U.S. patent application number 11/141817 was filed with the patent office on 2005-10-06 for current-to-voltage converting apparatus and impedance measuring apparatus.
This patent application is currently assigned to AGILENT TECHNOLOGIES, INC.. Invention is credited to Iwasaki, Yukoh.
Application Number | 20050218910 11/141817 |
Document ID | / |
Family ID | 33296129 |
Filed Date | 2005-10-06 |
United States Patent
Application |
20050218910 |
Kind Code |
A1 |
Iwasaki, Yukoh |
October 6, 2005 |
Current-to-voltage converting apparatus and impedance measuring
apparatus
Abstract
A current-to-voltage converting apparatus connected to an
element or a circuit having a first terminal connected to a signal
source and comprising a feedback amplifier, which is connected to a
second terminal of the element or the circuit and keeps the second
terminal at virtual ground, and which converts the current signals
that flow to the element or the circuit to voltage signals and
outputs these signals; a device for opening the feedback loop of
the feedback amplifier and measuring the open-loop loss of the
feedback loop; and a compensating amplifier, which compensates for
the open-loop loss. It further comprises a device for measuring the
open-loop phase shift of the feedback loop when the feedback loop
is open and a control unit for keeping the open-loop phase shift at
a pre-determined value.
Inventors: |
Iwasaki, Yukoh; (Tokyo,
JP) |
Correspondence
Address: |
Paul D. Greeley, Esq.
OHLANDT, GREELEY, RUGGIERO & PERLE, L.L.P.
10th FLOOR
ONE LANDMARK SQUARE
STAMFORD
CT
06901-2682
US
|
Assignee: |
AGILENT TECHNOLOGIES, INC.
|
Family ID: |
33296129 |
Appl. No.: |
11/141817 |
Filed: |
June 1, 2005 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
11141817 |
Jun 1, 2005 |
|
|
|
10809262 |
Mar 25, 2004 |
|
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Current U.S.
Class: |
324/650 |
Current CPC
Class: |
H03F 3/602 20130101;
G01R 27/02 20130101 |
Class at
Publication: |
324/650 |
International
Class: |
G01R 027/28 |
Foreign Application Data
Date |
Code |
Application Number |
Apr 18, 2003 |
JP |
2003-113733 |
Claims
1-9. (canceled)
10. An impedance measuring apparatus which comprises: a signal
source connected to a first terminal of a device under test, a
feedback amplifier, which is connected to a second terminal of said
device under test and keeps said second terminal at virtual ground,
and which converts current signals that flow to said device under
test to voltage signals and outputs these signals, means for
opening the feedback loop of said feedback amplifier and measuring
the open-loop loss of said feedback loop, a compensating amplifier,
which compensates said open-loop loss, and means for measuring the
vector voltage ratio between the voltage signals between said first
terminal and said second terminal and the output signals of said
feedback amplifier, whereby it measures the impedance of said
device under test from said vector voltage ratio.
11. The impedance measuring apparatus according to claim 10,
further comprising: means for measuring the open-loop phase shift
of said feedback loop when said feedback loop is open; and control
means for keeping said open-loop phase shift at a pre-determined
value.
12. The impedance measuring apparatus according to claim 10,
wherein said feedback loop is open or the open-loop loss of said
feedback loop is measured, the output of said signal source is
controlled so that it becomes zero or a direct-current signal.
13. The impedance measuring apparatus according to claim 10,
wherein said feedback amplifier comprises a modulation-type
narrow-band amplifier, and said narrow-band amplifier comprises a
quadrature detector, filters, and a vector modulator.
14. The impedance measuring apparatus according to claim 13,
wherein said compensating amplifier is in between said quadrature
detector and said vector modulator.
15. The impedance measuring apparatus according to claim 13,
wherein said control means controls the phase difference between
the signal that is applied to said quadrature detector and the
signal that is applied to said vector modulator
16. The impedance measuring apparatus according to claim 13,
wherein said feedback loop is opened by being opened in between
said quadrature detector and said vector modulator.
