U.S. patent application number 11/012078 was filed with the patent office on 2005-12-29 for apparatus utilizing latching micromagnetic switches.
This patent application is currently assigned to Magfusion, Inc.. Invention is credited to Ruan, Meichun, Shen, Jun, Wheeler, Charles.
Application Number | 20050285703 11/012078 |
Document ID | / |
Family ID | 23121206 |
Filed Date | 2005-12-29 |
United States Patent
Application |
20050285703 |
Kind Code |
A1 |
Wheeler, Charles ; et
al. |
December 29, 2005 |
Apparatus utilizing latching micromagnetic switches
Abstract
An apparatus includes an electrical device and a latching
micromagnetic switch that controls energy flow through the
electrical device. The latching micromagnetic switch includes a
cantilever, a permanent magnet, and a coil configured to latch the
latching micromagnetic switch in one of two positions each time
energy passes through the coil. The electrical device and the
latching micromagnetic switch can be integrated on a same
substrate. Otherwise, the electrical device and the latching
micromagnetic switch can be located on separate substrates and
coupled together. The electrical device can be a circuit, a filter,
an antenna, a transceiver, or the like.
Inventors: |
Wheeler, Charles; (Paradise
Valley, AZ) ; Shen, Jun; (Phoenix, AZ) ; Ruan,
Meichun; (Tempe, AZ) |
Correspondence
Address: |
STERNE, KESSLER, GOLDSTEIN & FOX PLLC
1100 NEW YORK AVENUE, N.W.
WASHINGTON
DC
20005
US
|
Assignee: |
Magfusion, Inc.
|
Family ID: |
23121206 |
Appl. No.: |
11/012078 |
Filed: |
December 15, 2004 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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11012078 |
Dec 15, 2004 |
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|
10147918 |
May 20, 2002 |
|
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60291651 |
May 18, 2001 |
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Current U.S.
Class: |
335/78 |
Current CPC
Class: |
H01H 2050/007 20130101;
H01H 50/005 20130101 |
Class at
Publication: |
335/078 |
International
Class: |
H01H 051/22 |
Claims
1-27. (canceled)
28. A system comprising: N branches including an electrical device
in each, wherein n is a positive integer of 1 or greater; a
latching micromagnetic switch system that controls energy flow to
each branch, such that only the electrical device in the branch
connected to the latching micromagnetic switch system operates, the
latching micromagnetic switch system having one or more latching
micromagnetic switches, each including, a cantilever, a permanent
magnet, and a coil configured to latch said latching micromagnetic
switch in one of two positions each time energy passes through the
coil:
29. The system of claim 28, wherein the latching micromagnetic
switch system comprises: a first one of the latching micromagnetic
switches that is coupled to a first side of each of the branches;
and a second one of the latching micromagnetic switches that is
coupled to a second side of each of the branches.
30. The system of claim 29, wherein: the first one of the latching
micromagnetic switches is a 1-input-N-output switch; and the second
one of the latching micromagnetic switches is a N-input-1-output
switch.
31. The system of claim 28, wherein the latching micromagnetic
switch system comprises: N first ones of the latching micromagnetic
switches each coupled to a first side of respective ones of the
branches; and N second ones of the latching micromagnetic switches,
each coupled to a second side of respective ones of the
branches.
32. The system of claim 28, wherein N is equal to or greater than 2
and the electrical devices are filters in a telephone having
various frequency channels, each frequency being set using each
respective one of the filters, such that a desired one of the
frequency channels receives a signal corresponding to which of the
branches is connected to the latching micromagnetic switch
system.
33. An apparatus comprising: an electrical device; and a latching
micromagnetic switch that controls energy flow to the electrical
device to effectively turn the electrical device at least one of ON
and OFF, the latching micromagnetic switch including, a magnet
proximate to a substrate, the magnet producing a first magnetic
field; a cantilever having a magnetic material and a longitudinal
axis, the magnetic material making the cantilever sensitive to the
first magnetic field, which is approximately perpendicular to the
longitudinal axis, the cantilever rotating between a first and
second state based on the first magnetic field producing a torque
in the magnetic material of the cantilever, the torque maintaining
the cantilever in one of the first and second states; a conductor
that conducts a current, the current inducing a torque in the
cantilever based on a second magnetic field, a component of the
second magnetic field that is parallel to the longitudinal axis
adjusts the direction of the torque produced by the first magnetic
field in the magnetic material of the cantilever, such that the
conductor switches the cantilever between the first and second
states.
34. A system comprising: N branches including an electrical device
in each, wherein N is a positive integer of 1 or greater; a
latching micromagnetic switch system that controls energy flow to
each branch, such that only the electrical device in the branch
connected to the latching micromagnetic switch system operates, the
latching micromagnetic switch system having one or more latching
micromagnetic switches, each including, a magnet proximate to a
substrate, the magnet producing a first magnetic field; a
cantilever having a magnetic material and a longitudinal axis, the
magnetic material making the cantilever sensitive to the first
magnetic field, which is approximately perpendicular to the
longitudinal axis, the cantilever rotating between a first and
second state based on the first magnetic field producing a torque
in the magnetic material of the cantilever that maintains the
cantilever in one of the first and second states; and a conductor
that conducts a current, the current induces a torque in the
cantilever based on a second magnetic field, a component of the
second magnetic field that is parallel to the longitudinal axis
adjusts the direction of the torque produced by the first magnetic
field in the magnetic material of the cantilever such that the
conductor switches the cantilever between the first and second
states.
35. A system, comprising: an electrical device; and a latching
micromagnetic switch that controls energy flow to the electrical
device to effectively turn the electrical device at least one of ON
and OFF, the latching micromagnetic switch including, a cantilever
having a longitudinal axis and including a magnetic layer; a
permanent magnet that applies a first magnetic field in a direction
substantially perdendicular to said longitudinal axis; and a coil
that generates a second magnetic field by passing energy through
the coil, wherein said second magnetic field includes a component
along said longitudinal axis, such that a magnetization direction
of said magnetic layer is affected, and wherein when energy is not
passed through the coil, said cantilever remains latched in one of
two positions due to torque created through interaction of said
first magnetic field and the magnetization direction of said
magnetic layer of said cantilever.
Description
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of U.S. Ser. No.
10/147,918, filed May 20, 2002, which claims priority under 35
U.S.C. .sctn. 119(e) to U.S. Prov. Patent App. No. 60/291,651,
filed May 18, 2001, which are both incorporated by reference herein
in their entireties.
