U.S. patent application number 11/436040 was filed with the patent office on 2006-12-21 for substrate storage container and method for manufacturing the same.
This patent application is currently assigned to Shin-Etsu Polymer Co., Ltd.. Invention is credited to Akihiro Hasegawa, Hiroshi Mimura.
Application Number | 20060283774 11/436040 |
Document ID | / |
Family ID | 36763027 |
Filed Date | 2006-12-21 |
United States Patent
Application |
20060283774 |
Kind Code |
A1 |
Hasegawa; Akihiro ; et
al. |
December 21, 2006 |
Substrate storage container and method for manufacturing the
same
Abstract
A substrate storage container includes a container main body,
first supporting parts and second supporting parts. The container
main body includes a back wall and a pair of side walls in order to
store a substrate between the side walls. The first supporting
parts are opposingly disposed on each side wall in order to support
a peripheral edge part of the substrate. The second supporting
parts are opposingly disposed on each side wall in order to support
the peripheral edge part of the substrate and positioned between
the back wall and the first supporting parts. The first supporting
parts and the second supporting parts are covered with a resin
layer having a lower frictional property than that of the container
main body.
Inventors: |
Hasegawa; Akihiro; (Niigata,
JP) ; Mimura; Hiroshi; (Niigata, JP) |
Correspondence
Address: |
OSHA LIANG L.L.P.
1221 MCKINNEY STREET
SUITE 2800
HOUSTON
TX
77010
US
|
Assignee: |
Shin-Etsu Polymer Co., Ltd.
Tokyo
JP
|
Family ID: |
36763027 |
Appl. No.: |
11/436040 |
Filed: |
May 17, 2006 |
Current U.S.
Class: |
206/725 ;
206/711; 206/832 |
Current CPC
Class: |
H01L 21/67383 20130101;
H01L 21/67369 20130101 |
Class at
Publication: |
206/725 ;
206/711; 206/832 |
International
Class: |
B65D 85/00 20060101
B65D085/00 |
Foreign Application Data
Date |
Code |
Application Number |
May 17, 2005 |
JP |
2005-144137 |
Claims
1. A substrate storage container comprising: a container main body
including a back wall and a pair of side walls in order to store a
substrate between the side walls; first supporting parts opposingly
disposed on each side wall in order to support a peripheral edge
part of the substrate; and second supporting parts opposingly
disposed on each side wall in order to support the peripheral edge
part of the substrate and positioned between the back wall and the
first supporting parts, wherein the first supporting parts and the
second supporting parts are covered with a resin layer having a
lower frictional property than that of the container main body.
2. The substrate storage container according to claim 1, further
comprising: an elastic retainer supporting the peripheral edge part
of the substrate and disposed on the back wall of the container
main body.
3. The substrate storage container according to claim 1, wherein
the first supporting parts and second supporting parts are
respectively protruded from the side walls of the container main
body, and a clearance is formed between the first supporting part
and the second supporting part on each side wall.
4. The substrate storage container according to claim 1, wherein
the side wall of the container main body includes a contacting
portion in order to contact with the peripheral edge part of the
substrate, wherein the contacting portion is positioned on an
extension line of an intersecting center line perpendicular to a
center line parallel to a direction of inserting and removing the
substrate among the center lines passing on the substrate when the
substrate is supported on the first supporting part and the second
supporting part, and wherein the contacting portion is covered with
the resin layer.
5. The substrate storage container according to claim 1, wherein
the side wall of the container main body includes a contacting
portion in order to contact with the peripheral edge part of the
substrate, and wherein the contacting portion is covered with the
resin layer.
6. The substrate storage container according to claim 1, wherein
the container main body is made of a material including one of
polycarbonate, polybutylene terephthalate, cycloolefin polymer,
polyether imide, polyether ether ketone and alloy resin, and
wherein the resin layer is made of one of polybutylene
terephthalate and polyether ether ketone.
7. The substrate storage container according to claim 1, wherein
the resin layer includes a flange formed inside the side wall and
having an outer portion near an outside surface of the side wall
and an inner portion near an inside surface of the side wall, and
wherein the outer portion has a larger dimension than that of the
inner portion.