17. The impedance measuring apparatus according to claim 13,
wherein said feedback amplifier also comprises a null detector and
feedback circuit, said null detector is connected to said second
terminal and the signals that are input to the null detector are
converted to voltage signals by the null detector, said narrow-band
amplifier resolves said converted voltage signal into an in-phase
component and an quadrature-phase component using said quadrature
detector, filters said in-phase component and said quadrature-phase
component using said respective filters, vector modulates said
filtered in-phase component and said filtered quadrature-phase
component using said vector modulator, and outputs the vector
voltage signals, and said feedback circuit inputs said vector
signals to said null detector.
18. The impedance measuring apparatus in claim 10, wherein said
element or said circuit is a capacitive element or capacitive
circuit.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention pertains to an impedance measuring
apparatus and in particular, relates to an impedance measuring
apparatus with which high-speed measurement is possible.
[0003] 2. Background of the Art
[0004] Impedance measuring apparatuses that operate by the
automatic balanced-bridge method are an example of the prior art of
impedance measuring apparatuses. Impedance measuring apparatuses
that operate by the automatic balanced-bridge method are
characterized in that they cover a broad measurement frequency
range and their measurement accuracy is good within a broad
impedance measurement range.
[0005] The internal structure and operation of an impedance
apparatus that operates by the automatic balanced-bridge method are
described below. FIG. 1 is a drawing showing the internal structure
of an impedance measuring apparatus that operates by the automatic
balanced-bridge method. Impedance measuring apparatus 10 in FIG. 1
comprises signal source 200, current-to-voltage converting
apparatus 300, and vector voltmeter 400 for determining the
impedance of device under test 100. The entire impedance measuring
apparatus 10 is operated under the control of an operation control
device CTRL.sub.1 (not illustrated), such as a CPU.
[0006] Device under test 100 is an element or a circuit having two
terminals. Device under test 100 should have at least two terminals
and also, it can be an element or a circuit with three or more
terminals. In this case, two of the three or more terminals are
used for the measurements. Device under test 100 is represented by
"DUT" in FIG. 1. The point where device under test 100, cable 510,
and cable 520 are connected in FIG. 1 is referred to as the High
terminal. Moreover, the point where device under test 100, cable
530, and cable 540 are connected is referred to as the Low
terminal.
[0007] Signal source 200 is the signal source that is connected to
a first terminal of the device under test 100 by cable 510 and
generates measurement signals that are applied to device under test
100. Moreover, signal source 200 is also connected to vector
voltmeter 400 by cable 510, cable 520, and buffer 550 and feeds
measurement signals to vector voltmeter 400. The measurement
signals are single sine-wave signals. However, the measurement
signals are not limited to single sine-wave signals and can also be
signals that comprise several sine waves.
[0008] Current-to-voltage converting apparatus 300 converts the
current that flows to device under test 100 and outputs voltage
signals to buffer 560. Current-to-voltage converting apparatus 300
comprises a null detector 310, a narrow-band amplifier 600, a
buffer 320, and a range resistor 330. Cable 530, null detector 310,
narrow-band amplifier 600, buffer 320, range resistor 330, and
cable 540 form a negative feedback loop 340.
[0009] Null detector 310 balances the current that flows to range
resistor 330 and the current that flows to device under test 100
and outputs signals to narrow-band amplifier 600 such that the
current that flows into the input terminals of null detector 310
through cable 530 will be brought to zero. When the current that
flows to range resistor 330 and the current that flows to device
under test 100 are balanced, the current at the Low terminal is
kept at virtual ground.
[0010] FIG. 2 is a drawing showing the internal structure of
narrow-band amplifier 600. Narrow-band amplifier 600 comprises a
phase sensitive detector 610, a filter 620 and a filter 630, as
well as a vector modulator 640, and amplifiers and amplifies the
output signals of null detector 310 and outputs them to buffer 320.
Narrow-band amplifier 600 resolves the output signals of null
detector 310 into an in-phase component and an quadrature-phase
component using phase sensitive detector 610, filters the in-phase
component and quadrature-phase component using filter 620 and
filter 630, modulates the filtered in-phase component and
quadrature-phase component using vector modulator 640, and feeds
the vector-modulated voltage signals to buffer 320.
