U.S. patent application number 10/935628 was filed with the patent office on 2006-03-16 for semiconductor optical modulator, an optical amplifier and an integrated semiconductor light-emitting device.
Invention is credited to Shunichi Sato, Takashi Takahashi.
Application Number | 20060054899 10/935628 |
Document ID | / |
Family ID | 27531826 |
Filed Date | 2006-03-16 |
United States Patent
Application |
20060054899 |
Kind Code |
A1 |
Takahashi; Takashi ; et
al. |
March 16, 2006 |
Semiconductor optical modulator, an optical amplifier and an
integrated semiconductor light-emitting device
Abstract
An integrated semiconductor optical-emitting device includes a
surface-emission laser diode and an EA-type semiconductor optical
modulator integrated commonly on a GaAs substrate in a direction
perpendicular to the GaAs substrate.
Inventors: |
Takahashi; Takashi; (Miyagi,
JP) ; Sato; Shunichi; (Miyagi, JP) |
Correspondence
Address: |
DICKSTEIN SHAPIRO MORIN & OSHINSKY LLP
2101 L Street, NW
Washington
DC
20037
US
|
Family ID: |
27531826 |
Appl. No.: |
10/935628 |
Filed: |
September 8, 2004 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
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10095516 |
Mar 13, 2002 |
6803604 |
|
|
10935628 |
Sep 8, 2004 |
|
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Current U.S.
Class: |
257/80 |
Current CPC
Class: |
H01S 5/18308 20130101;
H01S 5/50 20130101; H01S 5/0265 20130101; H01S 5/4087 20130101;
H01S 5/18358 20130101; H01S 2301/173 20130101; H01S 5/18311
20130101; G02F 1/01708 20130101; H01S 5/32366 20130101; H01S 5/1085
20130101; G02F 1/017 20130101; H01S 5/18305 20130101; H01S 5/4012
20130101; H01S 5/18302 20130101; H01S 5/34306 20130101; B82Y 20/00
20130101; H01S 5/101 20130101 |
Class at
Publication: |
257/080 |
International
Class: |
H01L 33/00 20060101
H01L033/00 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 13, 2001 |
JP |
2001-069816 |
Mar 13, 2001 |
JP |
2001-070289 |
Oct 22, 2001 |
JP |
2001-323209 |
Jan 18, 2002 |
JP |
2002-009834 |
Feb 21, 2002 |
JP |
2002-044303 |
Claims
1. A semiconductor optical modulator, comprising: an optical
absorption layer of a multiple quantum well structure; and a p-type
electrode and an n-type electrode applying an electric field to
said optical absorption layer, said multiple quantum well structure
comprising a quantum layer and a barrier layer, said quantum well
layer being formed of a material selected from the group consisting
of: GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, said barrier layer being
formed of a material selected from the group consisting of: GaAs,
GaInP and GaInAsP.
2. A semiconductor optical modulator comprising: an optical
absorption layer of multiple quantum well structure; and p-type and
n-type electrodes for applying an electric field to the multiple
quantum well structure, said multiple quantum well structure
comprising a quantum well layer, a barrier layer, and an
intermediate layer disposed between said quantum well layer and
said barrier layer, said quantum well layer being formed of a
material selected from the group consisting of: GaNAs, GaInNAs,
GaNAsSb and GaInNAsSb; said barrier layer being formed of a
material selected from the group consisting of: AlaGa1-aAs
(0<a.ltoreq.1), (AlbGa1-b) InP (0<b.ltoreq.1) (AlcGa1-c)
InAsP (0<c.ltoreq.1), said intermediate layer comprising a
material selected from the group consisting of: GaAs, GaInP and
GaInAsP.
3. An integrated semiconductor light-emitting device, comprising: a
semiconductor optical modulator; and a laser diode having an active
layer of any of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, said
semiconductor optical modulator and said laser diode being
integrated on a common substrate, said semiconductor optical
modulator, comprising: an optical absorption layer of a multiple
quantum well structure; and a p-type electrode and an n-type
electrode applying an electric field to said optical absorption
layer, said multiple quantum well structure comprising a quantum
layer and a barrier layer, said quantum well layer being formed of
a material selected from the group consisting of: GaNAs, GaInNAs,
GaNAsSb and GaInNAsSb, said barrier layer being formed of a
material selected from the group consisting of: GaAs, GaInP and
GaInAsP.
4. An integrated semiconductor light-emitting device as claimed in
claim 3, wherein said laser diode and said semiconductor are formed
monolithically on said substrate.
5. An integrated semiconductor light-emitting device as claimed in
claim 3, wherein said laser diode is a surface-emission laser
diode.
6. An integrated semiconductor light-emitting device as claimed in
claim 5, wherein said surface-emission laser diode and said
semiconductor optical modulator are integrated monolithically in a
direction perpendicular to said substrate.
7. An integrated semiconductor light-emitting device as claimed in
claim 6, wherein said semiconductor optical modulator is provided
inside an optical cavity of said surface-emission laser diode.
8. An integrated semiconductor light-emitting device as claimed in
claim 6, wherein said semiconductor optical modulator is provided
inside a distributed Bragg reflector of said surface-emission laser
diode.
9. An integrated semiconductor light-emitting device as claimed in
claim 6, wherein said semiconductor optical modulator is provided
inside a distributed Bragg reflector of located near said substrate
with respect to said active layer.
10. An integrated semiconductor light-emitting device, comprising:
a semiconductor optical modulator; and a laser diode having an
active layer of any of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, said
semiconductor optical modulator and said laser diode being
integrated on a common substrate, said semiconductor optical
modulator, comprising: an optical absorption layer of multiple
quantum well structure; and p-type and n-type electrodes for
applying an electric field to the multiple quantum well structure,
said multiple quantum well structure comprising a quantum well
layer, a barrier layer, and an intermediate layer disposed between
said quantum. well layer and said barrier layer, said quantum well
layer being formed of a material selected from the group consisting
of: GaNAs, GaInNAs, GaNAsSb and GaInNAsSb; said barrier layer being
formed of a material selected from the group consisting of:
AlaGa1-aAs (0<a.ltoreq.1), (AlbGa1-b) InP (0<b.ltoreq.1)
(AlcGa1-c) InAsP (0<c.ltoreq.1), said intermediate layer
comprising a material selected from the group consisting of: GaAs,
GaInP and GaInAsP.
11. An integrated semiconductor light-emitting device as claimed in
claim 10, wherein said laser diode is a surface-emission laser
diode.
12. An integrated semiconductor light-emitting device as claimed in
claim 11, wherein said surface-emission laser diode and said
semiconductor optical modulator are integrated monolithically in a
direction perpendicular to said substrate.
13. An integrated semiconductor light-emitting device as claimed in
claim 12, wherein said semiconductor optical modulator is provided
inside an optical cavity of said surface-emission laser diode.
14. An integrated semiconductor light-emitting device as claimed in
claim 12, wherein said semiconductor optical modulator is provided
inside a distributed Bragg reflector of said surface-emission laser
diode.
15. An integrated semiconductor light-emitting device as claimed in
claim 12, wherein said semiconductor optical modulator is provided
inside a distributed Bragg reflector of located near said GaAs
substrate with respect to said active layer.
16-21. (canceled)
22. A tunable laser apparatus, comprising: an optical cavity having
a pair of reflectors; an amplitude spontaneous emission optical
radiation source provided in said optical cavity; a wavelength
divide filter provided in said optical cavity, said wavelength
divide filter splitting an optical radiation produced by said
amplitude spontaneous optical emission optical source into optical
radiation components having respective wavelengths; an optical gate
array provided in said optical cavity, said optical gate array
selectively amplifying an optical radiation component divided by
said wavelength divide filter; and a semiconductor optical
modulator modulating an intensity of said optical radiation
component passed through said optical gate array, said
semiconductor optical modulator comprising: an optical absorption
layer of a multiple quantum well structure; and a p-type electrode
and an n-type electrode applying an electric field to said optical
absorption layer, said multiple quantum well structure comprising a
quantum well layer and a barrier layer, said quantum well layer
being formed of a material selected from the group consisting of:
GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, said barrier layer being
formed of a material selected from the group consisting of: GaAs,
GaInP and GaInAsP.
23. A tunable laser apparatus, comprising: an optical cavity having
a pair of reflectors; an amplitude spontaneous emission optical
radiation source provided in said optical cavity; a wavelength
divide filter provided in said optical cavity, said wavelength
divide filter splitting an optical radiation produced by said
amplitude spontaneous optical emission optical source into optical
radiation components having respective wavelengths; an optical gate
array provided in said optical cavity, said optical gate array
selectively amplifying an optical radiation component divided by
said wavelength divide filter; and a semiconductor optical
modulator modulating an intensity of said optical radiation
component passed through said optical gate array, said
semiconductor optical modulator comprising: an optical absorption
layer of multiple quantum well structure; and p-type and n-type
electrodes for applying an electric field to the multiple quantum
well structure, said multiple quantum well structure comprising a
quantum well layer, a barrier layer, and an intermediate layer
disposed between said quantum well layer and said barrier layer,
said quantum well layer being formed of a material selected from
the group consisting of: GaNAs, GaInNAs, GaNAsSb and GaInNAsSb;
said barrier layer being formed of a material selected from the
group consisting of: AlaGa1-aAs (0<a.ltoreq.1), (AlbGa1-b) InP
(0<b.ltoreq.1) (AlcGa1-c) InAsP (0<c.ltoreq.1), said
intermediate layer comprising a material selected from the group
consisting of: GaAs, GaInP and GaInAsP.
24. A multi-wavelength laser apparatus, comprising: an optical
cavity including a pair of reflectors; an wavelength divide filter
provided in said optical cavity; a semiconductor optical amplifier
provided in said optical cavity for selectively amplifying an
optical radiation divided by said wavelength divide filter; and a
semiconductor optical modulator provided in said optical cavity,
said semiconductor optical modulator modulating an intensity of
said optical radiation divided by said semiconductor optical
amplifier, said semiconductor optical modulator comprising: an
optical absorption layer of a multiple quantum well structure; and
a p-type electrode and an n-type electrode applying an electric
field to said optical absorption layer, said multiple quantum well
structure comprising a quantum layer and a barrier layer, said
quantum well layer being formed of a material selected from the
group consisting of: GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, said
barrier layer being formed of a material selected from the group
consisting of: GaAs, GaInP and GaInAsP.
25. A multi-wavelength laser apparatus, comprising: an optical
cavity including a pair of reflectors; an wavelength divide filter
provided in said optical cavity; a semiconductor optical amplifier
provided in said optical cavity for selectively amplifying an
optical radiation divided by said wavelength divide filter; and a
semiconductor optical modulator provided in said optical cavity,
said semiconductor optical modulator modulating an intensity of
said optical radiation divided by said semiconductor optical
amplifier, said semiconductor optical modulator comprising: an
optical absorption layer of multiple quantum well structure; and
p-type and n-type electrodes for applying an electric field to the
multiple quantum well structure, said multiple quantum well
structure comprising a quantum well layer, a barrier layer, and an
intermediate layer disposed between said quantum well layer and
said barrier layer, said quantum well layer being formed of a
material selected from the group consisting of: GaNAs, GaInNAs,
GaNAsSb and GaInNAsSb; said barrier layer being formed of a
material selected from the group consisting of: AlaGa1-aAs
(0<a.ltoreq.1), (AlbGa1-b) InP (0<b.ltoreq.1), (AlcGa1-c)
InAsP (0<c.ltoreq.1), said intermediate layer comprising a
material selected from the group consisting of: GaAs, GaInP and
GaInAsP.
26. An optical transmission system, comprising: an optical
transmission module producing optical signals of respective
wavelengths; an optical fiber transmitting said optical signals
produced by said optical transmission module; and an optical
receiver module receiving said optical signals transmitted through
said optical fiber, said optical transmission module comprising a
multi-wavelength laser apparatus, said multi-wavelength laser
apparatus comprising: an optical cavity including a pair of
reflectors; a wavelength divide filter provided in said optical
cavity; a semiconductor optical amplifier provided in said optical
cavity for selectively amplifying an optical radiation divided by
said wavelength divide filter; and a semiconductor optical
modulator provided in said optical cavity, said semiconductor
optical modulator modulating an intensity of said optical radiation
divided by said semiconductor optical amplifier, said semiconductor
optical modulator comprising: an optical absorption layer of a
multiple quantum well structure; and a p-type electrode and an
n-type electrode applying an electric field to said optical
absorption layer, said multiple quantum well structure comprising a
quantum well layer and a barrier layer, said quantum well layer
being formed of a material selected from the group consisting of:
GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, said barrier layer being
formed of a material selected from the group consisting of: GaAs,
GaInP and GaInAsP.
27. An optical transmission system, comprising: an optical
transmission module producing optical signals of respective
wavelengths; an optical fiber transmitting said optical signals
produced by said optical transmission module; and an optical
receiver module receiving said optical signals transmitted through
said optical fiber, said optical transmission module comprising a
multi-wavelength laser apparatus, said multi-wavelength laser
apparatus comprising: an optical cavity including a pair of
reflectors; an wavelength divide filter provided in said optical
cavity; a semiconductor optical amplifier provided in said optical
cavity for selectively amplifying an optical radiation divided by
said wavelength divide filter; and a semiconductor optical
modulator provided in said optical cavity, said semiconductor
optical modulator modulating an intensity of said optical radiation
divided by said semiconductor optical amplifier, said semiconductor
optical modulator comprising: an optical absorption layer of
multiple quantum well structure; and p-type and n-type electrodes
for applying an electric field to the multiple quantum well
structure, said multiple quantum well structure comprising a
quantum well layer, a barrier layer, and an intermediate layer
disposed between said quantum well layer and said barrier layer,
said quantum well layer being, formed of a material selected from
the group consisting of: GaNAs, GaInNAs, GaNAsSb and GaInNAsSb;
said barrier layer being formed of a material selected from the
group consisting of: AlaGa1-aAs (0<a.ltoreq.1), (AlbGa1-b) InP
(0<b.ltoreq.1), (AlcGa1-c) InAsP (0<c.ltoreq.1), said
intermediate layer comprising a material selected from the group
consisting of: GaAs, GaInP and GaInAsP.
28. A semiconductor optical amplifier, comprising: a GaAs
substrate; a gain region formed on said GaAs substrate; and p-side
and an n-side electrodes for injecting electric current into said
gain region, said gain region comprising a semiconductor layer
selected from the group consisting of: GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb.
29. A semiconductor optical amplifier as claimed in claim 28,
wherein said gain region has a multiple quantum well structure
including a stacking of plurality quantum well layers, each of said
quantum well layers having a composition selected from the group
consisting of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, said quantum
well layers having respective bandgaps different from each
other.
30. A semiconductor optical amplifier as claimed in claim 28,
wherein said semiconductor optical amplifier further comprises
means for suppressing laser oscillation in a Fabri-Perot mode.
31. An amplitude spontaneous emission optical source, comprising: a
GaAs substrate; a gain region formed on said GaAs substrate; and
p-side and an n-side electrodes for injecting electric current into
said gain region, said gain region comprising a semiconductor layer
selected from the group consisting of: GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb.
32. An optical gate array, comprising: a GaAs substrate; and a
plurality of optical semiconductor amplifiers formed on said GaAs
substrate in the form of an array, each of said optical
semiconductor amplifiers comprising: a gain region formed on said
GaAs substrate; and p-side and an n-side electrodes for injecting
electric current into said gain region, said gain region comprising
a semiconductor layer selected from the group consisting of: GaNAs,
GaInNAs, GaNAsSb and GaInNAsSb.
33. A tunable laser apparatus, comprising: an optical cavity having
a pair of reflectors; an amplitude spontaneous emission optical
source provided in said optical cavity; a wavelength divide filter
provided in said optical cavity, said wavelength divide filter
dividing an optical beam produced by said amplitude spontaneous
emission optical source into optical beam components of respective
wavelengths; and an optical gate array provided in said optical
cavity, said optical gate array selectively amplifying said optical
beam component divided by said wavelength divide filter, said
amplitude spontaneous emission optical source comprising: a GaAs
substrate; a gain region formed on said GaAs substrate; and p-side
and an n-side electrodes for injecting electric current into said
gain region, said gain region comprising a semiconductor layer
selected from the group consisting of: GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb, said optical gate array comprising: a plurality of
optical semiconductor amplifiers formed on said GaAs substrate in
the form of an array, each of said optical semiconductor amplifiers
comprising: a gain region formed on said GaAs substrate; and p-side
and an n-side electrodes for injecting electric current into said
gain region, said gain region comprising a semiconductor layer
selected from the group consisting of: GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb.
34. A multi-wavelength laser apparatus, comprising: an optical
cavity; a wavelength divide filter provided in said optical cavity;
and a semiconductor optical amplifier provided in said optical
cavity, said semiconductor optical amplifier selectively amplifying
an optical beam divided by said wavelength divide filter, said
semiconductor optical amplifier comprising: a GaAs substrate; a
gain region formed on said GaAs substrate; and p-side and an n-side
electrodes for injecting electric current into said gain region,
said gain region comprising a semiconductor layer selected from the
group consisting of: GaNAs, GaInNAs, GaNAsSb and GaInNAsSb.
35. A wavelength-division multiplex optical transmission system,
comprising: an optical transmission module producing optical
signals of respective wavelengths; an optical fiber transmitting
said optical signals produced by said optical transmission module;
and an optical receiver module receiving said plural optical
signals from said optical fiber, said optical transmission module
including a semiconductor optical amplifier comprising: a GaAs
substrate; a gain region formed on said GaAs substrate; and p-side
and an n-side electrodes for injecting electric current into said
gain region, said gain region comprising a semiconductor layer
selected from the group consisting of: GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb.
36. A method of fabricating an integrated semiconductor
light-emitting device, comprising: a GaAs substrate; a
surface-emission laser diode comprising an optical cavity defined
by a pair of distributed Bragg reflectors, said optical cavity
including an active layer of a material selected from any of GaNAs,
GaInNAs, GaNAsSb and GaInNAsSb; and a semiconductor optical
modulator comprising an optical absorption layer of a material
selected from any of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, said
surface-emission laser diode and said semiconductor optical
modulator being integrated on said GaAs substrate monolithically in
a direction perpendicular to said GaAs substrate, said
semiconductor optical modulator being provided in any of said
optical cavity and said pair of distributed Bragg reflectors, a
part of any of said optical cavity, said pair of distributed Bragg
reflectors and said semiconductor optical modulator including a
semiconductor layer containing Al, said method comprising the steps
of: growing a semiconductor layer containing Al by supplying an Al
source to a growth chamber; and growing a semiconductor layer
containing N by supplying a nitrogen compound source to said growth
chamber, wherein said method further comprising the step, after
said step of growing said semiconductor layer containing Al but
before said step of growing said semiconductor layer containing N,
of removing any of residual Al source, residual Al reactant,
residual Al compound, and residual Al remaining in said growth
chamber from a location of said growth chamber where there is a
chance of making a contact with said nitrogen source or an impurity
contained in said nitrogen source.
37. An integrated semiconductor light-emitting device, comprising:
a GaAs substrate; a surface-emission laser diode comprising an
optical cavity defined by upper and lower distributed Bragg
reflectors, said optical cavity including an active layer of a
material selected from any of GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb; and a semiconductor optical modulator comprising an
optical absorption layer of a material selected from any of GaNAs,
GaInNAs, GaNAsSb and GaInNAsSb, said surface-emission laser diode
and said semiconductor optical modulator being integrated on said
GaAs substrate monolithically in a direction perpendicular to said
GaAs substrate, said semiconductor optical modulator being provided
in any of said optical cavity and said upper distributed Bragg
reflector at a level above said active layer, wherein there is
provided a non-optical recombination elimination layer of a
material of a system of GaInAsP between said lower distributed
Bragg reflector and said optical cavity.
38. An integrated semiconductor light-emitting device as claimed in
claim 37, wherein a semiconductor region of said integrated
semiconductor light-emitting device located between said active
layer and said optical absorption layer is formed of GaInAsP for
the entire part thereof.
39. An integrated semiconductor light-emitting device as claimed in
claim 38, wherein said region includes an n-type semiconductor
layer.
40. An integrated semiconductor light-emitting device as claimed in
claim 37, wherein said semiconductor optical modulator is provided
inside of said upper distributed Bragg reflector such that said
optical absorption layer of said semiconductor optical modulator is
provided in a high refractive index layer having an optical
thickness of three quarter a wavelength of laser oscillation of
said surface-emission layer diode, with an offset of one quarter of
said wavelength as measured from a surface of said high refractive
index layer located at a side close to said active layer.
41. An integrated semiconductor light-emitting device as claimed in
claim 40, further comprising an additional distributed Bragg
reflector having a thickness of two periods between said optical
absorption layer and said optical cavity such that said additional
distributed Bragg reflector including two high refractive index
layers and two low refractive index layers repeated alternately,
wherein said high refractive index layer located closer to said
optical cavity as compared with another high refractive index layer
carries thereon an ohmic electrode.
42. An integrated semiconductor light-emitting device as claimed in
claim 39, further comprising a pair of selective oxidation layers
above and below a region including said optical absorption layer
and said active layer.
43. An integrated semiconductor light-emitting device, comprising:
a GaAs substrate; a surface-emission laser diode comprising an
optical cavity defined by upper and lower distributed Bragg
reflectors, said optical cavity including an active layer of a
material selected from any of GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb; and a semiconductor optical modulator comprising an
optical absorption layer of a material selected from any of GaNAs,
GaInNAs, GaNAsSb and GaInNAsSb, said surface-emission laser diode
and said semiconductor optical modulator being integrated on said
GaAs substrate monolithically in a direction perpendicular to said
GaAs substrate, said semiconductor optical modulator being provided
in any of said optical cavity and said lower distributed Bragg
reflector at a level below said active layer, wherein there is
provided a non-optical recombination elimination layer of a
material of a GaInAsP system between said lower distributed Bragg
reflector and said optical absorption layer.
44. An integrated semiconductor light-emitting device as claimed in
claim 43, wherein a semiconductor region of said integrated
semiconductor light-emitting device located between said active
layer and said optical absorption layer is formed of GaInAsP for
the entire part thereof.
45. An integrated semiconductor light-emitting device as claimed in
claim 44, wherein said region includes an n-type semiconductor
layer.
46. An integrated semiconductor light-emitting device as claimed in
claim 43, wherein said semiconductor optical modulator is provided
inside of said upper distributed Bragg reflector such that said
optical absorption layer of said semiconductor optical modulator is
provided in a high refractive index layer having an optical
thickness of three quarter a wavelength of laser oscillation of
said surface-emission layer diode, with an offset of one quarter of
said wavelength as measured from a surface of said high refractive
index layer located at a side close to said active layer.
47. An integrated semiconductor light-emitting device as claimed in
claim 46, further comprising an additional distributed Bragg
reflector having a thickness of two periods between said optical
absorption layer and said optical cavity such that said additional
distributed Bragg reflector including two high refractive index
layers and two low refractive index layers repeated alternately,
wherein said high refractive index layer located closer to said
optical cavity as compared with another high refractive index layer
carries thereon an ohmic electrode.
48. An integrated semiconductor light-emitting device as claimed in
claim 45, further comprising a pair of selective oxidation layers
above and below a region including said optical absorption layer
and said active layer.
49. An optical transmission system, comprising: an integrated
semiconductor light-emitting device, comprising: a GaAs substrate;
a surface-emission laser diode comprising an optical cavity defined
by upper and lower distributed Bragg reflectors, said optical
cavity including an active layer of a material selected from any of
GaNAs, GaInNAs, GaNAsSb and GaInNAsSb; and a semiconductor optical
modulator comprising an optical absorption layer of a material
selected from any of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, said
surface-emission laser diode and said semiconductor optical
modulator being integrated on said GaAs substrate monolithically in
a direction perpendicular to said GaAs substrate, said
semiconductor optical modulator being provided in any of said
optical cavity and said upper distributed Bragg reflector at a
level above said active layer, wherein there is provided a
non-optical recombination elimination layer of a material of a
system of GaInAsP between said lower distributed Bragg reflector
and said optical cavity; an optical fiber coupled to said
integrated semiconductor light-emitting device at an end thereof;
and an optical receiver coupled to said optical fiber at another
end thereof.
