U.S. patent application number 11/064270 was filed with the patent office on 2005-08-25 for apparatus for manufacturing flat-panel display.
This patent application is currently assigned to Advanced Display Process Engineering Co., Ltd.. Invention is credited to Choi, Jun Young, Jeong, Hong-Gi, Jo, Saeng Hyun, Kim, Gyeong-Hoon, Lee, Young Jong, Yoon, Byung-Oh.
Application Number | 20050183824 11/064270 |
Document ID | / |
Family ID | 34865570 |
Filed Date | 2005-08-25 |
United States Patent
Application |
20050183824 |
Kind Code |
A1 |
Lee, Young Jong ; et
al. |
August 25, 2005 |
Apparatus for manufacturing flat-panel display
Abstract
An flat-panel display (FPD) manufacturing apparatus which has a
configuration capable of easily processing large-size substrates
while achieving easy manufacturing, transporting, operating, and
repair processes.
Inventors: |
Lee, Young Jong;
(Sungnam-shi, KR) ; Choi, Jun Young; (Seoul,
KR) ; Jo, Saeng Hyun; (Seo-gu, KR) ; Yoon,
Byung-Oh; (Gunpo-shi, KR) ; Kim, Gyeong-Hoon;
(Anyang-shi, KR) ; Jeong, Hong-Gi; (Cheongju-shi,
KR) |
Correspondence
Address: |
DALY, CROWLEY, MOFFORD & DURKEE, LLP
SUITE 301A
354A TURNPIKE STREET
CANTON
MA
02021-2714
US
|
Assignee: |
Advanced Display Process
Engineering Co., Ltd.
|
Family ID: |
34865570 |
Appl. No.: |
11/064270 |
Filed: |
February 23, 2005 |
Current U.S.
Class: |
156/345.31 ;
118/719 |
Current CPC
Class: |
H01L 21/67126 20130101;
H01L 21/67236 20130101; H01L 51/56 20130101; H01L 21/67201
20130101; H01L 21/67196 20130101 |
Class at
Publication: |
156/345.31 ;
118/719 |
International
Class: |
C23F 001/00 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 25, 2004 |
KR |
10-2004-0012675 |
Jun 22, 2004 |
KR |
10-2004-0046667 |
Jun 23, 2004 |
KR |
10-2004-0047243 |
Aug 20, 2004 |
KR |
10-2004-0066006 |
Aug 31, 2004 |
KR |
10-2004-0069166 |
Dec 17, 2004 |
KR |
10-2004-0108225 |
Dec 24, 2004 |
KR |
10-2004-0111695 |
Claims
What is claimed is:
1. A separable vacuum chamber of a flat-panel display manufacturing
apparatus comprising: a top plate forming a top of the chamber; a
bottom plate facing the top plate and forming a bottom of the
chamber; a peripheral wall plate coupled, at upper and lower ends
thereof, to the top plate and the bottom plate, respectively, to
define a closed space, the peripheral wall plate having, at an end
thereof connected to the bottom plate, an extension extending in a
peripheral direction of the chamber inside the chamber to form a
step on the bottom plate; a cover member arranged on the bottom
plate to extend in the peripheral direction of the chamber inside
the chamber such that the cover member covers the extension of the
peripheral wall plate; and seal members interposed between the
extension and the cover member and between the bottom plate and the
cover member to shield the closed space from an outside of the
chamber.
2. A separable vacuum chamber of a flat-panel display manufacturing
apparatus comprising: a top plate forming a top of the chamber; a
bottom plate facing the top plate and forming a bottom of the
chamber; a peripheral wall plate coupled, at upper and lower ends
thereof, to the top plate and the bottom plate, respectively, to
define a closed space, the peripheral wall plate having, at an end
thereof connected to the top plate, an extension extending in a
peripheral direction of the chamber inside the chamber to form a
step on the top plate; a cover member arranged on the top plate to
extend in the peripheral direction of the chamber inside the
chamber such that the cover member covers the extension of the
peripheral wall plate; and seal members interposed between the
extension and the cover member and between the top plate and the
cover member to shield the closed space from an outside of the
chamber.
3. The separable vacuum chamber according to claim 2, wherein: the
peripheral wall plate further has, at an end thereof connected to
the bottom plate, an extension extending in a peripheral direction
of the chamber inside the chamber to form a step on the bottom
plate; and the vacuum chamber further comprises a cover member
arranged on the bottom plate to extend in the peripheral direction
of the chamber inside the chamber such that the cover member covers
the extension of the peripheral wall plate, and seal members
interposed between the extension and the cover member and between
the bottom plate and the cover member to shield the closed space
from an outside of the chamber.
4. The separable vacuum chamber according to claim 1 or 2, wherein:
the seal members are O-rings, respectively; and the O-ring
interposed between the extension and the cover member and the
O-ring interposed between the top or bottom plate and the cover
member are coupled with each other or are separate from each
other.
5. The separable vacuum chamber according to claim 4, wherein the
O-ring interposed between the extension and the cover member is
arranged on an inner surface of the extension or an end surface of
the extension.
6. A flat-panel display manufacturing apparatus comprising a load
lock chamber, a feeding chamber, and a processing chamber, wherein:
at least one of the chambers comprises at least two sub chambers,
which are vertically stacked; and the sub chambers have, at contact
portions thereof, protrusion/groove type engagement structures
engagable with each other, respectively.
7. The flat-panel display manufacturing apparatus according to
claim 6, wherein each of the protrusion/groove type engagement
structures has protrusions and grooves, each of which has a
rectangular shape, a right-angled triangular shape, a semicircular
shape, or a polygonal shape.
8. The flat-panel display manufacturing apparatus according to
claim 6, wherein the sub chambers perform the same function or
performs different functions, respectively.
9. A separable vacuum chamber used in manufacturing flat-panel
displays, comprising: a chamber housing divided into at least two
sections, wherein the vacuum chamber is formed by assembling the
chamber housing sections, together with elements to be arranged in
the vacuum chamber.
10. The separable vacuum chamber according to claim 9, wherein the
vacuum chamber has a circular cross-sectional shape parallel to the
ground.
11. The separable vacuum chamber according to claim 10, wherein the
vacuum chamber is a feeding chamber arranged between a load lock
chamber and a processing chamber to feed a substrate.
12. The separable vacuum chamber according to claim 11, wherein
each of the chamber housing sections includes dampers formed at
respective coupling ends of the chamber housing section, at which
the chamber housing section is coupled with the other chamber
housing section, to firmly couple the chamber housing sections.
13. The separable vacuum chamber according to claim 12, wherein:
each of the dampers extends radially outwardly from the associated
coupling end of the associated chamber housing section; and each of
the dampers has a plurality of uniformly-spaced clamping holes, in
which clamping bolts are coupled when the chamber housing sections
are assembled, respectively.
14. The separable vacuum chamber according to claim 13, wherein:
each of the chamber housing sections has a seal member receiving
groove formed at each coupling end of the chamber housing section;
and the chamber housing sections are coupled with each other under
the condition in which a seal member is fitted between the seal
member receiving grooves of the chamber housing sections.
15. The separable vacuum chamber according to any one of claims 10
to 14, wherein the chamber housing is divided into an intermediate
section, and a pair of arc-shaped sections respectively arranged at
opposite sides of the intermediate section while facing each other,
each of the arc-shaped sections having a central angle of
90.degree..+-.10.degree..
16. A flat-panel display manufacturing apparatus comprising a
plurality of chambers each adapted to perform a required process
for a substrate, wherein at least one of the chambers comprises: a
chamber housing having a gateway formed at a top of the chamber
housing; a top cover mounted to the top of the chamber housing to
open/close the gateway, and provided with one or more openings
formed through the top cover in a thickness direction of the top
cover; one or more auxiliary covers each mounted to the top cover
to open/close an associated one of the one or more openings; and
one or more seal members each interposed between the top cover and
an associated one of the one or more auxiliary covers to provide a
sealing effect between the top cover and the associated auxiliary
cover.
17. The flat-panel display manufacturing apparatus according to
claim 16, wherein the chamber is a feeding chamber.
18. The flat-panel display manufacturing apparatus according to
claim 16, wherein the chamber is a processing chamber.
19. The flat-panel display manufacturing apparatus according to
claim 17 or 18, wherein the top cover is made of stainless
steel.
20. The flat-panel display manufacturing apparatus according to
claim 19, wherein the number of the one or more auxiliary covers is
two or three.
21. The flat-panel display manufacturing apparatus according to
claim 20, wherein the one or more auxiliary covers are made of
aluminum.
22. The flat-panel display manufacturing apparatus according to
claim 21, further comprising: connecting rings fixed to an upper
surface of the top cover to connect the top cover to a crane; and
connecting rings fixed to an upper surface of each of the one or
more auxiliary covers to connect the auxiliary cover to the
crane.
23. A flat-panel display manufacturing apparatus comprising a load
lock chamber, a feeding chamber, and a processing chamber, to
manufacture flat-panel displays, wherein the load lock chamber
comprises: a vacuum chamber housing, in which vacuum can be
established; an opening formed through a peripheral wall of the
vacuum chamber housing to allow a substrate to pass through the
opening for loading of the substrate into the vacuum chamber
housing and unloading of the substrate from the vacuum chamber
housing; a gate valve adapted to open/close the opening; and end
effecter receiving grooves formed at a bottom wall of the vacuum
chamber housing to receive end effectors of a substrate feeding
robot installed outside the load lock chamber, respectively, each
of the end effecter receiving grooves having a predetermined depth
to allow an associated one of the end effectors to move vertically
in the end effecter receiving groove.
24. The flat-panel display manufacturing apparatus according to
claim 23, wherein the load lock chamber further comprises: a
substrate guide arranged along a peripheral edge of the bottom wall
of the vacuum chamber housing, the substrate guide having a
structure inclined toward a central portion of the vacuum chamber
housing.
25. The flat-panel display manufacturing apparatus according to
claim 23 or 24, wherein the load lock chamber further comprises: at
least two loading dies arranged in the vacuum chamber housing while
being vertically spaced apart from one another to load substrates
on the loading dies, respectively; and a plurality of
uniformly-spaced substrate support members arranged on each of the
loading dies, each of the substrate support members having a length
to allow the end effecters to move vertically in a state of being
inserted into a gap defined between the loading die and a substrate
supported by the substrate support members.
26. The flat-panel display manufacturing apparatus according to
claim 23 or 24, wherein the load lock chamber further comprises:
substrate protection members arranged on the bottom wall of the
vacuum chamber housing at regions where a substrate laid on the
bottom wall come into contact with the bottom wall, the substrate
protection members being made of a material exhibiting a hardness
lower than a hardness of the substrate.
27. The flat-panel display manufacturing apparatus according to
claim 24, wherein the substrate guide has a U-shaped structure
having, at one side thereof, an opening to allow the end effectors
to pass through the substrate guide.