[0011] Phase sensitive detector 610 is a quadrature detector and
comprises a mixer 611, a mixer 612, a signal source 613, and a
signal source 614. Signal source 613 generates sine-wave signals
and feeds them to mixer 611. Moreover, signal source 614 generates
cosine-wave signals and feeds them to mixer 612. The sine-wave
signals output by signal source 613 and the cosine signals output
by signal source 614 have the same frequency as the measurement
signals and they are orthogonal to each other. Consequently, mixer
611 and mixer 612 can orthogonally resolve the output signal of
null detector 310 into an in-phase component and an
quadrature-phase component.
[0012] Filter 620 is an integrator that comprises a resistor 621,
an amplifier 622, and a capacitor 623, and integrates the output
signals of mixer 611. Filter 630 is an integrator comprising a
resistor 631, an amplifier 632, and a capacitor 633, and integrates
the output signals of mixer 612.
[0013] Vector modulator 640 comprises a mixer 641, a mixer 642, a
signal source 643, a signal source 644, and an adder 645. Signal
source 643 generates sine-wave signals and feeds them to mixer 641.
Moreover, signal source 644 generates cosine signals and feeds them
to mixer 642. The sine-wave signals output by signal source 643 and
the cosine-wave signals output by signal source 644 have the same
frequency as the measurement signals, and they are orthogonal to
each other. Mixer 641 modulates the sine-wave signals that are
output from signal source 643 with the output signals of filter 620
and outputs the modulated sine signal. Mixer 642 modulates the
cosine-wave signals output from signal source 644 with the output
signals of filter 630 and outputs the modulated cosine signal. The
voltage signals output from mixer 641 and the voltage signals
output from mixer 642 are added by adder 645 and output to buffer
320.
[0014] Vector voltmeter 400 of FIG. 1 measures output signal
E.sub.dut of buffer 550 and output signal E.sub.rr of buffer 560.
Control device CTRL.sub.1 calculates the vector ratio of signal
E.sub.dut and signal E.sub.rr that have been measured and
calculates the impedance of device under test 100 from the
calculated vector ratio and the resistance of range resistor
330.
[0015] Measurement of the gate oxide film is one important
measurement in the production of MOS devices. The gate oxide film
thickness is an important parameter in determining the operating
threshold of MOS-type devices. The gate oxide film thickness is
measured by measuring the impedance of an MOS device, calculating
the capacitance from the impedance measurement, and converting this
calculated capacitance to the equivalent oxide film thickness using
the dielectric constant.
[0016] When an MOS device on a semiconductor wafer is tested using
a conventional impedance measuring apparatus 10, a wafer interface
device comprising a switch matrix, a chuck, a probe card, and the
like is added between the impedance measuring apparatus 10 and
device under test 100. The wafer interface device has a larger
ground capacitance than device under test 100. Moreover, cable 510,
cable 520, cable 530, and cable 540 that are connected between this
wafer interface device and impedance measuring apparatus 10 are
relatively long and also have a large ground capacitance. Cable
510, cable 520, cable 530, and cable 540 are called cable 510,
etc., hereafter. FIG. 3 is a drawing in which the above-mentioned
ground capacitance has been added to FIG. 1. C.sub.cable in FIG. 3
is the total ground capacitance of cable 510, etc. Moreover,
C.sub.winf is the ground capacitance of the wafer interface device.
The ground capacitance of the wafer interface device comprises the
ground capacitance of the switch matrix, the ground capacitance of
the chuck, and the ground capacitance of the probe card.
[0017] Conventional impedance measuring apparatus has two problems
with high-speed measurements. The first problem is that when a
large ground capacitance is applied to the Low terminal, the
current-to-voltage converting apparatus 300 takes a long time to
settle. If the time to settling of the current-to-voltage
converting apparatus 300 is long, the time until the current that
flows to range resistor 330 and the current that flows to the
device under test are balanced is also long and the wait time until
measurements begin is increased. When the capacitance of an MOS
device on a semiconductor wafer is measured, this problem is
exacerbated by a wafer interface device and cable 510, etc., with a
large ground capacitance, as described above.
[0018] The second problem is that when the capacitance of an MOS
device on a semiconductor wafer is measured, the ground capacitance
of the wafer interface device and cable 510, etc. is not constant.
There are many types of wafer interface devices and cable 510, etc.
depending on the device under test and the user's selection.
Consequently, the ground capacitance of the wafer interface device
and cable 510, etc. is not constant. Unless the ground capacitance
on the wafer interface device and cable 510, etc. is constant, it
will be very difficult to keep the ground capacitance from
affecting the measurement results as planned.
