U.S. patent application number 11/180189 was filed with the patent office on 2005-11-10 for functional polymer.
This patent application is currently assigned to Shipley Company, L.L.C.. Invention is credited to Anzures, Edgardo, Barr, Robert K., Lundy, Daniel E..
Application Number | 20050250044 11/180189 |
Document ID | / |
Family ID | 32034393 |
Filed Date | 2005-11-10 |
United States Patent
Application |
20050250044 |
Kind Code |
A1 |
Barr, Robert K. ; et
al. |
November 10, 2005 |
Functional polymer
Abstract
A polymer having .alpha.,.beta. unsaturated groups and a group
that generates a free radical when exposed to actinic radiation.
The polymer may be self-cross-linking.
Inventors: |
Barr, Robert K.;
(Shrewsbury, MA) ; Anzures, Edgardo; (Westborough,
MA) ; Lundy, Daniel E.; (Winchendon, MA) |
Correspondence
Address: |
John J. Piskorski
Edwards & Angell, LLP
P.O. Box 55874
Boston
MA
02205
US
|
Assignee: |
Shipley Company, L.L.C.
Marlborough
MA
01752
|
Family ID: |
32034393 |
Appl. No.: |
11/180189 |
Filed: |
July 13, 2005 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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11180189 |
Jul 13, 2005 |
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10391154 |
Mar 18, 2003 |
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60414759 |
Sep 30, 2002 |
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60414758 |
Sep 30, 2002 |
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60432875 |
Dec 12, 2002 |
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Current U.S.
Class: |
430/284.1 |
Current CPC
Class: |
Y10S 430/121 20130101;
Y10S 430/117 20130101; G03F 7/031 20130101; Y10S 522/904 20130101;
Y10S 430/124 20130101; Y10S 522/905 20130101; G03F 7/027 20130101;
G03F 7/0388 20130101; G03F 7/038 20130101 |
Class at
Publication: |
430/270.1 |
International
Class: |
G03C 001/492 |
Claims
1-20. (canceled)
21. A liquid photoresist comprising one or more diluents chosen
from organic solvents and water, and a polymer having
.alpha.,.beta.-unsaturat- ion and a group that generates a free
radical upon exposure of the photoresist to actinic radiation, the
polymer has an average molecular weight of at least 1000
daltons.
22. The liquid photoresist of claim 21, wherein the free radical is
generated from a backbone of the polymer.
23. The liquid photoresist of claim 21, wherein the free radical is
generated from a photoinitiator joined to the polymer.
24. The liquid photoresist of claim 23, wherein the photoinitiator
is an imidazole dimer, a benzophenone, an acetaphenone, an
anthraquinone, a naphthaquinone, a thioxanthone, a ketal, a benzoin
ether, a triazine-based compound, or combinations thereof.
25. The liquid photoresist of claim 24, wherein the imidazole dimer
is a hexaarylbiimidazole.
26. The liquid photoresist of claim 21, further comprising a
stripping agent, a plasticizer, a surfactant, an aromatic
chromophore, a dye, or combinations thereof joined to the
polymer.
27. The liquid photoresist of claim 21, wherein the polymer
comprises 25% by weight to 70% by weight of the liquid
photoresist.
28. The liquid photoresist of claim 27, wherein the polymer
comprises 30% by weight to 50% by weight of the liquid
photoresist.
29. The liquid photoresist of claim 21, wherein the polymer further
comprises multiple ester links.
Description
BACKGROUND OF THE INVENTION
[0001] The present invention is directed to a functional polymer.
More specifically, the present invention is directed to a
functional polymer having unsaturated groups and produces a free
radical upon exposure to actinic radiation.
[0002] Polymers are employed for numerous purposes in a wide
variety of industries. Functional polymers that readily form films
on a surface are highly desirable for use in the fields of
lithography, optical data storage, decorative pigments, adhesives,
cosmetics, paints, shellack, security applications or active and
passive optical elements such as polarizers, optical retarders or
color filters, electrophotographic imaging members, and the
like.
[0003] In addition to polymers, acrylates, methacrylates and other
unsaturated monomers are employed in coatings, adhesives, sealants,
and elastomers, and may be cross-linked by ultraviolet light (UV)
radiation or peroxide initiated free radical cure. Such monomers
are typically low molecular weight compounds that may be volatile
or readily absorbed through skin and may cause adverse health
effects. Additionally, many such unsaturated monomers are unstable
in compositions, thus they precipitate out of solution during
storage reducing the shelf life of the composition. Further, many
unsaturated monomers precipitate out of processing solution leaving
an undesirable scum or residue, which may contaminate articles or
manufacturing apparatus. Reducing the monomer content of
compositions may overcome some of the foregoing problems, however,
unsaturated monomers are often needed to provide the cross-linking
component in a composition.
[0004] In addition to unsaturated monomers, photoinitiators
employed in compositions sensitive to actinic radiation also create
unwanted problems. Many photoinitiators are insoluble in aqueous or
polar diluents because of their aromatic structures. As a result
such photoinitiators precipitate out of solution to contribute to
the undesirable scum and residue caused by unsaturated monomers.
Such a problem is especially found in a number of photoresists.
Also, such photoinitiators may be absorbed through the skin
creating a hazard to workers.
[0005] Photoresists include at least a resin binder, a
cross-linking monomer or oligomer and a photoinitiator. A wide
variety of polymeric binders may be used in photoresists. Such
polymeric binders may include, as polymerized components, one or
more acid functional monomers such as acrylic acid or methacrylic
acid. Photoresists may be employed in a number of industries. Such
industries include, but are not limited to, the electronics
industry such as the manufacture of printed wiring boards,
photomasks, planographic printing plates and semiconductors, color
filters for use in color liquid crystal display devices, and color
image pick-up elements.
[0006] A photoresist may be either positive-acting or
negative-acting. For negative-acting photoresists, coating layer
portions that are exposed to activating radiation polymerize or
cross-link in a reaction between a photoactive compound and
polymerizable agents of the photoresist composition. Consequently,
the exposed coating portions are rendered less soluble in a
developer solution than unexposed portions. For positive-acting
photoresists, exposed portions are rendered more soluble in a
developer solution while areas not exposed remain comparatively
less developer soluble.
[0007] Photoresists also may be either liquid or dry film. Liquid
photoresists are disposed, coated, or applied on a substrate and
then cured. Dry film photoresists may be laminated to a substrate.
One problem with many photoresists is that they are difficult to
strip from electrolytically plated circuit boards using
conventional alkaline aqueous stripping solutions, e.g. 3% sodium
hydroxide solutions. If the photoresist is not completely stripped
and removed, ragged metal circuit lines may result after etching
and may cause short-circuiting of the board.
[0008] Organic-based (amine- or organic solvent-containing)
alkaline stripping solutions may be used which produce smaller
stripped particles to facilitate stripping. While such
organic-based strippers remove photoresist better than
inorganic-based strippers, they are expensive relative to
inorganic-based strippers (e.g. sodium or potassium hydroxide) and
have more waste treatment and environmental concerns associated
with them. Solvent-strippable photoresists are much less desirable
due to workplace regulations limiting or reducing solvent
emissions.
[0009] Another problem associated with many photoresists is the
build-up of organic scum and residue from uncured photoresist, as
briefly mentioned above. Such organic scum and residue may deposit
on various articles and apparatus during the manufacture of
products made using photoresists such as printed wiring boards,
developer solutions and developer apparatus. Much of the organic
scum and residue is caused by unsaturated monomers and oligomers
such as (meth)acrylate-based compounds and photoactive agents
having numerous aromatic groups. Examples of such photoactive
agents that may form part of the scum and residue include, but are
not limited to, imidazole dimers, benzophenones, acetophenones,
anthraquinones, naphthaquinones, and triazine-based compounds. Such
contaminants are not readily water-soluble or water-dispersible
after they form residues in solution or deposit on an article or
apparatus. As dissolved photoresists build up in solution
(developer loading) insoluble organic materials begin to form in
the developing tank eventually forming scum or residue. Presence of
anti-foam additives (added to developer solutions to minimize
foaming) increases the tendency for residue and scum to form. As
the level of scum builds chances increase for a redeposit of the
scum and residue onto the developed circuit board. Such redeposited
residues cause a retardation of etching solution (etching
chemistries have difficulty penetrating organic residues) and cause
plating inhibition. Where etch is retarded, circuit shorts form
causing a defective circuit board. In addition to increasing
potential for defective circuit boards, the residue and scum also
make cleaning equipment difficult, thus increasing maintenance time
and cost in circuit board manufacturing.
[0010] U.S. Pat. No. 5,945,489 and U.S. Pat. No. 6,025,410 both to
Moy et al. (also see "Novel Resins That Cure Without Added
Photoinitiator" by Sheridan et al. Chemistry III-New Chemistry,
RadTech 2002, pages 462-474 (Technical Conference Proceedings))
disclose photosensitive oligomers that may be cross-linked without
an added photoinitiator. The patents disclose that a Michael
addition of acetoacetate donors to multifunctional acrylate
receptor compounds yields polyesters with reactive pendent acrylate
groups, which may be cross-linked in a subsequent curing reaction.
The patents state that pendent methyl ketone substituents serve as
an internal photoinitiator. Upon exposure to UV radiation, an acyl
radical with the methyl substituent is believed to be formed which
acts as a photoinitiator, thus photoinitiators are not added to
compositions containing the oligomers. Such oligomers are liquid
oligomers, which may be employed as decorative coatings on wood and
metal substrates. Odor generated from unreacted photoinitiators and
skin absorption of unreacted photoinitiators is avoided, thus
compositions containing such oligomers may be employed in materials
that include medical and food contact applications. However, such
oligomers are not believed to be suitable for use in photoresists
because they are not alkali developable, and are not photosensitive
at wavelengths greater than 320 nm. Accordingly, the oligomers of
Moy et al. are limited in their applications.
[0011] Accordingly, in view of the foregoing problems there is a
need for photosensitive compositions having components that are
more water-soluble or water-dispersible and eliminate or reduce
contamination of articles.
SUMMARY OF THE INVENTION
[0012] The present invention is directed to a polymer having
.alpha.,.beta.-unsaturation and a group that generates a free
radical upon exposure of the compound to actinic radiation, the
polymer has an average molecular weight of at least 1000
daltons.
[0013] The polymers may be employed in various photosensitive
compositions, such as coatings, adhesives, decorative pigments, and
compositions employed in lithography, optical data storage, active
and passive optical elements such as polarizers, optical retarders
or color filters, and electrophotographic imaging members. The
polymers also are suitable for use in photoresists.
[0014] The .alpha.,.beta.-unsaturated functional groups of the
polymers of the present invention enable the polymers to
self-cross-link, thus compositions containing the polymers have no
additional unsaturated monomers or have reduced amounts of
unsaturated monomers in contrast to many conventional
photosensitive compositions. The free radicals generated by the
polymers may act as a photoinitiator, thus compositions containing
polymers of the present invention also eliminate or reduce the
amounts of added photoinitiator to the compositions. Accordingly,
compositions containing polymers of the present invention eliminate
or at least reduce scum and residue formation caused by unsaturated
monomers and many photoinitiators found in conventional
photosensitive compositions.
[0015] Additionally, the polymers of the present invention may have
hydrophilic components such that the polymers are water-soluble or
water-dispersable. When polymers of the present invention are
employed in photoresists, such water-solubility or
water-dispersability helps eliminate or reduces scum and residue
formation caused by uncured photoresists. Further, the
hydrophilicity of the polymers of the present invention also
improves developability and strippability of photoresists
containing the polymers.