8. A method for manufacturing a substrate storage container
including a container main body having a back wall and a pair of
side walls in order to store a substrate between the side walls,
first supporting parts opposingly disposed on each side wall in
order to support a peripheral edge part of the substrate, and
second supporting parts opposingly disposed on each side wall in
order to support the peripheral edge part of the substrate and
positioned between the back wall and the first supporting parts,
said method comprising: forming the first supporting parts and the
second supporting parts on the side walls of the container main
body; covering the first supporting parts and the second supporting
parts with a resin layer having a lower frictional property than
that of the container main body; and forming the container main
body by inserting the side walls in a mold for forming the back
wall of the container main body.
9. The method for manufacturing a substrate storage container
according to claim 8, further comprising: covering a contacting
portion with the resin layer for contacting with the peripheral
edge part of the substrate on the side wall of the container main
body.
10. The method for manufacturing a substrate storage container
according to claim 8, further comprising: forming the side wall
with a through hole having a shape corresponding to a flange having
an outer portion near an outside surface of the side wall and an
inner portion near an inside surface of the side wall wherein the
outer portion of the flange has a larger dimension than that of the
inner portion; and filling the resin for forming the resin layers
from the outsides of the side wall via the through hole.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a substrate storage
container for storing various types of semiconductor wafers or
substrates made of a photo-mask glass, a aluminum disc or the
like.
[0003] 2. Related Background of Art
[0004] A conventional substrate storage containers, which is not
shown in the drawings, includes a container main body in which a
plurality of substrates including semiconductor wafers are arranged
and stored, a lid member which can be freely attached and detached,
and which opens and closes the front surface constituting the
opening part of this container main body, and an anchoring
mechanism which fastens the lid member that covers the front
surface of the container main body. Such containers are utilized as
precision substrate storage containers. A plurality of supporting
parts are respectively disposed on the inside surfaces of both side
walls of the container main body and have a shape bent along a
peripheral edge of the substrate in order to horizontally support
the side portion of the substrate. A front retainer which retains
the peripheral edge of the front part of the substrate is mounted
on the inside surface of the lid member.
[0005] Such substrate storage containers are used for the safe
transport of substrates from substrate production factories to
processing factories. At these processing factories, the substrates
are subjected to various types of treatments to produce
semiconductor parts or parts used for the process of semiconductor
parts (see Japanese Patent Application Laid-Open No. Hei. 10-101177
and Japanese Patent Application Laid-Open No. 2004-111830).
SUMMARY OF THE INVENTION
[0006] Conventional substrate storage containers are constructed as
described above, and are therefore susceptible to shocks during
loading and transport by means of truck, air freight, ship or the
like. When such containers are subjected to shocks, rubbing between
the substrates and supporting parts causes damage to the
substrates, and results in the generation of particulates that
adhere to the surfaces of the substrates, so that they may cause
significant problems such as a drop in the function and yield of
products. In particular, as the pitch of electronic circuits of
semiconductor parts has become finer in recent years, contamination
by particulates has become a serious problem.
[0007] Conventionally, furthermore, a region of 3 mm in the inward
radial direction from the peripheral edge part of the substrate has
been treated as an exclusion region, which is not used in the
working of semiconductor parts. In recent years, however, from the
standpoint of achieving a finer pitch in electronic circuits and
making products more compact, there has been a demand to increase
the yield by narrowing the exclusion region. In order to satisfy
such a demand, it is necessary to prevent contamination and
scratching of the peripheral edge parts and back surface of the
substrate.
[0008] In view of the above-mentioned facts, an object of the
present invention is to provide a substrate storage container which
can prevent scratching of the substrates and the generation of dust
caused by rubbing between the substrates and the supporting parts,
so that contamination and scratching of the peripheral edge parts
and back surfaces of the substrates can be suppressed, and another
object of the present invention is to provide a method for
manufacturing such a substrate storage container.
[0009] In order to solve the above-mentioned problems, a substrate
storage container according to the present invention comprises a
container main body including a back wall and a pair of side walls
in order to store a substrate between the side walls; first
supporting parts opposingly disposed on each side wall in order to
support a peripheral edge part of the substrate; and second
supporting parts opposingly disposed on each side wall in order to
support the peripheral edge part of the substrate and positioned
between the back wall and the first supporting parts, wherein the
first supporting parts and the second supporting parts are covered
with a resin layer having a lower frictional property than that of
the container main body.
[0010] Further, the substrate storage container may further
comprise an elastic retainer supporting the peripheral edge part of
the substrate and disposed on the back wall of the container main
body.
