U.S. patent application number 11/472428 was filed with the patent office on 2006-10-26 for pod cover removing-installing apparatus.
This patent application is currently assigned to RIGHT MFG CO., LTD. Invention is credited to Tatsuhiko Nagata.
Application Number | 20060239803 11/472428 |
Document ID | / |
Family ID | 34708608 |
Filed Date | 2006-10-26 |
United States Patent
Application |
20060239803 |
Kind Code |
A1 |
Nagata; Tatsuhiko |
October 26, 2006 |
Pod cover removing-installing apparatus
Abstract
A cover can be unlocked even if a rectangular engaging groove
runs out of alignment to some extent during previous steps or
during a carrying operation from a previous step. A T-shaped key
14c consists of a head 141 and a neck 142 functioning as a rotation
axis for the head 141. The head 141 has four inclined sides 143
along the both longitudinal sides tapering from the center toward
the end. The T-shaped key 14c also has chamfers 144 formed on the
topside of each inclined sides 143.
Inventors: |
Nagata; Tatsuhiko; (Tokyo,
JP) |
Correspondence
Address: |
STAAS & HALSEY LLP
SUITE 700
1201 NEW YORK AVENUE, N.W.
WASHINGTON
DC
20005
US
|
Assignee: |
RIGHT MFG CO., LTD
Tokyo
JP
|
Family ID: |
34708608 |
Appl. No.: |
11/472428 |
Filed: |
June 22, 2006 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
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PCT/JP03/16563 |
Dec 24, 2003 |
|
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11472428 |
Jun 22, 2006 |
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Current U.S.
Class: |
414/411 |
Current CPC
Class: |
H01L 21/67772 20130101;
E05B 65/006 20130101; H01L 21/67373 20130101 |
Class at
Publication: |
414/411 |
International
Class: |
B65B 69/00 20060101
B65B069/00 |
Claims
1. (canceled)
2. A pod cover removing-installing apparatus to remove and install
a cover for an opening of a pod, the inside of which is kept
extremely clean, by causing the cover to engage a door of an
opening of a highly clean room, while maintaining high cleanliness
of the pod and the room by closely attaching the circumference of
the two openings, the cover being provided with a lock mechanism to
lock and unlock the opening of the pod by rotation of a rectangular
key groove provided inside the rectangular key hole, wherein the
door is provided with a locking member having a T-shaped key, the
head of which engages the rectangular key groove via the
rectangular key hole of the cover, and driving to lock or unlock
the locking mechanism by the rotation of the T-shaped key, the
T-shaped key is provided with an engagement allowance section for
allowing the engagement of the head with the rectangular key groove
according to deviation of the rotation angle of the rectangular key
groove of the rock mechanism, and the engagement allowance section
consists of inclined sides extending along the both longitudinal
sides of the head and tapering from the center toward the end.
3. The pod cover removing-installing apparatus according to claim
2, wherein the engagement allowance section consists of chamfers
formed on the top of the inclined sides.
4. (canceled)
5. The pod cover removing-installing apparatus according to claim
2, provided with a drive control means for controlling the locking
member to perform a locking motion after the T-shaped key has been
rotated the number of times, each time a prescribed angle, until
the head of the T-shaped key engages the rectangular key
groove.
6. The pod cover removing-installing apparatus according to claim
2, wherein the T-shaped key is provided with a rotation allowable
section on the head to allow rotation of the head according to
deformation of the periphery of the rectangular key hole of the
cover.
7. The pod cover removing-installing apparatus according to claim
6, wherein the rotation allowance section consists of chamfers
formed on the jaw side of the inclined sides.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a pod cover
removing-installing apparatus for a pod which contains and
transfers thin substrates such as semiconductor wafers from one
space to another space while maintaining the cleanliness of both
spaces.
[0003] 2. Description of the Background Art
[0004] FIG. 19 shows an example of a conventional pod cover
removing-installing apparatus.
[0005] This conventional pod cover removing-installing apparatus
100 is provided with a diaphragm 101 which partitions off a high
clean space A and a low clean space B, an opening 102 formed in the
diaphragm 101 that serves as a passage between the high clean space
A and the low clean space B, a door 103 which opens and closes the
opening 102 of the diaphragm 101, a latch mechanism 104 that
latches the cover 203 of the pod 200, with two positioning pins
104a, 104b and two T-shaped keys 104c, 104d provided in the door
103, and a table 105 provided in the low clean space B for mounting
the pod 200, which has three positioning pins 105a, 105b, 105c and
one lock key 105d.
