U.S. patent application number 11/530254 was filed with the patent office on 2007-01-11 for method to manufacture silicon quantum islands and single-electron devices.
This patent application is currently assigned to TEXAS INSTRUMENTS INCORPORATED. Invention is credited to Gabriel George Barna, Olivier Alain Faynot, Christoph Wasshuber.
Application Number | 20070007596 11/530254 |
Document ID | / |
Family ID | 34678163 |
Filed Date | 2007-01-11 |
United States Patent
Application |
20070007596 |
Kind Code |
A1 |
Wasshuber; Christoph ; et
al. |
January 11, 2007 |
METHOD TO MANUFACTURE SILICON QUANTUM ISLANDS AND SINGLE-ELECTRON
DEVICES
Abstract
The present invention provides a method of manufacturing a
single-electron transistor device (100). The method includes
forming a thinned region (110) in a silicon substrate (105), the
thinned region (110) offset by a non-selected region (115). The
method also includes forming at least one quantum island (145) from
the thinned region (110) by subjecting the thinned region (110) to
an annealing process. The non-selected region (115) is aligned with
the quantum island (145) and tunnel junctions (147) are formed
between the quantum island (145) and the non-selected region (115).
The present invention also includes a single-electron device (200),
and a method of manufacturing an integrated circuit (300) that
includes a single-electron device (305).
Inventors: |
Wasshuber; Christoph;
(Cambridge, MA) ; Barna; Gabriel George;
(Richardson, TX) ; Faynot; Olivier Alain;
(Seyssinet-Pariset, FR) |
Correspondence
Address: |
TEXAS INSTRUMENTS INCORPORATED
P O BOX 655474, M/S 3999
DALLAS
TX
75265
US
|
Assignee: |
TEXAS INSTRUMENTS
INCORPORATED
7839 Churchill Way M.S. 3999
Dallas
TX
|
Family ID: |
34678163 |
Appl. No.: |
11/530254 |
Filed: |
September 8, 2006 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
10741489 |
Dec 19, 2003 |
7122413 |
|
|
11530254 |
Sep 8, 2006 |
|
|
|
Current U.S.
Class: |
257/347 ;
257/E21.404; 257/E29.168; 257/E29.322; 977/937 |
Current CPC
Class: |
B82Y 10/00 20130101;
Y10S 438/962 20130101; H01L 29/66439 20130101; H01L 29/7613
20130101 |
Class at
Publication: |
257/347 ;
257/E29.168 |
International
Class: |
H01L 27/12 20060101
H01L027/12 |
Claims
1. A single-electron device, including: at least one quantum island
composed of silicon on a buried oxide layer of a
silicon-on-insulator substrate; and source and drain electrodes
composed of said silicon and aligned with said quantum island,
wherein said quantum island is located between said source and
drain with tunnel junctions between said source and drain.
2. The single-electron transistor device as recited in claim 1,
wherein said at least one quantum island has a diameter that ranges
about 10 to about 100 nanometers.
3. The single-electron transistor device as recited in claim 1,
wherein said at least one quantum island comprises a plurality of
quantum islands having an average pitch of about 200 nanometers or
less.
4. The single-electron device as recited in claim 1, further
including a gate electrode configured to modulate a tunneling
barrier of said tunnel junctions when a voltage is applied to said
gate electrode.
5. The single-electron transistor device as recited in claim 4,
wherein said gate electrode is composed of said silicon, and said
gate electrode said source and drain and said quantum island are
located in substantially a same plane.
6. The single-electron transistor device as recited in claim 5,
wherein said source and drain and said quantum island are located
in substantially a same plane and said gate electrode is located
substantially out of said plane.
Description
[0001] This application is a divisional of application Ser. No.
10/741,489, filed Dec. 19, 2003.
TECHNICAL FIELD OF THE INVENTION
[0002] The present invention is directed, in general, to the
manufacture of a semiconductor device and, more specifically, to a
method of manufacturing of a silicon quantum island for a
single-electron device.