[0011] Further, the first supporting parts and second supporting
parts may be respectively protruded from the side walls of the
container main body, and a clearance is formed between the first
supporting part and the second supporting part on each side
wall.
[0012] Further, the side wall of the container main body may
include a contacting portion in order to contact with the
peripheral edge part of the substrate, and the contacting portion
is positioned on an extension line of an intersecting center line
perpendicular to a center line parallel to a direction of inserting
and removing the substrate among the center lines passing on the
substrate when the substrate is supported on the first supporting
part and the second supporting part, and the contacting portion is
covered with the resin layer.
[0013] Further, the side wall of the container main body may
include a contacting portion in order to contact with the
peripheral edge part of the substrate, and the contacting portion
may be covered with the resin layer.
[0014] Further, the container main body may be made of a material
including one of polycarbonate, polybutylene terephthalate,
cycloolefin polymer, polyether imide, polyether ether ketone and
alloy resin, and the resin layer may be made of one of polybutylene
terephthalate and polyether ether ketone.
[0015] Further, the resin layer may include a flange formed inside
the side wall and having an outer portion near an outside surface
of the side wall and an inner portion near an inside surface of the
side wall, and the outer portion may have a larger dimension than
that of the inner portion.
[0016] Moreover, in order to solve the above-mentioned problems, a
method according to the present invention is for manufacturing a
substrate storage container including a container main body having
a back wall and a pair of side walls in order to store a substrate
between the side walls, first supporting parts opposingly disposed
on each side wall in order to support a peripheral edge part of the
substrate, and second supporting parts opposingly disposed on each
side wall in order to support the peripheral edge part of the
substrate and positioned between the back wall and the first
supporting parts. The method comprising: forming the first
supporting parts and the second supporting parts on the side walls
of the container main body; covering the first supporting parts and
the second supporting parts with a resin layer having a lower
frictional property than that of the container main body; and
forming the container main body by inserting the side walls in a
mold for forming the back wall of the container main body.
[0017] Further, the method may further comprises: covering a
contacting portion with the resin layer for contacting with the
peripheral edge part of the substrate on the side wall of the
container main body.
[0018] Further, the method may further comprises: forming the side
wall with a through hole having a shape corresponding to a flange
having an outer portion near an outside surface of the side wall
and an inner portion near an inside surface of the side wall
wherein the outer portion of the flange has a larger dimension than
that of the inner portion; and filling the resin for forming the
resin layers from the outsides of the side wall via the through
hole.
[0019] Further, the substrate storage container of the present
invention may comprise: a container main body storing a substrate;
a cover opening and closing an opening portion of the container
main body; first supporting parts respectively disposed on a pair
of side walls forming the container main body and positioned on the
side of the opening portion of the container main body in order to
support a peripheral edge part of the substrate; and second
supporting parts respectively disposed on the pair of side walls
forming the container main body and positioned on an inside wall
side of the container main body in order to support the peripheral
edge part of the substrate, wherein at least the first and second
supporting parts among the first supporting parts, second
supporting parts and contact parts of the respective side walls
that contact the peripheral edge part of the substrate are covered
with a resin that has a lower friction property than that of the
container main body, and an elastic retainer supporting the
peripheral edge part of the substrate is disposed on the cover.
[0020] An elastic retainer supporting the peripheral edge part of
the substrate can be disposed on the inside wall of the container
main body, and at least a substrate supporting portion of the
retainer may be covered by a resin layer that has a lower friction
property than that of the container main body. A transparent window
to ascertain the condition of the substrate can be selectively
formed in a roof or a circumferential wall of the container main
body.
[0021] Further, the first and second supporting parts can be
integrally formed, and an intermediate part connecting the first
and second supporting parts may be formed with a small thickness so
that the intermediate part do not contact with the substrates.
Further, in regard to the resin layer having a lower friction
property, the measured value of the coefficient of friction with
respect to steel as measured in accordance with ASTM D1894 may be
than 0.33, preferably 0.20 or less.
[0022] In the present invention, at least the first and second
supporting parts among the parts that might possibly contact with
the substrate are respectively covered by engagement, molding or
the like with a friction layer that has a lower friction property
than that of the material of the container main body. Accordingly,
for example, even if shocks or the like act on the substrate
storage container, it is possible to suppress the scratching of the
substrates or the generation of dust and adhesion of the dust to
the substrate as a result of rubbing between the substrates and the
first and second supporting parts.
