U.S. patent application number 11/516103 was filed with the patent office on 2007-01-04 for transporting apparatus.
This patent application is currently assigned to DAIFUKU CO., LTD.. Invention is credited to Yoshiteru Ikehata, Yuichi Morimoto, Takayoshi Ono.
Application Number | 20070003400 11/516103 |
Document ID | / |
Family ID | 34137909 |
Filed Date | 2007-01-04 |
United States Patent
Application |
20070003400 |
Kind Code |
A1 |
Ikehata; Yoshiteru ; et
al. |
January 4, 2007 |
Transporting apparatus
Abstract
It is an object of the invention to provide an apparatus for
transporting a transported object in a transporting direction as
the transported object is supported by air, the apparatus having a
plurality of transporting units. A specific transporting unit of
the plurality of transporting units is controlled based on the
transporting state of at least one other transporting unit. Thus,
it is possible to reduce the number of problems that may occur
during transporting.
Inventors: |
Ikehata; Yoshiteru;
(Gamo-gun, JP) ; Ono; Takayoshi; (Gamo-gun,
JP) ; Morimoto; Yuichi; (Gamo-gun, JP) |
Correspondence
Address: |
THE WEBB LAW FIRM, P.C.
700 KOPPERS BUILDING
436 SEVENTH AVENUE
PITTSBURGH
PA
15219
US
|
Assignee: |
DAIFUKU CO., LTD.
Nishiyodogawa-ku
JP
|
Family ID: |
34137909 |
Appl. No.: |
11/516103 |
Filed: |
September 6, 2006 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
10899542 |
Jul 27, 2004 |
|
|
|
11516103 |
Sep 6, 2006 |
|
|
|
Current U.S.
Class: |
414/676 |
Current CPC
Class: |
B65G 49/063 20130101;
B65G 51/03 20130101; B65G 49/065 20130101; B65G 2249/045 20130101;
B65G 2249/02 20130101 |
Class at
Publication: |
414/676 |
International
Class: |
B65G 35/00 20060101
B65G035/00 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 29, 2003 |
JP |
2003-281677 |
Jul 29, 2003 |
JP |
2003-281678 |
Claims
1-21. (canceled)
22. A transporting apparatus, comprising: a) a plurality of
transporting units aligned in a transporting direction, each
transporting unit comprising: i) a blower fan; ii) a filter
disposed in the blowing direction of the blower fan; iii) a porous
plate provided on the side opposite the blower fan with respect to
the filter; iv) drive rollers provided at a distance from the
porous plate; and v) a motor for driving the drive rollers; and b)
a controller for sending control signals to the plurality of
transporting units; wherein the controller is also capable of
receiving information relating to a transporting state of at least
one transporting unit of the plurality of the transporting units,
and based on that transporting state, sends a control signal to
another one of the plurality of transporting units.
23. The transporting apparatus according to claim 22, wherein the
one transporting unit and said another one of the plurality of
transporting units are a transporting unit on the downstream side
and an adjacent transporting unit on the upstream side in the
transporting direction respectively; and wherein the controller
allows the upstream side transporting unit to start operation if
the downstream side transporting unit is in an operating state, and
prohibits the start of operation of the upstream side transporting
unit if the downstream side transporting unit is in a non-operating
state.
24. The transporting apparatus according to claim 23, further
comprising: manually operated input device for ordering the start
of operation for each of the plurality of transporting units;
wherein the controller, if the downstream side transporting unit is
in the operating state, starts operation of the upstream side
transporting unit when the input device orders the start of
operation of the upstream side transporting unit, and if the
downstream side transporting unit is in the non-operating state,
prohibits the start of operation of the upstream side transporting
unit even if the input device orders the start of operation of the
upstream side transporting unit.
25. The transporting apparatus according to claim 22, wherein the
one transporting unit and said another one of the plurality of
transporting units are a transporting unit on the upstream side and
a transporting unit on the downstream side in the transporting
direction respectively; and wherein the controller sends a control
signal to the blower fan of the downstream side transporting unit
such that the transported object can be contactlessly supported by
the blower fan of the downstream side transporting unit before a
transfer timing at which the transported object on the upstream
side transporting unit is transferred to the downstream side
transporting unit.
26. The transporting apparatus according to claim 25, wherein a
transporting unit further upstream than the upstream side
transporting unit is provided with a sensor for detecting
transported objects, and the controller moves the blower fan of the
downstream side transporting unit into a state where the blower fan
can contactlessly support the transported object, when the sensor
detects the transported object.
27. The transporting apparatus according to claim 25, wherein the
blower fans are capable of operating at a supporting operation
state defined by a supporting supplying amount for contactlessly
supporting the transported object, and a weak air state defined by
a small supplying amount that is smaller than the supporting
supplying amount; and wherein the controller changes the blower fan
of the downstream side transporting unit from the weak air state,
which is the state after operation is started, to the supporting
operation state in advance of the transfer timing.
Description
BACKGROUND OF THE INVENTION
[0001] The present invention relates to transporting apparatuses
provided with a plurality of transporting means aligned in the
transporting direction, each transporting means being provided with
air-supplying-type support means for blowing air toward a lower
surface portion of a transported object to contactlessly support
the transported object and drive force application means for
applying a drive force in the transporting direction to the
transported object that is supported by air-supplying-type support
means, and control means for controlling operation of the plurality
of transporting means.
[0002] Such transporting apparatuses transport transported objects
such as glass substrates for liquid crystal displays with the
plurality of transporting means aligned in the transporting
direction. In each transporting means, the drive force application
means applies a drive force to the transported object, which is
contactlessly supported by the air-supplying-type support means, to
for example support a section of the transported object, such as
both or one end of the transported object, in a contacting manner,
thereby transporting the transported object by transferring it from
the transporting means positioned on the upstream side in the
transporting direction to the transporting means positioned on the
downstream side in the transporting direction.
[0003] Among conventional transporting apparatuses, there are those
in which the orientation in which a transported object is
transported is horizontal or substantially horizontal, and those in
which the transported object is transported in a vertical or near
vertical orientation. Each will be explained next.
[0004] A conventional transporting apparatuses in which transported
objects are transported in a horizontal or substantially horizontal
orientation is described first. The air-supplying-type support
means supplies air toward an intermediate portion of the lower
surface portion between both end portions of the transported object
that is transported in a horizontal or substantially horizontal
orientation. The drive force application means has drive rotors for
applying a drive force to support, in a contacting manner, both
ends of a transported object that is transported in a horizontal or
substantially horizontal orientation.
