U.S. patent application number 11/364812 was filed with the patent office on 2006-09-14 for mask container.
Invention is credited to Christian Andersen, Anthony Mathius Tieben, Brian Wiseman.
Application Number | 20060201958 11/364812 |
Document ID | / |
Family ID | 36969745 |
Filed Date | 2006-09-14 |
United States Patent
Application |
20060201958 |
Kind Code |
A1 |
Tieben; Anthony Mathius ; et
al. |
September 14, 2006 |
Mask container
Abstract
A hinged mask-package container with a spring latch for use in
the transportation and storage of substrates. The container has a
base and lid secured by a slidable spring latch that accepts the
container's lid by sliding along the rail when the lid is pressed
down to meet the base and then secures the lid and base by sliding
back into its original position. The container also employs a
living hinge made by an overmolding process whereby the hinge is
formed in a first mold and then the container lid and base are
formed and joined to the hinge in a second mold.
Inventors: |
Tieben; Anthony Mathius;
(Jordon, MN) ; Andersen; Christian; (Carver,
MN) ; Wiseman; Brian; (Glencoe, MN) |
Correspondence
Address: |
PATTERSON, THUENTE, SKAAR & CHRISTENSEN, P.A.
4800 IDS CENTER
80 SOUTH 8TH STREET
MINNEAPOLIS
MN
55402-2100
US
|
Family ID: |
36969745 |
Appl. No.: |
11/364812 |
Filed: |
February 26, 2006 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
60657314 |
Feb 27, 2005 |
|
|
|
Current U.S.
Class: |
220/835 ;
220/324; 220/4.23; 220/839 |
Current CPC
Class: |
G03F 7/70741 20130101;
H01L 21/67373 20130101; H01L 21/67353 20130101; H01L 21/67359
20130101; G03F 1/66 20130101 |
Class at
Publication: |
220/835 ;
220/324; 220/004.23; 220/839 |
International
Class: |
B65D 43/14 20060101
B65D043/14; B65D 45/16 20060101 B65D045/16; B65D 6/28 20060101
B65D006/28 |
Claims
1. A mask-package container, the container comprising: a lid and a
base defining a storage area, the lid and the base each having a
hinge face and a latch face, wherein the lid and base are hingedly
connected at their hinge faces; the latch face of the base
including a rail extending distally from the base and a spring
mount extending from the rail, the rail having a rail base, a rail
platform fixed to the rail base, and a rail endpoint spaced from
the spring mount; the latch face of the lid including a
latch-engagement member extending distally from the lid, the
latch-engagement member having a guide portion; and a latch
mechanism for securing the base to the lid, the latch mechanism
defining an enclosure and including a latch carriage and a spring,
the latch carriage slidably engaging the rail, wherein the latch
carriage has a lid-engagement member including a guide portion and
a notch portion sized to receive the lid's guide portion, the latch
mechanism's spring being disposed within the latch carriage
extending from an enclosed side of the latch carriage to the spring
mount on the latch face of the base, the latch mechanism being
slidably disposed along the rail subject to the compression of the
spring by an interaction of the lid's guide portion with the latch
carriage's guide portion, the latch mechanism's movement being
limited in one direction by the rail endpoint and in the other
direction by spring forces resulting from displacement of the latch
carriage and spring toward the spring mount.
2. The mask-package container of claim 1 wherein the latch carriage
and spring are molded integrally.
3. The mask-package container of claim 1 wherein the latch carriage
includes a second engagement member below the lid-engagement member
for allowing the latch to be actuated from below.
4. The mask-package container of claim I wherein the lid's
latch-engagement member has the form of a ramp and the latch
carriage's lid-engagement member has the form of an opposing
ramp.
5. A mask package having a latch mechanism, the mask package
container having a lid and a base, each with latch faces that
together form a rail having first and second endpoints and a spring
mount spaced between the endpoints, the latch mechanism comprising:
a latch carriage slidably engaging the rail and enclosing the
spring mount a spring disposed within the latch carriage toward the
spring mount wherein the latch carriage has a first position that
keeps the lid and base latch faces together or apart, the latch
carriage's position on the rail being bounded by the first rail
endpoint and retained by the spring's force on the spring mount;
wherein the latch carriage has second position that allows the lid
and base latch faces to meet or separate, the second position being
reached upon application of force urging the latch carriage against
the spring force in a retracting direction and toward the second
rail endpoint.