BACKGROUND OF THE INVENTION
[0003] The continuing demand for increasing computational power and
memory space is driving the miniaturization of integrated circuits.
To sustain progress, miniaturization will soon be driven into the
nanometer regime. Unfortunately, conventional devices cannot be
scaled down straightforwardly because of problems caused by
parasitic resistance, scattering and tunneling, among other
things.
[0004] Single-electronics offer solutions to some of the problems
arising from miniaturization. Single-electronic devices can be made
from readily available materials and can use as little as one
electron to define a logic state. Unlike conventional devices,
single-electron devices show improved characteristics when their
feature size is reduced. This follows from the fact that
single-electron devices are based on quantum mechanical effects
which are more pronounced at smaller dimensions. Single-electron
devices also have low power consumption and therefore there are no
energy restrictions to exploit the high integration densities that
are possible with such devices.
[0005] The practical implementation of single-electronic devices
has yet to be realized, in part because there is no practical
process technology to mass produce nanometer-scale single-electron
device structures. Additionally, no process exists for
manufacturing single-electronic devices that can be readily
combined with present procedures for manufacturing very large scale
integrated circuits (VSLI). One reason for the lack of a practical
process involves problems in the manufacture of quantum islands and
their alignment with other device components.
[0006] Quantum islands are a central structural feature of all
single-electron devices. Those skilled in the art are familiar with
discrete electron tunneling and with other terms used to refer to
the quantum island, such as a quantum dot, a grain, a particle or
node. The term quantum island as used herein is defined as the
structure between contacts, such as a source and drain electrodes.
The structure of the quantum island must facilitate the movement of
discrete electron tunneling from the source to the quantum island
and from the quantum island to the drain.
[0007] Conventional methods for forming quantum islands are either
impractical or incompatible with existing VSLI process technology.
For instance, it is impractical to produce quantum islands in
commercial numbers by scanning tunneling microscopy (STM) or atomic
force microscopy (AFM). It is also problematic to form quantum
islands by using lithographic procedures to select an area of
silicon and then performing repeated cycles of etching and
oxidation to define the island. The pitch between quantum islands
formed in this manner is undesirably large (e.g., center to center
distance of greater than 200 nanometers) because of the limits in
resolution of existing lithographic technology.
[0008] Quantum islands formed by growing germanium, or depositing
gold clusters, on silicon substrates suffer from alignment
problems. That is, once gold or germanium quantum islands are
formed on the substrate, it is very difficult to reproducibly align
electrical contacts with the quantum island. This, in turn, makes
it difficult to produce single-electron devices with reproducible
performance characteristics, and to connect such devices to
traditional device components, such as metal oxide semiconductors
(MOS) devices.
[0009] Accordingly, what is needed in the art is a single-electron
device and method of manufacturing thereof that overcomes the
above-mentioned problems, and in particular allows for the
production of quantum islands that can be easily and reproducibly
aligned with contact electrodes.
SUMMARY OF THE INVENTION
[0010] To address the above-discussed deficiencies of the prior
art, the present invention provides a method of manufacturing a
single-electron transistor device. The method comprises forming a
thinned region in a silicon substrate, the thinned region offset by
a non-selected region. The method also includes forming at least
one quantum island from the thinned region by subjecting the
thinned region to an annealing process. The non-selected region is
aligned with the at least one quantum island and tunnel junctions
are formed between the quantum island and the non-selected
region.
[0011] In another embodiment, the present invention provides a
single-electron device. The device includes at least one quantum
island composed of silicon on a buried oxide layer of a
silicon-on-insulator substrate. The device also comprises source
and drain electrodes composed of the silicon. The source and drain
electrodes are aligned with the quantum island and the quantum
island is located between the source and drain with tunnel
junctions between the source and drain.
