U.S. patent application number 10/980497 was filed with the patent office on 2005-04-21 for magnetic pattern forming method, magnetic pattern forming apparatus, magnetic disk, and magnetic recording apparatus.
Invention is credited to Ikeda, Hiroyuki, Kuriwada, Takeshi, Kuriyama, Toshihiko, Seo, Yuzo.
Application Number | 20050083598 10/980497 |
Document ID | / |
Family ID | 18882305 |
Filed Date | 2005-04-21 |
United States Patent
Application |
20050083598 |
Kind Code |
A1 |
Seo, Yuzo ; et al. |
April 21, 2005 |
Magnetic pattern forming method, magnetic pattern forming
apparatus, magnetic disk, and magnetic recording apparatus
Abstract
A magnetic pattern forming apparatus, which is designed to form
a desired magnetic pattern on a magnetic disk having a magnetic
layer on a substrate, is made up of a mask having a pattern
identical or similar to the desired magnetic pattern, a projection
optical system for exposing the magnetic disk to a spot-like energy
beam coming through the mask to heat the magnetic layer for
projecting the mask pattern to the magnetic disk at a one-to-one
ratio or a predetermined reduction ratio, a magnetic field applying
device for applying an external magnetic field to the magnetic
disk, a control unit for conducting scanning with the spot-like
energy beam with respect to the magnetic disk and the mask in their
radial directions while rotating the magnetic disk and the
mask.
Inventors: |
Seo, Yuzo; (Kanagawa,
JP) ; Ikeda, Hiroyuki; (Kanagawa, JP) ;
Kuriwada, Takeshi; (Kanagawa, JP) ; Kuriyama,
Toshihiko; (Kanagawa, JP) |
Correspondence
Address: |
KATTEN MUCHIN ZAVIS ROSENMAN
575 MADISON AVENUE
NEW YORK
NY
10022-2585
US
|
Family ID: |
18882305 |
Appl. No.: |
10/980497 |
Filed: |
November 3, 2004 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
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10980497 |
Nov 3, 2004 |
|
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10058872 |
Jan 24, 2002 |
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Current U.S.
Class: |
360/59 ;
369/13.01; 369/13.02; 369/13.03; G9B/5.024; G9B/5.293;
G9B/5.306 |
Current CPC
Class: |
G11B 2005/0021 20130101;
G11B 5/553 20130101; B82Y 10/00 20130101; G11B 5/855 20130101; G11B
5/743 20130101; G11B 13/045 20130101; G11B 5/59633 20130101; G11B
5/82 20130101; G11B 5/012 20130101; G11B 2005/0029 20130101 |
Class at
Publication: |
360/059 ;
369/013.01; 369/013.02; 369/013.03 |
International
Class: |
G11B 011/00; G11B
005/02 |
Foreign Application Data
Date |
Code |
Application Number |
Jan 24, 2001 |
JP |
2001-015824 |
Claims
What is claimed is:
1. A magnetic pattern forming method of forming a desired magnetic
pattern on a magnetic disk by applying a spot-like energy beam
through a mask to said magnetic disk, having a magnetic layer on a
substrate, for heating a portion of said magnetic layer
concurrently with exposing the heated portion of said magnetic
layer to an external magnetic field, comprising the steps of:
making a scan with said spot-like energy beam in radial directions
of said magnetic disk and said mask while rotating said magnetic
disk and said mask; and projecting a pattern formed on said mask at
one of a one-to-one ratio and a predetermined reduction ratio for
the formation of said desired magnetic pattern on said magnetic
disk.
2. A magnetic pattern forming method of forming a desired magnetic
pattern on a magnetic disk by applying a spot-like energy beam
through a mask to said magnetic disk, having a magnetic layer on a
substrate, for heating a portion of said magnetic layer
concurrently with exposing the heated portion of said magnetic
layer to an external magnetic field, comprising the steps of:
making a spiral or concentric scan with said spot-like energy beam;
and projecting a pattern formed on said mask at one of a one-to-one
ratio and a predetermined reduction ratio for the formation of said
desired magnetic pattern on said magnetic disk.
3. A magnetic pattern forming method according to claim 1, wherein
said magnetic layer is previously magnetized evenly in a desired
detection by exposing said magnetic disk to said external magnetic
field, and said magnetic layer is applyed with said energy beam to
be heated and, at the same time, the heated portion of said
magnetic layer is exposed to said external magnetic field to be
magnetized in a direction opposite to said desired direction for
the formation of said desired magnetic pattern on said magnetic
disk.
4. A magnetic pattern forming method according to claim 3, wherein,
for said scan with said energy beam, a disk stage for supporting
said magnetic disk and a mask stage for supporting said mask are
moved in directions orthogonal to the axis of said energy beam.
5. A magnetic pattern forming method according to claim 4, wherein,
in a case in which said magnetic disk and said mask are rotated at
speeds equal to each other, a ratio of a mask stage moving speed to
a disk stage moving speed is set on the basis of the one of said
one-to-one ratio and said predetermined reduction ratio so that
said mask stage and said disk stage are moved on the basis of said
speed ratio.
6. A magnetic pattern forming method according to claim 3, wherein
an optical system for the projection includes an entrance
positioned in opposed relation to said mask and an exit positioned
in opposed relation to said magnetic disk which are constructed in
a separate condition, and at said scan with said energy beam, said
exit is moved along a surface of said magnetic disk and said
entrance is moved along a surface of said mask in synchronism with
the movement of said exit.
7. A magnetic pattern forming method according to claim 6, wherein,
in a case in which said magnetic disk and said mask are rotated at
speeds equal to each other, a ratio of an entrance moving speed to
an exit moving speed is set on the basis of the one of said
one-to-one ratio and said predetermined reduction ratio so that
said entrance and said exit are moved on the basis of said speed
ratio.
8. A magnetic pattern forming method according to claim 6, wherein
said magnetic disk and said mask are rotated coaxially.
9. A magnetic pattern forming method according to claim 3, wherein
an optical system for the projection includes an entrance
positioned in opposed relation to said mask, an exit positioned in
opposed relation to said magnetic disk and a main part making
connection between said entrance and said exit, with said main part
being rotated around a supporting point at which said main part is
supported, and for said scan with said energy beam, said projection
optical system being rotated along surfaces of said magnetic disk
and said mask.
10. A magnetic pattern forming method according to claim 9,
wherein, in a case in which said magnetic disk and said mask are
rotated at speeds equal to each other, a ratio of a distance
between said supporting point and said entrance to a distance
between said supporting point and said exit is set on the basis of
the one of said one-to-one ratio and said predetermined reduction
ratio.
11. A magnetic pattern forming method according to claim 3, wherein
said mask is formed according to a mask pattern, and has a
transmissive part allowing said energy beam to pass.
12. A magnetic pattern forming method according to claim 3, wherein
a shading plate is interposed between said mask and said magnetic
disk.
13. A magnetic pattern forming method according to claim 3, wherein
a minimum width of said magnetic pattern is set to be less than or
equal to 2 .mu.m.
14. A magnetic pattern forming method according to claim 3, wherein
said magnetic pattern includes one of a servo pattern for
positional control of a recording/reproducing head and a standard
pattern for recording of said servo pattern.
15. A magnetic disk on which a magnetic pattern is formed through
the use of the magnetic pattern forming method according to claim
3.
16. A magnetic recording apparatus comprising a magnetic disk, a
drive section for driving said magnetic disk in a recording
direction, a magnetic head including a recording section and a
reproducing section, moving means for moving said magnetic head
relatively with respect to said magnetic disk, and
recording/reproduced signal processing means for making an input of
a recording signal to said magnetic head and making an output of a
reproduced signal through said magnetic head, with a magnetic
pattern being formed on said magnetic disk through the use of the
magnetic pattern forming method according to claim 3.
17. A magnetic pattern forming apparatus made to form a desired
magnetic pattern on a magnetic disk having a magnetic layer on a
substrate, said apparatus comprising: a mask having a pattern
identical or similar to said desired magnetic pattern; a projection
optical system for applying a spot-like energy beam, incident
through said mask thereon, to the magnetic disk for heating said
magnetic layer and for projecting the mask pattern onto the
magnetic disk at one of a one-to-one ratio and a predetermined
reduction ratio; magnetic field applying means for exposing said
magnetic disk to an external magnetic field; and control means for
making a scan with said spot-like energy beam in radial directions
of said magnetic disk and said mask while rotating said magnetic
disk and said mask.
18. A magnetic pattern forming apparatus according to claim 17,
further comprising: disk rotating means for driving said magnetic
disk rotationally; and a mask rotating means for driving said mask
rotationally, said control means controlling said disk rotating
means and said mask rotating means.
19. A magnetic pattern forming apparatus according to claim 17,
wherein said magnetic field applying means is mounted on a tip
portion of an exit of said projection optical system.
20. A magnetic pattern forming apparatus according to claim 17,
further comprising: a disk stage for holding said magnetic disk
rotatably; and a mask stage for holding said mask rotatably, said
control means moving said disk stage and said mask stage in a
synchronized condition with respect to said projection optical
system.
21. A magnetic pattern forming apparatus according to claim 20,
wherein said control means controls rotational speeds of said
magnetic disk and said mask to speeds equal to each other, and
controls moving speeds of said mask stage and said disk stage on
the basis of a ratio of a moving speed of said mask stage to a
moving speed of said disk stage, set on the basis of the one of
said one-to-one ratio and said predetermined reduction ratio.
22. A magnetic pattern forming apparatus according to claim 17,
wherein said projection optical system includes an entrance
positioned in opposed relation to said mask and an exit positioned
in opposed relation to said magnetic disk which are constructed in
a separate condition, with said control means moving said entrance
and said exit in a synchronized condition so that said exit moves
along a surface of said magnetic disk and said entrance moves along
a surface of said mask.
23. A magnetic pattern forming apparatus according to claim 22,
wherein said control means controls rotational speeds of said
magnetic disk and said mask to speeds equal to each other, and
controls moving speeds of said entrance and said exit on the basis
of a ratio of a moving speed of said entrance to a moving speed of
said exit set on the basis of the one of said one-to-one ratio and
said predetermined reduction ratio.
24. A magnetic pattern forming apparatus according to claim 22,
further comprising disk/mask rotating means for rotationally
driving said magnetic disk and said mask coaxially so that said
control means controls said disk/mask rotating means to make said
magnetic disk and said mask rotate at speeds equal to each
other.
25. A magnetic pattern forming apparatus according to claim 17,
wherein said projection optical system includes an entrance
positioned in opposed relation to said mask, an exit positioned in
opposed relation to said magnetic disk and a main part making
connection between said entrance and said exit, and is rotatable
around a supporting point at which said main part is supported, and
said control means rotates said projection optical system so that
said exit is moved along a surface of said magnetic disk and said
entrance is moved along a surface of said mask.
26. A magnetic pattern forming apparatus according to claim 25,
wherein a ratio of a distance between said supporting point and
said entrance and a distance between said supporting point and said
exit is set on the basis of the one of said one-to-one ratio and
said predetermined reduction ratio, and said control means controls
rotational speeds of said magnetic disk and said mask to speeds
equal to each other.
27. A magnetic pattern forming apparatus according to claim 17,
wherein said mask is formed in accordance with said mask pattern
and has a transmissive part allowing said energy beam to pass.
28. A magnetic pattern forming apparatus according to claim 17,
wherein a shading plate is interposed between said mask and said
magnetic disk.
29. A magnetic pattern forming apparatus according to claim 17,
wherein a minimum width of said magnetic pattern is set to be less
than or equal to 2 .mu.m.
30. A magnetic pattern forming apparatus according to claim 17,
wherein said magnetic pattern includes one of a servo pattern for
positional control of a recording/reproducing head and a standard
pattern for recording of said servo pattern.
Description
BACKGROUND OF THE INVENTION
[0001] (1) Field of the Invention
[0002] The present invention relates to a magnetic pattern forming
method and apparatus for use in a magnetic recording apparatus
(magnetic disk), and more particularly to a magnetic pattern
forming method and apparatus, magnetic disk and magnetic recording
apparatus suitable for recording/reproduction (readout) by a
flying/contact head.
[0003] (2) Description of the Related Art
[0004] Magnetic recording apparatus represented by a magnetic disk
unit (hard disk drive) have come into widespread use as an external
storage of information processing equipment such as computers, and
in the recent years, they are being used as a moving-picture
recording apparatus or a recording apparatus for a set-top box.
[0005] The magnetic disk unit (hard disk drive) is usually made up
of a shaft for fixing one magnetic disk or a plurality of magnetic
disks in a skewering manner, a motor for turning the magnetic disk
joined through a bearing to the shaft, a magnetic head to be used
for recording and/or reproduction, an arm f or holding the head,
and an actuator capable of shifting the head through the head arm
to an arbitrary position above a magnetic recording medium, with
the recording/reproducing head being moved at a constant flying
quantity above the magnetic recording medium.
[0006] Furthermore, in addition to the flying head, there has been
proposed the employment of a contact head which contributes to
shortening the distance with respect to a medium.
[0007] A magnetic recording medium to be mounted on the magnetic
disk unit is produced by forming an NiP layer on a surface of a
substrate made usually from an aluminum alloy or the like and then
forming successively a metal under layer, a magnetic layer
(information recording layer), a protective layer, a lubricant
layer and other layers thereon after undergoing needed smoothing
treatment, texturing treatment and others. Alternatively, it is
made by forming successively a metal under layer, a magnetic layer
(information recording layer), a protective layer, a lubricant
layer and others on a surface of a substrate made of a glass or the
like. Among the magnetic recording media, there are a longitudinal
magnetic recording medium and a perpendicular magnetic recording
medium. In general, longitudinal recording is made on the
longitudinal magnetic recording medium.
[0008] The protective layer on the magnetic layer prevents the
magnetic layer from being damaged due to collision of the flying
magnetic head or sliding contact of the contact head, and the
lubricant layer provides lubricity between the magnetic head and
the medium. This construction enables recording/reproduction by a
flying/contact magnetic head. Since the employment of a
flying/contact head shortens the distance between the magnetic
layer and the head, the considerably higher density information
recording becomes feasible, as compared with an optical disk,
magneto optical disk or the like using a different type of
head.
[0009] The magnetic recording medium shows a yearly increase in
density, and for realizing this, there have been known a variety of
techniques. For example, the approaches involve reducing the flying
quantity of a magnetic head, employing a GMR head as a magnetic
head, using a high-corecivity magnetic material for a recording
layer of a magnetic disk, or reducing the space between information
recording tracks on a magnetic disk. For example, for 100
Gbit/inch.sup.2, it is said that the track density is necessary to
be equal to or more than 100 ktpi.
[0010] Each track has a control magnetic pattern formed for control
of the magnetic head, for example, a signal for position control of
the magnetic head or a signal for synchronous control. An increase
in the number of tracks by a reduction of the space of the
information recording tracks requires that signals (which sometimes
will be referred to hereinafter as "servo signals") for position
control of data recording/reproducing head are accordingly located
radially and densely, that is, the signals are more placed, for
more precise control.
[0011] In addition, there is an increasing requirement for
enlarging a data recording area by reducing an area other than for
data recording, that is, an area for servo signals and a gap
section between the servo area and the data recording area, thus
enhancing the data recording capacity. This requires the
enhancement in the output of the servo signal or the accuracy of
the synchronization signal.
[0012] A conventional method used widely for production involves
making a hole in the vicinity of a head actuator of a drive
(magnetic recording apparatus) to insert a pin with an encoder
there into for establishing the engagement with the actuator
through the pin, thereby moving a head up to a correct position for
recording a servo signal. However, since the center of gravity of
the positioning mechanism and the center of gravity of the actuator
exist at different positions, difficulty is encountered in
executing track position control with high accuracy and recording a
servo signal with a high precision.
[0013] In addition, there has been proposed a technique for
formation of irregular servo signals in which a laser beam is
placed onto a magnetic disk to deform a disk surface locally for
formation of physical irregularities. There are problems which
arises with this technique, however, in that an unstable state of a
flying head due to the irregularities exerts adverse influence on
recording/reproduction, cost rises because there is a need to use a
high-power laser beam for the formation of the irregularities, and
the one-by-one formation of the irregularities is
time-consuming.
[0014] New servo signal formation methods have been proposed with a
view to eliminating these problems.
[0015] As one example, there has been known a method in which a
servo pattern is formed on a master disk with a high-corecivity
magnetic layer and this master disk is brought closely into contact
with a magnetic recording medium so that the magnetic pattern is
printed thereon by means of an auxiliary magnetic field from the
external (see U.S. Pat. No. 5,991,104).
[0016] Another example is that, in a state where a medium is
previously magnetized in one direction, a soft magnetic layer with
a high permeability but a low corecivity is placed on a master disk
in the form of a pattern and the master disk is brought closely
into contact with the medium while an external magnetic field is
brought to strike thereon. In this example, the soft magnetic layer
serves as a shield, and the magnetic pattern is printed in the
non-shielded area (see U.S. Pat. No. 3,869,711, EP915456, Digest of
InterMag 2000, GP-06).
[0017] This technique features the employment of a master disk and
the formation of a magnetic pattern on a medium by a strong
magnetic field.
[0018] In general, since the strength or magnitude of a magnetic
field depends upon distance, in recording a magnetic pattern
through the use of a magnetic field, the pattern boundary tends to
be unclear due to stray magnetic field. In order to minimize the
stray magnetic field, it is essential to make the master disk and
the medium come closely into contact with each other. Moreover, it
is necessary that, as the pattern becomes finer, they are
accordingly brought completely into contact with each other without
defining a gap therebetween, and usually, they are pressed against
each other through the use of vacuum adhesion or the like.
[0019] In addition, the magnetic field to be used for print
increases as the corecivity of a medium becomes higher, and the
stray magnetic field increases consequently; therefore, there is a
need to achieve the contact therebetween more completely.
[0020] Thus, although the above-mentioned technique is relatively
applicable to a flexible floppy disk easy to press or a
low-corecivity magnetic disk which does not require too great
contact, considerable difficulty is experienced in applying it to a
high-density recording magnetic disk using a hard substrate, whose
corecivity exceeds 3000 Oe.
[0021] That is, in the case of the magnetic disk using a hard
substrate, there is a possibility that microscopic dirt particles
or the like get between the master disk and the medium at the
contact to produce defects on the medium or damage the high-priced
master disk. In particular, for a glass substrate, the contact
therebetween does not reach satisfaction because the dirt particles
get therebetween, which makes the magnetic print impossible or
causes cracks on the magnetic recording medium.
[0022] Furthermore, with the technique disclosed in U.S. Pat. No.
3,869,711, although a pattern formed obliquely with respect to a
track direction of a disk is recordable, the recording is limited
to the formation of only a pattern with a low signal strength. For
a magnetic recording medium with a high corecivity exceeding 2000
to 2500 Oe, in order to secure a magnetic field strength for print,
a soft magnetic material such as a permalloy or cendust, which has
a high saturated magnetic flux density, is used unavoidably as a
ferromagnetic material (shield material) for a pattern of a master
disk.
