U.S. patent application number 11/206124 was filed with the patent office on 2005-12-15 for semiconductor device and its manufacturing method.
Invention is credited to Iwai, Moriya, Nakanishi, Hiroaki, Yoshida, Masaaki.
Application Number | 20050275041 11/206124 |
Document ID | / |
Family ID | 19108031 |
Filed Date | 2005-12-15 |
United States Patent
Application |
20050275041 |
Kind Code |
A1 |
Iwai, Moriya ; et
al. |
December 15, 2005 |
Semiconductor device and its manufacturing method
Abstract
A semiconductor device is capable of being applied with both a
positive and a negative voltage to its control gate, and writing to
its memory requires a low voltage. A control gate is formed on a
memory unit region of a field oxide film, and an inter-layer
silicon oxide film is formed on its surface. A gate oxide film for
a non-volatile memory is formed on a P substrate between N type
diffusion layers. The floating gate is formed on the inter-layer
silicon oxide film, the field oxide film, and the gate oxide film
for the non-volatile memory. Since a large coupling ratio between
the control gate and the floating gate is available on the field
oxide film, memory rewriting requires only a low voltage. Further,
since the control gate is formed by a poly silicon film, both a
positive voltage and a negative voltage can be applied to the
control gate.
Inventors: |
Iwai, Moriya; (Hyogo,
JP) ; Yoshida, Masaaki; (Hyogo, JP) ;
Nakanishi, Hiroaki; (Hyogo, JP) |
Correspondence
Address: |
DICKSTEIN SHAPIRO MORIN & OSHINSKY LLP
2101 L Street, NW
Washington
DC
20037
US
|
Family ID: |
19108031 |
Appl. No.: |
11/206124 |
Filed: |
August 18, 2005 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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11206124 |
Aug 18, 2005 |
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10479629 |
Dec 4, 2003 |
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6949790 |
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Current U.S.
Class: |
257/390 ;
257/315; 257/391; 257/E21.682; 257/E21.684; 257/E21.694;
257/E27.103; 257/E29.129; 257/E29.304; 438/201 |
Current CPC
Class: |
H01L 27/115 20130101;
H01L 27/11534 20130101; H01L 27/11526 20130101; H01L 29/42324
20130101; H01L 29/7883 20130101; H01L 27/11521 20130101; H01L
27/11558 20130101 |
Class at
Publication: |
257/390 ;
257/391; 438/201; 257/315 |
International
Class: |
H01L 029/788; H01L
021/8238 |
Foreign Application Data
Date |
Code |
Application Number |
Sep 19, 2001 |
JP |
2001-284764 |
Claims
1-3. (canceled)
4. A manufacturing method of a semiconductor device equipped with a
non-volatile memory and a transistor, comprising: a step (A)
wherein a field oxide film for unit separation is formed on the
surface of a semiconductor substrate, and an active region
surrounded by the field oxide film is formed, and a gate oxide film
for the transistor is formed on the surface of the active region, a
step (B) wherein a poly silicon film is formed all over the surface
of the semiconductor substrate, a control gate is formed on the
field oxide film at a memory unit region, and a gate electrode for
the transistor is formed on the gate oxide film for the transistor
by patterning the poly silicon film, a step (C) wherein an
inter-layer silicon oxide film is formed on the surface of the
control gate and the surface of the gate electrode for the
transistor by a heat oxidization process, a step (D) wherein a gate
oxide film for the non-volatile memory is formed on the surface of
an active region of a memory unit region by a heat oxidization
process after selectively removing the silicon oxide film on the
surface of the active region of the memory unit region, and a step
(E) wherein a poly silicon film is formed all over the surface of
the semiconductor substrate, and a floating gate is formed on the
inter-layer silicon oxide film at the memory unit region, the field
oxide film, and the gate oxide film for the non-volatile memory by
patterning the poly silicon film.
5. A manufacturing method of a semiconductor device equipped with a
non-volatile memory, a high-voltage transistor, and a low voltage
transistor, comprising: a step (A) wherein a field oxide film for
unit separation is formed on a semiconductor substrate surface, an
active region surrounded by the field oxide film is formed, and a
gate oxide film for the non-volatile memory is formed on the
surface of the active region, a step (B) wherein a poly silicon
film is formed all over the surface of the semiconductor substrate,
and a floating gate is formed on a memory unit region of the gate
oxide film for the non-volatile memory, and on the field oxide film
by patterning the poly silicon film, a step (C) wherein by a heat
oxidation process, an inter-layer silicon oxide film is formed on
the surface of the floating gate, and thickness of the gate oxide
film for the non-volatile memory on the active region surface of
the high-voltage transistor region is grown and a high voltage
endurance gate oxide film for the high-voltage transistor is
formed, a step (D) wherein a low voltage endurance gate oxide film
for the low voltage transistor is formed on the surface of the
active region of the low voltage transistor region, while growing
thickness of the high voltage endurance gate oxide film by a heat
oxidization process, after selectively removing the silicon oxide
film of the active region surface of the low voltage transistor
region, and a step (E) wherein a poly silicon film is formed all
over the surface of the semiconductor substrate and is patterned, a
control gate is formed at least on the inter-layer silicon oxide
film on the floating gate that is present in the memory unit region
on the field oxide film, and a gate electrode for the low voltage
transistor is formed on the low voltage endurance gate oxide film,
and a gate electrode for the high-voltage transistor is formed on
the high voltage endurance gate oxide film.
6. A manufacturing method of a semiconductor device equipped with a
non-volatile memory, a high-voltage transistor, and a low voltage
transistor, comprising: a step (A) wherein a field oxide film for
unit separation is formed on the surface of a semiconductor
substrate, an active region surrounded by the field oxide film is
formed, and a silicon oxide film for a gate oxide film is formed on
the surface of the active region, a step (B) wherein a gate oxide
film for a non-volatile memory is formed on the surface of the
active region of a memory unit region, while forming a high voltage
endurance gate oxide film for a high-voltage transistor by growing
thickness of the silicon oxide film for the gate oxide film of the
high-voltage transistor region by a heat oxidization process after
selectively removing at least the silicon oxide film for the gate
oxide film on the surface of the active region of the memory unit
region, a step (C) wherein a poly silicon film is formed all over
the surface of the semiconductor substrate, a floating gate is
formed on the gate oxide film for the non-volatile memory and on
the field oxide film, and a gate electrode for the high-voltage
transistor is formed on the high voltage endurance gate oxide film
by patterning the poly silicon film, a step (D) wherein an
inter-layer silicon oxide film is formed on the surface of the
floating gate and on the surface of the gate electrode for the
high-voltage transistor by a heat oxidization process, a step (E)
wherein a low voltage endurance gate oxide film for the low voltage
transistor is formed on the surface of the active region of a low
voltage transistor region by a heat oxidization process after
selectively removing the silicon oxide film of the active region
surface of the low voltage transistor region, and a step (F)
wherein a poly silicon film is formed all over the surface of the
semiconductor substrate and patterned, a control gate is formed at
least on the inter-layer silicon oxide film on the floating gate
that is present in the memory unit region of the field oxide film,
and a gate electrode for the low voltage transistor is formed on
the low voltage endurance gate oxide film by patterning the poly
silicon film.
Description
TECHNICAL FIELD
[0001] The present invention generally relates to a semiconductor
device and a manufacturing method thereof, and especially relates
to a semiconductor device equipped with a non-volatile memory, and
manufacturing method thereof.
[0002] In this specification, a first electric conduction type is a
P type or an N type, and a second electric conduction type is an N
type or a P type, an electric conduction type reverse to the first
electric conduction type, respectively.
BACKGROUND ART
[0003] As kinds of a non-volatile memory called EEPROM
(electrically erasable programmable random memory), there are
generally two kinds that are differentiated by quantities of gates.
Namely, they are a one-layer gate type and a two-layer gate type.
As for the one-layer gate type, technology has been available, such
as presented by Japan Provisional Publications No. 6-85275 and No.
8-506693. As for the two-layer gate type, technology has been
available, such as presented by Japanese Patent Publication No.
4-80544.
[0004] A plan view of a one-layer gate type non-volatile memory is
shown in FIG. 28, as a conventional example.
[0005] On a P type semiconductor substrate (P substrate) 101, N
type diffusion layers 103,105,107 and a control gate 109 consisting
of an N type diffusion layer are formed. The N type diffusion
layers 103 and 105 are formed with an interval, and the N type
diffusion layers 105 and 107 are formed with an interval.
[0006] On the P substrate 101 that contains the interval between
the N type diffusion layers 103 and 105, a selection gate 111
consisting of a poly silicon film is formed through a gate oxide
film (illustration is omitted), partly overlapping with the N type
diffusion layers 103 and 105.
[0007] A floating gate 113 consisting of a poly silicon film is
formed through a silicon oxide film (illustration is omitted)
contiguously on the P substrate 101 that includes the interval
between the N type diffusion layers 105 and 107, and the control
gate 109. Near the interval between the N type diffusion layers 105
and 107, the floating gate 113 is arranged such that it overlaps
with the N type diffusion layers 105 and 107 in part through a gate
oxide film for the memory.
[0008] When erasing the one-layer gate type non-volatile memory,
i.e., injecting an electron to the floating gate 113, the N type
diffusion layer 107 is set at 0V (volt), and the N type diffusion
layer 103 is set at a predetermined potential Vpp, and the
predetermined potential Vpp is applied to the control gate 109 and
the selection gate 111. In this manner, a transistor is constituted
by the N type diffusion layers 103 and 105, and the selection gate
111 is turned on, and the electron is injected into the floating
gate 113 through the gate oxide film for the memory from the N type
diffusion layer 105.
[0009] When writing to the one-layer gate type non-volatile memory,
i.e., discharging an electron from the floating gate 113, the
control gate 109 is set at 0V, and the N type diffusion layer 107
is opened, and the predetermined potential Vpp is applied to the N
type diffusion layer 103 and the selection gate 111. In this
manner, the transistor constituted by the N type diffusion layers
103 and 105, and the selection gate 111 is turned on, and the
electron injected into the floating gate 113 is drawn out by the N
type diffusion layer 103 through the gate oxide film for the memory
by the tunnel effect.
[0010] In the one-layer gate type non-volatile memory, the control
gate 109 formed by the diffusion layer, and the floating gate 113
consisting of the poly silicon film can be overlapped with each
other on a large area of the substrate, providing a large coupling
ratio.
[0011] A sectional view of a two-layer gate type non-volatile
memory is shown in FIG. 29, as a conventional example. An N type
diffusion layer 117 and an N type diffusion layer 119 are formed on
the P substrate 101 with an interval. On the P substrate 101, and
between the N type diffusion layers 117 and 119, a floating gate
123, which consists of a poly silicon film, is formed through a
gate oxide film 121 for the memory, overlapping in part with the N
type diffusion layers 117 and 119. On the floating gate 123, a
control gate 127, which consists of a poly silicon film, is formed
through a silicon oxide film 125.
[0012] When erasing the two-layer gate type non-volatile memory,
i.e., injecting an electron to the floating gate 123, the N type
diffusion layer 117 is set at 0V, and N type diffusion layer 119 is
set at a predetermined potential Vpp, and the predetermined
potential Vpp is applied to the control gate 127, thereby, an
electron is injected into the floating gate 123 through the gate
oxide film 121 for the memory from the N type diffusion layer
119.
[0013] When writing to the two-layer gate type non-volatile memory,
i.e., discharging an electron from the floating gate 123, the
control gate 127 is set at 0V, and the N type diffusion layer 117
is opened, and the predetermined potential Vpp is applied to the N
type diffusion layer 119, thereby, the electron injected into the
floating gate 123 is drawn out by the N type diffusion layer 119
through the gate oxide film 121 for the memory by the tunnel
effect.
[0014] In the one-layer gate type non-volatile memory, since the
large coupling ratio is available, memory rewriting requires
comparatively low voltage. However, since the N type diffusion
layer constitutes the control gate 109, there is a problem that a
negative voltage cannot be applied to the control gate 109.
[0015] In the two-layer gate type non-volatile memory, while a
negative voltage can be applied to the control gate 127, due to the
control gate 127 being constituted by the poly silicon film, a
comparatively large voltage is required in writing, since the
coupling ratio is relatively small, as compared with the one-layer
gate type non-volatile memory.
[0016] Further, when a non-volatile memory is used, a high-voltage
transistor is often prepared additionally in order to rewrite to
the memory. In order to prevent destruction of the gate oxide film,
due to a high voltage applied, the gate oxide film of the
high-voltage transistor is formed thicker than the gate oxide film
of the memory, which constitutes the memory unit. An example of a
method is explained with reference to FIG. 30.
[0017] FIG. 30 is a sectional view showing a process that forms the
gate oxide films with two values of film thickness.
[0018] (1) A unit separation insulation film 129 and a silicon
oxide film 131 are formed on the P substrate 101 surface (refer to
sub-section (a)).
[0019] (2) A resist pattern 133 is prepared with the ordinary
phototype process technology, which covers a high-voltage
transistor region, and is open at a low voltage transistor region,
and then a silicon oxide film 131 of the low voltage transistor
region is selectively removed, using the resist pattern 133 as the
mask (refer to sub-section (b)).