[0002] The application is related to U.S. application Ser. No.
10/147,915, entitled, "MICROMAGNETIC LATCHING SWITCH PACKAGING,"
filed May 20, 2002, which is incorporated by reference herein in
its entirety.
BACKGROUND OF THE INVENTION
[0003] 1. Field of the Invention
[0004] The present invention relates to an electrical apparatus
having an electronic device with its energy flow controlled by
switches.
[0005] 1. Background Art
[0006] Switches are typically electrically controlled two-state
devices that open and close contacts to effect operation of devices
in an electrical or optical circuit. Relays, for example, typically
function as switches that activate or deactivate portions of
electrical, optical or other devices. Relays are commonly used in
many applications including telecommunications, radio frequency
(RF) communications, portable electronics, consumer and industrial
electronics, aerospace, and other systems. More recently, optical
switches (also referred to as "optical relays" or simply "relays"
herein) have been used to switch optical signals (such as those in
optical communication systems) from one path to another.
[0007] While conventional relays are mechanical or solid-state
devices, recent developments in micro-electro-mechanical systems
(MEMS) technologies and microelectronics manufacturing have made
new types of micro electrostatic and micromagnetic relays possible.
Such micromagnetic relays typically include an electromagnet that
energizes an armature to make or break an electrical contact. When
the magnet is de-energized, a spring or other mechanical force
typically restores the armature to a quiescent position. Such
relays typically exhibit a number of marked disadvantages, however,
in that they generally exhibit only a single stable output (i.e.,
the quiescent state) and they are not latching (i.e., they do not
retain a constant output as power is removed from the relay).
Moreover, the spring required by conventional micromagnetic relays
may degrade or break over time.
[0008] Non-latching micromagnetic relay switches are known. Such
relays include a permanent magnet and an electromagnet for
generating a magnetic field that intermittently opposes the field
generated by the permanent magnet. The replay must consume power in
the electromagnet to maintain at least one of the output states.
Moreover, the power required to generate the opposing field would
be significant, thus making the relay less desirable for use in
space, portable electronics, and other applications that demand low
power consumption.
[0009] The basic elements of a micromagnetic latching switch
include a permanent magnet, a substrate, a coil, and a cantilever
at least partially made of soft magnetic materials. In its optimal
configuration, the permanent magnet produces a static magnetic
field that is relatively perpendicular to the horizontal plane of
the cantilever. However, the magnetic field lines produced by a
permanent magnet with a typical regular shape (disk, square, etc.)
are not necessarily perpendicular to a plane, especially at the
edge of the magnet. Then, any horizontal component of the magnetic
field due to the permanent magnet can either eliminate one of the
bistable states or greatly increase the current that is needed to
switch the cantilever from one state to the other. Careful
alignment of the permanent magnet relative to the cantilever so as
to locate the cantilever in the right spot of the permanent magnet
field (usually near the center) will permit bi-stability and
minimize switching current. Nevertheless, high-volume production of
the switch can become difficult and costly if the alignment error
tolerance is small.
[0010] A bi-stable, latching switch that has a very low series
resistance value and that does not require power to hold the state
is therefore desired. Such a switch should also be reliable, simple
in design, low-cost and easy to manufacture, and should be useful
in optical and/or electrical environments.
BRIEF SUMMARY OF THE INVENTION
[0011] The latching micromagnetic switch of the present invention
can be used in a plethora of products including household and
industrial appliances, consumer electronics, military hardware,
medical devices and vehicles of all types, just to name a few broad
categories of goods. The latching micromagnetic switch of the
present invention has the advantages of compactness, simplicity of
fabrication, and has good performance at high frequencies.
[0012] Embodiments of the present invention provide an apparatus
including an electrical device and a latching micromagnetic switch
that controls energy flow through the electrical device. The
latching micromagnetic switch includes a cantilever, a permanent
magnet, and a coil configured to latch the latching micromagnetic
switch in one of two positions each time energy passes through the
coil.
[0013] In some embodiments the electrical device and the latching
micromagnetic switch are integrated on a same substrate.
[0014] In some embodiments the electrical device and the latching
micromagnetic switch are located on separate substrates and coupled
together.
[0015] Other embodiments of the present invention provide an
electrical apparatus comprising an electrical device and a latching
micromagnetic switch. The switch includes a dual-layer cantilever,
an embedded coil, and a permanent magnet.
[0016] Other embodiments of the present invention provide an
electrical apparatus comprising a plurality of filters and a
plurality of pairs of latching micromagnetic switches. Each one of
the pairs of the micromagnetic switches is positioned such that a
first switch in the pair of switches is at an input to a
corresponding one of the plurality of filters and a second switch
in the pair of switches is at an output of the corresponding one of
the plurality of filters.
[0017] Other embodiments of the present invention provide an
electrical apparatus comprising a transceiver having a transmit
differential pair and a receive differential pair, a first latching
micromagnetic switch that controls energy flowing through the
transmit differential pair, and a second latching micromagnetic
switch that controls energy flowing through the receive
differential pair.
[0018] Other embodiments of the present invention provide an
electrical apparatus comprising an antenna having multiple
conductive traces and a plurality of latching micromagnetic
switches. The plurality of switches couple adjacent ones of the
multiple conductive traces to control energy flow through the
antenna to tune the antenna.
[0019] An advantage of embodiments of the present invention is that
they provide a bi-stable, latching switch that has a very low
impedance value and that does not require power to hold the
states.
[0020] Further embodiments, features, and advantages of the present
inventions, as well as the structure and operation of the various
embodiments of the present invention, are described in detail below
with reference to the accompanying drawings.
BRIEF DESCRIPTION OF THE FIGURES
[0021] The accompanying drawings, which are incorporated herein and
form a part of the specification, illustrate the present invention
and, together with the description, further serve to explain the
principles of the invention and to enable a person skilled in the
pertinent art to make and use the invention.
[0022] FIGS. 1A and 1B are side and top views, respectively, of an
exemplary embodiment of a switch.
[0023] FIG. 2 illustrates the principle by which bi-stability is
produced.
[0024] FIG. 3 illustrates the boundary conditions on the magnetic
field (H) at a boundary between two materials with different
permeability (m1>>m2).
[0025] FIG. 4A-4B shows the computer simulation of magnetic flux
distributions, according to the present invention.
[0026] FIGS. 5A-5C show extracted horizontal components (Bx) of the
magnetic flux in FIG. 4.