[0023] However, in the case of the oblique pattern, a magnetic
field for the reverse magnetization becomes perpendicular to a gap
defined by the ferromagnetic layer of the master disk, which makes
it difficult to tilt the magnetization in a desired direction. In
consequence, a part of the magnetic field escapes to the
ferromagnetic layer to make it difficult to expose a desired
portion to a sufficient magnetic field at magnetic print so that a
sufficient reverse magnetization pattern is difficult to form and a
high signal strength is hard to obtain. In the case of such an
oblique magnetic pattern, its reproduction output drops
significantly beyond the azimuth loss with respect to a pattern
perpendicular to a track.
[0024] On the other hand, a technique disclosed in Japanese Patent
Application Nos. 2000-134608 and 2000-134611 relates to the
formation of a magnetic pattern on a magnetic recording medium by
means of a combination of local heating and exposure to an external
magnetic field. For example, in a state where a medium is
previously magnetized in one direction, an energy beam or like is
applied through a patterned mask thereonto for the local heating
and an external magnetic field is brought to strike thereon while
the corecivity of the heated area is lowered, thus making recording
on the heated area by the external magnetic field for formation of
a magnetic pattern.
[0025] According to this technique, since the external magnetic
field is brought to strike on a medium while the corecivity is
lowered by heating, there is no need for the external magnetic
field to be higher than the corecivity of the medium, and the
recording becomes feasible with a weak magnetic field. Moreover,
since the area subjected to recording is limited to the heating
area while the recording in other than the heating area cannot be
made even if a magnetic field is brought to strike thereon, the
recording of a clear magnetic pattern is possible without bringing
a mask or the like into contact with the medium. This can prevent
the medium or the mask from being damaged due to the press, thus
suppressing the defects appearing on the medium.
[0026] In addition, this technique enables the formation of a
satisfactory oblique magnetic pattern. This is because there is no
need to shield the external magnetic field with a soft magnetic
material of the master disk unlike the conventional art.
[0027] Thus, the magnetic pattern forming technique disclosed in
Japanese Patent Application Nos. 2000-134608 and 2000-134611 is a
superior technique which can efficiently form various minute
magnetic patterns with high accuracy and suppress the defects of a
medium without damaging the medium or a mask.
[0028] However, according to this technique, since the accuracy of
the magnetic pattern depends upon the mask patterning accuracy to
some extent, for the effective use of this technique, there is a
need to conduct minute processing on a mask with high accuracy. If
the magnetic pattern is made more minute up to 1 to 2 .mu.m or
formed in terms of submicron, because of the limit to the
processing accuracy, difficulty can be encountered in patterning a
mask with high precision, and the alignment precision between the
mask and the medium can deteriorate so that a magnetic pattern
cannot be formed with sufficiently high accuracy.
SUMMARY OF THE INVENTION
[0029] The present invention has been developed with a view to
eliminating the above-mentioned problems, and it is therefore an
object of the invention to provide a magnetic pattern forming
method and apparatus pertaining to a technique of forming a
magnetic pattern on a magnetic recording medium by means of a
combination of local heating and exposure to an external magnetic
field, and capable of efficiently forming a minute magnetic pattern
with higher precision, and in its turn offer a higher-density
magnetic disk and magnetic recording apparatus in a small amount of
time and at a low cost.
[0030] For this purpose, in accordance with a first aspect of the
present invention, there is provided a magnetic pattern forming
method of forming a desired magnetic pattern on a magnetic disk by
applying a spot-like energy beam through a mask to the magnetic
disk, having a magnetic layer placed on a substrate, for heating a
portion of the magnetic layer concurrently with exposing the heated
portion of the magnetic layer to an external magnetic field,
comprising the steps of making a scan with the spot-like energy
beam in radial directions of the magnetic disk and the mask while
rotating the magnetic disk and the mask, and projecting a pattern
formed on the mask at a one-to-one ratio (equivalence, neither
magnification nor reduction) or a predetermined reduction ratio for
the formation of the desired magnetic pattern on the magnetic
disk.
[0031] With this magnetic pattern forming method according to the
invention, in a case in which a magnetic pattern is formed on a
magnetic disk by means of a combination of local heating and
exposure to an external magnetic field, it is possible to
efficiently form a minute magnetic pattern with higher accuracy
and, in its turn, to provide a magnetic disk and magnetic recording
apparatus, capable of achieving higher-density recording, in a
small amount of time and at a low cost.
[0032] In addition, instead of the employment of a large-sized
illuminating optical system (particularly, light source) or
projection optical system, a small-sized and low-priced system can
form a magnetic pattern on a magnetic disk briefly and efficiently,
which contributes to realizing high productivity.
[0033] Furthermore, in accordance with a second aspect of the
present invention, there is provided a magnetic pattern forming
method of forming a desired magnetic pattern on a magnetic disk by
applying a spot-like energy beam through a mask to the magnetic
disk, having a magnetic layer placed on a substrate, for heating a
portion of the magnetic layer concurrently with exposing the heated
portion of the magnetic layer to an external magnetic field,
comprising the steps of making a spiral or concentric scan with the
spot-like energy beam, and projecting a pattern formed on the mask
at a one-to-one ratio or a predetermined reduction ratio for the
formation of the desired magnetic pattern on the magnetic disk.
[0034] Also with this magnetic pattern forming method according to
the invention, in a case in which a magnetic pattern is formed on a
magnetic disk by means of a combination of local heating and
exposure to an external magnetic field, it is possible to
efficiently form a minute magnetic pattern with higher accuracy
and, in its turn, to provide a magnetic disk and magnetic recording
apparatus, capable of achieving higher-density recording, in a
small amount of time and at a low cost.
[0035] In addition, instead of the employment of a large-sized
illuminating optical system (particularly, light source) or
projection optical system, even a small-sized and low-priced system
can form a magnetic pattern on a magnetic disk briefly and
efficiently, which contributes to realizing high productivity.
[0036] In particular, it is preferable that the magnetic layer is
previously magnetized evenly in a desired detection by exposing the
magnetic disk to the external magnetic field, and the magnetic
layer is applyed with the energy beam to be heated and, at the same
time, the heated portion of the magnetic layer is exposed to the
external magnetic field to be magnetized in a direction opposite to
the desired direction for the formation of the desired magnetic
pattern on the magnetic disk.
[0037] In addition, preferably, for the scan by the energy beam, a
disk stage for supporting the magnetic disk and a mask stage for
supporting the mask are moved in directions orthogonal to
(perpendicularly intersecting) the axis of the energy beam.
[0038] Still additionally, in a case in which the magnetic disk and
the mask are rotated at speeds equal to each other, a ratio of the
mask stage moving speed to the disk stage moving speed is set on
the basis of the one-to-one ratio or the predetermined reduction
ratio (in accordance with whether the projection is made at the
one-to-one ratio or at the predetermined reduction ratio) so that
the mask stage and the disk stage are moved on the basis of the
speed ratio.
[0039] Yet additionally, preferably, an optical system for the
projection includes an entrance (part of inlet) positioned in
opposed relation to the mask and an exit (part of outlet)
positioned in opposed relation to the magnetic disk which are
constructed separately, and at the scan with the energy beam, the
exit is moved along a surface of the magnetic disk and the entrance
is moved along a surface of the mask in synchronism with the
movement of the exit.
[0040] Moreover, preferably, in a case in which the magnetic disk
and the mask are rotated at speeds equal to each other, a ratio of
the entrance moving speed to the exit moving speed is set on the
basis of the one-to-one ratio or the predetermined reduction ratio
so that the entrance and the exit are moved on the basis of the
speed ratio.
[0041] Still moreover, preferably, the magnetic disk and the mask
are rotated coaxially.
[0042] Yet moreover, preferably, an optical system for the
projection includes an entrance positioned in opposed relation to
the mask, an exit part positioned in opposed relation to the
magnetic disk and a main part making connection between the
entrance and the exit, with the main part being rotated around a
supporting point at which the main part is supported, and for the
scan by the energy beam, the projection optical system being
rotated along surfaces of the magnetic disk and the mask.
[0043] Furthermore, preferably, in a case in which the magnetic
disk and the mask are rotated at speeds equal to each other, a
ratio of a distance between the supporting point and the entrance
to a distance between the supporting point and the exit is set on
the basis of the one-to-one ratio or the predetermined reduction
ratio.
[0044] Still furthermore, preferably, the mask is formed according
to a mask pattern, and has a transmissive part allowing the energy
beam to pass.
[0045] Yet furthermore, preferably, a shading plate is interposed
between the mask and the magnetic disk.
[0046] In addition, preferably, the minimum width of the magnetic
pattern is set to be less than or equal to 2 .mu.m.
[0047] Still additionally, preferably, the magnetic pattern
includes a servo pattern for positional control of a
recording/reproducing head or a standard pattern for recording of
the servo pattern.
[0048] In a magnetic disk according to the present invention, a
magnetic pattern is formed according to the above-mentioned
magnetic pattern forming method.
[0049] The magnetic disk according to the present invention, in a
case in which a magnetic pattern is formed on a magnetic disk by
means of a combination of local heating and exposure to an external
magnetic field, enables efficient formation of a minute magnetic
pattern with higher accuracy. This provides a higher-density
magnetic disk and magnetic recording apparatus in a small amount of
time and at a low cost.
[0050] In this case, without the employment of a large-sized
illuminating optical system (particularly, light source) or
projection optical system, even a small-sized and low-priced system
can form a magnetic pattern on a magnetic disk briefly and
efficiently, which contributes to realizing high productivity.
[0051] Furthermore, in accordance with a third aspect of the
present invention, there is provided a magnetic recording apparatus
comprising a magnetic disk, a drive section for driving the
magnetic disk in a recording direction, a magnetic head including a
recording section and a reproducing section, a moving means for
moving the magnetic head relatively to the magnetic disk, and a
recording/reproduced signal processing means for making an input of
a recording signal to the magnetic head and making an output of a
reproduced signal through the magnetic head, with a magnetic
pattern being formed on the magnetic disk according to the
above-mentioned magnetic pattern forming method.
[0052] The magnetic recording apparatus according to the present
invention, in a case in which a magnetic pattern is formed on a
magnetic disk by means of a combination of local heating and
exposure to an external magnetic field, enables efficient formation
of a minute magnetic pattern with higher accuracy. This provides a
higher-density magnetic disk and magnetic recording apparatus in a
small amount of time and at a low cost.
[0053] In this case, without the employment of a large-sized
illuminating optical system (particularly, light source) or
projection optical system, even a small-sized and low-priced system
can form a magnetic pattern on a magnetic disk briefly and
efficiently, which contributes to realizing high productivity.
[0054] Still furthermore, in accordance with a fourth aspect of the
present invention, there is provided a magnetic pattern forming
apparatus made to form a desired magnetic pattern on a magnetic
disk having a magnetic layer on a substrate, the apparatus
comprising a mask having a pattern identical or similar to the
desired magnetic pattern, a projection optical system for applying
a spot-like energy beam, incident through the mask thereon, to the
magnetic disk for heating the magnetic layer and for projecting
said mask pattern onto said magnetic disk at one of a one-to-one
ratio and a predetermined reduction ratio;
[0055] magnetic field applying means for exposing the magnetic disk
to an external magnetic field, and control means for making a scan
with the spot-like energy beam in radial directions of the magnetic
disk and the mask while rotating the magnetic disk and the
mask.
[0056] The magnetic pattern forming apparatus according to the
present invention, in a case in which a magnetic pattern is formed
on a magnetic disk by means of a combination of local heating and
exposure to an external magnetic field, enables efficient formation
of a minute magnetic pattern with higher accuracy. This provides a
higher-density magnetic disk and magnetic recording apparatus in a
small amount of time and at a low cost.
[0057] In this case, without the employment of a large-sized
illuminating optical system (particularly, light source) or
projection optical system, even a small-sized and low-priced system
can form a magnetic pattern on a magnetic disk briefly and
efficiently, which contributes to realizing high productivity.
[0058] Preferably, this magnetic pattern forming apparatus further
comprises disk rotating means for driving the magnetic disk
rotationally and a mask rotating means for driving the mask
rotationally so that the control means controls the disk rotating
means and the mask rotating means.
[0059] In addition, preferably, the magnetic field applying means
is mounted on a tip portion of an exit of the projection optical
system.
[0060] In particularly, preferably, this magnetic pattern forming
apparatus further comprises a disk stage for holding the magnetic
disk rotatably and a mask stage for holding the mask rotatably so
that the control means moves the disk stage and the mask stage in a
synchronized condition with respect to the projection optical
system.
[0061] Still additionally, preferably, the control means controls
rotational speeds of the magnetic disk and the mask to speeds equal
to each other, and controls moving speeds of the mask stage and the
disk stage on the basis of a ratio of a mask stage moving speed to
a disk stage moving speed set on the basis of the one-to-one ratio
or the predetermined reduction ratio.
[0062] In this case, it is also possible that the control means
controls the rotational speeds of the magnetic disk and the mask on
the basis of the ratio of the rotational speed of the magnetic disk
to the rotational speed of the mask set on the basis of the
one-to-one ratio or the predetermined reduction ratio, and controls
the moving speeds of the mask stage and the disk stage to an equal
speed.
[0063] Yet additionally, preferably, the projection optical system
includes an entrance positioned in opposed relation to the mask and
an exit positioned in opposed relation to the magnetic disk,
constructed separately, with the control means controlling the
entrance and the exit in a synchronized condition so that the exit
moves along a surface of the magnetic disk and the entrance moves
along a surface of the mask.
[0064] Moreover, preferably, the control means controls the
rotational speeds of the magnetic disk and the mask to speeds equal
to each other, and controls the moving speeds of the entrance and
the exit on the basis of a ratio of the moving speed of the
entrance to the moving speed of the exit set on the basis of the
one-to-one ratio or the predetermined reduction ratio.
[0065] In this case, it is also possible that the control means
controls the rotational speeds of the magnetic disk and the mask on
the basis of a ratio of the rotational speed of the magnetic disk
to the rotational speed of the mask set on the basis of the
one-to-one ratio or the predetermined reduction ratio, and controls
the moving speeds of the entrance and the exit to an equal
speed.
[0066] Still moreover, preferably, the magnetic pattern forming
apparatus further comprises disk/mask rotating means for
rotationally driving the magnetic disk and the mask coaxially so
that the control means controls the disk/mask rotating means to
make the magnetic disk and the mask rotate at an equal speed.
[0067] Yet moreover, preferably, the projection optical system
includes an entrance positioned in opposed relation to the mask, an
exit positioned in opposed relation to the magnetic disk and a main
part making connection between the entrance and the exit so that it
is rotatable around a supporting point at which the main part is
supported, and the control means rotates the projection optical
system so that the exit moves along a surface of the magnetic disk
and the entrance moves along a surface of the mask.
[0068] In this case, preferably, a ratio of a distance between the
supporting point and the entrance to a distance between the
supporting point and the exit is set on the basis of the one-to-one
ratio or the predetermined reduction ratio, and the control means
controls the rotational speeds of the magnetic disk and the mask to
an equal speed.
[0069] Incidentally, it is also possible that a ratio of a distance
between the supporting point and the entrance to a distance between
the supporting point and the exit is set at 1 to 1, and the control
means controls the rotational speeds of the magnetic disk and the
mask on the basis of a ratio of the rotational speed of the
magnetic disk to the rotational speed of the mask set on the basis
of the one-to-one ratio or the predetermined magnification
ratio.
[0070] Furthermore, preferably, the mask is formed in accordance
with a mask pattern and has a transmissive part allowing the energy
beam to pass.
[0071] Still furthermore, preferably, a shading plate is interposed
between the mask and the magnetic disk.
[0072] In addition, preferably, the minimum width of the magnetic
pattern is set to be less than or equal to 2 .mu.m Still
additionally, preferably, the magnetic pattern includes a servo
pattern for positional control of a recording/reproducing head or a
standard pattern for recording of the servo pattern.
BRIEF DESCRIPTION OF THE DRAWINGS
[0073] FIG. 1 is an explanatory side elevational view
illustratively showing an entire configuration of a magnetic
pattern forming apparatus according to a first embodiment of the
present invention;
[0074] FIG. 2A is a cross-sectional view illustratively showing an
example of a disk holding section and magnetic field applying
section of the magnetic pattern forming apparatus according to the
first embodiment of the present invention;
[0075] FIG. 2B is an illustrative view showing an example of a disk
holding section and magnetic field applying section of the magnetic
pattern forming apparatus according to the first embodiment of the
present invention;
[0076] FIG. 3 is a cross-sectional view illustratively showing an
example of a disk holding section and magnetic field applying
section of the magnetic pattern forming apparatus according to the
first embodiment of the present invention;
[0077] FIG. 4 is an illustration useful for explaining an example
of an energy beam illuminating optical system according to the
first embodiment of the present invention;
[0078] FIG. 5 is an illustration useful for explaining another
example of an energy beam illuminating optical system according to
the first embodiment of the present invention;
[0079] FIG. 6 is a perspective view illustratively showing an
entire configuration of a magnetic pattern forming apparatus
according to a modification of the first embodiment of the present
invention;
[0080] FIG. 7 is a side elevational view illustratively showing an
entire configuration of a magnetic pattern forming apparatus
according to a second embodiment of the present invention;
[0081] FIG. 8 is a plan view useful for explaining an operation of
the magnetic pattern forming apparatus according to the second
embodiment of the present invention;
[0082] FIG. 9A is a plan view illustratively showing a magnetic
field applying means of the magnetic pattern forming apparatus
according to the second embodiment of the present invention;
[0083] FIG. 9B is a plan view illustratively showing a magnetic
field applying means of the magnetic pattern forming apparatus
according to the second embodiment of the present invention;
and
[0084] FIG. 10 is a side elevational view illustratively showing an
entire configuration of a magnetic pattern forming apparatus
according to a third embodiment of the present invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0085] Referring to the drawings, a detailed description will be
given hereinbelow of a magnetic pattern forming apparatus and
method for use in a magnetic recording apparatus (magnetic
disk).
[0086] In the present invention, in a case in which a magnetic
pattern is form on a magnetic disk through the use of a combination
of local heating and exposure to an external magnetic field, the
magnetic disk is scanned with a small spot-like energy beam to be
heated to form a magnetic pattern; therefore, efficient formation
of a magnetic pattern becomes feasible in a small amount of time
with even a small-sized and low-priced projection optical system.
In addition, it is possible to provide a minute or microscopic
magnetic pattern with high accuracy by means of reduction
projection.
First Embodiment
[0087] Referring to FIGS. 1 to 5, a description will be given
hereinbelow of a magnetic pattern forming apparatus and method
according to a first embodiment of the present invention.
[0088] Secondly, a description will be given of a magnetic disk on
which a magnetic pattern is formed through the use of a magnetic
pattern apparatus (method) according to this embodiment.