6. The mask-package container of claim 5 wherein the latch carriage
and spring are molded integrally.
7. The mask-package container of claim 5 wherein the container has
two of the latch mechanisms and they are arranged to have
oppositely oriented retracting directions facilitating automatic
actuation.
8. The mask-package container of claim 5 wherein the lid's
latch-engagement member has the form of a ramp and the latch
carriage's lid-engagement member has the form of an opposing
ramp.
9. A mask package container including a base, a lid, and a hinge
connecting the base to the lid, made by the process of: providing a
first mold and a first polymer for the hinge of a mask package
container providing a second mold and a second polymer for the base
and lid of a mask package container; molding the hinge in the first
mold with the first polymer; removing the hinge from the first
mold; placing the hinge in the second mold; molding the lid and
base around the hinge with the second polymer.
10. The mask package container of claim 9 made by a process further
comprising the steps of: providing a third mold and a third
polymer; molding a latch for securing the lid to the base in the
third mold from the third polymer; fitting the latch to a side of
the lid or base without the hinge.
11. The mask package container made by the process of claim 9
wherein the second mold provides the base and lid each with latch
faces and portions of a rail extending distally from the latch
faces.
12. The mask package container made by the process of claim 10
wherein the second mold provides the base and lid each with latch
faces and portions of a rail extending distally from the latch
faces and wherein the step of fitting the latch includes the step
of fitting the latch to a portion of the rail.
13. The mask package container made by the process of claim 9
wherein the first and second polymers are the same.
14. The mask package container made by the process of claim 9
wherein the first and second polymers are different.
15. The mask package container made by the process of claim 10
wherein the third polymer is the same as either the first or second
polymers.
16. The mask package container made by the process of claim 10
wherein the third polymer is different from the first and second
polymers.
17. The mask package container made by the process of claim 10
wherein the step of molding the latch includes molding a spring
integral to the latch.
18. The mask package container made by the process of claim 9
wherein the first polymer comprises a plurality of polymers.
19. The mask package container made by the process of claim 10
wherein the first polymer comprises a plurality of polymers.
20. A method of opening a latched reticle container as described in
claim 7 and including the step of forcing a mechanical actuator
between the two latch carriages forcing them apart.
Description
RELATED APPLICATION
[0001] The present application claims the benefit of U.S.
Provisional Application No. 60/657,314 filed Feb. 27, 2005, which
is incorporated herein in its entirety by reference.
FIELD OF THE INVENTION
[0002] This invention relates to sealable hinged latchable
containers for storing and transporting masks used in manufacturing
integrated circuits.
BACKGROUND
[0003] Semiconductor components, such as integrated circuits, are
made using semiconductor wafers. To this end, relatively fragile
masks (or reticles) are used to project and define dimensions and
locations of the structures in the final product. These masks are
generally in the form of a substantially planar substrate. During
manufacture, small particles of foreign material may settle upon
the masks or substrate, hence damaging the mask or the product
being manufactured or otherwise interfering with the manufacturing
process. These foreign particles are present in the environments in
which masks are stored and transported. Because of the fragile
nature of masks and the necessity to prevent adherence of foreign
particles to the masks, containers are used. These containers serve
the dual purpose of protecting the masks from damage and providing
a dust-free microenvironment. Containers for masks have
conventionally been manufactured from separate top cover or lid and
a bottom or base. The portions are molded separately with each
having a hinge portion integral on the back side thereof. The
containers are then assembled utilizing a metal hinge pin to
complete the hinge. A simple manually slidable C-shaped latch
positioned on a rail on the front of the base piece is manually
slid to capture a tab on the top cover when closed to secure the
package shut. The hinge portions are conventionally formed of the
same materials as the top cover and base and typically has plastic
to plastic rubbing contact as well as plastic to metal rubbing
contact which can cause abrading and particle generation. A latch
that secures a lid to a base automatically and a hinge that could
be incorporated with minimal assembly steps and without the plastic
to plastic or plastic to metal rubbing contact and thus without the
associated particle generation would be quite desirable.