[0020] (3) After removing the resist pattern 133, a low voltage
endurance gate oxide film 135 for the low voltage transistor is
formed in the low voltage transistor region on the surface of the P
substrate 101 by a heat oxidization process, and simultaneously,
the silicon oxide film 131 of the high-voltage transistor region is
grown up such that a high voltage endurance gate oxide film 137 is
formed for the high-voltage transistor, the film being thicker than
the low voltage endurance gate oxide film 135 (refer to sub-section
(c)). In this manner, two kinds of gate oxide films with different
film thickness values are formed.
[0021] (4) A poly silicon film is formed all over the P substrate
101, patterning is performed on the poly silicon film such that a
gate electrode 139 is formed on the low voltage endurance gate
oxide film 135, and a gate electrode 141 is formed on the high
voltage endurance gate oxide film 137 (refer to sub-section
(d)).
[0022] In the above manufacturing method, the high voltage
endurance gate oxide film 137 is formed by applying the heat
oxidization process twice (hereinafter, called the twice-oxidized
film), and the low voltage gate oxide film 135 is formed by the
oxide film formed by applying the heat oxidization process once
(hereinafter, called once-oxidized film). The twice-oxidized film
tends to have less uniformity in film thickness, and lower
reliability than the once-oxidized film.
[0023] A so-called tunnel oxide film for writing is often formed
additionally, which has a film thickness different from the gate
oxide films that are used in the low voltage transistor and the
high-voltage transistor. In this case, a total of three types of
silicon oxide films, having different film thickness, are formed.
Usually, the thickest film is formed by applying the heat
oxidization process 3 times (called a 3 times-oxidized film,
hereinafter) through the manufacturing method described above. By
this method, thickness of the 3 times-oxidized film becomes even
less uniform than the twice-oxidized film, making it difficult to
control total film thickness, and causing reliability to
deteriorate.
[0024] Since the tunnel oxide film of which reliability is required
to be the highest becomes a twice-oxidized film in an advanced
miniature process where tunnel oxide film thickness is thicker than
gate oxide film thickness of a low voltage transistor, it is feared
that reliability may fall, which results from a resist pattern
being formed on a silicon oxide film that constitutes a part of the
twice-oxidized film in the formation process of the twice-oxidized
film.
[0025] Further, when the tunnel oxide film thickness and the gate
oxide film thickness of the low voltage transistor are close, film
thickness control is a highly difficult matter in view of the
presence of a natural oxide film that grows up on the semiconductor
substrate surface, and controllability of the oxidization furnace
used in a heat oxidization process, etc.
DISCLOSURE OF INVENTION
[0026] A first object of the present invention is offering a
semiconductor device equipped with a non-volatile memory, which can
perform memory rewriting at a low voltage, and accept both a
positive voltage and a negative voltage to its control gate.
[0027] A second object of the present invention is offering a
manufacturing method that can reduce film thickness variation of
both a gate oxide film for the memory, and a gate oxide film for
transistors, such that the reliability is improved, when forming a
non-volatile memory and other transistors simultaneously.
[0028] The semiconductor device of the present invention includes a
first insulation film that is formed on a first electric conduction
type semiconductor substrate, two diffusion regions of a second
electric conduction type formed separately at an interval on the
surface of a region contiguous to the first insulation film on the
semiconductor substrate, a gate oxide film formed by overlapping in
part with the two diffusion regions on the semiconductor substrate
that include the interval between the two diffusion regions, a
control gate of a poly silicon film formed on the first insulation
film, and a poly silicon film formed on the first insulation film
and the gate oxide film, wherein a non-volatile memory is prepared
on the first insulation film, which is constituted by a floating
gate arranged by overlapping with an upper layer or a lower layer
of the control gate through a second insulation film.
[0029] The non-volatile memory of the semiconductor device of the
present invention is a two-layer gate type wherein the control gate
and the floating gate are laminated on the first insulation film
such that a large coupling ratio is obtained and a lower voltage
can be used for rewriting than for a conventional two-layer gate
type non-volatile memory. Further, since the control gate is formed
on the first insulation film, being electrically separated from the
semiconductor substrate, both positive and negative voltages can be
applied to the control gate, which is impossible in a conventional
one-layer gate type non-volatile memory.
[0030] A first manufacturing method of the semiconductor device of
the present invention is a manufacturing method of a semiconductor
device equipped with a non-volatile memory and a transistor,
including steps (A) through (E) as follows.
[0031] (A) A step that is configured to form a field oxide film on
a semiconductor substrate surface, which separates units, and to
form an active region surrounded by the field oxide film, and to
form a gate oxide film for a transistor on the surface of the
active region.
[0032] (B) A step that is configured to form a poly silicon film
all over the upper surface of the semiconductor substrate, and to
form a control gate on a memory unit region of the field oxide
film, and a gate electrode for the transistor on the gate oxide
film for the transistor by patterning the poly silicon film.
[0033] (C) A step that is configured to form an inter-layer silicon
oxide film on the surface of the control gate and the surface of
the gate electrode for the transistor by applying a heat
oxidization process.
[0034] (D) A step that is configured to form a gate oxide film for
the memory on the surface of the active region of the memory unit
region by a heat oxidization process after selectively removing the
silicon oxide film from the active region surface of the memory
unit region.
[0035] (E) A step that is configured to form a poly silicon film
all over the upper surface of the semiconductor substrate, and to
form a floating gate on the inter-layer silicon oxide film, the
field oxide film, and the gate oxide film for the memory by
patterning the silicon oxide film.
[0036] According to the first manufacturing method, the
semiconductor device of the present invention can be manufactured.
Further, both the gate oxide film for the transistor and the gate
oxide film for the memory can be formed by the once-oxidized film,
enhancing the reliability of the both gate oxide films, and
reducing film thickness variation.
[0037] A second manufacturing method of the semiconductor device of
the present invention is a manufacturing method of a semiconductor
device equipped with a non-volatile memory, a high-voltage
transistor, and a low voltage transistor, and includes steps (A)
through (E) as follows.
[0038] (A) A step that is configured to form a field oxide film
that separates units on a semiconductor substrate surface, and an
active region surrounded by the field oxide film, and to form a
gate oxide film for the memory on the active region surface.
[0039] (B) A step that is configured to form a poly silicon film
all over the upper surface of the semiconductor substrate, and to
form a floating gate on the gate oxide film for the memory in the
memory unit region and the field oxide film by patterning the poly
silicon film.
[0040] (C) A step that is configured to form an inter-layer silicon
oxide film on the surface of the floating gate by a heat
oxidization process, and to form a high voltage endurance gate
oxide film for the high voltage transistor by growing the thickness
of the gate oxide film for the memory on the surface of the active
region of the high voltage transistor region.
[0041] (D) A step that is configured to form a low voltage
endurance gate oxide film for the low voltage transistor on the
surface of the active region of the low voltage transistor region,
and to grow the thickness of the low voltage endurance gate oxide
film by a heat oxidization process after selectively removing the
silicon oxide film from the surface of the active region of the low
voltage transistor region.
[0042] (E) A step that is configured to form a poly silicon film
all over the upper surface of the semiconductor substrate, and to
form a control gate at least on an upper layer of the floating gate
that is present on the field oxide film of the memory unit region
through the inter-layer silicon oxide film, a gate electrode for
the low voltage transistor on the low voltage endurance gate oxide
film, and a gate electrode for the high voltage transistor on the
high voltage endurance gate oxide film by patterning the poly
silicon film.
[0043] According to the second manufacturing method, the
semiconductor device of the present invention can be manufactured.
Further, both the low voltage endurance gate oxide film for the low
voltage transistor and the gate oxide film for the memory are
formed by the once-oxidized film, enhancing the reliability of the
both gate oxide films, and reducing film thickness variation.
[0044] Further, since the gate electrode for the low voltage
transistor and the gate electrode for the high-voltage transistor
are formed separately from the floating gate, silicide processing
by tungsten silicide etc. of the gate electrode for the low voltage
transistor and the gate electrode for the high-voltage transistor
is facilitated.
[0045] A manufacturing method of the semiconductor device of the
present invention is a manufacturing method of a semiconductor
device equipped with a non-volatile memory, a high-voltage
transistor, and a low voltage transistor, and includes steps (A)
through (F) as follows.
[0046] (A) A step that is configured to form a field oxide film
that separates units on a semiconductor substrate, and an active
region surrounded by the field oxide film, and to form a silicon
oxide film for a gate oxide film on the active region surface.
[0047] (B) A step that is configured to form a gate oxide film for
the non-volatile memory on the surface of the active region of the
memory unit region by a heat oxidization process, and to form a
high voltage endurance gate oxide film for the high voltage
transistor by growing the thickness of the silicon oxide film for
the gate oxide film of the high voltage transistor region, after
selectively removing at least the oxide film for the gate oxide
film on the surface of the active region of the memory unit
region.
[0048] (C) A step that is configured to form a poly silicon film
all over the upper surface of the semiconductor substrate, and to
form a floating gate on the gate oxide film for the memory in the
memory unit region and the field oxide film, and a gate electrode
for the high voltage transistor on the high voltage endurance gate
oxide film by patterning the poly silicon film.
[0049] (D) A step that is configured to form an inter-layer silicon
oxide film on the surface of the floating gate and on the surface
of the gate electrode for the high voltage transistor by a heat
oxidization process.
[0050] (E) A step that is configured to form a low voltage
endurance gate oxide film for the low voltage transistor on the
surface of the active region of the low voltage transistor region
by a heat oxidization process after selectively removing the
silicon oxide film on the surface of the active region of the low
voltage transistor region.
[0051] (F) A step that is configured to form a poly silicon film
all over the upper surface of the semiconductor substrate, to form
a control gate on at least the upper layer of the floating gate
that is present on the field oxide film of the memory unit region
through the inter-layer silicon oxide film, and to form a gate
electrode for the low voltage transistor on the low withstand gate
oxide film.
[0052] According to the manufacturing method, the semiconductor
device of the present invention can be manufactured. Further, both
the low voltage endurance gate oxide film for the low voltage
transistor and the gate oxide film for the memory are formed with
the once-oxidized film, enhancing the reliability of both gate
oxide films, and reducing film thickness variation. Further, the
high voltage endurance gate oxide film for the high-voltage
transistor is formed with the twice-oxidized film, enhancing the
reliability of the high voltage endurance gate oxide film, and
reducing film thickness variation, compared with the conventional
technology.
BRIEF DESCRIPTION OF DRAWINGS
[0053] FIG. 1 shows a first embodiment of the semiconductor device.
A plan view is shown at sub-section (A), a sectional view in the
A-A' cross-section of the sub-section (A) is shown at sub-section
(B), a sectional view in the B-B' cross-section of the sub-section
(A) is shown at sub-section (C), and a sectional view in the C-C'
cross-section of the sub-section (A) is shown at sub-section
(D).
[0054] FIG. 2 is a circuit diagram, showing an example when memory
units of this embodiment are arranged in a matrix.
[0055] FIG. 3 shows steps of a first embodiment of the
manufacturing method by sectional views, showing in the A-A'
cross-section and in the C-C' cross-section of the sub-section (A)
of FIG. 1.
[0056] FIG. 4 is for explaining steps of the first embodiment, a
second embodiment and a third embodiment of the manufacturing
method, and shows sectional views in the B-B' cross-section of the
sub-section (A) of FIG. 1.
[0057] FIG. 5 shows a second embodiment of the semiconductor
device. A plan view is shown at sub-section (A), a sectional view
in the A-A' cross-section of the sub-section (A) is shown at
sub-section (B), a sectional view in the B-B' cross-section of the
sub-section (A) is shown at sub-section (C), and a sectional view
in the C-C' cross-section of the sub-section (A) is shown at
sub-section (D).
[0058] FIG. 6 shows sectional views for explaining the second
embodiment of the manufacturing method, which are in the A-A'
cross-section and C-C' cross-section of the sub-section (A) of FIG.
5.
[0059] FIG. 7 shows a third embodiment of the semiconductor device.
A plan view is shown at sub-section (A). Sub-section (B) shows a
sectional view in the sectional view in the A-A' cross-section,
sub-section (C) shows a sectional view in the B-B' cross-section,
and sub-section (D) shows a sectional views in the C-C'
cross-section of the sub-section (A).
[0060] FIG. 8 shows sectional views for explaining the third
embodiment of the manufacturing method, which are in the A-A'
cross-section and the C-C' cross-section of the sub-section (A) of
FIG. 7.
[0061] FIG. 9 shows a fourth embodiment of the semiconductor
device. Sub-section (A) shows a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional views in the C-C' cross-section of the sub-section
(A).
[0062] FIG. 10 shows sectional views for explaining a fourth
embodiment of the manufacturing method, which show the sectional
views in the A-A' cross-section and C-C' cross-section of the
sub-section (A) of FIG. 9.
[0063] FIG. 11 shows sectional views for explaining the fourth
embodiment of the manufacturing method, which are in the B-B'
cross-section of the sub-section (A) of FIG. 9.
[0064] FIG. 12 shows a fifth embodiment of the semiconductor
device. Sub-section (A) shows a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional views in the C-C' cross-section of the sub-section
(A).
[0065] FIG. 13 shows sectional views for explaining a fifth
embodiment of the manufacturing method, which are in the A-A'
cross-section and the C-C' cross-section of the sub-section (A) of
FIG. 12.