[0016] Elimination or reduction of unsaturated monomers and
photoinitiators reduces the solids content of the photoresist, thus
enabling an increase of the diluent or liquid portion of the
photoresist. Accordingly, the present invention also is directed to
a liquid photoresist. Additionally, reduction of the chemical
components of the photoresist reduces the cost in manufacturing of
the photoresist.
[0017] In addition to .alpha.,.beta.-unsaturation and having an
integral photoinitiator, polymers of the present invention also may
have dyes, stripping agents, plasticizers, surfactants and other
components used in photosensitive compositions joined to them.
Thus, polymers of the present invention may compose the entire
solids fraction of a photosensitive composition.
DETAILED DESCRIPTION OF THE INVENTION
[0018] A "moiety" within the scope of the present invention means a
distinct structural component of the functional polymer and is
synonymous with the term "group". The term "polymer" means both
polymer and copolymer. A "capping group" is a group that is at a
terminus of a polymer's backbone. "Pendent" means a structural
component of the functional polymer that is joined to or suspended
from the main chain or backbone of the functional polymer by a
chemical bond. "(Meth)acrylate" means both acrylate and
methacrylate and (meth)acrylic means both acrylic and methacrylic.
"Monomer" or "oligomer" means any ethylenically or acetylenically
unsaturated compound that may be polymerized. "Functional group"
means a component of a functional polymer that adds serviceability
or processability to the polymer or permits the polymer to have a
function in a composition other than just as a binder component.
"Hydrophilic" within the scope of the present invention means
water-soluble or water-dispersable. "Water-soluble" within the
scope of the present invention means that a compound or polymer
swells or dissolves in water at normal temperatures (from above
0.degree. C. to 100.degree. C. at 1 atmosphere pressure).
"Water-dispersable" within the scope of the present invention means
that a compound or polymer forms an emulsion, micro-emulsion or
suspension in water at normal temperatures. All numerical ranges
are inclusive and combinable in any order, except where it is
logical that such numerical ranges are constrained to add up to
100%.
[0019] Polymers of the present invention have
.alpha.,.beta.-unsaturation and a group that generates a free
radical upon exposure of the polymers to actinic radiation, the
polymers have an average molecular weight of at least 1000 daltons.
Polymers having the .alpha.,.beta.-unsaturation and the group that
generates a free radical are film forming functional polymers. The
film forming functional polymers have a main chain or backbone that
is derived from .alpha.,.beta.-ethylenically or acetylenically
unsaturated polymerizable monomers or oligomers or combinations
thereof and terminate with at least one free unsaturated group at
either end of the polymer.
[0020] In addition to the at least one free unsaturated group at
either end of the polymer, at least one monomer or oligomer
employed to make the polymer backbone may have one or more groups
that are free to react with another compound to join that other
compound to the polymer to form a pendent functional group. Pendent
functional groups may terminate in one or more
.alpha.,.beta.-ethylenically or acetylenically unsaturated
functional group or another type of functional group. Functional
groups enable the polymer to self-cross-link, generate a free
radical, make the polymer hydrophilic or add additional functional
components to the polymer. Functional groups make the polymer and
compositions in which the polymer is used serviceable or
processable. Serviceable, for example, means that the polymer and
compositions in which the polymer is used may be coated on a
substrate, durable against solutions such as plating solutions, has
less post-exposure back cross-linking, or is sensitive to light at
wavelengths of at least 300 nm. Processability, for example, means
that the polymer and compositions in which the polymer is used may
be developed, stripped, or have an affinity for adhesion to metals.
Compounds that may be joined to the polymer to form functional
groups or moieties on the polymer include, but are not limited to,
photoinitiators, plasticizers, surfactants, dyes, stripping agents
or combinations thereof. Any compound or component that may be
joined to a polymer to improve the serviceability or processability
of the polymer or a composition in which the polymer is used may be
employed to practice the present invention. Specific examples of
such compounds are disclosed below.
[0021] Functional polymers may be prepared by any suitable method
known in the art. One method of preparing functional polymers is to
first functionalize one or more monomers or oligomers that are
employed to compose the polymer backbone followed by free radical
polymerization of the monomers or oligomers or combinations
thereof, thus forming a polymer with pendent functional groups. For
example, monomers or oligomers having free hydroxyl (--OH),
carboxyl (--COOH), or ester (--COO--R, where R is an organic
moiety) groups may react with compounds having free hydroxyl
groups, carboxyl groups, ester groups, aminyl (--NH.sub.2 or
--NHR), or isocyanate (--NCO) groups to form pendent groups.
Examples of such reactions include addition reactions or
condensation reactions. Examples of such addition reactions include
nucleophilic, electrophilic and free radical addition reactions.
Other examples of reactions include, but are not limited to, ether
formation, transesterification, anhydride formation, amide
formation or, urea formation. Such reaction methods and conditions
to carry out the reactions are well known in the art. See Morrison
and Boyd, "Organic Chemistry", 3.sup.rd edition, New York
University, 1973, and March, "Advanced Organic Chemistry,
Reactions, Mechanisms, and Structures" 2.sup.nd edition,
McGraw-Hill Book Company, 1977. Free radical polymerization of the
monomers or oligomers or combinations thereof follow to form a
functional polymer. Conditions for free radical polymerization of
monomers and oligomers are well known in the art. Free radical
polymerization of functionalized monomers or oligomers may be
performed in suspension solution (from 60.degree. C. to 80.degree.
C.) or emulsion (from -20.degree. C. to 60.degree. C.) form.
Pressures employed are near or at 1 atmosphere. Peroxide initiators
may be employed in the polymerization process such as dibenzoyl
peroxide. Azo initiators also may be employed such as 2,2'-azobis(2
methylpropane nitrile) or 2,2'-azobis(2-methylbutane-nitrile).
[0022] Alternative processes for preparing a functional polymer are
anionic polymerization, condensation polymerization or by post
polymerization functionalization. In post polymerization
functionalization, the main chain or polymer backbone and the
functional pendent components are prepared separately. Monomers or
oligomers or combinations thereof, which compose the backbone, may
be joined by free radical polymerization. Compounds that compose
the functional pendent groups may be prepared by any suitable
method known in the art. Such compounds need only have one free
reactive group as described above to bond with a free reactive
group on the polymer backbone. After the synthesis of the separate
components that make up the polymer, they are then joined together
in a separate reaction process to form the final functional
polymer. Examples of chemical bonds formed between a polymer
backbone and a pendent functional group are an ether bond R--O--P,
where R is as defined above and P is a polymer backbone, an ester
bond P--COO--R, or RCOO--P.
[0023] Another example of such a reaction is between an isocyanate
compound and a reactive group from a polymer backbone. After the
polymer backbone is prepared, the polymer backbone is mixed with an
isocyanate compound at reaction temperatures below 80.degree. C.
Mixing and heating are continued until the reaction is complete.
Typically, the reaction continues for 1 hour to 8 hours. Reactions
that take place occur between a free isocyanate group on the
isocyanate compound and a hydroxyl group, carboxyl group, or
primary or secondary aminyl functional group attached to the
polymer backbone. One mole of free isocyanate reacts with one mole
of a hydroxyl, carboxyl, or primary or secondary aminyl on the
polymer main chain. The reaction may be self quenching. Water,
alcohol, or other chemical species with labile hydrogen, and a
suitable catalyst, such as triethylamine, may be added at the end
of the reaction to quench any free isocyanate. Also, a suitable
polymerization inhibitor may optionally be added to prevent
premature cross-linking of terminal ethylenically or acetylenically
unsaturated moieties such as a (meth)acrylate moiety. Reaction
completion may be determined by using standard analytical
instruments well known in the art.
[0024] The synthesis may be carried out in the presence of an inert
dry solvent (inert to reaction conditions), for example, an ether,
an ester, ketones, nitriles, sulfones or phosphoric acid esters. To
accelerate the reactions, any suitable catalyst employed in
polymerization reactions may be used. Tin containing catalysts are
an example. Stabilizers or polymerization inhibitors may optionally
be added to the reaction steps to stabilize free-radical
polymerization.
[0025] Free isocyanate, i.e., --N.dbd.C.dbd.O, reacts with a
hydroxyl group from the polymer backbone, or a hydroxyl group from
a carboxyl group from the polymer backbone to form a R--NH--C(O)--P
linkage where P is the polymer backbone, and R is an organic
moiety. Examples of R include, but are not limited to substituted
and unsubstituted alkyl, aryl, alkylaryl, or cycloaliphatic.
Specific examples include a urethane group containing compound such
as a biuret group. A free isocyanate that reacts with a primary or
secondary amine moiety joined to the polymer backbone forms a
R--NH--C(O)--NR.sup.1-G-P urea (carbamide) linkage where R.sup.1
includes, but is not limited to, hydrogen, a linear, branched or
unsubstituted or substituted alkyl, or an unsubstituted or
substituted aryl. Substituent groups include, but are not limited
to, halogen, such as fluorine, bromine, chloride or iodine,
hydroxyl, carboxyl, or primary or secondary amine. A substituent
group replaces a hydrogen on a carbon atom. G is an organic moiety
that joins the nitrogen to the polymer chain. G includes, but is
not limited to, an alkyl, or a substituted aryl where the nitrogen
is joined to the aryl by an alkyl chain. The alkyl of G may be
linear or branched (C.sub.1-C.sub.24) alkyl. A free isocyanate that
reacts with a polyalkoxylated moiety from the polymer backbone
forms a R--NH--C(O)--O(AO).sub.x--C(O)--P linkage where A is a
linear or branched (C.sub.1-C.sub.24)alkyl, and x is an integer
from 0 to 1,000, preferably from 1 to 200. R, as defined above, may
terminate in one or more functional groups such as ethylenically or
acetylenically unsaturated moieties that permit functionalized
polymers of the present invention to self cross-link as in
photoresist compositions described below.
[0026] The main chain or backbone of functional polymers of the
present invention may be derived from monomers or oligomers which
include, but are not limited to, acid functional monomers, base
functional monomers, water-soluble functional monomers, urethane
oligomers or mixtures thereof.
[0027] Examples of suitable ethylenically or acetylenically
unsaturated monomers include, but are not limited to: (meth)acrylic
acid, (meth)acrylamides, alkyl (meth)acrylates, alkenyl
(meth)acrylates, aromatic (meth)acrylates, vinyl aromatic monomers,
nitrogen-containing compounds and their thio-analogs, substituted
ethylene monomers, cyclic olefins, substituted cyclic olefins, and
the like. Preferred monomers include (meth)acrylic acid, alkyl
(meth)acrylates and vinyl aromatic monomers.
[0028] Typically, the alkyl (meth)acrylates useful in the present
invention are (C.sub.1-C.sub.24)alkyl (meth)acrylates. Suitable
alkyl (meth)acrylates include, but are not limited to, "low cut"
alkyl (meth)acrylates, "mid cut" alkyl (meth)acrylates and "high
cut" alkyl (meth)acrylates.
[0029] "Low cut" alkyl (meth)acrylates are typically those where
the alkyl group contains from 1 to 6 carbon atoms. Suitable low cut
alkyl (meth)acrylates include, but are not limited to: methyl
methacrylate, methyl acrylate, ethyl acrylate, propyl methacrylate,
butyl methacrylate, butyl acrylate, isobutyl methacrylate, hexyl
methacrylate, cyclohexyl methacrylate, cyclohexyl acrylate and
mixtures thereof.