SUMMARY OF THE INVENTION
[0004] The invention addresses the needs of the industry in part by
a providing a container for storing and transporting masks and a
process for making the container by sequentially molding its
components using overmolding techniques and a living hinge. The
container includes a lid, a base, a hinge, and a latching
mechanism. In one embodiment, the hinge is formed of a first
material by injection molding. The hinge is placed in a mold to
overmold the base and cover thereon. Thus the base and lid formed
integrally--or connected mechanically by the overmolding--to the
hinge by a second injection molding. The hinge has a living hinge
portion that functions with no rubbing or abrading contact. The
latching mechanism, which includes a sliding latch member
configured as a C-shaped latch carriage and an integrally formed
spring, slidably engages a rail on the front side of the base. The
spring biases the latch member to an original normal position that
is the "latch" position. The latch can be automatically actuated,
that is, moved out of the latch position to accept and latch with
the top cover, when a ramp-shaped extension, that is a cam surface,
of the lid presses against a ramp-shaped beveled surface, a
cooperating cam surface, of the latch as the lid is being closed to
the base. The force of the downward moving lid extension contacts a
cam surface and urges each of the two latch carriages outboard
until the lid tab extensions enters notches in the latch carriages,
thereby releasing the latch carriage to it original position under
the force of the spring. When the lid extension is thus seated, it
is aligned with the rail and the latch spring retains the latch
mechanism in a locked and closed position. Another downwardly
facing ramp-shaped beveled edge of the latch may be used to
automatically open the latch mechanism by an actuator moving
upwardly from below.
[0005] A feature and advantage of the invention is that the latch
mechanism may be manually or robotically operated and robotically
operated with simple vertical moving actuating arms extending
either upwardly from below or downwardly from above.
[0006] A feature and advantage of the invention is a minimal number
of parts. For example each latch mechanism consists of only one
additional component in addition to the portions of the top cover
and base that are utilized. This facilitates simplicity, easy
cleaning, an minimizes manufacturing costs such as assembly
costs.
[0007] A feature and advantage is the lack of rubbing components in
the hinge.
[0008] A feature and advantage of preferred embodiments of the
invention is that the latch carriages both are biased inwardly to
their latched position facilitating robotic actuation for opening
by inserting between the two latch carriages an actuator with cam
surfaces that can simultaneously urge outwardly both latch
carriages by a simple vertical motion coming either from above or
below the container.
[0009] A feature and advantage of preferred embodiments is that the
latch carriages have cam surfaces that can be both actuated by a
actuator cam portion on the top lid and also robotically. Moreover
the latches are readily operated manually.
[0010] These and other objects, features, and advantages of this
invention will become apparent from the description which follows,
when considered in view of the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0011] FIG. 1 is a perspective view of one embodiment of a
container according to the inventions herein when in a closed
position;
[0012] FIG. 2 is a perspective view of the inside of the container
of FIG. 1 when in an open position;
[0013] FIG. 3 is a plan view of the outside of the container of
FIG. 1 when in an open position.
[0014] FIG. 4 is a side, cross sectional view of the container of
FIG. 1 when in an open position.
[0015] FIG. 5 is a perspective view illustrating the function of
the latch mechanism with the container partially open and the latch
carriage in its normal position.
[0016] FIG. 6 is a perspective view illustrating the function of
the latch mechanism with the top cover commencing to engage the
base at the latching mechanism deflecting the latch carriage
outwardly.
[0017] FIG. 7 is a perspective view illustrating the function of
the latch mechanism with the top cover closed on the base at the
latch carriage of the latching mechanism returned to its normal
position.
[0018] FIG. 8 is an view of the hinge before incorporation in the
container.
[0019] FIG. 9 is a view of the hinge before incorporation in the
container.
[0020] FIG. 10 is perspective view of the top of the hinge before
incorporation in the container.
[0021] FIG. 11 is perspective view of the bottom of the hinge
before incorporation in the container.
[0022] FIG. 12 is an end view of the hinge in a fully extended
position before incorporation in the container.
[0023] FIG. 13 is an end view of the living hinge portion of the
hinge.
[0024] FIG. 14 is an end view of the hinge in a fully folded
position before incorporation in the container.
[0025] FIG. 15 is an end view of the hinge in a fully folded
position before incorporation in the container.
[0026] FIG. 16 is a cross sectional side view of the hinge
mechanism integrally molded with the lid and base of this
invention;
[0027] FIG. 17 is a perspective view of the container from the back
side illustrating the hinge in the fully folded position.
[0028] FIG. 18 is a front elevational view of the latch
carriage.
[0029] FIG. 19 is a top plan view of the latch carriage.
[0030] FIG. 20 is a rear side elevational view of the latch
carriage.