[0006] The pod 200 is a container with an extremely clean internal
space C for containing a plurality of semiconductor wafers (25
wafers, for example).
[0007] This pod 200 is provided with a main container body 201, an
opening 202 provided on one side of the main container body 201, a
cover 203 for opening and closing the opening 202, the cover 203
having pin holes 204a, 204b for engaging the positioning pins 104a,
104b, and key holes 204c, 204d for engaging T-shaped keys 104c,
104d, and a bottom 205 having grooves 205a, 205b, 205c possessing a
V-shaped section for engaging the positioning pins 105a, 105b,
105c, and a key hole 205d for engaging the lock key 105d.
[0008] When the pod 200 is placed on the table 105, the three
positioning pins 105a, 105b, 105c engage the V-shaped
section-possessing grooves 205a, 205b, 205c. In this instance,
switching on a lock button, not shown in the drawing, causes the
lock key 105d to move upward, become angled, and engage the key
hole 205d. Then, the table 105 moves toward the diaphragm 101 for a
prescribed distance (about 30 mm, for example), thereby causing the
pod 200 to become attached to the diaphragm 101. A sealing material
such as an O-ring, not shown in the figure, is provided along the
circumference of the opening 102 of the diaphragm 101 and the
opening 202 of the pod 200, to ensure close attachment of the
openings and maintain cleanliness.
[0009] The movement of the table 105 causes the cover 203 of the
pod 200 to become closely attached to the door 103, whereby the
positioning pins 104a, 104b engage the pin holes 204a, 204b of the
cover 203 and the T-shaped keys 104c, 104d engage the key holes
204c, 204d. Thereafter, the T-shaped keys 104c, 104d are rotated
90.degree. by a rotary actuator or the like, not shown in the
figure, whereby nails 204e to 204h are pulled in to release the
lock between the container main body 201 and the cover 203.
[0010] Then, the door 103 is pulled into the space A (arrow D1) and
caused to descend (arrow D2) by a drive mechanism, not shown in the
figure, whereby the internal space C of the pod 200 and the
internal space A of the partition board 101 are brought into
communication while maintaining cleanliness.
[0011] In the above-described conventional technology, if some
trouble occurs during previous steps or during a carrying operation
from a previous step, one or both rectangular engaging grooves (not
shown) in key holes 204c, 204d that should engage the T-shaped keys
104c, 104d in the pod 200 run out of alignment in the rotational
direction and cannot engage the T-shaped keys 104c, 104d, resulting
in a problem that the cover 203 cannot be unlocked from the main
container body 201.
[0012] For example, in the pod cover removing-installing apparatus
in the previous step, the cover cannot smoothly open or close, and
is suspended in the state in which the rectangular engaging grooves
run out of alignment in the rotational direction.
[0013] In this instance, the automation line stops and it takes a
long period of time for restoring the line. In addition, if the
cover of the recovered pod is manually opened in a less clean
chamber, expensive wafers stored in the pod may become
unusable.
[0014] An object of the present invention is to provide a pod cover
removing-installing apparatus usable with various pods manufactured
by different manufacturers according to the SEMI standard and
capable of releasing lock of the cover when rectangular engaging
grooves run out of alignment during previous steps or during a
carrying operation from a previous step.
SUMMARY OF THE INVENTION
[0015] To achieve the above object, a first invention provides a
pod cover removing-installing apparatus to remove and install a
cover for an opening of a pod, the inside of which is kept
extremely clean, by causing the cover to engage a door of an
opening of a highly clean room, while maintaining high cleanliness
of the pod and the room by closely attaching the circumference of
the two openings, the cover being provided with a lock mechanism
for locking and unlocking the opening of the pod by rotation of a
rectangular key groove provided inside the rectangular key hole,
wherein the door is provided with a locking member having a
T-shaped key, the head of which engages the rectangular key groove
via the rectangular key hole of the cover, and driving to lock or
unlock the lock mechanism by the rotation of the T-shaped key, and
the T-shaped key is provided in the head section thereof with an
engagement allowance section for allowing the engagement of the
head with the rectangular key groove according to deviation of the
rotation angle of the rectangular key groove of the rock
mechanism.