[0005] Also, a plurality of transporting means provided with such
air-supplying-type support means and drive force application means
are arranged adjacent to one another in the transporting direction,
and by the control means starting the operation of the transporting
means in accordance with an order to start operation, for example,
a transported object that is transported in a horizontal or
substantially horizontal orientation is transferred to the
transporting means adjacent downstream in the transporting
direction (for example, see JP 2002-321820A).
[0006] A conventional transporting apparatuses for transporting a
transported object in a vertical or near vertical orientation is
described next. The air-supplying-type support means is configured
so as to blow air toward an intermediate portion between both end
portions of the lower surface portion of the transported object,
which is transported in a vertical or near vertical orientation,
and the drive force application means has drive rotors for applying
a drive force to support, in a contacting manner, a lower end
portion of a transported object that is transported in a vertical
or substantially vertical orientation.
[0007] Also, a plurality of transporting means provided with such
air-supplying-type support means and drive-force application means
are arranged adjacent to one another in the transporting direction,
and by the control means starting operation of the transporting
means through an order to start operation, for example, a
transported object in a vertical or near vertical orientation is
transferred to the transporting means adjacent downstream in the
transporting direction (for example, see JP 2002-308423A).
[0008] In the transporting apparatuses of the two documents
mentioned above, since the control means simply starts operation of
the transporting means through an operation start command, for
example, a specific transporting means is controlled without
consideration of the state of the other transporting means, and
thus there is a risk that problems may occur.
[0009] For example, in the conventional transporting apparatuses,
even if a transporting means adjacent on the downstream side in the
transporting direction cannot contactlessly support and carry the
transported object that it is to be transferred to it, there is a
possibility that the transporting means that is positioned upstream
in the transporting direction will start operation. Consequently,
there was a risk that the transported object could not be
contactlessly supported and transported, resulting in the
transported object coming into contact with the transporting means,
for example, and being damaged.
[0010] Also, in conventional transporting apparatuses, the control
means simply activates the air-supplying-type support means and the
drive force application means of the transporting means to which
the object is to be transferred and of the transporting means that
is further upstream in the transporting direction to the
transporting means to which the object is to be transferred, and
thus there is a risk that the transporting means to which the
object is to be transferred will not be capable of contactlessly
supporting the object to be transferred and the transported object
will come into contact with, for example, the transporting means to
which it is to be transferred and be damaged. That is to say, after
the air-supplying-type support means starts operating, the amount
of air that is blown toward the lower surface portion of the
transported object is not immediately an amount that is capable of
contactlessly supporting the transported object, and rather it
takes time from the start of operation until the transported object
can be contactlessly supported. Consequently, there is the problem
that the time between when the air-supplying-type support means
starts operating until when the transported object is transferred
is short, leading to instances in which the air-supplying-type
support means cannot contactlessly support the transported
object.
SUMMARY OF THE INVENTION
[0011] The present invention was arrived at in light of these
problems, and it is an object thereof to provide a transporting
apparatus that can solve the foregoing problems by controlling a
specific transporting means of the plurality of transporting means
in accordance with the transporting state of another transporting
means.
[0012] In order to achieve the foregoing objects, a transporting
apparatus according to the present invention is provided with a
plurality of transporting means aligned in a transporting
direction, each transporting means comprising air-supplying-type
support means for blowing air toward a lower surface portion of a
transported object to contactlessly support the transported object
and drive force application means for applying a drive force in the
transporting direction to the transported object that is supported
by the air-supplying-type support means, and control means for
controlling operation of the plurality of transporting means. The
control means, based on a transporting state of at least one of the
transporting means of the plurality of transporting means, controls
the state of a separate transporting means of the plurality of
transporting means.
[0013] Embodiments of the present invention are described below in
reference to the drawings, but the present invention is defined by
the appended claims and is not limited to these embodiments.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] FIG. 1 is a perspective view in which a portion of a
transporting apparatus according to the first embodiment has been
omitted;
[0015] FIG. 2 is a vertical front sectional view of the
transporting apparatus according to the first embodiment;
[0016] FIG. 3 is a partially magnified vertical front sectional
view of the transporting apparatus according to the first
embodiment;
[0017] FIG. 4 is a vertical section lateral view of the
transporting apparatus according to the first embodiment;
[0018] FIG. 5 is a perspective view of a transporting unit
according to the first embodiment;
[0019] FIG. 6 is a plan view of the transporting unit according to
the first embodiment;
[0020] FIG. 7 is a vertical section lateral view of the
transporting apparatus, showing a drive force application means,
according to the first embodiment;
[0021] FIG. 8 is a vertical section front view showing the primary
components of the drive force application means according to the
first embodiment;
[0022] FIG. 9 is a vertical section lateral view showing the
primary components of the drive force application means according
to the first embodiment;
[0023] FIG. 10 is a control block diagram of the transporting
apparatus according to the first embodiment;
[0024] FIG. 11 is a diagram that schematically shows the
transporting apparatus according to the first embodiment;
[0025] FIG. 12 is a flowchart of a manual operation according to
the first embodiment;
[0026] FIG. 13 is a diagram that schematically shows the
transporting apparatus according to the second embodiment;
[0027] FIG. 14 is a flowchart of the transporting apparatus
according to the second embodiment;
[0028] FIG. 15 is a perspective view of a transporting apparatus
according to the third embodiment, in which a portion thereof has
been omitted;
[0029] FIG. 16 is a partially omitted lateral view of the
transporting apparatus according to the third embodiment; and
[0030] FIG. 17 is a flow chart of a transporting apparatus
according to a separate embodiment.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
[0031] A transporting apparatus according to the present invention
is described with reference to the drawings. In the following
embodiments, a glass substrate is used as an example of the
transported object. However, a transported object is not limited to
a glass substrate. It is possible to combine the features of the
plurality of embodiments discussed below, provided there are no
contradictions, and each of such combinations may be considered as
an aspect of the present invention.
First Embodiment
[0032] As shown in FIGS. 1 to 3 and FIG. 10, the transporting
apparatus is for transporting plate-shaped work pieces, such as
glass substrates for liquid crystal display, as transported
objects, and is provided with a plurality of transporting units 1
(transporting means), a control member H serving as control means
for controlling operation of the plurality of transporting units 1,
and a manually operated command member S for sending control
information to the control member H.
[0033] Each transporting unit (transporting means) 1 carries a
glass substrate 2 in a horizontal or substantially horizontal
orientation.