[0019] There has been considerable progress in microfabrication
technology for semiconductors in recent years, with a huge number
of elements or circuits being formed on one wafer. While there has
been an obvious increase in the number of elements that serve as
the device under test, a corresponding increase in measurement time
is not allowed. Moreover, sacrifice of measurement precision for
high-speed measurement is not acceptable. The realization of
high-speed, high-precision impedance measurement is a very
important problem in the semiconductor industry today.
SUMMARY OF THE INVENTION
[0020] The present invention provides a novel apparatus with which
impedance can be measured at high speed and high precision in order
to solve the above-mentioned problems.
[0021] The present invention was created in order to realize the
above-mentioned object. The present invention is characterized in
that it is a current-to-voltage converting apparatus connected to
an element or a circuit having a first terminal connected to a
signal source comprising a feedback amplifier, which is connected
to a second terminal of this element or this circuit and keeps this
second terminal at virtual ground, and converts current signals
that flow to this element or this circuit to voltage signals and
outputs these signals; means for opening the feedback loop of this
feedback amplifier and measuring the open-loop loss of this
feedback loop; and a compensating amplifier, which compensates for
this open-loop loss.
[0022] Moreover, the present invention also provides an impedance
measuring apparatus characterized in that it comprises a signal
source connected to a first terminal of a device under test; a
feedback amplifier, which is connected to a second terminal of this
device under test and keeps this second terminal at virtual ground,
and converts to voltage signals and outputs the current signals
that flow to this device under test; means for opening the feedback
loop of this feedback amplifier and measuring the open-loop loss of
this feedback loop; a compensating amplifier, which compensates
this open-loop loss; and means for measuring the vector voltage
ratio between the voltage signals between this first terminal and
this second terminal and the output signals of this feedback
amplifier; and it measures the impedance of this device under test
from this vector voltage ratio.
BRIEF DESCRIPTION OF THE DRAWINGS
[0023] FIG. 1 is a drawing showing the internal structure of an
impedance measuring apparatus of the prior art.
[0024] FIG. 2 is a drawing showing the internal structure of a
narrow-band amplifier of an impedance measuring apparatus of the
prior art.
[0025] FIG. 3 is a drawing showing an impedance measuring apparatus
of the prior art to which a wafer interface apparatus has been
added.
[0026] FIG. 4 is a drawing showing the internal structure of the
impedance measuring apparatus of the present invention.
[0027] FIG. 5 is a drawing showing the internal structure of the
narrow-band amplifier of the impedance measuring apparatus of the
present invention.
[0028] FIG. 6 is a flow chart showing the operation of the
impedance measuring apparatus of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0029] The present invention will now be described based on the
preferred embodiments shown in the appended drawings. The first
embodiment of the present invention is an impedance measuring
apparatus that operates by the automatic balanced-bridge method,
and its internal structure is shown in FIG. 4. The same reference
symbols are used in FIGS. 1 and 4 for structural elements having
the equivalent function and properties.
[0030] An impedance measuring apparatus 20 in FIG. 4 comprises a
signal source 200, a current-to-voltage converting apparatus 800,
and a vector voltmeter 400 for measuring the impedance of device
under test 100. Impedance measuring apparatus 20 operates under the
control of computer device CTRL.sub.2 (not illustrated) that
executes the programs.
[0031] Device under test 100 comprises multiple MOS devices on a
semiconductor wafer. For convenience, the device under test is
represented in the drawing as only one "DUT." The MOS capacitance
of the MOS device is measured in the present embodiment and
therefore, device under test 100 is a capacitor with a first
terminal and a second terminal. Device under test 100 is connected
to impedance measuring apparatus 20 through a wafer interface
device 700. Although not illustrated, wafer interface device 700
comprises a switch matrix, a chuck, a probe card, and the like. The
point where wafer interface device 700 and a cable 510 and a cable
520 are connected is referred to as the High terminal. Moreover,
the point where wafer interface device 700 and cable 530 and a
cable 540 are connected is referred to as the Low terminal. Device
under test 100 should have at least two terminals and also can be
an element or circuit with three or more terminals, such as a
transistor. In this case, two of the three or more terminals are
used in the measurements.