[0089] According to this embodiment, a magnetic disk is made as
follows. That is, usually, a hard substrate is used as a substrate
for a magnetic disk, for that there is a need to prevent it from
vibrating even when a high-speed rotation takes place at fast
recording/reproduction. To provide a sufficient rigidity against
the vibration, in general, it is preferable that the thickness of
the substrate is equal to or more than 0.3 mm. However, since a
high thickness adversely affects the thickness reduction of a
magnetic recording apparatus, preferably, it is less than or equal
to 3 mm. For example, among the substrates, there are an Al-alloy
substrate made of an Al--Mg alloy or the like containing Al as a
main component, an Mg-alloy substrate made of an Mg--Zn alloy or
the like containing Mg as a main component, a substrate made of any
one of common soda glass, aluminosilicate glass, amorphous glass,
silicon, titanium, ceramics and various kinds of resins, or a
substrate made of a combination thereof. Of these substrates, it is
preferable to use the Al-alloy substrate, a glass-made substrate
such as a crystallized glass in view of strength, or a resin-made
substrate in terms of cost.
[0090] In the magnetic pattern forming apparatus (method) according
to this embodiment, since a mask and a magnetic disk are placed in
a non-contact condition as will be described later, unlike the
conventional magnetic printing method, it is free from a problem
that the contact between a magnetic disk having a hard substrate
and a master disk becomes sufficient to cause flaws or defects, or
that the boundary of a magnetic domain printed becomes unclear to
enlarge PW50. For this reason, great effects are attainable if the
magnetic pattern forming apparatus (method) according to this
embodiment is applied to a magnetic disk with a hard substrate. In
particular, it is effective to a magnetic disk having a substrate,
easy to crack, such as a glass-made substrate.
[0091] As magnetic disks to which this magnetic pattern forming
apparatus (method) is applicable, disc-like magnetic recording
media having a magnetic layer on a substrate are acceptable, for
example, including a hard disk, magneto optical disk and others.
Incidentally, the magnetic pattern forming apparatus is equally
referred to as a "thermomagnetic printing imaging exposure
apparatus" or "hard disk printing apparatus".
[0092] In a magnetic disk manufacturing process, it is a common way
to clean and dry a substrate initially, and also in the present
invention, it is preferable to clean and dry a substrate before
formation of layers from the viewpoint of securing the adhesion
between the layers.
[0093] For manufacturing a magnetic disk according to this
embodiment, it is also possible to form a metal layer, such as NiP,
on a surface of a substrate.
[0094] As methods for the formation of the metal layer, thin film
formation methods such as electroless plating, sputtering, vacuum
deposition and CVD are available. A substrate made of a conductive
material permits the use of electrolytic plating. It is preferable
that the film thickness of the metal layer is 50 nm or more.
However, considering the productivity of the magnetic disk or the
like, preferably less than or equal to 500 nm, more preferably less
than or equal to 300 nm.
[0095] In addition, although it is desirable that the area for the
formation of the metal layer is the entire surface of the
substrate, only a part thereof, for example, only an area
undergoing texturing, is also acceptable.
[0096] Still additionally, a concentric texturing can also be made
on a surface of a substrate or a surface of a metal layer formed on
the substrate. In this embodiment, the concentric texturing
signifies, for example, that a large number of microscopic grooves
are made on a substrate in its circumferential direction by
polishing it in the circumferential direction by means of a
mechanical texturing using free abrasive grains and a texture tape,
texturing processing using a laser beam or the like or a
combination thereof.
[0097] As the free abrasive grains, it is preferable to use diamond
abrasive grains, more preferably the diamond abrasive grains whose
surfaces are graphitized. Although, as another abrasive grains for
the mechanical texturing, alumina abrasive grains have come into
widespread use, particularly considering a longitudinal orientation
medium in which the axis of easy magnetization is oriented along
the textured grooves, the diamond abrasive grains show an extremely
high performance.
[0098] A head flying quantity set to be as small as possible
contributes to effective realization of high-density magnetic
recording and one of the features of these substrates is superior
surface smoothness; therefore, it is preferable that the roughness
Ra of the substrate surface is less than or equal to 2 nm, more
preferably less than or equal to 1 nm. In particular, it is
preferable that it is less than or equal to 0.5 nm. Incidentally,
the substrate surface roughness Ra is a value calculated according
to JIS B0601 after measured in terms of a measurement length of 400
.mu.m through the use of a stylus surface roughness measuring
apparatus. In this case, the tip portion of the measurement stylus
used usually has a size of approximately 0.2 .mu.m.
[0099] It is also appropriate that an under layer is formed on a
substrate and between the substrate and a magnetic layer. The under
layer is for the purpose of fining the crystal to control the
orientation of the crystal surfaces, and an under layer using Cr as
a main component is used preferably.
[0100] In addition to pure Cr, the materials for the under layer
includes Cr oxide and an alloy in which one or two elements
selected from V, Ti, Mo, Zr, Hf, Ta, W, Ge, Nb, Si, Cu and B are
introduced into Cr for crystal matching with a recording layer
(magnetic layer).
[0101] Of these, pure Cr or an alloy made by introducing one or two
elements selected from Ti, Mo, W, V, Ta, Si, Nb, Zr and Hf into Cr
is preferable. Although the optimum contents of these second and
third elements vary according to element, it is preferable that the
content is 1 atomic % to 50 atomic %, more preferably 5 atomic % to
30 atomic %, and much more preferably 5 atomic % to 20 atomic
%.
[0102] Although the film thickness of the under layer is not
limited as long as it displays an anisotropy, it is preferably 0.1
to 50 nm, more preferably 0.3 to 30 nm, and much more preferably
0.5 to 10 nm. During the film formation for the under layer
containing Cr as a main component, limitation is not imposed on
whether or not the substrate heating is conducted.
[0103] A soft magnetic layer can be placed on the under layer,
thatis, between the under layer and a magnetic layer as needed. In
particular, it is greatly effective and useful to keeper media
having less magnetic transition noise or perpendicular magnetic
recording media in which a magnetic domain lies in a direction
perpendicular to the longitudinal (in-plane) direction of the
media.
[0104] Preferably, the soft magnetic layer has a relatively high
permeability and less loss, and NiFe or an alloy made by
introducing Mo or the like as the third element thereinto is
properly used. The optimum permeability also varies largely
according to the property of a recording layer or a head to be used
for recording of data, and generally, it is preferable that the
maximum permeability is approximately 10 to 1000000 (H/m).
[0105] Alternatively, it is also appropriate that another
intermediate layer is placed on the under layer containing Cr as a
main component as needed. For example, the additional installation
of a CoCr-based intermediate layer is preferable for the
orientation control of the magnetic layer.
[0106] Following this, at the formation of a recording layer
(magnetic layer), a layer made of a material identical to that of
the under layer or a layer made of a different non-magnetic
material can also be inserted between the recording layer and the
soft magnetic layer. At the film formation for the recording layer,
limitation is not imposed on whether or not the substrate is
heated.
[0107] As a recording layer, it is preferable to use a Co-alloy
magnetic layer, a rare earth based magnetic layer represented by
TbFeCo, a superposed film comprising a transition metal and a noble
metal represented by a superposed film comprising Co and Pd, and
others.
[0108] As the Co-alloy magnetic layer, it is possible to use pure
Co or a Co-alloy magnetic material such as CoNi, CoSm, CoCrTa,
CoNiCr or CoCrPt commonly used as a magnetic material. Moreover, it
is also possible to use a material made by additionally introducing
an element such as Ni, Cr, Pt, Ta, W or B, or a compound such as
SiO.sub.2, into one of these Co-alloys. For example, there are
CoCrPtTa, CoCrPtB, CoNiPt, CoNiCrPtB and others. Although the film
thickness of the Co-alloy magnetic layer can be determined
arbitrarily, it is preferable that the thickness is equal to or
more than 5 nm, more preferably, equal to or more than 10 nm.
Moreover, it is preferable that it is less than or equal to 50 nm,
more preferably, less than or equal to 30 nm. In addition, this
magnetic layer can also be made in a manner that two layers or more
are placed in a superposed condition directly or in a state where
an appropriate non-magnetic intermediate layer is interposed
therebetween. In this case, the compositions of the superposed
magnetic materials can be the same or different from each
other.
[0109] For the rare earth-based magnetic layer, general materials
can be used as a magnetic material, for example, including TbFeCo,
GdFeCo, DyFeCo, TbFe and others. It is also possible that Tb, Dy,
Ho or the like is introduced into each of these rare earth alloys.
The introduction of Ti, Al or Pt for the purpose of the prevention
of oxidative deterioration is also acceptable. Although the film
thickness of the rare earth-based magnetic layer can be determined
arbitrarily, in general it is approximately 5 to 100 nm. Moreover,
this magnetic layer can also be made in a manner that two layers or
more are placed in a superposed condition directly or in a state
where an appropriate non-magnetic intermediate layer is interposed
therebetween. In this case, the compositions of the superposed
magnetic materials can be the same or different from each other. In
particular, the rare earth-based magnetic layer is an amorphous
structural film, and because of having a magnetic domain in a
direction perpendicular to the longitudinal direction of the media,
it is suitable for high-density recording, and is more effectively
applicable to the method according to the present invention capable
of forming a magnetic pattern at a high density with high
accuracy.
[0110] For the superposed film comprising a transition metal and a
noble metal which similarly enables the perpendicular magnetic
recording, general materials can be used as a magnetic material,
for example, including Co/Pd, Co/Pt, Fe/Pt, Fe/Au, Fe/Ag and
others. The transition metal and the noble metal, forming the
superposed film materials, are not particularly required to be
pure, and alloys containing them as main components are also
acceptable. Although the thickness of the superposed film can be
determined arbitrarily, in general it is approximately 5 to 1000
nm. Moreover, it is also possible that the superposed film is made
by superposing three or more kinds of materials, as needed.
[0111] In this embodiment, the magnetic layer serving as a
recording layer is maintained in a magnetized condition at a room
temperature, and is erased when heated and magnetized when being
exposed to an external magnetic field concurrently with being
heated.
[0112] The corecivity of the magnetic layer at the room temperature
is required to be set so that the magnetized condition is kept at
the room temperature while uniform magnetization is made by a
proper external magnetic field. When the corecivity of the magnetic
layer at the room temperature is set at 2000 Oe or more, a small
magnetic domain can be held, thus providing a magnetic disk
suitable for high-density recording. More preferably, it is 3000 Oe
or more.
[0113] Although the conventional magnetic printing method
encounters a difficulty in printing onto a magnetic disk with a
considerably high corecivity, in this embodiment, since the
magnetic layer is heated to lower the corecivity satisfactorily
before the formation of a magnetic pattern, the application to a
medium with a high corecivity is preferable.
[0114] Meanwhile, it is preferable that the corecivity thereof is
set at 20000 Oe and below. If exceeding 20000 Oe, a large external
magnetic field is required for batch magnetization, and the
ordinary magnetic recording can be difficult.
[0115] The magnetic layer is required to maintain a magnetized
condition at a room temperature and to be magnetized by a weak
external magnetic field at an appropriate heating temperature.
Moreover, a magnetic domain of a magnetic pattern tends to be
formed more clearly as the difference between the room temperature
and a temperature (demagnetization or erase temperature) at which
the magnetized condition disappears becomes larger. For this
reason, a higher demagnetization temperature is preferable, that
is, preferably equal to or more than 100.degree. C., and more
preferably equal to or more than 150.degree. C. For example, the
demagnetization temperature is set to be in the vicinity of a Curie
temperature (slightly lower than the Curie temperature) or around a
compensation temperature.
[0116] Preferably, the Curie temperature is equal to or more than
100.degree. C. In the case of less than 100.degree. C., the
stability of the magnetic domain at the room temperature tends to
be low. More preferably, it is equal to or more than 150.degree.
C., and less than or equal to 700.degree. C. If the magnetic layer
is heated up to an excessively high temperature, the magnetic layer
can deform.
[0117] In a case in which the magnetic disk is a longitudinal
magnetic recording medium, with respect to a high-density magnetic
disk with a high corecivity, the conventional magnetic printing
method encounters difficulty in saturation recording and difficulty
in formation of a magnetic pattern with a high magnetic field
strength, and enlarges the full width at half maximum. According to
this embodiment, even a longitudinal recording medium suitable for
such high recording density can form an excellent magnetic pattern.
In particular, if the saturation magnetic field of the aforesaid
magnetic layer is equal to or more than 50 emu/cc, the influence of
the demagnetizing field becomes great, and hence, the employment of
the present invention provides great effects.
[0118] Greater effects are attainable if the saturation magnetic
field thereof is equal to or more than 100 emu/cc. However, if
excessively high, the formation of a magnetic pattern becomes
difficult. Therefore, preferably, it is less than or equal to 500
emu/cc.
[0119] In a case in which not only the magnetic disk is a
perpendicular magnetic recording medium but also a magnetic pattern
is relatively large and even a unit volume of one magnetic domain
is large, the saturation magnetic field increases and the reverse
magnetization tends to occur due to a magnetic demagnetization,
thereby producing noises and impairing the full width at half
maximum. However, according to this embodiment, the additional use
of the under layer made of a soft magnetic material enables
satisfactory recording on these magnetic disks.
[0120] In this embodiment, it is preferable that a protective layer
is formed on a magnetic layer. That is, the uppermost surface of a
magnetic disk is covered with a hard protective layer. The
protective layer has a function to prevent the magnetic layer from
being damaged due to the collision with a head or the insertion of
dust/dirt particles between the magnetic layer and a mask. In the
case of the employment of a control magnetic pattern forming method
using a mask as well as the present invention, it additionally has
a function to protect the magnetic disk from the contact with the
mask. In a case in which the magnetic layer is made up of a
plurality of layers, the protective layer may be placed on a
magnetic layer close to the uppermost surface of the magnetic disk.
The protective layer can be placed directly on the magnetic layer
and, as needed, it can also be placed thereon in a state where a
layer having a different function is interposed therebetween.
[0121] As the protective layer, any layer is also acceptable as
long as it is of a hard type resistant to oxidation. In general,
for the protective layer, there is used a carbonaceous material
such as carbon, carbon hydride, carbon nitride, amorphous carbon or
SiC, or SiO.sub.2, Zr.sub.2O.sub.3, SiN or TiN. It is also
acceptable that the protective layer is made of a material having
magnetism.
[0122] In the magnetic disk, in order to bring the head and the
magnetic layer closest to each other, it is preferable that an
extremely hard protective layer is made thin. Accordingly, a
carbonaceous protective layer is preferable in view of shock
resistance and lubricity, and particularly, a diamond-like carbon
is preferable. It has not only a function to prevent the magnetic
layer from being damaged by an energy beam but also an extremely
strong resistance to damages of the magnetic layer due to a head.
The magnetic pattern forming method according to the present
invention is also applicable to an opaque protective layer such as
a carbonaceous protective layer.
[0123] A portion of an energy beam is absorbed by even the
protective layer, and is operative to heat the magnetic layer
locally due to heat conduction. For this reason, if the thickness
of the protective layer is excessively large, the control magnetic
pattern can be dim due to transverse heat conduction, and
therefore, it is preferable that the film thickness is made thin.
Moreover, the thin film is preferable in terms of a reduction of
the distance between the magnetic layer and the head at
recording/reproduction. Accordingly, the film thickness is
preferable to be less than or equal to 50 nm, more preferably less
than or equal to 30 nm, and much more preferably 20 nm. However,
for sufficient durability, it is preferable that the film thickness
is equal to or more than 0.1 nm, more preferably 1 nm or above.
[0124] In addition, it is also possible that the protective layer
is made up of two or more layers. If a layer containing Cr as a
main component is placed as one protective layer just above the
magnetic layer, a preferred effect is obtainable in that oxygen
penetration to the magnetic layer is preventable.
[0125] More preferably, a lubricant layer is formed on the
protective layer. This lubricant layer has a function to prevent
the magnetic disk from being damaged by a mask or a magnetic head.
For example, as lubricants for use in the lubricant layer, there
are a fluorine-based lubricant, a hydrocarbon-based lubricant and a
mixture thereof. They can be applied thereonto in an ordinary way
such as dipping or spin coating. A thin lubricant layer is
preferable, for avoiding the interference with the formation of a
magnetic pattern, and preferably the thickness is less than or
equal to 10 nm. To provide a sufficient lubrication performance, it
is preferable that the thickness is set to be equal to or more than
1 nm. However, in a case in which an energy beam is applied from
above the lubricant layer, re-applying or the like can be made in
consideration of damages (decomposition, polymerization) of the
lubricant layer, and others.
[0126] The magnetic pattern forming method according to this
embodiment can be implemented before the formation of the lubricant
layer or after it.
[0127] In addition, in order to prevent the impairment of the
traveling stability of a flying/contact head, it is preferable that
the surface roughness Ra of the magnetic disk after the formation
of a magnetic pattern is maintained to be less than or equal to 3
nm. The magnetic disk surface roughness Ra is a roughness of a
surface of the magnetic disk not including a lubricant layer, and
is a value calculated according to JIS B0601 after measured in
terms of a measurement length of 400 .mu.m through the use of a
stylus surface roughness measuring apparatus. More preferably, the
surface roughness is set to be less than or equal to 1.5 nm.
[0128] More desirably, a surface waviness Wa of the magnetic disk
after the formation of the magnetic pattern is kept to be less than
or equal to 5 nm. The waviness Wa signifies a waviness of a surface
of the magnetic disk having no lubricant layer, and is a value
obtained according to the Ra calculation after measured in terms of
a measurement length of 2 mm through the use of a stylus surface
roughness measuring apparatus. More preferably, the waviness Wa is
set to be less than or equal to 3 nm.
[0129] Meanwhile, a magnetic pattern for the magnetic disk thus
constructed is formed on a recording layer. Preferably, after a
protective layer or a protective layer and a lubricant layer are
formed on the recording layer, the formation of the magnetic
pattern is conducted in one of the above-mentioned methods.
However, in a case in which there is no need to pay attention to
the oxidation of the recording layer, it is possible to form the
magnetic pattern immediately after the film formation for the
magnetic layer.
[0130] Various types of methods can be taken as a method of forming
each layer of the magnetic disk, and for example, there are a dc
(magnetron) sputtering method, a high-frequency (magnetron)
sputtering method, an ECR sputtering method, and a physical
deposition method such as a vacuum deposition method.
[0131] In addition, as conditions at the film formation, an
ultimate vacuum, a substrate heating method and a substrate
temperature, a sputtering gas pressure, a bias voltage and others
are determined properly according to a property of a magnetic disk
to be produced. For example, as is usual in the case of a
sputtering film formation, preferably, the ultimate vacuum is set
to be less than or equal to 5.times.10.sup.-6 Torr, the substrate
temperature is set to be in a range from a room temperature to
400.degree. C., the sputtering gas pressure is set to be
1.times.10.sup.-3 to 20.times.10.sup.-3 Torr, and the bias voltage
is set to be 0 to -500 V.
[0132] The film formation can be conducted before the formation of
an under layer in the case of heating of a substrate.
