U.S. patent application number 11/480615 was filed with the patent office on 2006-11-09 for methods and apparatus for sealing an opening of a processing chamber.
This patent application is currently assigned to Applied Material, Inc.. Invention is credited to Wendell T. Blonigan, Shinichi Kurita, Ke Ling Lee.
Application Number | 20060249701 11/480615 |
Document ID | / |
Family ID | 33452371 |
Filed Date | 2006-11-09 |
United States Patent
Application |
20060249701 |
Kind Code |
A1 |
Kurita; Shinichi ; et
al. |
November 9, 2006 |
Methods and apparatus for sealing an opening of a processing
chamber
Abstract
In one embodiment, a slit valve is provided that is adapted to
seal an opening and that includes a valve housing having a first
wall, a first opening formed in the first wall, a second wall and a
second opening formed in the second wall. The slit valve also
includes a closure member having a sealing portion adapted to
contact the second wall and seal the second opening, and a bracing
member moveable relative to the sealing portion and adapted to
contact the first wall. The slit valve further includes at least
one actuating mechanism adapted to (1) move the sealing portion
toward the second wall and into contact with the second wall; and
(2) move the bracing member away from the sealing portion and into
contact with the first wall so as to brace the sealing portion
against the second wall. Numerous other aspects are provided.
Inventors: |
Kurita; Shinichi; (San Jose,
CA) ; Lee; Ke Ling; (Cupertino, CA) ;
Blonigan; Wendell T.; (Pleasanton, CA) |
Correspondence
Address: |
DUGAN & DUGAN, PC
55 SOUTH BROADWAY
TARRYTOWN
NY
10591
US
|
Assignee: |
Applied Material, Inc.
|
Family ID: |
33452371 |
Appl. No.: |
11/480615 |
Filed: |
July 3, 2006 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
10844974 |
May 12, 2004 |
7086638 |
|
|
11480615 |
Jul 3, 2006 |
|
|
|
60470140 |
May 13, 2003 |
|
|
|
Current U.S.
Class: |
251/195 |
Current CPC
Class: |
F16K 3/188 20130101;
H01L 21/67126 20130101; F16K 51/02 20130101 |
Class at
Publication: |
251/195 |
International
Class: |
F16K 25/00 20060101
F16K025/00 |
Claims
1. A slit valve adapted to seal an opening comprising: a valve
housing having: a first wall; a first opening formed in the first
wall; a second wall; and a second opening formed in the second
wall; a closure member having: a sealing portion adapted to contact
the second wall and seal the second opening; and a bracing member
moveable relative to the sealing portion and adapted to contact the
first wall; and at least one actuating mechanism adapted to: move
the sealing portion toward the second wall and into contact with
the second wall; and move the bracing member away from the sealing
portion and into contact with the first wall so as to brace the
sealing portion against the second wall.
2. The slit valve of claim 1, wherein the at least one actuating
mechanism includes an actuator that comprises a portion of the
closure member and is disposed between the bracing member and the
sealing portion.
3. The slit valve of claim 1, wherein the sealing portion includes
a resilient element adapted to contact and seal against the second
wall.
4. The slit valve of claim 1, wherein the bracing member includes a
resilient element adapted to contact the first wall.
5. The slit valve of claim 1, wherein the bracing member is adapted
to assume a retracted transverse position within the sealing
portion.
6. The slit valve of claim 1, wherein the at least one actuating
mechanism comprises a pneumatic actuator adapted to be selectably
activated via positive pressure and vacuum pressure.
7. The slit valve of claim 6, wherein the pneumatic actuator is
adapted to employ positive pressure to move the bracing member from
a retracted transverse position against the sealing portion to a
deployed transverse position against the first wall.
8. The slit valve of claim 6, wherein the pneumatic actuator is
adapted to employ vacuum pressure to move the bracing member from a
deployed transverse position against the first wall to a retracted
transverse position against the sealing member.
9. The slit valve of claim 1, wherein the at least one actuating
mechanism includes a pneumatic actuator comprising a pressure
cell.
10. The slit valve of claim 9, wherein a portion of the bracing
member defines a boundary of the pressure cell.
11. The slit valve of claim 9, wherein a portion of the sealing
portion defines a boundary of the pressure cell.
12. The slit valve of claim 10, wherein the at least one actuating
mechanism further comprises a bellows, and wherein the bellows also
defines a boundary of the pressure cell.
13. The slit valve of claim 12, wherein the bracing member is
coupled to the sealing portion via the bellows.
14. The slit valve of claim 13, wherein no coupling between the
bracing member and the sealing portion exists except via the
bellows.
15. The slit valve of claim 12, wherein the bellows is oriented
such that an expansion of the pressure cell produces contraction of
the bellows.
16. The slit valve of claim 12, wherein the bracing member
comprises a plate, and wherein the plate also defines a boundary of
the pressure cell.
17. The slit valve of claim 16, wherein the bracing member is
adapted to assume a retracted transverse position away from the
first wall such that the plate of the bracing member is within the
sealing portion.
18. The slit valve of claim 16, wherein the bracing member is
adapted to assume a deployed transverse position against the first
wall such that the plate of the bracing member remains within the
sealing portion.
19. The slit valve of claim 1, wherein the at least one actuating
mechanism includes a first actuating mechanism that is external to
the slit valve housing.
20. The slit valve of claim 19, wherein the first actuating
mechanism comprises a pneumatic actuator adapted to be activated
via positive pressure.
Description
[0001] This application is a continuation of and claims priority
from U.S. patent application Ser. No. 10/844,974 filed May 12, 2004
which claims priority from U.S. Provisional Patent Application Ser.
No. 60/470,140, filed May 13, 2003, each of which is hereby
incorporated by reference herein in its entirety.
FIELD OF THE INVENTION
[0002] The present invention relates generally to semiconductor
device manufacturing and more particularly to methods and apparatus
for sealing an opening of a processing chamber.
BACKGROUND OF THE INVENTION
[0003] A substrate processing chamber typically communicates with a
substrate transfer chamber through a sealable opening that is both
wide and relatively short to accommodate insertion and removal of
horizontally-oriented substrates. It is known to use a slit valve
to seal such an opening. For example, a sealing plate of the slit
valve may be extended to seal the opening, and retracted to permit
passage of substrates through the opening. Slit valve designs that
avoid the problems of (1) particle generation through rubbing
friction, and (2) uneven compression of resilient sealing elements,
are preferred.
[0004] During certain types of substrate processing steps, a
pressure differential may exist between the processing chamber and
the transfer chamber such that high pressure within the processing
chamber pushes outward against the sealing plate of the slit valve.
The slit valve thereby is subjected to stresses and fatigue, the
amounts of which increase with the pressure differential. Pressure
differential effects are exacerbated when large substrates, such as
those employed for flat panel displays, are involved (e.g., as a
larger substrate requires a larger opening between the processing
chamber and transfer chamber and a larger sealing plate to seal
such an opening). Conventional slit valves typically are not
designed to accommodate large pressure differentials. Accordingly,
a need exists for improved methods and apparatus for sealing an
opening of a processing chamber, particularly when large pressure
differentials are being employed.
SUMMARY OF THE INVENTION
[0005] In a first embodiment of the invention, a slit valve is
provided that is adapted to seal an opening. The slit valve
includes a valve housing having (1) a first wall; (2) a first
opening formed in the first wall; (3) a second wall; and (4) a
second opening formed in the second wall. The slit valve also
includes a closure member having a sealing portion adapted to
contact the second wall and seal the second opening, and a bracing
member moveable relative to the sealing portion and adapted to
contact the first wall. The slit valve further includes at least
one actuating mechanism adapted to (1) move the sealing portion
toward the second wall and into contact with the second wall; and
(2) move the bracing member away from the sealing portion and into
contact with the first wall so as to brace the sealing portion
against the second wall.