28. The flat-panel display manufacturing apparatus according to
claim 25, further comprising: aligners respectively arranged around
the loading dies to adjust positions of substrates loaded on the
loading dies.
29. A method for loading a substrate in a load lock chamber,
comprising the steps of: A) opening an opening of the load lock
chamber, and inserting a substrate into the load lock chamber by
use of a substrate feeding robot while inserting end effecters of
the feeding robot into end effecter receiving grooves of the load
lock chamber; B) lowering the end effecters of the feeding robot in
the end effecter receiving grooves, thereby loading the substrate
in the load lock chamber; C) horizontally moving the feeding robot,
thereby ejecting the feeding robot from the load lock chamber; and
D) closing the opening, and establishing a vacuum atmosphere in the
load lock chamber.
30. The method according to claim 29, further comprising: aligning
step of correcting a position of the substrate, following step
B).
31. The method according to claim 30, wherein the aligning step is
automatically carried out in accordance with a sliding movement of
the substrate carried out on an inclined substrate guide arranged
at a peripheral wall of the load lock chamber when the substrate is
laid on the inclined substrate guide at step B).
32. A flat-panel display manufacturing apparatus comprising a load
lock chamber, a feeding chamber, and a processing chamber, wherein
the feeding chamber comprises: a feeding robot comprising a feeding
arm arranged at a lower portion of the feeding chamber, and a
driver coupled to a lower end of the feeding arm, and seated on a
bottom of the feeding chamber; a vertical driver arranged beneath
the feeding chamber, and adapted to lift the feeding robot to a
level of a door; a driver gateway formed at one side of the feeding
chamber to allow the driver to pass through the driver gateway; and
the door mounted to the feeding chamber to open/close the driver
gateway.
33. The flat-panel display manufacturing apparatus according to
claim 32, further comprising: a seal member interposed between
contact surfaces of the drive gateway and door to provide a seal
effect between the gateway and the door.
34. The flat-panel display manufacturing apparatus according to
claim 32, further comprising: guide members arranged on the bottom
of the feeding chamber to extend rectilinearly to the driver
gateway, and adapted to guide movement of the feeding robot though
the driver gateway.
35. The flat-panel display manufacturing apparatus according to
claim 34, further comprising: auxiliary guide members slidably
mounted to the guide members, respectively, such that the auxiliary
guide members extend and retract through the driver gateway to
guide the movement of the feeding robot though the driver
gateway.
36. The flat-panel display manufacturing apparatus according to
claim 34, further comprising: auxiliary guide members hingably
mounted to the guide members, respectively, such that the auxiliary
guide members extend and retract through the driver gateway in
accordance with hinging operations to guide the movement of the
feeding robot though the driver gateway.
37. A flat-panel display manufacturing apparatus comprising an
electric field generating system, a processing gas supplying
system, and an exhausting system, which are arranged in a vacuum
chamber, to perform a required process for a substrate loaded in
the vacuum chamber, wherein the vacuum chamber comprises: a chamber
body forming a side wall of the vacuum chamber; a top cover coupled
to a top portion of the chamber body to form a top wall of the
vacuum chamber; and a bottom cover coupled to a bottom portion of
the chamber body to form a bottom wall of the vacuum chamber,
wherein the chamber body is provided, at a lower end thereof, with
an engagement rim horizontally inwardly protruded from the lower
end of the chamber body to be engaged with the bottom cover,
wherein the lower cover is provided, at a peripheral edge thereof,
with an engagement groove having a shape conforming to the
engagement rim.
38. The flat-panel display manufacturing apparatus according to
claim 37, wherein: at least one of the engagement rim and
engagement groove is provided with a seal member receiving groove;
and a seal member is fitted in the seal member receiving
groove.
39. The flat-panel display manufacturing apparatus according to
claim 37, wherein the engagement rim and engagement groove have
inclined engagement surfaces, respectively.
40. The flat-panel display manufacturing apparatus according to
claim 37, wherein the bottom cover includes a plurality of feeding
device coupling grooves arranged at an upper surface of the bottom
cover along the peripheral edge of the bottom cover.
41. The flat-panel display manufacturing apparatus according to
claim 40, wherein the bottom cover further includes coupling
blocks, which are fittable in respective feeding device coupling
holes such that an upper end of each coupling block is flush with
the upper surface of the bottom cover.
42. A method for repairing a flat-panel display manufacturing
apparatus, comprising the steps of: A) separating a top cover from
a chamber body by a feeding device; B) separating a bottom cover
from the chamber body by the feeding device, and laying the bottom
cover on a working die; C) repairing the bottom cover; D) coupling
the bottom cover to the chamber body by the feeding device; and E)
coupling the top cover to the chamber body by the feeding
device.
43. The method according to claim 42, wherein step B) comprises the
steps of: B-1) coupling the feeding device to feeding device
coupling holes formed at an upper surface of the bottom cover; B-2)
lifting the bottom cover to a level higher than the chamber body by
driving the feeding device; and B-3) moving the bottom cover to a
position where the bottom cover is positioned just over the chamber
body, and lowering the bottom cover into the chamber body such that
the bottom cover is mounted to the chamber body.
44. The method according to claim 42, wherein step D comprises the
steps of: D-1) lifting the bottom cover to a level higher than the
chamber body by driving the feeding device; D-2) moving the bottom
cover to a position where the bottom cover is positioned just over
the chamber body, and lowering the bottom cover into the chamber
body such that the bottom cover is mounted to the chamber body; and
D-3) firmly fixing the bottom cover to the chamber body.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to an apparatus for
manufacturing a flat-panel display, and, more particularly, to a
flat-panel display manufacturing apparatus which has an arrangement
suitable to perform desired processes for large-size
substrates.
[0003] 2. Description of the Related Art
[0004] Referring to FIG. 1, a general flat-panel display (FPD)
manufacturing apparatus is illustrated, which is used to
manufacture FPDs such as liquid crystal displays and plasma display
panels (PDPs). As shown in FIG. 1, the FPD manufacturing apparatus,
which is designated by reference numeral 1, includes a load lock
chamber 100, a feeding chamber 200, and a processing chamber 300,
which are connected in series. A gate valve G is arranged between
adjacent ones of the chambers, in order to independently maintain a
vacuum atmosphere in each chamber.
[0005] The load lock chamber 100 is connected to an external
station, in order to receive a substrate to be processed in the FPD
manufacturing apparatus for loading of the substrate or to
discharge a substrate completely processed in the FPD manufacturing
apparatus for unloading of the substrate. The load lock chamber 100
is repeatedly switched between a vacuum state and an atmospheric
state, so that the load lock chamber 100 is selectively
communicated with the external station. A loading die 102 is
arranged in the load lock chamber 100, in order to load one or more
substrates on the loading die 102.
[0006] Aligners 106 are arranged around the loading die 102, in
order to correct the position of a substrate S load on the loading
die 102, as shown in FIG. 1. The aligners 106 correct the position
of the substrate S by diagonally pushing the sides of the substrate
S loaded on the loading die 102. An exhausting device (not shown)
and a gas supplier (not shown) are also installed in the load lock
chamber 100, in order to change the atmosphere of the load lock
chamber 100 between a vacuum state and an atmospheric state.
[0007] The feeding chamber 200 is connected between the load lock
chamber 100 and the processing chamber 300. The feeding chamber 200
is provided with a feeding robot 202 arranged in the interior of
the feeding chamber 200, so that the feeding chamber 200 serves as
an intermediate passage for feeding a substrate between the load
lock chamber 100 and the processing chamber 300 for
loading/unloading of the substrate. The feeding chamber 200 is
maintained in a vacuum atmosphere, so that the processing chamber
300 is maintained in a vacuum atmosphere.
[0008] The processing chamber 300 is equipped with a loading die
302 to load a substrate in the processing chamber 300, and a
processing device (not shown) to perform a desired process for the
substrate loaded in the processing chamber 300. For example, an
etch process is carried out in a vacuum atmosphere established in
the processing chamber 300.
[0009] Such an FPD manufacturing apparatus may be of a cluster type
in which a plurality of processing chambers 300 are connected to a
single feeding chamber 200, as shown in FIG. 2. In this case, the
feeding chamber 200 may have a circular or polygonal shape such
that a plurality of processing chambers 300 are arranged around the
feeding chamber 200.
[0010] Meanwhile, recently-developed FPD manufacturing apparatuses
include vacuum chambers having an extremely large size, for
example, a width of 3 m or more, in order to process substrates
having a large size of 2 m or more. For this reason, there is a
problem in transporting such vacuum chambers from a manufacturing
place thereof to an installation place thereof. In other words,
such a vacuum chamber, which has a width of 3 m or more, cannot be
transported by land, taking into consideration the road conditions
of Korea and other foreign countries.
[0011] Furthermore, where such a large-size vacuum chamber is
manufactured in the form of a single body, it is necessary to use a
large-size machining device for the machining of a metal material
to form an outer housing of the vacuum chamber. In addition, the
machining process is also difficult.
[0012] Also, when it is necessary to repair structures installed in
the interior of the vacuum chamber, in order to eliminate various
problems generated during operation of the vacuum chamber, the top
of the vacuum chamber must be opened. Where the vacuum chamber is
manufactured in the form of a single body, however, it is difficult
to open the top of the vacuum chamber. Furthermore, much labor is
required. For this reason, it is impossible to easily repair the
vacuum chamber.
[0013] Due to an increase in chamber size, the footprint of the
vacuum chamber in a clean room is also greatly increased.
Therefore, it is necessary to provide an FPD manufacturing
apparatus capable of efficiently processing large-size substrates
without an increase in footprint.
SUMMARY OF THE INVENTION
[0014] It is an object of the invention to provide an FPD
manufacturing apparatus which is capable of easily processing
large-size substrates while achieving easy manufacturing,
transporting, operating, and repair processes.
[0015] In accordance with one aspect, the present invention
provides a separable vacuum chamber of a flat-panel display
manufacturing apparatus comprising: a top plate forming a top of
the chamber; a bottom plate facing the top plate and forming a
bottom of the chamber; a peripheral wall plate coupled, at upper
and lower ends thereof, to the top plate and the bottom plate,
respectively, to define a closed space, the peripheral wall plate
having, at an end thereof connected to the bottom plate, an
extension extending in a peripheral direction of the chamber inside
the chamber to form a step on the bottom plate; a cover member
arranged on the bottom plate to extend in the peripheral direction
of the chamber inside the chamber such that the cover member covers
the extension of the peripheral wall plate; and seal members
interposed between the extension and the cover member and between
the bottom plate and the cover member to shield the closed space
from an outside of the chamber.
[0016] In accordance with another aspect, the present invention
provides a separable vacuum chamber of a flat-panel display
manufacturing apparatus comprising: a top plate forming a top of
the chamber; a bottom plate facing the top plate and forming a
bottom of the chamber; a peripheral wall plate coupled, at upper
and lower ends thereof, to the top plate and the bottom plate,
respectively, to define a closed space, the peripheral wall plate
having, at an end thereof connected to the top plate, an extension
extending in a peripheral direction of the chamber inside the
chamber to form a step on the top plate; a cover member arranged on
the top plate to extend in the peripheral direction of the chamber
inside the chamber such that the cover member covers the extension
of the peripheral wall plate; and seal members interposed between
the extension and the cover member and between the top plate and
the cover member to shield the closed space from an outside of the
chamber.