50. An optical transmission system comprising an integrated
semiconductor light-emitting device, said integrated semiconductor
light-emitting device comprising: a GaAs substrate; a
surface-emission laser diode comprising an optical cavity defined
by upper and lower distributed Bragg reflectors, said optical
cavity including an active layer of a material selected from any of
GaNAs, GaInNAs, GaNAsSb and GaInNAsSb; and a semiconductor optical
modulator comprising an optical absorption layer of a material
selected from any of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, said
surface-emission laser diode and said semiconductor optical
modulator being integrated on said GaAs substrate monolithically in
a direction perpendicular to said GaAs substrate, said
semiconductor optical modulator being provided in any of said
optical cavity and said lower distributed Bragg reflector at a
level below said active layer, wherein there is provided a
non-optical recombination elimination layer of a material of a
GaInAsP system between said lower distributed Bragg reflector and
said optical absorption layer; an optical fiber coupled to said
integrated semiconductor light-emitting device at an end thereof;
and an optical receiver coupled to said optical fiber at another
end thereof.
51. An integrated semiconductor light-emitting device, comprising:
a GaAs substrate; a surface-emission laser diode comprising an
optical cavity defined by upper and lower distributed Bragg
reflectors, said optical cavity including an active layer of a
material selected from any of GaNAs, GaNAsSb and GaInNAsSb; and a
semiconductor optical modulator comprising an optical absorption
layer of a material selected from any of GaNAs, GaInNAs, GaNAsSb
and GaInNAsSb, said surface-emission layer diode and said
semiconductor optical modulator being integrated on said GaAs
substrate monolithically in a direction perpendicular to said GaAs
substrate, said semiconductor optical modulator being provided in
any of said optical cavity and said upper distribute Bragg
reflector at a level above said active layer.
Description
BACKGROUND OF THE INVENTION
[0001] The present invention generally relates to optical
semiconductor devices. Especially, it is related to optical
semiconductor devices such as a semiconductor optical modulator, a
semiconductor light-emitting device, a semiconductor optical
amplifier, an optical source of amplitude spontaneous emission
(ASE), an optical gate array, a tunable laser apparatus, a
multi-wavelength laser apparatus, and also an optical transmission
system that uses such an optical semiconductor device. Further, the
present invention relates to the fabrication process of the optical
semiconductor devices.
[0002] Japanese Laid-Open Patent Publication 10-22805 describes a
semiconductor optical modulator that uses an InGaAsP multiple
quantum well structure. In this reference, an InP/InGaAsP multiple
quantum well structure is used as an optical modulator, and optical
modulation is achieved by causing quantum confinement Stark effect
in the multiple quantum well structure. In quantum confinement
Stark effect, there occurs a decrease of energy bandgap between the
electrons and holes forming excitons upon application of a voltage
to the quantum well layer.
[0003] Thus, when a voltage is applied to a quantum well structure
having zero optical absorption in the state that no voltage is
applied thereto, here occurs an increase of optical absorption as a
result of decreased bandgap in the quantum well layer, and there is
caused optical absorption associated with such a decrease of
bandgap. Thereby, there is formed an EA (electro absorption)-type
optical modulator.
[0004] However, conventional EA-type semiconductor optical
modulator that uses the InP/InGaAsP multiple quantum well structure
has a drawback, due to the relatively small conduction band
discontinuity between the InP barrier layer and the InGaAsP quantum
well layer, in that the excitons are tend to be destroyed due to
the leakage of electrons from the quantum well layer upon
application of the voltage to the quantum well layer, wherein this
problem becomes particularly serious when operating the EA
modulator at high temperatures. In such a case, the magnitude of
decrease of the bandgap, caused by the quantum-confinement Stark
effect is reduced and hence the magnitude of change of the optical
absorption. As a result, there arises a problem of severe
degradation of S/N ratio of optical modulation.
[0005] Meanwhile, in the art of optical telecommunication, optical
amplifiers are used extensively for compensating for the
transmission loss occurring in optical fibers or for compensating
for coupling loss of various optical components.
[0006] Conventionally, optical amplifiers of progressive wave type
are used extensively. In an optical amplifier of progressive wave
type, an optical beam incident to an end surface of the optical
amplifier is amplified as it is propagated through an optical
waveguide region in which a gain region, characterized by a gain
with respect to optical radiation having a wavelength of the
incident optical beam, is provided. Thereby, an amplified optical
beam is obtained at an opposite end surface. In the gain region,
holes injected from a p-side electrode and electrons injected from
an n-side electrode form together a population inversion, and the
incident optical beam induces stimulated emission as it is
propagated through the gain region.
[0007] In the case of using a quartz optical fiber, the wavelength
band of 1.2-1.6 .mu.m is thought as the optimum wavelength for long
distance optical telecommunication, in view of the minimum
transmission loss at this wavelength. Japanese Laid-Open Patent
Publication 9-105963 or 11-186654 describes a conventional
propagating wave type semiconductor optical amplifier constructed
on an InP substrate and having an InP cladding layer. According to
these references, optical amplification at the wavelength of 1.3
.mu.m or 1.5 .mu.m is described by using a InGaAsP quantum well
layer.
[0008] Thus, the conventional semiconductor optical amplifiers
operable in the wavelength band of 1.2-1.6 .mu.m have been
constructed by growing a material layer of the InGaAsP system on
the InP substrate. In such a system, however, there arises a
problem similar to the case of the EA-type optical modulator in
that, because of the relatively small conduction band discontinuity
between the InGaAsP layer acting as the gain region and the InP
layer acting as a carrier-blocking layer of 150-200 meV, and
further in view of the Auger non-optical recombination effect, and
the like, the electrons easily cause leakage from the gain region.
The problem of electron leakage becomes particularly serious at
high temperatures.
[0009] In the case of the InGaAsP laser diode operable at the
wavelength of 1.3 .mu.m, it should be noted that the characteristic
temperature has a value of about 80 K, while this value of
characteristic temperature is about one-half the characteristic
temperature of an AlGaAs laser diode operable at the wavelength
band of 0.85 .mu.m.
[0010] The same tendency applies also to the case of the
semiconductor optical amplifier, and thus, there is a tendency that
optical amplification causes saturation at high temperatures as a
result of the leakage of carriers from the gain region. As a result
of such a carrier leakage, it has been difficult to achieve a large
optical amplification factor in the conventional semiconductor
optical amplifiers particularly at high temperatures.
[0011] Thus, this problem has been a bottleneck when constructing a
low-cost optical LAN system that requires semiconductor optical
amplifiers without using an electronic cooling system.
SUMMARY OF THE INVENTION
[0012] Accordingly, it is a general object of the present invention
to provide a novel and useful optical semiconductor device and a
fabrication process thereof, as well as an optical transmission
system that uses such an optical semiconductor device wherein the
foregoing problems are eliminated.
[0013] Another and more specific object of the present invention is
to provide a semiconductor optical device, such as an EA-type
semiconductor optical modulator, a semiconductor light-emitting
device, a tunable laser apparatus, a multi-wavelength laser
apparatus, or an optical transmission system capable of maintaining
a high S/N ratio at high temperatures and is capable of performing
a high-speed modulation of 10 GHz or more.
[0014] Another object of the present invention is to provide an
integrated semiconductor light-emitting device in which a
surface-emission laser diode and a semiconductor optical modulator
are integrated.
[0015] Another object of the present invention is to provide an
integrated semiconductor light-emitting device in which a
surface-emission laser diode and a semiconductor optical modulator
are integrated monolithically.
[0016] Another object of the present invention is to provide an
integrated semiconductor light-emitting device in which a
surface-emission laser diode having a N-containing active layer and
a semiconductor optical modulator having a N-containing optical
absorption layer are integrated monolithically.
[0017] Another object of the present invention is to provide a
semiconductor optical amplifier operable in the wavelength band of
1.2-1.6 .mu.m and is substantially free form change of optical
amplification factor with environmental temperature.
[0018] Further, the present invention provides an optical source
for ASE that uses such a semiconductor optical amplifier.
Furthermore, the present invention provides an optical gate array,
a tunable laser apparatus, a multi-wavelength laser apparatus, and
also an optical transmission system that uses such an optical
semiconductor device.
[0019] Other objects and further features of the present invention
will become apparent from the following detailed description when
read in conjunction with the attached drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0020] FIGS. 1A and 1B show the construction of an optical
modulator according to an embodiment of the present invention;
[0021] FIG. 2 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention;
[0022] FIGS. 3A and 3B are diagrams showing the construction of a
semiconductor light-emitting device according to another embodiment
of the present invention;
[0023] FIGS. 4A and 4B are diagrams showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention;
[0024] FIG. 5 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention;
[0025] FIG. 6 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention;
[0026] FIG. 7 is a diagram showing the relationship between a
threshold current and an optical loss obtained for an edge-emission
type laser diode having an active layer of GaInNAs;
[0027] FIGS. 8A and 8B are diagrams showing the construction of an
optical amplifier according to another embodiment of the present
invention;
[0028] FIG. 9 is a diagram showing the construction of an optical
modulator according to another embodiment of the present
invention;
[0029] FIG. 10 is a diagram showing the construction of a tunable
laser apparatus according to another embodiment of the present
invention;
[0030] FIG. 11 is a diagram showing the construction of an ASE
optical radiation source used in the tunable laser apparatus of
FIG. 10;
[0031] FIG. 12 is a diagram showing the construction of an optical
transmission system according to an embodiment of the present
invention;
[0032] FIG. 13 is a diagram showing the construction of a
multi-wavelength laser apparatus used in the optical transmission
system of FIG. 12;
[0033] FIG. 14 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of is the present invention;
[0034] FIG. 15 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention;
[0035] FIG. 16 is a diagram showing the relationship between the
resistivity of the distributed Bragg reflector and the thickness of
a compositional gradation layer;
[0036] FIG. 17 is a diagram showing the relationship between the
resistivity change rate of the distributed Bragg reflector and the
thickness of a compositional gradation layer;
[0037] FIG. 18 is a diagram showing the construction of a test
specimen used in the present invention;
[0038] FIG. 19 is a diagram showing the depth profile of nitrogen
and oxygen in the specimen of FIG. 18;
[0039] FIG. 20 is a diagram showing the depth profile of Al in the
specimen of FIG. 18;
[0040] FIG. 21 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention;
[0041] FIG. 22 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention;
[0042] FIG. 23 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention;
[0043] FIG. 24 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention;
[0044] FIG. 25 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention;
[0045] FIG. 26 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention in an enlarged scale;
[0046] FIG. 27 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention in an enlarged scale;
[0047] FIG. 28 is a diagram showing the construction of an
integrated semiconductor light-emitting device according to another
embodiment of the present invention.
DETAILED DESCRIPTION OF THE INVENTION
[First Mode of Invention]
[0048] In a first mode, the present invention provides an EA-type
semiconductor optical modulator having an optical absorption layer
of multiple quantum well structure and p-side and n-side electrodes
applying an electric field to said optical absorption layer,
wherein the multiple quantum well structure includes a quantum well
layer of a material selected from the group consisting of: GaNAs,
GaInNAs, GaNAsSb and GaInNAsSb and a barrier layer of a material
selected from the group consisting of: GaAs, GaInP and GaInAsP.
[0049] In the mixed crystal of a III-V material containing As and N
as the group V element, such as GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb, it is known that a large band discontinuity is achieved
for the conduction band as compared with the valence band when the
III-V mixed crystal is used to form a heterojunction with any of
GaAs, GaInAsP or GaInP.
[0050] Further, in the present invention, it is possible to
construct the semiconductor optical amplifier on a GaAs substrate,
and thus, it becomes possible to use a widegap material such as
GaInAsP or GaInP for the barrier layer. In the case of using a
conventional InP substrate, InAlAs has been used as the material of
the barrier layer that provides the largest bandgap and providing
lattice matching with the InP substrate. According to the present
invention, therefore, it is possible to improve the confinement of
electrons into the quantum well layer as compared with the
conventional device, and the problem of dissociation of excitons is
effectively suppressed even when the semiconductor optical
modulator is operated in a high temperature environment.
[0051] Because of the improved carrier confinement in the quantum
well layer, a large change of bandgap is secured as a result of the
quantum confinement Stark effect even when the optical modulator is
operated under a high temperature environment. Thus, there occurs
no decrease of S/N ratio at high temperatures in the semiconductor
optical modulator of the present embodiment.
[0052] In the conventional semiconductor optical modulator
constructed on an InP substrate, the large band discontinuity
appearing at the valence band provides excessively strong
confinement of holes and the holes having a large effective mass
are tend to be accumulated in the quantum well layer. When this
occurs there is caused degradation of the modulation
performance.
[0053] In the case of using a mixed crystal such as GaNAs, GaInNAs,
GaNAsSb, GaInNAsSb, and the like, that contains As and N as the
group V element, it is known that there occurs a shift of valence
band edge in the downward direction with increase of N content.
Thus, in the case a heterojunction is formed with a barrier layer
such as GaAs, GaInAsP or GaInP, it is possible to suppress the
unwanted increase of the valence band discontinuity. Thereby, the
problem of accumulation of holes in the quantum well layer is
eliminated and high-speed modulation of 10 GHz or more becomes
possible.
[0054] Meanwhile, it is known that N and Al are chemically reactive
and there tends to occur segregation of N at the interface between
the quantum well layer and the barrier layer in the case a quantum
well layer containing N as a constituent element and a barrier
layer containing Al as a constituent element are grown in direct
contact with each other. Thus, the present invention avoids such a
problem of N segregation by employing Al-free material such as
GaAs, GaInAsP or GaInP for the barrier layer. Thereby, a high
crystal quality is guaranteed for the active layer.
[0055] It should be noted that the barrier layer of GaAs, GaInAsP
or GaInP may further contain other III-V element such as B, N or
Sb.
Embodiment 1
[0056] FIGS. 1A and 1B show the construction of a semiconductor
optical modulator according to Embodiment 1 of the present
invention, wherein FIG. 1A shows the semiconductor optical
modulator in a front end view while FIG. 1B shows the semiconductor
optical modulator in a longitudinal cross-sectional view.
[0057] Referring to FIGS. 1A and 1B, the semiconductor optical
modulator is constructed on an n-type GaAs substrate 101 and
includes a lower cladding layer 102 of n-type AlGaAs having a
composition of Al.sub.0.4Ga.sub.0.6As and grown epitaxially on the
substrate 101, a lower optical waveguide layer 103 of GaAs grown
epitaxially on the cladding layer 102 and a multiple quantum well
structure 301 grown epitaxially on the lower optical waveguide
layer 103.
[0058] On the multiple quantum well structure 301, an upper optical
waveguide layer 105 of GaAs is grown epitaxially, and a first upper
cladding layer 302 of p-type AlGaAs having a composition
represented as Al.sub.0.4Ga.sub.0.6As, a p-type AlAs
selective-oxidation layer 303, a second cladding layer 304 of
p-type AlGaAs having a composition represented as
Al.sub.0.4Ga.sub.0.6As, and a cap layer 305 of p-type GaAs are
grown consecutively and epitaxially.
[0059] In the structure of FIGS. 1A and 1B, the multiple quantum
well layer 301 is formed of alternate stacking of a quantum well
layer of GaInNAs and a barrier layer of GaInP repeated three
times.
[0060] As represented in the front end view of FIG. 1A, there is
formed a mesa stripe structure in the optical modulator of FIGS. 1A
and 1B such that the mesa stripe structure extends in an axial
direction of the optical modulator from an incident end surface T1
to an output end surface T2 of the optical modulator. As can be
seen in the cross-sectional diagram of FIG. 1A, the mesa extends in
the downward direction from the cap layer 109 until it reaches an
intermediate position of the lower cladding layer 102, and thus,
the mesa stripe structure forms a ridge waveguide structure.
Further, there are formed a pair of oxide regions 304 of AlO.sub.x
in the AlAs selective oxidation layer 303 by a selective oxidation
process applied to the exposed lateral surface of the AlAs layer
303, such that the AlOx regions 304 sandwich the AlAs layer 303
therebetween.
[0061] On the p-type GaAs cap layer 109, there is provided a p-side
electrode 110, and an n-side electrode 111 is provided on a bottom
surface of the n-type GaAs substrate 101. Further, anti-reflection
coatings 112 and 113 having reflectance of 0.2% or less are
provided respectively on the end surfaces T1 and T2 that are formed
by a cleaving process.
[0062] In the semiconductor optical modulator, the laser beam
incident to the end surface T1 experiences a modulation of optical
intensity as it is guided through the optical waveguide including
the multiple quantum well structure 301 that changes optical
absorption coefficient upon the wavelength of the incident optical
beam. The optical beam thus modulated exits from the opposing end
surface T2.
[0063] In the vertical direction, it can be seen that the
semiconductor optical modulator has an SCH structure characterized
by the GaAs optical waveguide layers 103 and 105 vertically
confined by the less-refractive cladding layers 102, 302 and 108.
In the lateral direction, there occurs optical confinement into the
ridge waveguide formed by the mesa etching process.
[0064] When a reverse bias voltage is applied to the multilayer
quantum well structure 301 in such a semiconductor optical
modulator, there occurs a decrease of energy bandgap in the
multiple quantum well structure 301 as a result of the quantum
confinement Stark effect, and the multiple quantum well structure,
transparent to the incident optical beam in the state no bias
voltage is applied thereto, starts to absorb the optical beam upon
application of the bias voltage. Thus, the optical semiconductor
device of FIGS. 1A and 1B function as an EA-type optical
modulator.
[0065] By providing the anti-reflection coatings 112 and 113 on the
end surfaces T1 and T2 in the semiconductor optical modulator of
FIGS. 1A and 1B, the reflection loss of the optical beam when
entering the device and when exiting from the device is
successfully minimized. Further, by providing the AlOx regions 304
by the selective oxidation process of the AlAs layer 303, the
current path in the semiconductor optical modulator is confined
away from the mesa walls particularly in the vicinity of the
multiple quantum wall structure 301, and it becomes possible to
suppress the surface leakage current at the exposed lateral surface
of the multiple quantum well structure 301.
[0066] It should be noted that the EA-type semiconductor optical
modulator of FIGS. 1A and 1B use the GaInNAs quantum well layer on
the GaAs substrate 101 as the optical absorption layer. Thus, the
semiconductor optical modulator is suitable for operation in the
wavelength ban d of 1.3-1.55 .mu.m used commonly in optical fiber
telecommunication system.
[0067] It should be noted that the GaInNAs film constituting the
quantum well layer in the multiple quantum well structure 301 can
be grown on the GaAs substrate 101 in the form of single-crystal
film.
[0068] Thus, it is possible to use a GaInP layer for the barrier
layer, and the degree of electron confinement into the GaInNAs
quantum well layer is improved. As a result, dissociation of
excitons in the quantum well layer is suppressed successfully even
when the semiconductor optical modulator is operated at high
temperatures, and a large quantum confinement Stark effect is
guaranteed. Thereby, the problem of degradation of the S/N ratio is
successfully avoided.
[0069] In the case of using a mixed crystal such as GaNAs, GaInNAs,
GaNAsSb, GaInNAsSb, and the like, that contains As and N as the
group V element for the quantum well layer in the multiple quantum
well structure 301, there occurs a shift of valence band edge in
the downward direction with increase of the N content. Thus, in the
case a heterojunction is formed with a barrier layer such as GaAs,
GaInAsP or GaInP in the multiple quantum well structure 301, it is
possible to suppress the unwanted increase of the valence band
discontinuity. Thereby, the problem of accumulation of holes in the
quantum well layer is eliminated and high-speed modulation of 10-50
GHz becomes possible.
[0070] It is known that N and Al are chemically reactive and there
tends to occur segregation of N at the interface between the
quantum well layer and the barrier layer in the multiple quantum
well structure 301 in the case the quantum well layer containing N
as a constituent element and the barrier layer containing Al as a
constituent element are grown in direct contact with each other.
Thus, the present invention avoids the problem of N segregation by
employing Al-free material such as GaInP for the barrier layer.
Thereby, a high crystal quality is guaranteed for the active layer.
It should be noted that the barrier layer of GaAs or GaInAsP may be
used in addition to GaInP. Further, it is possible to use GaNAs,
GaInNAs, GaNAsSb, GaInNAsSb for the quantum well layer in addition
to GaInNAs.
[0071] FIGS. 1A and 1B show the semiconductor optical modulator as
a discrete device. However, it is also possible to form a number of
such semiconductor optical modulators on a common substrate in the
form of monolithic array, by forming a number of ridge stripe
structures.
[0072] Further, it is possible to construct a planar EA-optical
modulator that emits an optical beam in the direction perpendicular
to the substrate by using the foregoing multilayer quantum well
structure 301.
[Second Mode of Invention]
[0073] In a second mode, the present invention provides an EA-type
semiconductor optical modulator including an optical absorption
layer of multiple quantum well structure and p-type and n-type
electrodes for applying an electric field to the multiple quantum
well structure, wherein the multiple quantum well structure
comprises a quantum well layer, a barrier layer, and an
intermediate layer disposed between said quantum well layer and
said barrier layer, said quantum well layer being formed of a
material selected from the group consisting of: GaNAs, GaInNAs,
GaNAsSb and GaInNAsSb; said barrier layer being formed of a
material selected from the group consisting of: AlaGa1-aAs
(0<a.ltoreq.1) (AlbGa1-b)InP (0<b.ltoreq.1) (AlcGa1-c)InAsP
(0<c.ltoreq.1), said intermediate layer comprising a material
selected, from the group consisting of: GaAs, GaInP and
GaInAsP.
[0074] According to the second embodiment of the present invention,
the material such as AlaGa1-aAs (0<a.ltoreq.1), (AlbGa1-b)InP
(0<b.ltoreq.1) or (AlcGa1-c)InAsP (0<c.ltoreq.1) is used for
the barrier layer, wherein it should be noted that the foregoing
materials have a bandgap larger than that of GaAs, GaInAs or GaInP.
Thus, by using these materials for the barrier layer, it becomes
possible to increase the degree of electron confinement into the
quantum well layer, and the semiconductor optical modulator can
operate stably even under an elevated temperature environment.
[0075] In the present embodiment, it should be noted that a
material containing Al is used for the barrier layer. In this case,
however, the barrier layer is separated from the quantum well layer
by the intermediate layer of GaAs, GaInAsP or GaInP, which is free
from N and Al. By providing such an intermediate layer, the problem
of segregation of N at the interface between the barrier layer and
the quantum well layer is effectively suppressed, and high quality
quantum well structure is formed.
[0076] It is noted that Japanese Laid-Open Patent Publication
2000-89180 describes a quantum well modulator that uses a quantum
well layer of GaInNAs and a barrier layer of widegap II-VI material
such as ZnCdS or ZnMgSSe. Contrary to this prior art, the present
invention forms the barrier layer by a III-V material, which
belongs to the same family as the material constituting the quantum
well layer. Thus, the problem of mutual diffusion of elements at
the interface between the quantum well layer and the barrier layer
is effectively suppressed and excellent interface is
guaranteed.
[0077] Further, it should be noted that the intermediate layer
formed of any of GaAs, GaInP and GaInAsP may contain B and Sb. What
is important with the intermediate layer is that it should not
contain N and Al.
[Third Mode of Invention]
[0078] In a third mode, the present invention provides an
integrated semiconductor light-emitting device in which a
semiconductor optical modulator as noted in any of the first and
second mode of the invention is integrated on a common GaAs
substrate (GaAs single crystal substrate) with a laser diode having
an active layer of any of GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb.
[0079] It should be noted that the laser diode having the active
layer of any of GaNAs, GaInNAs, GaNAsSb, GaInNAsSb can be
constructed on a GaAs substrate so as to oscillate at the
wavelength band of 1.2-1.6 .mu.m. It is already verified that the
laser diode having such a construction has excellent temperature
performance as being characterized by the characteristic
temperature of 150-200 K.
[0080] It should be noted that the semiconductor optical modulator
of the first and second modes of the invention can also be formed
on the GaAs substrate, and thus, it becomes possible to modulate
the laser diode with a speed of 10 GHz or more, which substantially
exceeds the direct modulation speed of the laser diode.
[0081] Thus, by constructing an integrated semiconductor
light-emitting device such that a laser diode having an active
layer formed of any of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, is
integrated with a semiconductor optical modulator of any of the
First and Second Embodiments on a common GaAs substrate, it is
possible to construct a laser diode device having a large
characteristic temperature and operable in the wavelength band of
1.2-1.6 .mu.m with a high modulation speed of 10 GHz or more.
[Fourth Mode of Invention]
[0082] In a fourth mode, the present invention provides an
integrated semiconductor light-emitting device in which a
semiconductor optical modulator as noted in any of the first and
second modes is monolithically integrated on a common GaAs
substrate (GaAs single crystal substrate) with a laser diode having
an active layer of any of GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb.
[0083] It should be noted that the laser diode having the active
layer of any of GaNAs, GaInNAs, GaNAsSb, GaInNAsSb can be
constructed on a GaAs substrate so as to oscillate at the
wavelength band of 1.2-1.6 .mu.m. It is already verified that the
laser diode having such a construction has excellent temperature
performance as being characterized by the characteristic
temperature of 150-200 K.