[0016] A second invention provides the pod cover
removing-installing apparatus of the first invention, wherein the
engagement allowance section consists of inclined sides extending
along the both longitudinal sides of the head and tapering from the
center toward the end.
[0017] A third invention provides the pod cover removing-installing
apparatus of the second invention, wherein the engagement allowance
section consists of chamfers formed on the top of the inclined
sides.
[0018] A fourth invention provides the pod cover
removing-installing apparatus of the first invention, provided with
a drive control means for controlling the locking member to perform
a locking motion after the T-shaped key has been rotated for a
prescribed angle.
[0019] A fifth invention provides the pod cover removing-installing
apparatus of the first invention, provided with a drive control
means for controlling the locking member to perform a locking
motion after the T-shaped key has been rotated for the number of
times, each time for a prescribed angle, until the head of the
T-shaped key engages the rectangular key groove.
[0020] A sixth invention provides the pod cover removing-installing
apparatus of the first invention, wherein the T-shaped key is
provided with a rotation allowable section on the head to allow
rotation of the head according to deformation of the periphery of
the rectangular key hole of the cover.
[0021] A seventh invention provides the pod cover
removing-installing apparatus of the sixth invention, wherein the
rotation allowance section consists of chamfers formed on the jaw
side of the inclined sides.
BRIEF DESCRIPTION OF THE DRAWINGS
[0022] FIG. 1 is a perspective view showing an outline of a first
embodiment of the cover removing-installing apparatus for a pod of
the present invention.
[0023] FIG. 2 is a front view of the first embodiment of the cover
removing-installing apparatus for a pod of the present
invention.
[0024] FIG. 3 is an enlarged view of the part III of FIG. 2 and
shows the fine adjustment mechanism for the pod cover
removing-installing apparatus of the first embodiment.
[0025] FIG. 4 is an enlarged view of the part IV of FIG. 2 and
shows the centering mechanism for the pod cover removing-installing
apparatus of the first embodiment.
[0026] FIG. 5 is a cross sectional view along the line V-V of FIG.
2 and shows the holding mechanism of the pod cover
removing-installing apparatus of the first embodiment.
[0027] FIG. 6(a) is a perspective view and FIG. 6(b) is a cross
sectional view along the line VI-VI of FIG. 2, showing an eccentric
transmission mechanism for the pod cover removing-installing
apparatus of the first embodiment.
[0028] FIG. 7 is a cross sectional view along the line VII-VII of
FIG. 2 and shows the positioning securing means of the pod cover
removing-installing apparatus of the first embodiment.
[0029] FIG. 8 is a block diagram showing a control means for the
pod cover removing-installing apparatus of the first
embodiment.
[0030] FIG. 9 is a flowchart showing an operational example (cover
opening operation 1) for the pod cover removing-installing
apparatus of the first embodiment.
[0031] FIG. 10 is a flowchart showing an operational example (cover
opening operation 2) for the pod cover removing-installing
apparatus of the first embodiment.
[0032] FIG. 11 is a flowchart showing an operational example (cover
closing operation 1) for the pod cover removing-installing
apparatus of the first embodiment.
[0033] FIG. 12 is a flowchart showing an operational example (cover
opening operation 2) for the pod cover removing-installing
apparatus of the first embodiment.
[0034] FIG. 13 shows a T-shaped key unit for the pod cover
removing-installing member of the first embodiment, wherein FIG.
13(a) is a plan view, FIG. 13(b) is a side view, and FIG. 13(c) is
a front view.
[0035] FIG. 14 shows a T-shaped key unit extracted from FIG. 13,
wherein FIG. 14(a) is a front view, FIG. 14(b) is a side view, FIG.
14(c) is a plan view, and FIG. 14(d) is an enlarged view of the D
section of FIG. 14(a).
[0036] FIG. 15 is a drawing for describing the shape and engagement
movement of The T-shaped key 104c.
[0037] FIG. 16 is a drawing for describing the shape and engagement
movement of The T-shaped key 14c-1.
[0038] FIG. 17 is a drawing for describing the shape and engagement
movement of The T-shaped key 14c.