[0034] As shown in FIGS. 1 to 3, the transporting units 1 are
provided lined up adjacent to one another in the transporting
direction of the glass substrate 2, and the glass substrate 2 is
carried by transferring it from the transporting unit 1 positioned
upstream in the transporting direction to the transporting unit 1
positioned downstream in the transporting direction.
[0035] Also, the transporting units 1 are disposed in two stages in
the vertical direction, and the transporting directions of the
upper transporting unit 1 and the lower transporting unit 1 can be
opposite directions or can be the same direction. For example, if
the transporting directions of the upper transporting unit 1 and
the lower transporting unit 1 are opposite, then it is possible to
return a glass substrate 2 that has been transported by the upper
transporting unit 1 over the lower transporting unit 1 so as to
perform the same process on the glass substrate 2 or to return
defective glass substrates to the source.
[0036] As shown in FIGS. 1 to 4, the transporting units 1 are
provided with air-supplying-type support means 3 that supplies air
toward a lower surface portion of the glass substrate 2 so as to
contactlessly support the glass substrate 2, and drive force
application means 4 that applies a drive force in the transporting
direction to the glass substrate 2 that is supported by the
air-supplying-type support means 3.
[0037] Also, as shown in FIG. 11, the transporting unit 1 is
provided with a sensor T as detection means for detecting whether
the glass substrate 2 is on the transporting route thereof. The
sensor T detects the presence of the glass substrate 2 on the
transporting route if light emitted by light-emitting member is not
received by a light-receiving member, and it detects that the glass
substrate 2 is not on the transporting route when light from the
light-emitting member is received by the light-receiving member.
Furthermore, the number and installation position, for example, of
the sensor T can be suitably changed, and any sensor T capable of
detecting whether or not the glass substrate 2 on the transporting
route can be employed.
[0038] As shown in FIGS. 2 to 4, the air-supplying-type support
means 3 is provided with a dust removal filter 5 for removing dust,
and a blower fan 6 for blowing purified air toward the lower
surface portion of the glass substrate 2 through the dust removal
filter 5. The air-supplying-type support means 3 is made of a
plurality of fan filter units 7, each incorporating a single dust
removal filter 5 and a single blower fan 6 in an integral unit, and
a porous plate-shaped air rectifying plate 8 for rectifying the
flow of the purified air blown toward the lower surface portion of
the glass substrate 2 that is provided above the plurality of fan
filter units 7. In this context, "rectifying" means to uniformly
spread the supplied air over a wide area. The dust filter 5, the
blower fan 6 and the air rectifying plate 8 are supported on a
housing. More specifically, as shown in FIG. 5 and FIG. 6, one fan
filter unit 7 each is arranged on the left and right sides with a
spacing between them at an intermediate position in the width
direction, which is perpendicular to the transporting direction of
the glass substrate 2, and moreover, three fan filter units 7 are
provided in a line, with a spacing between them in the transporting
direction of the glass substrate 2, for example, for a total of six
fan filter units 7.
[0039] Thus, a single transporting unit 1 is provided with a
air-supplying-type support means 3 made of six fan filter units 7,
and a single air rectifying plate 8 is disposed such that it covers
the area above the six fan filter units 7.
[0040] As shown in FIG. 2 and FIG. 3, the blower fans 6 are
configured such that they suck in air from below the spot where
they have been arranged and blow that air toward the dust removal
filters 5 positioned above them.
[0041] In this manner, the air-supplying-type support means 3 is
configured such that it supplies purified air that has passed
through the dust removal filter 5 and been rectified by the air
rectifying plate 8 toward an intermediate portion between both end
portions in the width direction, which is perpendicular to the
transporting direction of the glass substrate 2, thereby
contactlessly supporting the intermediate portion in the width
direction of the glass substrate 2.
[0042] In the transporting unit 1, as described in FIG. 2 and FIGS.
4 to 6, ventilation paths 9 for discharging the purified air
downward are formed at intermediate positions in the width
direction, which is perpendicular to the transporting direction of
the glass substrate 2, and at positions separated by a spacing in
the center in the transporting direction of the glass substrate 2.
More specifically, because gaps are provided between the six fan
filter units 7, these gaps are employed to form ventilation paths 9
extending in the thickness direction of the fan filter units 7,
that are in communication with one another. Aperture portions are
formed in the air rectifying plate 8 at positions above the
ventilation paths 9, and the ventilation paths 9 guide purified air
that has been supplied through the aperture portions downward and
discharge the purified air downward. In this way, by providing the
ventilation paths 9 in intermediate positions in the width
direction, which is perpendicular to the transporting direction of
the glass substrate 2, and in positions separated by a spacing in
the center in the transporting direction of the glass substrate 2,
the purified air does not accumulate at intermediate positions in
the width direction of the glass substrate 2 or in the center in
the transporting direction and is discharged downward through the
ventilation paths 9. And, because the purified air does not
accumulate, the glass substrates 2 can be transported in a
horizontal or substantially horizontal orientation without being
bent upward.
[0043] The drive force application means 3, as shown in FIG. 2 and
FIG. 7, is made of drive rollers 14 for supporting both ends of the
glass substrate 2 in the width direction in a contacting manner,
and an electric motor 16 for driving the drive rollers 14 via power
transmission shafts 15. FIG. 7 is a vertical section of a lateral
view of the transporting unit 1 showing one side of the drive force
application means 3 provided as a left and right pair.
[0044] More specifically, a plurality of drive rollers 14 are
provided with a spacing between them in the transporting direction
of the glass substrate 2, and the power transmission shafts 15 are
lined up in the transporting direction and connectively linked by a
plurality of couplings 17. The electric motor 16 is provided such
that its output gear 16a meshes with a spur gear 18a provided on
the power transmission shafts 15, and the transmission shafts 15
are rotatively driven by the action of the electric motor 16.
Output shafts 19 are provided at positions in the transporting
direction of the glass substrate 2 corresponding to the positions
where the plurality of drive rollers 14 are disposed, and as shown
in FIG. 8 and FIG. 9, the drive rollers 14 are disposed on one end
of the output shafts 19. The drive rollers 14 are provided such
that they rotate as a single unit with the output shafts 19, and
input gears 20 that mesh with the spur gears 18 provided on the
power transmission shafts 15 are provided on the other end portion
of the output shafts 19.
[0045] In this manner, the drive force application means is
configured such that the power transmission shafts 15 are
rotatively driven by the action of the electric motor 16, and by
rotatively driving the power transmission shafts 15, the spur gears
18 on the power transmission shafts 15 and the input gears 20 mesh
with one another and rotate the output shafts 19, thereby rotating
the drive rollers 14. Also, the drive rollers 14 are rotated by the
action of the electric motor 16, and due to the drive rollers 14,
both end portions in the width direction of the glass substrate 2
are supported in a contacting manner while a drive force is applied
in the transporting direction to the glass substrate 2. A large
diameter portion 14a of the drive rollers 14 restricts positional
displacement in the width direction of the glass substrate 2.