BRIEF DESCRIPTION OF THE DRAWINGS
[0023] FIG. 1 is an overall perspective explanatory diagram showing
the first embodiment of the substrate storage container according
to the present invention;
[0024] FIG. 2 is a perspective explanatory diagram showing a state
in which the lid member is removed from the container main body of
the substrate storage container shown in FIG. 1;
[0025] FIG. 3 is a sectional plan view showing the first embodiment
of the substrate storage container according to the present
invention;
[0026] FIG. 4 is an explanatory diagram showing the side wall in
the first embodiment of the substrate storage container according
to the present invention;
[0027] FIG. 5 is a plan-view explanatory diagram showing the side
walls in the first embodiment of the substrate storage container
according to the present invention;
[0028] FIG. 6 is a sectional view taken along the line VI-VI in
FIG. 5 in the first embodiment of the substrate storage container
and method for manufacturing the same according to the present
invention;
[0029] FIG. 7 is a sectional view taken along the line VII-VII in
FIG. 5 in the first embodiment of the substrate storage container
and method for manufacturing the same according to the present
invention;
[0030] FIG. 8 is a sectional view taken along the VIII-VIII in FIG.
5 in the first embodiment of the substrate storage container and
method for manufacturing the same according to the present
invention;
[0031] FIG. 9 is a sectional view taken along the line IX-IX in
FIG. 5 in the first embodiment of the substrate storage container
and method for manufacturing the same according to the present
invention; and
[0032] FIG. 10 is a sectional plan view showing a second embodiment
of the substrate storage container according to the present
invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0033] Preferred embodiments of the present invention will be
described below with reference to the attached figures.
[0034] FIGS. 1 to 9 show a precision substrate storage container
100 used for shipping according to the first embodiment of the
present invention. As shown in FIGS. 1 to 9, the substrate storage
container 100 comprises a container main body 1, a lid member 10, a
plurality of first supporting parts 20, and a plurality of second
supporting parts 24.
[0035] A container main body 1 includes an opening portion 1F, a
back wall 1B opposing the opening portion 1F, and two pairs of side
walls 4 and side walls 4U, and the container main body 1 stores a
plurality of substrates W between the side walls 4 and side walls
4U. The lid member 10 closes the front side of the container main
body 1, which is the opening portion 1F of the container main body
1.
[0036] A plurality of first supporting parts 20 are respectively
disposed on the pair of left and right side walls 4 forming parts
of the container main body 1 and are positioned on the front side
of the container main body 1. Specifically, a pair of the first
supporting parts 20 are opposingly disposed on each side wall 4 to
support a peripheral edge part of substrates W and positioned on
the side of the opening portion 1F of the container main body
1.
[0037] A plurality of second supporting parts 24 are respectively
disposed on the pair of the left and right side walls 4 forming
parts of the container main body 1 and are positioned on the rear
side of the container main body 1. Specifically, a pair of the
second supporting parts 24 are opposingly disposed on each side
wall 4 to support the peripheral edge part of substrates W and
positioned on the side of the back wall 1B of the container main
body 1. In other words, the second supporting parts 24 are
positioned between the back wall 1B and the first supporting parts
20.
[0038] Contacting portion 5 are formed on the respective side walls
4 in order to contact with the peripheral edge parts of the
substrates W so that the substrates W are contacted with the
contacting portion 5, for example, when shocks or the like act on
the substrate storage container 100. The first and second
supporting parts 20 and 24 are covered with a resin layer 30 having
a lower frictional property than that of the container main
body.
[0039] As shown in FIG. 3, the substrates W are thin round
semiconductor wafers which have a diameter of, for example, 300 mm.
Specifically, the substrates W are made of silicon wafers in which
at least one of the front and back surfaces is worked with mirror
finish. An orientation flat or a notch with a semi-oval shape as
seen in a plan view, both of which are used for alignment, is
selectively formed in the circumferential edge part of each wafer,
so that the substrates can be inserted and removed by a special
robot.
[0040] The container main body 1 includes two pairs of recessions
1D opposingly formed in the inner periphery of the opening portion
1F (only the recessions 1D on the lower side are shown in FIG. 2).