[0030] "Mid cut" alkyl (meth)acrylates are typically those where
the alkyl group contains from 7 to 15 carbon atoms. Suitable mid
cut alkyl (meth)acrylates include, but are not limited to:
2-ethylhexyl acrylate ("EHA"), 2-ethylhexyl methacrylate, octyl
methacrylate, decyl methacrylate, isodecyl methacrylate (based on
branched (C.sub.10)alkyl isomer mixture), undecyl methacrylate,
dodecyl methacrylate (also known as lauryl methacrylate), tridecyl
methacrylate, tetradecyl methacrylate (also known as myristyl
methacrylate), pentadecyl methacrylate and mixtures thereof.
Particularly useful mixtures include dodecyl-pentadecyl
methacrylate, a mixture of linear and branched isomers of dodecyl,
tridecyl, tetradecyl and pentadecyl methacrylates; and
lauryl-myristyl methacrylate.
[0031] "High cut" alkyl (meth)acrylates are typically those where
the alkyl group contains from 16 to 24 carbon atoms. Suitable high
cut alkyl (meth)acrylates include, but are not limited to:
hexadecyl methacrylate, heptadecyl methacrylate, octadecyl
methacrylate, nonadecyl methacrylate, cosyl methacrylate, eicosyl
methacrylate and mixtures thereof. Particularly useful mixtures of
high cut alkyl (meth)acrylates include, but are not limited to:
cetyl-eicosyl methacrylate, which is a mixture of hexadecyl,
octadecyl, cosyl and eicosyl methacrylate; and cetyl-stearyl
methacrylate, which is a mixture of hexadecyl and octadecyl
methacrylate.
[0032] The mid-cut and high-cut alkyl (meth)acrylate monomers
described above are generally prepared by standard esterification
procedures using technical grades of long chain aliphatic alcohols,
and these commercially available alcohols are mixtures of alcohols
of varying chain lengths containing between 10 and 15 or 16 and 20
carbon atoms in the alkyl group. Examples of these alcohols are the
various Ziegler catalyzed ALFOL alcohols from Vista Chemical
company, i.e., ALFOL 1618 and ALFOL 1620, Ziegler catalyzed various
NEODOL alcohols from Shell Chemical Company, i.e. NEODOL 25 L, and
naturally derived alcohols such as Proctor & Gamble's TA-1618
and CO-1270. Consequently, for the purposes of this invention,
alkyl (meth)acrylate is intended to include not only the individual
alkyl (meth)acrylate product named, but also to include mixtures of
the alkyl (meth)acrylates with a predominant amount of the
particular alkyl (meth)acrylate named.
[0033] The alkyl (meth)acrylate monomers useful in the present
invention may be a single monomer or a mixture having different
numbers of carbon atoms in the alkyl portion. Also, the
(meth)acrylamide and alkyl (meth)acrylate monomers useful in the
present invention may optionally be substituted. Suitable
optionally substituted (meth)acrylamide and alkyl (meth)acrylate
monomers include, but are not limited to: hydroxy
(C.sub.2-C.sub.20)alkyl (meth)acrylates, dialkylamino
(C.sub.2-C.sub.20)alkyl (meth)arylates, dialkaylamino
(C.sub.2-C.sub.20)alkyl (meth)acrylamides, preferably,
hydroxy(C.sub.2-C.sub.6)alkyl (meth)acrylates,
dialkylamino(C.sub.2-C.sub- .6)alkyl (meth)acrylates,
dialkylamino(C.sub.2-C.sub.6)alkyl (meth)acrylamides.
[0034] Particularly useful substituted alkyl (meth)acrylate
monomers are those with one or more hydroxyl groups in the alkyl
radical, especially those where the hydroxyl group is found at the
.beta.-position (2-position) in the alkyl radical. Hydroxyalkyl
(meth)acrylate monomers in which the substituted alkyl group is a
(C.sub.2-C.sub.6)alkyl, branched or unbranched, are preferred.
Suitable hydroxyalkyl (meth)acrylate monomers include, but are not
limited to: 2-hydroxyethyl methacrylate ("HEMA"), 2-hydroxyethyl
acrylate ("HEA"), 2-hydroxypropyl methacrylate,
1-methyl-2-hydroxyethyl methacrylate, 2-hydroxy-propyl acrylate,
1-methyl-2-hydroxyethyl acrylate, 2-hydroxybutyl methacrylate,
2-hydroxybutyl acrylate and mixtures thereof.
[0035] Hydroxy poly opened-ring lactone polyalkylene oxide
(meth)acrylates as described in U.S. Pat. No. 6,045,973 may be
employed. Suitable hydroxy polyalkylene oxide (meth)acrylates
prepared from poly(propylene glycol) (meth)acrylates,
poly(propylene glycol) alkyl ether (meth)acrylates, poly (propylene
glycol) phenyl ether (meth)acrylates, poly(propylene glycol)
4-nonylphenol ether (meth)acrylates, poy(ethylene glycol)
(meth)acrylates, poly(propylene/ethylene glycol) (meth)acrylates,
poly(ethylene glycol)alkyl ether (meth)acrylates, poly(ethylene
glycol) phenyl ether (meth)acrylates, poly(propylene/ethylene
glycol) alkylether (meth)acrylates and mixtures thereof may be
employed. The poly(alkylene oxide) may have from 1 to 50 degrees of
polymerization. Such compounds may also be joined to the polymer
backbone as a pendent functional group via an isocyanate group by
reacting the hydroxyl of the poly(alkylene oxide) with an
isocyanate of a polyisocyanate. A free isocyanate may then be
reacted with a reactive group on the polymer backbone to join it to
the polymer.
[0036] Other substituted monomers useful in the present invention
are those with a tertiary amino group or alkylamino group. Examples
include, but are not limited to: dimethylaminoethyl methacrylate,
dimethylaminoethyl acrylate, N-methylaminoethyl methacrylamide,
N-methyl-aminopropyl methacrylamide, N-methylaminobutyl
methacrylamide, N-ethylaminoethyl methacrylamide,
N-ethylaminopropyl methacrylamide, N-ethylaminobutyl
methacrylamide, N-(1,1-dimethyl-3-oxobutyl) acrylamide,
N-(1,3-diphenyl-1-ethyl-3-oxobutyl) acrylamide,
N-(1-methyl-1-phenyl-3-ox- obutyl) methacrylamide, and
2-hydroxyethyl acrylamide, N-methacrylamide of aminoethyl ethylene
urea, N-maleimide of dimethylaminopropylamine and mixtures
thereof.
[0037] Other substituted (meth)acrylate monomers useful in the
present invention are silicon-containing monomers such as
.gamma.-propyl tri(C.sub.1-C.sub.6)alkoxysilyl (meth)acrylate,
.gamma.-propyl tri(C.sub.1-C.sub.6)alkylsilyl (meth)acrylate,
.gamma.-propyl di(C.sub.1-C.sub.6)alkoxy(C.sub.1-C.sub.6)alkylsilyl
(meth)acrylate, .gamma.-propyl
di(C.sub.1-C.sub.6)alkyl(C.sub.1-C.sub.6)alkoxysilyl
(meth)acrylate, vinyl tri(C.sub.1-C.sub.6)alkoxysilyl
(meth)acrylate, vinyl
di(C.sub.1-C.sub.6)alkoxy(C.sub.1-C.sub.6)alkylsilyl
(meth)acrylate, vinyl
(C.sub.1-C.sub.6)alkoxydi(C.sub.1-C.sub.6)alkylsily- l
(meth)acrylate, vinyl tri(C.sub.1-C.sub.6)alkylsilyl
(meth)acrylate, 2-propylsilsesquioxane (meth)acrylate and mixtures
thereof.
[0038] The vinyl aromatic monomers useful as unsaturated monomers
in the present invention include, but are not limited to: styrene,
hydroxystyrene, .alpha.-methylstyrene, vinyltoluene,
p-methylstyrene, ethylvinylbenzene, vinylnaphthalene, vinylxylenes,
and mixtures thereof. The vinylaromatic monomers also include their
corresponding substituted counterparts, such as halogenated
derivatives, i.e., containing one or more halogen groups, such as
fluorine, chlorine or bromine; and nitro, cyano,
(C.sub.1-C.sub.10)alkoxy, halo(C.sub.1-C.sub.10)alkyl,
carb(C.sub.1-C.sub.10)alkoxy, carboxy, amino,
(C.sub.1-C.sub.10)alkylamin- o derivatives and the like.
[0039] The nitrogen-containing compounds and their thio-analogs
useful as unsaturated monomers in the present invention include,
but are not limited to: vinylpyridines such as 2-vinylpyridine or
4-vinylpyridine; (C.sub.1-C.sub.8)alkyl substituted N-vinyl
pyridines such as 2-methyl-5-vinyl-pyridine,
2-ethyl-5-vinylpyridine, 3-methyl-5-vinylpyridine,
2,3-dimethyl-5-vinyl-pyridine, and
2-methyl-3-ethyl-5-vinylpyridine; methyl-substituted quinolines and
isoquinolines; N-vinylcaprolactam; N-vinylbutyrolactam;
N-vinylpyrrolidone; vinyl imidazole; N-vinyl carbazole;
N-vinyl-succinimide; (meth)acrylonitrile; o-, m-, or
p-aminostyrene; hydroxystylene; maleimide; N-vinyl-oxazolidone;
N,N-dimethyl aminoethyl-vinyl-ether; ethyl-2-cyano acrylate; vinyl
acetonitrile; N-vinylphthalimide; N-vinyl-pyrrolidones such as
N-vinyl-thio-pyrrolidone- , 3 methyl-1-vinyl-pyrrolidone,
4-methyl-1-vinyl-pyrrolidone, 5-methyl-1-vinyl-pyrrolidone,
3-ethyl-1-vinyl-pyrrolidone, 3-butyl-1-vinyl-pyrrolidone,
3,3-dimethyl-1-vinyl-pyrrolidone, 4,5-dimethyl-1-vinyl-pyrrolidone,
5,5-dimethyl-1-vinyl-pyrrolidone,
3,3,5-trimethyl-1-vinyl-pyrrolidone, 4-ethyl-1-vinyl-pyrrolidone,
5-methyl-5-ethyl-1-vinyl-pyrrolidone and
3,4,5-trimethyl-1-vinyl-pyrrolid- one; vinyl pyrroles; vinyl
anilines; and vinyl piperidines.
[0040] The substituted ethylene monomers useful as unsaturated
monomers in the present invention include, but are not limited to:
vinyl acetate, vinyl formamide, vinyl chloride, vinyl fluoride,
vinyl bromide, vinylidene chloride, vinylidene fluoride, vinylidene
bromide, tetrafluoroethylene, trifluoroethylene, trifluoromethyl
vinyl acetate, vinyl ethers and itaconic anhydride.
[0041] Suitable cyclic olefin monomers useful in the present
invention are (C.sub.5-C.sub.10) cyclic olefins, such as
cyclopentene, cyclopentadiene, dicylopentene, cyclohexene,
cyclohexadiene, cycloheptene, cycloheptadiene, cyclooctene,
cyclooctadiene, norbornene, maleic anhydride and the like. Such
cyclic olefins also include spirocyclic olefin monomers such as
spirocyclic norbornenyl monomers, spirocyclic cyclohexene monomers,
spirocyclic cyclopentene monomers and mixtures thereof. Suitable
substituted cyclic olefin monomers include, but are not limited to,
cyclic olefins having one or more substituent groups selected from
hydroxy, aryloxy, halo, (C.sub.1-C.sub.12)alkyl,
(C.sub.1-C.sub.12)haloalkyl, (C.sub.1-C.sub.12)hydroxyalkyl,
(C.sub.1-C.sub.12)halohydroxyalkyl such as
(CH.sub.2).sub.n'C(CF.sub.3).s- ub.2OH where n'=0 to 4,
(C.sub.1-C.sub.12)alkoxy, thio, amino, (C.sub.1-C.sub.6)alkylamino,
(C.sub.1-C.sub.6)dialkylamino, (C.sub.1-C.sub.12)alkylthio,
carbo(C.sub.1-C.sub.20)alkoxy, carbo(C.sub.1-C.sub.20)haloalkoxy,
(C.sub.1-C.sub.12)acyl,
(C.sub.1-C.sub.6)alkylcarbonyl(C.sub.1-C.sub.6)alkyl, and the like.
