U.S. patent application number 11/245105 was filed with the patent office on 2006-04-20 for storage container.
This patent application is currently assigned to MIRAIAL CO., LTD.. Invention is credited to Chiaki Matsutori, Tadahiro Obayashi.
Application Number | 20060081635 11/245105 |
Document ID | / |
Family ID | 35427635 |
Filed Date | 2006-04-20 |
United States Patent
Application |
20060081635 |
Kind Code |
A1 |
Matsutori; Chiaki ; et
al. |
April 20, 2006 |
Storage container
Abstract
To prevent a sealing member from falling off, facilitate
attachment of the sealing member, and improve the sealing property
of the sealing member. The sealing member of the present invention
includes a plurality of individually deformable portions fitted
into fitting groove portions separated across a protrusion in the
fitting groove formed in one of a container main body and a cover
member, a coupling portion connecting the individually deformable
portions, and a sealing piece abutting against a wall surface of
the other one of the container main body and the cover member to
seal a space, the sealing piece being integrated with the coupling
portion connecting the individually deformable portions. Convex
ribs are respectively formed on opposite sides of the individually
deformable portions to elastically come into close contact with the
wall surface of the protrusion.
Inventors: |
Matsutori; Chiaki;
(Kikuchi-shi, JP) ; Obayashi; Tadahiro;
(Kikuchi-shi, JP) |
Correspondence
Address: |
BACON & THOMAS, PLLC
625 SLATERS LANE
FOURTH FLOOR
ALEXANDRIA
VA
22314
US
|
Assignee: |
MIRAIAL CO., LTD.
Tokyo
JP
|
Family ID: |
35427635 |
Appl. No.: |
11/245105 |
Filed: |
October 7, 2005 |
Current U.S.
Class: |
220/378 ;
220/806 |
Current CPC
Class: |
F16J 15/061 20130101;
H01L 21/67763 20130101; F16J 15/062 20130101; H01L 21/67376
20130101; F16J 15/025 20130101; H01L 21/67766 20130101; H01L
21/67769 20130101 |
Class at
Publication: |
220/378 ;
220/806 |
International
Class: |
B65D 53/00 20060101
B65D053/00; B65D 43/04 20060101 B65D043/04 |
Foreign Application Data
Date |
Code |
Application Number |
Oct 14, 2004 |
JP |
2004-300587 |
Claims
1. A storage container comprising: a container main body forming a
housing portion having an opening; a cover member for closing the
opening of the container main body; and a sealing member for
hermetically sealing a space between the container main body and
the cover member and formed on one of the container main body and
the cover member, wherein the sealing member is fitted into a
fitting groove formed in one of the container main body and the
cover member, and includes a plurality of individually deformable
portions disposed opposite to each other through a gap formed along
a fitting direction in a sectional view, and a sealing piece for
sealing a space in abutment with a wall surface of the other one of
the container main body and the cover member.
2. The storage container according to claim 1, wherein the sealing
member is fitted in such a manner that leading edges of the
plurality of individually deformable portions fit into a deep
portion of the fitting groove.
3. The storage container according to claim 2, wherein the fitting
groove has a protrusion fitted in between the plurality of
individually deformable portions of a fitting portion of the
sealing member.
4. The storage container according to claim 3, wherein at least one
rib is formed on opposite sides of the plurality of individually
deformable portions of the sealing member, which comes in close
contact with the protrusion to keep an inner space airtight.
5. The storage container according to claim 3, wherein at least one
lip is formed on opposite sides of the plurality of individually
deformable portions of the sealing member, which comes in close
contact with the protrusion to keep an inner space airtight.
6. The storage container according to claim 1, wherein the
plurality of individually deformable portions of the sealing member
are continuously formed, and the sealing member is fitted in such a
state that leading edges of the plurality of individually
deformable portions are directed to a side opposite to the deep
portion of the fitting groove.
7. The storage container according to claim 6, wherein a fitting
member is fitted between the plurality of individually deformable
portions of the sealing member.
8. The storage container according to claim 6, wherein at least one
rib is formed on the side opposite to the opposite sides of the
plurality of individually deformable portions of the sealing
member, which comes in close contact with a wall surface of the
fitting groove to keep an inner space airtight.
9. The storage container according to claim 6, wherein at least one
lip is formed on the side opposite to the opposite sides of the
plurality of individually deformable portions of the sealing
member, which comes in close contact with a wall surface of the
fitting groove to keep an inner space airtight.
10. The storage container according to claim 1, wherein
slippage-preventing means for preventing the sealing member from
coming off is provided on an opening side of the fitting
groove.
11. The storage container according to claim 1, wherein the fitting
groove is expanded so as to incline at 1 to 6 degrees toward the
opening.
12. The storage container according to claim 1, wherein the wall
surface against which the sealing piece of the sealing member abuts
is inclined within a bendable range of the leading edge of the
sealing piece.