[0039] FIG. 18 is a flow chart showing subroutine for the unlock
operation of a motor 71 for locking the cover of S105 in FIG.
9.
[0040] FIG. 19 shows an example of a conventional pod cover
removing-installing apparatus.
DETAILED DESCRIPTION OF THE INVENTION AND PREFERRED EMBODIMENTS
[0041] The present invention will be described in more detail by
way of preferred embodiments with reference to the attached
drawings.
[0042] FIGS. 1 and 2 are drawings showing a first embodiment of the
pod cover removing-installing apparatus of the present invention,
wherein FIG. 1 is a perspective view showing an outline and FIG. 2
is a plan view of the apparatus.
[0043] This pod cover removing-installing apparatus is provided
with a diaphragm 11, an opening 12, a door 13 which opens and
closes the opening 12 of the diaphragm 11, two positioning pins
14a, 14b and two T-shaped keys 14c, 14d, a latch mechanism 14 which
opens and closes a cover 203 of a pod 200, and the like.
[0044] In the first embodiment, the door 13 is provided with a base
plate 13A and a position adjusting plate 13B movable in the
direction vertical to the plane so that its position can be
adjusted with respect to the base plate 13.
[0045] The door 13 is provided therein with four fine adjustment
mechanisms 20, two centering mechanisms 30, four holding mechanisms
40, two eccentric transmission mechanisms 50, one positioning
fixing means 60, and the like.
[0046] FIG. 3(a) and FIG. 3(b) are enlarged views of the part III
of FIG. 2 and show the fine adjustment mechanism for the pod cover
removing-installing apparatus of the first embodiment.
[0047] The fine adjustment mechanism 20 supports the position
adjusting plate 13B movable in the direction vertical to the plane
and exactly adjusts the position of the positioning pins 14a and
14b. This fine adjustment mechanism 20 is provided in the four
corners of the position adjusting plate 13B (see FIG. 1), each
having a fixture 21 for fastening and securing the base plate 13A
using a thread 21a, a female screw 22 for keeping the fixture 21
from loosening, a receiving member 23 of free bearings and the like
inserted into the fixture 21, a ball 24 rotatively supported by the
receiving member 23, an opposing plate 25 provided in the base
plate frame 13A-1 on the opposing side, a receiving member 26
provided in the opposing plate 25, a ball 27 rotatively supported
in the receiving member 26, a guide plate 28 provided on the side
of position adjusting plate 13B and movably squeezed by the ball 24
and the ball 27.
[0048] The fine adjustment mechanism 20 is designed so that in the
initial state in which the positioning pins 14a, 14b engage the pin
holes 204a, 204b of the pod 200 (see FIG. 19), tapered tips of the
positioning pins 14a, 14b move a prescribed distance (e.g. 3 mm in
every direction) vertically to the plane, while the tapered tips
match the tapered pin holes 204a, 204b. For this reason, even if
there is some error in the position of the pin holes 204a, 204b of
the pod 200, the positioning pins 14a, 14b can easily engage these
pin holes without colliding.
[0049] FIG. 4(a) and FIG. 4(b) are enlarged views of the part IV of
FIG. 2 and show the centering mechanism for the pod cover
removing-installing apparatus of the first embodiment.
[0050] The centering mechanism 30 is a mechanism for causing the
position adjusting plate 13B to return to the center. The centering
mechanism 30, consisting of two systems, one in the horizontal
direction (x direction) and the other in the vertical direction (y
direction), is provided with press boards 31x, 31y, securing
members 32x, 32y for securing the press boards 31x, 31y in the base
plate 13A, coil springs 33x, 33y for moving the press boards 31x,
31y to the center, securing members 34x, 34y for securing the other
ends of the coil springs 33x, 33y to the base plate 13A, guide
pieces 35, 37 which come into contact with the press boards 31x,
31y, securing members 36, 38 for securing the guide pieces 35, 37
in the position adjusting plate 13B and base plate 13A, and the
like.
[0051] The press board 31x aligns the guide pieces 35, 37 on a
straight line in the X direction. In the same manner, the press
board 31y aligns the guide pieces 35, 37 on a straight line in the
Y direction. The position adjusting plate 13B is centered by these
actions.
[0052] Although omitted from FIG. 2, a mechanism which is the same
but symmetrical with the mechanism shown in the upper right side is
provided in the upper left side of the FIG. 2.
