U.S. patent application number 11/067445 was filed with the patent office on 2005-08-25 for arrangement for tipping a table.
Invention is credited to Jakob, Matthias, Klemm, Ingo, Kresser, Manfred, Meissner, Jorg, Ross-Messemer, Martin, Rulf, Joachim.
Application Number | 20050183636 11/067445 |
Document ID | / |
Family ID | 34862919 |
Filed Date | 2005-08-25 |
United States Patent
Application |
20050183636 |
Kind Code |
A1 |
Klemm, Ingo ; et
al. |
August 25, 2005 |
Arrangement for tipping a table
Abstract
The invention relates to a tilting table array for
micro-positioning objects, preferably for defined generation of
oscillating movements of optical objects, such as for instance
mirror elements in projection lens arrays, including a tilting
table carrying the object and connected to at least one drive
element as well as a tilting table housing that is coupled to the
tilting table via an elastic connection. According to the
invention, the tilting table, the tilting table housing and the
elastic connection comprise one monolithic unit.
Inventors: |
Klemm, Ingo; (Jena, DE)
; Meissner, Jorg; (Jena, DE) ; Kresser,
Manfred; (Jena, DE) ; Jakob, Matthias; (Jena,
DE) ; Ross-Messemer, Martin; (Essingen, DE) ;
Rulf, Joachim; (Jena, DE) |
Correspondence
Address: |
PATTERSON, THUENTE, SKAAR & CHRISTENSEN, P.A.
4800 IDS CENTER
80 SOUTH 8TH STREET
MINNEAPOLIS
MN
55402-2100
US
|
Family ID: |
34862919 |
Appl. No.: |
11/067445 |
Filed: |
February 25, 2005 |
Current U.S.
Class: |
108/7 |
Current CPC
Class: |
G02B 7/1821 20130101;
G02B 26/0816 20130101; G02B 7/005 20130101; G02B 7/023
20130101 |
Class at
Publication: |
108/007 |
International
Class: |
A47F 005/12 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 25, 2004 |
DE |
10 2004 009 552.3 |
Sep 17, 2004 |
DE |
10 2004 045 256.3 |
Claims
1. A tilting table array for micro-positioning an object,
comprising a tilting table carrying the object and connected to at
least one drive element and a tilting table housing that is coupled
to the tilting table via an elastic connection, wherein the tilting
table, the tilting table housing and the elastic connection
comprise one monolithic unit.
2. The tilting table array according to claim 1, wherein the
monolithic unit comprises a metallic material.
3. The tilting table array according to claim 1, wherein the
monolithic unit comprises a non-metallic material.
4. The tilting table array according to claim 1, wherein the
monolithic unit is an injection molded part, a diecast part or a
combination of the foregoing.
5. The tilting table array according to claim 1, wherein the
tilting table housing is connected, to a base plate or a locking
lid serving the purpose of dust protection
6. The tilting table array according to claim 1, wherein the at
least one drive element is affixed to the base plate or the locking
lid and are positively or non-positively connected to the tilting
table.
7. The tilting table array according to claim 1, wherein the drive
element is attached in the tilting table housing.
8. The tilting table array according to claim 1, wherein the
elastic connection comprises at least one bending element, at least
one torsion element or a combination of the foregoing.
9. The tilting table array according to claim 1, wherein the
elastic connection comprises a torsion element comprises a T-shaped
joint modifiable in its geometric dimensions and in its
position.
10. The tilting table array according to claim 9, wherein the
T-shaped joint is adjustable by variable tools during the injection
molding process.
11. The tilting table array according to claim 1, wherein the drive
element is arranged such that its dynamic effect is directed
adjacent to the elastic connection on the tilting table and wherein
a counter-force is generated by a compression spring.
12. The tilting table array according to claim 11, wherein the
interior space of the compression spring is filled with an elastic
shaping element for the purpose of reducing vibration in the
array.
13. The tilting table array according to claim 12, wherein the
compression spring comprises a coil spring and the elastic shaping
element comprises a silicone rubber mass that completely fills the
interior space of the coil spring.
14. The tilting table array according to claim 1, comprising at
least two drive elements that are arranged symmetrically or
asymmetrically to the elastic connection and that act on the
tilting table with the same or different force.
15. The tilting table array according to claim 14, in which the
drive elements are arranged symmetrically.
16. The tilting table array according to claim 14, in which the
drive elements act with unequal force.
17. The tilting table array according to claim 1, wherein the drive
elements comprise piezo-actors.