[0084] It should be noted that the semiconductor optical modulator
of the first and second modes of invention can also be formed on
the GaAs substrate, and thus, it becomes possible to modulate the
laser diode with a speed of 10 GHz or more, which substantially
exceeds the direct modulation speed of the laser diode.
[0085] Thus, by constructing the integrated semiconductor
light-emitting device such that a laser diode having an active
layer formed of any of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, is
integrated monolithically with a semiconductor optical modulator of
any of the first and second mode of the invention on a common GaAs
substrate, it is possible to construct a laser diode device having
a large characteristic temperature and operable in the wavelength
band of 1.2-1.6 .mu.m with a high modulation speed of 10 GHz or
more.
Embodiment 2
[0086] FIG. 2 shows the construction of an integrated semiconductor
light-emitting device according to Embodiment 2 of the present
invention.
[0087] Referring to FIG. 2, the integrated semiconductor
light-emitting device is a laser diode device having an integral
optical modulator, and includes a laser diode part A that produces
a laser beam and an EA-type semiconductor optical modulator B that
modulates the intensity of the optical beam produced by the laser
diode part A, such that the laser diode part A and the
semiconductor optical modulator B are integrated on the n-type GaAs
substrate 101 commonly and monolithically.
[0088] Here, it should be noted that the laser diode part A
includes the n-type AlGaAs layer 102 having the composition of
Al.sub.0.4Ga.sub.0.6As as a cladding layer, the GaAs layer 103 as a
lower optical waveguide layer, and a multiple quantum well
structure 401 is formed on the lower optical waveguide layer 103.
Further, a diffraction grating layer 402 and a p-type cladding
layer 404 of AlGaAs having the composition of
Al.sub.0.4Ga.sub.0.6As are formed consecutively on the multiple
quantum well structure 401. Further, the GaAs layer 103 is provided
on the cladding layer 104 as a cap layer. In the present example,
the multiple quantum well structure 401 is formed of an alternate
repetition of a quantum well of GaInNAs and a barrier layer of
GaAs.
[0089] On the other hand, the EA-type semiconductor optical
modulator B includes the foregoing cladding layer 102 of n-type
Al.sub.0.4Ga.sub.0.6As, the lower optical waveguide layer 103 of
GaAs and the multiple quantum well structure 401 on the n-type GaAs
layer 103, wherein an upper optical waveguide layer 403 of GaAsP is
formed on the multiple quantum well structure 401 and a p-type
cladding layer 404 of AlGaAs having the composition of
Al.sub.0.4Ga.sub.0.6As is formed on the upper optical waveguide
layer 403. Further, the p-type GaAs layer 109 is formed on the
cladding layer 404 as a cap layer. It should be noted that the
upper optical waveguide layer 403 of GaAsP has a lattice constant
smaller than that of GaAs and accumulates a tensile strain of about
0.5%.
[0090] At the region between the laser diode part A and the EA-type
semiconductor optical modulator, there is provided a
high-resistance region 405 doped with proton such that the
high-resistance region 405 extends up to the n-type cladding layer
102. By providing the high-resistance region 405, the laser diode
part A and the EA-type semiconductor optical modulator B are
electrically separated from each other.
[0091] Further, there is provided a p-side electrode 406 on the
p-type GaAs cap layer 109 in the laser diode part A, while a p-type
electrode 407 is provided on the p-type GaAs cap layer 109 in the
EA-type semiconductor optical modulator B. Further, the electrode
111 is provided on the bottom surface of the n-type GaAs substrate
101 as a common electrode.
[0092] The device of FIG. 2 is cleaved at the both end surfaces and
the end surfaces thus formed are covered with the anti-reflection
coatings 112 and 113 having a reflectance of 0.2% or less,
similarly to the device of FIG. 1B.
[0093] In the integral optical semiconductor device of FIG. 2,
carrier injection is made into the multiple quantum well active
layer 401 by applying a forward bias across the p-side electrode
406 and the n-side electrode 111, and in response thereto, there
occurs recombination of carriers in the GaInNAs quantum well layer.
As a result, optical radiation having a wavelength of the 1.3 .mu.m
band corresponding to the bandgap energy of the GaInNAs quantum
well layer is produced. The optical radiation thus produced in the
multiple quantum well active layer 401 is amplified as it is guided
back and forth through the optical waveguide including the GaAsP
diffraction grating layer 402 and there occurs a laser oscillation
at the wavelength that satisfies the Bragg condition.
[0094] The laser beam thus formed in the laser diode part A is then
guided through the GaAs lower optical waveguide layer 103 and the
GaAsP diffraction grating layer 402 and enters into the EA-type
semiconductor optical modulator B, wherein it should be noted that
the bandgap wavelength of the multiple quantum well structure 401
in the semiconductor optical modulator B is shifted in the shorter
wavelength side as a result of the tensile strain caused in the
multiple quantum well structure 401 by the adjacent GaAsP upper
optical waveguide layer 403. In the laser diode part A, it should
be noted that this tensile strain is relaxed due to the formation
of minute projections and depressions of the diffraction grating
formed in the GaAsP layer 402. Thus, the multiple quantum well
structure 401 of the laser diode part A is not affected with the
strain of the GaAsP layer 402 with regard to the bandgap
energy.
[0095] Thus, in the EA-type semiconductor optical modulator B, the
bandgap of the multiple quantum well structure 401 is set larger
than the bandgap of the multiple quantum well structure 401 of the
laser diode part A by about several ten millielectron volts (meV),
and the multiple quantum well structure 401 of the EA-type
semiconductor optical modulator B is transparent with regard to the
laser beam produced by the laser diode part A in the state that no
bias voltage is applied across the p-side electrode 407 and the
n-side electrode 411.
[0096] Upon application of a reverse bias voltage across the p-side
electrode 407 and the n-side electrode 111, on the other hand, the
foregoing bandgap of the multiple quantum well structure 401 is
reduced as a result of the quantum confinement Stark effect, and
there occurs absorption of the laser beam produced by the laser
diode part A. Thus, it becomes possible to conduct a modulation of
laser beam intensity by causing on and off of the bias voltage
applied across the p-side electrode 407 and the n-side electrode
111.
[0097] It should be noted that the anti-reflection coatings 112 and
113 on the edge surfaces function to suppress the laser diode to
oscillate in the Fabri-Perot mode.
[0098] As the laser diode part A of the integrated device of FIG. 2
uses a GaInNAs quantum well layer tuned to the wavelength of 1.3
.mu.m band for the active layer, it is possible to use AlGaAs
having the composition of Al.sub.04Ga.sub.0.6As, a typical widegap
material, for the cladding layer. Thus, it becomes possible to
secure a large barrier height between the active layer and the
cladding layer for confining the electrons, and it becomes possible
to suppress the electron overflow from the quantum well layer to
the cladding layer. With this, the characteristic temperature of
the laser diode part A is increased to 150 K or more and the
threshold current of the laser diode is suppressed effectively even
when the integrated semiconductor light-emitting device is operated
in an elevated temperature environment.
[0099] In the EA-type semiconductor optical modulator B, it should
be noted that GaInNAs is used for the quantum well layer and GaAs
is used for the barrier layer in the multiple quantum well
structure 401. It is known that a large band discontinuity is
secured when a GaInNAs layer is used to form a heterojunction
together with a GaAs layer. Thus, the laser diode part A in the
integrated semiconductor light-emitting device of the present
example has an improved degree of electron confinement in the
GaInNAs quantum well layer as compared with the case of using a
conventional InP/InGaAsP quantum well structure, and the problem of
dissociation of excitons at high temperatures is successfully
eliminated. In other words, the semiconductor optical modulator B
of the present example can provide a large bandgap change caused by
the quantum confinement Stark effect even when the integrated
semiconductor light-emitting device is operated in a high
temperature environment, and an high S/N ratio is guaranteed.
[0100] Thus, the present example provides an ideal integrated
laser-diode/optical-modulator semiconductor device.
[0101] In the case of applying electric field to the semiconductor
optical modulator, it is possible to achieve the optical modulation
with a frequency much higher than the frequency possible when
modulating a laser diode directly by way of modulating the current
injection. Thus, by integrating the EA-type semiconductor optical
modulator with the laser diode as set forth in FIG. 2, it becomes
possible to modulate the laser beam with a frequency of 10-50 GHz,
which is much higher than the frequency possible when modulating a
laser diode directly by way of modulating the current injection.
Further, the integrated device of FIG. 2 has an advantageous
feature of compact size as a result of monolithic integration of
the laser diode and semiconductor optical modulator on the same
substrate.
[Fifth Mode of Invention]
[0102] In a fifth mode, the present invention provides an
integrated semiconductor light-emitting device in which a laser
diode and a semiconductor optical modulator are integrated, in the
form of a surface-emission type device.
[0103] When conducting the modulation of a laser beam by using an
optical modulator rather than modulating the laser diode directly,
the laser diode has to be driven continuously. Thus, in such a
construction, it is important to reduce the threshold current of
laser oscillation for suppressing the power consumption and heat
generation. In the present embodiment, it is possible to reduce the
threshold current of laser oscillation to 5 mA or less by using a
surface-emission laser diode.
[0104] The surface-emission laser diode used in the present
embodiment includes an active layer formed on a GaAs substrate
wherein the active layer is formed of any of the material such as
GaNAs, GaInNAs, GaNAsSb and GaInNAsSb. Thus, it is possible to use
the material system of GaAs/AlGaAs for the distributed Bragg
reflector, such that GaAs is used for the high refractive index
layer and AlAs or AlGaAs is used for the low refractive index layer
of the distributed Bragg reflector. In the distributed Bragg
reflector, the high refractive index layer and the low refractive
index layer are repeated alternately. In the case of using a
conventional system of InP/InGaAsP for the distributed Bragg
reflector, it is necessary to use the quaternary mixed crystal of
InGaAsP for the high refractive index layer and the thermal
resistance of the distributed Bragg reflector is increased
inevitably.
[0105] In addition, the conventional distributed Bragg reflector
based on the InP/InGaAsP system has a drawback, due to the small
refractive index difference between the low refractive index layer
and the high refractive index layer, in that a large number of
repetitions is necessary for achieving necessary high reflectance.
Contrary to the conventional distributed Bragg reflector, the
present invention has an advantageous feature, due to the large
refractive index difference between the high refractive index layer
and the low refractive index layer, in that a high reflectance is
achieved with reduced number of repetition in the distributed Bragg
reflector. Thereby, the Bragg reflector of the present embodiment
is advantageous for efficient heat dissipation, and the integrated
semiconductor light-emitting device of the present embodiment
operates stably in an elevated temperature environment.
Embodiment 3
[0106] FIGS. 3A and 3B show another construction of the integrated
semiconductor light-emitting device according to Embodiment 3 of
the present invention, wherein FIG. 3A shows the device in a plan
view while FIG. 3B shows the device in a longitudinal
cross-sectional view.
[0107] Referring to FIGS. 3A and 3B, the integrated semiconductor
light-emitting device is constructed on a Si substrate 1001 and
includes a vertical-cavity surface-emission laser diode 1002 formed
on the Si substrate 1001, wherein there are provided four such
laser diodes 1002 on the substrate 1001 in the form of an array.
Further, the Si substrate 1001 carries thereon an optical waveguide
1004 having a 45.degree. mirror 1003 at an end thereof, and an
EA-type semiconductor optical modulator 1005 is provided further on
the Si substrate 1001 in optical coupling with the other end of the
optical waveguide 1004. The EA-type semiconductor optical modulator
1005 includes four channels, and optical fibers 1006 are coupled to
respective channels of the semiconductor optical modulator 1005. In
each channel, the EA-type semiconductor optical modulator 1005 has
a structure explained already with reference to FIG. 1.
[0108] It should be noted that each of the surface-emission laser
diodes in the array includes a GaAs substrate carrying thereon a
lower distributed Bragg reflector of the GaAs/AlGaAs structure, and
an active layer of GaInNAs is formed on the lower distributed Bragg
reflector. Further, an upper distributed Bragg reflector of the
GaAs/AlGaAs structure is formed on the active layer and there is
formed a vertical cavity between the upper and lower distributed
Bragg reflectors. The laser diode oscillates at the wavelength of
1.3 .mu.m band.
[0109] Referring to FIG. 3B, the laser beam emitted in the upward
direction from the surface-emission laser diode 1002 is deflected
by the mirror 1003 by an angle of 45.degree. and impinges into the
optical waveguide 1004. The laser beam thus entered into the
optical waveguide 1004 is guided to the semiconductor optical
modulator 1005. It should be noted that each channel in the optical
modulator 1005 corresponds to one of the laser diodes 1002.
[0110] The laser beam thus entered into the semiconductor optical
modulator 1005 undergoes optical modulation. After modulation, the
laser beam is injected into corresponding one of the optical fibers
1006.
[0111] In the integrated semiconductor light-emitting device of
FIGS. 3A and 3B, it is possible to transmit the optical signals
with a bit rate of 40 Gbps in the maximum by using all the four
channels and by modulating the optical signal at the frequency of
10 GHz by using the semiconductor optical modulator 1005.
[0112] In the construction of FIGS. 3A and 3B, it should be noted
that the surface-emission laser diode 1002 has a construction of
including the active layer of GaInNAs on the GaAs substrate. Thus,
in this laser diode, it is possible to use a distributed Bragg
reflector constructed by alternately stacking a GaAs high
refractive index layer and an AlGaAs low refractive index
layer.
[0113] In the case of using a conventional system of InP/InGaAsP
for the distributed Bragg reflector, it has been necessary to use
the quaternary mixed crystal of InGaAsP for the high refractive
index layer and the thermal resistance of the distributed Bragg
reflector has increased inevitably.
[0114] In addition, the conventional distributed Bragg reflector
based on the InP/InGaAsP system has a drawback, due to the small
refractive index difference between the low refractive index layer
and the high refractive index layer, in that a large number of
repetitions is necessary for achieving necessary high reflectance.
Contrary to the conventional distributed Bragg reflector, the
present invention has an advantageous feature, due to the large
refractive index difference between the high refractive index layer
and the low refractive index layer, in that a high reflectance is
achieved with reduced number of repetition in the distributed Bragg
reflector. Thereby, the Bragg reflector of the present embodiment
is advantageous for efficient heat dissipation, and the integrated
semiconductor light-emitting device of the present embodiment
operates stably in an elevated temperature environment.
[0115] When conducting the modulation of a laser beam by using an
optical modulator rather than modulating the laser diode directly,
the laser diode has to be driven continuously. Thus, in such a
construction, it is important to reduce the threshold current of
laser oscillation for suppressing the power consumption and heat
generation. In the present embodiment, it is possible to reduce the
threshold current of laser oscillation to 5 mA or less by using a
surface-emission laser diode.
[0116] By constructing the multiple quantum well structure forming
the optical absorption layer of the EA-type semiconductor optical
modulator 1005 by using a GaInNAs layer for the quantum well layer
and an AlGaAs layer having a composition of Al.sub.0.2Ga.sub.0.8As
for the barrier layer, it is possible to increase the degree of
electron confinement into the GaInNAs quantum well layer. Thereby,
the dissociation of excitons is suppressed effectively also when
the device is operated in an elevated temperature environment and
the degradation of S/N ratio is avoided successfully.
[0117] Thus, in the construction of FIGS. 3A and 3B, it becomes
possible to realize an integrated semiconductor light-emitting
device operable stably at the wavelength band of 1.3 .mu.m even in
elevated temperature environment such that the optical
semiconductor device is capable of being driven at a high speed of
10 GHz or more, by integrating a surface-emission laser diode
having an active layer of GaInNAs and an EA-type semiconductor
optical modulator having an absorption layer of GaInNAs quantum
well layer commonly on the Si substrate 1001.
[Sixth Mode of Invention]
[0118] In a sixth mode of the present invention, it is possible to
construct a monolithic integrated semiconductor light-emitting
device by using a surface-emission laser diode for the laser diode
such that the surface-emission laser diode and the EA-mode
semiconductor optical device are stacked in a direction
perpendicular to the plane of the semiconductor layers.
[0119] In this case, the laser diode emits the laser beam in the
direction perpendicular to the principal surface of the GaAs single
crystal substrate and there is no need of forming the optical
input/output surfaces by a cleaving process. Such a
surface-emission laser diode can be integrated on the GaAs single
crystal substrate with high density in the form of two-dimensional
array.
[0120] As the laser diode is thus formed on a GaAs single crystal
substrate, the laser diode can use a distributed Bragg reflector in
which the high refractive index layer of GaAs and the
low-refractive index layer of AlGaAs or AlAs are stacked
alternately.
[0121] In the case of using a conventional system of InP/InGaAsP
for the distributed Bragg reflector, it has been necessary to use
the quaternary mixed crystal of InGaAsP for the high refractive
index layer and the thermal resistance of the distributed Bragg
reflector has increased inevitably.
[0122] In addition, the conventional distributed Bragg reflector
based on the InP/InGaAsP system has a drawback, due to the small
refractive index difference between the low refractive index layer
and the high refractive index layer, in that a large number of
repetitions is necessary for achieving necessary high reflectance.
Contrary to the conventional distributed Bragg reflector, the
present invention has an advantageous feature, due to the large
refractive index difference between the high refractive index layer
and the low refractive index layer, in that a high reflectance is
achieved with reduced number of repetition in the distributed Bragg
reflector. Thereby, the Bragg reflector of the present embodiment
is advantageous for efficient heat dissipation, and the integrated
semiconductor light-emitting device of the present embodiment
operates stably in an elevated temperature environment.
Embodiment 4
[0123] FIG. 4A shows the construction of an integrated
semiconductor light-emitting device according to Embodiment 4 of
the present invention.
[0124] Referring to FIG. 4A, the integrated semiconductor
light-emitting device is based on a surface-emission laser diode
and includes a semiconductor optical modulator integrated on the
surface-emission laser diode such that the semiconductor optical
modulator is formed inside the p-side distributed Bragg reflector
of the surface-emission laser diode.
[0125] More specifically, the integrated semiconductor
light-emitting device is constructed on the n-type GaAs substrate
101 and includes a distributed Bragg reflector 201 of n-type
GaAs/Al.sub.0.8Ga.sub.0.2As structure formed on the substrate 101,
wherein there is provided a lower spacer layer 202 on the
distributed Bragg reflector 201 and a multiple quantum well active
layer 203 having the GaInNAs/GaAs structure is formed on the lower
spacer layer 202. On the multiple quantum well layer 203, there is
formed a carrier blocking layer 204 of p-type AlGaAs having a
composition of Al.sub.0.2Ga.sub.0.8As, and a p-type GaAs upper
spacer layer 205 is grown on the carrier blocking layer 204.
[0126] Further, a selective-oxidation layer 501 of p-type AlAs is
grown on the upper spacer layer 205 and a first p-type distributed
Bragg reflector 502 having the GaAs/Al.sub.0.8Ga.sub.0.2As stacked
structure is formed on the selective-oxidation layer 501.
[0127] On the first p-type distributed Bragg reflector 502, there
is formed an insulation layer 503 of AlO.sub.x, and a contact layer
504 of n-type GaAs constituting a part of the EA-type semiconductor
optical modulator B is formed on the insulation layer 503. Further,
a cladding layer 505 of n-type AlGaAs having the composition of
Al.sub.0.4Ga.sub.0.6As, a multiple quantum well structure 506 and a
contact layer 507 of p-type AlGaAs having the composition of
Al.sub.0.4Ga.sub.0.6As are formed consecutively on the contact
layer 504. Here, it should be noted that the AlOx insulation layer
503 provides an electrical insulation between the surface-emission
laser diode and the AE-type semiconductor optical modulator B.
[0128] FIG. 4B shows the construction of the multiple quantum well
structure 506.
[0129] Referring to FIG. 4B, the multiple quantum well structure
506 is formed of an alternate repetition of a GaInNAs quantum well
layer 506a and a barrier layer 506b of Al.sub.02Ga.sub.0.8As, and
there is formed an intermediate layer 506c of GaAs between the
layers 506a and 506b with a thickness of 2 nm.
[0130] By providing such an intermediate layer 506c of GaAs, which
is free from N and Al, between the GaInNAs quantum well layer 506a
that contains N as the constituent element and the barrier layer of
Al.sub.0.2Ga.sub.0.8As that contains Al, the problem of segregation
of N at the layer interface is effectively suppressed and a high
quality quantum well structure is obtained.
[0131] It should be noted that the thickness of the AlOx insulation
layer 503, the thickness of the n-type GaAs contact layer 504, and
the total thickness of the cladding layer 505, the multiple quantum
well layer 506 and the cladding layer 507 are set so as to satisfy
the phase matching condition at the laser oscillation wavelength.
In other words, the optical thickness of the foregoing layers is
chosen to be a multiple integer of one-quarter of the laser
oscillation wavelength.
[0132] Further, a second p-type distributed Bragg reflector 508
having the structure of GaAs/A.sub.0.8Ga.sub.0.2As is formed on the
p-type Al.sub.0.4Ga.sub.0.6As cladding layer 507.
[0133] Referring back to FIG. 4A, the layered structure thus formed
is then subjected to a dry etching process to form a three-step
pillar structure, wherein the first pillar structure is formed so
as to expose the top surface of the n-type GaAs contact layer 504
while the second pillar structure is formed so as to expose the top
surface of the first p-type distributed Bragg reflector 502 of the
GaAs/Al.sub.0.8Ga.sub.0.2As structure. Further, the third pillar is
formed by conducting the dry etching process such that the dry
etching reaches the distributed Bragg reflector 201 of the n-type
GaAs/Al.sub.0.8Ga.sub.0.2As structure.
[0134] In the structure of FIG. 4A, it should be noted that the
marginal part of the p-type AlAs layer 501 exposed at the sidewall
surface of the third pillar structure is subjected to a lateral
oxidation process, and there is formed an AlOx insulation region
509 in the AlAs layer 501 such that the insulation region 509
surrounds laterally the core part of the AlAs layer 501. It should
be noted that this oxidation process for forming the AlOx
insulation region 509 can be conducted simultaneously to the
oxidation process used for oxidizing an AlAs layer to form the AlOx
layer 503. In the step of forming the AlOx layer 503, the lateral
oxidation process is conducted until the entire AlAs layer is
converted to AlOx in the layer 503.
[0135] In the step of FIG. 4A, it should be noted that there is
formed a p-side electrode 510 on the surface of the second p-type
distributed Bragg reflector 508 locating at the top part of the
first pillar for modulation, and an n-side electrode 511 is formed
on the exposed top surface of the n-type GaAs contact layer 504,
wherein the electrodes 510 and 511 are used for driving the
semiconductor optical modulator B.
[0136] On the exposed surface of the first p-type distributed Bragg
reflector 502 located at the top part of the third pillar, a p-side
electrode is provided as the electrode 110, and a bottom electrode
is provided on the bottom surface of the GaAs substrate 101 except
for the opening for emitting the laser beam as the electrode 111.
The electrodes 110 and 111 are used for driving the
surface-emission laser diode.
[0137] In the construction of FIG. 4A, there occurs carrier
injection into the GaInNAs/GaAs multiple quantum well active layer
203 of the surface-emission laser diode by applying a forward bias
across the p-side electrode 110 and the n-side electrode, wherein
the carriers (holes) thus injected are confined into the narrow
AlAs region 501 surrounded by the AlOx region 509 narrower than the
diameter of the first pillar. As a result of such a confinement of
the carriers, the threshold current of laser oscillation is reduced
effectively. As a recombination of the carriers thus injected in
the GaInNAs/GaAs multiple quantum well active layer 203, there is
produced optical radiation with a wavelength of 1.3 .mu.m in
correspondence to the bandgap energy of the GaInNAs quantum well
layer. The optical radiation thus produced is amplified as it is
reflected back and forth between the n-type distributed Bragg
reflector 201 and the p-type distributed Bragg reflector 502 or
508, and the laser oscillation takes place with the wavelength thus
causing resonance with the optical cavity thus formed by the
distributed Bragg reflectors 201, 502 and 508.
[0138] In the EA-type semiconductor optical modulator B, it should
be noted that the multiple quantum well structure 506 is
transparent with regard to the laser beam in the state in which no
bias is applied across the p-side electrode 510 and the n-side
electrode 511. Thus, in this state, not only the reflection from
the fist p-type distributed Bragg reflector 502 but also the
reflection from the second p-type distributed Bragg reflector
contributes to the optical feedback, and a high reflectance
exceeding 99% is achieved. With this very high reflectance, there
occurs a laser oscillation in the surface-emission laser diode.
[0139] When a reverse bias voltage is applied across the p-side
electrode 510 and the n-side electrode 511, on the other hand, the
bandgap of the multiple quantum well structure 506 is decreased as
a result of the quantum confinement Stark effect, and there occurs
absorption of the laser beam in the quantum well structure 506. As
a result, the effective reflectance of the p-type distributed Bragg
reflector is reduced and the laser oscillation is interrupted.