[0027] FIGS. 6A and 6B show a top view and a side view,
respectively, of a micromagnetic latching switch 600 with relaxed
permanent magnet alignment according to an aspect of the present
invention.
[0028] FIGS. 7 and 8 show further embodiments of the micromagnetic
latching switch according to the present invention.
[0029] FIGS. 9A and 9B show a top view and a side view,
respectively, of a micromagnetic latching switch with additional
features of the present invention.
[0030] FIG. 10 illustrates an apparatus including a device and a
latching micromagnetic switch according to embodiments of the
present invention.
[0031] FIGS. 11-12 illustrate a portion of an apparatus including a
filter and two latching micromagnetic switches according to
embodiments of the present invention.
[0032] FIGS. 13A, 13B, 14A, 14B, and 15 illustrate a portion of an
apparatus including a plurality of filters and a plurality of
latching micromagnetic switches according to embodiments of the
present invention.
[0033] FIG. 16 illustrates a portion of an apparatus including an
antenna with multiple conductive traces and multiple latching
micromagnetic switches according to embodiments of the present
invention.
[0034] FIG. 17 illustrates a portion of an apparatus including a
transceiver and antenna coupled via two latching micromagnetic
switches according to embodiments of the present invention.
[0035] FIG. 18 illustrates a portion of system using a
micromagnetic switch to control power supply to electronic devices
and/or circuits.
[0036] The present invention will now be described with reference
to the accompanying drawings. In the drawings, like reference
numbers indicate identical or functionally similar elements.
Additionally, the left-most digit(s) of a reference number
identifies the drawing in which the reference number first
appears.
DETAILED DESCRIPTION OF THE INVENTION
[0037] Introduction
[0038] It should be appreciated that the particular implementations
shown and described herein are examples of the invention and are
not intended to otherwise limit the scope of the present invention
in any way. Indeed, for the sake of brevity, conventional
electronics, manufacturing, MEMS technologies and other functional
aspects of the systems (and components of the individual operating
components of the systems) may not be described in detail herein.
Furthermore, for purposes of brevity, the invention is frequently
described herein as pertaining to a micro-electronically-machined
relay for use in electrical or electronic systems. It should be
appreciated that many other manufacturing techniques could be used
to create the relays described herein, and that the techniques
described herein could be used in mechanical relays, optical relays
or any other switching device. Further, the techniques would be
suitable for application in electrical systems, optical systems,
consumer electronics, industrial electronics, wireless systems,
space applications, or any other application.
[0039] The terms, chip, integrated circuit, monolithic device,
semiconductor device, and microelectronic device, are often used
interchangeably in this field. The present invention is applicable
to all the above as they are generally understood in the field.
[0040] The terms metal line, interconnect line, trace, wire,
conductor, signal path and signaling medium are all related. The
related terms listed above, are generally interchangeable, and
appear in order from specific to general. In this field, metal
lines are sometimes referred to as traces, wires, lines,
interconnect or simply metal. Metal lines, generally gold (Au),
aluminum (Al), copper (Cu) or an alloy of Al and Cu, are conductors
that provide signal paths for coupling or interconnecting,
electrical circuitry. Conductors other than metal are available in
microelectronic devices. Materials such as doped polysilicon, doped
single-crystal silicon (often referred to simply as diffusion,
regardless of whether such doping is achieved by thermal diffusion
or ion implantation), titanium (Ti), molybdenum (Mo), and
refractory metal suicides are examples of other conductors.
[0041] The terms contact and via, both refer to structures for
electrical connection of conductors from different interconnect
levels. These terms are sometimes used in the art to describe both
an opening in an insulator in which the structure will be
completed, and the completed structure itself. For purposes of this
disclosure contact and via refer to the completed structure.
[0042] The term vertical, as used herein, means substantially
orthogonal to the surface of a substrate. Moreover, it should be
understood that the spatial descriptions (e.g., "above", "below",
"up", "down", "top", "bottom", etc.) made herein are for purposes
of illustration only, and that practical latching relays can be
spatially arranged in any orientation or manner.
[0043] The above-described micromagnetic latching switch is further
described in international patent publications WO0157899 (titled
Electronically Switching Latching Micromagnetic Relay And Method of
Operating Same), which claims priority to U.S. Pat. No. 6,469,602,
and WO0184211 (titled Electronically Micromagnetic latching
switches and Method of Operating Same), which claims priority to
U.S. Pat. No. 6,496,612, to Shen et al. These patent publications
provide a thorough background on micromagnetic latching switches
and are incorporated herein by reference in their entirety.
Moreover, the details of the switches disclosed in WO0157899 and
WO0184211 are applicable to implement the switch embodiments of the
present invention as described below.
[0044] Overview of a Latching Switch
[0045] FIGS. 1A and 1B show side and top views, respectively, of a
latching switch. The terms switch and device are used herein
interchangeably to described the structure of the present
invention. With reference to FIGS. 1A and 1B, an exemplary latching
relay 100 suitably includes a magnet 102, a substrate 104, an
insulating layer 106 housing a conductor 114, a contact 108 and a
cantilever (moveable element) 112 positioned or supported above
substrate 104 by a staging layer 110.
[0046] Magnet 102 is any type of magnet such as a permanent magnet,
an electromagnet, or any other type of magnet capable of generating
a magnetic field H.sub.0 134, as described more fully below. By way
of example and not limitation, the magnet 102 can be a model
59-P09213T001 magnet available from the Dexter Magnetic
Technologies corporation of Fremont, Calif., although of course
other types of magnets could be used. Magnetic field 134 can be
generated in any manner and with any magnitude, such as from about
1 Oersted to 10.sup.4 Oersted or more. The strength of the field
depends on the force required to hold the cantilever in a given
state, and thus is implementation dependent. In the exemplary
embodiment shown in FIG. 1, magnetic field H.sub.0 134 can be
generated approximately parallel to the Z axis and with a magnitude
on the order of about 370 Oersted, although other embodiments will
use varying orientations and magnitudes for magnetic field 134. In
various embodiments, a single magnet 102 can be used in conjunction
with a number of relays 100 sharing a common substrate 104.
[0047] Substrate 104 is formed of any type of substrate material
such as silicon, gallium arsenide, glass, plastic, metal or any
other substrate material. In various embodiments, substrate 104 can
be coated with an insulating material (such as an oxide) and
planarized or otherwise made flat. In various embodiments, a number
of latching relays 100 can share a single substrate 104.