[0053] Because the position adjusting plate 13B can move vertical
to the plane with respect to the base plate 13A by means of the
fine adjustment mechanism 20, the centering mechanism 30 always
causes the position adjusting plate 13B to be positioned in the
previously determined center position (the engaging position
without an error) in the initial state in which the positioning
pins 14a, 14b engage the pin holes 204a, 204b of the pod 200 (see
FIG. 19).
[0054] FIG. 5 is a cross sectional view along the line V-V of FIG.
2 and shows the holding mechanism of the pod cover
removing-installing apparatus of the first embodiment.
[0055] The holding mechanism 40 holds the position adjusting plate
13B to the cover 203 of the pod 200 at the position where the
positioning pins 14a, 14b engage. The holding mechanism 40 has a
securing plate 41 provided in a base plate frame 13A-1, a joint 43
connected with this securing plate 41 through the O-ring 42, having
a nozzle (not shown in the figure) connected to a vacuum pressure
source, and an absorption pad 44 provided in the joint 43 which is
capable of being attached to the position adjusting plate 13B.
[0056] Because the position adjusting plate 13B can move vertical
to the plane with respect to the base plate 13A by means of the
fine adjustment mechanism 20, the holding mechanism 40 can hold the
positioning pins 14a, 14b to engage the pin holes 204a, 204b of the
pod 200 (see FIG. 19). This structure ensures that the container
maintains the same position as the position before removal when the
cover 203 has been once removed and returned thereafter. Therefore,
the cover can be closed without impediment.
[0057] FIG. 6(a) is a perspective view and FIG. 6(b) is a cross
sectional view along the line VI-VI of FIG. 2, showing an eccentric
transmission mechanism for the pod cover removing-installing
apparatus of the first embodiment.
[0058] The T-shaped key 14c (14d) is provided in a prescribed
position of the position adjusting plate 13B to engage the key hole
204c (204d) of the cover 203 to lock the cover 203, and driven by a
lock drive mechanism 70 (see FIG. 2). This lock drive mechanism 70
is provided on the side of the base plate 13A and rotates in either
direction around the axis of the T-shaped key 14c (14d) to perform
locking or unlocking movements.
[0059] Because it is desirable to make the position adjusting plate
13B light for ease of movement, the lock drive mechanism 70 and the
like are preferably installed on the base plate 13A. For this
reason, an eccentric transmission mechanism 50 is provided to
transmit a driving force from the lock drive mechanism 70 to the
T-shaped key 14c (14d).
[0060] This eccentric transmission mechanism 50 allows a deflection
of the base plate 13A and position adjusting plate 13B in the
direction vertical to the plane and transmits a rotational force of
the lock drive mechanism 70 to the T-shaped key (locking member)
14c (14d).
[0061] As shown in FIG. 6, the eccentric transmission mechanism 50
has a driving lever 51 connected to the lock drive mechanism 70, a
rotation lever 52 rotatively connected to the driving lever 51, a
bearing 54 supporting the rotation lever 52 on the base plate 13A
in a freely rotative manner, transmission rollers 53A, 53B provided
on the rotation lever 52, a slide disc 55 having grooves 55a, 55b
orthogonally provided on both sides, into which the transmission
rollers 53A, 53B and transmission rollers 56A, 56B are respectively
inserted, a rotation board 57 provided on the same axis with the
T-shaped key 14c (14d), a bearing 58 having the transmission
rollers 56A, 56B provided therein and supporting the axis of the
rotation board 57 and the T-shaped key 14c (14d) on the position
adjusting plate 13B in a freely rotative manner, and the like.
[0062] The eccentric transmission mechanism 50 transmits a
rotational force of the lock drive mechanism 70 to the T-shaped key
14c (14d), even if the position adjusting plate 13B deviates from
its original position within a movable range in the direction
vertical to the plane.
[0063] Here, as shown in FIG. 2, the lock drive mechanism 70 is
provided with a motor 71, a drive screw 73 to which the rotation of
the motor 71 is transmitted by a belt 72, a slide axis 74 arranged
in parallel with the drive screw 73, a moving block 75 freely
slidably supported in the slide axis 74 and driven by a drive screw
73, a bearing 76 secured on a moving block 75 and engaging a long
hole in the driving lever 51, and the like.