[0066] FIG. 14 is the fifth embodiment of the manufacturing method,
wherein sectional views in the B-B' cross-section of the
sub-section (A) of FIG. 12 are shown.
[0067] FIG. 15 shows a sixth embodiment of the semiconductor
device. Sub-section (A) is a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional view in the C-C' cross-section of the sub-section (A).
Sub-section (E) shows a sectional view of a low voltage transistor
formed in an area different from the sub-section (A).
[0068] FIG. 16 shows sectional views for explaining a sixth
embodiment of the manufacturing method, which are in the A-A'
cross-section and the C-C' cross-section of the sub-section (A) of
FIG. 15, and in the D-D' cross-section of the sub-section (E) of
FIG. 15.
[0069] FIG. 17 shows sectional views for explaining the sixth
embodiment, a seventh embodiment, and an eighth embodiment of the
manufacturing method, which are in the B-B' cross-section of the
sub-section (A) of FIG. 15.
[0070] FIG. 18 shows a seventh embodiment of the semiconductor
device. Sub-section (A) is a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional view in the C-C' cross-section of the sub-section (A).
Sub-section (E) shows a sectional view of a low voltage transistor
formed in an area different from the sub-section (A).
[0071] FIG. 19 shows sectional views for explaining the seventh
embodiment of the manufacturing method, which are in the A-A'
cross-section and the C-C' cross-section of the sub-section (A) of
FIG. 18, and in the D-D' cross-section of the sub-section (E) of
FIG. 18.
[0072] FIG. 20 shows an eighth embodiment of the semiconductor
device. Sub-section (A) is a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional view in the C-C' cross-section of the sub-section (A).
Sub-section (E) shows a sectional view of a low voltage transistor
formed in an area different from the sub-section (A).
[0073] FIG. 21 shows sectional views for explaining the eighth
embodiment of the manufacturing method, which are in the A-A'
cross-section and the C-C' cross-section of the sub-section (A) of
FIG. 20, and in the D-D' cross-section of the sub-section (E) of
FIG. 20.
[0074] FIG. 22 shows a ninth embodiment of the semiconductor
device. Sub-section (A) is a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional view in the C-C' cross-section of the sub-section (A).
Sub-section (E) shows a sectional view of a low voltage transistor
formed in an area different from the sub-section (A).
[0075] FIG. 23 shows sectional views for explaining the ninth
embodiment of the manufacturing method, which are in the A-A'
cross-section and the C-C' cross-section of the sub-section (A) of
FIG. 22, and in the D-D' cross-section of the sub-section (E) of
FIG. 22.
[0076] FIG. 24 shows sectional views for explaining the ninth
embodiment of the manufacturing method, which are in the B-B'
cross-section of the sub-section (A) of FIG. 22.
[0077] FIG. 25 shows a tenth embodiment of the semiconductor
device. Sub-section (A) is a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional view in the C-C' cross-section of the sub-section (A).
Sub-section (E) shows a sectional view of a low voltage transistor
formed in an area different from the sub-section (A).
[0078] FIG. 26 shows sectional views for explaining a tenth
embodiment of the manufacturing method, which are in the A-A'
cross-section and the C-C' cross-section of the sub-section (A) of
FIG. 25, and in the D-D' cross-section of the sub-section (E) of
FIG. 25.
[0079] FIG. 27 shows sectional views for explaining the tenth
embodiment of the manufacturing method, which are in the B-B'
cross-section of the sub-section (A) of FIG. 25.
[0080] FIG. 28 is a plan view showing an example of a conventional
one-layer gate type non-volatile memory.
[0081] FIG. 29 is a sectional view showing an example of a
conventional two-layer gate type non-volatile memory.
[0082] FIG. 30 shows sectional views showing a process that forms a
gate oxide film in two different values of film thickness.
BEST MODE FOR CARRYING OUT THE INVENTION
[0083] Embodiments of the present invention are explained with
reference to attached figures.
[0084] As for the semiconductor device of the present invention,
the second insulation film between the control gate and the
floating gate is desired to be structured by laminating a silicon
oxide film-a silicon nitride film-a silicon oxide film.
Consequently, since the laminating film containing the silicon
nitride film, through which an electron cannot pass easily, is
prepared between the control gate and the floating gate,
reliability of the memory is enhanced.
[0085] The semiconductor device of the present invention may
include a tunnel oxide film the thickness of which is thinner than
the gate oxide film for the memory, which is formed on one of the
two diffusion regions, and a part of the floating gate may be
formed also on the tunnel oxide film. Thereby, a coupling ratio can
be raised, enhancing design flexibility of the memory
properties.
[0086] FIG. 1 shows the first embodiment of the semiconductor
device. A plan view is shown at sub-section (A), a sectional view
in the A-A' cross-section of the sub-section (A) is shown at
sub-section (B), a sectional view in the B-B' cross-section of the
sub-section (A) is shown at sub-section (C), and a sectional view
in the C-C' cross-section of the sub-section (A) is shown at
sub-section (D). Although this embodiment describes only one memory
unit, the embodiment is applicable to any number of memory units.
This embodiment is explained with reference to FIG. 1.
[0087] A field oxide film 3 (first insulation film) for unit
separation is formed on the surface of a P substrate 1 in
thickness, for example, between 4500 A and 7000 A. Here, in this
embodiment, the film is formed 5000 A thick. N type diffusion
layers 5, 7, and 9 are formed in an active region of the P
substrate 1 surrounded by the field oxide film 3. The N type
diffusion layers 5 and 7 are formed with an interval, and the N
type diffusion layers 7 and 9 are formed with an interval.
[0088] A high voltage endurance gate oxide film 11 for a
high-voltage transistor is formed on the surface of the P substrate
1 that includes the interval region between the N type diffusion
layers 5 and 7, partly overlapping with the N type diffusion layers
5 and 7, in film thickness, for example, between 400 A and 600 A.
Here, in this embodiment, it is formed 500 A thick. On the high
voltage endurance gate oxide film 11, a selection gate 13 is formed
by a poly silicon film in thickness, for example, between 2500 A
and 4500 A. Here, in this embodiment, it is formed 3500 A thick.
The N type diffusion layers 5 and 7, the high voltage endurance
gate oxide film 11, and the selection gate 13 constitute the
high-voltage transistor.
[0089] On the memory unit region of the field oxide film 3, a
control gate 15 of a poly silicon film is formed in film thickness,
e.g., between 2500 A and 4500 A. Here, in this embodiment, it is
formed 3500 A thick. On the surface of the control gate 15, an
inter-layer silicon oxide film 17 (second insulation film)
(illustration is omitted in sub-section (A) of FIG. 1) is formed in
thickness, e.g., between 150 A and 250 A. Here, in this embodiment,
it is formed 200 A thick.
[0090] A gate oxide film 19 for the memory is formed on the surface
of the P substrate 1 that includes the interval region between the
N type diffusion layers 7 and 9, partly overlapping with the N type
diffusion layers 7 and 9 in thickness, e.g., between 80 A and 110
A. Here, in this embodiment, it is formed 100 A thick. The gate
oxide film 19 for the memory also serves as a tunnel oxide film. A
floating gate 21 of a poly silicon film thickness of which ranges,
e.g., between 2500 A and 4500 A, is formed on the inter-layer
silicon oxide film 17, the field oxide film 3, and the gate oxide
film 19 for the memory. Here, in this embodiment, it is formed 3500
A thick.
[0091] In the memory unit of the first embodiment of the
semiconductor device, the control gate 15 of the poly silicon film
on the field oxide film 3, and the floating gate 21 are widely
overlapped with each other through the inter-layer silicon oxide
film 17, providing a large coupling ratio, thereby memory rewriting
can be performed at a low voltage. Further, since the control gate
15 is formed by the poly silicon film, both positive and negative
voltages can be applied to the control gate 15.
[0092] FIG. 2 is a circuit diagram showing an example of the memory
unit of the first embodiment of the semiconductor device arranged
in a matrix form.
[0093] The memory unit (cell) is arranged in a matrix.
[0094] The selection gate 13 of cells i0, i1, and so on that are
aligned in the horizontal direction (word line WL direction) is
electrically connected to a common word line WLi, and the control
gate 15 is electrically connected to a common control gate line
CGi.
[0095] The N type diffusion layer 5 of the cells 0i, 1i and so on
aligned in the vertical direction (bit line Bit direction) is
electrically connected to a common bit line Bit, and the N type
diffusion layer 9 is electrically connected to a common VG (virtual
ground) line VGi.
[0096] Here, in this embodiment, i represents 0 or a natural
number.
[0097] When erasing the cells 00, 01 and so on that are aligned in
the word line direction, for example, each terminal is to be biased
as shown in Table 1.
1TABLE 1 Erasing bias conditions BIT0=0V VG0=open BIT1=0V VG1=open
WL0=Vpp Erase (High Vth) Erase (High Vth) CG0=Vpp (cell 00) (cell
01) WL0=0V Hold Hold CG0=0V (cell 10) (cell 11)
[0098] The word line WL0 and the control gate line CG 0 of a block
to be erased are biased at a predetermined potential Vpp, with
other word lines WLi and other control gate lines CGi being biased
at 0V, all the bit lines Biti being biased at 0V, and all the VG
lines VGi being open. Thereby, an electron is injected into the
floating gate 21 of the cells 00, 01 and so on that are connected
to the word line WL0 and the control gate line CG 0, via the gate
oxide film for the memory, and a comprehensive erasing is carried
out. At this time, the cells of the block connected to the word
line WLi and the control gate line CGi that are biased at 0V are
not erased.
[0099] When writing to only the cell 00, for example, each terminal
is to be biased as shown in Table 2.
2TABLE 2 Writing bias conditions BIT0=Vpp VG0=open BIT1=0V VG1=open
WL0=Vpp Write (Dep) No Writing (High Vth) CG0=0V (cell 00) (cell
01) WL0=0V Hold Hold CG0=0V (cell 10) (cell 11)
[0100] All the control gate lines CGi are biased at 0V, with only
the word line WL0 and the bit line Bit0 that are connected to the
cell 00 that is to be written to being biased at the predetermined
potential Vpp, other word lines WLi and other bit lines Biti being
biased at 0V, and all the VG lines VGi being open. Thereby, an
electron injected into the floating gate 21 of the cell 00 is drawn
out to the N type diffusion layer 7 through the gate oxide film for
the memory by the tunnel effect, and only the cell 00 is
selectively written to.
[0101] FIGS. 3 and 4 show sectional views for explaining the first
embodiment of the manufacturing method for manufacturing the
semiconductor device of the first embodiment. FIG. 3 shows
sectional views of the sub-section (A) of FIG. 1 in the A-A'
cross-section and in the C-C' cross-section. FIG. 4 shows sectional
views of the sub-section (A) of FIG. 1 in the B-B' cross-section.
With reference to FIG. 1, FIG. 3, and FIG. 4, the embodiment of
this manufacturing method is explained.
[0102] (1) The field oxide film 3 for unit separation is formed on
the P substrate 1 by the usual LOCOS (Local Oxidation of Silicon)
method. A sacrifice oxide film 23 in thickness between 250 A and
400 A is formed on the active region surface demarcated by the
field oxide film 3, and a channel dope injection is performed. A
poly silicon film in thickness between 2500 A and 4500 A is
deposited all over the upper surface of the P substrate 1, and the
control gate 15 is formed on the field oxide film 3 by phototype
process technology and etching (refer to sub-section (a) of FIG. 3,
and sub-section (a) of FIG. 4).
[0103] (2) The inter-layer silicon oxide film 17 is formed on the
surface of the control gate 15 in thickness between 150 A and 250 A
by a heat oxidization process. At this time, the sacrifice oxide
film 23 in the memory unit region grows up to have film thickness
of, e.g., between 350 A and 550 A, and turns into the silicon oxide
film 25 (refer to sub-section (b) of FIG. 3 and sub-section (b) of
FIG. 4).
[0104] (3) A resist pattern 27 is formed such that the control gate
15 and the gate oxide film 25 in the high-voltage transistor region
are covered, and the silicon oxide film 25 in the memory unit
region is selectively removed (refer to sub-section (c) of FIG. 3
and sub-section (c) of FIG. 4).
[0105] (4) After removing the resist pattern 27, a heat oxidization
process is performed such that the gate oxide film 19 for the
memory that is 90-100 A thick is formed on the surface of the
memory unit region of the P substrate 1. At this time, the silicon
oxide film 25 of the high-voltage transistor region grows up to
have film thickness between 400 A and 600 A, and turns into the
high voltage endurance gate oxide film 11. Then, the poly silicon
film 29 that is 2500-4500 A thick, for example, is deposited (refer
to sub-section (d) of FIG. 3 and sub-section (d) of FIG. 4).
[0106] (5) The selection gate 13 is formed on the field oxide film
3 of a high-voltage transistor region, and the high voltage
endurance gate oxide film 11 from the poly silicon film 29, by
phototype process technology and etching technology, and the
floating gate 21 is formed on the gate oxide film 19 for the memory
in the memory unit region, the field oxide film 3, and the control
gate 15. At this time, although not shown in the figure, a gate
electrode of a transistor that makes up a peripheral circuit can
also be simultaneously formed from the poly silicon film 29. Then,
the N type diffusion layers 5, 7, and 9 are formed on the P
substrate 1, using the selection gate 13 and the floating gate 21
as a mask by ion implantation of phosphor or arsenic under a
condition such as injecting energy being 70 KeV and a dose amount
being 6.times.10.sup.15/cm.sup.2 (refer to FIG. 1).