Alternatively, other devices (such as transistors, diodes, or other
electronic devices) could be formed upon substrate 104 along with
one or more relays 100 using, for example, conventional integrated
circuit manufacturing techniques. Alternatively, magnet 102 could
be used as a substrate and the additional components discussed
below could be formed directly on magnet 102. In such embodiments,
a separate substrate 104 may not be required.
[0048] Insulating layer 106 is formed of any material such as oxide
or another insulator such as a thin-film insulator. In an exemplary
embodiment, insulating layer is formed of Probimide 7510 material.
Insulating layer 106 suitably houses conductor 114. Conductor 114
is shown in FIGS. 1A and 1B to be a single conductor having two
ends 126 and 128 arranged in a coil pattern. Alternate embodiments
of conductor 114 use single or multiple conducting segments
arranged in any suitable pattern such as a meander pattern, a
serpentine pattern, a random pattern, or any other pattern.
Conductor 114 is formed of any material capable of conducting
electricity such as gold, silver, copper, aluminum, metal or the
like. As conductor 114 conducts electricity, a magnetic field is
generated around conductor 114 as discussed more fully below.
[0049] Cantilever (moveable element) 112 is any armature,
extension, outcropping or member that is capable of being affected
by magnetic force. In the embodiment shown in FIG. 1A, cantilever
112 suitably includes a magnetic layer 118 and a conducting layer
120. Magnetic layer 118 can be formulated of permalloy (such as
NiFe alloy) or any other magnetically sensitive material.
Conducting layer 120 can be formulated of gold, silver, copper,
aluminum, metal or any other conducting material. In various
embodiments, cantilever 112 exhibits two states corresponding to
whether relay 100 is "open" or "closed", as described more fully
below. In many embodiments, relay 100 is said to be "closed" when a
conducting layer 120, connects staging layer 110 to contact 108.
Conversely, the relay may be said to be "open" when cantilever 112
is not in electrical contact with contact 108. Because cantilever
112 can physically move in and out of contact with contact 108,
various embodiments of cantilever 112 will be made flexible so that
cantilever 112 can bend as appropriate. Flexibility can be created
by varying the thickness of the cantilever (or its various
component layers), by patterning or otherwise making holes or cuts
in the cantilever, or by using increasingly flexible materials.
[0050] Alternatively, cantilever 112 can be made into a "hinged"
arrangement (such as that described below in conjunction with FIG.
12). Although of course the dimensions of cantilever 112 can vary
dramatically from implementation to implementation, an exemplary
cantilever 112 suitable for use in a micromagnetic relay 100 can be
on the order of 10-1000 microns in length, 1-40microns in
thickness, and 2-600 microns in width. For example, an exemplary
cantilever in accordance with the embodiment shown in FIG. 1 can
have dimensions of about 600 microns.times.10 microns.times.50
microns, or 1000 microns.times.600 microns.times.25 microns, or any
other suitable dimensions.
[0051] Contact 108 and staging layer 110 are placed on insulating
layer 106, as appropriate. In various embodiments, staging layer
110 supports cantilever 112 above insulating layer 106, creating a
gap 116 that can be vacuum or can become filled with air or another
gas or liquid such as oil. Although the size of gap 116 varies
widely with different implementations, an exemplary gap 116 can be
on the order of 1-100 microns, such as about 20 microns, Contact
108 can receive cantilever 112 when relay 100 is in a closed state,
as described below, Contact 108 and staging layer 110 can be formed
of any conducting material such as gold, gold alloy, silver,
copper, aluminum, metal or the like. In various embodiments,
contact 108 and staging layer 110 are formed of similar conducting
materials, and the relay is considered to be "closed" when
cantilever 112 completes a circuit between staging layer 110 and
contact 108. In certain embodiments wherein cantilever 112 does not
conduct electricity, staging layer 110 can be formulated of
non-conducting material such as Probimide material, oxide, or any
other material. Additionally, alternate embodiments may not require
staging layer 110 if cantilever 112 is otherwise supported above
insulating layer 106.
[0052] Principle of Operation of a Micromagnetic Latching
Switch
[0053] When it is in the "down" position, the cantilever makes
electrical contact with the bottom conductor, and the switch is
"on" (also called the "closed" state). When the contact end is
"up", the switch is "off" (also called the "open" state). These two
stable states produce the switching function by the moveable
cantilever element. The permanent magnet holds the cantilever in
either the "up" or the "down" position after switching, making the
device a latching relay. A current is passed through the coil
(e.g., the coil is energized) only during a brief (temporary)
period of time to transition between the two states.
[0054] (i) Method to Produce Bi-Stability
[0055] The principle by which bi-stability is produced is
illustrated with reference to FIG. 2. When the length L of a
permalloy cantilever 102 is much larger than its thickness t and
width (w, not shown), the direction along its long axis L becomes
the preferred direction for magnetization (also called the "easy
axis"). When a major central portion of the cantilever is placed in
a uniform permanent magnetic field, a torque is exerted on the
cantilever. The torque can be either clockwise or counterclockwise,
depending on the initial orientation of the cantilever with respect
to the magnetic field. When the angle (.alpha.) between the
cantilever axis (.xi.) and the external field (H.sub.0) is smaller
than 90.degree., the torque is counterclockwise. When .alpha. is
larger than 90.degree., the torque is clockwise. The bidirectional
torque arises because of the bidirectional magnetization (i.e., a
magnetization vector "m" points one direction or the other
direction, as shown in FIG. 2) of the cantilever (m points from
left to right when .alpha.<90.degree., and from right to left
when .alpha.>90.degree.). Due to the torque, the cantilever
tends to align with the external magnetic field (H.sub.0). However,
when a mechanical force (such as the elastic torque of the
cantilever, a physical stopper, etc.) preempts to the total
realignment with H.sub.0, two stable positions ("up" and "down")
are available, which forms the basis of latching in the switch.