Thus, the intensity of the laser beam is modulated in response to
the modulation signal applied to the electrodes 510 and 511 of the
semiconductor optical modulator B.
[0140] In the integrated semiconductor light-emitting device of
FIGS. 4A and 4B, it is possible to increase the conduction band
discontinuity at the interface between the GaInNAs quantum well
layer and the p-type Al.sub.0.4Ga.sub.0.6As carrier blocking layer
204 to 200 meV or more in the GaInNAs surface-emission laser diode
constructed on the GaAs substrate 101 and operating at the
wavelength band of 1.3 .mu.m. Thus, it is possible to suppress the
electron overflow even in the case the laser diode is operated in
an elevated temperature environment. The laser diode has a reduced
thermal resistance as a result of reduced number of repetition in
the p-side distributed Bragg reflectors 502 and 508, wherein such a
reduction of number of repetition in the distributed Bragg
reflector has become possible in the present invention by using the
material system of GaAs/AlGaAs, which enables the reflectance of
99% or more with a small number of layers in the distributed Bragg
reflector.
[0141] Further, by constructing the multiple quantum well structure
506 forming the absorption layer of the EA-type semiconductor
optical modulator by using the quantum well layer of GaInNAs and
the barrier layer of Al.sub.0.2Ga.sub.0.8As, it is possible to
enhance the electron confinement effect in the GaInNAs quantum well
layer, and thus, the dissociation of excitons is effectively
suppressed even when the optical semiconductor device is operated
in an elevated temperature environment. As a result, a large
quantum confinement Stark effect is achieved and a large bandgap
change is guaranteed. Thus, the S/N ratio of optical modulation is
successfully suppressed even when the semiconductor optical
modulator is operated in an elevated temperature environment.
[0142] Thus, according to the integrated semiconductor
light-emitting device of FIGS. 4A and 4B, it becomes possible to
achieve a high-speed optical modulation of an optical beam having
the wavelength of 1.3 .mu.m at the speed of 10 GHz or more.
[0143] In the surface-emission type optical semiconductor device of
FIGS. 4A and 4B, the threshold current of laser oscillation is
reduced as a result of use of the surface-emission laser diode. In
such an integrated semiconductor light-emitting device, it is
further possible to arrange the laser diodes and the semiconductor
optical modulators in the form of high-density two-dimensional
array.
[Seventh Mode of Invention]
[0144] In a seventh mode, the present invention provides an
integrated semiconductor light-emitting device in which a
semiconductor optical modulator is integrated on a surface-emission
laser diode such that the semiconductor optical modulator is
located inside the cavity of the laser diode. In the present mode
of invention, the multiple quantum well structure constituting the
optical absorption layer in the semiconductor optical modulator is
transparent in the state no bias voltage is applied to the
semiconductor optical modulator. Because of the small optical loss
in the optical cavity, the surface-emission laser diode oscillates
at a low threshold current.
[0145] When a reverse bias voltage is applied to the semiconductor
optical modulator, the bandgap of the multiple quantum well
structure constituting the optical absorption layer of the
semiconductor optical modulator is reduced as a result of the
quantum confinement Stark effect, and there occurs optical
absorption in the optical absorption layer. Thereby, there is
caused an optical loss in the optical cavity and the threshold
current of laser oscillation is increased.
[0146] Thus, in the eight mode of the present invention, too, it is
possible to switch the state of the laser diode between the
oscillating state and the non-active state in which there is no
laser oscillation. According to the present invention, it is
possible to control the laser output over a wide range even in such
a case the optical absorption layer of the semiconductor optical
modulator is small such as 1 .mu.m and the change of optical
absorption coefficient is small. With this, it is possible to
improve the S/N ratio at the time of the optical modulation.
[0147] By using any of GaNAs, GaInNAs, GaNAsSb, GaInNAsSb for the
active layer, it is possible to construct a laser diode operable in
the wavelength band of 1.2-1.6 .mu.m, which is suitable for the
optical transmission over a quartz optical fiber. By using the
foregoing materials for the active layer, it is known that the
temperature characteristic of the laser diode is improved
significantly as is demonstrated by the characteristic temperature
of 150-200 K. Further, such a laser diode has an improved electron
confinement into the quantum confinement layer.
[0148] Thus, according to the present invention, it is possible to
provide a surface-emission type integrated semiconductor
light-emitting device characterized by a high-speed optical
modulation exceeding the speed of 10 GHz.
Embodiment 5
[0149] FIG. 5 shows another embodiment of the integrated
semiconductor light-emitting device according to the present
invention wherein the integrated semiconductor light-emitting
device includes an EA-type semiconductor optical modulator provided
monolithically on a surface-emission laser diode to form an
integral circuit. In the present embodiment, the EA-type
semiconductor optical modulator is formed inside an optical cavity
the surface-emission laser diode located at the side of the
substrate.
[0150] Referring to FIG. 5, the n-type GaAs substrate 101 carries
thereon the n-type distributed Bragg reflector 201 of the
GaAs/Al.sub.0.8Ga.sub.0.2As structure, and the lower spacer layer
202 of n-type GaAs and the multiple quantum well active layer 203
having the GaInNAs/GaAs structure are formed consecutively on the
distributed Bragg reflector 201.
[0151] On the multiple quantum well active layer 203, there is
provided a first upper spacer layer 1101 of GaAs, the p-type AlAs
selective oxidation layer 501 is formed on the GaAs spacer layer
1101.
[0152] Further, a second upper spacer layer 1102 of GaAs is formed
on the p-type AlAs layer 501 and a contact layer 1103 of p-type
GaAs is formed further thereon.
[0153] The contact layer 1103 carries thereon the multiple quantum
well structure 506, and an upper distributed Bragg reflector 1104
having the GaAs/Al.sub.0.8Ga.sub.0.2As structure is formed
thereon.
[0154] The multiple quantum well structure 506 has a construction
similar to the one described with reference to FIG. 4B.
[0155] Referring to FIG. 4B again, the multiple quantum well
structure 506 includes an alternate and repetitive stacking of the
GaInNAs active layer 506a and the barrier layer 506b of
Al.sub.0.2Ga.sub.0.8As, wherein it can be seen that the
intermediate layer 506c of GaAs is provided at the interface
between the active layer 506a and the barrier layer 506b with a
thickness of 2 nm.
[0156] By providing such an intermediate layer 506c of GaAs, which
is free from N and Al, between the GaInNAs quantum well layer 506a
that contains N as the constituent element and the barrier layer of
Al.sub.0.2Ga.sub.0.8As that contains Al, the problem of segregation
of N at the layer interface is effectively suppressed and a high
quality quantum well structure is obtained.
[0157] In the construction of FIG. 5, it should be noted that the
region located between the n-type distributed Bragg reflector 201
and the n-type upper distributed Bragg reflector 1104 forms the
optical cavity of the surface-emission laser diode. Thereby, the
total thickness of the GaAs lower spacer layer 202, the
GaInNAs/GaAs multiple quantum well active layer 203, the first GaAs
spacer layer 1101, the p-type AlAs layer 501, the second GaAs
spacer layer 1102, the p-type GaAs contact layer 1103 and the
multiple quantum well structure 506 is set so as to be equal to an
integer multiple of the half-wavelength of laser oscillation.
[0158] The layered structure thus formed is subjected to a dry
etching process to form a two-step pillar structure as represented
in FIG. 5, wherein the upper pillar forming the first, upper
stepped part is formed so as to expose the top surface of the
p-type GaAs contact layer 1103, while the second step is formed so
as to reach the n-type distributed Bragg reflector 201 of the
GaAs/Al.sub.0.8Ga.sub.0.2As structure.
[0159] Further, the p-type AlAs selective oxidation layer 501 is
oxidized selectively from the exposed lateral surface thereof, and
the AlOx insulating region 503 is formed so as to surround the core
part of AlAs. According to such a construction, it becomes possible
to confine the injected electric current to a region having a size
smaller than the size of the pillar, and the threshold current of
laser oscillation is reduced.
[0160] In the construction of FIG. 5, it can be seen that an n-type
electrode 511 is formed on the top part of the n-type distributed
Bragg reflector 1104 except for the region used for an optical
window from which the laser beam is emitted. Further, a p-side
common electrode 110 is formed on the exposed terrace surface of
the p-type GaAs contact layer 110. Furthermore, the n-type
electrode 111 is provided on the bottom surface of the n-type GaAs
substrate 101.
[0161] In the construction of FIG. 5, the surface-emission laser
diode is driven by applying a forward bias voltage across the
p-side electrode 110 and the n-side electrode 111, such that there
occurs carrier injection into the GaInNAs/GaAs quantum well active
layer 203. The carriers thus injected are confined into a small
area of the active layer 203 smaller than the size of the pillar,
as a result of the action of the AlOx insulating region 503 formed
in the AlAs layer 501 by the lateral oxidizing process. The
carriers thus injected into the active layer 203 cause a
recombination, and there is produced an optical radiation having a
wavelength of 1.3 .mu.m in correspondence to the bandgap energy of
the GaInNAs quantum well layer. The optical radiation thus produced
in the GaInNAs/GaAs multiple quantum well active layer 203 is then
amplified as it is reflected back and forth between the n-type
distributed Bragg reflector 201 and the n-type upper distributed
Bragg reflector 1104, and there occurs a laser oscillation. The
laser beam thus formed is then emitted from the optical window in
the electrode 511 in the upward direction with respect to the GaAs
substrate 101.
[0162] In the EA-type semiconductor optical modulator, the multiple
quantum well structure 506 is transparent in the state in which no
bias voltage is applied across the p-side electrode 110 and the
n-side electrode 511. Because of the absence of optical absorption
in the laser cavity, the surface-emission laser diode causes the
laser oscillation.
[0163] When a reverse bias voltage is applied across the p-side
electrode 110 and the n-side electrode 511, on the other hand,
there occurs a decrease of bandgap energy in the multiple quantum
well structure 506 as a result of the quantum confinement Stark
effect, and there occurs optical absorption in the multiple quantum
well structure 506. Thereby, the laser oscillation halts because of
the increased optical loss in the cavity. Thus, the present
embodiment can provide a large S/N ratio for the optical
modulation.
[0164] In the construction of FIG. 5, it should be noted that the
GaInNAs surface-emission laser diode of 1.3 .mu.m band formed on
the GaAs substrate 101 uses the distributed Bragg reflector of the
GaAs/AlGaAs material system, which is characterized by a small
thermal resistance. Further, the distributed Bragg reflector of the
foregoing system can provide a high reflectance of 99% or more
while reducing the number of repetition therein. As a result, it is
possible to construct a surface-emission laser diode having
excellent temperature characteristics. Further, it becomes possible
to reduce the threshold current of laser oscillation by using the
laser diode of the present embodiment as compared with the case of
using an edge-emission type laser diode.
[0165] In the multiple quantum well structure 506 constituting the
optical absorption layer of the EA-type semiconductor optical
modulator, it is possible to increase the degree of electron
confinement into the GaInNAs quantum well layer by using
Al.sub.0.2Ga.sub.0.8As for the barrier layer. Thus, it becomes
possible to suppress the dissociation of excitons even when the
optical modulator is operated in an elevated temperature
environment, and a large bandgap change caused by the quantum
confinement Stark effect is guaranteed. Thereby, the problem of S/N
degradation at high temperatures is successfully eliminated.
[0166] In the embodiment of FIG. 5, it is possible to realize a
high-speed optical semiconductor device operable in the wavelength
band of 1.3 .mu.m with a speed of 10 GHz or more even at high
temperatures, by integrating a surface-emission laser diode having
a GaInNAs active layer and an EA-type optical modulator that uses a
GaInNAs quantum well layer monolithically on a GaAs substrate.
[Eigth Mode of Invention]
[0167] In an eighth mode, the present invention provides an
integrated semiconductor light-emitting device similar to that of
the sixth mode, except that the semiconductor optical modulator is
provided inside the distributed Bragg reflector of the
surface-emission laser diode. In the present mode of invention, the
semiconductor optical modulator is constructed as a
surface-emission type device that receives and emits the optical
beam in a direction perpendicular to the substrate.
[0168] In the case the semiconductor optical modulator is located
inside the distributed Bragg reflector of the surface-emission
laser diode, the multiple quantum well structure constituting the
optical absorption layer of the optical modulator is transparent
with regard to the laser beam produced by the surface-emission
laser diode. Thus, the active region of the surface-emission laser
diode receives sufficient optical feedback of 99% or more from the
distributed Brag reflector located away from the semiconductor
optical modulator, and the laser oscillation takes place
efficiently.
[0169] When a reverse bias voltage is applied to the semiconductor
optical modulator, on the other hand, the bandgap energy of the
multiple quantum well structure of the optical modulator is reduced
as a result of the quantum confinement Stark effect, and thus, the
multiple quantum well layer starts to absorb the optical beam.
Thereby, the effective reflectance of the distributed Bragg
reflector is decreased and there occurs an increase of laser
oscillation threshold. Thus, the laser oscillation is no longer
sustainable and the laser oscillation is stopped. Thus, in the case
of the present invention, it is possible to modulate the intensity
of the optical beam widely even in the case the optical absorption
layer has a small thickness of: only 1 .mu.m in the semiconductor
optical modulator. Thereby, the S/N ratio of optical modulation is
improved.
[0170] Preferably, the semiconductor optical modulator is provided
at the location where the optical intensity is strongest in the
distributed Bragg reflector. In other words, it is preferable to
provide the optical modulator in the distributed Bragg reflector in
correspondence to the loop. By doing so, the modulation of optical
beam is achieved most effectively, and the laser beam can be
modulated with a smaller change of absorption coefficient.
[0171] In the case the semiconductor optical modulator is provided
inside the optical cavity, it is necessary to provide one electrode
for the laser diode and one electrode for the optical modulator in
the optical cavity. Thus, the carriers, which have caused overflow
in the active layer and reached the optical cavity, are collected
by the electrode and the efficiency of carrier confinement in the
active layer is degraded. In the case the semiconductor optical
modulator is provided inside the distributed Bragg reflector, on
the other hand, the carriers overflowed from the active layer to
the cavity are blocked by the low refractive index layer of the
distributed Bragg reflector that has a large bandgap. Thus, there
occurs no degradation of carrier confinement into the active
layer.
[Ninth Mode of Invention]
[0172] In a ninth mode, the present invention provides an
integrated semiconductor light-emitting device similar to the one
described in relation to the seventh mode of the invention, except
that the semiconductor optical modulator is provided inside the
distributed Bragg reflector located at the side of the substrate
with respect to the active layer.
[0173] As the process of forming a current confinement structure of
a surface-emission laser diode, it is generally practiced to
conduct a selective oxidation process of an AlAs layer to form an
AlOx insulating region in the AlAs layer by applying water vapor
from a lateral surface thereof.
[0174] In the case of providing the semiconductor optical modulator
in the distributed Bragg reflector located away from the substrate
as compared with the active layer of the surface-emission laser
diode, it is necessary to provide the lower electrode of the
semiconductor optical modulator and the upper electrode of the
surface-emission laser diode on a terrace surface formed in a part
of the upper distributed Bragg reflector, while formation of
forming such a terrace electrode requires the process of forming a
two-step pillar structure as represented in FIG. 5. Thereby, the
diameter of the lower pillar or mesa in which the AlAs layer is
provided is increased inevitably, and it is necessary to conduct
the selective oxidation process for forming the AlOx insulation
region over a long time in order to obtain a satisfactorily small
current path region in the current confinement structure. Thereby,
there is a substantial risk that the obtained AlAs current path
region may be varied device by device due to minute variation of
oxidation rate in the AlAs layer.
[0175] In the case the semiconductor optical modulator is provided
inside the lower distributed Bragg reflector located at the side of
the substrate with respect to the active layer of the
surface-emission laser diode, it is possible to provide the upper
electrode of the semiconductor optical modulator and the lower
electrode of the surface-emission laser diode on the terrace
surface formed blow the level of the active layer and the AlAs
selective oxidation layer. Thereby, the size of the mesa structure
or pillar structure including the active layer and the AlAs
selective oxidation layer is reduced as compared with the case of
the device of FIG. 5.
[0176] According to the present invention, the selective oxidation
process for forming the AlOx insulating region in the AlAs layer is
controlled because of the reduced length of the selective oxidation
process, and the variation of threshold current caused by the
variation of the AlAs current path region in the current
confinement structure is effectively eliminated.
[0177] It should be noted that the foregoing effect of the present
mode of the invention is valid also in the case the substrate is
doped to n-type, similarly to the case of the p-type substrate.
Further, the foregoing effect of the present mode of the invention
is valid also in the case the integral optical semiconductor device
is a three-terminal device or a four-terminal device. What is
important in the present mode of the invention is that the
semiconductor optical modulator is provided in the distributed
Bragg reflector located at the side of the substrate, and the
terrace surface, on which an electrode of the semiconductor optical
modulator and an electrode of the surface-emission laser diode are
provided, is located at a level below the level of the active layer
and the AlAs layer. In the present mode of the invention, it should
be noted that the AlAs layer has to be provided at the p-side
region with regard to the active layer.
Embodiment 6
[0178] FIG. 6 shows another embodiment of the integrated
semiconductor light-emitting device according to the present
invention wherein the integrated semiconductor light-emitting
device includes an EA-type semiconductor optical modulator provided
monolithically on a surface-emission laser diode to form an
integral circuit. In the present embodiment, the EA-type
semiconductor optical modulator is formed inside a distributed
Bragg reflector of the surface-emission laser diode located at the
side of the substrate.
[0179] Referring to FIG. 6, the n-type GaAs substrate 101 carries
thereon an n-type distributed Bragg reflector 1201 of the
GaAs/Al.sub.0.8Ga.sub.0.2As structure, and the multiple quantum
well structure 506 is provided on the distributed Bragg reflector
1201. Further, a lower p-type distributed Bragg reflector 1202 of
the GaAs/Al.sub.0.8Ga.sub.0.2As structure is formed on the multiple
quantum well structure 506, and the p-type AlAs layer 501, the GaAs
lower spacer layer 202, the multiple quantum well active layer 203
having the GaInNAs/GaAs structure, the GaAs upper spacer layer 205,
and an upper n-type distributed Bragg reflector of the
GaAS/Al.sub.0.8Ga.sub.0.2As structure are formed consecutively on
the distributed Bragg reflector 1201.
[0180] The multiple quantum well structure 506 has a construction
similar to the one described with reference to FIG. 4B.
[0181] Referring to FIG. 4B again, the multiple quantum well
structure 506 includes an alternate and repetitive stacking of the
GaInNAs active layer 506a and the barrier layer 506b of
Al.sub.0.2Ga.sub.0.8As, wherein it can be seen that the
intermediate layer 506c of GaAs is provided at the interface
between the active layer 506a and the barrier layer 506b with a
thickness of 2 nm.
[0182] By providing such an intermediate layer 506c of GaAs, which
is free from N and Al, between the GaInNAs quantum well layer 506a
that contains N as the Constituent element and the barrier layer of
Al.sub.0.2Ga.sub.0.8As that contains Al, the problem of segregation
of N at the layer interface is effectively suppressed and a high
quality quantum well structure is obtained.
[0183] In the construction of FIG. 6, it should be noted that the
multiple quantum well structure 506 is formed to have an optical
thickness equal to an integer multiple of the half-wavelength of
the laser oscillation wavelength.
[0184] The layered structure thus formed is subjected to a dry
etching process to form a pillar structure as represented in FIG.
6, wherein the pillar is formed so as to expose the top surface of
the p-type lower distributed Bragg reflector 1201 of the
GaAs/Al.sub.0.8Ga.sub.0.2As structure.
[0185] Further, the p-type AlAs selective oxidation layer 501 is
oxidized selectively from the exposed lateral surface thereof, and
the AlOx insulating region 503 is formed so as to surround the core
part of AlAs.
[0186] In the construction of FIG. 6, it can be seen that an n-type
electrode 1204 is formed on the top part of the n-type distributed
Bragg reflector 1203 except for the region used for an optical
window from which the laser beam is emitted. Further, a p-side
common electrode 110 is formed on the exposed terrace surface of
the p-type lower distributed Bragg reflector 1202. Furthermore, the
n-type electrode 111 is provided on the bottom surface of the
n-type GaAs substrate 101. The electrode 1204 is used for driving
the laser diode while the electrode 111 is used for driving the
semiconductor optical modulator. Further, the common electrode 510
is used by both of the laser diode and the semiconductor optical
modulator.
[0187] In the construction of FIG. 6, the surface-emission laser
diode is driven by applying a forward bias voltage across the
p-side electrode 510 and the n-side electrode 1204, such that there
occurs carrier injection into the GaInNAs/GaAs quantum well active
layer 203. The carriers thus injected are confined into a small
area of the active layer 203 smaller than the size of the pillar,
as a result of the action of the AlOx insulating region 503 formed
in the AlAs layer 501 by the lateral oxidizing process. With this,
the threshold current of laser oscillation is reduced.
[0188] The carriers thus injected into the active layer 203 cause a
recombination, and there is produced an optical radiation having a
wavelength of 1.3 .mu.m in correspondence to the bandgap energy of
the GaInNAs quantum well layer. The optical radiation thus produced
in the GaInNAs/GaAs multiple quantum well active layer 203 is then
amplified as it is reflected back and forth between the n-type
upper distributed Bragg reflector 1203 and the p-type lower
distributed Bragg reflector 1202 as well as the n-type lower
distributed Bragg reflector 1201, and there is caused a laser
oscillation. The laser beam thus formed is then emitted from the
optical window in the electrode 1204 in the upward direction with
respect to the GaAs substrate 101.
[0189] In the EA-type semiconductor optical modulator, the multiple
quantum well structure 506 is transparent in the state in which no
bias voltage is applied across the p-side electrode 510 and the
n-side electrode 111. Because of the absence of optical absorption
in the laser cavity, reflected optical beams are fed back to the
active region of the surface-emission laser diode by the p-type
distributed Bragg reflector 1202 and also by the n-type lower
distributed Bragg reflector 1201, and a reflectance of 99% or more,
which is needed for causing laser oscillation, is successfully
achieved.
[0190] When a reverse bias voltage is applied across the p-side
electrode 510 and the n-side electrode 111, on the other hand,
there occurs a decrease of bandgap energy in the multiple quantum
well structure 506 as a result of the quantum confinement Stark
effect, and there occurs optical absorption in the multiple quantum
well structure 506. Thereby, the laser oscillation halts because of
the decreased effective reflectance of the lower distributed Bragg
reflector located at the side of the substrate 101 with regard to
the active layer 203. With this, modulation of the laser beam is
achieved.
[0191] In the construction of FIG. 6, it should be noted that the
semiconductor optical modulator is provided inside the distributed
Bragg reflector at the side of the substrate, and thus, it is
possible to form the p-side electrode 510 used commonly by the
semiconductor optical modulator and also by the surface-emission
laser diode, on the terrace surface located below the level of the
active layer 203 and the AlAs layer 501. Thereby, it is possible to
reduce the lateral size or diameter of the pillar structure or mesa
structure a the time of mesa etching process of the active layer
203 and the AlAs layer 501.
[0192] In the case the semiconductor optical modulator is provided
in the distributed Bragg reflector at the side away from the
substrate, it is necessary to increase the distance of selective
oxidation as noted with reference to the structure of FIG. 5. In
such a case, there is a possibility of variation in the side of the
current confinement structure due to the possible variation of
oxidation rate in the AlAs layer, while such a variation of the
size of the current confinement structure results in a variation of
threshold current of the surface-emission laser diode.
[0193] By providing the semiconductor optical modulator inside the
distributed Bragg reflector located at the side of the substrate
(lower distributed Bragg reflector), it becomes possible to reduce
the size of the pillar structure and hence the distance needed for
oxidizing the AlAs layer 501.
[Tenth Mode of Invention]
[0194] In a tenth mode, the present invention provides an
integrated semiconductor light-emitting device in which a
surface-emission laser diode and a semiconductor optical modulator
having a multiple quantum well layer as an optical absorption layer
are integrated on a single crystal semiconductor substrate such
that the laser diode and the optical modulator are stacked in a
thickness direction of the semiconductor layers. Further, in the
present mode of the invention, the semiconductor optical modulator
is provided inside the optical cavity of the surface-emission laser
diode or inside the distributed Bragg reflector of the
surface-emission laser diode.
[0195] In the case of integrating a semiconductor optical modulator
on a surface-emission laser diode as explained in the pervious
embodiment, a thickness of several ten microns is necessary for the
semiconductor optical modulator so as to absorb the laser beam
produced by the surface-emission laser diode, while the fabrication
of a device having such a large thickness is difficult. When the
thickness is insufficient, on the other hand, the difference of
optical beam strength becomes small between the transparent state
and absorption state, and the SN ratio of the optical modulation is
deteriorated.