[0006] In a second embodiment of the invention, a method of sealing
an opening is provided. The method includes providing a valve
housing having (1) a first wall; (2) a first opening formed in the
first wall; (3) a second wall; and (4) a second opening formed in
the second wall. The method further includes providing a closure
member having a sealing portion adapted to contact the second wall
and seal the second opening, and a bracing member moveable relative
to the sealing portion and adapted to contact the first wall. The
method also includes (1) moving the sealing portion toward the
second wall and into contact with the second wall; and (2) moving
the bracing member away from the sealing portion and into contact
with the first wall so as to brace the sealing portion against the
second wall. Numerous other aspects are provided.
[0007] Other features and aspects of the present invention will
become more fully apparent from the following detailed description,
the appended claims and the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] FIGS. 1A-1C illustrate an embodiment of an apparatus in
accordance with the present invention comprising a chamber
isolation valve.
[0009] FIG. 2 is a perspective exploded assembly view of an
inventive chamber isolation valve representing an exemplary
embodiment of the chamber isolation valve of FIGS. 1A-1C.
[0010] FIGS. 3A-3F are sectional assembly side views of the chamber
isolation valve of FIG. 2 taken at various locations along a length
of the chamber isolation valve.
[0011] FIG. 4 is a flowchart that illustrates an exemplary process
for sealing the first opening of the chamber isolation valve of
FIG. 2.
[0012] FIG. 5 is a flowchart that illustrates an exemplary process
for placing the closure member of the chamber isolation valve of
FIG. 2 in the longitudinally retracted position of the closure
member shown in FIG. 3F.
[0013] FIG. 6 is a schematic representation of a slit valve system
including the chamber isolation valve of FIG. 2 and a slit valve
control module adapted to operate and/or coordinate functions of
the chamber isolation valve.
[0014] FIG. 7 is a schematic representation of a particular
embodiment of the slit valve system of FIG. 6.
DETAILED DESCRIPTION
[0015] FIGS. 1A-1C illustrate an embodiment of an apparatus in
accordance with the present invention comprising a chamber
isolation valve 101. Also, when considered in light of the
discussion below, FIGS. 1A-1C illustrate an embodiment of an
inventive method for using the chamber isolation valve 101 to seal
an opening 102 (shown in phantom in FIG. 1A) to an adjacent
processing chamber P (shown in phantom in FIG. 1A) so as to permit
pressurization of the processing chamber P for processing of a
substrate contained therein.
[0016] The chamber isolation valve 101 may include a closure member
103 for sealing the processing chamber opening 102. In addition,
the chamber isolation valve 101 may comprise a valve housing 105
within which at least a portion of the closure member 103 may be
movably disposed. To permit the chamber isolation valve 101 to be
used in conjunction with an opening of a processing chamber, the
valve housing 105 of the chamber isolation valve 101 may be placed
against the processing chamber, e.g. such that a seal (not shown)
is formed between the valve housing 105 and the processing chamber
around the processing chamber opening to be sealed.
[0017] The closure member 103 may include a sealing portion 107 for
sealing the processing chamber opening 102. For example, the
sealing portion 107 may be utilized so as to seal the processing
chamber opening 102 indirectly, e.g., by sealing an opening to the
valve housing 105 that is aligned with the processing chamber
opening 102. Alternatively, the sealing portion 107 may be placed
in direct contact (not shown) with the processing chamber P such
that the sealing portion 107 seals around the processing chamber
opening 102.
[0018] The closure member 103 may further include a bracing member
109 that is movable relative to the sealing portion 107. For
example, the bracing member 109 may be adapted to extend away from
and retract toward the sealing portion 107. Further, the bracing
member 109 may be adapted to brace or buttress the sealing portion
107, for example, when the sealing portion 107 is in position to
seal the processing chamber opening 102 as described above. Such an
arrangement is inherently efficient in that it may decrease and/or
minimize the amount of force needed to counter a positive pressure
within the processing chamber P, especially as compared to
commonly-utilized cantilevered arrangements (not shown).
[0019] To provide for convenient movement of the closure member 103
relative to the processing chamber opening 102, the closure member
103 may also comprise an extended portion 111 extending from the
sealing portion 107. In such an embodiment, an end of the extended
portion 111 that is spaced away from the sealing portion 107 may be
adapted to be grasped and/or manipulated, e.g. by an actuator (see
FIG. 2) disposed inside or outside the valve housing 105, so as to
enable the closure member 103 to be moved as a unit (e.g. by moving
both the sealing portion 107 and the bracing member 109 together
via the extended portion 111). For example, the closure member 103
may be moved via the extended portion 111 toward and/or away from
the processing chamber opening 102 (transversely between the
respective configurations of the chamber isolation valve 101 shown
in FIGS. 1B and 1C or longitudinally between the respective
configurations of the chamber isolation valve 101 shown in FIGS. 1A
and 1B).
[0020] Preferably, the extended portion 111 of the closure member
103 is fixed in relation to the sealing portion 107 of the closure
member 103. For example, the sealing portion 107 and the extended
portion 111 may be of unitary construction as shown in FIG. 1A.
Alternatively the extended portion 111 may be fixedly coupled to
the sealing portion 107.
[0021] The valve housing 105 may define an enclosure 113, a first
opening 115 to the enclosure 113, and a second opening 117 to the
enclosure 113. Preferably, the first opening 115 and the enclosure
113 are aligned along a common axis with the processing chamber
opening 102 and are sized so as to permit passage of substrates
through the valve housing 105 and into and out of the processing
chamber P. For example, the first opening 115 may be spaced apart
from the processing chamber opening 102 and the second opening 117
may be disposed on the other side of the enclosure 113, adjacent
the processing chamber opening 102 and on the common axis. In one
or more embodiments, the second opening 117 may be placed in
pneumatic communication with the processing chamber opening 102
such that the second opening 117 essentially comprises an extension
of the processing chamber opening 102.
[0022] The valve housing 105 may further comprise a rear plate 119
within which the first opening 115 is formed. The rear plate 119
may be adapted, and appropriately located, so as to permit the
bracing member 109 to contact the rear plate 119 and push against
the rear plate 119 for bracing the sealing portion 107 of the
closure member 103 during sealing (as described further below).
[0023] The valve housing 105 may further comprise a front plate 121
within which the second opening 117 is formed. The front plate 121
may be adapted, and appropriately located, so as to permit the
sealing portion 107 of the closure member 103 to contact the front
plate 121 and seal around the second opening 117. Alternatively, as
discussed above, the sealing portion 107 may directly contact the
processing chamber P to seal the opening 102.
[0024] In operation, as shown in FIG. 1A, the closure member 103 of
the chamber isolation valve 101 is adapted to assume a retracted
position relative to the first and second openings 115, 117 wherein
the closure member 103 is spaced away from (e.g., below) the first
and second openings 115, 117. Such a configuration permits
substrates to be passed through the valve housing 105 and into and
out of the processing chamber P.
[0025] As shown in FIG. 1A, in at least one embodiment, the
enclosure 113 of the valve housing 105 may enclose the sealing
portion 107 of the closure member 103 while still permitting
passage of substrates through the valve housing 105. Also as shown
in FIG. 1A, the enclosure 113 of the valve housing 105 may enclose
the sealing portion 107 and the bracing member 109 with space to
spare, e.g. so as to provide a first gap 123 between the bracing
member 109 and the rear plate 119, and a second gap 125 between the
sealing portion 107 and the front plate 121.