Alternatively, in the case of use of a transparent substrate having
a low thermal absorption factor, in order to increase the thermal
absorption factor, a seed layer containing Cr as a main component
or an under layer having a B2 crystal structure is formed and the
substrate is then heated, before the formation of a recording layer
and others.
[0133] In a case in which the recording layer is an rare
earth-based magnetic layer, from the viewpoint of the prevention of
the rare earth-based magnetic layer from corrosion/oxidation, it is
preferable that the innermost circumferential part or outermost
circumferential part of a disk is masked initially and, after the
film formation up to a recording layer, the mask is removed at the
subsequent protective layer formation so that the recording layer
is completely covered with the protective layer, and if the
protective layer is made up of two layers, it is preferable that
the film formation is conducted in a state where the recording
layer and the first protective layer are masked and the mask is
removed at the film formation for the second protective layer so
that the recording layer is fully covered with the second
protective layer.
[0134] Meanwhile, in this embodiment, a magnetic pattern is formed
as follows on a magnetic disk thus constructed. That is, a magnetic
pattern is formed on a magnetic disk having a magnetic layer on a
substrate through a process of heating the magnetic layer locally
and a process of exposing the magnetic layer to an external
magnetic field. In heating the magnetic layer locally by applying
an energy beam to a surface of the magnetic disk, the energy beam
application is made according to a mask pattern for projecting
(imaging) the mask pattern to the magnetic disk surface at a
reduction ratio.
[0135] In this case, since the formation of a magnetic pattern is
conducted with a combination of the local heating and the exposure
to an external magnetic field, unlike the conventional technique,
there is no need to use a strong external magnetic field. Moreover,
since no magnetization takes place even if a magnetic field is
brought to strike on other than the heated area, the formation of a
magnetic domain can be limited to a heated area. Thus, the magnetic
domain boundary becomes clear, and it is possible to form a pattern
in which the magnetic transition width is small and the magnetic
transition at the magnetic domain boundary is very sharp, thereby
providing a high-quality output signal. Depending upon selection of
condition, the magnetic transition width can be set to be less than
or equal to 1 .mu.m.
[0136] In addition, since, unlike the conventional technique, there
is no need to press a magnetic disk and a master disk, it is
possible to eliminate the possibility of the magnetic disk or the
mask being damaged and the defects of the magnetic disk being
increased.
[0137] Still additionally, this technique according to the present
invention enables satisfactory formation of a magnetic pattern
extending obliquely with respect to a track.
[0138] Moreover, since an energy beam is used for the local
heating, it is possible to easily control the size of a portion to
be heated and the power thereof, thus resulting in high-accuracy
formation of a magnetic pattern.
[0139] Still moreover, in this embodiment, since a patterning
energy beam having an intensity distribution corresponding to a
magnetic pattern to be formed is projected (imaged) to a surface of
a magnetic disk in a state reduced, in a case in which the energy
beam is narrowed down or focused through an objective lens before
passing through a mask, that is, as compared with the proximity
exposure, limitation is not imposed on the magnetic pattern
accuracy due to the mask patterning accuracy or alignment accuracy,
and high-accuracy formation of finer magnetic pattern becomes
feasible. And not only that, since the mask and the magnetic disk
are separated from each other, the formation thereof is less
susceptible to dirt particles on the magnetic disk.
[0140] An energy beam emitted from a light source is varied in
intensity distribution by means of a mask and then reaches a
surface of the magnetic disk as an image through an imaging means
such as an imaging lens. Incidentally, the imaging leans is
sometimes referred to equally as a projection lens, and the
reduction imaging is sometimes referred to equally as reduction
projection.
[0141] As the mask, any thing is also acceptable if it produces the
strength and weakness (variable intensity) of an energy beam on a
magnetic disk according to a magnetic pattern to be formed. For
example, there are a photomask in which an energy beam transmissive
part and an energy beam non-transmissive part are made according to
a pattern and a hologram mask in which a hologram is recorded so
that a specific pattern is imaged on a magnetic disk.
[0142] In this technique, an imaging means is situated between a
mask and a magnetic disk. When an energy beam is applied in a state
where a photomask and a magnetic disk are brought closely into
contact with each other, depending upon material, the mask absorbs
the energy beam so that it is heated and the temperature of the
contacting surface of the magnetic disk rises, thereby sometimes
making it difficult to draw a magnetic pattern clearly. On the
other hand, the present invention can solve this problem.
[0143] That is, for the benefits of the magnetic disk surface on
which a magnetic pattern is formed, it is preferable that a large
difference is made in temperature between illumination and
non-illumination by a pulse-like energy beam, for that the contrast
of the pattern is improved or the recording density is enhanced.
This means that it is preferable to keep the magnetic disk surface
at a temperature somewhat lower than the room temperature at the
time of the non-illumination by the pulse-like energy beam. The
room temperature is approximately 25.degree. C.
[0144] The use of a mask enables easy formation of a complicated
magnetic pattern for a short time by simply applying an energy
beam. Moreover, it enables easy formation of even a special pattern
hard to record through the use of a magnetic head.
[0145] For example, a magnetic pattern extending obliquely and
linearly with respect to a radius or track is used for a phase
shift servo system for a magnetic disk. Such radially continuous
pattern or an oblique pattern with respect to the radius was hard
to produce through the use of a conventional servo pattern forming
method of recording a servo signal for each track while rotating a
disk. On the other hand, the present invention allows such a
magnetic pattern to be easily and briefly formed with single
illumination without requiring complex calculation or complicated
apparatus configuration.
[0146] As the mask, it is preferable to use a mask having a
transmissive part which allows an energy beam to pass partially,
so-called a photomask. Since the photomask is easy to produce and
easily provides high processing accuracy, it becomes a
high-accuracy mask and enables the formation of a high-accuracy
magnetic pattern.
[0147] If a condenser lens is placed before the mask, an intensity
distribution of an energy beam is uniformly obtainable and
efficient focusing of an energy beam on an imaging leans becomes
feasible, so it is preferable to use the condenser lens.
[0148] Although this technique is applicable to a magnetic pattern
with any size and shape compatible with the beam diameter of the
energy beam and the strength of the external magnetic field, as the
magnetic pattern becomes finer, higher effects are attainable. When
the minimum width of the magnetic pattern becomes less than or
equal to 2 .mu.m, severer difficulty is experienced in alignment
between the magnetic disk and the mask; therefore, the application
of this technique produces a large. More preferably, the magnetic
pattern minimum width is set to be less than or equal to 1 .mu.m.
No lower limit exists in possible pattern formation, but logically,
it is possible to form a minute magnetic pattern near the limit on
the wavelength of the energy beam. For example, the use of an
eximer laser or the like enables approximately hundred nm.
[0149] The minimum width of a pattern signifies a length of the
narrowest portion of a pattern to be formed. For example, if the
pattern shape is a rectangular configuration, it signifies a length
of the shorter side thereof, and if being an ellipse, it signifies
the smaller diameter thereof.
[0150] In addition, since this technique enables the formation of a
finer magnetic pattern through reduction imaging, if it is applied
to a servo pattern for positional control of a data
recording/reproduction head or the formation of a standard pattern
for the recording of the servo pattern, great effects are
obtainable. The servo pattern is used to generate a servo signal
for conducting the tracking of a recording/reproduction head with
respect to a data track on a magnetic disk.
[0151] The servo pattern is required to be formed with higher
accuracy than that of a data pattern. The poor servo pattern
accuracy produces rough head position control. For this reason,
logically, it is impossible to record a data pattern with higher
accuracy than that of the servo pattern. Accordingly, as the
recording density of a magnetic disk increases, a minute servo
pattern is formed with higher accuracy.
[0152] Since this technique is suitable for the formation of
repeated simple magnetic patterns because of using a mask and can
form a fine magnetic pattern with high accuracy by means of
reduction imaging, if it is used for the production of a servo
pattern, a great effect is obtainable. Add to it that the use of a
mask enables easy formation of even a special or complex servo
pattern.
[0153] Even if it is applied to, instead of the servo pattern
itself, the formation of a standard pattern for generation of a
reference signal which is used for when a drive or the like records
a servo pattern, a great effect is similarly obtainable.
[0154] Since a high-precision servo pattern or standard pattern is
attainable, for a great effect, it can be applied to a high-density
recording magnetic disk whose track density is equal to or more
than 40 kTPI.
[0155] Moreover, also in a case in which the magnetic pattern
includes a pattern extending obliquely with respect to a track as
mentioned above, since the present invention can provide a large
signal strength, the invention is particularly suitable for an
oblique pattern such as a phase servo signal.
[0156] For example, when a standard line extends in a direction
orthogonal to a head traveling direction, the pattern extending
obliquely is a pattern having an inclination with respect to the
standard line. Preferably, if the inclination with respect to the
standard line is within .+-.45.degree., a satisfactory signal can
be derived even if it is used as a servo signal. Alternatively, a
magnetic pattern formed according to this technique can be used for
the examination of defects of a magnetic disk. Since the recording
process for the defect examination is omissible, it is possible to
shorten the manufacturing time, which contributes to cost reduction
and the enhancement of accuracy of the defect examination.
[0157] Since this technique perform the reduction imaging through
the use of an imaging means situated after a mask, if the reduction
ratio is set to be large, a more minute pattern becomes formable.
However, since the beam diameter of the energy beam becomes smaller
due to being narrowed down, the pattern area formable at a time
becomes small.
[0158] For this reason, this technique would particularly be
suitable for a magnetic disk having a diameter less than or equal
to 65 mm.
[0159] In general, as the diameter of a magnetic disk becomes
smaller, a larger recording capacity is required irrespective of a
small recording area, and the recording density is extremely high.
For use, a magnetic disk whose diameter is less than or equal to
1.8 inches is more preferable, and a magnetic disk having a
diameter less than or equal to 1 inch is particularly
preferable.
[0160] For example, data or the like can be recorded on a disk
having as an extremely small diameter as less than or equal to 1
inch. In particular, in the case of a perpendicular magnetic disk,
since the entire disk is easily exposed to an external magnetic
field, it is possible to record data on the entire surface thereof
for a short time. However, this technique is also applicable to a
magnetic disk having as a large diameter as 3.5 inches.
[0161] In this embodiment, although various combinations of the
local heating and the exposure to an external magnetic field can be
considered, it is preferable that, after a magnetic layer is
previously exposed to an external magnetic field to be uniformly
magnetized in a desired direction, concurrently with being heated
locally, the magnetic layer is exposed to an external magnetic
field so that the heated portion is magnetized in a direction
opposite to the desired direction, thereby achieving the formation
of a magnetic pattern. Since this can clearly form magnetic domains
in opposite directions, it is possible to produce a magnetic
pattern providing a high signal strength and excellent C/N and
S/N.
[0162] As the energy beam, any beam is also acceptable if it can
heat a surface of a recording layer locally. However, a laser is
preferable in view of the prevention of the application of an
energy beam to unnecessary parts.
[0163] To make the magnetic transition width sharp or steep, it is
preferable to use a pulse-like laser beam which makes a large
difference in temperature between energy beam illumination and
energy beam non-illumination, and prevents easy occurrence of heat
storage.
[0164] Although it is also possible to output a continuous laser in
the form of pulse through the use of an optical device, the
employment of a pulse laser light source is particularly
preferable. The pulse laser light source is made to generate a
laser intermittently in the form of pulse, and is capable of
applying a laser with a high peak power for an extremely short
time, and avoiding the occurrence of the heat storage.
[0165] In a magnetic disk according to this embodiment, to maintain
a magnetized condition to be stable even at the room temperature,
it is preferable that the demagnetization temperature at which the
magnetized condition (magnetic field) of the magnetic layer
disappears is higher. As the difference between the room
temperature and the demagnetization temperature is larger, the
magnetic domain of a magnetic pattern is more easily formed
clearly. For this reason, preferably, the demagnetization
temperature is equal to or more than 100.degree. C. For example,
the demagnetization temperature exists in the neighborhood of the
Curie temperature (somewhat lower than the Curie temperature) or in
the vicinity of a compensation temperature.
[0166] In addition, preferably, for magnetically detecting a signal
through the use of an MR, GMR or TMR head or the like, the
saturation magnetic field is equal to or more than 50 emu/cc. In
this case, since the influence of the demagnetizing field is great,
it is preferable that the pulse width is as narrow as possible so
that the temperature of a portion reversely magnetized by heating
and an external magnetic field lowers sharply.
[0167] More preferably, the saturation magnetic field is set to be
equal to or more than 100 emu/cc. However, since the pattern
formation becomes difficult when the saturation magnetic field
becomes excessively high, it is preferable that the saturation
magnetic field is less than or equal to 500 emu/cc.
[0168] Still additionally, since a higher corecivity at the room
temperature permits high-density recording, preferably, it is equal
to or more than 3000 Oe. Although the conventional magnetic
printing method encounters a difficulty in printing to a magnetic
disk with a too high corecivity, in the present invention, a
magnetic layer is heated to sufficiently lower the corecivity
before the formation of a magnetic pattern; therefore, a great
effect is obtainable when the invention is applied to a disk with a
high corecivity.
[0169] Moreover, in order to prevent a magnetic disk from being
damaged due to collision with a magnetic head in a magnetic pattern
formation process and at recording/reproduction, it is preferable
to form a protective layer. For shortening the distance between a
magnetic layer and a head, it is preferable that the film thickness
thereof is less than or equal to 50 nm.
[0170] If the magnetic layer is made up of a plurality of layers,
the protective layer is placed on a magnetic layer closest to the
surface. Preferably, the protective layer is made of a diamond-like
carbon. This not only has a function to prevent the magnetic layer
from being damaged by an energy beam but also shows an extremely
strong resistance to damage of the magnetic layer by the head.
[0171] Still moreover, it is preferable that a lubricant layer is
provided to give a lubricity between the head and the magnetic
disk. Although the magnetic pattern forming method according to the
present invention permits the magnetic pattern formation before and
after the formation of the lubricant layer, the thickness of the
lubricant layer is preferably made thin for the prevention of the
interference with the formation of the magnetic pattern or of the
sticking of the magnetic head. The preferred thickness thereof is
less than or equal to 10 nm.
[0172] Furthermore, to maintain the traveling stability of a
flying/contact head, it is preferable that the surface roughness Ra
of the magnetic disk after the formation of a magnetic pattern is
kept to be less than or equal to 3 nm. Incidentally, the magnetic
disk surface roughness Ra signifies a roughness of a magnetic disk
surface not including a lubricant layer and is a value calculated
according to JIS B0601 after measured in terms of a measurement
length of 400 .mu.m through the use of a stylus surface roughness
measuring apparatus. The more preferable value is less than or
equal to 1.5 nm.
[0173] More desirably, a surface waviness Wa of the magnetic disk
after the formation of the magnetic pattern is kept to be less than
or equal to 5 nm. The waviness Wa signifies a waviness of a surface
of the magnetic disk having no lubricant layer, and is a value
obtained according to the Ra calculation after measured in terms of
a measurement length of 2 mm through the use of a stylus surface
roughness measuring apparatus. More preferably, the waviness Wa is
set to be less than or equal to 3 nm.
[0174] Still furthermore, it is preferable that a glass-made hard
substrate is used as a substrate of a magnetic disk, for that less
dispersion of heat given by an energy beam due to thermal diffusion
takes place, thus enabling efficient use of energy. Add to it that,
owing to less thermal diffusion, the magnetic pattern resolution is
improvable. The employment of the glass substrate according to the
present invention is preferable because of exhibiting a strong
resistance to the insertion of dirt particles or the like, and
because of no occurrence of cracks in a magnetic disk or no damage
of a master stemming from the hardness of the substrate
surface.
[0175] A magnetic disk on which a magnetic pattern is formed in the
above-mentioned manner is not limited in magnetic pattern accuracy
resulting from mask patterning accuracy or alignment accuracy, a
minute magnetic pattern is formable with high precision. Moreover,
it is possible to form a pattern which provides a small magnetic
transition width and a very sharp magnetic transition at the
boundary of a magnetic domain, thus generating a high-quality
output signal.
[0176] In addition, the magnetic disk can easily be manufactured in
an extremely small amount of time and is not required to come
closely into contact with a master disk unlike the conventional
technique, less flaws or defects occur.
[0177] In particular, as the high-density recording is in progress,
not only a servo signal is hard to write but also the servo
recording is a main cause of an increase in cost; therefore, great
effects are obtainable when the present invention is applied to a
high-density recording magnetic disk. The application of the
present invention there to becomes more easy because the exposure
to a magnetic field is easy in the case of a perpendicular magnetic
recording medium.
[0178] If this technique is incorporated into a magnetic disk
manufacturing line, it is possible to manufacture a magnetic disk
having a high-precision magnetic pattern formed for head control,
in a small amount of time and at a low cost.
[0179] Secondly, referring to FIG. 1, a description will be given
hereinbelow of a magnetic pattern forming apparatus according to
this embodiment.
[0180] This magnetic pattern forming apparatus is an apparatus for
forming a desired magnetic pattern on a magnetic disk having a
magnetic layer on a substrate, and as shown in FIG. 1, is made up
of a disk stage (disk table, disk holding means) 60 for holding a
magnetic disk 1 rotatably, a mask (photomask) 12, a mask stage
(mask table, mask holding means) 61 for holding the mask 12
rotatably, a magnetic field applying means 62, an illuminating
optical system 63 equipped with an energy beam source for emitting
an energy beam 11, a projection optical system 64, a disk spindle
motor (disk rotating actuator, disk rotating means) 2 for
rotationally driving the magnetic disk 1, and a mask spindle motor
(mask rotating actuator, mask rotating means) 65 for rotationally
driving the mask 12.
[0181] The mask 12 is for varying an intensity distribution of the
energy beam 11, emitted from the energy beam source, according to a
desired magnetic pattern to be formed on the magnetic disk 1. In
this case, the mask 12 is made to have all patterns corresponding
to desired magnetic patterns to be formed on the magnetic disk 1.
This mask 12 is formed to have a pattern obtained by enlarging a
magnetic pattern to be formed on the magnetic disk 1 on the basis
of a reduction ratio for reduction projection. Accordingly, the
pattern to be formed on the mask 12 and the desired magnetic
pattern to be formed on the magnetic disk 1 are in similar relation
to each other. Although no limitation is imposed on the
configuration of the mask 12, the mask 12 is usually formed to have
a square or a disc-like configuration like the magnetic disk 1.
[0182] The magnetic field applying means (external magnetic field
applying means, magnetic field generating device) 62 is for
exposing the magnetic disk 1 to an external magnetic field.
[0183] In this embodiment, first of all, a magnetic layer is
exposed to an external magnetic field to be previously magnetized
uniformly and the magnetic disk 1 is then exposed to an external
magnetic field in an opposite direction while being heated locally,
thereby forming a magnetic pattern thereon. Thus, the magnetic
field applying means 62 includes a first magnetic field applying
means 4 and a second magnetic field applying means 8. Incidentally,
if the process for previously magnetizing the magnetic layer
uniformly is conducted before the operations in this apparatus,
then the first magnetic field applying means 4 is naturally
omissible from this apparatus.