[0046] As shown in FIG. 3 and FIG. 4, a frame member 10 of the
transporting unit 1 is made of an elongate unit frame member 11 on
which the plurality of fan filter units 7 are placed and supported,
and a pair of left and right accommodation frame members 12
disposed on either side of the unit frame member 11.
[0047] The unit frame member 11 is made of a flat bottom surface
member 11a arranged on the bottom side, lateral wall portions 11b
linked to both end portions of the bottom surface member 11a and
orientated upward, and a unit cover member 11c that covers the area
above the space between the lateral wall portions 11b. The lateral
wall portions 11b are shared with an accommodation frame member
12.
[0048] The space within the unit frame member 11 functions as a
transport space A accommodating the glass substrate 2 and the
air-supplying-type support means 3 made of the plurality of fan
filter units 7, and the unit frame member 11 is configured such
that the transport space A is covered in an airtight or
substantially airtight state. An air introduction opening 13 for
introducing outside air to the transport space A is formed in the
bottom surface member 11a at a spot located below the blower fan 6.
The action of the blower fan 6 sucks in the air of the transport
space A and passes the air that has been sucked in through the dust
removal filter 5 and the air rectifying plate 8 to supply purified
air toward the lower surface portion of the glass substrate 2, and
thereby circulating the air within the transport space A. The
action of the blower fan 6 introduces outside air into the
transport space A through the air introduction opening 13 to
increase the pressure within the transport space A and discharge
some the air circulating within the transport space A to the
outside through for example the gap between the unit frame member
11 and the accommodation frame member 12, thereby exchanging some
of the air circulating within the transport space A with outside
air.
[0049] The accommodation frame member 12 has an accommodation frame
12a that is formed bracket-shaped when viewed from the side, and an
accommodation cover member 12b that closes an open portion in the
side of the accommodation frame 12a The space within the
accommodation frame member 12 functions as an accommodation space B
for accommodating the drive mechanisms such as the electric motor
16 and the drive transmission shafts 15, and the accommodation
frame member 12 is configured such that the accommodation space B
is covered in an airtight or substantially airtight state. A
sub-fan-filter unit 21 that like the fan filter units 7 is provided
with a air-supplying function and a dust removal mechanism is
provided in the accommodation space B. An outside discharge opening
22 for discharging air within the accommodation space B to the
outside is formed in the lower surface portion of the accommodation
frame 12a at the spot where the sub-fan-filter unit 21 is arranged
in the transporting direction of the glass substrate 2, and an air
discharge opening 23 that allows the transport space A and the
accommodation space B to communicate with one another is formed in
a lateral surface portion of the accommodation frame 12a.
[0050] Thus, due to action of the sub-fan-filter unit 21, some of
the air in the transport space A is discharged into the
accommodation space B, the air in the accommodation space B is
sucked in due to the action of the sub-fan-filter unit 21, and air
from which dust has been removed by the sub-fan-filter unit 21 is
discharged to the outside through the outside discharge opening
22.
[0051] The transporting units 1 are disposed in two stages in the
vertical direction, and as shown in FIG. 2, the upper-side
transporting unit 1 is configured such that it can be swingably
operated upward about one end side of the lateral side portion so
as to open up the space above the lower-side transporting unit 1.
That is, the frame member 10 of the upper-side transporting unit 1
is supported such that it can freely pivot about a swing axis P,
and by swinging upwards it can open the area above the frame member
10 of the lower transporting unit 1. Also, to perform maintenance
on the lower transporting unit 1, the upper transporting unit 1 is
swingably operated and then the cover member 11c is removed from
the frame member 10 of the lower transporting unit 1 to allow the
transport space A of the lower transporting unit 1 to be opened. To
perform maintenance on the upper transporting unit 1, the cover
member 11c can be removed to open the transport space A of the
upper transporting unit 1. To perform maintenance on the
accommodation space B of the transporting unit 1, the accommodation
cover member 12b of the accommodation frame member 12 in either the
upper transporting unit 1 or the lower transporting unit 1 can be
removed to open up the accommodation space B.
[0052] As shown in FIG. 10, a control member H controls the
starting and stopping of operation of each of the plurality of the
transporting units 1 based on commands from the command member S.
More specifically, the control member H starts operation of the
transporting units 1 by starting actuation of the electric motors
16, the fan filter units 7, and the sub-fan-filter unit 21.
Conversely, the control member H stops operation of the
transporting units 1 by stopping actuation of the electric motor
16, the fan filter units 7 and the sub-fan-filter unit 21. The
control member H is configured such that the glass substrate 2 is
contactlessly supported and transported when the transporting units
1 are in the operating state.
[0053] The command member S is provided with a manually operated
operation change switch S1 for switching between automatic
operation and manual operation, and a manually operated operation
order switch group S2 for separately ordering the start and stop of
operation of the plurality of transporting units 1 during manual
operation. As shown in FIG. 11, the operation order switch group S2
is provided with the same number of operation order switches as the
number of transporting units 1 lined up in the transporting
direction, and each operation order switch corresponds to a single
transporting unit 1.
[0054] Further, when the control member H receives an order for
automatic operation from the operation change switch S1, the
control member H assumes all transporting units 1 are to be
operated and activates the electric motors 16 and the
sub-fan-filter units 21 as well as activates the blow fan 6 such
that the amount of air that is blown toward the lower surface
portion of the glass substrate 2 becomes a support air amount.
[0055] In this manner, during automatic operation the control
member H operates all transporting units 1 so as to transfer the
glass substrate 2 from the transporting unit 1 positioned upstream
in the transporting direction to the transporting unit 1 positioned
downstream in the transporting direction while transporting the
glass substrate 2 from the upstream end portion to the downstream
end portion.
[0056] With regards to the operation of the control member H during
automatic operation, it is also possible to control the plurality
of the transporting units 1 such that only some of the plurality of
transporting units are simultaneously in the operating state. If
the plurality of the transporting units 1 are controlled such that
only some of the plurality of transporting units 1 are
simultaneously in the operating state, then, for example, it is
possible to select which transporting unit 1 to start and which
transporting unit 1 to stop depending on which transporting unit 1
transporting route the glass substrate 2 is on based on information
detected by the sensor T, and then to start and stop operation of
the selected transporting units 1.