[0056] (ii) Electrical Switching
[0057] If the bidirectional magnetization along the easy axis of
the cantilever arising from H.sub.0 can be momentarily reversed by
applying a second magnetic field to overcome the influence of
(H.sub.0), then it is possible to achieve a switchable latching
relay. This scenario is realized by situating a planar coil under
or over the cantilever to produce the required temporary switching
field. The planar coil geometry was chosen because it is relatively
simple to fabricate, though other structures (such as a wraparound,
three-dimensional type) are also possible. The magnetic field
(Hcoil) lines generated by a short current pulse loop around the
coil. It is mainly the .xi.-component (along the cantilever, see
FIG. 2) of this field that is used to reorient the magnetization
(magnetization vector "m") in the cantilever. The direction of the
coil current determines whether a positive or a negative .xi.-field
component is generated. Plural coils can be used. After switching,
the permanent magnetic field holds the cantilever in this state
until the next switching event is encountered. Since the
.xi.-component of the coil-generated field (Hcoil-.xi.) only needs
to be momentarily larger than the .xi.-component
[H.sub.0.xi..about.H.sub.0 cos(.alpha.)=H.sub.0 sin(.phi.),
.alpha.=90.degree.-.phi.] of the permanent magnetic field and .phi.
is typically very small (e.g., .phi..ltoreq.5.degree.), switching
current and power can be very low, which is an important
consideration in micro relay design.
[0058] The operation principle can be summarized as follows: A
permalloy cantilever in a uniform (in practice, the field can be
just approximately uniform) magnetic field can have a clockwise or
a counterclockwise torque depending on the angle between its long
axis (easy axis, L) and the field. Two bistable states are possible
when other forces can balance die torque. A coil can generate a
momentary magnetic field to switch the orientation of magnetization
(vector m) along the cantilever and thus switch the cantilever
between the two states.
[0059] Relaxed Alignment of Magnets
[0060] To address the issue of relaxing the magnet alignment
requirement, the inventors have developed a technique to create
perpendicular magnetic fields in a relatively large region around
the cantilever. The invention is based on the fact that the
magnetic field lines in a low permeability media (e.g., air) are
basically perpendicular to the surface of a very high permeability
material (e.g., materials that are easily magnetized, such as
permalloy). When the cantilever is placed in proximity to such a
surface and the cantilever's horizontal plane is parallel to the
surface of the high permeability material, the above stated
objectives can be at least partially achieved. The generic scheme
is described below, followed by illustrative embodiments of the
invention.
[0061] The boundary conditions for the magnetic flux density (B)
and magnetic field (H) follow the following relationships:
1 B.sub.2 .multidot. n = B.sub.1 .multidot. n, B.sub.2 .times. n =
(.mu..sub.2/.mu..sub.1) B.sub.1 .times. n or H.sub.2 .multidot. n =
(.mu..sub.2/.mu..sub.1) H.sub.1 .multidot. n, H.sub.2 .times. n =
H.sub.1 .times. n
[0062] If .mu..sub.1>>.mu..sub.2, the normal component of
H.sub.2 is much larger than the normal component of H.sub.1, as
shown in FIG. 3. In the limit
(.mu..sub.1/.mu..sub.2).fwdarw..infin., the magnetic field H.sub.2
is normal to the boundary surface, independent of the direction of
H.sub.1 (barring the exceptional case of H.sub.1 exactly parallel
to the interface). If the second media is air (.mu..sub.2=1), then
B.sub.2=.mu..sub.0H.sub.2, so that the flux lines B.sub.2 will also
be perpendicular to the surface. This property is used to produce
magnetic fields that are perpendicular to the horizontal plane of
the cantilever in a micromagnetic latching switch and to relax the
permanent magnet alignment requirements.
[0063] FIGS. 4A and 4B shows the computer simulation of magnetic
flux (B) distributions. As can be seen, without the
high-permeability magnetic layer (a), the flux lines are less
perpendicular to the horizontal plane, resulting in a large
horizontal (x) component. The magnetic flux lines are approximately
perpendicular to the horizontal plane in a relatively large region
when a high-permeability magnetic layer is introduced with its
surface parallel to horizontal plane (b). The region indicated by
the box with dashed lines will be the preferred location of the
switch with the cantilever horizontal plane parallel to the
horizontal axis (x).
[0064] FIGS. 5A-C show the extracted horizontal components (Bx) of
the magnetic flux along cut-lines at various heights (y=-75 mm, -25
mm, 25 mm . . . ). From the top to bottom (a1-b1-c1), the
right-hand figures correspond to case (a) a single permanent
magnet, (b) a permanent magnet with a high-permeability magnetic
layer (thickness t=100 mm), and another case where the
high-permeability magnetic layer thickness is t=25 mm. In (a1)
without the high-permeability magnetic layer, we can see that Bx
increases rapidly away from the center. In (b1), Bx is reduced from
(a1) due to the use of the high-permeability magnetic layer. A
thinner high-m layer (c1) is less effective as the thicker one
(b1).
[0065] This property, that the magnetic field is normal to the
boundary surface of a high-permeability material, and the placement
of the cantilever (soft magnetic) with its horizontal plane
parallel to the surface of the high-permeability material, can be
used in many different configurations to relax the permanent magnet
alignment requirement.
[0066] FIGS. 6A and 6B show a top view and a side view,
respectively, of a micromagnetic latching switch 600 with relaxed
permanent magnet alignment according to an aspect the present
invention. In this embodiment, two high-permeability magnetic
layers are used to help the magnetic alignment in making the
micromagnetic latching switch. The switch comprises the following
basic elements: first high-permeability magnetic layer 602,
substrate 604, second high-permeability magnetic layer 606,
dielectric layers 608 and 610, a spiral coil 612, bottom conductor
614, cantilever assembly 616 (with at least a soft magnetic layer
618 and other conducting and/or supporting torsion spring 620), and
a top permanent magnetic layer 622 with a vertical magnetization
orientation. Preferably, the surfaces of the permanent magnet 622
and the high-permeability magnetic layers 602 and 606 are all
parallel to the horizontal plane 630 of the cantilever 616 so that
the horizontal component of the magnetic field produced by 622 is
greatly reduced near cantilever 616. Alternatively, a single soft
magnetic layer (602 or 606) can be used.
[0067] FIG. 7 shows another embodiment of the micromagnetic
latching switch. In this embodiment, two high-permeability magnetic
layers are used to help the magnetic alignment in making the
micromagnetic latching switch. The switch comprises the similar
basic elements as shown in FIG. 6. What differs in this embodiment
from that of FIG. 6 is that the second high-permeability magnetic
layer 702 is placed just below the top permanent magnet 622. Again,
preferably, the surfaces of the permanent magnet 622 and the
high-permeability magnetic layers 602 and 702 are all parallel to
the horizontal plane 630 of the cantilever 616 so that the
horizontal component of the magnetic field produced by 622 is
greatly reduced near cantilever 616.