[0012] Yet another embodiment of the present invention is a method
of manufacturing an integrated circuit. The method includes forming
a single-electron device as described above, and forming a
metal-oxide semiconductor (MOS) device in the silicon substrate.
The single-electron and MOS devices are interconnected to form an
operative integrated circuit.
[0013] The foregoing has outlined preferred and alternative
features of the present invention so that those of ordinary skill
in the art may better understand the detailed description of the
invention that follows. Additional features of the invention will
be described hereinafter that form the subject of the claims of the
invention. Those skilled in the art should appreciate that they can
readily use the disclosed conception and specific embodiment as a
basis for designing or modifying other structures for carrying out
the same purposes of the present invention. Those skilled in the
art should also realize that such equivalent constructions do not
depart from the scope of the invention.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] The invention is best understood from the following detailed
description when read with the accompanying FIGUREs. It is
emphasized that in accordance with the standard practice in the
semiconductor industry, various features may not be drawn to scale.
In fact, the dimensions of the various features may be arbitrarily
increased or reduced for clarity of discussion. Reference is now
made to the following descriptions taken in conjunction with the
accompanying drawings, in which:
[0015] FIGS. 1A to 1G illustrate sectional and plan views of
selected steps in an exemplary method for fabricating a
single-electron device according to the principles of the present
invention;
[0016] FIG. 2 illustrates a perspective view of an exemplary
single-electron device of the present invention;
[0017] FIGS. 3A and 3B present cross-sectional views of selected
steps in an exemplary method for manufacturing an integrated
circuit of the present invention; and
[0018] FIG. 4 presents an exemplary scanning electron microscopy
image obtained for a test device manufactured according to the
principles of the present invention.
DETAILED DESCRIPTION
[0019] The present invention benefits from the serendipitous
discovery of conditions for reproducibly forming quantum islands
while testing the use of a silicon-on-insulator (SOI) substrate in
the fabrication of high speed and low gate voltage MOS devices such
as Field Effect Transistors (FETs). A silicon layer present in a
commercially available lot of SOI substrate was thinned to a
thickness of about 5 to 10 nanometers via sacrificial oxidation.
After thinning the silicon layer, and prior to forming raised
source/drain structures, via selective epitaxial growth, the
surface of the silicon layer was primed to remove surface oxides
and other contaminants. Priming comprised an annealing process as
further discussed below.
[0020] Surprisingly, priming caused the silicon layer to break up
into agglomerates of silicon. It was realized that the agglomerates
of silicon can advantageously serve as quantum islands in a
single-electron device. This result was unexpected because similar
priming procedures, performed on thicker silicon layers (e.g.,
.about.20 nanometers or greater), have not resulted in agglomerates
of silicon.
[0021] While not limiting the scope of the present invention by
theory, it is believed that the annealing process in combination
with the use of thin silicon, is conducive to weakening or breaking
bonds that adhere the silicon layer to the underlying buried oxide
layer of the SOI substrate. This, in turn, allows the silicon layer
to break up and migrate to form silicon agglomerates on the buried
oxide layer. The silicon agglomerates can serve as quantum islands
in a single electron device. The inherent high surface tension of
silicon contributes to the formation of substantially spherical
quantum islands having a thickness that is greater than the
thickness of the original silicon layer. Moreover, because it has
not previously been recognized that quantum islands can be formed
as described herein, the silicon layer thickness and the components
of the annealing processes constitute a new set of result-effective
variables in the manufacture of single-electron devices.
[0022] The method of forming quantum islands according to the
present invention advantageously results in the quantum islands
being automatically aligned with other portions of the silicon that
are not thinned. As further illustrated below, the term aligned as
used herein, refers to the footprint of the quantum island being
bounded on at least two sides by regions of silicon that were not
selected for thinning. This feature ameliorates the above-mentioned
contact electrode alignment problems encountered with conventional
methods of forming quantum islands.
