U.S. patent application number 11/075263 was filed with the patent office on 2005-07-21 for decomposition apparatus of organic compound, decomposition method thereof, excimer uv lamp and excimer emission apparatus.
This patent application is currently assigned to Quark Systems Co., Ltd.. Invention is credited to Nakamura, Masaru.
Application Number | 20050156497 11/075263 |
Document ID | / |
Family ID | 34528295 |
Filed Date | 2005-07-21 |
United States Patent
Application |
20050156497 |
Kind Code |
A1 |
Nakamura, Masaru |
July 21, 2005 |
Decomposition apparatus of organic compound, decomposition method
thereof, excimer UV lamp and excimer emission apparatus
Abstract
A decomposition apparatus is provided that includes an excimer
lamp emitting UV light for decomposing an organic compound and a
decomposition container provided with the excimer lamp for
decomposing the organic compound in a liquid or a gas. In the
decomposition apparatus, since the UV light irradiated from the
excimer lamp is emitted to the liquid or the gas, the organic
compound in the liquid or the gas can be decomposed easily by the
simple decomposition apparatus and method. The decomposition
apparatus and method are effective to decompose the organic
compound, such as dioxin (polychlorinated dibenzo-para-dioxin), PCB
(polychiorinated biphenyl), trichloroethylene or the like,
polluting the air or water to purify the environment.
Inventors: |
Nakamura, Masaru;
(Chigasaki-shi, JP) |
Correspondence
Address: |
NIXON & VANDERHYE, PC
901 NORTH GLEBE ROAD, 11TH FLOOR
ARLINGTON
VA
22203
US
|
Assignee: |
Quark Systems Co., Ltd.
M. Watanabe & Co., Ltd, JAPAN
|
Family ID: |
34528295 |
Appl. No.: |
11/075263 |
Filed: |
March 9, 2005 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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11075263 |
Mar 9, 2005 |
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09695043 |
Oct 25, 2000 |
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6888041 |
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09695043 |
Oct 25, 2000 |
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09132215 |
Aug 11, 1998 |
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6194821 |
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Current U.S.
Class: |
313/238 |
Current CPC
Class: |
A62D 2203/10 20130101;
B01J 2219/0875 20130101; H01S 3/225 20130101; B01J 2219/0877
20130101; C02F 1/325 20130101; A62D 2101/22 20130101; B01J 19/123
20130101; A62D 3/176 20130101; B01J 2219/0892 20130101; C02F
2101/363 20130101; C02F 2201/328 20130101 |
Class at
Publication: |
313/238 |
International
Class: |
H01J 001/00 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 12, 1997 |
JP |
PO9-28071 |
Dec 26, 1997 |
JP |
P09-360940 |
May 11, 1998 |
JP |
P10-127195 |
May 19, 1998 |
JP |
P10-136229 |
Claims
1. A decomposition apparatus for decomposing an organic compound
fluid such as a gas of an organic compound, a liquid thereof, a gas
containing an organic compound, and a liquid containing an organic
compound, which comprises: an excimer lamp emitting UV light for
decomposing said organic compound, and a decomposition container
provided with an excimer lamp for decomposing said organic compound
in said organic compound fluid.
2. A decomposition apparatus as claimed in claim 1, wherein two or
more decomposition containers each having said excimer lamp are
jointed for flowing said fluid in one container to the other
container in order.
3. A decomposition apparatus as claimed in claim 1, wherein said
container is equipped with a flow rate buffering material for
slowing down a flow rate of said fluid.
4. A decomposition apparatus as claimed in claim 1, wherein said
decomposition container is equipped with a contact part between
said fluid and a catalyst gas for promoting decomposition of the
organic compound.
5. A decomposition apparatus as claimed in claim 1, wherein an
organic compound to be decomposed selected from fan, dioxin
(polychlorinated dibenzo-para-dioxin), PCB (polychlorinated
biphenyl), trichloroethylene, tetrachloroethylene, dichloromethane,
tetrachloromethane, 1,2-dichloroethane, 1,1-dichloroethane,
cis-1,2-dichloroethane, 1,1,1-trichloroethane, 1,3-dichloropropene
and a mixture thereof.
6. A decomposition apparatus as claimed in claim 1, wherein said
excimer lamp comprises: a discharging vessel made of a dielectric
material with excellent permeability of UV light, an inner tube
equipped on the inside of the discharging vessel, a protect tube
equipped on the outside of the discharging vessel, an outer
electrode equipped in the position between the protect tube and the
discharging vessel, an inner electrode equipped on the inside of
the inner tube, a filling gas filled up in said discharging vessel,
and a power supply for applying a voltage between said outer
electrode and said inner electrode.
7. A decomposition apparatus as claimed in claim 6, wherein said
excimer lamp comprises: said power supply applying a high frequency
voltage from 1 to 20 MHz to a metal container and the inner
electrode.
8. A decomposition apparatus as claimed in claim 1, wherein a wave
length of UV light is of 222 nm or below.
9. A decomposition apparatus of an organic compound fluid such as a
gas of an organic compound, a liquid thereof, a gas containing an
organic compound and a liquid containing an organic compound, which
comprises: an excimer emission body equipped with an inner
electrode, a metal container equipped to the outside of said
excimer emission body for filling up at least one selected from a
liquid of an organic compound and a liquid containing organic
compound a power supply for applying a high frequency voltage
between the inner electrode and the metal container, and a UV light
irradiated from said excimer emission body to said liquid in said
metal container allows to generate OH radical and 0 radical in the
liquid, and the radical cutting some bond of the organic compound
so that the organic compound in the liquid is decomposed
easily.
10. A decomposition apparatus as claimed in claim 9, wherein said
excimer emission body comprises: a discharging vessel made of a
dielectric material with excellent permeability of UV light, an
inner tube equipped on the inside of said discharging vessel, an
inner electrode equipped on the inside of said inner tube, and a
filling gas filled up in said discharging vessel.
11. A decomposition apparatus as claimed in claim 9, wherein said
excimer lamp comprises: said power supply applying a high frequency
voltage from 1 to 20 MHz to the metal container and the inner
electrode.
12. A decomposition apparatus as claimed in claim 9, wherein an
organic compound is selected from flon, dioxin (polychlorinated
dibenzo-para-dioxin), PCB (polychlorinated biphenyl),
trichloroethylene, tetrachloroethylene, dichloromethane,
tetrachloromethane, 1,2-dichloroethane, 1,1-dichloroethane,
cis-1,2-dichloroethane, 1,1,1-trichloroethane, 1,3-dichloropropene
and a mixture thereof.