[0017] In accordance with another aspect, the present invention
provides a separable vacuum chamber used in manufacturing
flat-panel displays, comprising: a chamber housing divided into at
least two sections, wherein the vacuum chamber is formed by
assembling the chamber housing sections, together with elements to
be arranged in the vacuum chamber.
[0018] In accordance with another aspect, the present invention
provides a flat-panel display manufacturing apparatus comprising a
plurality of chambers each adapted to perform a required process
for a substrate, wherein at least one of the chambers comprises: a
chamber housing having a gateway formed at a top of the chamber
housing; a top cover mounted to the top of the chamber housing to
open/close the gateway, and provided with one or more openings
formed through the top cover in a thickness direction of the top
cover; one or more auxiliary covers each mounted to the top cover
to open/close an associated one of the one or more openings; and
one or more seal members each interposed between the top cover and
an associated one of the one or more auxiliary covers to provide a
sealing effect between the top cover and the associated auxiliary
cover.
[0019] In accordance with another aspect, the present invention
provides a flat-panel display manufacturing apparatus comprising a
load lock chamber, a feeding chamber, and a processing chamber, to
manufacture flat-panel displays, wherein the load lock chamber
comprises: a vacuum chamber housing, in which vacuum can be
established; an opening formed through a peripheral wall of the
vacuum chamber housing to allow a substrate to pass through the
opening for loading of the substrate into the vacuum chamber
housing and unloading of the substrate from the vacuum chamber
housing; a gate valve adapted to open/close the opening; and end
effecter receiving grooves formed at a bottom wall of the vacuum
chamber housing to receive end effectors of a substrate feeding
robot installed outside the load lock chamber, respectively, each
of the end effecter receiving grooves having a predetermined depth
to allow an associated one of the end effectors to move vertically
in the end effecter receiving groove.
[0020] In accordance with another aspect, the present invention
provides a method for loading a substrate in a load lock chamber,
comprising the steps of: A) opening an opening of the load lock
chamber, and inserting a substrate into the load lock chamber by
use of a substrate feeding robot while inserting end effecters of
the feeding robot into end effecter receiving grooves of the load
lock chamber; B) lowering the end effecters of the feeding robot in
the end effecter receiving grooves, thereby loading the substrate
in the load lock chamber; C) horizontally moving the feeding robot,
thereby ejecting the feeding robot from the load lock chamber; and
D) closing the opening, and establishing a vacuum atmosphere in the
load lock chamber.
[0021] In accordance with another aspect, the present invention
provides a flat-panel display manufacturing apparatus comprising a
load lock chamber, a feeding chamber, and a processing chamber,
wherein the feeding chamber comprises: a feeding robot comprising a
feeding arm arranged at a lower portion of the feeding chamber, and
a driver coupled to a lower end of the feeding arm, and seated on a
bottom of the feeding chamber; a vertical driver arranged beneath
the feeding chamber, and adapted to lift the feeding robot to a
level of a door; a driver gateway formed at one side of the feeding
chamber to allow the driver to pass through the driver gateway; and
the door mounted to the feeding chamber to open/close the driver
gateway.
[0022] In accordance with another aspect, the present invention
provides a flat-panel display manufacturing apparatus comprising an
electric field generating system, a processing gas supplying
system, and an exhausting system, which are arranged in a vacuum
chamber, to perform a required process for a substrate loaded in
the vacuum chamber, wherein the vacuum chamber comprises: a chamber
body forming a side wall of the vacuum chamber; a top cover coupled
to a top portion of the chamber body to form a top wall of the
vacuum chamber; and a bottom cover coupled to a bottom portion of
the chamber body to form a bottom wall of the vacuum chamber,
wherein the chamber body is provided, at a lower end thereof, with
an engagement rim horizontally inwardly protruded from the lower
end of the chamber body to be engaged with the bottom cover,
wherein the lower cover is provided, at a peripheral edge thereof,
with an engagement groove having a shape conforming to the
engagement rim.
[0023] In accordance with another aspect, the present invention
provides a method for repairing a flat-panel display manufacturing
apparatus, comprising the steps of: A) separating a top cover from
a chamber body by a feeding device; B) separating a bottom cover
from the chamber body by the feeding device, and laying the bottom
cover on a working die; C) repairing the bottom cover; D) coupling
the bottom cover to the chamber body by the feeding device; and E)
coupling the top cover to the chamber body by the feeding
device.
BRIEF DESCRIPTION OF THE DRAWINGS
[0024] The above objects, and other features and advantages of the
present invention will become more apparent after reading the
following detailed description when taken in conjunction with the
drawings, in which:
[0025] FIG. 1 is a schematic view illustrating a layout of a
general FPD manufacturing apparatus;
[0026] FIG. 2 is a schematic view illustrating a layout of another
general FPD manufacturing apparatus;
[0027] FIG. 3 is a front view illustrating a separable vacuum
chamber according to a first embodiment of the present
invention;
[0028] FIGS. 4a and 4b are enlarged views corresponding to a
portion "A" of FIG. 3, respectively;
[0029] FIG. 5 is a front view illustrating a structure of a stacked
chamber included in an FPD manufacturing apparatus according to a
second embodiment of the present invention;
[0030] FIGS. 6a to 6d are schematic views respectively illustrating
various protrusion/groove type engagement structures applied to the
stacked chamber of FIG. 5;
[0031] FIG. 7 is a plan view illustrating a coupled state of a
separable vacuum chamber according to a third embodiment of the
present invention;
[0032] FIG. 8 is a plan view illustrating an exploded state of the
separable vacuum chamber according to the third embodiment of the
present invention;
[0033] FIG. 9 is an elevation view illustrating structures of
coupling surfaces of vacuum chamber sections according to the third
embodiment of the present invention;
[0034] FIG. 10 is a perspective view illustrating the structures of
the coupling surfaces of the vacuum chamber sections according to
the third embodiment of the present invention;
[0035] FIG. 11 is a plan view schematically illustrating a coupled
state of a top cover and auxiliary covers to a feeding chamber
included in an FPD manufacturing apparatus according to a fourth
embodiment of the present invention;
[0036] FIG. 12 is a transversal sectional view corresponding to
FIG. 3;
[0037] FIG. 13 is an exploded perspective view illustrating the top
cover and auxiliary covers arranged at the top of the feeding
chamber included in the FPD manufacturing apparatus according to
the fourth embodiment of the present invention;
[0038] FIG. 14 is a transversal sectional view illustrating a
structure of a load lock chamber according to a fifth embodiment of
the present invention;
[0039] FIG. 15 is a longitudinal sectional view illustrating the
structure of the load lock chamber according to the fifth
embodiment of the present invention;
[0040] FIG. 16 is a flow chart illustrating a method for loading a
substrate in the load lock chamber according to the fifth
embodiment of the present invention;
[0041] FIGS. 17a and 17b are sectional views illustrating a
procedure for unloading a feeding robot from a feeding chamber
included in an FPD manufacturing apparatus according to a sixth
embodiment of the present invention, respectively;
[0042] FIG. 18 is a plan view illustrating the feeding chamber of
FIGS. 17a and 17b;
[0043] FIG. 19 is an elevation view illustrating a state in which
the feeding robot is unloaded from the feeding chamber in the FPD
manufacturing apparatus according to the sixth embodiment of the
present invention;
[0044] FIG. 20 is an exploded perspective view illustrating a
structure of a vacuum chamber according to a seventh embodiment of
the present invention;
[0045] FIG. 21 is a schematic view illustrating a process for
assembling and repairing a bottom cover in accordance with the
seventh embodiment of the present invention;
[0046] FIG. 22 is a flow chart illustrating a method for
manufacturing and assembling a vacuum chamber according to the
seventh embodiment of the present invention; and
[0047] FIG. 23 is a flow chart illustrating a method for repairing
the vacuum chamber according to the seventh embodiment of the
present invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0048] Hereinafter, exemplary embodiments of the present invention
will be described with reference to the annexed drawings. In the
following description, elements respectively corresponding to those
in FIGS. 1 and 2 will be designated by the same reference
numerals.
[0049] <First Embodiment>
[0050] FIG. 3 is a front view illustrating a separable vacuum
chamber included in an FPD manufacturing apparatus according to a
first embodiment of the present invention. FIGS. 4a and 4b are
enlarged views corresponding to a portion "A" in FIG. 3,
respectively. Although the illustrated vacuum chamber is applicable
to any one of a load lock chamber, a feeding chamber, and a
processing chamber, the following description will be given only in
conjunction with the case in which the vacuum chamber is applied to
a load lock chamber, for convenience of description.
[0051] As shown in FIG. 3, the separate vacuum chamber according to
this embodiment, which is designated by reference numeral 100,
includes a top plate 110 and a bottom plate 120, which face each
other to define the top and bottom of the chamber 100,
respectively, and a peripheral wall plate 130 coupled, at upper and
lower ends thereof, to the top plate 110 and bottom plate 120,
respectively. Extensions 135 are formed at the upper and lower ends
of the peripheral wall plate 130 such that the extensions 135
extend along the top plate 110 and bottom plate 120 inside the
vacuum chamber 100, thereby forming steps on the top plate 110 and
bottom plate 120, respectively, as shown in FIGS. 3, 4a and 4b.
Although two extensions 135 are arranged at both ends of the
peripheral wall plate 130, respectively, in the illustrated case, a
single extension 135 may be formed only at one end of the
peripheral wall plate 130.
[0052] Thus, each of the extensions 135 extends from one end or
each end of the peripheral wall plate 130 along an inner surface of
the vacuum chamber 100 to form a step at the top plate 110, bottom
plate 120, or each of the top and bottom plates 110 and 120, as
shown in FIG. 4a. Each extension 135 has three surfaces, that is,
an outer surface or contact surface 135a contacting the top plate
110 or bottom plate 120, an inner surface 135b, and an end surface
135c.
[0053] In order to shield the interior of the chamber 100 from the
outside of the chamber 100, and thus, to effectively maintain the
interior of the chamber 100 in a vacuum state, seal members 140 are
arranged at the steps of the top plate 110, bottom plate 120, or
both the top and bottom plates 110 and 120, respectively, as shown
in FIG. 3. Cover members 150 are also arranged at the steps of the
top plate 110, bottom plate 120, or both the top and bottom plates
110 and 120, respectively, to cover the extensions 135 under the
condition in which each seal member 140 is interposed between an
associated one of the steps and an associated one of the cover
members 150. Each cover member 150 is in contact with surfaces
defining the associated step, that is, the surface portion of the
associated extension 135, the surface portion of the peripheral
wall plate 130 formed with the extension 135, and the surface
portion of the top plate 110 or bottom plate 120 contacting the
extension 135.