13. The storage container according to claim 12, wherein the wall
surface against which the sealing piece of the sealing member abuts
is one of a horizontal support and a vertical support that is
inclined toward the sealing piece at an angle of 2 to 8 degrees to
one of a horizontal plane and a vertical plane.
14. The storage container according to claim 1, wherein the
plurality of individually deformable portions of the sealing member
are inserted into the fitting groove in an elastically compressed
state.
15. The storage container according to claim 1, wherein a gap of a
predetermined capacity is formed between the plurality of
individually deformable portions of the sealing member and a wall
surface of the fitting groove.
16. The storage container according to claim 1, wherein the
container main body includes a thin-plate supporting portion
supporting a plurality of thin plates disposed at a predetermined
interval, and the cover member includes a thin-plate retainer
supporting the plurality of thin plates supported by the thin-plate
supporting portion under pressure.
17. A storage container comprising: a container main body which
forms a housing portion having an opening; a cover member for
closing the opening of the container main body; and a sealing
member for hermetically sealing a space between the container main
body and the cover member and formed on one of the container main
body and the cover member, wherein the sealing member has a main
body portion fitted into a fitting groove formed in one of the
container main body and the cover member, and a sealing piece
extending from the main body portion to an opposite wall surface of
the other one of the container main body and the cover member to
seal a space between the container main body and the cover member
in abutment with the wall surface, the fitting groove has a
plurality of sub-grooves at its bottom, and the main body portion
includes individually deformable portions respectively fitted into
the plurality of sub-grooves.
18. The storage container according to claim 17, wherein the
individually deformable portions include a convex elastic rib
formed throughout a perimeter on one side or both sides.
19. The storage container according to claim 17, wherein the
individually deformable portions are set smaller than an inner
dimension of the sub-grooves, and include a lip having a larger
degree of freedom than the individually deformable portions and
formed throughout a perimeter on one side or both sides.
20. A storage container comprising: a container main body which
forms a housing portion having an opening; a cover member for
closing the opening of the container main body; and a sealing
member for hermetically sealing a space between the container main
body and the cover member and formed on one of the container main
body and the cover member, wherein the sealing member has a main
body portion fitted into a fitting groove formed in one of the
container main body and the cover member, and a sealing piece
extending from the main body portion to an opposite wall surface of
the other one of the container main body and the cover member to
seal a space between the container main body and the cover member
in abutment with the wall surface, the fitting groove has one or
more sub-grooves throughout a perimeter at a bottom, and the main
body portion includes individually deformable portions sandwiching
a wall plate.
21. A storage container comprising: a container main body which
forms a housing portion having an opening; a cover member for
closing the opening of the container main body; and a sealing
member for hermetically sealing a space between the container main
body and the cover member and formed on one of the container main
body and the cover member, wherein the sealing member has a main
body portion fitted into a fitting groove formed in one of the
container main body and the cover member, and a sealing piece
abutting against a wall surface opposite to the main body portion
of the other one of the container main body and the cover member to
seal a space between the container main body and the cover member,
and the main body portion is formed into a U-shaped sectional form
expanded outside.
22. The storage container according to claim 21, wherein the
portion having the U-shaped sectional form is expanded beyond an
inner dimension of the fitting groove.
23. The storage container according to claim 21, further comprising
a fitting member fitted into a deep portion of the portion having
the U-shaped sectional form of the main body portion to bulge the
main body portion so as to come into pressure contact with the
fitting groove.
24. The storage container according to claim 21, wherein the main
body portion has a convex elastic rib formed throughout a perimeter
on one side or both sides.
25. A storage container comprising: a container main body which
forms a housing portion having an opening; a cover member for
closing the opening of the container main body; and a sealing
member for hermetically sealing a space between the container main
body and the cover member and formed on one of the container main
body and the cover member, wherein the sealing member has a main
body portion fitted into a fitting groove formed in one of the
container main body and the cover member, and a sealing piece
abutting against a wall surface opposite to the main body portion
of the other one of the container main body and the cover member to
seal a space between the container main body and the cover member,
and the main body portion has a slit throughout a perimeter on an
outer side to be expanded outward and formed such that the slit
opens.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application claims, under 35 USC 119, priority of
Japanese Application No. 2004-300587 filed Oct. 14, 2004.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention relates to a storage container for
storing, conveying, and processing an electronic part-mounted board
that should be kept clean during storage, such as a semiconductor
wafer, a storage disk substrate, or a liquid crystal glass
substrate.
[0004] 2. Description of the Related Art
[0005] A variety of devices have been hitherto made on a storage
container for storing an electronic part-mounted board such as a
semiconductor wafer, a storage disk substrate, or a liquid crystal
glass substrate under a clean atmosphere since if any foreign
matter or contaminant adheres to such a board in the process of
storing, conveying, and processing the board, a thin film or
element formed on the surface thereof may be damaged, or element
characteristics may be deteriorated.