[0026] The closure member 103 may be moved relative to the valve
housing 105 so as to assume a deployed position relative to the
first and second openings 115, 117 as shown in FIG. 1B wherein the
sealing portion 107 is disposed between the first and second
openings 115, 117. Preferably during such deployment, the first and
second gaps 123, 125 are maintained so as to reduce and/or
eliminate particle-generating friction and/or rubbing that might
otherwise arise between the closure member 103 and the valve
housing 105. It will now be apparent that substrates (not shown)
may no longer be passed through the valve housing 105, since the
closure member 103 blocks the path therethrough.
[0027] The closure member 103, which in FIG. 1B is shown in a
retracted position relative to the second opening 117 of the valve
housing 105, may be moved into a deployed position relative to the
second opening 117 as shown in FIG. 1C. As shown in FIG. 1C, the
sealing portion 107 of the closure member 103 is in contact with
the front plate 121, and may be caused to seal the second opening
117 of the valve housing 105. Preferably, and as demonstrated by
the chamber isolation valve 101 shown in FIGS. 1B and 1C, relative
motion between the sealing portion 107 of the closure member 103
and the front plate 121 of the valve housing 105 leading to sealing
of the second opening 117 is restricted to a direction that is
normal to front plate 121, so as to reduce and/or eliminate the
potential for particle generation via friction.
[0028] As may also be seen by comparing FIG. 1C to FIG. 1B, the
chamber isolation valve 101 may be adapted to generate a separation
force that moves the bracing member 109 relative to the sealing
portion 107 so as to cause the bracing member 109 to move away from
the processing chamber opening 102 (FIG. 1) and into contact with
the rear plate 119 of the valve housing 105. Alternatively, the
bracing member 109 may be caused to contact a portion of the
transfer chamber (not shown), or another structural member. The
chamber isolation valve 101 may then generate a bracing force, also
tending to urge the bracing member 109 away from the sealing
portion 107, so as to brace or buttress the sealing portion 107 of
the closure member 103 against the front plate 121 of the valve
housing 105, or against the processing chamber P (FIG. 1), as the
case may be. Such a bracing force may be generated in any number of
ways and at any number of locations relative to the closure member
103. For example, the bracing force may be both generated and
applied directly between the bracing member 109 and the sealing
portion 107, e.g. by a pneumatic actuator (see FIG. 2) disposed or
formed therebetween. Note that in at least one embodiment of the
invention, the bracing member 109 does not seal the first opening
115.
[0029] FIG. 2 is a perspective exploded assembly view of an
inventive chamber isolation valve 101a representing an exemplary
embodiment of the chamber isolation valve 101 of FIGS. 1A-1C. FIGS.
3A-3F are sectional assembly side views of the chamber isolation
valve 101a taken at various locations along a length of the chamber
isolation valve 101a and which describe structural and operational
aspects of the chamber isolation valve 101a. Structural and
functional descriptions appearing above with reference to the
chamber isolation valve 101 therefore also apply to the chamber
isolation valve 101a, with similar reference numerals being used to
indicate corresponding aspects (e.g., of structure) in the
figures.
[0030] Referring to FIGS. 2 and 3A, the valve housing 105 may
comprise an upper portion 127 and a lower portion 129 that is
coupled to the upper portion 127. The upper portion 127 may include
a resilient element 130 (FIG. 3A) so as to permit the rear plate
119 of the valve housing 105 to be sealed against an external
corresponding structure, such as a valve interface portion of a
transfer chamber (not shown). The lower portion 129 may include
resilient element 131 (FIG. 3A) for sealing the lower portion 129
of the valve housing 105 against the upper portion 127 of the valve
housing 105. The lower portion 129 may further include a first and
a second port 133 (FIGS. 2 and 3D) adapted to permit an extended
portion 111 of the closure member 103 to extend outward of the
valve housing 105 and to permit both longitudinal (e.g. vertical)
and transverse (e.g. horizontal) movement of the closure member 103
relative to the valve housing 105. More or fewer ports 133 may be
specified as necessary or as desired.
[0031] Referring to FIG. 2, the closure member 103 includes two
extended portions 111, each extended portion 111 being coupled to
the sealing portion 107, and the chamber isolation valve 101a being
configured such that each extended portion 111 extends through a
port 133. More or fewer extended portions 111 may be specified as
necessary or as desired.
[0032] Referring to FIGS. 2 and 3A-3F, the chamber isolation valve
101a may comprise a deployment mechanism 134 for moving the closure
member 103, e.g. relative to the valve housing 105 and/or the
processing chamber opening 102 (FIG. 1A). For example, the
deployment mechanism 134 may include one or more first actuators
135 (FIGS. 2 and 3A) for moving the closure member 103 between
longitudinally retracted and longitudinally deployed positions of
the closure member 103, shown respectively in FIGS. 3F and 3D. The
first actuator 135 may be one of many different types of suitable
devices. For example, a pneumatically-driven linear actuator such
as is embodied by the first actuator 135 of FIGS. 2 and 3A would be
suitable, as would be a belt- or screw-driven actuator.
[0033] The deployment mechanism 134 may further comprise one or
more external bellows 137 (FIG. 2) for protecting the enclosure 113
(FIG. 3D) of the valve housing 105 against intrusion of
contaminants through the ports 133. Each external bellows 137
corresponds to and is adapted to surround a separate extended
portion 111 of the closure member 103. Where more or fewer extended
portions 111 exist, the number of external bellows 137 may increase
or decrease accordingly. Each external bellows 137 may include a
first mounting flange 139 mounted to the valve housing 105 around
the port 133 through which the corresponding extended portion 111
extends.
[0034] The deployment mechanism 134 may further include one or more
second actuators 141 (FIGS. 2 and 3C) for moving the closure member
103 between transversely retracted and transversely deployed
positions of the closure member 103, shown respectively in FIGS. 3D
and 3E. Each second actuator 141 may be mounted to a first support
plate 143 which may in turn be movably mounted to the valve housing
105 via the first actuator 135. Each second actuator 141 may be one
of many different suitable devices. For example, a
pneumatically-driven linear actuator, such as is embodied by the
second actuator 141 of FIGS. 2 and 3C, would be suitable, as would
be a belt- or screw-driven actuator.
[0035] The deployment mechanism 134 may be adapted to guide the
first support plate 143 as the first actuator 135 moves the first
support plate 143 longitudinally relative to the valve housing 105.
For example, a first and a second support 149 may be affixed to and
extend from the valve housing 105, and the first support plate 143
may be slidably coupled to each support 149, e.g., via a rail 151
preferably fixedly coupled to each support 149, and a first and
second pair of trucks 153. Each pair of trucks 153 may be fixedly
coupled to the first support plate 143 and movably coupled to a
rail 151 so as to permit longitudinal movement of the first support
plate 143.
[0036] Referring to FIGS. 2, 3C and 3D, the deployment mechanism
134 may further include one or more brackets 145, each bracket 145
being secured to an end of a extended portion 111 that is spaced
apart from the sealing portion 107 of the closure member 103. The
deployment mechanism 134 may also include a second support plate
147, the second support plate 147 being movably mounted to the
first support plate 143 (and/or to the valve housing 105) via the
second actuator 141. Each bracket 145 may be coupled to the second
support plate 147 to provide a means by which the deployment
mechanism 134 may manipulate and/or move the closure member 103
(e.g. longitudinally, or transversely, or a combination
thereof).
