chips. Such tolerances are complex
functions of internal stresses, material history, thermal expansion
effects, and processing. One method which has been used previously
to compensate for such unequal gaps has been the use of
accelerometer outputs when available. However, not all tuning fork
gyroscopes have accelerometers included, so such a method of
compensation is not always possible.
[0055] One method of reducing the scale factor's sensitivity to
acceleration, in accordance with this invention, uses the
as-constructed gap distances between the upper and lower sense
plates and the proof masses. When the upper left and upper right
gaps are equal, and the lower left and lower right gaps are equal,
measuring the gaps, step 102, FIG. 4, obtains a first distance,
g.sub.t, between the upper sense plates and the proof masses and a
second distance, g.sub.b, between the lower sense plates and the
proof masses. These as-constructed gaps may be obtained, for
example, by measuring the capacitance between the upper sense
plates and the proof masses and between the lower sense plates and
the proof masses.
[0056] Applying voltages to the upper and lower sense plates, step
104, includes applying a first voltage, V.sub.t, to the upper sense
plate and a second voltage, V.sub.b, to the lower sense plate. The
ratio of the first voltage, V.sub.t, and the second voltage,
V.sub.b, is a function of the first and second distances, g.sub.t
and g.sub.b. Voltages V.sub.t and V.sub.b may be DC voltages. The
invention can be extended to AC carrier excitation where two
modulation steps are used--the first for the carrier frequency and
the second for the drive frequencies. Preferably, in all
embodiments of the present invention having more than one proof
mass, positive voltages are applied to the upper right and lower
left sense plates and negative voltages are applied to the upper
left and lower right sense plates. This arrangement leads to the
proof mass current representing the differential displacement and,
hence, angular rate.
[0057] Nominal gaps 36, 38 may be equal to g.sub.b and nominal gaps
40, 42 may be equal to g.sub.t. To eliminate the scale factor
sensitivity to sense axis linear acceleration, the ratio of
voltages V.sub.t and V.sub.b is preferably a function of the ratio
of the nominal gap g.sub.t and nominal gap g.sub.b. In one example,
where g.sub.t is not equal to g.sub.b, the ratio is:
V.sub.t/V.sub.b=g.sub.t.sup.3/g.sub.b.sup.3. (1)
[0058] The tuning condition does not depend on resonant
frequencies, mass, stiffness, or the amplitudes of drive motion.
The mathematics underlying equation (1) is as follows.
[0059] The tuning fork gyroscope scale factor contains terms
proportional to applied voltage and inverse gap squared: SF
.varies. V t ( g t + .DELTA. .times. .times. y ) 2 + V b ( g b +
.DELTA. .times. .times. y ) 2 ( A ) ##EQU6## where V.sub.t,
V.sub.b=voltages on upper and lower sense plates [0060] g.sub.t,
g.sub.b=upper and lower sense gaps [0061] .DELTA.y=displacement
caused by acceleration.
[0062] The first order Taylor series of (A) is: SF .varies. V t g t
2 + V b g b 2 + 2 .times. .times. .DELTA. .times. .times. y
.function. ( V b g b 3 - V t g t 3 ) ( B ) ##EQU7##
[0063] To zero the first order sensitivity of scale factor to
acceleration, the relative magnitudes of the upper and lower sense
plate voltages must be set per: ( V t V b = g t 3 g b 3 ) ( 1 )
##EQU8##
[0064] Equation (A) also indicates how well the two gaps must be
matched if the upper and lower voltages are identical. Let the
upper and lower constructed gaps be indicated as: g t = g + .DELTA.
.times. .times. g 2 ##EQU9## g b = g - .DELTA. .times. .times. g 2
##EQU9.2##
[0065] The Taylor expansion for the scale factor (B) becomes.