[0184] The projection optical system 64 is constructed as a linear
cylindrical member capable of leading an energy beam (the optical
axis of a laser) linearly. Moreover, this projection optical system
64 is located between the mask 12 and the magnetic disk 1 to
illuminate a magnetic layer with an energy beam 11 from the energy
beam source through the mask 12 for heating the magnetic layer so
that a mask pattern is reduction-projected onto the magnetic disk
1. As FIG. 3 shows, this projection optical system 64 is equipped
with an imaging means 15 whereby the energy beam (patterned energy
beam) 11, whose intensity distribution is changed by the mask 12,
is focused to produce a reduced image on a surface of the magnetic
disk 1.
[0185] FIGS. 2A, 2B and 3 are illustrations of an example of a disk
stage and magnetic field applying means of a magnetic pattern
forming apparatus according to the present invention.
[0186] As shown in a cross-sectional view of FIG. 2A, the magnetic
disk 1 on which a magnetic pattern is formed is mounted on a
turntable 3 fixed coaxially to the disk spindle motor (spindles
serving as a rotary shaft to be rotationally driven by a motor are
generally referred to as "spindle motors") 2 and then
vacuum-adhered thereto through a vacuum trench 7 to be fixedly
secured onto the turntable 3. The magnetic disk 1 has magnetic
layers 22a and 22b on a hard substrate 21.
[0187] The first magnetic field applying means 4 comprising a yoke
5 and a permanent magnet 6 is located above one surface of the disk
1. FIG. 2B is an illustration viewed from a direction of an arrow
in FIG. 2A. The first magnetic field applying means 4 has an
elongated configuration extending in radial directions of the disk
1, a pair of permanent magnets 6a and 6b, such as NdFe magnets, are
fixedly secured onto the yoke 5 in a state where their magnetic
poles are placed in opposite directions so that a magnetic field
occurs to make connection between the N-pole of the magnet 6a and
the S-pole of the magnet 6b. This magnetic field is set to be
larger than the corecivity of the disk 1 so that the magnetic layer
22a on the upper surface side of the magnetic disk 1 is magnetized
in a longitudinal direction and in a circumferential direction.
[0188] In this state, when the spindle motor 2 is rotated in a
state where the first magnetic filed applying means 4 is fixed, the
magnetic disk 1 is rotated in the arrow direction so that the
magnetic layer 22a is exposed to the magnetic field to be
magnetized in one direction. Subsequently, the first magnetic field
applying means 4 is retreated from above the disk 1.
[0189] Following this, the magnetic disk 1 is exposed to an
external magnetic field in an opposite direction while being heated
locally. As shown in the cross-sectional view of FIG. 3, the second
magnetic field applying means 8 comprising a yoke 9 and a permanent
magnet 10 is placed above the other surface of the magnetic disk 1.
A magnetic field generated from the second magnetic field applying
means 8 has the opposite direction to that of the first magnetic
field applying means 4, and is weak to be below the corecivity of
the disk 1. The other structure can be the same as that of the
first magnetic field applying means 4.
[0190] A pulse laser beam 11 emitted from a light source (not
shown) and passed through a condenser leans arrives at the
photomask 12. In the photomask 12, an opaque layer 14 opaque to a
laser wavelength is made on a substrate 13 transparent to the laser
wavelength on the basis of a magnetic pattern to be formed.
Accordingly, after the arrival at the photomask 12, the laser beam
11 penetrates the transparent portions of the photomask 12 so that
its intensity distribution varies according to the magnetic
pattern, thus producing a spatial pattern.
[0191] The photomask 12 can be produced in a manner that a film
made of a material opaque to the energy beam, represented by a
metal such as Cr, is formed on a substrate such as a quartz glass
or a soda-lime glass through the use of, for example, sputtering or
the like and a photoresist is applied thereonto and etching or the
like is conducted for creating desired transmissive and
non-transmissive parts.
[0192] When reaching the imaging lens 15, the laser beam 11 is
narrowed down to a desired size and the laser shading corresponding
to (similar to) the pattern formed on the photomask 12 is projected
as an image onto the magnetic disk 1 in a state reduced. The image
portion is heated so that the temperature of the magnetic layer 22a
is increased to a value in the vicinity of the demagnetization
temperature. At this time, an external magnetic field lower than
the corecivity of the magnetic layer 22a of the magnetic disk 1 is
simultaneously applied thereto by means of the second external
magnetic field applying means 8; in consequence, only the
temperature-increased portion thereof is magnetized in the
direction of the external magnetic field. Following this, the laser
illumination is stopped so that the temperature-increased portion
is cooled to the room temperature so that the magnetized condition
becomes stable. The second external magnetic field has an opposite
direction to that of the first external magnetic field which has
previously conducted the uniform magnetization, and a magnetic
pattern is formed on the magnetic layer 22a.
[0193] Incidentally, although one imaging lens 15 is used here as
shown in FIG. 3, it is also appropriate to use a plurality of
lenses for the improvement of aberration or the like.
[0194] The minimum beam diameter .phi. to which the beam is
narrowed down by the imaging lens 15 depends upon the numerical
aperture NA of an imaging lens and the wavelength .lambda. of an
energy beam being used, and there is a relationship of
.phi.=1.22.times.(.lambda./NA). That is, in a case in which a finer
pattern is formed on a magnetic disk, the wavelength .lambda. is
determined to be a smaller value or the numeral aperture NA is set
at a larger value. In a case in which the beam is previously
narrowed down through the use of a condenser lens, there is a need
to pay attention to the NA of the condenser lens.
[0195] FIG. 4 is an illustration of an example of a construction of
the illuminating optical system 63 used for the laser illumination
in this embodiment.
[0196] As FIG. 4 shows, the pulse laser beam 11 generated from a
pulse laser source 41 passes through a programmable shutter 42. The
programmable shutter 42 has a function to derive only a desired
pulse from the laser source 41. As the pulse laser source 41, it is
possible to use an eximer laser or a YAG quadruple-wavelength
Q-switch laser.
[0197] As will be described later, in this embodiment, since the
energy beam (laser beam) is applied in a spot-like configuration,
in the case of use of a laser with a high power and a wide
illumination range, the illuminating laser light is shaped into a
spot-like laser beam through the use of, for example, a shading
plate. In this case, the shading plate exhibits a function to avoid
the laser illumination toward an unnecessary area or
re-illumination toward an area in which a magnetic pattern has
already been formed. Preferably, the shading plate is positioned
immediately before the mask 12.
[0198] The laser beam 11 selected by the programmable shutter 42 is
converted into desired power by means of an attenuator 43 and then
passed through a condenser lens 44 to reach a photomask 12. In
general, the condenser lens 44 is composed of an a spherical lens
44a and a plano-convex lens 44b, and has a function to make uniform
the energy intensity distribution at a mask surface and efficiently
leads an energy flux to the imaging lens 15.
[0199] Then, the laser beam 11, after its intensity distribution is
varied according to the magnetic pattern by means of the photomask
12, passes through the imaging lens 15 so that an image is produced
on the magnetic layer 22a of the disk 1 in a state reduced.
[0200] FIG. 5 is an illustration of another example of a
construction of the illuminating optical system 63 used for the
laser illumination in this embodiment.
[0201] As FIG. 5 shows, after passing through the programmable
shutter 42 and the attenuator 43, the pulse laser beam 11 generated
from the pulse laser source 41 reaches a beam expander 45. The beam
expander 45 is put to use in a case in which the beam diameter is
once enlarged before imaging, for example, when the reduction
projection ratio of a mask is enhanced.
[0202] Following this, the laser beam 11 passes through the
condenser lens 44, and its intensity distribution is varied
according to the magnetic pattern in the photomask 12. Then, the
laser beam 11 is converted through the imaging lens 15 into a
reduced image on the magnetic layer 22a of the disk 1.
[0203] For making the energy intensity distribution uniform, a
homogenizer can also be use in place of the condenser lens.
Moreover, it is also possible to use both the condenser lens and
homogenizer.
[0204] Alternatively, in the case of no use of these uniforming
means, it is also possible to use only a desirable-distribution
portion while intercepting a low-energy portion by means of a slit
or the like.
[0205] Incidentally, the configuration and component disposition of
the optical system to be used in this embodiment can be changed
diversely as needed.
[0206] Although, for applying an external magnetic, the second
external magnetic field applying means 8 can be located on any one
of both surface sides of a disk, and in the above-described
example, because of being placed on a side opposite to the laser
illumination surface of the magnetic disk 1, it does not intercept
the laser beam.
[0207] Furthermore, a description will be given hereinbelow of
preferred conditions on the energy beam 11.
[0208] As the energy beam 11, any beam is also acceptable if it can
heat a recording layer surface partially, but from the viewpoint of
avoiding the application of an energy beam to an unnecessary
portion, a laser is preferable.
[0209] In particular, a pulse laser source is preferably put to
use. The pulse laser source is for intermittently generating a
laser beam in a pulse-like form, and it can emit a laser be am with
a high peak power for an extremely short time to cause less heat
storage, as compared with a case in which a continuous laser beam
is intermitted through the use of an optical device such as an
acoustic optical device (AO) or an electric-optical device (EO) to
be converted into a pulse-like state, so the pulse laser source is
considerably preferable.
[0210] In the case of a continuous laser beam being pulsed through
an optical device, in the pulse, the substantially same power is
gained over its pulse width. On the other hand, the pulse laser
source is made to emit a laser beam in the form of a pulse at a
time after storing energy by resonance therein, and hence, the peak
power becomes extremely high within the pulse and then get smaller.
In this embodiment, for the formation of a magnetic pattern with
high contrast and high accuracy, it is preferable to rapidly heat a
recording layer in an extremely small amount of time, and for this
reason, a pulse laser source is preferably put to use.
[0211] For the benefits of the magnetic disk surface on which a
magnetic pattern is to be formed, it is preferable to increase the
difference in temperature between the illumination and
non-illumination by a pulse-like energy beam. That is, it improves
the pattern contrast and enhances the recording density.
Accordingly, preferably, the magnetic disk surface temperature is
lower than the room temperature at the time of the non-illumination
by the pulse-like energy beam. In this case, the room temperature
is approximately 25.degree. C.
[0212] Preferably, the wavelength of the energy beam is less than
or equal to 1100 nm. If the wavelength thereof is shorter than this
value, it is possible to reduce the diffraction effect for
improving the resolution, which facilitates the formation of a
minute magnetic pattern. More preferably, the wavelength thereof is
less than or equal to 600 nm. It is possible to enlarge the
spacing, i.e., a gap, between a mask and a magnetic disk owing to
not only the high resolution but also the reduced diffraction, thus
resulting advantageously in easy handling and easy organization of
the magnetic pattern forming apparatus. Moreover, it is preferable
that the wavelength thereof is equal to or more than 150 nm. Below
150 nm, the absorption thereof by a synthetic quartz used for a
mask increases, thus easily causing insufficient heating. If the
wavelength thereof is set to be equal to or more than 350 nm, it is
also possible to use an optical glass as a mask.
[0213] Concretely, there are an eximer laser (248 nm), and the
double-wavelength (532 nm), the triple-wavelength (355 nm) or
quadruple-wavelength (266 nm) of a YAGQ-switch laser (1064 nm), and
further an Ar laser (488 nm, 514 nm), a ruby laser (694 nm) and
others.
[0214] Preferably, the power per pulse of the pulse-like energy
beam is set to be less than or equal to 1000 mJ/cm.sup.2. If power
exceeding this value is applied, there is a possibility that the
magnetic disk surface is damaged by the pulse-like energy beam to
be deformed. If the deformation causes the roughness Ra exceeding 3
nm or the waviness exceeding 5 nm, this can interfere with the
traveling of the flying/contact head.
[0215] More preferably, it is less than or equal to 500
mJ/cm.sup.2, and much more preferably, less than or equal to 100
mJ/cm.sup.2. Within this area, even if a substrate with a
relatively large thermal diffusion is put to use, it is easy to
form a magnetic pattern with a high resolution. Moreover, it is
preferable that the power is equal to or more than 10 mJ/cm.sup.2.
Below this value, the temperature of the magnetic layer is hard to
increase and the magnetic printing is hard to conduct.
[0216] In a case in which a substrate to be used in this embodiment
is made of a metal such as Al or an alloy, the thermal conductivity
is high, it is preferable that the power is in a range from 30 to
120 mJ/cm.sup.2 for fear of distortion of the magnetic pattern
stemming from heat given locally being extended to other than a
desired portion or of physical damage to the substrate due to
excessively energy.
[0217] In a case in which the substrate is made of ceramics such as
glass, since it has less heat conduction than that of Al or the
like and larger heat storage occurs at the pulse-like energy beam
applied portion, it is preferable that the power is in a range from
10 to 100 mJ/cm.sup.2.
[0218] In a case in which the substrate is made of a resin such as
polycarbonate, since the heat storage increases at the pulse-like
energy beam applied portion and the melting point thereof is lower
as compared with a glass or the like, it is preferable that the
power is in a range from 10 to 80 mJ/cm.sup.2.
[0219] In addition, in the case of being apprehensive of damage of
a magnetic layer, protective layer or lubricant layer due to an
energy beam, a means can also be taken to enhance the magnetic
field strength to be applied concurrently with the pulse-like
energy beam. That is, a magnetic field as large as possible, for
example, 25 to 75% of the corecivity at the ordinary temperature in
the case of a longitudinal magnetic recording medium and 1 to 50%
thereof in the case of perpendicular magnetic recording, is applied
thereto for the purpose of lowering the illuminating energy.
[0220] In the case of impressing the pulse-like energy beam through
the protective layer and the lubricant layer, re-applying or the
like can be required after the illumination in consideration of
damages (decomposition, polymerization) of the lubricant layer, and
others.
[0221] It is desirable that the pulse width of the energy beam is
less than or equal to 1 .mu.sec. In the case of a pulse width below
this value, the heating by the energy given through the pulse-like
energy beam to the magnetic disk is dispersed so that the
resolution tends to decrease. In a case in which the power per
pulse is the same, if the pulse width is shortened to impress
strong energy at a time, there is a tendency that the thermal
diffusion decreases and the resolution of the magnetic pattern
increases. More preferably, the pulse width is less than or equal
to 100 nsec. In this area, even if the substrate is made of a metal
such as Al having a relatively large thermal diffusion, it is
possible to easily form a magnetic pattern with a high resolution.
That is, attaching importance to the resolution, a shorter pulse
width is more preferable. Moreover, it is preferable that the pulse
width is equal to or more than 1 nsec. This is because it is
preferable that the heating is maintained until the reverse
magnetization of the magnetic layer comes to completion.
[0222] As one type of pulse-like laser beam, there is a laser such
as a mode lock laser capable of generating an ultra short pulse
attaining a picosecond or femtosecond level at a high frequency.
During a time period in which the ultra short pulses are applied at
a high frequency, although the laser beam disappears for an
extremely short time between the ultra short pulses, a heated area
cools hardly because of the extremely short time. That is, an area
raised once up to a temperature exceeding the Curie temperature is
kept at a temperature above the Curie temperature.
[0223] Accordingly, in such a case, a continuous illumination time
(continuous illumination time including a time between the ultra
short pulses for which the laser beam disappears) is set as one
pulse. Moreover, a value obtained by the integration of an energy
illumination quantity for a continuous illumination time is set as
power per pulse (mJ/cm.sup.2).
[0224] A means for exposing a magnetic layer to an external
magnetic field can accept the employment of a magnetic head, the
use of a plurality of electromagnets or permanent magnets disposed
so that a magnetic field appears in a magnetizing direction, or a
combination of these different means.
[0225] Incidentally, it is preferable that the external magnetic
field applying direction is any one of a circumferential direction
and radial direction of the magnetic disk 1 and a direction
perpendicular to a disk surface.
[0226] According to the present invention, a sufficient spacing
corresponding to a focal length exists between the imaging means
and a magnetic disk, which eliminates a possibility that the
magnetic disk is damaged because of dust getting therebetween or
damaged due to the contact with other components stemming from the
waviness of the magnetic disk. That is, this can solve the problem
arising with the conventional printing technique.
[0227] Since the distance to the imaging plane is determined in
advance, the separation between the imaging plane and the magnetic
disk is adjusted to this distance.
[0228] Preferably, for the formation of a magnetic pattern, a
shading plate capable of intercepting an energy beam partially is
placed between the energy beam source and the mask means or between
the mask means and the magnetic disk for providing a structure
capable of preventing the energy beam from being re-applied
thereto.
[0229] As the shading plate, any device is also acceptable if it
does not permits the transmission of the wavelength of an energy
beam being used, or reflects or absorbs the energy beam. However,
since the absorption of the heat from the energy beam tends to have
influence on a magnetic pattern due to the heat, it is preferable
to employ a device or member having a high thermal conductivity and
a high reflectivity, for example, a metal plate made of Cr, Al, Fe
or the like.
[0230] If the substrate of a magnetic disk according to this
embodiment is made of a glass, since the dispersion quantity of the
heat from the energy beam due to the heat diffusion is small, it is
possible to use the energy efficiently, so the employment of this
glass substrate is preferable. Add to it that the less heat
diffusion can improve the resolution on the magnetic pattern. The
employment of the glass substrate according to the present
invention provides a strong resistance to insertion of dirt
particles and to occurrence of cracks in the magnetic disk or
damage of the master stemming from the hard substrate surface.
[0231] In addition, in order to prevent the magnetic disk from
being damaged in a magnetic pattern forming process, it is
preferable that a protective layer with a thickness of 50 nm is
placed on the magnetic layer. In a case in which the magnetic layer
is made up of a plurality of layers, the protective layer is placed
on the magnetic layer close to the uppermost surface of the
magnetic disk. More preferably, a lubricant layer whose thickness
is less than or equal to 10 nm is placed on the protective
layer.
[0232] In this embodiment, the following methods can be taken as a
combination of a process of heating a magnetic layer locally and a
process of exposing the magnetic layer to an external magnetic
field.
[0233] Mode 1: a method of forming a magnetic pattern by exposing a
magnetic layer to a weak external magnetic field simultaneously
with heating it so that only the heated portion is magnetized in
the direction of the external magnetic field. This enables easy
formation of the magnetic pattern and permits the use of the weak
external magnetic field.
[0234] Mode 2: a method of forming a magnetic pattern by
magnetizing a magnetic layer uniformly with a strong external
magnetic field in a desired direction before heating it and then
heating a desired portion thereof concurrently with exposing the
desired portion to a weak magnetic field for magnetizing it in a
direction opposite to that before the heating. This provides a
magnetic pattern having an enhanced signal strength and an
excellent C/N and S/N.
[0235] These methods will be described hereinbelow.