18. The tilting table array according to claim 1 wherein the drive
elements operate in accordance with the principle of
magnetostriction, the principle of differential transformation, the
principle of oscillating capacitors, the principle of bending
plates, are step motors, hydraulic actors, pneumatic actors or a
combination of the foregoing.
19. The tilting table array according to claim 1, characterized in
that the drive element is connected to the tilting table via a
sphere.
20. The tilting table array according to claim 1, wherein the
object comprises an optical component.
21. The tilting table array according to claim 1, wherein the
tilting table supports an object receiver, wherein the connections
between the object receiver and the tilting table and between the
object receiver and the object are formed adhesive bonds.
22. The tilting table array according to claim 21, wherein, the
object receiver is pot-shaped and comprises an exterior base
surface receiving the object and an interior wall for attaching to
receiving contours of the tilting table for the purpose of
attachment and assembly of the object to a reference plane.
Description
FIELD OF THE INVENTION
[0001] The invention relates to a tilting table array for
micro-positioning objects, preferably for defined generation of
oscillating movements of optical objects, such as for instance
mirror elements in projection lens arrays, including a tilting
table carrying the object and connected to at least one drive
element as well as a tilting table housing that is coupled to the
tilting table via an elastic connection.
BACKGROUND OF THE INVENTION
[0002] DE 19700580 A1 describes a tilting table array for
micro-positioning mirror elements in which a tilting movement of
the mirror elements about two tilting axes is achieved by means of
solid body joints attached to a base plate. Such arrays are very
complicated in structure and therefore highly cost-intensive.
Moreover, the serviceable life is relatively short due to wear
phenomena that occur.
[0003] Tilting table arrays are also known in which an object
carrier is connected to a tabletop via, for example, a rotating or
tilting joint. The object carrier is tilted about the rotating
joint using piezo elements that are arranged in the tabletop and in
the object carrier at defined intervals from the rotating joint.
Such an array is described in DE 19606913 C1, for example.
[0004] The disadvantage of all known arrays is that the complexity
of assembling a device system is relatively high, because, in the
majority of applications, it is necessary to affix and adjust the
array in an additional housing.
[0005] This results in a large number of individual parts being
needed for micro-positioning, which is associated with high
complexity for making the adjustments and, therefore, significant
costs, so that such arrays prove to be disadvantageous,
particularly in mass production.
[0006] Based on the above, the object of the invention is to
further develop a tilting table array for static or dynamic
micro-positioning of objects such that virtually wear-free, highly
accurate and cost-minimized positioning of an object is possible
with relatively few individual elements.
SUMMARY OF THE INVENTION
[0007] This object is inventively achieved using a tilting table
array of the type described initially in that the tilting table,
the tilting table housing, and the elastic connection comprise one
monolithic unit, wherein the elastic connection can be at least one
bending element or at least one torsion element or at least a
combination of both elements.
[0008] Because of the fact that the key functional elements of the
tilting table array comprise one component, only a few individual
elements are needed for micro-positioning an object.
[0009] In this connection, the monolithic unit can consist of
either a metallic or a non-metallic material, and is usefully an
injection molded part, a die-cast part or a combination of several
shaping methods.
[0010] Dimensional variances in the array result solely from
tool-related shaping tolerances, that generally are controllable
with large numbers of units, however.
[0011] The relatively easily produced elastic connection between
tilting table and housing allows for friction-free and play-free
positioning of an object. This is especially important when, for
example, optical components such as mirror elements must be
dynamically moved with high frequencies. Moreover, highly precise
positioning of sensors, such as for instance photodiodes, or sample
manipulations are conceivable with the inventive tilting table
array.
[0012] One advantageous variant consists in providing a base plate
(locking lid), the tilting table array being positively or
non-positively joined to the base plate. In this connection, it is
also conceivable to attach the drive elements in the base plate,
thereby joining them to the tilting table, so that there is also a
positive or non-positive fit here.
[0013] For minimizing the individual elements and avoiding error
sequences, however, it is advantageous to position and attach the
drive elements in the tilting table housing.
[0014] Depending on the application, one or more drive elements can
be provided that are arranged both symmetrically and asymmetrically
on the tilting table adjacent to the elastic connection and that
act thereon with the same or different force.
[0015] For generating counter-forces, it is useful to provide one
or a plurality of spring elements between the tilting table and the
tilting table housing or between the tilting table and the base
plate.
[0016] In the case of tilting table arrays in which the position of
a mirror element is dynamically modified in the micro-range with
high frequencies (oscillating mirror), it is useful to provide
piezo-actors as drive elements.