[0023] One embodiment of the present invention is a method for
manufacturing a single-electron device. FIGS. 1A through 1G
illustrate cross sectional, and in some cases, plan views, at
selected steps in the manufacture of a single-electron device 100
according to the principles of the present invention. Turning first
to FIG. 1A, illustrated is a cross-sectional view of a silicon
substrate 105 after forming a thinned region 110 in the silicon
substrate, the thinned region offset by a non-selected region 115.
In some advantageous embodiments, the thinned region 110 has a
thickness 120 of about 20 nanometers or less. For instance, in some
cases, the thinned region 110 has a thickness 120 of between about
2 and about 20 nanometers.
[0024] Any conventional process can be used to form the thinned
region, although in some preferred embodiments, the thinned region
110 is formed by the sacrificial oxidation of a crystalline silicon
layer 125 of a silicon on insulator (SOI) substrate 105, having a
buried oxide layer 127 and bulk silicon layer 130. Sacrificial
oxidation refers to a widely known process where an oxide layer is
successively grown and removed from the surface of a silicon layer
110 selected for thinning. Any conventional sacrificial oxidation
process can be used to thin the silicon layer 110. As an example,
sacrificial oxidation can comprise a thermal oxidation of silicon
at about 900 to about 1100.degree. C., and the subsequent removal
of the resulting silicon oxide (e.g., SiO.sub.2) formed by an acid
etch, such as an aqueous hydrofluoric acid solution. Of course, one
skilled in the art would understand that other procedures, such as
plasma etching, could be used to thin the silicon layer 110.
[0025] As further illustrated in the plan view of the partially
completed device 100, shown in FIG. 1B, the thinned region has a
footprint 135 that defines where the quantum island is to be
formed. In certain preferred embodiments, the thinned region 110 is
part of a conductive line 140 formed from the silicon substrate
105. The conductive line 140 can be formed from a portion of the
silicon substrate 105, such as the crystalline silicon layer 125,
using conventional patterning and lithographic procedures. Of
course, if desired, the selected thinned region 110 or non-selected
region 115, comprising the conductive line 140, can be doped with
conventional dopants, such as boron or arsenic, to increase their
conductivity.
[0026] With continuing reference to FIG. 1A, FIG. 1C illustrates a
cross-sectional view of the partially completed device 100 after
forming at least one quantum island 145 by subjecting the thinned
region 110, to an annealing process. In other instances, however, a
plurality of quantum islands 145 can be formed from the thinned
region 110. The annealing process is controlled such that the
quantum island 145 is formed between and aligned with the
non-selected region 115. As a result, tunnel junctions 147 are
formed between the quantum island 145 and the non-selected region
115.
[0027] The thickness of the quantum island 120 depends on the
initial thickness of the thinned region 110 and the extent to which
the silicon agglomerates. In certain preferred embodiments, the
thickness 150 of the quantum island 145 is greater than the
thickness 120 of the thinned region 110. For example, in some
instances, the thickness 150 of the quantum island 145 is at least
about 20 percent greater than the thickness 120 of the thinned
region 110. In some preferred embodiments, the quantum island 145
is substantially spherical.
[0028] The annealing process preferably includes a temperature of
between about 600.degree. C. and about 1000.degree. C. In some
embodiments, the annealing process is performed for between about 1
and about 10 minutes. The annealing process also preferably
includes exposing the thinned region 110 to H.sub.2 gas at a
pressure of less than about 100 Torr. In some situations, the
annealing process includes exposing the thinned region 110 to pure
H.sub.2 gas at a pressure of about 20 Torr at a temperature of
about 950.degree. C. for about 2 minutes. In other situations, the
annealing process includes exposing the thinned region 110 to pure
H.sub.2 gas at a pressure of about 3.times.10.sup.-5 Torr at a
temperature of about 700 to about 850.degree. C. for about 2
minutes. In some cases, it is desirable to adjust the concentration
of H.sub.2 gas by further including an inert gas, such as argon or
helium. Adjusting the concentration of H.sub.2 gas in this fashion
moderates the extent of agglomeration of silicon thereby allowing
one to further control this process. In some embodiments suitable
ratios of H.sub.2:inert gas can range from 1:1 to about 1:50.