[0107] In this embodiment, the inter-layer silicon oxide film 17
and the gate oxide film 25 of the high-voltage transistor region
may be formed by a heat oxidization process after removing the
sacrifice oxide film 23, and the gate oxide film 19 for the memory
may be formed after selectively removing the silicon oxide film of
the memory region. In this case, the gate oxide film of the
high-voltage transistor region is made of a twice-oxidized film,
wherein film thickness variation can be suppressed, and reliability
can be raised.
[0108] FIG. 5 shows the second embodiment of the semiconductor
device. A plan view is shown at sub-section (A), a sectional view
in the A-A' cross-section of the sub-section (A) is shown at
sub-section (B), a sectional view in the B-B' cross-section of the
sub-section (A) is shown at sub-section (C), and a sectional view
in the C-C' cross-section of the sub-section (A) is shown at
sub-section (D). Although this embodiment describes only one memory
unit, the embodiment is applicable to any number of memory units.
This embodiment is explained with reference to FIG. 5. The same
numerals are given to the portion that achieves the same function
as in the first embodiment shown in FIG. 1, and detailed
explanation of the portion is not repeated.
[0109] The field oxide film 3 is formed on the surface of the P
substrate 1, and the N type diffusion layers 5, 7, and 9 are formed
in the active region of the P substrate 1. The high voltage
endurance gate oxide film 11 is formed on the surface of the P
substrate 1 that includes the interval region between the N type
diffusion layers 5 and 7. The selection gate 13 is formed on the
high voltage endurance gate oxide film 11.
[0110] The control gate 15 is formed on the field oxide film 3 of
the memory unit region. A laminating film 31 (not shown in the
sub-section (A)) consisting of a silicon oxide film/a silicon
nitride film/a silicon oxide film is formed on the upper surface of
the control gate 15. Film thickness of the silicon oxide film that
is included in the laminating film 31 is between 100 A and 150 A.
Here, in this embodiment, the thickness is 150 A. Film thickness of
the silicon nitride film is between 100 A and 200 A. Here, in this
embodiment, the thickness is 150 A.
[0111] On the side of the control gate 15, a poly silicon oxide
film sidewall 33 is formed, which is 150-250 A thick. Here, in this
embodiment, the thickness is 200 A.
[0112] The laminating film 31 and the poly silicon oxide film
sidewall 33 constitute the second insulation film of the
semiconductor device of the present invention.
[0113] The gate oxide film 19 for the memory is formed on the
surface of the P substrate 1 that includes the interval region
between the N type diffusion layers 7 and 9. The floating gate 21
of a poly silicon film is formed on the laminating film 31, the
field oxide film 3, and the gate oxide film 19 for the memory.
[0114] The memory unit of the second embodiment of the
semiconductor device is provided with the laminating film 31 that
contains the silicon nitride film through which an electron cannot
travel easily between the control gate 15 and the floating gate 21,
thereby the reliability of the memory is enhanced.
[0115] FIG. 6 shows sectional views for explaining the second
embodiment of the manufacturing method for manufacturing the
semiconductor device of the second embodiment, the sectional views
being in the A-A' cross-section and C-C' cross-section of the
sub-section (A) of FIG. 5. Sectional views in the B-B'
cross-section of the sub-section (A) of FIG. 5 is the same as FIG.
4. The embodiment of this manufacturing method is explained with
reference to FIG. 4 through FIG. 6.
[0116] (1) The field oxide film 3 for unit separation is formed on
the P substrate 1 by the usual LOCOS method. The sacrifice oxide
film 23 is formed on the active region surface demarcated by the
field oxide film 3, and a channel dope injection is performed. A
poly silicon film is deposited on the P substrate 1. Further, on
the poly silicon film, a laminating film 30 that consists of a
silicon oxide film that is 100-200 A thick, and a silicon nitride
film that is 100-150 A is formed. By the phototype process
technology and the etching technology, the laminating film 30 is
formed on the field oxide film 3 that is formed on the control gate
15 (refer to sub-section (a) of FIG. 4 and sub-section (a) of FIG.
6).
[0117] (2) The poly silicon oxide film sidewall 33 is formed on the
side of the control gate 15, thickness of which is between 150 A
and 250 A, by a heat oxidization process. At this time, a silicon
oxide film that is 5-50 A thick is formed on the upper surface of
the silicon nitride film of the laminating film 30 by
re-oxidization of the silicon nitride film, thereby the laminating
film 31 consisting of a three-layer film of silicon oxide
film/silicon nitride film/silicon oxide film is formed.
Simultaneously, the sacrifice oxide film 23 grows, and becomes the
silicon oxide film 25 (refer to sub-section (b) of FIG. 4 and
sub-section (b) of FIG. 6).
[0118] (3) Like the process explained with reference to the
sub-section (c) of FIG. 3 and the sub-section (c) of FIG. 4, the
resist pattern 27 is formed, and the silicon oxide film 25 of the
low voltage transistor region is selectively removed (refer to
sub-section (c) FIG. 4 and sub-section (c) of FIG. 6).
[0119] (4) Like the process explained with reference to the
sub-section (d) of FIG. 3 and the sub-section (d) of FIG. 4, a heat
oxidization process is performed, after removing the resist pattern
27, thereby the gate oxide film 19 for the memory is formed in the
memory unit region, and the high voltage endurance gate oxide film
11 is formed in the high-voltage transistor region, and then, the
poly silicon film 29 is deposited (refer to sub-section (d) of FIG.
4 and sub-section (d) of FIG. 6).
[0120] (5) The selection gate 13 and the floating gate 21 are
formed from the poly silicon film 29 by the phototype process
technology and the etching technology like the process explained
with reference to FIG. 1. Then, the N type diffusion layers 5, 7,
and 9 are formed by the ion implantation (refer to FIG. 5).
[0121] According to this embodiment, the insulation films of the
upper surface and the side of the control gate 15 can take a
different type, or different film thickness, or both. This
increases the degree of freedom in raising the coupling ratio, and
provides a wider choice of processes that can be selected.
[0122] In this embodiment, the gate oxide film 19 for the memory
may be formed after selectively removing the silicon oxide film of
the memory region, after forming the poly silicon oxide film
sidewall 33 and the gate oxide film 25 of the high-voltage
transistor region by the heat oxidization, after removing the
sacrifice oxide film 23. In this case, the gate oxide film of the
high-voltage transistor region is a twice-oxidized film, therefore,
thickness variation can be suppressed, and reliability can be
raised.
[0123] Further, although the poly silicon oxide film sidewall 33 is
formed by heat oxidization, an HTO film (high temperature oxide
film) sidewall may be formed by depositing an HTO film in the state
shown by the sub-section (a) of FIG. 6, and by etching-back.
However, since the gate oxide film 23 for the memory of the active
region surface of the high-voltage transistor region and the low
voltage transistor region is also removed by the etching-back, a
heat oxidization process is necessary such that a silicon oxide
film to be used as a predecessor of the high voltage endurance gate
oxide film is formed.
[0124] FIG. 7 shows the third embodiment of the semiconductor
device. A plan view is shown at sub-section (A). Sub-section (B)
shows a sectional view in the A-A' cross-section, sub-section (C)
shows a sectional view in the B-B' cross-section, and sub-section
(D) shows a sectional views in the C-C' cross-section of the
sub-section (A). Although this embodiment describes only one memory
unit, the embodiment is applicable to any number of memory units.
This embodiment is explained with reference to FIG. 7. The same
numerals are given to the portion that achieves the same function
as in the first embodiment shown in FIG. 1, and detailed
explanation of the portion is not repeated.
[0125] The field oxide film 3 is formed on the surface of the P
substrate 1, and the N type diffusion layers 5, 7, and 9 are formed
in the active region of the P substrate 1. The selection gate 13 is
formed through the high voltage endurance gate oxide film 11 on the
P substrate 1 that includes the interval region between the N type
diffusion layers 5 and 7.
[0126] The control gate 15 is formed on the field oxide film 3 of
the memory unit region, and the inter-layer silicon oxide film 17
is formed on the surface of the control gate 15. The gate oxide
film 19 for the memory is formed on the surface of the P substrate
1 that includes the interval region between the N type diffusion
layers 7 and 9. The floating gate 21 is formed on the inter-layer
silicon oxide film 17, the field oxide film 3, and the gate oxide
film 19 for the memory.
[0127] A poly silicon film 35 having the same film thickness as the
control gate 15 is formed on the field oxide film 3. A silicon
oxide film 37 (illustration is omitted in sub-section (A)) having
the same film thickness as the inter-layer silicon oxide film 17 is
formed on the surface of the poly silicon film 35. A poly silicon
film 39 having the same film thickness as the floating gate 21 is
formed on the silicon oxide film 37. The poly silicon film 35, the
silicon oxide film 37, and the poly silicon film 39 make up a
capacitor.
[0128] FIG. 8 shows sectional views for explaining the third
embodiment of the manufacturing method for manufacturing the
semiconductor device of the third embodiment, which are in the A-A'
cross-section and the C-C' cross-section of the sub-section (A) of
FIG. 7. The embodiment of this manufacturing method is explained
with reference to FIG. 4, FIG. 7, and FIG. 8.
[0129] (1) The field oxide film 3 for unit separation is formed on
the P substrate 1 by the usual LOCOS method, the sacrifice oxide
film 23 is formed, and a channel dope injection is performed. Then,
a poly silicon film that is 2500-4500 A thick is formed on the P
substrate 1. By the phototype process technology and the etching
technology, the control gate 15 and the poly silicon film 35
serving as the lower layer of the capacitor are formed on the field
oxide film 3 (refer to the sub-section (a) of FIG. 4 and
sub-section (a) of FIG. 8).
[0130] (2) The inter-layer silicon oxide film 17 and an inter-layer
silicon oxide film 37 are formed on the surface of the control gate
15 and on the surface of the poly silicon film 35, respectively, in
150-250 A film thickness by a heat oxidization process.
Simultaneously, the sacrifice oxide film 23 grows, and becomes the
silicon oxide film 25 (refer to the sub-section (b) of FIG. 4 and
sub-section (b) of FIG. 8).
[0131] (3) A resist pattern 41 is formed such that the control gate
15, the poly silicon film 35, and the silicon oxide film 25 of the
high-voltage transistor region are covered, and the silicon oxide
film 25 of the low voltage transistor region is selectively removed
(refer to the sub-section (c) of FIG. 4 and sub-section (c) of FIG.
8).
[0132] (4) Like the process explained with reference to the
sub-section (d) of FIG. 3 and the sub-section (d) of FIG. 4, the
resist pattern 41 is removed, the gate oxide film 19 for the memory
is formed in the memory unit region by a heat oxidization process,
the high voltage endurance gate oxide film 11 is formed by growing
the silicon oxide film 25 of the high-voltage transistor region,
and then, the poly silicon film 29 is deposited all over the upper
surface of the P substrate 1 (refer to the sub-section (d) of FIG.
4 and sub-section (d) of FIG. 8).
[0133] (5) From the poly silicon film 29, the selection gate 13,
the floating gate 21, and the poly silicon film 39 serving as the
upper layer of the capacitor on the silicon oxide film 37 are
formed by the phototype process technology and the etching
technology. Thereby, the capacitor structured by the poly silicon
film 35, the silicon oxide film 37, and the poly silicon film 39 is
formed simultaneously.
[0134] Then, the N type diffusion layers 5, 7, and 9 are formed by
the ion implantation (refer to FIG. 7).
[0135] In this embodiment, although the silicon oxide film 37 is
used as an insulation film between the poly silicon films 35 and 39
of the capacitor, the capacitor can also be formed by laminating a
silicon oxide film, a silicon nitride film, and a silicon oxide
film, like the manufacturing method explained with reference to
FIG. 6.
[0136] FIG. 9 shows the fourth embodiment of the semiconductor
device. Sub-section (A) shows a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional views in the C-C' cross-section of the sub-section (A).
Although this embodiment describes only one memory unit, the
embodiment is applicable to any number of memory units. This
embodiment is explained with reference to FIG. 9. The same numerals
are given to the portion that achieves the same function as in the
first embodiment shown in FIG. 1, and detailed explanation of the
portion is not repeated.
[0137] Points of this embodiment, which are different from the
first embodiment are that the selection gate 14 is formed by the
poly silicon film that is formed simultaneously with the control
gate 15, that the high voltage endurance gate oxide film 12 for the
high-voltage transistor made of the once-oxidized film is formed
under the selection gate 14, and that silicon oxide film 18 is
formed on the surface of the selection gate 14. Film thickness of
the high voltage endurance gate oxide film 12 is between 400 A and
600 A. Here, in this embodiment, it is 500 A. Film thickness of the
selection gate 14 is between 2500 A and 4500 A. Here, in this
embodiment, it is 3500 A. Film thickness of the silicon oxide film
18 is between 150 A and 250 A. Here, in this embodiment, it is 200
A. Illustration of the silicon oxide film 18 is omitted in the
sub-section (A) of FIG. 9.