[0057] Also, the control member H is configured such that, when
manual operation is ordered by the operation change switch S1, the
electric motor 16, the sub-fan-filter unit 21 and the blower fans 6
of only the transporting units 1 that are ordered to start
operating by the operation order switch group S2 are operated. In
this manner, during manual operation only those transporting units
1 ordered to operate by the operation order switch group S2 are
operated, and the glass substrate 2 is contactlessly supported on
and transported by those transporting units 1 that are
operated.
[0058] Also, during manual operation, the control member H does not
simply start operation of the transporting unit 1 ordered to start
operating by the operation order switch group S2, but rather starts
operation only if the transporting unit 1 adjacent on the
downstream side in the transporting direction can contactlessly
support and carry the substrate glass 2 that is to be transferred
thereto based on whether or not the transporting unit 1 adjacent on
the downstream side in the transporting direction is in an
operating state. Consequently, in the first embodiment, the state
of the transporting unit 1 on the upstream side is controlled based
on the transporting state (operating state) of the transporting
unit 1 on the downstream side.
[0059] There are a number of methods for determining whether a
specific transporting means is in the operating state. For example,
when an instruction has been made to start operation of a specific
transporting means, that is, when the operation order switch is on,
or when an operation start instruction has been performed by the
control member H using some other method, then this can be used to
determine that the transporting means to which the operation start
signal has been sent is in an operating state. It is also possible
to determine that a transporting means is in an operating state
based on signals from sensors provided in the air-supplying-type
support means 3 and the drive force application means 4. Sensors
known to those skilled in the art, such as a sensor for sensing
rotation of the blower fan 6, or a rotation sensor provided near
the electric motor 16, can be employed as such sensors.
[0060] If the transporting unit 1 adjacent on the downstream side
in the transporting direction is in the operating state, then the
control member H allows the transporting unit 1 upstream thereof to
start operation when an order to start operating is made by the
operation order switch group S2. However, if the transporting unit
1 adjacent on the downstream side in the transporting direction is
in the non-operating state, then the control member H does not
allow operation of the upstream transporting unit 1 to start even
if an order to start operation has been made by the operation order
switch group S2.
[0061] Also, the control member does not simply prohibit the start
of operation of a transporting unit 1 for which the adjacent one on
the downstream side in the transporting direction is in the
non-operating state. But it preferably prohibits the start of
operation of a up-stream side transporting unit 1 for which the
adjacent one on the downstream side in the transporting direction
is in the non-operating state if the sensor T detects the presence
of the glass substrate 2. To explain this in greater detail,
because there is no transporting unit 1 adjacent downstream in the
transporting direction to the transporting unit 1 positioned on the
most downstream side in the transporting direction, if operation
start is ordered by the group of operation order switches S2, then
the control member H unconditionally starts operation when a
command to start operation has been made by the operation order
switch group S2.
[0062] Further, as regards the transporting units 1 other than the
transporting unit 1 positioned on the most downstream side in the
transporting direction, the control member H starts operation when
a command to start operation has been made by the operation order
switch group S2 as long as the sensor T does not detect the
presence of the glass substrate 2, regardless of whether the
transporting unit 1 adjacent on the downstream side in the
transporting direction is in the operating state.
[0063] The control member H does not allow operation to start, even
if a command to start operation has been made by the operation
order switch group S2, when the transporting unit 1 adjacent on the
downstream side in the transporting direction is in the
non-operating state and the sensor T of the transporting unit 1
adjacent on the upstream side detects the glass substrate 2.
[0064] The starting and stopping of operation of the transporting
units 1 other than the transporting unit 1 positioned on the most
downstream side in the transporting direction are the same for all
transporting units 1, and thus, as shown in FIG. 11, two specific
transporting units 1 of the plurality of transporting units 1 lined
up in the transporting direction will be considered next and
described with reference to the flowchart in FIG. 12. In FIG. 11,
description is made with the transporting unit 1 on the upstream
side in the transporting direction defined as an upstream side
transporting unit 1a and the transporting unit 1 on the downstream
side in the transporting direction defined as a downstream side
transporting unit 1b, and of the operation switch types S2, and the
operation order switch for ordering the start of operation of the
upstream side transporting unit 1a is defined as an operation order
switch SW1 and the operation order switch for ordering the start of
operation of the downstream side transporting unit 1b is defined as
the operation order switch SW2.
[0065] First, when the upstream side transporting unit 1a is
ordered to start operating by the operation order switch SW1, the
control member H determines whether or not the downstream side
transporting unit 1b is in the operating state, and when the
downstream side transporting unit 1b is in the operating state, the
control member H starts operation of the upstream side transporting
unit 1a (steps 1 to 3).
[0066] Then, when the downstream side transporting unit 1b is in
the non-operating state and the sensor T in the upstream side
transporting unit 1a detects the presence of the glass substrate 2,
the control member H prohibits the start of operation of the
upstream side transporting unit 1a (steps 2, 4 and 5).
[0067] The control member H starts operation of the upstream side
transporting unit 1a even if the downstream side transporting unit
1b is in the non-operating state as long as the sensor T in the
upstream side transporting unit 1a does not detect the glass
substrate 2 (steps 2, 4 and 3).
[0068] When operation of the upstream side transporting unit 1a has
been started and the sensor T in the downstream side transporting
unit 1b detects the glass substrate 2, the control member H stops
operation of the upstream side transporting unit 1a and the
downstream side transporting unit 1b (steps 6 and 7).
Second Embodiment
[0069] The control member H according to a separate embodiment is
described next. With the exception of the control member H that is
described below, the structure of the transporting apparatus itself
is the same as that set forth in the first embodiment, and thus a
detailed explanation thereof is omitted in this embodiment.
[0070] As shown in FIG. 10, the control member H of this embodiment
as well controls the operation of each of the plurality of
transporting units 1 based on a command from the command member S.
When a transporting unit 1 is in the operating state, the control
member H actuates the electric motor 16, the fan filter units 7 and
the sub-fan-filter unit 21 to contactlessly support and carry the
glass substrate 2.
[0071] The fan filter units 7 are configured such that by switching
the operating state of the blower fan 6, the amount of purified air
blown toward the lower surface portion of the glass substrate 2 can
be switched between a supporting operation state in which the air
amount is a supporting air amount for contactlessly supporting the
glass substrate 2, and a weak air state in which the air amount is
a small set air amount that is smaller than the supporting air
amount.