[0037] The deployment mechanism 134 may be adapted both to guide
the second support plate 147 as the second actuator 141 moves the
second support plate 147 transversely relative to the first support
plate 143 and the valve housing 105, and to isolate the
transversely-operating second actuator 141 from the vertical force
represented by the combined weight of the closure member 103, the
second support plate 147 and the brackets 145 (e.g. so as to
facilitate smooth transverse translation of the closure member 103
relative to the valve housing 105). For example, as shown in FIGS.
2 and 3B, the deployment mechanism 134 may further comprise
bearings 155 extending from sides of the first support plate 143,
and each bracket 145 may comprise a guide slot 157 adapted to
accommodate a roller portion 159 of one of the bearings 155. As
such, while the second support plate 147 is moving transversely
relative to the first support plate 143, the bearings 155 and the
first support plate 143 may be caused to bear substantially all of
the weight of the closure member 103, the brackets 145 and the
second support plate 147 while still allowing that subassembly to
smoothly translate via overturning (rolling) communication between
the bearing roller portions 159 and-the bracket guide slots
157.
[0038] For instances in which the first opening 115 of the valve
housing 105 is relatively long, as with the chamber isolation valve
101a of FIG. 2, bracing member 109 may include a brace plate 161
that is similarly elongated. The brace plate 161 may comprise a
first side 163 (FIG. 3C) that faces toward the sealing portion 107,
on which a plurality of mounting bosses 165 (FIG. 3B) may be
provided. Each of the plurality of mounting bosses 165 may be
adapted to extend into a respective one of a plurality of pockets
167 (FIG. 2, see also FIG. 3B) formed within a non-sealing side 169
(FIG. 2) of the sealing portion 107. A respective one of an
equivalent plurality of drive plates 171 (FIG. 2) may be disposed
within each pocket 167 (see FIG. 3D) and coupled, preferably
fixedly, to the mounting boss 165 of the brace plate 161 extending
therein. A subassembly may thereby be formed comprising the brace
plate 161 as well as each drive plate 171 coupled to the brace
plate 161 via the mounting bosses 165.
[0039] The closure member 103 may be adapted to move the bracing
member 109 back and forth between the (transversely) retracted
position shown in FIG. 3D and the deployed or extended position
shown in FIG. 3E. For example, an actuating device may be employed
within the bracing member 109 and/or the sealing portion 107 of the
closure member 103 (e.g., so as to only minimally enlarge the
overall size of the closure member 103). For instance, the closure
member 103 may comprise at least one bracing actuator 173 (FIGS. 2
and 3E) as described below with reference to FIGS. 2 and 3B-3F.
[0040] When the first opening 115 is relatively long, as with the
chamber isolation valve 101a of FIG. 2, the closure member 103 may
include a plurality of bracing actuators 173 (e.g., depending on
the magnitude of bracing force that is required to be applied to
the sealing portion 107 via the bracing member 109 and/or the room
available on the non-sealing side 169 of the sealing portion 107 to
form pockets 167). Each bracing actuator 173 may be built into,
and/or integrated within the closure member 103 so as to be
comprised of portions of some of the components of the closure
member 103 already described above (e.g., a pocket 167 of the
sealing portion 107, and a drive plate 171 of the bracing member
109). In addition, each bracing actuator 173 may comprise a drive
plate bellows 175 (FIG. 3D) that includes a mounting flange 177
coupled to the non-sealing side 169 of the sealing portion 107
(e.g., around a pocket 167 of the sealing portion 107), and an
extensible wall portion 179 attached to the mounting flange 177 and
extending into the pocket 167, within which the extensible wall
portion 179 is attached to a drive plate 171.
[0041] With reference to FIG. 3E, each bracing actuator 173 may
comprise a pressure cell 181 comprising a pocket 167 of the sealing
portion 107 (see also FIG. 3B), a drive plate 171 of the bracing
member 109, the extensible wall portion 179 of the drive plate
bellows 175, and the mounting flange 177 (FIG. 3D) of the drive
plate bellows 175. The pressure cell 181 may be expanded via an
external source of pressurized gas (not shown) to force the bracing
member 109 against the rear plate 119. For example, FIG. 3E
illustrates a configuration of the chamber isolation valve 101a in
which the sealing portion 107 of the closure member 103 is deployed
against the front plate 121 of the valve housing 105, the bracing
member 109 of the closure member 103 is deployed against the rear
plate 119 of the valve housing 105, the extensible wall portion 179
of each drive plate bellows 175 is relatively compressed, and the
volume of the pressure cell 181 is relatively large.
[0042] Alternatively, the pressure cell 181 may be contracted via
an external source of vacuum pressure. For example, FIG. 3D
illustrates a configuration of the chamber isolation valve 101a in
which the bracing member 109 is retracted within a pocket 167 (FIG.
3B) of the sealing portion 107, the extensible wall portion 179 of
the drive plate bellows 175 is relatively extended, and the volume
of the pressure cell 181 (FIG. 3E) is relatively small. As will be
explained further below, each bracing actuator 173 may comprise one
such pressure cell 181 and may actuate (e.g., move/position/urge
the bracing member 109) via changes in the volume of the pressure
cell 181 and/or in the pressure (e.g., air pressure or fluid
pressure) within the pressure cell 181.
[0043] Each bracing actuator 173 may be energized pneumatically.
For example, each pocket 167 may be pneumatically coupled via a
conduit 183 (FIG. 3B) that penetrates the walls of each of the
pockets 167. Thus when the pressure cell 181 of one bracing
actuator 173 of the closure member 103 is subjected to increased
air or fluid pressure for expansion, or to vacuum pressure for
contraction as the case may be, the pressure cell 181 of each
bracing actuator 173 will tend to be similarly energized. As such
the collective force exerted by the bracing actuators 173 may move
the bracing member 109 relative to (e.g., toward or away from) the
sealing portion 107, according to the pressure existing in the
conduit 183.
[0044] The closure member 103 may be adapted to expose the conduit
183 to a source of vacuum pressure (not shown) for retracting the
bracing member 109 within the sealing portion 107, e.g., so as to
prevent contact between the bracing member 109 and the valve
housing 105 when the closure member 103 is in the longitudinally
retracted position of FIG. 3F, or is being moved into or out of
same. (The sealing portion 107 of the closure member 103 may be
similarly retracted from the front plate 121). The closure member
103 may also be adapted to expose the conduit 183 to a source of
pressurized gas (not shown) for extending the bracing member 109
away from the sealing portion 107 and/or to cause the bracing
member 109, when fully extended, to push against the rear plate 119
of the valve housing 105 so as to brace the sealing portion 107
against the front plate 121 of the valve housing 105 as shown in
FIG. 3E.
[0045] Exposure of the conduit 183 to a source of vacuum pressure
or of pressurized gas can be accomplished in any of a number of
ways. For example, one or both brackets 145 can include a socket
185 (FIG. 2) adapted to receive a pressure fitting (not shown),
e.g., an end fitting of a pressure hose. The pressure fitting (not
shown) may be adapted to mate with a pressure port 187 (FIG. 3E)
formed within the extended portion 111 of the closure member 103
that is in communication with an extended conduit 189 (FIG. 3C)
also formed within the extended portion 111 and leading to a
sealing portion interface 191 (FIG. 3C) of the extended portion
111. The sealing portion interface 191 may be made to seal against
an extended portion interface 193 of the sealing portion 107. A
resilient element 195 may provide for a seal between the two
interfaces. A feeder conduit 197 within the sealing portion 107 may
lead from the extended portion interface 193 to the conduit 183 of
the sealing portion 107. Such an arrangement provides a convenient
means for pneumatically actuating the bracing actuators 173 of the
closure member 103 and for exercising positive control (e.g.,
applying either vacuum or pressurized gas as necessary) over the
position of the bracing member 109 relative to the sealing portion
107 (e.g., at all times). Other configurations for applying vacuum
or pressurized gas to the bracing actuators 173 also may be
employed.