[0138] FIG. 10 and FIG. 11 show sectional views for explaining the
fourth embodiment of the manufacturing method for manufacturing the
semiconductor device of the fourth embodiment. FIG. 10 shows
sectional views that show sectional views in the A-A' cross-section
and the C-C' cross-section of the sub-section (A) of FIG. 9. FIG.
11 shows sectional views in the B-B' cross-section of the
sub-section (A) of FIG. 9. The embodiment of this manufacturing
method is explained with reference to FIG. 9 through FIG. 11.
[0139] (1) The field oxide film 3 for unit separation is formed on
the P substrate 1 by the usual LOCOS method. A sacrifice oxide film
is formed in film thickness between 250 A and 400 A on the surface
of the active region demarcated by the field oxide film 3, and a
channel dope injection is performed. After removing the sacrifice
oxide film, a heat oxidization process is performed such that the
high voltage endurance gate oxide film 12 in film thickness between
400 A and 600 A is formed in the active region. A poly silicon film
having a thickness between 2500 A and 4500 A is deposited all over
the upper surface of the P substrate 1. By the phototype process
technology and the etching technology, the control gate 15 is
formed on the field oxide film 3 of the memory unit formation
region, and the selection gate 14 is formed on the high voltage
endurance gate oxide film 12 of the high-voltage transistor
formation region and the field oxide film 3 (refer to sub-section
(a) of FIG. 10 and sub-section (a) of FIG. 11).
[0140] (2) The silicon oxide film 18 is formed on the surface of
the selection gate 14 in film thickness, for example, between 150 A
and 250 A by a heat oxidization process, and the inter-layer
silicon oxide film 17 is formed on the surface of the control gate
15. At this time, film thickness of the high voltage endurance gate
oxide film 12 of the memory unit region grows, and it becomes the
silicon oxide film 43 (refer to sub-section (b) of FIG. 10 and
sub-section (b) of FIG. 11).
[0141] (3) A resist pattern 45 is formed such that the selection
gate 14 and the control gate 15 are covered, and the silicon oxide
film 43 of the memory unit region is selectively removed (refer to
sub-section (c) of FIG. 10 and sub-section (c) of FIG. 11).
[0142] (4) The gate oxide film 19 for the memory is formed on the
surface of the P substrate 1 of the memory unit region by a heat
oxidization process, after removing the resist pattern 45. Then,
the poly silicon film 29 is deposited (refer to sub-section (d) of
FIG. 10 and sub-section (d) of FIG. 11).
[0143] (5) The floating gate 21 is formed on the gate oxide film 19
for the memory, on the field oxide film 3, and on the control gate
15 from the poly silicon film 29 by the phototype process
technology and the etching technology. Although not shown in the
figure, at this time, a gate electrode of a transistor that makes
up a peripheral circuit can simultaneously be formed from the poly
silicon film 29. Then, the N type diffusion layers 5, 7, and 9 are
formed on the P substrate 1, using the selection gate 14 and the
floating gate 21 as a mask by the ion implantation under a
condition of, for example, injecting energy being 70 KeV and a dose
amount of phosphor or arsenic being 6.times.10.sup.15/cm.sup.2
(refer to FIG. 9).
[0144] In this embodiment, since the high voltage endurance gate
oxide film 12 for the high-voltage transistor and the gate oxide
film 19 for the memory are formed separately, each of the gate
oxide films can take a different film thickness by one heat
oxidization process. In this manner, the resist pattern does not
remain during formation of the high voltage endurance gate oxide
film 12, as was the case with the conventional method for forming
the high voltage endurance gate oxide film for the high-voltage
transistor, which was explained using FIG. 30. In this manner,
quality of the high voltage endurance gate oxide film for the
high-voltage transistor is enhanced.
[0145] In this embodiment, the inter-layer silicon oxide film 17 on
the control gate 15, the poly silicon oxide film 18 on the
selection gate 14, and the gate oxide film 19 for the memory can be
simultaneously formed after forming the selection gate 14 and
entirely removing the oxide film in the active region. In this
manner, the problem that the P substrate 1 is exposed at the gate
oxide film 19 formation region for the memory during resist pattern
removal like the conventional technology is solved.
[0146] Further, since the high voltage endurance gate oxide film 12
is already covered by the selection gate 14 when the gate oxide
film 19 for the memory is formed (refer to (4) above), it is not
influenced by a heat oxidization process in a later step. Thereby,
the uniformity of the film thickness of the high voltage endurance
gate oxide film 12 for the high-voltage transistor can be obtained,
and film thickness controlling is also facilitated.
[0147] Further, although the high voltage endurance gate oxide film
12 for the high-voltage transistor is formed on the surface of the
active region of the P substrate 1, and the poly silicon film
serving as the selection gate 14 is formed on it in this embodiment
by the process described in (1) above with reference to the
sub-section (a) of FIG. 10 and the sub-section (a) of FIG. 11, the
present invention is not limited to this. The gate electrode for
the low voltage transistor may be formed on the gate oxide film for
the low voltage transistor whose film thickness is between 125 A
and 250 A. In this manner, the gate oxide film for the low voltage
transistor can be formed by the once-oxidized film, which
suppresses film thickness variation, and improves the
reliability.
[0148] Further, although the insulation film between the control
gate 15 and the floating gate 21 is served by the inter-layer
silicon oxide film 17 in this embodiment, the present invention is
not limited to this. For example, the insulation film between the
upper surface of the control gate 15 and the floating gate 21 may
be served by a laminating film of silicon oxide film/silicon
nitride film/silicon oxide film, like the manufacturing method
explained with reference to FIG. 6.
[0149] Further, like the manufacturing method explained with
reference to FIG. 8, a capacitor pattern may be formed
simultaneously, which consists of a lower layer of a poly silicon
film that is formed simultaneously with the control gate 15, and an
upper layer of a poly silicon film that is formed simultaneously
with the floating gate 21.
[0150] FIG. 12 shows the fifth embodiment of the semiconductor
device. Sub-section (A) shows a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional views in the C-C' cross-section of the sub-section (A).
Although this embodiment describes only one memory unit, the
embodiment is applicable to any number of memory units. This
embodiment is explained with reference to FIG. 12. The same
numerals are given to the portion that achieves the same function
as the fourth embodiment shown in FIG. 9, and detailed explanation
of the portion is not repeated.
[0151] The field oxide film 3 is formed on the surface of the P
substrate 1. An N type embedded diffusion layer 47 is formed in a
region that includes the active region of the P substrate 1
surrounded by the field oxide film 3. N type diffusion layers 49
and 51 are formed on both sides of the embedded diffusion layer 47.
In the active region of the P substrate 1, the N type diffusion
layer 5 and the N type diffusion layer 49 are formed with an
interval, and the N type diffusion layer 9 and the N type diffusion
layer 51 are formed with an interval.
[0152] On the P substrate 1 that includes the interval region
between the N type diffusion layers 5 and 49, the selection gate 14
is formed through the high voltage endurance gate oxide film 12,
overlapping in part with the N type diffusion layers 5 and 49. The
silicon oxide film 18 (illustration is omitted in sub-section (A)
of FIG. 12) is formed on the surface of the selection gate 14.
[0153] The control gate 15 is formed on the field oxide film 3 of
the memory unit region, and the inter-layer silicon oxide film 17
(illustration is omitted in the sub-section (A) of FIG. 12) is
formed on the surface of the control gate 15. On the surface of the
P substrate 1 that includes the interval region between the N type
diffusion layers 9 and 51, the gate oxide film 19 for the memory is
formed, overlapping in part with the N type diffusion layers 9 and
51.
[0154] A tunnel oxide film 53 that serves as a path for an electric
charge at the time of writing to and erasing the memory is formed
in a part of the surface of the embedded diffusion layer 47 in film
thickness between 90 A and 100 A. Here, in this embodiment, the
thickness is 90 A. Around the circumference of the tunnel oxide
film 53 on the surface of the embedded diffusion layer 47, a
silicon oxide film 55 is formed simultaneously with the gate oxide
film 19.
[0155] A floating gate 57 is formed on the inter-layer silicon
oxide film 17, the field oxide film 3, and the gate oxide film 19
for the memory. A part of the floating gate 57 is formed also on
the tunnel oxide film 53 and the silicon oxide film 55.
[0156] In the fifth embodiment of the semiconductor device, since
the tunnel oxide film 53 with film thickness thinner than the gate
oxide film 19 for the memory is formed, writing to and erasing the
memory can be performed through the tunnel oxide film 53, and the
flexibility in designing the memory characteristic is enhanced.
[0157] FIG. 13 and FIG. 14 show sectional views for explaining the
fifth embodiment of the manufacturing method for manufacturing the
semiconductor device of the fifth embodiment. FIG. 13 shows the
sectional view in the A-A' cross-section and in the C-C'
cross-section of the sub-section (A) of FIG. 12, and FIG. 14 shows
the sectional view in the B-B' cross-section of the sub-section (A)
of FIG. 12. The embodiment of this manufacturing method is
explained with reference to FIG. 12 through FIG. 14.
[0158] (1) The field oxide film 3 for unit separation is formed on
the P substrate 1 by the usual LOCOS method. A sacrifice oxide film
in film thickness between 250 A and 400 A is formed on the surface
of the active region demarcated by the field oxide film 3. The
diffusion layer 47 is formed by the ion implantation using phosphor
under a condition, e.g., 80 KeV and a dosing amount of
8.times.10.sup.15/cm.sup.2, around the tunnel oxide film region of
the P substrate 1, and then, a channel dope injection is performed.
After removing the sacrifice oxide film, the high voltage endurance
gate oxide film 12 is formed in film thickness between 400 A and
600 A in the active region by a heat oxidization process. A poly
silicon film that is 2500-4500 A thick is deposited all over the
upper surface of the P substrate 1. The control gate 15 is formed
on the field oxide film 3 of the memory unit formation region by
the phototype process technology and the etching technology, and
the selection gate 14 is formed on the high voltage endurance gate
oxide film 12 of the high-voltage transistor formation region, and
on the field oxide film 3 (refer to sub-section (a) of FIG. 13 and
sub-section (a) of FIG. 14).
[0159] (2) A silicon oxide film 16 is formed in film thickness,
e.g., between 150 A and 250 A by a heat oxidization process after
completely removing the oxide film on the active region. The
silicon oxide film 18 is simultaneously formed on the surface of
the selection gate 14, and the inter-layer silicon oxide film 17 is
formed on the surface of the control gate 15 (refer to sub-section
(b) of FIG. 13 and sub-section (b) of FIG. 14).
[0160] (3) A resist pattern 46 that contains an opening only at the
tunnel oxide film region is formed, and the silicon oxide film 16
in the tunnel oxide film region is selectively removed, using the
resist pattern 46 as a mask (refer to sub-section (c) FIG. 13 and
sub-section (c) of FIG. 14).
[0161] (4) After removing the resist pattern 46, a tunnel oxide
film 53 in film thickness between 90 A and 100 A is formed in the
memory unit region on the surface of the P substrate 1 by a heat
oxidization process. At this time, the silicon oxide film 16 of the
region around the tunnel oxide film region and other active region
surfaces grows up to film thickness between, e.g., 250 A and 350 A,
and turns into a silicon oxide film 55 and the gate oxide film 19
for the memory. Then, the poly silicon film 29 is deposited (refer
to sub-section (d) of FIG. 13 and sub-section (d) of FIG. 14).
[0162] (5) The floating gate 57 is formed from the poly silicon
film 29 by the phototype process technology and the etching
technology on the gate oxide film 19 for the memory, on the silicon
oxide film 55, on the tunnel oxide film 53, on the field oxide film
3, and on the control gate 15. Although not shown in the figure, a
gate electrode of a transistor that constitutes a peripheral
circuit can be simultaneously formed from the poly silicon film 29.
Then, the N type diffusion layers 5, 9, 49, and 51 are formed on
the P substrate 1 by the ion implantation of phosphor or arsenic,
using the selection gate 14 and the floating gate 57 as a mask
under a condition of, for example, injecting energy of 70 KeV and
an dosing amount of 6.times.10.sup.15/cm.sup.2 (refer to FIG.
12).
[0163] In this embodiment, film thickness of each of the tunnel
oxide film 53, the high voltage endurance gate oxide film 12, and
the gate oxide film 19 for the memory can be set up freely.
Further, since the tunnel oxide film 53 and the high voltage
endurance gate oxide film 12 can be formed by the once-oxidized
film, the reliability of each oxide film can be secured and film
thickness variation can be controlled.
[0164] Further, although the inter-layer silicon oxide film 17
serves as the insulation film between the control gate 15 and the
floating gate 57 in this embodiment, the present invention is not
limited to this. For example, a laminating film of silicon oxide
film/silicon nitride film/silicon oxide film may serve as the
insulation film between the upper surface of the control gate 15
and the floating gate 57, like the manufacturing method explained
with reference to FIG. 6.
[0165] Further, the capacitor pattern consisting of the lower layer
of a poly silicon film formed simultaneously with the control gate
15, and the upper layer of a poly silicon film formed
simultaneously with the floating gate 57 may be formed
simultaneously, like the manufacturing method explained with
reference to FIG. 8.