Particularly suitable substituted cyclic olefins include maleic
anhydride and cyclic olefins containing one or more of hydroxy,
aryloxy, (C.sub.1-C.sub.12)alkyl, (C.sub.1-C.sub.12)haloalkyl,
(C.sub.1-C.sub.12)hydroxyalkyl, (C.sub.1-C.sub.12)halohydroxyalkyl,
carbo(C.sub.1-C.sub.20)alkoxy, and
carbo(C.sub.1-C.sub.20)haloalkoxy. It will be appreciated by those
skilled in the art that the alkyl and alkoxy substituents may be
optionally substituted, such as with halogen, hydroxyl, cyano,
(C.sub.1-C.sub.6)alkoxyl, mercapto, (C.sub.1-C.sub.6)alkylthio,
amino, or acid labile leaving group. Suitable
carbo(C.sub.1-C.sub.20)alkoxy substituents include, but are not
limited to, those of the formula C(O)O-LG, wherein LG is a leaving
group including, but are not limited to, alkyl groups having 4 or
more carbon atoms with at least one quaternary carbon atom bonded
directly to a carboxylate oxygen such as tert-butyl esters,
2,3-dimethylbutyl esters, 2-methylpentyl esters,
2,3,4-trimethylpentyl esters, alicyclic esters, acetals or ketals
from vinyl ethers or enols such as
--O--(CH(CH.sub.3)OC.sub.2H.sub.5) or
--O--(CH.sub.2OC.sub.2H.sub.5), tetrahydropyran. Suitable alicyclic
esters as leaving groups include adamantyl, methyladamantyl,
ethyladamantyl, methylnorbornyl, ethylnorbornyl,
ethyltrimethylnorbornyl, ethyl fenchol and the like.
[0042] Any of a wide variety of difunctional branch-point monomers
are suitable for use in preparing the functional polymers of the
present invention provided that such branch-point monomers contain
a backbone comprising one or more base cleavable functionalities or
moieties, where such functionalities are disposed between the
polymerizable groups of the branch-point monomer. By "base
cleavable functionality" is meant any functionality or group that
can be cleaved by a base such as hydroxide ion, alkoxide ion,
ammonia or amines.
[0043] A wide variety of difunctional branch-point monomers
containing base cleavable moieties may be used. Such branch-point
monomers have the structure
A'-Z-B I
[0044] where A' and B each include one or more polymerizable
groups, and Z includes one or more base cleavable groups. Suitable
polymerizable groups for A' and B include, but are not limited to,
isocyanate ("--NCO"), R.sub.1R.sub.2C.dbd.CR.sub.3--,
R.sub.1--C.dbd.C--, R.sub.1R.sub.2C.dbd.CR.sub.4C(O)--O--,
R.sub.1R.sub.2C.dbd.CR.sub.4--O--, and --C(O)--O--R.sub.5; wherein
R.sub.1, R.sub.2 and R.sub.4 are independently selected from H,
(C.sub.1-C.sub.4)alkyl and halo; R.sub.5 is selected from H,
(C.sub.1-C.sub.4)alkyl, and NR.sub.6R.sub.7; and R.sub.6 and
R.sub.7 are independently selected from H and
(C.sub.1-C.sub.4)alkyl. In addition to one or more base cleavable
groups, the group Z may optionally include one or more spacer
groups. Z may suitably have the general formula
S.sub.x4(BCG).sub.y4; wherein S is a spacer group; (BCG) is a base
cleavable group; x.sub.4=0-20 and y.sub.4=1-30. It is preferred
that y.sub.4=2-20. Suitable spacer groups include, but are not
limited to, alkyleneoxy, aryleneoxy, (C.sub.1-C.sub.20)alkylene,
substituted(C.sub.1-C.sub.20)alkylene,
(C.sub.6-C.sub.20)aralkylene, substituted
(C.sub.6-C.sub.20)aralkylene, and the like. Suitable alkyleneoxy
groups have the general formula (--CHR.sub.8--CH.sub.2O--).sub.n3,
(--OCHR.sub.8--CH.sub.2--).sub.m3, or
(--O--CH.sub.2--CH.sub.2-CH.sub.2--).sub.p3, where R.sub.8 is H or
CH.sub.3, and n.sub.3, m.sub.3 and p.sub.3 are each 1-1000.
Exemplary alkylenoxy groups include ethyleneoxy, propyleneoxy and
ethyleneoxy/propyleneoxy mixtures. Aryleneoxy or arylene ether
spacers include phenyleneoxy (phenylene ether) spacers having the
general formula (--C.sub.6H.sub.4--O--).sub.z3 where
z.sub.3=1-1000, biphenylene ethers, phenanthryl ethers, naphthyl
ethers, and mixtures thereof. When two or more spacer groups are
used, they may be the same or different.
[0045] Such spacer groups may be selected to provide additional
properties. For example, alkyleneoxy spacers, such as ethyleneoxy
and/or propyleneoxy moieties, may help to emulsify the polymeric
binders for use in water borne photoresists. Spacers having
extended chain length may also provide improved flexibility and be
particularly useful in conformal photoresist formulations. The
choice of such spacer groups depend upon the particular use of the
polymer and the other components in the formulation, and is within
the ability of one skilled in the art.
[0046] Any base cleavable group is suitable for use in Z, but is
preferably selected from anhydrides (--C(O)--O--(O)C--), esters
(--C(O)--O--), carbonates, sulfonyl esters (--SO.sub.2--O--) and
the like, and more preferably esters. It is more preferred that the
difunctional branch-point monomers contain 2 or more base cleavable
groups and still more preferably 3 or more base cleavable groups.
Particularly suitable difunctional branch-point monomers contain 4
base cleavable groups, and more particularly 4 or more ester
linkages. It is further preferred that the difunctional branch
point monomer contain as polymerizable end groups moieties that
also contain one or more base cleavable functionalities, such as
(meth)acrylate esters. When the difunctional branch-point monomers
contain 2 or more base cleavable groups, such groups may be
directly bonded to each other or may be separated by one or more
spacer groups. An exemplary structure for such branch-point
monomers having multiple base cleavable groups is
A'-(S1).sub.x1-(BCG)1-(S2).sub.x2-(BCG).sub.2--(S3).sub.x3-B,
wherein S1, S2 and S3 refer to spacer groups 1-3, respectively,
(BCG) 1 and (BCG).sub.2 refer to base cleavable groups 1 and 2,
respectively, x1+x2+x3=0-20, and A', B, S, (BCG) and B are as
defined above. Other suitable structures having more or fewer
spacers and/or base cleavable groups or different configurations of
such groups are well within the ability of those skilled in the
art.
[0047] Suitable difunctional branch-point monomers useful in
preparing the polymers of the present invention include, but are
not limited to, acrylic anhydride, methacrylic anhydride, and ester
linkage containing monomers having (meth)acrylate end groups.
Exemplary difunctional branch-point monomers including one or more
urethane linkages and having (meth)acrylate end groups are:
pdmbi-pcp0200-pdmbi, pdmbi-pcp0201-pdmbi, pdmbi-pcp0230-pdmbi,
eh6c14-hdi-ppg1000-hdi-eh6c14, eh6c14-hdi-pcp0230-hdi-eh6c14,
eh6c14-hdi-ppg425-hdi-dmpa-hdi-ppg425-hdi-- eh6c14,
2hema-hdi-pcp0230-hdi-ppg425-hdi-pcp0230-hdi-2hema,
2hema-hdi-pcp0230-hdi-peg400-hdi-pcp0230-hdi-2hema,
2hema-hdi-pcp0200-hdi-pcp0230-hdi-pcp0200-hdi-2hema,
e6hem-hdi-pcp0200-hdi-pcp0230-hdi-pcp0200-hdi-e6hem,
e6hem-hdi-pcp0200-hdi-ppg1000-hdi-pcp0200-hdi-e6hem,
e6hem-hdi-ppg425-hdi-pcp0230-hdi-ppg425-hdi-e6hem,
e6hem-hdi-ppg1000-hdi-pcp0230-hdi-ppg1000-hdi-e6hem,
e6hem-hdi-pcp0230-hdi-ppg425-hdi-pcp0230-hdi-e6hem, and
e6hem-hdi-ppg1000-hdi-pcp0201-hdi-ppg1000-hdi-e6hem. In the above
described difunctional branch-point monomers, each "dash"
represents a urethane group (formed when an isocyanate group reacts
with a hydroxyl group) between the adjacent moieties. Such urethane
linkages are not required in the present branch-point monomers. The
abbreviations for the moieties are: hdi=1,6-hexamethylene
diisocyanate; pcp0200=TONE.TM. Polyol 0200 Diol (containing
carboxylic ester groups); pcp0201=TONE.TM. Polyol 0201 Diol
(contains carboxylic ester groups); pcp0230=TONE.TM. Polyol 0230
Diol (contains carboxylic ester groups); ppg425=polypropylene
glycol having a molecular weight of approximately 425;
ppg1000=polypropylene glycol having a molecular weight of
approximately 1000; dmpa=dimethylolpropionic acid;
pdmbi=3-isopropenyl-alpha,alpha-dimethylbe- nzyl isocyanate;
2hema=2-hydroxyethyl methacrylate (contains ester group and a
polymerizable end group); e6hem=ethoxylated hydroxyethyl
methacrylate (contains ester group and a polymerizable end group);
and eh6c14=ethoxylated caprolactone-derived methacrylate (contains
ester groups and a polymerizable end group). Such branch-point
monomers are generally commercially available or may be readily
prepared by known methods. TONE.TM. is a trademark for
polycaprolactone diols, available from the Dow Chemical Company
(Midland, Mich.). Other suitable polycaprolactone diols are
available from Solvay under the CAPA brand name. Typically, the
molecular weight of the branch-point monomers is .gtoreq.450, and
preferably from 450 to 6000.
[0048] More than one difunctional branch-point monomer may be used
to prepare the functional polymers. Thus, mixtures of difunctional
branch-point monomers may advantageously be used in the present
invention. The total amount of such difunctional branch-point
monomers in the functional polymers may be from 0.1 to 100 wt %
based upon the total weight of the monomers used to prepare the
polymer, typically from 0.1 to 25 wt %, and more typically from 0.1
to 10 wt %.
[0049] Polymers of the present invention contain sufficient acid
functionality to render the polymers soluble and removable upon
development. The term "acid functionality" refers to any
functionality capable of forming a salt upon contact with alkaline
developer, such as dilute alkaline aqueous sodium or potassium
hydroxide, e.g. 1 to 3 wt % solutions. Suitable acid functionality
includes, but is not limited to, carboxylic acids, sulfonic acids,
phosphonic acids and phenols. The polymers have an acid number of
up to 250, preferably up to 200. Typical ranges of acid numbers are
from 15 to 250 and preferably from 50 to 250. Such acid numbers are
based on the amount of KOH (potassium hydroxide) in mg to
neutralize 1 g (dry weight) of polymer.