.DELTA. .times. .times. SF / SF .DELTA. .times. .times. y / g = 3
.times. .times. .DELTA. .times. .times. g g ##EQU10##
[0066] When the upper and lower gaps are equal (.DELTA.g=0) and the
upper and lower voltage absolute values are equal, the scale factor
does not change with displacements caused by acceleration
(.DELTA.y). If the proof mass is displaced up 0.1 .mu.m during
construction, .DELTA.g/g=0.21 .mu.m/3 .mu.m and the scale factor
variation is 0.15 .DELTA.y/g. With only one sense plate, the scale
factor variation is 2 .DELTA.y/g.
[0067] In another example, as shown in step 202, FIG. 5, the
distance, g.sub.tl, between the left upper sense plate 32 and the
first proof mass 12 is measured, as is the distance, g.sub.tr,
between the right upper sense plate 34 and the second proof mass
14; the distance, g.sub.bl, between the left lower sense plate 26
and the first proof mass 12; and the distance, g.sub.br, between
the right lower sense plate 28 and the second proof mass 14. In
step 204 voltage V.sub.t is applied to the left upper sense plate,
voltage -V.sub.t to the right upper sense plate; voltage -V.sub.b
is applied to the left lower sense plate; and voltage V.sub.b is
applied to the right lower sense plate, when
g.sub.tl=g.sub.tr=g.sub.t and g.sub.bl=g.sub.br=g.sub.b. In this
instance, the ratio of V.sub.t and V.sub.b is that as shown by
equation (1).
[0068] For the case where g.sub.tl is not equal to g.sub.tr and
g.sub.bl is not equal to g.sub.br, step 206, the voltage applied to
the upper left sense plate is V.sub.tl, the voltage applied to the
upper right sense plate is V.sub.tr, the voltage applied to the
lower left sense plate is V.sub.bl and the voltage applied to the
lower right sense plate is V.sub.br. In this example, excitation
source 44 may apply a different voltage to each sense plate 26, 28,
32 and 34, FIG. 3, i.e., V.sub.bl to sense plate 26, V.sub.br to
sense plate 28, V.sub.tl to sense plate 32 and V.sub.tr to sense
plate 34. In this example, nominal gap 36 is g.sub.bl, nominal gap
38 is g.sub.br, nominal gap 40 is g.sub.tl and nominal gap 42 is
g.sub.tr. The ratio of V.sub.tl and V.sub.bl is preferably a
function of the ratio of g.sub.tl and g.sub.bl, and the ratio of
V.sub.tr and V.sub.br is preferably a function of the ratio of
g.sub.tr and g.sub.br. The preferred ratios are:
V.sub.tl/V.sub.bl=g.sub.tl.sup.3/g.sub.bl.sup.3 (2) and
V.sub.tr/V.sub.br=g.sub.tr.sup.3/g.sub.br.sup.3 (3)
[0069] As noted, in equations (1) through (3) of the present
invention, the cubic relationship zeroes the scale factor
sensitivity to linear acceleration along the sense axis.
[0070] There may be several designs for the arrangement of sense
plates and sense axis drivers, including a single sense plate under
each proof mass. The sense plates may extend under the drive and
sense combs. The sense plates may be rectangular or some other
shape. Guard bands beneath the motor combs may be included to
control out-of-plane sensitivities of the comb drive and to allow
additional configurations for the sense plates. There are various
suspension designs and proof mass shapes, and various metals may be
used for the sense plates and guard bands. The tuning gyroscope of
the present invention may be operated open loop without torque
plates, or with torque electrodes and closed loop control. The
torque plate could be centered within the sense plate, which would
contain an opening for the torque lead. All of these variations and
others, known in the art in conjunction with tuning fork gyroscopes
having only lower sense plates, may also be used with the tuning
scope gyroscope of the present invention.
[0071] Also, it is known that one voltage may be applied to the
proof masses and the currents that appear on the sense plates may
be read. In accordance with the present invention, one voltage may
be applied to the proof masses 12, 14, FIG. 3 and the output
currents I.sub.bl, I.sub.br, I.sub.tl, and I.sub.tr of four sense
plates 26, 28, 32 and 34 may be read by sensing means 45, FIG. 2.