[0064] When the bearing 76 is in the position (a), the rotation
lever 52 is in the position (a). When the bearing 76 moves to the
right and comes to the position (b), the rotation lever 52 rotates.
This causes the driving lever 51 to move that distance and to
descend to the point indicated by a chain line connected by two
dots. Because the bearing 76 is secured on the moving block 75, the
horizontal level of the position (b) remains the same as that of
the position (a). Because of this, a deviation of the engaging
position of the driving lever 51 and the bearing 76 is absorbed by
the long hole of the driving lever 51.
[0065] The T-shaped key 14c (14d) featuring the present invention
will now be described in detail.
[0066] FIG. 13 shows a T-shaped key unit of the cover
removing-installing apparatus of the first embodiment and FIG. 14
shows the T-shaped key extracted from FIG. 13. Since the T-shaped
keys 14c and 14d have the same shape, only the T-shaped key 14c
will be described.
[0067] As shown in FIG. 13, the T-shaped key unit comprises the
T-shaped key 14c, transmission rollers 56A, 56B, a rotation board
57 provided coaxially with the T-shaped key 14c, a bearing 58
rotatably supporting the axis of the rotation board 57 and T-shaped
key 14c on the positioning plate 13B, and the like.
[0068] As shown in FIG. 14, the T-shaped key 14c consists of a head
141 and a neck 142 functioning as a rotation axis for the head 141.
The head 141 has four inclined sides 143 along the both
longitudinal sides tapering from the center toward the end. An
angle of inclination (.psi.) of about 8-10.degree. has been
confirmed to be sufficient for the inclined sides 143 by
experiments of the present inventor.
[0069] The T-shaped key 14c has a chamfer 144 on the topside of
each inclined side 143. An angle of the chamfer (.PSI.) of about
10-12.degree. has been confirmed to be sufficient for the chamfers
144 by experiments of the present inventor.
[0070] FIGS. 15-17 are drawings for describing the shape and
engagement movement of the T-shaped key 14c.
[0071] In FIG. 15(a), 204c indicates a rectangular key hole, 104c
is a conventional T-shaped key, and 204i is a rectangular key
groove. In this embodiment, since there is a clearance between the
T-shaped key 104c and the key hole 204c, the T-shaped key 104c can
engage the rectangular key groove 204i via the key hole 204c even
if the rectangular key groove 204i is out of alignment at an angle
of .theta.1=.alpha. (the deviation allowance due to the clearance,
the clearance is 0.3-0.5 mm and .alpha. is about 4.degree. in this
embodiment) as shown in FIG. 15(b).
[0072] In FIG. 16(a), the T-shaped key 14c-1 does not have the
chamfers 144 for the T-shaped key 14c described in FIG. 14. In this
embodiment, since the T-shaped key 14c-1 has inclined sides 143,
the T-shaped key 14c-1 can engage the rectangular key groove 204i
via the key hole 204c even if the rectangular key groove 204i is
out of alignment at an angle of .theta.2=.alpha.+.beta. (wherein
.beta. is the deviation allowance angle due to the inclined sides
143) as shown in FIG. 16(b). When the angle of inclination of the
inclined sides 143 (.psi.) is 8.degree., .beta. is about
16.degree., and .theta.2 is 20.degree..
[0073] In FIG. 17(a), the T-shaped key 14c has the chamfers 144
described in FIG. 14. In this embodiment, since the T-shaped key
14c has the chamfers 144, the T-shaped key 14c can engage the
rectangular key groove 204i via the key hole 204c even if the
rectangular key groove 204i is out of alignment at an angle of
.theta.3=.alpha.+.beta.+.gamma. (wherein .gamma. is the deviation
allowance angle due to the angle of the chamfers 144) as shown in
FIG. 17(b). When the angle of the chamfers 144 (.PSI.) is about
30.degree., .gamma. is about 10.degree., and .theta.3 is
30.degree..
[0074] FIG. 7 is a cross sectional view along the line VII-VII of
FIG. 2, and shows the position securing means of the pod cover
removing-installing apparatus of the first embodiment.