[0054] Each cover member 150 minimizes exposure of an associated
one of the seal members 140 to plasma gas present in the chamber
100, and thus, protects the associated seal member 140. Preferably,
each cover member 150 is in close contact with the peripheral wall
plate 130 and the associated top plate 110 or bottom plate 120
while covering the associated seal member 140. In the case of the
cover member 150, which is coupled to the bottom plate 120, this
coupling may be simply achieved, using the weight of the cover
member 150, as shown in FIG. 4a. However, it is preferred that the
coupling of the cover member 150 to the bottom plate 120 be
achieved, using fastening members such as screws or bolts, in order
to obtain a higher coupling force. On the other hand, in the case
of the cover member 150, which is coupled to the top plate 110,
this coupling must be achieved, using fastening members such as
screws or bolts, as shown in FIG. 3, in order to prevent the cover
member 150 from being separated from the top plate 110 by the
weight of the cover member 150.
[0055] As shown in FIGS. 3 and 4a, each seal member 140 may
comprise O-rings, which may be typically used in a general vacuum
chamber. In accordance with the illustrated embodiment of the
present invention, each seal member 140 comprises a pair of O-rings
140a respectively arranged on the associated extension 135 and the
top plate 110 or bottom plate 120 where the extension 135 is
arranged.
[0056] The O-rings 140a of each seal member 140 may be separate
from each other or integral with each other. In the case of FIG.
4a, the O-rings 140a of each seal member 140 are arranged on the
associated extension 135 and a portion of the top plate 110 or
bottom plate 120 positioned near the end surface 135c of the
extension 135, respectively, while being separate from each other.
On the other hand, in the case of FIG. 4b, each seal member 140
comprises a pair of O-rings 140b respectively arranged on the
associated extension 135 and the portion of the top plate 110 or
bottom plate 120 positioned near the end surface 135c of the
extension 135, respectively, while being integral with each other.
Where the seal members 140, each of which comprises the O-rings
140b having an integral structure as shown in FIG. 4b, are used, it
is possible to more effectively maintain the chamber 100 in a
vacuum state.
[0057] Although each seal member 140 has been described as
comprising a pair of O-rings 140a or 140b respectively arranged on
the inner surface 135b of the associated extension 135 and the top
plate 110 or bottom plate 120, where the extension 135 is arranged,
while being separate from each other or integral with each other,
as shown in FIG. 4a or 4b, the seal member 140 may have a structure
in which the O-ring 140a or 140b, which is adapted to be arranged
on the extension 135, is not arranged on the inner surface 135b of
the extension 135, but is arranged at the end surface 135c of the
extension 135, if necessary.
[0058] In order to manufacture the separable vacuum chamber 100,
the bottom plate 120, which constitutes the bottom of the chamber
100, is first installed at a desired place. For simplification of
description, the following description will be given only in
conjunction with an assembly process carried out at one side of the
chamber 100 where seal members 140 each having a separate O-ring
structure are used. Thereafter, one O-ring 140a of one seal member
(lower seal member) 140 is laid on the bottom plate 120. In order
to place the O-ring 140a in position on the bottom plate 120, it is
preferred that a seat, which is adapted to receive a portion of the
O-ring 140a, be formed at a portion of the bottom plate 120 where
the O-ring 140a will be placed.
[0059] After the placement of the O-ring 140a on the bottom plate
120, the peripheral wall plate 130 is installed on the bottom plate
120 such that the outer surface 135a of the lower extension 135,
which is formed at the lower end of the peripheral wall plate 130,
comes into contact with the bottom plate 120, as shown in FIG. 4a.
As a result, a lower step is formed on the bottom plate 120. Since
no O-ring is interposed between the bottom plate 120 and the lower
end surface of the peripheral wall plate 130, contrary to
conventional cases, it is unnecessary to form a seat adapted to
receive a portion of the O-ring, at the lower end surface of the
peripheral wall plate 130 contacting the bottom plate 120.
[0060] After the installation of the peripheral wall plate 130 on
the bottom plate 120, the other O-ring 140a of the lower seal
member 140 is laid on the inner surface 135b of the lower extension
135 formed at the lower end of the peripheral wall plate 130, as
shown in FIG. 4a. In order to place the other O-ring 140a in
position on the lower extension 135, a seat, which is adapted to
receive a portion of the other O-ring 140a, is formed at the inner
surface 135b of the lower extension 135. Accordingly, the other
O-ring 140a is laid on the seat formed at the inner surface 135b of
the lower extension 135.
[0061] Thereafter, one cover member 150 (lower cover member) is
arranged at the lower step such that the lower cover member 150
comes into contact with the peripheral wall plate 130 and bottom
plate 120 under the condition in which the lower cover member 150
covers the O-rings 140 of the lower seal member 140 respectively
laid on the upper surface of the bottom plate 120 and the inner
surface 135b of the lower extension 135. The lower surface of the
lower cover member 150 has a particular shape such that the lower
surface comes into contact with the extension 135 forming the lower
step, and thus, engages with the extension 135. The lower surface
of the lower cover member 150 is also formed with seats to
partially receive the O-ring 140a arranged on the inner surface
135b of the extension 135 and the O-ring 140a arranged on the upper
surface of the bottom plate 120, respectively. Thereafter, the
lower cover member 150 is fastened to the bottom plate 120 by means
of fastening members such as bolts or screws, in order to firmly
couple the lower cover member 150 to the bottom plate 120, and
thus, to prevent movement of the lower cover member 150, and to
protect the O-rings 140a.
[0062] Thus, the lower structure of the chamber 100 is completely
formed in accordance with the above-described assembly process.
Using the same assembly process as the above-described assembly
process, the upper structure of the chamber 100 is then formed.
That is, the assembly process is carried out in the order of laying
the top plate 110 on the peripheral wall plate 130, arranging the
upper seal member 140, and then coupling the upper cover member
150.
[0063] <Second Embodiment>
[0064] In accordance with this embodiment, at least one of the load
lock chamber, feeding chamber, and processing chamber, which
constitute an FPD manufacturing apparatus, has a vertically-stacked
chamber structure including at least two sub chambers each coupled
to one another, using various protrusion/groove type structures. In
accordance with this embodiment, it is possible to provide an FPD
manufacturing apparatus capable of achieving an optimal space
efficiency, and thus, achieving a cost reduction and an increase in
productivity, while obtaining a desired rigidity of the stacked
chamber. Accordingly, this embodiment meets recent requirements to
develop an FPD manufacturing apparatus capable of manufacturing
large-size FPDs while exhibiting an increased productivity without
an increase in the installation area caused by an increase in FPD
manufacturing apparatus size.
[0065] Although the stacked chamber according to this embodiment is
applicable to any one of the load lock chamber, feeding chamber,
and processing chamber, the following description will be given
only in conjunction with the case in which the stacked chamber is
applied to the processing chamber, for convenience of
description.
[0066] FIG. 5 is a front view illustrating a structure of the
stacked chamber included in the FPD manufacturing apparatus
according to the second embodiment of the present invention.
[0067] As shown in FIG. 5, the processing chamber 300 included in
the FPD manufacturing apparatus includes at least two
vertically-stacked sub chambers. In the illustrated case, the
processing chamber 300 includes two vertically-stacked sub chambers
310 and 320. In order to manufacture FPDs, the FPD manufacturing
apparatus generally includes a load lock chamber, a feeding
chamber, and a processing chamber. Taking into consideration
process and space efficiencies, the chambers of the FPD
manufacturing apparatus may have a stacked structure. That is, one,
two or all of the three chambers, which constitute the FPD
manufacturing apparatus, may have a stacked structure.
[0068] Meanwhile, in the FPD manufacturing apparatus, the substrate
processing time taken in the processing chamber is longest, as
compared to the substrate processing times taken in the remaining
chambers. Also, the processing chamber performs a great number of
functions. For this reason, it is preferred that the processing
chamber include a certain number of vertically-stacked sub
chambers, in order to achieve an enhancement in substrate
processing efficiency.
[0069] For example, the processing chamber may include two
vertically-stacked sub chambers. In this case, the load lock
chamber and feeding chamber are driven to externally unload a
substrate completely processed in one sub processing chamber and to
load another substrate, to be processed, in the sub processing
chamber while a certain process is carried out for another
substrate in the other sub processing chamber. Thus, processes for
substrates in both the sub processing chambers can be efficiently
carried out.
[0070] The number of vertically-stacked sub chambers may be two or
more. Where two sub chambers are used, they may perform the same
function or different functions, respectively.
[0071] In the illustrated case, the processing chamber 300 of the
FPD manufacturing apparatus includes two vertically-stacked sub
chambers 310 and 320, which are coupled to each other, using
protrusion/groove type engagement structures respectively formed at
contact portions 330 of the sub chambers 310 and 320. Where the sub
chambers 310 and 320 are coupled to each other, using the
protrusion/groove type engagement structures respectively formed at
the contact portions 330 of the sub chambers 310 and 320, there is
an advantage in that the overall height of the processing chamber
300 is reduced, as compared to the case in which the coupling of
the sub chambers 310 and 320 is achieved without using the
protrusion/groove type engagement structures respectively formed at
the contact portions 330.
[0072] Furthermore, where the coupling of the sub chambers 310 and
320 is achieved without using the protrusion/groove type engagement
structures respectively formed at the contact portions 330, the sub
chambers 310 and 320 may move with respect to each other. Of
course, such movement may be prevented by coupling the contact
portions of the sub chambers 310 and 320 by means of a soldering
process. In this case, however, it is difficult to separate the sub
chambers from each other when it is desired to replace one of the
sub chambers with a new one. However, where the contact portions of
the sub chambers 310 and 320 are coupled with each other using the
above-described protrusion/groove type engagement structures, it is
possible to firmly couple the sub chambers 310 and 320 without any
movement thereof, and to easily separate the sub chambers 310 and
320 when it is desired to replace one of the sub chambers with a
new one.
[0073] FIGS. 6a to 6d are schematic views respectively illustrating
various protrusion/groove type engagement structures formed at the
contact portions 330 of the sub chambers 310 and 320 in order to
firmly couple the sub chambers 310 and 320 and to optimize the
overall height of the processing chamber 300.
[0074] FIG. 6a shows rectangular protrusion/groove type engagement
structures, FIG. 6b shows right-angled triangular protrusion/groove
type engagement structures, FIG. 6c shows semicircular
protrusion/groove type engagement structures, and FIG. 6d shows
polygonal protrusion/groove type engagement structures. In
accordance with such protrusion/groove type engagement structures,
the contact portions 320 of the sub chambers 310 and 320 are firmly
engaged with each other, so that the sub chambers 310 and 320 are
firmly coupled to each other to be prevented from moving with
respect to each other. On the other hand, when it is desired to
separate the sub chambers 310 and 320 from each other, this
separation can be easily achieved by simply vertically moving the
upper sub chamber 320 away from the lower sub chamber 310.