[0196] In the present embodiment, the semiconductor optical
modulator is provided inside the optical cavity or the distributed
Bragg reflector of the surface-emission laser diode. Thus, in the
event no bias voltage is applied to the semiconductor optical
modulator, it is transparent to the laser beam produced by the
surface-emission laser diode, and there occurs a laser oscillation
in the laser diode with a low threshold current. In the event a
reverse bias voltage is applied to the semiconductor optical
modulator, the bandgap of the multiple quantum well structure is
decreased as a result of the quantum confinement Stark effect, and
there occurs optical absorption. With this, there occurs an
increase of optical loss in the surface-emission laser diode and
the threshold current laser oscillation is increased.
[0197] Thus, it becomes possible to achieve an ON/OFF control of
the laser oscillation in the integrated semiconductor
light-emitting device of the present invention by applying or
removing a reverse bias voltage to the semiconductor optical
modulator while driving the surface-emission laser diode with a
constant drive current. In this case, it is possible to change the
intensity of the output laser beam significantly even in the case
the thickness of the semiconductor optical modulator is 1 .mu.m or
less. With this, it is possible to increase the S/N ratio of the
optical intensity modulation.
[0198] In the present embodiment, it should be noted that
interruption of laser oscillation is not always required in the
state that the reverse bias voltage is applied to the semiconductor
optical modulator. Only an increase of threshold current level is
sufficient. In such a case, there occurs a significant drop of the
optical output power upon application of the reverse bias voltage
to the semiconductor optical modulator although the laser
oscillation itself is not interrupted.
[0199] In the Japanese Laid-Open Patent Publication 5-152674, there
is a disclosure about the structure in which a semiconductor
optical modulator and a surface-emission laser diode are stacked
monolithically. In this prior art, however, the laser beam produced
by the laser diode is modulated externally by the semiconductor
optical modulator provided outside the laser diode. Thus, the
forgoing prior art suffers from the problem of degradation of the
S/N ratio in the case the thickness of the optical absorption layer
is small.
[0200] Contrary to the foregoing prior art, the present invention
can achieve a large change of optical output with a small change of
optical absorption, by modulating the internal loss of the laser
diode.
Embodiment 7
[0201] FIG. 14 shows the construction of an integrated
semiconductor light-emitting device according to the present
invention.
[0202] Referring to FIG. 14, the integrated semiconductor
light-emitting device is constructed on a p-type GaAs substrate
1401 and includes a lower distributed Bragg reflector 1462 of
p-type having the construction of
Al.sub.0.2Ga.sub.0.8As/Al.sub.0.9Ga.sub.0.1As formed on the GaAs
substrate 1401, wherein a multiple quantum well layer 1403 of
GaAs/Al.sub.0.2Ga.sub.0.8As structure is formed on the lower
distributed Bragg reflector 1401. Further, an n-type distributed
Bragg reflector 1404 of the
Al.sub.0.2Ga.sub.0.8As/Al.sub.0.9Ga.sub.0.1As structure, a lower
spacer layer 1405 of Al.sub.0.2Ga.sub.0.8As, a multiple quantum
well layer 1406 of GaAs/Al.sub.0.2Ga.sub.0.8As structure, an upper
spacer layer 1407 of Al.sub.0.2Ga.sub.0.8As, a p-type AlAs layer
501, and an upper distributed Bragg reflector 1408 of p-type
Al.sub.0.2Ga.sub.0.8As/Al.sub.0.9Ga.sub.0.1As structure, are formed
consecutively on the multiple quantum well layer 1403.
[0203] In the construction of FIG. 14, the layered structure thus
formed is then subjected to a dry etching process to form a pillar
structure, wherein the dry etching process for forming the pillar
structure is conducted such that the dry etching reaches the
distributed Bragg reflector 1404 of the n-type
Al.sub.0.2Ga.sub.0.8As/Al.sub.0.9Ga.sub.0.1As structure.
[0204] In the structure of FIG. 5, it should be noted that the
marginal part of the p-type AlAs layer 501 exposed at the sidewall
surface of the pillar structure is subjected to a lateral oxidation
process, and there is formed an AlOx insulation region 509 in the
AlAs layer 501 such that the insulation region 509 surrounds
laterally the core part of the AlAs layer 501.
[0205] In the structure of FIG. 14, it should be noted that there
is formed a p-side electrode 1413 on the surface of the p-type
distributed Bragg reflector 1408 locating at the top part of the
pillar except for the region from which the output optical beam is
emitted. Further, an n-side common electrode 1412 is formed on the
exposed terrace surface of the distributed Bragg reflector 1404
formed as a result of the dry etching process, and a bottom
electrode 1411 is provided on the bottom surface of the GaAs
substrate 1401.
[0206] In the construction of FIG. 14, there occurs carrier
injection into the GaAs/Al.sub.0.2Ga.sub.0.8As multiple quantum
well active layer 1406 by applying a forward bias across the p-side
electrode 1413 and the n-side electrode 1412, wherein the carriers
(holes) thus injected from the electrode 1413 are confined into the
narrow AlAs region 501 surrounded by the AlOx region 509 narrower
than the diameter of the pillar. As a result of recombination of
the carriers thus injected in the GaAs/Al.sub.02Ga.sub.0.8As
multiple quantum well active layer 1406, there is produced an
optical radiation with a wavelength of 0.85 .mu.m. The optical
radiation thus produced is amplified as it is reflected back and
forth between the lower distributed Bragg reflector including the
p-type reflector 1402 and the n-type reflector 1404 and the upper
distributed Bragg reflector 1408, and the laser oscillation takes
place. The laser beam thus formed as a result of the laser
oscillation is emitted from the optical window formed in the
electrode 1413 in the upward direction.
[0207] It should be noted that the multiple quantum well layer 1403
of the GaAs/Al.sub.0.2Ga.sub.0.8As structure has a band structure
designed such that the multiple quantum well layer 1403 is
transparent with regard to the laser beam produced by the multiple
quantum well active layer 1406 of the GaAs/Al.sub.0.2Ga.sub.0.8As
structure in the state in which no bias is applied across the
p-side electrode 1411 and the n-side electrode 1412. Thus, in this
state, the GaAs/Al.sub.0.2Ga.sub.0.8As multiple quantum well
optical absorption layer 1403 does not cause optical absorption,
and there occurs a laser oscillation with a low threshold
current.
[0208] When a reverse bias voltage is applied across the p-side
electrode 1411 and the n-side electrode 1412, on the other hand,
the bandgap of the multiple quantum well layer 1403 of the
GaAs/Al.sub.0.2Ga.sub.0.8As structure is decreased as a result of
the quantum confinement Stark effect, and there occurs absorption
of the laser beam in the quantum well structure 1403 produced by
the multiple quantum well active layer 1406 of the
GaAs/Al.sub.0.2Ga.sub.0.8As structure. As a result, the optical
loss inside the surface-emission laser diode is increased and there
occurs an increase of the threshold current of laser
oscillation.
[0209] Thus, by setting the electric current injected from the
p-side electrode 1413 and the n-side electrode 1412 into the
GaAs/Al.sub.0.2Ga.sub.0.8As multiple quantum well active layer 1406
of the GaAS/Al.sub.0.2Ga.sub.0.8As structure between the threshold
current for the case in which no bias is applied across the p-side
electrode 1411 and the n-side electrode 1412 and the threshold
current for the case in which the reverse bias voltage is applied
across the p-side electrode 1411 and the n-side electrode 1412, it
is possible to operate the integrated semiconductor optical device
such that there occurs a laser oscillation in the state no bias
voltage is applied across the electrodes 1411 and 1412 and the
laser oscillation stops in the case the bias voltage is applied
across the electrodes 1411 and 1412. With this, it becomes possible
to cause a large change in the output power of the laser diode.
[0210] In the present embodiment, it is possible to induce a large
change of output power by a small change of absorption coefficient
in the optical absorption layer, and the S/N ratio of optical
modulation is improved substantially as compared with the case of
modulating the laser beam produced by the laser diode by an
external optical modulator.
[0211] Further, according to the present invention, it is possible
to carry out the desired optical modulation of the laser beam with
a speed much higher than the speed achieved by directly modulating
the laser dive current as a result of the use of the EA modulation
conducted by applying an electric field to the
GaAs/Al.sub.0.2Ga.sub.0.8As multiple quantum well optical
absorption layer 1403.
[0212] According to the present invention it is possible to achieve
an optical modulation with a speed of 20-50 GHz, which
substantially exceeds the upper limit modulation speed of 10 GHz
for the case of direct modulation of the laser diode. By using the
integrated semiconductor light-emitting device of the present
invention, it is possible to construct a broadband optical
transmission system carrying a very large amount of signal
traffic.
[0213] In the present embodiment, it is also possible to use the
material system of InGaAs/AlGaAs, GaInP/AlGaInP, InGaN/AlGaN,
GaInNAsSb/AlGaAs, and the like, in addition to the material system
of GaAs/AlGaAs for constructing the surface-emission laser diode of
the 0.85 .mu.m band.
[Eleventh Mode of the Invention]
[0214] In an eleventh mode, the present invention provides an
integrated semiconductor light-emitting device in which a
surface-emission laser diode and a semiconductor optical modulator
having as an optical absorption layer are integrated on a single
crystal semiconductor substrate such that the laser diode and the
optical modulator are stacked in a thickness direction of the
semiconductor layers. In the present mode of the invention, the
semiconductor optical modulator is provided inside the distributed
Bragg reflector of the surface-emission laser diode located at the
opposite side of the optical emission surface of the
surface-emission laser diode from which the laser beam is
emitted.
[0215] In a surface-emission laser diode, the distributed Bragg
reflector used therein is generally designed to have a reflectance
of 99% or more for reducing the threshold current. Particularly,
the distributed Bragg reflector located at the side away from the
optical emission surface of the laser diode is usually designed to
have a very high reflectance of 99.9% or more in view of the fact
that there is no need of taking out optical beam through such a
distributed Bragg reflector. On the other hand, it is practiced to
reduce the reflectance of the distributed Bragg reflector located
at the side of the optical emission surface so as to facilitate
optical emission of the laser beam.
[0216] In the eleventh mode of the present invention, the
semiconductor optical modulator is located inside the distributed
Bragg reflector at the far side from the optical emission surface,
wherein the distributed Bragg reflector located at the for side of
the optical emission surface is designed to provide a higher
reflectance as compared with the distributed Bragg reflector
located near the optical emission surface. By providing the
semiconductor optical modulator in the distributed Bragg reflector
having such a higher reflectance, it becomes possible in the
present mode of the invention to increase the magnitude of change
of the threshold current by the semiconductor optical
modulator.
[Twelfth Mode of the Invention]
[0217] In a twelfth mode, the present invention provides an
integrated semiconductor light-emitting device in which a
surface-emission laser diode and a semiconductor optical modulator
having as an optical absorption layer are integrated on a single
crystal semiconductor substrate such that the laser diode and the
optical modulator are stacked in a thickness direction of the
semiconductor layers. In the present mode of the invention, the
semiconductor optical modulator is provided inside the distributed
Bragg reflector of the surface-emission laser diode. Thereby, at
least one of the electrodes of the semiconductor optical modulator
is provided at a position within one period of the distributed
Bragg reflector adjacent to the semiconductor optical
modulator.
[0218] A semiconductor distributed Bragg reflector is constructed
by stacking a high refractive index layer having a small bandgap
and a low refractive index layer having a large bandgap
alternately. Thus, there is caused a heterospike formation at the
interface between the high refractive index layer and the low
refractive index layer, and injection of carriers is prevented by
the existence of a such heterospike. Further, the existence of
depletion layer formed at the heterointerface increases the
capacitance component of the distributed Bragg reflector. Thereby,
the high-frequency transmission characteristics of the distributed
Bragg reflector are deteriorated as a result of the increased
resistance and capacitance.
[0219] In the twelfth mode of the present invention, the electrode
of the semiconductor optical modulator used for modulating the
optical absorption coefficient of the optical absorption layer is
provided within one period from the distributed Bragg reflector
adjacent to the semiconductor optical modulator. Thus, the electric
field is applied to the optical absorption layer with minimum
distance, and the effect of delay caused by resistance and
capacitance is reduced. Thereby, a higher operational speed becomes
possible.
Embodiment 8
[0220] FIG. 15 shows another example of the integrated
semiconductor light-emitting device according to the present
invention.
[0221] Referring to FIG. 15, the n-type GaAs substrate 101 carries
thereon the n-type distributed Bragg reflector 201 of the
GaAs/Al.sub.0.8Ga.sub.0.2As structure, and the lower spacer layer
202 of n-type GaAs and the multiple quantum well active layer 203
having the GaInNAs/GaAs structure are formed consecutively on the
distributed Bragg reflector 201.
[0222] On the multiple quantum well active layer 203, there is
provided the first upper spacer layer 205 of GaAs, and the p-type
AlAs selective oxidation layer 501 is formed on the GaAs spacer
layer 205. Further, the p-type AlAs layer 501 and a p-type GaAs
layer 1501 are formed consecutively thereon.
[0223] The p-type GaAs layer 1501 carries thereon an AlOx
insulation layer 503, and an n-type GaAs layer 1502 constituting a
part of the EA-type semiconductor optical modulator is provided on
the GaAs layer 1501. Further, the multiple quantum well structure
506 is formed on the layer 1502 and a p-type GaAs layer 1502 is
formed on the multiple quantum well structure 506.
[0224] Here, the AlOx layer 503 is provided for insulating the
surface-emission laser diode from the EA-mode semiconductor optical
modulator.
[0225] The multiple quantum well structure 506 has a construction
similar to the one described with reference to FIG. 4B.
[0226] Referring to FIG. 4B again, the multiple quantum well
structure 506 includes an alternate and repetitive stacking of the
GaInNAs active layer 506a and the barrier layer 506b of
Al.sub.0.2Ga.sub.0.8As, wherein it can be seen that the
intermediate layer 506c of GaAs is provided at the interface
between the active layer 506a and the barrier layer 506b with a
thickness of 2 nm.
[0227] In the construction of FIG. 15, it is further noted that the
p-type GaAs layer 1503 carries thereon the p-type distributed Bragg
reflector 503 of the GaAs/Al.sub.0.8Ga.sub.0.2As structure.
[0228] In the construction of FIG. 15, the layered structure thus
formed is subjected to a dry etching process to form a four-step
pillar structure, wherein the uppermost pillar is formed so as to
expose a terrace surface of the p-type GaAs layer 1503, while the
second pillar is formed so as to expose the terrace surface of the
n-type GaAs layer 1502. Further, the third pillar is formed so as
to expose the terrace surface of the p-type GaAs layer 1501, and
fourth pillar is formed so as to expose the terrace surface of the
distributed Bragg reflector 201.
[0229] Further, the p-type AlAs selective oxidation layer 501 is
oxidized selectively from the exposed lateral surface thereof, and
the AlOx insulating region 509 is formed so as to surround the core
part of AlAs. On the other hand, the AlOx layer 503 electrically
separating the surface-emission laser diode and the semiconductor
optical modulator is formed by oxidizing the AlAs layer totally
from the lateral surface thereof. This oxidation process of forming
the AlOx layer 503 can be conducted simultaneously to the step of
forming the AlOx region 509.
[0230] In the construction of FIG. 15, it can be seen that the
p-side electrode 510 of the optical modulator is formed on the
exposed surface of the p-type GaAs layer 1503, and the n-side
electrode 511 is formed on the second terrace surface formed in the
n-type GaAs layer 1502. Furthermore, the p-type electrode 110 of
the laser diode is provided on the third terrace surface formed in
the p-type GaAs layer 1501, and the n-side electrode 111 of the
laser diode is provided on the rear surface of the n-type GaAs
substrate 101.
[0231] In the construction of FIG. 15, the surface-emission laser
diode is driven by applying a forward bias voltage across the
p-side electrode 110 and the n-side electrode 111, such that there
occurs carrier injection into the GaInNAs/GaAs quantum well active
layer 203. The carriers thus injected are confined into a small
area of the active layer 203 smaller than the size of the pillar,
as a result of the action of the AlOx insulating region 509 formed
in the AlAs layer 501 by the lateral oxidizing process. The
carriers thus injected into the active layer 203 cause a
recombination, and there is produced an optical radiation having a
wavelength of 1.3 .mu.m in correspondence to the bandgap energy of
the GaInNAs quantum well layer. The optical radiation thus produced
in the GaInNAs/GaAs multiple quantum well active layer 203 is then
amplified as it is reflected back and forth between the n-type
distributed Bragg reflector 201 and the n-type upper distributed
Bragg reflector 508, and there occurs a laser oscillation. The
laser beam thus formed is then emitted from the optical window in
the electrode 511 in the upward direction with respect to the GaAs
substrate 101.
[0232] In the EA-type semiconductor optical modulator, the multiple
quantum well structure 506 is transparent in the state in which no
bias voltage is applied across the p-side electrode 510 and the
n-side electrode 511. Because of the absence of optical absorption
in the laser cavity, the surface-emission laser diode causes the
laser oscillation with a small threshold current.
[0233] When a reverse bias voltage is applied across the p-side
electrode 510 and the n-side electrode 511, on the other hand,
there occurs a decrease of bandgap energy in the multiple quantum
well structure 506 as a result of the quantum confinement Stark
effect, and there occurs optical absorption in the multiple quantum
well structure 506. Thereby, the laser oscillation halts because of
the increased optical loss in the cavity. Thus, the present
embodiment can achieve an optical modulation of the laser beam
produced by the surface-emission laser diode.
[0234] In the integrated semiconductor light-emitting device of
FIG. 15, the electrodes 510 and 511 of the semiconductor optical
modulator used for modulating the optical absorption coefficient of
the multiple quantum well structure 506 are provided on the GaAs
layers 1502 and 1503 adjacent to the semiconductor optical
modulator. Thus, the electric filed is induced, in response to the
application of the reverse bias voltage across the electrodes 510
and 506, directly in the multiple quantum well optical absorption
layer 506 without propagating through the distributed Bragg
reflector, and the delay caused by the resistance and capacitance
of the distributed Bragg reflector is eliminated. Thereby, the
integrated semiconductor optical device of the present invention
can function at a very high speed.
[Thirteenth Mode of Invention]
[0235] In a thirteenth mode, the present invention uses, in an
integrated semiconductor light-emitting device, an insulation layer
formed by selective oxidation of an AlAs layer or an AlGaAs layer
for the insulation between the semiconductor optical modulator and
the surface-emission laser diode.
[0236] Generally, the electrical insulation between a semiconductor
optical modulator and the laser diode has been achieved by applying
a reverse bias voltage to a pn junction. However, the electrical
insulation using such a reverse biased pn junction is not always
reliable due to the possibility of tunneling or breakdown
associated with crystal defects, and there is a risk that the
device may be damaged due to the large current flowing through the
active layer of the laser diode.
[0237] The insulation film formed as a result of oxidation of AlAs
or AlGaAs is an excellent insulation film. Thus, by using such an
insulation film formed by the selective oxidation process of AlAs
or AlGaAs for the insulation film, it is possible to increase the
breakdown voltage of the insulation film separating the
semiconductor optical modulator from the laser diode to 20V or
more.
[0238] Further, it should be noted that the insulation film thus
formed by the selective oxidation of AlAs or AlGaAs is used also
for forming the current confinement structure. Thereby, it becomes
possible to conduct the selective oxidation process for forming the
current confinement structure of the surface-emission laser diode
and the oxidation process for forming the insulation layer between
the semiconductor optical modulator and the surface-emission laser
diode simultaneously in a common oxidation step.
[0239] Thereby, it is possible to adjust the oxidation rate in
correspondence to the distance of selective oxidation by changing
the thickness or Al content between the layer used for the current
confinement structure and the insulation layer. By reducing the
thickness of the AlAs or AlGaAs layer, for example, it is possible
to reduce the oxidation rate. Further, the oxidation rate is
reduced also by reducing the Al content in the AlGaAs layer.
[0240] It should be noted that foregoing explanation, based on the
structure constructed on an n-type substrate, is applicable also to
the case of using a p-type substrate. Further, it is possible to
provide a tunneling layer in the surface emission laser diode in
the vicinity of the active layer and inject the carries through
such a tunneling layer.
[Fourtheenth Mode of Invention]
[0241] In a fourteenth mode, the present invention uses, in an
integrated semiconductor light-emitting device of any of the sixth
through twelfth mode of the invention, a compositional gradation
layer between a high refractive index layer and a low refractive
index layer constituting the distributed Bragg reflector of the
surface-emission laser diode, such that the compositional gradation
layer has a thickness of 30-50 nm.
[0242] FIG. 16 shows the result of calculation of resistance of the
distributed Bragg reflector having the GaAs/AlAs structure
(repeated four times) while changing the thickness of the
compositional gradation layer variously. In the calculation of FIG.
16, each of the layers constituting the distributed Bragg reflector
was doped to the carrier density of 7.times.10.sup.17
cm.sup.-1.
[0243] From the result of FIG. 16, it can be seen that the
resistance of the distributed Bragg reflector drops sharply when
the thickness of the compositional gradation layer has exceeded 30
nm and the resistance approaches to that of a bulk material
(represented in FIG. 16 by a dotted line).
[0244] FIG. 17 shows the change of reflectance of the distributed
Bragg reflector having the GaAs/AlAs structure tuned to the
wavelength band of 1.3 .mu.m, as a function of the thickness of the
compositional gradation layer.
[0245] Referring to FIG. 17, it can be seen that there occurs a
sharp change of reflectance when the thickness of the compositional
gradation layer has exceeded 50 nm as can be seen when compared
with a tangential line drawn in FIG. 17. Associated with this,
there occurs a sharp rise of the threshold current of laser
oscillation.
[0246] From the results of FIG. 16 and FIG. 17, it is concluded
that a low-resistance distributed Bragg reflector having a high
reflectance is obtained by setting the thickness of the
compositional gradation layer in the range of 30-50 nm.
[0247] Another advantage of providing such a compositional
gradation layer is that the notch formation at the interface
between the high refractive index layer and the low refractive
index layer is suppressed and the capacitance of the distributed
Bragg reflector is reduced.
[0248] Thus, the integrated semiconductor light-emitting device of
the present mode of invention can perform successfully even at very
high modulation frequencies.
[Fifteenth Mode of Invention]
[0249] In a fifteenth mode, the present invention provides a
tunable laser apparatus, comprising: an ASE (amplitude spontaneous
emission) optical radiation source provided in an optical cavity
having a pair of reflectors; an wavelength divide filter splitting
an optical radiation produced by the ASE optical source into
optical radiation components having respective wavelengths; an
optical gate array for selectively amplifying an optical radiation
component; and a semiconductor optical modulator modulating an
intensity of said optical radiation component passed through said
optical gate array, wherein a semiconductor optical modulator of
any of the first and second modes of the present invention is used
for the semiconductor optical modulator.
[0250] Here, the ASE optical source may be constructed by using a
semiconductor optical amplifier constructed on a GaAs substrate
such as a single crystal GaAs substrate on which a gain region is
provided together with a p-side electrode and an n-side electrode
for injecting a current into the gain region. For the gain region,
it is possible to use a semiconductor layer of any of GaNAs,
GaInNAs, GaNAsSb and GaInNAsSb.
[0251] It should be noted that the mixed crystal containing As and
N such as GaNAs, GaInNAs, GaNAsSb, GaInNAsSb, can be grown on the
GaAs substrate in the form of a single-crystal film and has a
bandgap wavelength of 1.2-1.6 .mu.m corresponding to the minimum
optical loss of a quartz optical fiber. Thus, the semiconductor
optical amplifier has a gain with regard to the laser beam having
the wavelength of 1.3-1.55 .mu.m.
[0252] In addition, it is known that the conduction band
discontinuity can be reduced when a mixed crystal layer containing
As and N as the group. V element is used to form a heterojunction
with an AlGaAs material or an AlGaInP material. Further, associated
with the fact that the mixed crystal containing N and As for the
group V element can be grown on a GaAs substrate, it is possible in
the semiconductor optical amplifier to use a widegap material such
as AlGaAs or AlGaInP for the cladding layer. Thereby, it becomes
possible to secure a conduction band discontinuity of 200 meV or
more between the gain region formed of any of GaNAs, GaInNAs,
GaNAsSb, GaInNAsSb and the cladding layer.
[0253] Because of the large conduction band discontinuity, the
problem of overflowing of electrons from the gain region to the
cladding layer is suppressed effectively even when the
environmental temperature is increased, and the decrease of gain
with temperature rise is effectively suppressed. Thus, in the
semiconductor optical modulator having a gain region formed of any
of GaNAs, GaInNAs, GaNAsSb, GaInNAsSb, it is possible to reduce the
change of optical amplification factor with regard to the change of
the environmental temperature.