[0006] In particular, sealing means for hermetically sealing a
space between a storage container main body and a cover member is
the key to preventing any foreign matter or contaminant from
entering the storage container from the outside.
[0007] To that end, there is known, for example, an airtight
container having a sealing member composed of an elastically
deformable endless portion fitted into a fit-retention groove, a
bendable projection, the leading edge of which extends almost
obliquely from the peripheral corner of the endless portion, and a
fitting rib recessed in or protruding from at least one of the
front and rear sides of the endless portion (see Japanese Patent
Laid-Open Publication No. 2002-68364).
[0008] However, the airtight container disclosed in Japanese Patent
Laid-Open Publication No. 2002-68364 is structured such that the
fit-retention groove and the endless portion of the sealing member
are fitted only by means of the fitting rib recessed in or
protruding from at least one of the front and rear sides of the
endless portion, so that the fit between the sealing member and the
fit-retention groove only depends on the elasticity of the elastic
material forming the endless portion and the fitting dimensional
accuracy between the endless portion and the fit-retention
groove.
[0009] Hence, the above airtight container is insufficient in terms
of the engagement between the endless portion of the sealing member
and the fit-retention groove, leading to a problem that the sealing
member easily falls off the fit-retention groove. In this case,
when the elasticity of the elastic member forming the endless
portion of the sealing member is made too high with a view to
enhancing the engagement between the sealing member and the
fit-retention groove, there arises a problem that the endless
portion is hard to remove from the fit-retention groove.
SUMMARY OF THE INVENTION
[0010] The present invention has been developed in view of the
above problems, and accordingly, it is an object of the present
invention to provide a storage container whose sealing member is
not liable to fall off, and the sealing property of the sealing
member is improved.
[0011] A storage container according to the present invention
includes: a container main body which forms a housing portion
having an opening; a cover member for closing the opening of the
container main body; and a sealing member for hermetically sealing
a space between the container main body and the cover member and
formed on one of the container main body and the cover member,
wherein the sealing member is fitted into a fitting groove formed
in one of the container main body and the cover member, and
includes a plurality of individually deformable portions disposed
opposite to each other through a gap formed along a fitting
direction in a sectional view, and a sealing piece for sealing a
space in abutment with a wall surface of the other one of the
container main body and the cover member.
[0012] In the storage container according to the present invention,
preferably, the sealing member is fitted in such a manner that
leading edges of the plurality of individually deformable portions
fit into a deep portion of the fitting groove. In this case,
preferably, the fitting groove has a protrusion fitted in between
the plurality of individually deformable portions of a fitting
portion of the sealing member. Further, preferably, at least one
rib is formed on opposite sides of the plurality of individually
deformable portions of the sealing member, which comes in close
contact with the protrusion to keep an inner space airtight, or at
least one lip is formed on opposite sides of the plurality of
individually deformable portions of the sealing member, which comes
in close contact with the protrusion to keep an inner space
airtight.
[0013] Further, in the storage container according to the present
invention, preferably, the plurality of individually deformable
portions of the sealing member are continuously formed, and the
sealing member is fitted in such a state that leading edges of the
plurality of individually deformable portions are directed to a
side opposite to the deep portion of the fitting groove. In this
case, preferably, a fitting member is fitted between the plurality
of individually deformable portions of the sealing member. Further,
preferably, at least one rib is formed on the side opposite to the
opposite sides of the plurality of individually deformable portions
of the sealing member, which comes in close contact with a wall
surface of the fitting groove to keep an inner space airtight, or
at least one lip is formed on the side opposite to the opposite
sides of the plurality of individually deformable portions of the
sealing member, which comes in close contact with a wall surface of
the fitting groove to keep an inner space airtight.
[0014] Further, preferably, in the storage container according to
the present invention, slippage-preventing means for preventing the
sealing member from coming off is provided on an opening side of
the fitting groove. In addition, preferably, the fitting groove is
expanded so as to incline at 1 to 6 degrees toward the opening.
Further, preferably, the wall surface against which the sealing
piece of the sealing member abuts is inclined within a bendable
range of the leading edge of the sealing piece, and the wall
surface against which the sealing piece of the sealing member abuts
is one of a horizontal support and a vertical support that is
inclined toward the sealing piece at an angle of 2 to 8 degrees to
one of the horizontal plane and the vertical plane.
[0015] Furthermore, preferably, the plurality of individually
deformable portions of the sealing member are inserted into the
fitting groove in an elastically compressed state. Moreover,
preferably, a gap of a predetermined capacity is secured between
the plurality of individually deformable portions of the sealing
member and a wall surface of the fitting groove.
[0016] Further, the container main body may include a thin-plate
supporting portion supporting a plurality of thin plates disposed
at a predetermined interval, and the cover member may include a
thin-plate retainer supporting the plurality of thin plates
supported by the thin-plate supporting portion under pressure.