[0075] The protrusion/groove type engagement structure may have
various shapes to achieve easy coupling of the sub chambers 310 and
320, and to reduce the overall height of the chamber 300.
Preferably, the protrusions and grooves of the protrusion/groove
type engagement structure may have one selected from a rectangular
shape, a right-angled triangular shape, a semicircular shape, and a
polygonal shape.
[0076] As described above, the sub chambers 310 and 320 of the
chamber 300 having the above-described vertically-stacked structure
may perform the same function or may perform different functions,
respectively. Accordingly, it is possible to achieve an optimal
space efficiency, and thus, an enhancement in productivity, and to
obtain an enhanced process efficiency.
[0077] As described above, it is possible to achieve an enhancement
in process efficiency by constituting at least one of the load lock
chamber, feeding chamber, and processing chamber of the FPD
manufacturing apparatus by at least two sub chambers, which are
vertically stacked. Also, the sub chambers are engaged with each
other, using the protrusion/groove type engagement structures
formed at respective contact portions of the sub chambers, so that
the sub chambers have firmness and easy separablility. The
processing chamber has a reduced overall height, thereby achieving
an optimal space efficiency.
[0078] <Third Embodiment>
[0079] In accordance with this embodiment, a vacuum chamber having
a separable structure to achieve easy manufacturing, transporting,
and repair processes is provided, which is used to manufacture
FPDs. For the separable structure, the vacuum chamber includes a
chamber housing divided into at least two sections. Thus, the
separable vacuum chamber is formed by assembling the chamber
housing sections, together with elements to be arranged in the
vacuum chamber.
[0080] Although the separable vacuum chamber according to this
embodiment is applicable to any one of the load lock chamber,
feeding chamber, and processing chamber, the following description
will be given only in conjunction with the case in which the
separable vacuum chamber is applied to the feeding chamber, for
convenience of description.
[0081] Preferably, the separable vacuum chamber according to this
embodiment is applied to the feeding chamber 200, which functions
to feed a substrate between the load lock chamber 100 and the
processing chamber 300, as shown in FIG. 7. The feeding chamber 200
requires an inner space wider than those of the load lock chamber
and processing chamber, in order to allow free movements of
elements arranged in the feeding chamber 200, such as a feeding
robot. As a result, the feeding chamber 200 may more severely
encounter problems incurred in the case in which it is required to
process large-size substrates. For example, although the size of
the feeding chamber 200 must be sufficiently increased in such a
case, it may be impossible to transport the feeding chamber having
such a size. In order to solve such a problem, it is desirable to
transport the feeding chamber under the condition in which the
feeding chamber is divided into a plurality of chamber portions.
For this reason, it is preferred that the separable chamber
structure according to this embodiment be mainly applied to the
feeding chamber.
[0082] It is also preferred that the separable vacuum chamber 200
have a circular shape when viewing from the top of the separable
vacuum chamber 200, as shown in FIG. 7. In order to arrange a large
number of processing chambers around the feeding chamber, it is
desirable for the feeding chamber to have a circular shape, as
compared to a rectangular shape or a polygonal shape such as a
hexagonal shape. Where the feeding chamber has a circular shape, it
is possible to freely form a desired number of processing chambers.
Thus, in accordance with the present invention, it is preferred
that the cross-sectional shape of the separable vacuum chamber 200
parallel to the ground have a circular shape.
[0083] It is also preferred that the separable vacuum chamber 200
be divided into three sections A, B, and C, as shown in FIG. 7 or
8. In this case, it is also preferred that the chamber sections B
and C have an arc shape having a central angle of
90.degree..+-.10.degree., while facing each other. In this case,
accordingly, the arc length of each chamber sections B or C is
similar to the width of the intermediate section A.
[0084] As shown in FIG. 9, a seal member receiving groove 212 is
formed at the coupling surface of each chamber section. A damper
211 also extends radially outwardly from each coupling end of each
chamber section, in order to firmly couple adjacent ones of the
chamber sections.
[0085] Each seal member receiving groove 212 has a desired depth,
and extends along the coupling surfaces of the associated chamber
sections. Adjacent ones of the chamber sections are coupled to each
other under the condition in which one seal member 213 is
interposed between the seal member receiving grooves 212 of the
adjacent chamber sections.
[0086] Where a vacuum chamber is formed by coupling the
above-described chamber sections under the condition in which each
seal member 213 is interposed between the seal member receiving
grooves 212 formed at the facing coupling surfaces of adjacent
chamber sections, it is possible to prevent ambient air from
entering the vacuum chamber along the coupling surfaces and to
prevent gas present in the vacuum chamber from leaking outwardly
from the vacuum chamber. Thus, the seal members 213 function to
seal the vacuum chamber.
[0087] Preferably, each seal member 213 extends continuously along
the coupling surfaces of the associated chamber sections, and is
made of an elastic material such that the seal member 213 is
slightly elastically compressed by the chamber sections when the
chamber sections are coupled to each other.
[0088] The dampers 211 function to firmly fasten the chamber
sections of the vacuum chamber. In particular, the slight elastic
compression of the seal members 213 can be achieved only when the
chamber sections of the vacuum chamber are fastened by the dampers
211. Thus, the coupling surfaces of the adjacent chamber sections
can be completely sealed by the function of the dampers 211.
[0089] As shown in FIG. 10, each damper 211 is radially outwardly
protruded from an associated lateral end of the associated chamber
section. A plurality of uniformly-spaced clamping holes 214 are
formed through each damper 211. That is, each damper 211 extends
radially outwardly from the associated lateral end of the
associated chamber section such that the damper 211 forms an
extension surface connected to the associated coupling surface of
the associated chamber section. Each damper 211 has a desired
thickness. The clamping holes 214 of each damper 211 extend
throughout the thickness of the damper 211 while being uniformly
spaced apart from one another along the damper 211. Each clamping
hole 214 is formed, at an inner surface thereof, with female
threads adapted to be threadedly coupled with a clamping bolt
215.
[0090] As shown in FIG. 7 or 8, when adjacent ones of the chamber
sections are to be coupled to each other, the clamping bolts 215
are threadedly coupled with the clamping holes 214 of the adjacent
chamber sections, thereby firmly coupling the chamber sections.
[0091] <Fourth Embodiment>
[0092] This embodiment provides an FPD manufacturing apparatus in
which at least one of the vacuum chambers included in the FPD
manufacturing apparatus includes a top cover having a divided
structure, that is, including a detachable auxiliary cover, in
order to achieve easy transportation of the vacuum chamber.
[0093] Although the vacuum chamber according to this embodiment is
applicable to any one of the load lock chamber, feeding chamber,
and processing chamber, the following description will be given
only in conjunction with the case in which the vacuum chamber is
applied to the feeding chamber, for convenience of description.
[0094] As shown in FIGS. 11 and 12, the feeding chamber 200 of the
FPD manufacturing apparatus according to this embodiment includes a
feeding robot gateway 232 formed at the top of the feeding chamber
200 to allow a feeding robot 220 arranged in the feeding chamber
200 to move outwardly from the interior of the feeding chamber 200,
for repair or replacement of the feeding robot 220. The feeding
chamber 200 also includes a top cover 240 to open and close the
feeding robot gateway 232.
[0095] As shown in FIG. 13, the top cover 240 has a circular plate
structure having cut-out portions at opposite sides thereof. The
top cover 240 has a plurality of openings 244, and reinforcing rims
242 upwardly protruded from the top cover 240 around the openings
244. A seal member O, which may be an O-ring, is arranged on the
top cover 240 inside each opening 244.
[0096] Preferably, the top cover 240 has two or three openings 244,
and each opening 244 has a rectangular shape. Of course, other
numbers and shapes of the openings 244 may be used. A seat 246 is
provided on the top cover 240 around each opening 244 inside the
associated reinforcing rim 242. An auxiliary cover 248 is seated on
each seat 246 under the condition in which one O-ring, that is,
seal member O, is interposed between the seat 246 and the auxiliary
cover 248, in order to generate a sealing effect between the seat
246 and the auxiliary cover 248. Wire connecting rings 250 are
fixed to the top cover 240 and auxiliary covers 248, in order to
connect the top cover 240 and auxiliary covers 248, using wires, to
a crane mounted to the ceiling of a clean room, in which the FPD
manufacturing apparatus installed, and thus, to enable the top
cover 240 and auxiliary covers 248 to be moved by the crane.
Preferably, the wire connecting rings 250 are fixed to respective
corners of the top cover 240, to respective opposite sides of each
reinforcing rim 242, and to respective opposite sides of each
auxiliary cover 248. Transverse reinforcing members (not shown),
each of which has a length identical to the width of each opening
244, may be arranged at the top cover 240 along desired sides of
the associated opening 244, in order to prevent the top cover 240
from being twisted due to heat applied thereto.
[0097] The top cover 240 may be made of stainless steel in order to
obtain a desired rigidity and a desired durability, and thus, to
prevent the top cover 240 from generating an excessive strain.
[0098] Each auxiliary cover 248 may have a rectangular
parallelepiped box structure. In this case, the rectangular
parallelepiped box structure of each auxiliary cover 240 may be
upwardly opened, in order to reduce the weight of the auxiliary
cover 240. As described above, a pair of wire connecting rings 250
are fixed to the upper end of each auxiliary cover 248 at opposite
sides of the auxiliary cover 248, respectively, to enable the
auxiliary cover 248 to be moved by the crane. Each auxiliary cover
248 is made of aluminum so that the auxiliary cover 248 has a
reduced weight.
[0099] As shown in FIG. 12, the feeding robot 220 includes a
feeding arm 224. The feeding robot 220 also includes a driver 222
to supply a drive force to the feeding arm 224. Although not shown,
the feeding robot 220 further includes a robot housing, and an end
effecter, on which a substrate to be fed is seated. When it is
desired to remove the feeding robot 220 from the feeding chamber
200, for maintenance and repair of the feeding robot 220, the
removal of the feeding robot 220 is carried out under the condition
in which the feeding arm 224 and driver 222 of the feeding robot
220 are separated from each other, because the feeding chamber 200
has a limited height.
[0100] The top cover 240 has a large size, and thus, a large
weight, because the feeding chamber 200 has a large size so as to
feed a large-size substrate. Accordingly, the top cover 240 must be
divided into several sections to distribute the weight of the top
cover 240 to those sections, and thus, to enable the top cover 240
to be moved by a crane adapted to move a limited weight. To this
end, the top cover 240 according to this embodiment has the
above-described divided structure, which includes a plurality of
auxiliary covers 248.
[0101] Although the divided structure of the top cover 240
according to this embodiment has been described as being applied to
the feeding chamber 200, this structure may also be applicable to
the processing chamber, which may be a plasma processing device,
for example, a chemical vapor deposition (CVD) device, an etcher,
or an asher.