[0254] In the conventional material system using an InP substrate,
it is known that the gain coefficient of the InGaAsP layer has a
low value of about 500 cm.sup.-1 (IEEE J. Quantum Electron., vol.
27, pp. 1804-1811). In the case of a GaInNAs layer (1.2 .mu.m)
formed on a GaAs substrate, on the other hand, a very large value
of 2243 cm.sup.-1 is reported (Jpn. J. Appl. Phys. vol. 35, pp.
206-209).
[0255] FIG. 7 shows the relationship between the threshold current
density Jth and the total loss a for an edge-emission laser diode
having a GaInNAs active layer with a wavelength of 1.3 .mu.m
band.
[0256] From FIG. 7, it can be seen that a large value of 1500
cm.sup.-1 is obtained for the gain coefficient Go of the GaInNAs
layer even at the wavelength of 1.3 .mu.m band. Thus, it is
concluded that a GaInNAs layer formed on a GaAs substrate has a
much larger gain coefficient as compared with an InGaAsP material
formed on an InP substrate and is suitable for constructing a gain
region of a semiconductor optical amplifier operable in the
wavelength band of 1.2-1.3 .mu.m.
[0257] In the foregoing semiconductor optical amplifier, it should
be noted that the gain region has a multiple quantum well structure
characterized by a multiple stacking of a quantum well layer of any
of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb In the multiple quantum
well structure, a plurality of quantum well layer having different
bandgaps are stacked.
[0258] Thus, in such a semiconductor optical amplifier, it is
possible to reduce the change of the optical amplification factor
by forming the gain region by the quantum well layer of any of
GaNAs, GaInNAs, GaNAsSb, and GaInNAsSb.
[0259] Further, it is also possible to change the energy bandgap of
the quantum well layer by changing the mixed crystal composition or
thickness (well width) of each quantum well layer. In this case,
each of the quantum well layer has a corresponding, mutually
different wavelength bands, and thus, the multiple quantum well
structure provides a gain over a broad wavelength band as a result
of superposition of the gain characteristics of various quantum
wells. The broadband optical amplifier of such a construction can
be used conveniently in a wavelength-division multiplexing optical
transmission system that uses a relatively large wavelength
interval between the wavelength channels.
[0260] It is important, in the case of increasing the bandwidth by
using plural quantum well layers of different bandgaps, to control
the gain of each quantum well layer as uniform as possible.
However, the use of different bandgaps generally results in
different gain coefficients between different quantum well layers.
Thereby, the barrier height of carrier confinement is changed also
in each quantum well.
[0261] In the case of the semiconductor optical amplifier noted
above that uses the quantum well layer of any of GaNAs, GaInNAs,
GaNAsSb and GaInNAsSb for the gain region, on the other hand, it is
possible to change the gain coefficient while maintaining the same
energy bandgap, by controlling the strain or N content of the
quantum well layer.
[0262] By increasing the N content, the conduction band edge of the
quantum well layer is shifted in the lower energy side in the band
diagram, while by increasing the Sb content, the conduction band
edge is shifted to the higher energy side. Thus, it is possible to
arrange the electron confinement barrier height for each of the
quantum well layers. With this, it is possible to achieve
uniformity of gain coefficients of various quantum well layers.
[0263] FIGS. 8A and 8B show the construction of a semiconductor
optical amplifier of the present mode of the invention, wherein
FIG. 8A shows the optical amplifier in a front view while FIG. 8B
shows the optical amplifier in a longitudinal cross sectional
view.
[0264] Referring to FIGS. 8A and 8B, the semiconductor optical
amplifier is constructed on the n-type GaAs substrate 101 and
includes an n-type cladding layer 102 of Al.sub.0.4Ga.sub.0.6As
formed on the GaAs substrate 101, the lower optical waveguide layer
103 of GaAs formed on the n-type cladding layer 102, and the
multiple quantum well active layer 104 of the GaInNAs/GaAs
structure is formed on the lower optical waveguide layer 103.
[0265] The multiple quantum well active layer 104 carries thereon
the upper optical waveguide layer 105 of GaAs, and the first p-type
cladding layer 106 of Ga.sub.0.5In.sub.0.5P is formed on the upper
optical waveguide layer 105.
[0266] In one example, the GaInNAs/GaAs multiple quantum well layer
104 is formed by repeating a GaInNAs quantum well layer having a
thickness of 7 nm and a GaAs barrier layer having a thickens of 10
nm three times.
[0267] On the foregoing first p-type cladding layer 106 of
Ga.sub.0.5In.sub.0.5P, it can be seen that there is formed a
current blocking layer 107 of n-type Al.sub.0.5Ga.sub.0.5P at both
lateral sides of the stripe region in which current injection is
made. Such a current blocking layer 107 is easily formed by
applying chemical etching process to the n-type
Al.sub.0.5Ga.sub.0.5P layer grown for the current blocking layer
107 along the stripe region by using a sulfuric etchant. By using
such a sulfuric etchant, only the AlInP layer is etched while no
etching is made in the GaInP layer. Thus, only the current blocking
layer 107 of n-type Al.sub.0.5Ga.sub.0.5P is etched as a result of
such a chemical etching process.
[0268] In the structure of FIGS. 8A and 8B, a second p-type
cladding layer 108 of Al.sub.0.4Ga.sub.0.6As is grown on the
current blocking layer 107 in contact with the first p-type
cladding layer 106 of Ga.sub.0.5In.sub.0.5P along the stripe
region, and the cap layer 109 of p-type GaAs is grown on the second
p-type cladding layer 108.
[0269] Further, the p-side electrode 110 is formed on the p-type
GaAs cap layer 109 and the n-side electrode 111 is provided on the
bottom surface of the n-type GaAs substrate 101.
[0270] Further, the cleaved end surfaces T1 and T2 are covered with
the anti-reflection coatings 112 and 113 having a reflectance of
0.2% or less.
[0271] It should be noted that the semiconductor optical modulator
of FIGS. 8A and 8B is designed to have a device of the
traveling-wave type. Thus, the laser beam incident from the rear
end surface T1 is amplified as it is guided along the waveguide
including the GaInNAs/GaAs multiple quantum well active layer 104
that has an optical gain, and the laser beam thus amplified is
emitted from the front end surface T2. In the direction
perpendicular to the substrate 101, there is formed an SCH
structure by sandwiching the GaAs optical waveguide layers 103 and
105 with the cladding layers 102 and 106 as well as by the cladding
layer 108 having a lower refractive index.
[0272] In the direction parallel to the substrate 101, there is
also formed an optical waveguide structure that confines the
optical radiation in the stripe region. It should be noted that the
current blocking layer 107 of n-type Al.sub.0.5In.sub.0.5P located
at both lateral sides of the stripe region has a refractive index
smaller than the refractive index of the p-type cladding layers 106
and 108. In addition, it should be noted that the current blocking
layer 107 of n-type Al.sub.0.5Ga.sub.0.5P is transparent to the
optical beam guided through the optical waveguide. Thus, there
occurs no optical absorption when the optical beam is guided
through the optical waveguide from the end surface T1 to the end
surface T2.
[0273] In the semiconductor optical amplifier of FIG. 8, there
occurs injection of holes and electrons respectively from the
p-side electrode 110 and the n-side electrode 111 into the
GaInNAs/GaAs multiple quantum well active layer 104 upon
application of a forward bias voltage across the electrodes 110 and
111, and there is induced a population inversion of carriers in the
active layer 104. Thus, there occurs stimulated emission in
response to the incident optical beam, and the incident optical
beam is amplified as it travels from the end surface T1 to the end
surface T2.
[0274] In the construction of FIGS. 8A and 8B, it should be noted
that the anti-reflection coatings 112 and 113 on the end surfaces
T1 and T2 function so as to suppress the laser oscillation in the
Fabri-Perot mode. While the anti-reflecting coatings 112 and 113
are used in the embodiment of FIGS. 8A and 8B for suppressing the
Fabri-Perot mode laser oscillation, other means such as forming
stripe region obliquely to the end surfaces T1 and T2 or forming a
window structure in the vicinity of the optical emission surface
may be used for suppressing the Fabri-Perot mode laser oscillation.
Further, it is also possible to provide an optical absorption
region in the vicinity of the optical emission surface. Further, it
is possible to use any of these means with the anti-reflection
coatings 112 and 113.
[0275] It should be noted that the semiconductor optical modulator
of FIGS. 8A and 8B includes the GaInNAs gain region (quantum well
layer) on the GaAs substrate 101, wherein the GaInNAs crystal layer
grown on a GaAs substrate has a bandgap wavelength of 1.2-1.6
.mu.m. Thus, the gain region shows an optical gain with regard to
the optical radiation having a wavelength of 1.3 .mu.m or 1.55
.mu.m used for optical fiber telecommunication. Further, GaInNAs is
known as a material that can achieve a large conduction band
discontinuity as compared with the valence band when used to form a
heterojunction with a material of AlGaAs system or AlGaInP
system.
[0276] Further, it is possible to form such a GaInNAs layer on a
GaAs substrate, and thus it becomes possible to use a widegap
material such as GaInP or AlGaAs as the cladding layer in
combination with the GaInNAs layer. Thereby, it becomes possible to
secure a large conductive band discontinuity of about 200 meV
between the GaInNAs gain region and the cladding layer. Thus, the
proportion of the electrons causing overflowing from the gain
region to the cladding layer is reduced significantly even in the
case the environmental temperature is increased, and the decrease
of gain associated with the temperature rise is effectively
suppressed. Thereby, the change of optical amplification factor
with the environmental temperature is minimized.
[0277] In the construction of FIGS. 8A and 8B, the material system
of GaInNAs has been used for the material capable of being formed
on the GaAs substrate 101 and simultaneously capable of providing a
gain in the long wavelength band. However, it is also possible to
use any of GaNAs, GaNAsSb or GaInNAsSb for the same purpose with
similar results.
[0278] Further, the construction of FIGS. 8A and 8B can be modified
so as to form a plurality of stripe regions on the same substrate
101. With this, it is possible to form a one-dimensional array of
semiconductor optical amplifier monolithically on a common
substrate.
[0279] FIG. 9 shows another example of the semiconductor optical
amplifier constructed in the form of a surface-emission type
device.
[0280] Referring to FIG. 9, the semiconductor optical amplifier is
constructed on the n-type GaAs substrate 101 and includes the
n-type distributed Bragg reflector 201 of the
GaAs/Al.sub.0.8Ga.sub.0.2As structure formed on the substrate 101,
the lower spacer layer 202 is formed on the distributed Bragg
reflector 201 and the multiple quantum well active layer 203 having
the GaInNAs/GaAs structure is formed on the lower spacer layer 202.
On the multiple quantum well layer 203, the carrier blocking layer
204 of p-type AlGaAs is formed with the composition of
Al.sub.0.2Ga.sub.0.8As, and the p-type GaAs upper spacer layer 205
is grown on the carrier blocking layer 204. Further, the p-type
distributed Bragg reflector 206 of the GaAs/Al.sub.0.8Ga.sub.0.2As
structure is formed on the upper spacer layer 205.
[0281] Here it should be noted that the n-type distributed Bragg
reflector 201R and the p-type distributed Bragg reflector are
formed by the alternate stacking of a high refractive index layer
of GaAs and a low refractive index layer of Al.sub.0.8Ga.sub.0.2As
with the optical thickness of one-quarter of the operational
wavelength.
[0282] Further, it should be noted that the total optical thickness
of the n-type GaAs lower spacer layer 202, the GaInNAs/GaAs
multiple quantum well active layer 203, the p-type Al0.4Ga0.6As
carrier blocking layer 204 and the p-type GaAs upper spacer layer
205 is set so as to become an integer multiple of one-half of the
operational wavelength.
[0283] In the semiconductor optical modulator of FIG. 9, there is
formed a high-resistance region 207 excluding a circular current
injection region, by conducting an ion implantation process of
protons as a current confinement region.
[0284] Further, the p-side electrode 110 is formed on the p-type
distributed Bragg reflector 206, and the n-side electrode 111 is
formed on the bottom surface of the n-type GaAs substrate 101. In
any of the electrodes 110 and 111, the electrode is removed at the
part corresponding to the optical window so as to allow incidence
and exit of the laser beam.
[0285] Thus, the semiconductor optical amplifier of FIG. 9 has a
surface-emission type structure, and thus, the laser beam incident
through the p-side electrode 110 is amplified as it is reflected
back and forth between the p-type distributed Bragg reflector 206
and the n-type distributed Bragg reflector 201 by the GaInNAs/GaAs
multiple quantum well active layer 230 that has a gain with regard
to the wavelength of the incident optical beam. The optical beam
thus amplified is then emitted from the bottom surface of the
n-type GaAs substrate 101 through the optical window formed in the
n-side electrode 111.
[0286] Thus, the semiconductor optical modulator of the present
mode of invention is a resonant-type optical amplifier having a
high gain for the optical wavelength that causes resonance with the
distributed Bragg reflectors 206 and 201. Thereby, the reflectance
of the distributed Bragg reflector 201 is reduced to 70-90% so as
to avoid laser oscillation caused in the optical amplifier.
[0287] It should be noted that the surface-emission type optical
amplifier of FIG. 9 includes the GaInNAs gain region on the GaAs
substrate similarly to the semiconductor optical modulator of FIG.
8. Thus, the optical amplifier of FIG. 9 is also suitable for the
optical amplification of the long-wavelength optical beam of 1.3
.mu.m or 1.55 .mu.m used for optical fiber telecommunication. Thus,
it is possible to secure a large conduction band discontinuity of
200 meV or more between the GaInNAs quantum well layer and the
p-type Al.sub.0.4Ga.sub.0.6As carrier blocking layer 204.
[0288] Thus, there occurs no sudden overflowing of electrons from
the GaInNAs quantum well layer even when the environmental
temperature has increased, and the decrease of gain with increasing
temperature is effectively suppressed. Thereby, the change of
optical amplification factor with the change of environmental
temperature is also suppressed.
[0289] In view of the fact that the semiconductor optical modulator
has a surface-emission type construction, it is not necessary to
form the optical input/output surfaces by a cleaving process. Thus,
it is possible to construct a two-dimensional array of
semiconductor optical amplifiers by using the optical semiconductor
amplifier of the present mode of the invention. Thus, the present
invention is advantageous for realizing parallel integration of the
optical telecommunication lines.
[0290] In the device of FIG. 9, it is also possible to use
construct the semiconductor optical amplifier in the form of a
reflection type device by providing a high reflectance of 99% or
more for the n-type distributed Bragg reflector 201. In this case,
the optical beam incident to the optical window formed in the
electrode 110 is emitted also from the same optical window in the
reversed direction.
[0291] It should be noted that the semiconductor optical amplifier
noted above can be used for the ASE (amplitude spontaneous
emission) optical source. Thus, in the semiconductor optical
amplifier, there is formed a population inversion by injecting
electric current into the gain region while avoiding laser
oscillation by reducing the reflectance of the edge surface, to
which the incoming optical beam is injected, to the level of 1% or
less.
[0292] Thus, the spontaneous optical emission caused in the gain
region is amplified by the stimulated emission and a high power ASW
is obtained. In other words, the semiconductor optical amplifier of
the present invention can be used as the optical source emitting
ASE, by driving the semiconductor optical amplifier device in a
highly injected state while interrupting incidence of optical beam
and simultaneously suppressing the occurrence of laser
oscillation.
[0293] Because the foregoing semiconductor optical amplifier has
the gain region formed of any of the materials of GaNAs, GaInNAs,
GaNAsSb and GaInNAsSb, it is possible to secure a conduction band
discontinuity of 200 meV or more between the gain region and the
cladding layer. Thereby, there occurs no overflowing of electrons
from the gain region into the cladding layer even in the case the
environmental temperature is increased. Thus, the device can
maintain high optical output even in the case the device is driven
at elevated temperatures.
[0294] It should be noted that the tunable laser apparatus
according to the present mode of invention can be constructed on a
GaAs substrate (GaAs single crystal substrate) in the form of
array.
[0295] Thus, in the case no bias current is injected in the
semiconductor optical amplifier, the gain region absorbs the
incident optical beam. In the case a bias current is injected and
an optical beam is supplied to the semiconductor optical amplifier,
there occurs an optical amplification with a gain of 10-20 dB.
Thereby, the semiconductor optical amplifier functions as an
optical gate that controls transmission/interruption of the
incident optical beam in response to the bias current. By arraying
a number of such semiconductor optical modulators on a substrate,
it becomes possible to construct an optical gate array for
selecting a transmission channel of parallel optical signals.
[0296] The gain region of the semiconductor optical amplifier
constituting the optical gate array is constituted by any of the
materials of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb in the case the
optical semiconductor amplifier described before is used. Thus, it
becomes possible to increase the conduction band discontinuity
between the gain region and the cladding layer to 200 mV or more.
Thereby, overflowing of electrons from the gain region to the
cladding layer is effectively suppressed even in the case the
environmental temperature is increased and a high optical
amplification factor is maintained even in the elevated temperature
environment. Thus, it becomes possible to construct an optical gate
array capable of operating without causing degradation of the S/N
ratio of the optical signals passed therethrough and capable of
operating stably with respect to the environmental temperature.
[0297] In the tunable laser diode apparatus of such a construction,
the optical beam produced by the ASE optical source is an ASE beam
characterized by a broad spectrum. Thus, the optical beam thus
produced by the ASE optical source is divided spatially into
respective optical beam components having different wavelengths as
it is guided through a wavelength divide filter. For such a
wavelength divide filter, an arrayed waveguide device may be
used.
[0298] The optical beam components thus passed through the
wavelength divide filter is then directed to the optical gate
array, wherein it should be noted that each optical beam component
incident to the semiconductor optical amplifier has a wavelength
different from the wavelength of other optical beam components and
characterized by a narrow spectrum as a result of the wavelength
selection in the wavelength divide filter. Thus, by selectively
applying a bias current to a selected semiconductor optical
amplifier tuned to a desired wavelength, the optical signal
component of desired wavelength is selectively amplified. The
optical beams other than this selected wavelength are absorbed as
they are guided through the unbiased optical amplifier.
[0299] The optical beam component thus selected by the optical gate
array then causes a resonance in the optical cavity constructed by
the reflectors disposed at the rear edge surface and the front edge
surface of the optical gate array, and thus, there occurs a laser
oscillation. Thus, the original optical beam is divided into
discrete optical beam components in correspondence to the number of
the semiconductor optical amplifiers constituting the optical gate
array.
[0300] The ASE optical that uses the semiconductor optical
amplifiers noted above is operable with high output power at high
temperatures, and thus, the optical gate array described above
operates stably with regard to the environmental temperature. Thus,
by constructing the tunable laser apparatus by using the ASE
optical source and the optical gate array, in which the
semiconductor optical amplifiers are used, it becomes possible to
provide an optical source stable with regard to the change of the
environmental temperature. As such an optical source does not
require exact temperature regulation such as the one achieved by an
electronic cooling system, it is possible to construct the optical
source with low cost.
Embodiment 9
[0301] FIG. 10 is a diagram showing an embodiment of the tunable
laser diode apparatus.
[0302] Referring to FIG. 10, the tunable laser apparatus is
constructed on a Si substrate 606 and includes an ASE radiation
source 601 provided on the Si substrate 606 for producing an
optical beam, wherein there is provided a wavelength divide filter
602 also on the Si substrate 602 for dividing the optical beam
produced by the ASE radiation source 601 into respective optical
beam components. Further, there is provided an optical gate array
603 in the form of a monolithic array of semiconductor optical
amplifiers 604 and an optical combiner 605 for combining the
optical beams passed through the optical gate array 603 into a
single optical waveguide. The optical beam emitted from the optical
combiner 605 is then modulated by the semiconductor optical
modulator 607.
[0303] The tunable laser diode device thus constructed operates as
follows.
[0304] As noted previously, the optical radiation is produced by
the ASE radiation source 601 in the form of an ASE characterized by
a broad optical emission spectrum. During the process of guiding
through the wavelength divide filter 601, the optical beam
components of respective wavelengths are spatially separated. For
the wavelength divide filter 602, it is possible to use an arrayed
waveguide device. The optical beams thus passed through the
wavelength divide filter 602 is then guided to the optical gate
array 603 in which n-channel traveling-wave type semiconductor
optical amplifiers 604 are in the form of an monolithic array.
[0305] The optical beam injected into each of the semiconductor
optical amplifier 604 has a wavelength selected by the wavelength
divide filter 602, and there are optical beams having wavelengths
of .lamda.1-.lamda.n. Thus, by injecting a bias-current selectively
in the optical gate array 603 in correspondence to one of the
wavelengths .lamda.1-.lamda.n, the optical beam component of the
selected wavelength is amplified selectively. The optical beam
components of other wavelengths are absorbed.
[0306] The optical beam component thus selected by the optical gate
array 603 then causes resonance in the optical cavity formed by the
rear edge surface of the ASE radiation source 601 and the front
edge surface of the semiconductor optical amplifier 604 and there
is caused a laser oscillation. Thereby, the optical beam component
of the selected wavelength is divided as a discrete optical beam in
correspondence to the number of the semiconductor optical
modulators 604 constituting the optical gate array 603. The optical
beams emitted from the optical gate array are combined into a
common optical waveguide by the optical combiner 605 and is
subjected to an optical modulation by the semiconductor optical
modulator 607.
[0307] FIGS. 11A and 11B show an embodiment of the ASE radiation
source 601 used in the tunable laser apparatus of FIG. 10, wherein
FIG. 11A shows the ASE radiation source 601 in a front view while
FIG. 11B shows the ASE radiation source in a longitudinal cross
sectional view.
[0308] Referring to FIG. 11A, it can be seen that the ASE radiation
source 601 has a layered structure similar to the one shown in FIG.
8A with regard to the semiconductor optical amplifier.
[0309] At the front end surface T1 formed by a cleaving process,
there is provided an anti-reflection coating 703 having a
reflectance of 0.2% or less, and a high reflection film 702 having
a reflectance of 99% is provided on the rear end surface T1.
[0310] Further, there is formed a stripe region 702, in which the
current injection is made, such that the stripe region 704 has a
front end part bent by an angle of about 10.degree. with respect to
the device end surface in the vicinity of the front end surface
T2.
[0311] FIG. 11C shows the construction of the GaInNAs/GaAs multiple
quantum well structure 701 used for the active layer in the
construction of FIG. 11A.
[0312] Referring to FIG. 11C, the GaInNAs/GaAs multiple quantum
well structure 701 includes four GaInNAs quantum well layers 705a,
705b, 705c and 705d stacked with intervening GaAs barrier layers
706 such that each quantum well layer is vertically sandwiched by a
pair of GaAs barrier layers 706.
[0313] It should be noted that each of the GaInNAs quantum well
layers 705a-705d has a bandgap wavelength different from that of
other GaInNAs quantum well layers. For example, the quantum well
layer 705a may have a bandgap wavelength of 1.20 .mu.m, the quantum
well layer 705b may have a bandgap wavelength of 1.24 .mu.m, the
quantum well layer 705c may have a bandgap wavelength of 1.28
.mu.m, and the quantum well layer 705d may have a bandgap
wavelength of 1.32 .mu.m.
[0314] The ASE radiation source of FIG. 11 uses the semiconductor
optical amplifier explained with reference to FIGS. 8A and 8B.
[0315] Thus, in FIG. 11, there is caused spontaneous emission and
also stimulated emission as a result of recombination of holes and
electrons in the multiple quantum well active layer 701 in response
to injection of forward bias current from the p-side electrode 110
and the n-side electrode 111.
[0316] Because the anti-reflection coating 703 is formed on the
front end surface T1, the resonance of the optical radiation
produced in the multiple quantum well active layer 70 as a result
of multiple reflection is suppressed, and the optical beams is
obtained from the front end surface T1 without causing laser
oscillation. Thereby, the spontaneous optical radiation is
amplified by the population inversion in the gain region and is
emitted as ASE.
[0317] In the case of using a semiconductor optical amplifier as an
ASE radiation source, it is not necessary to inject a signal
optical beam from the rear end surface T1. Thus, the construction
of FIG. 11 uses the high-reflectance film 702 of 99% reflectance at
the rear edge surface T1 such that the ASE is obtained efficiently
at the front end surface T2.
[0318] As indicated in FIG. 11B, the stripe region 704 for current
injection is formed such that the front end part thereof is tilted
by 100 from the normal direction of the end surface T2 in the
vicinity of the end surface T2 used for the optical emission
surface. Thereby, the optical feedback of the optical beam to the
gain region after reflection at the end surface T2 is successfully
minimized and the occurrence of laser oscillation in the optical
cavity between the end surfaces T1 and T2 is suppressed.