[0075] The position securing means 60 of this embodiment has a
passage 61 provided in the axial direction of the positioning pin
14a (14b), a passage 62 provided in the vertical direction of the
passage 61 and joining therewith, a stretch member 63 formed from
rubber such as neoprene provided around the circumference of the
positioning pin 14a (14b) and capable of stretching according to an
increase or decrease in the internal pressure, a pipe 64 connected
with the passage 61, a securing member 65 for securing the pipe 64
at the rear end of the positioning pin 14a (14b), and the like.
[0076] In this position securing means 60, pipe 64 is connected to
a pneumatic circuit or a vacuum circuit, not shown in the figure,
which causes the internal pressure of the passages 61, 62 to
increase or decrease, thereby causing the stretch member 63 to
expand or contract, causing the gap between the positioning pins
14a, 14b and the pin holes 204a, 204b to be filled out. The
positioning pins 14a, 14b are secured in the position in this
manner.
[0077] FIG. 8 is a block diagram showing a control means for the
pod cover removing-installing apparatus of the first embodiment,
and FIGS. 9-12 are flow charts showing operations of the cover
removing-installing apparatus.
[0078] The control means 80 has various sensors 81 for detecting
the positions and the like of each moving part, a controller 82
which produces various control signals to control each drive part,
described later, based on the position detection signals from the
sensors 81, a driver 83 for converting control signals from the
controller 82 into drive signals conforming to each drive part, and
a drive part driven based on the drive signals from the driver 83,
including a position-keeping valve 84 which controls the flow of
the air pressure to the holding mechanism 40, a cover securing
valve 85 which controls the flow of the air pressure to a cover
securing means 60, a cover locking motor 71 of a lock drive means
70, a container moving motor 86, a door moving motor 87, and the
like.
[0079] Next, the cover opening operation will be described
referring to FIGS. 9 and 10.
[0080] The controller 82 drives the position-keeping valve 84 to
the release side (Step 101, the step is hereinafter referred to as
"S") and, upon confirmation of release with a sensor (S 102, YES),
drives the container moving motor 86 to move the pod 200 forward (S
103), then, upon confirmation that the pod 200 has come to the
joining position (S 104, YES), stops the container moving motor
86.
[0081] Because the holding mechanism 40 is canceled in this state
by the position-keeping valve 84, the position adjusting plate 13B
is not only free, but also has been moved to the center by the
centering mechanism 30. When the pod 200 comes to the joining
point, the position adjusting plate 13B can be moved by the fine
adjustment mechanism 20, enabling the complete joining of the cover
203 of the pod 200 and the door 13 even though the pin holes 204a
and 204b of the pod 200 deviate in the allowable range with respect
to the positioning pins 14a, 14b.
[0082] Next, the cover locking motor 71 is driven to the unlock
side (S105) and the T-shaped keys 14c and 14d are rotated to
retract the nails 204e-204h of the cover 203. When the sensor
confirms that the nails 204e-204h have been retracted (unlock)
(S106, YES), the cover securing valve 85 is driven to the securing
side (S107) to expand the stretch member 63 of the positioning pins
14a, 14b, confirming the securing of the pin holes 204a, 204b with
the sensor (S108, YES).
[0083] In the final stage of the operation S107, even if there is a
deviation between the positioning pins 14a, 14b and pin holes 204a,
204b, and the position adjusting plate 13B has been moved, the
T-shaped keys 14c, 14d can rotate due to the eccentric transmission
mechanism 50.
[0084] Moreover, accurate positioning is possible because the pin
holes 204a, 204b are secured by expanding the stretch member 63 of
the positioning pins 14a, 14b.
[0085] Next, as shown in FIG. 10, the position-keeping valve 84 is
driven to the hold side (S109), confirming the holding with the
sensor (S110, YES), and causing the door to reverse by driving the
door moving motor 87 (S111). Upon confirmation that the door has
reversed (S112, YES), the door moving motor 87 is further driven to
move the door downward (S113). When the door has reached the lower
limit (S114, YES), the operation to terminate the process is
stopped.
[0086] In this state, the position-keeping valve 84 is driven to
the hold side and holds the position of the position adjusting
plate 13B in its original position in the later-described door
closing operation. Therefore, the door does not collide with the
opening 202 of the pod 200 when closed.
[0087] Next, the cover closing operation will be described
referring to FIGS. 11 and 12.
