U.S. patent application number 11/341926 was filed with the patent office on 2006-08-17 for substrate processing apparatus.
This patent application is currently assigned to Dainippon Screen Mfg., Co., Ltd.. Invention is credited to Ichiro Mitsuyoshi.
Application Number | 20060182560 11/341926 |
Document ID | / |
Family ID | 36815800 |
Filed Date | 2006-08-17 |
United States Patent
Application |
20060182560 |
Kind Code |
A1 |
Mitsuyoshi; Ichiro |
August 17, 2006 |
Substrate processing apparatus
Abstract
One transport robot transports an FOUP among a load port, a
third mounting section, and a shelf array. The other transport
robot, which is disposed on the reverse side of the one transport
robot with the shelf array interposed between the two, transports
an FOUP between the shelf array and a second mounting section.
Executed in the third mounting section are mapping processing and
transportation of a substrate encased in an FOUP to a substrate
processing unit. This enables a plurality of transportations to be
executed at almost the same time. Additionally, the two transport
robots can execute transportation of an FOUP without mutual spatial
interference.
Inventors: |
Mitsuyoshi; Ichiro; (Kyoto,
JP) |
Correspondence
Address: |
OSTROLENK FABER GERB & SOFFEN
1180 AVENUE OF THE AMERICAS
NEW YORK
NY
100368403
US
|
Assignee: |
Dainippon Screen Mfg., Co.,
Ltd.
|
Family ID: |
36815800 |
Appl. No.: |
11/341926 |
Filed: |
January 27, 2006 |
Current U.S.
Class: |
414/411 |
Current CPC
Class: |
H01L 21/67769 20130101;
H01L 21/67772 20130101 |
Class at
Publication: |
414/411 |
International
Class: |
B65B 69/00 20060101
B65B069/00 |
Foreign Application Data
Date |
Code |
Application Number |
Jan 28, 2005 |
JP |
JP2005-021361 |
Nov 17, 2005 |
JP |
JP2005-332651 |
Claims
1. A substrate processing apparatus that performs processing of a
substrate, comprising: a substrate processing unit to perform
processing of a substrate; a cassette storing and transporting unit
that stores and transports a cassette to encase a substrate, and
that is disposed side by side with respect to said substrate
processing unit; and a first mounting section that mounts said
cassette and is disposed side by side with respect to said cassette
storing and transporting unit, said cassette storing and
transporting unit having: a plurality of shelves to hold a
cassette; a second mounting section that mounts a cassette and is
disposed between said substrate processing unit and said plurality
of shelves; a first transporting section to transport a cassette
between said first mounting section and said plurality of shelves;
and a second transporting section to transport a cassette between
said plurality of shelves and said second mounting section.
2. The substrate processing apparatus according to claim 1, wherein
said first transporting section is disposed between said first
mounting section and said plurality of shelves, and transports a
cassette from a direction of one side of said plurality of shelves
to said plurality of shelves.
3. The substrate processing apparatus according to claim 2, wherein
said second transporting section is disposed between said substrate
processing unit and said plurality of shelves, and transports a
cassette from a direction of the other side of said plurality of
shelves to said plurality of shelves.
4. The substrate processing apparatus according to claim 3, wherein
said first transporting section and said second transporting
section have a holding element to hold a cassette from the
underside of said cassette; and said plurality of shelves have a
passage section to allow said holding element to pass through in
the vertical direction.
5. The substrate processing apparatus according to claim 4, wherein
said cassette storing and transporting unit mounts a cassette and
further has a judging section to judge the situation with regard to
a substrate encased in a cassette.
6. The substrate processing apparatus according to claim 5, wherein
said first transporting section transports a cassette between said
judging section and said first mounting section.
7. The substrate processing apparatus according to claim 6, wherein
said cassette storing and transporting unit further having: an
alignment section to adjust the position of a substrate; and a
third transporting section that takes out substrates one by one
from a cassette mounted on said judging section and transports them
to said alignment section, and that transports substrates one by
one, the position of which is adjusted in said alignment section,
to a cassette mounted on said judging section.
8. The substrate processing apparatus according to claim 1, wherein
said plurality of shelves are arranged in two dimensions along the
vertical direction and the horizontal direction.
9. The substrate processing apparatus according to claim 1, wherein
said cassette storing and transporting unit further comprises a
lifting mechanism that causes a cassette mounted on said second
mounting section to ascend and descend while holding said
cassette.
10. The substrate processing apparatus according to claim 5,
wherein said judging section has: an opening and closing mechanism
to open and close a lid of a cassette existing in said judging
section; and a counting mechanism to count the number of substrates
encased in a cassette that is opened and closed by said opening and
closing mechanism.
11. The substrate processing apparatus according to claim 1,
further comprising: an opening and closing mechanism to open and
close a lid of a cassette mounted on said second mounting
section.
12. The substrate processing apparatus according to claim 11,
wherein said substrate processing unit has a transporting mechanism
to load and unload a substrate with respect to a cassette mounted
on said second mounting section.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a substrate processing
apparatus that performs processing of a semiconductor substrate, a
glass substrate for a liquid crystal display, a glass substrate for
a photomask, a substrate for an optical disk, and the like (which
are hereinafter referred to as a "substrate"). In particular, the
invention relates to an improvement to transport efficiently a
cassette in a cassette storing and transporting unit.
[0003] 2. Description of the Background Art
[0004] Conventionally, there has been known a substrate processing
apparatus having a cassette storing and transporting unit that
stores a cassette encasing a substrate, and transports a cassette
to transfer a substrate between substrate processing units. The
traditionally known substrate processing apparatus has such an
advantage that the depth of a loader 10 can be reduced thereby to
decrease its footprint.
[0005] However, in the traditionally known substrate processing
apparatus, a transport robot of a loader section is disposed
between a storage shelf and a load port. Therefore, when a cassette
is transferred between the load port and the loader section, it is
necessary to withdraw the transport robot into a suitable
position.
[0006] In the conventionally known substrate processing apparatus,
one transport robot performs transportation between the storage
shelf and an opener. Hence, the transportation from the storage
shelf to the opener, and the transportation from the opener to the
storage shelf cannot be executed almost simultaneously.
SUMMARY OF THE INVENTION
[0007] The present invention is directed to a substrate processing
apparatus that performs processing of a substrate.
[0008] According to the present invention, the substrate processing
apparatus includes a substrate processing unit, a cassette storing
and transporting unit, and a first mounting section. The substrate
processing unit performs processing of a substrate. The cassette
storing and transporting unit stores and transports a cassette to
encase a substrate, and is disposed side by side with respect to
the substrate processing unit. The first mounting section that
mounts the cassette and is disposed side by side with respect to
the cassette storing and transporting unit. The cassette storing
and transporting unit has a plurality of shelves to hold a
cassette, a second mounting section that mounts a cassette and is
disposed between the substrate processing unit and the plurality of
shelves, a first transporting section that transports a cassette
between the first mounting section and the plurality of shelves,
and a second transporting section that transports a cassette
between the plurality of shelves and the second mounting
section.
[0009] The transportation between the first mounting section and
the plurality of shelves which is executed by the first
transporting section, and the transportation between the second
mounting section and the plurality of shelves which is executed by
the second transporting section can be executed in parallel with
each other. This can improve the throughput in the cassette storing
and transporting unit, and in the substrate processing apparatus as
well.
[0010] Preferably, the first transporting section is disposed
between the first mounting section and the plurality of shelves,
and transports a cassette to the plurality of shelves from a
direction of one side of the plurality of shelves.
[0011] This provides for ease of access to a cassette on the first
mounting section and on the plurality of shelves.
[0012] Preferably, the second transporting section is disposed
between the substrate processing unit and the plurality of shelves,
and transports a cassette to the plurality of shelves from a
direction of the other side of the plurality of shelves.
[0013] Parallel operation of the respective transporting sections
can be set without consideration of spatial interference between
the first transporting section and the second transporting
section.
[0014] Preferably, the first and second transporting sections have
a holding element that holds a cassette from the underside of the
cassette, and the plurality of shelves have a passage section that
allows the holding element to pass through in the vertical
direction.