[0166] FIG. 15 shows the sixth embodiment of the semiconductor
device. Sub-section (A) is a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional view in the C-C' cross-section of the sub-section (A).
Sub-section (E) shows a sectional view of a low voltage transistor
formed in an area different from the sub-section (A), and is
considered in D-D' cross-section. Although this embodiment
describes only one memory unit, the embodiment is applicable to any
number of memory units. This embodiment is explained with reference
to FIG. 15. The same numerals are given to the portion that
achieves the same function as the first embodiment shown in FIG. 1,
and detailed explanation of the portion is not repeated.
[0167] The field oxide film 3 for unit separation is formed on the
surface of the P substrate 1, and the N type diffusion layers 5, 7,
and 9 are formed in the active region of the P substrate 1.
[0168] A high voltage endurance gate oxide film 61 in film
thickness between 400 A and 600 A for the high-voltage transistor
is formed, overlapping in part with the N type diffusion layers 5
and 7, on the surface of the P substrate 1 that includes the
interval region between the N type diffusion layers 5 and 7. Here,
in this embodiment, the film thickness is 500 A. A selection gate
62 is formed from a poly silicon film in thickness between 2500 A
and 4500 A on the high voltage endurance gate oxide film 61. Here,
in this embodiment, the film thickness is 3500 A. The N type
diffusion layers 5 and 7, the high voltage endurance gate oxide
film 61, and the selection gate 62 constitute the high-voltage
transistor.
[0169] A gate oxide film 63 for the memory is formed in film
thickness between 90 A and 100 A on the surface of the P substrate
1 that includes the interval region between N the type diffusion
layers 7 and 9, overlapping in part with the N type diffusion
layers 7 and 9. Here, in this embodiment, the film thickness is 90
A. The gate oxide film 63 for the memory serves also as a tunnel
oxide film.
[0170] On the memory unit region of the field oxide film 3, and on
the gate oxide film 63 for the memory, a floating gate 65 of a poly
silicon film is formed in film thickness between 2500 A and 4500 A.
Here, in this embodiment, the film thickness is 3500 A. On the
surface of the floating gate 65, an inter-layer silicon oxide film
(the second insulation film) 67 (illustration is omitted in
sub-section (A) of FIG. 15) is formed in film thickness between 150
A and 250 A. Here, in this embodiment, the film thickness is 200
A.
[0171] On the memory unit region of the field oxide film 3, and on
the inter-layer silicon oxide film 67, a control gate 69 of a poly
silicon film is formed in film thickness between 2500 A and 4500 A.
Here, in this embodiment, the film thickness is 3500 A.
[0172] A low voltage endurance gate oxide film 71 for a low voltage
transistor is formed on the surface of the active region of the low
voltage transistor region (illustration is omitted in the
sub-section (A)) in film thickness between 125 A and 150 A. Here,
in this embodiment, the film thickness is 150 A. On the low voltage
endurance gate oxide film 71, a gate electrode 73 for the low
voltage transistor of a poly silicon film is formed in film
thickness between 2500 A and 4500 A. Here, in this embodiment, the
film thickness is 3500 A (refer to (E)). Although illustration is
omitted, N type diffusion layers are formed in the active region
corresponding to the both ends of the gate electrode 73 for the low
voltage transistor, the both ends being in the z-axis, that is,
perpendicular through the paper.
[0173] In the memory unit of the sixth embodiment of the
semiconductor device, the floating gate 65 and the control gate 69
of the poly silicon film can be widely overlapped with each other
through the inter-layer silicon oxide film 67 on the field oxide
film 3, thereby a large coupling ratio is obtained, making it
possible to rewrite to the memory at a low voltage. Further, since
the control gate 69 is formed with the poly silicon film, both
positive and negative voltages can be applied to the control gate
69.
[0174] FIG. 16 and FIG. 17 show sectional views for explaining the
sixth embodiment of the manufacturing method for manufacturing the
semiconductor device of the sixth embodiment. FIG. 16 shows
sectional views in the A-A' cross-section and the C-C'
cross-section of the sub-section (A) of FIG. 15, and in the D-D'
cross-section of the sub-section (E) of FIG. 15. Further, FIG. 17
shows sectional views in the B-B' cross-section of the sub-section
(A) of FIG. 15. The embodiment of this manufacturing method is
explained with reference to FIG. 15 through FIG. 17.
[0175] (1) The field oxide film 3 for unit separation is formed on
the P substrate 1 by the usual LOCOS method. A sacrifice oxide film
in thickness between 250 A and 400 A is formed on the surface of
the active region demarcated by the field oxide film 3, and a
channel dope injection is performed. After removing the sacrifice
oxide film, a heat oxidization process is performed, and the gate
oxide film 63 for the memory in thickness between 90 A and 100 A is
formed in the active region. A poly silicon film is deposited in
thickness between 2500 A and 4500 A all over the upper surface of
the P substrate 1. By the phototype process technology and the
etching technology, the floating gate 65 is formed on the field
oxide film 3 in the memory unit region, and the gate oxide film 63
for the memory (refer to sub-section (a) of FIG. 16 and sub-section
(a) of FIG. 17).
[0176] (2) An inter-layer silicon oxide film 67 in film thickness
between 400 A and 600 A is formed on the surface of the floating
gate 65 by a heat oxidization process. At this time, the gate oxide
film 63 for the memory in the high-voltage transistor region and in
the low voltage transistor region grows up to have film thickness
between 200 A and 300 A, and turns into the silicon oxide film 75
(refer to sub-section (b) of FIG. 16 and sub-section (b) of FIG.
17).
[0177] (3) A resist pattern 77 that covers the floating gate 65 and
the high-voltage transistor region of the silicon oxide film 75 is
formed, and the silicon oxide film 75 in the low voltage transistor
region is selectively removed (refer to sub-section (c) of FIG. 16
and sub-section (c) of FIG. 17).
[0178] (4) After removing the resist pattern 77, a low voltage
endurance gate oxide film 71 in film thickness between 125 A and
250 A is formed in the memory unit region of the surface of the P
substrate 1 by a heat oxidization process. At this time, the
high-voltage transistor region of the silicon oxide film 75 grows
up to have film thickness between 400 A and 600 A, and turns into a
high voltage endurance gate oxide film 61. Then, a poly silicon
film 79 is deposited in thickness between 2500 A and 4500 A all
over the upper surface of the P substrate 1 (refer to section (d)
of FIG. 16 and sub-section (d) of FIG. 17).
[0179] (5) A control gate 69 is formed in the memory unit region of
the field oxide film 3 and the floating gate 65, a selection gate
62 is formed on the high voltage endurance gate oxide film 61, and
a gate electrode 73 for the low voltage transistor is formed on the
gate electrode 71 by patterning of the poly silicon film 79 by the
phototype process technology and the etching technology. Then, the
N type diffusion layers 5, 7, and 9 and an N type diffusion layer
for the low voltage transistor are formed on the P substrate 1 by
the ion implantation, using the selection gate 62, the floating
gate 65, and the gate electrode 73 as a mask under conditions such
as injecting energy of 70 KeV and a dosing amount of phosphor or
arsenic of 6.times.10.sup.15/cm.sup.2 (refer to FIG. 15).
[0180] In this embodiment, since the gate oxide film (tunnel oxide
film) 63 for the memory and the low voltage endurance gate oxide
film 71 for the low voltage transistor are formed independently,
each of the gate oxide films can take a different film thickness by
one heat oxidization process. In this manner, even when the low
voltage endurance gate oxide film 71 is thinner than the gate oxide
film 63 for the memory, the reliability of both films can be
secured, and film thickness variation can be controlled.
[0181] In this embodiment, the high voltage endurance gate oxide
film 61 for the high-voltage transistor is formed by the heat
oxidization of the silicon oxide film 75 that is formed by growing
the gate oxide film 63 for the memory by the heat oxidization.
However, the heat oxidization process for forming the silicon oxide
film 75 serves also as formation of the inter-layer silicon oxide
film 67. For this reason, if targeted film thickness of the silicon
oxide films 67 is greatly different from the inter-layer oxide film
75, the silicon oxide film 75 of the high-voltage transistor region
has to be once removed, and a new silicon oxide film has to be
formed. In this case, an additional phototype process and an
additional oxide film etching process are required for protecting
either the inter-layer silicon oxide film 67 on the surface of the
floating gate 65 or the silicon oxide film 75.
[0182] FIG. 18 shows the seventh embodiment of the semiconductor
device. Sub-section (A) is a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional view in the C-C' cross-section of the sub-section (A).
Sub-section (E) shows a sectional view of a low voltage transistor
formed in an area different from the sub-section (A). Here, in this
embodiment, the cross-section of the sub-section (E) is defined as
the D-D' cross-section. Although this embodiment describes only one
memory unit, the embodiment is applicable to any number of memory
units. This embodiment is explained with reference to FIG. 18. The
same numerals are given to the portion that achieves the same
function as in the sixth embodiment shown in FIG. 15, and detailed
explanation of the portion is not repeated.
[0183] The field oxide film 3 is formed on the surface of the P
substrate 1, and the N type diffusion layers 5, 7, and 9 are formed
in the active region of the P substrate 1. The high voltage
endurance gate oxide film 61 is formed on the surface of the P
substrate 1 that includes the interval region between the N type
diffusion layers 5 and 7. The selection gate 62 is formed on the
high voltage endurance gate oxide film 61.
[0184] The gate oxide film 63 for the memory is formed on the
surface of the P substrate 1 that includes the interval region
between the N type diffusion layers 7 and 9. The floating gate 65
is formed on the memory unit region of the field oxide film 3, and
the gate oxide film 63 for the memory.
[0185] A laminating film 81 (illustration is omitted in sub-section
(A)) of silicon oxide film/silicon nitride film/silicon oxide film
is formed on the upper surface of the floating gate 65. Film
thickness of the silicon oxide film that constitutes the laminating
film 81 is between 100 A and 150 A. Here, in this embodiment, it is
150 A thick. Film thickness of the silicon nitride film is between
100 A and 200 A. Here, in this embodiment, it is 150 A thick. On
the side of the floating gate 65, a poly silicon oxide film
sidewall 82 is formed in film thickness between 150 A and 250 A.
Here, in this embodiment, it is 200 A thick.
[0186] The laminating film 81 and the poly silicon oxide film
sidewall 82 constitute the second insulation film of the
semiconductor device of the present invention.
[0187] The control gate 69 is formed on the field oxide film 3 and
the laminating film 81. The low voltage endurance gate oxide film
71 and the gate electrode 73 are formed (refer to (E)) in the low
voltage transistor region (illustration is omitted in (A)).
Although illustration is omitted, an N type diffusion layer is
formed in the active region corresponding to both ends of the gate
electrode 73 for the low voltage transistor, both ends being in the
z-axis, that is, perpendicular through the paper.
[0188] For the memory unit of the seventh embodiment of the
semiconductor device, the laminating film 81 is provided, which
includes a silicon nitride film through which an electron cannot
pass easily between the floating gate 65 and the control gate 69,
so that the reliability of the memory is raised.
[0189] FIG. 19 shows sectional views for explaining the seventh
embodiment of the manufacturing method for manufacturing the
semiconductor device of the seventh embodiment, which are in the
A-A' cross-section and the C-C' cross-section of the sub-section
(A) of FIG. 18, and in the D-D' cross-section of the sub-section
(E) of FIG. 18. The sectional views in the B-B' cross-section of
sub-section (A) of FIG. 18 is the same as FIG. 17. The embodiment
of this manufacturing method is explained with reference to FIG. 17
through FIG. 19.
[0190] (1) The field oxide film 3 for unit separation is formed on
the P substrate 1 by the usual LOCOS method. A sacrifice oxide film
is formed on the surface of the active region demarcated by the
field oxide film 3, and a channel dope injection is performed.
After removing the sacrifice oxide film, a heat oxidization process
is performed and the gate oxide film 63 for the memory is formed on
the surface of the active region. A poly silicon film is deposited
all over the upper surface of the P substrate 1, on which a
laminating film 80 that includes a silicon nitride film in
thickness between 100 A and 200 A and a silicon oxide film in
thickness between 100 A and 150 A is formed. By the phototype
process technology and the etching technology, the floating gate 65
is formed on the memory unit region of the field oxide film 3, and
on the gate oxide film 63 for the memory, and the laminating film
80 is formed on the upper surface of the floating gate 65 (refer to
sub-section (a) FIG. 17 and sub-section (a) of FIG. 19).
[0191] (2) A poly silicon oxide film sidewall 82 in film thickness
between 150 A and 250 A is formed on the side of the floating gate
65 by a heat oxidization process. At this time, the silicon nitride
film of the laminating film 80 is oxidized again, forming a silicon
oxide film which is 5-50 A thick, resulting in the laminating film
81 of a three-layer film consisting of silicon oxide film/silicon
nitride film/silicon oxide film formed on the upper surface of the
silicon nitride film. Simultaneously, the gate oxide film 63 for
the memory in the high-voltage transistor region and the low
voltage transistor region grows, and becomes the silicon oxide film
75 (refer to sub-section (b) of FIG. 17 and sub-section (b) of FIG.
19).
[0192] (3) Like the process explained with reference to the
sub-section (c) of FIG. 16 and the sub-section (c) of FIG. 17, a
resist pattern 77 is formed, and the low voltage transistor region
of the silicon oxide film 75 is removed (refer to sub-section (c)
of FIG. 17 and sub-section (c) of FIG. 19).