[0029] In some instances, it is desirable to modify the performance
characteristics of the single-electron device 100 by altering the
energy barrier for electron tunneling through the tunnel junctions
150. As illustrated in the cross-section view presented in FIG. 1D,
this can be done by depositing an insulating material 155 around
the quantum island 145. Suitable insulating material 155 includes
silicon oxide or a high-k dielectric material such as HfO.sub.2or
HfSiON. The insulating material can also advantageously provide
structural support and insulation from subsequently formed device
layers, such as conductive layers, deposited over the quantum
island 145. In other instances, however, the insulating material
155 can simply be air.
[0030] Of course, the performance characteristics of the
single-electron device 100 can also be adjusted by changing the
size of the quantum island 145 once it is formed by the
above-described annealing process. For instance, enlarging the
quantum island 145 can advantageously reduce the size of the tunnel
junctions 147, thereby facilitating electron tunneling. With
continuing reference to FIG. 1C, FIG. 1E illustrates the device 100
after enlarging the quantum island 145 by a selective epitaxial
growth process. In some embodiments, for instance, the adjusted
thickness 160 of the quantum island is between about 10 and about
20 percent larger than the original thickness 150 of the quantum
island 145. Any number of conventional selective epitaxial growth
processes can be used to enlarge the quantum island 145. As an
example, selective epitaxial growth can be achieved via
commercially available tools using chemistries such as
Si.sub.2H.sub.6/Cl2.
[0031] As the plan view in FIG. 1F illustrates, in some cases it is
advantageous to form a plurality of conductive lines 140, 165 and
for the footprint of the quantum island 135 to be defined by an
intersection of the conductive lines 140, 165. In such embodiments,
at least one of the conductive line 165 is a gate electrode while
another conductive line 140 serves as a source and drain electrode
of a single-electron transistor device 100.
[0032] As further illustrated in FIG. 1G, if desired, the
non-selected region 115 of the conductive lines 140, 165 can be
further patterned before or after forming the quantum island 145 to
form a gate electrode structure 170 or electrical contacts, such as
source and drain electrodes, 175, 177. Forming a side gate
electrode structure, such as shown in FIG. 1G, can be advantageous
because the gate electrode 170 and source and drain electrodes 175,
177 are all formed in a single lithographic step. Moreover, because
these structures 170, 175, 177 bound at least two sides of the
footprint of the quantum island 135, they are automatically aligned
with the quantum island 145. Alignment is automatic because the
quantum islands 145 and these structures 170, 175, 177 are formed
from the same substrate 105, as explained above. Of course, other
gate structures, such as dual-gate and tri-gate structures, also
fall within the scope of the present invention.
[0033] In some embodiments, for example, where a device with a
smaller area is desired, the gate electrode 170 can be formed above
or below the quantum island 145. While this particular embodiment
is not shown, it is readily apparent to those skilled in the art
how to fabricate the device 100 using conventional procedures and
the method disclosed herein. In some instances, an overlying or
underlying gate can advantageously provide more uniform control of
tunneling through the tunnel junctions. This can be the case when a
two-dimensional array of quantum islands is formed, because the
field generated by the overlying or underlying gate is more
uniformly distributed around the quantum islands than a side gate.
Alternatively, in embodiments where there is a single quantum
island or a one-dimensional column of quantum islands, a side gate
electrode 170 can provide a uniform field around the quantum island
or islands 145.
[0034] Additionally, in some embodiments, the gate electrode 170 is
moveable under a voltage bias. As explained in U.S. patent
application Ser. No. 10/448,673, filed May 30, 2003, and
incorporated by reference herein in its totality, the Coulomb
oscillation frequency of the drain current of the single-electron
device 100 can be modulated by changing the gate capacitance of the
device through movement of the gate 170. Changing the Coulomb
oscillation frequency, in turn, allows the single-electron device
100 to store and transmit logic states.