[0015] The time required for a cassette transfer operation can be
reduced thereby to improve the throughput in the cassette storing
and transporting unit, and in the substrate processing apparatus as
well.
[0016] Accordingly, an object of the present invention is to
provide a substrate processing apparatus that can transport
efficiently a cassette in a cassette storing and transporting
unit.
[0017] These and other objects, features, aspects and advantages of
the present invention will become more apparent from the following
detailed description of the present invention when taken in
conjunction with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0018] FIG. 1 is a perspective view showing the overall
construction of a substrate processing apparatus according to first
and second preferred embodiments of the present invention;
[0019] FIG. 2 is a perspective view showing the construction of an
FOUP in the first and second preferred embodiments;
[0020] FIG. 3 is a top view of a loader and unloader section in the
first preferred embodiment;
[0021] FIG. 4 is a front view of the loader and unloader section in
the first preferred embodiment;
[0022] FIG. 5 is a sectional view of a shelf member and an
FOUP;
[0023] FIG. 6 is a top view of the neighborhood of the shelf
member;
[0024] FIG. 7 is a top view of a loader and unloader section
according to the second preferred embodiment;
[0025] FIG. 8 is a front view of the loader and unloader section in
the second preferred embodiment;
[0026] FIG. 9 is a side view of a second opening and closing
mechanism and a transporting mechanism in the first and second
preferred embodiments; and
[0027] FIG. 10 is a side view of first and second opening and
closing mechanisms in the first and second preferred
embodiments.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0028] Preferred embodiments of the present invention will be
described below in detail with reference to the accompanying
drawings.
1. First Preferred Embodiment
[0029] FIG. 1 is a perspective view showing the overall
construction of a substrate processing apparatus 1 in a first
preferred embodiment. The substrate processing apparatus 1 is an
apparatus that takes out, from an FOUP (front opening unified pod)
80, a set of a plurality of substrates (lots) encased in the FOUP
80, and that performs substrate processings in sequence with
respect to the plurality of substrates, for example, etching with
chemical solution such as hydrofluoric acid, and rinse with
de-ionized water. As shown in FIG. 1, the substrate processing
apparatus 1 consists mainly of a load port 10, a loader and
unloader section 100, and a substrate processing unit 200. FIG. 1
and the succeeding respective figures are accompanied by an XYZ
rectangular coordinate system, where the Z-axis direction is the
vertical direction, and an XY plane is a horizontal plane,
depending on the necessity for clarifying their respective
directional relationships.
[0030] Here, the FOUP (cassette) 80 will now be described. FIG. 2
is a perspective view showing the construction of the FOUP 80. A
flange 82 is formed on the top of a casing 81 of the FOUP 80. A
lifter arm 171 (see FIGS. 3 and 4) grips the flange 82, thereby
holding the FOUP 80 in suspension.
[0031] Additionally, a lid 83 is disposed on one surface of the
casing 81 (the plane viewed in the direction of an arrow AR1 in
FIG. 2). The lid 83 has a lock mechanism with respect to the casing
81. When the lock mechanism is allowed to function with the lid 83
attached to the casing 81, the lid 83 is secured to the casing 81
and the interior of the casing 81 becomes a closed space.
[0032] With this construction, if the FOUP 80 is transported in the
exterior of the substrate processing apparatus 1, the lock
mechanism is allowed to function with the lid 83 attached to the
casing 81, thereby causing the interior of the casing 81 to become
a closed space. Therefore, irrespective of the cleanliness of a
clean room where the substrate processing apparatus 1 is placed,
the interior of the FOUP 80 can be maintained at a high
cleanliness.
[0033] On the other hand, the release of the lock mechanism enables
the lid 83 to be removed from the casing 81, so that a substrate
can be taken out from the interior of the casing 81, and a
substrate can be encased in the interior of the casing 81. For
example, 25 or 13 substrates are encased in the casing 81 with
their respective main surfaces arranged along the horizontal
direction.
[0034] The load port (the first mounting section) 10 is a mounting
table, on which a transporting apparatus in the exterior of the
substrate processing apparatus 1 (e.g., AVG (automatic guided
vehicle)), or the FOUP 80 transferred from an operator of the
substrate processing apparatus 1 is mounted. As shown in FIG. 1,
the load port 10 is disposed side by side with respect to the
loader and unloader section 100, and a plurality of (four in
accordance with the first preferred embodiment) FOUPs 80 are
mounted concurrently on a mounting surface 10a.
[0035] Additionally, as shown in FIGS. 1 and 3, a plurality of
(four in accordance with this preferred embodiment) shutters 11 are
disposed on a side surface on the load port 10 side in the loader
and unloader section 100. Upon opening the shutter 11, there is
formed an opening portion that provides communication between the
external space of the substrate processing apparatus 1 and the
internal space of the loader and unloader section 100.
[0036] This enables a transport robot 130a of the loader and
unloader section 100 (see FIGS. 3 and 4) to perform, via the above
opening portion, transportation of the FOUP 80 between the load
port 10 and the internal space of the loader and unloader section
100. Specifically, the FOUP 80 encasing an untreated substrate is
transported from the load port 10 to the loader and unloader
section 100. The FOUP 80 encasing a treated substrate after being
subjected to processing in the substrate processing unit 200 is
transferred from the loader and unloader section 100 to the load
port 10.
[0037] The loader and unloader section 100 is used as a cassette
storing and transporting unit that temporarily stores in its
interior the FOUP 80 mounted on the load port 10, and also
transports the FOUP 80 encasing a substrate toward the substrate
processing unit 200. As shown in FIG. 1, the loader and unloader
section 100 is disposed at a place sandwiched between the load port
10 and the substrate processing unit 200.
[0038] Further, the substrate processing unit 200 has a second
opening and closing mechanism 180 and a transporting mechanism 190
that are used in transferring a substrate between a second mounting
section 160 and the substrate processing unit 200. The second
opening and closing mechanism 180 and the transporting mechanism
190 are disposed in the vicinity of the shutter 161 of the loader
and unloader section 100, as shown in FIGS. 3 and 9.
[0039] FIG. 9 is a side view of the second opening and closing
mechanism 180 and the transporting mechanism 190 of the substrate
processing unit 200. FIG. 10 is a side view of the second opening
and closing mechanism 180. The substrate processing unit 200 has in
its interior a chemical solution tank to store chemical solution
and a rinsing tank to store de-ionized water. A substrate is
subjected to a predetermined substrate processing by allowing the
substrate to be stored in the chemical solution tank or the rinsing
tank.
[0040] The second opening and closing mechanism 180 consists mainly
of a latch part 181 and a lifting part 182, as shown in FIGS. 9 and
10. The latch part 181 can be fit in the lid 83 of the FOUP 80. The
latch part 181 is attached to one end of a movable portion 182b.
When a cylinder 182a of the lifting part 182 causes the movable
portion 182b to execute advance and withdrawal motion in the
directions indicated by a double-headed arrow AR2 (approximately
the Z-axis direction), the latch part 181 ascends and descends in
the directions indicated by the arrow AR2 (see FIG. 9). The latch
part 181 can also be shifted in the directions indicated by a
double-headed arrow AR3 (the Y-axis direction) by a horizontal
shifting mechanism (not shown) (see FIG. 10).
[0041] Hence, when the latch part 181 is shifted with it fit in the
lid 83 in the directions indicated by the arrow AR2 or AR3, the
internal space of the casing 81 of the FOUP 80 mounted on the
second mounting section 160 is opened or closed.
[0042] The transporting mechanism 190 consists mainly of a support
part 191 and an advance and withdrawal section 192. The
transporting mechanism 190 performs loading or unloading of a
substrate with respect to a FOUP 80, when the shutter 161 is opened
and the lid 83 of the FOUP 80 mounted on the second mounting
section 160 is removed.
[0043] The support part 191 consists mainly of a plurality of (25
or 13 in this preferred embodiment) support arms 191a, and a
fitting member 191b. The support arms 191a are arranged in the
vertical direction (approximately the Z-axis direction) at equally
spaced intervals while extending in the horizontal direction
(approximately the Y-axis direction), and each of them supports a
substrate such that the main surface of the substrate is
approximately parallel to an XY plane. The end of each support arm
191a on the substrate processing unit 200 side is attached to the
fitting member 191b extending in the vertical direction.