[0193] (4) Like the process explained with reference to the
sub-section (d) of FIG. 16 and the sub-section (d) of FIG. 17, the
resist pattern 77 is removed, and then, a heat oxidization process
is performed such that the low voltage endurance gate oxide film 71
is formed on the surface of the active region of the low voltage
transistor region. The high voltage endurance gate oxide film 61 is
formed in the high-voltage transistor region, and the poly silicon
film 79 is deposited after that (refer to sub-section (d) of FIG.
17 and sub-section (d) of FIG. 19).
[0194] (5) Like the process explained with reference to FIG. 15,
the selection gate 62, the control gate 69, and the gate electrode
73 for the low voltage transistor are formed from the poly silicon
film 79 by the phototype process technology and the etching
technology. Then, the N type diffusion layers 5, 7, and 9 and an N
type diffusion layer for the low voltage transistor are formed by
the ion implantation (refer to FIG. 18).
[0195] In this embodiment, the high voltage endurance gate oxide
film 61 for the high-voltage transistor is formed by heat
oxidization of the silicon oxide film 75 that was made by growing
the gate oxide film 63 for the memory by heat oxidization. Here,
the heat oxidization process that forms the silicon oxide film 75
serves as formation of the poly silicon oxide film sidewall 82.
When targeted film thickness of the silicon oxide film 75 in the
heat oxidization process differs greatly from the film thickness
target of the poly silicon oxide film sidewall 82, a phototype
process and an oxide film etching process are added for protecting
the laminating film 81 of the surface of the floating gate 65 and
the poly silicon oxide film sidewall 82, the silicon oxide film 75
is selectively removed and heat oxidization is performed again such
that the silicon oxide film having desired film thickness is formed
in the high-voltage transistor region.
[0196] Further, although the poly silicon oxide film sidewall 82 is
formed by heat oxidization in this embodiment, an HTO film sidewall
may be formed by etching-back an HTO film that is deposited in the
state of FIG. 19 (a). However, since the gate oxide film 63 for the
memory of the active region surface in the high-voltage transistor
region and the low voltage transistor region is also removed by
etching-back, a heat oxidization process is necessary such that a
silicon oxide film used as the predecessor of the high voltage
endurance gate oxide film is formed.
[0197] FIG. 20 shows the eighth embodiment of the semiconductor
device. Sub-section (A) is a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional view in the C-C' cross-section of the sub-section (A).
Sub-section (E) shows a sectional view of a low voltage transistor
formed in an area different from the sub-section (A). The
cross-section of the sub-section (E) is called the D-D'
cross-section. Although this embodiment describes only one memory
unit, the embodiment is applicable to any number of memory units.
This embodiment is explained with reference to FIG. 20. The same
numerals are given to the portion that achieves the same function
as in the sixth embodiment shown in FIG. 15, and detailed
explanation of the portion is not repeated.
[0198] The field oxide film 3 is formed on the surface of the P
substrate 1, and the N type diffusion layers 5, 7, and 9 are formed
in the active region of the P substrate 1 of the memory unit
region. The selection gate 62 is formed through the high voltage
endurance gate oxide film 61 on the P substrate 1 that includes the
interval region between the N type diffusion layers 5 and 7.
[0199] The gate oxide film 63 for the memory is formed on the
surface of the P substrate 1 that includes the interval region
between the N type diffusion layers 7 and 9. The floating gate 65
is formed on the field oxide film 3 of the memory unit region, and
the gate oxide film 63 for the memory. The inter-layer silicon
oxide film 67 is formed on the surface of the floating gate 65. The
control gate 69 is formed on the field oxide film 3 and the
inter-layer silicon oxide film 67. The low voltage endurance gate
oxide film 71 and the gate electrode 73 are formed in the low
voltage transistor region (illustration is omitted in sub-section
(A)) (refer to sub-section (E)).
[0200] A poly silicon film 83 having the same film thickness as the
floating gate 65 is formed on the field oxide film 3. A silicon
oxide film 84 having the same film thickness as the inter-layer
silicon oxide film 67 is formed on the surface of the poly silicon
film 83. A poly silicon film 85 having the same film thickness as
the control gate 69 is formed on the silicon oxide film 84. The
poly silicon film 83, the silicon oxide film 84, and the poly
silicon film 85 constitute a capacitor.
[0201] FIG. 21 shows sectional views for explaining the eighth
embodiment of the manufacturing method for manufacturing the
semiconductor device of the eighth embodiment, the sectional views
being in the A-A' cross-section and the C-C' cross-section of the
sub-section (A) of FIG. 20, and in the D-D' cross-section of the
sub-section (E) of FIG. 20. The sectional view in the B-B'
cross-section of the sub-section (A) of FIG. 20 is the same as that
of FIG. 17. The embodiment of this manufacturing method is
explained with reference to FIG. 17, FIG. 20, and FIG. 21.
[0202] (1) The field oxide film 3 for unit separation is formed on
the P substrate 1 by the usual LOCOS method. A sacrifice oxide film
is formed on the surface of the active region demarcated by the
field oxide film 3, and a channel dope injection is performed.
After removing the sacrifice oxide film, a heat oxidization process
is performed such that the gate oxide film 63 for the memory is
formed on the surface of the active region. A poly silicon film in
thickness between 2500 A and 4500 A is deposited all over the upper
surface of the P substrate 1. With the phototype process technology
and the etching technology, the floating gate 65 is formed on the
memory unit region of the field oxide film 3, and on the gate oxide
film 63 for the memory. The poly silicon film 83 serving as the
lower layer of the capacitor is formed on the field oxide film 3
(refer to sub-section (a) of FIG. 17 and sub-section (a) of FIG.
21).
[0203] (2) The inter-layer silicon oxide films 67 and 84 in
thickness between 150 A and 250 A are formed on the surface of the
floating gate 65 and on the surface of the poly silicon film 83,
respectively, by a heat oxidization process. The gate oxide film 63
for the memory in the high-voltage transistor region and the low
voltage transistor region grows, and becomes the silicon oxide film
75 (refer to sub-section (b) of FIG. 17 and sub-section (b) of FIG.
21).
[0204] (3) A resist pattern 86 is formed such that the floating
gate 65, the poly silicon film 83, and the silicon oxide film 75 in
the high-voltage transistor region are covered, and the silicon
oxide film 75 of the low voltage transistor region is selectively
removed (refer to sub-section (c) of FIG. 17 and sub-section (c) of
FIG. 21).
[0205] (4) Like the process explained with reference to the
sub-section (d) of FIG. 16 and the sub-section (d) of FIG. 17,
after removing the resist pattern 86, a heat oxidization process is
performed such that the low voltage endurance gate oxide film 71 is
formed on the surface of the active region in the low voltage
transistor region. The silicon oxide film 75 of the high-voltage
transistor region is grown, forming the high voltage endurance gate
oxide film 61, and then, the poly silicon film 79 is deposited all
over the upper surface of the P substrate 1 (refer to sub-section
(d) FIG. 17 and sub-section (d) of FIG. 21).
[0206] (5) The poly silicon film 85 serving as the upper layer of
the capacitor is formed from the poly silicon film 79 on the
selection gate 62, on the control gate 69, and on the silicon oxide
film 84 by the phototype process technology and the etching
technology. Thereby, the capacitor consisting of the poly silicon
film 83, the silicon oxide film 84, and the poly silicon film 85 is
formed simultaneously. Then, the N type diffusion layers 5, 7, and
9 and an N type diffusion layer for the low voltage transistor are
formed by the ion implantation (refer to FIG. 20).
[0207] In this embodiment, although the silicon oxide film 84
serves as the insulation film between the poly silicon films 83 and
85 of the capacitor, a laminating film consisting of silicon oxide
film/silicon nitride film/silicon oxide film may serve the purpose,
like the manufacturing method explained with reference to FIG.
19.
[0208] FIG. 22 shows the ninth embodiment of the semiconductor
device. Sub-section (A) is a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional view in the C-C' cross-section of the sub-section (A).
Sub-section (E) shows a sectional view of the low voltage
transistor formed in an area different from the sub-section (A).
The cross-section of the sub-section (E) is named the D-D'
cross-section. Although this embodiment describes only one memory
unit, the embodiment is applicable to any number of memory units.
This embodiment is explained with reference to FIG. 22. The same
numerals are given to the portion that achieves the same function
as in the fifth embodiment shown in FIG. 12 and the sixth
embodiment shown in FIG. 15, and detailed explanation of the
portion is not repeated.
[0209] The field oxide film 3 is formed on the surface of the P
substrate 1. The N type embedded diffusion layer 47 is formed in
the region including the active region of the P substrate 1
surrounded by the field oxide film 3. The N type diffusion layers
49 and 51 are formed on the both sides of the embedded diffusion
layer 47. The N type diffusion layer 5 and the N type diffusion
layer 49 are formed with an interval, and the N type diffusion
layer 9 and the N type diffusion layer 51 are formed with an
interval in the active region of the P substrate 1.
[0210] A gate oxide film 87 for the memory in thickness between 200
A and 300 A is formed on the surface of the P substrate 1 that
includes the interval region between the N type diffusion layers 9
and 51, overlapping in part with the N type diffusion layers 9 and
51. Here, in this embodiment, the thickness is 250 A.
[0211] The tunnel oxide film 53 is formed in a part of the surface
of the embedded diffusion layer 47. A silicon oxide film 88 is
formed simultaneously with the gate oxide film 87 for the memory
around the tunnel oxide film 53 on the surface of the embedded
diffusion layer 47.
[0212] A floating gate 89 is formed on the memory unit region of
the field oxide film 3, and the gate oxide film 87 for the memory.
A part of a floating gate 89 is formed also on the tunnel oxide
film 53 and the silicon oxide film 88. A silicon oxide film (second
insulation film) 90 is formed on the surface of the floating gate
89. The control gate 69 is formed on the field oxide film 3 and the
silicon oxide film 90.
[0213] The selection gate 62 is formed through the high voltage
endurance gate oxide film 61 on the P substrate 1 that includes the
interval region between the N type diffusion layers 5 and 49,
overlapping in part with the N type diffusion layers 5 and 49. The
low voltage endurance gate oxide film 71 and the gate electrode 73
(refer to sub-section (E)) are formed in the low voltage transistor
region (illustration is omitted in sub-section (A)).
[0214] In the ninth embodiment of the semiconductor device, since
the tunnel oxide film 53 is formed in thickness that is thinner
than the gate oxide film 87 for the memory, the writing and erasing
of the memory is performed through the tunnel oxide film 53, and
the flexibility in designing the memory properties is raised.
[0215] FIG. 23 and FIG. 24 show sectional views for explaining the
ninth embodiment of the manufacturing method for manufacturing the
semiconductor device of the ninth embodiment. FIG. 23 shows
sectional views in the A-A' cross-section and the C-C'
cross-section of the sub-section (A) of FIG. 22, and in the D-D'
cross-section of the sub-section (E) of FIG. 22. Further, FIG. 24
shows sectional views in the B-B' cross-section of the sub-section
(A) of FIG. 22. This manufacturing method is explained with
reference to FIG. 22 through FIG. 24.
[0216] (1) The field oxide film 3 for unit separation is formed on
the P substrate 1 by the usual LOCOS method. By the ion
implantation, e.g., at 80 KeV and with a dosing amount of phosphor
of 8.times.10.sup.15/cm.sup.2- , the embedded diffusion layer 47 is
formed around the tunnel oxide film region of the P substrate 1. A
sacrifice oxide film is formed on the surface of the active region
demarcated by the field oxide film 3, and a channel dope injection
is performed. After removing the sacrifice oxide film, a heat
oxidization process is performed such that a silicon oxide film 91
in thickness between 150 A and 250 A is formed in the active
region. A resist pattern 92 that has an opening only in the tunnel
oxide film region is formed, and the silicon oxide film 91 at the
tunnel oxide film region is selectively removed, using the resist
pattern 92 as a mask (refer to sub-section (a) of FIG. 23 and
sub-section (a) of FIG. 24).
[0217] (2) The tunnel oxide film 53 in thickness between 90 A and
100 A is formed in the tunnel oxide film region on the surface of
the P substrate 1 by a heat oxidization process, after removing the
resist pattern 92. At this time, the silicon oxide film 91 in the
region around the tunnel oxide film region and other active region
surfaces grows up to have 250-350 A film thickness, and turns into
the silicon oxide film 88 and the gate oxide film 87 for the
memory.
[0218] A poly silicon film is deposited all over the P substrate 1.
The floating gate 89 is formed on the memory unit region of the
gate oxide film 87 of the memory, the field oxide film 3, the
silicon oxide film 88, and the tunnel oxide film 53 by the
phototype process technology and the etching technology (refer to
sub-section (b) of FIG. 23 and sub-section (b) of FIG. 24).
[0219] (3) The silicon oxide film 90 in thickness between 150 A and
250 A is formed on the surface of the floating gate 89 by a heat
oxidization process. At this time, the gate oxide film 87 for the
memory in the high-voltage transistor region and the low voltage
transistor region grows to become a silicon oxide film 93 that is
350-450 A thick (refer to sub-section (c) of FIG. 23 and
sub-section (c) of FIG. 24).