[0068] FIG. 8 shows another embodiment of the micromagnetic
latching switch. In this embodiment, several high-permeability
magnetic layers 602, 802, 804 and 806 are placed around the
permanent magnet 622 and the cantilever switch in a package to form
a magnetic loop. The bottom high-permeability magnetic layer 602
helps to reduce the horizontal field component near cantilever 616,
and the layers 802, 804 and 806 screens the external field and
improve the internal magnetic field strength.
[0069] The above cases are provided as examples to illustrate the
use of high-permeability magnetic materials in combination with
permanent magnets to produce magnetic fields perpendicular to the
horizontal plane of the cantilever of the micromagnetic latching
switches. Different variations (multiple layers, different
placements, etc.) can be designed based on this principle to
accomplish the goal of relaxing the alignment of the permanent
magnet with the cantilever to make the switch bistable (latching)
and easy (low current) to switch from one state to the other.
[0070] In another embodiment pf the present invention, the switch
system comprises micromagnetic cantilevers, electromagnets (S-shape
or single-line coils), permanent magnetic and soft magnetic layer
in parallel to provide an approximate uniform magnetic field
distribution, single-pole double-throw (SPDT) schemes, and
transmission line structures suitable for radio frequency signal
transmissions.
[0071] FIGS. 9A and 9B shows a top view and a side view,
respectively, of a micromagnetic latching switch with additional
features of the present invention. The switch 900 comprises the
following basic elements: a cantilever made of soft magnetic
material (e.g., permalloy) and a conducting layer,
cantilever-supporting hinges (torsion spring), bottom contacts that
serve as the signal lines, an "S-shape" planar conducting coil, a
permalloy layer (or other soft magnetic material) on the substrate
( which is permalloy silicon, GaAs, glass, etc.), and a bottom
permanent magnet (e.g., Neodymium) attached to the bottom of the
substrate. The magnet can be placed or fabricated directly on the
substrate. The magnetization orientation of the magnet is either
along +Z or along -Z. Due to the soft magnetic material's nature of
high permeability, the magnetic field near the permalloy top
surface is self-aligned parallel to the z-axis (or approximately
perpendicular to the permalloy layer surface). This self-aligned
field is needed for holding the cantilever in either on or off
state. The whole device is housed in a suitable package (not shown)
with proper sealing and electrical contact leads.
[0072] For the best performance, the cantilever centerline (which
may not be the same as the hinge line) should be located
approximately near the center of the magnet, i.e., the two
distances from the edge (w1 and w2) are approximately equal.
However, the cantilever centerline can also be located away from
the center of the magnets and the device will still be functional.
The S-shape coil produces the switching magnetic field to switch
the cantilever from one state to the other by applying positive or
negative current pulses into the coil. In the figure, the effective
coil turn number under the cantilever is 5. However, the coil turn
number n can be any arbitrary positive integer number
(1.ltoreq.n.ltoreq..infin.). When the turn number is one, it means
there is just a single switching metal line under the cantilever.
This is very useful design when the device size is scaled down. In
addition, multilayer coil can also be used to strengthen the
switching capability. This can be done by adding the successive
coil layers on top of the other layer(s). Coil layers can be spaced
by the in-between insulator and connected through the conducting
vias.
[0073] The permanent magnetic field holds (latches) the cantilever
to either state. When the cantilever toggles to the right, the
cantilever's bottom conductor (e.g., Au) touches the bottom
contacts and connects the signal line 1. In this case, the signal
line 2 is disconnected. On the other hand, when the cantilever
toggles to the left, the signal line 2 is connected and signal line
1 is disconnected. It forms a SPDT latching switch. Although in the
figure, the widths of the magnet and permalloy layer on substrate
are same, in reality, they can be different. The width of the
magnet can either be larger or smaller than the width of the
permalloy layer.
[0074] Application Specific Uses of Latching Micromagnetic
Switches
[0075] Many goods comprising electrical or electronic-related
devices employ discrete components made of conductive traces
disposed on some form of a substrate. The latching micromagnetic
switches 100 of the present invention can be used to change various
characteristics of such conductive traces, or simply connect or
couple them together. By way of example, but not limitation, the
latching micromagnetic switches 100 of the present invention can be
used to adjust, select, switch, couple, or otherwise reconfigurable
(e.g., digitally tune) many types of devices or conductive traces.
For purposes of this description and the accompanying claims, the
term "conductive trace" means any metal, metal alloy, semiconductor
(e.g., doped or not doped) or other conductive material formed or
otherwise patterned on a substrate, as would also become apparent
to a person skilled in the art based on the teachings herein. The
terms "microstrip" and conductive trace are used interchangeably
herein.
[0076] General Apparatus Using the Switches
[0077] FIG. 10. illustrates an apparatus 1000 (or portion of an
apparatus) that uses one or more latching micromagnetic switches
1002, according to embodiments of the present invention. Throughout
the specification, the use of "switch" or "switches" can be any one
of the above-described switches in FIGS. 1-9B or any of the
switches described in related U.S. application Ser. No. 10/051,477,
entitled "MICROMAGNETIC LATCHING SWITCH WITH RELAXED PERMANENT
MAGNET ALIGNMENT REQUIREMENTS," filed Jan. 18, 2002, which is
incorporated herein by reference in its entirety. The apparatus
1000 also includes an electrical device 1004 (e.g., a circuit(s), a
filter(s), a filter system, an antenna(s), a transceiver(s), etc.)
coupled to one or more switches 100. In some embodiments switch
1002 can be coupled adjacent an input, an output, or both. In other
embodiments, switch 1002 can be in electrical device 1004 and not
at an input and an output, or can be in electrical device 1004,
adjacent an input, adjacent an output, or any combination thereof.
In some embodiments a device can be retrofitted to be coupled to
and controlled by switches 1002, while in other embodiments the
electric device 1004 and switches 1002 can be integrated on the
same substrate. Switches 1002 control energy flow through
electrical device 1004, while providing the benefits of using MEMs
technology as described above.
[0078] Filter Apparatus Using the Switches
[0079] Currently there are a number of different wireless
communications protocols in use (GSM, CDMA, TDMA, European GSM, GPS
and G3 to name a few) that make it impractical to design and
manufacture a single wireless handset (or other wireless
communications device) that is compatible with more than perhaps
one or two of these different protocols. The electronic components
that makeup a two-way radio, such as filters, oscillators, power
amplifiers and antennas must typically be designed to operate over
a very narrow and specific frequency range in order to achieve the
required level of performance. In order to produce a multimode
handset, several similar components must be used, each of which is
allocated to a different mode. This approach is costly, bulky and
complicated. Therefore, switches can eliminate much of this
redundancy by providing a way of producing sufficiently high
quality reconfigurable RF components that cannot be practically
implemented using other more conventional design approaches.