[0050] Preferably, functional polymers of the present invention
have multiple ester links in the backbone or in pendent side
chains, or in the backbone and in the pendent chains. Such ester
links permit quick and clean removal of the functional polymers
from a substrate using a stripping agent. Quick and clean removal
is highly desirable in a photoresist. Preferably, functional
polymers have from 2 or more ester links in the backbone or in the
pendent side chains or in both the backbone and chains. Preferably
the functional polymers have from 5 or more ester links, more
preferably from 10 to 50 ester links, most preferably from 20 to 40
ester links in the backbone and/or pendent side chains. Such
polyester links may be derived from the hydroxy poly opened-ring
lactone or hydroxy polyalkylene oxide (meth)acrylates described
above.
[0051] In one embodiment of the present invention, isocyanate
compounds used to prepare the functional polymers of the present
invention include urethane/ethylenically or acetylenically
unsaturated isocyanates. Such compounds have a --NHC(O)-- moiety,
at least one free isocyanate group (--N.dbd.C.dbd.O), and an
ethylenically or acetylenically unsaturated moiety such as a (meth)
acrylate that is at a terminus of the isocyanate compound. Biuret
ethylenically or acetylenically unsaturated isocyanates have a
--NH--C(O)--N--C(O)--NH-- moiety, at least one free isocyanate
group and an ethylenically or acetylenically unsaturated moiety at
a terminus of the compound. Examples of such compounds include, but
are not limited to, the following general formulas: 1
[0052] where Z' includes, but is not limited to, alkyl, alkylene,
cycloalkyl, aryl, heterocyclic alkyl, heteroaryl, a polymer such as
a copolymer including a branched polymer or branched copolymer; Y
includes, but is not limited to, alky, alkylene, cycloalkyl, aryl,
heterocyclic alkyl, heteroaryl,
--((CH.sub.2).sub.u--O--).sub.v--(CH.sub.2).sub.w--, or
--(CH.sub.2).sub.u--C(O)--O--).sub.v--(CH.sub.2).sub.w--, where u,
and w are integers of from 1 to 10, and v is an integer of from 0
to greater than 1,000, preferably from 1 to 200, most preferably
from 5 to 10. R.sup.2 is hydrogen or (C.sub.1-C.sub.4) alkyl.
Preferably R.sup.2 is hydrogen or methyl. Hetero-atoms include, but
are not limited to, oxygen, sulfur, and nitrogen. The alkyl,
alkylene, cycloalkyl, aryl, heterocyclic alkyl, heteroaryl and
polymers may be unsubstituted or substituted. Examples of suitable
substituent groups include, but are not limited to, carboxyl,
hydroxyl, (C.sub.1-C.sub.4) alkyl), aminyl such as a primary or
secondary aminyl, or hydroxyaminyl, or --CN.
[0053] Examples of suitable alkyl groups include, but are not
limited to, linear or branched (C.sub.1-C.sub.20) alkyl. Examples
of alkenyl, cycloakyl or aryl groups include, but are not limited
to, linear or branched (C.sub.2-C.sub.20) alkenyl,
(C.sub.5-C.sub.6) cycloalky such as an isophorone, and
(C.sub.5-C.sub.6) aryl such as phenyl.
[0054] The isocyanate compounds with at least one free isocyanate
group may be prepared by any suitable method known in the art.
Monoisocyanates with functional groups such as (meth)acrylate
groups, diisocyanates or triisocyanates that may be employed are
either known or may be prepared by analogy to known compounds.
Examples of suitable diisocyanates and triisocyanates include, but
are not limited to, ethylene diisocyanate, propylene diisocyanate,
butylene-1,3-diisocyanate, 1,6-hexamethylene diisocyanate,
2,2,4-trimethyl-hexamethylene diisocyanate,
2,4-dimethyl-6-ethyloctamethylene diisocyanate, cyclohexylene
diisocyanate, cyclopentylene diisocyanate,
1,4-diisocyanatomethyl-cyclohe- xane,
1,3-diisocyanatoethyl-cyclohexane, toluylene diisocyanate,
3,3,5-trimethyl-1-isocyanato-5-isocyanatomethyl-cyclohexane,
2-butene-1,4-diisocyanate, isophorone diisocyanate,
1,6-hexamethylene diisocyanate biuret, 1,6-hexamethylene
diisocyanate trimer, or isophorone diisocyanate trimer. Many of the
foregoing listed diisocyantes and triisocyantes as well as the
biurets and trimers may be purchased from Lyondell (located at 122
Melanney St., Houston, Tex.) or Bayer (located at 100 Bayer Rd.,
Pittsburg, Pa. 15025).
[0055] Isocyanates such as the diisocyanates and triisocyanates
described above may then be reacted with a sufficient amount of one
or more hydroxyl containing compounds such that one free isocyanate
group is left to react with the polymer backbone prepared as
described above. As mentioned above, the reaction mole ratio of
hydroxyl group to isocyanate group is about 1:1. Any suitable
compound with at least one free hydroxyl group to react with an
isocyanate group may be employed. An isocyanate compound of the
present invention also may be reacted with another isocyanate
compound having at least one free hydroxyl group. Hydroxyalkyl,
hydroxyalkenyl, hydroxyaryl compounds and the like are examples of
such compounds that may be employed. Hydroxyalkyl (meth)acrylates
are one example of suitable compounds. Hydroxyethyl (meth)acrylate
or hydroxypropyl (meth)acrylate (n or iso compounds) are examples
of hydroxyl group-containing esters that are suitable. Other
suitable hydroxyalkyl (meth)acrylates include, but are not limited
to, 2-hydroxy-butyl (meth)acrylate, 4-hydroxy-butyl (meth)acrylate,
2-hydroxy-cyclohexyl (meth)acrylate, 2-hydroxyethylmethacrylate,
and the like. Suitable polyethylene glycol mono (meth)acrylates
also may be employed such as, but not limited to, diethylene glycol
mono (meth)acrylate, triethylene glycol mono (meth)acrylate and the
like. Hydroxyalicyclic (meth)acrylates, and hydroxyaromatic
(meth)acrylates such as bis phenol A dimethacrylate also may be
employed. U.S. Pat. No. 4,019,972 discloses a method of preparing
urethanes.
[0056] Functional groups that are to be joined to the polymer
backbone and have free reactive groups, such as isocyanate groups,
may be reacted with compounds having .alpha.,.beta.-ethylenically
or acetylenically unsaturated groups to extend the functional
pendent groups. Such compounds with unsaturated groups include, but
are not limited to, a compound having a formula:
CH.sub.2.dbd.CHR.sup.3--C(O)--O-(A.sub.1)-(B.sub.1)-(C.sub.1)--H
V
[0057] where R.sup.3 is hydrogen or methyl, (A.sub.1), (B.sub.1)
and (C.sub.1) are in any order, (A.sub.1) is a chain formed of from
1 to 40 alkoxylate monomers, aromatic-substituted alkoxylate
monomers having from 1 to 20 carbon atoms, or mixtures thereof,
(B.sub.1) is either absent or is a chain formed of from 1 to 40
alkoxylate monomers, or aromatic-substituted alkoxylate monomers
having from 1 to 20 carbon atoms, or mixtures thereof, and the
monomer composition of (B.sub.1) being different than the monomer
composition of (A.sub.1), and (C.sub.1) is a chain formed of from 1
to 40 open-ring lactone monomers having from 2 to 21 carbon
atoms.
[0058] In addition to unsaturated groups, functional polymers
generate a free-radical upon exposure to actinic radiation.
Free-radical generating monomers or oligomers may be derived from
Michael addition reactions of at least one diketone or at least one
acetoacetate derivative functional donor compound and at least two
multifunctional acrylate receptor compounds. The resulting
free-radical generating oligomer may contain both capping and
pendent acrylate groups which are capable of cross-linking upon
exposure to actinic radiation. Michael addition reactions are
catalyzed by a strong base such as diazabicyclo-undecene (DBU).
Other cyclic amidines, for example diazabicyclo-nonene (DBN) and
guanidines, also are suitable for catalyzing Michael addition
reactions. U.S. Pat. No. 5,945,489 and U.S. Pat. No. 6,025,410
disclose Michael addition reactions. Preferably, the oligomers
which generate a free-radical absorb light at 300 nm or greater.
Such oligomers may be part of the polymer backbone or joined to a
pendent group.
[0059] A hydrophilic compound which generates a free-radical
polymerization initiator of the present invention may have a
general formula: 2
[0060] where m is an integer of from at least 1, generally from 1
to 100, preferably from 5 to 50, R" and R'" may be the same or
different and may be groups that provide the oligomer with
water-solubility or water-dispersable, R" and R'" may include, but
are not limited to unsubstituted or substituted
(C.sub.6-C.sub.14)aryl such as unsubstituted or substituted phenyl,
unsubstituted or substituted naphthyl, unsubstituted or substituted
anthracenyl, unsubstituted or substituted phenanthryl, linear or
branched (C.sub.1-C.sub.15)alkyl, linear or branched
(C.sub.2-C.sub.15)hydroxyalky, substituted or unsubstituted
(C.sub.5-C.sub.14) heterocyclic aryl where the heteroatom is S, N,
or O, or linear or branched (C.sub.1-C.sub.5) aminylalkyl,
--NR.sub.9R.sub.10 where R.sub.9 and R.sub.10 are the same or
different and may be hydrogen, (C.sub.1-C.sub.3)alkyl or
(C.sub.1-C.sub.4)hydroxyalkyl. Substituents include, but are not
limited to, (C.sub.1-C.sub.5)alkoxy, hydroxyl, (C.sub.1-C.sub.5)
hydroxyalkyl, (C.sub.1-C.sub.5)alkyl,
(C.sub.1-C.sub.5)carboxyalkyl, (C.sub.2-C.sub.5) ester,
(C.sub.1-C.sub.5)aminylalkyl, phenyl, hydroxyphenyl, --NO.sub.2,
sulfonate, phosphate, --SH, (C.sub.1-C.sub.5)thioalkyl, acetyl,
benzoyl, aldehyde, (C.sub.1-C.sub.5)ketyl, and the like.
Preferably, R" or R'" is unsubstituted or substituted phenyl,
unsubstituted or substituted naphthyl, unsubstituted or substituted
anthracenyl, (C.sub.1-C.sub.8)alkyl,
(C.sub.2-C.sub.10)hydroxyalkyl, unsubstituted or substituted
(C.sub.5-C.sub.10) heterocyclic aryl, or
(C.sub.1-C.sub.5)aminylalkyl. R" and R'" also may be --O--R.sub.11
where R.sub.11 is the same as R" and R'" described above.
[0061] R", R'" and R.sub.11 groups also may absorb light at 300 nm
to 365 nm or greater. The most preferred R", R'" and R.sub.11 are
water-soluble or water-dispersable and absorb light at 300 nm to
365 nm or greater.
[0062] R' also may be a water-soluble or a water-dispersable group.
R' may be a group which provides sufficient acid groups such that
the polymer may be developed with an aqueous or aqueous base
solution. R' may have an acid number of at least 50. Preferably, R'
is water-soluble or water-dispersable and absorb light at 300 nm or
greater. R' may be derived from acid functional monomers, non-acid
functional monomers, alkylene oxides, polyesters, urethanes, or
mixtures thereof. Urethanes are compounds that have at least one
--CO(NH)-- moiety, and biurets are urethanes that have at least one
--NH--CONH--CONH-- moiety in the structure. Examples of suitable
oligomers are disclosed in U.S. Pat. No. 6,045,973, U.S. Pat. No.