[0236] The direction of the external magnetic field exposure made
concurrently with the heating in the mode 1 varies according to
type of a magnetic layer of a magnetic disk. In the case of a
magnetic disk in which the axis of easy magnetization lies in a
longitudinal direction, the exposure to the external magnetic field
is made so that the magnetic layer is magnetized in a direction
identical or opposite to the traveling direction (moving direction
of the head relative to the magnetic disk) of a data
writing/reproducing head. Moreover, the exposure to the external
magnetic field can also be made so that the magnetic layer is
magnetized in a radial direction of the magnetic disk. In a case in
which the axis of easy magnetization lies in directions
perpendicular to the longitudinal direction, the exposure to the
external magnetic field is made so that the magnetic layer is
magnetized in one of the perpendicular directions.
[0237] In this case, the strength of the magnetic field,although
varying according to property of a magnetic layer of a magnetic
disk, is set to be lower than the corecivity at the room
temperature. Preferably, the magnetic field is set to be equal to
or more than 1/8 of the corecivity of the magnetic layer at the
room temperature. Below this value, the heated portion receives the
influence of the magnetic field from a peripheral magnetic domain
when cooled, and hence there is a possibility that it is again
magnetized in the same direction as that of the periphery.
[0238] However, it is preferable that the magnetic field strength
is set to be less than or equal to 2/3 of the corecivity of the
magnetic layer at the room temperature. Above this value, it can
exert influence on the magnetic domains around the heated portion.
More preferably, the magnetic field strength is set to be less than
or equal to 1/2 of the corecivity thereof.
[0239] The heating is made up to a temperature at which the
corecivity of the magnetic layer starts to lower, for example, to a
value in the vicinity of the Curie temperature of the magnetic
layer. Preferably, the heating is made to 100.degree. C. or more. A
magnetic layer, which receives the influence of an external
magnetic field below 100.degree. C., tends to have a magnetic
domain with low stability at the room temperature. Moreover, it is
preferable that the heating temperature is less than or equal to
400.degree. C. If exceeding this temperature, the possibility
exists that the magnetic layer deforms.
[0240] The direction of the external magnetic field before the
heating in the mode 2 varies with the type of a magnetic layer of a
magnetic disk. In the case of a magnetic disk in which the axis of
easy magnetization lies in a longitudinal direction, the exposure
to the external magnetic field is made so that the magnetic layer
is magnetized in a direction identical or opposite to the traveling
direction (moving direction of the head relative to the magnetic
disk) of a data writing/reproducing head. Moreover, in a case in
which the magnetic disk has a circular configuration, the exposure
thereto can also be made so that the magnetic layer is magnetized
in a radial direction of the magnetic disk. In a case in which the
axis of easy magnetization lies in directions perpendicular to the
longitudinal direction, the exposure thereto is made so that the
magnetic layer is magnetized in one of the perpendicular
directions.
[0241] Although the strength of the magnetic field varies with the
property of the magnetic layer of the magnetic disk, it is
preferable that the magnetization thereof is made by a magnetic
field equal to or more than twice the corecivity of the magnetic
layer at the room temperature. Below this value, the possibility
exists that the magnetization becomes insufficient.- However, in
consideration of the ability of a magnetizing device to be used for
magnetic filed application, it is preferable that the magnetic
field strength is set to be less than or equal to five times the
corecivity of the magnetic layer at the room temperature.
[0242] The direction of the magnetic field to be applied
simultaneously with the heating in the mode 2 is opposite to the
magnetic field direction before the heating.
[0243] In this case, the magnetic field strength is similar to that
of the external magnetic field applied concurrently with the
heating in the mode 1, and the heating temperature is the same as
that in the mode 1.
[0244] By optimizing the above-mentioned conditions, a magnetic
pattern is formable with higher accuracy, and the quality of the
output signal is improvable. That is, it is possible to form a
pattern which provides a small magnetic transition width, extremely
sharp magnetic transition at the boundary of a magnetic domain and
a high-quality output signal. Depending upon the selection of the
conditions, magnetic transition widths less than or equal to not
only 1 .mu.m, but also 0.5 .mu.m and even 0.3 .mu.m becomes
possible.
[0245] In this embodiment, the magnetic transition width signifies
a magnetic pulse width (that is, full width at half maximum)
corresponding to 50% of the maximum magnetization for a reproduced
signal waveform obtained by reproducing a magnetic pattern through
the use of a magnetic head.
[0246] In addition, the method according to the present invention
has an advantage of suppressing the laser beam intensity to a lower
value as compared with a conventional method of forming an
irregular pattern by means of a laser beam, and can prevent the
flying head from being unstable due to the absence of
irregularities.
[0247] According to this method, since a combination of the local
heating by a local heating means and the exposure to an external
magnetic field by an external magnetic field applying means is
employed for the formation of a magnetic pattern, it is possible to
form a magnetic pattern without using a powerful external magnetic
field applying means, unlike the conventional technique. Moreover,
since no magnetization is made even if a magnetic field is applied
to other than the heated area, the formation of a magnetic domain
is limited to the heated area. Thus, it is possible to form a
pattern which provides a small magnetic transition width, extremely
sharp magnetic transition at the boundary of a magnetic domain and
a high-quality output signal. Depending upon the selection of the
conditions, it is possible to set the magnetic transition width at
1 .mu.m and below.
[0248] According to this technique, unlike the conventional
magnetic printing technique, there is no need to press a magnetic
disk and a master disk into an integrated condition by means of
vacuum adhesion or the like, which eliminates the need for a
complicated disk holding means. Moreover, although the conventional
technique requires repeated adhesion/removal of a mask at every
replacement of a magnetic disk, this technique does not require the
removal of a mask after it is once set. Add to it that, since the
disk and the mask are positioned in a separated condition, the
handling such as attachment/removal of the disk or the mask becomes
easy.
[0249] In addition, since an energy beam is used for the local
heating, it is easy to control a portion to be heated and
power.
[0250] Still additionally, because of the employment of a reduction
projection technique, as compared with the conventional printing
apparatus, if the mask alignment accuracy or mask patterning
accuracy with respect to a magnetic disk is the same, a more minute
magnetic pattern is formable with high accuracy.
[0251] Using a mask having a transmissive part allowing partial
transmission of an energy beam, so-called a photomask, the pattern
formation becomes easy and a high processing accuracy is
attainable, which provides a high-precision mask and enables the
formation of a higher-accuracy magnetic pattern.
[0252] As an energy beam source, any source is also acceptable if
it is capable of heating a surface of a recording layer partially,
but a laser beam source is preferable from the viewpoint of
preventing an unnecessary portion from being exposed to the energy
beam.
[0253] For making the magnetic transition width sharp, it is
preferable to use a pulse-like laser beam which provides a large
difference in temperature between the energy beam illumination and
the energy beam non-illumination and eliminates easy occurrence of
heat storage.
[0254] Although it is acceptable to convert a continuous laser beam
into a pulse-like form through the use of an optical device, the
employment of a pulse laser source is particularly preferable. The
pulse laser source is for generating a laser beam intermittently in
a pulse-like form, and can emit a laser beam with high peak power
for an extremely short time to prevent easy occurrence of heat
storage.
[0255] When a condenser lens is located before a mask, it is
possible to make the intensity distribution of an energy beam
uniformly and condense the energy beam toward an imaging means.
Therefore, the location of the condenser lens is preferable.
[0256] Meanwhile, requirements exist for shortening the time to be
taken for the formation of a magnetic pattern on the magnetic disk
1 to the utmost while maintaining a high resolution for realizing
high productivity.
[0257] For shortening the magnetic pattern formation time to the
utmost, for example, it is considered to apply the energy beam 11
to a wide area (for example, entire surface) of the magnetic disk 1
for forming a magnetic pattern over the wide area of the magnetic
disk 1 at a time. However, in this case, there is a need to use a
large-sized illuminating optical system 63 (particularly, light
source 41) or projection optical system 64, which leads to an
increase in cost.
[0258] For this reason, a desirable approach is to scan the
magnetic disk 1 with an energy beam in a circumferential direction
of the magnetic disk 1 while employing a small-sized and low-priced
illuminating optical system 63 (particularly, light source 41) or
projection optical system 64 [that is, system which can apply an
energy beam to only a small area on the magnetic disk 1 (that is,
system having a small imaging range)], for realizing efficient
formation of a magnetic pattern for as a short time as
possible.
[0259] In particular, in a case in which the magnetic disk 1 is a
longitudinal magnetic recording medium, there is a need to apply a
magnetic field in a disk circumferential direction for the
formation of a magnetic pattern, but difficulty is encountered in
applying the magnetic field to the entire surface of the magnetic
disk 1 in the disk circumferential direction at a time. For this
reason, for the formation of a magnetic pattern on the entire
surface of the magnetic disk 1, an efficient manner is writing a
magnetic pattern intermittently on each of small ranges (for
example, short arcuate sectors) obtained by dividing the magnetic
disk 1 along the disk circumferential direction.
[0260] Accordingly, in this embodiment, for the formation of a
magnetic pattern on the entire surface of the magnetic disk 1, the
magnetic disk 1 is scanned two-dimensionally with a spot-like
(small square, ellipse or circle) energy beam (laser beam spot)
capable of illuminating a small range on the magnetic disk. This
can form a magnetic pattern efficiently in a small amount of time
while achieving a small-sized and low-priced illuminating optical
system 63 (particularly, light source 41) or the projection optical
system 64.
[0261] In this case, preferably, the spot size of the spot-like
energy beam is approximately {fraction (1/10)} to {fraction
(1/10,000)} of the radius of the magnetic disk 1. In particular,
considering the object of the present invention that a small spot
diameter is acceptable, although it is preferable that the spot
size (spot diameter) is set to be less than or equal to {fraction
(1/10)} of the radius, since a too small spot size causes a long
time to be taken for the pattern formation, preferably, the spot
size is equal to or more than {fraction (1/10,000)}.
[0262] For example, in the case of a common magnetic disk having a
diameter of 2.5 inches or the like, an appropriate spot size (spot
diameter) is in a range of approximately 10 .mu.m to approximately
1 mm.
[0263] In this case, as the light source 41 of the illuminating
optical system 63, a source is employed which is capable of
emitting a spot-like laser beam, and in this case, for scanning a
wide area for as a short time as possible, it is preferable to use
a device capable of an energy beam in the form of a short pulse at
a high speed. For example, it is preferable to use a pulse YAG
laser based on LD continuous excitation, which shows high
stability, high frequency and small energy per pulse. In this case,
the laser beam spot has a rectangular configuration and the size
thereof is approximately 0.2 mm long by approximately 0.2 mm
broad.
[0264] In the case of the use of a device such as an eximer laser
which provides a relatively high output, irrespective of the
illumination range being large, it is possible to heat the magnetic
disk 1 up to a temperature at which the magnetization becomes
possible (it is possible to sufficiently secure energy per unit
illumination area). On the other hand, since a YAG laser can
produce only a relatively low output, the illumination with a laser
beam with a relatively small illumination area (spot-like
configuration) is made to give sufficient energy per unit
illumination area in order to secure a heating performance capable
of magnetizing the magnetic disk 1.
[0265] In this connection, in this embodiment, although various
types are available as the light source 41 as mentioned above, in
the case of the use of a high-power (high-output) and
wide-illumination-range laser such as a eximer laser for generating
an energy beam (laser beam) in a spot-like form, a shading plate,
for example, can be used so that a laser beam to be applied is
shaped into a spot-like laser beam.
[0266] In addition, in this embodiment, the scanning with the
energy beam 11 is made in radial directions of the magnetic disk 1
and the mask 12 while they are rotated as mentioned above. This is
called r-.theta. direction scanning (radial-circumferential
direction scanning).
[0267] In this case, the formation of a magnetic pattern on the
entire surface of the magnetic disk 1 is effected in a mariner that
the scanning with an energy beam 11 is linearly (or in an arcuate
fashion) made only once from a point near the central portion of
the magnetic disk 1 to a point near the outermost circumferential
portion (from a point near the outermost circumferential portion to
a point near the central portion of the magnetic disk 1) on the
magnetic disk 1. As a manner of scanning the magnetic disk 1 with
the energy beam 11 in a radial direction of the magnetic disk 1
while rotating the magnetic disk 1 and the mask 12, there are a
method of continuously scanning the magnetic disk 1 with the energy
beam 11 from a portion near the central portion to a portion near
the outermost circumferential portion (from a portion near the
outermost circumferential portion to a portion near the central
portion) on the magnetic disk 1 for performing a spiral scanning
with the energy beam 11 and a method of stepwise changing the
position of the illumination by the energy beam 11 more-than-one
times along a radial direction of the magnetic disk 1 for
performing concentric scanning with the energy beam 11.
[0268] Concretely, for making a scan with an energy beam in a
radial direction of a magnetic disk and a mask, in this embodiment,
the position of the energy beam illumination made through the
illuminating optical system 63 is fixed and the locations of the
projection optical system 64 and the magnetic field applying means
62 are fixed, while the disk stage 60 and the mask stage 61 (that
is, the magnetic disk 1 and the mask 12) are shifted (for scanning)
in a direction orthogonal to (perpendicularly intersecting) the
axis of the energy beam 11 (optical axis of a laser beam) applied
through the illuminating optical system 63 and the projection
optical system 64.
[0269] That is, the disk stage 60 and the mask stage 61 are located
separately in parallel with each other and the projection optical
system 64 is placed between the disk stage 60 and the mask stage 61
to be at right angles to the disk stage 60 and them ask stage 61 so
that the exit of the projection optical system 64 is located in
opposed relation to the disk stage 60 and the entrance of the
projection optical system 64 is situated in opposed relation to the
mask stage 61. Moreover, the disk stage 60 and the mask stage 61
are shifted in parallel in a state where the relationship in
location among the disk stage 60, the mask stage 61 and the
projection optical system 64 remains maintained.
[0270] From a method in which the magnetic disk 1 and the mask 12
are scanned with the energy beam 11 in radial directions of the
magnetic disk 1 and the mask 12 by shifting the disk stage 60 and
the mask stage 61 (that is, the magnetic disk 1 and the mask 12),
this is referred to as a "stage scan method (table scan method,
disk scan method)".
[0271] Accordingly, as FIG. 1 shows, the magnetic pattern forming
apparatus according to the present invention is, as mentioned
above, made up of the disk spindle motor (disk rotating actuator,
disk rotating means) 2 for rotationally driving the disk 1 and the
mask spindle motor (mask rotating actuator, mask rotating means) 65
for rotationally driving the mask 12, and further includes a disk
stage linear motor 66 for driving the disk stage 60, a mask stage
linear motor 67 for driving the mask stage 61 and a controller
(control means) 68 for controlling the operations of these disk
spindle motor 2, mask spindle motor 65, disk stage linear motor 66
and mask stage linear motor 67.
[0272] In this embodiment, the disk spindle motor 2 is held on the
disk stage 60 to be movable together with the disk stage 60. In
like manner, the mask spindle motor 65 is held on the mask stage 61
to be movable together with the mask stage 61.
[0273] Of these components, the disk stage linear motor (disk stage
driving actuator, disk holding means driving actuator, disk stage
driving means) 66 is connected to the disk stage 60 to move the
disk stage 60 relatively with respect to the projection optical
system 64 set in a fixed condition.
[0274] That is, the disk stage linear motor 66 is designed to
operate on the basis of a control signal (operation signal) from
the control means 68, and upon an operation of the disk stage
linear motor 66, the disk stage 60 is made to be shifted in
parallel in the same plane in a direction orthogonal to the energy
beam 11 (the optical axis of the laser beam) applied through the
projection optical system 64.
[0275] Thus, the scanning with the energy beam 11 given through the
exit of the projection optical system 64 located in a fixed
condition can be made from a point in the vicinity of the central
portion to a point in the vicinity of the outermost circumferential
portion (or from a point near the outermost circumferential portion
to a point near the central portion) on the magnetic disk.
[0276] The mask stage linear motor (mask stage driving actuator,
mask holding means driving actuator, mask stage driving means) 67
is connected to the mask stage 61 to move the mask stage 61
relatively with respect to the illumination position of the fixed
illuminating optical system 63 or the fixed projection optical
system 64.
[0277] That is, the mask stage linear motor 67 is designed to act
on the basis of a control signal (operation signal) from the
control means 68, and upon an operation of the mask stage linear
motor 67, the mask stage 61 is shifted in parallel in the same
plane in a direction orthogonal to the energy beam 11 (the optical
axis of the laser beam) given from the illuminating optical system
63 toward the projection optical system 64.
[0278] Thus, the scanning with the energy beam 11 applied from the
illuminating optical system 63, whose illumination position is
fixed, toward the projection optical system 64 can be made from a
point in the vicinity of the central portion to a point in the
vicinity of the outermost circumferential portion (or from a point
near the outermost circumferential portion to a point near the
central portion) on the mask 12.
[0279] The control means 68 controls the disk spindle motor 2 and
the mask spindle motor 65 for turning the magnetic disk 1 and the
mask 12 at an equal speed, and outputs a control signal to the disk
stage linear motor 66 and the mask stage linear motor 67 for
controlling the scanning so that the energy beam 11 to be applied
to the magnetic disk 1 and the energy beam 11 to be applied to the
mask 12 are in synchronism with each other.
[0280] In this case, the control means 68 controls the operation of
the disk stage linear motor 66 by outputting a control signal
thereto, and at this time, controls the moving quantity, moving
speed and others of the disk stage 60.
[0281] In like manner, the control means 68 controls the operation
of the mask stage linear motor 67 by outputting a control signal
thereto, and at this time, controls the moving quantity, moving
speed and others of the mask stage 61.
[0282] In addition, the control means 68 is made to output the
control signals for the disk stage linear motor 66 and the mask
stage linear motor 67 in a synchronized condition so that the disk
stage 60 and the mask stage 61 are moved in a synchronized
condition.
[0283] Still additionally, the control means 68 is made to control
the moving speeds of the mask stage 61 and the disk stage 60 on the
basis of a ratio of the speed (moving speed) at which the mask
stage 61 is moved and the speed (moving speed) at which the disk
stage 60 is moved, set according to a reduction ratio to be taken
for when a mask pattern is projected onto the magnetic disk 1 at a
predetermined reduction ratio by illuminating the magnetic disk 1
with the spot-like energy beam 11.
[0284] For example, if the predetermined reduction ratio for the
reduction projection is set to be 1/2, the moving speed of the mask
stage 61 and the moving speed of the disk stage 60 is set so that
the speed ratio thereof is 2:1.
[0285] In this way, the mask stage 61 and the disk stage 60 are
designed to be movable independently of each other so that the
moving speeds thereof are variable in accordance with the
predetermined reduction ratio, which can cope particularly with the
reduction projection.
[0286] Moreover, it is also appropriate that the control means 68
controls the rotational speeds of the magnetic disk 1 and the mask
12 on the basis of a speed ratio of a rotational speed of the
magnetic disk 1 and a rotational speed of the mask 12 set according
to a predetermined reduction ratio, and controls the moving speeds
of the mask stage 61 and the disk stage 60 to speeds equal to each
other.
[0287] The magnetic pattern forming apparatus according to this
embodiment is constructed as described above, and is operated as
follows.