[0072] That is to say, the air-supplying-type support means 3 made
of a plurality of fan filter units 7 is configured such that it
supplies purified air toward the lower surface portion of the glass
substrate 2 through the dust removal filter 5, and such that can be
changed between the supporting operation state and the weak air
state.
[0073] When operating the plurality of transporting units 1, the
control member H controls the operating state of the
air-supplying-type support means 3 of the transfer transporting
unit 1 to which the glass substrate 2 is to be transferred such
that the glass substrate 2 can be contactlessly supported by the
air-supplying-type support means 3 prior to the transfer timing of
the glass substrate 2. Consequently, in this second embodiment, the
state of the downstream side transporting unit 1 is controlled in
accordance with the transporting state of the upstream side
transporting unit 1. Here, the point at which the electric motor 16
of the transporting unit 1 to which transfer is to be made is
operated, so that the glass substrate 2 can be transferred to that
transporting unit 1, is defined as the transfer timing.
[0074] In other words, the control member H operates the
air-supplying-type support means 3 at the weak air state, and for
the transporting unit 1 to which transfer is to be made, changes
the air-supplying-type support means 3 from the weak air state to
the supporting operation state before the transfer timing. More
preferably, the control member H, for the transporting unit 1 to
which transfer is to be made, changes the state of the
air-supplying-type support means 3 from the weak air state to the
supporting operation state at an upstream transfer timing, at which
the glass substrate 2 is transferred to a transporting unit 1 which
is adjacent and is upstream in the transporting direction of the
transporting unit 1 to which transfer is to be made, so that the
transition is made to a state where the air-supplying-type support
means 3 can contactlessly support the glass substrate 2. Here, the
time at which the electric motor 16 of the upstream side
transporting unit 1 is activated such that the glass substrate 2 is
transferred to the transporting unit 1 adjacent upstream in the
transporting direction of the transporting unit 1 to which transfer
is to be made is detected as the upstream transfer timing. The
upstream transfer timing is set such that by changing the
air-supplying-type support means 3 from the weak air state to the
supporting operation state at the upstream transfer timing based on
the time required to change the operating state of the
air-supplying-type support means 3 or the transporting speed of the
glass substrate 2, for example, it is possible for the transporting
unit 1 to which transfer is to be made to contactlessly support the
glass substrate 2 to be transferred.
[0075] The operation of the fan filter units 7 and the electric
motor 16 during control of the plurality of transporting units 1 by
the control member H is described in greater detail below.
[0076] First, the control member H operates the fan filter units 7
of all of the plurality of transporting units 1 lined up in the
transporting direction at the weak air state. Then, the control
member H changes the operating state of the transporting unit 1 to
which transfer is to be made at the upstream transfer timing, which
is prior to the transfer timing, such that the fan filter units 7
are switched from the weak air state to the supporting operation
state, and also activates the electric motors 16 of the
transporting unit 1 on whose transporting route the substrate 2 is
present and the transporting unit 1 positioned one downstream from
that transporting unit 1.
[0077] In this manner, the transporting unit 1 to which transfer is
to be made is capable of contactlessly supporting the glass
substrate 2 by the air-supplying-type support means 3 at the
upstream transfer timing, which is before the transfer timing at
which the glass substrate 2 is actually transferred, and thus the
glass substrate 2 is transferred and transported between
transporting units 1 while the glass substrate 2 is contactlessly
supported by the air-supplying-type support means 3.
[0078] The upstream transfer timing is also defined as the timing
at which the operation of the electric motors 16 is started such
that the glass substrate 2 is transferred to the transporting unit
1 adjacent upstream in the transporting direction of the
transporting unit 1 to which transfer is to be made.
[0079] Further, when operation start is initially ordered by the
command member S, the control member H activates the fan filter
units 7 of the transporting unit 1 positioned most upstream in the
transporting direction and the transporting unit 1 positioned one
downstream therefrom at the supporting operation state, and
activates the fan filter units 7 of the other transporting units 1
at the weak air state.
[0080] In this operating state, the glass substrate 2 is placed on
the transporting route of the transporting unit to which transfer
is to be made, which is positioned on the most upstream side in the
transporting direction, by a loading device, thereby introducing
the glass substrate 2 into the transporting apparatus.
[0081] Then, when the glass substrate 2 has been introduced, the
control member H detects that the glass substrate 2 is on the
transporting route of the transporting unit 1 positioned on the
most upstream side in the transporting direction based on the
detection information of the object sensor T, after which it
activates the electric motors 16 of the transporting unit 1
positioned on the most upstream side in the transporting direction
and the transporting unit 1 that is positioned one downstream from
that transporting unit 1, transferring the glass substrate 2 from
the transporting unit 1 positioned on the most upstream side in the
transporting direction to the transporting unit 1 that is
positioned one downstream from that transporting unit 1.
[0082] In this fashion, by controlling the operating state of the
fan filter units 7 and the electric motors 16, the glass substrate
2 is contactlessly supported and transferred from the transporting
unit 1 positioned on the upstream side in the transporting
direction to the transporting unit 1 positioned on the
downstream-side in the transporting direction while the glass
substrate 2 is transported from the upstream end portion to the
downstream end portion of the transporting apparatus by the
plurality of transporting units 1.
[0083] Because the fan filter units 7 and the electric motors 16 of
all the transporting units 1 are operated in the same manner for
all of the plurality of transporting units 1, three specific
transporting units 1 of the plurality of transporting units 1 lined
up in the transporting direction as shown in FIG. 13 are considered
and described in further detail in accordance with the flowchart in
FIG. 14. In FIG. 13, the description is made with the transporting
unit 1 positioned on the most upstream side in the transporting
direction defined as the upstream side transporting unit 1a, the
transporting unit 1 positioned one downstream from the upstream
side transporting unit 1a defined as an intermediate transporting
unit 1b, and the transporting unit 1 positioned one downstream from
the intermediate transporting unit 1b defined as a downstream side
transporting unit 1c.
[0084] First, if the glass substrate 2 is present on the
transporting route of the upstream side transporting unit 1a but
the glass substrate 2 has not arrived at the position of the object
sensor T, then the blower fans 6 of the fan filter units 7 of the
upstream side transporting unit 1a are in the supporting operation
state and the blower fans 6 of the intermediate transporting unit
1b and the downstream side transporting unit 1c are in the weak air
state. This is the assumed operating state (step 1).