[0032] Signal source 200 is the signal source that is connected to
the first terminal of device under test 100 via cable 510 and wafer
interface device 700 and generates the measurement signals that
will be applied to device under test 100. Moreover, signal source
200 is the signal source that is connected to vector voltmeter 400
through cable 510, cable 520, and buffer 550 and feeds the
measurement signals to vector voltmeter 400. The measurement
signals are single sine-wave signals. However, the measurement
signals are not limited to single sine-wave signals and can also be
signals that comprise multiple sine waves.
[0033] A current-to-voltage converting apparatus 800 converts
current flowing to device under test 100 and outputs voltage
signals to buffer 560. Current-to-voltage converting apparatus 800
comprises a null detector 310, a narrow-band amplifier 900, a
buffer 320, and a range resistor 330. Cable 530, null detector 310,
narrow-band amplifier 900, buffer 320, range resistor 330, and
cable 540 form a negative feedback loop 810.
[0034] Null detector 310 balances the current that flows to range
resistor 330 and the current that flows to device under test 100
and outputs signals to narrow-band amplifier 900 so that the
current that flows through cable 530 to the input terminal of null
detector 310 is brought to zero. When the current that flows to
range resistor 330 and the current that flows to device under test
100 are balanced, the voltage of the Low terminal is kept at
virtual ground.
[0035] FIG. 5 is a drawing showing the internal structure of
narrow-band amplifier 900. Narrow-band amplifier 900 comprises a
phase sensitive detector 910, filters 920 and 930, a variable gain
amplifier 941, a variable gain amplifier 942, a switch 951, a
switch 952, a constant voltage source 961, a constant voltage
source 962, a vector modulator 970, a switch 980, and a switch 990,
and amplifies the output signals of null detector 310 and outputs
them to buffer 320.
[0036] Phase sensitive detector 910 is quadrature detector and
comprises a mixer 911, a mixer 912, a signal source 913, and a
signal source 914. Signal source 913 generates sine-wave signals
and feeds them to mixer 911. Moreover, signal source 914 generates
cosine signals and feeds them to mixer 912. The sine-wave signals
output by signal source 913 and the cosine-wave signals output by
signal source 914 have the same frequency as the measurement
signals and the signals are orthogonal to each other. Consequently,
mixer 911 and mixer 912 orthogonally resolve the output signal of
null detector 310 into an in-phase component and an
quadrature-phase component and output the signals to filter 920 and
filter 930. The output signal of signal source 913 and the output
signal of signal source 914 should be signals that have the same
frequency as the measurement signal and are orthogonal to each
other, and they can be a rectangular-wave signal rather than a
sine-wave signal.
[0037] Filter 920 is an integrator comprising a resistor 921, an
amplifier 922, and a capacitor 923, and integrates the output
signals of mixer 911. Moreover, filter 930 is an integrator
comprising a resistor 931, an amplifier 932, and a capacitor 933,
and integrates the output signals of mixer 912.
[0038] Variable gain amplifier 941 amplifies the output signals of
filter 920 and outputs them to switch 951. Moreover, variable gain
amplifier 942 amplifies the output signals of filter 930 and
outputs them to switch 952. The gain of variable gain amplifier 941
and that of variable gain amplifier 942 are the same and the gain
is changed by computer control CTRL.sub.2.
[0039] Switch 951 selects either the output signals of variable
gain amplifier 941 or the output signals of constant voltage source
961 and outputs these to vector modulator 970. Moreover, switch 952
selects either the output signals of variable gain amplifier 942 or
the output signals of constant voltage source 962 and outputs them
to vector modulator 970.
[0040] Vector modulator 970 comprises a mixer 971, a mixer 972, a
signal source 973, a signal source 974, and an adder 975. Signal
source 973 generates sine-wave signals and feeds them to mixer 971.
Moreover, signal source 974 generates cosine-wave signals and feeds
them to mixer 972. The sine-wave signals output by signal source
973 and the cosine-wave signals output by signal source 974 have
the same frequency as the measurement signals and are orthogonal to
each other. Mixer 971 modulates the sine-wave signals output from
signal source 973 with the output signals of switch 951 and outputs
the modulated sine signal. Mixer 972 modulates the cosine-wave
signals output from signal source 974 with the output signals of
switch 952 and outputs the modulated cosine signal. The voltage
signals that are output from mixer 971 and the voltage signals that
are output from mixer 972 are added by adder 975 and output to
buffer 320. The output signals of signal source 973 and the output
signals of signal source 974 should be signals having the same
frequency as the measurement signals and that are orthogonal one
another. They are not limited to sine-wave signals or cosine-wave
signal. For instance, rectangular-wave signals can be used in place
of these signals.