[0031] FIG. 21 is an end view of the latch carriage.
[0032] FIG. 22 is a perspective view of a corner of the base
illustrating the latch carrage retracted from its normal
position.
[0033] FIG. 23 is a perspective view of the mechanism engaging lid
extension of the present latch mechanism.
[0034] FIG. 24 is a side view of a rail of the base as part of the
latch mechanism.
[0035] FIG. 25 is an illustration as to how both latch mechanisms
can be simultaneously operated by a simple cam actuator either from
above or below the container.
[0036] It is understood that the above-described figures are only
illustrative of the present invention and are not contemplated to
limit its scope.
DETAILED DESCRIPTION
[0037] FIGS. 1-4 show an embodiment of the mask (reticle) container
of the invention. The container is depicted generally at 100 and
includes an upper member such as a cover or lid 102, a lower member
or base 104, a hinge 106, and a pair of latching mechanisms
108.
[0038] The lid 102, in turn, has a shell 110 with a generally
planar top 112, opposed longitudinal sides 114 and 116 and opposed
lateral sides 118 and 120, thereby defining a lid cavity 121.
Disposed within the lid cavity 121 are opposed recess structure 122
and 124 and laterally opposed reticle restraints or cushions 126
and 128. Exemplary cushions suitable for some embodiments of the
invention are disclosed in U.S. Pat. No. 6,216,873, hereby
incorporated by reference.
[0039] The base 104 has a shell portion 129 having a generally
planar bottom 130, opposed longitudinal sides 132 and 134, and
generally opposed lateral sides 136 and 138, thereby defining a
base cavity 140. Posts 142, 144, 146, and 148 are attached to the
bottom 130 proximate the four comers of the base cavity 140.
Laterally opposed recessed structure 150 and 152 are positioned at
the lateral sides 136 and 138, respectively. A rim 154 is defined
at the periphery of the lid 102 and a ledge 156 is defined at a
periphery of the base 104. The rim 154 sealingly contacts the ledge
156 when the container is closed.
[0040] In use, a mask is placed in the cavity 140 and is supported
and confined by the posts 142-148. When the lid 102 is closed,
cushions 126 and 128 resiliently confine the mask vertically and
laterally.
[0041] Referring to FIGS. 2, 3, 4, and 8-17, the hinge 106
unitarily (or otherwise integrally) has a first hinge member 170
and a second hinge member 172, which are separated by a hinge
portion 174 as shown in FIGS. 6-16. The hinge portion 174, as
described in more detail below, is an area of reduced thickness to
enable the hinge to functionally and pivotally flex when attached
to the lid and base and constitutes a "living hinge." First hinge
member 170 may be considered to include a planar portion 180
terminating in a lip 182. A second hinge member 172 has respective
first, second, and third planar portions 186, 188, and 190 and a
lip 192. As can be seen the first, second, and third planar
portions 186, 188, and 190 angularly adjoin and the third planar
portion 190 terminates at the lip 192. As best shown in FIG. 13,
the hinge portion 174 is defined by a generally arcuate groove 194
and a generally opposed notch 196.
[0042] Referring to FIGS. 1, 2, 4-7, and 18-24, each latching
mechanism 108 has a latch carriage 200, a rail 202, and a top cover
projection or extension 204. Latch carriage 200, as best shown in
includes a C shaped in the vertical cross-section) body 208
accommodating a spring 210. The spring is preferably serpentine in
shape and is compressible within the body. The latch carriage 200
has beveled (angled) generally converging, inboard lateral edges
214 and 216 that function as cam surfaces. The latch carriage 208
also has a generally curvilinear front member 218, with a plurality
of gripping extensions 220, and a rear member 222. The rear member
222 defines upper and lower notches 224 and 226 via respective
extensions 228 and 230 and lip 232 and 234 extending inwardly from
the extensions 226 and 228.
[0043] The rail 202, as best shown in FIGS. 5-7, 22, and 24, has a
first extension 240 extending from the longitudinal side 132 of the
base 104. Respective second and third extensions 242 and 244 extend
from the first extension 240 and are dimensioned to slidingly
accommodate the notches 226 and 228 of the latch 200. The rail 202
may also include a spring mount 246 outboard the structure formed
by the first second and third extensions 240, 242, and 244.