[0102] When it is desired to move the top cover 240 installed on
the top of the feeding chamber 200 in the FPD manufacturing
apparatus according to this embodiment, the auxiliary covers 248,
which constitute the divided structure of the top cover 240, are
sequentially moved by the crane mounted to the clean room under the
condition in which the wire connecting rings 250 of each auxiliary
cover 248 are connected to a hook included in the crane.
[0103] Thereafter, the top cover 240, which has a reduced weight in
accordance with separation of the auxiliary covers 248 from the top
cover 240, is moved to a desired place by the crane under the
condition in which the wire connecting rings 250 of each auxiliary
cover 248 are connected to the hook of the crane. The feeding robot
220 is then outwardly moved from the feeding chamber 200, for
maintenance and repair. After completion of the maintenance and
repair, the feeding robot 220 is again positioned in the feeding
chamber 200 in accordance with a procedure carried out in the order
reverse to the above-described procedure.
[0104] The top cover 240 may be separated when it is necessary to
perform maintenance and repair for the feeding robot 220 or other
large-size inner structures arranged in the feeding chamber 200. On
the other hand, the auxiliary covers 248 may be separated when it
is necessary to perform simple maintenance and repair for the
feeding chamber 200.
[0105] Thus, in accordance with this embodiment, the top cover 240
has the divided structure including a plurality of detachable
auxiliary covers 248 to distribute the weight of the top cover 240
to the auxiliary covers 248, and thus, to enable the top cover 240
to be easily separated from the large-size feeding chamber 200,
using a crane having a limited capacity. After separation of the
auxiliary covers 248, the weight of the top cover 240 is
correspondingly reduced, so that it is possible to move the top
cover 240 by the crane without any overload applied to the
crane.
[0106] <Fifth Embodiment>
[0107] This embodiment provides a load lock chamber having a simple
structure, and thus, exhibiting a reduction in manufacturing costs
and a reduction in the time taken to load/unload a substrate.
[0108] As shown in FIG. 14, the load lock chamber 100 according to
this embodiment includes a chamber housing 140, openings (not
shown), gate valves (not shown), and end effecter receiving grooves
150.
[0109] The chamber housing 140 defines, therein, a chamber in which
vacuum can be established. Since the load lock chamber repeatedly
and alternately establishes an atmospheric state and a vacuum
state, the load lock chamber 100 includes a pumping device to
establish the vacuum state in the load lock chamber, and a venting
device to establish the atmospheric state in the load lock
chamber.
[0110] Two openings are formed at opposite side walls of the
chamber housing 140 such that the openings face each other. One
opening, which is formed at the side wall of the chamber housing
140 arranged adjacent to the feeding chamber 200, is used as a
gateway to load a substrate into the feeding chamber 200 and to
unload the substrate from the feeding chamber 200. On the other
hand, the other opening, which is formed at the opposite side wall,
is used as a gateway to load a substrate from the outside of the
load lock chamber 100 into the load lock chamber 100 and to unload
the substrate from the load lock chamber 100 to the outside of the
load lock chamber 100. Each opening is opened and closed by a gate
valve. The gate valve has a structure capable of preventing a gap
from being formed between the gate valve and the opening in a
closed state of the opening, thereby maintaining the chamber to be
in a sealed state.
[0111] Each end effect receiving groove 150 defines a path, along
which an associated end effecter E of the feeding robot moves to
enter the load lock chamber 100. The end effecters E of the feeding
robot, on which a substrate is laid, enter the load lock chamber
100 under the condition in which the end effectors E are received
in respective end effecter receiving grooves 150 while being lifted
to a level, at which the substrate does not come into contact with
a bottom wall of the chamber housing 140. To this end, each end
effecter receiving groove 150 is formed at the bottom wall of the
chamber housing 140 in the form of a groove having a predetermined
depth capable of allowing the end effecter E to move vertically in
the end effecter receiving groove 150. Accordingly, each end
effecter E can move vertically in a state of being received in the
associated end effecter receiving groove 150. When the end
effecters E move downwardly in a state of carrying a substrate, the
substrate is laid on the bottom wall of the chamber housing 140, so
that the substrate is separated from the end effecters E. Under
this condition, the end effecters E are outwardly retracted.
[0112] Preferably, substrate protection members 160 are arranged on
the bottom wall of the chamber housing 140 at regions where the
substrate laid on the bottom wall come into contact with the bottom
wall, as shown in FIG. 14. Where the substrate comes into direct
contact with the bottom wall of the chamber housing 140, the
substrate may be damaged because the bottom wall of the chamber
housing 140 has a hardness higher than that of the substrate.
Accordingly, the substrate protection members, which are made of a
material causing no damage to the substrate, are arranged on the
bottom wall of the chamber housing 140.
[0113] Preferably, a substrate guide 170 is also provided in the
load lock chamber 100 according to this embodiment. The substrate
guide 170 functions to guide a substrate to be loaded at an
accurate position in the load lock chamber 100. In accordance with
this embodiment, the substrate guide 170 is arranged along the edge
of the bottom wall of the chamber housing 140. The substrate guide
170 has a structure inclined toward a central portion of the load
lock chamber 100. Accordingly, when a substrate is loaded in the
load lock chamber 100, the substrate is moved to an accurate
position in the load lock chamber 100 as the edges of the substrate
slide along the substrate guide 170. As shown in FIG. 15, the
substrate guide 170 has a rectangular shape opened at one side to
allow the end effecters E to access the load lock chamber 100
through the opened side. That is, the substrate guide 170 has a
U-shaped structure having, at one side thereof, an opening to allow
the end effectors to pass through the substrate guide 170.
[0114] Preferably, at least one loading die 180 is also arranged in
the load lock chamber 100 according to this embodiment, as shown in
FIG. 14. The loading die 180 functions to load a substrate S
thereon. At least two loading dies 180 may be arranged in the load
lock chamber 100, in order to simultaneously load at least two
substrates. A plurality of uniformly-spaced substrate support
members 182 are arranged on each loading die 180 such that the
substrate support members 182 are upwardly protruded from the
loading die 180. The substrate support members 182 are made of a
material exhibiting a hardness lower than that of the substrate, in
order to prevent the substrate support members 182 from damaging
the substrate. The substrate support members 182 have a sufficient
length to allow the end effecters E to move vertically in a state
of being inserted into a gap defined between the associated loading
die 180 and a substrate supported by the substrate support members
182.
[0115] Another substrate guide 170 is provided to perform a
position correction for a substrate loaded on each loading die 180.
As shown in FIG. 14, this substrate guide 170 is arranged around
the associated loading die 180, and has an inclined structure
having a lower end extending to a level lower than the upper end of
each support member 182. Of course, a separate aligner may be
arranged in the load lock chamber 100 to simultaneously align a
plurality of substrates loaded on respective loading dies 180.
[0116] Hereinafter, a method for loading substrates in the load
lock chamber according to this embodiment will be described with
reference to FIG. 16.
[0117] First, step S110 of introducing a substrate S into the load
lock chamber 100 is executed. At step S110, one gate valve is
driven to open one opening of the load lock chamber 100.
Thereafter, a substrate is introduced into the load lock chamber
100 through the opened opening, using the substrate feeding robot
arranged outside the load lock chamber 100. At this time, the end
effecters E of the substrate feeding robot are inserted into the
end effecter receiving grooves formed at the bottom wall of the
load lock chamber 100.
[0118] Subsequently, step S120 of loading the substrate S in the
load lock chamber 100 is executed. At step S120, the substrate
feeding robot is driven to downwardly move the end effecters E in
respective end effecter receiving grooves 212 until the substrate S
on the end effecters E is laid on the bottom wall of the load lock
chamber 100. Thus, the substrate S is completely loaded in the load
lock chamber 100.
[0119] Thereafter, step S130 of ejecting the substrate feeding
robot from the load lock chamber 100 is executed. At step S130, the
substrate feeding robot is horizontally moved until the end
effecters E are completely removed from the load lock chamber
100.
[0120] Next, step S140 of aligning the substrate S loaded in the
load lock chamber 100 to accurately position the substrate S is
executed. Where the substrate guide 170 is used, step S140 is
executed simultaneously with step S120 because, when the substrate
S is loaded on the bottom wall of the load lock chamber 100 at the
substrate loading step S120, the substrate S slides along the
substrate guide 170 arranged along the edge of the bottom wall of
the load lock chamber 100, and thus, moves to an accurate position.
Of course, where a separate aligner is used, the substrate aligning
step S140 is executed independently of the substrate loading step
S120.
[0121] Finally, step S150 of establishing a vacuum atmosphere in
the load lock chamber 100 is executed. At step S150, the gate valve
is driven to close the opened opening. The vacuum pump is then
driven to vent gas present in the load lock chamber 100.
[0122] Meanwhile, when it is desired to load a plurality of
substrates in the load lock chamber 100, steps S110, S120, and S130
are repeatedly executed until all substrates are loaded in the load
lock chamber 100. Thereafter, steps S140 and S150 are executed.
[0123] <Sixth Embodiment>
[0124] This embodiment provides a feeding chamber having a
structure capable of allowing the feeding robot to pass through one
side wall of the feeding chamber.
[0125] In an FPD manufacturing apparatus including a plurality of
chambers, the feeding chamber according to this embodiment
functions to load a substrate into a selected one of the chambers,
for example, a load lock chamber or a processing chamber, and to
unload the substrate from the selected chamber. As shown in FIGS.
17a and 17b, the feeding chamber 200, which is configured in
accordance with this embodiment, is provided, at opposite side
walls thereof, with gateways, and gate valves to open/close the
gateways, respectively. Also, the top cover 240 is mounted on the
feeding chamber 200. The driver 222 of the feeding robot 220
adapted to feed a substrate is seated, at an upper end thereof, on
the bottom wall of the feeding chamber 200 while extending
downwardly through an opening formed at the bottom wall of the
feeding chamber 200. A seal member O such as an O-ring is
interposed between contact surfaces of the bottom wall of the
feeding chamber 200 and the upper end of the driver 222.
[0126] As described above, the feeding robot 220 mainly includes
the robot housing, the feeding arm 224 mounted to an upper end of
the robot housing and foldable within a predetermined length range,
the driver 222, which is mounted to a lower end of the robot
housing, and the end effecters E, on which a substrate will be
seated. When it is desired to remove the feeding robot 220 from the
feeding chamber 200, for maintenance and repair of the feeding
robot 220, the removal of the feeding robot 220 is carried out
under the condition in which the feeding arm 224 and driver 222 of
the feeding robot 220 are separated from each other, because the
feeding chamber 200 has a limited height.
[0127] A driver gateway 266 is provided at one side wall of the
feeding chamber 200, in order to allow the driver 222 of the
feeding robot 220 to pass through the driver gateway 266 for
installation of the driver 222 in the feeding chamber 200 and
separation of the driver 222 from the feeding chamber 200. A door
264 is also provided at the side wall of the feeding chamber 200,
in order to allow the feeding robot 220 to be removed from the
feeding chamber 200 when it is desired to perform maintenance and
repair for the feeding robot 220. The door 264 is hingably mounted
to the side wall of the feeding chamber 200 where the driver
gateway 266 is formed.