[0035] Another embodiment of the present invention is a
single-electron device. Any of the above-described methods can be
used to manufacture a single-electron device 200, such as the
exemplary transistor device shown in the perspective drawing of
FIG. 2. One skilled in the art would understand that similar
procedures could be used to form a variety of single-electron
devices 200 that also fall within the scope of the present
invention. As an example, single-electron diode devices are also
within the scope of the present invention.
[0036] As illustrated in FIG. 2, the single-electron device 200
includes at least one quantum island 205 composed of silicon 210 on
a buried oxide layer 215 on a bulk silicon layer 217 of a
silicon-on-insulator substrate 220. The device 200 also includes
source and drain electrodes 225, 227 also composed of the silicon
210, and aligned with the quantum island 205. The quantum island
205 is located between the source and drain electrodes 225, 227,
with tunnel junctions 230 between the source and drain electrodes
225, 227.
[0037] As further illustrated in FIG. 2, in preferred embodiments
of the device 200, the quantum island 205 has a diameter ranging
from about 10 to about 100 nanometers. When there is a plurality of
quantum islands 205, the average diameter is in the above-cited
range. In other preferred embodiments, the plurality of quantum
islands 205 have an average pitch 240 of about 200 nanometers or
less, and more preferably less than about 100 nanometers, and even
more preferably, from about 5 to 10 nanometers. As a consequence of
the above-described annealing process, in some advantageous
embodiments, the plurality of quantum islands 205 are uniformly
spaced in a two-dimensional array or one-dimensional column. In
still other preferred embodiments, the tunnel junctions 230 include
a gap 245 between the source and drain electrodes 225, 227, and the
quantum island 205, the gap 245 ranging from about 1 to about 1000
nanometers.
[0038] As also illustrated in FIG. 2, the single-electron device
200 can further include a gate electrode 250. The gate electrode
250 is configured to modulate a tunneling barrier of the tunnel
junctions 230 when a voltage is applied to the gate electrode 250.
In some preferred embodiments, the gate electrode 250 is also
composed of the silicon 210 used to form the quantum island 205 and
source and drain electrodes 225, 227.
[0039] In some embodiments, it is advantageous for a number of the
component parts of the single-electron transistor device to be in
substantially the same plane. For example, it is advantageous for
the quantum island 205, source and drain electrodes 225, 227 and
gate electrode 250 to all be located in substantially a same plane.
In alternative embodiments, as noted above, the quantum island 205
and source and drain electrode 225, 227 are located in
substantially a same plane and gate electrode 250 is located
substantially out of the plane. In such instances, the gate
electrode 250 can comprise silicon 210, or other electrically
conductive material, such as aluminum.
[0040] Yet another embodiment of the present invention is a method
of manufacturing an integrated circuit. FIGS. 3A and 3B present
cross-sectional views of selected steps in an exemplary method for
manufacturing an integrated circuit 300 according to the principles
of the present invention.
[0041] Turning first to FIG. 3A, illustrated is a selected portion
of the partial completed integrated circuit 300 after forming a
single-electron device 305. The single-electron device 305 can be
manufactured by any of the previously discussed embodiments. For
instance, as illustrated in FIG. 3A, the single-electron device 305
can be a transistor that includes at least one quantum island 310
formed by subjecting a thinned region of a silicon substrate 315 to
an annealing process as described above. As discussed above and
illustrated in FIGS. 1A-1G, non-selected regions of the silicon
substrate 315 can be further patterned to formed source and drain
electrodes 320, 325 that are aligned with the quantum island or
islands 310. As further illustrated in FIG. 3A, the single-electron
device 305 can further include a gate electrode 330 formed adjacent
to the quantum island 310. For example, as illustrated, the gate
electrode 330 can be formed over the quantum island 310, using
conventional procedures to deposit and pattern a metal layer.