6,166,245, U.S. Pat. No. 6,207,347 B1, U.S. Pat. No. 6,268,111 B1,
U.S. Pat. No. 6,319,653, U.S. Pat. No. 6,322,951 B1, and U.S. Pat.
No. 6,329,123 B1.
[0063] While not being bound by theory, it is believed that the
pendent ketone substituents, as shown in formula VI, are the source
of the free-radical polymerization initiator. Such pendent ketone
substituents are integral to the compound and are internal or
"built-in" photoinitiators. Integral means that the ketone
substitutent is a basic structural component of the polymer.
[0064] In another embodiment of the invention a source of the
free-radical may be a photoinitiator compound. Examples of such
photoinitiators include, but are not limited to, imidazole dimers,
benzophenones, thioxanthones, ketals, benzoin ethers,
acetophenones, anthraquinones, naphthaquinones, or triazine-based
compounds. Imidazole dimers such as heaxaarylbiimidazoles (HABI)
are very useful in photosensitive formulations, such as in
photoresists.
[0065] A hexaarylbiimidazole with a reactive group which may
undergo an addition or condensation reaction with a reactive group
of a carrier component as described above has a general formula:
3
[0066] R.sub.13, R.sub.14 and R.sub.15 are the same or different
and may be a hydrogen, unsubstituted or substituted alkyl, alkoxy,
unsubstituted or substituted aryl, aryloxy, hydroxyl, aminyl,
carboxyl, ester, thio, isocyanate, --N(CH.sub.2--OCH.sub.3).sub.2,
hydroxyalkyloxy or alkylthio. At least one of R.sub.13, R.sub.14
and R.sub.15 is a reactive group which may react with a reactive
group of the carrier compound. Such reactive groups may have a
labile hydrogen, such as in hydroxyl or aminyl groups. Examples of
reactive groups include, but are not limited to,
--N(CH.sub.2--CH.sub.3).sub.2, carboxyl, ester, thio or isocyanate.
Examples of spacer groups with reactive groups include, but are not
limited to, (C.sub.1 to C.sub.12)hydroxyalkyl, (C.sub.1 to
C.sub.12)carboxyalkyl, (C.sub.1 to C.sub.12)aminylalkyl,
(C.sub.1-C.sub.12)alkylester, or hydroxyalkyloxy such as
--O--CH.sub.2--CH.sub.2)OH, --(O--CH.sub.2--CH.sub.2--CH.sub.2)OH
and --(O--CH.sub.2--CH.sub.2--CH.sub.2--CH.sub.2)OH, (C.sub.1 to
C.sub.12)aliphatic isocyanate, (C.sub.5-C.sub.8)cycloaliphatic
isocyanate or (C.sub.5 to C.sub.6)aromatic isocyanate. Any
aliphatic, aromatic or cycloaliphatic group with a reactive group
attached to it may perform as a spacer group. Preferably, the
reactive group is joined to the photoinitiator by a spacer group. A
spacer is preferred because bonding the photoinitiator to the
carrier component is easier and less disruptive of the
photoinitiator capability to form a polymerization initiator.
Preferred reactive groups are (C.sub.1 to C.sub.6)hydroxy alkyl or
(C.sub.1 to C.sub.6)aminyl alkyl. In addition to R.sub.15 equaling
R.sub.13 and R.sub.14, R.sub.15 also may be a halogen group such as
chloro, bromo, or fluoro.
[0067] Examples of alkyl groups having 1 to 4 carbon atoms are
methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl and
test-butyl. Examples of suitable aryl groups having from 6 to 10
carbon atoms are phenyl, naphthyl, ortho-tolyl, meta-tolyl and
para-tolyl. Both the alkyl and the aryl groups may be
functionalized with a reactive group such as hydroxyl, aminyl or
other reactive groups discussed above.
[0068] Hydrophobic photoactive compounds may be prepared by any
suitable method known in the art. For example, hexaarylbiimidazole
compounds may be prepared by oxidative coupling of
triphenylimidazoles. Preparation of substituted triphenylimidazoles
is described in U.S. Pat. No. 3,748,557, U.S. Pat. No. 4,311,783,
and U.S. Pat. No. 4,622,286. In some cases, reaction mixtures in
which more than one hexaarylbiimidazole is produced can be used
without complete separation and purification as described in U.S.
Pat. No. 4,622,286.
[0069] An example of forming substituted triphenylimidazoles used
in the oxidation procedures to prepare the hexaarylbiimidazoles can
be prepared by refluxing, in glacial acetic acid containing
ammonium acetate, benzil with an appropriately substituted
benzaldehyde or a benzil and benzaldehyde which are both suitably
substituted, then drowning the reaction mass in water or in an
ammoniun hydroxide solution, filtering and purifying the product by
recrystallization; or by refluxing a benzoin and a benzaldehyde in
methanol in the presence of copper acetate and ammonia; or by
heating a benzil and a benzaldehyde at 180.degree. C. to
190.degree. C. in formamide as described in U.S. Pat. No.
3,784,557. Benzils and substituted benzils may be prepared by any
suitable method in the literature such as by oxidizing
corresponding benzoins as disclosed in U.S. Pat. No. 4,144,156.
[0070] Another method for forming a photoinitiator component with a
reactive group is to react the photoinitiator, such as
hexarrylbiimidazole, with an alkyl ether or ester in a Friedal
Crafts reaction. The ether or ester group on the alkyl chain or
spacer group attached to the photoinitiator is cleaved to get a
hydroxyl group on the spacer group. The photoinitiator may then be
reacted with a reactive group on a carrier component by an addition
or condensation reaction to form a photoinitiator of the present
invention. Such addition and condensation reactions, as well as the
conditions under which they proceed, are well known in the art.
Other photoinitiators such as thioxanthones, ketals, benzoin
ethers, benzophenones, acetophenones, anthraquinones,
napthaquinones and triazine-based compounds may be functionalized
with reactive groups by analogy using similar procedures.
[0071] Examples of such addition reactions that may occur include
the reaction of a hydroxyl, carboxyl or aminyl reactive group on
the photoinitiator or joined to the photoinitiator by a spacer
group with an isocyanate pendent group on the carrier component to
obtain a urethane (--NHCOO--), amide (--NHCO--) or urea bond
(--NHCONH--) between the carrier component and the photoinitiator.
Alternatively, an isocyanate group attached to the photoinitiator,
or an isocyanate group joined to the photoinitiator by a spacer may
react with a hydroxyl, carboxyl or aminyl functional group on the
carrier component to form the same types of urethane, amide and
urea bonds. Examples of suitable isocyanates which may be employed
are described above. Ester bonds (--COOR) also may form to join a
photoinitiator to a carrier such as a reaction between an acid
group and an alcohol group. R represents an organic moiety
described above.
[0072] In addition to the photoinitiators described above, aromatic
chromophores may be employed in the present invention. Aromatic
chromophores have groups such as phenyl and naphthyl, which are
sensitive to light at wavelengths of from 320 nm to 450 nm.
Typically, such aromatic chromophores are light sensitive from 340
nm to 400 nm, more typically from 350 nm to 365 nm. While not being
bound by any theory, it is believed that the aromatic groups of the
chromophore provide the light sensitivity in the range of 320 nm to
450 nm. Examples of such aromatic chromophores include, but are not
limited to, phenylacridine, or substituted phenylacridines. Such
aromatic chromophores may be joined to a polymer by the same
methods that the photoinitiators described above may be joined to a
polymer.
[0073] Examples of other suitable compounds include, but are not
limited to, plasticizers, surfactants, and complex surfactants. One
example of a suitable plasticizer which may be bonded to a chain or
backbone of a functional polymer is a urethane plasticizer having
formula VIII. 4
[0074] wherein
[0075] --X.sub.1-- is one of the following groups: 5
[0076] Y.sub.1 is a saturated apliphatic or cycloaliphatic group
with 2 to 12 carbon atoms,
[0077] Z.sub.1 is the group 6
[0078] R.sub.16 is R.sub.19 or CONH--R.sub.19,
[0079] R.sub.17 and R.sub.18 are hydrogen atoms or methyl
groups,
[0080] R.sub.19 is a saturated aliphatic group with 1 to 20 carbon
atoms,
[0081] n is zero or a whole number from 1 to 15,
[0082] m' is whole number from 2 to 4,
[0083] p' is zero or a whole number from 1 to 4,
[0084] k' is a whole number from 2 to 12,
[0085] r' is a whole number from 4 to 12, and
[0086] n'+p' is a whole number from 1 to 10, and wherein
R.sub.16=R.sub.19 if p'=0, R.sub.16=CONH--R.sub.10 if n'=0.
[0087] Because the urethane of formula VIII terminates in aliphatic
or cycloaliphatic groups, a functional group such as a halogen may
be added to at least one of the terminal groups in order for the
urethane to react with a polymer backbone or pendent group.
[0088] Examples of water-soluble or water-emulsifiable surfactants
that may be joined to a polymer include alkoxylated emulsifiers. A
suitable alkoxylated emulsifier is one having the general
formula:
R.sub.20--O--(A"O).sub.n"--H IX
[0089] where A"O are alkylene oxide units selected from ethylene
oxide units (CH.sub.2--CH.sub.2--O) and propylene oxide units
(CH(CH.sub.3}CH.sub.2--O) or (CH.sub.2--H(CH.sub.3)--O) and
mixtures of ethylene and propylene oxide units, either in the
mixture of molecules, where R.sub.20 is a hydrophobic group,
typically a hydrocarbon group, n" is between 8 and 200, preferably
between 15 and 40. Preferably, R.sub.20 is a tristyrylphenol.
[0090] Dyes may also be joined to functional compounds of the
present invention. Suitable dies include, but are not limited to,
triphenylmethane dyes, azo dyes, polyazo dyes, antraquinone, eosin,
eosinate, thazine, fluorocein, phthalein, xanthene, oxazine,
aniline based, anionic and cationic dyes. Such dyes may be joined
to the functional polymer by any suitable method in the art. Such
dyes have one or more free reactive groups such as, for example,
sulfinate, amino, or hydroxyl groups that may react with a group on
the polymer. An exemplary method of joining a dye to a polymer is
to place a spacer group on one of the ring structures of the dye
molecule employing a Friedal Crafts reaction as described above for
the photoinitiators. Once the dye molecule has a spacer groups, the
reactive group on the spacer is then reacted with a reactive group
of a functional polymer as described above.
[0091] The functional polymers have an average molecular weight
range of at least 1000 daltons. More typically, the average
molecular weight range of the functional polymers is from 10,000
daltons to 500,000 daltons. Molecular weights may be measured by
such methods as GPC (gel permeation chromatography) or SEC (size
exclusion chromatography). The functionalized polymers of the
present invention may be functionalized with one or more pendent
functional moieties in ranges of from 1.0 to as high as 100 mole
percent of reactive sites on the polymer backbone, typically from
about 2.0 to about 20 mole percent, more typically from about 5.0
to about 15 mole percent. Complete functionalization of the polymer
backbone with pendent groups is not always desirable because such
groups as hydroxyl and carboxyl groups on the backbone provide for
solubility in alkaline solutions. Such solubility is highly
desirable when the functionalized polymer is employed in
photoresist. Acid functionality of the main chain may be a
carboxylic acid functionality or may include, for example, a
sulfonic acid or phosphoric acid functionality.