13. A decomposition apparatus as claimed in claim 9, wherein a wave
length of UV light is of 222 nm or below.
14-24. (canceled)
Description
BACKGROUND OF THE INVENTION
[0001] The present invention relates to a decomposition apparatus
of an organic compound by emission of an ultraviolet (UV) light
which is irradiated from an excimer lamp, a decomposition method
thereof and an excimer lamp and an excimer emission apparatus which
may suitable be used for the decomposition apparatus and the
decomposition method.
[0002] An organic compound causing air pollution or water pollution
can be decomposed or eliminated by an activated carbon adsorption
treatment, an oxidation decomposition treatment, an activated
sludge treatment, a bio-oxidation treatment or the like. Among the
treatments described above, the activated carbon adsorption
treatment may suitable be used for the elimination of the organic
compound causing water pollution.
[0003] As the problem of the activated carbon adsorption treatment,
a high-priced activated carbon is generally used and therefore the
activated carbon makes it necessary to recycle; a handling of the
activated carbon is not easy since the activated carbon is of
powdery; an apparatus of the activated carbon adsorption treatment
is of comparatively large scale; a recycling treatment of the
activated carbon and maintenance of the apparatus need much labors
and costs.
[0004] Recently, we are in dilemma how to solve the problem
described above. Therefore, a method and an apparatus for
decomposing easily the organic compound causing air pollution or
water pollution at a low cost is requested.
SUMMARY OF THE INVENTION
[0005] The present invention was made in view of the
above-mentioned circumstances. An object of the present invention
is therefore to provide a decomposition apparatus by emission of a
UV light which is irradiated from an excimer lamp, a decomposition
method thereof and an excimer lamp and an excimer emission
apparatus which may suitable be used for a decomposition apparatus
and a decomposition method of an organic compound.
[0006] For the purpose of attainment of the above-mentioned object
of the present invention, a decomposition apparatus for decomposing
an organic compound fluid such as a gas of an organic compound, a
liquid thereof, a gas containing an organic compound and a liquid
containing an organic compound is decomposed. The decomposition
apparatus comprises an excimer lamp emitting UV light for
decomposing the organic compound, a decomposition container
provided with an excimer lamp for decomposing the organic compound
in the organic compound fluid. In the decomposition apparatus of
the present invention, two or more decomposition container each
having the excimer lamp may be jointed for flowing the fluid in the
container to other container in order, and the organic compound in
the fluid can be effectively decomposed. In case of the
above-mentioned apparatus, it is preferable that the container is
provided with a flow rate buffering material for slowing down a
flow rate of the fluid. It is preferable that a contact part
between the fluid and a catalyst gas for promoting decomposition of
the organic compound is equipped to the decomposition container.
The excimer lamp, which may suitable be used for the decomposition
apparatus, comprises a discharging vessel made of a dielectric
material with excellent permeability of a UV light, an inner tube
equipped on the inside of the discharging vessel, a protect tube
equipped on the outside of the discharging vessel, an outer
electrode equipped in the position between the protect tube and the
discharging vessel, an inner electrode equipped on the inside of
the inner tube, a filling gas filled up in the discharging vessel
and a power supply for applying a voltage between the outer
electrode and the inner electrode.
[0007] A decomposition apparatus for decomposing an organic
compound in second mode of the present invention comprises an
excimer emission body equipped with an inner electrode, a metal
container equipped to the outside of the excimer emission body for
filling up at least one selected from a liquid of an organic
compound and a liquid containing organic compound, and a power
supply for applying a high frequency voltage between the inner
electrode and the metal container, and a UV light irradiated from
the excimer emission body to the liquid in the metal container
allows to generate OH radical and O radical into the liquid, and
the radical cuts some bond of the organic compound so that the
organic compound in the liquid is decomposed easily. It is
preferable that the excimer emission body comprises a discharging
vessel made of a dielectric material with excellent permeability of
a UV light, an inner tube equipped on the inside of the discharging
vessel, an inner electrode equipped on the inside of the inner tube
and a filling gas filled up in the discharging vessel. It is
preferable that the power supply applies a high frequency voltage
from 1 to 20 MHz to the metal container and the inner
electrode.
[0008] The organic compound used may be selected from flon, dioxin
(polychlorinated dibenzo-para-dioxin), PCB (polychlorinated
biphenyl), trichloroethylene, tetrachloroethylene, dichloromethane,
tetrachloromethane, 1,2-dichloroethane, 1,1-dichloroethane,
cis-1,2-dichloroethane, 1,1,1-trichloroethane, 1,3-dichloropropene
and the mixture thereof. It is preferable that the UV light of
wavelength of 222 nm or below may suitable be used.
[0009] A decomposition method for decomposing an organic compound
of the present invention may be used in the decomposition apparatus
described above, and comprises steps of flowing a fluid which is
selected from a gas of an organic compound, a liquid thereof, a gas
containing an organic compound and a liquid containing an organic
compound during the emission of a UV light which is irradiated from
the excimer lamp, and decomposing the organic compound in fluid
during its flowing. In this case, it is preferable that the fluid
flows slowly in a flow rate buffering material during the emission
of UV light. And, it is preferable that the fluid contacts a
catalyst for promoting the decomposition of an organic compound
during the emission of UV light. The organic compound used may be
selected from flon, dioxin (polychlorinated dibenzo-para-dioxin),
PCB (polychlorinated biphenyl), trichloroethylene,
tetrachloroethylene, dichloromethane, tetrachloromethane,
1,2-dichloroethane, 1,1-dichloroethane, cis-1,2-dichloroethane,
1,1,1-trichloroethane, 1,3-dichloropropene and the mixture thereof.
It is preferable that the UV light of wave length of 222 nm or
below may suitable be used.