[0017] Piezo-actors possess the outstanding characteristic that
short switching cycles with high power amplitudes are possible,
even with small strokes (high accuracy of positioning).
[0018] Drive elements, such as drive elements that operate in
accordance with the principle of magnetostriction (magnetic coils)
and/or in accordance with the principle of differential
transformation and/or in accordance with the principle of
oscillating capacitors and/or in accordance with the principle of
bending plates, are also conceivable. In addition, combinations
with step motors and/or with hydraulic or pneumatic actors are also
possible.
[0019] When piezo-actors are used, it proves to be useful to
connect the drive elements to the tilting table via a sphere,
because working a counter-contour against the actor permits defined
positioning relative to the tilting table.
[0020] One variant of the inventive tilting table array consists in
forming the elastic connection as a T-shaped joint. The rotation
point of the joint can also be placed directly beneath the object
using the structural design in terms of the height and depth as
well as the position of the transverse beam. This causes a
reduction in the moment of inertia of the tilting table, together
with a frequently desired increase in the resonant frequency of the
tilting system (rapid switching).
[0021] Modification of the torsional rigidity by varying the
geometric dimensions of the T-joint also influences the resonant
frequency of the tilting system, but also limits the amplitude if
only a dynamic force is available. Because the rigidity of the
elastic connection also depends decisively on the material of the
monolithic unit and the injection molding process itself, it is
possible to define this parameter using suitable tool design during
production of the monolithic unit. Tool sets that can be used to
determine the geometry of the T-joint can be easily exchanged
during the production process.
[0022] One advantageous embodiment of the inventive tilting table
array, especially when mirrors are to be positioned, consists in
forming the object to be positioned, that is, the mirror, directly
as a component of the monolithic unit, the surface of the tilting
table comprising a metallic material being finely tooled such that
it satisfies the requirements for an optical system. This is
advantageous because even fewer individual elements are necessary,
thereby minimizing the complexity of assembly.
[0023] Furthermore, when a specially produced object, such as a
mirror element, is received on the tilting table, it is
advantageous to provide an object receiver, wherein the connections
between the object receiver and the tilting table and between the
object receiver and the object should be designed as adhesive
connections. The object receiver is usefully designed to be
pot-shaped, its exterior base surface receiving the object and its
interior wall provided for attaching to specially designed contours
of the tilting table.
[0024] The advantage of this is that the object can initially be
connected to the object receiver by means of an adhesive substance
in a relatively simple manner. In a second assembly step, the
object is then easily adjusted and affixed to the object receiver
without distortion occurring in the object. In addition, the
"object--object receiver" unit can be easily exchanged on the
tilting table.
[0025] The tilting table movements, in connection with a
compression spring that generates the counter-force, can lead to
unpleasant vibrations, so that one advantageous further development
of the inventive array consists in filling the interior space of
the compression spring that is embodied as a spiral spring and that
is limited by the tilting table and the tilting table housing or
the tilting table and the base plate and/or the locking lid with an
elastic shaping element.
[0026] The elastic shaping element usefully consists of a silicon
rubber compound that completely fills the interior space of the
spiral spring, thus allowing for stress-free attenuation of the
compound elements without requiring additional rubber elements
subject to tolerances.
BRIEF DESCRIPTION OF THE DRAWINGS
[0027] In the following, the inventive tilting table array is
described in greater detail using exemplary embodiments. The
corresponding figures show:
[0028] FIG. 1 is a schematic view of the tilting table array with
an elastic bending element,
[0029] FIG. 2 is a schematic view of the tilting table array with
two elastic bending elements,
[0030] FIG. 3 is a top view of a tilting table array for an
oscillating mirror with two elastic torsion elements,
[0031] FIG. 4 is a cross sectional view of the tilting table array
according to FIG. 3 taken along section lines 4-4,
[0032] FIG. 5 is a cross sectional view of the tilting table array
according to FIG. 3 taken along section lines 5-5, and
[0033] FIG. 6 depicts a torsion element in the form of a
T-joint.
DETAILED DESCRIPTION OF THE INVENTION
[0034] FIG. 1 shows, in schematic form, an embodiment of the
inventive tilting table array, comprising a monolithic tilting
table housing 1 with an integrated tilting table 2 and an
integrated elastic bending joint 3. Via two drive elements 5 and 6
arranged symmetrically to the elastic bending element 3 in a base
plate 4, forces are transmitted to the tilting table 2 so that the
position of an object 7 affixed to the tilting table can be
modified in accordance with the control of the drive elements 5 and
6.