The lid member 10 includes a locking mechanism (not shown) for
fastening the lid member 10 to the container main body 1. The
locking mechanism is provided inside the lid member 10 and includes
engaging portions which can protrude from the outer periphery of
the lid member 10. The lid member 10 is mounted on or dismounted
from the container main body 1 by operating the locking mechanism
via the through operating holes 42. In addition to this locking
mechanism, an anchoring mechanism can be provided on both side
portions of the lid member 10 in order to be engaged with anchoring
blocks 41 protruding from the front portions of side walls 4 of the
container main body 1.
[0041] As shown in FIGS. 1 through 3, the container main body 1 is
formed as a transparent front-open box type container main body by
insert molding in which a pair of side walls 4 are inserted into a
special mold, and the mold is filled with a predetermined material.
The container main body 1 functions so that a plurality of
substrates W (for example, 25 or 26 substrates) are lined up and
stored at a specified pitch in the vertical direction.
[0042] There are no particular restrictions on the material for
forming the container main body 1. For example, a resin such as
polycarbonate, polybutylene terephthalate, cycloolefin polymer,
polyether imide, polyether ether ketone or the like may be
selectively used. In addition, a conductive resin produced by
adding carbon, carbon fibers, carbon nanotubes, metal fibers, metal
oxides, conductive polymers or the like may be added to such resins
or alloy resins. Among these materials, polycarbonates, which are
superior in terms of transparency, are especially desirable.
[0043] In the container main body 1, as shown in FIGS. 1 through 3,
the circumferential edge part of the front portion is bent outward
in substantially an L shape as seen in a sectional view (See FIG.
3), so that a rim part 2 is formed. Positioning fittings used for
positioning are disposed on both sides of the front part of the
bottom surface and in the center of the rear part of the bottom
surface. A robotic flange 3 to be held by an automatic conveying
machine is mounted in a detachable manner on the central part of
the roof.
[0044] As shown in FIGS. 3, 5 and the like, both side walls 4 of
the container main body 1 are respectively formed to have a bent
shape so as to correspond to the shape of the substrates W, thus
forming a plurality of first supporting parts 20 and second
supporting parts 24. The first and second supporting parts 20, 24
are formed prior to the manufacture of the container main body 1.
Then, after the contacting portion 5 and the first and second
supporting parts 20 and 24 that contact the peripheral edge parts
of the substrates W are covered by the resin layer 30, a portion of
the container main body 1 is formed by inserting the side walls 4
into the mold used for the container main body 1.
[0045] As shown in FIG. 3, the lid member 10 comprises a housing
body 11 and a cover 12. The housing body 11 is substantially
dish-shaped in cross section and is engaged in a detachable manner
with the rim part 2 of the front side of the container main body 1.
As described above, the locking mechanism for fastening the lid
member 10 to the container main body 1 is provided in the lid
member 10. The locking mechanism of the lid member 10 engages with
and closes off the container main body 1 by means of an operation
from the outside. Examples of this kind of locking mechanism are
disclosed in United States Patent Application Publication No.
2005/0230398 and United States Patent Application Publication No.
2005/0274645. The cover 12 is mounted on the surface of the housing
body 11. An elastic front retainer 13 of the lid member 10 retains
the peripheral edges of the front parts of the substrates W and is
mounted on the opposite surface of the housing body 11 that faces
the inside (that is, the back wall) of the container main body 1.
Further, an endless sealing gasket 14 is engaged with the
circumferential wall of the housing body 11. The sealing gasket 14
undergoes compressive deformation, and functions to seal the
container main body 1.
[0046] The lid member 10 is molded with a resin such as a
polycarbonate, fluorine-containing polycarbonate, polyether
sulfone, polyether imide, polyether ether ketone or the like.
[0047] As shown in FIGS. 2 through 5, the plurality of first and
second supporting parts 20 and 24 protrude separately inward from
both side walls (specifically, the inside surfaces of both side
walls) of the container main body 1. A clearance 25 is formed
between these first and second supporting parts 20 and 24 on each
side wall (See FIGS. 3 and 5).