[0017] The storage container according to the present invention
includes a sealing member formed on one of a container main body
and a cover member to hermetically seal a space therebetween, which
is fitted into a fitting groove formed in one of the container main
body and the cover member and includes a plurality of individually
deformable portions disposed opposite to each other across a gap
secured along the fitting direction in a sectional view, and a
sealing piece abutting a wall surface of the other one of the
container main body and the cover member, whereby the sealing
member is not liable to come off and the sealing property of the
sealing member is enhanced.
BRIEF DESCRIPTION OF THE DRAWINGS
[0018] FIG. 1 is a schematic sectional view illustrative of an
overall storage container according to a first embodiment of the
present invention;
[0019] FIG. 2 is a schematic enlarged sectional view of a sealing
member of the storage container;
[0020] FIGS. 3A and 3B are schematic sectional views of the sealing
member of the storage container;
[0021] FIG. 4 is a schematic enlarged sectional view illustrative
of a sealing member according to a second embodiment of the present
invention;
[0022] FIGS. 5A and 5B are schematic sectional views of the sealing
member of the storage container;
[0023] FIG. 6 is a schematic enlarged sectional view of a sealing
member of a storage container illustrative of a third embodiment of
the present invention;
[0024] FIGS. 7A and 7B are schematic enlarged sectional views
illustrative of a sealing member of a storage container according
to a fourth embodiment of the present invention;
[0025] FIG. 8 is a schematic sectional view illustrative of a
sealing member of a storage container according to a fifth
embodiment of the present invention; and
[0026] FIG. 9 is an enlarged sectional view illustrating the
sealing member.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0027] Hereinafter, embodiments of a storage container of the
present invention will be described with reference to the
accompanying drawings.
[0028] Referring to FIG. 2, a first embodiment of the storage
container of the present invention will be described. FIG. 2 is a
sectional view schematically showing the storage container.
[0029] The storage container includes a container main body 1
forming a housing portion (i.e., inner space) 4 having an opening
1a, a cover member 2 for covering the opening 1a of the container
main body 1, and a sealing member 3 for keeping the inner space 4
of the container main body 1 airtight with the opening 1a of the
container main body 1 being closed with the cover member 2.
[0030] Further, a thin-plate retainer 6 is attached to the inner
side of the cover member 2. A thin-plate supporting portion 7 is
attached to an inner side face of the container main body 1. The
thin-plate retainer 6 and the thin-plate supporting portion 7 are
grooved at regular intervals. Thus, when the cover member 2 is put
on the container main body while thin plates 8 are held in these
grooves, the thin plates 8 can be arrayed in position at
predetermined intervals almost in parallel by means of the
thin-plate retainer 6 and the thin-plate supporting portion 7.
[0031] The container main body 1 and the cover member 2 are
preferably formed of a polymer material that generates little gas,
for example, polycarbonate. Besides, the thin-plate retainer 6 and
the thin-plate supporting portion 7 are preferably formed of a
polymer material such as polyethylene or polybutelene
terephthalate.
[0032] The sealing member 3 has a closed ring shape as viewed from
the left side of FIG. 2. The sealing member 3 is interposed between
the container main body 1 and the cover member 2 to thereby shut
out the inflow of the outside air into the inner space 4 of the
container main body 1. In the storage container 1, a fitting groove
5 is formed in a circular form along the outer periphery of the
cover member 2, and one side of the sealing member 3 is fitted into
the fitting groove 5, while the other side thereof is brought into
contact with an inner wall surface 15 of the container main body 1.
In this way, the space between the container main body 1 and the
cover member 2 is sealed. Note that the fitting groove 5 is formed
on the container main body 1 side in FIG. 2, but may be formed on
the cover member 2 side. FIG. 1 shows an example where the fitting
groove 5 is formed on the cover member 2 side.
[0033] Referring next to FIG. 1, and FIGS. 3A and 3B, the sealing
member 3 is described in detail. FIG. 1 shows the example where the
fitting groove 5 is formed on the cover member 2 side, which is a
schematic enlarged sectional view of the sealing member of the
cover member 2. FIG. 3A illustrates the sealing member 3 not fitted
into the fitting groove 5. FIG. 3B illustrates the sealing member 3
fitted into the fitting groove 5 with the cover member 2 put on the
container main body 1. The following description is focused on the
sealing member 3 fitted into the fitting groove 5, so that there is
no distinction made about whether the fitting groove 5 is formed on
the cover member 2 side or the container main body 1 side.