[0035] FIG. 2 shows another exemplary embodiment of the design of a
monolith, comprising a tilting table housing 8, a tilting table 9,
as well as two elastic bending elements 10 and 11. This embodiment
is easily produced by injection molding or die-casting, simply
using open/shut tools without additional couplers, so that the cost
of tools can be kept extremely low.
[0036] An inventive tilting table array for micro-positioning
(oscillating movement) a mirror element 12 is shown in the
exemplary embodiment depicted in FIGS. 3, 4 and 5, the same
reference numbers identifying identical elements.
[0037] FIG. 3 shows the array in a top view from the side facing
away from the mirror element 12 to be positioned (without a base
plate and/or locking lid 13), comprising a tilting table housing 14
with an integrated tilting table 15. The tilting table 15 is
connected to the tilting table housing 14 via two elastic torsion
frames 16 and 17.
[0038] For the purpose of completing the positioning movement on
the tilting table 15, that is, for generating the oscillating
movement of the mirror element 12 (not shown in FIG. 3), a
piezo-actor (piezo motor) 18 is located in the tilting table
housing 14 that acts on one side of the tilting table 15 via a
sphere 19, thereby displacing the tilting table. The counter-force
to the force of the piezo-actor 18 is generated by a compression
spring 20 affixed to the tilting table 15 and the locking lid 13,
as can be seen in FIG. 4 (section 4-4 from FIG. 3).
[0039] An elastic shaping element 29 consisting of a silicone
rubber mass is disposed in the interior space of the compression
spring 20 formed as a spiral spring, limited by the tilting table
15 and a spring guide pin 28 molded to the locking lid 13.
[0040] Prior to the assembly of the locking lid 13, the silicone
rubber mass is injected into the interior space of the spiral
spring 20. During assembly of the locking lid 13, the spring guide
pin 28 dips, without force, into the non-cross-linked silicone
rubber mass that as a result precisely fills the interior space of
the spiral spring 20. Then the silicone rubber mass vulcanizes in a
tension-free manner. Tempering the assembled array accelerates
cross-linking.
[0041] Both the piezo-actor 18 and the locking lid 13 are connected
to the tilting table housing 14 via screw elements 21 and/or
22.
[0042] For the purpose of affixing the mirror element 12 to the
tilting table 15, the surface of the tilting table 15 possesses two
annular contours 23 and 24 that support a pot-shaped object
receiver 25 carrying the mirror element 12.
[0043] The mirror element 12 is initially affixed to the pot-shaped
object receiver 25 by means of tension-free adhesion. Then, as is
more clearly evident from FIG. 5 (section 5-5 taken from FIG. 3),
the pot-shaped object receiver 25 is placed onto the annular
contours 23 and 24 and, following alignment in all degrees of
freedom, connected to the tilting table 15 via an adhesive compound
26.
[0044] FIG. 6 shows a possible embodiment of the elastic connection
between the tilting table 15 and the tilting table housing 14 in
the form of a T-shaped joint 27 embodied as a torsion frame. The
T-shaped joint 27, which, with regard to its torsional rigidity,
depends on its geometric dimensions, such as depth T and length L,
its position in the elastic connection, and the material, is
torsionally soft without bending stiffness being significantly
reduced. Low-frequency components of movement are blocked, thereby
increasing the resonant frequency of the tilting system, which is
decisive for rapid positioning procedures (switching procedures),
especially in the case of optical elements. The adjustment of the
T-shaped joint 27 already takes place during production of the
monolithic unit in an injection molding process using specially
manufactured variable tools. Mechanical retooling is
unnecessary.
LIST OF REFERENCE NUMBERS
[0045] 1, 8, 14 Tilting table housing
[0046] 2, 9, 15 Tilting table
[0047] 3,10, 11 Elastic bending element
[0048] 4 Base plate
[0049] 5, 6 Drive element
[0050] 7 Object
[0051] 12 Mirror element
[0052] 13 Locking lid (base plate)
[0053] 16, 17 Torsion frame
[0054] 18 Piezo-actor (piezo motor)
[0055] 19 Sphere
[0056] 20 Compression spring
[0057] 21, 22 Screw element
[0058] 23, 24 Annular contour
[0059] 25 Pot-shaped object receiver
[0060] 26 Adhesive mass
[0061] 27 T-shaped joint
[0062] 28 Elastic element/silicone rubber mass
[0063] 29 Spring guide pin
* * * * *