[0010] An excimer lamp, which may suitable be used for the
decomposition apparatus and the decomposition method described
above, comprises a discharging vessel made of a dielectric material
with excellent permeability of UV light, an inner tube equipped on
the inside of the discharging vessel, an outer electrode equipped
on the outside of the discharging vessel, an inner electrode
equipped on the inside of the inner tube and a filling gas filled
up in the discharging vessel, and a UV light is preferably
irradiated from the excimer lamp by which a high frequency voltage
is applied between the outer electrode and the inner electrode from
1 to 20 MHz. In this case, it is preferable that the inner tube is
cooled by a nitrogen gas flowed in the inner tube. It is preferable
that d/D ratio, in which the "d" is an inner diameter of the inner
tube and the "D" is an outer diameter of the inner electrode, is of
from 1.1 to 3.0, and that L/D ratio, in which the "L" is a length
of the inner electrode and the "D" is an outer diameter of the
inner electrode, is of from 10 to below 30.
[0011] An U-shaped inner tube of at least one or above, as the
inner tube, may be equipped on the inside of the discharging
vessel.
[0012] An excimer emission apparatus comprises the excimer lamp
described above, a power supply for applying a high frequency
voltage from 1 to 20 MHz between the outer electrode and the inner
electrode and a circulating cooling apparatus by the nitrogen gas
to cool the inner tube. In this case, it is preferable that d/D
ratio, in which the "d" is an inner diameter of the inner tube and
the "D" is an outer diameter of the inner electrode, is of from 1.1
to 3.0, and that L/D ratio, in which the "L" is a length of the
inner electrode and the "D" is an outer diameter of the inner
electrode, is of from 10 to below 30.
BRIEF DESCRIPTION OF THE DRAWINGS
[0013] FIG. 1 shows a schematic view illustrating a first
embodiment of a decomposition apparatus (A) of the present
invention.
[0014] FIG. 2 shows a schematic view illustrating a second
embodiment of a decomposition apparatus (B) of the present
invention.
[0015] FIG. 3 shows a schematic longitudinal cross sectional view
illustrating an embodiment of an excimer lamp used for the
decomposition apparatus of the present invention.
[0016] FIG. 4 shows a schematic view illustrating a third
embodiment of a decomposition apparatus (C) of the present
invention.
[0017] FIG. 5 shows a schematic view illustrating a fourth
embodiment of a decomposition apparatus (D) of the present
invention attached the excimer lamp.
[0018] FIG. 6 shows a schematic perspective view illustrating an
embodiment of an excimer lamp used for the decomposition apparatus
(C) in FIG. 4.
[0019] FIG. 7 shows a schematic view illustrating a fifth
embodiment of a decomposition apparatus (E) of the present
invention.
[0020] FIG. 8 shows a schematic view illustrating a sixth
embodiment of a decomposition apparatus (F) of the present
invention in.
[0021] FIG. 9 shows a schematic view illustrating a seventh
embodiment of a decomposition apparatus (G) of the present
invention.
[0022] FIG. 10 shows a schematic perspective view illustrating an
embodiment of a flow rate buffering material.
[0023] FIG. 11 shows a schematic view illustrating an embodiment of
a manner of flowing of the liquid to the flow rate buffering
material.
[0024] FIG. 12 shows a schematic view illustrating an eighth
embodiment of a decomposition apparatus (H) of the present
invention.
[0025] FIG. 13 shows a schematic perspective view illustrating an
embodiment of a part of the inlet side of gas in the decomposition
apparatus (H) shown in FIG. 12.
[0026] FIG. 14 shows a schematic longitudinal cross sectional view
illustrating an embodiment of the flow rate buffering material for
the gas in FIG. 12.
[0027] FIG. 15 shows a schematic view illustrating a ninth
embodiment of an decomposition apparatus (I) of the present
invention.
[0028] FIG. 16 shows a schematic longitudinal cross sectional view
illustrating a tenth embodiment of a decomposition apparatus (J) of
the present invention.
[0029] FIG. 17 shows a schematic longitudinal cross sectional view
illustrating an embodiment of a excimer lamp of the present
invention.
[0030] FIG. 18 shows a schematic cross sectional view illustrating
an embodiment of the relationship between the inner tube and the
inner electrode of the excimer lamp of the present invention.
[0031] FIG. 19 shows an schematic longitudinal cross sectional view
illustrating an embodiment of an excimer lamp of the present
invention.
[0032] FIG. 20 shows an schematic longitudinal cross sectional view
illustrating an embodiment of an excimer lamp of the present
invention.
[0033] FIG. 21 shows a schematic cross sectional view illustrating
an embodiment of the relationship between the inner tube and the
inner electrode of the excimer lamp of the present invention.
[0034] FIG. 22 shows a schematic cross sectional view illustrating
an embodiment of the relationship between the inner tube and the
inner electrode of the excimer lamp of the present invention.
[0035] FIG. 23 shows a schematic cross sectional view illustrating
an embodiment of the relationship between the inner tube and the
inner electrode of the excimer lamp of the present invention.
[0036] FIG. 24 shows a schematic longitudinal cross sectional view
illustrating an embodiment of the excimer lamp of the present
invention.
[0037] FIG. 25 shows a schematic cross sectional view in
perpendicular direction to lengthwise direction illustrating an
embodiment of the excimer lamp as shown in FIG. 24.
[0038] FIG. 26 shows a schematic cross sectional view illustrating
an embodiment of the U-shape inner tube used for the excimer lamp
of the present invention.
[0039] FIG. 27 shows a schematic longitudinal cross sectional view
illustrating an embodiment of an excimer lamp of the present
invention.
[0040] FIG. 28 shows a schematic cross sectional view illustrating
an embodiment of an excimer lamp in FIG. 27.
[0041] FIG. 29 shows a schematic view illustrating an embodiment of
an excimer generating apparatus of the present invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0042] The present invention will now be explained with reference
to figures.
[0043] A decomposition apparatus for decomposing an organic
compound in first mode of the present invention will be explained.
FIG. 1 shows a schematic view illustrating a first embodiment of a
decomposition apparatus of the present invention. In FIG. 1, the
decomposition apparatus A comprises an excimer lamp 1 and a
decomposition container 2. The excimer lamp 1 is equipped to the
decomposition container 2 to immerse in a liquid 3 of at least one
selected from a liquid of an organic compound and a liquid
containing an organic compound. The organic compound in liquid 3 is
decomposed by emission of UV light irradiated from the excimer lamp
1.