Switches are uniquely suited for this purpose because they have a
very high bandwidth, high linearity, low insertion loss, high
isolation, require a small chip area and can be produced cost
effectively. Herein described are several methods of using latching
magnetic MEMS switches to produce a reconfigurable bandpass filter.
A bandpass filter was chosen as an example because they are used
extensively in cell phones and wireless local area networks (LANs),
but it should be noted that the following concepts can equally well
be applied to various order lowpass, high-pass and band rejection
filters, and the like.
[0080] FIG. 11 illustrates a portion of an apparatus 1100 according
to embodiments of the present invention. Apparatus 1100 includes a
switch (S) 1102 at an input, a filter (F) 1104, and switch 1106 at
an output. No energy flows through this apparatus 1100 unless both
switches 1102 and 1106 are open, thus turning the filter 1100 ON
and OFF.
[0081] FIG. 12 shows close-up view of a portion of an apparatus
1200 according to an embodiment of the present invention. Apparatus
1200 includes a filter 1202 composed of "lumped" or discrete
inductors 1204 and capacitors 1206 and 1208. Specifically, planar
spiral inductors 1204 and two types of capacitors: a thin-film type
1206 and an interdigitated variety 1208. These two different types
of capacitors are only shown to demonstrate two different
architectures, and not to limit the invention. These lumped
components have an advantage of producing a filter 1202 with a very
high-Q or sharply defined resonant frequency (which is a
significant figure of merit for filters), but has the disadvantage
of not being the most compact design in terms of chip area and
becoming inoperable at very high microwave frequencies. Again,
switches 1210 and 1212 control energy flow to turn the filter 1202
ON and OFF.
[0082] FIG. 13A illustrates a portion of an apparatus 1300
according to embodiments of the present invention. Apparatus 1300
includes a plurality of filters 1302 that are controlled by a pair
of switches 1304 and 1306. Throughout the specification, the use of
"filter" or "filters" can be an actual filter circuit or branches
of a large filter (not shown). This apparatus 1300 can be a
telephone, as described above, that has multiple frequency bands,
and thus multiple band pass band filters 1302. Switches 1304 and
1306 control which filter 1302 is operating, thus controlling which
frequency is being used by the apparatus 1300.
[0083] FIG. 13B illustrates a circuit diagram of a portion of an
apparatus 1350 according to embodiments of the present invention.
Apparatus 1350 includes four filters 1352-1358 coupled between two
switches 1360 and 1362. The four filters 1352-1358 can be either
lumped types filters (FIG. 14) or any other type of filters, such
as SAW filters, BAW filters, etc. The switches 1360 and 1362 can be
either single-pole, four-throw switches (SP4T) or equivalently a
1.times.4 matrix switch configured from one or more latching
micromagnetic switches in accordance with embodiments of the
present invention. For example, the switches 1360 and 1362 can
include four latching micromagnetic switches controlled by a single
signal to turn only one latching micromagnetic switch OFF and ON at
a time, such that only one filter 1352-1358 is operating at a time.
It is to be appreciated that any "m" (m is any positive integer)
filters can be controlled by switches 1360 and 1362, thus the
switches may be single-pole, "m"-throw switches or lxm matrix
switches.
[0084] FIGS. 14A and 14B are a circuit diagrams illustrating a
portion of an apparatus 1400 according to embodiments of the
present invention. Apparatus 1400 includes a reconfigurable
bandpass filter design that uses magnetic latching MEMS switches
1402-1416 to select any combination of four different frequency
passbands according to embodiments of the present invention. A
large filter comprises four different small filters or "branches"
1418-1424, each of which is an independent bandpass filter "tuned"
to a different and specific frequency. For this example, a third
order equal-ripple filer design is shown. The individual lumped
element values (for the capacitors and inductors) are given in the
figure as exemplary values. By opening and closing the appropriate
MEMS switches 1402-1416 the RF signal is directed from the "RF in"
port 1426 through the appropriate filter(s) 1418-1424 and to the
"RF out" port 1428. Switches 1402 and 1404 are either both open or
both closed. Similarly for 1406 and 1408 are either both open or
both closed, and likewise for pairs 1410 and 1412 and pairs 1416
and 1418. Using this configuration, four separate filters 1418-1424
are replaced by a single switchable larger filter, which can
considerably reduce the overall number of components in a
multi-band cell phone (not shown). In other embodiments, any number
of branches or filter elements can be accommodated.
[0085] FIG. 15 illustrates a portion of an apparatus 1500 according
to embodiments of the present invention. Apparatus 1500 is based on
a distributed microstrip design, rather than the lumped (discrete)
approach described in FIG. 14. Similar to the design shown in FIG.
14, the distributed microstrip reconfigurable large filter consists
of three sub-filter "branches" or filters 1502-1506 that are
selected using latching magnetic MEMS switches 1508-1518. However,
the microstrip architecture relies on appropriately designed
sections of transmission lines to produce the required inductance
and capacitance values needed to synthesize the large filter.
Although there are a variety of design approaches that can be used
to accomplish this, three implementations of distributed bandpass
filters are shown according to embodiments of the present
invention. Specifically, a coupled line architecture 1506, a stub
filter 1504, and a capacitive-gap coupled line bandpass filter
1502. These distributed approaches have the advantages of
compactness and simplicity of fabrication, and good performance at
high frequencies, but lack the high-Q performance of the discrete
design.
[0086] It should be further noted that the concept of
reconfigurablity of RF components using latching magnetic MEMS
components can be further extended to envision structures such as
reconfigurable inductors, where a "chain" of inductors is connected
in series using MEMS switches. The series connection of several
small inductors would yield the sum total inductance of all the
small inductors additively. A "tunable" inductor could thus be
constructed. Similarly, a parallel "chain" of capacitors could be
produced in the identical way.
[0087] Antenna Apparatus Using the Switches
[0088] FIG. 16 illustrate an apparatus 1600 having conductive
traces. A strip or microstrip dipole antenna 1602 is formed on a
substrate (not shown). Additional conductive traces 1604 can be
added to tune the antenna 1602 using latching micromagnetic
switches 1606. Alternatively, additional conductive trace elements
1604 of various shapes and sizes can be added using latching
micromagnetic switches 1606. Phased-array antennas can also be
implemented in this manner. In yet another antenna application, the
cantilever of a latching micromagnetic switch can comprise an
output horn portion of an adjustable antenna.