In this example, nominal gap 36 is g.sub.bl, nominal gap 38 is
g.sub.br, nominal gap 40 is g.sub.tl, and nominal gap 42 is
g.sub.tr. The weighted summation of output currents on each of the
sense plates is I.sub.sum where I sum = I tr - I tl .function. ( g
tl g tr ) 3 + I bl .function. ( g bl g tr ) 3 - I br .function. ( g
bl g tr ) 3 . ( 4 ) ##EQU11## I.sub.sum in equation (4) is
proportional to the input angular rate and does not depend on
vertical displacement.
[0072] Also, it will be apparent to those skilled in the art that
the gyroscope of this invention may be used to sense in-plane
rotations, or to sense out-of-plane rotations, with one example of
the latter described in U.S. Pat. No. 6,257,059 B1 to Weinberg et
al. For the tuning fork gyroscope in accordance with this invention
used to sense in-plane motion, as described above and in FIG. 2A,
sense plates 26, 28, 32 and 34 are driven in the same plane as
drive axis 22, and the sense axis for proof masses 12, 14 is into
and out of the page, perpendicular to drive axis 22. For sensing
out-of-plane motion, sense plates 26', 28', 32', 34', FIG. 6A, are
perpendicular to the plane of drive axis 22' and the sense axis
displacement for proof masses 12', 14' is in the direction of
arrows 100, 101. Nominal gaps 36', 38' may be equal to g.sub.bl and
g.sub.br, nominal gaps 40', 42' may be equal to g.sub.tl and
g.sub.tr in equations (2) and (3). In another embodiment, numerous
sense plates, which may number in the hundreds, as shown
schematically in FIG. 6B as 26a', 26b' . . . 26n, 28a', 28b' . . .
28n', 32a', 32b' . . . 32n', and 34a', 34b' . . . 34n', may be
arranged as combs for a larger effective sensing area.
[0073] Tuning fork gyroscope 10a, FIG. 7, in accordance with this
invention may include a single proof mass 50 which is suspended
with respect to first substrate 52. Drive comb 54 provides means
for oscillating proof mass 50 along a drive axis, shown by arrow
56. First sense electrode 58 is disposed under proof mass 50 and is
supported by substrate 52. Second substrate 60 is spaced from first
substrate 52. Second sense electrode 62 is disposed over proof mass
50 and is supported by substrate 60. First and second sense
electrodes 58, 62 are interconnected to excitation source 64.
Sensing means 65 senses changes in nominal gaps 66, 68, defined by
the proof mass and sense plates 58, 62, respectively.
[0074] In operation, excitation source 64 applies a first voltage,
V.sub.b, to sense plate 58 and a second voltage, V.sub.t, to sense
plate 62. Nominal gap 66 may be equal to g.sub.b, and nominal gap
68 may be equal to g.sub.t. The ratio of the second voltage,
V.sub.t, and the first voltage, V.sub.b, may be a function of the
ratio of g.sub.t and g.sub.b. In one example, the ratio may be that
shown in equation (1).
[0075] A typical fabrication process for a single crystal tuning
fork gyroscope in accordance with this invention utilizes the
dissolved wafer process with either reactive (RIE) or plasma
enhanced ion etching and boron diffusion or epitaxy to define the
final structure. The fabrication sequence involves both silicon and
glass processing, FIGS. 8A-8G.
[0076] Processing starts with lightly doped silicon wafer or
substrate 220, FIG. 8A that contains a 5 to 50 micron thick highly
doped epitaxial layer 221. A recess 222 is etched into the silicon.
This recess defines the gap spacing of the conducting plates. The
etching may be accomplished using, for example, plasma enhanced ion
etching.