[0044] The organic compound may suitable be selected from flon,
dioxin (polychlorinated dibenzo-para-dioxin), PCB (polychlorinated
biphenyl), trichloroethylene, tetrachloroethylene, dichloromethane,
tetrachloromethane, 1,2-dichloroethane, 1,1-dichloroethane,
cis-1,2-dichloroethane, 1,1,1-trichloroethane, 1,3-dichloropropene
and the mixture thereof. All of the organic compound described
above pollutes air or water and has a strong bond between carbon
and chlorine. However, the organic compound in the liquid 3 can be
decomposed easily by emission of the UV light irradiated from the
excimer lamp 1 according to the present invention. The
decomposition apparatus can decompose an organic halogen compound
containing halogens element such as fluorine element or bromine
element besides the organic compound described above.
[0045] The form of the container 2 is not limited to that of the
container 2 in FIG. 1. It is preferable to use the container 2 in
which the material thereof is unreactive to the liquid 3 and the UV
light irradiated from the excimer lamp 1 for example stainless
steel or the like. The container 2 may be provided with an
attachment hole 10 of the excimer lamp 1, an exhaust hole 5 of a
decomposed gas 4 and an exhaust tube with carbon filter to exhaust
gas. The container 2 may be provided with a mixer which is a
stirrer with a stirrer chip 9 or a propeller mixer, to decompose
efficiently.
[0046] FIG. 2 shows a schematic view illustrating a second
embodiment of a decomposition apparatus (B) of the present
invention. In the decomposition apparatus B as shown in FIG. 2, two
or more containers 2 each having the excimer lamp 1 may be joints
for flowing the fluid in one container to the other container in
order. In the decomposition apparatus B, the liquid 3 is emitted by
light irradiated from the excimer lamp 1 during flowing in the
container 2 so that the organic compound in the liquid 3 is
decomposed continuously and efficiently. According to the
decomposition apparatus (B), the efficiency of decomposition and
the quantity of decomposition treatment of the organic compound can
be improved.
[0047] FIG. 3 shows a schematic longitudinal cross sectional view
illustrating an embodiment of an excimer lamp used for the
decomposition apparatus of the present invention. As shown in FIG.
1 and FIG. 2, the excimer lamp 1 is equipped to the container 2 to
immerse in the liquid 3. The excimer lamp 1 comprises a discharging
vessel made of a dielectric material with excellent permeability of
UV light, an inner tube equipped on the inside of the discharging
vessel, an outer electrode equipped on the outside of the
discharging vessel, an inner electrode equipped on the inside of
the inner tube and a filling gas filled up in the discharging
vessel, and a UV light is preferably irradiated from the excimer
lamp 1 by which a high frequency voltage is applied between the
outer electrode and the inner electrode from 1 to 20 MHz. A power
supply (no illustrating in figures) for applying a voltage of the
high frequency between the outer electrode 34 and the inner
electrode 35 of the excimer lamp 1, is equipped to the
decomposition apparatus. The irradiated UV light is emitted in all
directions from a surface of the excimer lamp 1 by the applying
voltage. The detail of constitution of the excimer lamp 1 will be
explained afterwards. The excimer lamp 1 may be provided with a
supporting member 38 comprising a attachment member 37 for fitting
the excimer lamp 1 to the container 2. The excimer lamp 1 may be
attached anywhere and may be possible to desorb.
[0048] The excimer lamp 1 can irradiate the UV light of the
different wavelength such as 172 nm, 222 nm and 308 nm based on a
kind of the filling gas. To the decomposition of the organic
compound, it is preferable to emit the UV light of wavelength of
222 nm or below, for example 172 nm and 222 nm, to the organic
compound. By the emission of UV light of wavelength of 222 nm or
below, many exited oxygen atom is generated directly from oxygen in
the liquid or air and have a strong oxidation force. Furthermore,
since the UV light has the strong photon energy, a bond such as
C--C, C--O, C--H and C--Cl of the organic compound is cut easily,
the organic compound is decomposed by which the exited oxygen atoms
attacks the position of the bond so that a decomposed material such
as CO.sub.2, H.sub.2O or the like is generated. In FIG. 1, the
decomposed material is released from the liquid 3 as the
decomposition gas 4 and is exhausted through the exhaust tube 5 of
the container 2.
[0049] FIG. 4 and FIG. 5 show a schematic view illustrating third
and fourth embodiments of a decomposition apparatus C, D equipped
with the excimer lamp unit 41, 51, which has excimer lamp, for
emitting the liquid 3 into the container 42, 52. In FIG. 4 and FIG.
5, the excimer lamp unit 41, 51 of at least one or above are
equipped on the sides of the containers 42, 52.
[0050] FIG. 6 shows a schematic perspective view illustrating an
embodiment of an excimer lamp unit 41 used for the decomposition
apparatus C in FIG. 4. The excimer lamp unit 41 has the excimer
lamp 1 in a protect box 61 with one open window 62 and can be
attached to the position 43 of the container 42 by an attachment
member 63. According to the decomposition apparatus, the organic
compound in the liquid 3 is decomposed by emission of the UV light
irradiated from the excimer lamp 1.
[0051] As shown in the decomposition apparatus D of FIG. 5, at
least one ring-shape excimer lamp unit 51 is equipped to the
cylinderic container 52.
[0052] FIG. 7 shows a schematic view illustrating a fifth
embodiment of a decomposition apparatus E to decompose the organic
compound in gas 72, which is evaporated by heat of the liquid 3, by
emission of the UV light irradiated from the excimer lamp unit 71
which has excimer lamp. The kind of the heat apparatus 72, the
position of the attachment thereof and the heating manner of the
heat apparatus are not particularly limited. It is preferable that
the excimer lamp 71 is equipped on the top plate of the container
72 to emit the gas 74 which may be either the gas of organic
compound or the gas containing the organic compound.
[0053] FIG. 8 shows a schematic view illustrating a sixth
embodiment of a decomposition apparatus F in which a route of a
catalyst gas for promoting the decomposition of the organic
compound is equipped to the container 82. The amount of flowing of
the catalyst gas 86 is controlled by the flow control valve 89
equipped to the exit of the catalyst gas cylinder 80. The gas 74
evaporated from liquid comprising the organic compound, and
catalyst gas 86 is contacted at a contact part 88 of the route 84
of the catalyst gas. The contact part 88 can be equipped with a
contact material such as a net-shape material. When a pressure of
the catalyst gas 86 in the route 84 is slightly higher than that of
the gas 74 in the container 58, the catalyst gas 86 and the gas 74
can be contacted at just outside of the route 84 of the catalyst
gas. The catalyst gas 86 may be circulated as shown in FIG. 8. A
contact material with a catalyst powder may be equipped to the
contact part 88 instead of the catalyst gas 86. Consequently, under
the condition described above, the gas 74 is easily decomposed by
emission of the UV light irradiated from the excimer lamp unit 71.