[0088] Referring to FIG. 11, the controller 82 drives the door
moving motor 87 to elevate (S201) to the upper limit point (S202,
YES), then to go forward (S203) until the door 13 starts rejoining
the pod 200. Upon confirmation of the initiation of rejoining by a
sensor (S204, YES), the position-keeping valve 84 is driven to the
release side (S205). Upon confirmation of the release by a sensor
(S206, YES), the door moving motor 87 is driven forward (S207)
until rejoining is complete, whereupon the door moving motor 87 is
stopped and the rejoining with the pod 200 is confirmed by a sensor
(S208).
[0089] Next, the cover securing valve 85 is driven to the release
side (S209) to cause the stretch member 63 of the positioning pins
14a, 14b to become contracted. The release from the pin holes 204a,
204b is confirmed by a sensor (S210, YES). The cover locking motor
71 is driven to the lock side (S211) to rotate the T-shaped keys
14c, 14d and cause the nails 204e to 204h to protrude and lock the
cover, which is confirmed by a sensor (S212, YES).
[0090] Finally, the container moving motor 86 is driven to move the
pod 200 backward (S213). Upon confirmation by a sensor that the pod
200 has reversed (S214, YES), the container moving motor 86 is
stopped to terminate the cover closing operation.
[0091] Next, the T-shaped key control operation when the
rectangular key groove 204i of the cover 203 is out of alignment,
featuring the present invention, will be described.
[0092] FIG. 18 is a flow chart showing subroutine for the unlock
operation of a motor 71 for locking the cover of S105 in FIG.
9.
[0093] When S1050 in FIG. 18 is called for by S105 in FIG. 9,
whether or not the heads 141 of the T-shaped keys 14c, 14d have
engaged the rectangular key grooves 204i is judged (S105). When the
answer is YES, the operation proceeds to S1058 in which the cover
locking motor 71 is rotationally driven to the unlock side, and
then the operation returns to the flow of FIG. 9.
[0094] When the answer of S1051 is NO, a pod moving motor 86 is
withdrawn (S1052) and T-shaped keys 14c and 14d are rotated a small
angle (in this case about 3o) by a cover locking motor 71
(S1053).
[0095] The pod moving motor 86 is then driven forward (S1054) again
to judge whether the heads 141 of the T-shaped keys 14c, 14d have
engaged the rectangular key groove 204i (S1055). If the response in
S1055 is YES, the operation proceeds to S1058; if NO, the operation
proceeds to S1056.
[0096] A prescribed number of operations (four times here) is
counted. Whether or not the number has been counted up to four is
judged (S1056). If the response is NO, the operations of
S1052-S1055 are repeated; if YES, the operation proceeds to S1057,
wherein an alarm is given, and then the operation returns to the
flow of FIG. 9.
[0097] As described above, since the T-shaped key 14c is provided
with the inclined sides 143 and chamfers 144 and, in addition, is
rotated a small angle during an engaging operation, the T-shaped
key 14c can engage the rectangular key groove 204i via the key hole
204c, even if the rectangular key groove 204i is out of alignment
with respect to the key hole 204c.
(Modification)
[0098] The present invention is not limited to the above-described
embodiments and can be varied or modified in various ways. Such
variations and modifications are within the scope of equivalency of
the present invention.
[0099] (1) For example, in FIG. 18, when the answer to the judgment
(S1051) as to whether the engagement has been successfully
completed is NO, the T-shaped keys 14c and 14d may be rotated a
small angle by a cover locking motor 71 (S1053) without withdrawing
the pod moving motor 86. In this instance, whether or not the
engagement at that position has been successful may be again judged
(S1055).
[0100] (2) When the T-shaped keys 14c and 14d are not engaged in
the operation of FIG. 18, the T-shaped keys 14c and 14d are
restored to the original angle (0.degree.) to repeat the operation
of FIG. 18.
[0101] (3) Although an embodiment of the T-shaped key 14c with the
chamfers 144 was described, the T-shaped key 14c-1 without the
chamfers 144 described in FIG. 16 is also within the scope of the
present invention.
[0102] (4) The T-shaped key 14c may have a chamfer (rotation
allowance) 145 on the jaw side of the inclined side 144 of the head
141. This arrangement ensures rotation of The T-shaped key 14c even
if the periphery of the key holes 204 of the cover 203 inwardly
deforms.
* * * * *