[0044] A lower end of the fitting member 191b is disposed on a
movable tray 192a of the advance and withdrawal section 192. The
advance and withdrawal section 192 has three trays (movable trays
192a and 192b, and a stationary tray 192c), as shown in FIG. 9.
These trays 192a, 192b, and 192c are disposed in top-to-bottom
order. The stationary tray 192c of the advance and withdrawal
section 192 is attached to a rotary shaft 194 pivoted about a base
193, allowing the advance and withdrawal section 192 to be
rotatable about an axis 194c.
[0045] With this construction, in connection with the advance and
withdrawal section 192, the movable tray 192b executes advance and
withdrawal motion with respect to the stationary tray 192c, and the
movable tray 192a executes advance and withdrawal motion with
respect to the movable tray 192b, so that the support part 191
shifts between the full-line position and the dotted-line position.
As a result, an untreated substrate encased in the interior of the
casing of the FOUP 80 is loaded in the substrate processing unit
200 while being supported by the support part 191 of the
transporting mechanism 190. The treated substrate subjected to
substrate processing in the substrate processing unit 200 is
unloaded from the substrate processing unit 200 while being
supported by the support part 191, and then encased in the casing
81 of the FOUP 80.
[0046] Thus, the substrate transferred to the substrate processing
unit 200 from the loader and unloader section 100 by the
transporting mechanism 190 of the substrate processing unit 200 is
then stored in the above-mentioned chemical solution tank or
rinsing tank so as to be subjected to a predetermined substrate
processing such as rinsing or the like. The substrate after
completion of the predetermined processing is then unloaded from
the substrate processing unit 200 to the loader and unloader
section 100 by the transporting mechanism 190.
[0047] A control unit 50 shown in FIG. 1 has a memory 51 that
stores a program, a variable and the like, and a CPU 52 that
executes control according to the program stored in the memory 51.
Objects to be controlled such as the shutter 11 of the loader and
unloader section 100, the transport robot 130, and the lifter 170
(see FIG. 3) are electrically connected to the control unit 50 by a
signal line (not shown). Therefore, the CPU 52 causes these objects
to be controlled to operate at a predetermined timing according to
the program stored in the memory 51.
<1.2. Construction of Loader and Unloader Section>
[0048] FIGS. 3 and 4 are a top view and a front view of the loader
and unloader section 100 in the first preferred embodiment,
respectively. FIG. 5 is a sectional view of the shelf member 141a
and the FOUP 80. FIG. 6 is a top view of the neighborhood of the
shelf member 141a. The following is a detail description of the
loader and unloader section 100 that is used as a cassette storing
and transporting unit.
[0049] As shown in FIGS. 3 and 4, the loader and unloader section
100 consists mainly two transport robots 130 (130a, 130b), a shelf
array 140, and two mounting sections (second and third mounting
sections 160, 150).
[0050] Referring to FIG. 3, individual elements arranged in the
loader and unloader section 100 are arranged along the horizontal
direction (approximately the X-axis direction) so as to form three
rows. Specifically, the transport robot (a first transporting
section) 130a and a third mounting section (a judging section) 150
are disposed on the first row from the load port 10 side. The shelf
array 140 is disposed on the second row. The transport robot (a
second transporting section) 130b and the second mounting section
160 are disposed on the third row.
[0051] The shelf array 140 is an encasing section to store a
plurality of (16 in accordance with the first preferred embodiment)
FOUPs 80. In other words, the shelf array 140 stores not only the
FOUPs 80 encasing an untreated substrate, but also the empty FOUPs
80, from which the substrate is already taken out. As shown in
FIGS. 3 and 4, the shelf array 140 is obtained by arranging in two
dimensions a plurality of shelves along the vertical direction (the
Z-axis direction) and the horizontal direction (the X-axis
direction).
[0052] Each of the plurality of shelves has a pair of shelf members
141a. As shown in FIGS. 5 and 6, each shelf member 141a is in the
general shape of an "L", and is attached to the corresponding frame
145 such that the longitudinal direction of the shelf member 141a
is approximately parallel to the Y-axis direction. A surface of the
shelf member 141a, on which the FOUP 80 is mounted, has a
projecting portion 142 that corresponds to a hole portion 85
disposed at a lower part of the FOUP 80. Hence, the FOUP 80 can be
stably held on the pair of the shelf members 141a by fitting the
projecting portions 142 of a pair of the shelf members 141a into
the hole portions 85 of the FOUP 80.
[0053] Thus, in accordance with the first preferred embodiment, the
pair of the shelf members 141a are used as a storage shelf to store
the FOUP 80, and the region sandwiched between the pair of the
shelf members 141a is used as an encasing space 141 to store the
FOUP 80.
[0054] Formed between two shelf members 141a constituting a storage
shelf is an opening portion 146 that is greater in size than a tip
portion 139 of the transport robot 130 (130a, 130b). As shown in
FIG. 4, each opening portion 146 is arranged along the vertical
direction (the Z-axis direction).
[0055] Therefore, the tip portion 139 of the transport robot 130
ascends and descends in the interior of the shelf array 140 while
passing through these opening portions 146. In other words, the
opening portions 146 of a plurality of storage shelves in the shelf
array 140 function as a passage portion allowing the tip portion
139 to pass through in the vertical direction.
[0056] Referring to FIG. 3, the transport robots 130a and 130b are
FOUP transporting sections that are placed on the load port 10 side
and the substrate processing unit 200 side, respectively, when
viewed from the shelf array 140. That is, the transport robot (the
first transporting section) 130a is disposed on the reverse side of
the transport robot (the second transporting section) 130b with the
shelf array 140 interposed therebetween.
[0057] In the first preferred embodiment, the both robots 130a and
130b have almost the same hardware configuration. In the following
description, except where the transport robot 130a is discriminated
from the transport robot 130b, the two are simply referred to as a
"transport robot 130."
[0058] A tip portion 139 of the transport robot 130 is a holding
element to hold the FOUP 80 from the underside, and is in the
general shape of a triangle. A projecting portion 139a is disposed
in the vicinity of each vertex on the upper surface side of the tip
portion 139. Disposed at a lower part of the FOUP 80 are three hole
portions 87 that correspond to the projecting portions 139a,
respectively (see FIG. 5, in which two of the three hole portions
are shown for convenience in plotting). The tip portion 139 is
attached to an arm 138a, via a rotary shaft 134b positioned in
approximately parallel to the Z-axis, thus allowing it to be
rotatable about the rotary shaft 134b. Accordingly, the transport
robot 130 stably holds the FOUP 80 by causing the three projecting
portions 139a to fit in their respective corresponding hole
portions 86 of the FOUP 80, while causing the tip portion 139 to
rotate.
[0059] The arm 138a is attached to an arm 138b via the rotary shaft
134c positioned in approximately parallel to the Z-axis, and the
arm 138b is attached to an anchor block 136 via the rotary shaft
134a. The anchor block 136 is disposed on a strut 131 extending in
the vertical direction (the Z-axis direction) such that it can
ascend and descend. The strut 131 is free to slide along a guide
rail 132 extending in the horizontal direction (the X-axis
direction).
[0060] With this construction, the transport robot 130 (130a, 130b)
causes the FOUP 80 held on the tip portion 139 to shift in the
horizontal direction along the shelf array 140 and to ascend and
descend in the vertical direction. Therefore, the transport robot
130a transports the FOUP 80 among the storage shelf of the shelf
array 140, the load port 10, and the third mounting section 150.
The transport robot 130b transports the FOUP 80 between the storage
shelf of the shelf array 140 and the second mounting section
160.
[0061] The transport robot 130a performs processing of:
transporting the FOUP 80 that is loaded through the load port 10,
from the load port 10 to the shelf array 140; transporting it from
the load port 10 to the third mounting section 150; transporting it
from the third mounting section 150 to the shelf array 140; and
transporting the FOUP 80 stored in the shelf array 140 to the load
port 10.
[0062] The transport robot 130b performs transportation of the FOUP
80 stored in the shelf array 140 from the shelf array 140 to the
second mounting section 160; and transportation from the mounting
section 150 to the shelf array 140.