[0046] It should also be noted that the extensible wall portions
179 of each of the drive plate bellows 175 are compressed during
expansion of the pressure cells 181. Such an arrangement may
subject the extensible wall portions 179 to less stress and fatigue
than would be the case if the extensible wall portions 179 were
expanded during pressure cell expansion, thus increasing the useful
life of the drive plate bellows 175. The opposite arrangement may
be employed.
[0047] It is further noted that in one embodiment each of the
extended portions 111 of the closure member 103 may contact (see
FIG. 3E) an inner surface 154 (FIG. 3D) of the first mounting
flange 139 of an external bellows 137 as the sealing portion 107 of
the closure member 103 contacts the front plate 121 of the valve
housing 105. Such an arrangement may assist in providing a
positive, self-aligning limit to the extent to which the closure
member 103 moves toward the front plate 121 of the valve housing
105 (as described below). For instance, the position of the closure
member 103 within the valve housing 105 when contact is established
between the extended portion 111 and the first mounting flanges 139
may correspond to a desired initial degree of compression of a
resilient sealing element (not shown) between the sealing portion
107 of the closure member 103 and the front plate 121, such that
any further compression that may be required may be provided by the
bracing member 109 bracing the sealing portion 107 against the
front plate 121. In other embodiments, the extended portions 111
may remain out of contact with the inner surface 154 of the bellows
137 when the sealing portion 107 of the closure member 103 contacts
the front plate 121.
[0048] FIG. 4 is a flowchart that illustrates an exemplary process
400 for sealing the first opening 115 of the chamber isolation
valve 101a. Referring to FIG. 4, the process 400 may begin at a
step 401. At a step 402, the process 400 either proceeds to a step
403 or a step 404 depending on the longitudinal position of the
closure member 103 (FIG. 2). If the closure member 103 is in the
longitudinally retracted position illustrated in FIG. 3F, the
process 400 proceeds to step 403.
[0049] At the step 403, the closure member 103 is moved from the
longitudinally retracted position of FIG. 3F to the longitudinally
deployed position of the closure member 103 illustrated by FIG. 3D.
For example, the first actuator 135 of the deployment mechanism 134
may be caused to elevate the closure member 103 from the
longitudinally retracted position of FIG. 3F to the longitudinally
deployed position of FIG. 3D. In one or more embodiments of the
inventive method, before, during and/or after the above-described
elevation of the closure member 103, the deployment mechanism 134
maintains the second gap 125 (FIG. 1A) and one or more of the
bracing actuators 173 maintains the first gap 123 (FIG. 1A) between
the closure member 103 and the valve housing 105 to protect against
rubbing and/or particle generation during movement of the closure
member 103. Accordingly, in some such embodiments, the second
actuators 141 of the deployment mechanism 134 are actuated to
retain the closure member 103 in a transversely retracted position
away from the front plate 121 of the valve housing 105.
[0050] At the conclusion of the step 403, the closure member 103
will be in the vertically deployed position of FIG. 3D. As such,
the process 400 proceeds to a step 404.
[0051] At the step 404, the closure member 103 is transversely
deployed, e.g., is moved from the transversely retracted position
of the closure member 103 of FIG. 3D to the transversely deployed
position of the closure member 103 illustrated in FIG. 3E. For
example, one or more of the second actuators 141 of the deployment
mechanism 134 (and/or one or more of the bracing actuators 173) may
be caused to move the closure member 103 from the transversely
retracted position of the closure member 103 of FIG. 3D to the
transversely deployed position of FIG. 3E. By deactivating (e.g.,
depressurizing) the second actuators 141, the extended portions 111
may be transversely movable, and expansion of one or more of the
bracing actuators 173, spring biasing of the extended portions 111
or the closure member 103 or the like may move the sealing portion
107 toward the front plate 121. In one or more embodiments of the
inventive method, the above transverse deployment of the closure
member 103 results in the sealing portion 107 of the closure member
103 being moved into contact with the front plate 121 of the valve
housing 105. In some such embodiments and/or in other embodiments,
the above-described transverse deployment of the closure member 103
results in the extended portions 111 of the closure member 103
contacting corresponding inner surfaces 154 of the first mounting
flanges 139 of the external bellows 137.
[0052] Proceeding to a step 405 of the process 400, the bracing
member 109 of the closure member 103 is transversely deployed,
e.g., is moved to a transversely deployed position of the bracing
member 109 illustrated in FIG. 3E. For example, one or more of the
bracing actuators 173 (FIG. 2) of the closure member 103 may be
caused to move the bracing member 109 away from a transversely
retracted position of the bracing member 109 against and/or within
the sealing portion 107 (e.g., as illustrated in FIG. 3D), to the
transversely deployed position of FIG. 3E.
[0053] In one or more embodiments of the inventive method, the step
405 begins only after the step 404 is complete. In other
embodiments, the step 405 and the step 404 are performed
simultaneously and/or both steps are begun before either is
complete. In still further embodiments, the step 404 begins only
after the step 405 has begun. Additionally, in one or more
embodiments of the inventive method, before, during, and/or after
the above-described transverse deployments of the closure member
103 and the bracing member 109 of the closure member 103, the
deployment mechanism 134 is employed to maintain the closure member
103 in the longitudinally deployed position of the closure member
103 (FIG. 3E). For example, the first actuator 135 may remain
activated after elevating the closure member 103 (see step
402).
[0054] Proceeding to a step 406 of the process 400, the sealing
portion 107 is braced against the front plate 121 to seal the first
opening 115 formed therein. For example, the pressure in the
pressure cells 181 of each bracing actuator 173 may be increased
from what may have been a relatively low pressure sufficient to
move the bracing member 109 into place against the rear plate 119
(see the step 405) to a relatively high pressure commensurate with
the anticipated magnitude of pressure forces to be exerted by the
pressurized chamber P. Alternatively, if a pressure used to expand
the pressure cells 181 in the step 405 is high enough to resist the
anticipated pressure forces, or if the pressure was increased
gradually or step-wise during the step 405 to an adequately high
pressure, that same pressure may be maintained for as long as
bracing force is required.
[0055] With the closure member 103 being both longitudinally and
transversely deployed, the bracing member 109 being transversely
deployed and the sealing portion 107 being braced against the front
plate 121 so as to seal the first opening 115, the process 400 ends
at a step 407.
[0056] The process 400 may alternatively begin with one or more
steps to ensure that the first and second gaps 123, 125 between the
closure member 103 and the valve housing 105 exist prior to the
closure member 103 being longitudinally deployed (e.g., elevated)
by the first actuator 135 of the deployment mechanism 134. For
example, one or more of the bracing actuators 173 may be employed
in a direction opposite the bracing direction, e.g., via the
application of vacuum pressure, to ensure the bracing member 109
remains retracted against and/or within the sealing portion 107
(and away from the rear plate 119 of the valve housing 105) during
longitudinal deployment of the closure member 103. Further, one or
more of the second actuators 141 may be employed in a direction
opposite the sealing direction, e.g., via the application of
positive pressure (with movement in the sealing direction
occurring, e.g., by the force of a biasing element, such as a coil
spring (not shown) or by expansion of the pressure cells 181), to
ensure the sealing portion 107 of the closure member 103 remains
retracted away from the front plate 121 of the valve housing 105
during longitudinal deployment of the closure member 103.