[0089] Transceiver Apparatus Using the Switches
[0090] FIG. 17 illustrates a portion of an apparatus 1700 according
to embodiments of the present invention. Apparatus 1700 can be a
transceiver in which latching micromagnetic switches 1702 and 1704
can be used to switch coupling of an antenna or antenna array (not
shown) between a transmit circuit (not shown) and a receive circuit
(not shown). This is accomplished by having two latching
micromagnetic switches 1702 and 1704 coupling a receiver (not
shown) or a transmitter (not shown) to an antenna (not shown).
[0091] Power Control
[0092] FIG. 18 illustrates a schematic drawing of an apparatus 1800
according to embodiments of the present invention. Apparatus 1800
includes a latching micromagnetic switch 1802 having a cantilever
1804, a permanent magnet 1806, and a coil 1808. The coil is
controlled by a controller 1810 to move the cantilever between two
stable positions. The switch 1802 is coupled between a power supply
1812 and an electrical devices and/or circuits (electronic device)
1814. The switch 1802 is used to control the flow of power from the
power supply 1812 to the electronic devices and/or circuits 1814.
When the power supply 1812 is needed for the electronic device
1814, a short current pulse through the coil 1808 in the switch
1802 turns the switch 1802 ON. In the ON state the power supply
1812 is connected to the electronic device 1814. When the power
supply 1812 is not or nor longer needed, a short, opposite current
pulse through the coil 1808 turns the switch 1802 OFF and
disconnects the power supply 1812 from the electronic device
1814.
[0093] Other Applications of the Switches
[0094] Latching micromagnetic switches of the present invention can
be used with conductive traces in many other applications as well.
They can be employed as switching elements for digital components,
such as multiplexers and de-multiplexers, phase shifters, delay
lines, surface acoustic wave (SAW) devices, programable RF
circuits, and tunable oscillators. For multiplexer and
de-multiplexer applications, the latching micromagnetic switches
can be used to redirect signals according to a desired mux or
demux. logic function. For phase shifters, delay lines, surface
acoustic wave (SAW) devices, the latching micromagnetic switches
can switch in or switch out additional elements of delay or phase,
and in the case of a SAW add or subtract inter digitate finger
elements as desired. For programable RF circuits, such as a tunable
oscillator, the latching micromagnetic switches can be used to
switch in or switch out components to change resonator(s)
characteristics.
[0095] Similarly, conductive traces are used in integrated circuit
couplers. The wavelength, impedance, or the like, of such couplers
can be adjusted using latching micromagnetic switches.
[0096] Also, as discussed above, the latching micromagnetic
switches can either be integrated on a same substrate as an
electrical device being controlled or can be non-integrated and
located on a separate substrate from the electrical device being
controlled. This allows for pre-existing devices to use the
switches, while also allowing for new devices to integrate the
switches to reduce the size of the overall apparatus.
[0097] Other HighQ Switching Applications
[0098] Latching micromagnetic switches of the present invention can
be used in high redundancy RF circuit applications to switch-in
redundant components to replace failed components. Another area in
which the latching micromagnetic switches of the present invention
can be used is in RF switch arrays for a testing apparatus. Once a
probe is connected to a device under test, various tests can be
performed by switchably connecting various different test
modules/circuits using an array of micromagnetic latches according
to the present invention.
[0099] The latching micromagnetic switches of the present invention
can be used in communications switch applications, such as in
cross-point switches. Public switch network switches and private
branch exchange switches can be implemented using cross-point
switches comprising latching micromagnetic switches. Both
optical-to-electrical-to-optical (OEO) and all optical cross-point
switch can employ latching micromagnetic switches.
[0100] Repeaters exist for receiving EM (electromagnetic)
information signals, optionally performing signal conditioning or
processing (amplification, filtering, frequency translation, etc.)
on the received signals, and re-transmitting the conditioned
signals at same or different frequencies. Repeaters suffer from the
disadvantage of being relatively expensive in terms of cost and
power consumption. Conventional wireless communications circuitry
is complex and has a large number of circuit parts. Higher part
counts result in higher power consumption, which is undesirable,
particularly in battery powered repeater units. A latching
micromagnetic switch according to the present invention can reduce
power consumption in such repeaters.
[0101] High sensitivity, low noise amplifiers can also benefit by
incorporating latching micromagnetic switches. In this embodiment,
a selectable number of output devices (e.g., transistors) can be
used to adjust or optimize the amplifier output power. Gate and/or
drain switching can be performed by latching micromagnetic switches
to achieve a highQ, low noise signal.
[0102] Latching micromagnetic switches can also be used as
switching elements in each pixel of an image projector. A dense
array of mirrored cantilevered switches can be used to project
bright light or filtered light of much higher intensity than
permitted by conventional LCD projectors. The latching
micromagnetic switches of the present invention can withstand
switching speeds well in excess of the frequency required for image
projection.
[0103] The low-power dissipation of the latching micromagnetic
switches of the present invention can have benefits in power
management and replay circuits in many fields. An example field is
automotive applications, such as sensor switching and higher power
switching using parallel latching micromagnetic switches.
[0104] Latching micromagnetic switches can be used in conjunction
with a magnetic key to implement a reconfigurable relay lock. A key
can be fabricated by arranging several to hundreds of miniature
magnets in a physically, programmed array fashion. A cooperative
lock mechanism to receive the key can be formed of an array of
latching micromagnetic switches to read the programmed array of
miniature magnets to unlock any manner of device, circuit or
hardware component (e.g., a door). The key can be configured as a
flat rectangular card, or can take-on a variety of physical shapes,
as would also become apparent to a person skilled in the art. The
lock can be digitally controlled to facilitate a programmable
code.
[0105] Another security approach is to simply group switches
together in a combinational logic circuit that would require
actuation of the given combination of switches to pass a
signal.
[0106] Other applications for latching micromagnetic switches
include cable modems, TV tuners and smart circuit breakers.
[0107] Conclusion
[0108] The corresponding structures, materials, acts and
equivalents of all elements in the claims below are intended to
include any structure, material or acts for performing the
functions in combination with other claimed elements as
specifically claimed. Moreover, the steps recited in any method
claims may be executed in any order. The scope of the invention
should be determined by the appended claims and their legal
equivalents, rather than by the examples given above. Finally, it
should be emphasized that none of the elements or components
described above are essential or critical to the practice of the
invention, except as specifically noted herein.
* * * * *