[0034] The sealing member 3 is, as shown in FIGS. 3A and 3B, fitted
into the fitting groove 5 formed on either the container main body
1 side or the cover member 2 side, and composed of plural portions
(hereinafter, referred to "individually deformable portions) 9a, 9b
which are individually deformable, and disposed opposite to each
other across a gap defined in the fitting direction as viewed in a
sectional view, a coupling portion 10 connecting the individually
deformable portions 9a and 9b, and a sealing piece 11 that abuts
against the other wall surface of either the container main body 1
or the cover member 2 for sealing an inner space 4. The sealing
piece 11 is integrated with the coupling portion 10 connecting the
individually deformable portions 9a and 9b. The individually
deformable portions 9a, 9b and the coupling portion 10 constitute a
main body portion. The main body is fitted into the fitting groove
5 to support the sealing piece 11.
[0035] On the other hand, a protrusion 14 projects outwardly from
the deep portion (i.e., bottom) of the fitting groove 5. The
protrusion 14 is formed on the bottom of the fitting groove 5
throughout the perimeter thereof, and fitting groove portions 5a
and 5b are formed between the side walls of the protrusion 14 and
the fitting groove 5. That is, two stripes of sub-groves are
formed.
[0036] In addition, the individually deformable portions 9a and 9b
of the sealing member 3 have two convex ribs 12 each; the two ribs
12 are each formed on the opposite sides of the individually
deformable portions 9a and 9b facing the protrusion 14, elastically
in close contact with the side faces of the protrusion 14. The ribs
12 are formed along the perimeter of the side faces of the
individually deformable portions 9a and 9b in a closed ring
shape.
[0037] In this way, forming the ribs 12 in the individually
deformable portions 9a, 9b in close contact with the side faces of
the protrusion 14 makes it possible to more securely seal the gap
and improve the sealing property of the sealing member. Herein, the
example where the individually deformable portions 9a and 9b have
the two ribs 12 each is discussed. However, one rib or three or
more ribs may be formed on each portion. Besides, the ribs 12 may
be formed on not only one side, but also on the other side of the
individually deformable portions 9a, 9b, that is, the side opposite
to the protrusion 14. Alternatively, the ribs 12 may be formed only
on the other side.
[0038] By adopting such a structure that the protrusion 14 is
formed inside the fitting groove 5 to form plural fitting groove
portions (i.e., sub-groove portions), and the individually
deformable portions 9a, 9b are fitted into the fitting groove
portions, the fitting area can be increased to enhance the
engagement and secure a long seal length. Thus, the sealing
property of the sealing member can be enhanced. The formation of
the ribs 12 in the individually deformable portions 9a, 9b, in
close contact with the wall surfaces of the protrusion 14 makes it
possible to more securely seal the gap and attain a much higher
sealing property of the sealing member.
[0039] This beneficial effect is more marked in the case of
increasing the number of protrusions 14 (i.e., sub-groove
portions). However, a larger number of protrusions 14 (i.e.,
sub-groove portions) are difficult to mold and engage with the
individually deformable portions 9a and 9b. In addition, a
manufacturing cost increases. Thus, the number of protrusions 14 is
appropriately set in consideration of such points.
[0040] Further, the leading edge of the sealing piece 11 of the
sealing member 3 elastically bends to abut against the inner wall
surface 15 as a close-contact portion of the container main body 1
to shut out the inflow of the outside air into the housing space 4
of the container main body 1. In this case, it is preferred that
the sealing piece 11 be tilted with respect to the inner wall
surface 15 (also referred to as "close-contact portion") of the
container body 1 so as to secure sufficient adhesion when the
leading edge of the sealing piece 11 comes into close contact with
the wall surface 15. That is, the sealing piece 11 is preferably
formed at an angle to the wall surface in a deformable range of the
leading edge when in close contact therewith. This makes it
possible to more securely seal the gap and improve the sealing
property of the sealing member.
[0041] A material for the sealing member 3 is preferably an elastic
polymer that generates little gas. For example, polyester elastomer
or polyolefin elastomer may be used. Specific examples of polyester
elastomer mainly include a copolymer mainly containing a
terephthalic acid, 1,4-tetramethylene glycol, and polyoxyethylene
glycol, or a polymer compound thereof.
[0042] As shown in FIG. 3A, the sealing member 3 thus structured is
splayed in such a direction as to increase the distance between the
individually deformable portions 9a and 9b before being fitted into
the fitting groove 5. Also, the sealing piece 11 straightly extends
without deforming.
[0043] As shown in FIG. 1 and FIG. 3B, in the sealing member 3, the
individually deformable portions 9a and 9b are fitted into the
fitting groove portions 5a and 5b between the wall surface of the
fitting groove 5 and the wall surface of the protrusion 14 so that
the leading edges of the individually deformable portions 9a and 9b
fit into the deep portion (i.e., bottom) of the fitting groove 5,
and the protrusion 14 is fitted in between the individually
deformable portions 9a and 9b.