[0042] FIG. 3A also illustrates the partially completed integrated
circuit after formed a MOS device 335 in the silicon substrate 315.
In some preferred embodiments, the MOS device 335 is a metal-oxide
semiconductor field-effect transistor (MOSFET) formed in the
crystalline silicon layer 340 of a SOI substrate 315. In some
instances, it is desirable for a channel 337 of the MOS device to
comprise a portion of crystalline silicon layer 340. In some
preferred embodiments, the MOS device includes one or more
transistors, such as PMOS and NMOS transistors, to form a CMOS
device.
[0043] Some advantageous embodiments of the MOSFET have raised
source and drain electrodes 345, 347, formed via selective
epitaxial growth similar to that described above. As well known by
those skilled in the art, raised source and drain electrodes can
advantageously reduce electrical resistance in the source drain
regions and thereby improve device 335 performance. As further
illustrated in FIG. 3A, in some cases device isolation can be
achieved by removing portions of the crystalline silicon layer 340
to form an opening 350 and thereby expose portions of the buried
oxide layer 355 of an SOI substrate 315.
[0044] Turning now to FIG. 3B, shown is the partially completed
integrated circuit 300 after interconnecting the MOS device 335 to
the single-electron device 305 to form an operative integrated
circuit 300. As illustrated in FIG. 3B, interconnect metals lines
360 in or on one or more dielectric layers 365, 370, located over
single-electron 305 and MOS devices 335 can interconnect the two
devices 305, 335 to each other, or other components in the
integrated circuit 300. In some preferred embodiments, for
instance, the MOSFET 335 is connected to the single-electron device
305 so as to amplify a drain current from the single-electron
device 305. One skilled in the art would understand how the
single-electron 305 and MOS devices 335 could be configured to
provide memory or logic device components in the integrated circuit
300.
[0045] Having described the present invention, it is considered
that the same will become even more apparent by reference to the
following examples. It should be appreciated that the examples are
presented solely for the purpose of illustration and should not be
construed as limiting the invention. For instance, although the
experiments described below may be carried out in laboratory
setting, one of ordinary skill in the art could adjust specific
numbers, dimensions and quantities up to appropriate values for a
full scale plant.
EXAMPLE
[0046] Selected data to illustrating the fabrication and evaluation
of a test device are presented to demonstrate various methods and
beneficial features of the invention.
[0047] A commercial sample of SOI substrate (standard UNIBOND.TM.
from Silicon On Insulator Technologies, Bernin, France), having
crystalline silicon layer average thickness of .about.500 Angstrom
and buried oxide layer average thickness of .about.4000 Angstrom
thick layer, was used as the starting substrate. A selected portion
of the crystalline silicon layer was isolated and thinned to a
thickness of 50 to 100 Angstroms via sacrificial oxidation. This
was achieved by performing a blanket sacrificial oxidation of the
silicon to reduce its thickness, standard processing to form the
gate and sidewalls, and then followed by selective epitaxial growth
(SEG) to define the source drain electrodes. As part of the SEG,
SOI wafers were subjected to a high-temperature pre-SEG clean
process that caused the thinned silicon to agglomerate into the
spheres. The pre-SEG clean comprised a .about.950.degree. C. anneal
in a pure H.sub.2 atmosphere at .about.20 Torr for .about.2
minutes.
[0048] FIG. 4 presents an exemplary scanning electron microscopy
image obtained for one test device manufactured as described above.
As shown in the figure, the thinned silicon layer breaks up and
agglomerates to form islands of silicon on the buried oxide layer.
As further illustrated in FIG. 4, the islands of silicon formed a
regular geometric pattern and having diameters ranging from about
30 to 80 nanometers and pitch of about 100 nanometers.
[0049] Although the present invention has been described in detail,
one of ordinary skill in the art should understand that they can
make various changes, substitutions and alterations herein without
departing from the scope of the invention.
* * * * *