[0063] Thus, the transport robots 130a and 130b are disposed
oppositely with the shelf array 140 interposed therebetween. This
enables a plurality of transportations to be executed almost
concurrently, thereby improving the throughput in the load and
unloader section 100 as a whole. Except where the transport robots
130a and 130b access to the same storage shelf, they can execute
transportation of the FOUP 80 without mutual spatial interference.
It is therefore possible to set the operations of the transport
robots 130a and 130b without considering the interference between
the two.
[0064] Moreover in the first preferred embodiment, the
transportation of the FOUP 80 executed between the load port 10 and
the substrate processing unit 200 is performed by the two transport
robots 130a and 130b of the loader and unloader section 100,
instead of the transporting section of the load port 10. Therefore,
in the first preferred embodiment, neither of the transport robot
130a nor 130b is required to withdraw when the FOUP 80 is
transported from the load port 10 to the substrate processing unit
200. This permits efficient transportation of the FOUP 80.
[0065] The transportation of the FOUP 80 between the transport
robot 130 (130a, 130b) and each storage shelf of the shelf array
140 is executed as follows. That is, when the FOUP 80 is
transferred from the transport robot 130 to the storage shelf,
first, the tip portion 139 of the transport robot 130 is shifted
such that the height position (the position in the Z-axis
direction) of a bottom 88 of the FOUP 80 encased at a storage shelf
is higher than the height position of a top surface 143 of the
shelf member 141a (141b, 141c) (see FIG. 5). Subsequently, the tip
portion 139 is allowed to descend such that the projecting portions
142 of a pair of the shelf member 141a (141b, 141c) are fit in the
hole portions 85 of the FOUP 80.
[0066] By allowing the tip portion 139 to further descend, the FOUP
80 is mounted on the top surface 143 of the pair of the shelf
member 141a (141b, 141c), and the projecting portion 139a of the
tip portion 139 is separated from a hole portion 87, thus
completing the transfer of the FOUP 80 from the transport robot 130
to the storage shelf.
[0067] On the other hand, when the FOUP 80 is transferred from a
storage shelf to the transport robot 130, first, the tip portion
139 of the transport robot 130 is shifted to under the FOUP 80 that
is mounted on a storage shelf. Subsequently, the tip portion 139 is
allowed to ascend such that the projecting portion 139a of the tip
portion 139 is fit in the hole portion 87 of the FOUP 80.
[0068] By allowing the tip portion 139 to further ascend, the FOUP
80 is held by the tip portion 139, and the projecting portion 142
is separated from the hole portion 85, thus completing the transfer
of the FOUP 80 from the storage shelf to the transport robot
130.
[0069] Thus, in process of transporting the FOUP 80 between the
transport robot 130 and the storage shelf, the FOUP 80 is shifted
above the shelf member 141a (141b, 141c). Consequently, the
encasing space 141 is set so as to have a greater height than the
FOUP 80.
[0070] The second mounting section 160 is used to transfer a
substrate encased in the FOUP 80 to the substrate processing unit
200, and disposed on the substrate processing unit 200 side when
viewed from the shelf array 140.
[0071] Like the shelf member 141a, the shelf member 141b is a
member that is in the general shape of an "L", and has a plurality
of (three in accordance with the first preferred embodiment)
projecting portions on the plane on the FOUP 80 side. It is
disposed such that the longitudinal direction of the shelf member
141b is approximately parallel to the X-axis direction, as shown in
FIGS. 3 and 4.
[0072] Additionally, a shutter 161 that can ascend and descend in
the directions indicated by a double-headed arrow AR4
(approximately the Z-axis direction, see FIG. 9) is disposed on a
side wall on the substrate processing unit 200 side in the vicinity
of the second mounting section 160. Upon opening the shutter 161,
there is formed an opening portion that provides communication
between the internal space of the loader and unloader section 100
and the internal space of the substrate processing unit 200.
[0073] Hence, when the FOUP 80 is mounted on a pair of the shelf
members 141b, the second opening and closing mechanism 180 of the
substrate processing unit 200 removes the lid 83 of the FOUP 80,
while the transporting mechanism 190 of the substrate processing
unit 200 takes out an untreated substrate from the FOUP 80, and
transports the untreated substrate into the substrate processing
unit 200 via the opening portion formed upon opening the shutter
161.
[0074] On the other hand, after the substrate processing unit 200
performs processing such as rinsing and drying with respect to a
substrate, the shutter 161 is opened, and the transporting
mechanism 190 transports the treated substrate via the opening
portion into the FOUP 80, while the second opening and closing
mechanism 180 closes the lid 83 of the FOUP 80.
[0075] A lifter 170 of the second mounting section 160 is a lifting
section that causes the FOUP 80 mounted on a pair of the shelf
members 141b to ascend and descend between a mounting position (the
full-line position in FIG. 4) and a withdrawal position (the
dash-single-dot-line position in FIG. 4). As shown in FIG. 4, the
lifter 170 is disposed above a pair of the shelf members 141b, and
has a lifter arm 171.
[0076] The lifter arm 171 grips a flange 82 (a grip portion) formed
on the top of the FOUP 80, and releases its grip state. The lifter
arm 171 can also ascend and descend along the vertical direction
(the Z-axis direction) by a driving mechanism (not shown).
[0077] This enables the second mounting section 160 to raise the
empty FOUP 80, from which the substrate is already supplied to the
substrate processing unit 200, to the withdrawal position (the
dash-single-dot-line position in FIG. 4).
[0078] The transport robot 130b is therefore able to continuously
execute the transfer of the FOUP 80 encasing an untreated substrate
to the mounting position of the second mounting section 160, and
the receipt of the empty FOUP 80 raised to the withdrawal position,
from the second mounting section 160. Specifically, only one
reciprocating motion of the transport robot 130b between the shelf
array 140 and the second mounting section 160 permits the
interchange between the FOUP 80 encasing a substrate and the empty
FOUP 80. This can further improve the throughput in the processing
executed in the loader and unloader section 100.
[0079] The third mounting section 150 is used to execute mapping
processing such as confirmation of the number of substrates encased
in the FOUP 80 loaded from the load port 10, and is disposed on the
load port 10 side when viewed from the shelf array 140. That is,
the third mounting section 150 is disposed on the opposite side of
the second mounting section 160 with the shelf array 140 interposed
therebetween.
[0080] The third mounting section 150 is equipped with a first
opening and closing mechanism 185 to open and close the lid 83 of
the FOUP 80. The first opening and closing mechanism 185 has the
same hardware configuration as the second opening and closing
mechanism 180, as shown in FIG. 10. Therefore, the internal space
of the casing 81 of the FOUP 80 mounted on the second mounting
section 160 is opened or closed by allowing the latch part 181 of
the first opening and closing mechanism 185 to shift in the
directions indicated by the arrow AR2 or the directions indicated
by the arrow AR3, while allowing it to fit in the lid 83.
[0081] Like the shelf members 141a and 141b, a shelf member 141c is
a member that is in the general shape of an "L", and has a
projecting portion. It is attached such that its longitudinal
direction is approximately parallel to the X-axis direction (see
FIGS. 3 and 4). The third mounting section 150 further has a
counting mechanism 187 to count the number of substrates encased in
the interior of the FOUP 80, as shown in FIG. 3.
[0082] Therefore, when the FOUP 80 is mounted on a pair of the
shelf members 141c, the opening and closing mechanism removes the
lid 83 of the FOUP 80, while the counting mechanism 187 counts the
number of substrates encased in the interior of the FOUP 80. Thus,
the third mounting section 150 is used as a judging section to
judge the situation with regard to the substrates encased in the
FOUP 80.
[0083] The lifter 170 of the third mounting section 150 is, as
shown in FIG. 4, a lifting section disposed above a pair of the
shelf members 141c, and has the same hardware configuration as the
lifter 170 of the second mounting section 160. That is, the lifter
170 of the third mounting section 160 causes the FOUP 80 mounted on
a pair of the shelf members 141c to ascend and descend between the
mounting position (the full-line position in FIG. 4) and the
withdrawal position (the dash-single-dot-line position in FIG.
4).