[0044] Thus, the individually deformable portions 9a and 9b of the
sealing member 3 exert the elastic restoring force to the state of
FIG. 3A, but at the same time, they are compressed between the
fitting groove 5 and the protrusion 14 and thus come into close
contact with the wall surfaces of the fitting groove 5. At this
time, as shown in FIG. 1, almost no gap remains between the wall
surface and the individually deformable portions 9a, 9b after the
fitting, so these portions cannot undergo any further compressive
deformation. As a result, the larger pressing force on the fitting
groove 5 is attained due to not only the elastic force with which
the individually deformable portions 9a, 9b are restored to their
original state but also the elastic force of a material forming the
sealing member 3.
[0045] Then, in this state, the cover member 1 is put on the
container main body 1, thereby bringing the leading edge of the
sealing piece 11 of the seal member 3 into close contact with the
wall surface 15 of the container main body 1 to seal the gap
between the sealing piece 11 of the sealing member 3 and the
container main body 1. Therefore, the housing space 4 of the
container main body 1 is kept airtight by blocking out the outside
air.
[0046] In this way, this storage container is provided with the
sealing member 3 for hermetically sealing a space between the
container main body 1 and the cover member 2 on either one thereof.
The sealing member 3 includes the plurality of individually
deformable portions, which are fitted into the fitting groove 5
formed on one of the container main body 1 and the cover member 2,
and the sealing piece 11 for sealing the gap in abutment with the
wall surface of the other one. This makes it possible to separate
or disperse the elastic force at the fitted portion with the
fitting groove 5, and facilitates the adjustment of the adhesion
between the sealing member 3 and the fitting groove 5, and the
attachment of the sealing member 3 while preventing the sealing
member 3 from coming off, with the result that the sealing property
of the sealing member is enhanced.
[0047] In this example, the protrusion 14 is formed with a large
thickness to set a large interval between the individually
deformable portions 9a and 9b in accordance therewith. However, as
shown in FIGS. 7A and 7B, the interval between the individually
deformable portions 9a and 9b may be set smaller like a slit, and
the protrusion 14 may be formed into a thin wall plate. In this
case as well, the sealing property can be enhanced.
[0048] Referring next to FIG. 4 and FIGS. 5A and 5B, a second
embodiment of the present invention is described. FIG. 4 is a
schematic enlarged sectional view of a sealing member portion of a
storage container according to this embodiment. FIG. 5A illustrates
the sealing member 3 not fitted into the fitting groove 5. FIG. 5B
illustrates the sealing member 3 fitted into the fitting groove 5
with the cover member 2 put on the container main body 1.
[0049] Similar to the first embodiment, the sealing member 3 of
this embodiment is composed of the individually deformable portions
9a, 9b fitted into the fitting groove 5 formed on one of the
container main body 1 and the cover member 2, the coupling portion
10 connecting the individually deformable portions 9a and 9b and
fitted into the fitting groove 5, and the sealing piece 11 for
sealing the gap in abutment with the wall surface of the other one
of the container main body 1 and the cover member 2. The sealing
piece 11 is integrated with one of the individually deformable
portions, the individually deformable portion 9a. Note that the
position of the coupling portion 10 is the reverse of that of the
first embodiment. Hence, the individually deformable portions 9a,
9b and the coupling portion 10 are formed in a U-shaped sectional
view expanded outside.
[0050] The individually deformable portions 9a and 9b of the
sealing member 3 not fitted into the fitting groove 5 are also
expanded at some distance from each other as shown in FIG. 5A.
Further, the ribs 12 are formed on the opposite sides of the
individually deformable portions 9a, 9b in close contact with the
wall surfaces of the fitting groove 5.
[0051] On the other hand, convex braces 16 are formed in abutment
with the individually deformable portions 9a, 9b of the sealing
member 3 near the opening of the wall surfaces of the fitting
groove 5. The brace 16 prevents the individually deformable
portions 9a, 9b of the sealing member 3 from coming off from the
fitting groove 5 due to an external force or a difference between
external pressure and internal pressure. Thus, the brace 16 does
not need to be formed throughout the perimeter of the fitting
groove 5, and thus only needs to be formed partially. Further, if
the sealing member 3 has sufficient elastic restoring force, the
brace 16 may be omitted.
[0052] As shown in FIG. 4 and FIG. 5B, the sealing member 3 thus
structured is fitted into the fitting groove 5 such that the
coupling portion 10 connecting the individually deformable portions
9a and 9b fits into the deep portion of the fitting groove 5, that
is, the leading edge of the individually deformable portions 9a, 9b
are directed to the side opposite to the deep portion of the
fitting groove 5.
[0053] Thus, in a state where the sealing member 3 is fitted
therein, a gap 19 is defined between the individually deformable
portions 9a and 9b, and the ribs 12 and 12b are pressed against the
wall surfaces of the fitting groove 5 mainly by means of the
elastic restoring force with which the individually deformable
portions 9a, 9b are restored to the original state, i.e., unfitted
state.