[0048] As shown in FIGS. 3 through 7, the plurality of first
supporting parts 20 are arranged in parallel at a specified pitch
in the vertical direction on the inside surfaces of the respective
side walls 4 forming the container main body 1. Further, the first
supporting parts 20 are arranged in a position closer to the front
side of the container main body 1, and support the peripheral edges
of the side parts of the substrates W in a horizontal attitude via
the resin layers 30. Each first supporting part 20 is covered with
the resin layer 30 and formed in a substantially semicircular shape
as seen in a plan view (See FIGS. 3 and 5) to have a thin region 21
and a thick region 22. The thin region 21 protrudes toward the
inside of the container main body 1 from the inside surface of the
corresponding side wall 4, and supports the peripheral edge of the
side part of the substrate W in a horizontal attitude via the resin
layer 30. The thick region 22 is formed on the outer side of the
thin region 21 (that is, on the side of the side wall 4), and
prevents the substrate W from jumping out or moving. Bumps 23
corresponding to the thickness of the substrate W are formed by the
thin region 21 and the thick region 22 and shape the thin region 21
into a circular arc shape as seen in a plan view.
[0049] As shown in FIGS. 3 through 5, 8 and 9, the plurality of
second supporting parts 24 are lined up at a specified pitch in the
vertical direction on the inside surfaces of the respective side
walls 4 that form a part of the container main body 1. The second
supporting parts 24 are arranged in a position closer to the back
wall 1B of the container main body 1, and support the peripheral
edges of the side parts of the substrates W in a horizontal
attitude via the resin layers 30. Each second supporting part 24 is
covered with the resin layer 30 and is formed in a substantially
flat shape as seen in a sectional view (See FIGS. 8 and 9). The
thin regions 21A protrude toward the inside of the container main
body 1 from the inside surface of the side wall 4, and each thin
region 21 A supports the peripheral edge of the side part of the
substrate W in a horizontal attitude via the resin layer 30. In
this embodiment, the "thin" region 21A mean that the thin region
21A is thinner than the thick region of the first supporting part
20. The upper surface of each thin region 21A is formed in a
position corresponding to the upper surface of one of the thin
regions 21 of the first supporting part 20 in the vertical
direction. Further, each second supporting part 24 is formed in a
substantially trapezoidal shape as seen in a plan view.
[0050] The resin layers 30 are formed by a two-color molding method
using a material having a lower frictional property and a higher
wear-resistant property than those of the material of the container
main body 1. Specifically, a polybutylene terephthalate (PBT) or
polyether ether ketone (PEEK) is used as a material for the resin
layers 30. When the coefficient of friction of the resin layers 30
with respect to steel is measured in accordance with ASTM (American
Society for Testing and Material) D1894, the measured value
obtained is less than 0.33, and is preferably 0.20 or less.
[0051] Such resin layers 30 function to cover the contacting
portions 5 of the respective side walls 4 when the substrates W
having a poor slipping property contacts with the contacting
portions 5. Further, as mentioned above, the resin layers 30 also
function to cover the front and back surfaces of the first
supporting parts 20 and the front and back surfaces of the second
supporting parts 24. In cases where the substrates W are supported
by the first and second supporting parts 20 and 24 on the pair of
side walls 4, as shown in FIGS. 3 through 5, an example of the
contacting portions 5 of the respective side walls 4 is a plurality
of inside surface portions 6 positioned on the extension lines EL
of the intersecting center lines perpendicular to center lines CL
parallel to the direction of inserting and removing the substrates
W among the center lines passing on the substrates W when the
substrate are supported on the first supporting parts 20 and the
second supporting parts 24. Further, another example of the
contacting portions 5 is the bent rear part inside surfaces 7 of
the respective side walls 4 (See FIG. 3).
[0052] In cases where the container main body 1 is manufactured as
described above, the mold for the side walls 4 is first filled with
a material such as a polycarbonate or the like, and the respective
side walls 4, the first supporting parts 20 and the second
supporting parts 24 are integrally formed. At the same time, the
contacting portions 5 for contacting with the peripheral edge part
of the substrate is formed on the side wall of the container main
body 1 in accordance with the shape of the mold for the side walls
4.
[0053] Further, the mold is filled with a resin having a lower
frictional property and a higher wear-resistant property. Then the
resin layers 30 covers the first supporting parts 20, the second
supporting parts 24 and the contacting portions 5 of the respective
side walls 4 that are to be contacted with the peripheral edge
parts of the substrates W. Accordingly, the contacting portions 5,
the first supporting parts 20 and the second supporting parts 24
are covered by the resin layers 30 and integrated with the resin
layers 30.