[0041] Switch 980 feeds the signals that will be input to phase
sensitive detector 910 to vector voltmeter 400 as necessary.
Moreover, switch 990 feeds the output signals of mixer 971 to
vector voltmeter 400 as necessary.
[0042] Vector voltmeter 400 of FIG. 4 measures output signal
E.sub.dut of buffer 550 and output signal E.sub.rr of buffer 560.
Control device CTRL.sub.2 calculates the vector ratio of measured
signal E.sub.dut and signal E.sub.rr and further, calculates the
impedance of device under test 100 from the calculated vector ratio
and the resistance of range resistor 330. Although not illustrated,
range resistor 330 comprises multiple resistors with different
resistances and selects the resistor as needed in accordance with
the impedance of device under test 100 that is to be measured.
Impedance measuring apparatus 20 thereby can measure the impedance
from a wide range of values.
[0043] Next, the operating procedure of impedance measuring
apparatus 20 will be described. As previously explained, impedance
measuring apparatus 20 is operated under the-control of computer
device CTRL.sub.2 that executes the programs. Consequently, the
following operating procedure describes the flow of the program
executed by computer device CTRL.sub.2. The flow chart that shows
the operating procedure of impedance measuring apparatus 20 is
shown in FIG. 6.
[0044] First, at step 10, impedance measuring apparatus 20
initializes the entire device. For instance, it performs voltage
offset adjustment within the apparatus, and the like.
[0045] Next, at step 20, negative feedback loop 810 is opened, the
adjustment signals for measuring the open-loop loss and the
open-loop phase shift of the negative feedback loop are output and
the adjustment signals (original signals) are measured. The
open-loop loss and open-loop phase shift are the loss and the phase
of the one-loop transmission function. Specifically, the output
signals of signal source 200 become zero or direct current signals
constant-voltage source 961 and mixer 971 are conducted with switch
951 as the A side and constant voltage source 962 and mixer 972 are
conducted with switch 952 as the A side. When signal source 200
becomes either zero or a direct-current signal, the High terminal
is grounded. Sine-wave signals are output from signal source 973.
Zero or direct current signals are output from signal sources 974.
The output signals of mixer 971 are used as the adjustment signals
for this condition. Furthermore, switch 990 is turned on and the
vector voltage of the adjustment signals is measured by vector
voltmeter 400.
[0046] Next, in step 30, the signals for adjustment that have gone
through one negative feedback loop are measured with negative
feedback loop 810 left open. Specifically, switch 990 is turned off
and switch 980 is turned on. Moreover, the vector voltage of the
signals for adjustment that have gone through one negative feedback
loop is measured by vector voltmeter 400.
[0047] Next, at step 40, the open-loop loss and the open-loop phase
shift are calculated, the open-loop loss is compensated, and the
open-loop phase shift is brought to the pre-determined value.
Specifically, the ratio of the amplitude of the vector voltage and
the difference in the phase angles of the vector voltage are found
by comparing the vector voltage measured at step 20 and the vector
voltage measured at step 30. The ratio of the amplitude of the
vector voltage is the open-loop loss and the difference in the
phase angles of the vector voltage is the open-loop phase shift. In
order to compensate for the open-loop loss, the gain of the
variable gain amplifier 941 and the gain of variable gain amplifier
942 are set by being multiplied by the inverse of the open-loop
loss. Moreover, the phase of the output signals of signal source
913 and the phase of the output signals of signal source 914 are
controlled in order to keep the open-loop phase shift at a
pre-determined value. Negative feedback loop 810 settles most
rapidly when the open-loop phase shift is 180.degree.. In other
words, the time up to when measurements start is shortened.