[0128] Extensions having a certain thickness extend inwardly from
an inner surface of the driver gateway 266, in order to enable a
seal member O to be installed between the driver gateway 266 and a
rear surface edge of the door 264, and thus, to provide a sealing
effect between the driver gateway 266 and the door 284.
[0129] Also, the seal member O, which is interposed between the
contact surfaces of the bottom wall of the feeding chamber 200 and
the upper end of the driver 222, provides a sealing effect between
the feeding chamber 200 and the driver 222. A vertical driver 270
is also arranged beneath the driver 222 of the feeding robot 220.
The vertical driver 270 functions to upwardly move the driver 222
to a desired level when the driver 222 is removed from the feeding
chamber 200, and thus, to prevent the seal member O from being
damaged during the removal of the driver 222. The vertical driver
270 also downwardly moves the driver 222 to an original position
when the driver 222 is loaded into the feeding chamber 200.
[0130] Preferably, the vertical driver 270 comprises a
cylinder.
[0131] As shown in FIG. 18, the feeding chamber 200 also includes
guide members 272 arranged between the driver gateway 266 and the
driver 222 of the feeding robot 220. Each guide member 272 has the
form of a rail. Auxiliary guide members 273 are hingably mounted to
outer ends of the guide members 272, respectively, such that the
auxiliary guide members 273 extend and retract through the driver
gateway 266 in accordance with hinging operations thereof. A
sliding plate 274 is slidably arranged on the guide members 272.
The auxiliary guide members 273 may be slidably mounted to the
guide members 272, respectively, such that the auxiliary guide
members 273 extend and retract through the driver gateway 266.
[0132] When it is desired to remove the driver 222 of the feeding
robot 220 from the feeding chamber 200, the driver 222 is first
lifted and then laid on the sliding plate 274 slidably mounted on
the guide members 272. The auxiliary guide members 273 are then
hinged such that they extend outwardly from the feeding chamber
200. Under this condition, the sliding plate 274 is then moved
along the guide members 272 and the auxiliary guide members 273, as
shown in FIG. 19. Thus, the driver 222 can be easily removed from
the feeding chamber 200. The loading of the driver 222 into the
feeding chamber 200 can also be easily achieved in accordance with
a procedure reverse to the above-described procedure. Normally, the
auxiliary guide members 273 are maintained in a folded state. The
auxiliary guide members 273 are unfolded in accordance with hinging
operations thereof, only when the driver 222 of the feeding robot
220 is to be removed.
[0133] A transfer means (not shown) may be arranged in rear of the
driver 222 of the feeding robot 220 in the feeding chamber 200, in
order to transfer the driver 222 to the sliding plate 274.
[0134] Hereinafter, the procedure for loading the feeding robot 220
into the feeding chamber 200 and unloading the feeding robot 220
from the feeding chamber 200 in the FPD manufacturing apparatus
according to this embodiment will be described with reference to
FIGS. 17a, 17b, and 18. When it is desired to unload the feeding
robot 220 from the feeding chamber 200, for maintenance and repair
of the feeding robot 220, the vacuum state of the feeding chamber
200 is first released. Thereafter, the door 264 is hinged to open
the driver gateway 266.
[0135] The top cover 240 is then removed from the feeding chamber
200, using the crane. Subsequently, the feeding arm 224 is manually
separated from the driver 222, and then moved to the outside of the
feeding chamber 100, using the crane.
[0136] Thereafter, the vertical driver 270, which is arranged
beneath the driver 222 while being in contact with the driver 222,
is driven to upwardly move the driver 222 to a level where the
driver 222 can pass through the driver gateway 264 without any
interference, while preventing the seal member O adapted to provide
a sealing effect between the bottom wall of the feeding chamber 100
and the driver 222.
[0137] Next, the driver 222 is transferred to the sliding plate 274
by the transferring means. Where the auxiliary guide members 273
are slidably mounted to the guide members 272, respectively, such
that the auxiliary guide members 273 extend and retract through the
driver gateway 266, the transferring means also outwardly slides
the auxiliary guide members 273 from the feeding chamber 200 along
the guide members 272, as shown in FIG. 19. As a result, the driver
222 is removed from the feeding chamber 200.
[0138] Under this condition, maintenance and repair can be
performed for the feeding arm 224 and driver 222 of the feeding
robot 220. After the maintenance and repair, the driver 222 is
again loaded into the feeding chamber 200 in accordance with a
procedure reverse to the above-described procedure.
[0139] Thus, the feeding robot 220 can be loaded and unloaded
through the driver gateway 264 formed at one side wall of the
feeding chamber 200 under the condition in which the driver gateway
264 is opened by the door 266. Accordingly, it is possible to
achieve the loading and unloading of the driver 222, even in the
case in which the space defined between the feeding chamber 200 and
the clean room is reduced due to the increased size of the feeding
chamber 200.
[0140] <Seventh Embodiment>
[0141] This embodiment provides a vacuum chamber, which includes a
separable bottom wall, in order to achieve an easy installation of
structures to be arranged at a lower portion of the vacuum chamber,
an easy function test for the structures, and easy maintenance and
repair for the structures, and a repairing method for the
structures.
[0142] Preferably, the vacuum chamber according to this embodiment
is applied to the processing chamber 300 of the FPD manufacturing
apparatus. In accordance with this embodiment, as shown in FIG. 20,
the vacuum chamber 300 includes three sections, that is, a chamber
body 330, a top cover 340, and a bottom cover 350, which are
independently manufactured.
[0143] As shown in FIG. 20, the chamber body 330 has a rectangular
box structure including four side walls. The chamber body 330 forms
a side wall section of the vacuum chamber 300, and defines the
overall appearance of the vacuum chamber 300. The chamber body 330
is provided, at desired portions thereof, with an opening 332 to
allow a substrate to pass through the opening 332 for loading of
the substrate into the vacuum chamber 300 and unloading of the
substrate from the vacuum chamber 300, and view ports 334 to allow
the operator to observe a substrate processing procedure carried
out in the vacuum chamber, using plasma, and the results exhibited
in the substrate processing procedure.
[0144] The top cover 340 is coupled to an upper end of the chamber
body 330 while being in contact with the upper end of the chamber
body 330, thereby forming a top wall section of the vacuum chamber
300, as shown in FIG. 20. An upper electrode and a process gas
supplying system are arranged at the top cover 340. Seal member
receiving grooves are formed at respective coupling surfaces of the
top cover 340 and chamber body 330. A seal member O is interposed
between the seal member receiving grooves. The seal member O
provides a sealing effect between the coupling surfaces of the top
cover 340 and chamber body 330 so that vacuum can be established in
the vacuum chamber 300. At least two seal members may be arranged
to obtain an enhanced sealing effect.
[0145] As shown in FIG. 20, the bottom cover 350 is coupled to a
lower end of the chamber body 330 while being in contact with the
lower end of the chamber body 330, thereby forming a bottom wall
section of the vacuum chamber 300. The bottom cover 350 is formed
with various holes, for example, a driving hole 352 for a lower
electrode, a driving hole 354 for an inner vertical reciprocation
pin, a driving hole 356 for an outer vertical reciprocation bar,
and a vacuum pump connecting hole 358. These holes correspond to
positions where various elements to extend through the bottom cover
350 are arranged, respectively. That is, a drive shaft of a lower
electrode driving module extends through the lower electrode
driving hole 352. An inner vertical reciprocation pin driving
module, which is adapted to vertically reciprocate the inner
vertical reciprocation pin near the lower electrode, passes through
the inner vertical reciprocation pin driving hole 354. An outer
reciprocation bar driving module passes through the outer vertical
reciprocation pin driving hole 356.
[0146] As shown in FIG. 20, an engagement rim 336 is horizontally
protruded to a desired length from the inner side wall surface of
the chamber body 330 along a region where the lower end of the
chamber body 330 is coupled with the bottom cover 350. The bottom
cover 350 is engaged, at a peripheral edge thereof, with the
engagement rim 336 in the chamber body 330, so that the bottom
cover 350 is coupled to the chamber body 330.
[0147] Preferably, the bottom cover 350 is provided, at the
peripheral edge thereof, with an engagement groove 359 having a
stepped shape conforming to the engagement rim 336. Since the
engagement groove 359 has a shape conforming to the engagement rim
336, no gap is formed between the engagement surfaces of the
engagement rim 336 and engagement groove 359 when the bottom cover
250 is coupled to the chamber body 330. In particular, the
engagement surfaces of the engagement rim 336 and engagement groove
359 have a stepped shape, so that plasma generated in the vacuum
chamber 300 cannot easily leak from the vacuum chamber 300 between
the engagement surfaces because the plasma exhibits straightness.
It is more preferable that the horizontal surface portion of each
engagement surface be inclinedly formed. In this case, when the
bottom cover 350 is coupled to the chamber body 330, the bottom
cover 350 can be positioned at an accurate position without any
position correction.
[0148] Preferably, seal member receiving grooves are formed at the
engagement surfaces of the engagement rim 336 and engagement groove
359, respectively, as shown in FIG. 20. A seal member O is fitted
between the seal member receiving grooves. The seal member O
provides a sealing effect between the coupling surfaces of the
lower cover 350 and chamber body 330 so that vacuum can be
established in the vacuum chamber 300. At least two seal members
may be arranged to obtain an enhanced sealing effect.
[0149] Preferably, a plurality of feeding device coupling holes 357
are formed at an upper surface of the bottom cover 50 along the
peripheral edge of the bottom cover 50, as shown in FIG. 20. The
feeding device coupling holes 357 function to enable a feeding
device, for example, the crane, to easily carry out an operation
for lifting the bottom cover 350 when the bottom cover 350 is to be
coupled to the chamber body 330 or to be separated from the chamber
body 330. Each feeding device coupling hole 357 has female threads
to be threadedly coupled with male threads formed on an end of a
feeding wire connected to the crane. Accordingly, the bottom cover
350 can be firmly connected to the crane, so that it is possible to
easily raise the bottom cover 350, using the crane.
[0150] In accordance with this embodiment, coupling blocks 355 are
preferably provided at the bottom cover 350. The coupling blocks
355 are fitted in respective feeding device coupling holes 357 to
block the feeding device coupling holes 357 after completion of a
bottom cover assembling or repair process. Where the feeding device
coupling holes 357 are maintained in an opened state in the
substrate treating process using plasma, diverse particles may be
deposited in the feeding device coupling holes 357, or arc may be
generated at the feeding device coupling holes 357 due to plasma.
It is preferred that the coupling blocks 355 be fitted in
respective feeding device coupling holes 357 such that the upper
end of each coupling block 355 is flush with the upper surface of
the bottom cover 350.
[0151] Now, the method for manufacturing and assembling the vacuum
chamber in accordance with this embodiment will be described with
reference to FIG. 22.