[0084] With this construction, the third mounting section 150 can
raise the FOUP 80 after completion of mapping processing to the
withdrawal position (the dash-single-dot-line position in FIG. 4),
while causing the lifter arm 171 to grip the flange 82.
[0085] The transport robot 130a is therefore able to continuously
execute the transfer of the FOUP 80 not subjected to mapping
processing to the mounting position of the third mounting section
150, and the receipt of the FOUP 80, after being subjected to
mapping processing and raised to the withdrawal position, from the
second mounting section 150. Specifically, only one reciprocating
motion of the transport robot 130a between the shelf array 140 and
the second mounting section 160 permits the interchange between the
FOUP 80 after completion of mapping processing and the FOUP 80 not
subjected to mapping processing. This can further improve the
throughput in the processing executed in the loader and unloader
section 100.
[0086] In a conventional loader and unloader section having only
one opener section, mapping processing is usually executed in the
second mounting section 160 disposed on the substrate processing
unit 200 side. That is, the transfer of a substrate to the
substrate processing unit 200, and the mapping processing are
executed in the second mounting section 160.
[0087] Hence, if there is only one opener section, by the time the
substrate encased in the FOUP 80 is loaded in the substrate
processing unit 200, it needs to be transported between the second
mounting section 160 and the shelf array 140 in some cases. This
may cause a waste of the process of transportation.
[0088] Furthermore, during the mapping processing, a transporting
mechanism 190 on the substrate processing unit 200 side cannot load
a substrate from the second mounting section 160 to the substrate
processing unit 200. This leads to such a disadvantage that the
processing in the second mounting section 160 is a rate-determining
factor of the throughput in the processing executed in the loader
and unloader section 100.
[0089] On the contrary, in the loader and unloader section 100 of
the first preferred embodiment, the second and third mounting
sections 160 and 150 can execute concurrently the loading of a
substrate into the substrate processing unit 200, and mapping
processing. Like the conventional loader and unloader section, it
is unnecessary to reciprocate the FOUP 80 between the shelf array
140 and the second mounting section 160 by the time a substrate is
loaded in the substrate processing unit 200. This permits a
reduction in the time of waiting for another processing in the
second mounting section 160, thereby further improving the
throughput in the transportation executed in the loader and
unloader section 100.
<1.3. Advantages of Substrate Processing Apparatus of First
Preferred Embodiment>
[0090] As above described, in the loader and unloader section 100
of the substrate processing apparatus 1 of the first preferred
embodiment, the transport robot (the first transport section) 130a
is disposed on the load port (the first mounting section) 10 side,
and the transport robot (the second transporting section) 130b is
disposed on the substrate processing unit 200 side, with the shelf
array 140 interposed between the two. This enables the transport
robots 130a and 130b to execute transportation of the FOUP 80
without mutual spatial interference, except where they access to
the same storage shelf.
[0091] It is therefore possible to further improve the throughput
in the transportation executed in the loader and unloader section
100, and the throughput in the substrate processing apparatus 1 as
well. Additionally, the operations of the transport robots 130a and
130b can be set without consideration of spatial interference of
the transports robots 130a and 130b.
[0092] The loader and unloader section 100 has the two mounting
sections (the second and third mounting sections 160 and 150). The
mapping processing in the third mounting section 150, and the
transfer of a substrate to the substrate processing unit 200 in the
second mounting section 160 are executed concurrently.
Specifically, like the conventional loader and unloader section,
the second mounting section 160 is not required to execute mapping
processing, and it may execute only the transfer of a substrate, so
that the time of waiting for another processing in the second
mounting section 160 can be reduced.
2. Second Preferred Embodiment
[0093] A second preferred embodiment of the present invention will
next be described. A substrate processing apparatus in the second
preferred embodiment has the same construction as the first
preferred embodiment, except that a loader and unloader section 500
further has an aligning section to align substrates in a
predetermined direction. In the following description, like
components are identified by the same reference numerals as in the
substrate processing apparatus of the first preferred
embodiment.
<2.1. Construction of Substrate Processing Apparatus>
[0094] FIG. 1 is a perspective view showing the overall
construction of a substrate processing apparatus 400 in a second
preferred embodiment. The substrate processing apparatus 400 is an
apparatus that takes out, from an FOUP (front opening unified pod)
80, a set of a plurality of substrates (lots) encased in the FOUP
80, and that performs substrate processings in sequence with
respect to the plurality of substrate, for example, etching with
chemical solution such as hydrofluoric acid, and rinse with
de-ionized water. As shown in FIG. 1, the substrate processing
apparatus 400 consists mainly of a load port 10, a loader and
unloader section 500, and a substrate processing unit 200. FIG. 1
and the succeeding respective figures are accompanied by an XYZ
rectangular coordinate system, where the Z-axis direction is the
vertical direction, and an XY plane is a horizontal plane,
depending on the necessity in clarifying their respective
directional relationships.
[0095] The load port (the first mounting section) 10 is a mounting
table, on which a transporting apparatus in the exterior of the
substrate processing apparatus 400 (e.g., AVG (automatic guided
vehicle)), or the FOUP 80 transferred from an operator of the
substrate processing apparatus 400 is mounted. As shown in FIG. 1,
the load port 10 is disposed side by side with respect to the
loader and unloader section 500, and a plurality of (four in
accordance with the second preferred embodiment) FOUPs 80 are
mounted concurrently on a mounting surface 10a.
[0096] Additionally, as shown in FIGS. 1 and 7, a plurality of
(four in accordance with the second preferred embodiment) shutters
11 are disposed on a side surface on the load port 10 side in the
loader and unloader section 500. Upon opening the shutter 11, there
is formed an opening portion that provides communication between
the external space of the substrate processing apparatus 400 and
the internal space of the loader and unloader section 500.
[0097] This enables a transport robot 130a of the loader and
unloader section 500 (see FIGS. 7 and 8) to perform, via the above
opening portion, transportation of the FOUP 80 between the load
port 10 and the internal space of the loader and unloader section
500. Specifically, the FOUP 80 with an untreated substrate encased
is transported from the load port 10 to the loader and unloader
section 500. The FOUP 80 with a treated substrate after being
subjected to processing in the substrate processing unit 200 is
transferred from the loader and unloader section 500 to the load
port 10.
[0098] The loader and unloader section 500 is used as a cassette
storing and transporting unit that temporarily stores in its
interior the FOUP 80 mounted on the load port 10, and also
transports the FOUP 80 encasing a substrate toward the substrate
processing unit 200. As shown in FIG. 1, the loader and unloader
section 500 is disposed at a place sandwiched between the load port
10 and the substrate processing unit 200.
[0099] Further, the substrate processing unit 200 has a second
opening and closing mechanism 180 and a transporting mechanism 190
that are used in transferring a substrate between a second mounting
section 160 and the substrate processing unit 200. The second
opening and closing mechanism 180 and the transporting mechanism
190 are disposed in the vicinity of the shutter 161 of the loader
and unloader section 500, as shown in FIGS. 3 and 9.
[0100] FIG. 9 is a side view of the second opening and closing
mechanism 180 and the transporting mechanism 190 of the substrate
processing unit 200. FIG. 10 is a side view of the second opening
and closing mechanism 180. The substrate processing unit 200 has in
its interior a chemical solution tank to store chemical solution
and a rinsing tank to store de-ionized water. A substrate is
subjected to a predetermined substrate processing by allowing the
substrate to be stored in the chemical solution tank or the rinsing
tank.
[0101] The second opening and closing mechanism 180 consists mainly
of a latch part 181 and a lifting part 182, as shown in FIGS. 9 and
10. The latch part 181 can be fit in the lid 83 of the FOUP 80. The
latch part 181 is attached to one end of a movable portion 182b.
When a cylinder 182a of the lifting part 182 causes the movable
portion 182b to execute advance and withdrawal motion in the
directions indicated by a double-headed arrow AR2 (approximately
the Z-axis direction), the latch part 181 ascends and descends in
the directions indicated by the arrow AR2 (see FIG. 9). The latch
part 181 can also be shifted in the directions indicated by a
double-headed arrow AR3 (the Y-axis direction) by a horizontal
shifting mechanism (not shown) (see FIG. 10).