[0077] The epitaxial layer 221 defines the part thickness. A
structure layer 224, FIG. 8B is etched to provide at least one
proof mass 250 and may be 5 to 100 .mu.m in thickness, with a
thickness of 5 to 20 .mu.m preferred. Silicon-on-insulator or
boron-geranium-silicon may be used for thicker, 10 to 100 .mu.m
thick, proof masses. The features of the structure and of the
connecting posts 225 between the lower and upper plates are defined
by reactive ion etching (RIE), FIG. 8C. The posts 225 also serve as
electrical connections between the plates. By etching past the p++
etch stop, the structures are released. A CF.sub.3Br or SF.sub.6
chemistry may be used for the etching in a parallel plate reactor
or inductively-coupled plasma, which gives straight sidewalls and
high aspect ratios.
[0078] The glass processing involves forming recesses 226, 228,
FIG. 8D, in glass substrate 230. Recesses 226, 228 are
approximately 1700 .ANG. deep. Glass substrate 230 may be a
borosilicate glass, such as Corning 7740. Then multimetal pads 232,
234 are deposited in recesses 226, 228. Multimetal pads 232, 234
may be Ti/Pt/Au or Ti/Pt. Multimetal pads 232, 234 are deposited
such that multimetal pads protrude only 500 .ANG. above the surface
of the glass substrate 230. The multimetal pads 232, 234 form the
capacitor sense plates and the leads to and from the
transducer.
[0079] Silicon substrate 220 and glass substrate 230 are then
electrostatically bonded together, FIG. 8E. The electrostatic
bonding takes place at approximately 335.degree. C. with a
potential of 1000V applied between the glass and silicon. In order
to make electrical contact to the silicon, a metal lead 234 on the
glass is allowed to overlap the silicon rim over a small area 236.
During the electrostatic bonding process, the silicon and glass are
drawn tightly together, a process which insures a low resistance
silicon to metal (such as gold or platinum) contact. KOH thinning
may be applied. The final step is a selective etch in ethylene
diamine pyrocatechol (EDP), which dissolves the silicon substrate
220 and stops on the heavily doped diffused layer 224, FIG. 8F.
[0080] Indentations 239, which form the upper sense gap, are etched
into a second glass wafer 240 or substrate and sense plate metal
242 and metal runs 244 are deposited, FIG. 8G. It will be
understood by those skilled in the art that cutting the gap 239
between proof mass 250 and the substrate 240 may include cutting
into the silicon or cutting into the glass. Second glass wafer 240
is water drilled to expose the bonding pads 246, which may be made
of metal or deposited silicon, on the lower sense plates. The
second glass wafer 240 is electrostatically bonded to the silicon
structure layer. The voltages and temperatures are similar to those
used in bonding the first glass. For the second bond, the proof
masses 250 are supported only by their suspension arms 252 and not
by the bulk silicon wafer. Therefore, additional leads, which are
later removed in dicing, maintain both the sense plates and the
proof masses at one potential. These connections avoid
electrostatic attraction and subsequent sticking.
[0081] It will be understood that the terms upper and lower as used
herein are relative terms only and are not meant to limit the
invention to sense plates that are higher or lower, but would also
include any arrangement of sense plates wherein there are sense
plates on opposite sides of a proof mass.
[0082] Although specific features of the invention are shown in
some drawings and not in others, this is for convenience only as
each feature may be combined with any or all of the other features
in accordance with the invention. The words "including",
"comprising", "having", and "with" as used herein are to be
interpreted broadly and comprehensively and are not limited to any
physical interconnection. Moreover, any embodiments disclosed in
the subject application are not to be taken as the only possible
embodiments.
[0083] Other embodiments will occur to those skilled in the art and
are within the following claims:
[0084] In addition, any amendment presented during the prosecution
of the patent application for this patent is not a disclaimer of
any claim element presented in the application as filed: those
skilled in the art cannot reasonably be expected to draft a claim
that would literally encompass all possible equivalents, many
equivalents will be unforeseeable at the time of the amendment and
are beyond a fair interpretation of what is to be surrendered (if
anything), the rationale underlying the amendment may bear no more
than a tangential relation to many equivalents, and/or there are
many other reasons the applicant can not be expected to describe
certain insubstantial substitutes for any claim element
amended.
* * * * *