[0288] That is, in forming a desired magnetic pattern on the
magnetic disk 1 by applying the energy beam 11 through the mask 12
to the magnetic disk 1, having the magnetic layer 22a on a
substrate, for heating the magnetic layer 22a concurrently with
exposing the heated portion of the magnetic layer 22a to an
external magnetic field from the magnetic field applying means 62,
in a state where the magnetic disk 1 is rotated by the disk spindle
motor 2 and the mask 12 is rotated by the mask spindle motor 65 at
a speed equal to the rotational speed of the magnetic disk 1, the
scanning with the energy beams 11 are made by the disk stage linear
motor 66 and the mask stage linear motor 67 in the radial
directions of the magnetic disk 1 and the mask 12 in a synchronized
condition.
[0289] Concretely, the disk stage 60 carrying the magnetic disk 1
and the mask stage 61 carrying the mask 12 are moved in directions
orthogonal to the energy beam 11, and the scanning with the energy
beams 11 are made in the radial directions of the magnetic disk 1
and the mask 12 in a synchronized condition.
[0290] Accordingly, with the advantages of the magnetic pattern
forming apparatus and method according to this embodiment, in a
case in which a magnetic pattern is formed on the magnetic disk 1
by means of a combination of the local heating and the exposure to
an external magnetic field, a minute magnetic pattern is formable
efficiently with higher accuracy, which leads to providing a
higher-density recording type magnetic disk and magnetic recording
apparatus in a small amount of time and at a low cost.
[0291] In addition, without employing a large-sized illuminating
optical system 63 (particularly, light source 41) or projection
optical system 64, it is possible to form a magnetic pattern on the
magnetic disk 1 briefly and efficiently through the use of a
small-sized and low-priced illuminating optical system 63
(particularly, light source 41) or projection optical system 64
[system which can apply a beam to only a small area on the magnetic
disk 1 (that is, system having a small imaging range)], thus
realizing high productivity.
[0292] In the above-described embodiment, although the mask stage
61, the projection optical system 64 and the disk stage 60 are
disposed in series along the energy beam 11, it is also possible
to, in a state where the components of the magnetic pattern forming
apparatus and the operations thereof remain unchanged, change only
the disposition of the components.
[0293] That is, for example, as FIG. 6 shows, the disk stage 60 and
the mask stage 61 (namely, the magnetic disk 1 and the mask 12) are
put side by side (or juxtaposed) on the same plane.
[0294] In addition, a projection optical system 64A is constructed
as an inverted U-shaped type (inverse U-shaped) cylindrical member
so that an energy beam (an optical axis of a laser beam) has an
inverted U-like configuration (inverse U-like configuration), and
is composed of an entrance 64a constituting one end portion
thereof, an exit 64b constituting the other end portion thereof and
a linear main part 64c making connection between the entrance 64a
and the exit 64b.
[0295] Still additionally, the projection optical system 64A is
located in opposed relation to the magnetic disk 1 and the mask 12.
That is, the entrance 64a of the projection optical system 64A is
positioned to face the mask 12 while the exit 64b thereof is
positioned to, face the magnetic disk 1.
[0296] In this case, the disk stage 60 and the mask stage 61 are
designed to be moved in the same plane in the same direction in a
synchronized condition (translation motion).
[0297] In the above-described embodiment, although the magnetic
field applying means 62 has a bar-like configuration extending
radially throughout the generally entire length of the magnetic
disk 1, any device is also acceptable if it can apply a magnetic
field to at least a portion (-illuminated portion, illuminated
position) of the magnetic disk 1 heated by a spot-like energy beam
11. For example, as well as a magnetic field applying means
according to a second embodiment which will be described later, it
is also possible to use a type which can be attached to the tip
portion of the exit of the projection optical system 64 (see FIGS.
9A and 9B). (Description of Magnetic Recording Apparatus) A
magnetic recording apparatus according to this embodiment is made
up of the above-mentioned magnetic disk 1, a driving section for
driving the magnetic disk 1 in a recording direction, a magnetic
head comprising a recording section and a reproducing section, a
means for moving the magnetic head relatively with respect to a
magnetic recording medium, and a recording/reproduced signal
processing means for making the input of a recording signal to the
magnetic head and the output of a reproduced signal from the
magnetic head. In general, for high-density recording, the magnetic
head to be used is of a flying/contact type.
[0298] Because of the use of a magnetic disk having a formed minute
and high-accuracy magnetic pattern such as a servo pattern, this
magnetic recording apparatus enables high-density recording.
Moreover, since no flaw and less defect exists on the magnetic
disk, the recording with less error becomes possible.
[0299] In addition, even if the present invention is applied to a
magnetic recording apparatus made such that, after a magnetic disk
is incorporated into the apparatus, the aforesaid magnetic pattern
is read out by a magnetic head to obtain a reproduced signal so
that a servo burst signal is recorded by the magnetic head with
this reproduced signal being used as a standard signal, a precise
servo signal is easily obtainable.
[0300] Still additionally, if a signal recorded as a magnetic
pattern according to the present invention is left in other than a
user data area even after the servo burst signal is recorded by the
magnetic head, when the position of the magnetic head shifts due to
some disturbance, the magnetic head can easily be returned to a
desired position. Accordingly, this offers a high-reliability
magnetic recording apparatus in which the signals according to both
the writing methods exist.
[0301] The magnetic recording apparatus according to the present
invention comprises at least one magnetic disk mentioned above, a
driving section for driving this magnetic disk in a recording
direction, a magnetic head including a recording section and a
reproducing section, a means for moving the magnetic head
relatively with respect to the magnetic disk, and a
recording/reproduced signal processing means for making the input
of a signal to the magnetic head and the output of a reproduced
signal from the magnetic head.
[0302] In addition, when the present invention is applied to a
magnetic recording apparatus made such that, after a magnetic disk
is incorporated into the apparatus, the aforesaid magnetic pattern
is read out by a magnetic head to obtain a reproduced signal so
that a servo burst signal is recorded by the magnetic head with
reference being made to this reproduced signal, a precise servo
signal is easily obtainable. Moreover, if a signal recorded as a
magnetic pattern according to the present invention is left in
other than a user data area even after the servo burst signal is
recorded by the magnetic head, when the position of the magnetic
head shifts due to some disturbance, the magnetic head can easily
be returned to a desired position. Accordingly, magnetic recording
apparatus in which the signals according to both the writing
methods exist offers high reliability.
[0303] A description will be given hereinbelow of an example of
magnetic disk apparatus represented as a magnetic recording
apparatus.
[0304] The magnetic disk apparatus is made up of a shaft for fixing
one magnetic disk or a plurality of magnetic disks in a commonly
skewering manner, a motor for turning the magnetic disk joined
through a bearing to the shaft, a magnetic head to be used for
recording and/or reproduction, an arm for holding the head, and an
actuator capable of shifting the head through the head arm to an
arbitrary position above a magnetic recording medium, with the
recording/reproducing head being moved at a constant flying
quantity above the magnetic recording medium. The recording
information is converted through the signal processing means into a
recording signal which in turn, is recorded by the magnetic head.
Moreover, the reproduced signal read out by the magnetic head is
inversely converted through the same signal processing means to
acquire reproduced information.
[0305] On the disk, information signals are recorded in units of
sectors along concentric tracks. A servo pattern is generally
recorded between the sectors. The magnetic head reads a servo
signal from the pattern to precisely perform the tracking to the
center of a track for reading out the information signal in that
sector. In like manner, the tracking is made also at the
recording.
[0306] As mentioned above, since a servo pattern which generates a
servo signal, is made to be used for the purpose of the tracking in
the recording of information, it is particularly required to have
high accuracy. Moreover, a servo pattern which has presently been
put to use comprises two sets of patterns shifted by 1/2 pitch from
each other in each track and, hence, is required to be formed at an
interval of 1/2 pitch of the information signal, so the double
accuracy is necessary.
[0307] However, in the case of a conventional servo pattern forming
method, because of the influence of vibration occurring due to the
difference in center of gravity between an external pin and an
actuator, the limit of a write track width becomes 0.2 to 0.3
.mu.m, and the servo pattern accuracy cannot catch up with the
increase in track density, which tends to cause the hindrance to
the recording density improvement and cost reduction of a magnetic
recording apparatus.
[0308] According to this embodiment, since a high-accuracy magnetic
pattern can efficiently be formed through the use of a reduction
projection technique, as compared with the conventional servo
pattern forming method, it is possible to form a servo pattern at a
considerably lower cost and in a considerably smaller amount of
time, and for example, it is possible to enhance the track density
of a magnetic disk to above 40 kTPI. Accordingly, a magnetic
recording apparatus using this magnetic disk can provide
high-density recording.
[0309] In addition, since the use of a phase shift servo system can
offer a continuously varying servo signal, it is possible to
enhance the track density, and to conduct the tracking below a
width of 0.1 .mu.m, thus achieving higher-density recording.
[0310] As described above, a magnetic pattern extending linearly
and obliquely with respect to a radial direction from an inner
circumference to an outer circumference is used for a phase shift
servo system. With the conventional servo pattern forming method in
which a servo signal is recorded by each track while a disk is
rotated, it is relatively hard to form such a radially continuing
pattern or oblique pattern, and it is required to use complicated
calculation or arrangement therefor.
[0311] On the other hand, according to this embodiment, if a mask
corresponding to the aforesaid pattern is once produced, the
pattern can easily be formed simply by producing a reduced image at
a desired position on a disk with an energy beam after passed
through the mask; therefore, a magnetic disk for use in a phase
shift servo system is easily producible in a small amount of time
and at a low cost, thus leading to providing a phase shift servo
type magnetic recording apparatus capable of achieving the
high-density recording.
[0312] In particular, this embodiment is suitable for high-density
recording on a small-diameter magnetic disk because the energy beam
is narrowed down, and preferably applicable to a magnetic disk
having a diameter less than or equal to 65 mm, more preferably less
than or equal to 2 inches, and much more preferably less than or
equal to 1 inch.
[0313] So far, as the main currents of servo pattern forming
methods, after a magnetic disk is incorporated into a magnetic
recording apparatus (drive), the servo pattern formation is
implemented with a dedicated servo writer in a clean room.
[0314] In this case, after each drive is mounted in a servo writer,
patterns are recorded along a track one by one while the magnetic
head is mechanically moved in a state where a pin of a servo writer
inserted into a hole made in one of a face or back of the drive, so
it takes time as long as 15 to 20 minutes per drive. Since a hole
is made in the drive in addition to the use of the dedicated servo
write, these works are required to done in a clean room, which
leads to a cumbersome process and an increase in cost.
[0315] According to this embodiment, since the illumination with an
energy beam is made through a mask on which a pattern is recorded
in advance, a servo pattern or a standard pattern for the recording
of the servo pattern can be recorded collectively, which enables
the formation of a servo pattern to be implemented in an extremely
easy way and in a small amount of time. In the case of a magnetic
recording apparatus accommodating a magnetic disk having a servo
pattern formed in this way, the aforesaid servo pattern writing
process becomes unnecessary.
[0316] On the other hand, for a magnetic recording apparatus
accommodating a magnetic disk having a standard pattern for the
recording of a servo pattern, a desired servo pattern is writable
in the apparatus on the basis of the standard pattern, which
eliminates the need for the use of the aforesaid servo writer and
for the work in a clean room.
[0317] Add to it that, since there is no need to make a hole in the
back of the magnetic recording apparatus, the durability and safety
are preferably improvable.
[0318] Furthermore, according to the present invention, since a
space equivalent to a focal length is defined between the imaging
means and the magnetic disk, it is possible to prevent the magnetic
disk from being damaged due to the contact with other components or
due to the insertion of microscopic dirt particles or dust, thus
avoiding the occurrence of defects.
[0319] As described above, this embodiment can provide a magnetic
recording apparatus, capable of achieving high-density recording,
in a simple process and at a low cost.
[0320] As the magnetic head to be used, there are various types of
heads such as a thin-film head, an MR head, a GMR head and a TMR
head.
[0321] When the reproducing section of the aforesaid magnetic head
is constructed with an MR head, even in the case of the high
recording density, a sufficient signal strength is attainable,
which contributes to the realization of a magnetic recording
apparatus whereby higher recording density is achievable.
[0322] If this magnetic head is used at a flying height more than
or equal to 0.001 .mu.m but less than 0.05 .mu.m, below that of the
conventional technique, the improved output is obtainable, which
provides high apparatus S/N and offers a magnetic recording
apparatus with a high capacity and with high reliability.
[0323] In addition, if a signal processing circuit based on a most
likelihood decode method is used in a combined state, the recording
density is further improvable, and for example, even in the case of
the recording/reproduction at a track density of 13 kTPI or more, a
linear recording density of 250 kFCI and a recording density of 3
Gbit or more per square inch, a sufficient S/N is attainable.
[0324] Still additionally, if the reproducing section of the
magnetic head is constructed as a GMR head comprising a plurality
of conductive magnetic layers, whose resistance varies greatly when
their magnetizing directions vary relatively with an external
magnetic field, and conductive non-magnetic layers placed among the
conductive magnetic layers, or a GMR head utilizing the spin-valve
effect, it is possible to further enhance the signal strength, thus
realizing a high-reliability magnetic recording apparatus having a
recording density exceeding 10 Gbit per square inch and a linear
recording density exceeding 350 kFCI.
Description of Second Embodiment
[0325] Furthermore, referring to FIGS. 7, 8, 9A and 9B, a
description will be given hereinbelow of a magnetic pattern forming
apparatus and method, magnetic disk and magnetic recording
apparatus according to a second embodiment of the present
invention.
[0326] A difference of the magnetic pattern forming apparatus
according to this embodiment from the above-described first
embodiment is a construction for scanning with an energy beam in
radial directions of a magnetic disk and a mask.
[0327] That is, in the above-described first embodiment, the
illuminating optical system 63, the projection optical system. 64
and the magnetic field applying means 62 are set in fixed
conditions and the disk stage 60 and the mask stage 61 are moved
(operated for scanning) in a direction orthogonal to the energy
beam 11 (the optical axis of a laser beam) given through the
illuminating optical system 63 and the projection optical system
64, whereas in this embodiment, as shown in FIGS. 7 and 8, the
positions of a magnetic disk 1 and a mask 12 are fixed (however,
the magnetic disk 1 and the mask 12 are rotated) and a projection
optical system 64B is to be rotated (operated for scanning,
shifted, or rocked).
[0328] In addition, in the above-described first embodiment, the
magnetic field applying means 62 is fixed, whereas in this
embodiment, the magnetic field applying means 71 is made to be
rotated (moved) together with the projection optical system 64B.
Still additionally, although, in the above-described first
embodiment, the position of the energy beam illumination made
through the illuminating optical system 63 is fixed, in this
embodiment, the position of the energy beam illumination made
through the illuminating optical system 63 is made to be changed to
the position of the projection optical system 64B.
[0329] Concretely, in this magnetic pattern forming apparatus, the
magnetic disk 1 and the mask 12 are juxtaposed on the same plane as
shown in FIGS. 7 and 8. Incidentally, in this embodiment, since
there is no need to move the magnetic disk 1 and the mask 12, a
disk stage and a mask stage are not provided therein.
[0330] In addition, the projection optical system 64B is
constructed as an inverted U-shaped (inverse U-like) 96 cylindrical
member so that an energy beam runs along an inverted U-like
(inverse U-like) configuration, and is composed of an entrance 64a
constituting its one end portion, an exit 64b constituting the
other end portion and a linear main part 64c making connection
between the entrance 64a and the exit 64b.
[0331] Still additionally, the projection optical system 64B is
located in opposed relation to the magnetic disk 1 and the mask 12.
That is, the projection optical system 64B is disposed so that the
entrance 64a of the projection optical system 64B is placed in
opposed relation to the mask 12 while the exit 64b thereof is
situated in opposed relation to the magnetic disk 1.
[0332] In particular, the projection optical system 64B thus
constructed is made such that the main part 64c extending linearly
is supported at a supporting point O to be rotatable around this
supporting point (fixed point) O (with the supporting point O
serving as the center of rotation).
[0333] In this case, at the supporting point O of the linear main
part 64c, the projection optical system 64B is connected to a
rotary shaft (spindle, supporting member) of a projection optical
system spindle motor 70 which will be mentioned later. The
operation of this projection optical system spindle motor 70
rotates the projection optical system 64B with the supporting point
O (spindle connection portion) serving as the center of
rotation.
[0334] At this time, the position of the supporting point O, i.e.,
the position of the supporting point O on the linear main part 64c,
is determined in accordance with as projection ratio to be taken
for when a reduction projection is made through the projection
optical system 64B. That is, a predetermined reduction ratio for
the reduction projection using the projection optical system 64B is
set on the basis of a ratio of a distance from the supporting point
O to the entrance 64a and a distance from the supporting point O to
the exit 64b.
[0335] For example, in a case in which the predetermined reduction
ratio for the reduction projection is set to 1/2, the distance
between the supporting point O and the entrance 64a and the
distance between the supporting point O and the exit 64b are
determined so that the ratio thereof is 2 to 1.
[0336] The change of the position of the supporting point O
according to the predetermined reduction ratio can change the
rotating radius at the rotation of the projection optical system
64B; in consequence, the moving distance of the entrance 64a and
the moving distance of the exit 64b when the projection optical
system 64B is put to rotation can be set according to the
predetermined reduction ratio. Therefore, the application to a
reduction projection is particularly preferable.
[0337] It is also appropriate that the ratio of the distance
between the supporting point O and the entrance 64a and the
distance between the supporting point O and the exit 64b is set to
1:1 and the control means 68 controls the rotational speeds of the
magnetic disk 1 and the mask 12 on the basis of a ratio of the
rotational speeds of the magnetic disk 1 and the mask 12 set
according to a predetermined reduction ratio.
[0338] In addition, the projection optical system 64B can be
rotated around the supporting point O so that the entrance 64a is
moved (rotated, shifted for scanning) in a radial direction of the
mask 12 to draw an arcuate locus and, at the same time, the exit
64b is moved (rotated, shifted for scanning) in a radial direction
of the magnetic disk 1 to draw an arcuate locus.
[0339] For example, in a case in which the entrance 64a is moved
along the radial direction of the mask 12 from a point in the
vicinity of the central portion of the mask 12 to a point in the
vicinity of the outermost circumferential portion thereof, the exit
64b is shifted from a point in the vicinity of the outermost
circumferential portion of the magnetic disk 1 to a point in the
vicinity of the central portion thereof along a radial direction of
the magnetic disk 1. On the other hand, in a case in which the exit
64b is moved along a radial direction of the magnetic disk 1 from a
point near the central portion of the magnetic disk 1 to a point
near the outermost circumferential portion thereof, the entrance
64a is shifted from a point near the outermost circumferential
portion of the mask 12 to a point near the central portion thereof.
Thus, the entrance 64a and the exit 64b are moved in opposite
directions.
[0340] Incidentally, because the projection optical system 64 B is
moved to perform the scanning with the energy beam 11 in the radial
directions of the magnetic disk 1 and the mask 12, it is called a
lens scanning system.