[0220] (4) A resist pattern 94 is formed such that the floating
gate 89 is covered, and the silicon oxide film 93 of the active
region surface in the high-voltage transistor region and the low
voltage transistor region is selectively removed (refer to
sub-section (d) of FIG. 23 and sub-section (d) of FIG. 24).
[0221] (5) A silicon oxide film 95 is formed on the surface of the
active region of the high-voltage transistor region and the low
voltage transistor region in thickness between 350 A and 450 A by a
heat oxidization process, after removing the resist pattern 94. The
resist pattern 77 is formed such that it has an opening in the low
voltage transistor region, and the silicon oxide film 95 in the
active region surface of the low voltage transistor region is
selectively removed (refer to sub-section (e) of FIG. 23 and
sub-section (e) of FIG. 24).
[0222] (6) Like the process explained with reference to the
sub-section (d) of FIG. 16 and the sub-section (d) of FIG. 17, the
low voltage endurance gate oxide film 71 is formed on the surface
of the active region of the low voltage transistor region, and the
high voltage endurance gate oxide film 61 is formed in the
high-voltage transistor region by a heat oxidization process after
removing the resist pattern 77, and then, a poly silicon film is
deposited. Like the process explained with reference to FIG. 15,
the selection gate 62, the control gate 69, and the gate electrode
73 for the low voltage transistor are formed by the phototype
process technology and the etching technology. Then, the N type
diffusion layers 5, 9, 49, and 51 and an N type diffusion layer for
the low voltage transistor are formed by the ion implantation
(refer to FIG. 22).
[0223] In this embodiment, film thickness of each of the tunnel
oxide film 53, the high voltage endurance gate oxide film 61, the
low voltage endurance gate oxide film 71, and the gate oxide film
87 for the memory can be set up freely. Further, since the tunnel
oxide film 53 and the low voltage endurance gate oxide film 71 are
formed by the once-oxidized film, and the high voltage endurance
gate oxide film 61 and the gate oxide film 87 for the memory are
formed by the twice-oxidized film, the reliability of each oxide
film is secured and the control of film thickness variation is
facilitated.
[0224] Although the insulation film between the control gate 69 and
the floating gate 89 is formed by the silicon oxide film 90 in this
embodiment, the present invention is not limited to this. For
example, the insulation film between the upper surface of the
floating gate 89 and the control gate 69 may be formed by a
laminating film of silicon oxide film/silicon nitride film/silicon
oxide film, like the manufacturing method explained with reference
to FIG. 19. In this case, influence upon the capacitance between
the floating gate and the control gate by oxidization processing at
a later process is decreased, which enhances properties of the
memory.
[0225] Further, the capacitor pattern that consists of a lower
layer of a poly silicon film formed simultaneously with the
floating gate 89, and an upper layer of a poly silicon film formed
simultaneously with the control gate 69, like the manufacturing
method explained with reference to FIG. 21, may be formed
simultaneously.
[0226] FIG. 25 shows the tenth embodiment of the semiconductor
device. Sub-section (A) is a plan view. Sub-section (B) shows a
sectional view in the A-A' cross-section, sub-section (C) shows a
sectional view in the B-B' cross-section, and sub-section (D) shows
a sectional view in the C-C' cross-section of the sub-section (A).
Sub-section (E) shows a sectional view of a low voltage transistor
formed in an area different from the sub-section (A). The
cross-section used in the sub-section (E) is named the D-D'
cross-section. Although this embodiment describes only one memory
unit, the embodiment is applicable to any number of memory units.
This embodiment is explained with reference to FIG. 25. The same
numerals are given to the portion that achieves the same function
as in the sixth embodiment shown in FIG. 15, and detailed
explanation of the portion is not repeated.
[0227] Points of this embodiment, which are different from the
sixth embodiment are that a selection gate 97 is formed by the poly
silicon film that is formed simultaneously with the floating gate
65, that a high voltage endurance gate oxide film 96 for the
high-voltage transistor is formed by a twice-oxidized film under
the selection gate 97, and that the silicon oxide film 68 is formed
on the surface of the selection gate 97. The film thickness of the
high voltage endurance gate oxide film 96 is between 400 A and 600
A, and here, in this embodiment, it is 500 A. The film thickness of
the selection gate 97 is between 2500 A and 4500 A, and here, it is
3500 A. The film thickness of the silicon oxide film 68 is between
150 A and 250 A, and here, it is 200 A. Illustration of the silicon
oxide film 68 is omitted in the sub-section of FIG. 25.
[0228] FIG. 26 and FIG. 27 show sectional views for explaining the
tenth embodiment of the manufacturing method for manufacturing the
semiconductor device of the tenth embodiment. FIG. 26 shows
sectional views in the A-A' cross-section and the C-C'
cross-section of the sub-section (A) of FIG. 25, and in the D-D'
cross-section of the sub-section (E) of FIG. 25. Further, FIG. 27
shows sectional views in the B-B' cross-section of the sub-section
(A) of FIG. 25. The embodiment of this manufacturing method is
explained with reference to FIG. 25 through FIG. 27.
[0229] (1) The field oxide film 3 for unit separation is formed on
the P substrate 1 by the usual LOCOS method. A sacrifice oxide film
is formed on the surface of the active region demarcated by the
field oxide film 3, and a channel dope injection is performed.
After removing the sacrifice oxide film, a heat oxidization process
is performed such that the silicon oxide film whose film thickness
is between 350 A and 450 A is formed in the active region. By the
phototype process technology and the etching technology, the
silicon oxide film is selectively removed such that the silicon
oxide film remains only in the high-voltage transistor region. A
heat oxidization process is performed such that the gate oxide film
63 for the memory is formed on the surface of the active region of
the memory unit region and the low voltage transistor region. At
this time, the silicon oxide film in the high-voltage transistor
region grows to have film thickness between 400 A and 600 A, and
turns into the high voltage endurance gate oxide film 96. A poly
silicon film in thickness between 2500 A and 4500 A is deposited
all over the upper surface of the P substrate 1. By the phototype
process technology and the etching technology, the floating gate 65
is formed on the memory unit region of the field oxide film 3 and
the gate oxide film 63 for the memory, and the selection gate 97 is
formed on the high-voltage transistor region of the field oxide
film 3 and the high voltage endurance gate oxide film 96 (refer to
sub-section (a) of FIG. 26 and sub-section (a) of FIG. 27).
[0230] (2) The silicon oxide film 68 in film thickness between 150
A and 250 A is formed on the surface of the selection gate 97 by a
heat oxidization process, and the inter-layer silicon oxide film 67
is formed on the surface of the floating gate 65. At this time, the
low voltage transistor region of the gate oxide film 63 for the
memory of grows, and becomes the silicon oxide film 98 (refer to
sub-section (b) of FIG. 26 and sub-section (b) of FIG. 27).
[0231] (3) The resist pattern 77 is formed such that the floating
gate 65 and the selection gate 97 may be covered, and the low
voltage transistor region of the silicon oxide film 98 is
selectively removed (refer to subsection (c) of FIG. 26 and
subsection (c) of FIG. 27).
[0232] (4) After removing the resist pattern 77, the low voltage
endurance gate oxide film 71 is formed on the surface of the active
region of the low voltage transistor region by a heat oxidization
process, then, the poly silicon film 79 is deposited all over the P
substrate 1 (refer to sub-section (d) of FIG. 17 and sub-section
(d) of FIG. 21).
[0233] (5) The control gate 69 and the gate electrode 73 for the
low voltage transistor are formed from the poly silicon film 79 by
the phototype process technology and the etching technology. Then,
the N type diffusion layers 5, 7, and 9 and the N type diffusion
layer for the low voltage transistor are formed by the ion
implantation (refer to FIG. 25).
[0234] In this embodiment, although the inter-layer silicon oxide
film 67 serves as an insulation film between the floating gate 65
and the control gate 69, a laminating film consisting of silicon
oxide film/silicon nitride film/silicon oxide film may serve the
purpose, like the manufacturing method explained with reference to
FIG. 19. Further, the capacitor pattern consisting of the lower
layer of the poly silicon film formed simultaneously with the
floating gate 65, and the upper layer of the poly silicon film
formed simultaneously with the control gate 69 may be
simultaneously formed, like the manufacturing method explained with
reference to FIG. 21.
[0235] Although the embodiments of the present invention are
described as above, the present invention is not limited to these
embodiments, but various variations and modifications may be made
without departing from the scope of the present invention.
[0236] The semiconductor device of the present invention includes a
control gate consisting of a poly silicon film formed on a first
insulation film, and a poly silicon film formed on the first
insulation film and a gate oxide film. The semiconductor device
further includes a non-volatile memory that includes a floating
gate provided on either of the upper layer and the lower layer of
the control gate through a second insulation film on the first
insulation film, the floating gate overlapping with the control
gate. The control gate and the floating gate are laminated on the
first insulation film, thereby a large coupling ratio is obtained,
which enables rewriting at a low voltage. Further, since the
control gate is formed on the first insulation film, both a
positive voltage and a negative voltage can be applied to the
control gate.
[0237] The second insulation film between the control gate and the
floating gate of the semiconductor device of the present invention
is structured by a laminating film of silicon oxide film--silicon
nitride film--silicon oxide film, enhancing the reliability of the
memory.
[0238] The semiconductor device of the present invention includes a
tunnel oxide film having film thickness that is thinner than the
gate oxide film for the memory on one of two diffusion regions, and
a part of the floating gate is formed also on the tunnel oxide
film, which enables an electric charge to be injected to and
discharged from the floating gate through the tunnel oxide film,
thereby the design flexibility of the memory properties is
raised.
[0239] The manufacturing method of the present invention includes a
process (A) wherein the gate oxide film for a transistor is formed
on the surface of the active region, a process (B) wherein the
control gate is formed on the field oxide film of the memory unit
region, and a gate electrode for the transistor is formed on the
gate oxide film for the transistor, a process (C) wherein an
inter-layer silicon oxide film is formed on the surface of the
control gate and on the surface of the gate electrode for the
transistor, a process (D) wherein the gate oxide film for the
memory is formed on the surface of the active region of the memory
unit region, and a process (E) wherein the floating gate is formed
on the inter-layer silicon oxide film, the field oxide film and the
gate oxide film for the memory, according to which the
semiconductor device of the present invention can be manufactured.
Further, both the gate oxide film for the transistor and the gate
oxide film for the memory can be formed by a once-oxidized film,
the reliability of both the gate oxide films is enhanced, and
reduction of film thickness variation is achieved.
[0240] The present invention also provides the manufacturing method
that includes a process (A) wherein the gate oxide film for the
memory is formed on the surface of the active region, a process (B)
wherein a floating gate is formed on a gate oxide film for the
memory in the memory unit region, and the field oxide film, a
process (C) wherein the inter-layer silicon oxide film is formed on
the surface of the floating gate, while forming a high voltage
endurance gate oxide film for the high-voltage transistor by
growing film thickness of the gate oxide film for the memory on the
surface of the active region in the high-voltage transistor region,
a process (D) wherein the low voltage endurance gate oxide film for
the low voltage transistor is formed on the surface of the active
region of the low voltage transistor region, while growing film
thickness of the high voltage endurance gate oxide film, and a
process (E) wherein a floating gate is formed at least on the upper
layer of the floating gate that is present on the field oxide film
in the memory unit region via the inter-layer silicon oxide film,
according to which the semiconductor device of the present
invention can be manufactured. Further, each of the low voltage
endurance gate oxide film for the low voltage transistor and the
gate oxide film for the memory can be formed by the once-oxidized
film, enhancing the reliability of both the gate oxide films, and
reducing film thickness variation.
[0241] The present invention further provides the manufacturing
method that includes a process (A) wherein silicon oxide film for
the gate oxide film is formed on the surface of the active region,
a process (B) wherein the gate oxide film for the non-volatile
memory is formed on the surface of the active region of the memory
unit region, while forming the high voltage endurance gate oxide
film for the high voltage transistor by growing film thickness of
the silicon oxide film for the gate oxide film in the high voltage
transistor region, a process (C) wherein the floating gate is
formed on the gate oxide film for the memory in the memory unit
region and the field oxide film, and the gate electrode for the
high voltage transistor is formed on the high withstand gate oxide
film, a process (D) wherein the inter-layer silicon oxide film is
formed on the surface of the floating gate and the surface of the
gate electrode for the high voltage transistor, a process (E)
wherein the low withstand gate oxide film for the low voltage
transistor is formed on the surface of the active region of the low
transistor region, and a process (F) wherein the control gate is
formed through the inter-layer silicon oxide film at least on the
upper layer of the floating gate that is present on the field oxide
film of the memory unit region, and the gate electrode for the low
voltage transistor is formed on the low withstand gate oxide film,
according to which the semiconductor device of the present
invention is manufactured. Further, each of the low voltage
endurance gate oxide film for the low voltage transistor and the
gate oxide film for the memory is formed by the once-oxidized film,
enhancing the reliability of the both gate oxide films and reducing
film thickness variation. Further, the high voltage endurance gate
oxide film for the high-voltage transistor is formed by a
twice-oxidized film, enhancing the reliability of the high voltage
endurance gate oxide film and reducing film thickness variation, as
compared with the conventional technology.
* * * * *