[0085] Next, when the presence of the glass substrate 2 is detected
by the object sensor T in the upstream side transporting unit 1a
(step 2), the blower fan 6 of the intermediate transporting unit 1b
is also activated at the supporting operation state in addition to
the blower fan 6 of the upstream side transporting unit 1a, and the
blower fan 6 of the downstream side transporting unit 1c is in the
weak air state. Then, the control member H starts operation of the
electric motor 16 in the intermediate transporting unit 1b to
transfer the glass substrate 2 from the upstream side transporting
unit 1a to the intermediate transporting unit 1b (step 3). The
upstream transfer timing is detected by starting operation of the
electric motor 16 in the intermediate transporting unit 1b, and the
fan filter units 7 in the downstream side transporting unit 1c, to
which transfer is to be made, is changed from the weak air state to
the supporting operation state (step 4). While there may be a gap
between the detection of the glass substrate 2 by the object sensor
T in step 2 and the start of the electric motor 16 in the
intermediate transporting unit 1b in step 3, the electric motor 16
may be started when the object sensor T detects the glass substrate
2.
[0086] Thereafter, when the presence of the glass substrate 2 is
detected by the intermediate transporting unit 1b by the object
detecting sensor T, the control member H changes the state of the
fan filter units 7 in the upstream side transporting unit 1a from
the supporting operation state to the weak air state (steps 5 and
6).
[0087] The operation of the sub-fan-filter units 21 can be suitably
altered, such as activating the sub-fan-filter unit 21 of the
transporting unit 1 in which the electric motor 16 is in the
operating state or activating the sub-fan-filter units 21 of all
the transporting units 1.
Third Embodiment
[0088] A third embodiment illustrates a separate embodiment of the
orientation of the transported object that is transported in the
foregoing first and second embodiments, and focusing on this
feature the third embodiment is described below in accordance with
the drawings. Structural features other than this are identical to
those of the first embodiment, and thus by using the same reference
numerals a detailed explanation thereof is omitted.
[0089] As shown in FIG. 15 and FIG. 16, a plurality of vertical
orientation transporting units 24 are provided lined up in the
transporting direction of the glass substrate 2 and function as
transporting means for carry a glass substrate 2 serving as the
transported object in a vertical or near vertical orientation.
[0090] The vertical orientation transporting units 24 are provided
with a vertical orientation air-supplying-type support means 25,
which is provided in a near vertical orientation, and a vertical
orientation drive force application means 26, which is provided in
a near vertical orientation.
[0091] Incidentally, in this third embodiment of the present
invention, the glass substrate 2 is transported in an orientation
that is nearly vertical, and thus the side on which the vertical
orientation transporting unit 24 is present is the lower surface
portion of the glass substrate 2.
[0092] The vertical orientation air-supplying-type support means 26
is configured such that purified air is supplied toward the lower
surface portion of the glass substrate 2 being transported in a
nearly vertical orientation so as to contactlessly support the
glass substrate 2.
[0093] Incidentally, the vertical orientation air-supplying-type
support means 26, like the air-supplying-type support means 3 in
the first embodiment, is constituted by fan-filter units 7a in
which the dust-removal filter 5 and the blowing fan 6 are
incorporated into a single unit, and the fan-filter units 7a are
made of two blowing fans 6 arranged vertically and one dust-removal
filter 5 incorporated into a single unit.
[0094] An air rectifying plate 8 for rectifying purified air from
the fan-filter units 7a is also provided.
[0095] The vertical orientation drive force application means 26 is
provided with a timing belt 27 that applies a drive force while
supporting an end portion of the glass substrate 2 in a contacting
manner, and thus applies a drive force in the transporting
direction to the glass substrate 2.
[0096] To describe the vertical orientation drive force application
means 26 in further detail, it is provided with a drive shaft 29
that is positioned on the lower transporting side and rotates due
to an electric motor 28, a driven shaft 37 that is positioned on
the upper transporting side and is capable of rotation, and the
timing belt 27, which is wound between the drive shaft 29 and the
driven shaft 30.
[0097] The timing belt 27 is supported on its forward route portion
by inner support shafts 31 from its inner circumferential side, and
is supported on its return route portion by outer support shafts 32
from its outer circumferential side.
[0098] A transporting case 34 that covers a transport space C,
which accommodates the vertical orientation air-supplying-type
support means 26 and the carry route of the glass substrate 2, in
an airtight or substantially airtight manner is provided.
[0099] In the vertical orientation air-supplying-type support means
26, like in the first embodiment, the fan filter units 7a are
configured such that they can be switched between a supporting
operation state in which the amount of purified air that is blown
toward the lower surface portion of the glass substrate 2 is a
supporting air amount, and a weak air state in which the amount of
purified air that is blown toward the lower surface portion of the
glass substrate 2 is a small set air amount.
[0100] The control member H, like in the first embodiment, can be
configured such that, in accordance with a command from a command
member S, it controls the starting and stopping of operation of
each of the plurality of vertical orientation transporting units 24
to perform manual operation and automatic operation. The control
member H is also configured such that the glass substrate 2 is
contactlessly supported and transported by activating the electric
motor 28 and the fan filter unit 7a when the vertical orientation
transporting units 24 are in the operating state.
[0101] Like in the first embodiment, it is possible to adopt a
configuration in which the control member H, during manual
operation, does not simply start operation of the vertical
orientation transporting units 24, which are ordered to start
operation by the operation order switch group S2, but rather starts
operation only if the vertical orientation transporting unit 24
adjacent on the downstream side in the transporting direction can
contactlessly support and carry the glass substrate 2 to be
transferred based on whether the vertical orientation transporting
unit 24 adjacent on the downstream side in the transporting
direction is in the operating state.
[0102] In this case, the control member H allows operation the
vertical orientation transporting unit 24, with respect to which
the vertical orientation transporting unit 24 on the downstream
side in the transporting direction is in the operating state, to be
started, and prohibits operation of the vertical orientation
transporting unit 24, with respect to which the vertical
orientation transporting unit 24 on the downstream side in the
transporting direction is in the non-operating state, from
starting.
[0103] Also, the control member H is configured such that operation
of the vertical orientation transporting unit 24, with respect to
which the vertical orientation transporting unit 24 adjacent on the
downstream side in the transporting direction is in the operating
state, is started when an operation start command is ordered by
operation order switch group S2, and such that operation of the
vertical orientation transporting unit 24, with respect to which
the vertical orientation transporting unit 24 adjacent on the
downstream side in the transporting direction is in the
non-operating state, even if the operation order switch group S2
orders the start of operation of the vertical orientation
transporting unit 24.