[0341] Accordingly, as FIG. 7 shows, this magnetic pattern forming
apparatus comprises, in addition to the disk spindle motor (disc
rotating actuator, disc rotating means) 2 for rotating the disk 1
and the mask spindle motor (mask rotating actuator, mask rotating
means) 65 for rotating the mask 12, a projection optical system
spindle motor 70 and a controller (control means) 68 for
controlling these disk spindle motor 2, mask spindle motor 65 and
projection spindle motor 70.
[0342] The projection optical system spindle motor (projection
optical system actuator, projection optical system rotating means,
entrance rotating means, exit rotating means) 70 has a positioning
control function to accurately control an angle of rotation of the
projection optical system 64 with respect to the magnetic disk 1
and the mask 12. For this reason, it is called a positioning
control function included spindle motor.
[0343] The control means 68 controls the operations of the disk
spindle motor 2 and the mask spindle motor 65 to rotate the
magnetic disk 1 and the mask 12 at equal speeds and outputs a
control signal to control the operation of the projection optical
system spindle motor 70 so that the energy beam 11 for the magnetic
disk 1 and the energy beam 11 for the mask 12 takes a synchronized
condition for scanning.
[0344] In this case, in outputting a control signal for controlling
the operation of the projection optical system spindle motor 70,
the control means 68 controls a rotating quantity (moving
quantity), a rotational speed (moving speed) and others of the main
part 64c.
[0345] For example, the magnetic field applying means 71 is
constructed as a bar-like magnetic field applying means 71'
extending throughout the generally overall length of the magnetic
disk 1 in its radial direction as indicated by a two-dot chain line
in FIG. 8.
[0346] In this case, as in the case of the above-described first
embodiment, the magnetic field applying means 71i is equipped with
a yoke and a pair of permanent magnets (for example, NdFe magnets
or the like), and the pair of permanent magnets are fixed onto the
yoke in a state where their magnetic poles are set in opposite
directions so that a magnetic field is produced to make connection
between the N-pole of one permanent magnet and the S-pole of the
other permanent magnet.
[0347] However, in consideration of the exposure of as a small area
as possible to an external magnetic field, it is preferable that an
area to which the external magnetic field is applied by the
magnetic field applying means 71 is only a portion (energy beam
applied portion, energy beam applied position) heated by exposure
to the energy beam 11. This is because, even if the magnetic field
is weak, when the magnetic field strikes on a portion other than
the energy beam applied portion, there is a possibility that an
unexpected reverse magnetization takes place.
[0348] For this reason, in this embodiment, the magnetic field
applying means 71 is attached to the tip portion of the exit 64b of
the projection optical system 64B to be movable together with the
projection optical system 64B as shown in FIG. 7.
[0349] As FIGS. 9A and 9B show, this magnetic field applying means
71 is composed of a pair of permanent magnets (for example, NdFe
magnets or the like) 72A, 72B and a pair of ferromagnetic members
(magnetic material; for example, Fe or the like) 73A, 73B.
[0350] That is, an objective lens 74 located at the tip side of the
exit 64b of the projection optical system 64B is interposed and
held between the tip portions of the pair of ferromagnetic members
73A and 73B, and the permanent magentas 72A and 72B are set between
one side surface of the ferromagnetic member 73A and one side
surface of the ferromagnetic member 73B and between the other side
surface of the ferromagnetic member 73A and the other side surface
of the feromagnetic member 73B, respectively, thereby organizing
the magnetic field applying means 71.
[0351] In this case, the N-poles of the permanent magnets 72A and
72B exist on the ferromagnetic member 73A side while the S-poles of
the permanent magnets 72A and 72B lie on the ferromagnetic member
73B side, and the ferromagnetic members 73A and 73B are magnetized
by the magnetic fields from the permanent magnets 72A and 72B so
that the tip portion of the ferromagnetic member 73A becomes an
N-pole while the tip portion of the ferromagnetic member 73B
becomes an S-pole.
[0352] As a result, as indicated by two-dot chain lines in FIGS. 9A
and 9B, in the vicinity of the objective lens 74 placed on the exit
64b of the projection optical system 64B, a magnetic field occurs
in a direction from the tip portion of the ferromagnetic member 73A
being the N-pole to the tip portion of the ferromagnetic member 73B
being the S-pole to make connection between the ferromagnetic
member 73A and the ferromagnetic member 73B. Moreover, this
magnetic field is set to be larger than the corecivity of the
magnetic disk 1 in a state heated, and when the magnetic field
applying means 71 is brought close to the magnetic disk 1, the
magnetic layer 22a on the upper surface side of the magnetic disk 1
is magnetized in a longitudinal direction and in a circumferential
direction.
[0353] In addition, in this embodiment, since the position of the
entrance 64a of the projection optical system 64B varies, unlike
the above-described first embodiment, the illuminating optical
system 63 is made so that the incident position of an energy beam
on the entrance 64a can be changed to the position of the
projection optical system 64B.
[0354] Concretely, as this illuminating optical system 63, for
example, a galvanometer and an f-.theta. lens can be used so that
an arbitrary position on the magnetic disk 1 (or the mask 12) is
illuminated with a spot-like energy beam 11. That is, in a manner
that the angle of the energy beam 11 is varied as occasion calls so
that the energy beam 11 is incident on the f-.theta. lens, the
illumination of an arbitrary position on the magnetic disk 1
becomes feasible.
[0355] The other construction of this magnetic pattern forming
apparatus and the magnetic pattern forming method are similar to
those in the above-described first embodiment.
[0356] Accordingly, with the magnetic pattern forming apparatus and
method according to this embodiment, in a case in which a magnetic
pattern is formed on the magnetic disk 1 by means of a combination
of the local heating and the exposure to an external magnetic
field, it is possible to efficiently form a minute magnetic pattern
with higher accuracy, which leads to providing a magnetic disk and
magnetic recording apparatus, capable of achieving higher-density
recording, in a small amount of time and at a low cost.
[0357] In addition, without employing a large-sized illuminating
optical system 63 (particularly, light source 41) or projection
optical system 64B, it is possible to form a magnetic pattern on
the magnetic disk 1 briefly and efficiently through the use of a
small-sized and low-priced illuminating optical system 63 or
projection optical system 64 [system which can apply a beam to only
a small area on the magnetic disk 1 (that is, system having a small
imaging range)], thus realizing high productivity.
[0358] Still additionally, simply by rotating the projection
optical system 64B, the magnetic disk 1 (mask 12) can be scanned
with the energy beam 11 in its radial direction, so the
construction can be made at a low cost.
[0359] Yet additionally, since the projection optical system 64B is
rotated by the projection optical system spindle motor 70 to move
the entrance 64a and the exit 64b unitarily, there is no need to
execute the synchronous control on the entrance 64a and the exit
64b, there is an advantage of simplifying the control.
[0360] In this embodiment, although the rotation of the projection
optical system 64B is under control of the controller 68, the
present invention is not limited to this, but it is also acceptable
that, for example, the projection optical system 64B is rotated
manually.
Description of Third Embodiment
[0361] Furthermore, referring to FIG. 10, a description will be
given hereinbelow of a magnetic pattern forming apparatus and
method, magnetic disk and magnetic recording apparatus according to
a third embodiment of the present invention.
[0362] A difference of the magnetic pattern forming apparatus
according to this embodiment from the apparatus according to the
above-described first embodiment is a construction for making a
scan with an energy beam in radial directions of a magnetic disk
and a mask.
[0363] That is, in the above-described first embodiment, the
illuminating optical system 63, the projection optical system 64
and the magnetic field applying means 62 are set in fixed
conditions and the disk stage 60 and the mask stage 61 are moved
(operated for scanning) in a direction orthogonal to the energy
beam 11 (the optical axis of a laser beam) given through the
illuminating optical system 63 and the projection optical system
64, whereas in this embodiment, as shown in FIG. 10, the positions
of a magnetic disk 1 and a mask 12 are fixed (however, the magnetic
disk 1 and the mask 12 are rotated) and a projection optical system
64D is made to be moved (operated for scanning).
[0364] Moreover, although the magnetic field applying means 62 is
fixed in the above-described first embodiment, in this embodiment,
a magnetic field applying means 71 is designed to be moved together
with the projection optical system 64D. Still moreover, although
the position of the energy beam illumination made through the
illuminating optical system 63 is fixed in the above-described
first embodiment, in this embodiment, the position of the energy
beam illumination made through the illuminating optical system 63
is varied to the position of the projection optical system 64D.
[0365] Concretely, as FIG. 10 shows, this magnetic pattern forming
apparatus is equipped with a disk/mask spindle motor 80 capable of
rotating the disk 1 and the mask 12.
[0366] This disk/mask spindle motor (disk/mask rotating actuator,
mask/disk rotating actuator, disk rotating means, mask rotating
means) 80 is composed of a motor 80a and a spindle serving as a
rotary shaft of the motor 80a. In this case, as the spindle, there
are provided a mask spindle 80b for rotating the mask 12 and a disk
spindle 80c for rotating the magnetic disk 80c. These mask spindle
80b and disk spindle 80c are located coaxially.
[0367] When the magnetic disk 1 is held by the disk spindle 8Oc and
the mask 12 is held by the mask spindle 80b, the magnetic disk 1
and the mask 12 are disposed in parallel with each other in a state
spaced vertically from each other on the same axis.
[0368] In addition, the magnetic disk 1 held by the disk spindle
80c and the mask 12 held by the mask spindle 80b are rotationally
driven by a single motor 80a.
[0369] Incidentally, in this embodiment, since there is no need to
move the magnetic disk 1 and the mask 12, neither disk stage nor
mask stage exist.
[0370] Still additionally, as FIG. 10 shows, in the projection
optical system 64D, an entrance 64a on which an energy beam 11
transmitted from the illuminating optical system 63 through the
mask 12 is incident and an exit 64b from which the energy beam 11
is emitted toward the magnetic disk 1 are provided in a state
separated from each other.
[0371] Moreover, the entrance 64a is disposed in opposed relation
to the mask 12 while the exit 64b is placed in opposed relation to
the magnetic disk 1.
[0372] Still moreover, the entrance 64a and the exit 64b are made
to be movable independently of each other, and hence, the entrance
64a is equipped with an entrance moving means 81A for moving the
entrance 64a and the exit 64b is provided with an exit moving means
81B for moving the exit 64b.
[0373] The entrance moving means 81A is composed of an entrance
linear motor (entrance driving actuator, entrance driving means)
82A, a rail 83A placed to extend in parallel with the mask 12 and a
supporting member 84A for supporting the entrance 64a so that the
entrance 64a is on the rail 83A. That is, the entrance 64a is
supported through the supporting member 84A to be on the rail 83A,
and when the supporting member 84A for supporting this entrance 64a
is driven by the entrance linear motor 82A, the entrance 64a is
moved in parallel with a surface of the mask 12. Incidentally, the
construction of the entrance moving means 81A is not limited to
this.
[0374] The exit moving means 81B is composed of an exit linear
motor (exit driving actuator, exit driving means) 82B, a rail 83B
placed to extend in parallel with the magnetic disk 1 and a
supporting member 84B for supporting the exit 64b so that the exit
64b is on the rail 83B. That is, the exit 64b is supported through
the supporting member 84B to be on the rail 83B, and when the
supporting member 84B for supporting the exit 64b is driven by the
exit linear motor 82B, the exit 64b is moved in parallel with a
surface of the magnetic disk 1. Incidentally, the construction of
the exit moving means 81B is not limited to this in this case,
since the scanning with the energy beam 11 is made in the radial
directions of the magnetic disk 1 and the mask 12 by shifting the
entrance 64a and the exit 64b constituting the projection optical
system 64D, this system is called a lens scanning system.
[0375] Furthermore, as FIG. 10 shows, this magnetic pattern forming
apparatus is additionally equipped with a controller (control
means) 68 which controls the disk/mask spindle motor 80, the
entrance linear motor 82A and the exit linear motor 82B.
[0376] The control means 68 has an operation control function to
control the disk/mask spindle motor 80 to rotate the magnetic disk
1 and the mask 12 at equal speeds and to output a control signal to
the entrance linear motor 82A and the exit linear motor 82B so that
the energy beam 11 to be applied to the magnetic disk 1 and the
energy beam 11 to be applied to the mask 12 take a synchronous
condition for scanning.
[0377] In this case, the control means 68 outputs a control signal
to the entrance linear motor 82A for controlling the operation
thereof, and at this time, controls the moving quantity, moving
speed and others of the entrance 64a.
[0378] In like manner, the control means 68 outputs a control
signal to the exit linear motor 82B for controlling the operation
thereof" and at this time, controls the moving quantity, moving
speed and others of the exit 64b.
[0379] In addition, the control means 68 outputs the control
signals to the entrance linear motor 82A and the exit linear motor
82B in a synchronized condition so that the entrance 64a and the
exit 64b are moved in a synchronized condition.
[0380] Still additionally, the control means 68 is made to control
the moving speeds of the entrance 64a and the exit 64b on the basis
of a ratio of a speed (moving speed) at which the entrance 64a is
moved and a speed at which the exit 64b is moved, set according to
a reduction ratio to be taken for when the magnetic disk 1 is
illuminated with the spot-like energy beam 11 to project a mask
pattern onto the magnetic disk 1 at a predetermined reduction
ratio.
[0381] For example, in a case in which the reduction ratio for the
reduction projection is set to 1/2, a ratio of the moving speed of
the entrance 64a and the moving speed of the exit 64b is set to be
2 to 1.
[0382] In this way, the entrance 64a and the exit 64b are made to
be movable separately and independently so that the moving speeds
thereof can be changed according to the predetermined reduction
ratio, thus dealing particularly with the reduction projection.
[0383] It is also appropriate that the control means 68 controls
the rotational speeds of the magnetic disk 1 and the mask 12 on the
basis of a ratio of the rotational speed of the magnetic disk 1 and
the rotational speed of the mask 12 set according to the
predetermined reduction ratio, and controls the moving speeds of
the entrance 64a and the exit 64b to equal speeds.
[0384] Furthermore, in this embodiment, the projection optical
system 64D is made to be rotated as mentioned above, and since the
position of the exit 64b of the projection optical system 64D
relative to the magnetic disk 1 varies accordingly, as in the case
of the above-described second embodiment, the magnetic field
applying means 71 is attached to the tip portion of the exit 64b of
the projection optical system 64D to be movable with the exit
64b.
[0385] The concrete construction of the magnetic field applying
means 71 is the same as that of the above-described second
embodiment, and as well as the second embodiment, the magnetic
field applying means 71 is constructed as a bar-like magnetic field
applying means extending throughout the generally overall length of
the magnetic disc 1 in its radial direction Still furthermore,
since the position of the entrance 64a of the projection optical
system 64D varies, as well as the second embodiment, the
illuminating optical system 63 is made such that the position at
which the energy beam 11 is incident on the entrance 64a can be
changed to the position of the projection optical system 64D.
[0386] The other construction of this magnetic pattern forming
apparatus and the magnetic pattern forming method are similar to
those in- the above-described first embodiment.
[0387] Accordingly, with the magnetic pattern forming apparatus and
method according to this embodiment, in a case in which a magnetic
pattern is formed on the magnetic disk 1 by means of a combination
of the local heating and the exposure to an external magnetic
field, it is possible to efficiently form a minute magnetic pattern
with higher accuracy, which leads to providing a magnetic disk and
magnetic recording apparatus, capable of achieving higher-density
recording, in a small amount of time and at a low cost.
[0388] In addition, without employing a large-sized illuminating
optical system 63 (particularly, light source 41) or projection
optical system 64D, it is possible to form a magnetic pattern on
the magnetic disk 1 briefly and efficiently through the use of a
small-sized and low-priced illuminating optical system 63 or
projection optical system 64 [system which can apply a beam to only
a small area on the magnetic disk 1 (that is, system having a small
imaging range)], thus realizing high productivity.
[0389] Still additionally, in this embodiment, the magnetic disk 1
and the mask 12a redriven by a single motor 80; therefore, this
offers an advantage of making the entire apparatus compact.
[0390] In this connection, in the description of each of the
above-described embodiments, the magnetic disk 1 is designed as a
longitudinal magnetic recording medium on which the magnetization
is made in a longitudinal direction and for efficient exposure to
an external magnetic field while lowering the cost of the magnetic
field applying means 62, the magnetic field applying means 62 is
designed to apply the external magnetic field to a partial area
(area corresponding to the energy beam applied position) of the
magnetic disk 1. On the other hand, as a matter of course, in a
case in which the magnetic disk 1 is constructed as a perpendicular
magnetic recording medium on which the magnetization is made in a
perpendicular direction, for the application of the present
invention, the magnetic field applying means 62 is made to
magnetize it in the perpendicular direction.
[0391] In this case, the magnetic field applying means 62 is
designed to be capable of exposing the entire surface of the
magnetic disk 1 to an external magnetic field. For example, a
cylindrical permanent magnet or solenoid having a diameter larger
than the diameter of the magnetic disk 1 is put to use
therefor.
[0392] Moreover, in the description of each of the above-described
embodiments, although the magnetic pattern forming apparatus
(method) is made to perform the reduction projection at a
predetermined reduction ratio, the present invention is not limited
to this, but it is also appropriate that the projection is made at
a one-to-one ratio or a magnification ratio.
[0393] Still moreover, in each of the above-described embodiments,
although, in a state where the magnetic disk 1 and the mask 12 are
rotated, the disk state 60 and the mask stage 61are moved (first
embodiment), the projection optical system 64B is rotated (second
embodiment) or the projection optical system 64D is moved (third
embodiment) for making the scanning with an energy beam spirally or
concentrically, the present invention is not limited to these
methods. For example, it is also appropriate that the illuminating
optical system is designed to be capable of varying the
illumination position (illumination angle) and the energy beam
illumination position is shifted for the scanning in the radial
directions of the magnetic disk 1 and the mask 12 by means of the
illuminating optical system for the spiral or concentric
illumination with the energy beam 11.
[0394] Concretely, as this illuminating optical system, for
example, a galvanometer and an f-.theta. lens are used which are
capable of applying a spot-like energy beam 11 to an arbitrary
position on the magnetic disk. 1 (or the mask 12). With this
construction, the energy beam illumination angle (illuminating
direction) is changed on occasion by means of the galvanometer so
that the energy beam 11 is incident on the f-.theta. lens so that
the scanning with the energy beam 11 is spirally made with respect
to the magnetic disk 1. Alternatively, the energy beam illumination
angle (illuminating direction) is stepwise changed more-than-one
times by the galvanometer so that the energy beam 11 is incident on
the f-.theta. lens, thereby accomplishing the concentric scanning
with the energy beam 11 with respect to the magnetic disk 1.
[0395] While the invention has been described in detail and with
reference to specific embodiments thereof, it will be apparent to
one skilled in the art that various changes and modifications can
be made therein without departing from the spirit and scope
thereof.
[0396] This application is based on Japanese patent application No.
2001-015824 filed on Jan. 24, 2001, the entire contents thereof
being hereby incorporated by reference.
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