[0319] In the ASE optical radiation source of FIG. 11, it should be
noted that the gain region is formed of a GaInNAs quantum well
layer. Thus, a large conduction band discontinuity of 200 meV or
more is secured between the gain region and the
Al.sub.0.4Ga.sub.0.6As cladding layer. Thus, the problem of
overflowing of electrons from the gain region to the cladding layer
is suppressed even when the environmental temperature has
increased, and the population inversion is maintained also in the
case the device is operated in an elevated temperature environment
and a high power ASE is obtained.
[0320] In the ASE optical radiation source of FIG. 11, the four
GaInNAs quantum well layers 705a-705d constituting the multiple
quantum well active layer 701 are formed to have respective,
mutually different bandgap energies. Thus, each of the quantum well
layers 705a-705d has a gain for respective, mutually different
wavelengths.
[0321] By combining GaInNAs quantum well layers of different energy
bandgaps, the multiple quantum well active layer 701 provides a
broad gain band at the wavelength of 1.20-1.32 .mu.m. As the ASE
optical radiation source of FIG. 11 can thus produce the ASE over
the broad wavelength band, the magnitude of wavelength change
attainable in the tunable laser apparatus of FIG. 10 is
increased.
[0322] In the tunable laser apparatus of FIG. 10, it should be
noted that the optical gate array 603 is constructed by integrating
the traveling-wave type semiconductor optical amplifiers 604 shown
in FIGS. 8A and 8B on a GaAs substrate in the form of array. The
number n of the array may be set to 8, for Embodiment.
[0323] In this case, it is possible to select eight wavelengths
from the range of 1.20-1.32 .mu.m. As the optical cavity is formed
by the rear end surface of the ASE radiation source 601 and the
front end surface of the semiconductor optical amplifier 604, there
is provided a low reflection film having a reflectance of about 10%
on the front end surface of the semiconductor optical amplifier
604.
[0324] In the optical gate array 603, the gain region of the
semiconductor optical amplifier 604 is formed of GaInNAs, and thus,
there is secured a large conduction band discontinuity of 200 meV
or more at the interface between the gain region and the
Al.sub.0.4Ga.sub.0.6As cladding layer, and the problem of
overflowing of the electrons from the gain region to the cladding
layer is suppressed even in the case the environmental temperature
is increased. Thereby, a high optical amplification factor is
maintained and the degradation of S/N ratio of the optical signals
passing through the optical gate array is prevented even in high
environmental temperatures.
[0325] Thus, as noted previously, the tunable laser apparatus of
FIG. 10, using the ASE radiation optical source 601 operable with
high output power in high temperature environments and the optical
gate array 603 operable stably with regard to environmental
temperature change, for the active device can form an optical
source stable with regard to environmental temperature change. As
there is no need of providing exact temperature control by way of
an electronic cooling system and the like, the optical source of
the present embodiment can be produced with low cost.
[0326] In the tunable laser apparatus of the present invention, it
should further be noted that the optical beam thus separated by the
wavelength divide filter is modulated by using the EA-type
semiconductor optical modulator. As the optical modulation is thus
achieved by application of electric field rather than injection of
electric current, it is possible to increase the modulation
frequency and the laser apparatus can be operated with very high
modulation frequency.
[0327] By using the EA-type semiconductor optical modulator of the
first mode or second mode of the invention in the tunable laser
apparatus, the degradation of the S/N ratio is suppressed even in
high temperature environment and a high-speed modulation exceeding
10 GHz becomes possible.
[Sixteenth Mode of Invention]
[0328] According to a sixteenth mode, the present invention
provides a multi-wavelength laser apparatus, comprising: an optical
cavity defined by a pair of reflectors; a wavelength divide filter
provided in said optical cavity; a semiconductor optical amplifier
provided in said optical cavity, said semiconductor optical
amplifier selectively amplifying respective optical beam components
of respective wavelengths divided out by said wavelength divide
filter; and a semiconductor optical modulator modulating an
intensity of said optical beam components amplified by said
semiconductor optical amplifier, wherein a semiconductor optical
amplifier of any of first and second modes of the present invention
is used for said semiconductor optical modulator.
[0329] Here, the semiconductor optical amplifier of FIGS. 8A and 8B
or FIG. 9 can be used for the foregoing optical amplifier.
[0330] The optical beam produced by the semiconductor optical
amplifier provided in an optical cavity defined by a pair of
reflectors takes the form of ASE characterized by a broad spectrum
width. The optical beam thus produced is supplied to the wavelength
divide filter and is fed back to the semiconductor optical
amplifier after being guided through the wavelength divide filter.
Here, the optical beam fed back to the semiconductor optical
amplifier is divided spatially into the optical beam components
each having a narrow spectrum. Thus, the optical beam component of
a specific wavelength is amplified selectively.
[0331] By repeating the foregoing, the selected optical beam
component selected by the wavelength divide filter causes a laser
oscillation in the optical cavity. Thus, by providing the optical
semiconductor amplifiers in plural number at the locations where
optical beam components of various wavelengths are obtained, it
becomes possible to construct a multi-wavelength laser apparatus
that oscillates at different wavelengths.
[0332] It is possible to minimize the change of optical
amplification factor with regard to environmental temperature by
using the semiconductor optical amplifier and the semiconductor
optical amplifier maintains a large optical amplification factor at
high temperatures. Thus, it becomes possible to construct a
multi-wavelength laser apparatus stable with regard to the change
of environmental temperature by using the semiconductor laser
amplifier noted before. Such a multi-wavelength laser apparatus can
be constructed with low cost as it can omit the exact temperature
control achievable by way of an expensive electronic cooling
system.
[0333] In the multi-wavelength laser apparatus of the present
invention, it should further be noted that the optical beam thus
separated by the wavelength divide filter is modulated by using the
EA-type semiconductor optical modulator. As the optical modulation
is thus achieved by application of electric field rather than
injection of electric current, it is possible to increase the
modulation frequency and the laser apparatus can be operated with
very high modulation frequency.
[0334] By using the EA-type semiconductor optical modulator of the
first mode or second mode of the invention in the multi-wavelength
laser apparatus, the degradation of the S/N ratio is suppressed
even in high temperature environment and a high-speed modulation
exceeding 10 GHz becomes possible.
[Seventeenth Mode of Invention]
[0335] In a seventeenth mode, the present invention provides a
wavelength-division multiplex optical transmission system
comprising: an optical transmission module transmitting optical
signals of plural wavelengths; an optical fiber transmitting said
optical signals; and an optical receiver module detecting said
optical signals, wherein the multi-wavelength laser apparatus
described before is used for said optical transmission module.
[0336] The art of wavelength-division multiplexing is the
technology of increasing the transmission capacity of an optical
transmission line by transmitting optical signals of different
wavelengths through a single optical fiber. In order to implement
the wavelength-division multiplexing, it is necessary to provide a
multi-wavelength optical source and that it is necessary to provide
such a multi-wavelength optical source with low cost. Thus, the
multi-wavelength laser apparatus explained before is most suitable
for such a multi-wavelength optical source.
[0337] As noted already, the multi-wavelength laser apparatus of
the present invention operates stably in terms of optical output
and modulation characteristics with the change of environmental
temperature. Thus, it does not require exact temperature control
achievable by an expensive electronic cooling system. Thereby, the
multi-wavelength laser apparatus of the present invention can be
produced with low cost. Associated therewith, the optical
transmission system using such a low-cost multi-wavelength laser
apparatus can be constructed with low cost.
Embodiment 10
[0338] FIG. 12 shows the construction of an optical transmission
system of the present invention.
[0339] Referring to FIG. 12, the optical transmission system is
formed of an optical transmission module 801, an optical receiver
module 802 and an optical fiber cable 803 connecting the optical
transmission module 801 and the optical receiver module 802.
[0340] Here, the optical fiber cable 803 may be formed of a
single-mode optical fiber having a quartz core and a quartz
cladding, while the optical transmission module 801 may include a
drive control circuit 805 and a multi-wavelength laser apparatus
804. In such a system, optical signals of different wavelengths are
transmitted through the single optical fiber in the form of
wavelength-multiplexed signal. Further, the optical receiver module
802 includes a receiver unit 806 and a receiver circuit 807.
[0341] In the optical transmission system of such a construction,
the electric signal incident to the optical transmission module 801
is supplied first to the drive control circuit 805, and the drive
control circuit 805 causes the multi-wavelength laser apparatus 804
to oscillate at the respective wavelengths by injecting a drive
current to respective laser diodes. Further, the laser beam
intensity is modulated in response to the electrical signal. The
multi-wavelength laser apparatus thus modulates the laser beams of
different optical wavelengths independently and the optical signals
thus modulated are injected into the single optical fiber cable
803.
[0342] The wavelength-division multiplexed optical signal thus
injected into the optical fiber cable 803 is then guided to the
optical receiver 806, wherein the optical signal is divided into
respective optical signal components of respective wavelengths by a
wavelength divide filter provided therein, and the optical signal
components thus obtained are converted into electrical signals by a
photodiode or an avalanche photodiode. Thereafter, the optical
signals thus obtained are amplified and shaped in the receiver
circuit 807.
[0343] FIG. 13 shows the construction of a multi-wavelength laser
apparatus 804 used in the optical transmission system of FIG.
12.
[0344] Referring to FIG. 13, there is provided a semiconductor
optical amplifier 604 that produces and amplifies ASE. As can be
seen, a number of semiconductor optical amplifiers are integrated
on a common substrate monolithically.
[0345] Further, the multi-wavelength laser apparatus 804 includes a
wavelength divide filter 602 for dividing the optical beam produced
by the semiconductor optical amplifier 604, wherein it can be seen
that there is provided a high reflectance film 901 on the
wavelength divide filter 602 at the side far from the semiconductor
optical amplifier 604. Further, there are provided EA-type
semiconductor optical modulators 902 in correspondence to each of
the semiconductor optical amplifiers 604 for modulating the optical
signal amplified by the semiconductor optical amplifier 604. The
optical signals thus modulated by the optical modulators 902 are
merged at an optical combiner 605 in which the optical signals of
the respective channels are combined into a single optical
waveguide.
[0346] In operation, the ASE produced by the semiconductor
amplifier 604 and having a broad optical spectrum is supplied to
the wavelength divide filter 602 and is reflected back by the high
reflectance film 901 at the other side of the waveguide divider
602. The optical signals are then fed back to the semiconductor
optical amplifier 604 after being guided through the wavelength
divide filter 602.
[0347] Thereby, it should be noted that the optical signals fed
back to the semiconductor optical amplifier 604 are already divided
spatially by the wavelength divide filter 602 and has a narrow
spectrum. Thus, an optical signal of specific wavelength is
amplified selectively in the optical amplifier 604. Because the
front end surface of the semiconductor optical amplifier 604 is
covered with a low reflection film having a reflectance of 10%, the
high reflectance film 901 and the front end surface of the
semiconductor optical amplifier 604 constitutes the optical cavity
in which the laser oscillation takes place.
[0348] The semiconductor optical amplifiers 604 are provided at
locations of the wavelength divide filter 602 wherein the optical
signals of respective wavelengths are obtained. Thus, by causing a
laser oscillation of the optical signals of different wavelengths
by way of optical amplification, the desired multi-wavelength laser
apparatus is obtained. In the Embodiment of FIG. 13, four such
semiconductor optical amplifiers are used and there occurs a laser
oscillation at the wavelengths of 1.20 .mu.m, 1.24 .mu.m, 1.28
.mu.m and 1.32 .mu.m.
[0349] In the multi-wavelength laser apparatus of FIG. 13, the
semiconductor optical amplifier shown in FIGS. 8A and 8B is used
for the optical semiconductor amplifier 604. Thereby, the gain
region is formed of the GaInNAs quantum well layer and a large
conduction band discontinuity of 200 meV or more is achieved
between the gain region and the Al.sub.0.4Ga.sub.0.6As cladding
layer. Thus, there occurs no substantial overflow of electrons from
the gain region to the cladding layer even when the environmental
temperature is increased. Thus, a high optical amplification factor
is maintained also in the case of operating in high temperature
environment, and the laser apparatus operates stably even when
there is caused a change of environmental temperature.
[0350] In the multi-wavelength laser apparatus of FIG. 13, it
should further be noted that the optical beam is modulated by using
the EA-type semiconductor optical modulator 902. As the optical
modulation is thus achieved by application of electric field rather
than injection of electric current, it is possible to increase the
modulation frequency and the laser apparatus can be operated with
very high modulation frequency.
[0351] By using the EA-type semiconductor optical modulator of FIG.
1 operable with the speed of 10-50 GHz in the multi-wavelength
laser apparatus, a very large capacity transmission up to the rate
of 100 Gbit/s is achieved in the optical telecommunication system
of FIG. 12 by modulating the four laser beams of the respective
wavelengths with the speed of 25 GHz.
[0352] The optical telecommunication system of FIG. 12 thus formed
is stable with regard to the change of environmental temperature,
Further, it uses a low-cost construction. Thereby, it is possible
to construct a very large capacity optical transmission system
capable of achieving the bit rate of 100 Gbit/s with a low cost and
high reliability.
[Eighteenth Mode of Invention]
[0353] Next, the fabrication process of the integrated
semiconductor light-emitting device of the present invention will
be explained.
[0354] Before starting detailed description, a brief review will be
made on the discovery made by the inventor of the present invention
in the investigation that constitutes the foundation of the present
mode of the invention.
[0355] FIG. 18 shows the structure of the sample used by the
inventor in the foregoing investigation.
[0356] Referring to FIG. 18, a first semiconductor layer 2
containing Al such as AlAs, AlP, AlGaAs, AlInP, AlGaInP, AlInAs,
AlInAsP, AlGaInAsP, and the like, is formed on a compound
semiconductor substrate 1 of GaAs, InP, or GaP, and a first
intermediate layer 3A free from Al and N is formed on the first
semiconductor layer 2. Further, an active layer 4 containing N such
as GaNAs, GaPN, GaInNAs, GaInNAs is formed on the first
intermediate layer 3A, and a second intermediate layer 3B identical
in composition with the intermediate layer 3A is formed on the
active layer 4. Further, a second semiconductor layer 5 containing
Al similar to the first semiconductor layer 2 is formed on the
intermediate layer 3B. The intermediate layers 3A and 3B may be
formed of GaAs, GaP, InP, GaInP, GaInAs, GaInAsP, and the like. The
active layer 4 includes a multiple quantum well structure formed of
quantum well layers containing N.
[0357] The sample of FIG. 18 was formed by an MOCVD process in an
epitaxial growth apparatus that uses a metal organic Al source such
as TMA (trimethyl aluminum) or TEA (trimethyl aluminum) and a
nitrogen compound source such as DMHy (dimethyl hydrazine) or MMHy
(monomethyl hydrazine) or NH.sub.3.
[0358] FIG. 19 shows the depth profile of nitrogen and oxygen in
the device for the case the cladding layers 2 and 5 are formed by
an AlGaAs layer, the intermediate layers 3A and 3B are formed of
GaAs, and the active layer 4 is formed of the GaInNAs/GaAs double
quantum well structure and that the structure is formed by using a
single MOCVD apparatus. It should be noted that the measurement of
FIG. 19 was conducted under the measurement condition summarized in
Table 1 below by secondary ion mass spectrometry. TABLE-US-00001
TABLE 1 first ion specie Cs+ first acceleration voltage 3.0 kV
sputter rate 0.5 nm/s measurement area 160 .times. 256 .mu.m.sup.2
degree of vacuum <3E-7Pa polarity of measured ion --
[0359] FIG. 19 is referred to.
[0360] It can be seen that there appear two nitrogen peaks in the
active layer 4 in correspondence to the GaInNAs/GaAs double quantum
well structure. Further, it is also noted that an oxygen peak is
detected in the active layer 4. On the other hand, the oxygen
concentration in the intermediate layers 3A and 3B, which are free
from N and Al, is lower in terms of one order as compared with the
oxygen concentration in the active layer 4.
[0361] Further, the depth profile of oxygen measured about the
sample having the construction in which the active layer 4
including therein the GaInNAs/GaAs double quantum well structure is
formed on the cladding layer of GaInP together with the GaAs
intermediate layers 3A and 3B, has revealed that the oxygen
concentration in the active layer 4 is in the background level.
[0362] FIG. 20 shows the depth profile of Al obtained for the same
sample of FIG. 19. The measurement was conducted by the secondary
ion mass spectroscopy similarly to the case of FIG. 19 under the
measurement condition shown in Table 2. TABLE-US-00002 TABLE 2
first ion specie O2+ first acceleration voltage 5.5 kV sputter rate
0.3 nm/s measurement area 60 .mu.mO degree of vacuum <3E-7OPa
polarity of measured ion +
[0363] FIG. 20 is referred to.
[0364] It can be seen that Al is detected in the active layer 4,
which was formed without introducing an Al source material.
Further, it is noted that the Al concentration in the GaAs
intermediate layer 3A or 3B formed adjacent to the Al-containing
cladding layer 2 or 5 is lower than the Al concentration in the
active layer 4 by factor of ten. This indicates that Al in the
active layer 4 has not caused diffusion from the Al-containing
cladding layer 2 or 5 and has substituted Ga in the active layer
4.
[0365] On the other hand, Al was not detected in the active layer
in the case that the N-containing active layer was grown on a
semiconductor layer free from Al such as GaInP.
[0366] By comparing FIG. 20 with FIG. 19, it is noted further that
the two oxygen peaks in FIG. 19 corresponding to the double quantum
well do not coincide with the nitrogen peak but do coincide with
the peak profile of Al shown in FIG. 20. This results indicates
that oxygen in the GaInNAs quantum well layer has been incorporated
into the active layer not with the nitrogen source but with Al in
the form coupled with residual Al that has been incorporated into
the quantum well layer.
[0367] More specifically, the residual Al source material or
residual Al reactant, or residual Al compound or residual Al in the
MOCVD chamber is thought to cause a coupling with an impurity such
as water contained in the nitrogen source compound or
oxygen-containing material remaining in the gas line or reaction
chamber and has been incorporated into the active layer 4 in the
form coupled with oxygen or water.
[0368] Thus, when a semiconductor structure having an Al-containing
semiconductor layer, such as the semiconductor layer 2, is provided
between a substrate and an N-containing active layer as in the case
of FIG. 18 by a continuous MOCVD process using a single epitaxial
apparatus, it is inevitable to avoid incorporation of Al into the
N-containing active layer.
[0369] As Al is incorporated into the active layer 4 in the form
coupled with water contained in the nitrogen compound source or in
the form coupled with oxygen remaining in the gas line or reaction
chamber, such incorporation of Al results simultaneously in
incorporation of oxygen into the active layer 4. Thereby, oxygen
thus incorporated form non-optical recombination levels in the
active layer, and there is caused a decrease of efficiency of
optical emission in the active layer 4.
Embodiment 11
[0370] FIG. 21 shows the construction of an integrated
semiconductor light-emitting device of the present mode of the
invention.
[0371] Referring to FIG. 21, the integrated semiconductor
light-emitting device is constructed on an n-type GaAs substrate
2401 and includes a lower distributed Bragg reflector 2402 of the
n-type GaAs/Al.sub.0.8Ga.sub.0.2As structure formed on the GaAs
substrate 2401.
[0372] After the distributed Bragg reflector 2402 is thus formed,
the growth of the semiconductor layer is interrupted and an
Al-removal process is conducted by conducting a purging process of
the growth chamber, for example such that residual Al source,
residual Al reactance, residual Al compound or residual Al is
removed from the growth chamber or any of the locations in which
there is a chance that these residual materials may contact with
the N compound source material or the impurity contained in the N
compound source material.
[0373] Further, an optical absorption layer 2403 of GaInNAs is
formed on the growth interruption surface of the distributed Bragg
reflector 2402.
[0374] Further, a p-type distributed Bragg reflector 2404 is formed
on the GaInNAs optical absorption layer 2403 and a p-type GaAs
spacer layer 2405 is formed on the p-type distributed Bragg
reflector 2404, and an active layer 2406 of GaInNAs/GaAs multiple
quantum well structure is formed further on the GaAs spacer layer
2405. It should be noted that the multiple quantum well structure
of the active layer 2406 does not contain Al in any of the quantum
well layer or barrier layer.
[0375] On the active layer 2406, an upper spacer layer 2407 of
p-type GaAs is formed, and an upper distributed Bragg reflector
2502 of p-type is formed on the GaAs spacer layer 2407. Further, an
upper distributed Bragg reflector 2408 of n-type is formed on the
spacer layer 2407.
[0376] The layered structure thus formed is subjected to a mesa
etching process and there is formed a pillar shaped mesa structure
such that the mesa structure includes the distributed Bragg
reflector 2408, the active layer 2406 and a part of the distributed
Bragg reflector 2404, and an n-side electrode 2409 having an
optical window is provided on the upper distributed Bragg reflector
2408 forming the top surface of the mesa structure. Further, a
p-side electrode 2410 is formed on the exposed surface of the
distributed Bragg reflector 2502 formed as a result of the mesa
etching process. Further, an n-side bottom electrode 2411 is
provided on the bottom surface of the GaAs substrate 2401.
[0377] Thus, by applying a forward bias across the electrodes 2410
and 2409 in the state no reverse bias voltage is applied across the
electrodes 2410 and 2411, the optical absorption layer 2403 is
transparent and there occurs a laser oscillation at the wavelength
band of 1.3 .mu.m as a result of the optical feedback taking place
between the distributed Bragg reflector 2402 and the distributed
Bragg reflector 2404 as well as the distributed Bragg reflector
2408.
[0378] Thereby, it should be noted that, because of the Al-removal
process conducted after the growth of the GaAs/AlGaAs distributed
Bragg reflector 2402, there occurs no substantial incorporation of
Al, and hence O, into the active layer 2406. Thereby, the laser
diode oscillates efficiently with small threshold of laser
oscillation.
[0379] When a reverse bias voltage is applied across the electrodes
2410 and 2411, on the other hand, the optical absorption caused in
the optical absorption layer 2403 as a result of the quantum
confinement Stark effect effectively reduces the reflectance of the
upper distributed Bragg reflectors 2402, and because of the reduced
optical feedback associated with such a reduction of the
reflectance, there occurs an increase of threshold current, and the
oscillation of the laser diode is stopped.
[0380] In the example of FIG. 21, it can be seen that the optical
absorption layer 403 is provided at the far side from the optical
window in the electrode 2409 with regard to the active layer 2406.
Thus, in the case of integrating the optical modulator with the
surface-emission laser diode, it is not necessary to provide the
optical modulator at the exit side of the optical beam, contrary to
the conventional optical modulator that has to be provided on the
exit path of the optical beam of the laser diode.
[Nineteenth Mode of Invention]
[0381] In a nineteenth mode, the present invention provides a
surface-emission type integrated semiconductor light-emitting
device, comprising: [0382] a GaAs substrate; a surface-emission
laser diode having an optical cavity sandwiched by a lower
distributed semiconductor optical reflector and an upper
distributed semiconductor Bragg reflector in a direction
perpendicular to said GaAs substrate, said optical cavity including
an active layer formed of any of GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb, and an optical modulator comprising an optical
absorption layer formed of any of GaNAs, GaInNAs, GaNAsSb and
GaInNAsSb, said surface-emission laser diode and said optical
modulator being integrated monolithically on said GaAs substrate in
a direction perpendicular to said substrate, said optical modulator
being provided in said optical cavity at a location above said
active layer or inside said upper optical reflector, wherein there
is provided a non-optical recombination elimination layer of a
GaInAsP system between said lower semiconductor distributed
reflector and said optical cavity.
[0383] Here, the non-optical recombination layer is free from Al
and is typically formed of a material such as GaInAsP, GaInP,
GaAsP, and the like. The non-optical recombination layer may
contain other III or V elements such as B, N, Sb, and the like,
except for Al.
[0384] By providing such a non-optical recombination elimination
layer in combination with the Al-removal process noted in the
previous mode of the invention, the problem of non-optical
recombination of carriers, which tends to occur at the surface
formed as a result of the interruption of epitaxial growth
associated with the Al-removal process, due to impurities such as
O, Si, C, and the like segregated to such a growth interruption
surface, is effectively suppressed by blocking the flow of carriers
to such a growth interruption surface by the non-optical
recombination elimination layer. It should be noted that the
non-optical recombination elimination layer has an increased
bandgap as compared with the semiconductor layer constituting the
optical cavity such as the GaAs spacer layer, and the overflow of
the carriers from the optical cavity is effectively blocked before
they reach the growth interruption surface. Thereby, the present
invention can suppress the leakage current and improve the
efficiency of optical emission.