Consequently, the phase of the output signals of signal source 913
and the phase of the output signals of signal source 914 are
controlled so that the value obtained by subtracting 180.degree.
from the open-loop phase shift is desired open-loop phase shift
.phi.. By compensating for open-loop loss and controlling the
open-loop phase shift as described above, the settling time of
negative feedback loop 810 is uniform and can be universally
shortened at all of the measurement signal frequencies, regardless
of the impedance of device under test 100 that is connected, the
ground capacitance of wafer interface device 700, the total ground
capacitance of cable 510, and the frequency of the measurement
signals, and therefore the output signal of current-to-voltage
converting apparatus 800 settles rapidly. As above mentioned,
control of the open-loop phase shift is performed by controlling
the phase of the-output signals of signal source 913 and the phase
of the output signals of signal source 914. Control of the
open-loop phase shift can also be performed by controlling the
phase of the output signals of signal source 973 and the phase of
the output signals of signal source 974.
[0048] Next, at step 50, negative feedback loop 810 is closed and
the impedance of device under test 100 is measured. Specifically,
switches 951 and 952 are brought to the T side and variable gain
amplifier 941 and mixer 971 are connected and variable gain
amplifier 942 and mixer 972 are connected, respectively. Cosine
signals are output from signal source 974. Switch 980 and switch
990 are both turned off. The output signal E.sub.dut of buffer 550
and the output signal E.sub.rr of buffer 560 are measured by vector
voltmeter 400. Furthermore, the vector ratio of the measured signal
E.sub.dut and the signal E.sub.rr is calculated and the impedance
of device under test 100 is calculated from the calculated vector
ratio and the resistance of range resistor 330.
[0049] Next, at step 60, the calculated impedance is output to the
display screen (not illustrated), or is output to the printer (not
illustrated) that is connected to impedance measuring apparatus 20
or the like.
[0050] The above-mentioned embodiment of the present invention is
only one embodiment that explains the present invention according
to the Scope of the Patent Claim, and it is clear to experts in the
field that a variety of modifications are possible within the
claimed scope of the Scope of the Patent Claim. Finally, several
embodiments of the present invention are given below, underscoring
the possibility of broad application of the present invention.
[0051] A current-to-voltage converting apparatus characterized in
that it is a current-to-voltage converting apparatus connected to
an element or a circuit having a first terminal connected to a
signal source, with this current-to-voltage converting apparatus
comprising: a feedback amplifier, which is connected to a second
terminal of this element or this circuit and keeps this second
terminal at virtual ground, and which converts the current signals
that flow to this element or this circuit to voltage signals and
outputs these signals, means for opening the feedback loop of this
feedback amplifier and measuring the open-loop loss of this
feedback loop, and a compensating amplifier, which compensates for
this open-loop loss.
[0052] The current-to-voltage converting apparatus as discussed
above, characterized in that it further comprises: means for
measuring the open-loop phase shift of this feedback loop when this
feedback loop is open; and control means for keeping this open-loop
phase shift at a pre-determined value.
[0053] When this feedback loop is open or the open-loop loss of
this feedback loop is measured, the output of this signal source is
controlled so that it becomes zero or a direct-current signal.
[0054] The feedback amplifier preferably comprises a
modulation-type narrow-band amplifier, and this narrow-band
amplifier comprises a phase sensitive detector, filters, and a
vector modulator.
[0055] The compensating amplifier is placed in between the phase
sensitive detector and the vector modulator.
[0056] The control means controls the phase difference between the
signal that is applied to the phase sensitive detector and the
signal that is applied to the vector modulator.
[0057] The feedback loop is opened by being opened in between the
phase sensitive detector and the vector modulator.
[0058] The feedback amplifier further comprises a null detector and
a feedback circuit, the null detector is connected to the second
terminal and the signals that are input to the null detector are
converted to voltage signals by the null detector, the narrow-band
amplifier resolves this converted voltage signal into an in-phase
component and an quadrature-phase component using the phase
sensitive detector, filters this in-phase component and this
quadrature-phase component using these respective filters, vector
modulates this filtered in-phase component and this filtered
quadrature-phase component using this vector modulator, and outputs
the vector voltage signals and the feedback circuit inputs these
vector signals to the null detector.
[0059] The element or circuit is a capacitive element or capacitive
circuit.