[0092] The functionalized polymers of the present invention are
film forming polymers that may be employed in any industry where
polymer film coatings are desired. Such industries include, but are
not limited to lithography, electrophotographic imaging members,
optical data storage, decorative pigments, adhesives, cosmetics,
security applications or active and passive optical elements such
as polarizers, optical retarders or color filters, paints and other
surface coating compositions. The functionalized polymers also have
good flexibility, and are readily soluble in aqueous alkaline
solutions such as sodium hydroxide, potassium hydroxide, sodium
carbonate, and the like. Because the functionalized polymers have
good flexibility and solubility, the functionalized polymers are
especially useful in photoresist compositions, particularly in
liquid imaging photoresists. The high solubility of the
functionalized polymers in aqueous alkaline solutions enables
photoresists made with the functionalized polymers to be easily
stripped, thus preventing short circuiting on a circuit board.
Additionally, undesirable and costly strippers such as
organic-based, amine or organic solvent-containing strippers may be
avoided. Thus, excessive waste treatment procedures may be
eliminated from the printed wiring board procedures as well as
environmental and worker safety concerns associated with such
organic-based strippers. Good flexibility also provides for a
photoresist that is not brittle and does not readily chip.
Chipping, due to brittleness, can lead to circuit defects in
printed wiring boards.
[0093] The functionalized polymers also have good adhesion to metal
surfaces due to their pendent functional groups. The functionalized
polymers are also self cross-linking, thus the functionalized
polymers may be employed as the sole cross-linking agent in a
photoresist composition. Advantageously, cross-linking monomers or
oligomers employed in conventional photoresists may be eliminated.
Thus, premature polymeriztion between the various components of a
photoresist composition are avoided. Accordingly, both the
stability and the shelf life of such photoresists are improved.
[0094] Because the functional polymers are hydrophilic, they are
suitable for use in liquid photoresists, such as waterborne
photoresists. Such photoresists may be positive-working or
negative-working. Functionalized polymers of the present invention
compose from 5% by weight to 90% by weight of the photoresist
composition. Preferably the functionalized polymers comprise from
25% by weight to 70% by weight, most preferably from 30% by weight
to 50% by weight of the liquid photoresist composition. In addition
to a diluent, the balance of the photoresist composition may
optionally include additional binder polymers, cross-linking
monomers or oligomers, and conventional additives as described
below. Diluents employed include water an organic solvent or
mixtures thereof. A mono-alcohol or a polyol is a preferred organic
diluent. Water is the most preferred diluent.
[0095] Optional cross-linking agents may be employed, but are
preferably excluded. Such cross-linking agents include a monomer,
or a short chain oligomer having ethylenic unsaturation,
particularly, .alpha.,.beta.-ethylenic unsaturation functionality
of 2 or greater. A mixture of conventional monofunctional and
multi-functional monomers may be used. Such optional cross-linking
agents are included in amounts of from 5% to 15% by weight of the
photoresist.
[0096] Optionally the functionalized polymers of the present
invention may contain an additional photoinitiator chemical system.
Preferably such photoinitiators are excluded. The photoinitiator
chemical system may compose from 0.1% to 5% by weight of the
photoresist composition. Conventional photoinitiators or
photoinitiator systems may be employed.
[0097] Photoresist compositions of the present invention may also
include an optional color former. Color formers are employed in
amounts of from 0.1% to 1.0% by weight of the composition. Examples
of suitable color formers include, but are not limited to,
diphenylamine, dibenzylaniline, triphenylamine, diethylaniline,
diphenyl-p-phenylenediamine, p-toluidine, 4,4'-biphenyldiamine,
o-chloroaniline, leuco crystal violet, leuco malachite green, and
the like.
[0098] Additionally, the photoimageable compositions may contain a
wide variety of additional adjuvants including stabilizers,
flexibilizing agents, adhesion promoters, plasticizers, fillers or
mixtures thereof. Such adjuvants are additives that contribute to
the effectiveness of the primary ingredients. Optionally,
additional polymeric or resin binders may be added to the liquid
photoresists. Such additional polymeric binders may include, as
polymerized components, one or more acid functional monomers such
as (meth)acrylic acid. For example, U.S. Pat. No. 5,952,153,
discloses polymeric binders that have sufficient acid functionality
to be employed in the photoresists of the present invention. When
employed, such polymers may be used in amounts of from 5% to 20% by
weight of the photoresist composition.
[0099] Processing of the liquid photoresist compositions is by any
suitable means employed in the art. For example, a photoimageable
composition layer formed from a liquid composition is applied to a
substrate, such as a surface, of a metal-clad board. An example of
a suitable metal is copper. Any substrate on which a liquid
photoresist may be applied may be employed. The liquid photoresist
composition may be applied to a substrate by any known means, such
as spinning, dipping or roller coating. Once applied, most of the
diluent is removed and the photoresist is then exposed to actinic
radiation through appropriate artwork. Exposure to actinic
radiation polymerizes the cross-linking components in the
light-exposed areas, if the photoresist is negative-working,
resulting in a cross-linked structure that is resistant to
developer. Next, the unexposed portion of the photoresist is
developed in dilute alkaline aqueous solution, such as a 1% sodium
carbonate solution. The alkali solution causes salt formation with
carboxylic acid groups of the functionalized polymer rendering the
unexposed portions of the photoresist soluble and removable. After
development, an etchant may be used to remove metal from areas
where the photoresist was removed thereby forming a printed circuit
pattern. The remaining photoresist may be removed using an
appropriate stripper, such as 1% to 3% sodium or potassium
hydroxide aqueous solution. Organic based developers, such as
tetraalkylammonium hydroxide based developers, may be used but are
less preferred.
[0100] The following examples are intended to further illustrate
the present invention but are not intended to limit the scope of
the invention.
EXAMPLE 1
Polymer of Methacrylic Acid and Methyl Methacrylate functionalized
with: 1,6-Hexamethylene Diisocyanate Biuret--Polypropoxylated
Hydroxypropylmethacrylate Moieties
[0101] A homogeneous solution containing 62.0 grams of methacrylic
acid and 265.0 grams of methyl methacrylate was prepared. 75% by
weight of the homogeneous solution were transferred into a second
flask. The homogeneous solution of the first flask was diluted to
26.0% by weight solids and the homogeneous solution of the second
flask was diluted to 86.50% by weight solids by adding sufficient
methyl ethyl ketone.
[0102] The first flask was mixed and heated to reflux under
atmospheric conditions. 2.0 grams of 2,2'-azobis
(2-methylbutyronitrile) was added to the reaction mixture, mixed
and held at reflux for about 30 minutes.
[0103] 6.25 grams of 2,2'-azobis (2-methylbutyronitrile) was mixed
with 38.0 grams of methyl ethyl ketone and fed into the first flask
along with the contents of the second flask over 4 hours while
maintaining reflux. An additional amount of 9.0 grams of methyl
ethyl ketone was then added to the first flask and the mixture was
refluxed for an additional hour.
[0104] 4.55 grams of 2,2'-azobis (2-methylbutyronitrile) were
dissolved in 48.0 grams of methyl ethyl ketone and mixed. The
mixture was then added to the first flask over a period of 90
minutes while maintaining reflux.
[0105] 8.5 grams of 2,2'-azobis (2-methylbutyronitrile) were mixed
with 48.0 grams of methyl ethyl ketone and then fed into the
reaction mixture over about 150 minutes while maintaining reflux.
An additional amount of 23.0 grams of methyl ethyl ketone were
added to the reaction mixture. At the end of the reaction,
2,2'-azobis (2-methylbutyronitrile) was thermally killed off to
below parts per million concentrations. The acrylic polymer main
chain or back bone product was set aside.
[0106] 150.0 grams of 1,6-hexamethylene diisocyante biuret (23.0%
NCO) were added to a clean dry, nitrogen sparged flask. 0.06 grams
of dibutylin dilaurate, 0.05 grams of Irganox.RTM. 1076
(antioxidant) and 160.0 grams of methyl ethyl ketone were also
added to the flask. The flask was sparged with dry air and
stoppered. The components were mixed and heated at about 35.degree.
C.
[0107] In a separate clean dry air sparged addition funnel, 193.0
grams of polypropoxylated hydroxypropylmethacrylate (hydroxyl
number=158) was weighed out. The polypropoxylated
hydroxypropylmethacrylate was added to the flask containing the
1,6-hexamethylene diisocyanate biuret over about 1 hour with mixing
and maintaining a temperature of 35.degree. C. The addition funnel
was then rinsed with 118.0 grams of methyl ethyl ketone to remove
any remaining polypropoxylated hydroxypropylmethacrylate. The rinse
was added to the flask containing the biuret with a temperature
increased to 60.degree. C. The reaction was maintained for 3 hours
at 60.degree. C. The reaction was monitored to determine completion
of the synthesis of a urethane acrylate moiety by known analytical
methods in the art.
[0108] The functionalized polymer was prepared by weighing out
763.0 grams of the acrylic polymer (47% solids) and 55.0 grams of
methyl ethyl ketone to a clean, dry air sparged flask. The
combination was mixed and heated to 45.degree. C. The
urethane/acrylate moiety was then added to the acrylic polymer over
about 1 hour. 0.50 grams of Irganox.RTM. 1076 and 28.0 grams of
methyl ethyl ketone was added to the reaction mixture. The reaction
contents were held at 45.degree. C. for 3 hours with constant
mixing. The polymer main chain was 6 mole percent functionalized
with the moiety. P represents the polymer backbone with one
functional moiety attached. 7
EXAMPLE 2
Polymer of 2-Hydroxyethyl Methacrylate, Methacrylic Acid and Methyl
Methacrylate Functionalized with: Isophorone
Diisocyanate--Polypropoxylat- ed Hydroxypropylmethacrylate
Moieties
[0109] The step of preparing the acrylic polymer backbone was the
same as in the method described in Example 1 above except that 70.0
grams of 2-hydroxyethyl methacrylate was added to the mixture of
methacrylic acid and methyl methacrylate.
[0110] The reaction conditions for preparing the functionalized
pendent groups were the same as described in Example 1 above except
that 1 mole of isophorone diisocyanate was reacted with about one
mole of hydroxy methacrylate to form a isophorone diisocyante
hydroxy methacrylate moiety.
[0111] The isocyanate groups of the isophorone diisocyanate hydroxy
methacrylate moiety were reacted with the hydroxyl groups of the
2-hydroxyethyl methacrylate moiety under the conditions described
in Example 1 to form a functionalized polymer with functionalized
pendent groups as shown below. The polymer was 6 mole percent
functionalized. P represents the polymer backbone. 8
EXAMPLE 3
Synthesis of 1,6-Hexamethylene Diisocyanate Trimer-Polyalkoxylated
Hydroxyalkyl (meth)acrylate, or a 1,6-Hexamethylene Diisocyanate
Trimer-Hydroxyalkyl (meth)acrylate (urethane/acrylate with at Least
One Free isocyanate)
[0112] One mole of 1,6-hexamethylene diisocyanate trimer is added
to a clean dry, nitrogen sparged flask. 0.06 grams of dibutylin
dilaurate, 0.05 grams of Irganox.RTM. (antioxidant) and 160.0 grams
of methyl ethyl ketone are also added to the flask. The flask is
sparged with dry air and stoppered. The components are mixed and
heated at 35.degree. C. Two moles of a polyalkoxylated hydroxyalkyl
(meth)acrylate, or two moles of hydroxyalkyl (meth)acrylate are
added to the flask, mixed with the trimer, and heated at 35.degree.