[0385] As such a non-optical recombination layer is free from Al,
there occurs no increase of residual Al concentration even when the
process of formation of the non-optical recombination layer is
conducted after the Al-removal process.
Embodiment 12
[0386] FIG. 22 shows the construction of an integrated
semiconductor light-emitting device according to an embodiment of
the present invention, wherein those parts corresponding to the
parts described previously are designated by the same reference
numerals and the description thereof will be omitted.
[0387] Referring to FIG. 22, the integrated semiconductor
light-emitting device is constructed on the n-type GaAs substrate
2401 and includes the lower distributed Bragg reflector 2402 of the
GaAs/Al.sub.0.8Ga.sub.0.2As structure formed on the GaAs substrate
2401.
[0388] After the distributed Bragg reflector 2402 is thus formed,
the growth of the semiconductor layer is interrupted and an
Al-removal process is conducted by conducting a purging process of
the growth chamber, for example such that residual Al source,
residual Al reactance, residual Al compound or residual Al is
removed from the growth chamber or any of the locations in which
there is a chance that these residual materials may contact with
the N compound source material or the impurity contained in the N
compound source material.
[0389] After the residual Al concentration level is sufficiently
lowered, an n-type GaInP layer 2501 is formed on the distributed
Bragg reflector 2402, and the n-type GaAs spacer layer 2405 is
grown on the growth interruption surface of the distributed Bragg
reflector 2402. Further, the active layer 2406 of GaInNAs/GaAs
multiple quantum well structure is formed on the GaAs spacer layer
2405. It should be noted that the multiple quantum well structure
of the active layer 2406 does not contain Al in any of the quantum
well layer or barrier layer.
[0390] On the active layer 2406, the upper spacer layer 2407 of
p-type GaAs is formed, and an upper distributed Bragg reflector
2502 of p-type is formed on the GaAs spacer layer 2407. Further,
the optical absorption layer 2403 of GaInNAs is formed on the upper
reflector 2502 and a second upper distributed Bragg reflector 2503
of n-type is formed further on the optical absorption layer
2403.
[0391] The layered structure thus formed is subjected to a mesa
etching process and there is formed a pillar shaped mesa structure
such that the mesa structure includes the distributed Bragg
reflector 2503, the optical-absorption layer 2403 and a part of the
distributed Bragg reflector 2502, and an n-side electrode 2409
having an optical window is provided on the distributed Bragg
reflector 2503 forming the top surface of the mesa structure and a
p-side electrode 2410 is formed on the exposed surface of the
distributed Bragg reflector 2502 formed as a result of the mesa
etching process. Further, an n-side bottom electrode 2411 is
provided on the bottom surface of the GaAs substrate 2401.
[0392] Thus, by applying a forward bias across the electrodes 2410
and 2411 in the state no reverse bias voltage is applied across the
electrodes 2409 and 2410, the optical absorption layer 2403 is
transparent and there occurs a laser oscillation as a result of the
optical feedback taking place between the distributed Bragg
reflector 2402 and the distributed Bragg reflector 2502 as well as
the distributed Bragg reflector 2503.
[0393] Thereby, it should be noted that, because of the Al-removal
process conducted after the growth of the GaAs/AlGaAs distributed
Bragg reflector 2402, there occurs no substantial incorporation of
Al, and hence O, into the active layer 2406. Further, existence of
the non-optical recombination elimination layer 2501 on such a
growth interruption surface successfully blocks the carriers to
overflow to the growth interruption surface, and the leakage
current caused by the non-optical recombination of the carriers at
such a growth interruption surface is effectively eliminated.
Thereby, the laser diode oscillates efficiently with small
threshold of laser oscillation.
[0394] When a reverse bias voltage is applied across the electrodes
2409 and 2410, on the other hand, the optical absorption caused in
the optical absorption layer 2403 as a result of the quantum
confinement Stark effect effectively reduces the reflectance of the
upper distributed Bragg reflectors 2502 and 2503, and because of
the reduced optical feedback associated with such a reduction of
the reflectance, there occurs an increase of threshold current, and
the oscillation of the laser diode is stopped.
[Twentieth Mode of Invention]
[0395] In a twentieth mode, the present invention provides a
surface-emission type integrated semiconductor light-emitting
device, comprising: a GaAs substrate; a surface-emission laser
diode having an optical cavity sandwiched by a lower distributed
semiconductor optical reflector and an upper distributed
semiconductor Bragg reflector in a direction perpendicular to said
GaAs substrate, said optical cavity including an active layer
formed of any of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, and an
optical modulator comprising an optical absorption layer formed of
any of GaNAs, GaInNAs, GaNAsSb and GaInNAsSb, said surface-emission
laser diode and said optical modulator being integrated
monolithically on said GaAs substrate in a direction perpendicular
to said substrate, said optical modulator being provided in said
optical cavity at a location below said active layer or inside said
lower optical reflector, wherein there is provided a non-optical
recombination elimination layer of a GaInAsP system between said
lower semiconductor distributed reflector and said optical
absorption layer.
[0396] Similarly as before, the non-optical recombination layer is
free from Al and may be formed by any of GaInAsP, GaInP or
GaAsP.
[0397] In this mode of the invention, too, the non-optical
recombination elimination layer effectively blocks the non-optical
recombination of overflowing carriers from the active layer
2406.
[0398] By providing the optical absorption layer 2403 at the side
of the lower reflector, which is far from the optical window from
which the optical beam is emitted, with respect to the active
layer, a large magnitude of optical modulation becomes possible
with a small change of optical absorption coefficient, in view of
the fact that the reflector used at the opposite side of the
optical window is designed to have a larger reflectance as compared
with the distributed Bragg reflector located at the side of the
optical window. Thereby, the integrated semiconductor optical
device provides an improved S/N ratio of optical modulation.
Embodiment 13
[0399] FIG. 23 shows an example of the integrated semiconductor
optical modulator of the present mode of the invention, wherein
those parts corresponding to the parts described previously are
designated by the same reference numerals and the description
thereof will be omitted.
[0400] Referring to FIG. 23, it can be seen that the active layer
2406 is now provided in the pillar-shaped mesa structure between
the GaAs spacer layers 2405 and 2406, and the optical absorption
layer 2403 forming the optical modulator is located near the lower
distributed Bragg reflector 2402 at the far side of the optical
window formed in the electrode 2409 with regard to the active layer
2406. Further, the non-optical recombination layer 2501 is provided
between the lower distributed Bragg reflector 2402 and the optical
absorption layer 2403.
[0401] Similarly as before, there is conducted an Al-removal
process after the lower distributed Bragg reflector 2402 is formed
by conducting a purging process or evacuation process, and a growth
interruption surface is formed on the top surface of the lower
distributed Bragg reflector 2402. Thus, by providing the widegap,
Al-free non-optical recombination elimination layer 2501 of GaInP
on such a growth interruption surface, the carriers overflowing
from the active layer 2406 to the lower distributed Bragg reflector
2402 is effectively blocked and the problem of increased leakage
current caused by the non-optical recombination of overflowing
carriers is effectively eliminated.
[0402] Further, by conducting the Al-removal process after the
growth of the lower distributed Bragg reflector 2402 and further
forming the non-optical recombination layer 2501 before the growth
of the GaInNAs optical absorption layer 2403, the quality of the
optical absorption layer 2403 is improved and the problem of
breakdown upon application of a large reverse bias voltage is
eliminated successfully. Thereby, the integrated semiconductor
light-emitting device of FIG. 23 shows improved reliability.
[Twenty-First Mode of Invention]
[0403] In a twenty-first mode, the present invention provides an
integrated semiconductor optical modulator similar to the device of
the nineteenth mode or twentieth mode of the invention except that
all the semiconductor layers provided between the active layer and
the optical absorption layer is formed of a material of the GaInAsP
system. Here, it should be noted that the GaInAsP system includes
Al-free materials such as GaAs, GaInP, GaInAsP, GaAsP, GaInAs, and
the like. The material of the GaInAsP may further contain elements
such as B, N, Sb or a dopant element.
[0404] According to the present mode of the invention, there occurs
no increase of Al concentration level in the growth chamber after
the Al-removal process is conducted. Thereby, no Al-removal process
is necessary between the step of forming the optical absorption
layer and the active layer, and thus, no growth interruption
surface is formed. Thus, the efficiency of optical emission is
improved and simultaneously the leakage current of the optical
modulator is suppressed.
Embodiment 14
[0405] FIG. 24 shows the construction of the integrated
semiconductor light-emitting device according to an embodiment of
the present invention, wherein those parts corresponding to the
parts described previously are designated by the same reference
numerals and the description thereof will be omitted.
[0406] Referring to FIG. 24, the integrated semiconductor
light-emitting device has a construction similar to that of FIG. 23
except that the n-type distributed Bragg reflector 2404 of FIG. 23
is formed of an n-type distributed Bragg reflector 2701 having an
alternate repetition of a GaAs high refractive index layer and a
GaInP low refractive index layer having a lattice matching
composition to GaAs.
[0407] In such a structure, there occurs no change of increase of
Al concentration level in the growth chamber after the Al-removal
process is conducted when the lower distributed Bragg reflector
2402 is formed. Therefore, there is no need of conducting another
Al-removal process between the step of forming the optical
absorption layer 2403 and the step of forming the active layer
2406. Thereby, there is no possibility of formation of growth
interruption surface between the optical absorption layer 2403 and
the active layer 2406, and the efficiency of optical emission in
the active layer 2406 is improved while simultaneously minimizing
the leakage current.
Twenty-Second Embodiment
[0408] In a twenty-second mode, the present invention provides an
integrated semiconductor light-emitting device similar to that of
the twenty-first mode of the invention, except that the
semiconductor layer provided between the active layer and the
optical absorption layer has n-type conductivity.
[0409] In a surface-emission laser diode, it is practiced to
provide a current confinement structure by selectively oxidizing an
AlAs layer. By oxidizing the AlAs layer selectively from a lateral
direction, there is formed an insulating AlOx region so as to
surround a non-oxidized AlAs core region, and the electric current
is concentrated to the non-oxidized AlAs core region thus
formed.
[0410] Generally, such an AlAs/AlOx current confinement structure
is provided at the p-type side of the surface-emission laser diode
in view of smaller mobility of holes. More specifically, by
providing such an AlAs/AlOx current confinement structure in the
path of the holes, the lateral spreading of the holes that may take
place after being confined by the current confinement structure but
before being injected into the active layer is minimized as
compared with the case of providing such a current confinement
structure in the path of electrons. In the case of electrons, there
occurs an extensive spreading of electrons once confined by the
AlAs/AlOx current confinement structure as a result of the very
large mobility of electron. Thus, it is necessary to provide the
current confinement structure, and hence the AlAs layer, in the
p-type side of the surface-emission laser diode.
[0411] In the present mode of the invention, the semiconductor
layer provided between the active layer and the optical absorption
layer has the n-type conductivity. Thus, the AlAs layer used for
the current confinement structure is provided at the outer side of
the active layer. With this, the process of forming such an AlAs
layer does not cause the problem of increase of the Al
concentration level at the time of the step of forming the active
layer, as the active layer is formed before the step of forming the
AlAs layer. Thereby, the problem of degradation of the
light-emission efficiency of the active layer is eliminated, in
addition to the feature of forming the current confinement
structure.
[0412] It should be noted that the selective oxidation layer used
for the selective oxidation process for forming the AlOx layer is
not limited to AlAs but an AlGaAs layer may be used as long as the
Al content in the AlGaAs layer is 90% or more.
EXAMPLE 15
[0413] FIG. 25 shows the construction of the integrated
semiconductor light-emitting device according to an embodiment of
the present invention, wherein those parts corresponding to the
parts described previously are designated by the same reference
numerals and the description thereof will be omitted.
[0414] Referring to FIG. 25, the device is substantially identical
with the device of FIG. 14 explained before except that there is
provided an optical recombination elimination layer 2803 of p-type
GaInP and that the active layer 1406 of the GaAs/AlGaAs multiple
quantum well structure is replaced with the active layer 2406
having the GaInNAs/GaAs multiple quantum well structure.
[0415] Thus, after the formation of the p-type lower distributed
Bragg reflector 1402 of the GaAs/AlGaAs structure, the growth of
the semiconductor layers is interrupted and the Al-removal process
is conducted.
[0416] After the Al-removal process, the p-type GaInP non-optical
recombination elimination layer 2803 is formed on the growth
interruption surface of the lower distributed Bragg reflector 1402
thus formed, and the GaInNAs optical absorption layer 1403 is
formed on the non-optical recombination elimination layer 2803.
[0417] As already noted, the AlAs layer 501 is formed after the
GaInNAs active layer 2406 is formed.
[0418] As other aspect of the device of FIG. 25 are already
explained with reference to FIG. 14, further description thereof
will be omitted.
[Twenty-Third Mode of Invention]
[0419] In a twenty-third mode, the present invention provides an
integrated semiconductor light-emitting device as set forth in the
previous mode of the present invention, wherein the semiconductor
optical modulator is disposed inside the distributed Bragg
reflector of the surface-emission laser diode such that the optical
absorption layer is provided in a high refractive index layer of
the distributed Bragg reflector having an optical thickness of 3/4
wavelength at a location offset by a distance of 1/4 wavelength
from the surface of the high refractive index layer at the side of
the active layer.
[0420] When integrating an optical modulator with a
surface-emission laser diode, it is necessary to form the optical
modulator such that the phase matching condition of the laser diode
is not disturbed. In order to satisfy this requirement, the present
mode of the invention forms the optical absorption layer inside a
high refractive index layer having a 3/4 wavelength optical
thickness with an offset from the end surface thereof located at
the side of the active layer.
[0421] By doing so, it should further be noted that the optical
absorption layer is located at the loop of the optical standing
wave formed in the distributed Bragg reflector. Thereby, the
reflectance of the distributed Bragg reflector is modulated
efficiently and the optical modulator can be driven with a small
drive voltage.
[0422] In the distributed Bragg reflector forming a .lamda.-cavity,
the loop of the optical standing wave is located at the interface
of the high refractive index layer and the low refractive index
layer. Thus, when an optical absorption layer is formed in such an
interface, the optical standing wave is disturbed in view of the
fact that the optical absorption layer has a refractive index
larger than the high refractive index layer of the distributed
Bragg reflector.
[0423] Because of the situation noted above, the present invention
provides the optical absorption layer in the high refractive index
layer having the optical thickness of 3/4 wavelength. In this case,
the phase matching condition is easily satisfied.
Embodiment 16
[0424] FIG. 26 shows a part of the n-type GaAs/GaInP distributed
Bragg reflector 2804 used in the present invention, wherein the
distributed Bragg reflector 2804 corresponds to the distributed
Bragg reflector 1404 of FIG. 25.
[0425] Referring to FIG. 26, it can be seen that there is provided
a non-optical recombination elimination layer 2803 of p-type GaInP
in correspondence to the layer 2803 of FIG. 25, and a GaAs layer
2901 is formed as a lower intermediate layer. Further, a
GaInNAs/GaAs multiple quantum well optical absorption layer 2902 is
formed on the intermediate layer 2901 and upper intermediate layer
2903 of GaAs is formed further on the optical absorption layer
2902. On the upper intermediate layer 2903, there are formed a low
refractive index layer 2804a of n-type GaInP and a high refractive
index layer 2804b of n-type GaAs alternately, each with an optical
thickness of one-quarter of the laser oscillation wavelength.
Thereby, it should be noted that the low-refractive index layer
2804a makes a direct contact with the intermediate layer 2903.
[0426] Here, it should be noted that the GaInP non-optical
recombination elimination layer 2803 has an optical thickness of
one quarter of the laser oscillation wavelength, and the total
thickness of the layers 2901, 2902 and 2903 is set to be equal to
three quarter of the laser oscillation wavelength. Further, the
optical absorption layer 2902 is located with an offset from the
surface of the layer 2903 contacting with the GaInP layer 2804a,
which is a surface defining a "3/4 wavelength structure", including
the layers 2901, 2902 and 2903 at the side of the active layer,
with a distance of one quarter of the laser oscillation
wavelength.
[0427] In such a construction of FIG. 26, it should be noted that
the foregoing 3/4 wavelength structure, formed of the layers
2901-2903, in fact has an optical thickness of an integer multiple
of one quarter of the laser oscillation wavelength and functions as
a part of the lower distributed Bragg reflector. Thus, thereby
there is no disturbance on the function of the distributed Bragg
reflector.
[0428] As noted previously, the optical absorption layer 2901 thus
formed is located at the loop of the optical standing wave formed
in the distributed Bragg reflector and can modulate the reflectance
of the reflector efficiently with a minimum driving voltage.
[Twenty-Foruth Mode of Invention]
[0429] In a twenty-fourth mode, the present invention provides an
integrated semiconductor light-emitting device as set forth in the
twenty-third mode of the present invention, wherein there are
provided two repetitions of the low refractive index layer and the
high refractive index layer in the distributed Bragg reflector
between the optical absorption layer and the optical cavity.
[0430] Here, it should be noted that the low refractive index layer
(having a large bandgap) in the foregoing two-period reflector
structure located at the side of the optical cavity functions so as
to block the leakage of carriers overflowing from the GaAs spacer
layer. Thereby, the efficiency of carrier confinement is improved
and the temperature characteristics of the laser diode are
improved.
[0431] On the other hand, the low refractive index layer in the
foregoing two-period reflector structure located at the side of the
optical absorption layer functions so as to block the minority
carriers formed in the optical absorption layer, and thus
suppressing the breakdown.
[0432] In the present mode of the invention, it should further be
noted that an ohmic electrode is provided on the high refractive
index layer sandwiched by a pair of the low refractive index
layers, wherein it should be noted that this ohmic electrode is
used commonly by the surface-emission laser diode for injecting the
drive current and by the optical modulator for applying a
modulation signal. Thus, it will be understood that there are
provided low refractive index layers of widegap material
respectively between the ohmic contact layer and the active layer
and between the ohmic contact layer and the optical absorption
layer, and thus, there is no problem such as the leakage current
flowing directly to the electrode.
[0433] In addition, it can be seen that the optical absorption
layer is provided closest to the optical cavity in the distributed
Bragg reflector in correspondence to the loop of the optical
standing wave formed in the distributed Bragg reflector. Thus, it
is possible to absorb the optical radiation efficiently by the
optical absorption layer.
[0434] It is preferable that the two period distributed Bragg
reflector provided between the optical absorption layer and the
optical cavity is formed of the material system free from Al such
as the GaInAsP system. By using such an Al-free materials, there
occurs no problem of residual Al in the growth chamber and the
Al-removal process can be omitted before the growth of the optical
absorption layer or the active layer.
Embodiment 17
[0435] FIG. 27 shows a part of the integrated semiconductor
light-emitting device of the present mode of the invention in
detail, wherein those parts corresponding to the parts described
previously are designated by the same reference numerals and the
description thereof will be omitted.
[0436] Referring to FIG. 27 showing a layered structure similar to
that of FIG. 26, it should be noted that the p-type lower
distributed Bragg reflector 2804 is formed of a consecutive
stacking of a low refractive index layer 2804a of n-type GaInP
having the one-quarter optical thickness, a high refractive index
layer 2804b of n-type GaAs also having the one-quarter optical
thickness, and a low refractive index layer of n-type GaInP having
the one-quarter optical thickness, thus, there is formed a
distributed Bragg reflector of about two periods, including the
upper intermediate layer 2903 of GaAs in addition to the foregoing
layers 2804a and 2804b, between the optical absorption layer 2902
and the lower GaAs spacer layer 2405.
[0437] In such a structure, the low refractive index layer 2804a of
widegap n-type GaInP located closer to the GaAs spacer layer 2405
effectively blocks the carriers (minority carriers) from causing
overflowing out of the lower GaAs spacer layer 2405, and the
efficiency of carrier confinement into the active layer is
improved. Thereby, the temperature characteristics of the
integrated semiconductor light-emitting device are improved.
[0438] On the other hand, the GaInP low refractive index layer
9804a of the two-period distributed Bragg reflector located closer
to the optical absorption layer 902 effectively blocks the minority
carriers produced in the optical absorption layer 902 and
suppresses the occurrence of breakdown in the optical absorption
layer 902, which is applied with reverse biasing.
[0439] Further, it should be noted the electrode 2409 is formed on
the n-type GaAs high refractive index layer 2804b as the common
electrode for the surface-emission laser diode and the optical
modulator. In such a construction, the active region of the laser
diode such as the layer 2405 is separated from the layer 2804b
carrying the common electrode 2409 by the widegap low refractive
index layer 2804a. Similarly, the optical absorption layer 2902 is
separated from the layer 2804b by the widegap low refractive index
layer 2804a. Thus, the problem of leakage current flowing directly
to the common electrode 2409 is eliminated.
[0440] In the construction of FIG. 27, too, the optical absorption
layer 2902 is provided in correspondence to the loop (third loop
from the active layer 2406) of the optical standing wave formed in
the distributed Bragg reflector. Thus, it is possible to achieve an
effective optical modulation by a small change of optical
absorption coefficient in the optical absorption layer 2902, and
the integrated light-emitting semiconductor device can be driven
with a low modulation voltage.
[Twenty-Fifth Mode of Invention]
[0441] In a twenty-fifth mode, the present invention provides a
modification of the twenty second mode in which there are provided
upper and lower selective-oxidation layers above the active layer
and below the optical absorption layer, excluding the region
between the optical absorption layer and the active layer.
[0442] The selective oxidation layer provided in the p-type region
adjacent to the active layer confines the electric current injected
into the active layer and suppresses the threshold current of the
surface-emission laser diode.
[0443] On the other hand, the selective oxidation layer proved in
the p-type region adjacent to the optical absorption layer confines
the electric field to the part of the optical absorption layer
corresponding to the region of the active layer to which the
injection of the electric current is made as a result of the
current confinement.
[0444] Thus, in such a construction, it is possible to reduce the
bandgap of the optical absorption layer in correspondence to the
part where there is formed a strong lateral intensity distribution
in the surface-emission laser diode, and an efficient optical
absorption is realized.
Embodiment 18
[0445] FIG. 28 shows the construction of an integrated
semiconductor light-emitting device according to the present mode
of the invention, wherein those parts corresponding to the parts
described previously are designated by the same reference numerals
and the description thereof will be omitted.
[0446] Referring to FIG. 28, the semiconductor device has a layered
structure similar to that of the device of FIG. 25 except that
there is formed a selective oxidation layer 3101 of AlAs between
the p-type GaAs/AlGaAs distributed Bragg reflector 1402 and the
non-optical recombination elimination layer 2803 of GaInP.
[0447] The layered structure thus formed is subjected to a mesa
etching process to form a structure two-step pillar structure
including a first pillar in which the layers 1404-501 are included
and a second, larger pillar in which the layers 1402-1404 are
included.
[0448] In the first pillar, the lateral surface of the AlAs
selective oxidation layer 501 is exposed and the AlOx insulation
region 509 is formed in the layer 501 so as to surround a core part
of the AlAs layer 501 by applying a selective oxidation process
such that the oxidation process proceeds from the exposed lateral
surface toward the interior of the AlAs selective oxidation layer
501.
[0449] In the second pillar, on the other hand, the lateral surface
of the AlAs selective oxidation layer 3101 is exposed and an AlOx
insulation region 2807 is formed in the AlAs layer 3101 by applying
a selective oxidation process such that the oxidation process
proceeds laterally from the foregoing exposed lateral surface
toward the central core region of the AlAs layer 3101.
[0450] When forming the integrated semiconductor light-emitting
device, it is preferable to conduct the lateral oxidation process
for forming the AlOx regions 509 and 2807 simultaneously.
[0451] In the construction of FIG. 28, it should be noted that the
growth of the semiconductor layer is stopped after the AlAs layer
3101 is formed and the Al-removal process explained before is
conducted for reducing residual Al from the growth chamber.
Further, by providing the GaInP non-optical recombination
elimination layer 2803 on the growth interruption surface thus
formed, the carriers are blocked from escaping to the growth
interruption surface and the problem of non-optical recombination
of carriers is suppressed effectively.
[0452] Further, the present invention is not limited to the
embodiments described heretofore, but various variations and
modifications may be made without departing from the scope of the
invention.
[0453] For example, it is possible to construct an optical
transmission system by using the integrated semiconductor
light-emitting device of the eighteenth through twenty-fifth mode
of the present invention similarly to the construction of FIG. 12
explained before.
[0454] The present invention is based on Japanese priority patent
applications 2001-069816 filed on Mar. 13, 2001, 2001-070289 filed
on Mar. 13, 2001, 2001-323209 filed on Oct. 22, 2001, 2002-009834
filed on Jan. 18, 2002 and 2002-044303 filed on Feb. 21, 2002, the
entire contents thereof are incorporated herein as reference.
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