[0057] FIG. 5 is a flowchart that illustrates an exemplary process
500 for placing the closure member 103 of the chamber isolation
valve 101a in the longitudinally retracted position of the closure
member 103 shown in FIG. 3F. Referring to FIG. 5, the process 500
may begin at a step 501. At a step 502, the process 500 either
proceeds to a step 503 or a step 504 depending on the transverse
position of the bracing member 109 (FIG. 2). If the bracing member
109 is not in a transversely retracted position, the process 500
proceeds to the step 503.
[0058] At the step 503, the bracing member 109 is transversely
retracted, e.g., moved to a transversely retracted position such as
is shown in FIG. 3D. For example, one or more of the bracing
actuators 173 may be caused to move the bracing member 109 from a
transversely deployed position of the bracing member 109, such as
is shown in FIG. 3E, to the transversely retracted position as
shown in FIG. 3D.
[0059] Proceeding to the step 504, the process 500 either proceeds
to the step 505 or a step 506 depending on the transverse position
of the closure member 103 (FIG. 2). If the closure member 103 is
not in a transversely retracted position, the process 500 proceeds
to step 505.
[0060] At the step 505, the closure member 103 is transversely
retracted, e.g., moved to a transversely retracted position such as
is shown in FIG. 3D. For example, one or more of the second
actuators 141 may be caused to move the closure member 103 from a
transversely deployed position of the closure member 103, such as
is shown in FIG. 3E, to the transversely retracted position as
shown in FIG. 3D.
[0061] In one or more embodiments of the process 500, two or more
of the steps 502, 503, 504 and 505 may occur simultaneously or in a
different order. Additionally, the step 505 need not begin only
after the step 503 is complete. Also, in one or more embodiments of
the process 500, before, during and after the retraction of either
or both the bracing member 109 and the closure member 103, the
deployment mechanism 134 may be employed to actively retain the
closure member 103 in the vertically deployed position of the
closure member 103 (FIG. 3E). For example, the first actuator 135
of the deployment mechanism 134 may be continuously activated for
this purpose.
[0062] Proceeding to the step 506, the closure member 103 is moved
to the longitudinally retracted position of the closure member 103
as shown in FIG. 3F. For example, the first actuator 135 of the
deployment mechanism 134 may be caused to move the closure member
103 from the longitudinally deployed position as shown in FIG. 3D
to the longitudinally retracted position shown in FIG. 3F. In one
or more embodiments of the process 500, before, during, and/or
after the above-described retraction of the closure member 103, the
deployment mechanism 134 and one or more of the bracing actuators
173 may maintain the first and second gaps 123, 125 (FIG. 1A)
between the closure member 103 and the valve housing 105 to protect
against rubbing and/or particle generation during longitudinal
movement of the closure member 103. For example, in some such
embodiments, the second actuators 141 may be prevented from moving
the closure member 103 transversely toward the front plate 121 of
the valve housing 105. Additionally, in one or more embodiments the
bracing actuators 173 may be prevented from moving the bracing
member 109 transversely toward the rear plate 119 of the valve
housing 105. As well, in one or more embodiments, one or more of
the bracing actuators 173 may be activated, e.g., via application
of vacuum pressure, to maintain a retracted position of the bracing
member 109 against/within the sealing portion 107 during
longitudinal retraction of the closure member 103.
[0063] The closure member 103 being both longitudinally and
transversely retracted, the chamber isolation valve 101a is now
configured to permit passage of substrates back and forth through
the valve housing 105 of the chamber isolation valve 101a, and the
process 500 ends at a step 507. Where it is advantageous or
desirable, additional steps may be taken to ensure the closure
member 103 remains spaced apart from the valve housing 105, even
when retracted and not moving. For example, one or more of the
bracing actuators 173 and/or one or more of the second actuators
141 may be continuously activated to maintain the first and/or
second gaps 123, 125 (FIG. 1A).
[0064] As relates to the processes 400, 500 of FIGS. 4 and 5, in
some embodiments of the chamber isolation valve 101a, the first
actuator 135 is adapted to actuate via the application of positive
pressure during both longitudinal deployment and longitudinal
retraction of the closure member 103. In some other embodiments of
the chamber isolation valve 101a, the first actuator 135 may be
adapted to actuate via positive pressure during longitudinal
deployment with gravity being employed for vertical retraction. In
further embodiments of the chamber isolation valve 101a, each
bracing actuator 173 may be adapted to actuate via a spring default
during transverse deployment of the closure member 103, and in some
such embodiments each second actuator 141 may be adapted to actuate
via positive pressure during transverse retraction of the closure
member 103 (e.g., for assurance of maintaining a transverse
retraction of the closure member 103 during longitudinal movement
of the closure member 103). In still further embodiments of the
chamber isolation valve 101a, each bracing actuator 173 may be
adapted to actuate via positive pressure during transverse
deployment of the bracing member 109 and via vacuum pressure (e.g.,
no spring default) during transverse retraction of the bracing
member 109 (e.g., to avoid having to overcome the force of a spring
default when deploying the bracing member 109). Other
configurations may be employed.
[0065] FIG. 6 is a schematic representation of a slit valve system
600 including the chamber isolation valve 101a of FIG. 2 and a slit
valve control module 601 adapted to operate and/or coordinate
functions of the chamber isolation valve 101a. For example, the
slit valve control module 601 may be adapted to interact with the
chamber isolation valve 101a so as to perform the process 400
illustrated by the flow chart of FIG. 4 and/or the process 500
illustrated by the flow chart of FIG. 5.
[0066] The slit valve control module 601 may comprise an
input/output module 603 adapted to generate and/or receive signals.
For example, the input/output module 603 may be adapted to:
[0067] (1) determine whether the closure member 103 is in a
longitudinally retracted position as illustrated in FIG. 3F;
[0068] (2) generate and transmit an electrical signal along a first
signal conductor 605 corresponding to the closure member 103 being
in the longitudinally retracted position of FIG. 3F;
[0069] (3) illuminate an indicator light (e.g., a green L.E.D.)
corresponding to the closure member 103 being in the longitudinally
retracted position of FIG. 3F;
[0070] (4) determine whether the closure member 103 is in a
longitudinally deployed position as illustrated in FIG. 3D;
[0071] (5) generate and transmit an electrical signal along a
second signal conductor 607 corresponding to the closure member 103
being in the longitudinally deployed position of FIG. 3D;
[0072] (6) illuminate an indicator light (e.g., a red L.E.D.)
corresponding to the closure member 103 being in the longitudinally
deployed position of FIG. 3D;
[0073] (7) determine whether the bracing member 109 is in a
transversely deployed position as illustrated on FIG. 3E;
[0074] (8) generate and transmit an electrical signal along a third
signal conductor 609 corresponding to the bracing member 109 being
in the transversely deployed position of FIG. 3E;
[0075] (9) prevent the signal (5) above from being generated and
transmitted, and the indicator light of (6) above from being
illuminated, until the bracing member 109 has been determined to be
in a transversely deployed position as in (7) above;
[0076] (10) receive an electrical signal along a fourth signal
conductor 611, e.g., so as to cause and/or permit the slit valve
control module 601 to operate the chamber isolation valve 101a so
as to perform the process 400 described above with reference to
FIG. 4 (e.g., seal the first opening 115 of the chamber isolation
valve 101a as illustrated in FIG. 3E);
[0077] (11) receive an electrical signal along a fifth signal
conductor 613, e.g., so as to cause and/or permit the slit valve
control module 601 to operate the chamber isolation valve 101a so
as to perform the process 500 described above with reference to
FIG. 5 (e.g., place the closure member 103 in the longitudinally
retracted position of the closure member 103 as illustrated in FIG.