[0152] First, step S210 is executed to manufacture the vacuum
chamber 300, which includes the chamber body 330, top cover 340,
and bottom cover 350. At step S210, the manufacture of the vacuum
chamber 300 is achieved by independently manufacturing the chamber
body 330 forming the side wall portion of the vacuum chamber 300,
the top cover 340 forming the top wall portion of the vacuum
chamber 300, and the bottom cover 350 forming the bottom wall
portion of the vacuum chamber 300.
[0153] Next, step S220 of installing the chamber body 330 on a main
frame (not shown) is executed. At step S220, the chamber body 330
is first laid on the main frame, and is then fixed to the main
frame. In detail, the chamber body 330 is lifted, using the feeding
device, and is then laid on a portion of the main frame
corresponding to a position where the chamber body 330 is coupled
with the main frame. Thereafter, the position of the chamber body
330 on the main frame is adjusted so that the chamber body 330 is
accurately positioned. After the chamber body 330 is positioned at
an accurate position on the main frame, the chamber body 330 is
firmly fixed to the main frame so that the chamber body 330 cannot
move.
[0154] Thereafter, step S230 of installing structures on the top
and bottom covers 340 and 350 is executed. At step S230, the bottom
cover 350 is first positioned on a working die spaced apart from
the bottom of the chamber body 330 by a long distance to allow the
structure installing process to be easily carried out. Under this
condition, accordingly, it is possible to easily perform processes
for installing structures such as the lower electrode driving
module, inner vertical reciprocation pin driving module, outer
vertical reciprocation bar driving module, and vacuum chamber.
Also, it is possible to easily perform a functional test for each
structure because a wide space, in which the functional test is
carried out, can be provided.
[0155] Subsequently, step S240 of coupling the bottom cover 350 to
the chamber body 330, using the feeding device, is executed. At
step S240, the bottom cover 350, for which the installation of the
structures and the functional test for the structures have been
completed, is coupled to the chamber body 330. In accordance with
this embodiment, step S240 is executed, using a method of lifting
the bottom cover 350 above the chamber body 330, lowering the
bottom cover 350 into the chamber body 330, and coupling the bottom
cover 350 to the chamber body 330. It is preferred that step S240
comprise steps of: a) lifting the bottom cover 350 to a level
higher than the chamber body 330; b) moving the bottom cover 350 to
a position where the bottom cover 350 is positioned just over the
chamber body 330, and lowering the bottom cover 350 into the
chamber body 330 such that the bottom cover 350 is mounted to the
chamber body 330. Also, it is preferred that step S240 further
comprise the step of c) firmly fixing the bottom cover 350 to the
chamber body 330. When the bottom cover 350 is coupled to the
chamber body 330 in accordance with the above-described method, the
coupling of the bottom cover 350 becomes firm due to the weights of
the bottom cover 350 and the structures installed on the bottom
cover 350. However, it is more preferable that the fixing step be
further executed, in order to more firmly couple the bottom cover
350 to the chamber body 330, taking into consideration the fact
that large parts of the structures installed on the bottom cover
350 are driven.
[0156] Finally, step S250 of coupling the top cover 340 to the
chamber body 330, using the feeding device, is executed. At step
S250, the top cover 340, on which desired structures have been
installed, is coupled to the upper end of the chamber body 330.
Step S250 is executed by lifting the top cover 340 above the
chamber body 330, lowering the top cover 340 such that the top
cover 340 is positioned on the chamber body 330, and firmly
coupling the top cover 340 to the chamber body 330.
[0157] Thus, the assembly of the vacuum chamber 300 according to
this embodiment is completed.
[0158] Hereinafter, the method for repairing the vacuum chamber
according to this embodiment will be described with reference to
FIG. 23.
[0159] First, step S310 of separating the top cover 340 is
executed. At step S310, the top cover 340 is separated from the
chamber body 330, using a top cover opening device included in the
plasma-using substrate processing device or a separate feeding
device, thereby opening the top wall section of the vacuum chamber
300.
[0160] Next, step S320 of separating the bottom cover 350, and
laying the bottom cover 350 on the working die is executed. At step
S320, the feeding device is first coupled with the feeding device
coupling holes 357 of the bottom cover 350. Under this condition,
the feeding device lifts the bottom cover 350, and feeds the bottom
cover 350 to a place where the working die is located, and then
lays the bottom cover 350 on the working die. Thus, the operator
can perform a repair process for the bottom cover 350 on the
working die. The working die is configured to maintain the bottom
cover 350 at a level spaced apart from the ground by a considerable
vertical distance so that the operator can easily perform the
repair process in a state of entering a space beneath the working
die.
[0161] Step S330 of repairing the bottom cover 350 and the
structures installed on the bottom cover 350 is then executed. At
step S330, a repair process is executed for parts of the structures
to be repaired.
[0162] Thereafter, step S340 of coupling the bottom cover 350 to
the chamber body 330 is executed. At step S340, the bottom cover
350, which has been completely repaired, is moved to an original
position in the chamber body 330, using the feeding device. This
step is executed in the order reverse to that of the bottom cover
separating step S320.
[0163] Finally, step S350 of coupling the top cover 340 to the
chamber body 330 is executed. Step S350 is executed in the order
reverse to that of the top cover separating step S310.
[0164] Thus, the top and bottom covers 340 and 350 are positioned
at respective original positions thereof, so that the repair
process for the vacuum chamber 300 is completed.
[0165] In accordance with the above-described embodiments of the
present invention, various advantages and effects are obtained.
[0166] That is, in accordance with the first embodiment, one seal
member is arranged on the extension formed at each end of the
peripheral wall plate of a chamber to maintain the chamber in a
vacuum state, and one cover member is arranged on the seal member
to cover the seal member. Accordingly, there is an advantage in
that the life span of the seal member increases.
[0167] When it is desired to replace the seal member with a new
one, this replacement can be achieved by separating only the cover
member without separation of the peripheral wall plate, top plate
and bottom plate, which constitute the chamber. Accordingly, it is
possible to easily achieve maintenance and repair for the
chamber.
[0168] In accordance with the second embodiment, at least one of
the load lock chamber, feeding chamber, and processing chamber,
which constitute an FPD manufacturing apparatus, has a
vertically-stacked chamber structure including at least two sub
chambers. Accordingly, there is an advantage of an enhancement in
process efficiency, and thus, an increase in productivity. That is,
where the processing chamber includes two sub chambers, there is an
effect capable of simultaneously performing two identical processes
or two different processes.
[0169] Also, the coupling between the sub chambers is achieved,
using the protrusion/groove type structures. Accordingly, it is
possible to minimize the overall height of the chamber, and to
obtain an increased coupling force of the sub chambers, and thus,
to obtain an optimal space efficiency.
[0170] Since the sub chambers are coupled to each other, using the
protrusion/groove type structures, there are advantages in that it
is possible to firmly couple the sub chambers, and to easily
separate the sub chambers from each other.
[0171] In accordance with the third embodiment, the vacuum chamber
is not manufactured in the form of a singe body, but manufactured
in the form of a plurality of chamber sections, which will be
assembled to form the vacuum chamber. Accordingly, there is an
advantage in that it is possible to easily transport the vacuum
chamber, manufactured to have a large size, to an installation
place. That is, where such a large-size vacuum chamber is
manufactured in the form of a single body, it is impossible to
transport the vacuum chamber, using a vehicle. However, where the
vacuum chamber is manufactured in the form of a plurality of
chamber sections, it is possible to easily achieve transportation
of the vacuum chamber by transporting the chamber sections, each of
which has a reduced width, as compared to the vacuum chamber. Of
course, the vacuum chamber is completely formed by assembling the
chamber sections after the transportation thereof to an
installation plate. Also, there is no problem in establishing a
vacuum atmosphere in the assembled vacuum chamber.
[0172] Furthermore, where a vacuum chamber having a width of 3 m or
more is manufactured in the form of a single body, it is necessary
to machine a large-size metal body to form the vacuum chamber. For
this reason, the machining means adapted to machine the metal body
must also have a large size. The machining process is also
difficult. However, such problems are eliminated in accordance with
the present invention.
[0173] In addition, there is an advantage of easy maintenance and
repair in that the maintenance and repair process for damaged inner
structures of the vacuum chamber can be carried out under the
condition in which only a part of the chamber sections is separated
from the vacuum chamber.
[0174] In accordance with the fourth embodiment, the top cover
arranged on the vacuum chamber has a divided structure including
one or more detachable auxiliary covers, in order to distribute the
weight of the top cover to the auxiliary covers in the procedure of
separating the top cover from the vacuum chamber to allow the
feeding robot to pass through the vacuum chamber upon loading or
unloading the feeding robot, for maintenance and repair of the
feeding robot. In the procedure of separating the top cover from
the vacuum chamber, the auxiliary covers are individually separated
from the top cover by the crane. Accordingly, the separation and
assembly of the top cover can be achieved within a weight range
allowable by the crane. Thus, the separation and assembly of the
top cover can be easily achieved.
[0175] In accordance with the fifth embodiment, it is unnecessary
to arrange lift pins and aligners in the load lock chamber.
Accordingly, there are advantages of a simple structure and a
reduction in manufacturing costs. Also, the process for loading a
substrate into the load lock chamber is simple. Accordingly, the
time taken to load a substrate is reduced, so that the overall
substrate processing time is reduced.
[0176] In accordance with the sixth embodiment, the driver of the
feeding robot can be loaded or unloaded through the driver gateway
provided at one side of the feeding chamber, in the procedure of
loading or unloading the feeding robot, for assembly, maintenance
or repair of the feeding robot. Accordingly, it is possible to
achieve the loading and unloading of the driver without using the
crane. As a result, the time taken to load or unload the driver is
reduced.
[0177] Also, the unloading of the driver is carried out in a state
of being lifted to a desired level by the vertical driver, which is
arranged beneath the feeding robot in order to move the driver of
the feeding robot to the level of the driver gateway while
preventing damage of the seal member adapted to provide a seal
effect between the feeding chamber and the feeding robot. The
unloading and loading of the feeding robot driver can also be
easily achieved by the guide members and the auxiliary guide
members hingably or slidably mounted to the guide members such that
the auxiliary guide members extend and retract through the driver
gateway.
[0178] In accordance with the seventh embodiment, as shown in FIG.
21, the working die J having a sufficient height t to enable the
operator to perform a repair process in a state of entering a space
beneath the working die J. Accordingly, the operator can easily
perform an assembling process for structures to be installed on the
bottom cover, and a repair process for the installed structures
under the condition in which the bottom cover is laid on the
working die J. Thus, it is possible to completely eliminate the
difficulty encountered in executing the structure assembling
process and the bottom cover repair process in conventional cases
in which the height of the main frame from the ground is short.
Since the operator can perform the structure assembling process and
the bottom cover repair process in an upright state, the time taken
to perform the structure assembling process and the bottom cover
repair process is greatly reduced. In addition, there is an
advantage in that it is possible to prevent accidents from
occurring during the execution of the processes.
* * * * *