[0054] When molding the resin layers 30, the mold is filled with
the resin having a lower frictional property and a higher
wear-resistant property from the side of the outsides of the side
walls 4. As shown in FIGS. 7 and 9, it is desirable that the resin
layers 30 include flanges 8 formed in the side walls 4. In this
case, the resin for forming the resin layers 30 are filled from the
outsides of the respective side walls 4 via through holes having
the shape corresponding to the flanges 8. Each flange 8 has an
outer portion 8a near an outside surface of the side wall 4 and an
inner portion 8b near an inside surface of the side wall 4, and the
outer portion 8a has a larger dimension than that of the inner
portion 8b (See FIGS. 7 and 9). Owing to these flanges 8, the
covering portions (that is, the resin layers 30) do not slip out.
Specifically, if the flanges 8 with large dimensions are formed
beforehand, then peeling or positional deviation of the covering
resin layers 30 can be suppressed or prevented even in cases where
the adhesive strength of the interface between the resin of the
side walls 4 and the resin of the resin layers 30 is small so that
a sufficient adhesive strength cannot be expected.
[0055] In the case of providing the flanges 8, the side walls 4 are
formed with a through hole having a shape corresponding to the
flanges 8 having the larger dimension on an outside surface of the
side wall compared with the dimension on an inside surface of the
side wall. Then the mold is filled with the resin for forming the
resin layers 30 from the outsides of the side wall via the through
hole
[0056] After the contacting portions 5 of the respective side walls
4 and the first and second supporting parts 20 and 24 have thus
been covered by the resin layers 30, the pair of side walls 4 are
inserted into the mold for the container main body 1. Then, a resin
such as a polycarbonate or the like is injected into the mold and
cooled and hardened, and a container main body 1 with side walls 4
integrated on both sides can be manufactured.
[0057] In the abovementioned construction, most of the container
main body 1 that contacts the substrates W is covered by resin
layers 30 which are elements independent from the container main
body 1, so that the slipping characteristics against substrates W
are improved. Accordingly, even if the substrate storage container
is subjected to shocks, it is possible to prevent damage to the
substrates W, which is caused by the rubbing of the peripheral edge
parts or back surfaces of the substrates W and the first and second
supporting parts 20 and 24. As a result, it is possible to
conspicuously suppress or prevent a drop in the function and yield
of the product.
[0058] Further, the yield can be improved by narrowing the
exclusion region from the circumferential edge parts of the
substrates W (for example, 3 mm in the inward radial direction).
Further, since the conventional supporting parts having a shape
bent along a peripheral edge of the substrate are divided into the
first and second supporting parts 20 and 24 and caused to protrude
separately, a clearance 25 is formed between the first and second
supporting parts 20 and 24. Accordingly, the contact area with the
substrates W can be surely reduced, so that contamination by
organic matter can be greatly reduced.
[0059] Next, FIG. 10 shows a substrate storage container 200 as a
second embodiment according to the present invention. In this case,
a pair of left and right elastic rear retainers 9 support the
peripheral edge part of the substrates W at the rear parts and are
disposed on the back wall 1B (specifically, mounted on the inside
surface of the back wall 1B) which is the inside wall of the
container main body 1. In the substrate storage container 200, the
first and second supporting parts 20, 24 are connected by
intermediate parts 122. Accordingly, each set of the first and
second supporting parts 20 and 24 are formed as a continuous
integral body rather than being formed separately. The intermediate
parts 122 connecting the first and second supporting parts 20 and
24 have a planar arc shape on their edges, and thicknesses of the
intermediate parts 122 are smaller than those of the first and
second supporting parts 20 and 24. Therefore, the intermediate
parts 122 are apart from the inserted substrates W in the vertical
direction and are shaped not to contact with the back surface
peripheral edge parts of the substrates W. Accordingly, even if the
substrate storage container is subjected to shocks, it is possible
to prevent damage to the substrates W as well as the case of the
first embodiment.
[0060] A plurality of pairs of the elastic rear retainers 9 are
lined up in the vertical direction. The respective rear retainers 9
are superior in terms of elasticity, wear resistance and low
frictional property, and are formed to have a substantially
U-shaped or V-shaped cross section. The rear retainers 9 are formed
with a material having less danger of contaminating the substrates
W, e.g., a polybutylene terephthalate, polyether ether ketone,
polyester type elastomer, polyolefin type elastomer or the
like.