3F);
[0078] (12) control and direct power to one or more pneumatic
switches of the slit valve control module 601 (not shown) adapted
to selectively reconfigure connections between and/or among a
plurality of pneumatic conduits having a connection to the slit
valve control module 601, such as: [0079] (a) a vacuum source
conduit 615; [0080] (b) a pressurized gas source conduit 617;
[0081] (c) an ambient (atmospheric) exhaust conduit 619; [0082] (d)
a brace actuation conduit 621; [0083] (e) a clamp actuation conduit
623; [0084] (f) a closure member lowering conduit 625; [0085] (g) a
closure member elevating conduit 627;
[0086] (13) detect the presence of elevated pressure (e.g.,
pressurization) in the brace actuation conduit 621;
[0087] (14) perform the function of (7) above at least in part via
the function of (13) above; and/or (15) detect the presence of
depressed pressure (e.g., vacuum) in the brace actuation conduit
621.
[0088] The slit valve control module 601 may also be adapted to
perform the following functions:
[0089] (16) selectively connecting the pressurized gas source
conduit 617 to the brace actuation conduit 621, e.g., so as to
actuate each bracing actuator 173 and thereby move the bracing
member 109 into the transversely deployed position illustrated in
FIG. 3E;
[0090] (17) selectively connecting the vacuum source conduit 615 to
the brace actuation conduit 621, e.g., so as to actuate each
bracing actuator 173 and thereby move the bracing member 109 into
the transversely retracted position illustrated in FIG. 3D;
[0091] (18) positively preventing the function of (17) above from
occurring while the pneumatic connection of (16) above exists;
[0092] (19) positively preventing the function of (16) above from
occurring while the pneumatic connection of (17) above exists;
[0093] (20) selectively connecting the pressurized gas source
conduit 617 to the clamp actuation conduit 623, e.g., so as to
actuate each second actuator 141 of the deployment mechanism 134
and thereby move the closure member 103 into the transversely
retracted position illustrated in FIG. 3D (e.g., by defeating a
spring default tending to deploy the closure member 103);
[0094] (21) selectively connecting the ambient exhaust conduit 619
to the clamp actuation conduit 623, e.g., so as to cease actuating
each second actuator 141 of the deployment mechanism 134 and to
allow a spring default (e.g., built into each deployment mechanism
134) or action of the bracing actuators 173 to dominate, thereby
moving the closure member 103 into the transversely deployed
position illustrated in FIG. 3E;
[0095] (22) selectively connecting the pressurized gas source
conduit 617 to the closure member lowering conduit 625, e.g., so as
to actuate the first actuator 135 (FIG. 3A) and thereby move the
closure member 103 into the longitudinally retracted position
illustrated in FIG. 3F;
[0096] (23) selectively connecting the ambient exhaust conduit 619
to the closure member elevating conduit 627, e.g., so as to
facilitate the function of (22) above;
[0097] (24) selectively connecting the pressurized gas source
conduit 617 to the closure member elevating conduit 627, e.g., so
as to actuate the first actuator 135 (FIG. 3A) and thereby move the
closure member 103 into the longitudinally deployed position
illustrated in FIG. 3D;
[0098] (25) selectively connecting the ambient exhaust conduit 619
to the closure member lowering conduit 625, e.g., so as to
facilitate the function of (24) above;
[0099] (26) simultaneously performing (22) and (23) above;
[0100] (27) simultaneously performing (24) and (25) above;
[0101] (28) selectively switching from (26) above to (27)
above;
[0102] (29) selectively switching from (27) above to (26)
above;
[0103] (30) simultaneously performing (17) and (20) above;
[0104] (31) simultaneously performing (16) and (21) above;
[0105] (32) selectively switching from (30) above to (31)
above;
[0106] (33) selectively switching from (31) above to (30)
above;
[0107] (34) positively preventing (16) and (21) from occurring
while the pneumatic connection of (22) exists;
[0108] (35) positively preventing (16) and (21) from occurring
unless the closure member 103 is in the vertically deployed
position illustrated in FIG. 3D;
[0109] (36) positively preventing (28) and (29) above from
occurring unless the pneumatic connection of (17) above exists;
[0110] (37) defaulting to (31) upon loss of power to the slit valve
control module 601;
[0111] (38) performing the process 400 of FIG. 4 by performing
(28), (27), (35), (16), (21) and (36) above;
[0112] (39) performing the process 400 of FIG. 4 by performing
(28), (27), (35), (16), (21), (36), (32) and (31) above;
[0113] (40) performing the process 500 of FIG. 5 by performing
(36), (20), (17), (29), (22), (23), (26), and (34) above;
and/or
[0114] (41) performing the process 500 of FIG. 5 by performing
(36), (33), (20), (17), (29), (23), (26), (34), and (30) above.
Numerous other functions also or alternatively may be
performed.
[0115] FIG. 7 is a schematic representation of a particular
embodiment 600a of the slit valve system 600 of FIG. 6 comprising
the chamber isolation valve 101a of FIG. 2 and a particular
embodiment 601a of the slit valve control module 601, wherein the
slit valve control module 601a is shown in more detail. Referring
to FIG. 7, the slit valve control module 601a is adapted to perform
the functions 1-41 as described above. The aspects/structure of the
slit valve control module 601a adapted to perform those functions
will be introduced and explained in the general order of the
functions.
[0116] Functions 1-3 may be encompassed in a first position switch
629, a first indicator light 631, and the first signal conductor
605. The first position switch 629 may be configured so as to be
normally open, and may be installed within or adjacent the chamber
isolation valve 101a such that it is actuated or closed when the
closure member 103 reaches the FIG. 3F longitudinally retracted
position. The first indicator light 631 can be a signal to a human
operator. The first signal conductor 605 can carry a signal to a
remote controller (not shown). Other uses for the first indicator
light 631 and/or the first signal conductor 605 are possible.
[0117] Functions 4-6 may by similarly encompassed in a second
position switch 635, a second indicator light 637, and the second
signal conductor 607. The second position switch 635 may be
configured so as to be normally open, and may be installed within
or adjacent the chamber isolation valve 101a such that it is
actuated or closed when the closure member 103 reaches the FIG. 3D
longitudinally deployed position. The second indicator light 637
and the second signal conductor 607 may function similarly to the
first indicator light 631 and the first signal conductor 605.
[0118] Function 7 may be encompassed in pressure switch 641. The
pressure switch 641 may be configured so as to be normally open,
and may be pneumatically coupled to the brace actuation conduit 621
(e.g., via an orifice 643 adapted to slowly equalize pressure on
either side of the orifice 643) so as to be actuated or closed when
the brace actuation conduit 621 is at positive pressure compared to
ambient pressure. Since positive pressure in the brace actuation
conduit 621 leads to transverse deployment of the bracing member
109 via actuation of each bracing actuator 173, and the orifice 643
may be actuated so as to equalize pressure only after the bracing
member 109 has deployed, the pressure switch 641 may perform
function 7.
[0119] Functions 8 and 9 may be encompassed by the third signal
conductor 609 and the fact that the pressure switch 641 must be
closed for the second indicator light 637 to light up or for the
third signal conductor 609 to receive power.
[0120] Functions 10 and 11 may be encompassed by the fourth signal
conductor 611 and the fifth signal conductor 613 respectively.
[0121] Function 12 may be encompassed by the fourth signal
conductor 611 and the fifth signal conductor 613, which may be
adapted to receive a signal (e.g., in the form of +24V or another
power level signal), as described below.
[0122] Function 13 may be encompassed in the pressure switch 641,
and function 14 is self-explanatory.
[0123] Function 15 may be encompassed in a vacuum switch 651. The
vacuum switch 651 may be configured so as to be normally open, and
may be pneumatically coupled to the brace actuation conduit 621
(e.g., via the orifice 643) so as to be actuated or closed when the
brace actuation conduit 621 is at vacuum pressure compared to the
ambient.