[0054] Therefore, as compared with the sealing member of the first
embodiment, the fitting force is weakened, but the degree of
freedom of the individually deformable portions 9a and 9b is
increased. Thus, the adhesion of the ribs 12 to the wall surfaces
of the fitting groove 5 improves, resulting in the high sealing
property of the sealing member. That is, the ribs 12 can exert the
same function as lips 20 mentioned below. Further, the force of
fitting the sealing member 3 into the fitting grooves 5 is small,
and accordingly the wear of the fitting portion resulting from the
friction due to the externally applied vibration can be suppressed.
Thus, it is possible to minimize the generation of any foreign
matter at the fitting portion even if a vibration is externally
applied. The fitting force can be adjusted by selecting a suitable
size of the gap 19, a suitable thickness of the individually
deformable portions 9a, 9b, and a suitable material for the sealing
member 3.
[0055] In this case, the brace 16 formed near the opening of the
fitting groove 5 can engage with the ribs 12a and 12b, so that the
sealing member 3 never comes off from the fitting groove 5 as long
as the sealing member 3 is being used ordinally, despite the weak
fitting force. On the other hand, in the fitted state, the gap 19
is formed, so that the gap is mechanically squashed, whereby the
individually deformable portions 9a and 9b can be removed together
with the coupling portion 10 from the fitting groove while avoiding
the brace 16.
[0056] The storage container accommodating a semiconductor wafer
for storage, conveyance, and processing under a clean atmosphere is
repeatedly washed for the purposes of removing contaminants and
preventing contamination. In this case, if the sealing member 3 can
be easily removed, the washing step can be simplified, and the
washing efficiency can be improved.
[0057] Referring next to FIG. 6, a third embodiment of the present
invention is described. FIG. 6 is a schematic enlarged sectional
view of a sealing member portion of a storage container according
to this embodiment.
[0058] In this embodiment, a fitting member 17 is fitted in between
the individually deformable portions 9a and 9b of the sealing
member 3 of the second embodiment. The fitting member 17 includes a
bulging portion 18a inserted between the individually deformable
portions 9a and 9b, and a retainer 18b abutting against the end of
one of the individually deformable portions 9a and 9b, which does
not have the integrally formed sealing piece 11, that is, the
individually deformable portion 9b. The bulging portion 18a and the
retainer 18b are integrally formed.
[0059] The bulging portion 18a of the fitting member 17 is inserted
between the individually deformable portions 9a and 9b, so the
individually deformable portions 9a and 9b are pushed outward
against the wall surface of the fitting groove 5. Accordingly, the
adhesion between the individually deformable portions 9a, 9b and
the fitting groove 5 improves. Note that the fitting member 17 may
be formed into the closed ring shape. However, in order to
facilitate the insertion between the individually deformable
portions 9a and 9b of the sealing member 3, a string-like member is
preferably used. Further, the retainer 18b of the fitting member 17
may be omitted. The ribs 12 are optionally provided.
[0060] On the other hand, in this embodiment, the wall surface
(i.e., close-contact portion) 15 of the container main body 1 in
close contact with the sealing piece 11 of the sealing member 3 is
formed in an inclined state at the angle of .theta. in the
direction in which the sealing piece 11 is tilted. That is, when
the storage container is placed in a horizontal position during
use, the opening 1a of the container main body 1 opens in a
horizontal direction, and thus the wall surface 15 is set upright
(i.e., vertical support). The wall surface 15 is inclined toward
the sealing piece 11 at the angle .phi. to the vertical plane.
[0061] Accordingly, the sealing piece 11 of the sealing member 3
can stably come into close contact with the wall surface 15. An
experiment carried out by the inventors of the present invention
revealed that, provided the angle .phi. is within 2 to 8 degrees,
the sealing piece 11 can stably come into close contact with the
wall surface 15 as the vertical support even if the cover member 2
is repeatedly attached to/detached from the container main body 1.
This is because when the inclination angle .phi. is set to
2.degree. or more, the pressing force acts on the leading edge of
the sealing piece 11 toward the circumferential direction, so that
uniform stress can be attained at the leading edge of the sealing
piece 11, thereby enabling the stable adhesion. If the inclination
angle .phi. is 80 or more, the adhesion becomes unstable. This is
supposedly because the pressing force with which the sealing piece
11 presses the wall surface 15 is lowered.
[0062] Note that if the storage container is used upright, the wall
surface 15 extends in a horizontal direction (i.e., horizontal
support), and is assumed to tilt toward the sealing piece 11 at the
angle .phi. to the horizontal plane.
[0063] Referring next to FIGS. 7A and 7B, a fourth embodiment of
the present invention is described. FIGS. 7A and 7B are schematic
enlarged sectional views of a sealing member used in this
embodiment, in which FIG. 7A illustrates the sealing member not
fitted into a fitting groove and FIG. 7B illustrates the sealing
member fitted into the fitting groove with the cover member put on
the container main body.