The decomposed gas 85 is exhausted from the exhaust part 5 with the
carbon filter 8. According to the decomposition apparatus, the
efficiency of decomposition of the organic compound can be
improved.
[0054] As the catalyst gas 86 or powder, it is preferable to use
that of titanium oxide, magnesium oxide or the like, and the
titanium in the titanium oxide or the magnesium in the magnesium
oxide attacks the bonded part of C--Cl in particular so that the
bonded part of that is cut easily.
[0055] FIG. 9 shows a schematic view illustrating a seventh
embodiment of a decomposition apparatus G. As the decomposition
apparatus G, the organic compound is decomposed by emission of the
UV light during the liquid 3 of the organic compound flows down in
the flow rate buffering material 93 which is equipped on the
position in the neighborhood of the surface of excimer lamp unit 91
which has excimer lamp, in the container. The amount of flowing of
the liquid 3 is controlled by the flow control valve 96 equipped to
the flowing tube 95. The liquid 3 flows down slowly through the
flow rate buffering material 93 from the inlet 97 to the container
92. The organic compound in the liquid 3 is decomposed by emission
of the UV light irradiated from the excimer lamp unit 91. When the
organic compound can not be decomposed sufficiently, a treated
liquid 101 is restored to the standing container 99, and is pumped
by the circulation pump 104 equipped to the circulation tube 102 to
restore in the container 94, and the organic compound in the liquid
3 is decomposed again thereafter. When the liquid flows down slowly
in the flow rate buffering material 93 by the control of the flow
control valve 96, the organic compound in the liquid 3 can be
decomposed efficiently by emission of the UV light.
[0056] As the flow rate buffering material 93, it is preferable
that the unreactive material on the UV light and the liquid 3, for
example quartz, glass fiber, stainless steel or the like, is used
and is worked in a net-shape, an asbestos-shape or a bundle-shape.
FIG. 10 shows a schematic perspective view illustrating an
embodiment of a flow rate buffering material. In FIG. 10, (a) shows
the net-like flow rate buffering material 105, (b) shows the
asbestos-shape flow rate buffering material 106.
[0057] When the liquid 3 flows down in the flow rate buffering
material 93, as shown in FIG. 11, the liquid 3 passes the flow rate
control valve 96 and the inlet tube 97, is separated by a separated
tube 111 and flows down in the wide flow rate buffering material
93. By the flow rate buffering material described above, the
efficiency of decomposition of the organic compound is improved
since a large amount of the liquid 3 can flow down in the flow rate
buffering material 93.
[0058] In FIG. 9, the catalyst gas 86 may flow into the
decomposition apparatus G to improve the efficiency of
decomposition of the organic compound. The catalyst gas 86
described above, which promotes the decomposition of the organic
compound in the liquid 3, and the liquid 3 is contacted at the flow
rate buffering material 93. The decomposed gas 4 and the catalyst
gas 86 may be exhausted from the outlet 5 by absorption of the pump
103. A contact material with the catalyst powder described above
may be equipped to the flow rate buffering material 93 instead of
the catalyst gas 86. The material of the catalyst gas 86 and powder
is the same as that described above.
[0059] FIG. 12 shows a schematic view illustrating an eighth
embodiment of a decomposition apparatus H for decomposing the gas
120 which is either the gas of the organic compound or the gas
containing the organic compound. The organic compound in the gas
120 is decomposed by emission of UV light irradiated from the
excimer lamp unit 121, which has excimer lamp, during flowing up in
the flow rate buffering material 126 which is equipped on the
position in the neighborhood of the surface of the excimer lamp
unit 121 in the container 122.
[0060] For improving the efficiency of decomposition of the organic
compound, the gas 120 may flow up slowly in the flow rate buffering
material 126 by the control of the flow rate control valve 125 or
the adsorption pump 124. The flow rate buffering material 126 is
the same as that described above. When the decomposition apparatus
is not equipped with the flow rate buffering material 126, the
organic compound in the gas 120 can be decomposed by the control of
the flow rate.
[0061] In order to improve the efficiency of decomposition of the
organic compound in the gas, it is preferable that the gas 120
flows with the same catalyst gas as that described above and passes
in the flow rate buffering material with the same catalyst powder
as that described above.
[0062] FIG. 13 shows a schematic perspective view illustrating an
embodiment of a part on the inlet side of gas 120 in the
decomposition apparatus H shown in FIG. 12. The upper part of the
container 120 is equipped with a cylinder 131 of the gas 120, an
inlet tube 133 of the gas 120, a flow rate control valve 132 of the
gas 120, a cylinder 134 of the catalyst gas 86, an inlet tube 136
of the catalyst gas 86, and a flow rate control valve 135 of the
catalyst gas 86.
[0063] FIG. 14 shows a schematic longitudinal cross sectional view
illustrating an embodiment of the flow rate buffering material 126
used in FIG. 12. In FIG. 14, (a) is the hound's-tooth-shape flow
rate buffering material 126a which is provided with the hindrance
plate 141 of hound's-tooth in the container 122, (b) is the
net-shape flow rate buffering material 126b which is provided with
the net-shape member 142 of wave-shape in the container 122. The
flow rate buffering material 126 used in FIG. 14 may be used in the
same manner as that of the flow rate buffering material 105, 106 as
shown in FIG. 10.
[0064] FIG. 15 shows a schematic view illustrating a ninth
embodiment of a decomposition apparatus I provided with the route
150 of the catalyst gas in the decomposition apparatus shown in
FIG. 12. The route 150 of the catalyst gas is equipped to the
container in the neighborhood of the flow rate buffering material
126 so that the catalyst gas promotes the decomposition of the
organic compound in the gas 86 on the contacting part 151. In the
decomposition apparatus I, the catalyst gas 120 and the gas 86
flows to the container through the different route. Therefore, in
order to mix the gas 86 and the catalyst gas 120 in the container,
it is preferable that a pressure of the catalyst gas 86 in the
route 150 of the catalyst gas is slightly higher than that of the
gas 3 in the route of the gas 3. The catalyst gas 120 flows from
holes of the contacting part 151 to the flow rate buffering
material 126. The decomposed gas 123 is exhausted through the
adsorption pump 124. The catalyst gas 120, except the catalyst gas
flowed in the flow rate buffering material 126, is exhausted
through the outlet part 153 of the catalyst gas. The catalyst gas
120 exhausted through an outlet part 153 may be used again by the
circulation. The flowing direction of the catalyst gas 120 may be
opposed to the direction of flow of the gas 86. The other
numericals are the same as those in figures described above.