[0061] Each of the first supporting parts 20 has a thin region 21
and a thick region 22 as the first supporting parts 20 according to
the first embodiment have. The thin region 21 protrudes toward the
inside of the container main body 1 from the inside surface of the
corresponding side wall 4, and supports the peripheral edges of the
side parts of the substrates W in a horizontal attitude via the
resin layer 30. The thick region 22 is formed on the outer side of
the thin region 21, and prevents the substrates W from jumping out
or moving. Bumps 23 corresponding to the thickness of the substrate
W are formed between the thin region 21 and thick region 22. The
remaining parts are the same as in the above-mentioned first
embodiment; therefore, a description of these parts is omitted
here.
[0062] Actions and effects that are substantially similar to those
of the first embodiment can also be expected in this second
embodiment. Further, since the respective substrates W are clamped
and protected in the front and rear directions and rear retainers 9
by the front retainers 13 that have a shock-absorbing effect, it is
clear that even if the substrate storage container is subjected to
shocks during transport, there is no rattling of the substrates W,
and the substrates W can be held in a stable manner.
[0063] Further, in the above-mentioned embodiments, the lid member
10 includes the locking mechanism to be operated from the outside
via the through operating holes 42. However, the present invention
is not limited to this. For example, instead of or in addition to
the locking mechanism, an anchoring mechanism may be disposed on
the side portions of the lid member 10 in order to be engaged with
the anchoring blocks 41 protruding from the front portions of side
walls 4 of the container main body 1. Specifically, the anchoring
mechanism includes partially hollow anchoring pieces respectively
supported on both side portions of the lid member 10 so that the
anchoring pieces can rotate around the axes on the side portions of
the lid member 10 and engage in a detachable manner with the
anchoring blocks 41 of the container main body 1. This kind of
anchoring mechanism is disclosed, for example, in Japanese Patent
Application Laid-Open No. 2004-111830. Further, in cases where the
substrates W are supported by the first and second supporting parts
20 and 24 on the pair of side walls 4, the contacting portions 5 of
the respective side walls 4 in order to contact with the substrates
W may also be parts other than the inside surface portions 6
positioned on the extension line EL of the intersecting center line
perpendicular to the center line CL parallel to the direction of
inserting and removing the substrate W among the center lines
passing on the substrate W. For example, the contacting portions 5
may be the plurality of bent rear part inside surfaces 7 of the
respective side walls 4.
[0064] Further, the bent rear part inside surfaces 7 of the
respective side walls 4 and the second supporting parts 24 may also
be covered by the continuous resin layers 30, or may be covered by
layers independently covering the respective side walls 4 and the
second supporting parts 24. Further, the thin regions 21, the thick
regions 22 and the bumps 23 may also be shaped not by the resin
layers 30, but by the original shape of the first supporting parts
20 to be covered with the resin layers 30. Further, the side walls
4 including first and second supporting parts 20 and 24 may be
integrally molded by being inserted into a mold for the container
main body 1.
[0065] Moreover, the side walls 4 and container main body 1 may
also be integrally formed by laser welding, thermal fusion or
ultrasonic fusion. In this case, integration may be achieved by
interposing a sealing member such as packing or the like between
the respective side walls 4 and the remaining parts of the
container main body 1. Further, the sealing member may be
integrated beforehand with the side walls 4 or container main body
1, or may be formed as a separate member.
[0066] The present invention has the effect of being able to
suppress the scratching of the substrates W and the generation of
dust due to rubbing between the substrates W and supporting parts.
Further, the present invention also has the effect of being able to
suppress the contamination and scratching of the circumferential
edge parts and back surfaces of the substrates.
[0067] Further, if an elastic retainers 9, 13 that support the
peripheral edge parts of the substrates W are disposed on the
inside surface of the container main body, looseness of the
substrates W can be suppressed even if the substrate storage
container 200 is subjected to shocks during movement.
[0068] Further, if the first and second supporting parts 20 and 24
are respectively caused to protrude separately from both side walls
of the container main body, and if a clearance 25 is formed between
these first and second supporting parts 20 and 24, the amount of
material used in the first and second supporting parts 20 and 24
can be reduced. Further, since the contact areas with the
substrates can be reduced, contamination accompanied by the contact
can be reduced.
[0069] Here, substrates applicable for the present invention
include various types of single or multiple semiconductor wafers
(e.g., 200 mm, 300 mm or 450 mm types), liquid crystal glasses,
photo-mask glasses and precision substrates such as aluminum discs
or the like. The container main body 1 may be front-open box type,
top-open box type, FOSB type or FOUB type, and may be transparent,
opaque, or semi-transparent, and conductive or insulating.
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