[0044] Extension 250 extends from the longitudinal side 114 of the
lid 102 and presents a generally angled surface 252 as shown in
FIGS. 23 and 25. A lip 254 extends from a main portion 256 of the
extension 250. When the container is fully closed the lip 254
generally aligns with the third extension 244 of the base latch
assembly.
[0045] Latch 200 is slidingly disposed on rail 202 such that the
spring 210 abuts and biases the latch 200 away from the spring
mount 246. When the container is closed, the angled surface 252 of
the lid extension 204 contacts the angled lateral edge 214 of the
latch 200, thereby forcing the latch 200 to slide away there from
and compressing the spring 210 against the adjacent spring mount
246. When the lid is completely closed, the spring 210 decompresses
to allow the latch 200 to be displaced away from the spring mount
246 such that the notch 224 of the latch 200 is accommodated
partially by the rail 254. In this position, the latch 200 spans
the extension 215 and the rail 202, thereby securing the lid in a
closed position. The beveled edge 216 is useful for automatically
opening the latch from above or below, such as by automatic
handling equipment 257 as shown in FIG. 26. The handling equipment
forces the latch 200 open by exerting an upward force on the
beveled edge 216, thereby urging the latch outboard and allowing
the lid and base rail portions to disengage. Similarly, referring
to FIGS. 5, 6, and 7, the beveled edge 252 or cam surface of the
projection of the top lid automatically causes the latch carriage
to retract as indicated by the arrow 251 in FIG. 6 by engagement
with the beveled surface 214 of the latch carriage. The projection
then clears the beveled surface allowing the latch carriage to snap
back to its normal position as indicated by the arrow 253 of FIG.
7.
[0046] In one embodiment, the container is made by a process that
includes sequential molding operations. In one exemplary process,
the hinge is molded and allowed to cure. Then the hinge is removed
from the first mold and placed in a second mold. The second mold is
injected with a second polymer suitable for the lid and base
members. FIG. 16 shows how the hinge is embedded in the present lid
and base and how the lips 182 and 192 anchor and secure the
hinge--in addition to mechanical or chemical bonding between the
polymers used to form the hinge, lid and base. The latch 200 is
molded separately, with the latch carriage and spring formed
integrally. The integral lid, base, and hinge are removed from the
second mold after being allowed to cure. The latch is installed on
the rail 202. Finally, cushions are affixed to the lid 102.
Suitable sequential molding processes are disclosed in U.S. Pat.
Nos. 6,428,729, 6,719,381, 6,402,552, and 6,077,124, and U.S.
Patent Application 20030025244, each hereby incorporated by
reference.
[0047] FIG. 16 shows the conformation of the hinge when the
container of this invention is fully opened. FIG. 14 shows the
hinge in a closed position and FIG. 15 depicts the hinge generally
mid-way between the open and closed positions. These figures
illustrate how hinging is accomplished when the hinge flexes at
portions having reduced thickness at the hinge portion 174. In
certain embodiments the flexible hinge material may be mechanically
attached to the base and top cover in a separate operation, rather
that during an overmolding operation. In some embodiments the
living hinge may be formed with two materials: a flexible material
for the living hinge and another material suitable for attachment
to the base and top cover by means such as welding or by a second
overmolding operation.
[0048] Suitable materials used to form the hinge include
polypropylene and polyurethane, optionally with an inherently
dissipative polymer to dissipate static electricity. Suitable
materials for the lid, base, and hinge include acrylonitrile
butadiene-styrene (ABS), optionally with a static dissipative
property, e.g., StatPro 435.TM. is such a material utilized in
molding these types of products by Entegris, Inc. the owner of the
this application. Other polymers may also be used, depending on the
specific application intended for the container. Polymers suitable
for these and other applications are disclosed in Handbook of
Plastics, Elastomers, and Composites, Charles A. Harper,
Editor-in-Chief, Third Edition, 1996, McGraw-Hill, hereby
incorporated by reference.
[0049] Although not illustrated in the figures, an elastomeric seal
may be utilized with the container to seal between the top cover
and base when the container is closed. In certain embodiments, the
seal may be formed before the top cover and base are molded and may
be inserted in the molds for said top cover and base to be joined
by overmolding.
[0050] Because numerous modifications of this invention may be made
without departing from the spirit thereof, the scope of the
invention is not to be limited to the embodiments illustrated and
described. Rather, the scope of the invention is to be determined
by the appended claims and their equivalents.
* * * * *