[0102] Hence, when the latch part 181 is shifted with it fit in the
lid 83 in the directions indicated by the arrow AR2 or AR3, the
internal space of the casing 81 of the FOUP 80 mounted on the
second mounting section 160 is opened or closed.
[0103] The transporting mechanism 190 consists mainly of a support
part 191 and an advance and withdrawal section 192. The
transporting mechanism 190 performs loading or unloading of a
substrate with respect to a FOUP 80, when the shutter 161 is opened
and the lid 83 of the FOUP 80 mounted on the second mounting
section 160 is removed.
[0104] The support part 191 consists mainly of a plurality of (25
or 13 in the second preferred embodiment) support arms 191a, and a
fitting member 191b. The support arms 191a are arranged in the
vertical direction (approximately the Z-axis direction) at equally
spaced intervals while extending in the horizontal direction
(approximately the Y-axis direction), and each of them supports a
substrate such that the main surface of the substrate is
approximately parallel to an XY plane. The end of each support arm
191a on the substrate processing unit 200 side is attached to the
fitting member 191b extending in the vertical direction.
[0105] A lower end of the fitting member 191b is disposed on a
movable tray 192a of the advance and withdrawal section 192. The
advance and withdrawal section 192 has three trays (movable trays
192a and 192b, and a stationary tray 192c), as shown in FIG. 9.
These trays 192a, 192b, and 192c are disposed in top-to-bottom
order. The stationary tray 192c of the advance and withdrawal
section 192 is attached to a rotary shaft 194 pivoted about a base
193, allowing the advance and withdrawal section 192 to be
rotatable about an axis 194c.
[0106] With this construction, in the advance and withdrawal
section 192, the movable tray 192b executes advance and withdrawal
motion with respect to the stationary tray 192c, and the movable
tray 192a executes advance and withdrawal motion with respect to
the movable tray 192b, so that the support part 191 shifts between
the full-line position and the dotted-line position. As a result,
an untreated substrate encased in the interior of the casing of the
FOUP 80 is loaded in the substrate processing unit 200 while being
supported by the support part 191 of the transporting mechanism
190. The treated substrate subjected to substrate processing in the
substrate processing unit 200 is unloaded from the substrate
processing unit 200 while being supported by the support part 191,
and then encased in the casing 81 of the FOUP 80.
[0107] Thus, the substrate transferred to the substrate processing
unit 200 from the loader and unloader section 100 by the
transporting mechanism 190 of the substrate processing unit 200 is
then stored in the above-mentioned chemical solution tank or
rinsing tank so as to be subjected to a predetermined substrate
processing such as rinsing or the like. The substrate after
completion of the predetermined processing is then unloaded from
the substrate processing unit 200 to the loader and unloader
section 500 by the transporting mechanism 190.
[0108] A control unit 50 shown in FIG. 1 has a memory 51 that
stores a program, a variable and the like, and a CPU 52 that
executes control according to the program stored in the memory 51.
Objects to be controlled such as the shutter 11 of the loader and
unloader section 500, the transport robot 130, and the lifter 170
(see FIG. 7) are electrically connected to the control unit 50 by a
signal line (not shown). Therefore, the CPU 52 causes these objects
to be controlled to operate at a predetermined timing according to
the program stored in the memory 51.
<2.2. Construction of Loader and Unloader Section>
[0109] FIGS. 7 and 8 are a top view and a front view of the loader
and unloader section 500 in the second preferred embodiment,
respectively. FIG. 5 is a sectional view of the shelf member 141a
and the FOUP 80. FIG. 6 is a top view of the neighborhood of the
shelf member 141a. The following is a detail description of the
loader and unloader section 500 that is used as a cassette storing
and transporting unit.
[0110] As shown in FIGS. 7 and 8, the loader and unloader section
500 consists mainly two transport robots 130 (130a, 130b) and 530,
a shelf array 140, two mounting sections (second and third mounting
sections 160, 150), and an alignment section 510.
[0111] Referring to FIG. 7, individual elements arranged in the
loader and unloader section 500 are arranged along the horizontal
direction (approximately the X-axis direction) so as to form three
rows. Specifically, the transport robot (a first transporting
section) 130a and a third mounting section (a judging section) 150
are disposed on the first row from the load port 10 side. The shelf
array 140, the alignment section 510, and the transport robot 530
are disposed on the second row. The transport robot (a second
transporting section) 130b and the second mounting section 160 are
disposed on the third row.
[0112] The shelf array 140 is an encasing section to encase a
plurality of (14 in accordance with the second preferred
embodiment) FOUPs 80. In other words, the shelf array 140 encases
not only the FOUPs 80 encasing an untreated substrate, but also the
empty FOUPs 80, from which the substrate is already taken out. As
shown in FIGS. 7 and 8, the shelf array 140 is obtained by
arranging in two dimensions a plurality of shelves along the
vertical direction (the Z-axis direction) and the horizontal
direction (the X-axis direction).
[0113] Each of the plurality of shelves has a pair of shelf members
141a. As shown in FIGS. 5 and 6, each shelf member 141a is in the
general shape of an "L", and is attached to the corresponding frame
145 such that the longitudinal direction of the shelf member 141a
is approximately parallel to the Y-axis direction. A surface of the
shelf member 141a, on which the FOUP 80 is mounted, has a
projecting portion 142 that corresponds to a hole portion 85
disposed at a lower part of the FOUP 80. Hence, the FOUP 80 can be
stably held at the pair of the shelf members 141a by fitting the
projecting portions 142 of a pair of the shelf members 141a into
the hole portions 85 of the FOUP 80.
[0114] Thus, in accordance with the second preferred embodiment,
the pair of the shelf members 141a are used as a storage shelf to
store the FOUP 80, and the region sandwiched between the pair of
the shelf members 141a is used as an encasing space 141 to store
the FOUP 80.
[0115] Formed between two shelf members 141a constituting a storage
shelf is an opening portion 146 that is greater in size than a tip
portion 139 of the transport robot 130 (130a, 130b). As shown in
FIG. 8, each opening portion 146 is arranged along the vertical
direction (the Z-axis direction).
[0116] Therefore, the tip portion 139 of the transport robot 130
ascends and descends in the interior of the shelf array 140 while
passing through these opening portions 146. In other words, the
opening portions 146 of a plurality of storage shelves in the shelf
array 140 function as a passage portion allowing the tip portion
139 to pass through in the vertical direction.
[0117] Referring to FIG. 7, the transport robots 130a and 130b are
FOUP transporting sections that are placed on the load port 10 side
and the substrate processing unit 200 side, respectively, when
viewed from the shelf array 140. That is, the transport robot (the
first transporting section) 130a is disposed on the reverse side of
the transport robot (the second transporting section) 130b with the
shelf array 140 interposed therebetween.
[0118] A tip portion 139 of the transport robot 130 is a holding
element to hold the FOUP 80 from the underside, and is in the
general shape of a triangle. A projecting portion 139a is disposed
in the vicinity of each vertex on the upper surface side of the tip
portion 139. Disposed at a lower part of the FOUP 80 are three hole
portions 87 that correspond to the projecting portions 139a,
respectively (see FIG. 7, in which two of the three hole portions
are shown for convenience in plotting). The tip portion 139 is
attached to an arm 138a, via a rotary shaft 134b positioned in
approximately parallel to the Z-axis, thus allowing it to be
rotatable about the rotary shaft 134b. Accordingly, the transport
robot 130 stably holds the FOUP 80 by causing the three projecting
portions 139a to fit in their respective corresponding hole
portions 86 of the FOUP 80, while causing the tip portion 139 to
rotate.
[0119] The arm 138a is attached to an arm 138b via the rotary shaft
134c positioned in approximately parallel to the Z-axis, and the
arm 138b is attached to an anchor block 136 via the rotary shaft
134a. The anchor block 136 is disposed on a strut 131 extending in
the vertical direction (the Z-axis direction) such that it can
ascend and descend. The strut 131 is free to slide along a guide
rail 132 extending in the horizontal direction (the X-axis
direction).
[0120] With this construction, the transport robot 130 (130a, 130b)
causes the FOUP 80 held at the tip portion 139 to shift in the
horizontal direction along the shelf array 140 and to ascend and
descend in the vertical direction. Therefore, the transport robot
130a transports the FOUP 80 among the storage shelf of the shelf
array 140, the load port 10, and the third mounting section 150.