C. for one hour. The reaction temperature is increased to
60.degree. C. and the reaction is maintained for 3 hours. The
resulting compound has the following general structure where n is
an integer of from 0 to 1000, preferably from 1 to 200, 1 is an
integer of from 1 to 10, m is an integer of from 1 to 10 and
R.sup.3 is (meth)acrylate. 9
[0113] The foregoing urethane/acrylate with one free isocyanate
group may be reacted with a polymer main chain containing free
carboxyl, hydroxyl, or aminyl groups to form a functionalized
polymer of the present invention.
EXAMPLE 4
Synthetic Procedure
[0114] 60 g of a diacrylate acceptor compound (formula IX below)
and 0.5 g of diazabicyclo-undecene (DBU) are weighed into a 500 ml
3-neck round bottom flask equipped with a mechanical stirrer and
addition funnel. 15.0 g of an acetoacetate derived donor compound
(formula X below) is weighed into the addition funnel. The acceptor
compound and DBU are mixed for 5 minutes prior to addition of the
donor compound. The donor compound is then added dropwise to the
stirred acceptor/DBU mixture over a 15 minute period. The solution
is warmed to 54 degrees Celsius after addition of the donor
compound is complete. After the exotherm subsided in 100 minutes, a
viscous yellow liquid is obtained which does not gel upon standing.
10
[0115] where R' is a radical derived from a urethane oligomer
having a formula:
CH.sub.2.dbd.C(CH.sub.3)CO--O--(--CH.sub.2--CH.sub.2--O--).sub.5-6--(--CO--
-CH.sub.2--CH.sub.2--CH.sub.2--CH.sub.2--CH.sub.2--O).sub.3--CO--NH--
[0116]
(CH.sub.2).sub.6--NH--CO--(--O--CH.sub.2--CH.sub.2--CH.sub.2--CH.su-
b.2--CH.sub.2--CO--).sub.3--(--O--CH.sub.2--CH.sub.2--).sub.5-6-O--CO--C(C-
H.sub.3).dbd.CH.sub.2. 11
[0117] The oligomer of the above reaction between donor compound XI
and acceptor compound X has the following general formula: 12
EXAMPLE 5
[0118] To 2.1 parts of hydroxybutyl substituted benzil (0.01 mole)
dissolved in 50 parts of glacial acetic acid containing 6 parts of
ammonium acetate (0.078 mole) is added 1.4 parts of
o-chlorobenzaldehyde (0.01 mole), and the solution is refluxed for
2 hours. The solution is then drowned in 200 parts of cold water
whereupon 3.1 parts of reaction product precipitate. The product is
isolated by filtration and purified by recrystalling twice from
ethanol. The product, a chlorinated hydroxybutyl imidazole, is a
white crystalline solid.
[0119] To 1.1 parts of the above prepared imidazole dissolved in
100 parts of ethanol containing 12 parts of potassium hydroxide is
added 450 parts of a 1% by weight water solution of potassium
ferricyanide at a rate of 5 parts per minute for 1.5 hours with
continuous stirring. The oxidation reaction product in an amount of
1.0 parts precipitates from the reaction mixture, is isolated by
filtration, and is washed with water until free from ferricyanide.
The product is dried at 56.degree. C. for eight hours at 0.1 mm.
mercury pressure after predrying overnight in a vacuum oven at
50.degree. C. It is solvated with two moles of enthanol for every
three moles of biimidazole. The product is a biimidazole having the
general formula shown below.
[0120] A portion of the ethanol-solvated product was dried
azeotropically with cyclohexane to produce non-solvated material.
Recrystallization from ether also yields the non-solvated product.
13
[0121] The above photoactive component is then reacted with the
pendent carboxyl groups of an oligomer composed of
methylmethacrylate and acrylic acid to bind the photoactive
component with the oligomer by an ester linkage. The oligomer is
prepared by free radical polymerization of the methylmethacrylate
and acrylic acid monomers. The methylmethacrylate and acrylic acid
monomers are obtainable from Rohm and Haas Company. The reaction
takes place in an aqueous acidic environment. The reactants are
refluxed in the acidic environment from 90.degree. C. to
100.degree. C. to obtain a water-soluble photoinitiator yield of
from 85% to 90% by weight.
[0122] The hydrophilic photoinitiator containing compound may be
employed as a cross-linking agent or further polymerized and
employed as a polymer binder in a photoresist formulation. Upon
exposure to light, a radical from the photoactive component is
generated to polymerize the cross-linking agents of the
formulation.
EXAMPLE 6
Synthesis of Functionalized Copolymer
[0123] A homogeneous solution containing 197 grams of methacrylic
acid, 512 grams of methyl methacrylate and 79 grams of
poly(ethoxylated) monomethacrylate was prepared. 75% by weight of
the homogeneous solution were prepared into a second flask. The
homogeneous solution of the first flask was diluted to 25% by
weight solids and the homogeneous solution of the second flask was
diluted to 60% be weight solids by adding sufficient methyl ethyl
ketone.
[0124] The first flask was mixed and heated to reflux under
atmospheric conditions. 2.0 grams of 2,2'-azobis
(2-methylbutyronitirle) was added to the reaction mixture, mixed
and held at reflux for 30 minutes.
[0125] 6.0 grams of 2,2'-azobis (2-methylbutyronitirle) was mixed
with about 40 grams of methyl ethyl ketone and fed into the first
flask along with the contents of the second flask over 4 hours
while maintaining reflux. An additional amount of 9.0 grams of
methyl ethyl ketone was then added to the first flask and the
mixture was refluxed for an additional hour.
[0126] 5.0 grams of 2,2'-azobis (2-methylbutyronitrile) were
dissolved in 50.0 grams of methyl ethyl ketone and mixed. The
mixture was then added to the first flask over a period of 90
minutes while maintaining reflux.
[0127] 9.0 grams of 2,2'-azobis (2-methylbutyronitrile) were mixed
with 50.0 grams of methyl ethyl ketone and then fed into the
reaction mixture over 150 minutes while maintaining reflux. An
additional amount of 25.0 grams of methyl ethyl ketone were added
to the reaction mixture. At the end of the reaction, 2,2'-azobis
(2-methylbutyronitirle) was thermally killed off to below parts per
million concentrations. The acrylic copolymer main chain or
backbone was set aside.
[0128] 5.31 grams of 1,6-hexamethylene diisocyanate biuret (23. %
free-NCO) were added to a clean dry, nitrogen sparged flask. 0.06
grams of dibutylin dilaurate, 0.05 grams of Irganox.RTM. 1076
(antioxidant) and 160.0 grams of methyl ethyl ketone were also
added to the flask. The flask was sparged with dry air and
stoppered. The components were mixed and heated at 35.degree.
C.
[0129] In a separate clean dry air sparged addition funnel, 15.97
grams of poly(ethoxylate-b-caprolactone) monomethacrylate oligomer
was weighed out. The oligomer was added to the flask containing the
1,6-hexamethylene diisocyanate biuret over 1 hour with mixing and
maintaining a temperature of 35.degree. C. The addition funnel was
then rinsed with 118.0 grams of methyl ethyl ketone to remove any
remaining oligomer. The rinse was added to the flask containing the
biuret with a temperature increased to 60.degree. C. The reaction
was maintained for 3 hours at 60.degree. C. the reaction was
monitored to determine completion of the synthesis of a urethane
acrylate moiety by high pressure liquid chromatography (HPLC).
[0130] The functionalized polymer was prepared by weighing out
763.0 grams of the acrylic copolymer (47% solids) and 50.0 grams of
methyl ethyl ketone to a clean, dry air sparged flask. The
combination was mixed and heated to 45.degree. C. The
urethane/acrylate moiety was then added to the acrylic polymer over
1 hour 0.50 grams of Irganox.RTM. 1076 and 30.0 grams of methyl
ethyl ketone was added to the reaction mixture. The reaction
contents were held at 45.degree. C. for 3 hours with constant
mixing. The resulting copolymer was composed of 25 mole % of
methyacrylic acid, 65 mole % of methyl methacrylate and 10 mole %
of poly(ethoxylated) monomethacrylate residues. The copolymer main
chain was 6 mole % functionalized with the moiety.
EXAMPLE 7
Synthesis of a Functionalized Copolymer
[0131] A homogeneous solution containing 77.5 grams of
2-hydroxyethyl methacrylate, 194 grams of methacrylic acid, and 504
grams of methyl methacrylate was prepared. 75% by weight of the
homogeneous solution was transferred to a second flask. The
homogeneous solution of the first flask was diluted to 25% by
weight solids and the homogeneous solution of the second flask was
diluted to 60% by weight solids by adding sufficient methyl ethyl
ketone.
[0132] The first flask was mixed and heated to reflux under
atmospheric conditions. 2.0 grams of 2,2'-azobis
(2-methylbutyronitirle) was added to the reaction mixture, mixed
and held at reflux for 30 minutes.
[0133] 6.25 grams of 2,2'-azobis (2-methylbutyronitirle) was mixed
with 40.0 grams of methyl ethyl ketone and fed into the first flask
along with the contents of the second flask over 4 hours while
maintaining reflux. An additional amount of 9.0 grams of methyl
ethyl ketone was then added to the first flask and the mixture was
refluxed for an additional hour.
[0134] 5.0 grams of 2,2'-azobis (2-methylbutyronitrile) were
dissolved in 50.0 grams of methyl ethyl ketone and mixed. The
mixture was then added to the first flask over a period of 90
minutes while maintaining reflux.
[0135] 9.0 grams of 2,2'-azobis (2-methylbutyronitirle) were mixed
with 50.0 grams of methyl ethyl ketone and then fed into the
reaction mixture over 150 minutes while maintaining reflux. An
additional amount of 23.0 grams of methyl ethyl ketone were added
to the reaction mixture. At the end of the reaction, 2,2'-azobis
(2-methylbutyronitirle) was thermally killed off to below parts per
million concentrations. The acrylic polymer main chain or backbone
product was set aside.
[0136] 150.0 grams of 1,6-hexamethylene diisocyanate biuret
(23.0%-NCO) were added to a clean dry, nitrogen sparged flask. 0.06
grams of dibutylin dilaurate, 0.05 grams of Irganox.RTM. 1076
(antioxidant) and 160.0 grams of methyl ethyl ketone were also
added to the flask. The flask was sparged with dry air and
stoppered. The components were mixed and heated at 35.degree.
C.
[0137] In a separate clean dry air sparged addition funnel, 190.0
grams of poly(ethoxylate-b-caprolactone)monomethacrylate oligomer
was weighed out. The oligomer was added to the flask containing the
1,6-hexamethylene diisocyanate biuret over 1 hour with mixing and
maintaining a temperature of 35.degree. C. The addition funnel was
then rinsed with 120.0 grams of methyl ethyl ketone to remove any
remaining oligomer. The rinse was added to the flask containing the
biuret with a temperature increased to 60.degree. C. The reaction
was maintained for 3 hours at 60.degree. C. The reaction was
monitored to determine completion of the synthesis of the urethane
acrylate moiety.
[0138] The functionalized polymer was prepared by weighing out
750.0 grams of the acrylic copolymer and 55.0 grams of methyl ethyl
ketone to a clean, dry air sparged flask. The combination was mixed
and heated to 45.degree. C. The urethane/arcrylate moiety was then
added to the acrylic copolymer over 1 hour. 0.50 grams of
Irganox.RTM. 1076 and 30.0 grams of methyl ethyl ketone was added
to the reaction mixture. The reaction contents were held at
45.degree. C. for 3 hours with constant mixing. The polymer main
chain was 6 mole percent functionalized with the moiety.
* * * * *