[0104] Like in the second embodiment, it is also possible to adopt
a configuration in which the control member H does not simply
prohibit operation of a vertical orientation transporting unit 24
with respect to which the vertical orientation transporting unit 24
adjacent on the downstream side in the transporting direction is in
the non-operating state, but also the start of operation of when
the object sensor T detects the presence of the glass substrate 2
on a vertical orientation transporting unit 24 with respect to
which the vertical orientation transporting unit 24 on the
downstream side in the transporting direction is in the operating
state.
[0105] Also, the control member H is configured such that, with
regard to operating the plurality of vertical orientation
transporting units 24, it activates the vertical air-supplying-type
support means 26 of the vertical orientation transporting unit 24
that is to be operated at the weak air state and changes the
vertical orientation air-supplying-type support means 26 of the
vertical type transporting unit 24 to which transfer is to be made
from the weak air state to the supporting operation state at the
upstream transfer timing, which is before the transfer timing.
[0106] In the third embodiment, since a sub-fan-filter unit is not
provided, a control block diagram obtained by, in FIG. 10, omitting
the sub-fan-filter unit 21 and changing the electric motor 16
changed to the electric motor 28.
Further Embodiments
[0107] (1) In the first and third embodiments described above, the
control member H, during manual operation only, allows the start of
operation of the transporting unit 1 with respect to which the
transporting unit 1 (in the third embodiment, the vertical
orientation transporting unit 24) adjacent downstream in the
transporting direction is in the operating state and prohibits the
start of operation of the transporting unit 1 with respect to which
the transporting unit 1 adjacent downstream in the transporting
direction is in the non-operating state. However, it is also
possible to adopt a configuration in which the control member H,
during both manual operation and automatic operation, or during
automatic operation only, allows the start of operation of the
transporting unit 1 with respect to which the transporting unit 1
adjacent downstream in the transporting direction is in the
operating state and prohibits the start of operation of the
transporting unit 1 with respect to which the transporting unit 1
adjacent downstream in the transporting direction is in the
non-operating state.
[0108] (2) In the first and third embodiments described above, the
control member H prohibits the start of operation when the object
sensor T in the transporting unit 1 with respect to which the
transporting unit 1 (in the third embodiment, the vertical
orientation transporting unit 24) adjacent downstream in the
transporting direction is in the non-operating state detects the
presence of the glass substrate 2, but it is also possible to adopt
an implementation in which the start of operation is prohibited for
all transporting units 1 with respect to which the transporting
unit 1 adjacent downstream in the transporting direction are in the
non-operating state regardless of whether the sensor T detects the
presence of the glass substrate 2. In this case, it is possible to
either provide or not provide the sensor T.
[0109] (3) In the second and third embodiments, the control member
H changes the fan filter units 7 and 7a from the weak air state to
the supporting operation state at the upstream transfer timing,
which is before the transfer timing, but it is sufficient that the
timing at which the fan filter units 7 and 7a of the transporting
units 1 and the vertical orientation transporting units 24 to which
transfer is to be made are changed from the weak air state to the
supporting operation state is before the transfer timing, and for
example this can be a timing this is earlier than the upstream
transfer timing. Either way, taking into consideration the time
required for changing the operating state of the air-supplying-type
support means 3 or the transporting speed of the glass substrate 2,
for example, it is preferable that the upstream transfer timing
allows sufficient time for the transporting unit 1 to which
transfer is to be made to contactlessly support the glass substrate
2 that is to be transferred.
[0110] (4) In the second and third embodiments, the control member
H activates the air-supplying-type support means 3 and the vertical
orientation air-supplying-type support means 26 at the weak air
state, and changes the air-supplying-type support means 3 and the
vertical orientation air-supplying-type support means 26 of the
transporting unit 1 and the vertical orientation transporting unit
24 for transfer from the weak air state to the supporting operation
state before the transfer timing, but it is also possible for the
control member H to keep the air-supplying-type support means 3 and
the vertical orientation air-supplying-type support means 26 of the
transporting unit 1 and the vertical orientation transporting unit
24 for transfer in the operation stop state, and to start operation
such that the air-supplying-type support means 3 and the vertical
orientation air-supplying-type support means 26 of the transporting
unit 1 and the vertical orientation transporting unit 24 for
transfer are put into the supporting operation state prior to the
transfer timing.
[0111] Incidentally, in this case it is possible to operate the
air-supplying-type support means 3 and the vertical orientation
air-supplying-type support means 26 at only the supporting
operation state, it is not necessary for them to be capable of
changing between the weak air state and the supporting operation
state.
[0112] (5) In the second and third embodiments, the upstream
transfer timing is detected by the activating the electric motor 16
such that the glass substrate 2 is transferred to a transporting
unit 1 that is more upstream than the transporting unit 1 adjacent
upstream in the transporting direction, but for example it is also
possible to provide a sensor or the like for detecting that the
glass substrate 2 has been transferred onto a transporting unit 1
that is more upstream than the transporting unit 1 adjacent
upstream in the transporting direction, and by detecting with this
sensor that the glass substrate 2 has been transferred, it is
possible to detect the upstream timing. FIG. 17 shows a more
general flowchart than the flowchart shown in FIG. 14.
[0113] (6) In the second and third embodiments, all the
transporting units 1 are operated, but for example it is also
possible for two transporting units 1, namely the transporting unit
1 on whose transporting route the substrate 2 is present and the
transporting unit 1 adjacent to that transporting unit 1 on the
downstream side in the transporting direction, to be operated. That
is, it is possible for only some of the plurality of transporting
units 1 to serve as the transporting units to be operated, and the
manner in which the transporting units to be operated are set can
be suitably changed.
[0114] (7) In the first embodiment, the air discharge opening 23
connecting the transporting space A and the accommodation space B
is formed in a lateral surface portion of the accommodation frame
12a, however it is also possible to adopt a configuration in which
the air discharge opening 23 is not formed such that the transport
space A and the accommodation space B are not connected.
[0115] (8) The first and third embodiments described an example of
the fan filter units 7 and 7a in which the dust removal filter 5
and the blower fan 6 are combined into a single unit, but it is not
absolutely necessary that the dust removal filter 5 and the blower
fan 6 are attached as a single unit, and it is also possible to
adopt a configuration in which, for example, a guide route or the
like for guiding air blown by the blower fan 6 to the dust removal
filter 5 is provided, and the dust removal filter 5 and the blower
fan 6 are configured as separate members.
[0116] (9) In the first and third embodiments, the glass substrate
2 was illustrated as an example of the transported object, but
various other types of articles such as plate-shaped work pieces or
disk-shaped work pieces can also be adopted.
[0117] (10) It is also possible to use a rotating type knob or
touch panel in place of the switch as the manually operated
operation ordering means for ordering the start of operation.
* * * * *