[0065] According to the decomposition apparatus of the first mode
of the present invention described above, since the UV light
irradiated from excimer lamp or excimer lamp unit is emitted to the
liquid or the gas containing the organic compound, the organic
compound in the liquid or the gas can be decomposed easily by the
simple decomposition apparatus and method. The decomposition
apparatus and method are effective to decompose the organic
chloride compound polluting the air or water, to purify the
environment.
[0066] Next, a decomposition apparatus for decomposing the organic
compound in the second mode of the present invention will be
explained below. FIG. 16 shows a schematic longitudinal cross
sectional view illustrating another embodiment of a decomposition
apparatus J. In FIG. 16, the decomposition apparatus J comprises an
excimer emission body 161 equipped with an inner electrode 35, a
metal container 162 equipped to the outside of the excimer emission
body 161 for filling up at least one selected from a liquid of an
organic compound and a liquid containing organic compound, and a
power supply for applying a high frequency voltage between the
inner electrode 35 and the metal container 162.
[0067] The UV light is irradiated from the excimer emission body
136 by the applying of the voltage of the suitable frequency
between the inner electrode 35 and the metal container 162 so that
UV light is emitted to the liquid 3. The metal container 162 acts
as the outer electrode shown in FIG. 3 so that the applying of
voltage between the metal container 162 and the inner electrode 35
generates the high frequency discharge to irradiate the UV light.
Although the UV light of wavelength of 222 nm or below is not
generated the ozone in the liquid 3 or air, the UV light allows to
generate the high reactive OH radical or O radical in the liquid 3.
The radical cuts some bond of the organic compound so that the
organic compound in the liquid 3 is decomposed efficiently to the
decomposed material of CO.sub.2, H.sub.2O and so.
[0068] The excimer emission body 161 comprises the discharging
vessel 31 made of the dielectric material with excellent
permeability of UV light, the inner tube 32 equipped on the inside
of the discharging vessel 31, the inner electrode 35 equipped on
the inside of the inner tube 32 and the filling gas 36 filled up in
the discharging vessel 31. The form of the excimer emission body
161 is not limited in particularly. The excimer emission body 161
is the same as that of the excimer lamp 1 of the decomposition
apparatus of the first mode described above, except the
displacement of the outer electrode 34 to the metal container 162
and to be not equipped with the protect tube 33. The decomposition
apparatus shown in FIG. 3 is provided with the outer electrode 34
to the outer side of the discharging vessel 31 in usual. However,
the decomposition apparatus J shown in FIG. 16 is provided with the
metal container 162 filled up the liquid on the outer side of the
excimer emission body 161. The metal container 162 acts as the
outer electrode. The UV light is emitted to the liquid 3
efficiently because of without the outer electrode, and therefore,
the decomposition apparatus can improve the efficiency of
decomposition of the organic compound. The component part equipped
to the excimer emission body 161 is described below.
[0069] A nitrogen gas 164 may flow on the inside of the inner tube
32 of the excimer emission body 161 to cool. The kind of the
nitrogen gas 164 is not limited particularly. The commercial
nitrogen gas may be used. The inner tube 32 can be cooled
sufficiently by flowing of the nitrogen gas 164 at a low
temperature cooled by the heat exchanger (no illustrating in
figures). The circulating cooling apparatus (no illustrating in
figures) of the nitrogen gas is equipped to the decomposition
apparatus J for supplying the nitrogen gas 164. The inner tube 32
can be prevented from deterioration so that the lifetime of the
excimer emission body 161 can be improved.
[0070] As the metal container 162, it is preferable to use the
stainless steel or the like which has a high conductivity and high
corrosion resistance to the liquid 3 containing the organic
compound. The metal container 162 has the property of shielding
(so-called: EMI shield property) on the high frequency
electromagnetic wave irradiated from the excimer emission body
161.
[0071] The voltage between the metal container 162 and the inner
electrode 35 is of any frequency to irradiate the suitable amount
of emission of UV light. It is preferable to apply the high
wavelength voltage from 1 to 20 MHz. The detailed explanation is
described below. A position and a manner of attachment of the
excimer generator 161 are not limited.
[0072] According to the decomposition apparatus described above, as
the metal container 162 acts as the outer electrode and the
container for filling the liquid 3, the construction of the
decomposition apparatus can be simple. As the UV light is not
hindered by the outer electrode, the liquid is emitted by the UV
light sufficiently. As the large amount of OH radical or O radical
generates in the liquid, the bond of the organic compound is cut
efficiently so that the organic compound is decomposed easily.
[0073] Next, an excimer lamp and an excimer emission apparatus used
for the decomposition apparatus or the decomposition method of the
organic compound described above will be explained by the reference
in figures.
[0074] An excimer lamp will be explained below. FIG. 17 shows a
schematic longitudinal cross sectional view illustrating an
embodiment of an excimer lamp of the present invention. The excimer
lamp 171, such as explained in FIG. 3, comprises the discharging
vessel 31 made of a dielectric material with excellent permeability
of UV light, the inner tube 32 equipped on the inside of the
discharging vessel 31, the outer electrode 34 equipped on the
outside of the discharging vessel 31, the inner electrode 35
equipped on the inside of the inner tube 32 and the filling gas 36
filled up in the discharge vessel 31. The UV light is preferably
irradiated from the excimer lamp 171 by which a high frequency
voltage is applied between the outer electrode and inner electrode
32 from 1 to 20 MHz. The UV light is emitted from the excimer lamp
171 to the liquid. A protect tube (no illustrating in figures) may
be equipped on the outside of the discharging vessel 31. The outer
electrode 34 may be equipped to the position between the protect
tube and the discharging electrode 34. The discharging vessel and
the protect tube may be made of dielectric material with
permeability of the UV light. It is preferable to use a quartz or a
synthetic quartz with a high permeability.