[0124] Function 16 may be encompassed in a master pressure source
valve 653. The master pressure source valve 653 may be configured
so as to be normally closed, and may connect the brace actuation
conduit 621 with the pressurized gas source conduit 617. The master
pressure source valve 653 may be further configured so as to be
actuated or opened when exposed at an actuation port to positive
pressure via a pneumatic conduit 655. The pneumatic conduit 655 may
be selectively connected either to the pressurized gas source
conduit 617 or the ambient exhaust conduit 619 via a first flow
regulator 657 (as well as through a pair of pneumatic switching
connectors as will be explained below).
[0125] Function 17 may be encompassed in a master vacuum source
valve 659. The master vacuum source valve 659 may be configured so
as to be normally closed, and may connect the brace actuation
conduit 621 with the vacuum source conduit 615. The master vacuum
source valve 659 may be further configured so as to be actuated or
opened when exposed at an actuation port to positive pressure via a
pneumatic conduit 661. The pneumatic conduit 661 may be selectively
connected either to the pressurized gas source conduit 617 or the
ambient exhaust conduit 619 via a second flow regulator 663 (as
well as through a pneumatic switching connector as will be
explained below).
[0126] The slit valve control module 601a may comprise a first
pneumatic switching connector 665, a second pneumatic switching
connector 667, and a third pneumatic switching connector 669, all
adapted to participate in the interface described in the above
described function 12. The first pneumatic switching connector 665
and the second pneumatic switching connector 667 are adapted to
establish and selectively vary the pneumatic connection
configuration between and/or among five separate pneumatic conduits
(two of which are always common with the ambient exhaust conduit
619, and one of which is always common with the pressurized gas
source conduit 617), and the second pneumatic switching connector
667 is adapted to establish and selectively vary the pneumatic
connection configuration between three separate pneumatic conduits
(one of which is always common with the ambient exhaust conduit
619).
[0127] The second pneumatic switching connector 667 is adapted to
assume pneumatic configuration A by default, wherein the default
mechanism may be, e.g., a spring, and is adapted to selectively
assume pneumatic configuration B, e.g., via high-side voltage being
applied to an actuation coil adapted to shift pneumatic
configuration B into the position occupied by configuration A as
shown in FIG. 7. The third pneumatic switching connector 669 is
adapted to assume pneumatic configuration C by default, wherein the
default mechanism may be, e.g., a spring, and is adapted to
selectively assume pneumatic configuration D as shown in FIG. 7,
e.g., via positive pressure being applied to a pneumatic actuation
mechanism 671 and the pneumatic actuation mechanism 671 thereby
actuating so as to shift pneumatic configuration D into the
position shown (e.g., moving configuration C out and moving
configuration D in). The first pneumatic switching connector 665 is
adapted to selectively assume either pneumatic configuration E, as
shown in FIG. 7, or pneumatic configuration F, e.g., via two
different high-side conductors (e.g., of +24V) being applied to
respective actuation coils that are adapted to move the first
pneumatic switching connector 665 from configuration E to
configuration F, or from configuration F to configuration E, as the
case may be.
[0128] The slit valve control module 601a may further include
additional high-side voltage conductors 673, 675 and 677, return or
ground conductors 679, 681, 683 and 685, and a third position
switch 687. The third position switch 687 may be configured so as
to be normally closed, and may be installed within or adjacent the
chamber isolation valve 101a such that it is actuated or opened
when the closure member 103 reaches the FIG. 3D longitudinally
deployed position.
[0129] It will be apparent to those skilled in the art upon reading
the present application and reviewing the figures of the present
application, especially FIG. 7, that the slit valve control module
601a is adapted to perform the above-described functions 16-41 via
selectively receiving a high-side voltage signal along the fourth
signal conductor 611 or the fifth signal conductor 613, and
permitting the remaining elements of the slit valve control module
601a to function as described above according to the schematic of
FIG. 7. For example, the master vacuum source valve 659 and the
master pressure source valve 653 are adapted to open in a mutually
exclusive manner, preventing the simultaneous application of vacuum
pressure and positive pressure to the brace actuation conduit 621
and each bracing actuator 173. As well, the circuits between the
fourth signal conductor 611 and the return or ground conductor 683,
and between the fifth signal conductor 613 and the return or ground
conductor 683, are incapable of being closed unless and until the
brace actuation conduit 621 is being exposed to vacuum pressure via
the master vacuum source valve 659, and the vacuum switch 651 is
thereby closed (this permits switching from configuration E to
configuration F, or vice versa, in the first pneumatic switching
connector 665). Additionally, the third pneumatic switching
connector 669 may not assume configuration D unless positive
pressure is received at the pneumatic actuation mechanism 671, and
the latter is not possible unless the first pneumatic switching
connector 665 is in configuration E as shown. Still further, the
third position switch 687, shown open in FIG. 7, is normally
closed, causing the second pneumatic switching connector 667 to
remain in configuration B (resulting in vacuum pressure being
applied to the brace actuation conduit 621 and the bracing member
109 to remain in the transversely retracted position of FIG. 3F)
until the closure member 103 reaches the longitudinally deployed
position of FIG. 3D, at which time the third position switch 687
opens, triggering the spring default of the second pneumatic
switching connector 667, and causing the second pneumatic switching
connector 667 to switch to configuration A. Other
configurations/systems for controlling the inventive valve 101,
101a may be employed.
[0130] The foregoing description discloses only exemplary
embodiments of the invention. Modifications of the above disclosed
apparatus and methods which fall within the scope of the invention
will be readily apparent to those of ordinary skill in the art. For
instance, according to one or more embodiments, pressure forces
within the processing chamber P tending to push the sealing portion
107 away from the processing chamber P may be opposed solely by
bracing force generated by the bracing actuators 173. In other
embodiments, the magnitude of the bracing force may be less than
that required to oppose the pressure forces within the processing
chamber P, and additional forces from other sources may be added
thereto to maintain a seal against the processing chamber opening
102.
[0131] In at least one embodiment of the invention, the main body
of the sealing portion 107 may be formed from a metal, such as
aluminum or the like. In such embodiments, the sealing portion 107
may include a resilient member 198 (FIG. 3E) that contacts the
front plate 121 and prevents metal portions of the sealing portion
107 from contacting the front wall 121 (e.g., so as to prevent
particle generation from metal-to-metal contact). The resilient
member 198 may include, for example, polyetheretherketone (PEEK) or
another suitable material (e.g., in the form of an o-ring or
similar sealing member). Likewise, in at least one embodiment, the
main body of the bracing member 109 may be formed from a metal,
such as aluminum or another suitable metal, and include a resilient
member 199 (FIG. 3E) that contacts the back plate 119 (to prevent
particle generation from metal-to-metal contact). The resilient
member 199 may include, for example, polyetheretherketone (PEEK) or
another suitable material (e.g., in the form of an o-ring or
similar sealing member). It will be understood that as used herein,
the sealing portion 107 may be said to contact the front plate 121
if its resilient member 198 or any other portion of the sealing
portion 107 contacts the front plate 121. Likewise, the bracing
member 109 may be said to contact the rear plate 119 if its
resilient member 199 or any other portion of the bracing member 109
contacts the rear plate 119.
[0132] In at least one embodiment of the invention, the bellows 137
and/or the extensible wall portion 179 may be formed of stainless
steel. Any other similar material may be employed.
[0133] Accordingly, while the present invention has been disclosed
in connection with exemplary embodiments thereof, it should be
understood that other embodiments may fall within the spirit and
scope of the invention, as defined by the following claims.
* * * * *