[0060] An impedance measuring apparatus which comprises: a signal
source connected to a first terminal of a device under test, a
feedback amplifier, which is connected to a second terminal of the
device under test and keeps the second terminal at virtual ground,
and which converts current signals that flow to this device under
test to voltage signals and outputs these signals, means for
opening the feedback loop of this feedback amplifier and measuring
the open-loop loss of this feedback loop, a compensating amplifier,
which compensates this open-loop loss, and means for measuring the
vector voltage ratio between the voltage signals between the first
terminal and the second terminal and the output signals of the
feedback amplifier, wherein it measures the impedance of the device
under test from this vector voltage ratio.
[0061] The impedance measuring apparatus further comprising: means
for measuring the open-loop phase shift of the feedback loop when
this feedback loop is open; and control means for keeping the
open-loop phase shift at a pre-determined value.
[0062] The feedback loop is open or the open-loop loss of this
feedback loop is measured, the output of the signal source is
controlled so that it becomes zero or a direct-current signal.
[0063] The feedback amplifier comprises a modulation-type
narrow-band amplifier, and this narrow-band amplifier comprises a
phase sensitive detector, filters, and a vector modulator.
[0064] The compensating amplifier is placed in between the phase
sensitive detector and the vector modulator.
[0065] The control means controls the phase difference between the
signal that is applied to the phase sensitive detector and the
signal that is applied to the vector modulator.
[0066] The feedback loop is opened by being opened in between the
phase sensitive detector and the vector modulator.
[0067] The feedback amplifier further comprises a null detector and
a feedback circuit, this null detector is connected to the second
terminal and the signals that are input to the null detector are
converted to voltage signals by the null detector, the narrow-band
amplifier resolves this converted voltage signal into an in-phase
component and an quadrature-phase component using the phase
sensitive-detector, filters this in-phase component and this
quadrature-phase component using these respective filters, vector
modulates this filtered in-phase component and this filtered
quadrature-phase component using the vector modulator, and outputs
the vector voltage signals, and the feedback circuit inputs these
vector signals to the null detector.
[0068] The element or the circuit is a capacitive element or
capacitive circuit.
[0069] As previously described in detail, a current-to-voltage
converting apparatus connected to an element or a circuit having a
first terminal connected to a signal source comprises a feedback
amplifier, which is connected to a second terminal of this element
or this circuit and keeps the second terminal at virtual ground,
and which converts the current signals that flow to this element or
this circuit to voltage signals and outputs these signals; means
for opening the feedback loop of this feedback amplifier and
measuring the open-loop loss of this feedback loop; and a
compensating amplifier, which compensates for this open-loop loss,
and therefore, the settling time of this feedback loop is
shortened.
[0070] In addition, it comprises means for measuring the open-loop
phase shift of the feedback loop when this feedback loop is open
and control means for keeping this open-loop phase shift at a
pre-determined value, and therefore, the settling time of this
feedback loop is further shortened.
[0071] The result of shortening the settling time of this feedback
loop is similarly obtained with the impedance measuring apparatus
comprising the above-mentioned current-to-voltage converting
apparatus. That is, the impedance measuring apparatus comprises a
signal source connected to a first terminal of a device under test;
a feedback amplifier, which is connected to a second terminal of
this device under test and keeps the second terminal at virtual
ground, and which converts current signals that flow to this device
under test to voltage signals and outputs these signals; means for
opening the feedback loop of this feedback amplifier and measuring
the open-loop loss of this feedback loop; a compensating amplifier,
which compensates this open-loop loss; and means for measuring the
vector voltage ratio between the voltage signals between the first
terminal and the second terminal and the output signals of this
feedback amplifier. Therefore, the settling time of this feedback
loop can be shortened and high-speed measurement is possible.
[0072] Moreover, the vector measuring apparatus comprises means for
measuring the open-loop phase shift of this feedback loop when this
feedback loop is open and control means for keeping this open-loop
phase shift at a pre-determined value. Therefore, the settling time
of this feedback loop is further shortened and measurements can be
conducted more rapidly.
[0073] For instance, when the device under test is a capacitor of
10 pF and the ground capacitance of the wafer interface device is
1,000 pF or higher and the impedance of the device under test is
measured at a measurement signal of 100 kHz, the measurement time
of the impedance measuring apparatus of the present invention
proceeds at least three times more rapidly than that of a
conventional apparatus.
* * * * *