[0064] The sealing member 3 of this embodiment also includes the
individually deformable portions 9a and 9b fitted into the fitting
groove 5 formed on one of the container main body 1 and the cover
member 2, the coupling portion 10 connecting the individually
deformable portions 9a and 9b and fitted into the fitting groove 5,
and the sealing piece 11 sealing the gap in abutment with the other
one of the container main body 1 and the cover member 2. The
sealing piece 11 is integrally formed with one of the individually
deformable portions 9a and 9b, the individually deformable portion
9a.
[0065] In the sealing member 3, when the sealing member is inserted
into the fitting groove 5 with the coupling portion 10 fitting into
the deep portion of the fitting groove 5, as shown in FIG. 7B,
almost no gap is left between the individually deformable portions
9a, 9b; the individually deformable portions 9a and 9b no longer
undergo compressive deformation.
[0066] Accordingly, if the sealing member 3 is inserted into the
fitting groove 5 with the coupling portion 10 fitting into the deep
portion of the fitting groove 5, the individually deformable
portions 9a and 9b come into close contact with the wall surfaces
of the fitting groove 5 due to the elastic restoring force that
restores these portions to a splayed form as shown in FIG. 7A.
[0067] At this time, almost no gap remains between the individually
deformable portions 9a and 9b, so that they cannot undergo any
further compressive deformation. Hence, a large pressing force acts
on the wall surface of the fitting groove 5 due to not only the
elastic restoring force of the individually deformable portions 9a
and 9b but also the elastic force of the material forming the
sealing member 3.
[0068] Note that the ribs described in the above embodiments are
omitted herein, but needless to say, the ribs may be formed.
[0069] Referring next to FIG. 8, a fifth embodiment of the present
invention is described. FIG. 8 is a schematic enlarged sectional
view showing a sealing member used in this embodiment, which has
not been yet fitted into the fitting groove.
[0070] The sealing member 3 has the same structure as the sealing
member 3 of the first embodiment except that one or more (in this
example, one) lips 20 are formed on the opposite sides of the
individually deformable portions 9a and 9b instead of the ribs 12.
The lip 20 is an elastic deformable portion involving the flexion
deformity. The lip 20 is inferior in terms of fitting force to the
ribs, but is superior to the ribs in terms of adhesion and sealing
property due to its large degree of freedom. Further, the wear of
the sealing member resulting from externally applied vibration etc.
can be suppressed because of its small fitting force.
[0071] The protrusion 14 is formed on one side inside the fitting
groove 5. Thus, one of the fitting groove portions, i.e., the
fitting groove portion 5b matches with one of the individually
deformable portions, i.e., the individually deformable portion 9b.
The sealing member 3 is held in the fitting groove 5 mainly by
means of this portion and both side faces of the main body. Note
that the lip 20 is provided only on the inner side of the
individually deformable portion 9a, but may be optionally provided
on the outer side thereof. Alternatively, the lip 20 may be
provided only on the outer side of the individually deformable
portion 9a, or on one or both of the sides thereof.
[0072] FIG. 9 is an enlarged view of a sealing member portion of a
storage container using the above sealing member 3. Similar to the
first embodiment, the sealing member is structured such that the
individually deformable portions 9a and 9b of the sealing member 3
are fitted into the fitting groove portions 5a and 5b of the
fitting groove 5 formed in the cover member 2.
[0073] At this time, the fitting groove portion 5a is formed in
such a manner as to secure a gap 21 between the individually
deformable portion 9a forming the lip 20 and the wall surface of
the protrusion 14, whereby the lip 20 bends to come into close
contact with the wall surface of the protrusion 14 due to the
elastic deformity, thereby sealing the space. Also, the entire
width of the individually deformable portions 9a and 9b is set
somewhat larger than the width of the fitting groove 5, whereby the
individually deformable portions 9a and 9b can come into close
contact with the wall surfaces of the fitting groove 5.
[0074] At this time, the wall surfaces (i.e., outer and inner
peripheral surfaces) of the fitting groove 5 are inclined inwardly
at the angle of .theta. to the vertical plane. That is, the fitting
groove 5 is so tilted as to expand toward the opening. The angle
.theta. is preferably within a range of 10 to 60, more preferably
30 to 50. By tilting the surfaces within such an angular range, the
individually deformable portions 9a and 9b of the sealing member 3
are easily inserted into the fitting groove 5, and sufficient
fitting force can be maintained. Also, this enables the smooth
removal from the mold upon molding, so that the satisfactory
fitting surface can be obtained.
[0075] Note that the above embodiments describe the case where the
fitting groove 5 is formed on the cover member 2 side by way of
example, but similar effects can be obtained even when the fitting
groove 5 is formed on the container main body 1 side.
* * * * *