[0075] The filling gas 36 is filled in the discharging vessel 31
for discharging the excimer lamp 171. The wavelength of the UV
light varies by the kind of the filling gas. As the filling gas 36,
it is preferable to use the gas of He, Xe, Kr, Ar, ArF, ArCl, KrF,
XeF, XeCl, XeBr, F.sub.2--Kr--He or the like. A pressure and a kind
of gas in the discharging vessel 31 are determined by the suitable
condition to obtain a required wavelength and a required amount of
irradiation of UV light. It is preferable to fill the pressure of
from 10 to 60 kPa. The other things are explained in FIG. 3.
[0076] The inner tube 32 also uses a quartz or a synthetic quartz
with dielectric. It is preferable that the inner tube 32 is
equipped to the center of the discharging vessel 131 so that the
excimer lamp can be uniformly emitted the UV light on the around of
the inner tube 32. As shown in FIG. 16, the nitrogen gas 164 flows
in the inner tube 32. Since the inner tube 32 is cooled by the
nitrogen gas 164, the deterioration of the inner tube 31 can be
prevented and is the same as that of the discharging vessel 31 so
that the lifetime of the excimer lamp can be improved.
[0077] FIG. 18 shows a schematic cross sectional view illustrating
an embodiment of the relationship between the inner tube and the
inner electrode of the excimer lamp of the present invention. It is
preferable that d/D ratio, which the "d" is an inner diameter of
the inner tube and the "D" is an outer diameter of the inner
electrode 35, is from 1.1 to 3.0 for flowing the nitrogen gas 164
in the inner tube 32 easily. When the d/D ratio is below 1.1, the
space between the inner tube 32 and the inner electrode is not
enough so that the nitrogen gas 164 can not flow in the inner tube
32 and the inner tube 32 can not be enough cooled by the nitrogen
gas 164. When the d/D ratio is above 3.0, the nitrogen gas 164
flows easily so that the inner tube 32 is cooled sufficiently. In
this case, however, it is not preferable that the outer diameter of
the inner tube becomes thick and that of the excimer lamp becomes
thick, too, or the excimer lamp can not be discharged uniformly
since the outer diameter of the inner electrode 35 becomes thin.
Therefore, the d/D ratio is limited from 1.1 to 3.0.
[0078] As the inner electrode 31, it is preferable to use stainless
steel, aluminum, aluminum alloy, copper, copper oxide, alloy
containing of copper, alloy containing copper oxide or the like.
The inner electrode 35 does contact the filling gas 36 so that the
high frequency discharge happens on all parts of the inner tube
32.
[0079] FIG. 19 and FIG. 20 show an schematic longitudinal cross
sectional view illustrating an embodiment of an excimer lamp of the
present invention, respectively. FIG. 21 to FIG. 23 show a
schematic cross sectional view illustrating an embodiment of the
relationship between the inner tube and the inner electrode of the
excimer lamp of the present invention.
[0080] When both ends of the inner tube 192 are open, it is
preferable to use the rod-shaped inner electrode 35. As a result,
the inner tube 192 can be cooled sufficiently because of flowing
easily the nitrogen gas 164 from one end side to the other end
side. When one end of the inner tube 35 is closed, it is preferable
to use the hollow pipe-shape inner electrode 211 (as shown in FIG.
21). As a result, the inner tube 32 can be cooled sufficiently
since the nitrogen gas 164 flows from the inside of the electrode
211 to the outside of the electrode 211. When the form of the inner
electrode is the hollow pipe-shaped, it is preferable that d/D
ratio, in which the "d" is a inner diameter of the inner tube 32
and the "D" is an outer diameter of the hollow pipe-shape inner
electrode 211, is in the range of that described above.
[0081] When one end of the inner tube 32 is closed, the rod-shape
inner electrode may be used. As shown in FIG. 22, the insertion
tube 221 may be inserted to the suitable position along the inner
electrode 35 so that the nitrogen gas 164 can flow in the inner
tube 32 easily. Furthermore, as shown in FIG. 23, the inner
electrode 231 of the flat-shape may be used for separating the
inlet-side and the outlet-side of the nitrogen gas 164 so that the
nitrogen gas 164 can flow in the inner tube 32 easily.
[0082] It is preferable that L/D ratio, in which the "L" is a
length of the inner electrode 35, 211, 221 and the "D" is an outer
diameter of the inner electrode, is of from 10 to below 30. The
length L of the inner electrode is in proportion to that of the
excimer lamp 1, 161, 171, 191, 201, and the length of the inner
electrode is determined by that of the excimer lamp. With the
increase of the outer diameter D of the inner electrode, the outer
diameter of the inner tube and the discharging vessel becomes thick
so that the outer diameter of the excimer lamp becomes thick,
too.
[0083] When the L/D is below 10, the inner tube is cooled
sufficiently by the nitrogen gas flowed in the inner tube since the
outer diameter of the inner electrode and the excimer lamp becomes
thick. Consequently, the efficiency of emission of the UV light is
not improved since the surface area of the excimer lamp
decreases.
[0084] When the L/D is 30 or above, the inner tube becomes longer,
and the nitrogen gas cannot flow sufficiently in the inner tube so
that the inner tube is not cooled sufficiently. Therefore, the L/D
is limited from 10 to 30 below.
[0085] As the outer electrode 34, it is preferable to use a
material made of stainless steel, aluminum or the like. Any
electrode of punching metal shape, mesh shape or net shape may be
equipped around of the discharging vessel 31. The electrode of rod
shape or oblong shape may be equipped lengthwise of the discharging
vessel 31. When the electrode of punching metal shape, mesh shape
or net shape is used, the shield property of the excimer lamp is
improved on an electromagnetic wave of high frequency (so-called:
EMI shield). When the electrode of the rod shape or the oblong
shape is used, the UV light is emitted from the surface of the
excimer lamp sufficiently since a large amount of the UV light can
irradiate from the excimer lamp.
[0086] In the excimer lamp, a protect tube may be provided on the
outer side of the outer electrode 34, if necessary, and a nitrogen
gas may introduced into the space between the protect tube and the
discharging vessel 31.
[0087] The amount of the UV light increases with the applying of
high frequency voltage so that the efficiency of irradiation of the
UV light increases. Therefore, since the thermal efficiency of the
excimer lamp and the irradiation efficiency of UV light is high,
the excimer lamp can save electricity and is of economical. It is
preferable that the frequency of voltage applied to the excimer
lamp is of from 1 to 20 MHz, particularly of from 5 to 16 MHz,
furthermore preferably of from 11 to 15 MHz. In this case, it is
preferable that the high frequency voltage outputted from the power
supply 163 is of from 0.1 to 10 V, particularly of from 0.1 to 5 V.