The transport robot 130b transports the FOUP 80 between the storage
shelf of the shelf array 140 and the second mounting section
160.
[0121] The transport robot 130a performs processing of:
transporting the FOUP 80 that is loaded through the load port 10,
from the load port 10 to the shelf array 140; transporting it from
the load port 10 to the third mounting section 150; transporting it
from the third mounting section 150 to the shelf array 140; and
transporting the FOUP 80 stored in the shelf array 140 to the load
port 10.
[0122] The transport robot 130b performs the transportation of the
FOUP 80 stored in the shelf array 140 from the shelf array 140 to
the second mounting section 160, and transportation from the
mounting section 150 to the shelf array 140.
[0123] Thus, the transport robots 130a and 130b are disposed
oppositely with the shelf array 140 interposed therebetween. This
enables a plurality of transportations to be executed almost
concurrently, thereby improving the throughput in the load and
unloader section 500 as a whole. Except where the transport robots
130a and 130b access to the same storage shelf, they execute
transportation of the FOUP 80 without mutual spatial interference.
It is therefore possible to set the operations of the transport
robots 130a and 130b without considering the interference between
the two.
[0124] Moreover in the second preferred embodiment, the
transportation of the FOUP 80 executed between the load port 10 and
the substrate processing unit 200 is performed by the two transport
robots 130a and 130b of the loader and unloader section 100,
instead of the transporting section of the load port 10. Therefore,
in the second preferred embodiment, neither of the transport robot
130a nor 130b is required to withdraw when the FOUP 80 is
transported from the load port 10 to the substrate processing unit
200. This permits efficient transportation of the FOUP 80.
[0125] The transportation of the FOUP 80 between the transport
robot 130 (130a, 130b) and each storage shelf of the shelf array
140 is executed as follows. That is, when the FOUP 80 is
transferred from the transport robot 130 to the storage shelf,
first, the tip portion 139 of the transport robot 130 is shifted
such that the height position (the position in the Z-axis
direction) of the bottom 88 of the FOUP 80 stored at a storage
shelf is higher than the height position of a top surface 143 of
the shelf member 141a (141b, 141c) (see FIG. 7). Subsequently, the
tip portion 139 is allowed to descend such that the projecting
portions 142 of a pair of the shelf member 141a (141b, 141c) are
fit in the hole portions 85 of the FOUP 80.
[0126] By allowing the tip portion 139 to further descend, the FOUP
80 is mounted on the top surface 143 of the pair of the shelf
member 141a (141b, 141c), and the projecting portion 139a of the
tip portion 139 is separated from a hole portion 87, thus
completing the transfer of the FOUP 80 from the transport robot 130
to the storage shelf.
[0127] On the other hand, when the FOUP 80 is transferred from a
storage shelf to the transport robot 130, first, the tip portion
139 of the transport robot 130 is shifted to under the FOUP 80 that
is mounted on a storage shelf. Subsequently, the tip portion 139 is
allowed to ascend such that the projecting portion 139a of the tip
portion 139 is fit in the hole portion 87 of the FOUP 80.
[0128] By allowing the tip portion 139 to further ascend, the FOUP
80 is held by the tip portion 139, and the projecting portion 142
is separated from the hole portion 85, thus completing the transfer
of the FOUP 80 from the storage shelf to the transport robot
130.
[0129] Thus, in process of transporting the FOUP 80 between the
transport robot 130 and the storage shelf, the FOUP 80 is shifted
above the shelf member 141a (141b, 141c). Therefore, the encasing
space 141 is set so as to have a greater height than the FOUP
80.
[0130] The second mounting section 160 is used to transfer a
substrate encased in the FOUP 80 to the substrate processing unit
200, and disposed on the substrate processing unit 200 side when
viewed from the shelf array 140.
[0131] Like the shelf member 141a, the shelf member 141b is a
member that is in the general shape of an "L", and has a plurality
of (three in accordance with the second preferred embodiment)
projecting portions on the plane on the FOUP 80 side. It is
disposed such that the longitudinal direction of the shelf member
141b is approximately parallel to the X-axis direction, as shown in
FIGS. 7 and 8.
[0132] Additionally, a shutter 161 that can ascend and descend in
the directions indicated by a double-headed arrow AR4
(approximately the Z-axis direction, see FIG. 9) is disposed on a
side wall on the substrate processing unit 200 side in the vicinity
of the second mounting section 160. Upon opening the shutter 161,
there is formed an opening portion that provides communication
between the internal space of the loader and unloader section 500
and the internal space of the substrate processing unit 200.
[0133] Hence, when the FOUP 80 is mounted on a pair of the shelf
members 141b, the second opening and closing mechanism 180 of the
substrate processing unit 200 removes the lid 83 of the FOUP 80,
while the transporting mechanism 190 of the substrate processing
unit 200 takes out an untreated substrate from the FOUP 80, and
transports the untreated substrate into the substrate processing
unit 200 via the opening portion formed upon opening the shutter
161.
[0134] On the other hand, after the substrate processing unit 200
performs processing such as rinsing and drying with respect to a
substrate, the shutter 161 is opened, and the transporting
mechanism 190 transports the treated substrate via the opening
portion into the FOUP 80, while the second opening and closing
mechanism 180 closes the lid 83 of the FOUP 80.
[0135] A lifter 170 of the second mounting section 160 is a lifting
section that causes the FOUP 80 mounted on a pair of the shelf
members 141b to ascend and descend between a mounting position (the
full-line position in FIG. 8) and a withdrawal position (the
dash-single-dot-line position in FIG. 8). As shown in FIG. 8, the
lifter 170 is disposed above a pair of the shelf members 141b, and
has a lifter arm 171.
[0136] The lifter arm 171 grips a flange 82 (a grip portion) formed
on the top of the FOUP 80, and releases its grip state. The lifter
arm 171 can also ascend and descend along the vertical direction
(the Z-axis direction) by a driving mechanism (not shown).
[0137] This enables the second mounting section 160 to raise the
empty FOUP 80, from which the substrate is already supplied to the
substrate processing unit 200, to the withdrawal position (the
dash-single-dot-line position in FIG. 8).
[0138] The transport robot 130b is therefore able to continuously
execute the transfer of the FOUP 80 encasing an untreated substrate
to the mounting position of the second mounting section 160, and
the receipt of the empty FOUP 80 raised to the withdrawal position,
from the second mounting section 160. Specifically, only one
reciprocating motion of the transport robot 130b between the shelf
array 140 and the second mounting section 160 permits the
interchange between the FOUP 80 encasing a substrate and the empty
FOUP 80. This can further improve the throughput in the processing
executed in the loader and unloader section 500.
[0139] The third mounting section 150 is used to execute mapping
processing such as confirmation of the number of substrates encased
in the FOUP 80 loaded from the load port 10, and is disposed on the
load port 10 side when viewed from the shelf array 140. That is,
the third mounting section 150 is disposed on the opposite side of
the second mounting section 160 with the shelf array 140 interposed
therebetween.
[0140] The third mounting section 150 is equipped with a first
opening and closing mechanism 185 to open and close the lid 83 of
the FOUP 80. The first opening and closing mechanism 185 has the
same hardware configuration as the second opening and closing
mechanism 180, as shown in FIG. 10. Therefore, the internal space
of the casing 81 of the FOUP 80 mounted on the second mounting
section 160 is opened or closed by allowing the latch part 181 of
the first opening and closing mechanism 185 to shift in the
directions indicated by the arrow AR2 or the directions indicated
by the arrow AR3, while allowing it to fit in the lid 83.
[0141] Like the shelf members 141a and 141b, a shelf member 141c is
a member that is in the general shape of an "L", and has a
projecting portion. It is attached such that its longitudinal
direction is approximately parallel to the X-axis direction (see
FIGS. 7 and 8). The third mounting section 150 further has a
counting mechanism 187 to count the number of substrates encased in
the interior of the FOUP 80, as shown in FIG. 7.
[0142] Therefore, when the FOUP 80 is mounted on a pair of the
shelf members 141c, the opening and closing mechanism 185 removes
the lid 83 of the FOUP 80, while the counting mechanism 187 counts
the number of substrates encased in the interior of the FOUP 80.
Thus, the third mounting section 150 is used as a judging section
to judge the situation with regard to the substrates encased in the
FOUP 80.
[0143] The lifter 170 of the third mounting section 150 is, as
shown in FIG. 8, a lifting section disposed above a pair of the
shelf members 141c, and has the same hardware configuration as the
lifter 170 of the second mounting section 160. That is, the lifter
170 of the third mounting section 160 causes the FOUP 80 mounted on
a pair of the shelf members 141c to ascend and descend between the
mounting position (the full-line position in FIG. 8) and the
withdrawal position (the dash-single-dot-line position in FIG.
8).
[0144] With this construction, the third mounting section 150 can
raise the FOUP 80 after completion of mapping processing to the
withdrawal position (the dash-single-dot-line position in FIG. 8),
while causing the lifter arm 171 to grip the flange 82.
[0145] The transport robot 130a is therefore able to continuously
execute the transfer of the FOUP 80 not subjected to mapping
processing to the mounting position of the third mounting section
150, and the receipt of the FOUP 80, after being subjected to
mapping processing and raised to the withdrawal position, from the
second mounting section 150. Specifically, only one reciprocating
motion of the transport robot 130a between the shelf array 140 and
the third mounting section 160 permits the interchange between the
FOUP 80 after completion of mapping processing and the FOUP 80 not
subjected to mapping processing. This can further improve the
throughput in the processing executed in the loader and unloader
section 500.
[0146] In a conventional loader and unloader section having only
one opener section, mapping processing is usually executed in the
second mounting section 160 disposed on the substrate processing
unit 200 side. That is, the transfer of a substrate to the
substrate processing unit 200, and mapping processing are executed
in the second mounting section 160.
[0147] Hence, if there is only one opener section, by the time the
substrate encased in the FOUP 80 is loaded in the substrate
processing unit 200, it needs to be transported between the second
mounting section 160 and the shelf array 140 in some cases. This
may cause a waste of the process of transportation.
[0148] Furthermore, during the mapping processing, a transporting
mechanism 190 on the substrate processing unit 200 side cannot load
a substrate from the second mounting section 160 to the substrate
processing unit 200. This leads to such a disadvantage that the
processing in the second mounting section 160 is a rate-determining
factor of the throughput in the processing executed in the loader
and unloader section 500.
[0149] On the contrary, in the loader and unloader section 500 of
the second preferred embodiment, the second and third mounting
sections 160 and 150 can execute concurrently the loading of a
substrate into the substrate processing unit 200, and mapping
processing. Unlike the conventional loader and unloader section,
the loader and unloader section 500 eliminates the need to
reciprocate the FOUP 80 between the shelf array 140 and the second
mounting section 160 by the time a substrate is loaded in the
substrate processing unit 200. This permits a reduction in the time
of waiting for another processing in the second mounting section
160, thereby further improving the throughput in the transportation
executed in the loader and unloader section 500.
[0150] As shown in FIG. 7, the transport robot (the third
transporting section) 530 is disposed at a region that is present
along the X-axis direction of the shelf array 140 and sandwiched
between the second and third mounting sections 160 and 150 (i.e.,
the second row). The transport robot 530 is also disposed such that
its height position (the Z-axis direction position) is
approximately the same as the mounting position of the FOUP 80 in
the second and third mounting sections 160 and 150 (the full-line
position in FIG. 8).
[0151] The transport robot 530 has a lifter 536, to which an arm
538b is attached via a rotary shaft 534a disposed in approximately
parallel to the Z-axis. An arm 538a is attached via a rotary shaft
534c to the arm 538b. A tip portion 539 for transporting substrates
one by one is provided via a rotary shaft 534b.
[0152] After the first opening and closing mechanism 185 of the
third mounting section opens the lid 83 of the FOUP 80 mounted on
the third mounting section 150, a non-contact type detecting
section (not shown) detects the orientation flat and the notch
position of the substrate in the FOUP 80. Subsequently, the tip
portion 539 of the transport robot 530 takes out the substrates one
by one from the FOUP 80, and then transports them to the alignment
section 510. After the alignment section 510 completes the
alignment processing of the substrates, the tip portion 539 of the
transport robot 530 takes out the substrates one by one from the
alignment section 510, and transports them to the FOUP 80.
[0153] The alignment section 510 is an adjusting section of a
so-called single wafer processing that performs alignment
processing per substrate. As shown in FIG. 7, the alignment section
510 is placed within the shelf array 140 and adjacent to the
transport robot 530, and disposed such that its height position is
approximately the same as that of the transport robot 530. Here,
the alignment section 510 adjusts the rotary position of a
substrate based on an orientation flat and a notch position. At
this time, the substrate is rotated based on the detection result
obtained by the non-contact type detecting section, and the
position of the substrate is adjusted such that the crystal
orientation of the substrate becomes a predetermined direction,
thereby completing the alignment processing.
[0154] Thus, the alignment processing executed by the loader and
unloader section 500 is executed for the substrate that is taken
out from the FOUP 80 mounted on the third mounting section 150, and
then loaded in the alignment section 510. That is, in executing the
alignment processing, no FOUP 80 is mounted on the second mounting
section 160.
[0155] This enables the loader and unloader section 500 to
concurrently execute the transfer of a substrate from the second
mounting section 160 to the substrate processing unit 200, the
transfer of substrates one by one between the third mounting
section 150 and the alignment section 510, and the alignment
processing executed in the alignment section 510. Therefore, the
alignment processing can be executed in the loader and unloader
section 500, while minimizing the throughput drop of the processing
executed in the loader and unloader section 500.
[0156] Moreover, in the alignment section 510, the non-contact type
detecting section can detect the orientation flat and the notch
position of a substrate, so that the occurrence of particles can be
suppressed than a batch type adjusting section. Hence, the
alignment section 510 can execute alignment processing while
suppressing defects in substrate processing.
<2.3. Advantages of Substrate Processing Apparatus of Second
Preferred Embodiment>
[0157] As above described, in the loader and unloader section 500
of the substrate processing apparatus 400 of the second preferred
embodiment, the transport robot (the first transport section) 130a
is disposed on the load port (the first mounting section) 10 side,
and the transport robot (the second transporting section) 130b is
disposed on the substrate processing unit 200 side, with the shelf
array 140 interposed between the two. This enables the transport
robots 130a and 130b to execute concurrent transportation of the
FOUP 80 without mutual spatial interference, except where they
access to the same storage shelf.
[0158] It is therefore possible to further improve the throughput
in the transportation executed in the loader and unloader section
500, and the throughput in the substrate processing apparatus 400
as well. Additionally, the operations of the transport robots 130a
and 130b can be set without consideration of spatial interference
of the transports robots 130a and 130b.
[0159] The loader and unloader section 500 has the two mounting
sections (the second and third mounting sections 160 and 150). The
mapping processing in the third mounting section 150, and the
transfer of a substrate to the substrate processing unit 200 in the
second mounting section 160 are executed concurrently.
Specifically, like the conventional loader and unloader section,
the second mounting section 160 is not required to execute mapping
processing, and it may execute only the transfer of a substrate. It
is therefore possible to reduce the time of waiting for another
processing in the second mounting section 160, as in the case with
the conventional apparatus. This can further improve the throughput
in the transportation in the loader and unloader section 500, and
in the throughput in the substrate processing apparatus 400 as
well.
[0160] Additionally, in the loader and unloader section 500, the
transfer of a substrate to the substrate processing unit 200, and
alignment processing can be executed concurrently. Therefore, the
alignment processing can be executed while minimizing the
throughput drop in the loader and unloader section 500 as a
whole.
[0161] Furthermore, since the alignment section 510 can detect the
orientation flat and the notch position of a substrate by the
non-contact type detecting section, the alignment processing can be
executed while suppressing defects in substrate processing.
[0162] While the invention has been shown and described in detail,
the foregoing description is in all aspects illustrative and not
restrictive. It is therefore understood that numerous modifications
and variations can be devised without departing from the scope of
the invention.
* * * * *