When the voltage is below 0.1 V, the large amount of the UV light
can not irradiate since the high frequency discharge can not happen
between the outer electrode 34 and the inner electrode 35
sufficiently. When the voltage is above 10V, the amount of the UV
light saturates so that the irradiation efficiency of the UV light
does not increase and the excimer lamp does not save
electricity.
[0088] According to the excimer lamp of the present invention,
since the inner tube is cooled by flowing the nitrogen gas, the
deterioration of the inner tube can be prevented and is the same as
that of the discharging vessel so that the lifetime of the excimer
lamp can be improved. The excimer lamp, which can irradiate the UV
light of wave length of 222 nm or below, can prevent the
deterioration of the inner tube. The nitrogen gas used can be
treated safely and the construction of the excimer lamp can be
simple.
[0089] FIG. 24 shows a schematic longitudinal cross sectional view
illustrating an embodiment of the excimer lamp of the present
invention. The excimer lamp 241 is equipped with the U-shape inner
tube 242 on the inner side of the discharging vessel 31. FIG. 25
shows a schematic cross sectional view illustrating an embodiment
of the excimer lamp as shown in FIG. 24. FIG. 26 shows a schematic
cross sectional view illustrating an embodiment of the U-shape
inner tube 242 used for the excimer lamp of the present
invention.
[0090] At least one U-shape inner tube 242 is equipped on the
inside of the discharging vessel 31. The inner tube 242 is usually
made of the quartz, the synthetic quartz or the like, having
dielectric property. Since the inner electrode 243 is equipped on
the inside of the inner tube 242, the discharging vessel 31 with
the inner tube 242 is almost the same as that of a discharging
vessel with two inner electrodes so that the opportunity of high
frequency discharge in the excimer lamp increases. The increase of
the opportunity of high frequency discharge can extremely improve
the irradiation efficiency of the UV light.
[0091] As the inner electrode 243 as shown in FIG. 26(a), it is
preferable to use the liquid metal 244, especially mercury. The
liquid metal 244 can flow in the U-shape inner tube 242 easily so
that the U-shape inner electrode and the excimer lamp become thin.
As shown in FIG. 26(b), the inner electrode 243 may be the
electrode 245 of the net-shape. As the electrode 245 of net-shape
metal 245, it is preferable to use that made of the copper
wire.
[0092] FIG. 27 shows a schematic longitudinal cross sectional view
illustrating an embodiment of an excimer lamp 271 of the present
invention. FIG. 28 shows a schematic cross sectional view
illustrating an embodiment of an excimer lamp 271 in FIG. 27. The
excimer lamp 271 is equipped with the two U-shape inner tubes 242
to the inside of the discharging vessel 31 so that the opportunity
of the high frequency discharge between the outer electrode and the
inner tube 242 increases. Consequently, the irradiation efficiency
of the UV light can be improved.
[0093] Last, an excimer emission apparatus of the present invention
will be explained as follows.
[0094] FIG. 29 shows a schematic view illustrating an embodiment of
an excimer emission apparatus 291 of the present invention. The
excimer emission apparatus 291 comprises the excimer lamp of the
present invention described above (for example, the numerical
number is 201), a high frequency power supply 163 for applying the
voltage from 1 to 20 MHz between the outer electrode 35 and the
inner electrode 35, a circulating cooling apparatus 292 for flowing
the nitrogen gas in the inner tube 32. The detail explanation of
the excimer lamp is described above.
[0095] The nitrogen gas circulates in the inner tube 32 to cool it.
Since the deterioration of the inner tube cooled by UV light and
the heat becomes slowly, the degree of deterioration of the inner
tube can be the same as that of the discharging vessel 31.
Consequently, the lifetime of the excimer lamp can be improved.
[0096] The high frequency power supply 163 can apply the voltage of
the high frequency from 1 to 20 MHz between the outer electrode 34
and the inner electrode 35 of the excimer lamp 20. The construction
of the excimer lamp is not limited that of shown in FIG. 29. In the
case of the excimer emission apparatus 291 as shown in FIG. 29, the
high frequency power supply 163 is provided at a power supply
apparatus 293 as a main element. The high frequency power supply
163 may comprises the other component, for example, a matching
controller 294, variable capacitors C1, C2 or the like.
[0097] The power supply apparatus 293 as shown in FIG. 29 comprises
the high frequency power supply 163, the matching controller 294,
inductances L1, L2 and the variable capacitors C1, C2, as
fundamental element. The alternating power supply 295 applies an
electrical power of approximately 100V to the power supply
apparatus 293. The high frequency power supply 163 converts the
electrical power to that of the predetermined frequency from 1 to
20 MHz. The frequency converted is output from the high frequency
power supply 163. It is preferable that the voltage of the high
frequency described above is of from 0.1 to 10 V, particularly of
from 0.1 to 5V. The control of the variable capacitor C1 by the
matching controller 294 matches the impedance Z1 outputted from the
high frequency power supply 163 with the impedance Z2 inputted on
the excimer lamp 201. Consequently, In the circuit in the power
supply apparatus 293 shown in FIG. 29, the excimer lamp 201
irradiates the UV light at a high efficiency.
[0098] In the excimer emission apparatus of the present invention,
the excimer lamp 201 generates the high frequency discharge by
applying the electrical power from 25 to 30 W with the high
frequency of 13.56 MHz, to irradiate 10 mW/cm.sup.2 of the UV light
from the excimer lamp 201. However, in a prior excimer emission
apparatus, the excimer lamp generates the dielectric barrier
discharge by applying the electrical power of 50W with the voltage
from 1 to 10 kV of any frequency from 40 to 300 kHz, to irradiate
10 mW/cm.sup.2 of the UV light from the prior excimer lamp.
Therefore, the excimer emission apparatus of the present invention
converts the input energy to the UV light efficiently so that the
generation of heat of the excimer lamp decreases. The lifetime of
the prior excimer lamp, consequently, is shorter than that of the
excimer lamp of the present invention since the prior excimer lamp
generates more the deterioration due to generation of heat than
that of present invention.
* * * * *